JP7013507B2 - Substrate processing equipment, semiconductor equipment manufacturing methods and programs - Google Patents

Description

The present disclosure relates to a substrate processing apparatus, a manufacturing method and a program of a semiconductor apparatus.

As one step in the manufacturing process of a semiconductor device, a process of forming a film on a substrate may be performed (see, for example, Patent Document 1). In this case, a process of forming a film may be performed so as to embed the inside of the recess provided on the surface of the substrate.

Japanese Unexamined Patent Publication No. 2016-56410

The present disclosure provides a technique capable of forming a film so as to be embedded in a recess of a substrate.

According to one aspect of the present disclosure
The board mount on which the board is mounted and the board mount
An adsorption-inhibiting gas supply unit that supplies an adsorption-inhibiting gas from the upper side of the substrate mounting table onto the surface of the substrate, and an adsorption-inhibiting gas supply unit.
A raw material gas supply unit that supplies raw material gas from the upper side of the substrate mounting table onto the surface of the substrate, and a raw material gas supply unit.
Equipped with
The substrate processing apparatus in which the distance D1 between the gas supply port provided in the adsorption inhibitory gas supply unit and the substrate is larger than the distance D2 between the gas supply port provided in the raw material gas supply unit and the substrate. Is provided.

According to the present disclosure, the film can be formed so as to be embedded in the recesses of the substrate.

It is a conceptual diagram which shows the schematic structure example of the main part of the substrate processing apparatus which concerns on 1st Embodiment of this disclosure. It is a figure which shows the detailed configuration example of the main part of the substrate processing apparatus which concerns on 1st Embodiment of this disclosure, and FIG. ) Is a side sectional view showing a BB cross section of FIG. It is a figure which shows the detailed structure example of the main part of the substrate processing apparatus which concerns on 1st Embodiment of this disclosure, and is the side sectional view which shows the CC cross section of FIG. It is a figure which showed the series of steps of the example of the film formation method which concerns on 1st Embodiment of this disclosure, and FIG. 4 (a) is a figure which showed the example of the adsorption inhibition group forming process, and FIG. Is a diagram showing an example of a raw material gas adsorption process, and FIG. 4C is a diagram showing an example of a reforming process using a reaction gas. It is a conceptual diagram which shows an example of the schematic structure of the main part of the substrate processing apparatus which concerns on the 2nd aspect of this disclosure. It is a conceptual diagram which shows an example of the schematic structure of the main part of the substrate processing apparatus which concerns on other aspects of this disclosure.

<First aspect of the present disclosure>
The first aspect of the present disclosure will be described below.

(1) Configuration of Substrate Processing Device First, the configuration of the substrate processing device will be described with reference to FIGS. 1, 2 (a), 2 (b), and FIG. The substrate processing apparatus according to this aspect is configured as a single-wafer type substrate processing apparatus that processes the substrate to be processed one by one. Examples of the substrate to be processed include a semiconductor wafer substrate (hereinafter, simply referred to as “wafer”) in which a semiconductor device (semiconductor device) is built.

(Processing container)
The substrate processing apparatus 100 described in this embodiment includes a processing container (not shown). The processing container is configured as a closed container with a metal material such as aluminum (Al) or stainless steel (SUS). Further, a substrate loading / unloading port (not shown) is provided on the side surface of the processing container, and the wafer 200 is conveyed through the substrate loading / unloading port. Further, a gas exhaust system such as a vacuum pump or a pressure controller (not shown) is connected to the processing container, and the inside of the processing container can be adjusted to a predetermined pressure by using the gas exhaust system.

(Board mount)
Inside the processing container, a substrate mounting table 210 on which the wafer 200 is mounted is provided. The substrate mounting table 210 is formed in a disk shape, for example, in a plan view, and a plurality of wafers 200 are mounted on the upper surface (board mounting surface) thereof at equal intervals in the circumferential direction. .. Further, the substrate mounting table 210 includes a heater (not shown) as a heating source, and the heater can be used to maintain the temperature of the wafer 200 at a predetermined temperature. The board mounting table 210 is configured to be rotationally driven by a rotation mechanism (not shown) with the center position of the board mounting table 210 in a plan view as a rotation axis. The rotary mechanism that rotationally drives the board mount 210 is configured to include, for example, a rotary bearing that rotatably supports the board mount 210, a drive source typified by an electric motor, and the like. In the example, the case where five wafers 200 are mounted is shown, but the present invention is not limited to this, and the number of wafers to be mounted may be appropriately set. For example, if the number of mounted sheets is large, the processing throughput can be expected to be improved, and if the number of mounted sheets is small, the size of the substrate mounting table 210 can be suppressed. Since the substrate mounting surface of the substrate mounting table 210 is in direct contact with the wafer 200, it is desirable that the substrate mounting surface is made of a material such as quartz or alumina.

(Cartridge head)
On the upper side of the board mounting table 210, a cartridge head 230 as a gas supply mechanism for the wafer 200 on the board mounting table 210 is provided. The cartridge head 230 includes a central support portion 230a arranged near the center position of the board mounting base 210, and a plurality of cartridge portions 230b, 230c extending radially from the central support portion 230a toward the outer peripheral side of the board mounting base 210. It is configured to include 230d. Specifically, the cartridge heads 230 are arranged in the order of the cartridge portions 230b, 230c, 230d, 230b, 230c, 230d along the circumference centered on the central support portion 230a at substantially equal intervals, for a total of six cartridges. It has a part. Each of the cartridge portions 230b, 230c, and 230d extends beyond the outer peripheral end of the wafer 200 on the substrate mounting table 210 and further extends to the outer peripheral side thereof.

The number of installed cartridge portions 230b, 230c, 230d is shown in FIG. 1 in the case where two cartridge portions are evenly provided in the circumferential direction around the central support portion 230a, for a total of six. It is not limited to. It may be appropriately set in consideration of the number of gas types supplied to the wafer 200, the processing throughput, and the like.

Further, in this embodiment, the cartridge portions 230b, 230c, 230d are configured to extend from the central support portion 230a toward the outer peripheral side of the substrate mounting table 210 in a strip shape. That is, each of the cartridge portions 230b, 230c, 230d has a substantially rectangular planar shape in which the longitudinal direction is arranged toward the outer peripheral side of the substrate mounting table 210. However, the planar shape of each cartridge portion 230b, 230c, 230d does not necessarily have to be substantially rectangular. For example, in consideration of the relationship between the peripheral speed difference between the inner and outer circumferences and the gas supply amount when the substrate mounting table 210 and the cartridge head 230, which will be described later, move relative to each other, the fan shape may be formed so as to expand toward the outer peripheral side. In any of the planar shapes, it is assumed that the longitudinal size of each of the cartridge portions 230b, 230c, 230d is formed to be larger than the maximum diameter of the wafer 200.

(Cartridge part)
The configurations of the cartridge portions 230b, 230c, and 230d included in the cartridge head 230 will be described in detail with reference to FIGS. 2 (a), 2 (b), and 3.

FIG. 2A is a diagram showing a detailed configuration example of the cartridge portion 230b, and is a side sectional view showing a cross section taken along the line AA of FIG.

The cartridge unit 230b has an adsorption inhibitory gas supply unit 232b (hereinafter, referred to as “gas supply unit 232b”). The gas supply unit 232b is configured to supply the adsorption inhibitory gas onto the surface of the wafer 200 from the upper side of the substrate mounting table 210. The gas supply unit 232b has an adsorption-inhibiting gas supply hole 233b (hereinafter referred to as "gas supply hole 233b") which is a through hole for the adsorption-inhibiting gas. Further, an adsorption-inhibiting gas supply port 222b (hereinafter referred to as "gas supply port 222b") is provided at the lower end of the gas supply hole 233b. In the present specification, the distance between the gas supply port 222b provided in the gas supply unit 232b and the surface of the wafer 200 is defined as the distance D1.

Further, the cartridge unit 230b has a pair of adsorption-inhibiting gas exhaust units 240b (hereinafter referred to as "gas exhaust unit 240b") on both sides of the gas supply unit 232b. The gas exhaust unit 240b is configured to exhaust the adsorption-inhibiting gas on both sides of the gas supply unit 232b. The gas exhaust unit 240b has an adsorption-inhibiting gas exhaust hole 238b (hereinafter referred to as "gas exhaust hole 238b") which is a through hole for the adsorption-inhibiting gas.

