JP6354892B2 - Position detection device and video equipment - Google Patents
Position detection device and video equipment Download PDFInfo
- Publication number
- JP6354892B2 JP6354892B2 JP2017098746A JP2017098746A JP6354892B2 JP 6354892 B2 JP6354892 B2 JP 6354892B2 JP 2017098746 A JP2017098746 A JP 2017098746A JP 2017098746 A JP2017098746 A JP 2017098746A JP 6354892 B2 JP6354892 B2 JP 6354892B2
- Authority
- JP
- Japan
- Prior art keywords
- elastic deformation
- deformation
- output
- detection
- differential amplifier
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000001514 detection method Methods 0.000 title claims description 117
- 230000005489 elastic deformation Effects 0.000 claims description 149
- 230000035945 sensitivity Effects 0.000 claims description 13
- 230000003287 optical effect Effects 0.000 claims description 6
- 238000010586 diagram Methods 0.000 description 8
- 238000005452 bending Methods 0.000 description 6
- 239000003990 capacitor Substances 0.000 description 5
- 230000003321 amplification Effects 0.000 description 4
- 238000003199 nucleic acid amplification method Methods 0.000 description 4
- 102100023431 E3 ubiquitin-protein ligase TRIM21 Human genes 0.000 description 2
- 101000685877 Homo sapiens E3 ubiquitin-protein ligase TRIM21 Proteins 0.000 description 2
- 101000685886 Homo sapiens RNA-binding protein RO60 Proteins 0.000 description 2
- 101000824892 Homo sapiens SOSS complex subunit B1 Proteins 0.000 description 2
- 101000824890 Homo sapiens SOSS complex subunit B2 Proteins 0.000 description 2
- 102100023433 RNA-binding protein RO60 Human genes 0.000 description 2
- 102100022320 SPRY domain-containing SOCS box protein 1 Human genes 0.000 description 2
- 102100022330 SPRY domain-containing SOCS box protein 2 Human genes 0.000 description 2
- 230000009466 transformation Effects 0.000 description 2
- 238000007792 addition Methods 0.000 description 1
- 230000008602 contraction Effects 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000009751 slip forming Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Mechanical Light Control Or Optical Switches (AREA)
- Micromachines (AREA)
- Mechanical Optical Scanning Systems (AREA)
Description
この発明は、例えば圧電素子などによって傾動される可動部の傾動位置を検出する位置検出装置と、この位置検出装置を備えた映像機器とに関する。 The present invention relates to a position detection device that detects a tilt position of a movable portion that is tilted by, for example, a piezoelectric element, and a video apparatus including the position detection device .
従来から、光源から射出されたレーザ光を二次元方向に走査する光スキャナーが知られている（特許文献１参照）。 2. Description of the Related Art Conventionally, an optical scanner that scans laser light emitted from a light source in a two-dimensional direction is known (see Patent Document 1).
かかる光スキャナーは、固定枠内に配置された可動枠とミラー部とを備え、可動枠は弾性変形可能な４つの曲がり梁によって固定枠に保持され、ミラー部は２つのトーションバーによって可動枠内に保持されている。可動枠は曲がり梁の弾性変形によって第１軸回りに回動し、ミラー部はトーションバーのねじれによって、２つのトーションバーと同軸上の第２軸回りに回動するようになっている。第１軸と第２軸とは直交している。
各曲がり梁の表面には、圧電素子が取り付けられており、この圧電素子の伸縮により曲がり梁が弾性変形して可動枠及びミラー部が第１軸回りに回動し、曲がり梁の曲がりに応じて可動枠に第２軸回りの回転トルクが与えられ、トーションバーを介してミラー部が第２軸回りに回動するようになっている。このミラー部の第１軸及び第２軸回りの回動により、レーザ光を二次元方向に走査するようになっている。
また、可動枠やミラー部の動きは、発光素子の光を検出対象部に照射して、その反射光を受光素子で受光し、その反射光量の変化から検出する。
Such an optical scanner includes a movable frame and a mirror unit arranged in a fixed frame, the movable frame is held on the fixed frame by four bending beams that can be elastically deformed, and the mirror unit is held in the movable frame by two torsion bars. Is held in. The movable frame is rotated around the first axis by elastic deformation of the bending beam, and the mirror portion is rotated around the second axis coaxial with the two torsion bars by the torsion of the torsion bar. The first axis and the second axis are orthogonal.
A piezoelectric element is attached to the surface of each bending beam, and the bending beam is elastically deformed by the expansion and contraction of the piezoelectric element, so that the movable frame and the mirror portion rotate around the first axis, and according to the bending of the bending beam. Thus, rotational torque about the second axis is applied to the movable frame, and the mirror portion rotates about the second axis via the torsion bar. The laser beam is scanned in a two-dimensional direction by the rotation of the mirror portion around the first axis and the second axis.
Further, the movement of the movable frame and the mirror part is detected from the change in the amount of reflected light by irradiating the detection target part with the light of the light emitting element and receiving the reflected light with the light receiving element.
このような光スキャナーでは、ミラー部の動きを検出するために、光スキャナーとは別に、発光素子と受光素子とが必要であるという問題がある。 In such an optical scanner, there is a problem that a light emitting element and a light receiving element are required separately from the optical scanner in order to detect the movement of the mirror unit.
この発明の目的は、発光素子と受光素子とを使用せずに、しかもノイズの影響を受けずに傾動部の傾動位置を検出することのできる位置検出装置と、この位置検出装置を備えた映像機器とを提供することにある。 An object of the present invention is to provide a position detection device that can detect the tilting position of the tilting portion without using a light emitting element and a light receiving element and without being affected by noise, and an image provided with the position detecting device. To provide equipment .
請求項１の発明は、可動部と、
前記可動部を支持する弾性変形部と、
前記弾性変形部に設けられ、前記弾性変形部の変形量に応じた出力信号を生じる第１変形検出手段と、
前記弾性変形部に設けられ、前記弾性変形部の変形量に応じた出力信号を生じる第２変形検出手段と、
前記第１，第２変形検出手段の出力信号の差である差信号を増幅して出力する差動増幅回路器と、
前記差信号から前記可動部の傾動位置を検出する検出部と、を備え、
前記弾性変形部は第１，第２弾性変形部が連続した折り返し構造を有し、
前記折り返し構造が２つ設けられ、
一方の折り返し構造の第１弾性変形部に設けられた第２弾性変形検出手段の出力端子と、
他方の折り返し構造の第１弾性変形部に設けられた第２弾性変形検出手段の出力端子とを接続し、
一方の折り返し構造の第２弾性変形部に設けられた第１弾性変形検出手段の出力端子と、
他方の折り返し構造の第２弾性変形部に設けられた第１弾性変形検出手段の出力端子とを接続して前記差動増幅器に入力させることを特徴とする。
請求項２の発明は、可動部と、
前記可動部を支持する弾性変形部と、
前記弾性変形部に設けられ、前記弾性変形部の変形量に応じた出力信号を生じる第１変形検出手段と、
前記弾性変形部に設けられ、前記弾性変形部の変形量に応じた出力信号を生じる第２変形検出手段と、
前記第１，第２変形検出手段の出力信号の差である差信号を増幅して出力する差動増幅回路器と、
前記差信号から前記可動部の傾動位置を検出する検出部と、を備え、
前記弾性変形部は第１，第２弾性変形部が連続した折り返し構造を有し、
前記折り返し構造が２つ設けられ、
一方の折り返し構造の第１，第２弾性変形部に設けられた第２，第１弾性変形検出手段と、
他方の折り返し構造の第１，第２弾性変形部に設けられた第２，第１弾性変形検出手段とのうち、予め求めておいた感度の高い一方の第１弾性変形検出手段または他方の第１弾性変形検出手段と、予め求めておいた感度の高い一方の第２弾性変形検出手段または他方の第２弾性変形検出手段とからの検出信号値の差を前記差動増幅器から求めることを特徴とする。
請求項３の発明は、可動部と、
前記可動部を支持する弾性変形部と、
前記弾性変形部に設けられ、前記弾性変形部の変形量に応じた出力信号を生じる第１変形検出手段と、
前記弾性変形部に設けられ、前記弾性変形部の変形量に応じた出力信号を生じる第２変形検出手段と、
前記第１，第２変形検出手段の出力信号の差である差信号を増幅して出力する差動増幅回路器と、
前記差信号から前記可動部の傾動位置を検出する検出部と、を備え、
前記弾性変形部は第１，第２弾性変形部が連続した折り返し構造を有し、
前記折り返し構造が２つ設けられ、
一方の折り返し構造の第２弾性変形部に設けられた第１弾性変形検出手段と、他方の折り返し構造の第２弾性変形部に設けられた第１弾性変形検出手段とのどちらか一方と、
一方の折り返し構造の第１弾性変形部に設けられた第２弾性変形検出手段と、他方の折り返し構造の第１弾性変形部に設けられた第２弾性変形検出手段とのどちらか一方とを選択する切換スイッチを設け、
それぞれの第１，第２弾性変形検出手段の感度を測定して、感度のよい第１，第２弾性変形検出手段を前記切換スイッチの切り換えによって選択し、この選択された第１，第２弾性変形検出手段の検出信号を前記差動増幅器に入力するようにしたことを特徴とする。
The invention of claim 1 includes a movable part;
An elastically deformable portion that supports the movable portion;
First deformation detection means provided in the elastic deformation portion, and generating an output signal corresponding to the deformation amount of the elastic deformation portion;
A second deformation detection means provided in the elastic deformation section, which generates an output signal corresponding to the deformation amount of the elastic deformation section;
A differential amplifier circuit that amplifies and outputs a difference signal that is a difference between output signals of the first and second deformation detecting means;
A detection unit that detects a tilt position of the movable unit from the difference signal,
The elastically deformable portion have a folded structure in which the first, second deforming portion is continuous,
Two folding structures are provided,
An output terminal of a second elastic deformation detection means provided in the first elastic deformation portion of one folded structure;
Connecting the output terminal of the second elastic deformation detection means provided in the first elastic deformation portion of the other folded structure;
An output terminal of the first elastic deformation detection means provided in the second elastic deformation portion of one folded structure;
By connecting the output terminal of the first elastic deformation detecting means provided in the second elastic deformation portion of the other of the folded structure, characterized in Rukoto is input to the differential amplifier.
