JP7078249B2 - Assembly structure to connect the suction nozzle - Google Patents

Description

The present invention relates to an assembly structure connecting a suction nozzle of a wafer, and more particularly to an assembly structure capable of automatically adjusting the overall vertical offset and horizontal positioner.

In the semiconductor packaging process, it is necessary to suck and leave the wafer by cutting or grinding, so a device for sucking and leaving is provided, and in that device, contact is made between sucking and leaving the wafer. Therefore, a fixed seat and a suction nozzle are provided.

As wafers become thinner and thinner, the specifications commonly found on the market today are around 30-50 μm, and may be even thinner. Therefore, the work of sucking and leaving is a mistake in the artificial operation of the suction nozzle, and it does not result in normal pressure, or because the suction nozzle cannot apply force evenly, air is applied to the wafer and the contact surface. The original suction and neglected fixed seats and suction nozzles cannot meet the production needs because they occur or cannot be completely adhered to the underfill and also damage the wafer, but the suction nozzles. May manufacture different fixed seats and suction nozzles for thinner wafers, except that they are manufactured in a planar fashion.

Traditionally, the assembly structure used to connect a common suction nozzle is a fixed seat, where the clamp jaws are placed and the suction nozzles are embedded directly into the clamp jaws. However, since the suction nozzle is embedded in the clamp jaw arranged above the fixed seat, it is difficult to remove the suction nozzle after it is attached and embedded, which makes it difficult to replace it. When installing the suction nozzle, it is inevitable that it will come into contact with the suction wafer surface of the suction nozzle, but it will cause contamination of the suction nozzle, and the suction nozzle cannot be pressed to the end by mistake, so it is fixed. It sticks to the contact surface of the seat and tilts, so it cannot be guaranteed that it must be flat after mounting the suction nozzle, but there is a risk of damaging the wafer. Since the clamp jaw and the suction nozzle are tightly fitted, assembled and fixed, the suction nozzle is easily deformed by the pressure from the clamp jaw, and the wafer may be damaged.

Traditionally, the assembly structure used to connect the suction nozzle has a fixed seat located in the convex contact structure at the bottom of the vacuum hole and the corresponding concave structure located in the suction nozzle, with a clamp jaw attached to the suction nozzle. It is easy to do, but since the concave structure corresponding to the suction nozzle must be provided, it is easily deformed in the manufacturing process, and there is a problem that the suction nozzle is contaminated when it is attached. In addition, depending on the material of the suction nozzle, it may have larger tolerances during manufacturing and has a corresponding preset uneven structure, but is easy to slide and deform and may damage the wafer. There is.

Due to the corresponding tightening, it is an assembly structure that fixes the suction nozzle, and the localization leg is extended below the fixed seat to fit into the localization hole in the suction nozzle, and the localization leg and suction In the tightening structure between the nozzle and the suction nozzle, it is difficult to attach and detach the suction nozzle. Moreover, the suction nozzle and the fixed seat are localized by tightening, and although the structure cannot be adjusted, there is a risk that the suction nozzle will be soiled by contact when it is attached.

In the conventional assembly structure, in relation to the corresponding tightening described above, the fixing of the suction nozzle is improved, and a magnet is embedded in the fixed seat to provide an iron piece or stainless steel that attracts to the suction nozzle. , Replace the tightening assembly structure. However, while the tightening assembly structure can be improved, it also causes other technical problems. The piece of iron or stainless steel between the fixed seat and the suction nozzle cannot be completely tightened and engaged, which may result in a vacuum leak. The magnetic attraction structure of the iron piece or stainless steel between the magnet and the suction nozzle has no corresponding location and causes the problem of horizontal offset when assembling the suction nozzle.

Also, due to conventional tightening, the assembly structure that fixes the suction nozzle has the problem of vertical offset between the suction nozzle and the non-flat surface with respect to the sucked wafer when focusing on the problem of flatness of the assembled suction nozzle. If the above-mentioned improvement in the structure of flatness between the suction nozzle and the fixed seat cannot solve the problem of vertical offset, the influence of this problem becomes large, especially when the thickness of the wafer is reduced.

In view of this, an assembly structure for connecting the suction nozzles according to the first to third aspects is provided with respect to the conventional improved structure, and is used for assembling the suction nozzles. The assembly structure includes a fixed seat and a suction nozzle base. The fixed seat has a main body of magnetic conduction, and an engaging portion is provided on the upper end surface thereof. A vacuum passage is provided in the engaging portion. A hollow guide post is provided on the lower end surface of the fixed seat. The guide post is provided with at least one localization bump on the outer circumference and communicates with the vacuum passage.
The suction nozzle base has a main body of magnetic conduction, and a suction nozzle is provided. The suction nozzle base is provided with a localization portion penetrating the main body of the suction nozzle base. A guide portion corresponding to the guide post is provided in the localization portion. Inside the guide portion, a localization recess corresponding to the localization bump is provided. In the localization part, the suction nozzle base is assembled to the fixed seat by placing the guide post on the guide part through the position where the localization recess corresponds to the localization bump, or the fixed seat and the suction nozzle base. Limit the horizontal displacement on the assembly structure with. This is useful for operating and using the suction nozzle.