Further, the cartridge unit 230b has a pair of first inert gas supply units 234b (hereinafter referred to as "gas supply unit 234b") on both sides of the pair of gas exhaust units 240b. The gas supply unit 234b is configured to supply the inert gas onto the surface of the wafer 200 from the upper side of the substrate mounting table 210 on both sides of the gas supply unit 232b. The gas supply unit 234b has a first inert gas supply hole 235b (hereinafter referred to as “gas supply hole 235b”) which is a through hole for the inert gas. Further, a first inert gas supply port 225b (hereinafter referred to as "gas supply port 225b") is provided at the lower end of the gas supply hole 235b. In the present specification, the distance between the gas supply port 225b provided in the gas supply unit 234b and the surface of the wafer 200 is defined as the distance P1.

Further, the cartridge unit 230b has a first inert gas exhaust unit 239b (hereinafter referred to as “gas exhaust unit 239b”) between the gas exhaust unit 240b and the gas supply unit 234b, respectively. The gas exhaust unit 239b is configured to exhaust the inert gas. The gas exhaust unit 239b has a first inert gas exhaust hole 237b (hereinafter referred to as “gas exhaust hole 237b”) which is a through hole for the inert gas.

FIG. 2B is a diagram showing a detailed configuration example of the cartridge portion 230c, and is a side sectional view showing a BB cross section of FIG.

The cartridge unit 230c has a raw material gas supply unit 232c (hereinafter, referred to as “gas supply unit 232c”). The gas supply unit 232c is configured to supply the raw material gas onto the surface of the wafer 200 from the upper side of the substrate mounting table 210. The gas supply unit 232c has a raw material gas supply hole 233c (hereinafter referred to as “gas supply hole 233c”) which is a through hole for the raw material gas. Further, a raw material gas supply port 222c (hereinafter referred to as "gas supply port 222c") is provided at the lower end of the gas supply hole 233c. In the present specification, the distance between the gas supply port 222c provided in the gas supply unit 232c and the surface of the wafer 200 is defined as the distance D2.

Further, the cartridge unit 230c has a pair of raw material gas exhaust units 240c (hereinafter referred to as "gas exhaust unit 240c") on both sides of the gas supply unit 232c. The gas exhaust unit 240c is configured to exhaust the raw material gas on both sides of the gas supply unit 232c. The gas exhaust unit 240c has a raw material gas exhaust hole 238c (hereinafter, referred to as “gas exhaust hole 238c”) which is a through hole for the raw material gas.

Further, the cartridge unit 230c has a pair of second inert gas supply units 234c (hereinafter referred to as "gas supply unit 234c") on both sides of the pair of gas exhaust units 240c. The gas supply unit 234c is configured to supply the inert gas onto the surface of the wafer 200 from the upper side of the substrate mounting table 210 on both sides of the gas supply unit 232c. The gas supply unit 234c has a second inert gas supply hole 235c (hereinafter referred to as “gas supply hole 235c”) which is a through hole for the inert gas. A second inert gas supply port 225c (hereinafter referred to as "gas supply port 225c") is provided at the lower end of the gas supply hole 235c. In the present specification, the distance between the gas supply port 225c provided in the gas supply unit 234c and the surface of the wafer 200 is defined as the distance P2.

Further, the cartridge unit 230c has a second inert gas exhaust unit 239c (hereinafter referred to as “gas exhaust unit 239c”) between the gas exhaust unit 240c and the gas supply unit 234c, respectively. The gas exhaust unit 239c is configured to exhaust the inert gas. The gas exhaust unit 239c has a second inert gas exhaust hole 237c (hereinafter referred to as “gas exhaust hole 237c”) which is a through hole for the inert gas.

FIG. 3 is a diagram showing a detailed configuration example of the cartridge unit 230d, and is a side sectional view showing a CC cross section of FIG.

The cartridge unit 230d has a reaction gas supply unit 232d (hereinafter, referred to as “gas supply unit 232d”). The gas supply unit 232d is configured to supply the reaction gas onto the surface of the wafer 200 from the upper side of the substrate mounting table 210. The gas supply unit 232d has a reaction gas supply hole 233d (hereinafter, referred to as “gas supply hole 233d”) which is a through hole for the reaction gas. Further, a reaction gas supply port 222d (hereinafter referred to as “gas supply port 222d”) is provided at the lower end of the gas supply hole 233d. In the present specification, the distance between the gas supply port 222d provided in the gas supply unit 232d and the surface of the wafer 200 is defined as the distance D3.

Further, the cartridge unit 230d has a pair of reaction gas exhaust units 240d (hereinafter referred to as "gas exhaust unit 240d") on both sides of the gas supply unit 232d. The gas exhaust unit 240d is configured to exhaust the reaction gas on both sides of the gas supply unit 232d. The gas exhaust unit 240d has a reaction gas exhaust hole 238d (hereinafter, referred to as “gas exhaust hole 238d”) which is a through hole for the reaction gas.

Further, the cartridge unit 230d has a pair of third inert gas supply units 234d (hereinafter referred to as "gas supply unit 234d") on both sides of the pair of gas exhaust units 240d. The gas supply unit 234d is configured to supply the inert gas onto the surface of the wafer 200 from the upper side of the substrate mounting table 210 on both sides of the gas supply unit 232d. The gas supply unit 234d has a third inert gas supply hole 235d (hereinafter referred to as “gas supply hole 235d”), which is a through hole for the inert gas. Further, a third inert gas supply port 225d (hereinafter referred to as "gas supply port 225d") is provided at the lower end of the gas supply hole 235d. In the present specification, the distance between the gas supply port 225d provided in the gas supply unit 234d and the surface of the wafer 200 is defined as the distance P3.

Further, the cartridge unit 230d has a third inert gas exhaust unit 239d (hereinafter referred to as “gas exhaust unit 239d”) between the gas exhaust unit 240d and the gas supply unit 234d, respectively. The gas exhaust unit 239d is configured to exhaust the inert gas. The gas exhaust unit 239d has a third inert gas exhaust hole 237d (hereinafter referred to as “gas exhaust hole 237d”) which is a through hole for the inert gas.

The gas exhaust unit 239d is for exhausting the inert gas. The gas exhaust unit 239d is configured by providing the cartridge substrate 231d with a third inert gas exhaust hole 237d (hereinafter, referred to as “gas exhaust hole 237d”) which is a through hole for the inert gas.

As shown in FIGS. 2A and 2B, the distance D1 is larger than the distance D2. Further, as shown in FIG. 2A, the distance P1 is smaller than the distance D1. Further, as shown in FIG. 2B, the distance P2 is smaller than the distance D2. As shown in FIG. 3, the distance P3 is smaller than the distance D3.

(Gas supply system)
Subsequently, the configuration of the gas supply system connected to each cartridge unit 230b, 230c, 230d will be described.

As shown in FIG. 2A, an adsorption inhibitory gas supply pipe 241b (hereinafter referred to as “gas supply pipe 241b”) is connected to the gas supply hole 233b of the gas supply unit 232b. The gas supply pipe 241b has, in order from the upstream direction, an adsorption-inhibiting gas supply source 242b (hereinafter referred to as "gas supply source 242b"), a mass flow controller (MFC) 243b which is a flow rate controller (flow control unit), and an opening / closing. A valve 244b, which is a valve, is provided. The adsorption-inhibiting gas supply system is mainly composed of the gas supply pipe 241b, the MFC 243b, and the valve 244b. The gas supply source 242b may be included in the adsorption inhibitory gas supply system. With such a configuration, the adsorption inhibitory gas supply system supplies the adsorption inhibitory gas onto the surface of the wafer 200 from the upper side of the substrate mounting table 210 through the gas supply hole 233b. The adsorption-inhibiting gas is a gas that inhibits the adsorption of the raw material gas on the wafer 200. As the adsorption inhibitory gas, for example, carbon tetrafluoride (CF ₄ ) gas can be used.

