JP7014209B2 - Manufacturing method of processing jigs, laser processing equipment, and laser processing products - Google Patents

Description

The present invention relates to a processing jig, a laser processing apparatus, and a method for manufacturing a laser processed product.

Laser processing is known in which a work material such as a metal plate is irradiated with a laser beam to cut the work material (see, for example, Patent Document 1). In the laser processing apparatus described in Patent Document 1, the nozzle injects the assist gas onto the material to be processed from the same position where the laser beam is irradiated. The assist gas ejected from the same direction as the laser beam blows off the metal (hereinafter also referred to as "molten metal") in which a part of the work material is melted by the laser beam. This suppresses the adhesion of molten metal to the material to be processed.

Japanese Unexamined Patent Publication No. 2010-234373

However, the assist gas injected from the nozzle described in Patent Document 1 may deform the cut portion of the work material depending on the flow rate of the assist gas and the thickness of the work material. In addition, since the laser oscillator that irradiates the laser light and the nozzle are integrally formed, there is a problem that the laser processing device using the scanning mirror that reflects the laser light cannot supply the assist gas to the material to be processed. there were.

The present invention has been made to solve the above-mentioned problems, and after suppressing the adhesion of the molten material generated in the cut portion by laser processing to the material to be processed, the deformation of the cut portion by the assist gas is performed. The purpose is to suppress.

The present invention has been made to solve the above-mentioned problems, and can be realized as the following forms. A processing jig, the first holder arranged to face one surface of the material to be processed, and the first holder to be arranged to face the surface of the material to be processed opposite to the one surface. A second holder, a nozzle for injecting gas, and a transport unit for transporting the material to be processed in a predetermined direction are provided, and both the first holder and the second holder are the workpieces. It is arranged apart from the material, and the gas ejected from the nozzle is formed between the first holder and the material to be processed, and between the second holder and the material to be processed. In the gap, an air flow along the surface of the work material is generated, and the transport portion is a transport roller that transports the work material in the same direction as the air flow direction. A processing jig, the first holder arranged to face one surface of the material to be processed, and the first holder to be arranged to face the surface of the material to be processed opposite to the one surface. A second holder, a nozzle for injecting gas, and a transport unit for transporting the material to be processed in a predetermined direction are provided, and at least one of the first holder and the second holder is the cover. The gas ejected from the nozzle is arranged apart from the processing material, and the gas ejected from the nozzle is a gap formed between at least one of the first holder and the second holder and the material to be processed. In, an air flow is generated along the surface of the material to be processed, the distance between the gaps is 0.1 mm or more and less than 1.0 mm, and the transport portion is in the same direction as the air flow direction. A transport roller that transports materials.

(1) According to one embodiment of the present invention, a processing jig is provided. This processing jig has a first holder arranged to face one surface of the material to be processed and a first holder arranged to face the surface of the material to be processed opposite to the one surface. 2 The holder and a nozzle for injecting gas are provided, and at least one of the first holder and the second holder is arranged apart from the material to be processed and is ejected from the nozzle. The gas produces an air flow along the surface of the material to be processed in the gap formed between at least one of the first holder and the second holder and the material to be processed.

According to this configuration, in the work material to be cut by laser processing, the airflow generated by the nozzle cools the melt of the work material generated in the cut portion, and the melt adheres to the work material. Suppress. Further, even if the melt adheres to the work material, it can be removed by blowing off the melt adhered to the work material by the air flow. In addition, the airflow suppresses the generation and stagnation of fume, which is the metal vapor generated at the cut. Here, since the airflow flows in a direction along at least one surface of one surface and the opposite surface of the material to be processed, it does not have a component parallel to the thickness direction of the material to be processed. As a result, it is possible to prevent the cut portion from being deformed in the thickness direction of the work material due to the air flow. The airflow flowing through the formed gap can adjust the distance between the first holder and the material to be processed by Bernoulli's theorem or the Coanda effect. Thereby, the distance between the position where the laser beam is irradiated (or the device which irradiates the laser beam) and the material to be processed can be adjusted.

(2) The processing jig of the above aspect may further include a transport unit for transporting the material to be processed in a predetermined direction.
According to this configuration, since the work material is conveyed by the transport unit, the man-hours for exchanging the work material that has been processed can be reduced, and the processing of the work material can be automated.

(3) In the processing jig of the above aspect, the transport unit may transport the material to be machined in the same direction as the direction of the air flow.
According to this configuration, the airflow is not disturbed by the work material transported in the transport direction, so that the work material can be more influenced by Bernoulli's theorem and the Coanda effect. As a result, the distance between the first holder and the material to be processed can be adjusted more appropriately.

(4) In the processing jig of the above aspect, the nozzle may inject an inert gas.
According to this configuration, the oxidation of the melt of the work material can be suppressed, so that the temperature rise of the melt and the work material can be suppressed.

