JP7058194B2 - socket - Google Patents

Description

The present disclosure relates to a socket for electrically connecting a member to be inspected and a wiring board.

Conventionally, when testing a member to be inspected such as an IC package (for example, a burn-in test), a socket has been used to electrically connect the member to be inspected and a wiring board.

Patent Document 1 includes a socket body, a floating that houses an IC package, and a contact pin that is fixed to the socket body and has a contact piece that comes into contact with a lead terminal of the IC package housed in the floating. Is described.

In this socket, the floating positioning hole engages with the guide projection of the socket body in a slightly loosely fitted state. As a result, the lateral displacement of the floating with respect to the socket body is restricted, and the IC package and the contact pin are positioned.

Jitsufuku No. 5-17829 Gazette

With the miniaturization of the member to be inspected, it is required to improve the positioning accuracy between the member to be inspected and the contact pin.

An object of the present disclosure is to provide a socket capable of improving the positioning accuracy between the member to be inspected and the contact pin.

The socket according to one aspect of the present disclosure includes a socket main body, a rigid body portion fixed to the socket main body and extending upward, and an elastic portion extending in a direction including a horizontal component from the rigid body portion. A probe pin provided on one end side of the elastic portion and having a contact portion in contact with the member to be inspected, an accommodating portion for accommodating the member to be inspected, and a hole into which the rigid portion is inserted. It has a floating structure that moves in the vertical direction with respect to the socket body while being restricted from moving in the horizontal direction by the rigid body portion.

According to the present disclosure, the positioning accuracy between the member to be inspected and the contact pin can be improved.

FIG. 1A is a plan view showing an example of a socket. FIG. 1B is a cross-sectional view taken along the line 1B-1B of FIG. 1A. FIG. 1C is a cross-sectional view taken along the line 1C-1C of FIG. 1A. FIG. 2A is a plan view showing an example of the socket body. FIG. 2B is a cross-sectional view taken along the line 2B-2B of FIG. 2A. FIG. 2C is a cross-sectional view taken along the line 2C-2C of FIG. 2A. FIG. 2D is a cross-sectional view taken along the line 2D-2D of FIG. 2A. FIG. 3A is a plan view showing an example of floating. FIG. 3B is an enlarged plan view showing a floating accommodating portion. FIG. 3C is a cross-sectional view taken along the line 3C-3C of FIG. 3A. FIG. 4 is a diagram showing an example of a probe pin. FIG. 5A is a cross-sectional view showing a state in which the cover is closed. FIG. 5B is a cross-sectional view showing a state in which the cover is closed. FIG. 6 is a diagram showing another example of the probe pin.

Hereinafter, embodiments of the present disclosure will be described in detail with reference to the drawings. The embodiments described below are examples, and the present disclosure is not limited to these embodiments. The components of the embodiments described below can be combined as appropriate. In addition, some components may not be used.

In the following description, when the same type of elements are distinguished and described, for example, "probe pin 40a", using a reference code composed of a combination of a common number consisting of numbers and a serial number consisting of alphabets, for example, "probe pin 40a". It is expressed as "probe pin 40b". Further, in the case of comprehensively explaining the same type of elements without distinguishing them, only the common number among the reference numerals is used and expressed as, for example, "probe pin 40".

1A, 1B, 1C, 2A, 2B, 2C, 2D, 3A, 3C, 5A and 5B are composed of X-axis, Y-axis and Z-axis for convenience of explanation. A dimensional Cartesian coordinate system is drawn. The positive direction of the X axis is defined as the + X direction, the positive direction of the Y axis is defined as the + Y direction, and the positive direction of the Z axis is defined as the + Z direction (upward direction).

FIG. 1A is a plan view showing an example of the socket 100 according to the embodiment. The lower half of FIG. 1A shows a state in which the cover 30 (described later) is removed. FIG. 1B is a cross-sectional view taken along the line 1B-1B of FIG. 1A. Note that FIG. 1B shows a state in which the cover 30 is open. FIG. 1C is a cross-sectional view taken along the line 1C-1C of FIG. 1A. In FIG. 1C, the cover 30 is omitted.