In the first aspect, the number of stereotactic grooves is larger than that of the stereotaxic bumps. Therefore, the suction nozzle base is selectively assembled to the fixed seat by utilizing the position where the localization concave groove corresponds to the localization bump.

The localization bump has an arcuate surface.

The localization bump is connected to the outer periphery of the guide post by a steel ball, or is provided with an opening for placing the steel ball in the guide post.

In the second aspect, the suction nozzle base is provided with a recess for installing a magnet. The localization part protrudes from the bottom surface of the recess relative to the range of the recess, and the fixed seat and the suction nozzle base are assembled and connected by magnetic suction to prevent magnetic force from leaking from the lower end of the suction nozzle. Will be done. Further, a seal groove is provided at the base of the suction nozzle. The seal groove surrounds the outside of the recess. The sealing component can use an elastic material to ensure vacuum airtightness between the fixed seat and the suction nozzle base.

In the third aspect, a sealing component is provided between the fixed seat and the suction nozzle base. The guide portion has a tapered conical hole path. The stereotaxic groove is located inside the conical hole path. The localization section provides the necessary relative displacement space for the guide section when the suction nozzle base is tilted relative to the relatively wide hole path of the conical hole path, and the lower end surface of the suction nozzle is tilted on the surface of the wafer. Can be attached to. The sealing parts are used to maintain the close contact between the fixed seat and the suction nozzle base assembling structure. The slope of the conical path has an angle of 1 to 5 degrees with the vertical line. The angle between the inclined surface and the vertical line is preferably 2 degrees to 2.5 degrees.

The suction nozzle base is provided with a seal groove and a recess. The localization portion projects from the bottom surface of the recess relative to the range of the recess. A magnet is installed in the recess. The fixed seat and the base of the suction nozzle are assembled and connected by magnetic suction to prevent magnetic force from leaking from the lower end of the suction nozzle. The seal groove surrounds the outside of the recess. The sealing component is provided in the sealing groove. Since the sealing component is made of an elastic material, vacuum airtightness can be ensured.

The sealing component is higher than the height of the suction nozzle base according to the adjustment space formed between the lower end surface of the fixed seat and the upper end surface of the suction nozzle base. The height of the adjustment space compensates for the height difference caused by the inclination.

Handles are provided on both sides of the suction nozzle base for ease of handling.

The assembly structure connecting the suction nozzles according to the fourth aspect includes a fixed seat and a suction nozzle base. The fixed seat has a main body of magnetic guide and an engaging portion is provided on the upper end surface thereof. A vacuum passage is provided in the engaging portion. A hollow guide post is provided on the lower end surface of the fixed seat. The guide post communicates with the vacuum passage.
The suction nozzle base has a main body of magnetic conduction, and a suction nozzle is provided. The suction nozzle base is provided with a localization portion that penetrates the main body corresponding to the guide post. The localization portion assembles the suction nozzle base on the fixed seat corresponding to the guide post, or limits the horizontal displacement of the fixed seat and the suction nozzle base on the assembly structure. This is useful for operating and using the suction nozzle.

The localization part has a tapered conical hole path. An upper end hole and a lower end hole are formed on the upper and lower end surfaces of the suction nozzle base, respectively. The suction nozzle base is provided with a sealing component between the fixed seat and the suction nozzle base by connecting the upper end hole to the guide post. The localization also provides the required relative displacement space for the guide post when the suction nozzle base is tilted, with the conical hole facing the hole below its upper end hole and below the suction nozzle. It can be attached to the surface of a wafer with an inclined end face. In addition, the sealing parts are used to maintain the degree of adhesion between the fixed seat and the suction nozzle base assembling structure. The conical path has a plurality of inclined surfaces having an angle of 1 to 5 degrees with the vertical line. The number of inclined surfaces is the same as the number of side column surfaces of the guide post. The angle between the inclined surface and the vertical line is preferably 2 degrees to 2.5 degrees. The suction nozzle base is provided with a recess and a seal groove. A magnet is provided in the recess. The seal groove surrounds the outside of the recess. The seal component is provided in the seal groove and is formed of an elastic material, so that vacuum airtightness can be ensured.

The guide post has a cross-sectional shape that is either a convex quadrangle or a triangle.

The suction nozzle base is provided with a recess for installing a magnet. The localization portion projects from the bottom surface of the recess relative to the range of the recess. The fixed seat and the base of the suction nozzle are assembled and connected by magnetic suction, and the magnetic force is prevented from leaking from the lower end of the suction nozzle.

The sealing component is higher than the height of the suction nozzle base according to the adjustment space formed between the lower end surface of the fixed seat and the upper end surface of the suction nozzle base. The height of the adjustment space compensates for the height difference caused by the inclination.

Handles are provided on both sides of the suction nozzle base for ease of handling.

The present invention has the following effects as compared with the conventional technique.

