JP7009296B2 - Active vibration isolation system - Google Patents

Description

The technique disclosed herein relates to an active vibration isolation system in which a plurality of active vibration isolation devices are stacked one above the other.

An active type vibration isolator (so-called active vibration isolator) is disclosed in, for example, Patent Document 1. Specifically, the active vibration isolator (active precision vibration isolator) disclosed in Patent Document 1 is an elastic body that supports a supported body (surface plate) from below with respect to the foundation (in the same document, "gas spring". (Exemplified), and an actuator that raises and lowers the supported body via the elastic body and applies a control force to the supported body via the elastic body (exemplified by "servo valve" in the same document). ,have. This active vibration isolator can control the actuator so as to suppress the vibration generated in the supported body based on the control signal output from the controller.

Further, Patent Document 1 also discloses that a plurality of active vibration isolation devices are used in combination in order to obtain a higher vibration isolation performance. Specifically, in Patent Document 1, as an example of an active vibration isolation system in which a plurality of active vibration isolation devices are stacked one above the other, an active vibration isolation device (upper stage actuator) on the upper stage side and an active vibration isolation device on the lower stage side are described. It is disclosed that the device (lower stage actuator) is arranged in series. In this case, the active vibration isolator on the upper stage side is mounted on the active vibration isolation device on the lower stage side.

Japanese Patent No. 5064316

In a general active vibration isolator, the supported body is placed in a predetermined position (hereinafter, also referred to as “vibration suppression control”) in advance of starting the control for suppressing the vibration generated in the supported body (hereinafter, also referred to as “vibration suppression control”). For example, it is necessary to move up and down to the target position of the supported body in the displacement feedback control).

Here, in the case of an active vibration isolation system as described in Patent Document 1, in order to promptly start the vibration suppression control described above, the supported body is raised and lowered at the same time in both the upper and lower active vibration isolation devices. It is conceivable that the configuration will be such.

However, when such a configuration is adopted, vibration suppression control cannot be executed during ascending / descending, so that the upper and lower active vibration isolators may become unstable and each may oscillate. As a result, the transition to a state in which vibration suppression control can be executed (hereinafter, also referred to as “active state”) may be delayed as a result.

Such a problem is not limited to the vibration isolator that combines an air spring and a servo valve as in Patent Document 1, but is also a common problem to, for example, an active vibration isolator that combines a coil spring and a linear motor. ..

The technology disclosed here was made in view of this point, and its purpose is to start up stably and promptly in an active vibration isolation system in which a plurality of active vibration isolation devices are stacked one above the other. Is to realize.

The technique disclosed herein is an active vibration isolation system including a plurality of active vibration isolation devices and a controller for controlling each of the plurality of active vibration isolation devices, and the plurality of active vibration isolation devices are stacked one above the other. Related. The plurality of active vibration isolators move the supported body up and down via the elastic body and the elastic body, respectively, and the supported body is supported by the elastic body. The plurality of active vibration isolators include an actuator that applies a control force via an elastic body, and the plurality of active vibration isolators have a step of raising and lowering the supported body to a predetermined position and raising and lowering the supported body to the predetermined position at the time of starting each of the active vibration isolators. It is configured to carry out a step of shifting the actuator to a controllable active state so as to suppress the vibration generated in the supported body.

Then, when the controller activates each of the plurality of active vibration isolation devices, the controller shifts the plurality of active vibration isolation devices one by one to the active state in order.

Here, the “predetermined position” indicates a target position or the like of each supported body, which is determined for each active vibration isolator.

According to this configuration, when a plurality of active vibration isolation devices are activated, each active vibration isolation device is sequentially shifted to the active state one by one. For example, if the active vibration isolator on the upper stage is moved to the active state and then the active vibration isolation device on the lower stage is moved up and down toward a predetermined position, the vibration generated by the raising and lowering is the active vibration isolation on the upper stage side. May cause shaking of the device. However, since the active vibration isolator on the upper stage has completed the transition to the active state, it is possible to reduce the shaking caused by the lower stage side. As a result, the active vibration isolation system can be started stably, and as a result, the start can be performed promptly.

Further, when each of the plurality of active vibration isolation devices is activated, the controller may complete the steps of raising and lowering the supported body to the predetermined position one by one.

