JP7027219B2 - Sample holder - Google Patents

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JP7027219B2
JP7027219B2 JP2018062395A JP2018062395A JP7027219B2 JP 7027219 B2 JP7027219 B2 JP 7027219B2 JP 2018062395 A JP2018062395 A JP 2018062395A JP 2018062395 A JP2018062395 A JP 2018062395A JP 7027219 B2 JP7027219 B2 JP 7027219B2
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electrode
sample holder
holding surface
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sample holding
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JP2019175995A (en
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陽平 堀
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Kyocera Corp
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Description

本開示は、半導体集積回路の製造工程などで半導体ウェハ等の各試料を保持するために用いられる試料保持具に関するものである。 The present disclosure relates to a sample holder used for holding each sample such as a semiconductor wafer in a manufacturing process of a semiconductor integrated circuit or the like.

試料保持具として、例えば、特許文献１に記載の静電チャックが知られている。特許文献１に開示された静電チャックは、セラミック基体とセラミック基体の内部に位置する内部電極とを有している。内部電極は、静電電極とヒータ電極である。セラミック基体には内部電極が露出する孔部が設けられており、孔部には内部電極と外部とを接続する給電部材が位置している。 As a sample holder, for example, the electrostatic chuck described in Patent Document 1 is known. The electrostatic chuck disclosed in Patent Document 1 has a ceramic substrate and an internal electrode located inside the ceramic substrate. The internal electrodes are an electrostatic electrode and a heater electrode. The ceramic substrate is provided with a hole in which the internal electrode is exposed, and a feeding member for connecting the internal electrode and the outside is located in the hole.

国際公開第２０１６／０３５８７８号International Publication No. 2016/035878

このような静電チャックにおいては、内部電極のうち孔部に露出する領域から、外部に熱が逃げるおそれがあった。その結果、試料保持面における均熱性を高めることが困難であった。 In such an electrostatic chuck, heat may escape to the outside from a region of the internal electrode exposed to the hole. As a result, it was difficult to improve the soaking property on the sample holding surface.

本開示の試料保持持具は、板状であって一方の主面が試料保持面であり、他方の主面に開口する孔部を有する絶縁基体と、該絶縁基体の内部において前記試料保持面に対向する内部電極とを備えており、該内部電極は、前記絶縁基体に全体が覆われた第１電極および、該第１電極よりも熱伝導率が小さく、該第１電極に隣り合っており、前記孔部に引き出された第２電極を有し、該第２電極は、前記試料保持面に平行な方向で前記第１電極に隣り合っていることを特徴とする。 The sample holding tool of the present disclosure has an insulating substrate that is plate-shaped and one main surface is a sample holding surface and has a hole that opens in the other main surface, and the sample holding surface inside the insulating substrate. The internal electrode is provided with an internal electrode facing the above, and the internal electrode has a first electrode completely covered with the insulating substrate and has a smaller thermal conductivity than the first electrode, and is adjacent to the first electrode. It has a second electrode drawn out in the hole portion, and the second electrode is adjacent to the first electrode in a direction parallel to the sample holding surface .

本開示の試料保持具によれば、試料保持面の均熱性を高めることができる。 According to the sample holder of the present disclosure, it is possible to improve the soaking property of the sample holding surface.

試料保持具の一例を示す断面図である。It is sectional drawing which shows an example of a sample holder. 試料保持具の他の例を示す断面図である。It is sectional drawing which shows the other example of a sample holder. 試料保持具の他の例を示す断面図である。It is sectional drawing which shows the other example of a sample holder. 試料保持具の他の例を示す断面図である。It is sectional drawing which shows the other example of a sample holder. 試料保持具の他の例を示す断面図である。It is sectional drawing which shows the other example of a sample holder. 試料保持具の他の例を示す断面図である。It is sectional drawing which shows the other example of a sample holder. 試料保持具の他の例を示す断面図である。It is sectional drawing which shows the other example of a sample holder.

本開示の試料保持具１０の一例について、図面を用いて詳細に説明する。 An example of the sample holder 10 of the present disclosure will be described in detail with reference to the drawings.

