JP7042490B2 - マイクロ波処理装置、および炭素繊維の製造方法 - Google Patents
マイクロ波処理装置、および炭素繊維の製造方法 Download PDFInfo
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- JP7042490B2 JP7042490B2 JP2018220391A JP2018220391A JP7042490B2 JP 7042490 B2 JP7042490 B2 JP 7042490B2 JP 2018220391 A JP2018220391 A JP 2018220391A JP 2018220391 A JP2018220391 A JP 2018220391A JP 7042490 B2 JP7042490 B2 JP 7042490B2
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- 238000012545 processing Methods 0.000 title claims description 213
- 229920000049 Carbon (fiber) Polymers 0.000 title description 36
- 239000004917 carbon fiber Substances 0.000 title description 36
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 title description 35
- 238000004519 manufacturing process Methods 0.000 title description 13
- 230000001678 irradiating effect Effects 0.000 claims description 40
- 238000010438 heat treatment Methods 0.000 description 157
- 239000000835 fiber Substances 0.000 description 54
- 239000000463 material Substances 0.000 description 54
- 239000002243 precursor Substances 0.000 description 48
- 239000007789 gas Substances 0.000 description 42
- 230000020169 heat generation Effects 0.000 description 39
- 230000032258 transport Effects 0.000 description 26
- 239000001301 oxygen Substances 0.000 description 15
- 229910052760 oxygen Inorganic materials 0.000 description 15
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 14
- 230000005540 biological transmission Effects 0.000 description 12
- 238000000034 method Methods 0.000 description 10
- 230000008569 process Effects 0.000 description 10
- 230000001965 increasing effect Effects 0.000 description 8
- 229910052751 metal Inorganic materials 0.000 description 8
- 239000002184 metal Substances 0.000 description 8
- 238000012986 modification Methods 0.000 description 8
- 230000004048 modification Effects 0.000 description 8
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 7
- 230000008859 change Effects 0.000 description 5
- 239000000203 mixture Substances 0.000 description 5
- 238000004804 winding Methods 0.000 description 5
- 229910052799 carbon Inorganic materials 0.000 description 4
- 239000011521 glass Substances 0.000 description 4
- 239000000843 powder Substances 0.000 description 4
- 230000005855 radiation Effects 0.000 description 4
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 3
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 3
- 238000010521 absorption reaction Methods 0.000 description 3
- 239000000919 ceramic Substances 0.000 description 3
- 229910010293 ceramic material Inorganic materials 0.000 description 3
- 239000002131 composite material Substances 0.000 description 3
- 238000007796 conventional method Methods 0.000 description 3
- 229910002804 graphite Inorganic materials 0.000 description 3
- 239000010439 graphite Substances 0.000 description 3
- 229910052750 molybdenum Inorganic materials 0.000 description 3
- 239000011733 molybdenum Substances 0.000 description 3
- 230000035699 permeability Effects 0.000 description 3
- 229920000642 polymer Polymers 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 3
- 229910052721 tungsten Inorganic materials 0.000 description 3
- 239000010937 tungsten Substances 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 229920000742 Cotton Polymers 0.000 description 2
- 239000004677 Nylon Substances 0.000 description 2
- 238000005452 bending Methods 0.000 description 2
- 238000003763 carbonization Methods 0.000 description 2
- 210000000085 cashmere Anatomy 0.000 description 2
- 230000003247 decreasing effect Effects 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 230000005684 electric field Effects 0.000 description 2
- 229920006015 heat resistant resin Polymers 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 229920001778 nylon Polymers 0.000 description 2
- 230000035515 penetration Effects 0.000 description 2
- -1 polytetrafluoroethylene Polymers 0.000 description 2
- 229920001343 polytetrafluoroethylene Polymers 0.000 description 2
- 239000004810 polytetrafluoroethylene Substances 0.000 description 2
- 230000002829 reductive effect Effects 0.000 description 2
- 238000005728 strengthening Methods 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 210000002268 wool Anatomy 0.000 description 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- 239000004698 Polyethylene Substances 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 239000000306 component Substances 0.000 description 1
- 239000012141 concentrate Substances 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000002708 enhancing effect Effects 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 238000010304 firing Methods 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- NBVXSUQYWXRMNV-UHFFFAOYSA-N fluoromethane Chemical compound FC NBVXSUQYWXRMNV-UHFFFAOYSA-N 0.000 description 1