The invention of claim 2 comprises a movable part;
An elastically deformable portion that supports the movable portion;
First deformation detection means provided in the elastic deformation portion, and generating an output signal corresponding to the deformation amount of the elastic deformation portion;
A second deformation detection means provided in the elastic deformation section, which generates an output signal corresponding to the deformation amount of the elastic deformation section;
A differential amplifier circuit that amplifies and outputs a difference signal that is a difference between output signals of the first and second deformation detecting means;
A detection unit that detects a tilt position of the movable unit from the difference signal,
The elastically deformable portion have a folded structure in which the first, second deforming portion is continuous,
Two folding structures are provided,
Second and first elastic deformation detection means provided in the first and second elastic deformation portions of one folded structure;
Of the second and first elastic deformation detecting means provided in the first and second elastic deformation portions of the other folded structure, one of the first elastic deformation detecting means having high sensitivity obtained in advance or the other of the second elastic deformation detecting means. a first elastic deformation detecting means, the Rukoto the difference between the detection signal value from a previously sensitive that has been determined one of the second elastic deformation detecting means or the other of the second elastic deformation detection means determined from the differential amplifier Features.
The invention of claim 3 includes a movable part,
An elastically deformable portion that supports the movable portion;
First deformation detection means provided in the elastic deformation portion, and generating an output signal corresponding to the deformation amount of the elastic deformation portion;
A second deformation detection means provided in the elastic deformation section, which generates an output signal corresponding to the deformation amount of the elastic deformation section;
A differential amplifier circuit that amplifies and outputs a difference signal that is a difference between output signals of the first and second deformation detecting means;
A detection unit that detects a tilt position of the movable unit from the difference signal,
The elastic deformation part has a folded structure in which the first and second elastic deformation parts are continuous,
Two folding structures are provided,
Either one of the first elastic deformation detection means provided in the second elastic deformation part of one folding structure and the first elastic deformation detection means provided in the second elastic deformation part of the other folding structure;
Select one of the second elastic deformation detection means provided in the first elastic deformation portion of one folding structure and the second elastic deformation detection means provided in the first elastic deformation portion of the other folding structure Provide a changeover switch to
The sensitivity of each of the first and second elastic deformation detecting means is measured, and the first and second elastic deformation detecting means having good sensitivity are selected by switching the changeover switch, and the selected first and second elastic deformation detecting means are selected. The detection signal of the deformation detection means is input to the differential amplifier.
この発明によれば、発光素子や受光素子を使用せずに、しかもノイズの影響を受けずに傾動部の傾動位置を検出することができる。 According to the present invention, it is possible to detect the tilt position of the tilt portion without using a light emitting element or a light receiving element and without being affected by noise.
以下、この発明に係る位置検出装置の実施の形態である実施例を図面に基づいて説明する。 Hereinafter, an embodiment which is an embodiment of a position detection device according to the present invention will be described based on the drawings.
［第１実施例］
図１にレーザ光を２次元方向に走査する位置検出装置１を示す。
この位置検出装置１は、メムスユニット１００と、このメムスユニット１００の後述する可動部１７（図２参照）を傾動させる駆動部２００と、可動部１７の傾動位置を求める傾動アクチュエータ駆動システム５００を有する検出部３００とを備えている。
[First embodiment]
FIG. 1 shows a position detection apparatus 1 that scans a laser beam in a two-dimensional direction.
The position detection device 1 includes a MEMS unit 100, a driving unit 200 that tilts a movable unit 17 (see FIG. 2), which will be described later, of the MEMS unit 100, and a tilt actuator driving system 500 that determines a tilt position of the movable unit 17. And a detection unit 300.
駆動部２００には、後述する鋸波電圧Ｖａ,Ｖｂ（図５参照）を出力する出力回路２０１と、後述する共振電圧Ｖｄ（図１０参照）を出力する出力回路２０２とが設けられている。 The drive unit 200 is provided with an output circuit 201 that outputs sawtooth voltages Va and Vb (see FIG. 5) described later, and an output circuit 202 that outputs a resonance voltage Vd (see FIG. 10) described later.
検出部３００には、増幅回路３１０と差動増幅回路（差動増幅器）３３０とが設けられている。 The detection unit 300 includes an amplifier circuit 310 and a differential amplifier circuit (differential amplifier) 330.
メムスユニット１００は、図３に示すように、フレーム板１０と、このフレーム板１０の所定箇所に取り付けられた駆動用圧電素子２０〜２５と、検出用圧電素子３０〜３５とを有している。
［フレーム板］
フレーム板１０は、図２に示すように、複数の切込Ｋ１〜Ｋ６によって形成された外周囲側に位置する固定フレーム１１と、この固定フレーム１１内に位置する弾性変形部１２〜１６と、可動部１７を有している。
As shown in FIG. 3, the MEMS unit 100 includes a frame plate 10, driving piezoelectric elements 20 to 25 attached to predetermined positions of the frame plate 10, and detection piezoelectric elements 30 to 35. .
[Frame board]
As shown in FIG. 2, the frame plate 10 includes a fixed frame 11 that is formed on the outer peripheral side formed by the plurality of cuts K <b> 1 to K <b>6; A movable part 17 is provided.
弾性変形部（第１弾性変形部）１２は、一端が固定フレーム１１に固定され、その他端が弾性変形部（第２弾性変形部）１３の後部に固定されている。弾性変形部１２と弾性変形部１３とは切込Ｋ１,Ｋ２によって１回の折返し構造となっている。 The elastic deformation part (first elastic deformation part) 12 has one end fixed to the fixed frame 11 and the other end fixed to the rear part of the elastic deformation part (second elastic deformation part) 13. The elastic deformation portion 12 and the elastic deformation portion 13 have a single turn-back structure by the cuts K1 and K2.
同様に、弾性変形部（第１弾性変形部）１４は、他端が固定フレーム１１に固定され、その一端が弾性変形部（第２弾性変形部）１５の後部に固定されている。弾性変形部１４と弾性変形部１５とは切込Ｋ３,Ｋ４によって１回の折返し構造となっている。 Similarly, the other end of the elastic deformation portion (first elastic deformation portion) 14 is fixed to the fixed frame 11, and one end thereof is fixed to the rear portion of the elastic deformation portion (second elastic deformation portion) 15. The elastic deformation portion 14 and the elastic deformation portion 15 have a single turn-back structure by the cuts K3 and K4.
弾性変形部１３の先端部には下方（図２において）に延びたアーム部１８Ｌが連続形成され、このアーム部１８Ｌの先端部が弾性変形部（第３弾性変形部）１６の一端側の下部（図２において）に固定されている。一方、弾性変形部１５の先端部が弾性変形部１６の他端側の下部に固定されている。また、弾性変形部１５の先端部には逆Ｌ字形のアーム部１８Ｒが形成され、このアーム部１８Ｒの先端部が弾性変形部１３の先端部に固定されている。 An arm portion 18L extending downward (in FIG. 2) is continuously formed at the distal end portion of the elastic deformation portion 13, and the distal end portion of the arm portion 18L is a lower portion on one end side of the elastic deformation portion (third elastic deformation portion) 16. (In FIG. 2). On the other hand, the distal end portion of the elastic deformation portion 15 is fixed to the lower portion on the other end side of the elastic deformation portion 16. Further, an inverted L-shaped arm portion 18R is formed at the distal end portion of the elastic deformation portion 15, and the distal end portion of the arm portion 18R is fixed to the distal end portion of the elastic deformation portion 13.
弾性変形部１６の上部の両端部には、切込Ｋ５,Ｋ６によって左右方向に延びた細い支持部１９Ａ,１９Ｂが形成され、この支持部１９Ａ,１９Ｂが可動部１７を支持している。可動部１７の表面はミラー１７Ｍとなっている。 Thin support portions 19A and 19B extending in the left-right direction by notches K5 and K6 are formed at both ends of the upper portion of the elastic deformation portion 16, and the support portions 19A and 19B support the movable portion 17. The surface of the movable portion 17 is a mirror 17M.