図１は、本開示の一例である試料保持具１０を示す断面図である。図１に示すように、試料保持具１０は、絶縁基体１と、内部電極２と、孔部１２とを備えている。 FIG. 1 is a cross-sectional view showing a sample holder 10 which is an example of the present disclosure. As shown in FIG. 1, the sample holder 10 includes an insulating substrate 1, an internal electrode 2, and a hole 12.

絶縁基体１は、試料を保持するための部材である。絶縁基体１は、板状の部材であって
、例えば円板状または角板状である。絶縁基体１は、例えば一方の主面が試料保持面１１である。絶縁基体１は、内部に内部電極２を有している。また、試料保持具１０を静電チャックとして用いる場合においては、絶縁基体１は、内部に静電吸着用電極を有していてもよい。絶縁基体１は、例えばセラミック材料を有する。セラミック材料としては、例えばアルミナ、窒化アルミニウム、窒化珪素またはイットリア等とすることができる。絶縁基体１の寸法は、例えば直径を２００～５００ｍｍに、厚みを１～１５ｍｍにすることができる。 The insulating substrate 1 is a member for holding a sample. The insulating substrate 1 is a plate-shaped member, and is, for example, a disk-shaped or square plate-shaped member. For example, one main surface of the insulating substrate 1 is a sample holding surface 11. The insulating substrate 1 has an internal electrode 2 inside. Further, when the sample holder 10 is used as an electrostatic chuck, the insulating substrate 1 may have an electrostatic adsorption electrode inside. The insulating substrate 1 has, for example, a ceramic material. The ceramic material may be, for example, alumina, aluminum nitride, silicon nitride, yttrium, or the like. The dimensions of the insulating substrate 1 can be, for example, a diameter of 200 to 500 mm and a thickness of 1 to 15 mm.

絶縁基体１は、他方の主面に孔部１２を有する。孔部１２は、絶縁基体１の内部に設けられた内部電極２を通電するために設けられている。孔部１２の内側には、電極端子３が設けられて、内部電極２に電気的に接続されていてもよい。孔部１２の寸法は、例えば直径が１～１０ｍｍの円形で、深さが０．５～１４．５ｍｍであってもよい。孔部１２は、絶縁基体１に複数設けられていてもよい。孔部１２は、絶縁基体１の中心に設けられていてもよい。この場合は、電極端子３を中心に引き出すことができるので、試料保持面１１の均熱性を高めることができる。 The insulating substrate 1 has a hole 12 on the other main surface. The hole portion 12 is provided for energizing the internal electrode 2 provided inside the insulating substrate 1. An electrode terminal 3 may be provided inside the hole portion 12 and electrically connected to the internal electrode 2. The dimensions of the hole 12 may be, for example, a circle having a diameter of 1 to 10 mm and a depth of 0.5 to 14.5 mm. A plurality of holes 12 may be provided in the insulating substrate 1. The hole 12 may be provided in the center of the insulating substrate 1. In this case, since the electrode terminal 3 can be pulled out to the center, the heat equalizing property of the sample holding surface 11 can be improved.

内部電極２は、絶縁基体１の内部に設けられている。内部電極２は、絶縁基体１の内部において、試料保持面１１に対向して設けられている。内部電極２は、一部が絶縁基体１の孔部１２に引き出されている。内部電極２は、孔部１２に引き出された部位において、電極端子３に電気的に接続されていてもよい。 The internal electrode 2 is provided inside the insulating substrate 1. The internal electrode 2 is provided inside the insulating substrate 1 so as to face the sample holding surface 11. A part of the internal electrode 2 is drawn out into the hole 12 of the insulating substrate 1. The internal electrode 2 may be electrically connected to the electrode terminal 3 at a portion drawn out from the hole 12.