(5) In the processing jig of the above aspect, the first holder may have a laser light transmitting portion made of sapphire or quartz.
According to this configuration, it is not necessary to form a slit or the like through which the laser beam passes in the first holder, and the degree of freedom in the shape of the first holder is improved.

(6) According to another embodiment of the present invention, a laser processing apparatus is provided. This laser processing apparatus includes the processing jig of the above-described embodiment and an irradiation unit that irradiates the one surface of the processing jig with laser light from the side of the first holder, and the first holding. The jig is arranged apart from the one surface of the work material, and the gas ejected from the nozzle is placed in the gap between the first holder and the one surface. Creates an air flow along.
According to this configuration, the airflow generated by the nozzle cools the melt of the work material, suppresses the melt from adhering to the work material, and generates fume, which is a metal vapor generated at the cut portion. Suppress stagnation. Further, since the airflow flows in the direction along one surface of the work material, it does not have a component parallel to the thickness direction of the work material, so that the cut portion is formed in the thickness direction of the work material by the air flow. It is possible to suppress the deformation to. According to Bernoulli's theorem or the Coanda effect, the airflow flowing through the formed gap can adjust the distance between the position where the laser beam is irradiated (or the device which irradiates the laser beam) and the material to be processed.

(7) According to another embodiment of the present invention, a method for manufacturing a laser processed product is provided. In this manufacturing method, a step of arranging a material to be processed between a first holder and a second holder, and irradiation of one surface of the material to be processed with laser light from the side of the first holder. And the step of generating an air flow along the one surface of the work material in the gap formed between the first holder and the work material together with the irradiation of the laser light. To prepare for.
According to this configuration, the melt generated by laser machining does not adhere to the work material due to the air flow on the first surface of the work material arranged between the first holder and the second holder. Is removed. In addition, the airflow suppresses the generation and stagnation of fume, which is the metal vapor generated at the cut. Here, since the airflow flows along one surface in the gap formed between the first holder and the material to be processed, it does not have a component parallel to the thickness direction of the material to be processed. As a result, it is possible to prevent the cut portion from being deformed in the thickness direction of the work material due to the air flow. According to Bernoulli's theorem or the Coanda effect, the airflow flowing through the gap can adjust the distance between the position where the laser beam is irradiated (or the device that irradiates the laser beam) and the material to be processed.

The present invention can be realized in various aspects, for example, a processing jig, a laser processing apparatus, an apparatus and system including these, a material fixing method, a laser processing method, and a laser. It can be realized in the form of a method for manufacturing a processed product, a computer program for executing these systems and methods, a server device for distributing the computer program, a non-temporary storage medium for storing the computer program, and the like.

It is a schematic plan view of the laser processing apparatus provided with the processing jig as the 1st Embodiment of this invention. It is the schematic of the cross section of A1-A1 in FIG. It is a perspective view of the vicinity of the gas injection port of the 1st nozzle. It is explanatory drawing of the laser beam which irradiates from a laser irradiation part. It is a schematic plan view of the laser processed product cut by the laser beam when the formula (1) is satisfied. It is a flowchart of the manufacturing method of a laser processed product. It is explanatory drawing of the laser processing apparatus of the comparative example. It is the schematic plan view of the laser processing apparatus provided with the processing jig of 2nd Embodiment. It is the schematic of the cross section of A2-A2 in FIG. It is the schematic plan view of the laser processing apparatus provided with the processing jig of 3rd Embodiment. It is the schematic of the cross section of A3-A3 in FIG. It is a perspective view of the vicinity of the gas injection port of the 1st nozzle of the modification. It is explanatory drawing of the 1st holder in the modification.

<First Embodiment>
FIG. 1 is a schematic plan view of a laser processing apparatus 100 provided with a processing jig 10 as the first embodiment of the present invention. FIG. 2 is a schematic view of a cross section of A1-A1 in FIG. The laser processing apparatus 100 is an apparatus that cuts a sheet material MS as a material to be processed into a predetermined size by a laser beam. The sheet material MS of the first embodiment is a metal having a plate thickness, but in other embodiments, it may be a sheet-shaped ceramics and a resin. It should be noted that each of the XYZ axes, which is the Cartesian coordinate system shown in FIGS. 1 and 2, corresponds to the Cartesian coordinate system shown in the figures after FIG.

As shown in FIG. 1, the laser processing apparatus 100 has a processing jig 10 that supports the sheet material MS and a laser on the processing surface (one surface) Mf of the sheet material MS supported by the processing jig 10. It includes a laser irradiation unit 20 that irradiates light, and a control unit 30 that controls the operation of each unit of the processing jig 10 and the laser irradiation unit 20.

