JP7059611B2 - Liquid discharge head, liquid discharge unit and device for discharging liquid - Google Patents

Description

The present invention relates to a liquid discharge head, a liquid discharge unit, and a device for discharging a liquid.

Conventionally, a recording device equipped with an inkjet head and an inkjet head that generate pressure fluctuations in a liquid chamber (also referred to as an individual liquid chamber, a pressurized liquid chamber, etc.) and eject a liquid from a minute nozzle formed in the liquid chamber has been known. Has been done.

In the manufacturing process of the inkjet head, when the liquid chamber is formed on the actuator substrate, if the actuator substrate is thinned to near the height of the liquid chamber, handling in the subsequent process (transportation in the processing device, inter-process transfer, etc.) This makes the actuator board fragile, making stable production difficult. Therefore, before thinning the actuator board, a support board on which a liquid flow path or the like is formed is joined with an adhesive to reinforce the actuator board.

In this case, since the actuator part (vibration plate, piezoelectric body, etc.) of the actuator board is a movable part, a recess is provided in the support board so that the actuator part does not come into direct contact with the support board, and the non-formed part of the recess is the actuator. I try to join it with the board.

However, when joining with a general joining technique, there are cases where the board is misaligned or part of the joint is not completely joined and rigidity cannot be ensured, resulting in problems such as crosstalk (mutual interference) between actuators. It was happening. In addition, there is a problem that tension is applied to the drive unit and displacement is reduced due to changes in the bonding strength and the bonding interval between the actuator board and the support board in the plane.

In Patent Document 1, the width of the holding substrate partition wall, the width of the liquid chamber partition wall, and the width of the wiring layer pattern are determined in consideration of functional deterioration due to misalignment when joining the flow path substrate and the holding substrate and crosstalk between actuators. It stipulates. As a result, the joining reliability between the flow path substrate and the holding substrate can be improved, which contributes to miniaturization. Further, in Patent Document 2, the joint portion of the holding substrate is formed into a predetermined shape for the purpose of reducing crosstalk and ensuring sufficient adhesive strength and sealing property of the adhesive.

However, the conventional technique cannot solve the problem that sufficient rigidity cannot be ensured because the joint is not completely formed in a part of the region where more reliable joint is required, such as the region near the actuator. Therefore, it is desired to improve the discharge characteristics such as preventing crosstalk and reduction of displacement.

It is an object of the present invention to provide a liquid discharge head capable of reliably joining locations where rigidity is required, suppressing crosstalk between actuators, and having highly accurate and stable discharge characteristics.

In order to solve the above problems, the present invention is an actuator board on which an actuator is formed , and has a length and a short side with respect to the surface direction of the actuator board on the side opposite to the surface on which the actuator is formed. A liquid discharge head in which an actuator substrate having a chamber and a support substrate having a recess formed as a drive region of the actuator on a surface facing the actuator substrate are joined by an adhesive to support the actuator. The non-formed portion of the recess in the substrate is a joining partition wall to be joined to the actuator board, and the joining partition walls are arranged in the lateral direction of the liquid chamber, and among the portions of the support board to be joined to the actuator board, the said At least a part excluding the joined partition wall has a lattice shape, and the width of the joined partition wall in the short side of the liquid chamber at the portion joined to the actuator substrate is larger than the line width of the lattice shape.

According to the present invention, it is possible to provide a liquid discharge head which can surely join a portion where rigidity is required, suppress crosstalk between actuators, and have high accuracy and stable discharge characteristics.

It is sectional drawing in the short side direction of a liquid chamber in an example of a liquid discharge head of this invention. It is sectional drawing in the longitudinal direction of a liquid chamber in an example of a liquid discharge head of this invention. It is a figure for demonstrating the relationship between the width of the adhesive application part and the adhesive film thickness. It is sectional drawing for explaining the generation mechanism of crosstalk and tension. It is a plane schematic diagram in the example of the liquid discharge head of this invention. It is a schematic plan view of a main part in another example of a liquid discharge head of this invention. It is a schematic plan view of a main part in another example of a liquid discharge head of this invention. It is a schematic plan view of a main part in another example of a liquid discharge head of this invention. It is a schematic diagram which shows an example of the apparatus which discharges a liquid which concerns on this invention. It is a schematic diagram which shows the other example of the apparatus which discharges a liquid which concerns on this invention. It is a schematic diagram which shows an example of the liquid discharge unit which concerns on this invention. It is a schematic diagram which shows the other example of the liquid discharge unit which concerns on this invention. It is a perspective view in another example of the apparatus which discharges a liquid of this invention. It is a side view in another example of the apparatus which discharges a liquid of this invention.

Hereinafter, the liquid discharge head, the liquid discharge unit, and the device for discharging the liquid according to the present invention will be described with reference to the drawings. It should be noted that the present invention is not limited to the embodiments shown below, and can be modified within the range conceivable by those skilled in the art, such as other embodiments, additions, modifications, and deletions. However, as long as the action and effect of the present invention are exhibited, it is included in the scope of the present invention.

The present invention comprises an actuator, an actuator substrate in which a liquid chamber having a length and a short side with respect to the surface direction of the substrate is formed on the opposite side of the actuator, and a drive region of the actuator on a surface facing the actuator substrate. It is a liquid discharge head in which a support substrate on which a recess is formed is bonded by an adhesive, and a non-formed portion of the recess in the support substrate is a bonding partition wall to be bonded to the actuator substrate. The partition walls are arranged in the lateral direction of the liquid chamber, and at least a part of the portion of the support substrate to be joined to the actuator substrate, excluding the bonded partition wall, has a lattice shape and is in the shape of a lattice with the actuator substrate of the joined partition wall. The width of the liquid chamber at the joining portion in the lateral direction is equal to or larger than the line width of the lattice shape.