内部電極２は、例えば静電吸着用電極または発熱抵抗体である。内部電極２が静電吸着用電極である場合は、発熱抵抗体は例えば絶縁基体１の他方の主面に設けられていてもよい。このときに、内部電極２の寸法は、例えば内部電極２が静電吸着用電極である場合は、厚みを０．０１ｍｍ～０．５ｍｍに、面積を３００００ｍｍ２～１９００００ｍｍ２にすることができる。また、発熱抵抗体は、銀パラジウム等の金属成分と、ケイ素、ビスマス、カルシウム、アルミニウムおよびホウ素等の材料の酸化物からなるガラス成分とを含んでいてもよい。このときに、発熱抵抗体の寸法は、例えば厚みを０．０１ｍｍ～０．１ｍｍに、幅を０．５ｍｍ～５ｍｍに長さを１０００ｍｍ～５００００ｍｍにすることができる。 The internal electrode 2 is, for example, an electrostatic adsorption electrode or a heat generation resistor. When the internal electrode 2 is an electrostatic adsorption electrode, the heat generation resistor may be provided on the other main surface of the insulating substrate 1, for example. At this time, the dimensions of the internal electrode 2 can be, for example, when the internal electrode 2 is an electrostatic adsorption electrode, the thickness can be 0.01 mm to 0.5 mm and the area can be 30,000 mm 2 to 190000 mm 2 . Further, the heat generation resistor may contain a metal component such as silver-palladium and a glass component made of an oxide of a material such as silicon, bismuth, calcium, aluminum and boron. At this time, the dimensions of the heat generation resistor can be, for example, a thickness of 0.01 mm to 0.1 mm, a width of 0.5 mm to 5 mm, and a length of 1000 mm to 50,000 mm.

本開示の試料保持具１０によれば、内部電極２は、絶縁基体１に全体が覆われた第１電極２１および、第１電極２１よりも熱伝導率が小さく、第１電極２１に隣り合っており、孔部１２に引き出された第２電極２２を有している。これにより、内部電極２の熱が、孔部１２から外に逃げてしまうおそれを低減することができる。その結果、試料保持面１１の均熱性を高めることができる。 According to the sample holder 10 of the present disclosure, the internal electrode 2 has a smaller thermal conductivity than the first electrode 21 and the first electrode 21 whose entire surface is covered with the insulating substrate 1, and is adjacent to the first electrode 21. It has a second electrode 22 drawn out from the hole 12. As a result, it is possible to reduce the possibility that the heat of the internal electrode 2 escapes from the hole portion 12 to the outside. As a result, the soaking property of the sample holding surface 11 can be improved.

第１電極２１は、図１に示すように、孔部１２まで引き出されていてもよい。また、図２に示すように、孔部１２の側面１２１まで引き出されていていなくてもよい。この場合は、第２電極２２が部分的に絶縁基体１の内部に入り込んでいてもよい。 As shown in FIG. 1, the first electrode 21 may be drawn out to the hole portion 12. Further, as shown in FIG. 2, it does not have to be pulled out to the side surface 121 of the hole portion 12. In this case, the second electrode 22 may partially enter the inside of the insulating substrate 1.

第１電極２１は、例えばタングステンまたは白金等の部材であってもよい。第１電極２１がタングステンである場合は、第２電極２２は、例えば白金またはイリジウム等の部材であってもよい。 The first electrode 21 may be a member such as tungsten or platinum. When the first electrode 21 is tungsten, the second electrode 22 may be a member such as platinum or iridium.

また、第２電極２２は、第１電極２１よりも仕事関数が大きくてもよい。これにより、孔部１２に引き出された第２電極２２が酸化することにより、第２電極２２が破損してしまうおそれを低減することができる。その結果、試料保持具１０の耐久性を高めることができる。このときに、第２電極２２をイリジウムまたは白金に、第１電極２１をタングステンまたは白金にすることができる。 Further, the second electrode 22 may have a larger work function than the first electrode 21. As a result, it is possible to reduce the possibility that the second electrode 22 will be damaged due to the oxidation of the second electrode 22 drawn out to the hole portion 12. As a result, the durability of the sample holder 10 can be enhanced. At this time, the second electrode 22 can be made of iridium or platinum, and the first electrode 21 can be made of tungsten or platinum.

それぞれの材料の仕事関数については、例えば、化学便覧等の文献に記載されている。例えば、第１電極２１をタングステンとした場合の仕事関数は４．６ｅＶであり、第２電極２２を白金とした場合の仕事関数は５．７ｅＶ、第２電極２２をイリジウムとした場合の仕事関数は５．３ｅＶである。 The work function of each material is described in, for example, literature such as the Chemistry Handbook. For example, the work function when the first electrode 21 is tungsten is 4.6 eV, the work function when the second electrode 22 is platinum is 5.7 eV, and the work function when the second electrode 22 is iridium. Is 5.3 eV.