In the assembly structure of the present invention, the fixed seat uses the localization bump provided on the guide post, and the localization bump is placed in accordance with the localization concave groove at the base of the suction nozzle. When the fixed seat is assembled, the suction nozzle base is horizontally localized, thereby eliminating the problem of horizontal displacement of the suction nozzle.

Further, since the suction nozzle is directly and flatly attached to the base of the suction nozzle, the problem of deformation of the suction nozzle does not occur instead of fitting the suction nozzle firmly to the structure for assembling the suction nozzle.

The suction nozzle in the assembled structure has a seal component provided in the seal groove, and by utilizing the elasticity of the seal component, various irregularities and inclinations related to the fixed portion, suction nozzle, suction nozzle base, wafer or its adsorbent, etc. To fix. Thereby, in order to secure the flatness, the suction nozzle is made to be adsorbed flatly, or is attached flatly to the wafer or the adsorbed material.

A magnet is provided at the suction nozzle base in the assembled structure, and the fixed seat having magnetic permeability and the suction nozzle base are combined, and the fixed seat and the suction nozzle base are assembled and connected by magnetic suction. A handle is provided on the base of the suction nozzle, and the base of the suction nozzle is assembled using the handle. It can be attached or removed from the fixed part. Further, the lower end surface of the suction nozzle for sucking the wafer surface is not contaminated, and it is not necessary to attach or remove the fixing portion.

The temperature of the operating environment can affect the magnetic force of the magnet, but the effect of temperature on the magnetic force is the useful life of the suction nozzle before it needs to be replaced due to the shorter life of the suction nozzle. Does not affect the work of attracting and leaving the wafer, unless the magnet is completely demagnetized at the Curie temperature.

The suction nozzle base is provided with a conical hole path at the guide portion thereof. The conical hole path is a tapered conical structural space surrounded by an inclined surface. Since the position of the fixed seat does not change when the suction nozzle base is tilted, the guide post can provide the required relative displacement space. Thereby, the suction nozzle base can be fitted with the sealing component and compensates for the vertical offset caused by the whole assembly or the wafer or other causes through the tilt. The suction nozzle base is designed with the angle between its tilted surface and the vertical line taking into account the maximum tilt of the fixed part, the suction nozzle, and all possible vertical offsets of the wafer etc. to generate the vertical offset. When this is done, the offset can be corrected to flatness, which is useful in combination with the sealing parts.

The suction nozzle base is used to maintain airtightness between the fixed seat when tilted and the sealing component even if the height differs due to tilting.

The guide post of the fixed seat and the conical hole path at the base of the suction nozzle are provided at the center of the fixed seat and the base of the suction nozzle. Therefore, the standard of the fixed seat can be simplified so that the standard of the fixed seat is not changed only by changing the suction nozzle base and the suction nozzle when the wafer size changes. As a result, the fixed seat does not need to be changed according to the size of the wafer and can be used for a long period of time.

It is a perspective view of the assembly structure which connects the suction nozzle by 1st Embodiment of this invention. It is a perspective view which shows the bottom surface of the assembly structure which connects the suction nozzle by 1st Embodiment of this invention. It is an exploded perspective view of the assembly structure which connects the suction nozzle by 1st Embodiment of this invention. It is a bottom view of the assembly structure which connects the suction nozzle by 1st Embodiment of this invention. It is a figure which shows the cross-sectional view along the line AA of FIG. It is a partially enlarged view of FIG. It is a figure which shows the cross-sectional view along the line BB of FIG. It is a partially enlarged view of FIG. It is a figure which shows the cross-sectional view along the line CC of FIG. It is sectional drawing explaining the adjustment of the vertical offset of the assembly structure connecting the suction nozzle by 1st Embodiment of this invention. It is a partially enlarged view of FIG. It is an exploded perspective view of the assembly structure which connects the suction nozzle by 2nd Embodiment of this invention. It is an exploded perspective view of the assembly structure which connects the suction nozzle by the 3rd Embodiment of this invention. It is sectional drawing of the assembly structure connecting the suction nozzle by 3rd Embodiment of this invention. It is a partially enlarged view of FIG.

The assembly structure for connecting the suction nozzles according to the first embodiment of the present invention will be described with reference to FIGS. 1 to 3. 1 to 3 are a perspective view and an exploded perspective view of the first embodiment of the present invention, and the assembly structure in the assembly structure connecting the suction nozzles includes a fixed seat 10 and a suction nozzle base 20. A suction nozzle 30 is provided below the suction nozzle base 20, and the lower end surface of the suction nozzle 30 is for sucking the wafer 40.

The fixed seat 10 has a metal body which is a magnetic conductor, and an engaging portion 11 is arranged on the upper end surface thereof in order to engage with a vacuum ejector (not shown). The engaging portion 11 is provided with a vacuum passage 111. The vacuum passage 111 penetrates the engaging portion 11 and the lower fixed seat 10.

As shown in FIG. 3, a hollow guide post 12 is provided on the lower end surface of the fixed seat 10. The guide post 12 communicates with the vacuum passage 111, and at least one localization bump 13 is provided on the outer periphery thereof.

