JP7048050B2 - Actuator and actuator manufacturing method - Google Patents

Description

The present invention relates to an actuator and a method for manufacturing the actuator.

Actuators are expected to replace motors and the like that utilize magnetic force because they are lightweight and can obtain a large driving force.

For example, a technique of a laminated electrostatic actuator in which a large number of electrodes are laminated and expanded or contracted according to a voltage applied between the electrodes has been proposed (see Patent Document 1).

Japanese Unexamined Patent Publication No. 2013-243805

In the prior art, electrodes to which a voltage of the same polarity is applied are joined to each other in the stacking direction, but are not joined to electrodes to which a voltage of a different polarity is applied. There is a problem that it is easily deformed and the output of the actuator is not stable.

An object of the present invention is to provide an actuator having a stable structure as compared with the conventional one and capable of outputting a large force, and a method for manufacturing the actuator.

One aspect of the actuator illustrating the present invention is a first electrode group having a plurality of first band-shaped electrodes arranged in parallel at predetermined intervals on a plane, and a plurality of first band-shaped electrodes of the first electrode group. A second band having a plurality of second band-shaped electrodes arranged in parallel at predetermined intervals on a plane of the first electrode group in a direction intersecting the arranged direction and to which a voltage having a polarity opposite to that of the first electrode group is applied. A voltage of the same polarity as the first electrode group, which is arranged in parallel between each of the plurality of first band-shaped electrodes on the plane of the two electrode group and the second electrode group facing each other on the opposite side of the first electrode group. Is applied in parallel between each of the plurality of second band-shaped electrodes on the plane of the third electrode group having the plurality of third band-shaped electrodes and the third electrode group facing each other on the opposite side of the second electrode group. A plurality of pairs of the first electrode group and the fourth electrode group having a plurality of fourth band-shaped electrodes to which a voltage of opposite polarity is applied are provided, and the plurality of pairs are in the vertical direction of the plane of the first electrode group. The first electrode group and the second electrode group are joined at the positions where the plurality of first band-shaped electrodes and the plurality of second band-shaped electrodes intersect, respectively, and the second electrode group and the third electrode group are , The plurality of second band-shaped electrodes and the plurality of third band-shaped electrodes are joined at the intersecting positions, and the third electrode group and the fourth electrode group are the plurality of third band-shaped electrodes and the plurality of fourth band-shaped electrodes. Are joined at the positions where they intersect, and the fourth electrode group and the adjacent set of the first electrode group are joined at the positions where the plurality of fourth band-shaped electrodes and the plurality of adjacent sets of the first band-shaped electrodes intersect with each other. Will be done.

Further, the first band-shaped electrode, the second band-shaped electrode, the third band-shaped electrode and the fourth band-shaped electrode may have the same width as each other, and the predetermined interval may be the width of the first band-shaped electrode.

Further, the first band-shaped electrode, the second band-shaped electrode, the third band-shaped electrode and the fourth band-shaped electrode may be covered with a dielectric.

One aspect of the method for manufacturing an actuator illustrating the present invention is to form a plurality of strip-shaped electrodes sandwiched between dielectrics having a predetermined thickness, and a part of the plurality of strip-shaped electrodes is set as a first electrode group at a predetermined interval. The first electrode group is arranged in parallel on a plane, and a part of the plurality of band-shaped electrodes is set as the second electrode group in a direction intersecting the direction in which the plurality of band-shaped electrodes of the first electrode group are arranged. The first electrode group and the first electrode group are arranged in parallel at predetermined intervals on a plane at a position where the plurality of first band-shaped electrodes of the first electrode group and the plurality of second band-shaped electrodes of the second electrode group intersect with each other. The two electrode groups are joined together, and a part of the plurality of band-shaped electrodes is used as the third electrode group, and the plurality of first band-shaped electrodes are formed on the plane of the second electrode group facing the first electrode group on the opposite side. Arranged in parallel between each, the second electrode group and the third electrode group are joined at a position where the plurality of second band-shaped electrodes and the plurality of third band-shaped electrodes of the third electrode group intersect with each other. The rest of the plurality of strip-shaped electrodes is set as the fourth electrode group, and is arranged in parallel between each of the plurality of second strip-shaped electrodes on the plane of the third electrode group facing the second electrode group on the opposite side. The third electrode group and the fourth electrode group are joined at positions where the plurality of third band-shaped electrodes and the plurality of fourth band-shaped electrodes of the fourth electrode group intersect, respectively, and the first electrode group and the second electrode group are joined. , A plurality of pairs of the third electrode group and the fourth electrode group, and a pair adjacent to the fourth electrode group at a position where the plurality of fourth band-shaped electrodes and the plurality of adjacent first band-shaped electrodes intersect with each other. The first electrode group is joined and laminated in the vertical direction of the plane of the adjacent set of the first electrode group.