According to this configuration, the upper and lower active vibration isolation devices can be stably moved up and down, and the active vibration isolation system can be started more stably.

Further, when each of the plurality of active vibration isolators is activated, the controller shifts to the active state in order from the active vibration isolation device located on the upper stage side to the active vibration isolation device located on the lower stage side. It may be configured to allow.

Usually, the active vibration isolating device located at the uppermost stage is equipped with a vibration isolating object such as a semiconductor-related manufacturing device. Therefore, the active vibration isolator located on the upper stage side is closer to the vibration isolation target than the active vibration isolation device located on the lower stage side. Therefore, shifting from the active vibration isolator located on the upper stage side to the active state in order is advantageous in protecting the vibration isolation target from shaking.

Further, even if the controller can feedback control the actuator based on the vibration state of the supported body so as to suppress the vibration of the supported body by the control force in the active state. good.

According to this configuration, the vibration of the supported body can be suppressed in the active state.

Further, in the active state, the controller can feedback control the actuator based on the relative displacement of the supported body with respect to the foundation so that the vibration of the supported body is attenuated by the control force. , May be.

According to this configuration, the vibration of the supported body can be suppressed in the active state.

Further, the controller may be able to feedback control the actuator based on the acceleration of the supported body so that the vibration of the supported body is attenuated by the control force in the active state. ..

According to this configuration, the vibration of the supported body can be suppressed in the active state.

Further, the controller may be provided one for each of the plurality of active vibration isolation devices.

According to the above configuration, stable and prompt start-up can be realized in an active vibration isolation system in which a plurality of active vibration isolation devices are stacked one above the other.

FIG. 1 is a diagram illustrating a schematic configuration of an active vibration isolation system. FIG. 2 is a block diagram illustrating a control system of an active vibration isolation system. FIG. 3 is a flowchart illustrating control regarding activation of the active vibration isolation system.

Hereinafter, embodiments of the present disclosure will be described with reference to the drawings. The following description is an example.

-Overall configuration of active vibration isolation system-
FIG. 1 is a diagram illustrating a schematic configuration of an active vibration isolation system S (hereinafter, simply referred to as “vibration isolation system”) according to the present embodiment. Further, FIG. 2 is a block diagram illustrating a control system of the vibration isolation system S.

The vibration isolation system S includes two active vibration isolation devices 1 (hereinafter, simply referred to as “vibration isolation devices”) and a controller 100 that controls each of the two vibration isolation devices 1. The shaking device 1 is stacked one above the other. Both of the two vibration isolation devices 1 are so-called active type vibration isolation devices, and by stacking them vertically, more advanced vibration isolation performance can be exhibited as described later.

Hereinafter, the vibration isolating device 1 arranged on the upper stage side is referred to as "first vibration isolating device 1A", while the vibration isolating device 1 arranged on the lower stage side is referred to as "second vibration isolating device 1B". The first vibration isolator 1A is equipped with an object D as a vibration isolation target such as a semiconductor-related manufacturing device, while the second vibration isolation device 1B is equipped with the first vibration isolation device 1A. It is configured in. That is, the first vibration isolator 1A operates so as to suppress the vibration of the mounted object D, while the second vibration isolator 1B operates so as to suppress the vibration of the mounted object D and the first vibration isolating device 1A. .. The first vibration isolating device 1A is an example of the "active vibration isolating device located on the upper stage side", and the second vibration isolating device 1B is an example of the "active vibration isolating device located on the lower stage side".

-Overall configuration of active vibration isolator-
Hereinafter, the configuration of each vibration isolator 1 will be described in detail. The following description is common to the first vibration isolating device 1A and the second vibration isolating device 1B.

Specifically, the vibration isolation device 1 according to the present embodiment includes a vibration isolation table 10 on which a vibration isolation target is mounted, a plurality of air spring units 2 that support the vibration isolation table 10 from below via a foundation, and the air spring unit 2. It is provided with a servo valve 25 that raises and lowers the vibration isolation table 10 via the air spring unit 2 and applies a control force to the vibration isolation table 10 via the air spring unit 2.