The socket 100 is a device that houses the member to be inspected 1 and electrically connects the housed member 1 to be inspected and a wiring board (not shown) attached to the lower side of the socket 100. The member 1 to be inspected is, for example, an electronic component such as an IC package.

Various tests are performed on the member 1 to be inspected, which is housed in the socket 100 and electrically connected to the wiring board. For example, it is investigated whether the member 1 to be inspected operates properly in the same environment as the actual usage environment of the member 1 to be inspected, or in an environment where a load is applied more than the actual environment. The socket 100 is a device for connecting the member 1 to be inspected and the wiring board in order to perform such a test.

The socket 100 has a socket body 10, a floating 20, a cover 30, and a plurality of probe pins 40.

(Socket body 10)
The socket main body 10 will be described with reference to FIGS. 2A to 2D. FIG. 2A is a plan view showing an example of the socket body 10. FIG. 2B is a cross-sectional view taken along the line 2B-2B of FIG. 2A. FIG. 2C is a cross-sectional view taken along the line 2C-2C of FIG. 2A. FIG. 2D is a cross-sectional view taken along the line 2D-2D of FIG. 2A.

The socket body 10 includes a frame body 11, a bearing portion 12, a recess 13, a pin fixing portion 14, a spring fixing portion 15, a first claw portion 16, and a stopper claw portion 17.

The frame 11 defines the outer shape of the socket body 10. The outer shape of the socket body 10 defined by the frame 11 is a substantially rectangular shape in a plan view.

The bearing portion 12 is provided so as to project in the + X direction from the + X end of the frame body 11. The bearing portion 12 includes a bearing portion 12a and a bearing portion 12b. The bearing portion 12a is provided on the + Y end side of the socket body 10. The bearing portion 12b is provided on the −Y end side of the socket body 10. A shaft 18 (see FIG. 1A) is inserted through the bearing portion 12.

The recess 13 is a portion surrounded by the frame body 11. The recess 13 is formed near the center of the upper surface of the socket body 10. The recess 13 accommodates the floating 20. Through holes 53 penetrating in the vertical direction are provided on the + X end side and the −X end side of the recess 13. In this embodiment, the through holes 53 are provided at four locations. The second claw portion 24 (described later) of the floating 20 is inserted into the through hole 53.

The pin fixing portion 14 is provided in the recess 13. As shown in FIGS. 2B and 2D, the pin fixing portion 14 is provided with a groove 51 for accommodating the probe pin 40. The bottom of the groove 51 is provided with a through hole 52 that penetrates to the lower surface of the socket body 10. A second contact portion 44 (described later) of the probe pin 40 is inserted into the through hole 52.

The pin fixing portion 14 includes a pin fixing portion 14a, a pin fixing portion 14b, a pin fixing portion 14c, and a pin fixing portion 14d. The pin fixing portion 14a extends from the substantially center of the socket body 10 in the + X direction (an example of the “second horizontal direction”). A probe pin 40a (described later) is fixed to the pin fixing portion 14a. The pin fixing portion 14b extends from the substantially center of the socket body 10 in the −X direction (an example of the “first horizontal direction”). A probe pin 40b (described later) is fixed to the pin fixing portion 14b.

The pin fixing portion 14c extends in the + Y direction from the approximate center of the socket body 10. Probe pins 40c, 40d, 40e and 40f (described later) are fixed to the pin fixing portion 14c. The pin fixing portion 14d extends from the substantially center of the socket body 10 in the −Y direction (an example of the “third horizontal direction”). Probe pins 40g, 40h, 40j and 40k (described later) are fixed to the pin fixing portion 14d.

The spring fixing portion 15 is provided in the recess 13. In this embodiment, the spring fixing portions 15 are provided at four locations. A coil spring 19 (an example of a “biasing member”; see FIG. 1B) is arranged in the spring fixing portion 15. The coil spring 19 is a compression spring that expands and contracts in the vertical direction.