(Basic configuration of liquid discharge head)
First, the basic configuration of the liquid discharge head of the present embodiment will be described. FIG. 1 shows a cross-sectional view of the liquid discharge head of the present embodiment in the short side direction of the liquid chamber. FIG. 2 shows a cross-sectional view of the liquid discharge head of the present embodiment in the longitudinal direction of the liquid chamber.

The liquid discharge head 1 of the present embodiment is an actuator in which an actuator 60 and a liquid chamber 15 (also referred to as a pressurized liquid chamber) having a length and a short side with respect to the surface direction of the substrate are formed on the opposite side of the actuator 60. The substrate 100 and the support substrate 200 having a recess 67 formed as a drive region of the actuator 60 on the surface facing the actuator substrate 100 are joined by an adhesive 49.

A piezoelectric body 12 and a diaphragm 13 for generating liquid discharge energy are formed on the actuator substrate 100, and a pressurized liquid chamber partition wall 14 and a liquid chamber 15 are formed. The liquid chambers 15 have a longitudinal direction and a short side with respect to the surface direction of the substrate, and a plurality of liquid chambers 15 are provided in the short side direction, and each liquid chamber 15 is partitioned by a pressurized liquid chamber partition wall 14.

The actuator 60 has a piezoelectric body 12, an individual electrode 11, and the like, and the piezoelectric body 12 is sandwiched between the common electrode 10 and the individual electrode 11, and a voltage is applied by the wiring layer 42. The actuator substrate 100 is formed with a passivation film 50 that protects the wiring layer 42 and an interlayer insulating film 45 that adjusts the connection between the wiring layer 42 and the common electrode 10.

The non-formed portion of the recess 67 in the support substrate 200 is the joining partition wall 201 that joins with the actuator substrate 100, and the joining partition walls 201 are arranged in the lateral direction of the liquid chamber 15 (see FIG. 3 described later).

The actuator substrate 100 is joined to a nozzle substrate 300 having a nozzle hole 16, and the nozzle substrate 300 forms a part of the liquid chamber 15. Further, the droplet supply port 66, the common droplet flow path 19, and the common liquid chamber 18 are formed in the support substrate 200 and the actuator substrate 100, and the common liquid chamber 18 communicates with the liquid chamber 15.
The liquid discharge head 1 is formed by joining the actuator substrate 100, the support substrate 200, and the nozzle substrate 300.

In the liquid discharge head 1 formed in this way, a nozzle that discharges the recording liquid based on the image data from the control unit in a state where each liquid chamber 15 is filled with a liquid, for example, a recording liquid (ink). A voltage is applied to the individual electrodes 11 corresponding to the holes 16.

In this case, for example, a pulse voltage of 20 V is applied through the lead-out wiring and the connection hole formed in the interlayer insulating film 45 by the oscillation circuit. When this voltage pulse is applied, the piezoelectric body 12 itself contracts in the direction parallel to the diaphragm 13 due to the electric strain effect, and the diaphragm 13 bends in the direction of the liquid chamber 15. As a result, the pressure in the liquid chamber 15 rises sharply, and the recording liquid is discharged from the nozzle hole 16 communicating with the liquid chamber 15.

Next, after the pulse voltage is applied, the contracted piezoelectric body 12 returns to its original position, so that the bent diaphragm 13 returns to its original position. Therefore, the inside of the liquid chamber 15 has a negative pressure as compared with the inside of the common liquid chamber 18, and the ink supplied from the outside through the droplet supply port 66 has fluid resistance from the common droplet flow path 19 and the common liquid chamber 18. It is supplied to the liquid chamber 15 via the portion 17.
By repeating these steps, droplets can be continuously ejected, and an image is formed on a recording medium arranged facing the liquid ejection head.

(First Embodiment)
Hereinafter, an embodiment of the liquid discharge head of the present invention will be described.
Conventionally, in order to prevent problems such as cracking of the actuator board, the support board is joined with an adhesive to reinforce the actuator board before the actuator board is thinned in the process of manufacturing the liquid discharge head. At this time, when an adhesive layer having a thickness of about 0.5 to 4 μm is formed on the support substrate side by using a thin film transfer technique, and then the adhesive layer is joined to the actuator substrate by a general joining technique, the joint portion is formed. In some cases, the joints were not completely joined and rigidity could not be ensured.

The present inventor investigated in detail the cause of the incomplete joining in a part of the joint, and found that the amount of the adhesive to be transferred was insufficient in the part where the joining was not sufficient, and the transfer was performed. It was found that the amount of adhesive being applied was small. It was also found that the amount of adhesive to be transferred depends on the area of the transferred portion, for example, the width per unit length.

FIG. 3 shows a graph for explaining the relationship between the width of the adhesive-applied portion and the adhesive film thickness. In this figure, the "adhesive coated portion" means the bonded portion in the bonded partition wall of the support substrate, and the "width of the adhesive coated portion" is the unit length of the adhesive coated portion. It means the width of the edge. The "adhesive film thickness" is a measurement of the adhesive film thickness after the adhesive is applied (transferred) to the support substrate to a thickness of about 1 μm, and is before being bonded to the actuator substrate. It was measured in a state.

As shown in the figure, the larger the width per unit length of the adhesive-applied portion, the larger the adhesive film thickness (broken line in the figure). This is because the force for holding the adhesive differs depending on the area (the width thereof if it is a linear shape) of the portion to which the adhesive is applied (transferred).