また、図３または図４に示すように、第１電極２１と第２電極２２とは、試料保持面１１に垂直な方向に部分的に重なっていてもよい。これにより、ヒートサイクル下において、内部電極２に熱膨張が生じた場合に、第１電極２１と第２電極２２との間に熱応力が生じ、第１電極２１と第２電極２２とが剥離してしまうおそれを低減することができる。その結果、試料保持具１０の耐久性を高めることができる。この場合、第２電極２２のうち、第１電極２１と重なっている部分の面積を３０～９０ｍｍ２にすることができる。 Further, as shown in FIG. 3 or 4, the first electrode 21 and the second electrode 22 may partially overlap each other in the direction perpendicular to the sample holding surface 11. As a result, when thermal expansion occurs in the internal electrode 2 under the heat cycle, thermal stress is generated between the first electrode 21 and the second electrode 22, and the first electrode 21 and the second electrode 22 are separated from each other. It is possible to reduce the risk of this. As a result, the durability of the sample holder 10 can be enhanced. In this case, the area of the portion of the second electrode 22 that overlaps with the first electrode 21 can be set to 30 to 90 mm 2 .

また、第２電極２２の全体が、第１電極２１に対して試料保持面１１に垂直な方向に重なっていてもよい。これにより、第１電極２１と第２電極２２とが剥離してしまうおそれをより低減することができる。その結果、試料保持具１０の耐久性を高めることができる。これに対して、第２電極２２の一部分が、第１電極２１に対して試料保持面１１に垂直な方向に重なっている場合は、第１電極２１と第２電極２２との接触面積を減らすことができる。そのため、第１電極２１の熱が第２電極２２に伝わるおそれを低減することができる。これにより、第１電極２１の熱が、孔部１２から外に逃げてしまうおそれを低減することができる。その結果、試料保持面１１の均熱性を高めることができる。 Further, the entire second electrode 22 may overlap with respect to the first electrode 21 in a direction perpendicular to the sample holding surface 11. This makes it possible to further reduce the possibility that the first electrode 21 and the second electrode 22 will be separated from each other. As a result, the durability of the sample holder 10 can be enhanced. On the other hand, when a part of the second electrode 22 overlaps the first electrode 21 in the direction perpendicular to the sample holding surface 11, the contact area between the first electrode 21 and the second electrode 22 is reduced. be able to. Therefore, it is possible to reduce the possibility that the heat of the first electrode 21 is transferred to the second electrode 22. As a result, it is possible to reduce the possibility that the heat of the first electrode 21 escapes from the hole portion 12 to the outside. As a result, the soaking property of the sample holding surface 11 can be improved.

また、図４に示すように、第１電極２１と第２電極２２とは、試料保持面１１に垂直な方向および平行な方向の両方で重なっていてもよい。これにより、試料保持面１１に垂直な方向および平行な方向の両方において、第１電極２１と第２電極２２とが剥離してしまうおそれを低減することができる。その結果、試料保持具１０の耐久性を高めることができる。 Further, as shown in FIG. 4, the first electrode 21 and the second electrode 22 may overlap in both the direction perpendicular to the sample holding surface 11 and the direction parallel to the sample holding surface 11. As a result, it is possible to reduce the possibility that the first electrode 21 and the second electrode 22 are separated from each other in both the direction perpendicular to the sample holding surface 11 and the direction parallel to the sample holding surface 11. As a result, the durability of the sample holder 10 can be enhanced.

また、第１電極２が金属粒子を含み、第２電極２２が同じ金属粒子を含んでいてもよい。これにより、第１電極２１と第２電極２２との接触抵抗を低減することができる。その結果、試料保持面１１における均熱性を高めることができる。この場合は、例えば第１電極２１および第２電極２２に含まれる金属粒子はタングステンまたは白金であってもよい。また、第２電極２２に、第１電極２１に含まれる金属粒子が含まれていることは、ＥＰＭＡ（ＥｌｅｃｔｒｏｎＰｒｏｂｅＭｉｃｒｏＡｎａｌｙｚｅｒ）を用いて、各金属粒子に関するカラーマッピングを行なうことで、確認することができる。 Further, the first electrode 2 may contain metal particles, and the second electrode 22 may contain the same metal particles. As a result, the contact resistance between the first electrode 21 and the second electrode 22 can be reduced. As a result, the soaking property on the sample holding surface 11 can be improved. In this case, for example, the metal particles contained in the first electrode 21 and the second electrode 22 may be tungsten or platinum. Further, it can be confirmed that the second electrode 22 contains the metal particles contained in the first electrode 21 by performing color mapping on each metal particle using EPMA (ElectronProbeMicroAnalyzer).