可動部１７は、弾性変形部１２〜１５の弾性変形によりＹ方向（図２において左右方向）に傾動し、可動部１７は弾性変形部１６の弾性変形によりＸ方向（図２において上下方向）に傾動するようになっている。すなわち、可動部１７は２軸回りに傾動するようになっている。
そして、弾性変形部１２〜１５の表面には、図３に示すように弾性変形部１２〜１５を弾性変形させる駆動用圧電素子（駆動手段）２０〜２３が取り付けられている。弾性変形部１６の左右の両端側の表面には駆動用圧電素子（第３駆動手段）２４,２５が取り付けられている。
また、弾性変形部１２〜１５の表面には、弾性変形部１２〜１５の弾性変形量を検出する検出用圧電素子（変形検出手段）３０〜３３が駆動用圧電素子２０〜２３に隣接して取り付けられている。弾性変形部１６の左右方向（図３において）の両端部の表面には、弾性変形部１６の弾性変形を検出する検出用圧電素子（変形検出手段）３４,３５が駆動用圧電素子２４，２５に隣接して、すなわち近傍に取り付けられている。
図４に示すように、駆動用圧電素子（第１駆動手段）２０の表面電極（図示せず）と駆動用圧電素子（第２駆動手段）２３の表面電極（図示せず）とが共通の入力端子ＳＤＡに接続され、駆動用圧電素子（第２駆動手段）２１の表面電極（図示せず）と駆動用圧電素子（第１駆動手段）２２の表面電極（図示せず）とが共通の入力端子ＳＤＢに接続されている。また、駆動用圧電素子２４の表面電極と駆動用圧電素子２５の表面電極とが共通の入力端子ＭＤに接続されている。各駆動用圧電素子２０〜２５の裏面電極（図示せず）はアースライン（図示せず）に接続されている。
入力端子ＳＤＡは、図１に示すように、駆動部２００の出力回路２０１の出力端子２０１Ａに接続され、入力端子ＳＤＢは出力回路２０１の出力端子２０１Ｂに接続されている。また、入力端子ＭＤは出力回路２０２の出力端子２０２Ａに接続されている。
The movable portion 17 tilts in the Y direction (left and right direction in FIG. 2) due to the elastic deformation of the elastic deformation portions 12 to 15, and the movable portion 17 moves in the X direction (up and down direction in FIG. 2) due to the elastic deformation of the elastic deformation portion 16. It comes to tilt. That is, the movable part 17 tilts around two axes.
And the driving piezoelectric elements (drive means) 20-23 which elastically deform the elastic deformation parts 12-15 are attached to the surface of the elastic deformation parts 12-15 as shown in FIG. Driving piezoelectric elements (third driving means) 24 and 25 are attached to the left and right end surfaces of the elastic deformation portion 16.
Further, detection piezoelectric elements (deformation detecting means) 30 to 33 for detecting the amount of elastic deformation of the elastic deformation portions 12 to 15 are adjacent to the driving piezoelectric elements 20 to 23 on the surfaces of the elastic deformation portions 12 to 15. It is attached. Detection piezoelectric elements (deformation detecting means) 34 and 35 for detecting elastic deformation of the elastic deformation portion 16 are provided on the surfaces of both end portions in the left-right direction (in FIG. 3) of the elastic deformation portion 16. It is attached adjacent to, that is, in the vicinity.
As shown in FIG. 4, the surface electrode (not shown) of the driving piezoelectric element (first driving means) 20 and the surface electrode (not shown) of the driving piezoelectric element (second driving means) 23 are common. A surface electrode (not shown) of the driving piezoelectric element (second driving means) 21 and a surface electrode (not shown) of the driving piezoelectric element (first driving means) 22 are connected to the input terminal SDA. It is connected to the input terminal SDB. Further, the surface electrode of the driving piezoelectric element 24 and the surface electrode of the driving piezoelectric element 25 are connected to a common input terminal MD. The back electrodes (not shown) of the driving piezoelectric elements 20 to 25 are connected to an earth line (not shown).
As shown in FIG. 1, the input terminal SDA is connected to the output terminal 201 </ b> A of the output circuit 201 of the drive unit 200, and the input terminal SDB is connected to the output terminal 201 </ b> B of the output circuit 201. The input terminal MD is connected to the output terminal 202A of the output circuit 202.
各検出用圧電素子３０〜３３の表面電極には、図４に示すように出力端子ＳＳＡ１,ＳＳＡ２,ＳＳＢ１,ＳＳＢ２がそれぞれ接続され、各検出用圧電素子３０〜３３が検出する弾性変形量に応じた検出信号（検出電流）が出力端子ＳＳＡ１,ＳＳＡ２,ＳＳＢ１,ＳＳＢ２から出力されることになる。また、検出用圧電素子３４，３５の表面電極には、共通
の出力端子ＭＳが接続され、検出用圧電素子３４,３５が検出する弾性変形量に応じた検出信号（検出電流）が出力端子ＭＳから出力されることになる。
As shown in FIG. 4, output terminals SSA1, SSA2, SSB1, and SSB2 are connected to the surface electrodes of the detection piezoelectric elements 30 to 33, respectively, and according to the amount of elastic deformation detected by the detection piezoelectric elements 30 to 33. The detected signal (detected current) is output from the output terminals SSA1, SSA2, SSB1, and SSB2. A common output terminal MS is connected to the surface electrodes of the detection piezoelectric elements 34 and 35, and a detection signal (detection current) corresponding to the amount of elastic deformation detected by the detection piezoelectric elements 34 and 35 is output to the output terminal MS. Will be output.
駆動部２００の出力回路２０１の出力端子２０１Ａ,２０１Ｂからは、図５に示す鋸波電圧Ｖａ,Ｖｂが出力されて入力端子ＳＤＡ,ＳＤＢを介して駆動用圧電素子２０,２３、２１,２２に印加する。鋸波電圧Ｖａと鋸波電圧Ｖｂとは位相が１８０度反転した電圧である。
この鋸波電圧Ｖａ,Ｖｂにより、駆動用圧電素子２０,２３,２１,２２が伸縮して可動部１７のミラー１７ＭがＹ方向に対して傾動する。すなわち、Ｘ方向と平行なミラー１７Ｍの中心を通るＡ軸回りに回動する（図４参照）。
図５は、ミラー１７Ｍの傾きと、駆動用圧電素子２０,２３,２１,２２に印加する鋸波電圧Ｖａ,Ｖｂとの関係を示す。時点ｔ０では、ミラー１７Ｍはミラー１７Ｍを中心にして、すなわち図４のＡ軸（第１軸）回りに右側に最大傾き、時点ｔ１では、鋸波電圧Ｖａは最大電圧の３/４、鋸波電圧Ｖｂは最大電圧の１/４となり、ミラー１７Ｍは最大傾斜と水平のおおよそ中間の傾きとなる。
時点ｔ２では、鋸波電圧Ｖａは最大電圧の１/２、鋸波電圧Ｖｂは最大電圧の１/２となり、ミラー１７Ｍはおおよそ水平となる。時点ｔ３では、鋸波電圧Ｖａは最大電圧の１/４、鋸波電圧Ｖｂは最大電圧の３/４となり、ミラー１７Ｍは時点ｔ１の傾きと逆の傾きとなる。時点ｔ４では、鋸波電圧Ｖａはゼロ、鋸波電圧Ｖｂは最大電圧となり、ミラー１７Ｍは時点ｔ０の傾きと逆の傾きとなる。時点ｔ５では、鋸波電圧Ｖａは最大電圧、鋸波電圧Ｖｂはゼロとなり、ミラー１７Ｍは時点ｔ０と同じ傾きとなる。以下、同様な動作が繰り返されることになる。
図６は、時点ｔ０,ｔ５のフレーム板１０の弾性変形部１２〜１６の弾性変形（傾動状態）と、ミラー１７Ｍの傾動状態を示したものである。時点ｔ０,ｔ５では、弾性変形部１２,１５が最大に変形（駆動用圧電素子２０,２３が最大に収縮）した状態を示す。
図７は、時点ｔ４のフレーム板１０の弾性変形部１２〜１６の弾性変形（傾動状態）と、ミラー１７Ｍの傾動状態を示したものである。時点ｔ４では、弾性変形部１３,１４が最大に変形（駆動用圧電素子２１,２２が最大に収縮）した状態を示す。
図８及び図９は、時点ｔ０,ｔ５と時点ｔ４とのとき、ミラー１７Ｍに光が入射した場合、その反射光の反射方向をそれぞれ示したものであり、ミラー１７Ｍの傾きに応じて反射光はＹ方向（水平方向：図３において左右方向）に走査されることが分かる。
図１０は、駆動用圧電素子２４,２５に印加する共振電圧Ｖｄと、ミラー１７ＭのＸ方向に対する傾動状態との関係を示したものである。時点ｔ１では、共振電圧Ｖｄはゼロであり、ミラー１７Ｍの変位（傾動）はゼロである。時点ｔ２では、駆動用圧電素子２４,２５が最大の中間ぐらいに収縮し、ミラー１７Ｍはやや左へ傾動する。時点ｔ３では、駆動用圧電素子２４,２５が最大に収縮し、ミラー１７Ｍは左側へ最大に傾動する。このようにして、ミラー１７ＭはＸ方向に傾動していく。すなわち、ミラー１７Ｍは、Ｙ方向と平行な第２軸回りに傾動する。
ミラー１７ＭのＸ方向の傾動は、少ない投入エネルギーでできる限り大きな振幅を得るために共振で動作させる。共振電圧Ｖｄは、共振周波数の電圧を示す。
［増幅回路］
増幅回路３１０は、検出用圧電素子３４,３５から出力される検出信号を増幅する増幅回路である。
この増幅回路３１０は、図１１に示すように、検出用圧電素子３４,３５から出力される検出信号の電流を電圧に変換する電圧変換器（第３電圧変換器）３１１と、ローパスフィルタＦ１及びハイパスフィルタＦ２と、増幅器３１２とを有している。
電圧変換器３１１の反転入力端子と出力端子との間にローパスフィルタＦ１が接続され、非反転入力端子が接地されている。
電圧変換器３１１の出力端子はハイパスフィルタＦ２及び抵抗Ｒ１を介して増幅器３１２の反転入力端子に接続されている。また、この増幅器３１２の反転入力端子は抵抗Ｒ２を介して増幅器３１２の出力端子に接続されている。増幅器３１２の非反転入力端子は接地されている。
ローパスフィルタＦ１は、図１３に示すように、抵抗Ｒ３とコンデンサＣ１の並列回路から構成されている。ハイパスフィルタＦ２は、コンデンサＣ２のみからなるフィルタである。
［差動増幅回路］
差動増幅回路３３０は、図１２に示すように、電圧変換器３３１，３３２と、差動アンプ３４０などとを有している。
The sawtooth voltages Va and Vb shown in FIG. 5 are output from the output terminals 201A and 201B of the output circuit 201 of the driving unit 200, and are supplied to the driving piezoelectric elements 20, 23, 21 and 22 via the input terminals SDA and SDB. Apply. The sawtooth voltage Va and the sawtooth voltage Vb are voltages whose phases are inverted by 180 degrees.