As described above, even if the adhesive is uniformly applied by the thin film transfer device, the amount of the adhesive differs depending on the joining portion, and the amount of the adhesive contributing to the joining between the support substrate and the actuator substrate also differs. If the support substrate and the actuator substrate are joined without adjusting the amount of the adhesive, there arises a problem that the joint portion is not completely joined and the portion requiring rigidity cannot be reliably joined.

FIG. 4 shows a schematic diagram for explaining the mechanism of crosstalk and tension generation. This figure is a schematic cross-sectional view when the upper substrate 310 and the lower substrate 320 are joined with the adhesive 330, and is an example when the substrates are joined without adjusting the amount of the adhesive. In the figure, the region indicated by reference numeral 201a schematically shows the bonding between the bonding partition wall 201 and the actuator substrate 100 in the support substrate 200, and the region indicated by reference numeral 202b is the lattice shape 202 in the support substrate 200. The joining of the actuator substrate 100 is schematically shown. The illustrated adhesive 330 is for explaining the difference in film thickness in the region, and the width and the like of the adhesive are not limited to this.

Since crosstalk is generated by the propagation of vibrations of adjacent actuators, it is important to secure the rigidity of the joint partition wall 201, that is, the joint completeness in order to prevent crosstalk. However, as shown in the figure, when the film thickness of the adhesive 330 in the joint partition wall 201 is thin, the required rigidity cannot be secured, the vibration of the adjacent actuators propagates, and crosstalk occurs. Further, when the film thickness of the adhesive 330 in the bonded partition wall 201 is relatively thinner than the film thickness of the adhesive 330 in the lattice shape 202, tension is applied in the direction shown by the thick arrow in the figure, so that the actuator is applied. Tension is applied to the region where the actuator is present, and the actuator displacement is hindered.

Therefore, in the present embodiment, in order to control the adhesive film thickness that contributes to the bonding in consideration of the relationship between the width of the adhesive-applied portion and the adhesive film thickness and the tension generated on the substrate, the adhesive is adhered. Control the shape of the coated part.

FIG. 5 shows a schematic plan view of a joint portion of the support substrate 200 of the liquid discharge head of the present embodiment. In the figure, a plurality of actuators 60 are shown, and the liquid chamber 15 is omitted, but the liquid chamber 15 is formed at a position corresponding to the actuator 60. Further, the actuator 60 has a longitudinal direction and a lateral side in the surface direction of the substrate, and the longitudinal direction and the lateral side direction of the actuator 60 are the same as the longitudinal direction and the lateral side direction of the liquid chamber 15, respectively.
The number of actuators 60 and liquid chambers 15 is not limited to this. Further, the AA cross section in FIG. 5 corresponds to the cross-sectional view of FIG. 1, and the BB cross section corresponds to the cross-sectional view of FIG.

As shown in the figure, the non-formed portion of the recess 67 in the support substrate 200 is a joining partition wall 201 that joins with the actuator board 100, and the joining partition wall 201 is in the lateral direction of the liquid chamber 15 (the lateral direction of the actuator 60, the actuator 60). It is arranged in the arrangement direction of).

In the present embodiment, at least a part of the portion of the support substrate 200 to be joined to the actuator substrate 100, excluding the joining partition wall 201, has a grid shape 202. In the example shown in the figure, the left side in the figure has a grid shape 202. By forming at least a part of the support substrate 200 into a grid shape, extra adhesive can be poured into the grid opening when the upper substrate and the lower substrate are joined.
Here, the lattice shape is represented by reference numeral 202, and a part of the lattice shape is represented by reference numeral 202a.

Further, the width of the joint partition wall 201 in the portion to be joined to the actuator substrate 100 in the lateral direction of the liquid chamber 15 is equal to or larger than the line width of the grid shape. That is, as shown in the figure, when the width in the lateral direction of the liquid chamber 15 at the portion of the joining partition wall 201 joined to the actuator substrate 100 is d1, and the line width of the grid shape 202 (width of reference numeral 202a) is d2. It satisfies d1 ≧ d2.

The joint portion adjacent to the actuator 60, that is, the portion corresponding to the joint partition wall 201 is required to have rigidity, but by doing so as described above, the amount of adhesive applied (transferred) to this portion can be increased. And can be reliably joined by the joining partition wall 201. As a result, sufficient rigidity can be ensured in the portion corresponding to the joint partition wall 201, so that it is possible to suppress crosstalk between the actuators in which the actuators 60 interfere with each other during driving. In addition, it is possible to prevent unnecessary tension from being applied to the actuator substrate, and it is possible to prevent a decrease in displacement of the drive unit. Therefore, it is possible to obtain a liquid discharge head having high accuracy and stable discharge characteristics.

In this embodiment, the width of the liquid chamber 15 in the lateral direction and the line width of the grid shape at the portion of the joint partition wall 201 to be joined to the actuator substrate 100 are measured at several points and average values are obtained.

Further, it is preferable that the width of the joining partition wall 201 in the lateral direction of the liquid chamber 15 at the portion joined with the actuator substrate 100 is larger than the line width of the lattice shape 202. In the case of the example shown in the figure, it is preferable that d1> d2. In this case, the adhesive applied to the joining partition wall 201 contributes to the joining more reliably, and the joining can be surely performed at the place where rigidity is required.

The upper limit of the width d1 in the lateral direction of the liquid chamber 15 at the portion of the bonding partition wall 201 bonded to the actuator substrate 100 is not particularly limited, but is preferably twice or less of d2.