As shown in FIGS. 1 and 2, the processing jig 10 supports the sheet material MS wound in a roll shape and conveys the sheet material MS in a predetermined direction. ) 12, the first holder 13 arranged to face the machined surface Mf of the sheet material MS, and the first holder 13 arranged to face the lower surface Mu which is the surface opposite to the machined surface Mf of the sheet material MS. 2 The holder 14 is provided with a first nozzle (nozzle) 15 and a second nozzle (nozzle) 16 for injecting nitrogen (N ₂ ), which is an inert gas, as an assist gas. Hereinafter, the upstream roller 11 and the downstream roller 12 are collectively referred to as "rollers 11 and 12".

As shown in FIG. 2, each of the upstream roller 11 and the downstream roller 12 is composed of a pair of rollers. Each of the pair of rollers 11 and 12 rotates at the same rotation speed with the sheet material MS sandwiched between them. As a result, the rollers 11 and 12 transport the sheet material MS along the transport direction DR1 at a transport speed corresponding to the rotation speed.

The first holder 13 and the second holder 14 are arranged apart from the sheet material MS conveyed by the rollers 11 and 12. In other words, the surface FF1 facing the sheet material MS in the first holder 13 and the processed surface Mf of the sheet material MS form a first gap GP1. The distance between the facing surface FF1 and the machined surface Mf, that is, the thickness of the first gap GP1 is the distance d1. Similarly, the surface FF2 facing the sheet material MS in the second holder 14 and the lower surface Mu of the sheet material MS form a second gap GP2. The distance between the facing surface FF2 and the lower surface Mu, that is, the thickness of the second gap GP2 is the distance d2. In the first embodiment, the distance d1 and the distance d2 have the same length, but in other embodiments, they may have different lengths.

As shown in FIG. 1, the first holder 13 is formed with a first slit SL1 forming a constant angle α1 with respect to the transport direction DR1. As shown in FIG. 2, the first slit SL1 penetrates the first holder 13 in the thickness direction. The thickness direction referred to here is a direction orthogonal to the facing surface FF1 of the first holder 13 and the facing surface FF2 of the second holder 14 facing each other via the sheet material MS, and is in the Z axis. The directions are parallel. Similar to the first holder 13, the second holder 14 is formed with a second slit SL2 forming an angle α1 with respect to the transport direction DR1. As shown in FIG. 2, the second slit SL2 penetrates the second holder 14 in the thickness direction.

FIG. 3 is a perspective view of the vicinity of the gas injection port of the first nozzle 15. As shown in FIG. 3, in the first nozzle 15, nitrogen supplied from the upstream side is injected from a plurality of injection ports PS formed on the downstream side. As shown in FIG. 2, the nitrogen injected from the first nozzle 15 causes an air flow along the machined surface Mf in the first gap GP1. Similarly, the nitrogen injected from the second nozzle 16 causes an air flow along the lower surface Mu in the second gap GP2. In other words, in the first embodiment, the rollers 11 and 12 have the same direction of the air flow generated by the first nozzle 15 and the second nozzle 16 and the transport direction DR1 of the sheet material MS.

As shown in FIG. 2, the laser irradiation unit 20 irradiates the sheet material MS with the laser beam LS from the side of the first holder 13 to the processed surface Mf of the sheet material MS. In other words, the laser irradiation unit 20 irradiates the machined surface Mf of the sheet material MS with the laser beam LS from the upper side (Z-axis positive direction side) of the first holder 13.

FIG. 4 is an explanatory diagram of the laser beam LS emitted from the laser irradiation unit 20. FIG. 4 shows a simplified change in the laser beam LS irradiated from the laser irradiation unit 20 to the sheet material MS. In the first embodiment, the position of the laser irradiation unit 20 is set to a predetermined position in advance with respect to the processing jig 10. By scanning the irradiation angle α2 of the laser beam LS, the laser irradiation unit 20 lasers along the first slit SL1 formed in the first holder 13 and the second slit SL2 formed in the second holder 14. Irradiate with light LS. Therefore, the laser beam LS is directly applied to the sheet material MS conveyed by the rollers 11 and 12. In the sheet material MS cut by the laser beam LS, metal sputters in which the sheet material MS is melted are generated.

The control unit 30 includes a CPU (Central Processing Unit) (not shown), a ROM (Read Only Memory), and a RAM (Random Access Memory). The CPU expands the computer program stored in the ROM into the RAM and executes it, thereby operating the laser irradiation unit 20, the transfer speed of the sheet material MS by the rollers 11 and 12, and the first nozzle 15 and the second nozzle. The flow rate of nitrogen injected from the nozzle 16 is controlled.