Further, the downstream side of the first inert gas supply pipe 251b (hereinafter referred to as "gas supply pipe 251b") is branched and connected to each of the gas supply holes 235b of each gas supply unit 234b. The gas supply pipe 251b is provided with an inert gas supply source 252 (hereinafter referred to as “gas supply source 252”), an MFC 253, and a valve 254 in order from the upstream direction. The gas supply pipe 251b, MFC253, and valve 254 constitute the first inert gas supply system. The gas supply source 252 may be included in the first inert gas supply system. With such a configuration, the first inert gas supply system supplies the inert gas onto the surface of the wafer 200 from the upper side of the substrate mounting table 210 through the gas supply hole 235b.

As shown in FIG. 2B, a raw material gas supply pipe 241c (hereinafter referred to as “gas supply pipe 241c”) is connected to the gas supply hole 233c of the gas supply unit 232c. The gas supply pipe 241c is provided with a raw material gas supply source 242c (hereinafter referred to as “gas supply source 242c”), an MFC 243c, and a valve 244c in order from the upstream direction. The raw material gas supply system is mainly composed of the gas supply pipe 241c, the MFC 243c, and the valve 244c. The gas supply source 242c may be included in the raw material gas supply system. With such a configuration, the raw material gas supply system supplies the raw material gas onto the surface of the wafer 200 from the upper side of the substrate mounting table 210 through the gas supply hole 233c. As the raw material gas, for example, dichlorosilane (SiH ₂ Cl ₂ , abbreviation: DCS) gas can be used.

Further, the downstream side of the second inert gas supply pipe 251c (hereinafter referred to as "gas supply pipe 251c") is branched and connected to each of the gas supply holes 235c of each gas supply unit 234c. The gas supply pipe 251c is provided with a gas supply source 252, an MFC 253, and a valve 254 in order from the upstream direction. The gas supply pipe 251c, MFC253, and valve 254 constitute the second inert gas supply system. The gas supply source 252 may be included in the second inert gas supply system. With such a configuration, the second inert gas supply system supplies the inert gas onto the surface of the wafer 200 from the upper side of the substrate mounting table 210 through the gas supply hole 235c.

As shown in FIG. 3, a reaction gas supply pipe 241d (hereinafter referred to as “gas supply pipe 241d”) is connected to the gas supply hole 233d of the gas supply unit 232d. The gas supply pipe 241d is provided with a reaction gas supply source 242d (hereinafter referred to as “gas supply source 242d”), an MFC 243d, and a valve 244d in order from the upstream direction. The reaction gas supply system is mainly composed of the gas supply pipe 241d, the MFC 243d, and the valve 244d. The gas supply source 242d may be included in the reaction gas supply system. With such a configuration, the reaction gas supply system supplies the reaction gas onto the surface of the wafer 200 from the upper side of the substrate mounting table 210 through the gas supply hole 233d. As the reaction gas, for example, ammonia (NH ₃ ) gas can be used.

Further, the downstream side of the third inert gas supply pipe 251d (hereinafter referred to as "gas supply pipe 251d") is branched and connected to each of the gas supply holes 235d of each gas supply unit 234d. The gas supply pipe 251d is provided with a gas supply source 252, an MFC 253, and a valve 254 in order from the upstream direction. The gas supply pipe 251d, MFC253, and valve 254 constitute the third inert gas supply system. The gas supply source 252 may be included in the third inert gas supply system. With such a configuration, the third inert gas supply system supplies the inert gas onto the surface of the wafer 200 from the upper side of the substrate mounting table 210 through the gas supply hole 235d.

(Gas exhaust system)
Subsequently, the configuration of the gas exhaust system connected to each cartridge unit 230b, 230c, 230d will be described.

As shown in FIG. 2A, the upstream side of the adsorption inhibition gas exhaust pipe 261b (hereinafter referred to as “gas exhaust pipe 261b”) is branched and connected to each of the gas exhaust holes 238b of each gas exhaust unit 240b. Has been done. The gas exhaust pipe 261b is provided with a valve 262. Further, on the downstream side of the valve 262, a pressure controller 263 that controls the space below the gas supply unit 232b to a predetermined pressure is provided. A vacuum pump 264 is provided on the downstream side of the pressure controller 263. The adsorption-inhibiting gas exhaust system is mainly composed of the gas exhaust pipe 261b, the valve 262, and the pressure controller 263. The vacuum pump 264 may be included in the adsorption inhibitory gas exhaust system. With such a configuration, the adsorption inhibitory gas exhaust system exhausts the adsorption inhibitory gas supplied on the surface of the wafer 200 through the gas exhaust hole 238b to the upper side of the wafer 200.

Further, the upstream side of the first inert gas exhaust pipe 271b (hereinafter referred to as "gas exhaust pipe 271b") is branched and connected to each of the gas exhaust holes 237b of each gas exhaust unit 239b. The gas exhaust pipe 271b is provided with a valve 272. Further, on the downstream side of the valve 272, a pressure controller 273 that controls the space below the gas supply unit 234b to a predetermined pressure is provided. Further, a vacuum pump 274 is provided on the downstream side of the pressure controller 273. The first inert gas exhaust system is mainly composed of the gas exhaust pipe 271b, the valve 272, and the pressure controller 273. The vacuum pump 274 may be included in the first inert gas exhaust system. With such a configuration, the first inert gas exhaust system exhausts the inert gas supplied on the surface of the wafer 200 to the upper side of the wafer 200 through the gas exhaust hole 237b.

As shown in FIG. 2B, the upstream side of the raw material gas exhaust pipe 261c (hereinafter referred to as “gas exhaust pipe 261c”) is branched and connected to each of the gas exhaust holes 238c of each gas exhaust unit 240c. ing. The gas exhaust pipe 261c is provided with a valve 262. Further, on the downstream side of the valve 262, a pressure controller 263 that controls the space below the gas supply unit 232c to a predetermined pressure is provided. A vacuum pump 264 is provided on the downstream side of the pressure controller 263. The raw material gas exhaust system is mainly composed of the gas exhaust pipe 261c, the valve 262, and the pressure controller 263. The vacuum pump 274 may be included in the raw material gas exhaust system. With such a configuration, the raw material gas exhaust system exhausts the raw material gas supplied on the surface of the wafer 200 through the gas exhaust hole 238c to the upper side of the wafer 200.

Further, the upstream side of the second inert gas exhaust pipe 271c (hereinafter referred to as "gas exhaust pipe 271c") is branched and connected to each of the gas exhaust holes 237c of each gas exhaust unit 239c. The gas exhaust pipe 271c is provided with a valve 272. Further, on the downstream side of the valve 272, a pressure controller 273 that controls the space below the gas supply unit 234c to a predetermined pressure is provided. Further, a vacuum pump 274 is provided on the downstream side of the pressure controller 273. The second inert gas exhaust system is mainly composed of the gas exhaust pipe 271c, the valve 272, and the pressure controller 273. The vacuum pump 274 may be included in the second inert gas exhaust system. With such a configuration, the second inert gas exhaust system exhausts the inert gas supplied on the surface of the wafer 200 to the upper side of the wafer 200 through the gas exhaust hole 237c.

As shown in FIG. 3, the upstream side of the reaction gas exhaust pipe 261d (hereinafter referred to as “gas exhaust pipe 261d”) is branched and connected to each of the gas exhaust holes 238d of each gas exhaust unit 239d. The gas exhaust pipe 261d is provided with a valve 262. Further, on the downstream side of the valve 262, a pressure controller 263 that controls the space below the gas supply unit 232d to a predetermined pressure is provided. A vacuum pump 264 is provided on the downstream side of the pressure controller 263. The reaction gas exhaust system is mainly composed of the gas exhaust pipe 261d, the valve 262, and the pressure controller 263. The vacuum pump 274 may be included in the reaction gas exhaust system. With such a configuration, the reaction gas exhaust system exhausts the reaction gas supplied on the surface of the wafer 200 through the gas exhaust hole 238d to the upper side of the wafer 200.

Further, the upstream side of the third inert gas exhaust pipe 271d (hereinafter referred to as "gas exhaust pipe 271d") is branched and connected to each of the gas exhaust holes 237d of each gas exhaust unit 239d. The gas exhaust pipe 271d is provided with a valve 272. Further, on the downstream side of the valve 272, a pressure controller 273 that controls the space below the gas supply unit 234d to a predetermined pressure is provided. Further, a vacuum pump 274 is provided on the downstream side of the pressure controller 273. The gas exhaust pipe 271d, the valve 272, and the pressure controller 273 mainly constitute the third inert gas exhaust system. The vacuum pump 274 may be included in the third inert gas exhaust system. With such a configuration, the third inert gas exhaust system exhausts the inert gas supplied on the surface of the wafer 200 to the upper side of the wafer 200 through the gas exhaust hole 237d.