By controlling the shape of the adhesive-applied portion in this way, it is possible to reliably join the portions near the actuator where rigidity is required, and it is possible to suppress crosstalk between the actuators. In addition, it is possible to suppress drive variations due to crosstalk, and it is possible to obtain a liquid discharge head having stable drive, uniform discharge characteristics, and highly accurate and stable discharge characteristics.

<Embodiment of a method for manufacturing a liquid discharge head>
Next, an example of the method for manufacturing the liquid discharge head of the present embodiment will be described with reference to specific examples. Although the figure in the middle of the manufacturing process is not shown, FIGS. 1, 2 and 5 can be referred to.

As the actuator substrate 100, the diaphragm 13 is formed on a silicon single crystal substrate (for example, a plate thickness of 400 μm) having a plane orientation (110). The diaphragm 13 may be either a single layer or a laminated film as long as the function as the diaphragm and the subsequent process consistency are ensured.

As the diaphragm, for example, a silicon oxide film, a polysilicon film, an amorphous silicon film, or a silicon nitride film is laminated by the LP-CVD method (Low Pressure Chemical Vapor Deposition) so as to have the desired diaphragm rigidity. Form a film.

Considering the process consistency, the rigidity of the diaphragm, and the stress of the entire diaphragm 13, the number of laminated layers is preferably about 3 to 7 layers. The uppermost layer of the diaphragm 13 is preferably a silicon oxide film formed by the LP-CVD method in order to secure adhesion with the common electrode 10 to be formed later. Then, for example, 10 layers of a common electrode composed of TiO ₂ and Pt are formed by a sputtering method at 20 nm and 160 nm, respectively.

Next, for example, PZT (lead zirconate titanate) is formed on the common electrode 10 as a piezoelectric body 12 in a plurality of times by a spin coating method, and finally a 2 μm thick film is formed. Next, the individual electrodes 11 composed of SRO and Pt are formed into films of 40 nm and 100 nm, respectively, by a sputtering method.
Here, the film forming method of the piezoelectric body 12 is not limited to the spin coating method, and may be formed by, for example, a sputtering method, an ion plating method, an aerosol method, a sol-gel method, an inkjet method, or the like. Then, the piezoelectric body 12 and the individual electrode 11 are formed at positions corresponding to the liquid chamber 15 to be formed later by the litho etching method. Further, the piezoelectric body 12 is formed so as to correspond to the position of the joint partition wall 201.

Next, an interlayer insulating film 45 is formed to insulate the common electrode 10, the piezoelectric body 12, and the wiring layer 42 (lead wiring) to be formed later. As the interlayer insulating film 45, a SiO ₂ film is formed at 1000 nm by, for example, a plasma CVD method. The interlayer insulating film 45 may be a film other than SiO ₂ of the plasma CVD method as long as it does not affect the piezoelectric body 12 or the electrode material and has an insulating property.

Next, a connection hole for connecting the individual electrode 11 and the wiring layer 42 is formed in the interlayer insulating film 45 by the litho etching method. When the common electrode 10 is also connected to the wiring layer 42, a connection hole is formed in the same manner.

Next, as the wiring layer 42, for example, TiN / Al is formed with a film thickness of 30 nm / 3 μm by a sputtering method. At the bottom of the connection hole, TiN is alloyed by the thermal history of the subsequent process when Pt, which is the material of the individual electrode 11 or the common electrode 10, is in direct contact with Al, which is the material of the wiring layer 42, and the volume changes. It is applied as a barrier layer to prevent alloying in order to prevent film peeling due to stress caused by.
The wiring layer 42 is also formed at a position that becomes a joint portion with the support substrate 200.

Next, as the passivation film 50, a silicon nitride film having a thickness of 1000 nm is formed by, for example, a plasma CVD method.

After that, the drawer wiring pad portion 41 of the wiring layer 42, the actuator 60, and the common droplet flow path 19 are opened by the litho etching method.

Next, the diaphragm 13 at the position of the common droplet flow path 19 and the common liquid chamber 18 is removed by the litho etching method.

Next, the recess 67 is formed on the support substrate 200 at a position corresponding to the actuator 60 by the litho etching method, and at the same time, a lattice shape as shown in FIG. 5 is formed. As a result, the portion to which the adhesive for joining with the actuator substrate 100 is applied has a shape as shown in FIG. 5, for example.

Next, the adhesive 49 is applied to the support substrate 200 with a general thin film transfer device to a thickness of, for example, 1 μm. The material of the adhesive 49 is not particularly limited and can be appropriately changed.
Then, the adhesive 49 is applied (transferred) to the support substrate 200 side and then bonded to the actuator substrate 100.

Then, in order to form the liquid chamber 15, the common liquid chamber 18, and the fluid resistance portion 17, the actuator substrate 100 is polished to a desired thickness t (for example, a thickness of 80 μm) by a known technique. In addition to the polishing method, etching or the like may be performed.

Next, the partition wall portion other than the liquid chamber 15, the common liquid chamber 18, and the fluid resistance portion 17 is covered with a resist by a lithography method. Then, for example, anisotropic wet etching is performed with an alkaline solution (KOH solution or TMHA solution) to form a liquid chamber 15, a common liquid chamber 18, and a fluid resistance portion 17. In addition to anisotropic wet etching with an alkaline solution, the liquid chamber 15, the common liquid chamber 18, and the fluid resistance portion 17 may be formed by dry etching using an ICP etcher.