Due to the sawtooth voltages Va and Vb, the driving piezoelectric elements 20, 23, 21, and 22 expand and contract, and the mirror 17M of the movable portion 17 tilts with respect to the Y direction. That is, it rotates around the A axis passing through the center of the mirror 17M parallel to the X direction (see FIG. 4).
FIG. 5 shows the relationship between the tilt of the mirror 17M and the sawtooth voltages Va and Vb applied to the driving piezoelectric elements 20, 23, 21 and 22. At time t0, the mirror 17M is tilted to the right about the A axis (first axis) in FIG. 4 at the center of the mirror 17M, and at time t1, the sawtooth voltage Va is 3/4 of the maximum voltage. The voltage Vb is ¼ of the maximum voltage, and the mirror 17M has an intermediate inclination between the maximum inclination and the horizontal.
At time t2, the sawtooth voltage Va is 1/2 of the maximum voltage, the sawtooth voltage Vb is 1/2 of the maximum voltage, and the mirror 17M is approximately horizontal. At time t3, the sawtooth voltage Va is 1/4 of the maximum voltage, the sawtooth voltage Vb is 3/4 of the maximum voltage, and the mirror 17M has a slope opposite to the slope of the time t1. At the time t4, the sawtooth voltage Va is zero, the sawtooth voltage Vb is the maximum voltage, and the mirror 17M has a slope opposite to the slope at the time t0. At time t5, the sawtooth voltage Va is the maximum voltage, the sawtooth voltage Vb is zero, and the mirror 17M has the same slope as that at time t0. Thereafter, the same operation is repeated.
FIG. 6 shows the elastic deformation (tilting state) of the elastic deformation portions 12 to 16 of the frame plate 10 at the time points t0 and t5 and the tilting state of the mirror 17M. At time points t0 and t5, the elastic deformation portions 12 and 15 are deformed to the maximum (the driving piezoelectric elements 20 and 23 are contracted to the maximum).
FIG. 7 shows the elastic deformation (tilting state) of the elastic deformation portions 12 to 16 of the frame plate 10 at the time point t4 and the tilting state of the mirror 17M. At time t4, the elastic deformation portions 13 and 14 are deformed to the maximum (the driving piezoelectric elements 21 and 22 are contracted to the maximum).
8 and 9 show the reflection directions of the reflected light when light is incident on the mirror 17M at time t0, t5 and time t4, respectively. The reflected light depends on the inclination of the mirror 17M. Can be seen to be scanned in the Y direction (horizontal direction: left and right in FIG. 3).
FIG. 10 shows the relationship between the resonance voltage Vd applied to the driving piezoelectric elements 24 and 25 and the tilt state of the mirror 17M in the X direction. At time t1, the resonance voltage Vd is zero, and the displacement (tilt) of the mirror 17M is zero. At time t2, the driving piezoelectric elements 24 and 25 are contracted to the maximum middle, and the mirror 17M is tilted slightly to the left. At time t3, the driving piezoelectric elements 24 and 25 contract to the maximum, and the mirror 17M tilts to the left to the maximum. In this way, the mirror 17M tilts in the X direction. That is, the mirror 17M tilts around the second axis parallel to the Y direction.
The tilt in the X direction of the mirror 17M is operated by resonance in order to obtain as large an amplitude as possible with a small input energy. The resonance voltage Vd indicates a voltage having a resonance frequency.
[Amplification circuit]
The amplification circuit 310 is an amplification circuit that amplifies the detection signals output from the detection piezoelectric elements 34 and 35.
As shown in FIG. 11, the amplifier circuit 310 includes a voltage converter (third voltage converter) 311 that converts a current of a detection signal output from the detection piezoelectric elements 34 and 35 into a voltage, a low-pass filter F1, and A high-pass filter F2 and an amplifier 312 are included.
A low-pass filter F1 is connected between the inverting input terminal and the output terminal of the voltage converter 311 and the non-inverting input terminal is grounded.
The output terminal of the voltage converter 311 is connected to the inverting input terminal of the amplifier 312 via the high pass filter F2 and the resistor R1. The inverting input terminal of the amplifier 312 is connected to the output terminal of the amplifier 312 via the resistor R2. The non-inverting input terminal of the amplifier 312 is grounded.
As shown in FIG. 13, the low-pass filter F1 is composed of a parallel circuit of a resistor R3 and a capacitor C1. The high pass filter F2 is a filter including only the capacitor C2.
[Differential amplifier circuit]
As shown in FIG. 12, the differential amplifier circuit 330 includes voltage converters 331 and 332, a differential amplifier 340, and the like.
電圧変換器（第２電圧変換器）３３１の非反転入力端子は接地され、反転入力端子はローパスフィルタＦ３を介して出力端子に接続されている。 The non-inverting input terminal of the voltage converter (second voltage converter) 331 is grounded, and the inverting input terminal is connected to the output terminal via the low-pass filter F3.
電圧変換器（第１電圧変換器）３３２の非反転入力端子は接地され、反転入力端子はローパスフィルタＦ３を介して出力端子に接続されている。 The non-inverting input terminal of the voltage converter (first voltage converter) 332 is grounded, and the inverting input terminal is connected to the output terminal via the low-pass filter F3.
差動アンプ３４０は、オペアンプ３４１と抵抗Ｒ４〜Ｒ７とを有している。オペアンプ３４１の非反転入力端子は抵抗Ｒ４を介して電圧変換器３３１の出力端子に接続され、また、オペアンプ３４１の非反転入力端子は抵抗Ｒ５を介して接地されている。 The differential amplifier 340 includes an operational amplifier 341 and resistors R4 to R7. The non-inverting input terminal of the operational amplifier 341 is connected to the output terminal of the voltage converter 331 via the resistor R4, and the non-inverting input terminal of the operational amplifier 341 is grounded via the resistor R5.
オペアンプ３４１の反転入力端子は抵抗Ｒ６を介して電圧変換器３３２の出力端子に接続され、また、オペアンプ３４１の反転入力端子は抵抗Ｒ７を介して出力端子に接続されている。 The inverting input terminal of the operational amplifier 341 is connected to the output terminal of the voltage converter 332 via the resistor R6, and the inverting input terminal of the operational amplifier 341 is connected to the output terminal via the resistor R7.
ローパスフィルタＦ３は、図１３に示すように、抵抗Ｒ８とコンデンサＣ３の並列回路から構成されるフィルタである。
［傾動アクチュエータ駆動システム］
傾動アクチュエータ駆動システム５００は、図１４に示すように、圧電素子（第２変形検出手段）３０と、圧電素子（第１変形検出手段）３１と、この圧電素子３０,３１の検出信号（出力信号）の差を求めてこの差（差信号）から可動部の傾動位置を検出する差動増幅回路３３０とを有している。
［動 作］
次に、上記のように構成される位置検出装置１の動作について説明する。
As shown in FIG. 13, the low-pass filter F3 is a filter composed of a parallel circuit of a resistor R8 and a capacitor C3.
[Tilt actuator drive system]
As shown in FIG. 14, the tilt actuator driving system 500 includes a piezoelectric element (second deformation detecting means) 30, a piezoelectric element (first deformation detecting means) 31, and detection signals (output signals) of the piezoelectric elements 30, 31. ) And a differential amplifier circuit 330 for detecting the tilt position of the movable part from the difference (difference signal).
[Operation]
Next, the operation of the position detection apparatus 1 configured as described above will be described.