(controller)
Further, as shown in FIG. 1, the substrate processing apparatus 100 has a controller 280 that controls the operation of each part of the substrate processing apparatus 100. The controller 280 has at least a calculation unit 281 and a storage unit 282. The controller 280 is connected to each of the above-mentioned configurations, calls a program or a recipe from the storage unit 282 in response to an instruction from the host controller or the user, and controls the operation of each configuration according to the contents thereof. Specifically, the controller 280 includes a rotation mechanism, a heater, a high-frequency power supply, a matching unit, MFC243b, 243c, 243d, 253, a valve 244b, 244c, 244d, 254,262,272, a vacuum pump 264,274, and an elevating mechanism 500. Etc. are controlled.

The controller 280 may be configured as a dedicated computer or a general-purpose computer. For example, an external storage device (for example, a magnetic tape, a magnetic disk such as a flexible disk or a hard disk, an optical disk such as a CD or DVD, a magneto-optical disk such as MO, a semiconductor memory such as a USB memory or a memory card) in which the above-mentioned program is stored). The controller 280 according to this embodiment can be configured by preparing the 283 and installing the program on a general-purpose computer using the external storage device 283.

Further, the means for supplying the program to the computer is not limited to the case of supplying the program via the external storage device 283. For example, a communication means such as the Internet or a dedicated line may be used to supply the program without going through the external storage device 283. The storage unit 282 and the external storage device 283 are configured as a computer-readable recording medium. Hereinafter, these are collectively referred to simply as a recording medium. When the term recording medium is used in the present specification, it may include only the storage unit 282 alone, it may include only the external storage device 283 alone, or it may include both of them.

(2) Substrate Processing Step Next, as one step of the semiconductor manufacturing process, a substrate processing step of processing the wafer 200 by using the substrate processing apparatus 100 having the above-described configuration will be described.
Here, as a substrate processing step, a case where a thin film is formed on the wafer 200 will be taken as an example. _In particular, in this embodiment, CF4 gas is used as the adsorption inhibitory gas, DCS gas is used as the raw material gas, and _NH3 gas is used as the reaction gas. An example of forming a silicon nitride film (SiN film) on the wafer 200 by alternately supplying DCS gas and NH ₃ gas will be described.

In the following description, the operation of each part constituting the substrate processing apparatus 100 is controlled by the controller 280. In this embodiment, a silicon (Si) wafer is used as the wafer 200, and recesses such as trenches and holes are formed on the surface of the wafer 200.

(Substrate loading process: S101)
In the substrate processing apparatus 100, first, as a substrate loading step (S101), the substrate loading / unloading port of the processing container is opened, and a plurality of (for example, 5) wafers 200 are placed in the processing container using a wafer transfer machine (not shown). It is carried in and placed side by side on the substrate mounting table 210. Then, the wafer transfer machine is retracted to the outside of the processing container, the substrate loading / unloading port is closed, and the inside of the processing container is sealed.

(Pressure temperature adjustment step: S102)
After the substrate loading step (S101), a pressure temperature adjusting step (S102) is performed. In the pressure temperature adjusting step (S102), after the inside of the processing container is sealed in the substrate loading step (S101), the gas exhaust system connected to the processing container is operated to control the inside of the processing container to have a predetermined pressure. do. The predetermined pressure is a processing pressure at which a SiN film can be formed in the film forming step (S103) described later, for example, a processing pressure at which the raw material gas supplied to the wafer 200 does not self-decompose. Specifically, it is set to 10 to 9000 Pa. This processing pressure is also maintained in the film forming step (S103) described later.

Further, in the pressure temperature adjusting step (S102), electric power is supplied to the heater embedded in the substrate mounting table 210 to control the surface of the wafer 200 to reach a predetermined temperature. At this time, the temperature of the heater is adjusted by controlling the energization condition to the heater based on the temperature information detected by the temperature sensor (not shown). The predetermined temperature is a processing temperature at which a SiN film can be formed in the film forming step (S103) described later, for example, a processing temperature at which the raw material gas supplied to the wafer 200 does not self-decompose. Specifically, the temperature is set to room temperature or higher and 750 ° C. or lower, preferably room temperature or higher and 650 ° C. or lower. This processing temperature is also maintained in the film forming step (S103) described later.

(Film formation process: S103)
After the pressure temperature adjusting step (S102), a film forming step (S103) is performed. The processing operation of the substrate processing apparatus 100 performed in the film forming step (S103) is roughly classified into a relative position movement processing operation and a gas supply / exhaust processing operation. These operations are performed in parallel.

First, the relative position movement processing operation will be described.

In this operation, the board mounting table 210 is rotationally driven by a rotation mechanism (not shown) to start relative position movement between the board mounting table 210 and the cartridge portions 230b, 230c, 230d of the cartridge head 230. As a result, each wafer 200 mounted on the substrate mounting table 210 passes under each of the cartridge portions 230b, 230c, 230d in the cartridge head 230 in order.

Next, the gas supply / exhaust processing operation will be described.

In this operation, the adsorption inhibitory gas ₍ CF4 gas) is supplied from the gas supply port 222b of the cartridge unit 230b, the raw material gas (DCS gas) is supplied from the gas supply port 222c of the cartridge unit 230c, and the cartridge unit 230d Reaction gas ( _NH3 gas) is supplied from the gas supply port 222d. These supplied gases are exhausted above the wafer 200 through the gas exhaust holes 238b, 238c, 238d by opening the valve 262 while operating the vacuum pump 264. At this time, the inert gas (N ₂ gas) is supplied from each of the gas supply port 225b of the cartridge unit 230b, the gas supply port 225c of the cartridge unit 230c, and the gas supply port 225d of the cartridge unit 230d. These supplied inert gases are exhausted above the wafer 200 through the gas exhaust holes 237b, 237c, 237d by opening the valve 272 while operating the vacuum pump 274.

As described above, focusing on one wafer 200 by simultaneously performing the two operations of the relative position movement processing operation and the gas supply / exhaust processing operation, the step of supplying the adsorption inhibitory gas to the wafer 200 (step A). ), The step of supplying the raw material gas (step B), and the step of supplying the reaction gas (step C) are performed in this order with a step of purging the surface of the wafer 200 in those steps, a predetermined number of times. It will be.

In step A, CF ₄ gas is supplied to the surface of the wafer 200. When the CF ₄ gas is supplied, the Si exposed on the surface of the wafer 200 reacts with the CF ₄ gas, so that an F-terminated (SiF-terminated) adsorption inhibitory layer is formed on the surface of the wafer 200. As described above, since the distance D1 is larger than the distance D2, in step A, the CF ₄ gas is supplied at a relatively low pressure with respect to the wafer 200, for example, the DCS gas supplied in step B described later. It is supplied at a pressure lower than the pressure. Therefore, the CF ₄ gas does not reach the bottom side of the recess of the wafer 200 and is adsorbed only on the opening side of the recess of the wafer 200. As a result, the adsorption inhibitory layer is formed only on the opening side of the recess of the wafer 200 (see FIG. 4A). The passage time of the cartridge portion 230b with respect to the surface of the wafer 200, that is, the supply time of the CF ₄ gas is adjusted to be, for example, 0.1 to 20 seconds (preferably 0.1 to 9 seconds or less). ing.

The gas concentration of the adsorption-inhibiting gas is preferably at least lower than the concentration of the raw material gas. In the present disclosure, such a relationship of gas concentration is referred to as a low gas concentration. The gas concentration depends on at least one of the gas flow rate and pressure. That is, the gas concentration can be lowered by reducing the gas flow rate, reducing the pressure, or both. The adsorption inhibitory gas is supplied to the wafer 200 at a low gas concentration. As a result, the adsorption inhibitory gas is consumed on the opening side of the recess of the wafer 200, the adsorption inhibitory gas does not reach the bottom side of the recess, and the adsorption inhibitory layer is formed only on the opening side of the recess of the wafer 200. can do. Here, the consumption of the adsorption-inhibiting gas means that the molecules of the adsorption-inhibiting gas are adsorbed on the wafer 200, that is, on the surface of the recess on the opening side. The adsorption-inhibiting gas adsorbed on the bottom side of the recess has a low gas concentration such that the amount of the raw material gas described later is less than the amount adsorbed on the bottom side of the recess. The adsorbed molecule includes the adsorption-inhibiting gas molecule itself and the molecule in which the adsorption-inhibiting gas molecule is partially decomposed.