Next, the nozzle substrate 300 having the nozzle hole 16 opened at the position corresponding to each liquid chamber 15 is joined to the actuator substrate 100. This completes the liquid discharge head 1. According to this embodiment, it is possible to manufacture a liquid discharge head having high accuracy and stable discharge characteristics with a high yield.

(Second embodiment)
Next, other embodiments of the present invention will be described. Descriptions of the same items as in the above embodiment will be omitted. FIG. 6 shows a diagram for explaining the present embodiment. FIG. 6A is a diagram corresponding to the grid shape 202 in FIG. 5, but is different in that the gap portion 212 is provided in the cross portion 210 in the grid shape 202.

The cross portion 210 in the lattice shape 202 has a larger amount of adhesive transfer than the other portions. On the other hand, by providing the gap portion 212, the adhesive applied (transferred) to the cross portion moves to the gap portion 212 to some extent, and the amount of the adhesive that contributes to the bonding can be controlled. As a result, it is possible to prevent the joining interval after joining from becoming large in the cross portion, and it is possible to relax the tension on the displaced portion of the actuator 60 due to the difference in the thickness of the adhesive.

The method for forming the void portion 212 is not particularly limited, but can be formed by, for example, a litho etch method.
Further, the shape of the gap portion 212 is not particularly limited and can be appropriately changed. In FIG. 6A, the void portion 212 has a rectangular shape, but the present invention is not limited to this, and may be, for example, a circular shape. Further, a plurality of gap portions 212 may be provided in the cross portion.

FIG. 6B is a cross-sectional view taken along the line CC in FIG. 6A, and is joined to the actuator substrate 100 on the lower side of the paper surface. Here, the height of the grid-shaped partition wall in the support substrate is H, and the height of the gap portion 212 is h. h can be appropriately changed, and h ≦ H is preferable, but h should be appropriately changed depending on the amount (thickness) of the adhesive to be applied (transferred), the type of the adhesive, the target bonding interval, and the like. Can be done.

(Third embodiment)
Next, other embodiments of the present invention will be described. Descriptions of the same items as in the above embodiment will be omitted. FIG. 7 shows a diagram for explaining the present embodiment. FIG. 7 is a diagram corresponding to the grid shape 202 in FIG. 5, except that the width of the cross portion 220 in the grid shape 202 is smaller than the width of the portion other than the cross portion 220.

In the present embodiment, the width is reduced to a rectangle only in the vicinity of the cross portion 220 in the grid shape 202. Thereby, it is possible to control the amount of the adhesive that contributes to the bonding in the cross portion where the transfer amount of the adhesive is large. Therefore, it is possible to prevent the joining interval after joining from becoming large in the cross portion, and it is possible to relax the tension on the displacement portion of the actuator 60 due to the difference in the thickness of the adhesive.

In the figure, the maximum line width d3 in the line width of the grid shape is smaller than d1 in FIG. 5, and d1 ≧ d3. Further, it is preferable that d1> d3.

(Fourth Embodiment)
Next, other embodiments of the present invention will be described. Descriptions of the same items as in the above embodiment will be omitted. FIG. 8 shows a diagram for explaining the present embodiment. FIG. 8 is a diagram corresponding to the grid shape 202 in FIG. 5, but is different in that the width of the cross portion 230 in the grid shape 202 is continuously reduced toward the center of the cross portion 230.

In the present embodiment, the width of the cross portion 230 in the lattice shape 202 is continuously reduced toward the center of the cross portion 230. Thereby, it is possible to control the amount of the adhesive that contributes to the bonding in the cross portion where the transfer amount of the adhesive is large. Therefore, it is possible to prevent the joining interval after joining from becoming large in the cross portion, and it is possible to relax the tension on the displacement portion of the actuator 60 due to the difference in the thickness of the adhesive.

In the figure, the maximum line width d4 in the line width of the grid shape is smaller than d1 in FIG. 5, and d1 ≧ d4. Further, it is preferable that d1> d4.

(Liquid discharge unit, device that discharges liquid)
Next, an example of the device for discharging the liquid according to the present invention will be described with reference to FIGS. 9 and 10. FIG. 9 is an explanatory plan view of a main part of the device, and FIG. 10 is an explanatory view of a side surface of the main part of the device.

This device is a serial type device, and the carriage 403 is reciprocated in the main scanning direction by the main scanning moving mechanism 493. The main scanning movement mechanism 493 includes a guide member 401, a main scanning motor 405, a timing belt 408, and the like. The guide member 401 is bridged over the left and right side plates 491A and 491B to movably hold the carriage 403. Then, the carriage 403 is reciprocated in the main scanning direction by the main scanning motor 405 via the timing belt 408 bridged between the drive pulley 406 and the driven pulley 407.

The carriage 403 is equipped with a liquid discharge unit 440 in which the liquid discharge head 404 and the head tank 441 according to the present invention are integrated. The liquid discharge head 404 of the liquid discharge unit 440 discharges, for example, liquids of each color of yellow (Y), cyan (C), magenta (M), and black (K). Further, the liquid discharge head 404 is mounted by arranging a nozzle row composed of a plurality of nozzles in a sub-scanning direction orthogonal to the main scanning direction and facing the discharge direction downward.

The liquid stored in the liquid cartridge 450 is supplied to the head tank 441 by the supply mechanism 494 for supplying the liquid stored outside the liquid discharge head 404 to the liquid discharge head 404.

The supply mechanism 494 includes a cartridge holder 451 which is a filling part for mounting the liquid cartridge 450, a tube 456, a liquid feeding unit 452 including a liquid feeding pump, and the like. The liquid cartridge 450 is detachably attached to the cartridge holder 451. Liquid is delivered from the liquid cartridge 450 to the head tank 441 by the liquid feeding unit 452 via the tube 456.

