JP7003421B2 - Winding equipment for pulse power supply - Google Patents

Description

The present invention relates to a transformer winding structure, and more particularly to a transformer winding structure in a gate drive circuit using a pulse transformer.

As the pulse width modulation type pulse power supply, a circuit method using a PFL (cable discharge circuit), a PEN (pulse shaping circuit), a bloom line, or the like can be considered. However, in particular, a method in which a short pulse width output of up to several hundred nsec is required with a short rise / fall time of several tens of nsec and pulse width modulation can be easily performed is performed by directly supplying power to the load with a switch or the like. It is valid. FIG. 5 shows a circuit configuration example of a pulse width modulation type pulse power supply that directly supplies power to a load with a switch or the like.

In the circuit configuration example shown in FIG. 5, electric power is supplied by the DC power supply V from the outside. The capacitor C is inserted when a voltage drop is considered due to the responsiveness of the DC power supply V.

The resistance R2 and the switch SW2 are unnecessary if the load load is a resistance load, but are necessary when energy remains on the load load side and the voltage is to be reduced.

The resistors R1 and R2 are inserted as necessary in order to suppress vibration when the inductance of the circuit floating component or the load load is capacitive.

FIG. 6 is a timing chart when energy is supplied to the load load of FIG. When it is desired to supply energy to the load load and raise the voltage on the load load side, the switch SW1 is turned ON and the switch SW2 is turned OFF. After that, when it is desired to lower the voltage on the load load side, the switch SW1 is turned off and the switch SW2 is turned on.

When used mainly for plasma generation applications, the voltage applied to the load load is a high voltage (for example, several kV to several tens kV). Since the switch SW1 and the switch SW2 are applied with substantially the same voltage as the load load, a switch with a high withstand voltage is required.

As the semiconductor switching element used for the switches SW1 and SW2, for example, an IGBT (insulated gate bipolar transistor) may be applied. However, since the switch that operates at an applied voltage of several tens of kV class and several tens of nsec is not a single unit, it is common to use discrete semiconductor devices connected in series. There are various methods of connecting in series to operate the switches, but as a simpler method, there is a method of turning on each switch directly by a pulse transformer at the same time.

FIG. 7 shows an example of a circuit configuration of a gate drive using a pulse transformer. FIG. 7 is an example in which three elements are connected in series as the switch SW1 and the switch SW2.

If the pulse transformer has a large leakage inductance, even if the input waveform is a square wave, a voltage drop due to the leakage inductance occurs in the output side waveform and the waveform is distorted. Therefore, it is desirable that the leakage inductance in the pulse transformer is small.

In FIG. 7, the gate voltage is applied to each switch (SWn, SWn-1, SW0) only for the time desired to be turned on to the primary side of the pulse transformer. When it is necessary to adjust the ON timing of the switches (SWn, SWn-1, SW0) of each stage, fine adjustment circuits (Cn, Cn) for ON / OFF timing between the transformer secondary side of each stage and the switch. -1, C0) is added.

Here, in the insulating pulse transformer method, a high voltage is applied as it is between the primary side and the secondary side of the transformer. Therefore, the insulation structure of the transformer primary-secondary winding is important.

Japanese Unexamined Patent Publication No. 7-37477 Japanese Unexamined Patent Publication No. 2001-267157

In order to increase the insulation distance, if a pulse transformer with a large inner diameter is used, the outer shape will be large. Here, insulation (electrical insulation) and reduction of leakage inductance are realized by using a ring-shaped core. The core used for the pulse transformer needs to have an inner diameter as small as possible in order to reduce the leakage inductance while gaining the insulation distance between the secondary winding side and the primary side winding.

An object of the present invention is to provide a technique for ensuring electrical insulation capacity and reducing leakage inductance in a pulse transformer that transmits a signal and signal power in a gate circuit.

The winding device for a pulse power supply of the present invention has a ring-shaped core, a first electric wire penetrating a hole in the center of the core, a second electric wire wound around the core, and an inner circumference of the core. It is characterized by having a support member for supporting the first electric wire so that the first electric wire and the second electric wire are separated from each other with a gap on the side.

The support member is a tubular and bellows-shaped member having electrical insulation and penetrating the core. The first electric wire penetrates the inside, and the mountain portion of the bellows is on the inner peripheral side of the core. It may be supported and the valley portion of the bellows may support the first electric wire.

Further, the support member may have electrical insulation and may be located on both sides of the core in the axial direction of the core.