The guide post 12 of the present embodiment is a cylindrical hollow cylindrical body. The localization bump 13 is a bump having an arcuate surface, and is integrally formed on the outer periphery of the guide post 12. Depending on the actual needs, the localization bump 13 is connected to the outer circumference of the guide post 12 with a steel ball, or is provided with an opening for arranging the steel ball with the guide post 12 on the outer circumference of the guide post 12. A structure may be provided that forms an arcuate surface. The guide post 12 is a hollow cylindrical body having an elliptical cylinder shape.

The suction nozzle base 20 is provided with a localization portion 21 penetrating the main body thereof. The localization portion 21 communicates with the vacuum passage 111 of the fixed seat 10. The localization portion 21 includes a guide portion 22 and a localization recessed groove 23. The localization portion 21 is provided with a guide portion 22 corresponding to the guide post 12. Further, inside the guide portion 22, a localization recessed groove 23 corresponding to the localization bump 13 is provided.

The cross section of FIG. 6 is a view showing a cross-sectional view taken along the line BB of FIG. 4, and the position of the cross section is exactly the place where the localization bump 13 of the fixed seat 10 is provided. As shown in FIG. 6, the suction nozzle base 20 is provided so that the localization bump 13 and the localization concave groove 23 correspond to each other and the guide portion 22 of the guide post 12 is placed. As shown in FIG. 6A, there is an inclined surface having a vertical line and an angle θ between the conical hole path 220 of the guide portion 22 and the guide post 12, and the space between the localization recess 23 and the localization bump 13 is , A vertical contact surface, useful for structural localization.

The suction nozzle base 20 is provided with handles 25 on both sides thereof, and a fixed recess 26 communicating with the localization portion 21 is provided on the lower end surface thereof. The fixing recess 26 is provided for the suction nozzle 30 to be adhesively fixed. Since the suction nozzle 30 is flatly attached and fixed below the suction nozzle base 20, the flatness of the suction nozzle 30 can be ensured.

The suction nozzle base 20 utilizes the fact that the localization portion 21 corresponds to the lower part of the fixed seat 10, and as shown in FIG. 6A, the localization portion 21 has a guide post at a position where the localization recess 23 corresponds to the localization bump 13. 12 is placed inside the guide portion 22. Thereby, the suction nozzle base 20 is assembled to the fixed seat 10. The horizontal displacement in the assembly structure of the fixed seat 10 and the suction nozzle base 20 is restricted by the shape in which the localization bump 13 and the localization concave groove 23 correspond to each other, and the two relative positions are restricted to move left and right. The suction nozzle 30 is useful for operational use under vacuum so that it cannot be used.

In the present embodiment, the localization bump 13 and the localization concave groove 23 are installed in a one-to-one manner, but the number of structures that selectively correspond to each other can be selectively increased, or 1 Since the two localization bumps 13 correspond to the two localization recesses 23, the directions of the different suction nozzle bases 20 are selected and assembled into the fixed seat 10.

As shown in FIGS. 5 and 5A, the guide portion 22 has a conical hole path 220 that penetrates the fixed seat 10 and tapers in width. The inside of the conical hole path 220 is interconnected with the localization concave groove 23 to form the shape of the opening hole of the localization portion 21 as shown in FIG. 7.

The cross section in FIG. 5 is a cross-sectional view taken along the line AA of FIG. 4, and the cross-sectional line is a portion where the localization bump 13 of the fixed seat 10 is not provided, so that the guide post 12 Is shown in the figure to be placed inside the guide portion 22. As shown in FIG. 5A, since the conical hole path 220 has an inclined surface having an angle θ with respect to the vertical line, both sides of the guide portion 22 with respect to the guide post 12 exhibit an inclined surface having a tapered width. In FIG. 5A, the localization bump 13 on the other surface is indicated by a broken line. The conical hole path 220 of the guide portion 22 has an inclined surface having an angle of 1 degree to 5 degrees with the vertical line. Depending on the actual requirements, the deviation angle θ between the inclined surface of the conical hole 120 and the vertical line can be 2 degrees, 2.5 degrees, 3 degrees, 3.5 degrees, 4 degrees or 4.5 degrees. The preferred range of the angle θ is 2 degrees to 2.5 degrees.

The fixed seat 10 and the suction nozzle base 20 in the present embodiment are similarly provided with magnetic conduction. A seal groove 27 and a recess 28 are provided on the upper end surface of the suction nozzle base 20. As shown in FIGS. 3 and 7, the localization portion 21 projects from the bottom surface of the recess 28 relative to the range of the recess 28. By installing the magnet 29 in the recess 28, the fixed seat 10 and the suction nozzle base 20 are assembled and connected by magnetic suction. Since the fixed seat 10 and the suction nozzle base 20 are magnetically conductive materials, magnetic force is prevented from leaking from the lower end of the suction nozzle 30.