Although it is described here that the gas concentration is low, the gas concentration is not limited to this. In addition to the low gas concentration, an atmosphere similar to the low gas concentration may be created by changing the gas flow velocity. By lowering the flow velocity of the gas, the gas is consumed on the opening side before reaching the bottom side of the recess.

In step B, DCS gas is supplied onto the surface of the wafer 200. The supplied DCS gas reaches the surface of the wafer 200 at the wafer processing position, whereby a Si-containing layer containing chlorine (Cl) is formed on the surface of the wafer 200 on which the adsorption inhibition layer is not formed. (See FIG. 4 (b)). As described above, since the distance D2 is smaller than the distance D1, in step B, the DCS gas is supplied at a relatively high pressure with respect to the wafer 200, for example, the CF ₄ gas supplied in step A described above. It is supplied at a pressure higher than the pressure of. Therefore, the DCS gas reaches from the opening side to the bottom side of the recess of the wafer 200. However, since the adsorption inhibitory layer is formed on the opening side of the recess of the wafer 200, the DCS gas is adsorbed only on the bottom side of the recess. As a result, the Si-containing layer is formed only on the bottom side of the recess of the wafer 200 (see FIG. 4B). As described above, in step B, the formation of the Si-containing layer on the surface of the wafer 200 having the adsorption inhibitory layer (for example, the opening of the recess) is suppressed, and the surface of the wafer 200 having no adsorption inhibitory layer (inside the recess). It is possible to selectively form a Si-containing layer on the bottom). Such selective formation of the Si-containing layer is possible because the F-terminated adsorption inhibitory layer existing on the opening side of the recess of the wafer 200 contains Si in the opening side of the recess of the wafer 200. This is because it acts as a factor that inhibits layer formation (adsorption of Si), that is, as an inhibitor. The passage time of the cartridge unit 230c with respect to the surface of the wafer 200, that is, the DCS gas supply time is adjusted to be, for example, 0.1 to 20 seconds (preferably 0.1 to 9 seconds or less). There is.

The gas concentration of the raw material gas is preferably higher than the concentration of the adsorption-inhibiting gas. In the present disclosure, such a relationship of gas concentration is referred to as a high gas concentration. The gas concentration depends on at least one of the gas flow rate and pressure. That is, the gas concentration can be increased by increasing the gas flow rate, increasing the pressure, or both. The raw material gas is supplied to the wafer 200 at a high gas concentration. As a result, even if a part of the raw material gas is consumed on the opening side of the concave portion of the wafer 200, it is possible to generate raw material gas molecules that reach the bottom side of the concave portion. As described above, since the adsorption inhibitory gas is adsorbed on the opening side of the recess, the amount of raw material gas consumed on the opening side of the recess can be reduced, and the bottom side of the recess can be reduced. It is possible to increase the amount of raw material gas that reaches.

Although it is described here that the gas concentration is high, the gas concentration is not limited to this. In addition to the high gas concentration, an atmosphere similar to the high gas concentration may be created by changing the flow velocity of the gas. By increasing the flow velocity of the gas, it becomes possible to allow the gas to reach the bottom side of the recess before the gas is consumed on the opening side of the recess.

In step C, _NH3 gas is supplied to the surface of the wafer 200. The supplied NH ₃ gas reaches the surface of the wafer 200 at the wafer processing position, whereby at least a part of the Si-containing layer formed on the surface of the wafer 200 is nitrided (modified). By modifying the Si-containing layer, a layer containing Si and N, that is, a SiN layer is formed on the surface of the wafer 200. As described above, since the Si-containing layer is formed only on the bottom side of the recess of the wafer 200, the SiN layer is also formed only on the bottom side of the recess of the wafer 200 (FIG. 4C). reference). The passage time of the cartridge unit 230d with respect to the surface of the wafer 200, that is, the supply time of _NH3 gas is adjusted to be, for example, 0.1 to 20 seconds (preferably 0.1 to 9 seconds). ing.

When the above-mentioned cycle is performed a predetermined number of times by continuing the relative position movement processing operation and the gas supply / exhaust processing operation for a predetermined time, the SiN having the desired film thickness is formed by laminating the above-mentioned SiN layer on the wafer 200. A film is formed. At this time, the inside of the recess formed on the surface of the wafer 200 is gradually embedded by the SiN film from the bottom toward the opening (hereinafter, in the present specification, such an embedding process is referred to as bottom-up film formation). There is.). As the number of cycles performed increases and the embedding of the SiN film in the recess formed _on the surface of the wafer 200 progresses, the CF4 gas is supplied into the recess, and the productivity of the embedding process decreases or the embedding process progresses. It may be difficult to proceed with the process. In such cases, it is preferable to reduce the supply flow rate of CF ₄ gas or stop the supply of CF ₄ gas depending on the progress of the embedding process. When the supply of CF ₄ gas is stopped, it is preferable to supply the inert gas (N ₂ gas) from the gas supply unit 232b.

When the processing of embedding the SiN film in the recess is completed, the gas supply / exhaust processing operation is terminated. After that, the rotation mechanism stops the relative position movement between the substrate mounting table 210 and the cartridge portions 230b, 230c, 230d in the cartridge head 230. As a result, the relative position movement processing operation ends.

(Substrate carry-out process: S104)
After the film forming step (S103) is completed, the substrate processing apparatus 100 performs the substrate carrying-out step (S104). In the substrate carry-out step (S104), the processed wafer 200 is carried out of the processing container in the reverse procedure of the substrate carry-in step (S101) described above.

(3) Effects of this aspect According to this aspect, one or more of the following effects are exhibited.

(A) In this embodiment, as shown in FIGS. 2 (a) and 2 (b), the distance D1 is larger than the distance D2. Therefore, in step A, the adsorption inhibitory gas (CF ₄ gas) is supplied to the wafer 200 at a relatively low pressure. As a result, the CF ₄ gas does not reach the bottom side of the recess of the wafer 200 and is adsorbed only on the opening side of the recess of the wafer 200. As a result, the adsorption inhibitory layer is formed only on the opening side of the recess of the wafer 200 (see FIG. 4A).

As described above, the distance D2 is smaller than the distance D1. Therefore, in step B, the raw material gas (DCS gas) is supplied to the wafer 200 at a relatively high pressure. As a result, the DCS gas reaches from the opening side to the bottom side of the recess of the wafer 200. However, since the adsorption inhibitory layer is formed on the opening side of the recess of the wafer 200, the DCS gas is adsorbed only on the bottom side of the recess. As a result, the Si-containing layer is formed only on the bottom side of the recess of the wafer 200 (see FIG. 4B). Further, in step C, since the reaction gas ( _NH3 gas) nitrides the Si-containing layer, the SiN layer is formed only on the bottom side of the recess of the wafer 200 (see FIG. 4C).

As described above, in the above cycle, the SiN film can be gradually embedded from the bottom of the concave portion of the wafer 200 toward the opening to perform bottom-up film formation. As a result, the embedding characteristics of the SiN film in the recess formed on the surface of the wafer 200 can be improved.

(B) In this aspect, as shown in FIG. 2A, the distance P1 is smaller than the distance D1. Therefore, the inert gas (N ₂ gas) is supplied to the wafer 200 at a higher pressure than the CF ₄ gas. As a result, the pressure in the space below the gas supply unit 234b becomes higher than the pressure in the space below the gas supply unit 232b. As a result, the air sealing effect of the N ₂ gas is surely exhibited, and the CF ₄ gas can be surely suppressed from leaking to the outside from the space below the cartridge portion 230b.

(C) In this aspect, as shown in FIG. 2B, the distance P2 is smaller than the distance D2. Therefore, the inert gas (N ₂ gas) is supplied to the wafer 200 at a higher pressure than the DCS gas. As a result, the pressure in the space below the gas supply unit 234c in the cartridge unit 230c becomes higher than the pressure in the space below the gas supply unit 232c. As a result, the air sealing effect of the N ₂ gas is surely exhibited, and the DCS gas can be surely suppressed from leaking to the outside from the space below the cartridge portion 230c.