また、第１電極２１に含まれる金属粒子が、第２電極２２のうち第１電極２１と第２電極２２との接触する部位の近傍において、第２電極２２に含まれていてもよい。この場合は、第１電極２１と第２電極２２との接触抵抗をより低減することができる。具体的には、金属粒子は、第１電極２１と接触する部位から０．０５ｍｍ～３ｍｍの領域に含まれていてもよい。 Further, the metal particles contained in the first electrode 21 may be contained in the second electrode 22 in the vicinity of the portion of the second electrode 22 where the first electrode 21 and the second electrode 22 come into contact with each other. In this case, the contact resistance between the first electrode 21 and the second electrode 22 can be further reduced. Specifically, the metal particles may be contained in a region of 0.05 mm to 3 mm from the portion in contact with the first electrode 21.

また、図５に示すように、孔部１２の内側には、第２電極２２に電気的に接続された電極端子３が設けられていてもよい。これにより、第２電極２２からの熱引きを抑えつつ、外部との電気的な接続を行うことができる。その結果、試料保持面１１の均熱性を高めることができる。 Further, as shown in FIG. 5, an electrode terminal 3 electrically connected to the second electrode 22 may be provided inside the hole portion 12. As a result, it is possible to make an electrical connection with the outside while suppressing heat drawing from the second electrode 22. As a result, the soaking property of the sample holding surface 11 can be improved.

電極端子３は、内部電極２と外部電源とを電気的に接続するための部材である。電極端子３は、例えば棒状の部材であってもよい。電極端子３は、第２電極２２よりも熱伝導率が低い部材であってもよい。これにより、内部電極２の熱が電極端子３から外部に逃げて
しまうおそれを低減することができる。その結果、試料保持面１１の均熱性を高めることができる。この場合、電極端子３としては、例えばＦｅ－Ｎｉ－Ｃｏ合金等の部材を用いることができる。 The electrode terminal 3 is a member for electrically connecting the internal electrode 2 and the external power source. The electrode terminal 3 may be, for example, a rod-shaped member. The electrode terminal 3 may be a member having a lower thermal conductivity than the second electrode 22. As a result, it is possible to reduce the possibility that the heat of the internal electrode 2 escapes from the electrode terminal 3 to the outside. As a result, the soaking property of the sample holding surface 11 can be improved. In this case, as the electrode terminal 3, a member such as a Fe—Ni—Co alloy can be used.

また、図６に示すように、電極端子３と第２電極２２とは、ロウ材等の接合材４により接合されていてもよい。このときに、接合材４は、第２電極２２と同じ成分を含んでいてもよい。これにより、接合材４の熱伝導率を低減することができる。そのため、内部電極２の熱が、接合材４を介して外部に逃げるおそれを低減することができる。その結果、試料保持面１１の均熱性を高めることができる。また、孔部１２には、接合材４が充填されていてもよい。 Further, as shown in FIG. 6, the electrode terminal 3 and the second electrode 22 may be joined by a joining material 4 such as a brazing material. At this time, the bonding material 4 may contain the same components as the second electrode 22. As a result, the thermal conductivity of the bonding material 4 can be reduced. Therefore, it is possible to reduce the possibility that the heat of the internal electrode 2 escapes to the outside through the bonding material 4. As a result, the soaking property of the sample holding surface 11 can be improved. Further, the hole portion 12 may be filled with the bonding material 4.

