JP7060239B2 - Lens checker - Google Patents

Lens checker Download PDF

Info

Publication number
JP7060239B2
JP7060239B2 JP2018136137A JP2018136137A JP7060239B2 JP 7060239 B2 JP7060239 B2 JP 7060239B2 JP 2018136137 A JP2018136137 A JP 2018136137A JP 2018136137 A JP2018136137 A JP 2018136137A JP 7060239 B2 JP7060239 B2 JP 7060239B2
Authority
JP
Japan
Prior art keywords
lens
light
image
transmitted
optical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2018136137A
Other languages
Japanese (ja)
Other versions
JP2020012765A (en
Inventor
珠貴 小出
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Rexxam Co Ltd
Original Assignee
Rexxam Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Rexxam Co Ltd filed Critical Rexxam Co Ltd
Priority to JP2018136137A priority Critical patent/JP7060239B2/en
Publication of JP2020012765A publication Critical patent/JP2020012765A/en
Application granted granted Critical
Publication of JP7060239B2 publication Critical patent/JP7060239B2/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Landscapes

  • Testing Of Optical Devices Or Fibers (AREA)

Description

本発明は、眼鏡用レンズやコンタクトレンズ、及びその他の光学レンズ等の被検レンズ表
面のキズや汚れ及びゴミまたは隠しマーク等の外観検査や観察等に使用されている、所謂
レンズチェッカーに関し、殊に被検レンズ内部の脈理や表面の研磨不良等の検査や観察に
適した装置に関する。
The present invention relates to a so-called lens checker used for visual inspection and observation of scratches, stains, dust, hidden marks, etc. on the surface of a lens to be inspected such as a lens for spectacles, a contact lens, and other optical lenses. The present invention relates to a device suitable for inspection and observation of veins inside the lens to be inspected and poor surface polishing.

使用中のメガネレンズやコンタクトレンズ等について、その受光画面或いは撮像画面の画
像から、レンズ表面や裏面のキズや汚れ、埃やゴミ等の異物を目視判別するよう構成され
たレンズチェッカーを用いて人的に目視観察または検査する場合に、次の様な種々の問題
が存在していた。
即ち、被検レンズ表面におけるキズが深い場合や、大きなキズや大きな塵やゴミ等の異物
の場合には、キズやゴミ等を透過した透過光の屈折割合や反射割合が大きいので、これを
光学的に捉えることは比較的容易であるのに対し、内部の素材密度分布の異常による脈理
や表面の浅いキズに相当する研磨ムラ等の場合には、屈折する透過光や反射される反射光
等の検出光を光学的に捉えることが難しいので、検出した僅かな光に基づく画像の目視的
判別または観察が不可能な状況となり、同時に検出光に基づく画像データの数値も小さい
ので、機械的に判別するための検出器機の解析精度を上げる必要性があるという観点から
みても困難性を増し、こうした後者のような脈理や浅いキズ及び研磨ムラ等に対する判別
装置の需要と改善策が切望されているのが現状である。
また、光源側のコリメートレンズ等の光学系に対して受光側の撮像装置やスクリーン等は
、その外径寸法を大径化して受光範囲を大きくするのが一般的構成であり、特に光学系の
大径化の傾向は、被検レンズ上に存在する異物の部位は特定されていないことと相俟って
、隠し文字や隠しマークの場合は概ね被検レンズの周縁部付近に刻印されているのが一般
的であるので、被検レンズの全体をカバーできるように光学系の大径化を図ることは避け
得ない傾向にある。
For spectacle lenses and contact lenses in use, people use a lens checker configured to visually identify foreign matter such as scratches, dirt, dust and dirt on the front and back of the lens from the image on the light receiving screen or image pickup screen. In the case of visual observation or inspection, the following various problems existed.
That is, in the case of deep scratches on the surface of the lens to be inspected, or in the case of large scratches or foreign substances such as large dust and dirt, the refraction ratio and reflection ratio of the transmitted light transmitted through the scratches and dust are large. While it is relatively easy to grasp in terms of optics, in the case of veins due to abnormal material density distribution inside or uneven polishing corresponding to shallow scratches on the surface, transmitted light that is refracted or reflected light that is reflected Since it is difficult to optically capture the detected light such as, it becomes impossible to visually discriminate or observe the image based on the detected slight light, and at the same time, the numerical value of the image data based on the detected light is small, so that it is mechanical. It is becoming more difficult from the viewpoint that it is necessary to improve the analysis accuracy of the detector for discrimination, and the demand and improvement measures for the discrimination device for such veins, shallow scratches, uneven polishing, etc. like the latter are eagerly desired. The current situation is that it has been done.
In addition, the image pickup device, screen, etc. on the light receiving side have a general configuration in which the outer diameter dimension is increased to increase the light receiving range with respect to the optical system such as the collimating lens on the light source side, and particularly in the optical system. The tendency to increase the diameter is due to the fact that the part of the foreign matter existing on the test lens is not specified, and in the case of hidden characters and marks, it is generally engraved near the peripheral edge of the test lens. Therefore, it is unavoidable to increase the diameter of the optical system so as to cover the entire test lens.

更に、CCDカメラ等の撮像手段を受光側に設けてなる従来の撮像型レンズチェッカーの
場合、光源からの散乱光を被検レンズのバックライトとして照射し、被検レンズを明視野
照明または暗視野照明してキズ等を際立たせるようにしているが、殊に散乱光を受ける受
光側の光学系の大径化は免れないとともに、暗視野または明視野状態で観察されたキズや
汚れ、隠しマークや異物等が、レンズの表面に存在するのか裏面に存在するのかの判別を
行うためには、レンズの表面画像と裏面画像の焦点調節操作(ピント合わせ)をその都度
行って撮像し直さねばならないという煩わしさを伴っていた。
一方、撮像画像の人的な目視観察によらずに、撮像画像データを用いて被検レンズの正常
部分とキズや異物との判別を、光強度分布や輝度分布として捉えて機械的に判別または判
定するためには、輝度センサーや機械的にデータ処理するための演算処理手段が必要とな
るので、光学機器としても複雑化するうえにその演算処理手段に関する費用が嵩み、高価
になってしまう不都合を伴うものであった。
Further, in the case of a conventional image pickup type lens checker in which an image pickup means such as a CCD camera is provided on the light receiving side, scattered light from a light source is irradiated as a backlight of the test lens, and the test lens is illuminated with bright field or dark field. Although it is illuminated to make scratches stand out, the diameter of the optical system on the light receiving side that receives scattered light is inevitably increased, and scratches, stains, and hidden marks observed in the dark or bright field are inevitable. In order to determine whether foreign matter or foreign matter is present on the front surface or the back surface of the lens, it is necessary to perform a focus adjustment operation (focusing) on the front surface image and the back surface image of the lens each time to re-image. It was accompanied by the annoyance.
On the other hand, the discrimination between the normal part of the test lens and the scratch or foreign matter is grasped as the light intensity distribution or the brightness distribution by using the captured image data without human visual observation of the captured image, or the discrimination is mechanically performed. In order to make a determination, a brightness sensor and an arithmetic processing means for mechanically processing data are required, which complicates the optical equipment and increases the cost of the arithmetic processing means, resulting in high cost. It was inconvenient.

上記した如く、人的に目視観察するレンズチェッカーであって、被検レンズLを観察する
ための発光ダイオード5とピンホール板6とコリメータレンズ7とからなる照明光学系2
に対して共軸関係に対向配置された大径の投影スクリーン4等の撮像手段を設けて、スク
リーン4上の影像または影像出力画面を目視観察するように構成された先行例としては、
例えば下記特許文献1が、また、被検レンズ5を観察するための拡散板20と一体の照明
ユニット120を、対向配置されたCCDカメラ30等に対して共軸調整自在に設けて、
被検レンズ5を透過した画像データから、透過光の光強度に関する輝度分布を計測し、輝
度等を数値化して比較演算することにより機械的にキズや異物の判定を行う先行例として
は、例えば下記特許文献2が、更に被検物12の脈理を観察するために、当該被検物12
のレーザー光源1側の光路中に偏光板4をまた、受光側の撮像レンズ5の焦点位置おける
光路中にナイフエッジ6をセットで配置し、これ等の偏光板4とナイフエッジ6を同期し
て回転制御して得た画像を用いて脈理を観察する先行例として、例えば下記特許文献3が
夫々知られているが、何れも簡単かつ安価に然も小型にして被検レンズ内部の脈理や表面
の研磨ムラ等に関する判別精度の問題を解決できるものではなかった。
特開平10-132707号公報 特開平9-269276号公報 特開平7-311153号公報
As described above, it is a lens checker for human visual observation, and is an illumination optical system 2 including a light emitting diode 5 for observing the lens L to be inspected, a pinhole plate 6, and a collimator lens 7.
As a precedent example configured to visually observe an image or an image output screen on the screen 4 by providing an image pickup means such as a large-diameter projection screen 4 arranged opposite to each other in a co-axis relationship.
For example, the following Patent Document 1 also provides a lighting unit 120 integrated with a diffuser plate 20 for observing a lens 5 to be co-axis-adjustable with respect to a CCD camera 30 or the like arranged opposite to each other.
As a precedent example, for example, a scratch or a foreign substance is mechanically determined by measuring the luminance distribution related to the light intensity of the transmitted light from the image data transmitted through the lens 5 and quantifying the luminance or the like and performing a comparative calculation. The following Patent Document 2 further observes the pulse of the subject 12 in order to further observe the subject 12.
A polarizing plate 4 is arranged in the optical path on the laser light source 1 side, and a knife edge 6 is arranged as a set in the optical path at the focal position of the image pickup lens 5 on the light receiving side, and these polarizing plates 4 and the knife edge 6 are synchronized. For example, the following Patent Documents 3 are known as precedent examples for observing the pulse using an image obtained by controlling the rotation of the lens. It was not possible to solve the problem of discrimination accuracy related to the reason and uneven polishing of the surface.
Japanese Unexamined Patent Publication No. 10-132707 Japanese Unexamined Patent Publication No. 9-269276 Japanese Unexamined Patent Publication No. 7-31153