図５は、式（１）を満たす場合にレーザ光ＬＳにより切断されたレーザ加工製品ＳＡ１の概略平面図である。図５に示されるように、シート材ＭＳから切断されたレーザ加工製品ＳＡ１は、対向する一組の辺がシート材ＭＳの幅である長さＷと、切断方向に直交する長さＬ１とを有する矩形状のシートとして製造される。 In the control unit 30, the following equation (1) satisfies the moving speed _VL in which the laser beam _LS moves in the sheet material MS and the transport speed VS of the sheet material MS by the rollers 11 and 12 shown in FIG. The irradiation angle α2 of the laser beam LS is controlled so as to be performed.

FIG. 5 is a schematic plan view of the laser processed product SA1 cut by the laser beam LS when the formula (1) is satisfied. As shown in FIG. 5, the laser processed product SA1 cut from the sheet material MS has a length W in which a pair of opposite sides is the width of the sheet material MS and a length L1 orthogonal to the cutting direction. Manufactured as a rectangular sheet with.

The control unit 30 ejects nitrogen from the first nozzle 15 and the second nozzle 16 according to the material of the sheet material MS, the thickness of the sheet material MS, the transport speed of the sheet material MS by the rollers 11 and 12, and the like. To determine. Here, if the flow rates of the first nozzle 15 and the second nozzle 16 are defined as Q1 and Q2 (m ³ / s), respectively, the flow rates of nitrogen flowing through the first gap GP1 and the second gap GP2 are V1 and V2 (m / s). s) is expressed by the following equations (2) and (3).
V1 = Q1 / (W · d1) ... (2)
V2 = Q2 / (W · d2) ... (3)
The respective flow velocities V1 and V2 are preferably larger than 0.1 (m / s) and smaller than 100 (m / s). Further, the transport speed VS of the sheet material MS by the rollers 11 and 12 is preferably 0.1 m / _s or more and 5 m / s or less, regardless of whether or not the above formulas (2) and (3) are satisfied. Further, the distance d1 of the first gap GP1 formed between the first holder 13 and the sheet material MS, and the distance d1 of the second gap GP2 formed between the second holder 14 and the sheet material MS. The d2 is preferably 0.1 mm or more and 1.0 mm or less. The flow rates Q1 and Q2 are preferably 10 ^-3 m ³ / s or more and 10 ^-1 m ³ / s or less. In particular, when the distances d1 and d2 are 0.1 mm or more and 0.5 mm or less, the flow rates Q1 and Q2 are preferably 10 ^-3 m ³ / s or more and 10 ^-2 m ³ / s or less.

FIG. 6 is a flowchart of a manufacturing method of the laser processed product SA1. As shown in FIG. 6, in the flowchart of the manufacturing method (hereinafter, also simply referred to as “manufacturing flow”), first, between the first holder 13 and the second holder 14 of the processing jig 10. A sheet material MS as a work material is arranged (step S1). Next, the laser irradiation unit 20 irradiates the machined surface Mf of the sheet material MS with the laser beam LS from the side of the first holder 13 (Z-axis positive direction side) with respect to the sheet material MS (step S2). The first nozzle 15 generates an air flow along the machined surface Mf in the first gap GP1 together with the irradiation of the laser beam LS, and the second nozzle 16 causes the lower surface Mu of the sheet material MS in the second gap GP2. (Step S3) is generated along with the air flow, and the manufacturing flow is completed.

FIG. 7 is an explanatory diagram of the laser processing device 100z of the comparative example. FIG. 7 shows an enlarged schematic cross-sectional view of the sheet material MS cut by the laser beam LS emitted from the laser irradiation unit 20z of the comparative example. As shown in FIG. 7, the laser processing apparatus 100z of the comparative example includes a laser irradiation unit 20z and a third nozzle 15z attached to the laser irradiation unit 20z. The laser processing device 100z of the comparative example includes a laser irradiation unit 20z and a third nozzle 15z, which are different from those of the first embodiment shown in FIG. 7, as compared with the laser processing device 100 of the first embodiment. On the other hand, the laser processing apparatus 100z of the comparative example has the same configuration as each configuration of the first embodiment as a configuration not shown in FIG. 7.

As shown in FIG. 7, in the comparative example, the third nozzle 15z is attached to the laser irradiation unit 20z so as to be positioned coaxially with the laser light LS irradiated to the laser irradiation unit 20z. Therefore, the third nozzle 15z injects nitrogen as a high-pressure assist gas onto the sheet material MS along the injection direction DR2 which is substantially the same as the laser beam LS. When the sheet material MS is cut by the laser beam LS, the spatter SP, which is a molten metal generated in the cut portion AR1, is blown off from the cut portion AR1 by the nitrogen injected from the third nozzle 15z. On the other hand, since the nitrogen injected along the injection direction DR2 has a component parallel to the thickness direction (Z-axis direction) of the sheet material MS, the cut portion AR1 is bent toward the lower surface Mu side.