The suction nozzle base 20 is magnetically attracted to the fixed seat 10 to improve the conventional embedded assembly structure. At the time of installation, the suction nozzle base 20 is inadvertently pressed against the bottommost surface to be flatly attached to the fixed seat 10, and the suction nozzle 30 assembled to the suction nozzle base 20 is tilted at the same time and is attracted to the wafer. There is a problem that 40 is damaged during work.

The seal groove 27 of the suction nozzle base 20 is provided on the outside of the recess 28. As shown in FIG. 3, the seal groove 27 surrounds the outside of the recess 28. As shown in FIG. 7, the seal component 271 is provided by adhering and engaging in the seal groove 27. After assembly, the seal component 271 is sandwiched between the fixed seat 10 and the suction nozzle base 20, and the upper end of the seal component 271 engages with the bottom surface of the fixed seat 10. The seal component 271 is formed to have a similar outer shape to correspond to the seal groove 27.

The cross section of FIG. 7 is a view showing a cross-sectional view taken along the line CC of FIG. 1, and the cross-sectional line is a cross-sectional direction of the entire suction nozzle base 20. FIG. 7 shows the localization unit 21. The localization portion 21 has the shape of an opening formed by connecting the guide portion 22 and the localization recessed groove 23. The magnet 29 is surrounded inside and outside by a localization portion 21 protruding from the bottom surface of the recess 28 and a sealing component 271.

The sealing component 271 is elastic and at the same time can ensure an airtight structure between the fixed seat 10 and the suction nozzle base 20 (see FIGS. 6 and 8), between the two under vacuum operation. The degree of vacuum can be maintained. Therefore, the suction nozzle 30 is useful for operation and use under vacuum. The elastic material of the sealing component 271 can correct irregularities or tilts that occur in the fixed seat 10, the suction nozzle base 20, the suction nozzle 30, and the various structures of the wafer 40, and the suction nozzle 30 , Can be attached flat to the wafer 40 or attached flat.

In practice, the temperature can affect the magnet 29 of the suction nozzle base 20 and further affect the magnetic force. However, due to the short life of the suction nozzle 30, the effect of temperature on the magnet 29 before the suction nozzle 30 needs to be replaced is that the magnet 29 is completely at Curie temperature before the end of the useful life of the suction nozzle 30. It does not affect suction and leaving work unless it is demagnetized.

As shown in FIGS. 5, 6 and 8, the suction nozzle 30 is fixed to the lower end surface of the suction nozzle base 20. The top surface of the suction nozzle 30 includes a passage 31 and through holes 32 of the plurality of suction nozzles 30. The through hole 32 communicates with the guide post 12 on the lower end surface of the fixed seat 10 through the passage 31, and also communicates with the vacuum passage 111, so that the vacuum passage 111 and the through hole 32 form an air passage. As a result, when the suction nozzle 30 sucks air using a vacuum suction device (not shown), the vacuum passage 111 sucks the wafer 40 through the generated vacuum suction force. At this time, the wafer 40 is attached to the lower end surface 33 for sucking the wafer 40 after the suction nozzle 30 is assembled.

Under normal usage conditions, the lower end surface 33 of the suction nozzle 30 can be directly attached to the wafer 40. However, when the surface of the wafer 40 is not flat or when the wafer 40 is arranged abnormally, the surface of the wafer 40 is relatively inclined with the lower end surface 33 of the suction nozzle 30.

In such a situation, in order to attach the lower end surface 33 of the suction nozzle 30 to the surface of the wafer 40 which is relatively inclined, it is necessary to incline the suction nozzle 30 and the suction nozzle base 20 together, and the wafer needs to be inclined. It can be maintained to be attached to the wafer 40 without damaging the structure of the 40.

In the assembled structure of the present embodiment, the conical hole path 220 of the guide portion 22 has a hole path that gradually widens toward the lower side of the localization bump 13. This is a conical structural space with a tapered width surrounded by an inclined surface of the conical hole path 220. When the suction nozzle base 20 is tilted, the fixed seat 10 maintains its original position, but the guide post 12 is not tilted, so that the conical hole 220 is when the suction nozzle base 20 is tilted. The guide post 12 is provided with the necessary relative displacement space to vertically adjust the suction nozzle base 20 up and down according to the tilt direction.

When the suction nozzle base 20 is tilted, there is a height difference due to the tilt with the fixed seat 10. In this case, the seal component 271 sandwiched between the fixed seat 10 and the suction nozzle base 20 is used. Maintain two degrees of adhesion.

The seal component 271 is higher than the height of the suction nozzle base 20, and a pre-reserved adjustment space 14 is formed between the lower end surface of the fixed seat 10 and the upper end surface of the suction nozzle base 20. The height is set in consideration of the assembly tolerance of the wafer 40 itself and the respective components required for the wafer 40 to be sucked and left. At the same time, the elasticity of the sealing component 271 can be used to compensate for the vertical height difference caused by the tilt, so that the suction nozzle base 20 can maintain the airtightness of the entire structure while tilting. Assembling automatically adjusts the accumulated vertical allowable offset and at the same time serves as a horizontal positioner for the suction nozzle 30.