本発明における第一の解決課題は、被検レンズ自体の素材密度分布の異常に基づく脈理に
対する目視的判別を可能にするために、被検レンズを含む光学系の光路中の少なくとも受
光側において、被検レンズを透過した透過光を偏光制御するための偏光子(若しくは波長
板)を適宜組み入れ操作自在に設けることにより、被検レンズを透過した透過光のXY方
向の偏光成分を適宜制限可能となし、被検レンズ内部の脈理部分においてXY方向の偏光
成分とは異なる方向に複屈折された異常な透過光束のみを撮像手段により受光し、これを
脈理に基因した鮮明な脈理画像として得ることができるよう構成し、以って、上記先行文
献3における如き光源側の偏光板と受光側のナイフエッジとの同期的な操作と制御機構を
設けることなく、簡単な構造にして脈理に対する人的な判別や観察を、確実かつ安価に行
うことができる優れたレンズチェッカーを提供することにある。
The first problem to be solved in the present invention is at least on the light receiving side in the optical path of the optical system including the test lens in order to enable visual discrimination of the pulse based on the abnormality of the material density distribution of the test lens itself. By appropriately incorporating a polarizing element (or wave plate) for controlling the polarization of the transmitted light transmitted through the test lens and providing an operation freely, the polarization component of the transmitted light transmitted through the test lens in the XY direction can be appropriately limited. However, only the abnormal transmitted light beam that is double-reflected in a direction different from the polarization component in the XY direction in the pulse part inside the test lens is received by the imaging means, and this is a clear pulse image based on the pulse. Therefore, the pulse can be made into a simple structure without providing a synchronous operation and control mechanism between the polarizing plate on the light source side and the knife edge on the light receiving side as in the above-mentioned prior document 3. The purpose is to provide an excellent lens checker that can reliably and inexpensively perform human discrimination and observation of optics.

そして本発明における付帯的な課題として、上記先行文献1におけると同様に光源側の光
源からの照射光を制限するピンホール型の絞り手段により光束を制限し、この特定の光軸
中心光束をコリメートレンズにて平行光束として被検レンズに照射し、被検レンズを透過
させた後の光路中に設けたナイフエッジ効果を得て受光側の受像装置により被検レンズの
透過光による画像を際立たせる、所謂シュリーレン効果を得ることに関しては大きな違い
はないが、特徴とするところは、光源側においてその照射光のコリメートレンズユニット
を、光軸に対して直交する水平方向に所定量だけ相対的にスライド自在に設けることに
より、被検レンズに対する透過光の照射位置を適宜変更調節自在になし、被検レンズにお
いて屈曲された透過光束を受光可能に調整可能にすると共に、コリメートレンズ等の光学
系の大径化を押え、これにより受光側光学系の大径化をも併せて小径化することができ、
引用文献1における如き、受光側大径スクリーン(またはCCDカメラ)等の受光側光学
系の小径化を図れ、曳いてはレンズチェッカー全体として、装置の小型化を果たすことが
可能な安価な人的観察式のレンズチェッカーを提供することにある。
更にまた本発明における付帯的な課題として、引用文献2の如き機械的判定に必要な輝度
センサーや画像データの数値化のための高価な演算処理手段に代えて、撮像光学系に簡単
な光量調節手段及びナイフエッジ式の遮光切換機構を付け加えることにより、視差画像を
得るだけでなく前記したシュリーレン光学系の効果とも相俟って、被検レンズ表面におけ
る研磨ムラ等による透過光の散乱光画像の鮮明度の向上を安価に図れると共に、画像の判
別を安価に果たすことができるレンズチェッカーを提供することにある。
Then, as an incidental problem in the present invention, the light beam is limited by the pinhole type narrowing means that limits the irradiation light from the light source on the light source side as in the above-mentioned prior document 1, and the specific optical axis center light beam is collimated. The lens is irradiated with the test lens as a parallel light beam to obtain the knife edge effect provided in the optical path after the test lens is transmitted, and the image receiving device on the light receiving side makes the image by the transmitted light of the test lens stand out. There is no big difference in obtaining the so-called Schlieren effect, but the feature is that the collimated lens unit of the irradiation light is relatively slid by a predetermined amount in the horizontal direction orthogonal to the optical axis on the light source side. By freely providing it, the irradiation position of the transmitted light to the test lens can be changed and adjusted as appropriate, and the transmitted light beam bent in the test lens can be adjusted so that it can receive light, and the optical system such as a collimating lens is large. By suppressing the diameter reduction, it is possible to reduce the diameter of the optical system on the light receiving side as well as to reduce the diameter.
As in Cited Document 1, the diameter of the light-receiving side optical system such as the light-receiving side large-diameter screen (or CCD camera) can be reduced, and the lens checker as a whole can be miniaturized. The purpose is to provide an observation type lens checker.
Furthermore, as an incidental problem in the present invention, instead of the brightness sensor required for mechanical determination and the expensive arithmetic processing means for digitizing image data as in Cited Document 2, the light amount can be easily adjusted in the imaging optical system. By adding a means and a knife-edge type light-shielding switching mechanism, not only a parallax image can be obtained, but also the effect of the Schlieren optical system described above can be combined with the scattered light image of transmitted light due to uneven polishing on the surface of the lens to be inspected. It is an object of the present invention to provide a lens checker that can improve sharpness at low cost and can discriminate images at low cost.

被検レンズに対する透過光用光源と同軸的に配置されたピンホール型の絞り手段を備えた
基台の上面中央部には、被検レンズの載置台を設けると共に、当該被検レンズ載置台を貫
く光軸に対しほぼ同軸的にコリメートレンズを配置する一方、この基台上の一側に植立さ
せた支柱の上端部には、前記光源と共軸関係となるように被検レンズの表面または裏面の
画像を撮影するための対物レンズと結像レンズ、及び撮像手段からなる受光側光学系を対
向配置し、かつ当該結像レンズ及び撮像手段からなる受光側光学系に対し、少なくとも被
検レンズからの透過光のXY成分の一方を偏光するための偏光子を適宜光路中に介在操作
自在に設けて、透過光のXY成分を適宜制限した状態において、被検レンズの脈理部分に
よる複屈折光束のみを受光し、これを撮像可能に構成したことを特徴とするものである。
A mounting table for the test lens is provided at the center of the upper surface of a base provided with a pinhole type aperture means coaxially arranged with a light source for transmitted light for the test lens, and the test lens mounting table is provided. While the collimating lens is arranged almost coaxially with the penetrating optical axis, the surface of the lens under test is placed on the upper end of the column planted on one side of the base so as to have a co-axis relationship with the light source. Alternatively, an objective lens for capturing an image on the back surface, an imaging lens, and a light receiving side optical system composed of an imaging means are arranged to face each other, and at least the light receiving side optical system composed of the imaging lens and the imaging means is inspected. A decoder for polarizing one of the XY components of the transmitted light from the lens is appropriately provided in the optical path as an intervening operation, and the XY components of the transmitted light are appropriately restricted. It is characterized in that it receives only the refracted light beam and is configured to be capable of imaging.

更に、本発明における上記受光側光学系を構成する撮像手段の光路中には、光学的受光範
囲の光軸中心にナイフエッジが位置して視野の半分を交互に遮ることができる遮光切換手
段を、光軸に対する直交軸線に沿って同一平面内で進退操作自在に設けると共に、当該遮
光切換手段と一体的に、上記透過光のXY成分を制限するための偏光子若しくは波長板を
設け、各要素の切換操作の手順が一義的に行われるよう構成したことを特徴とするもので
ある。
加えて、本発明における上記光源側光学系を構成するよう基台の上面中央部に設けた被検
レンズ載置台を貫く光軸に対し、ほぼ同軸的に配置したコリメートレンズを、光軸に対し
て直交する水平方向に相対的にスライド移動調節自在に配置してなり、当該コリメートレ
ンズを僅かに移動操作することにより、被検レンズに対する透過光の照射位置を移動調節
自在に構成したことを特徴とするものである。
Further, in the optical path of the image pickup means constituting the light receiving side optical system in the present invention, a light shielding switching means capable of alternately blocking half of the field of view by locating a knife edge at the center of the optical axis of the optical light receiving range. , A polarizing element or a wave plate for limiting the XY component of the transmitted light is provided integrally with the light-shielding switching means, and each element is provided so as to be freely advancing and retreating in the same plane along the orthogonal axis with respect to the optical axis. It is characterized in that the procedure of the switching operation of is uniquely performed.
In addition, a collimated lens arranged substantially coaxially with the optical axis penetrating the test lens mounting table provided in the center of the upper surface of the base so as to form the light source side optical system in the present invention is provided with respect to the optical axis. It is characterized by being arranged so that the slide movement can be adjusted relatively in the horizontal direction orthogonal to each other, and by slightly moving the collimating lens, the irradiation position of the transmitted light to the test lens can be moved and adjusted. Is to be.