また、図６に示すように、第２電極２２は、第１電極２１よりも厚くてもよい。これにより、第２電極２２に電極端子３を接続する際に、第２電極２２が破損してしまうおそれを低減することができる。また、第１電極２１が第２電極２２よりも薄いことにより、第１電極２１と絶縁基体１の熱膨張差により、絶縁基体１が破損してしまうおそれを低減することができる。その結果、試料保持具１０の耐久性を高めることができる。 Further, as shown in FIG. 6, the second electrode 22 may be thicker than the first electrode 21. This makes it possible to reduce the possibility that the second electrode 22 will be damaged when the electrode terminal 3 is connected to the second electrode 22. Further, since the first electrode 21 is thinner than the second electrode 22, the possibility that the insulating substrate 1 is damaged due to the difference in thermal expansion between the first electrode 21 and the insulating substrate 1 can be reduced. As a result, the durability of the sample holder 10 can be enhanced.

このときに、第１電極２１の厚みの定義としては、試料保持具１０を試料保持面１１に垂直な縦断面で見たときに、第１電極２１の厚みをランダムに５箇所測定したときの平均値を、第１電極２１の厚みとすることができる。また、焼結後の絶縁基体１における電極の厚みを測定する場合は、絶縁基体１を厚み方向に切断し、絶縁基体１の側面に内部電極２を露出させる。そうすることにより、マイクロスコープで内部電極２の露出面を観察し、内部電極２の厚みを測定できる。第２電極２２が第１電極２１よりも厚い例としては、第１電極２１の厚みを０．０１～０．０５ｍｍに、第２電極２２の厚みを０．０６ｍｍ～０．５ｍｍにすることができる。 At this time, the definition of the thickness of the first electrode 21 is that when the sample holder 10 is viewed in a vertical cross section perpendicular to the sample holding surface 11, the thickness of the first electrode 21 is randomly measured at five points. The average value can be the thickness of the first electrode 21. When measuring the thickness of the electrode in the insulating substrate 1 after sintering, the insulating substrate 1 is cut in the thickness direction to expose the internal electrode 2 on the side surface of the insulating substrate 1. By doing so, the exposed surface of the internal electrode 2 can be observed with a microscope and the thickness of the internal electrode 2 can be measured. As an example in which the second electrode 22 is thicker than the first electrode 21, the thickness of the first electrode 21 may be 0.01 to 0.05 mm, and the thickness of the second electrode 22 may be 0.06 mm to 0.5 mm. can.

また、図７に示すように、孔部１２は、側面１２１と底面１２２とを有しており、第２電極２２は、側面１２１と底面１２２とに設けられていてもよい。これにより、第２電極２２と電極端子３との接触面積を大きくすることができる。これにより、第２電極２２と電極端子３との導電性を高め、第２電極２２と電極端子３との間の発熱を低減することができる。その結果、試料保持面１１の均熱性を高めることができる。 Further, as shown in FIG. 7, the hole portion 12 has a side surface 121 and a bottom surface 122, and the second electrode 22 may be provided on the side surface 121 and the bottom surface 122. As a result, the contact area between the second electrode 22 and the electrode terminal 3 can be increased. As a result, the conductivity between the second electrode 22 and the electrode terminal 3 can be increased, and the heat generation between the second electrode 22 and the electrode terminal 3 can be reduced. As a result, the soaking property of the sample holding surface 11 can be improved.

この場合に、第２電極２２のうち、孔部１２の側面１２１に設けられた部分の厚みを０．０２～３ｍｍに、孔部１２の底面１２２に設けられた部分の厚みを０．０２～３ｍｍにすることができる。 In this case, the thickness of the portion of the second electrode 22 provided on the side surface 121 of the hole 12 is 0.02 to 3 mm, and the thickness of the portion provided on the bottom surface 122 of the hole 12 is 0.02 to 0.02. It can be 3 mm.

１：絶縁基体
１１：試料保持面
１２：孔部
１２１：側面
１２２：底面
２：内部電極
２１：第１電極
２２：第２電極
３：電極端子
４：接合材
１０：試料保持具 1: Insulated substrate 11: Sample holding surface 12: Hole 121: Side surface 122: Bottom surface 2: Internal electrode 21: First electrode 22: Second electrode 3: Electrode terminal 4: Bonding material 10: Sample holder

Claims (7)