In the pulse power winding device of the present invention, the support member can stably secure the distance between the first electric wire and the second electric wire on the inner peripheral side of the ring-shaped core, so that dielectric breakdown can be suppressed and insulation breakdown can be suppressed. Leakage inductance can be reduced.

Explanatory drawing which shows typically the pulse transformer which concerns on 1st Embodiment of this invention. Explanatory drawing which shows typically the pulse transformer which concerns on 1st Embodiment of this invention. An explanatory view schematically showing a pulse transformer according to a second embodiment of the present invention. An explanatory view schematically showing a pulse transformer according to a second embodiment of the present invention. A circuit diagram showing an example of a circuit configuration of a pulse width modulation type pulse power supply. The timing chart when energy is supplied to the load load of FIG. A circuit diagram showing an example of a circuit configuration of a gate drive using a pulse transformer.

Hereinafter, an embodiment of the present invention will be described in detail with reference to the drawings. The pulse power winding device according to each embodiment of the present invention is applicable to the gate drive circuit as shown in FIG. 7 described above. However, the winding device for pulse power supply in each embodiment of the present invention is not limited to the one applied to the gate drive circuit, and can be applied to various winding devices for pulse power supply.

The pulse transformer 1 of the first embodiment, which is a winding device for a pulse power source according to the present invention, will be described with reference to FIGS. 1 and 2.

FIG. 1 is an explanatory diagram schematically showing the pulse transformer 1 of the first embodiment. FIG. 2 shows the pulse transformer 1 of the first embodiment as viewed from the direction of arrow A in FIG. 1, and is an explanatory diagram schematically showing the pulse transformer 1 of the first embodiment.

The pulse transformer 1 is a ring-shaped core 2, a primary side electric wire 3 penetrating the core 2, a secondary side electric wire 4 wound around the core 2, and a bellows-shaped support member for supporting the primary side electric wire 3. It has 5 and.

The core 2 has a hole 6 having a circular cross section in the center, and the outer peripheral surface of the hole 6 is the inner peripheral surface 7 of the core 2. The outer peripheral surface 8 of the core 2 is a cylindrical surface concentric with the inner peripheral surface 7 of the core 2. That is, the core 2 is a so-called toroidal core.

The primary side electric wire 3 as the first electric wire penetrates the inside (inner peripheral side) of the hole 6 of the core 2 and the support member 5. The primary side electric wire 3 is supported by the support member 5 so as to be located on the inner peripheral side of the core 2, that is, in the hole portion 6, substantially in the center of the hole portion 6.

The secondary side electric wire 4 as the second electric wire is wound around the core 2 so as to pass through the inner peripheral side of the core 2. In other words, the secondary side electric wire 4 is wound around the core 2 along the axial direction of the core 2.

The support member 5 is a tubular and bellows-shaped member having a substantially constant wall thickness, and penetrates the hole 6 of the core 2.

The support member 5 is made of an electrically insulating material such as PTFE (polytetrafluoroethylene).

The bellows of the support member 5 is formed by repeating the peaks 9 and valleys 10 of the bellows alternately and concentrically along the axial direction of the support member (longitudinal direction of the support member).

The bellows of the support member 5 is set so that at least one mountain portion 9 is always present in the hole portion 6 of the core 2.

The bellows of the support member 5 are set so that, for example, all the mountain portions 9 are concentric with each other and have the same diameter, and all the valley portions 10 are concentric with each other and have the same diameter. That is, the support member 5 is formed so that the outer diameter is maximum at the peak portion 9 of the bellows and the outer diameter is minimum at the valley portion 10 of the bellows. The outer diameter of the ridge portion 9 of the bellows is set to be equal to, for example, the inner diameter of the hole portion 6 of the core 2. The inner diameter of the valley portion 10 of the bellows is set to be equal to, for example, the outer diameter of the primary side electric wire 3.

On the inner peripheral side of the core 2, the support member 5 is in pressure contact with the secondary side electric wire 4 wound around the core 2 and the ridge portion 9 of the bellows. Further, the support member 5 supports the primary side electric wire 3 at the valley portion 10 of the bellows. In other words, the support member 5 supports the primary side electric wire 3 so that the primary side electric wire 3 and the secondary side electric wire 4 are separated from each other with a gap on the inner peripheral side of the core 2. More specifically, the support member 5 covers the entire circumference in the radial direction of the support member with a predetermined distance t1 between the primary side electric wire 3 and the secondary side electric wire 4 including the air layer and the like on the inner peripheral side of the core 2. The primary side electric wire 3 is supported so as to be separated from each other.