図１に示す駆動部２００の出力回路２０２から図１０に示す共振周波数の共振電圧Ｖｄが出力され、この共振電圧Ｖｄが駆動用圧電素子２４,２５に印加し、駆動用圧電素子２４,２５が伸縮して、フレーム板１０の弾性変形部１６が弾性変形し、可動部１７のミラー１７Ｍは図１０に示すように傾動していく。すなわち、ミラー１７ＭはＸ方向に傾動していく。 A resonance voltage Vd having the resonance frequency shown in FIG. 10 is output from the output circuit 202 of the driving unit 200 shown in FIG. 1, and this resonance voltage Vd is applied to the driving piezoelectric elements 24 and 25. By extending and contracting, the elastic deformation portion 16 of the frame plate 10 is elastically deformed, and the mirror 17M of the movable portion 17 tilts as shown in FIG. That is, the mirror 17M tilts in the X direction.
このミラー１７ＭのＸ方向の傾動により、ミラー１７Ｍに入射した光は反射してＸ方向に走査されていくことになる。 Due to the tilt of the mirror 17M in the X direction, the light incident on the mirror 17M is reflected and scanned in the X direction.
一方、検出用圧電素子３４,３５から出力される検出信号が図１１に示す増幅回路３１０の電圧変換器３１１に入力され、検出信号の電流が電圧に変換されて電圧変換器３１１から出力電圧として出力される。この出力電圧がハイパスフィルタＦ２を通って増幅器３１２に入力され、増幅器３１２から検出信号に応じた出力電圧が出力され、この出力電圧によってミラー１７ＭのＸ方向に対する傾動位置が検出されることになる。すなわち、弾性変形部１６のＸ方向の弾性変形量が増幅器３１２から出力される出力電圧として検出される。 On the other hand, the detection signals output from the detection piezoelectric elements 34 and 35 are input to the voltage converter 311 of the amplifier circuit 310 shown in FIG. 11, and the current of the detection signal is converted into a voltage and output from the voltage converter 311 as an output voltage. Is output. This output voltage is input to the amplifier 312 through the high-pass filter F2, and an output voltage corresponding to the detection signal is output from the amplifier 312. The tilt position of the mirror 17M in the X direction is detected by this output voltage. That is, the amount of elastic deformation in the X direction of the elastic deformation portion 16 is detected as an output voltage output from the amplifier 312.
ところで、共振電圧Ｖｄの周波数は、数ｋＨｚ〜数１０ｋＨｚであるため、圧電素子３４,３５の電極に発生する電荷量も比較的多く、このため、圧電素子３４,３５から出力される検出信号の電流は大きく、Ｓ／Ｎ比も良好な検出信号が得られることになる。このため、増幅回路３１０からミラー１７ＭのＸ方向に対する傾動位置を示すＸ傾動位置信号を得ることができる。
他方、駆動部２００の出力回路２０１の出力端子２０１Ａ,２０１Ｂから図５に示す鋸波電圧Ｖａ,Ｖｂが出力されて、駆動用圧電素子２０,２３、２１,２２に印加し、駆動用圧電素子２０,２３、２１,２２が伸縮していく。これにより、フレーム板１０の弾性変形部１２〜１５が弾性変形して、可動部１７のミラー１７Ｍが図５に示すように傾動していく。すなわち、ミラー１７ＭはＹ方向に傾動していく。
このミラー１７ＭのＹ方向の傾動により、ミラー１７Ｍに入射した光は反射してＹ方向に走査されていくことになる。
弾性変形部１２,１３の弾性変形量は、圧電素子３０,３１から出力される検出信号が図１４に示す差動増幅回路３３０の電圧変換器３３１,３３２にそれぞれ入力し、検出信号の電流が電圧（出力電圧）Ｖ１,Ｖ２に変換されて電圧変換器３３１,３３２から出力され、この電圧Ｖ１,Ｖ２が差動アンプ３４０に入力する。差動アンプ３４０は、電圧変換器３３１,３３２から出力される電圧Ｖ１,Ｖ２の差に応じた電圧（差信号）を出力する。
ここで、ミラー１７ＭのＹ方向の傾動は、非共振であり、かつ周波数も数１０Ｈｚである。このため、圧電素子３０,３１の電極に発生する電荷量が非常に少ない（発生する電荷量は動作周波数と比例関係にある）。このため、電圧変換器３３１,３３２のゲインを上げれば圧電素子３０,３１の出力信号を大きくすることができるが、圧電素子３０,３１から出力される検出信号のＳ／Ｎ比が非常に悪く、このため、電圧変換器３３１,３３２のみから検出信号を取り出すのは困難であった。
しかし、電圧変換器３３１,３３２から出力される電圧を差動アンプ３４０で差動増幅すると、ノイズが打ち消されて信号成分のみが出力され、しかも、差動アンプ３４０から出力される電圧は、ミラー１７ＭのＹ方向の傾動に応じて変化していることも分かった。これは、弾性変形部１２,１３の変形量が異なるために、圧電素子３０,３１から出力される検出信号に差が生じ、差動アンプ３４０で差動増幅すると、ノイズが打ち消されて信号成分のみが出力されるものと思われる。
すなわち、電圧変換器３３１,３３２から出力される電圧を差動アンプ３４０で差動増幅することにより、ミラー１７ＭのＹ方向の傾動位置に応じた電圧を検出することができることが分かった。つまり、差動増幅回路３３０からミラー１７ＭのＹ方向に対する傾動位置を示すＹ傾動位置信号が出力される。
この第１実施例では、検出部３００の増幅回路３１０にはハイパスフィルタＦ２を設けているので、出力回路２０１から出力される周波数の低い鋸波電圧Ｖａ,Ｖｂ（図５参照）によるクロストークを抑えることができる。また、検出部３００の差動増幅回路３３０にはローパスフィルタＦ３を設けているので、出力回路２０２から出力される周波数の高い共振電圧Ｖｄ（図１０参照）によるクロストークを抑えることができる。このため、さらにＳ／Ｎ比の高いＸ傾動位置信号やＹ傾動位置信号を得ることができる。
図１５は、Ｌ型２次ＣＲパッシブフィルタＦ４を示す。このＬ型２次ＣＲパッシブフィルタＦ４は、抵抗Ｒ８,Ｒ９とコンデンサＣ４,Ｃ５とから構成されている。
このＬ型２次ＣＲパッシブフィルタＦ４を差動増幅回路３３０の出力端子Ｓ−Ｖoutに接続すれば、さらにＳ／Ｎ比の高いＹ傾動位置信号を得ることができる。また、出力端子Ｓ−Ｖoutに接続する替わりにローパスフィルタＦ３の接続点Ａ１,Ａ２と抵抗Ｒ４,Ｒ５との間に接続してもよい。
図１６は、ＶＣＶＳ型アクティブローパスフィルタＦ５を示す。このＶＣＶＳ型アクティブローパスフィルタＦ５は、オペアンプＯＰ１と抵抗Ｒ１０,Ｒ１１,Ｒ１２,Ｒ１３とコンデンサＣ６,Ｃ７とから構成されている。
このＶＣＶＳ型アクティブローパスフィルタＦ５をＬ型２次ＣＲパッシブフィルタＦ４の替わりに使用してもよい。ＶＣＶＳ型アクティブローパスフィルタＦ５を使用することにより、さらに、Ｓ／Ｎ比の高いＹ傾動位置信号を得ることができる。
図１７は、計装アンプ（計装増幅器）６００を示す。この計装アンプ６００は、増幅器６０１,６０２と差動増幅器６０３とから構成されている。この計装アンプ６００を差動アンプ３４０の替わりに使用すれば、高感度でさらにＳ／Ｎ比のよいＹ傾動位置信号を得ることができる。
第１実施例では、圧電素子３０,３１をフレーム板１０の弾性変形部１２,１３に設けて圧電素子３０,３１の検出信号の差をとるようにしているが、フレーム板１０の固定フレーム１１の位置で圧電素子３０,３１に重畳されるノイズと同じノイズが重畳される場合には、圧電素子３０,３１のどちらか一方をフレーム板１０の固定フレーム１１に設けて、圧電素子３０,３１の検出信号の差をとるようにしてもよい。
また、第１実施例では、圧電素子３２,３３の検出信号を利用していないので、圧電素子３２,３３を設けなくてもよい。
第１実施例では、フレーム板１０に弾性変形部１２,１４と弾性変形部１３,１５とは切込Ｋ１,Ｋ２,Ｋ３,Ｋ４によって１回の折返し構造を設けているが、複数回設けてもよく、また、弾性変形量が十分にとれる場合には折返し構造を設けたくてもよい。
［第２実施例］
図１８は第２実施例の位置検出装置７００を示す。この位置検出装置７００は、傾動アクチュエータ駆動システム５１０の差動増幅回路３３０の前段に選択部７０１を設けたものである。この選択部７０１によって、感度の高い圧電素子３０または圧電素子３２と、圧電素子３１または圧電素子３３とを選択し、この選択した圧電素子３１または３２と、圧電素子３１または３３とを差動増幅回路３３０に接続するものである。そして、この接続した圧電素子３１または３２と、圧電素子３１または３３とから出力される検出信号を差動増幅回路３３０へ入力するようにしたものである。
第２実施例の位置検出装置７００によれば、感度の高い圧電素子３０を予め把握できているので、基板を組み立てる段階で接続する側を決定して接続することにより、よりＳ／Ｎ比のよいＹ傾動位置信号を得ることができる。
［第３実施例］
図１９は第３実施例の位置検出装置８００を示す。位置検出装置８００は、傾動アクチュエータ駆動システム５２０の差動増幅回路３３０の前段に切換スイッチ８０１を設けたものである。この切換スイッチ８０１の切り換えによって、感度の高い圧電素子３０または圧電素子３２と、圧電素子３１または圧電素子３３を選択するものである。
By the way, since the frequency of the resonance voltage Vd is several kHz to several tens of kHz, the amount of electric charges generated in the electrodes of the piezoelectric elements 34 and 35 is relatively large. Therefore, the detection signal output from the piezoelectric elements 34 and 35 A detection signal having a large current and a good S / N ratio can be obtained. Therefore, an X tilt position signal indicating the tilt position of the mirror 17M with respect to the X direction can be obtained from the amplifier circuit 310.