This device includes a transport mechanism 495 for transporting the paper 410. The transport mechanism 495 includes a transport belt 412, which is a transport means, and a sub-scanning motor 416 for driving the transport belt 412.

The transport belt 412 attracts the paper 410 and transports it at a position facing the liquid discharge head 404. The transport belt 412 is an endless belt, and is hung between the transport roller 413 and the tension roller 414. Adsorption can be performed by electrostatic adsorption, air suction, or the like.

Then, the transport belt 412 orbits in the sub-scanning direction by rotationally driving the transport roller 413 via the timing belt 417 and the timing pulley 418 by the sub-scanning motor 416.

Further, on one side of the carriage 403 in the main scanning direction, a maintenance / recovery mechanism 420 for maintaining / recovering the liquid discharge head 404 is arranged on the side of the transport belt 412.

The maintenance / recovery mechanism 420 includes, for example, a cap member 421 that caps the nozzle surface (the surface on which the nozzle is formed) of the liquid discharge head 404, a wiper member 422 that wipes the nozzle surface, and the like.

The main scanning movement mechanism 493, the supply mechanism 494, the maintenance / recovery mechanism 420, and the transport mechanism 495 are attached to a housing including the side plates 491A and 491B and the back plate 491C.

In this apparatus configured in this way, the paper 410 is fed onto the transport belt 412 and sucked, and the paper 410 is conveyed in the sub-scanning direction by the circumferential movement of the conveyor belt 412.

Therefore, by driving the liquid ejection head 404 in response to the image signal while moving the carriage 403 in the main scanning direction, the liquid is ejected onto the stopped paper 410 to form an image.

As described above, since this device includes the liquid discharge head according to the present invention, it is possible to stably form a high-quality image.

Next, another example of the liquid discharge unit according to the present invention will be described with reference to FIG. FIG. 11 is an explanatory plan view of a main part of the unit.

This liquid discharge unit includes a housing portion composed of side plates 491A, 491B and a back plate 491C, a main scanning movement mechanism 493, a carriage 403, and a liquid among the members constituting the device for discharging the liquid. It is composed of a discharge head 404.

It should be noted that a liquid discharge unit may be configured in which at least one of the above-mentioned maintenance / recovery mechanism 420 and the supply mechanism 494 is further attached to, for example, the side plate 491B of the liquid discharge unit.

Next, still another example of the liquid discharge unit according to the present invention will be described with reference to FIG. FIG. 12 is a front explanatory view of the unit.

This liquid discharge unit includes a liquid discharge head 404 to which the flow path component 444 is attached, and a tube 456 connected to the flow path component 444.

The flow path component 444 is arranged inside the cover 442. A head tank 441 may be included instead of the flow path component 444. Further, a connector 443 that electrically connects to the liquid discharge head 404 is provided on the upper part of the flow path component 444.

In the present application, the "device for discharging a liquid" is a device provided with a liquid discharge head or a liquid discharge unit and driving the liquid discharge head to discharge the liquid. The device for discharging the liquid includes not only a device capable of discharging the liquid to a device to which the liquid can adhere, but also a device for discharging the liquid into the air or into the liquid.

The "device for discharging the liquid" may include means for feeding, transporting, and discharging paper to which the liquid can adhere, as well as a pretreatment device, a posttreatment device, and the like.

For example, as a "device that ejects a liquid", an image forming device that is a device that ejects ink to form an image on paper, and a three-dimensional object (three-dimensional object) are formed in layers in order to form a three-dimensional object. There is a three-dimensional modeling device (three-dimensional modeling device) that discharges the modeling liquid into the powder layer.

Further, the "device for discharging a liquid" is not limited to a device in which a significant image such as characters and figures is visualized by the discharged liquid. For example, those that form patterns that have no meaning in themselves and those that form a three-dimensional image are also included.

The above-mentioned "thing to which a liquid can adhere" means a material to which a liquid can adhere at least temporarily, such as a material to which the liquid adheres and adheres, and a material to which the liquid adheres and permeates. Specific examples include paper, recording paper, recording paper, film, recorded media such as cloth, electronic substrates, electronic components such as piezoelectric elements, powder layers (powder layers), organ models, and media such as inspection cells. Yes, and includes everything to which the liquid adheres, unless otherwise specified.

The above "materials to which liquid can adhere" are temporary liquids such as paper, thread, fiber, fabric, leather, metal, plastic, glass, wood, ceramics, building materials such as wallpaper and flooring, and textiles for clothing. But it is good if it can be attached.

The "liquid" also includes inks, treatment liquids, DNA samples, resists, pattern materials, binders, modeling liquids, or solutions and dispersions containing amino acids, proteins, and calcium.

Further, the "device for discharging the liquid" includes, but is not limited to, a device in which the liquid discharge head and the device to which the liquid can adhere move relatively. Specific examples include a serial type device that moves the liquid discharge head, a line type device that does not move the liquid discharge head, and the like.

In addition, as a "device for ejecting liquid", a treatment liquid coating device for ejecting a treatment liquid to the paper in order to apply the treatment liquid to the surface of the paper for the purpose of modifying the surface of the paper, raw materials. There is an injection granulator that granulates fine particles of raw materials by injecting a composition liquid dispersed in a solution through a nozzle.

The "liquid discharge unit" is a liquid discharge head integrated with functional parts and a mechanism, and is a collection of parts related to liquid discharge. For example, the "liquid discharge unit" includes a head tank, a carriage, a supply mechanism, a maintenance / recovery mechanism, a main scanning movement mechanism in which at least one of the configurations is combined with a liquid discharge head, and the like.