The present invention has a more stable structure than the conventional one and can output a large force.

It is a figure which shows one Embodiment of an actuator. It is a figure which shows an example of the arrangement pattern of the electrode film shown in FIG. 1 and the pattern of the adhesive to be applied. It is a figure which shows an example of the manufacturing method of the actuator shown in FIG.

Hereinafter, embodiments will be described with reference to the drawings.

FIG. 1 shows an embodiment of an actuator.

In the actuator 100 shown in FIG. 1, a set of electrode films 10-40 laminated in the order of the electrode films 10-40 coated with the adhesives shown in shading are laminated in the Z-axis direction, and two end members such as an acrylic plate are laminated. It is a laminated electrostatic actuator sandwiched between 50.

Each of the electrode films 10-40 is, for example, a strip-shaped electrode plate in which a metal film such as copper is sandwiched between a dielectric film such as a PET (Polyethylene Terephthalate) film. The thickness of the electrode film 10-40 is, for example, 4 micrometers. Then, for example, an adhesive such as silylated urethane is applied to each of the surfaces of the electrode film 10-40 above the Z axis in patterns different from each other. The length and width of the electrode films 10-40 are the same as each other.

FIG. 2 shows an example of the arrangement pattern of the electrode film 10-40 shown in FIG. 1 and the pattern of the adhesive to be applied. FIG. 2A shows an arrangement pattern of the electrode film 10 and a pattern of an adhesive applied to the electrode film 10, and FIG. 2B shows an arrangement pattern of the electrode film 20 and the electrode film 20. The pattern of the adhesive applied to is shown. FIG. 2C shows an arrangement pattern of the electrode film 30 and a pattern of an adhesive applied to the electrode film 30, and FIG. 2D shows an arrangement pattern of the electrode film 40 and the electrode film 40. The pattern of the adhesive applied to is shown.

As shown in FIG. 2A, for example, the four electrode films 10 extend in the Y-axis direction on the XY plane of the end member 50 as the first electrode group, and the electrode film 10 extends in the X-axis direction. Arranged at intervals of the width of. Then, on each electrode film 10, four electrode films 20 laminated in the Z-axis direction extend in the X-axis direction and are arranged at intervals of the width of the electrode film 20 in the Y-axis direction. The adhesive shown in the hook is applied. Instead of applying the adhesive, double-sided tape or the like may be arranged.

As shown in FIG. 2B, each of the four electrode films 20 is bonded to the electrode film 10 with the adhesive applied in FIG. 2A and arranged as a second electrode group. Then, in each electrode film 20, three electrode films 30 laminated in the Z-axis direction extend in the Y-axis direction, and between each of the four electrode films 10 in the first layer, that is, the electrode film 30. The adhesive is applied to the positions arranged at intervals of the width of. In FIG. 2B, the electrode film 20 is shaded because a voltage having the opposite polarity to the voltage applied to the electrode film 10 is applied to the electrode film 20.

As shown in FIG. 2 (c), each of the three electrode films 30 is bonded to the electrode film 20 with the adhesive applied in FIG. 2 (b) and arranged as a third electrode group. Then, in each electrode film 30, three electrode films 40 laminated in the Z-axis direction extend in the X-axis direction, and between each of the four electrode films 20 in the second layer, that is, the electrode film 40. The adhesive is applied to the positions arranged at intervals of the width of.