本発明のレンズチェッカーは、被検レンズに対する透過光用光源と同軸的に配置されたピ
ンホール型の絞り手段を備えた基台の上面中央部には、被検レンズの載置台を設けると共
に、当該被検レンズ載置台を貫く光軸に対しコリメートレンズを配置する一方、この基台
上の一側に植立させた支柱の上端部には、前記光源と共軸関係となるように被検レンズの
表面または裏面の画像を撮影するための対物レンズと結像レンズ、及び撮像手段からなる
受光側光学系を対向配置し、かつ当該結像レンズ及び撮像手段からなる受光側光学系に対
し、少なくとも被検レンズからの透過光のXY成分の一方を偏光させるための偏光子を適
宜光路中に介在操作自在に設けて、透過光のXY成分を適宜制限した状態において被検レ
ンズの脈理部分による複屈折光束のみを受光し、これを撮像可能に構成したので、被検レ
ンズ本体における脈理を透過した複屈折光束のみを正常部分からの透過光成分が遮断され
ているために際立たせることができ、これに依る脈理部分の鮮明な画像を得ることができ
るから、今まで人的目視判別が困難とされてきた脈理を容易に目視判別することができる
優れた機能を発揮できるのである。
そして、本発明において特徴とするところは、上記受光側光学系を構成する撮像手段の光
路中には、光学的受光範囲の光軸中心にナイフエッジが位置して視野の半分(水平面内で
の左右方向、或いは前後方向の半分)を交互に遮ることができる遮光切換手段を、光軸に
対する直交軸線に沿って同一平面内で進退操作自在に設けると共に、当該遮光切換手段と
一体的に上記透過光のXY成分を制限するための偏光子若しくは波長板を設け、各切換操
作の手順が一義的に行われるよう構成したので、ナイフエッジや偏光子を必要とするよう
な作業に応じて、本発明のレンズメーター装置においては、光路中への切換え操作を行う
に際しその操作手順が必ず順番に行われることとなり、即ち同時にナイフエッジと偏光子
を光路中にセットする恐れがないので、誤った操作をすることが確実に防止され、安全性
と正確性に優れた検査や観察作業が保障され、然も例えば、これ等を自動的に操作するた
めの駆動アクチュエータを設ける場合であっても、単一の駆動系で済むために構成上経済
的である等、装置として優れた操作性と経済性を兼ね備えた実用的効果を発揮することが
できるものである。
In the lens checker of the present invention, a mounting table for the test lens is provided in the center of the upper surface of a base provided with a pinhole type aperture means coaxially arranged with a light source for transmitted light for the test lens. While the collimating lens is placed with respect to the optical axis penetrating the lens mounting table, the upper end of the column planted on one side of the base is tested so as to have a co-axis relationship with the light source. An objective lens for capturing an image of the front surface or the back surface of the lens, an imaging lens, and a light receiving side optical system composed of an imaging means are arranged to face each other, and the light receiving side optical system composed of the imaging lens and the imaging means is arranged. A polarizing element for polarizing at least one of the XY components of the transmitted light from the test lens is appropriately provided in the optical path so that the XY components of the transmitted light are appropriately restricted. Since only the double-reflected light beam is received and can be imaged, only the double-reflected light beam transmitted through the pulse in the subject lens body is made to stand out because the transmitted light component from the normal part is blocked. Since it is possible to obtain a clear image of the lens portion due to this, it is possible to exert an excellent function of easily visually discriminating the lens, which has been difficult to visually discriminate by humans. be.
The feature of the present invention is that a knife edge is located at the center of the optical axis of the optical light receiving range in the optical path of the image pickup means constituting the light receiving side optical system, and half of the field of view (in the horizontal plane). A light-shielding switching means capable of alternately blocking the left-right direction or half of the front-back direction) is provided so as to be able to freely advance and retreat in the same plane along the axis orthogonal to the optical axis, and the light-shielding switching means is integrated with the light-shielding switching means. A polarizing element or a wave plate for limiting the XY component of light is provided, and the procedure of each switching operation is uniquely performed. In the lens meter device of the present invention, when switching to the optical path, the operation procedure is always performed in order, that is, there is no risk of setting the knife edge and the transducer in the optical path at the same time, so that the operation is erroneous. It is surely prevented from doing so, and the inspection and observation work with excellent safety and accuracy are guaranteed. Even if, for example, a drive actuator for automatically operating these is provided, it is only possible. Since it requires only one drive system, it is economical in terms of configuration, and can exhibit practical effects having excellent operability and economic efficiency as a device.

なお、当然のことながら被検レンズにおける表面のキズやゴミ等は、上記脈理と比べて透
過光の散乱が顕著であるので、得られる画像に基づく目視判別を今まで通り容易に行える
ことは勿論であり、更に、被検レンズ表面の研磨ムラについても、被検レンズの透過光が
研磨ムラの為に散乱光となって受光されるに際しても、特に光量の強い光軸中心付近の
透過光がナイフエッジにより制限されて周辺の散乱光部分が見やすくなり、研磨ムラと
して明暗がはっきりした鮮明な画像として撮像できるから、その判別を精度よく然も人的
に容易に行うこともでき、然も輝度センサーや高価な演算処理手段等を用いる必要がない
ので、安価にかつ確実に判別または観察を行える優れたれた実用的効果を発揮できるので
ある。
As a matter of course, scratches and dust on the surface of the lens under test have more remarkable scattering of transmitted light than the above-mentioned pulse, so that visual discrimination based on the obtained image can be easily performed as before. Of course, regarding uneven polishing of the surface of the test lens, even when the transmitted light of the test lens is received as scattered light due to uneven polishing, the transmitted light near the center of the optical axis, which has a particularly strong amount of light, is received. However, it is limited by the knife edge, making it easier to see the scattered light around it, and it is possible to capture a clear image with clear contrast as polishing unevenness. Since it is not necessary to use a brightness sensor, an expensive arithmetic processing means, or the like, it is possible to exert an excellent practical effect of being able to discriminate or observe inexpensively and reliably.

また本発明のレンズチェッカーは、上記基台の上面中央部に設けた被検レンズ載置台を貫
く光軸に対しほぼ同軸的に配置したコリメートレンズを、光軸に対して直交する水平方向
に相対的にスライド移動調節自在に配置してなり、当該コリメートレンズを僅かに水平移
動操作することにより、被検レンズに対する透過光の照射位置を被検レンズに移動調節自
在に構成してあるので、一般的に被検レンズの周縁部近傍に設けられていることが多い隠
しマークの観察にも適しているばかりでなく、ピンホール型の絞り手段により屈折された
光源からの照射光が被検レンズから外れてしまうようなことがあっても、コリメートレン
ズを左右(或いは前後)方向へ僅かに水平移動操作することにより、照射光が被検レンズ
から外れることなく適宜被検レンズを照射することができ、被検レンズを透過した透過光
を受光側の光学系により確実に捉えることができるので、これ等の光学機器について、少
なくとも水平移動操作可能な範囲で小径化することができ、装置全体としてみても安価に
小型化を果すことが可能な優れた効果を併せて発揮できるのである。
Further, in the lens checker of the present invention, collimated lenses arranged substantially coaxially with the optical axis penetrating the test lens mounting table provided in the center of the upper surface of the base are relative to each other in the horizontal direction orthogonal to the optical axis. By arranging the collimating lens so that the slide movement can be adjusted, and by slightly moving the collimating lens horizontally, the irradiation position of the transmitted light to the test lens can be moved and adjusted to the test lens. Not only is it suitable for observing hidden marks that are often provided near the peripheral edge of the subject lens, but also the irradiation light from the light source refracted by the pinhole type aperture means is emitted from the subject lens. Even if the collimating lens may come off, by slightly moving the collimating lens horizontally in the left-right (or front-back) direction, it is possible to irradiate the subject lens as appropriate without the irradiation light coming off the subject lens. Since the transmitted light transmitted through the lens under test can be reliably captured by the optical system on the light receiving side, the diameter of these optical devices can be reduced at least within the range in which horizontal movement operation is possible, and the device as a whole can be viewed. However, it can also exert an excellent effect that can be miniaturized at low cost.

更に本発明の撮像型レンズチェッカーは、遮光切換手段として同一平面内にナイフエッジ
が具備されているので、光学的な視野の半分、例えば、左右方向の半分に関し一方(右半
分)の画像に対する他方(左半分)の透過光が干渉することがないよう互いに遮光できる
ので、夫々の半分毎の画像を鮮明な画像として撮像することができて観察画像の人的な読
み取りや判別の精度を大幅に向上し得るという優れた効果を併せて発揮する。
Further, since the image pickup type lens checker of the present invention is provided with a knife edge in the same plane as a light blocking switching means, the other half of the optical field of view, for example, the other half in the left-right direction with respect to one (right half) image. Since the transmitted light of the (left half) can be shielded from each other so that they do not interfere with each other, each half of the image can be captured as a clear image, and the accuracy of human reading and discrimination of the observed image is greatly improved. It also has the excellent effect of being able to improve.