On the other hand, the sawtooth voltages Va and Vb shown in FIG. 5 are output from the output terminals 201A and 201B of the output circuit 201 of the drive unit 200, and are applied to the drive piezoelectric elements 20, 23, 21 and 22, and the drive piezoelectric elements. 20,23,21,22 expands and contracts. Thereby, the elastic deformation parts 12-15 of the frame board 10 elastically deform, and the mirror 17M of the movable part 17 tilts as shown in FIG. That is, the mirror 17M tilts in the Y direction.
Due to the tilt of the mirror 17M in the Y direction, the light incident on the mirror 17M is reflected and scanned in the Y direction.
The amount of elastic deformation of the elastic deformation portions 12 and 13 is determined by inputting the detection signals output from the piezoelectric elements 30 and 31 to the voltage converters 331 and 332 of the differential amplifier circuit 330 shown in FIG. Voltages (output voltages) V 1 and V 2 are converted and output from the voltage converters 331 and 332, and the voltages V 1 and V 2 are input to the differential amplifier 340. The differential amplifier 340 outputs a voltage (difference signal) corresponding to the difference between the voltages V1 and V2 output from the voltage converters 331 and 332.
Here, the tilt of the mirror 17M in the Y direction is non-resonant and the frequency is several tens of Hz. For this reason, the amount of charge generated at the electrodes of the piezoelectric elements 30 and 31 is very small (the amount of generated charge is proportional to the operating frequency). Therefore, if the gains of the voltage converters 331 and 332 are increased, the output signals of the piezoelectric elements 30 and 31 can be increased, but the S / N ratio of the detection signals output from the piezoelectric elements 30 and 31 is very poor. For this reason, it is difficult to extract the detection signal from only the voltage converters 331 and 332.
However, when the voltage output from the voltage converters 331 and 332 is differentially amplified by the differential amplifier 340, noise is canceled and only the signal component is output, and the voltage output from the differential amplifier 340 is mirrored. It was also found that it changed according to the 17M tilt in the Y direction. This is because the deformation amounts of the elastic deformation portions 12 and 13 are different, so that a difference occurs in the detection signals output from the piezoelectric elements 30 and 31. When differential amplification is performed by the differential amplifier 340, noise is canceled and signal components are Only seems to be output.
That is, it was found that the voltage corresponding to the tilt position of the mirror 17M in the Y direction can be detected by differentially amplifying the voltage output from the voltage converters 331 and 332 with the differential amplifier 340. That is, a Y tilt position signal indicating the tilt position of the mirror 17M in the Y direction is output from the differential amplifier circuit 330.
In the first embodiment, since the high-pass filter F2 is provided in the amplifier circuit 310 of the detection unit 300, crosstalk due to the sawtooth voltages Va and Vb (see FIG. 5) output from the output circuit 201 are low. Can be suppressed. In addition, since the differential amplifier circuit 330 of the detection unit 300 is provided with the low-pass filter F3, crosstalk due to the resonance voltage Vd (see FIG. 10) having a high frequency output from the output circuit 202 can be suppressed. For this reason, it is possible to obtain an X tilt position signal and a Y tilt position signal with a higher S / N ratio.
FIG. 15 shows an L-type second-order CR passive filter F4. The L-type second-order CR passive filter F4 includes resistors R8 and R9 and capacitors C4 and C5.
If this L-type secondary CR passive filter F4 is connected to the output terminal S-Vout of the differential amplifier circuit 330, a Y tilt position signal with a higher S / N ratio can be obtained. Further, instead of connecting to the output terminal S-Vout, it may be connected between the connection points A1, A2 of the low-pass filter F3 and the resistors R4, R5.
FIG. 16 shows a VCVS type active low-pass filter F5. The VCVS type active low-pass filter F5 includes an operational amplifier OP1, resistors R10, R11, R12, R13, and capacitors C6, C7.
This VCVS type active low pass filter F5 may be used in place of the L type secondary CR passive filter F4. By using the VCVS type active low-pass filter F5, a Y tilt position signal with a higher S / N ratio can be obtained.
FIG. 17 shows an instrumentation amplifier 600 (instrumentation amplifier). The instrumentation amplifier 600 includes amplifiers 601 and 602 and a differential amplifier 603. If this instrumentation amplifier 600 is used instead of the differential amplifier 340, it is possible to obtain a Y tilt position signal with high sensitivity and a better S / N ratio.
In the first embodiment, the piezoelectric elements 30 and 31 are provided on the elastic deformation portions 12 and 13 of the frame plate 10 so as to take a difference between detection signals of the piezoelectric elements 30 and 31, but the fixed frame 11 of the frame plate 10 is fixed. When the same noise as the noise superimposed on the piezoelectric elements 30 and 31 is superimposed at the position, one of the piezoelectric elements 30 and 31 is provided on the fixed frame 11 of the frame plate 10 and the piezoelectric elements 30 and 31 are disposed. The difference between the detection signals may be taken.
In the first embodiment, since the detection signals of the piezoelectric elements 32 and 33 are not used, the piezoelectric elements 32 and 33 need not be provided.
In the first embodiment, the elastic deformation portions 12 and 14 and the elastic deformation portions 13 and 15 are provided in the frame plate 10 with a single folding structure by the cuts K1, K2, K3, and K4. In addition, if the amount of elastic deformation is sufficient, a folded structure may be provided.
[Second Embodiment]
FIG. 18 shows a position detection apparatus 700 according to the second embodiment. This position detection device 700 is provided with a selection unit 701 in the previous stage of the differential amplifier circuit 330 of the tilt actuator drive system 510. The selection unit 701 selects the piezoelectric element 30 or the piezoelectric element 32 having high sensitivity and the piezoelectric element 31 or the piezoelectric element 33, and differentially amplifies the selected piezoelectric element 31 or 32 and the piezoelectric element 31 or 33. The circuit 330 is connected. A detection signal output from the connected piezoelectric element 31 or 32 and the piezoelectric element 31 or 33 is input to the differential amplifier circuit 330.
According to the position detection device 700 of the second embodiment, since the highly sensitive piezoelectric element 30 can be grasped in advance, the S / N ratio can be further improved by determining and connecting the connecting side at the stage of assembling the substrate. A good Y tilt position signal can be obtained.
[Third embodiment]
FIG. 19 shows a position detection apparatus 800 of the third embodiment. The position detection device 800 is provided with a changeover switch 801 in the preceding stage of the differential amplifier circuit 330 of the tilt actuator driving system 520. By switching the changeover switch 801, the piezoelectric element 30 or the piezoelectric element 32 with high sensitivity and the piezoelectric element 31 or the piezoelectric element 33 are selected.
システムのセットアップ時あるいはウオーミングアップ時に実際に切換スイッチ８０１を切り換えることによって各検出用圧電素子３０〜３３の感度を測定し、切換スイッチ８０１によって感度の高い検出用圧電素子３０または３２と、検出用圧電素子３１または３３とを差動増幅回路３３０に接続するものである。 The sensitivity of each of the detection piezoelectric elements 30 to 33 is measured by actually switching the changeover switch 801 at the time of system setup or warm-up, and the detection piezoelectric element 30 or 32 having a high sensitivity is detected by the changeover switch 801. 31 or 33 is connected to the differential amplifier circuit 330.
このようにすることで、圧電素子３０〜３３の感度のバラツキや経時変化によって感度が逆転した場合でも、常にＳ／Ｎ比の良いＹ傾動位置信号を得ることができる。
［映像機器］
図２０に光走査型の映像機器１０００を示す。位置検出装置１と、制御装置１００１と、レーザ光発生装置１００２と、映像信号出力装置１００３とを備えている。
制御装置１００１は、映像信号出力装置１００３から出力される映像信号に基づいて位置検出装置１の駆動部２００やレーザ光発生装置１００２を制御する。レーザ光発生装置１００２から出力されたレーザ光は、メムスユニット１００の可動部１７のミラー１７Ｍに向けて照射され、ここで反射されてスクリーン１００４に投影される。この投影される反射光は、ミラー１７ＭのＸ方向及びＹ方向の傾動により、スクリーン１００４上を二次元方向に走査されていき、スクリーン１００４上に映像が投影されることになる。
この映像機器１０００は、位置検出装置１を備えているので、Ｓ／Ｎ比の高いＸ傾動位置信号やＹ傾動位置信号を得ることができ、このため、制御性に優れた高性能な映像機器となる。
この映像機器１０００は、位置検出装置１を備えているが、他の位置検出装置７００,８００であってもよい。
上記実施例は、傾動アクチュエータ駆動システム５００,５１０,５２０をいずれも光を２次元方向に走査する位置検出装置１,７００,８００に適用したものについて説明したが、１次元方向に光を走査する位置検出装置に適応してもよい。
上記実施例では、いずれもフレーム板１０の弾性変形部１２〜１６の変形量を圧電素子３０〜３３で検出するようにしているが、これに限らず、例えばひずみゲージなどを用いて検出するようにしてもよい。
また、弾性変形部１２〜１６の変形を駆動用圧電素子２０〜２３で行っているが、これに限らず、例えば静電気力や電磁力などで弾性変形部１２〜１６を弾性変形させるようにしてもよい。
By doing so, it is possible to always obtain a Y tilt position signal with a good S / N ratio even when the sensitivity is reversed due to variations in sensitivity of the piezoelectric elements 30 to 33 or changes with time.