The vibration isolation table 10 is configured as a so-called surface plate, and is elastically supported from below by a plurality of (usually four, but three or more) air spring units 2. In the following description, the vibration isolation table 10 in the first vibration isolation device 1A is referred to as "first vibration isolation table 10A", while the vibration isolation table 10 in the second vibration isolation device 1B is referred to as "second vibration isolation table 10B". May be called. The first and second vibration isolation tables 10A and 10B are both examples of "supported bodies".

The air spring unit 2 is composed of an air spring Sv (elastic body) that supports a load in the vertical direction. The air spring Sv is arranged on the base plate (foundation) 21 and is airtightly inserted into the opening of the upper end of the case 20 and the opening of the upper end via the diaphragm 22 to form an air chamber in the case 20. It is provided with a piston 24 for partitioning the 23. Since the load is supported by using the air spring Sv in this way, the vibration isolator 1 has excellent vibration isolation performance. Further, in this embodiment, the air pressure (internal pressure) of the air spring Sv is controlled. Therefore, it is possible to impart a control force to the vibration isolator 10 so as to reduce the vibration.

Therefore, each air spring unit 2 is provided with an FB acceleration sensor S1 and a displacement sensor S2 for detecting the acceleration of the vibration isolation table 10 in the vicinity of its support position (predetermined position) and its displacement, respectively. There is. Further, an FF acceleration sensor S3 for detecting the acceleration (floor vibration) in the base plate 21 is also provided, and the detection signals output from the sensors S1 to S3 are input to the controller 100, respectively.

Further, a pipe for supplying compressed air from an air pressure source (not shown) is connected to each air spring unit 2, and the air pressure of the air spring Sv can be adjusted by a servo valve 25 interposed in the pipe. .. The servo valve 25 can raise and lower the vibration isolation table 10 via the air spring Sv.

Specifically, each servo valve 25 opens and closes in response to a control signal from the controller 100, and by opening and closing each servo valve 25, air is supplied and discharged to the air spring Sv for each air spring unit 2. The flow rate is adjusted so that the air pressure of the air spring Sv is changed rapidly. By changing the air pressure of the air spring Sv, the piston 24 inserted in the case 20 of the air spring Sv moves up and down. As a result, the vibration isolation table 10 can be raised and lowered, and a control force can be applied to the vibration isolation table 10.

Further, each servo valve 25 is connected to a reservoir tank (not shown) for storing compressed air. An electric pump (not shown) is connected to this reservoir tank, and the air pressure in the reservoir tank is maintained at a predetermined value by operating the electric pump.

Note that FIG. 1 shows only the air spring unit 2 on the right side, the vertical FB acceleration sensor S1, the displacement sensor S2, the FF acceleration sensor S3, the servo valve 25, etc. that form the control system, but the same control is performed. The system is attached to each air spring unit 2.

Further, although not shown, a similar air spring unit 2 may be provided around the vibration isolation table 10 as an actuator for generating a control force in the horizontal direction, or a plurality of air springs Sv may be provided as a horizontal actuator. By controlling the internal pressure, the vibration of the vibration isolator 10 in the horizontal direction can also be suppressed.

-Control related to vibration suppression-
The controller 100 controls the servo valve 25 based on the signals and the like input from the sensors S1 to S3. As a result, the internal pressure of the air spring Sv is adjusted by adjusting the supply flow rate and the exhaust flow rate of the compressed air. The controller 100 is provided one for each of the first and second vibration isolators 1A and 1B.

Hereinafter, the controller 100 of the first vibration isolating device 1A may be referred to as a “first controller 100A”, and the controller 100 of the second vibration isolating device 1B may be referred to as a “second controller 100B”.

Hereinafter, the control of the vibration isolation table 10 via the servo valve 25 will be specifically described. For convenience, only the first vibration isolating device 1A will be described, but the same control is performed for the second vibration isolating device 1B.

In this configuration example, the controller 100 has a vibration isolation FB control unit 101, a vibration suppression FB control unit 102, a vibration isolation FF control unit 103, and the like, and is eliminated by inputting a control signal to the servo valve 25. The shaking table 10 is configured to be provided with a control force that suppresses its vibration.