The first claw portion 16 is provided so as to project from the frame body 11 toward the through hole 53. In this embodiment, the first claw portion 16 is provided at four locations. The first claw portion 16 engages with the second claw portion 24 provided on the floating 20.

As shown in FIG. 2C, the stopper claw portion 17 is provided so as to project from the frame body 11 in the −X direction. The stopper claw portion 17 engages with a claw 36 (described later) provided on the stopper 35 (described later).

(Floating 20)
Floating 20 will be described with reference to FIGS. 3A to 3C. FIG. 3A is a plan view showing an example of the floating 20. FIG. 3B is an enlarged plan view showing the accommodating portion 22. FIG. 3C is a cross-sectional view taken along the line 3C-3C of FIG. 3A.

The floating 20 includes a flat plate portion 21, an accommodating portion 22, a hole 23, a second claw portion 24, and a recess 25.

The flat plate portion 21 defines the outer shape of the floating 20. The outer shape of the floating 20 defined by the flat plate portion 21 is a substantially rectangular shape in a plan view.

The accommodating portion 22 is provided substantially in the center of the flat plate portion 21. The accommodating portion 22 will be described in detail with reference to FIG. 3B. The accommodating portion 22 is formed in a concave shape according to the outer shape of the member 1 to be inspected accommodated in the accommodating portion 22.

A through groove 54 is formed at the bottom of the accommodating portion 22 so as to penetrate to the lower surface of the flat plate portion 21. The position of the through groove 54 coincides with the position of the terminal of the member 1 to be inspected arranged in the accommodating portion 22. Further, the contact portion 43 of the probe pin 40 is inserted into the through groove 54.

At the bottom of the accommodating portion 22, a thick groove 55 extending outward from a pair of facing side surfaces (+ X side and −X side surfaces) is formed. As a result, a device such as a manipulator can be inserted into the thick groove 55 to attach or detach the member 1 to be inspected.

The hole 23 is provided in the flat plate portion 21. The hole 23 penetrates the flat plate portion 21 in the vertical direction. The hole 23 includes the hole 23a, the hole 23b, the hole 23c, and the hole 23d. The hole 23a is provided on the + X side of the accommodating portion 22. The hole 23a is a rectangular long hole having a long axis in the X direction. The wall surface defining the + X side end of the hole 23a is referred to as a wall surface 26a. The hole 23b is provided on the −X side of the accommodating portion 22. The hole 23b is a rectangular long hole having a long axis in the X direction. The wall surface defining the −X side end of the hole 23b is referred to as a wall surface 26b.

The hole 23c is provided on the + Y side of the accommodating portion 22. The hole 23c is a rectangular long hole having a long axis in the Y direction. The wall surface defining the + Y side end of the hole 23c is referred to as a wall surface 26c. The wall surface defining the + X side end of the hole 23c is referred to as a wall surface 27c. The wall surface defining the −X side end of the hole 23c is referred to as a wall surface 28c.

The hole 23d is provided on the −Y side of the accommodating portion 22. The hole 23d is a rectangular long hole having a long axis in the Y direction. The wall surface defining the −Y side end of the hole 23d is referred to as a wall surface 26d. The holes 23a and 23b have the same shape. The holes 23c and 23d have the same shape. The length of the minor axis of the hole 23a and the hole 23b is shorter than the length of the minor axis of the hole 23c and the hole 23d.

The probe pin 40a is inserted into the hole 23a. The probe pin 40b is inserted into the hole 23b. Probe pins 40c, 40d, 40e and 40f are inserted into the holes 23c. Probe pins 40g, 40h, 40j and 40k are inserted into the holes 23d.

The second claw portion 24 is provided at the + X end and the −X end of the flat plate portion 21. The second claw portion 24 extends downward (−Z direction). In the present embodiment, the second claw portion 24 is provided at four locations. As described above, the second claw portion 24 engages with the first claw portion 16 provided on the socket body 10.