本発明のレンズチェッカーの全体構成の一実施例を示す斜視図A perspective view showing an embodiment of the overall configuration of the lens checker of the present invention. 本発明のレンズチェッカーの一実施例における本体部分の説明用縦断面図A vertical sectional view for explaining a main body portion in an embodiment of the lens checker of the present invention. 図1におけるA-A矢視方向から見た基台部分の拡大断面図Enlarged cross-sectional view of the base portion seen from the direction of the arrow AA in FIG. 本発明のレンズチェッカーにおける説明用光学線図Optical diagram for explanation in the lens checker of the present invention 本発明のレンズチェッカーにおける脈理撮像原理を示す光学説明図An optical explanatory view showing the principle of pulse imaging in the lens checker of the present invention. 本発明のレンズチェッカーにおける偏光子と遮光切換手段を一体化した一実施例を示す拡大平面図An enlarged plan view showing an embodiment in which a polarizing element and a light-shielding switching means in the lens checker of the present invention are integrated. 本発明のレンズチェッカーにより脈理を捉えた説明用写真An explanatory photograph that captures the pulse with the lens checker of the present invention.

本発明のレンズチェッカーの一実施例を図面に基づいて説明する。
先ず、本発明のレンズチェッカーの全体を示す図1において、基台1の上面中央部には、
内蔵された透過光用光源2からの照射光に対応させて、例えば、50ミクロン程度のピン
ホール2bを中央に穿孔した絞り手段としての絞り板2aが光源2に近接しかつ同軸的に
設けられ、中央に穿孔されたピンホール2bからの中心軸近傍の外乱光の少ない照射光束
を、光軸に対する所定の屈折角度を与えて通過させ、後述の被検レンズ載置台3における
被検レンズLeへと対応するコリメートレンズユニット4(図2,図3参照)による平行
光として照射されるよう構成されている。
そして本発明の一実施例における光源側においては、図2及び図3に詳述してあるように
、レンズチェッカー装置の基台1上には、光源2の光量を調節するための操作ダイヤル1
aが設けられていると共に、光源2と共軸関係を保ち、被検レンズ載置用の透明ガラス板
3aを図示実施例の場合は、例えば黒色円筒状のプラスチック製筒体3bの頂部に組付け
られてなる被検レンズ載置台3が、その支持アーム部材3cにより片持ち支持状態に配置
され、然も当該載置台3は、片持ち支持部の調節摘み3dを例えば手動でネジ操作するこ
とにより、光軸に沿って同一軸線上を少なくとも上下方向に移動操作自在に取付けられお
り、後述する受光側の撮像手段9の合焦点位置を適宜変更調節自在に光源側光学系が構成
されている。
なお、上記被検レンズ載置用の透明ガラス板3aやプラスチック製筒体3bは円形或いは
円筒状に限られるものではなく、例えば四角形のものを採用して被検レンズ載置台3を構
成しても良いことは言うまでもない。
An embodiment of the lens checker of the present invention will be described with reference to the drawings.
First, in FIG. 1 showing the entire lens checker of the present invention, the central portion of the upper surface of the base 1 is shown.
Corresponding to the irradiation light from the built-in transmitted light light source 2, for example, a diaphragm plate 2a as a diaphragm means in which a pinhole 2b of about 50 microns is perforated in the center is provided close to and coaxially with the light source 2. , An irradiation light beam with a small amount of ambient light near the central axis from the pinhole 2b drilled in the center is passed through with a predetermined refractive angle with respect to the optical axis, and is passed to the lens Le on the lens mounting table 3 to be described later. It is configured to be irradiated as parallel light by the collimating lens unit 4 (see FIGS. 2 and 3) corresponding to the above.
On the light source side in one embodiment of the present invention, as described in detail in FIGS. 2 and 3, an operation dial 1 for adjusting the amount of light of the light source 2 is placed on the base 1 of the lens checker device.
In the case of the illustrated embodiment, the transparent glass plate 3a for mounting the test lens is assembled on the top of, for example, a black cylindrical plastic cylinder 3b while maintaining the coaxial relationship with the light source 2 while providing a. The attached test lens mounting table 3 is arranged in a cantilever support state by the support arm member 3c, and the mounting table 3 still manually screw-operates the adjustment knob 3d of the cantilever support portion, for example. Therefore, the optical system on the light source side is configured so that it can be freely moved and operated at least in the vertical direction on the same axis along the optical axis, and the focal position of the image receiving means 9 on the light receiving side, which will be described later, can be appropriately changed and adjusted. ..
The transparent glass plate 3a and the plastic cylinder 3b for mounting the test lens are not limited to a circular or cylindrical shape, and for example, a quadrangular one is used to form the test lens mounting table 3. Needless to say, it is also good.

更に本発明の光源側における特徴は、上記被検レンズ載置台3の筒体3bの筒体内側にお
いて、筒体3bとほぼ同軸的に一定の隙間を保ちつつ、例えば比較的小径な集光用レンズ
群4a、4b、4cから構成された照射光のコリメートレンズユニット4が組合されてお
り、かつ、当該コリメートレンズユニット4は、基台1上に水平に設けられたスライド式
のガイド部材4dによって片持ち支持状態のまま筒体3b内の空中に支持されていると共
に、当該支持部に取付けられた調節摘み4eを手動でネジ操作することにより、基台1に
対して装置正面から見て例えば、上記被検レンズ載置台3を貫く光軸に対して直交する水
平面内で左右或いは前後方向へと、筒体3bの内面に対する嵌合隙間で許容される寸法に
応じて相対的に光軸と平行関係を保持したまま僅かに移動操作自在に構成されているので
、この相対的な移動操作により、コリメートレンズユニット4を経た照射光が被検レンズ
Leへと照射可能(図4の光学線図参照)であると共に、被検レンズLeにより屈曲を受
けた透過光束を受光側において受光することが可能であるので、一般的に被検レンズの周
縁部近傍に設けられていることが多い隠しマークなどを観察するのに便利なように構成さ
れているばかりでなく、例えば被検レンズLeがハイカーブレンズやコンタクトレンズな
どのように傾斜面や曲率半径が小さな面への入射時に透過光束を受光する上で有利な機構
であり、かつ、これ等の操作機構により機器全体の小型化を可能にしているのである。
なお、図示実施例においては、光源側光学系に点光源2及びピンホール2bとコリメート
レンズユニット4を用いて、撮像側における画像の鮮明度を得るのに有利な平行光束を用
いた事例を示してあるが、これ等の光学系における光源2やコリメートレンズユニット4
の構成は、本発明の実施例に限定されるものではなく、例えば安定したLED白色光源を
採用し、或いは両者の光源を備えて作業に合わせて光源を切換使用可能に構成する等々、
必要に応じて変更実施してもよい。
Further, the feature on the light source side of the present invention is that, for example, for light collection with a relatively small diameter while maintaining a constant gap substantially coaxially with the cylinder 3b inside the cylinder 3b of the lens mounting table 3 to be inspected. A collimating lens unit 4 for irradiation light composed of lens groups 4a, 4b, and 4c is combined, and the collimating lens unit 4 is provided by a slide-type guide member 4d horizontally provided on a base 1. While being supported in the air inside the tubular body 3b while still in the cantilever support state, by manually screwing the adjustment knob 4e attached to the support portion, for example, when viewed from the front of the device with respect to the base 1. In the horizontal plane orthogonal to the optical axis penetrating the lens mounting table 3 above, the optical axis is relative to the optical axis according to the size allowed by the fitting gap with respect to the inner surface of the tubular body 3b. Since the lens is configured to be slightly movable while maintaining the parallel relationship, the irradiation light passing through the collimating lens unit 4 can be irradiated to the lens Le to be inspected by this relative movement operation (optical diagram of FIG. 4). (See), and since it is possible to receive the transmitted light beam bent by the test lens Le on the light receiving side, a hidden mark that is generally provided near the peripheral edge of the test lens is often provided. Not only is it configured to be convenient for observing, for example, the lens Le to be inspected receives transmitted light beam when it is incident on an inclined surface or a surface having a small radius of curvature such as a high curve lens or a contact lens. It is an advantageous mechanism in terms of the above, and it is possible to reduce the size of the entire device by these operation mechanisms.
In the illustrated embodiment, an example is shown in which a point light source 2, a pinhole 2b, and a collimating lens unit 4 are used for the optical system on the light source side, and a parallel light beam advantageous for obtaining sharpness of an image on the image pickup side is used. However, the light source 2 and the collimating lens unit 4 in these optical systems
The configuration is not limited to the embodiment of the present invention, for example, a stable LED white light source is adopted, or both light sources are provided so that the light source can be switched and used according to the work.
Changes may be implemented as necessary.