As described above, in the processing jig 10 of the first embodiment, the first holder 13 and the second holder 14 are arranged apart from the sheet material MS conveyed by the rollers 11 and 12. .. Nitrogen injected from the first nozzle 15 is along the machined surface Mf of the sheet material MS in the first gap GP1 formed between the facing surface FF1 of the first holder 13 and the machined surface Mf of the sheet material MS. Creates an air flow. Therefore, the airflow generated by the first nozzle 15 cools the spatter SP generated in the cutting portion AR1 by laser processing, and suppresses the spatter SP from adhering to the sheet material MS. Further, even if the spatter SP adheres to the sheet material MS, the air flow of nitrogen blows off the spatter SP adhering to the sheet material MS and removes it. Further, the nitrogen airflow suppresses the generation and stagnation of fume, which is a metal vapor generated in the cut portion AR1. Here, since the air flow flows in the direction along the machined surface Mf, it does not have a component parallel to the thickness direction of the sheet material MS as in the comparative example. As a result, it is possible to prevent the airflow from deforming the cut portion AR1 of the sheet material MS in the thickness direction of the sheet material MS. The airflow flowing through the first gap GP1 can adjust the distance d1 between the first holder 13 and the sheet material MS by Bernoulli's theorem or the Coanda effect. As a result, the distance between the laser beam LS irradiated by the laser irradiation unit 20 and the sheet material MS is adjusted.

Further, the processing jig 10 of the first embodiment includes rollers 11 and 12 that support the sheet material MS and convey it in a predetermined direction. Therefore, since the material to be processed is conveyed via the rollers 11 and 12, the man-hours for exchanging the material to be processed can be reduced and the processing of the material to be processed can be automated.

Further, the rollers 11 and 12 of the first embodiment convey the sheet material MS in the same direction as the air flow generated by the first nozzle 15. Therefore, since the airflow is not disturbed by the sheet material MS transported in the transport direction DR1, it can be more influenced by Bernoulli's theorem and the Coanda effect.

Further, since the first nozzle 15 of the first embodiment injects nitrogen as an inert gas, the oxidation of the spatter SP can be suppressed, so that the temperature rise of the spatter SP and the sheet material MS can be suppressed.

Further, in the processing jig 10 of the first embodiment, in addition to the air flow generated in the first gap GP1, the nitrogen injected from the second nozzle 16 is transferred to the facing surface FF2 of the second holder 14 and the sheet material MS. In the second gap GP2 formed between the lower surface Mu and the lower surface Mu, an air flow is generated along the lower surface Mu of the sheet material MS. Therefore, the sheet material MS is affected by Bernoulli's theorem and the Coanda effect due to the air flow not only from the machined surface Mf but also from the lower surface Mu. As a result, the distance between the laser beam LS irradiated by the laser irradiation unit 20 and the sheet material MS is adjusted more appropriately.

<Second Embodiment>
FIG. 8 is a schematic plan view of the laser processing apparatus 100a provided with the processing jig 10a of the second embodiment. FIG. 9 is a schematic view of a cross section of A2-A2 in FIG. The processing jig 10a of the second embodiment has a fourth nozzle 15a instead of the first nozzle 15 and the second nozzle 16 as compared with the processing jig 10 of the first embodiment, and a second. The position of the upstream roller 11a is different from that of the first embodiment, and the other configurations are the same. Therefore, in the second embodiment, the fourth nozzle 15a and the upstream roller 11a, which are different from the configurations of the first embodiment, will be described, and the description of other configurations will be omitted. In the second embodiment, a copper sheet material MSa is used as the material to be processed.

As shown in FIG. 9, the upstream roller 11a of the second embodiment is arranged on the same plane as the downstream roller 12 (on the same XY plane). Therefore, unlike the state in which the sheet material MSa transported by the upstream roller 11a and the downstream roller 12 is bent by the upstream roller 11 of the first embodiment, the sheet material MSa is conveyed along the transport direction DR1 while maintaining a flat state. Will be done.

As shown by the arrows in FIGS. 8 and 9, the nitrogen injected from the fourth nozzle 15a produces an air flow in the first gap GP1 along the machined surface Mf and in a direction orthogonal to the transport direction DR1. .. In other words, the airflow direction in the second embodiment is along the XY plane and parallel to the Y axis. Further, since the processing jig 10a of the second embodiment does not include the second nozzle 16 provided in the first embodiment, no air flow composed of nitrogen is generated in the second gap GP2.