The conical hole path 220 of the guide portion 22 can adjust the operation under the usage situation where the surface of the wafer 40 is inclined with the suction nozzle 30 by adjusting the vertical allowable offset assembled on the structure together with the sealing component 271. Moreover, the corresponding structural relationship between the localization recess 23 to which the conical hole 220 is connected and the localization bump 13 on the outer periphery of the guide post 12 does not simultaneously cause the overall assembly structure to be in relative horizontal displacement. The angle θ between the inclined surface of the conical hole 220 and the vertical line is set in consideration of the fixed seat 10, the suction nozzle base 20, the suction nozzle 30, and the maximum inclination of the possible vertical offset of the wafer 40 and the like. Will be done.

When assembling the assembly structure according to the first embodiment, the seal component 271 is inserted into the seal groove 27. Next, the magnet 29 is arranged in the recess 28 of the suction nozzle base 20. Then, the suction nozzle 30 is attached to the fixed recess 26 of the suction nozzle base 20. Finally, by grasping the handles 25 installed on both sides of the suction nozzle base 20 by hand and aligning the localization concave groove 23 with the position of the localization bump 13, the guide portion 22 is connected to the guide post 12 and the magnet 29 is connected. The suction nozzle base 20 and the attached suction nozzle 30 are attracted to the fixed seat 10 by the suction force of the above, and the wafer mounting device is assembled. On the other hand, when removing, the handle 25 of the suction nozzle base 20 can be grasped and pulled out by hand, that is, the suction nozzle base 20 and the suction nozzle 30 can be removed together.

Using the handle 25 of the suction nozzle base 20, the suction nozzle 30 is directly installed on the fixed seat 10 or removed from the fixed seat 10 so that the operator does not touch the lower end surface 33 of the suction nozzle 30. Can be done. As a result, the lower end surface 33 of the suction nozzle 30 is not contaminated, and it is not necessary to remove the fixed seat 10 on the equipment, so that the suction nozzle 30 can be quickly installed on the fixed seat 10.

(Second Embodiment)
A second embodiment of the present invention will be described with reference to FIG. The structure of the second embodiment is substantially the same as that of the first embodiment and has the same function. In order to simplify the description, the same reference numerals are given and the description thereof will be omitted.

The difference between the second embodiment and the first embodiment is that the localization portion 21A of the suction nozzle base 20A of the second embodiment is connected to the two localization recesses 231 and 232 formed inside the guide portion 22. The guide post 12 is placed inside the guide portion 22 corresponding to the localization bump 13 by the concave groove 231 or the localization concave groove 232, and similarly guides the suction nozzle base 20 to be relatively assembled below the fixed seat 10. be able to.

(Third Embodiment)
A third embodiment of the present invention will be described with reference to FIGS. 10 and 11. The structure of the third embodiment is substantially the same as that of the first embodiment and has the same function. In order to simplify the description, the same reference numerals are given and the description thereof will be omitted.

The difference between the third embodiment and the first embodiment is that the guide post 12B of the fixed seat 10B of the third embodiment is a hollow cylinder having a square columnar shape. The localization bump 13 of the first embodiment is not provided on the side pillar of the guide post 12B.

The localization portion 21B of the suction nozzle base 20B is formed in a shape corresponding to the guide post 12B so as to be interconnected with the guide post 12B. The quadrangular localization portion 21B as shown in FIGS. 11 and 11A has a conical hole path 210B having a tapered width such as a pyramid shape. An upper end hole 211B and a lower end hole 212B are formed on the upper and lower end surfaces of the suction nozzle base 20B, respectively. Further, the suction nozzle base 20B is connected to the guide post 12B by an upper end hole 211B having a smaller hole diameter.

The conical hole path 210B of the localization portion 21B is four continuous inclined surfaces, and the number of inclined surfaces is the same as the number of side pillar surfaces of the guide post 12B. The angle θ formed by the inclined surface of the conical hole path 210B and the vertical line is the same as that of the first embodiment. The pillar body of the guide post 12B of the third embodiment is provided in advance so as to have a cross-sectional shape of either a convex quadrangle or a triangle, if necessary.

A sealing component 271 is provided between the fixed seat 10B and the suction nozzle base 20B. As shown in FIGS. 11 and 11A, the conical hole 210B of the localization portion 21B has a wider hole below the upper end hole 211B. It is advantageous when the suction nozzle base 20 is tilted to provide the required relative displacement space for the guide post 12B in a wider hole and the lower end surface 33 of the suction nozzle 30 is attached to the surface of the tilted wafer. be. The sealing component 271 is used to maintain the degree of adhesion between the fixed seat 10B and the suction nozzle base 20B.

In the assembly structure according to the present embodiment, the guide posts 12, 12B and the localization portions 21, 21B are all preliminarily located at the center of the fixed seats 10, 10B and the suction nozzle bases 20, 20A, 20B. Therefore, the standard of the fixed seat 10 can be simplified to one, but when the size of the wafer 40 is changed, only the appropriate suction nozzle bases 20, 20A, 20B and the suction nozzle 30 are replaced accordingly. It can be simplified so as not to change the standard of the fixed seats 10 and 10B. As a result, the fixed seats 10 and 10B can be used for a long time, and the time and cost for replacing the fixed seats 10 and 10B can be saved.