また、本発明の基本的な特徴として図示の実施例においては、一例として上記光源側光学
系の被検レンズ載置台3における透明ガラス板3aに対し、適宜近接或いは重合させて第
一の偏光子(若しくは第一の波長板)20aを同軸的に配置し、照射光におけるXY成分
のうちの何れかの成分、例えば、図5に示す如くX成分を遮断して残りのY成分のみに選
別制御された偏光光束として被検レンズLeに照射するようになし、かかる特定の(Y成
分)の透過光による被検レンズLeにおける正常部分を透過した透過光束に対する遮光制
御と相俟って、被検レンズLeにおける異常な密度分布を持つ脈理21aの部分を透過し
て複屈折された透過光束のみを、受光側における検出光とするよう構成されている。
一方、基台1の上面一側に植設した支柱5の上端部には受光側光学系として図2に示すよ
うに、上記透過光用光源2と共軸関係の下に載置台3の透明ガラス板3aと対向するよう
被検レンズLeを透過してきた透過光束による映像を撮像するための撮像手段9(例えば
CMOS等)をオーバーハング状態に、対物レンズ6a及び結像レンズユニット6b、6
c、6dとからなる結像レンズユニット6と共に支持してなり、当該撮像手段9により得
た画像データをパソコンまたはタブレットなどにおけるディスプレイ画面(図示せず)に
拡大表示し、この画面を人的に観察または検査するようにされ、これ等構成は従来の撮像
型レンズメーターの構成と基本的な違いはないが、本発明の場合における特徴的な構成と
して、上記光源側の第一の偏光子20aに対応させて受光側光学系の光路中に第二の偏光
子(若しくは第二の波長板)20bを適宜光路内に進退操作自在に配置し、例えば図5に
一例を示す如く、上記第一の偏光子20aにてX成分がカットされてY成分のみの透過光
を、更にこの第二の偏光子20bにより偏光することにより暗視野状態を作り出し、こう
した透過光の主成分の遮断状態において上記したように、被検レンズLeに複屈折を発生
させる脈理21aが存在している場合には、複屈折された透過光が第一と第二の偏光子2
0a、20bを通り抜けて受光されることとなり、これが白色の脈理画像21bとして撮
像手段9により撮像することができるよう構成されおり、今まで目視判別などが困難とさ
れていた脈理の目視判別及び検査を確実に行うことができるのである。
なお図中9aは、撮像手段9のピントを微調整するための操作摘みを示す。
Further, as a basic feature of the present invention, in the illustrated embodiment, as an example, the first polarizing element is appropriately brought close to or overlapped with the transparent glass plate 3a in the test lens mounting table 3 of the light source side optical system. (Or the first wavelength plate) 20a is arranged coaxially, and any component of the XY components in the irradiation light, for example, the X component is blocked as shown in FIG. 5, and the selection control is performed only for the remaining Y component. The lens Le to be examined is irradiated as the polarized light beam, and the light emission of the specific (Y component) transmitted light is combined with the light shielding control for the transmitted light beam transmitted through the normal portion of the lens Le to be examined. Only the transmitted light beam transmitted through the portion of the pulse 21a having an abnormal density distribution in the lens Le and double-reflected is used as the detection light on the light receiving side.
On the other hand, as shown in FIG. 2, the upper end of the support column 5 planted on one side of the upper surface of the base 1 is transparent as the light receiving side optical system of the mounting base 3 under the coaxial relationship with the transmitted light light source 2. The objective lens 6a and the imaging lens unit 6b, 6 are placed in an overhang state with the imaging means 9 (for example, CMOS or the like) for capturing an image by the transmitted light beam transmitted through the test lens Le so as to face the glass plate 3a.
It is supported together with the imaging lens unit 6 composed of c and 6d, and the image data obtained by the imaging means 9 is enlarged and displayed on a display screen (not shown) of a personal computer or a tablet, and this screen is displayed humanly. It is designed to be observed or inspected, and these configurations are not basically different from the configurations of the conventional imaging type lens meter, but as a characteristic configuration in the case of the present invention, the first polarizing element 20a on the light source side is used. A second polarizing element (or a second wave plate) 20b is appropriately arranged in the optical path of the light receiving side optical system so as to be able to move forward and backward in the optical path. The X component is cut by the polarizing element 20a of the above, and the transmitted light of only the Y component is further polarized by the second polarizing element 20b to create a dark field state. As described above, when the test lens Le has a pulse 21a that causes double refraction, the double refracted transmitted light is the first and second polarizing elements 2.
The light is received through 0a and 20b, and this is configured so that it can be imaged by the imaging means 9 as a white pulse image 21b. And the inspection can be performed reliably.
Note that 9a in the figure indicates an operation knob for finely adjusting the focus of the image pickup means 9.

加えて本発明では、更なる付帯的特徴の一つとして、図2乃至図4に示すように、光源側
においては照射光用光源2からの照射光が、絞り板2aのピンホール効果を受けた制限光
として屈折され、更に絞り板2aと同軸的に配置されたコリメートレンズユニット4を介
して載置台3の背面から照射されるのに対し、受光側においては、載置台3に対峙させた
対物レンズ6aにより、被検レンズLeを透過した平行光によるレンズ表面画像または背
面画像として結像レンズユニット6へと導き、その画像を撮像手段9に結像させる基本的
光学系において、当該撮像手段9の手前の光路中に、光量調節自在な例えば光路面積を連
続的に絞って変更する如き、例えば虹彩絞り形式の可変絞り手段7と、光学的受光範囲の
光軸中心にナイフエッジ8a、8bが位置して視野の半分(例えば、水平面内での左右方
向、或いは前後方向の半分)を交互に同一平面内で遮ることができるように構成(図6参
照)された遮光切換手段8を、光軸に対する直交軸線に沿って進退操作自在に装備してな
り、当該遮光切換手段8により上記撮像手段9において視差画像を必要に応じ適宜撮影可
能に構成されていることである。
即ち、本発明の遮光切換手段8は図6に示すように、光学的視野における例えば右側の半
円部分と左側の半円部分とを、各々ナイフエッジ8a、8bにより遮るよう配置されてい
ると共に、結像レンズユニット6の光軸に対して直交する軸線に沿って、当該遮光切換手
段8の何れかのナイフエッジ8aまたは8bを光路内へ選択的に進入退出操作自在に設け
られ、ナイフエッジ8a、8bの何れかで中心光束が遮られた透過光束が、遮られていな
い側の半円形の透過光束に干渉して回析画像に影響を及ぼすことのないように配置され、
夫々鮮明な視差像が得られるよう構成してなり、一般的な被検レンズ表面のキズと埃また
はゴミ等は勿論のこと、表面における研磨ムラの目視的判別並びに観察を高価な演算処理
手段を用いることなく、人的に容易にしかも安価に行えるようにしたものである。
In addition, in the present invention, as one of further incidental features, as shown in FIGS. 2 to 4, on the light source side, the irradiation light from the irradiation light light source 2 receives the pinhole effect of the aperture plate 2a. It is refracted as limiting light and is further irradiated from the back surface of the mounting table 3 via the collimating lens unit 4 arranged coaxially with the aperture plate 2a, whereas on the light receiving side, it faces the mounting table 3. In a basic optical system in which an objective lens 6a guides an image forming lens unit 6 as a lens surface image or a back image by parallel light transmitted through a lens Le to be imaged, and the image is formed on the image pickup means 9, the image pickup means. In the optical path in front of 9, for example, a variable aperture means 7 in the form of an iris aperture, such as continuously narrowing and changing the optical path area in which the amount of light can be adjusted, and knife edges 8a and 8b at the center of the optical axis of the optical light receiving range. The light-shielding switching means 8 is configured so that half of the field of view (for example, the left-right direction in the horizontal plane or the half in the front-back direction) can be alternately blocked in the same plane (see FIG. 6). It is equipped with a light-shielding switching means 8 that can be freely moved forward and backward along an axis orthogonal to the optical axis, and is configured so that the image pickup means 9 can appropriately capture a disparity image as needed.
That is, as shown in FIG. 6, the shading switching means 8 of the present invention is arranged so as to block, for example, the right semicircular portion and the left semicircular portion in the optical field by the knife edges 8a and 8b, respectively. Along an axis orthogonal to the optical axis of the imaging lens unit 6, a knife edge 8a or 8b of any of the light-shielding switching means 8 is selectively provided in the optical path so that the knife edge can be freely entered and exited. The transmitted light beam whose central light beam is blocked by either 8a or 8b is arranged so as not to interfere with the semicircular transmitted light beam on the unobstructed side and affect the diffracted image.
Each of them is configured to obtain a clear parallax image, and it is an expensive arithmetic processing means for visually discriminating and observing polishing unevenness on the surface as well as general scratches and dust or dust on the surface of the lens to be inspected. It is designed so that it can be easily and inexpensively performed by humans without using it.

因みに図6の実施例においては、前記第二の偏光子20bを、結像レンズユニット6及び
撮像手段9による受光側光学系における遮光切換手段8と操作性を確保するために一体的
に並列的に設けた事例を例示したが、操作手順などの適当な誤作動防止手段を別途設ける
ことが可能であれば、偏光子20bを遮光切換手段8と一体的に設ける必要はなく、適宜
光学的な光路内に同軸的に配置することができるのであれば、夫々別体的に設けることも
可能であるが、一体的に構成する方が駆動系を単一にできるので構成上有利であると共に
、操作性と誤作動防止効果を簡単な構成で実現できるので有利である。
また、撮像手段9に至る手前の受光側光路内において、レイアウトに制約を受けない場合
には、前記光源側に設けた第一の偏光子20aを廃止して当該第一及び第二偏光子20a
及び20bを近接重合構造として組合せ、少なくとも受光側の光路内に配置してもよく、
更に、これ等の偏光子20a、20bは、被検レンズの透過光の波長成分を遮断制御可能
な波長板を代替採用して、透過光束を制限するよう操作することもできる等、これ等の何
れの構成を採用するかは、当業者ならば本発明の要旨を逸脱しない範囲において適宜選択
し採用実施することが可能である。
Incidentally, in the embodiment of FIG. 6, the second polarizing element 20b is integrally parallel to the light-shielding switching means 8 in the light-receiving side optical system by the imaging lens unit 6 and the imaging means 9 in order to ensure operability. However, if it is possible to separately provide an appropriate malfunction preventing means such as an operation procedure, it is not necessary to integrally provide the polarizing element 20b with the light-shielding switching means 8, and it is appropriately optical. If they can be arranged coaxially in the optical path, they can be provided separately, but it is advantageous in terms of configuration because the drive system can be unified if they are configured integrally. It is advantageous because operability and malfunction prevention effect can be realized with a simple configuration.
Further, if the layout is not restricted in the optical path on the light receiving side in front of the image pickup means 9, the first and second polarizing elements 20a provided on the light source side are abolished.
And 20b may be combined as a proximity polymerization structure and arranged at least in the optical path on the light receiving side.
Further, these splitters 20a and 20b can be operated to limit the transmitted luminous flux by using a wave plate capable of blocking and controlling the wavelength component of the transmitted light of the test lens as an alternative. It is possible for a person skilled in the art to appropriately select and adopt which configuration is adopted without departing from the gist of the present invention.