The distance t1 between the primary side electric wire 3 and the secondary side electric wire 4 on the inner peripheral side of the core 2 is secured by the unevenness due to the bellows of the support member 5. Therefore, in the pulse transformer 1, the insulation distance of the interval t1 can be set between the primary side electric wire 3 and the secondary side electric wire 4 in the radial direction of the primary side electric wire on the inner peripheral side of the core 2. become.

Further, the support member 5 has an outer diameter of the mountain portion 9 so as to be able to penetrate the hole portion 6 of the core 2 and to allow the mountain portion 9 which is the outermost end of the bellows to be in pressure contact with the secondary side electric wire 4. Is set. When the mountain portion 9 of the bellows is pressed against the secondary side electric wire 4, the primary side electric wire 3 and the secondary side electric wire 4 and the core 2 are fixed, and the primary side electric wire 3 is fixed substantially in the center of the core 2. ..

When driving a gate using a pulse transformer in a pulse power supply that is particularly required to be miniaturized in the external specifications, it is necessary to design a pulse transformer that takes into consideration the inductance and secures the Vt product (voltage / time product) as much as possible. Become. In particular, the electrical insulation performance of the pulse transformer is determined by the insulator / insulating material inserted between the primary and secondary pulse transformers, the insulation distance, and the like. Since the high voltage of the main circuit is directly applied to the primary side electric wire (first electric wire) which is the transformer 1-2 secondary electric wire, its electrical insulation performance is important.

Therefore, in the pulse transformer 1 of the first embodiment, the primary side electric wire 3 and the secondary side electric wire 4 are separated from each other with a predetermined interval t1 on the inner peripheral side of the ring-shaped core 2. 3 is supported by the support member 5. As a result, the pulse transformer 1 can stably secure the distance t1 between the primary side electric wire 3 and the secondary side electric wire 4, suppress dielectric breakdown, and reduce the leakage inductance.

In the pulse transformer 1, on the inner peripheral side of the core 2, the primary side electric wire 3 and the secondary side electric wire 4 are separated from each other via an air layer. Therefore, in the pulse transformer 1, the ratio of the insulator / insulating material existing between the primary side electric wire 3 and the secondary side electric wire 4 can be reduced, and the cost can be relatively reduced.

Further, in the pulse transformer 1 of the first embodiment, the primary side electric wire 3 is located at the center of the core 2 due to the unevenness in the radial direction of the support member caused by the peak portion 9 and the valley portion 10 of the bellows of the support member 5. I can support it. That is, the pulse transformer 1 can stably secure the distance t1 between the primary side electric wire 3 and the secondary side electric wire 4 on the inner peripheral side of the core 2 without fixing the primary side electric wire 3.

Therefore, in the pulse transformer 1, there is no case where the primary side electric wire 3 and the secondary side electric wire 4 come into contact with each other due to a bias (variation) or the like during manufacturing, resulting in dielectric breakdown.

Further, the pulse transformer 1 can uniformly secure the distance t1 between the primary side electric wire 3 and the secondary side electric wire 4 on the inner peripheral side of the core due to the unevenness due to the bellows of the support member 5.

Therefore, the pulse transformer 1 can suppress the corona discharge generated between the primary side electric wire 3 and the secondary side electric wire 4.

Next, the pulse transformer 21 of the second embodiment, which is the winding device for the pulse power supply according to the present invention, will be described with reference to FIGS. 3 and 4.

FIG. 3 is an explanatory diagram schematically showing the pulse transformer 21 of the second embodiment. FIG. 4 shows the pulse transformer 21 of the second embodiment as viewed from the direction of arrow B in FIG. 3, and is an explanatory diagram schematically showing the pulse transformer 21 of the second embodiment.

The pulse transformer 21 includes a ring-shaped core 22, a primary electric wire 23 penetrating the core 22, a secondary electric wire 24 wound around the core 22, and a support member 25 for supporting the primary electric wire 23. have.

The core 22 has a hole 26 having a circular cross section in the center, and the outer peripheral surface of the hole 26 is the inner peripheral surface 27 of the core 22. The outer peripheral surface 28 of the core 22 is a cylindrical surface concentric with the inner peripheral surface 27 of the core 22. That is, the core 22 is a so-called toroidal core. The core 22 is mounted on the printed circuit board 30 via the first fixing member 29. The first fixing member 29 is made of an insulating material having electrical insulating properties such as a resin such as silicon gel.

The primary side electric wire 23 as the first electric wire penetrates the hole 26 of the core 22. Further, the primary side electric wire 23 penetrates the support member 25. The primary side electric wire 23 is supported by the support member 25 so as to be located on the inner peripheral side of the core 22, that is, in the hole portion 26, substantially in the center of the hole portion 26.