Here, the term "integration" means, for example, a liquid discharge head and a functional component, a mechanism in which the mechanism is fixed to each other by fastening, bonding, engagement, etc., or one in which one is movably held with respect to the other. include. Further, the liquid discharge head, the functional component, and the mechanism may be configured to be detachable from each other.

For example, as a liquid discharge unit, there is a liquid discharge head and a head tank integrated, such as the liquid discharge unit 440 shown in FIG. In some cases, the liquid discharge head and the head tank are integrated by being connected to each other by a tube or the like. Here, a unit including a filter can be added between the head tank of these liquid discharge units and the liquid discharge head.

Further, as a liquid discharge unit, there is a unit in which a liquid discharge head and a carriage are integrated.

Further, there is a liquid discharge unit in which the liquid discharge head and the scanning movement mechanism are integrated by holding the liquid discharge head movably by a guide member constituting a part of the scanning movement mechanism. Further, as shown in FIG. 11, there is a liquid discharge unit in which a liquid discharge head, a carriage, and a main scanning movement mechanism are integrated.

Further, as a liquid discharge unit, there is a carriage to which a liquid discharge head is attached, in which a cap member which is a part of the maintenance / recovery mechanism is fixed, and the liquid discharge head, the carriage, and the maintenance / recovery mechanism are integrated. ..

Further, as a liquid discharge unit, as shown in FIG. 12, a tube is connected to a head tank or a liquid discharge head to which a flow path component is attached, and the liquid discharge head and a supply mechanism are integrated. ..

The main scanning movement mechanism shall include a single guide member. Further, the supply mechanism includes a single tube and a single loading unit.

Further, the pressure generating means used for the "liquid discharge head" is not limited. For example, in addition to the piezoelectric actuator (which may use a laminated piezoelectric element) as described in the above embodiment, it is composed of a thermal actuator using an electric heat conversion element such as a heat generating resistor, a vibrating plate, and a counter electrode. An electrostatic actuator or the like may be used.

Further, in the terms of the present application, image formation, recording, printing, printing, printing, modeling, etc. are all synonymous.

<Embodiment of a device for discharging a liquid>
An example of the device for discharging the liquid of the present embodiment in the case of an inkjet recording device will be described with reference to FIGS. 13 and 14. FIG. 13 is a perspective view of the inkjet recording device of the present embodiment, and FIG. 14 is a side view of the device.

The inkjet recording device 90 is a printing mechanism including a carriage 98 that can move in the scanning direction inside the main body of the device, a liquid ejection head 1 mounted on the carriage 98, an ink cartridge 99 that supplies ink to the liquid ejection head 1, and the like. A paper cassette (or a paper tray) 93 capable of loading a large number of sheets 92 from the front side is freely mounted on the lower part of the apparatus main body, which houses the parts 91 and the like.

Further, it has a manual feed tray 94 opened for manually feeding the paper 92, takes in the paper 92 supplied from the paper feed cassette 93 or the manual feed tray 94, and records a required image by the printing mechanism unit 91. After that, the paper is discharged to the paper ejection tray 95 mounted on the rear surface side.

The printing mechanism unit 91 slidably holds the main guide rod 96, the slave guide rod 97, and the carriage 98, which are guide members laid horizontally on the left and right side plates (not shown), in the main scanning direction. The liquid ejection head 1 for ejecting ink droplets of each color of (Y), cyan (C), magenta (M), and black (Bk) is arranged in a direction in which a plurality of ink ejection ports (nozzles) intersect the main scanning direction. , The ink droplets are mounted with the ejection direction facing downward. Further, each ink cartridge 99 for supplying ink of each color to the liquid ejection head 1 is replaceably mounted on the carriage 98.

The ink cartridge 99 is provided with an atmosphere port communicating with the atmosphere above and a supply port for supplying ink to the liquid ejection head 1 below, and has a porous body filled with ink inside, and is porous. The ink supplied to the liquid ejection head 1 is maintained at a slight negative pressure by the capillary force of the body. Further, although the liquid discharge head 1 of each color is used as the liquid discharge head 1, one liquid discharge head having a nozzle for discharging ink droplets of each color may be used.

Here, the carriage 98 is slidably fitted on the rear side (paper transport downstream side) on the main guide rod 96, and slidably mounted on the slave guide rod 97 on the front side (paper transport upstream side). There is.
Then, in order to move and scan the carriage 98 in the main scanning direction, a timing belt 104 is stretched between the drive pulley 102 and the driven pulley 103 that are rotationally driven by the main scanning motor 101, and the timing belt 104 is mounted on the carriage 98. The carriage 98 is reciprocated by the forward and reverse rotation of the main scanning motor 101.

On the other hand, in order to convey the paper 92 set in the paper feed cassette 93 downward to the liquid ejection head 1, the paper feed roller 105 and the friction pad 106 for separately supplying the paper 92 from the paper feed cassette 93, and the paper 92 are provided. A guide member 107 for guiding, a transport roller 108 for reversing and transporting the fed paper 92, and a transport roller 109 pressed against the peripheral surface of the transport roller 108 and a feeding angle of the paper 92 from the transport roller 108 are defined. It has a tip roller 110 to be used. The transfer roller 108 is rotationally driven via a gear train by a sub-scanning motor.