As shown in FIG. 2, the inputs to the servo valve 25 are mainly the vibration isolation feedback operation amount calculated by the vibration isolation FB control unit 101 based on the output from the FB acceleration sensor S1 and the displacement sensor S2. The vibration damping feedback operation amount calculated by the vibration damping FB control unit 102 based on the output and the vibration isolation feed forward operation amount calculated by the vibration isolation FF control unit 103 based on the output from the FF acceleration sensor S3. Consists of inclusion.

The vibration isolation FB control unit 101 generates a control force that attenuates the vibration based on the detection value of the FB acceleration sensor S1, that is, the acceleration in the vertical direction of the vibration isolation table 10, by the air spring Sv. For example, the detected value of acceleration, its differential value, and the integrated value are multiplied by the feedback gain, and the three are added together and then inverted to obtain a control input (vibration isolation feedback operation amount) to the servo valve 25. be able to. As a result, the same effect as adding rigidity to the vibration isolating table 10 or increasing the mass of the vibration isolating table 10 can be obtained.

Further, the vibration damping FB control unit 102 controls the internal pressure of the air spring Sv so as to be small based on the detection value of the displacement sensor S2, that is, the amount of change (relative displacement) in the vertical position of the vibration isolation table 10. As a result, the tilt of the vibration isolation table 10 and the shaking generated by this tilt are suppressed (attenuated). For example, after subtracting the displacement detection value from the target value (zero), the control input (vibration damping feedback operation amount) to the servo valve 25 can be obtained according to the PID control rule. As a result, the vertical position of the vibration isolation table 10 can be converged to the above-mentioned support position.

Further, the vibration isolation FF control unit 103 is based on the value detected by the FF acceleration sensor S3, that is, the vibration state of the floor (see the shaded area in FIG. 1), and reverses the vibration transmitted from the vibration isolation target to the vibration isolation target. It is for generating phase vibration, and a control input to the servo valve 25 can be obtained by using, for example, a digital filter. The characteristics of this digital filter are the transfer function H (s) when the floor vibration is transmitted to the vibration isolation table 10 via the air spring unit 2 and the transfer function K (s) of the compensation system composed of the air spring unit 2. ) Is expressed as -H (s) · K (s) ^-1 .

Then, the servo valve 25 operates in response to the control input as described above, and the internal pressure of the air spring unit 2 is controlled, so that an appropriate control force is applied to the vibration isolation table 10 which is the vibration isolation target. It will be. That is, for the vibration transmitted from the floor, the vibration isolation FF control unit 103 suppresses the transmission of the vibration by performing the vibration isolation feedforward control, and the vibration isolation FB control unit 101 removes the minute vibration still transmitted. Very high vibration isolation performance can be obtained by reducing the vibration by performing vibration feedback control.

On the other hand, for relatively large vibration, that is, vibration (vibration) generated in the vibration isolation table 10 due to the operation of the mounted object D or the like, the vibration damping FB control unit 102 controls the vibration (vibration) in addition to the vibration isolation feedback control described above. It will be diminished by performing vibration feedback control.

As described above, such a configuration is common to the first vibration isolating device 1A and the second vibration isolating device 1B. However, the first vibration isolator 1A executes the vibration isolation feedback control based on the acceleration z2 "in the vertical direction of the first vibration isolation table 10A, and causes the relative displacement z2-z1 of the first vibration isolation table 10A in the vertical direction. Based on this, vibration suppression feedback control is executed, and vibration isolation feed forward control is executed based on the acceleration z1 "in the vertical direction of the base plate 21 of the first vibration isolation device 1A.

In addition, z0, z1 and z2 are the vertical position of the floor surface on which the second vibration isolation device 1B is placed, the vertical position of the second vibration isolation table 10B in the second vibration isolation device 1B, and the first vibration isolation device, respectively. It is equal to the vertical position of the first vibration isolation table 10A in 1A. As shown in FIG. 1, the base plate 21 of the first vibration isolator 1A is fixed on the second vibration isolation table 10B. Therefore, the time derivative of z1 is equal to the time derivative of the vertical position of the base plate 21 in the first vibration isolator 1A.