As shown in FIG. 2 (d), each of the three electrode films 40 is bonded to the electrode film 30 with the adhesive applied in FIG. 2 (c) and arranged as a fourth electrode group. Then, an adhesive is applied to each electrode film 40 at a position where each of the four electrode films 10 of the first layer of the next set to be laminated in the Z-axis direction is arranged. The four electrode films 10 shown in FIG. 2A are preferably arranged on the XY plane of the end member 50 coated with the adhesive in the pattern shown in FIG. 2D.

In this way, the electrode film 10 and the electrode film 20, the electrode film 20 and the electrode film 30, the electrode film 30 and the electrode film 40, and the electrode film 40 and the adjacent set of the electrode films 10 are subjected to voltages having different polarities. Adhered to each other. As a result, the actuator 100 can stably maintain its structure even when an external force is applied from the X-axis or Y-axis direction.

Further, since the electrode film 10 and the electrode film 30 to which the voltage of the same polarity is applied, and the electrode film 20 and the electrode film 40 are alternately arranged in the X-axis or Y-axis direction at intervals of the width of the electrode film. , The part that operates as a conventional hinge part can be omitted. As a result, the actuator 100 has a structure that does not easily extend in the Z-axis direction, the distance between the electrode films in the Z-axis direction can be reduced, and a larger force can be output as compared with the conventional case.

In FIG. 2, there are four electrode films 10 in the first electrode group, four electrode films 20 in the second electrode group, three electrode films 30 in the third electrode group, and an electrode film 40 in the fourth electrode group. The number is 3, but it is not limited to this. It is preferable that the number of each of the electrode films 10-40 is appropriately determined according to the size of the XY plane of the actuator 100, the size of the output required for the actuator 100, and the like.

The shape of the XY plane of the actuator 100 is a square, but it may be a rectangle such as a rectangle. Then, it is preferable that the number of each of the electrode films 10-40 is appropriately determined according to the shape of the XY plane of the actuator 100, the magnitude of the output required for the actuator 100, and the like.

FIG. 3 shows an example of the manufacturing method of the actuator 100 shown in FIG. For example, in order to produce the electrode film 10-40, an electrode sheet in which a copper thin film is sandwiched between PET films is produced (FIG. 3A). The electrode sheet shown in FIG. 3 (a) is cut in a strip shape along a broken line in the figure, for example (FIG. 3 (b)). Then, the electrode sheet (that is, the electrode film 10-40) cut in the strip shape shown in FIG. 3B is subjected to an etching treatment to remove the copper thin film exposed on the cut surface (FIG. 3). (C)). In the etched electrode sheet shown in FIG. 3 (c), the cut surface is joined with a PET film to form an electrode film 10-40.

Each of the generated electrode films 10-40 is arranged in the order shown in FIGS. 2 (a) and 2 (d), and is laminated in the Z-axis direction. As a result, the actuator 100 is generated.

As described above, in the embodiment shown in FIGS. 1 to 3, the actuator 100 has an electrode film 10 and an electrode film 20, an electrode film 20 and an electrode film 30, an electrode film 30 and an electrode film 40 to which voltages having different polarities are applied. , The electrode film 40 and the adjacent set of electrode films 10 are adhered to each other in the Z-axis direction. As a result, the actuator 100 can stably maintain its structure even when an external force such as gravity is applied.

Further, the electrode film 10 and the electrode film 30 to which a voltage having the same polarity is applied, and the electrode film 20 and the electrode film 40 are alternately arranged in the X-axis or Y-axis direction at intervals of the width of the electrode film. Therefore, the part that operates as the conventional hinge part can be omitted. As a result, the actuator 100 has a structure that does not easily extend in the Z-axis direction, the distance between the electrode films in the Z-axis direction can be reduced, and a larger force can be output as compared with the conventional case.

The above detailed description will clarify the features and advantages of the embodiments. It is intended that the claims extend to the features and advantages of the embodiments as described above, without departing from their spirit and scope of rights. In addition, anyone with ordinary knowledge in the art should be able to easily come up with any improvements or changes, and there is no intention to limit the scope of the embodiments having the invention to the above-mentioned embodiments. It is also possible to use suitable improvements and equivalents within the scope disclosed in.