The above is a preferred embodiment of the present invention, and the present invention is not limited to the one described in the above embodiment, and various design changes and corrections are made without departing from the gist of the invention. , Substitution, union, simplification, and equivalent replacement is of course possible.

10 ... Fixed seat 10B ... Fixed seat 11 ... Engagement part 111 ... Vacuum passage 12 ... Guide post 12B ... Guide post 120 ... Conical hole path 13 ... Localization bump 14・ ・ ・ Adjustment space 20 ・ ・ ・ Suction nozzle base 20A ・ ・ ・ Suction nozzle base 20B ・ ・ ・ Suction nozzle base 21 ・ ・ ・ Localization part 21B ・ ・ ・ Localization part 210B ・ ・ ・ Conical hole path 211B ・ ・ ・ Upper end hole 212B ・ ・ ・ Lower end hole 22 ・ ・ ・ Guide part 220 ・ ・ ・ Conical hole path 23 ・ ・ ・ Localized concave groove 25 ・ ・ ・ Handle 26 ・ ・ ・ Fixed concave part 27 ・ ・ ・ Seal groove 271 ・ ・ ・ Seal parts 28 ・・ ・ Recess 29 ・ ・ ・ Magnet 30 ・ ・ ・ Suction nozzle 31 ・ ・ ・ Passage 32 ・ ・ ・ Through hole 33 ・ ・ ・ Lower end surface 40 ・ ・ ・ Wafer

Claims (17)