On the other hand, the second vibration isolator 1B executes vibration isolation feedback control based on the acceleration z1 "in the vertical direction of the second vibration isolation table 10B, and causes the relative displacement z1-z0 of the second vibration isolation table 10B in the vertical direction. Based on this, vibration suppression feedback control is executed, and vibration isolation feed forward control is executed based on the acceleration z0 "in the vertical direction of the base plate 21 of the second vibration isolation device 1B.

-Configuration related to booting the active vibration isolation system-
By the way, in the above-mentioned first and second vibration isolation devices 1A and 1B, the vibration isolation feedback control, the vibration damping feedback control and the vibration isolation feedforward control as described above (hereinafter, these are collectively referred to as "vibration suppression control"). (In some cases), it is necessary to raise and lower the vibration isolation tables 10 of the first and second vibration isolation devices 1A and 1B to predetermined support positions in advance.

That is, the first and second vibration isolation devices 1A and 1B suppress the step of ascending each vibration isolation table 10 to the support position and the vibration generated in the vibration isolation table 10 raised and lowered to the support position at the time of each activation. In order to do so, it is necessary to sequentially execute the above-mentioned step of starting the vibration suppression control. In the following description, the state in which the vibration suppression control can be executed in each of the first and second vibration isolators 1A and 1B is referred to as an "active state". That is, the latter step is equivalent to shifting the first and second vibration isolators 1A and 1B to the active state, respectively. In the active state, the first and second vibration isolation devices 1A and 1B can execute the vibration isolation feedback control, the vibration damping feedback control, and the vibration isolation feedforward control as described above, respectively. Further, both the first and second vibration isolating devices 1A and 1B are configured to immediately shift to the active state as soon as the raising and lowering of the vibration isolating table 10 is completed.

In the vibration isolation system S according to the present embodiment, the first and second vibration isolation devices 1A and 1B both shift to the active state, so that each of them can independently execute the vibration suppression control.

Here, in order to promptly start such vibration suppression control, that is, in order to promptly shift the vibration isolating devices 1A and 1B to the active state, both the first and second vibration isolating devices 1A and 1B are used. In the above, a configuration is conceivable in which the vibration isolation table 10 is raised and lowered at the same time.

However, when such a configuration is adopted, the vibration suppression control is not executed while the vibration isolator 10 is moving up and down, so that the first and second vibration isolation devices 1A and 1B are in an unstable state, and each of them oscillates. there is a possibility. As a result, the transition to the active state is delayed as a result.

On the other hand, in the vibration isolation system S according to the present embodiment, when the first and second vibration isolation devices 1A and 1B are activated, the first and second vibration isolation devices 1A and 1B are activated one by one in order. To move to. More specifically, the vibration isolation system S shifts to the active state in order from the first vibration isolation device 1A located on the upper stage side to the second vibration isolation device 1B located on the lower stage side.

For example, when the vibration isolator 1A on the upper stage is moved to the active state and then the vibration isolation device 1B on the lower stage is levitated toward the support position, the vibration generated by the ascent is generated by the vibration isolator on the upper stage side. It may cause shaking in 1A. However, since the vibration isolator 1A on the upper stage side has already completed the transition to the active state, it is possible to reduce the shaking caused by the lower stage side. As a result, the vibration isolation system S can be started stably, and as a result, the start can be performed promptly.

Further, the first vibration isolating device 1A located on the upper stage side directly supports the mounted object D as the vibration isolating target. By shifting from the first vibration isolator 1A to the active state in order, it is advantageous in protecting the load D from shaking.

Further, the vibration isolation system S according to the present embodiment is configured to sequentially complete the steps of raising and lowering the first and second vibration isolation tables 10A and 10B to predetermined positions one by one. That is, the vibration isolation system S starts raising and lowering the second vibration isolation table 10B after completing the step of raising and lowering the first vibration isolation table 10A. As a result, in the present embodiment, the period in which the first vibration isolation table 10A is floating and the period in which the second vibration isolation table 10B is floating do not overlap. As a result, the first and second vibration isolation devices 1A and 1B can be stably moved up and down, and the vibration isolation system S can be started more stably.