更に本発明の実施例では、前記ナイフエッジ8a、8bを備えた遮光切換手段8には、例
えば絞り摘み7aまたはダイヤル(図示せず)を操作して光路面積を連続的に変更調節自
在な虹彩絞り形式の可変絞り手段7が一体的に設けられており、当該可変絞り手段7は遮
光切換手段8と同様に、結像レンズユニット6の光軸に対して直交する軸線に沿い光路内
へ選択的に進入退出操作自在に設けられ、これにより撮像手段9に対する絞り調節効果に
より画像の明るさを自由に調節し、被検レンズ表面のキズの判別観察を人的に行うことが
有利なように構成したことである。
なお、図6に例示した可変絞り手段7とナイフエッジ8a、8b及び上記偏光子20b等
の形態は、この図示実施例に限るものではなく、例えばこれ等を一体的に組合せることな
く個別に設けて夫々個別に操作するように構成しても良いが、一体的に構成した方が、前
記したように、切換え操作手順を間違いなく行うことが確実になるばかりでなく、操作用
の駆動系アクチュエータを必要とする場合にも単一系で済むので経済的にも有利で好まし
く、またその他に手動操作を自動操作方式に構成すること等々の変更は、本発明の基本的
な目的と効果を逸脱しない限り何れの構成を採用しても構わない。
また、可変絞り手段7の形式も実施例に限らないこと勿論である。
Further, in the embodiment of the present invention, the light-shielding switching means 8 provided with the knife edges 8a and 8b is an iris whose optical path area can be continuously changed and adjusted by operating, for example, a diaphragm knob 7a or a dial (not shown). A diaphragm-type variable diaphragm means 7 is integrally provided, and the variable diaphragm means 7 is selected in the optical path along an axis orthogonal to the optical axis of the imaging lens unit 6, similarly to the light-shielding switching means 8. It is provided so that the entry / exit operation can be freely performed, whereby the brightness of the image can be freely adjusted by the aperture adjustment effect on the image pickup means 9, and it is advantageous to perform human discrimination observation of scratches on the surface of the lens to be inspected. It was configured.
The form of the variable diaphragm means 7, the knife edges 8a, 8b, the polarizing element 20b, and the like illustrated in FIG. 6 is not limited to this illustrated embodiment, and for example, they are individually combined without being integrally combined. It may be provided and configured to be operated individually, but if it is configured integrally, not only is it certain that the switching operation procedure is performed without fail, but also the drive system for operation is ensured. Even when an actuator is required, it is economically advantageous and preferable because it requires only a single system, and other changes such as configuring manual operation to an automatic operation method have the basic purpose and effect of the present invention. Any configuration may be adopted as long as it does not deviate.
Further, it goes without saying that the type of the variable aperture means 7 is not limited to the embodiment.

以下、本発明のレンズチェッカーの操作手順並びに観察要領等について、添付図面を参照
しつつ説明する。
先ず本発明のレンズチェッカーでは、被検レンズの検査または観察を開始するにあたり、
基台1のレンズ載置台3の上面に被検レンズLe(丸レンズであるか眼鏡フレーム入りの
レンズであるかは問わない)を載せて、照射用光源2の光量を操作ダイヤル1aにより調
節しながら被検レンズLeからの透過光の画像を撮像手段9により撮影し、この撮像デー
タをパソコンなどに送信してディスプレイ画面に表示し、被検レンズの内部欠陥や表面の
キズと隠しマーク、或いはキズや埃または汚れなどを人的に観察検査するのであるが、前
者のような表面のキズと隠し文字やマークなどの場合には、その操作手順や観察要領等は
概ね従来のものと変わりはなく、可変絞り手段7の操作摘みまたはダイヤル操作(手動と
自動を問わない)により、画像の明るさと鮮明度を調整して観察する。
Hereinafter, the operation procedure of the lens checker of the present invention, the observation procedure, and the like will be described with reference to the attached drawings.
First, in the lens checker of the present invention, when inspecting or observing the lens under test, the inspection or observation is started.
The test lens Le (whether it is a round lens or a lens with a spectacle frame) is placed on the upper surface of the lens mounting table 3 of the base 1, and the light intensity of the irradiation light source 2 is adjusted by the operation dial 1a. However, an image of the transmitted light from the test lens Le is taken by the image pickup means 9, and this image pickup data is transmitted to a personal computer or the like and displayed on the display screen, and internal defects of the test lens, scratches on the surface, and hidden marks, or We humanly observe and inspect scratches, dust, dirt, etc., but in the case of surface scratches such as the former and hidden characters and marks, the operation procedure and observation procedure are almost the same as the conventional ones. Instead, the brightness and sharpness of the image are adjusted and observed by the operation knob or dial operation (whether manual or automatic) of the variable aperture means 7.

ここで重要なことは、本発明の場合、図4に示す光学線図からも明らかなように、絞り板
2aにおけるピンホール効果のために照射光が屈折されても、被検レンズの周縁部に対す
るコリメート光が外れずに照射できるということである。更に詳述するならば、コリメー
トレンズユニット4等の照射光側の光学系や対物レンズ6a等の受光側の光学系を夫々大
径に構成しなくても、即ちコリメートレンズユニット4による光束の照射位置が被検レン
ズLeから外れることのないように、照射光の照射位置を僅かに移動操作可能であるため
、特に被検レンズLeの周縁部に付与されていることが多い隠し文字やマークについても
、大径の光学系を用いることなく確実に観察できることである。
例えば、使用中の眼鏡フレームに枠入れされた眼鏡レンズの隠しマークなどを観察する場
合の手順の一例を説明するに、先ず、載置台3の透明ガラス板3a上に図示してない眼鏡
レンズを置いて、そのレンズ周縁部付近の隠し文字やマークを見つける。
この時、光源2からの照射光が眼鏡フレームを外れて照射されてしまうような場合であっ
ても、前述したように調節摘み4eを手動でネジ操作してコリメートレンズユニット4を
水平方向の右または左に僅かに相対的に摺動移動させ、これにより照射する平行光が眼鏡
レンズを透過するように調節することにより、当該透過光を受光側において受光できるの
で、例えハイカーブレンズのような場合であっても、隠し文字やマークを画像として確認
することができる。
更に隠し文字やマークを確認できた後において光学中心位置を求めるためには、レンズ性
能の特性として一般に知られている隠し文字やアライメントマーク間距離の34mmの丁
度半分の距離に相当する17mmだけレンズ中心寄りに移動した位置を、被検眼鏡レンズ
の光学中心位置としてマーキングすればよいので、このマーキングを利用して使用中の被
検レンズとフレームとの適合性などを確認評価すればよい。
What is important here is that, in the case of the present invention, as is clear from the optical diagram shown in FIG. 4, even if the irradiation light is refracted due to the pinhole effect in the diaphragm plate 2a, the peripheral portion of the lens to be inspected. It means that the collimated light can be irradiated without coming off. More specifically, even if the optical system on the irradiation light side such as the collimating lens unit 4 and the optical system on the light receiving side such as the objective lens 6a are not configured to have large diameters, that is, irradiation of the light beam by the collimating lens unit 4 Since the irradiation position of the irradiation light can be slightly moved so that the position does not deviate from the lens Le to be inspected, especially for hidden characters and marks often attached to the peripheral edge of the lens Le to be inspected. However, it is possible to observe reliably without using a large-diameter optical system.
For example, to explain an example of a procedure for observing a hidden mark of a spectacle lens framed in a spectacle frame in use, first, a spectacle lens (not shown) is placed on a transparent glass plate 3a of a mounting table 3. Place it and find hidden letters and marks near the periphery of the lens.
At this time, even if the irradiation light from the light source 2 is emitted off the spectacle frame, the collimated lens unit 4 is moved to the right in the horizontal direction by manually screwing the adjustment knob 4e as described above. Alternatively, by slightly sliding it to the left and adjusting the parallel light to be emitted so as to pass through the spectacle lens, the transmitted light can be received on the light receiving side, for example, in the case of a high curve lens. Even so, hidden characters and marks can be confirmed as images.
Furthermore, in order to obtain the optical center position after confirming the hidden characters and marks, the lens is only 17 mm, which corresponds to exactly half the distance of 34 mm between the hidden characters and alignment marks, which is generally known as a characteristic of lens performance. The position moved toward the center may be marked as the optical center position of the spectacle lens to be inspected, and this marking may be used to confirm and evaluate the compatibility between the lens to be in use and the frame.