The secondary side electric wire 24 as the second electric wire is wound around the core 22 so as to pass through the inner peripheral side of the core 22. In other words, the secondary side electric wire 24 is wound around the core 22 along the axial direction of the core 22.

The support members 25 are located on both sides of the core 22 in the core axial direction. The support member 25 is made of a material having electrical insulation, and has a tip portion 31 capable of supporting the primary side electric wire 23 and a base end portion 32 fixed to the printed circuit board 30.

The tip portion 31 has an annular shape, for example, and supports the primary side electric wire 23 by contacting a part or all of the inner peripheral surface thereof with the primary side electric wire 23. The base end portion 32 has, for example, a rod shape, one end side is continuous with the tip end portion 31, and the other end side is fixed to the printed circuit board 30.

The support member 25 supports the primary side electric wire 23 so that the primary side electric wire 23 and the secondary side electric wire 24 are separated from each other with a gap on the inner peripheral side of the core 22. More specifically, the support member 25 supports the primary side electric wire 23 so that the primary side electric wire 23 and the secondary side electric wire 24 are separated from each other with a predetermined distance t2 formed of an air layer on the inner peripheral side of the core 22. is doing. In other words, the support member 25 has a sufficient dielectric strength with respect to the core 22 so that the distance between the primary side electric wire 23 and the secondary side electric wire 24 on the inner peripheral side extends over the entire circumference in the primary side electric wire circumferential direction. The primary side electric wire 23 is supported so that the obtained interval t2 is obtained.

Therefore, in the pulse transformer 21, the insulation distance of the interval t2 can be set between the primary side electric wire 23 and the secondary side electric wire 24 in the radial direction of the primary side electric wire on the inner peripheral side of the core 22.

In such a pulse transformer 21 of the second embodiment, the primary side electric wire 23 and the secondary side electric wire 24 are separated from each other with a predetermined interval t2 on the inner peripheral side of the ring-shaped core 22. The electric wire 23 is supported by a pair of support members 25, 25 located on both sides of the core 22. As a result, the pulse transformer 21 can stably secure the distance t2 between the primary side electric wire 23 and the secondary side electric wire 24, can suppress dielectric breakdown, and can reduce the leakage inductance.

In the pulse transformer 21, the primary side electric wire 23 and the secondary side electric wire 24 are separated from each other via an air layer on the inner peripheral side of the core 22. Therefore, in the pulse transformer 21, the ratio of the insulator / insulating material existing between the primary side electric wire 23 and the secondary side electric wire 24 can be reduced, and the cost can be relatively reduced.

Further, in the pulse transformer 21 of the second embodiment, the primary side electric wire 23 on the inner peripheral side of the core 22 is located substantially in the center of the hole 26 of the core 22 by the support members 25 and 25 located on both sides of the core 22. Can be supported. That is, the pulse transformer 21 can stably secure the distance t2 between the primary side electric wire 23 and the secondary side electric wire 24 on the inner peripheral side of the core 22.

Therefore, in the pulse transformer 21, there is no case where the primary side electric wire 23 and the secondary side electric wire 24 come into contact with each other due to a bias (variation) or the like during manufacturing, resulting in dielectric breakdown.

Further, the pulse transformer 21 can uniformly secure the distance t2 between the primary side electric wire 23 and the secondary side electric wire 24 on the inner peripheral side of the core by the support members 25 and 25 located on both sides of the core 22.

Therefore, the pulse transformer 21 can suppress the corona discharge generated between the primary side electric wire 23 and the secondary side electric wire 24.

1 ... Pulse transformer 2 ... Core 3 ... Primary side electric wire 4 ... Secondary side electric wire 5 ... Support member 6 ... Hole 7 ... Inner peripheral surface 8 ... Outer peripheral surface 9 ... Mountain part 10 ... Tani part

Claims (1)

With multiple ring-shaped cores,
The first electric wire penetrating the central hole of the plurality of cores,
The second wire wound around the core and
It has a plurality of support members that support the first electric wire so that the first electric wire and the second electric wire are separated from each other with a gap on the inner peripheral side of the core.
The support member has electrical insulation, is located on both sides of the core in the axial direction of the core, and is located between a plurality of the cores, and has an annular tip capable of supporting the first electric wire. A winding device for a pulse power supply, characterized in that one end side is continuous with the tip portion and the other end side is a base end portion fixed to a printed circuit board .

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