Further, in order to realize the control mode as described above, the first controller 100A starts the activation of the first vibration isolation device 1A (specifically, starts the ascending / descending of the first vibration isolation table 10A). After a predetermined time has elapsed, a timing signal is output to the second controller 100B. This predetermined time is defined as the sum of the time required for raising and lowering the first vibration isolation table 10A and the time required for shifting to the active state after completing the raising and lowering of the first vibration isolation table 10A. Therefore, when the first controller 100A outputs the timing signal, the first vibration isolator 1A has substantially completed the transition to the active state.

When the timing signal is input, the second controller 100B starts starting the second vibration isolating device 1B (specifically, starting the raising and lowering of the second vibration isolating table 10B). As described above, when the first controller 100A outputs the timing signal, the first vibration isolator 1A has substantially completed the transition to the active state. Therefore, the second vibration isolator 1B can be started while the first vibration isolator 1A has completed the transition to the active state. As a result, even if the vibration isolation table 10 (second vibration isolation table 10B) of the second vibration isolation device 1B oscillates, the shaking accompanying the oscillation can be attenuated by the first vibration isolation device 1A.

-Specific example of control flow-
Hereinafter, the control process executed when the vibration isolation system S is started will be described.

As shown in step S1 of FIG. 3, both the first and second vibration isolation devices 1A and 1B are in a standby state before the vibration isolation system S is started. In this standby state, compressed air is not supplied to the air springs Sv of each device, and both the first and second vibration isolation tables 10A and 10B are in the settling state.

As shown in the following step S2, when the vibration isolation system S is activated, the first controller 100A outputs a control signal to the servo valve 25 of the first vibration isolation device 1A. Then, the servo valve 25 that receives this control signal raises (elevates) the first vibration isolation table 10A. At this time, the second vibration isolator 1B is in a standby state following step S1.

Then, in the subsequent step S3, when a predetermined time has elapsed from the start of the ascent of the first vibration isolation table 10A, the first controller 100A outputs a timing signal to the second controller 100B. When this timing signal is input, the second controller 100B outputs a control signal to the servo valve 25 of the second vibration isolator 1B. Then, the servo valve 25 that receives this control signal raises (elevates) the second vibration isolation table 10B. Here, immediately before the ascent of the second vibration isolator 10B starts, the first vibration isolation device 1A completes the ascent of the first vibration isolation table 10A and shifts to the active state. The first vibration isolation device 1A that has transitioned to the active state starts the vibration isolation feedback control, vibration damping feedback control, and vibration isolation feedforward control described above.

In the following step S4, the ascending of the second vibration isolating table 10B proceeds while the first vibration isolating device 1A is in the active state. Then, as soon as the second vibration isolation table 10B has finished ascending, the second vibration isolation device 1B shifts to the active state.

In this way, when the activation of the vibration isolation system S is completed, the first vibration isolation device 1A is accompanied by the vibration transmitted from the floor to the first vibration isolation table 10A via the second vibration isolation device 1B, the operation of the load D, and the like. It is possible to reduce both the vibration generated in the first vibration isolation table 10A and the vibration. On the other hand, the second vibration isolator 1B transmits the vibration transmitted from the floor to the second vibration isolation table 10B and the vibration transmitted to the second vibration isolation table 10B via the first vibration isolation device 1A with the operation of the mounted object D and the like. Both vibration and vibration can be diminished. As a result, the vibration isolation system S according to the present embodiment exhibits good vibration isolation performance.

<< Other Embodiments >>
In the above-described embodiment, the vibration isolation system S in which two vibration isolation devices 1A and 1B are stacked has been described, but the present invention is not limited to this configuration. For example, the above-mentioned technique can be applied to a vibration isolation system in which three or more vibration isolation devices are stacked. In that case, the vibration isolator located at the top may be shifted to the active state in order.

Further, in the above-described embodiment, the two vibration isolation devices 1A and 1B are similarly configured except for the vertical arrangement, but the configuration is not limited to this. For example, the vibration isolator 1A located on the upper side may be made relatively small, while the vibration isolator 1B located on the lower side may be made relatively large. By doing so, it is advantageous to support a larger weight on the lower stage side, and it is advantageous to reduce the size and weight of the entire system on the upper stage side. In particular, in the vibration isolating device 1B on the lower stage side, instead of providing the second vibration isolating table 10B, a lighter plate-shaped member such as a so-called top plate may be interposed.