- 229920002313 fluoropolymer Polymers 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 230000002452 interceptive effect Effects 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 150000002825 nitriles Chemical class 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 239000012299 nitrogen atmosphere Substances 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 230000036961 partial effect Effects 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 239000012466 permeate Substances 0.000 description 1
- 230000010363 phase shift Effects 0.000 description 1
- 229920000573 polyethylene Polymers 0.000 description 1
- 238000002310 reflectometry Methods 0.000 description 1
- 230000003014 reinforcing effect Effects 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 230000002441 reversible effect Effects 0.000 description 1
- 238000007363 ring formation reaction Methods 0.000 description 1
- 239000005060 rubber Substances 0.000 description 1
- 238000004088 simulation Methods 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 238000009423 ventilation Methods 0.000 description 1
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- Treatment Of Fiber Materials (AREA)
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2018220391A JP7042490B2 (ja) | 2018-11-26 | 2018-11-26 | マイクロ波処理装置、および炭素繊維の製造方法 |
| JP2022035282A JP2022066481A (ja) | 2018-11-26 | 2022-03-08 | マイクロ波処理装置、および炭素繊維の製造方法 |
| JP2023221868A JP7667593B2 (ja) | 2018-11-26 | 2023-12-27 | マイクロ波処理装置、および炭素繊維の製造方法 |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2018220391A JP7042490B2 (ja) | 2018-11-26 | 2018-11-26 | マイクロ波処理装置、および炭素繊維の製造方法 |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
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| JP2018006744A Division JP6446573B1 (ja) | 2018-01-18 | 2018-01-18 | マイクロ波処理装置、および炭素繊維の製造方法 |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
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| JP2022035282A Division JP2022066481A (ja) | 2018-11-26 | 2022-03-08 | マイクロ波処理装置、および炭素繊維の製造方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2019125573A JP2019125573A (ja) | 2019-07-25 |
| JP2019125573A5 JP2019125573A5 (enExample) | 2021-02-25 |
| JP7042490B2 true JP7042490B2 (ja) | 2022-03-28 |
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| Application Number | Title | Priority Date | Filing Date |
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| JP2018220391A Active JP7042490B2 (ja) | 2018-11-26 | 2018-11-26 | マイクロ波処理装置、および炭素繊維の製造方法 |
| JP2022035282A Withdrawn JP2022066481A (ja) | 2018-11-26 | 2022-03-08 | マイクロ波処理装置、および炭素繊維の製造方法 |
| JP2023221868A Active JP7667593B2 (ja) | 2018-11-26 | 2023-12-27 | マイクロ波処理装置、および炭素繊維の製造方法 |
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| JP2022035282A Withdrawn JP2022066481A (ja) | 2018-11-26 | 2022-03-08 | マイクロ波処理装置、および炭素繊維の製造方法 |
| JP2023221868A Active JP7667593B2 (ja) | 2018-11-26 | 2023-12-27 | マイクロ波処理装置、および炭素繊維の製造方法 |
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| Country | Link |
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| JP (3) | JP7042490B2 (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2022066481A (ja) * | 2018-11-26 | 2022-04-28 | マイクロ波化学株式会社 | マイクロ波処理装置、および炭素繊維の製造方法 |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| MA57761B1 (fr) * | 2020-02-04 | 2023-03-31 | Qwave Solutions Inc | Appareils, systèmes et procédés de chauffage avec des ondes électromagnétiques |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2013002767A (ja) | 2011-06-20 | 2013-01-07 | Micro Denshi Kk | マイクロ波を応用した加熱装置 |
| WO2013145932A1 (ja) | 2012-03-30 | 2013-10-03 | 東京エレクトロン株式会社 | 加熱機構、ならびに成膜装置および成膜方法 |
| JP6151844B1 (ja) | 2016-12-26 | 2017-06-21 | 弘治 大石橋 | マイクロ波加熱装置 |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007299681A (ja) * | 2006-05-01 | 2007-11-15 | National Institute Of Advanced Industrial & Technology | マイクロ波加熱の温度制御方法及びマイクロ波加熱装置 |
| JP2010123738A (ja) * | 2008-11-19 | 2010-06-03 | Canon Inc | マイクロ波プラズマ処理装置 |
| JP2013231244A (ja) | 2012-04-27 | 2013-11-14 | Applied Materials Inc | 炭素繊維の製造装置 |
| JP5877448B2 (ja) * | 2012-09-26 | 2016-03-08 | ミクロ電子株式会社 | マイクロ波を応用した加熱装置 |
| JP6088690B1 (ja) * | 2016-05-13 | 2017-03-01 | マイクロ波化学株式会社 | マイクロ波処理装置、プログラム |
| JP6261789B2 (ja) | 2017-03-02 | 2018-01-17 | マイクロ波化学株式会社 | 加熱装置、および加熱方法 |
| JP7042490B2 (ja) * | 2018-11-26 | 2022-03-28 | マイクロ波化学株式会社 | マイクロ波処理装置、および炭素繊維の製造方法 |
-
2018
- 2018-11-26 JP JP2018220391A patent/JP7042490B2/ja active Active
-
2022
- 2022-03-08 JP JP2022035282A patent/JP2022066481A/ja not_active Withdrawn
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- 2023-12-27 JP JP2023221868A patent/JP7667593B2/ja active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2013002767A (ja) | 2011-06-20 | 2013-01-07 | Micro Denshi Kk | マイクロ波を応用した加熱装置 |
| WO2013145932A1 (ja) | 2012-03-30 | 2013-10-03 | 東京エレクトロン株式会社 | 加熱機構、ならびに成膜装置および成膜方法 |
| JP6151844B1 (ja) | 2016-12-26 | 2017-06-21 | 弘治 大石橋 | マイクロ波加熱装置 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2022066481A (ja) * | 2018-11-26 | 2022-04-28 | マイクロ波化学株式会社 | マイクロ波処理装置、および炭素繊維の製造方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JP7667593B2 (ja) | 2025-04-23 |
| JP2024023984A (ja) | 2024-02-21 |
| JP2019125573A (ja) | 2019-07-25 |
| JP2022066481A (ja) | 2022-04-28 |
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