そして殊に、本発明のレンズチェッカーの注目すべき特徴的な脈理の判別要領について、
図5を参照しつつ以下説明する。
従来装置による明視野と暗視野の観察状態だけでは容易に判別確認することが困難とされ
ていた、被検レンズ内部の脈理の判別観察を行うには、前記した如く被検レンズ載置台3
の透明ガラス板3aの背面に適宜配置された第一の偏光子20aにおいて、光源2からの
照射光に対してそのXY成分の何れか一方の成分(例えばX成分)の偏光調整を行い、被
検レンズLeに対しその背面から照射光の残りのY成分のみを透過させることとなる。
そして、仮に被検レンズLeにおいて脈理21aが存在している場合には、当該脈理21
aの異常な歪や密度分布の違いにより、この脈理部分を透過した透過光が複屈折を受けた
偏光光束として透過することになり、同時に正常部分を透過した透過光束のY成分は、第
二の偏光子20bにより偏光されるので、受光画面は透過光のXY成分が制限された暗視
野状態の画面22となるのに対し、脈理21aにより複屈折を受けた透過光は、第二の偏
光子20bの偏光を受けることがないので受光画面上において明暗のはっきりした脈理画
像21bとなって現れ、撮像手段9により鮮明にこの脈理を捉えて撮像する(図7参照)
ことができ、従来目視判別が難しいとされていた脈理の判別判断を間違いなく確実に行う
ことができるのである。
即ち、上記した光学原理に基づく図5の光学説明図からも明らかなように、本発明のレン
ズチェッカーにより得られた図7に示す脈理写真では、被検レンズLeに対する透過光の
XY成分が制限された周囲の部分とは異なる中央部分(矢印A部分)が、脈理21aのた
めに複屈折を受けた脈理画像21b部分を表しており、本来透過光が制限されているため
に何も見えないはずの受光画面において、脈理画像A(21b)が人的に目視確認できる
ので参照されたい。なお、図7中の矢印B部分はマーカーペンのインク部分である。
And in particular, regarding the remarkable characteristic pulse discrimination procedure of the lens checker of the present invention.
The following will be described with reference to FIG.
As described above, in order to discriminate and observe the pulse inside the test lens, which has been difficult to easily discriminate and confirm only by the observation state of the bright field and the dark field by the conventional device, the test lens mounting table 3
In the first polarizing element 20a appropriately arranged on the back surface of the transparent glass plate 3a, the polarization of one of the XY components (for example, the X component) is adjusted with respect to the irradiation light from the light source 2 to be covered. Only the remaining Y component of the irradiation light is transmitted from the back surface of the inspection lens Le.
If the pulse 21a is present in the lens Le to be inspected, the pulse 21a is present.
Due to the abnormal strain of a and the difference in density distribution, the transmitted light transmitted through this pulse portion is transmitted as a polarized light beam subjected to double refraction, and at the same time, the Y component of the transmitted light beam transmitted through the normal portion is the first. Since it is polarized by the second polarizing element 20b, the light receiving screen becomes the screen 22 in the dark field state in which the XY component of the transmitted light is limited, whereas the transmitted light subjected to double refraction by the pulse 21a is the second. Since it does not receive the polarization of the polarizing element 20b, it appears as a pulse image 21b with clear light and darkness on the light receiving screen, and the image pickup means 9 clearly captures and captures this pulse (see FIG. 7).
This makes it possible to reliably and reliably discriminate and determine the pulse, which was conventionally considered difficult to visually discriminate.
That is, as is clear from the optical explanatory view of FIG. 5 based on the above optical principle, in the pulse photograph shown in FIG. 7 obtained by the lens checker of the present invention, the XY component of the transmitted light with respect to the lens Le to be inspected is present. The central part (arrow A part) different from the restricted surrounding part represents the part of the pulse image 21b that has undergone double refraction due to the pulse 21a, and what is because the transmitted light is originally limited. The pulse image A (21b) can be visually confirmed on the light receiving screen, which should not be visible, so please refer to it. The arrow B portion in FIG. 7 is an ink portion of the marker pen.

なお、上記実施例においては、光源側の第一の偏光子20aにおいて照射光のX成分を制
限し、受光側の第二の偏光子20bにより透過光のY成分を制限するよう構成した事例を
説明したが、これ等のXY成分の制限を第一の偏光子20aと第二の偏光子20bの何れ
で行っても構わないが、少なくとも受光側において被検レンズを透過した透過光の主な波
長成分を遮断制御すると共に、脈理21aのために複屈折された透過光束を受光可能に構
成することが必要なことである。
In the above embodiment, there is an example in which the X component of the irradiation light is limited by the first polarizing element 20a on the light source side and the Y component of the transmitted light is limited by the second polarizing element 20b on the light receiving side. As described above, the limitation of these XY components may be performed by either the first polarizing element 20a or the second polarizing element 20b, but at least on the light receiving side, the main transmitted light transmitted through the test lens is used. It is necessary to control the cutoff of the wavelength component and to be able to receive the transmitted light beam birefringent for the pulse 21a.

因に、受光側における所謂シュリーレン光学系を利用した例えば、類似した形状のキズと
埃や汚れ、或いは浅いキズや被検レンズ表面の研磨ムラ等の判別若しくは観察要領につい
て説明するに、本発明の場合、ナイフエッジ式の遮光切換手段8を受光側の光路内に組み
込まれているので、そのナイフエッジ効果による光軸中心付近の光量を押えた状態におい
て、レンズ表面のキズや研磨ムラ等に基因した散乱光を受光して鮮明な回析像を適宜得る
ことができる。
即ち、本発明のレンズチェッカーでは、最初に被検レンズの載置台3に対する撮像手段9
の焦点合わせの微調整を操作摘み9aにより行った後、観察対象とする被検レンズLeを
載置台3の透明ガラス板3aの上面に置いてから、レンズ表面または裏面の合焦点の初期
設定について載置台3の調節摘み3dによる上下動操作により最初に行っておく。
次いで、載置台3上の被検レンズを透過した透過光束が、対物レンズ6aと結像ユニット
6bを経て撮像手段9に導かれる直前において、図2に示す光路内に位置していた前記可
変絞り7を光路外へ退出させると同時に、これと一体に設けられている遮光切換手段8の
右側ナイフエッジ8aまたは左側ナイフエッジ8bを交互に光路内に進出位置させること
により、夫々の半分毎の光束画面を撮影して視差像が適宜得られるように操作する。
ただし、半分毎の視差像を必要としない場合には、一方のナイフエッジを用いた回析像を
得るように操作すればよい。
このとき本発明の場合、遮光切換手段8におけるナイフエッジ8a、8bにより、被検レ
ンズを透過した視野の半分の光束がナイフエッジ効果により回析されて像を結ぶ一方で、
遮られた視野の半分における光軸中心付近の光束が確実にカットされるので、残された視
野の半分の光束に対して干渉することがなく、撮像手段9による撮影画像を鮮明な画像と
して得ることができるのである。
Incidentally, to explain the procedure for discriminating or observing, for example, scratches and dust and dirt having similar shapes, shallow scratches, and uneven polishing of the surface of the lens to be inspected using the so-called Schlieren optical system on the light receiving side. In this case, since the knife edge type light blocking switching means 8 is incorporated in the optical path on the light receiving side, the cause is scratches on the lens surface, uneven polishing, etc. in a state where the amount of light near the center of the optical axis due to the knife edge effect is suppressed. It is possible to appropriately obtain a clear diffraction image by receiving the scattered light.
That is, in the lens checker of the present invention, first, the image pickup means 9 for the mounting table 3 of the test lens
After fine-tuning the focus of the lens with the operation knob 9a, place the lens Le to be observed on the upper surface of the transparent glass plate 3a of the mounting table 3, and then set the initial focus on the front or back surface of the lens. First, the adjustment knob 3d of the mounting table 3 is used to move up and down.
Next, the variable diaphragm located in the optical path shown in FIG. 2 immediately before the transmitted luminous flux transmitted through the test lens on the mounting table 3 is guided to the image pickup means 9 via the objective lens 6a and the imaging unit 6b. At the same time as moving the 7 out of the optical path, the right side knife edge 8a or the left side knife edge 8b of the light shielding switching means 8 provided integrally with the 7 is alternately advanced into the optical path, so that the luminous flux for each half is reached. Take a picture of the screen and operate it so that a parallax image can be obtained as appropriate.
However, if the parallax image for each half is not required, an operation may be performed so as to obtain a diffraction image using one of the knife edges.
At this time, in the case of the present invention, the light flux of half of the field of view transmitted through the test lens is diffracted by the knife edge effect 8a and 8b in the shading switching means 8 to form an image, while forming an image.
Since the luminous flux near the center of the optical axis in half of the blocked field of view is reliably cut, the image captured by the imaging means 9 is obtained as a clear image without interfering with the luminous flux of half of the remaining field of view. You can do it.

なお、本発明は図示並びに本文記載の実施例に限定されるものではなく、本発明の要旨を
逸脱しない限り構成要素の代替要素を採用し、或いは、技術的な均等の範囲で構成要素に
変更を加えて採用実施することなど、自由に構成し実施可能であるので詳細な説明は省略
する。
It should be noted that the present invention is not limited to the examples shown in the illustration and described in the text, and alternative elements of the constituent elements are adopted as long as they do not deviate from the gist of the present invention, or are changed to the constituent elements within the technically equivalent range. Since it is possible to freely configure and implement such as adopting and implementing, detailed explanation is omitted.