The recess 25 is provided on the lower surface of the flat plate portion 21. In this embodiment, the recesses 25 are provided at four locations. The recesses 25 are provided corresponding to the spring fixing portions 15 provided in the socket main body 10, respectively. The upper end side of the coil spring 19 fits into the recess 25. The upper end of the coil spring 19 abuts on the bottom of the recess 25.

(Cover 30)
The cover 30 will be described with reference to FIGS. 1A and 1B. The cover 30 is a member that covers the upper side of the socket body 10. The cover 30 includes a main body 31, a first bearing portion 32, and a second bearing portion 33.

The main body 31 defines the outer shape of the cover 30. The outer shape of the cover 30 defined by the main body 31 is a substantially rectangular shape in a plan view. A pressing portion 31a projecting downward is provided at the center of the main body 31.

The first bearing portion 32 is provided so as to project in the + X direction from the + X end of the main body 31 in a state where the cover 30 is closed. The first bearing portion 32 includes a first bearing portion 32a and a first bearing portion 32b. The first bearing portion 32a is provided on the + Y end side of the cover 30. The first bearing portion 32b is provided on the −Y end side of the cover 30. A shaft 18 is inserted through the first bearing portion 32.

The shaft 18 is provided so as to insert the bearing portion 12 of the socket body 10 and the first bearing portion 32 of the cover 30. A coil spring 56 is provided so as to surround the shaft 18. The first end of the coil spring 56 is fixed to the socket body 10 and the second end is fixed to the cover 30. The coil spring 56 urges the cover 30 in the opening direction.

The second bearing portion 33 is provided so as to project from the −X end of the main body 31 in the −X direction. A shaft 34 (see FIG. 1B) is inserted through the second bearing portion 33.

A stopper 35 is provided so as to be pivotally supported by the shaft 34. Further, a coil spring 57 (see FIG. 1B) is provided so as to surround the shaft 34. The first end of the coil spring 57 is fixed to the cover 30, and the second end is fixed to the stopper 35. The coil spring 57 urges the stopper 35 to rotate counterclockwise in FIG. 1B about the shaft 34.

The stopper 35 has a claw 36 that is hooked on the stopper claw portion 17 of the socket body 10. The cover 30 is fixed to the socket body 10 by the claw 36 being caught by the stopper claw portion 17. Further, the cover 30 is released from being fixed to the socket body 10 by releasing the hooking of the claw 36 on the stopper claw portion 17.

(Probe pin 40)
The probe pin 40 will be described with reference to FIG. FIG. 4 is a diagram showing an example of the probe pin 40. In the present embodiment, the probe pin 40 is a component manufactured by punching a thin plate. In the following description, the direction orthogonal to the paper surface in FIG. 4 may be referred to as a "plate thickness direction".

The probe pin 40 is a member that contacts the member 1 to be inspected housed in the housing portion 22 of the floating 20 and the wiring board attached to the lower side of the socket body 10 and electrically connects them. The probe pin 40 is made of, for example, a conductive metal.

The probe pin 40 includes a rigid body portion 41, an elastic portion 42, a contact portion 43, and a second contact portion 44. Hereinafter, each part of the probe pin 40 will be described. In the following description, for convenience, the orientation of the probe pin 40 fixed to the socket body 10 will be used.

The rigid body portion 41 is a portion fixed to the socket body 10. Specifically, the probe pin 40 is fixed to the socket body 10 by press-fitting the rigid body 41 into the groove 51 provided in the pin fixing portion 14 of the socket body 10.

With the probe pin 40 fixed to the socket body 10, the rigid body portion 41 extends in the horizontal direction and further extends in the upward direction. The rigid body portion 41 does not deform when the contact portion 43 is pressed by the member to be inspected 1. The rigid body portion 41 has a wall surface 45 on the side opposite to the extending direction of the elastic portion 42.

The elastic portion 42 extends from the upper end side of the rigid body portion 41 in a direction including a horizontal component. Specifically, the elastic portion 42 extends upward from the upper end of the rigid body portion 41, curves downward, and further curves and extends horizontally. The base of the elastic portion 42 is connected to the rigid body portion 41. The elastic portion 42 bends when the contact portion 43 is pressed by the member 1 to be inspected.