[Video equipment]
FIG. 20 shows an optical scanning type image device 1000. The position detection device 1, a control device 1001, a laser light generation device 1002, and a video signal output device 1003 are provided.
The control device 1001 controls the drive unit 200 and the laser light generation device 1002 of the position detection device 1 based on the video signal output from the video signal output device 1003. The laser beam output from the laser beam generator 1002 is irradiated toward the mirror 17M of the movable unit 17 of the MEMS unit 100, and is reflected and projected onto the screen 1004. The projected reflected light is scanned on the screen 1004 in a two-dimensional direction by tilting the mirror 17M in the X direction and the Y direction, and an image is projected on the screen 1004.
Since the video equipment 1000 includes the position detection device 1, it is possible to obtain an X tilt position signal and a Y tilt position signal having a high S / N ratio. Therefore, a high performance video equipment with excellent controllability. It becomes.
The video equipment 1000 includes the position detection device 1, but may be other position detection devices 700 and 800.
In the above embodiment, the tilt actuator driving systems 500, 510, and 520 are applied to the position detection devices 1, 700, and 800 that scan light in the two-dimensional direction. However, the light is scanned in the one-dimensional direction. You may adapt to a position detection apparatus .
In the above-described embodiments, the deformation amounts of the elastic deformation portions 12 to 16 of the frame plate 10 are detected by the piezoelectric elements 30 to 33. However, the present invention is not limited to this. For example, the deformation amount is detected using a strain gauge or the like. It may be.
Moreover, although the deformation | transformation of the elastic deformation parts 12-16 is performed with the piezoelectric elements 20-23 for a drive, it is not limited to this, For example, it is made to elastically deform the elastic deformation parts 12-16 with an electrostatic force, an electromagnetic force, etc. Also good.
この発明は、上記実施例に限られるものではなく、特許請求の範囲の発明の要旨を逸脱しない限り、設計の変更や追加等は許容される。 The present invention is not limited to the above-described embodiments, and design changes and additions are permitted without departing from the scope of the claimed invention.
１ 位置検出装置
１０ フレーム板
１１ 固定フレーム
１２〜１６ 弾性変形部
１７ 可動部
２０〜２５ 駆動用圧電素子
３０〜３３ 圧電素子
３３０ 差動増幅回路（差動増幅器）
５００ 傾動アクチュエータ駆動システム
1 position detection apparatus 10 frame plate 11 fixed frame 12-16 elastic deformation part 17 movable part 20-25 piezoelectric element for driving 30-33 piezoelectric element 330 differential amplifier circuit (differential amplifier)
500 Tilt actuator drive system
Claims (10)
前記可動部を支持する弾性変形部と、
前記弾性変形部に設けられ、前記弾性変形部の変形量に応じた出力信号を生じる第１変形検出手段と、
前記弾性変形部に設けられ、前記弾性変形部の変形量に応じた出力信号を生じる第２変形検出手段と、
前記第１，第２変形検出手段の出力信号の差である差信号を増幅して出力する差動増幅回路器と、
前記差信号から前記可動部の傾動位置を検出する検出部と、を備え、
前記弾性変形部は第１，第２弾性変形部が連続した折り返し構造を有し、
前記折り返し構造が２つ設けられ、
一方の折り返し構造の第１弾性変形部に設けられた第２弾性変形検出手段の出力端子と、
他方の折り返し構造の第１弾性変形部に設けられた第２弾性変形検出手段の出力端子とを接続し、
一方の折り返し構造の第２弾性変形部に設けられた第１弾性変形検出手段の出力端子と、
他方の折り返し構造の第２弾性変形部に設けられた第１弾性変形検出手段の出力端子とを接続して前記差動増幅器に入力させることを特徴とする位置検出装置。 Moving parts;
An elastically deformable portion that supports the movable portion;
First deformation detection means provided in the elastic deformation portion, and generating an output signal corresponding to the deformation amount of the elastic deformation portion;
A second deformation detection means provided in the elastic deformation section, which generates an output signal corresponding to the deformation amount of the elastic deformation section;
A differential amplifier circuit that amplifies and outputs a difference signal that is a difference between output signals of the first and second deformation detecting means;
A detection unit that detects a tilt position of the movable unit from the difference signal,
The elastically deformable portion have a folded structure in which the first, second deforming portion is continuous,
Two folding structures are provided,
An output terminal of a second elastic deformation detection means provided in the first elastic deformation portion of one folded structure;
Connecting the output terminal of the second elastic deformation detection means provided in the first elastic deformation portion of the other folded structure;
An output terminal of the first elastic deformation detection means provided in the second elastic deformation portion of one folded structure;
Position detecting device according to claim Rukoto allowed by connecting the output terminal of the first elastic deformation detecting means provided in the second elastic deformation portion of the other of the folded structure is input to the differential amplifier.
前記可動部を支持する弾性変形部と、
前記弾性変形部に設けられ、前記弾性変形部の変形量に応じた出力信号を生じる第１変形検出手段と、
前記弾性変形部に設けられ、前記弾性変形部の変形量に応じた出力信号を生じる第２変形検出手段と、
前記第１，第２変形検出手段の出力信号の差である差信号を増幅して出力する差動増幅回路器と、
前記差信号から前記可動部の傾動位置を検出する検出部と、を備え、
前記弾性変形部は第１，第２弾性変形部が連続した折り返し構造を有し、
前記折り返し構造が２つ設けられ、
一方の折り返し構造の第１，第２弾性変形部に設けられた第２，第１弾性変形検出手段と、
他方の折り返し構造の第１，第２弾性変形部に設けられた第２，第１弾性変形検出手段とのうち、予め求めておいた感度の高い一方の第１弾性変形検出手段または他方の第１弾性変形検出手段と、予め求めておいた感度の高い一方の第２弾性変形検出手段または他方の第２弾性変形検出手段とからの検出信号値の差を前記差動増幅器から求めることを特徴とする位置検出装置。 Moving parts;
An elastically deformable portion that supports the movable portion;
First deformation detection means provided in the elastic deformation portion, and generating an output signal corresponding to the deformation amount of the elastic deformation portion;
A second deformation detection means provided in the elastic deformation section, which generates an output signal corresponding to the deformation amount of the elastic deformation section;
A differential amplifier circuit that amplifies and outputs a difference signal that is a difference between output signals of the first and second deformation detecting means;
A detection unit that detects a tilt position of the movable unit from the difference signal,
The elastically deformable portion have a folded structure in which the first, second deforming portion is continuous,
Two folding structures are provided,
Second and first elastic deformation detection means provided in the first and second elastic deformation portions of one folded structure;
Of the second and first elastic deformation detecting means provided in the first and second elastic deformation portions of the other folded structure, one of the first elastic deformation detecting means having high sensitivity obtained in advance or the other of the second elastic deformation detecting means. a first elastic deformation detecting means, the Rukoto the difference between the detection signal value from a previously sensitive that has been determined one of the second elastic deformation detecting means or the other of the second elastic deformation detection means determined from the differential amplifier A position detection device.
前記可動部を支持する弾性変形部と、
前記弾性変形部に設けられ、前記弾性変形部の変形量に応じた出力信号を生じる第１変形検出手段と、
前記弾性変形部に設けられ、前記弾性変形部の変形量に応じた出力信号を生じる第２変形検出手段と、
前記第１，第２変形検出手段の出力信号の差である差信号を増幅して出力する差動増幅回路器と、
前記差信号から前記可動部の傾動位置を検出する検出部と、を備え、
前記弾性変形部は第１，第２弾性変形部が連続した折り返し構造を有し、
前記折り返し構造が２つ設けられ、
一方の折り返し構造の第２弾性変形部に設けられた第１弾性変形検出手段と、他方の折り返し構造の第２弾性変形部に設けられた第１弾性変形検出手段とのどちらか一方と、
一方の折り返し構造の第１弾性変形部に設けられた第２弾性変形検出手段と、他方の折り返し構造の第１弾性変形部に設けられた第２弾性変形検出手段とのどちらか一方とを選択する切換スイッチを設け、
それぞれの第１，第２弾性変形検出手段の感度を測定して、感度のよい第１，第２弾性変形検出手段を前記切換スイッチの切り換えによって選択し、この選択された第１，第２弾性変形検出手段の検出信号を前記差動増幅器に入力するようにしたことを特徴とする位置検出装置。 Moving parts;
An elastically deformable portion that supports the movable portion;
First deformation detection means provided in the elastic deformation portion, and generating an output signal corresponding to the deformation amount of the elastic deformation portion;
A second deformation detection means provided in the elastic deformation section, which generates an output signal corresponding to the deformation amount of the elastic deformation section;
A differential amplifier circuit that amplifies and outputs a difference signal that is a difference between output signals of the first and second deformation detecting means;
A detection unit that detects a tilt position of the movable unit from the difference signal,
The elastically deformable portion have a folded structure in which the first, second deforming portion is continuous,
Two folding structures are provided,
Either one of the first elastic deformation detection means provided in the second elastic deformation part of one folding structure and the first elastic deformation detection means provided in the second elastic deformation part of the other folding structure;
Select one of the second elastic deformation detection means provided in the first elastic deformation portion of one folding structure and the second elastic deformation detection means provided in the first elastic deformation portion of the other folding structure Provide a changeover switch to
The sensitivity of each of the first and second elastic deformation detecting means is measured, and the first and second elastic deformation detecting means having good sensitivity are selected by switching the changeover switch, and the selected first and second elastic deformation detecting means are selected. A position detecting device characterized in that a detection signal of a deformation detecting means is inputted to the differential amplifier .