本発明は、被検レンズ表面の観察検査装置として眼鏡レンズやその他の光学レンズ等の欠
陥としての脈理や研磨ムラ及びキズ、埃やゴミ等の異物や汚れ、隠し字やマークなどの広
範囲な被検レンズの観察検査に利用可能なレンズチェッカーとして有用であり、併せて光
学技術の産業分野における小型化と精度の向上等を果すことにおいて利用可能である。
The present invention is a device for observing and inspecting the surface of a lens to be inspected, and has a wide range of defects such as spectacle lenses and other optical lenses such as veins, uneven polishing and scratches, foreign matter such as dust and dirt, stains, hidden letters and marks. It is useful as a lens checker that can be used for observation and inspection of the lens to be inspected, and at the same time, it can be used for miniaturization and improvement of accuracy in the industrial field of optical technology.

1 レンズチェッカーの基台
2 透過光用光源
2a ピンホール型の絞り板
3 被検レンズの載置台
4 コリメートレンズユニット
4e 調節摘み
6 結像レンズユニット
7 虹彩形式の可変絞り手段
8 遮光切換手段
8a 右側ナイフエッジ
8b 左側ナイフエッジ
9 撮像手段(CMOS)
20a第一偏光子
20b第二偏光子
21a脈理
21b脈理画像
1 Base of lens checker 2 Light source for transmitted light 2a Pinhole type diaphragm plate 3 Placement stand for test lens 4 Collimated lens unit 4e Adjustable knob 6 Imaging lens unit 7 Iris-type variable diaphragm means 8 Shading switching means 8a Right side Knife edge 8b Left side Knife edge 9 Imaging means (CMOS)
20a First polarizing element 20b Second polarizing element 21a Pulse 21b Pulse image

Claims (3)

被検レンズに対する透過光用光源と同軸的に配置されたピンホール型の絞り手段を備えた
基台の上面中央部には、被検レンズの載置台を設けると共に、当該被検レンズ載置台を貫
く光軸に対しほぼ同軸的にコリメートレンズを配置する一方、この基台上の一側に植立さ
せた支柱の上端部には、前記光源と共軸関係となるように被検レンズの表面または裏面の
画像を撮影するための対物レンズと結像レンズ、及び撮像手段からなる受光側光学系を対
向配置し、かつ当該結像レンズ及び撮像手段からなる受光側光学系に対し、少なくとも被
検レンズからの透過光のXY成分の一方を偏光するための偏光子を適宜光路中に介在操作
自在に設けて、透過光のXY成分を適宜制限した状態において、被検レンズの脈理部分に
よる複屈折光束のみを受光し、これを撮像可能に構成したことを特徴とするレンズチェッ
カー。
A mounting table for the test lens is provided at the center of the upper surface of a base provided with a pinhole type aperture means coaxially arranged with a light source for transmitted light for the test lens, and the test lens mounting table is provided. While the collimating lens is arranged almost coaxially with the penetrating optical axis, the surface of the lens to be inspected is located on the upper end of the column planted on one side of the base so as to have an axial relationship with the light source. Alternatively, an objective lens for capturing an image on the back surface, an imaging lens, and a light receiving side optical system composed of an imaging means are arranged to face each other, and at least the light receiving side optical system consisting of the imaging lens and the imaging means is inspected. A decoder for polarizing one of the XY components of the transmitted light from the lens is appropriately provided in the optical path as an intervening operation, and the XY components of the transmitted light are appropriately restricted. A lens checker characterized in that it receives only the refractive light and is configured to be capable of imaging.
上記受光側光学系を構成する撮像手段の光路中には、光学的受光範囲の光軸中心にナイフ
エッジが位置して視野の半分を交互に遮ることができる遮光切換手段を、光軸に対する直
交軸線に沿って同一平面内で進退操作自在に設けるとともに、当該遮光切換え手段と一体
的に上記透過光のXY成分を制限するための偏光子若しくは波長板を設け、各要素の切換
操作の手順が一義的に行われるよう構成したことを特徴とする上記請求項1項記載のレン
ズチェッカー。
In the optical path of the image pickup means constituting the light receiving side optical system, a light shielding switching means having a knife edge located at the center of the optical axis of the optical light receiving range and capable of alternately blocking half of the field of view is provided orthogonal to the optical axis. In addition to being provided so that it can be freely moved forward and backward in the same plane along the axis, a splitter or wave plate for limiting the XY component of the transmitted light is provided integrally with the light-shielding switching means, and the procedure for switching each element is as follows. The lens checker according to claim 1, wherein the lens checker is configured to be uniquely performed.
上記光源側光学系を構成するよう基台の上面中央部に設けた被検レンズ載置台を貫く光軸
に対し、ほぼ同軸的に配置したコリメートレンズを、光軸に対して直交する方向に相対的
にスライド移動調節自在に配置してなり、当該コリメートレンズを僅かに移動操作するこ
とにより、被検レンズに対する透過光の照射位置を移動調節自在に構成したことを特徴と
する上記請求項1項乃至2項記載のレンズチェッカー。
A collimating lens arranged substantially coaxially with the optical axis penetrating the test lens mounting table provided in the center of the upper surface of the base so as to form the light source side optical system is relative to the direction orthogonal to the optical axis. The above-mentioned claim 1 is characterized in that the collimating lens is arranged so as to be adjustable in slide movement, and the irradiation position of transmitted light to the test lens can be adjusted in movement by slightly moving the collimating lens. The lens checker according to item 2.
JP2018136137A 2018-07-19 2018-07-19 Lens checker Active JP7060239B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2018136137A JP7060239B2 (en) 2018-07-19 2018-07-19 Lens checker

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2018136137A JP7060239B2 (en) 2018-07-19 2018-07-19 Lens checker

Publications (2)

Publication Number Publication Date
JP2020012765A JP2020012765A (en) 2020-01-23
JP7060239B2 true JP7060239B2 (en) 2022-04-26

Family

ID=69170959

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2018136137A Active JP7060239B2 (en) 2018-07-19 2018-07-19 Lens checker

Country Status (1)

Country Link
JP (1) JP7060239B2 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7454389B2 (en) 2020-01-29 2024-03-22 株式会社ヨコオ In-vehicle antenna device

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003121385A (en) 2001-10-18 2003-04-23 Tosoh Corp Method and device for inspecting inside of vitreous silica material for defect
US20030227622A1 (en) 2000-05-16 2003-12-11 Priestley Richard S. Automated system for measurement of an optical property
JP2010156558A (en) 2008-12-26 2010-07-15 Olympus Corp Transmission lighting system, inspection system and transmission lighting method
JP2013148568A (en) 2011-12-22 2013-08-01 Iwasaki Electric Co Ltd Projection system

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0875598A (en) * 1994-09-01 1996-03-22 Sharp Corp Plastic lens inspection device and method
JPH0915095A (en) * 1995-06-27 1997-01-17 Nikon Corp Homogeneity inspection equipment for optical material
JP3538281B2 (en) * 1995-12-14 2004-06-14 ペンタックス株式会社 Optical member inspection device

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20030227622A1 (en) 2000-05-16 2003-12-11 Priestley Richard S. Automated system for measurement of an optical property
JP2003121385A (en) 2001-10-18 2003-04-23 Tosoh Corp Method and device for inspecting inside of vitreous silica material for defect
JP2010156558A (en) 2008-12-26 2010-07-15 Olympus Corp Transmission lighting system, inspection system and transmission lighting method
JP2013148568A (en) 2011-12-22 2013-08-01 Iwasaki Electric Co Ltd Projection system

Also Published As

Publication number Publication date
JP2020012765A (en) 2020-01-23

Similar Documents

Publication Publication Date Title
TWI558997B (en) Defect observation method and device thereof
JP5610844B2 (en) Glass sheet inspection system
KR101857539B1 (en) Inspection lighting system and inspection system
JP5348765B2 (en) Method and apparatus for inspecting fine irregularities of flat transparent body
JP6385974B2 (en) Optical instrument and measuring device for measuring total reflection absorption spectrum
US20180024344A1 (en) Microscope
JP7060239B2 (en) Lens checker
KR101447857B1 (en) Particle inspectiing apparatus for lens module
JP6633599B2 (en) Lens checker
JP6564153B1 (en) Test lens mounting table and lens checker
JP2020012652A (en) Lens checker
JPH0961291A (en) Apparatus for testing optical parts
JP5992990B2 (en) Objective optical system and ATR measurement apparatus for ATR measurement
JP6710814B1 (en) Lens mount and lens checker
JP5397889B2 (en) Cup mounting device
JP2018189475A (en) Lens checker
JP2004535601A (en) Configuration of microscope objective lens
JP5647716B2 (en) A simple telecentric lens device for micro unevenness inspection machine
JP2006330359A (en) Microscope system and flare preventing optical apparatus
JP3234921U (en) microscope
KR102358724B1 (en) 2 in 1 microscope
JP7458617B1 (en) Inspection lighting equipment, illumination optical system, and inspection system
WO2021039952A1 (en) Skin inspection device
KR20110133183A (en) Inspecting machine for flat panel
CN219122497U (en) Shooting device

Legal Events

Date Code Title Description
A711 Notification of change in applicant

Free format text: JAPANESE INTERMEDIATE CODE: A711

Effective date: 20191003

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20210409

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20220222

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20220405

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20220407

R150 Certificate of patent or registration of utility model

Ref document number: 7060239

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150