10, 20, 30, 40 ... Electrode film; 50 ... End member; 100 ... Actuator

Claims (4)

The first electrode group having a plurality of first band-shaped electrodes arranged in parallel at predetermined intervals on a plane and the direction in which the plurality of first band-shaped electrodes of the first electrode group are arranged intersect with each other. A second electrode group having a plurality of second band-shaped electrodes arranged in parallel on the plane of the first electrode group at predetermined intervals and to which a voltage having a polarity opposite to that of the first electrode group is applied, and the above. It is arranged in parallel between each of the plurality of first band-shaped electrodes on the plane of the second electrode group facing on the opposite side of the first electrode group, and a voltage having the same polarity as that of the first electrode group is applied. The third electrode group having the plurality of third band-shaped electrodes to be formed is parallel to each of the plurality of second band-shaped electrodes on the plane of the third electrode group facing the second electrode group on the opposite side. A plurality of pairs of the first electrode group and the fourth electrode group having a plurality of fourth band-shaped electrodes to which a voltage of opposite polarity is applied are provided.
The plurality of sets are laminated in the direction perpendicular to the plane of the first electrode group.
The first electrode group and the second electrode group are joined at a position where the plurality of first band-shaped electrodes and the plurality of second band-shaped electrodes intersect with each other.
The second electrode group and the third electrode group are joined at a position where the plurality of second band-shaped electrodes and the plurality of third band-shaped electrodes intersect with each other.
The third electrode group and the fourth electrode group are joined at a position where the plurality of third band-shaped electrodes and the plurality of fourth band-shaped electrodes intersect with each other.
The first electrode group of the set adjacent to the fourth electrode group is joined at a position where the plurality of fourth band-shaped electrodes and the plurality of first band-shaped electrodes of the adjacent set intersect with each other. Characterized actuator. In the actuator according to claim 1,
The first band-shaped electrode, the second band-shaped electrode, the third band-shaped electrode, and the fourth band-shaped electrode have the same width as each other.
An actuator characterized in that the predetermined interval is the width of the first band-shaped electrode. In the actuator according to claim 1 or 2.
An actuator characterized in that the first band-shaped electrode, the second band-shaped electrode, the third band-shaped electrode, and the fourth band-shaped electrode are covered with a dielectric material. A plurality of strip-shaped electrodes sandwiched between dielectrics having a predetermined thickness are formed, and a plurality of strip-shaped electrodes are formed.
A part of the plurality of strip-shaped electrodes is arranged on a plane in parallel at predetermined intervals as a first electrode group.
A part of the plurality of strip-shaped electrodes is set as the second electrode group, and the predetermined predetermined shape is formed on the plane of the first electrode group in a direction intersecting the direction in which the plurality of strip-shaped electrodes of the first electrode group are arranged. The first electrode group and the second electrode group are arranged in parallel at intervals at positions where the plurality of first band-shaped electrodes of the first electrode group and the plurality of second band-shaped electrodes of the second electrode group intersect with each other. Join the electrode group and
A part of the plurality of strip-shaped electrodes is set as a third electrode group, and between each of the plurality of first strip-shaped electrodes on the plane of the second electrode group facing the first electrode group on the opposite side. Arranged in parallel, the second electrode group and the third electrode group are joined at positions where the plurality of second band-shaped electrodes and the plurality of third band-shaped electrodes of the third electrode group intersect with each other.
The rest of the plurality of strip-shaped electrodes is set as the fourth electrode group, and is parallel between each of the plurality of second strip-shaped electrodes on the plane of the third electrode group facing the second electrode group on the opposite side. The third electrode group and the fourth electrode group are joined at a position where the plurality of third band-shaped electrodes and the plurality of fourth band-shaped electrodes of the fourth electrode group intersect with each other.
A plurality of pairs of the first electrode group, the second electrode group, the third electrode group, and the fourth electrode group are combined with the plurality of first band-shaped electrodes in a set adjacent to the plurality of fourth band-shaped electrodes. The fourth electrode group and the first electrode group of the adjacent set are joined at the positions where they intersect with each other, and the first electrode group of the adjacent set is laminated in the vertical direction of the plane. How to manufacture the actuator.

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