(D) In this aspect, as shown in FIG. 3, the distance P3 is smaller than the distance D3. Therefore, the inert gas (N ₂ gas) is supplied to the wafer 200 at a higher pressure than the NH ₃ gas. As a result, the pressure in the space below the gas supply unit 234c in the cartridge unit 230d becomes higher than the pressure in the space below the gas supply unit 232d. As a result, the air-sealing effect of the N ₂ gas is surely exhibited, and the NH ₃ gas can be surely suppressed from leaking to the outside from the space below the cartridge portion 230d.

<Second aspect of the present disclosure>
Hereinafter, the second aspect of the present disclosure will be described with reference to FIG.

As described above, as the number of times the above-mentioned cycle is performed increases and the embedding of the SiN film in the recess formed on the surface of the wafer 200 progresses, the embedding is carried out by supplying the adsorption inhibitory gas (CF ₄ gas) into the recess. The productivity of the processing may decrease, or the progress of the embedding processing may become difficult. In this embodiment, the magnitude of the distance D1 is changed instead of reducing the supply flow rate of the CF ₄ gas or stopping the supply of the CF ₄ gas according to the progress of the embedding process. To solve the problem of. Hereinafter, the details of this embodiment will be described.

The difference between the substrate processing apparatus 100 of this embodiment and the first aspect described above is that, as shown in FIG. 5, the cartridge unit 230b is provided with an elevating mechanism 500 as an elevating unit for elevating and lowering the gas supply unit 232b. Hereinafter, the procedure of the film forming process using the elevating mechanism 500 will be described.

In order to embed the SiN film in the recess of the wafer 200, the raw material gas (DCS gas) is adsorbed on the bottom of the recess of the wafer 200 at the initial stage of the cycle described above. Therefore, in this embodiment, in order to adsorb the CF ₄ gas near the bottom of the recess of the wafer 200 in the initial stage of the cycle, the CF ₄ gas is supplied to the wafer 200 at a relatively high pressure. Specifically, in the initial stage of the cycle described above, the elevating mechanism 500 is operated to move the gas supply unit 232b to a lower position, and the distance D1 is reduced. However, the lower limit of the distance D1 is a distance at which the CF ₄ gas does not adsorb to the bottom of the recess of the wafer 200.

On the other hand, if the distance D1 is kept small even if the embedding process is advanced in the middle stage or the final stage of the above-mentioned cycle, CF4 gas is formed _on the surface of the SiN film formed to be embedded in the recess. Will be adsorbed, and the embedding process will not proceed after that. Therefore, in this embodiment, _CF4 gas is gradually adsorbed to a shallow position in the recess of the wafer 200 according to the progress of the embedding process of the SiN film in the recess of the wafer 200 in the middle stage or the final stage of the cycle. Specifically, in the middle stage and the final stage of the cycle, the elevating mechanism 500 is operated, the gas supply unit 232b is gradually moved to a higher position according to the progress of the embedding process of the SiN film, and the distance D1 is increased. ..

In this way, by adjusting the size of the distance D1 according to the progress of the embedding process of the SiN film in the recess of the wafer 200, CF4 gas is _placed near the bottom of the recess of the wafer 200 at the initial stage of the cycle. It is adsorbed, and in the middle stage and the final stage of the cycle, the _CF4 gas is gradually adsorbed to the shallow position of the recess of the wafer 200. As a result, the embedding process can proceed without reducing the supply flow rate of the adsorption-inhibiting gas or stopping the supply of the adsorption-inhibiting gas.

Further, as another effect of operating the elevating mechanism 500 to adjust the size of the distance D1, the distance D1 is set for each wafer 200 according to any one of the conditions of the depth of the recess of the wafer 200 and the width of the opening. The size can be determined. According to this aspect, by setting the optimum distance D1 in advance according to the depth of the recess and the width of the opening of the wafer 200, the supply flow rate of the adsorption-inhibiting gas can be reduced or the supply of the adsorption-inhibiting gas can be stopped. The embedding process can proceed without any trouble.

In this embodiment, the supply flow rate of CF ₄ gas may be reduced or the supply of CF ₄ gas may be stopped depending on the progress of the embedding process. When the supply of CF ₄ gas is stopped, it is preferable to supply the inert gas (N ₂ gas) from the gas supply unit 232b. When N ₂ gas is supplied from the gas supply unit 232b, it is preferable to reduce the distance D1.

<Other aspects of the present disclosure>
Although the first and second aspects of the present disclosure have been specifically described above, the present disclosure is not limited to the above-mentioned aspects, and various changes can be made without departing from the gist thereof.

In the above aspect, an example in which the adsorption inhibitory gas ₍ CF4 gas) is supplied the same number of times in performing the above-mentioned cycle a predetermined number of times has been described, but the present disclosure is not limited to this. For example, CF ₄ gas may be supplied once for each of the above cycles. Also in this case, the same effect as the above-described aspect can be obtained.

Further, in the above aspect, the case where the substrate mounting table 210 is rotationally driven by the rotation mechanism has been described as an example, but the present disclosure is not limited to this. For example, if the relative positions of the cartridge portions 230b, 230c, 230d on the substrate mounting table 210 and the cartridge head 230 are moved, the cartridge head 230 may be rotationally driven by the rotation mechanism. Also in this case, the same effect as the above-described aspect can be obtained. When the cartridge head 230 is rotationally driven, the moment of inertia acting on the wafer 200 can be suppressed as compared with the above-described embodiment in which the substrate mounting table 210 is rotationally driven, so that the rotational speed can be increased. Is preferable. However, the above-described embodiment in which the substrate mounting table 210 is rotationally driven is preferable in that the configuration of the gas pipe or the like can be simplified.

Further, in the above aspect, the substrate mounting table 210, which is rotationally driven with the center position of the substrate mounting table 210 as the rotation axis, has been described as an example, but the present disclosure is not limited to this. For example, as shown in FIG. 6, a substrate mounting table 210 in which each wafer 200 is arranged in a row may be used. That is, a substrate mounting table 210 that moves horizontally in one direction or reciprocates may be used so that the wafer 200 moves linearly under each of the cartridge portions 230b, 230c, and 230d. Also in this case, the same effect as the above-described aspect can be obtained.

Further, in the above aspect, the cartridge unit 230b having the gas supply unit 234b has been described as an example, but the present disclosure is not limited thereto. That is, the cartridge unit 230b that does not have the gas supply unit 234b may be used. Similarly, for the cartridge unit 230c, the cartridge unit 230c that does not have the gas supply unit 234c may be used. Similarly, for the cartridge unit 230d, the cartridge unit 230d that does not have the gas supply unit 234d may be used. In these cases as well, the same effects as those described above can be obtained.

A matching unit (not shown) and a high frequency power supply may be connected to the cartridge portion 230d of the cartridge portions 230b, 230c, 230d. In that case, plasma is generated in the space below the cartridge unit 230d by adjusting the impedance with a high-frequency power supply and a matching unit. Also in this case, the same effect as the above-described aspect can be obtained.

Further, in the above aspect, an example in which _CF4 gas is used as the adsorption inhibitory gas has been described, but the present disclosure is not limited to this. For example, a gas containing a halogen, a gas containing a halogen radical, a gas containing a plurality of carbon elements, or the like can be used. Specifically, there are the above-mentioned CF ₄ , chlorine trifluoride (ClF ₃ ) gas, and Cl ₂ gas activated by plasma or the like. In these cases as well, the same effects as those described above can be obtained.

Further, in the above-described embodiment, the inorganic gas is used as the adsorption inhibitory gas, but an organic gas may be used. As the organic gas, there is a material that forms a self-assembled monolayer (SAM). Such materials include carboxylic acid materials, phosphonic acid materials, thiol materials, silylamine materials, chlorosilane materials, and oxysilane materials. In these cases as well, the same effects as those described above can be obtained.