As described above, the nitrogen injected from the fourth nozzle 15a of the second embodiment generates an air flow along the machined surface Mfa in the first gap GP1. Therefore, as in the processing jig 10 of the first embodiment, the airflow generated by the fourth nozzle 15a cools the spatter SP and suppresses the spatter SP from adhering to the sheet material MSa. Further, since the air flow flows in the direction along the machined surface Mfa, it is possible to suppress the deformation of the cut portion AR1 of the sheet material MSa in the thickness direction of the sheet material MSa. Further, the airflow can adjust the distance d1 between the laser beam LS irradiated by the laser irradiation unit 20 and the sheet material MSa according to Bernoulli's theorem or the Coanda effect.

<Third Embodiment>
FIG. 10 is a schematic plan view of a laser processing apparatus 100b including the processing jig 10b of the third embodiment. FIG. 11 is a schematic view of a cross section of A3-A3 in FIG. In the processing jig 10b of the third embodiment, the shape of the first holder 13b and the fifth nozzle that injects nitrogen instead of the fourth nozzle 15a are compared with the processing jig 10a of the second embodiment. The shape of 15b is different, and the other configurations are the same. Therefore, in the third embodiment, the first holder 13b and the fifth nozzle 15b, which are different from the configurations of the second embodiment, will be described, and the description of other configurations will be omitted.

As shown in FIG. 11, in the third embodiment, the first holder 13b and the fifth nozzle 15b are integrally formed. Specifically, a part of the fifth nozzle 15b through which the injected nitrogen passes is formed in the first holder 13b. The distance between the facing surface FF1b of the first holder 13b and the machined surface Mfa of the sheet material MSa is a distance d1b larger than the distance d1 of the first embodiment. That is, the first gap GP1b is formed larger than the first gap GP1 of the first embodiment.

The fifth nozzle 15b is formed in the first holder 13b on the upstream roller 11a side of the position of the laser irradiation unit 20. Since nitrogen has flowed into the fifth nozzle 15b, the nitrogen injected from the fifth nozzle 15b causes an air flow along the machined surface Mfa in the first gap GP1b as shown by the arrow in FIG.

As described above, the nitrogen injected from the fifth nozzle 15b of the third embodiment generates an air flow along the machined surface Mfa in the first gap GP1b. Therefore, as in the processing jig 10 of the first embodiment, the airflow generated by the fifth nozzle 15b cools the spatter SP and suppresses the spatter SP from adhering to the sheet material MSa. Further, since the air flow flows in the direction along the machined surface Mfa, it is possible to suppress the deformation of the cut portion AR1 of the sheet material MSa in the thickness direction of the sheet material MSa. Further, the airflow can adjust the distance d1 between the laser beam LS irradiated by the laser irradiation unit 20 and the sheet material MSa according to Bernoulli's theorem or the Coanda effect.

<Modified example of this embodiment>
The present invention is not limited to the above embodiment, and can be carried out in various embodiments without departing from the gist thereof, and for example, the following modifications are also possible.

[Modification 1]
The laser machining apparatus 100, 100a, 100b and the machining jigs 10, 10a, 10b in the above embodiment are examples, and the configuration and shape of the laser machining apparatus and the machining jig can be variously modified. The processing jig 10 may not include rollers 11 and 12 for transporting the sheet material MS, and a transport device other than the rollers may be adopted for transporting the sheet material MS. The transport direction DR1 of the sheet material MS by the rollers 11 and 12 may be configured to be changeable. The laser processing device 100 does not necessarily have to include a control unit, and for example, the laser irradiation unit 20 may be controlled by a control signal received from a device other than the laser processing device 100. The first nozzle 15 and the like inject nitrogen as an inert gas, but the injected gas can be variously deformed. For example, the nozzle may inject argon as an inert gas or may inject a gas other than the inert gas. Well-known techniques can be applied to the shape and placement of the nozzles.

FIG. 12 is a perspective view of the vicinity of the gas injection port of the first nozzle 17 of the modified example. As shown in FIG. 12, the first nozzle 17 of the modified example includes one injection port PSc instead of the injection port PS in the nozzle 15 of the first embodiment. The injection port PSc is an elliptical slit in which all of the injection ports PS of the first embodiment are connected. As described above, the injection ports PSc formed in the first nozzle 17 and the first nozzle 17 can be variously deformed. As a nozzle of another modification, it is not a single device for injecting gas, but a nozzle-like device to which gas formed in the first holder 13b is supplied as in the third embodiment (FIG. 11). It may be a structure. As used herein, the term "nozzle for injecting gas" refers to a mechanism and structure for injecting a gas that is a source of airflow along the surfaces of the sheet materials MS and MSa.