The contact portion 43 is provided at the tip end portion of the elastic portion 42 (the end portion on the side opposite to the side connected to the rigid body portion 41). The position where the contact portion 43 is provided is not limited to this, and for example, the contact portion 43 may be provided in the intermediate portion of the elastic portion 42. The contact portion 43 comes into contact with the member 1 to be inspected. Specifically, the contact portion 43 comes into contact with the terminal of the component 1 to be inspected housed in the accommodating portion 22 of the floating 20.

It is preferable that the vertical position of the upper end of the contact portion 43 (the portion that comes into contact with the lower end of the member 1 to be inspected) and the vertical position of the base portion of the elastic portion 42 are close to each other. As a result, when the contact portion 43 is pushed down by the member to be inspected 1, the contact portion 43 hardly moves in the horizontal direction, and the contact state between the terminal of the member to be inspected 1 and the contact portion 43 is more reliably secured. Can be done.

The second contact portion 44 extends downward from the lower end of the rigid body portion 41. The second contact portion 44 comes into contact with the wiring board, respectively.

In this embodiment, the probe pin 40 includes probe pins 40a, 40b, 40c, 40d, 40e, 40f, 40g, 40h, 40j and 40k. As described above, the probe pin 40a is fixed to the pin fixing portion 14a of the socket body 10. The probe pin 40b is fixed to the pin fixing portion 14b of the socket body 10.

The probe pins 40c, 40d, 40e and 40f are fixed to the pin fixing portion 14c of the socket body 10. The probe pins 40g, 40h, 40j and 40k are fixed to the pin fixing portion 14d of the socket body 10.

The socket body 10, the floating 20, the cover 30, and the probe pin 40 constituting the socket 100 have been described above.

In FIGS. 1B and 1C, the probe pin 40 is press-fitted and fixed to the socket body 10, the floating 20 is set to the socket body 10, and the member 1 to be inspected is housed in the accommodating portion 22 of the floating 20. It shows the state that was done.

The floating 20 is urged upward by the coil spring 19. Further, the floating 20 is in a state in which the upward movement is restricted by the engagement between the first claw portion 16 of the socket main body 10 and the second claw portion 24 of the floating 20.

In this state, there is a slight gap between the upper end of the contact portion 43 of the probe pin 40 and the lower end of the member 1 to be inspected. In other words, the contact portion 43 of the probe pin 40 is not in contact with the member 1 to be inspected.

Further, the rigid portion 41 of the probe pin 40 is inserted into the hole 23 of the floating 20, but is not in contact with the floating 20. That is, there is a gap between the inner wall surface of the hole 23 and the rigid portion 41.

Therefore, the movement of the floating 20 in the horizontal direction is not restricted, and the floating 20 can move in the horizontal direction. Further, the elastic portion 42 of the probe pin 40 is not bent.

When the cover 30 is closed, the member 1 to be inspected is pressed downward by the pressing portion 31a of the cover 30. As a result, the floating 20 moves downward while being guided by the rigid body portion 41 of the probe pin 40.

Specifically, the wall surface 26a of the floating 20 comes into contact with the wall surface 45a provided on the rigid body portion 41a of the probe pin 40a (an example of the "first rigid body portion"), so that the floating surface 20 is in contact with the probe pin 40a. It is restricted to move in the -X direction.

Further, the wall surface 26b of the floating 20 comes into contact with the wall surface 45b provided on the rigid body portion 41b of the probe pin 40b (an example of the "second rigid body portion"), so that the floating surface 20 is in the + X direction with respect to the probe pin 40b. It is restricted to move to.

Further, the wall surface 26c of the floating 20 comes into contact with the wall surfaces 45c, 45d, 45e and 45f provided on the rigid bodies 41c, 41d, 41e and 41f of the probe pins 40c, 40d, 40e and 40f, so that the floating 20 is a probe. Movement in the −Y direction is restricted with respect to the pins 40c, 40d, 40e and 40f. The rigid body portion 41c is an example of the “third rigid body portion”.