Further, in the above aspect, the SiN film has been described as the film formed on the wafer 200, but the present disclosure is not limited to this. For example, a film containing at least one or more elements such as Al, hafnium (Hf), zirconium (Zr), titanium (Ti), molybdenum (Mo), and ruthenium (Ru) may be formed. Further, it can be applied to a processing apparatus for forming an oxide film, a nitride film, an acid nitride film, a carbonized film, a carbonized film, a carbonated film, etc. containing at least one of these elements. In these cases as well, the same effects as those described above can be obtained.

<Preferable aspect of the present disclosure>
Hereinafter, preferred embodiments of the present disclosure will be described.

[Appendix 1]
According to one aspect of the present disclosure
The board mount on which the board is mounted and the board mount
An adsorption-inhibiting gas supply unit that supplies an adsorption-inhibiting gas from the upper side of the substrate mounting table onto the surface of the substrate, and an adsorption-inhibiting gas supply unit.
A raw material gas supply unit that supplies raw material gas from the upper side of the substrate mounting table onto the surface of the substrate, and a raw material gas supply unit.
Equipped with
The substrate processing apparatus in which the distance D1 between the gas supply port provided in the adsorption inhibitory gas supply unit and the substrate is larger than the distance D2 between the gas supply port provided in the raw material gas supply unit and the substrate. Is provided.

[Appendix 2]
Preferably,
A first inert gas supply unit that supplies the inert gas on the surface of the substrate from the upper side of the substrate mounting table is provided on both sides of the adsorption inhibitory gas supply unit.
The substrate processing apparatus according to Appendix 1 is provided, wherein the distance P1 between the gas supply port provided in the first inert gas supply unit and the substrate is smaller than that of D1.

[Appendix 3]
Preferably,
A second inert gas supply unit that supplies the inert gas on the surface of the substrate from the upper side of the substrate mounting table is provided on both sides of the raw material gas supply unit.
The substrate processing apparatus according to Appendix 1 or 2, wherein the distance P2 between the gas supply port provided in the second inert gas supply unit and the substrate is smaller than that of D2 is provided.

[Appendix 4]
Preferably,
The substrate processing apparatus according to any one of Supplementary note 1 to 3, further comprising an elevating unit that elevates and elevates the adsorption inhibitory gas supply unit to change the distance D1.

[Appendix 5]
Preferably,
The adsorption-inhibiting gas supply unit and the raw material are subjected to a film forming process in which a cycle including supply of an adsorption-inhibiting gas to the substrate having recesses formed on the surface thereof and supply of a raw material gas to the substrate is performed a predetermined number of times. The substrate processing apparatus according to Appendix 4, further comprising a control unit that controls the gas supply unit and further controls the elevating unit so as to change (increase) the distance D1 during the film forming process. Will be done.

[Appendix 6]
Preferably,
Further having a control unit for controlling the elevating part so as to determine the size of the distance D1 according to any one of the conditions of the depth of the recess formed on the surface of the substrate and the opening width. The substrate processing apparatus according to Appendix 4 is provided.

[Appendix 7]
Preferably,
When the cycle including the supply of the adsorption-inhibiting gas to the substrate having the recesses formed on the surface and the supply of the raw material gas to the substrate is performed a predetermined number of times and the embedding in the recesses proceeds to a predetermined condition, the adsorption occurs. 13. A substrate processing apparatus is provided.

[Appendix 8]
Preferably,
The control unit controls the adsorption-inhibiting gas supply unit so that the inert gas is supplied from the adsorption-inhibiting gas supply unit when the supply of the adsorption-inhibiting gas is stopped and the supply of the raw material gas is continued. The substrate processing apparatus according to Appendix 7 is provided.

[Appendix 9]
According to another aspect of the present disclosure.
The process of mounting the board on the board mounting table and
A step of supplying adsorption-inhibiting gas onto the surface of the substrate from an adsorption-inhibiting gas supply unit provided on the upper side of the substrate mount, and a raw material gas supply unit provided on the upper side of the substrate-mounting table to supply the substrate. It has a step of supplying a raw material gas on the surface of the surface and a step of forming a film including a step of supplying the raw material gas.
In the film forming step, the distance D1 between the gas supply port provided in the adsorption inhibitory gas supply unit and the substrate is larger than the distance D2 between the gas supply port provided in the raw material gas supply unit and the substrate. Provided is a method of manufacturing a semiconductor device to be carried out in a state of being in a state of being.

[Appendix 10]
According to yet yet another aspect of the present disclosure.
The procedure for mounting the board on the board mounting table of the board processing device, and
The procedure of supplying the adsorption inhibitory gas onto the surface of the substrate from the adsorption inhibitory gas supply unit provided on the upper side of the substrate mount, and the raw material gas supply unit provided on the upper side of the substrate mount are the substrate. The raw material gas supply unit is provided with a step of supplying the raw material gas on the surface of the surface, and a film forming procedure including the procedure, and a distance D1 between the gas supply port provided in the adsorption inhibitory gas supply unit and the substrate is provided in the raw material gas supply unit. A program is provided by a computer to cause the substrate processing apparatus to execute in a state where the distance D2 between the gas supply port and the substrate is larger than the distance D2.

200 ... Wafer, 232b ... Adsorption inhibitory gas supply unit, 232c ... Raw material gas supply unit 222b ... Adsorption inhibitory gas supply port 222b ... Adsorption inhibitory gas supply port 222c ... Raw material gas supply port

Claims (16)