板状であって一方の主面が試料保持面であり、他方の主面に開口する孔部を有する絶縁基体と、該絶縁基体の内部において前記試料保持面に対向する内部電極とを備えており、該内部電極は、前記絶縁基体に全体が覆われた第１電極および、該第１電極よりも熱伝導率が小さく、該第１電極に隣り合っており、前記孔部に引き出された第２電極を有し、該第２電極は、前記試料保持面に平行な方向で前記第１電極に隣り合っていることを特徴とする試料保持具。 It is provided with an insulating substrate that is plate-shaped and one main surface is a sample holding surface and has a hole that opens in the other main surface, and an internal electrode that faces the sample holding surface inside the insulating substrate. The internal electrode has a lower thermal conductivity than the first electrode completely covered with the insulating substrate and the first electrode, is adjacent to the first electrode, and is pulled out into the hole. A sample holder having a second electrode, wherein the second electrode is adjacent to the first electrode in a direction parallel to the sample holding surface . 前記第２電極は、前記第１電極よりも仕事関数が大きいことを特徴とする請求項１に記載の試料保持具。 The sample holder according to claim 1, wherein the second electrode has a larger work function than the first electrode. 前記第１電極と前記第２電極とは、前記試料保持面に垂直な方向に部分的に重なっていることを特徴とする請求項１または請求項２に記載の試料保持具。 The sample holder according to claim 1 or 2, wherein the first electrode and the second electrode partially overlap each other in a direction perpendicular to the sample holding surface. 前記第１電極は、金属粒子を含み、該金属粒子は、前記第２電極に含まれていることを特徴とする請求項１乃至請求項３のいずれかに記載の試料保持具。 The sample holder according to any one of claims 1 to 3, wherein the first electrode contains metal particles, and the metal particles are contained in the second electrode. 前記孔部の内側には、前記第２電極に電気的に接続された電極端子が設けられていることを特徴とする請求項１乃至請求項４のいずれかに記載の試料保持具。 The sample holder according to any one of claims 1 to 4, wherein an electrode terminal electrically connected to the second electrode is provided inside the hole. 前記第２電極は、前記第１電極よりも厚いことを特徴とする請求項５に記載の試料保持具。 The sample holder according to claim 5, wherein the second electrode is thicker than the first electrode. 前記孔部の底面は、断面視したときに前記試料保持面に対向するとともに前記試料保持面までの距離が前記第１電極から前記試料保持面までの距離よりも小さくなるように配置されており、前記第２電極は、断面視したときに前記孔部内を埋めるように設けられているとともに前記底面に対向する開口側の面の位置が前記第１電極と前記他方の主面との間にあることを特徴とする請求項５または請求項６に記載の試料保持具。 The bottom surface of the hole is arranged so as to face the sample holding surface when viewed in cross section and the distance to the sample holding surface is smaller than the distance from the first electrode to the sample holding surface . The second electrode is provided so as to fill the inside of the hole when viewed in cross section, and the position of the surface on the opening side facing the bottom surface is between the first electrode and the other main surface. The sample holder according to claim 5 or 6, characterized in that there is .
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Citations (5)

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JP2006332675A (en) 2006-05-26 2006-12-07 Sumitomo Electric Ind Ltd Wafer holder and semiconductor manufacturing apparatus
JP2008130609A (en) 2006-11-16 2008-06-05 Ngk Insulators Ltd Heating apparatus
JP2009111005A (en) 2007-10-26 2009-05-21 Shin Etsu Chem Co Ltd Corrosion-resistant laminated ceramics member
WO2013168471A1 (en) 2012-05-07 2013-11-14 トーカロ株式会社 Electrostatic chuck and production method for electrostatic chuck
JP2017119593A (en) 2015-12-28 2017-07-06 日本特殊陶業株式会社 Ceramic member

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006332675A (en) 2006-05-26 2006-12-07 Sumitomo Electric Ind Ltd Wafer holder and semiconductor manufacturing apparatus
JP2008130609A (en) 2006-11-16 2008-06-05 Ngk Insulators Ltd Heating apparatus
JP2009111005A (en) 2007-10-26 2009-05-21 Shin Etsu Chem Co Ltd Corrosion-resistant laminated ceramics member
WO2013168471A1 (en) 2012-05-07 2013-11-14 トーカロ株式会社 Electrostatic chuck and production method for electrostatic chuck
JP2017119593A (en) 2015-12-28 2017-07-06 日本特殊陶業株式会社 Ceramic member

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