Further, the wall surface 26d of the floating 20 comes into contact with the wall surfaces 45g, 45h, 45j and 45k provided on the rigid bodies 41g, 41h, 41j and 41k of the probe pins 40g, 40h, 40j and 40k, so that the floating 20 is a probe. Movement in the + Y direction is restricted for pins 40g, 40h, 40j and 40k.

While the floating 20 is moving downward, the contact portion 43 of the probe pin 40 and the member 1 to be inspected come into contact with each other. The floating 20 descends to the state shown in FIGS. 5A and 5B while bending the elastic portion 42 of the probe pin 40. 5A and 5B are views showing a state in which the cover 30 is fixed to the socket body 10.

By the above operation, the member 1 to be inspected is housed in the socket 100, and various tests are performed on the member 1 to be inspected.

As described above, in the present embodiment, the floating 20 moves downward while being restricted from moving in the horizontal direction by the rigid body portion 41 of the probe pin 40. Therefore, the positioning accuracy between the terminal of the member 1 to be inspected and the contact portion 43 can be improved.

In the above-described embodiment, the horizontal movement of the floating 20 is not restricted in the state before the cover 30 is closed (the state shown in FIGS. 1B and 1C), but the description is not limited thereto. .. The horizontal movement of the floating 20 may be restricted before the cover 30 is closed.

For that purpose, the wall surface 26 of the floating 20 and the wall surface 45 of the probe pin 40 may be brought into contact with each other before the cover 30 is closed. Specifically, for example, the rigid body portion 41 of the probe pin 40 may be extended upward. Further, for example, the thickness of the flat plate portion 21 of the floating 20 may be increased.

Further, in the above-described embodiment, the rigid body portion 41a restricts the movement of the floating 20 in the −X direction, and the rigid body portion 41b restricts the movement of the floating 20 in the + X direction. Further, the rigid bodies 41c, 41d, 41e and 41f regulated the movement of the floating 20 in the −Y direction, and the rigid bodies 41g, 41h, 41j and 41k restricted the movement of the floating 20 in the + Y direction.

The moving direction of the floating 20 regulated by the rigid body portion 41 is not limited to this.

For example, the dimension of the rigid body portion 41 in the plate thickness direction may be the same as or slightly smaller than the dimension of the hole 23 in the minor axis direction to restrict the movement of the floating 20 in the plate thickness direction of the rigid body portion 41. Specifically, for example, the rigid body portion 41a may restrict the movement of the floating 20 in at least one of the + Y direction and the −Y direction.

Further, for example, the contact between the rigid body portion 41c and the wall surface 27c restricts the movement of the floating 20 in the −X direction, and the contact between the rigid body portion 41f and the wall surface 28c causes the floating 20 to move in the + X direction. It may be regulated.

Further, for example, in the rigid body portion, the movement of the floating probe pin in both directions orthogonal to the plate thickness direction may be restricted. An example of this will be described below with reference to the drawings. FIG. 6 is a diagram showing how the probe pin 60a restricts the movement of the floating 20 in the + X direction and the −X direction. The probe pin 60a is a component corresponding to the probe pin 40a in the above-described embodiment.

The rigid body portion 61a of the probe pin 60a has a wall surface 65a that abuts on the wall surface 26a that defines the + X side end of the hole 23a, and a wall surface 66a that abuts on the wall surface 29a that defines the −X side end of the hole 23a.

The elastic portion 62a of the probe pin 60a extends from an intermediate portion in the vertical direction of the wall surface 66a of the rigid body portion 61a in a direction containing a horizontal component (direction from the wall surface 65a toward the wall surface 66a).

According to the probe pin 60a, the wall surface 65a and the wall surface 26a can restrict the movement of the floating 20 in the −X direction, and the wall surface 66a and the wall surface 29a can restrict the movement of the floating 20 in the + X direction.

Further, in the above-described embodiment, the case where the terminal is provided on the lower surface of the member to be inspected has been described as an example, but it is needless to say that the description is not limited to this. The present disclosure can also be applied to a member to be inspected having a terminal extending horizontally from the main body.