The board mount on which the board is mounted and the board mount
An adsorption-inhibiting gas supply unit that supplies an adsorption-inhibiting gas from the upper side of the substrate mounting table onto the surface of the substrate, and an adsorption-inhibiting gas supply unit.
A raw material gas supply unit that supplies raw material gas from the upper side of the substrate mounting table onto the surface of the substrate, and a raw material gas supply unit .
A first inert gas supply unit that supplies the inert gas onto the surface of the substrate from the upper side of the substrate mounting table on both sides of the adsorption inhibitory gas supply unit .
Equipped with
The distance D1 between the gas supply port provided in the adsorption-inhibiting gas supply unit and the substrate is larger than the distance D2 between the gas supply port provided in the raw material gas supply unit and the substrate, and the first A substrate processing apparatus in which the distance P1 between the gas supply port provided in the inert gas supply unit and the substrate is smaller than that of D1 . The board mount on which the board is mounted and the board mount
An adsorption-inhibiting gas supply unit that supplies an adsorption-inhibiting gas from the upper side of the substrate mounting table onto the surface of the substrate, and an adsorption-inhibiting gas supply unit.
A raw material gas supply unit that supplies raw material gas from the upper side of the substrate mounting table onto the surface of the substrate, and a raw material gas supply unit.
A second inert gas supply unit that supplies the inert gas onto the surface of the substrate from the upper side of the substrate mounting table on both sides of the raw material gas supply unit.
Equipped with
The distance D1 between the gas supply port provided in the adsorption-inhibiting gas supply unit and the substrate is larger than the distance D2 between the gas supply port provided in the raw material gas supply unit and the substrate, and the second A substrate processing apparatus in which the distance P2 between the gas supply port provided in the inert gas supply unit and the substrate is smaller than that of D2. The board mount on which the board is mounted and the board mount
An adsorption-inhibiting gas supply unit that supplies an adsorption-inhibiting gas from the upper side of the substrate mounting table onto the surface of the substrate, and an adsorption-inhibiting gas supply unit.
A raw material gas supply unit that supplies raw material gas from the upper side of the substrate mounting table onto the surface of the substrate, and a raw material gas supply unit.
An elevating part that raises and lowers the adsorption inhibitory gas supply part ,
Equipped with
The adsorption inhibition is such that the distance D1 between the gas supply port provided in the adsorption inhibition gas supply section and the substrate is larger than the distance D2 between the gas supply port provided in the raw material gas supply section and the substrate. A board processing device that raises and lowers the gas supply unit. The adsorption-inhibiting gas supply unit and the adsorption-inhibiting gas supply unit so as to perform a film-forming process in which a cycle including the supply of the adsorption-inhibiting gas to the substrate having recesses formed on the surface and the supply of the raw material gas to the substrate is performed a predetermined number of times. The substrate processing apparatus according to claim 3 , further comprising a control unit capable of controlling the raw material gas supply unit and controlling the elevating unit so as to change the distance D1 during the film forming process. The adsorption-inhibiting gas supply unit and the adsorption-inhibiting gas supply unit so as to perform a film-forming process in which a cycle including the supply of the adsorption-inhibiting gas to the substrate having recesses formed on the surface and the supply of the raw material gas to the substrate is performed a predetermined number of times. The substrate processing apparatus according to claim 3 , further comprising a control unit capable of controlling the raw material gas supply unit and further controlling the elevating unit so as to increase the distance D1 during the film forming process. Further, a control unit capable of controlling the elevating part so as to determine the size of the distance D1 according to one of the conditions of the depth of the recess formed on the surface of the substrate and the opening width. The substrate processing apparatus according to claim 3 . The board mount on which the board is mounted and the board mount
An adsorption-inhibiting gas supply unit that supplies an adsorption-inhibiting gas from the upper side of the substrate mounting table onto the surface of the substrate, and an adsorption-inhibiting gas supply unit.
A raw material gas supply unit that supplies raw material gas from the upper side of the substrate mounting table onto the surface of the substrate, and a raw material gas supply unit.
Equipped with
The distance D1 between the gas supply port provided in the adsorption inhibitory gas supply unit and the substrate is larger than the distance D2 between the gas supply port provided in the raw material gas supply unit and the substrate.
When the cycle including the supply of the adsorption-inhibiting gas to the substrate having the recesses formed on the surface and the supply of the raw material gas to the substrate is performed a predetermined number of times, the embedding in the recesses proceeds to a predetermined condition. A substrate processing apparatus having the adsorption inhibitory gas supply unit and the control unit that controls the raw material gas supply unit so as to stop the supply of the adsorption inhibitory gas and continue the supply of the raw material gas. The control unit controls the adsorption-inhibiting gas supply unit so that the inert gas is supplied from the adsorption-inhibiting gas supply unit when the supply of the adsorption-inhibiting gas is stopped and the supply of the raw material gas is continued. The substrate processing apparatus according to claim 7 . The process of mounting the board on the board mounting table and
A step of supplying an adsorption inhibitory gas onto the surface of the substrate from an adsorption inhibitory gas supply unit provided on the upper side of the substrate mount, and a raw material gas supply unit provided on the upper side of the substrate mount, the substrate. The step of supplying the raw material gas on the surface of the substrate and the first inert gas supply unit provided on the upper side of the substrate mounting table on both sides of the adsorption inhibitory gas supply unit are inert to the surface of the substrate. It has a step of supplying gas and a step of forming a film including.
In the film forming step, the distance D1 between the gas supply port provided in the adsorption inhibitory gas supply unit and the substrate is larger than the distance D2 between the gas supply port provided in the raw material gas supply unit and the substrate. A method for manufacturing a semiconductor device, which is carried out in a state where the distance P1 between the gas supply port provided in the first inert gas supply unit and the substrate is smaller than D1 . The process of mounting the board on the board mounting table and
The step of supplying the adsorption-inhibiting gas onto the surface of the substrate from the adsorption-inhibiting gas supply unit provided on the upper side of the substrate mount, and the raw material gas supply unit provided on the upper side of the substrate mount, the substrate. The step of supplying the raw material gas on the surface of the substrate and the inert gas on the surface of the substrate from the second inert gas supply unit provided on the upper side of the substrate mounting table on both sides of the raw material gas supply unit. And the process of supplying
With a film forming process, including
In the film forming step, the distance D1 between the gas supply port provided in the adsorption inhibitory gas supply unit and the substrate is larger than the distance D2 between the gas supply port provided in the raw material gas supply unit and the substrate. A method for manufacturing a semiconductor device, which is carried out in a state where the distance P2 between the gas supply port provided in the second inert gas supply unit and the substrate is smaller than D2. The process of mounting the board on the board mounting table and
A step of supplying adsorption-inhibiting gas onto the surface of the substrate from an adsorption-inhibiting gas supply unit provided on the upper side of the substrate mount, and a raw material gas supply unit provided on the upper side of the substrate-mounting table to supply the substrate. It has a step of supplying a raw material gas on the surface of the surface and a step of forming a film including a step of supplying the raw material gas.
In the film forming step, the distance D1 between the gas supply port provided in the adsorption inhibitory gas supply unit and the substrate is larger than the distance D2 between the gas supply port provided in the raw material gas supply unit and the substrate. A method for manufacturing a semiconductor device, which is carried out by changing the distance D1 by raising and lowering the adsorption inhibitory gas supply unit so as to be in a state of being. The process of mounting the board on the board mounting table and
A step of supplying adsorption-inhibiting gas onto the surface of the substrate from an adsorption-inhibiting gas supply unit provided on the upper side of the substrate mount, and a raw material gas supply unit provided on the upper side of the substrate-mounting table to supply the substrate. It has a step of supplying a raw material gas on the surface of the surface and a step of forming a film including a step of supplying the raw material gas.
In the film forming step, the distance D1 between the gas supply port provided in the adsorption inhibitory gas supply unit and the substrate is larger than the distance D2 between the gas supply port provided in the raw material gas supply unit and the substrate. When the embedding in the recess formed on the surface of the substrate progresses to a predetermined condition, the supply of the adsorption inhibitory gas is stopped and the supply of the raw material gas is continued. Manufacturing method of semiconductor device. The procedure for mounting the board on the board mounting table of the board processing device, and
The procedure of supplying the adsorption-inhibiting gas onto the surface of the substrate from the adsorption-inhibiting gas supply section provided on the upper side of the substrate mount, and the raw material gas supply section provided on the upper side of the substrate mount stand the substrate. The procedure for supplying the raw material gas on the surface of the substrate and the first inert gas supply unit provided on the upper side of the substrate mounting table on both sides of the adsorption inhibitory gas supply unit are inert to the surface of the substrate. The procedure for supplying gas and the film forming procedure including the step are such that the distance D1 between the gas supply port provided in the adsorption inhibitory gas supply section and the substrate is the gas supply port provided in the raw material gas supply section and the said. By a computer in a state where the distance to the substrate is larger than D2 and the distance P1 between the gas supply port provided in the first inert gas supply unit and the substrate is smaller than D1. A program to be executed by the substrate processing apparatus. The procedure for mounting the board on the board mounting table of the board processing device, and
The procedure of supplying the adsorption-inhibiting gas onto the surface of the substrate from the adsorption-inhibiting gas supply section provided on the upper side of the substrate mount, and the raw material gas supply section provided on the upper side of the substrate mount stand the substrate. The procedure for supplying the raw material gas on the surface of the substrate and the inert gas on the surface of the substrate from the second inert gas supply unit provided on the upper side of the substrate mounting table on both sides of the raw material gas supply unit. The distance D1 between the gas supply port provided in the adsorption inhibitory gas supply unit and the substrate is the gas supply port provided in the raw material gas supply unit and the substrate. The gas supply port provided in the second inert gas supply unit and the distance P2 between the substrate and the gas supply port are larger than the distance D2, and the distance P2 is smaller than the D2. A program to be executed by the board processing equipment. The procedure for mounting the board on the board mounting table of the board processing device, and
The procedure of supplying the adsorption-inhibiting gas onto the surface of the substrate from the adsorption-inhibiting gas supply unit provided on the upper side of the substrate mount, and the raw material gas supply unit provided on the upper side of the substrate mount are the substrate. A procedure for supplying the raw material gas on the surface of the surface and a film forming procedure including the procedure for supplying the raw material gas are provided. A program that raises and lowers the adsorption-inhibiting gas supply unit so that the distance D2 between the gas supply port and the substrate is larger than the distance D2 to change the distance D1 and causes the substrate processing apparatus to carry out the program. The procedure for mounting the board on the board mounting table of the board processing device, and
The procedure of supplying the adsorption-inhibiting gas onto the surface of the substrate from the adsorption-inhibiting gas supply unit provided on the upper side of the substrate mount, and the raw material gas supply unit provided on the upper side of the substrate mount are the substrate. A procedure for supplying the raw material gas on the surface of the surface and a film forming procedure including the procedure for supplying the raw material gas are provided. When the distance D2 between the gas supply port and the substrate is set to be larger than the distance D2 and the embedding in the recess formed on the surface of the substrate progresses to a predetermined condition, the supply of the adsorption inhibitory gas is stopped and the above-mentioned A program for causing the substrate processing apparatus to carry out a procedure for continuing the supply of raw material gas and a computer.

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