Further, in the above-described embodiment, the two vibration isolation devices 1A and 1B are provided with the first and second controllers 100A and 100B, respectively, but the configuration is not limited to this. For example, a controller common to the first and second vibration isolators 1A and 1B may be used.

Further, in the above embodiment, the configuration in which the servo valve 25 is used as the actuator and the air spring Sv is used as the elastic body has been exemplified, but the configuration is not limited to this. For example, a linear motor may be used as the actuator, and a coil spring may be used as the elastic body. Since the coil spring does not have an integral characteristic like the air spring, when a linear motor is used as the actuator, the configuration around the vibration isolation FB control unit 101 is changed. However, the basic control mode is almost the same as that of the above embodiment.

Further, in the above-described embodiment, the active state is defined as a state in which vibration isolation feedback control, vibration suppression feedback control, and vibration isolation feedforward control can be executed among the vibration suppression controls, but the definition of the active state is limited to this. Not done. The active state may be a state in which at least the vibration damping feedback control can be executed, preferably a state in which the vibration damping feedback control and the vibration damping feedback control can be executed.

Further, in the above-described embodiment, the second vibration isolation table 10B is configured to start ascending after the first vibration isolation table 10A has completed ascending, but the configuration is not limited to this. The ascending period may overlap between the first vibration isolation table 10A and the second vibration isolation table 10B. For example, the second vibration isolation table 10B may be configured to start ascending immediately before the first vibration isolation table 10A completes ascent.

S Active vibration isolation system 1 Active vibration isolation device 1A First vibration isolation device (active vibration isolation device located on the upper side)
1B 2nd anti-vibration device (active anti-vibration device located on the lower side)
2 Air spring unit Sv Air spring (elastic body)
10 Anti-vibration table (supported body)
10A 1st vibration isolation table (supported body)
10B 2nd vibration isolation table (supported body)
21 Base plate (foundation)
25 Servo valve (actuator)
100 controller 100A 1st controller (controller)
100B 2nd controller (controller)

Claims (7)

It is an active vibration isolation system including a plurality of active vibration isolation devices and a controller for controlling each of the plurality of active vibration isolation devices, and the plurality of active vibration isolation devices are stacked one above the other.
Each of the plurality of active vibration isolators
An elastic body that supports the supported body from below with respect to the foundation,
An actuator for raising and lowering the supported body via the elastic body and applying a control force to the supported body via the elastic body is provided.
The plurality of active vibration isolators can control the actuator so as to suppress the step of raising and lowering the supported body to a predetermined position and the vibration generated in the supported body raised and lowered to the predetermined position at the time of each activation. It is configured to carry out the process of transitioning to an active state.
The controller is an active vibration isolation system, characterized in that, when each of the plurality of active vibration isolation devices is activated, the plurality of active vibration isolation devices are sequentially shifted to the active state one by one. In the active vibration isolation system according to claim 1,
The controller is an active vibration isolation system, characterized in that when each of the plurality of active vibration isolation devices is activated, the steps of raising and lowering the supported body to the predetermined position are completed one by one in order. In the active vibration isolation system according to claim 1 or 2.
When each of the plurality of active vibration isolators is activated, the controller shifts the active vibration isolation device from the active vibration isolation device located on the upper stage side to the active vibration isolation device located on the lower stage side in order. An active vibration isolation system characterized by being configured. In the active vibration isolation system according to any one of claims 1 to 3.
The controller is characterized in that, in the active state, the actuator can be feedback-controlled based on the vibration state of the supported body so as to suppress the vibration of the supported body by the control force. Vibration isolation system. In the active vibration isolation system according to claim 4,
The controller is characterized in that, in the active state, the actuator can be feedback-controlled based on the relative displacement of the supported body with respect to the foundation so that the vibration of the supported body is attenuated by the control force. Active vibration isolation system. In the active vibration isolation system according to claim 4 or 5.
The controller is characterized in that, in the active state, the actuator can be feedback-controlled based on the acceleration of the supported body so that the vibration of the supported body is attenuated by the control force. Vibration system. In the active vibration isolation system according to any one of claims 1 to 6.
The controller is an active vibration isolation system, characterized in that one is provided for each of the plurality of active vibration isolation devices.

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