A printing receiving member 111, which is a paper guide member, is provided to guide the paper 92 sent out from the transport roller 108 corresponding to the moving range of the carriage 98 in the main scanning direction on the lower side of the liquid ejection head 1. .. On the downstream side of the imprint receiving member 111 in the paper transport direction, a rotary-driven transport roller 112 and a spur 113 for feeding the paper 92 in the paper discharge direction are provided. Further, a paper ejection roller 114 for feeding the paper 92 to the paper ejection tray 95, a spur 115, and guide members 116 and 117 forming a paper ejection path are arranged.

At the time of recording by the inkjet recording apparatus 90, the liquid ejection head 1 is driven in response to an image signal while moving the carriage 98 to eject ink onto the stopped paper 92 and record one line, and then record one line. After transporting a predetermined amount of paper 92, the next line is recorded. When the recording end signal or the signal that the rear end of the paper 92 reaches the recording area is received, the recording operation is ended and the paper 92 is ejected.

Further, a recovery device 127 for recovering the discharge defect of the liquid discharge head 1 is arranged at a position outside the recording area on the right end side in the moving direction of the carriage 98. The recovery device 127 has a capping means, a suction means, and a cleaning means. The carriage 98 is moved to the recovery device 127 side during printing standby, and the liquid ejection head 1 is capped by the capping means to keep the ejection port portion in a wet state, thereby preventing ejection defects due to ink drying. In addition, by ejecting ink that is not related to recording during recording, the ink viscosities of all the ejection ports are kept constant, and a stable ejection state is maintained.

In addition, when a discharge defect occurs, the discharge outlet (nozzle) of the liquid discharge head 1 is sealed by a capping means, and bubbles and the like with ink are sucked out from the discharge port by a suction means through a tube to the discharge port surface. Adhering ink, dust, etc. are removed by cleaning means, and ejection defects are recovered. Further, the sucked ink is discharged to a waste ink reservoir installed in the lower part of the main body, and is absorbed and held by an ink absorber inside the waste ink reservoir.

As described above, since the inkjet recording apparatus 90 is equipped with the liquid ejection head 1 manufactured by the present invention, stable ink ejection characteristics can be obtained and image quality is improved. In the above description, the case where the liquid ejection head 1 is used for the inkjet recording apparatus 90 has been described, but the liquid ejection head 1 is applied to a device for ejecting droplets other than ink, for example, a liquid resist for patterning. May be good.

1 Liquid discharge head 10 Common electrode 11 Individual electrode 12 Piezoelectric element 13 Vibration plate 14 Pressurized partition 15 Liquid chamber 16 Nozzle hole 17 Fluid resistance part 18 Common liquid chamber 19 Common droplet flow path 41 Drawer wiring pad part 42 Wiring layer 45 Layer Insulation film 49 Adhesive 50 Passionation film 60 Actuator 66 Droplet supply port 67 Recess 100 Actuator board 200 Support board 201 Joined partition partition 202 Lattice shape 210, 220, 230 Cross part 212 Void 300 Nozzle board 401 Guide member 403 Carriage 404 Liquid discharge head 405 Main scanning motor 406 Drive pulley 407 Driven pulley 408 Timing belt 410 Paper 412 Conveying belt 413 Conveying roller 414 Tension roller 416 Sub-scanning motor 417 Timing belt 418 Timing pulley 420 Maintenance recovery mechanism 421 Cap member 422 Wiper member 440 Liquid discharge unit Tank 442 Cover 443 Connector 444 Flow path parts 450 Liquid cartridge 451 Cartridge holder 452 Liquid transfer unit 456 Tube 491A, 491B Side plate 491C Back plate 493 Main scanning movement mechanism 494 Supply mechanism 495 Transport mechanism

Japanese Unexamined Patent Publication No. 2013-49191 Japanese Unexamined Patent Publication No. 2013-163341

Claims (7)

An actuator board on which an actuator is formed, wherein a liquid chamber having a length and a short side with respect to the surface direction of the actuator board is formed on the side opposite to the surface on which the actuator is formed.
A liquid discharge head in which a support substrate having a recess formed as a drive region of the actuator formed on a surface facing the actuator substrate is joined by an adhesive.
The non-formed portion of the recess in the support substrate is a bonded partition wall to be joined to the actuator substrate, and the bonded partition walls are arranged in the lateral direction of the liquid chamber.
Of the portions of the support substrate to be joined to the actuator board, at least a part excluding the joining partition wall has a lattice shape.
A liquid discharge head characterized in that the width in the lateral side of the liquid chamber at a portion of the joint partition wall to be joined to the actuator substrate is larger than the line width of the lattice shape. The liquid discharge head according to claim 1 , wherein a gap portion is provided in the cross portion in the lattice shape. The liquid discharge head according to claim 1 or 2 , wherein the width of the cross portion in the lattice shape is smaller than the width of the portion other than the cross portion. The liquid discharge head according to any one of claims 1 to 3 , wherein the width of the cross portion in the lattice shape is continuously reduced toward the center of the cross portion. A liquid discharge unit comprising the liquid discharge head according to any one of claims 1 to 4 . A head tank that stores the liquid to be supplied to the liquid discharge head, a carriage on which the liquid discharge head is mounted, a supply mechanism that supplies the liquid to the liquid discharge head, a maintenance / recovery mechanism that maintains and recovers the liquid discharge head, and the liquid. The liquid discharge unit according to claim 5 , wherein at least one of the main scanning moving mechanisms for moving the discharge head in the main scanning direction is integrated with the liquid discharge head. A device for discharging a liquid, comprising the liquid discharge head according to any one of claims 1 to 4 or the liquid discharge unit according to claim 5 or 6 .

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