The positional relationship between the first holders 13 and 13b, the sheet materials MS and MSa, and the second holder 14 in the above embodiment can be variously modified. In the above embodiment, both the first holders 13 and 13b and the second holder 14 are arranged apart from the sheet materials MS and MSa, but the first holders 13 and 13b and the second holder 14 are arranged. At least one of the above may be arranged apart from the sheet materials MS and MSa. The first holders 13 and 13b and the second holder 14 do not necessarily have to be arranged in parallel with the machined surface Mf and the lower surface Mu in the sheet material MS and MSa. For example, it may be inclined so that the distance d1 or the distance d2 becomes smaller toward the downstream side along the transport direction DR1, and vice versa. The shapes of the first holders 13 and 13b and the second holder 14 are changed to the extent that the air flow of the gas injected from the first nozzle 15 and the second nozzle 16 is generated along the surface of the machined surface Mf and the lower surface Mu. To.

The gas ejected from the nozzle has a gap (for example, a first gap) formed between at least one of the first holder and the second holder arranged apart from each other and the sheet material as a material to be processed. In GP1), an air flow along the surface of the sheet material may be generated. For example, in the processing jig 10 of the first embodiment, the air flow may not be generated in the first gap GP1 and may be generated only in the second gap GP2. Further, in the process of step S3 in the manufacturing flow (FIG. 6), the second nozzle 16 does not have to generate an air flow along the lower surface Mu of the sheet material MS in the second gap GP2. The distance d1 representing the thickness of the first gap GP1 and the distance d2 representing the thickness of the second gap GP2 can be variously deformed.

Further, the directions of the airflow generated in the first gap GP1 and GP1b and the second gap GP2 can be variously deformed. The direction of the air flow along the surface of the sheet materials MS and MSa does not have to be the same as or orthogonal to the transport direction DR1 of the rollers 11 and 12, for example, an angle of 30 degrees (°) with the transport direction DR1. It may be made. The airflow along the surface of the work material in this embodiment means the flow of gas flowing substantially parallel to the surface of the work material. Approximately parallel in the present specification means parallel to a plane forming an angle of 20 ° or less with respect to a reference plane. It is more preferable that the airflow along the surface is parallel to a plane forming an angle of 5 ° or less with respect to the reference plane. For example, even if an air flow that does not partially follow the surface of the work material is generated in the vicinity of the spatter SP adhering to the work surface Mf, the air flow should be regarded as an air flow along the surface of the work material. Can be done. Further, when the surface of the material to be processed is a curved surface, the air flow flows along the curved surface. The airflow along the surface of the work material may be near the irradiation of the laser beam. Therefore, unlike the laser machining apparatus 100 of the first embodiment, it is not necessary that a nitrogen air flow is generated on the entire surface of the machining surface Mf and the lower surface Mu conveyed to the rollers 11 and 12.

[Modification 2]
FIG. 13 is an explanatory diagram of the first holder 13c in the modified example. FIG. 13 is a schematic perspective view of the sheet material MS irradiated with the laser beam LS from the laser irradiation unit 20 and the first holder 13c of the modified example arranged between the laser irradiation unit 20 and the sheet material MS. Indicated by. In the modified example, the same configuration as that of the first embodiment is not shown in FIG. In the modified example, the first holder 13c is made of quartz that transmits the laser beam LS. Further, the first holder 13c is not formed with the first slit SL1 through which the laser beam LS passes. That is, the first holder 13c functions as a laser light transmitting portion capable of transmitting the laser light LS.

The first holder 13c of the modified example is capable of transmitting the laser beam LS. Therefore, it is not necessary to form the first slit SL1 through which the laser beam LS passes in the first holder 13c, and the degree of freedom in the shape of the first holder 13c is improved. Due to the self-cleaning effect (laser cleaning) of the laser beam LS, the spatter SP adhering to the first holder 13c does not have to be affected by the spatter SP in laser processing. For example, as shown in FIG. 13, by forming the entire surface of the first holder 13c with quartz, the laser irradiation unit 20 can emit the laser beam LS to an arbitrary position of the sheet material MS. As a result, the sheet material MS can be cut into an arbitrary shape. For example, the laser irradiation unit 20 may divide the width W of the sheet material MS shown in FIG. 5 into half the length W / 2.

The position of the laser irradiation unit 20 of the above embodiment and the modified example was fixed to the processing jigs 10, 10a, 10b in a state where the irradiation angle α2 of the laser light LS could be changed, but the laser irradiation unit was fixed. 20 can be variously modified. For example, the position of the laser irradiation unit 20 may change with respect to the processing jigs 10, 10a, and 10b. There may be two or more laser irradiation units 20 that irradiate the sheet materials MS and MSa with the laser beam LS. Further, the laser irradiation unit 20 includes a scanning mirror that reflects the laser light LS, and even if the irradiation position of the laser light LS with respect to the sheet materials MS and MSa is changed by changing the direction of the scanning mirror. good.