Further, in the above-described embodiment, the case where the four probe pins 40c, 40d, 40e and 40f are inserted into the hole 23c has been described as an example, but the description is not limited thereto. The number of probe pins inserted into the holes 23c may be one, or may be a plurality of probe pins other than four. Similarly, the number of probe pins inserted into the hole 23a is not limited to one, and may be a plurality of probe pins.

Further, in the above-described embodiment, the dimension of the rigid body portion 41 in the plate thickness direction and the dimension of the elastic portion 42 in the plate thickness direction are equal to each other. On the other hand, for example, the plate thickness of the rigid body portion 41 may be thicker than the plate thickness of the elastic portion 42. By doing so, the rigid body portion 41 can more reliably regulate the movement of the floating 20 in the plate thickness direction.

The present disclosure is widely available as a socket for electrically connecting a member to be inspected and a wiring board.

1 Inspected member 10 Socket body 11 Frame body 12, 12a, 12b Bearing part 13 Recessed parts 14, 14a, 14b, 14c, 14d Pin fixing part 15 Spring fixing part 16 First claw part 17 Stopper claw part 18 Shaft 19 Coil spring 20 Floating 21 Flat plate part 22 Accommodating part 23, 23a, 23b, 23c, 23d Hole 24 Second claw part 25 Recessed part 26, 26a, 26b, 26c, 26d, 27c, 28c, 29a Wall surface 30 Cover 31 Main body 31a Pressing part 32, 32a , 32b 1st bearing 33 2nd bearing 34 shaft 35 stopper 36 claws 40, 40a, 40b, 40c, 40d, 40e, 40f, 40g, 40h, 40j, 40k probe pins 41, 41a, 41b, 41c, 41d, 41e, 41f, 41g, 41h, 41j, 41k Rigid part 42 Elastic part 43 Contact part 44 Second contact part 45, 45a, 45b, 45c, 45d, 45e, 45f, 45g, 45h, 45j, 45k Wall surface 51 Groove 52 Penetration Hole 53 Through hole 54 Through groove 55 Thick groove 56 Coil spring 57 Coil spring 60a Probe pin 61a Rigid part 62a Elastic part 65a, 66a Wall surface 100 Socket

Claims (6)

With the socket body
A rigid body portion fixed to the socket body and extending upward, an elastic portion extending in a direction including a horizontal component from the rigid body portion, and an elastic portion provided on one end side of the elastic portion and extending thereof. A probe pin having a contact portion, which comes into contact with the member to be inspected,
A floating portion that has an accommodating portion for accommodating the member to be inspected and a hole into which the rigid body portion is inserted, and moves vertically with respect to the socket body while being restricted from moving in the horizontal direction by the rigid body portion. When,
A socket with. The probe pin comprises a first probe pin having a first rigid portion and a first elastic portion extending in a direction comprising a first horizontal component.
The floating is restricted from moving in the first horizontal direction by the first rigid body portion.
The socket according to claim 1. The probe pin further comprises a second probe pin having a second rigid body portion and a second elastic portion extending in a direction comprising a second horizontal component opposite to the first horizontal direction.
The floating is restricted from moving in the second horizontal direction by the second rigid body portion.
The socket according to claim 2. The probe pin further comprises a third probe pin having a third rigid body portion and a third elastic portion extending in a direction comprising a third horizontal component orthogonal to the first horizontal direction.
The floating is restricted from moving in the third horizontal direction by the third rigid body portion.
The socket according to claim 2 or 3. Further provided with an urging member provided between the socket body and the floating to urge the floating upward.
The socket body is provided with a first claw portion, and the socket body is provided with a first claw portion.
The floating is provided with a second claw portion that restricts the upward movement of the floating by engaging with the first claw portion.
The socket according to any one of claims 1 to 3. In a state where the upward movement of the floating is restricted by the engagement between the first claw portion and the second claw portion, there is a gap between the inner wall surface of the hole and the rigid body portion.
The socket according to claim 5.

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