前記第１変形検出手段は、前記第１弾性変形部に設けられ、
前記第２変形検出手段は、前記第２弾性変形部に設けられ、
前記検出部は、前記可動部の前記第１軸回りの傾動位置を検出することを特徴とする請求項１ないし請求項３の何れか一項に記載の位置検出装置。 The movable part tilts around the first axis due to the elastic deformation of the first and second elastic deformation parts,
The first deformation detection means is provided in the first elastic deformation portion,
The second deformation detection means is provided in the second elastic deformation portion,
Wherein the detection unit includes a position detecting device according to any one of claims 1 to 3, characterized in that for detecting the tilt position of the first axis of the movable portion.
前記弾性変形部に支持され、前記可動部を支持する第３弾性変形部と、
前記第３弾性変形部に設けられ、該第３弾性変形部の変形量に応じた出力信号を生じる第３変形検出手段と、
を有し、
前記検出部は、前記第３変形検出手段が生じる出力信号から前記可動部の第２軸回りの傾動位置を求めることを特徴とする位置検出装置。 The position detection device according to any one of claims 1 to 4 ,
A third elastic deformation portion supported by the elastic deformation portion and supporting the movable portion;
A third deformation detecting means provided in the third elastic deformation portion, and generating an output signal corresponding to the deformation amount of the third elastic deformation portion;
Have
The position detection device, wherein the detection unit obtains a tilt position of the movable unit around a second axis from an output signal generated by the third deformation detection unit.
第１圧電素子から出力される第１検出信号の電流を電圧に変換する第１電圧変換器と、第２圧電素子から出力される第２検出信号の電流を電圧に変換する第２電圧変換器と、第３圧電素子から出力される第３検出信号の電流を電圧に変換する第３電圧変換器とを設け、
第１，第２電圧変換器はローパスフィルタを有し、
第３電圧変換器はハイパスフィルタを有し、
前記差動増幅器で第１電圧変換器の出力電圧と第２電圧変換器の出力電圧との差を増幅させて前記可動部の第１軸回りの傾動位置を検出し、
前記第３電圧変換器の出力電圧に基づいて第２軸回りの傾動位置を検出することを特徴とする請求項６に記載の位置検出装置。 The first, second, and third deformation detecting means are first and second piezoelectric elements that generate electric signals by being deformed in accordance with the deformation of the first, second, and third elastic deformation portions, respectively. Second and third piezoelectric elements,
A first voltage converter that converts the current of the first detection signal output from the first piezoelectric element into a voltage, and a second voltage converter that converts the current of the second detection signal output from the second piezoelectric element into a voltage. And a third voltage converter for converting the current of the third detection signal output from the third piezoelectric element into a voltage,
The first and second voltage converters have a low pass filter,
The third voltage converter has a high-pass filter;
Amplifying the difference between the output voltage of the first voltage converter and the output voltage of the second voltage converter with the differential amplifier to detect the tilt position of the movable part around the first axis;
The position detection device according to claim 6 , wherein a tilt position around the second axis is detected based on an output voltage of the third voltage converter.
または、前記差動増幅器の出力端子に２次以上のパッシブルフィルタまたはアクティブフィルタを設けることを特徴とする請求項７に記載の位置検出装置。 More than second order between the output terminal of the first voltage converter and one input terminal of the differential amplifier and between the output terminal of the second voltage converter and the other input terminal of the differential amplifier. Provide a passive filter or active filter,
The position detection device according to claim 7 , wherein a second-order or higher passive filter or an active filter is provided at an output terminal of the differential amplifier.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2017098746A JP6354892B2 (en) | 2017-05-18 | 2017-05-18 | Position detection device and video equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2017098746A JP6354892B2 (en) | 2017-05-18 | 2017-05-18 | Position detection device and video equipment |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2013026433A Division JP6171380B2 (en) | 2013-02-14 | 2013-02-14 | Actuator drive system and video equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2017146624A JP2017146624A (en) | 2017-08-24 |
| JP6354892B2 true JP6354892B2 (en) | 2018-07-11 |
Family
ID=59682256
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2017098746A Expired - Fee Related JP6354892B2 (en) | 2017-05-18 | 2017-05-18 | Position detection device and video equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP6354892B2 (en) |
Family Cites Families (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5694237A (en) * | 1996-09-25 | 1997-12-02 | University Of Washington | Position detection of mechanical resonant scanner mirror |
| US5982528A (en) * | 1998-01-20 | 1999-11-09 | University Of Washington | Optical scanner having piezoelectric drive |
| JP5458462B2 (en) * | 2005-10-11 | 2014-04-02 | パナソニック株式会社 | Vibration type inertial force detection sensor |
| JP2007326204A (en) * | 2006-06-09 | 2007-12-20 | Seiko Epson Corp | Actuator |
| JP2008241330A (en) * | 2007-03-26 | 2008-10-09 | Citizen Holdings Co Ltd | Detection circuit of piezoelectric vibrator and gyro sensor |
| WO2009088058A1 (en) * | 2008-01-10 | 2009-07-16 | Brother Kogyo Kabushiki Kaisha | Optical scanner and optical scanner manufacturing method |
| JP5262613B2 (en) * | 2008-11-20 | 2013-08-14 | パナソニック株式会社 | Optical reflection element |
| JP5890115B2 (en) * | 2011-06-22 | 2016-03-22 | スタンレー電気株式会社 | Optical deflector |
| JP5987510B2 (en) * | 2011-10-03 | 2016-09-07 | ミツミ電機株式会社 | Optical scanning device and optical scanning control device |
| JP2013195886A (en) * | 2012-03-22 | 2013-09-30 | Panasonic Corp | Optical scanner |
| JP5916577B2 (en) * | 2012-09-26 | 2016-05-11 | 富士フイルム株式会社 | Mirror driving device and driving method thereof |
-
2017
- 2017-05-18 JP JP2017098746A patent/JP6354892B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JP2017146624A (en) | 2017-08-24 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP5987510B2 (en) | Optical scanning device and optical scanning control device | |
| US8649080B2 (en) | Two-dimensional optical deflector including only one pair of meander-type piezoelectric actuators and its driver | |
| JP2012237788A (en) | Optical scanner and image projection device equipped with the same | |
| JP2006105979A (en) | Atomic force microscope | |
| WO2014068846A1 (en) | Actuator | |
| WO2007037293A1 (en) | Electromechanical transducer device driving circuit and retina scan display apparatus having the same | |
| JP2007010966A (en) | Optical switch apparatus | |
| US11143863B2 (en) | Optical scanning device | |
| JP6398599B2 (en) | Optical deflection apparatus, optical scanning apparatus, image projection apparatus, and head-up display | |
| US7612569B2 (en) | Oscillating device, electric potential measuring device, light deflecting device, and image forming apparatus | |
| JP6171380B2 (en) | Actuator drive system and video equipment | |
| US20110181931A1 (en) | mems device comprising oscillations measurements means | |
| JP6354892B2 (en) | Position detection device and video equipment | |
| CN111381366B (en) | Optical scanning device and control method thereof | |
| JP2012168444A (en) | Correction system for deflection reflecting device, and graphic display device | |
| JP6424479B2 (en) | Actuator and control method of actuator | |
| US10048490B2 (en) | Drive system, video device, image projection device, and drive control method | |
| JP2005189548A (en) | Optical switch apparatus and calibration method for optical switch apparatus | |
| JP5104776B2 (en) | Scanning device, two-dimensional scanning device, and two-dimensional optical scanning device | |
| JP2017090793A (en) | Projector | |
| CN218145865U (en) | MEMS device and electronic device | |
| JP2017040911A (en) | Drive system, video equipment, image projector, and drive control method | |
| JPH07151770A (en) | Scanning device | |
| JP2019032470A (en) | Optical scanning device and measuring instrument | |
| CN115231507A (en) | Piezoelectric-based MEMS device with time-shared actuation and sensing circuitry |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20170602 |
|
| A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20170602 |
|
| A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20180313 |
|
| A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20180314 |
|
| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20180507 |
|
| TRDD | Decision of grant or rejection written | ||
| A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20180515 |
|
| A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20180528 |
|
| R151 | Written notification of patent or utility model registration |
Ref document number: 6354892 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R151 |
|
| LAPS | Cancellation because of no payment of annual fees |