In the modification shown in FIG. 13, all of the first holder 13c is made of quartz, but the portion of the first holder formed by the laser transmitting portion can be variously deformed. For example, the first slit SL1 of the first holder 13 in the first embodiment may be filled with quartz. By doing so, in the laser processing apparatus, after irradiating the sheet material MS with the laser beam LS, it is possible to prevent the spatter SP from adhering to the laser irradiation unit 20 beyond the first holder 13. Further, the laser transmitting portion may be made of a material other than quartz, and may be made of, for example, sapphire.

Although this embodiment has been described above based on the embodiments and modifications, the embodiments described above are for facilitating the understanding of the present embodiment and do not limit the present embodiment. This aspect may be modified or improved without departing from its spirit and claims, and this aspect includes its equivalent. Further, if the technical feature is not described as essential in the present specification, it may be deleted as appropriate.

10, 10a, 10b ... Machining jig 11, 11a ... Upstream roller (conveyor)
12 ... Downstream roller (conveyor)
13, 13b, 13c ... 1st holder 14 ... 2nd holder 15, 17 ... 1st nozzle 15a ... 4th nozzle 15b ... 5th nozzle 15z ... 3rd nozzle 16 ... 2nd nozzle 20, 20z ... Laser irradiation unit 30 ... Control unit 100, 100a, 100b, 100z ... Laser processing device AR1 ... Cutting part DR1 ... Transfer direction DR2 ... Injection direction FF1, FF1b ... Facing surface FF2 ... Facing surface GP1, GP1b ... First gap GP2 ... Second gap LS … Laser light MS, MSa… Sheet material (work material)
Mf, Mfa ... Processed surface (one surface)
Mu ... Bottom surface (opposite surface)
PS, PSc ... Injection port SA1 ... Laser processed product SL1 ... 1st slit SL2 ... 2nd slit SP ... Spatter V1, V2 ... Flow velocity _VL ... Movement speed VS ... Transport speed d1, _d1b , d2 ... Distance Q1, Q2 … Flow rate α1… Angle α2… Irradiation angle

Claims (7)

It is a processing jig
A first holder placed facing one surface of the material to be machined,
A second holder arranged to face the surface of the material to be processed opposite to the one surface, and the second holder.
A nozzle that injects gas and
A transport unit that transports the material to be processed in a predetermined direction,
Equipped with
Both the first holder and the second holder are arranged apart from the material to be processed.
The gas ejected from the nozzle is of the work material in the gap formed between the first holder and the work material and between the second holder and the work material. Creates an air flow along the surface ,
The transport unit is a machining jig that is a transport roller that transports the material to be machined in the same direction as the air flow . It is a processing jig
A first holder placed facing one surface of the material to be machined,
A second holder arranged to face the surface of the material to be processed opposite to the one surface, and the second holder.
A nozzle that injects gas and
A transport unit that transports the material to be processed in a predetermined direction,
Equipped with
At least one of the first holder and the second holder is arranged apart from the material to be processed.
The gas ejected from the nozzle was along the surface of the work material in the gap formed between at least one of the first holder and the second holder and the work material. Create an air flow,
The distance of the gap is 0.1 mm or more and less than 1.0 mm .
The transport unit is a machining jig that is a transport roller that transports the material to be machined in the same direction as the air flow . The processing jig according to claim 1 or 2 .
The nozzle is a processing jig that injects an inert gas. The processing jig according to any one of claims 1 to 3 .
The first holder is a processing jig having a laser light transmitting portion made of sapphire or quartz. It is a laser processing device
The processing jig according to any one of claims 1 to 4 ,
An irradiation unit that irradiates the one surface of the processing jig with a laser beam from the side of the first holder, and an irradiation unit.
Equipped with
The first holder is arranged apart from the one surface of the work material.
A laser processing device in which a gas ejected from the nozzle creates an air flow along the one surface in the gap between the first holder and the one surface. It is a manufacturing method of laser processed products.
The process of arranging the work material between the first holder and the second holder,
A step of irradiating one surface of the material to be processed , which is conveyed in a predetermined direction by the conveying portion from the side of the first holder, with a laser beam.
With the irradiation of the laser beam, in the gap formed between the first holder and the material to be processed and between the second holder and the material to be processed, the one of the material to be processed. And the process of creating an air flow along the surface of
Equipped with
The manufacturing method , wherein the transport unit is a transport roller that transports the material to be processed in the same direction as the direction of the air flow . It is a manufacturing method of laser processed products.
The process of arranging the work material between the first holder and the second holder,
A step of irradiating one surface of the material to be processed , which is conveyed in a predetermined direction by the conveying portion from the side of the first holder, with a laser beam.
A step of generating an air flow along the one surface of the work material in a gap formed between the first holder and the work material together with the irradiation of the laser beam.
Equipped with
The distance of the gap is 0.1 mm or more and less than 1.0 mm .
The manufacturing method , wherein the transport unit is a transport roller that transports the material to be processed in the same direction as the direction of the air flow .

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