An assembly structure connecting suction nozzles, used for assembling suction nozzles, said assembly structure comprising a fixed seat and a suction nozzle base.
The fixed seat has a magnetic guiding body, an engaging portion is provided on the upper end surface thereof, a vacuum passage is provided on the engaging portion, and a hollow guide post is provided on the lower end surface of the fixed seat. The guide post is provided so that the guide post is provided with at least one localization bump on the outer periphery and communicates with the vacuum passage.
The suction nozzle base has a main body of magnetism, and the suction nozzle is provided.
The suction nozzle base is provided with a localization portion penetrating the main body, the localization portion is provided with a guide portion corresponding to the guide post, and the localization portion is inside the guide portion. A localization recess corresponding to the bump is provided, and the localization portion is formed by placing the guide post on the guide portion via a position where the localization recess corresponds to the localization bump, whereby the suction nozzle is provided. Assemble the base to the fixed seat, or limit the horizontal displacement of the fixed seat and the suction nozzle base on the assembly structure .
The number of the localization recesses is larger than that of the localization bumps.
The suction nozzle base is an assembly structure for connecting a suction nozzle, which comprises selectively assembling the suction nozzle to the fixed seat by utilizing the position where the localization concave groove corresponds to the localization bump . The assembly structure for connecting the suction nozzle according to claim 1, wherein the localization bump has an arcuate surface. The suction nozzle according to claim 1, wherein the localization bump is connected to the outer periphery of the guide post by a steel ball, or is provided with an opening for arranging the steel ball in the guide post. Assembly structure to connect. An assembly structure connecting suction nozzles, used for assembling suction nozzles, said assembly structure comprising a fixed seat and a suction nozzle base.
The fixed seat has a magnetic guiding body, an engaging portion is provided on the upper end surface thereof, a vacuum passage is provided on the engaging portion, and a hollow guide post is provided on the lower end surface of the fixed seat. The guide post is provided so that the guide post is provided with at least one localization bump on the outer periphery and communicates with the vacuum passage.
The suction nozzle base has a main body of magnetism, and the suction nozzle is provided.
The suction nozzle base is provided with a localization portion penetrating the main body, the localization portion is provided with a guide portion corresponding to the guide post, and the localization portion is inside the guide portion. A localization recess corresponding to the bump is provided, and the localization portion is formed by placing the guide post on the guide portion via a position where the localization recess corresponds to the localization bump, whereby the suction nozzle is provided. Assemble the base to the fixed seat, or limit the horizontal displacement of the fixed seat and the suction nozzle base on the assembly structure .
The suction nozzle base is provided with a recess for installing a magnet.
The localization portion protrudes from the bottom surface of the recess with respect to the range of the recess.
The fixed seat and the suction nozzle base are assembled and connected by magnetic adsorption, and are connected.
A seal groove is provided at the base of the suction nozzle.
The seal groove is formed so as to surround the outside of the recess, and a seal component is provided.
The sealing component is an assembly structure for connecting a suction nozzle, which is characterized by being formed of an elastic material . An assembly structure connecting suction nozzles, used for assembling suction nozzles, said assembly structure comprising a fixed seat and a suction nozzle base.
The fixed seat has a magnetic guiding body, an engaging portion is provided on the upper end surface thereof, a vacuum passage is provided on the engaging portion, and a hollow guide post is provided on the lower end surface of the fixed seat. The guide post is provided so that the guide post is provided with at least one localization bump on the outer periphery and communicates with the vacuum passage.
The suction nozzle base has a main body of magnetism, and the suction nozzle is provided.
The suction nozzle base is provided with a localization portion penetrating the main body, the localization portion is provided with a guide portion corresponding to the guide post, and the localization portion is inside the guide portion. A localization recess corresponding to the bump is provided, and the localization portion is formed by placing the guide post on the guide portion via a position where the localization recess corresponds to the localization bump, whereby the suction nozzle is provided. Assemble the base to the fixed seat, or limit the horizontal displacement of the fixed seat and the suction nozzle base on the assembly structure .
A sealing component is provided between the fixed seat and the suction nozzle base.
The guide portion has a tapered conical hole path and has a tapered conical hole path.
The stereotactic groove is located inside the conical hole and is located inside.
The localization portion faces a relatively wide side of the conical hole path to provide the relative displacement space required for the guide post when the suction nozzle base is tilted so that the lower end surface of the suction nozzle is tilted. An assembly structure for connecting a suction nozzle , which can be attached to the surface of an inclined wafer and uses the sealing component to maintain a close contact between the fixed seat and the suction nozzle base. .. The assembly structure for connecting a suction nozzle according to claim 5 , wherein the inclined surface of the conical hole path has an angle of 1 degree to 5 degrees from the vertical line. The assembly structure for connecting the suction nozzles according to claim 6 , wherein the angle between the inclined surface and the vertical line is 2 degrees to 2.5 degrees. The suction nozzle base is provided with a seal groove and a recess.
The localization portion projects from the bottom surface of the recess relative to the range of the recess.
A magnet is installed in the recess.
The fixed seat and the suction nozzle base are assembled and connected by magnetic adsorption.
The assembly structure for connecting a suction nozzle according to claim 5 , wherein the seal groove surrounds the outside of the recess, and the seal component is provided in the seal groove. The assembly structure for connecting a suction nozzle according to claim 8 , wherein the sealing component is formed of an elastic material. An assembly structure connecting suction nozzles, used for assembling suction nozzles, said assembly structure comprising a fixed seat and a suction nozzle base.
The fixed seat has a magnetic guiding body, an engaging portion is provided on the upper end surface thereof, a vacuum passage is provided on the engaging portion, and a hollow guide post is provided on the lower end surface of the fixed seat. The guide post is provided and communicates with the vacuum passage.
The suction nozzle base has a main body of magnetism, and the suction nozzle is provided.
The suction nozzle base is provided with a localization portion corresponding to the guide post and penetrating the main body thereof, and the localization portion has the suction nozzle base assembled to the fixed seat corresponding to the guide post. Or, limit the horizontal displacement of the fixed seat and the suction nozzle base on the assembly structure .
The localization portion has a tapered conical hole path and has a tapered conical hole path.
An upper end hole and a lower end hole are formed on the upper and lower end surfaces of the suction nozzle base, respectively.
The suction nozzle base is provided with a sealing component between the fixed seat and the suction nozzle base by connecting the upper end hole to the guide post.
The localization portion provides the relative displacement space required for the guide post when the suction nozzle base is tilted by the conical hole path facing the hole path located below the upper end hole, and the suction nozzle is provided. An assembly structure that can be attached to the surface of a wafer whose lower end surface is inclined, and that uses the sealing component to connect a suction nozzle that maintains the degree of adhesion between the fixed seat and the suction nozzle base . The conical path has a plurality of inclined surfaces having an angle of 1 to 5 degrees from the vertical line.
The assembly structure for connecting suction nozzles according to claim 10 , wherein the number of inclined surfaces is the same as the number of side pillar surfaces of the guide post. The assembly structure for connecting a suction nozzle according to claim 11 , wherein the angle between the inclined surface and the vertical line is 2 degrees to 2.5 degrees. The assembly structure for connecting a suction nozzle according to claim 10 , wherein the pillar body of the guide post is provided with a cross-sectional shape of either a convex quadrangle or a triangle. The suction nozzle base is provided with a recess for installing a magnet.
The localization portion projects from the bottom surface of the recess relative to the range of the recess.
The assembly structure for connecting a suction nozzle according to claim 10 , wherein the fixed seat and the suction nozzle base are assembled and connected by magnetic suction. The suction nozzle base is provided with a recess and a seal groove.
A magnet is provided in the recess.
The seal groove surrounds the outside of the recess and
The assembly structure for connecting a suction nozzle according to claim 10 , wherein the seal component is formed of an elastic material and is provided in the seal groove. The seal parts are
It is higher than the height of the suction nozzle base according to the adjustment space formed between the lower end surface of the fixed seat and the upper end surface of the suction nozzle base.
The assembly structure for connecting the suction nozzles according to any one of claims 4 , 5 , and 8 , wherein the height of the adjustment space compensates for the height difference caused by the inclination. The assembly structure for connecting the suction nozzles according to any one of claims 1, 4, 5, 8 and 10, wherein handles are provided on both sides of the suction nozzle base.

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