JP6981336B2 - Heat flow measuring device and its manufacturing method - Google Patents

Description

The present invention relates to a heat flow measuring device in which a heat flux sensor and a thermocouple sheet having a thermocouple are integrated, and a method for manufacturing the same.

Conventionally, a heat flux sensor which is formed in a thin film shape and outputs a signal corresponding to a heat flux flowing between one surface and the other surface in the thickness direction has been known.

For example, Patent Document 1 describes a heat flow measuring device in which a plurality of electrically independent heat flux sensors are simultaneously formed in a process of manufacturing one multilayer substrate. This heat flow measuring device reduces the individual difference in performance of a plurality of heat flux sensors.

Japanese Unexamined Patent Publication No. 2016-11950

The heat flow measuring device described in Patent Document 1 can measure the heat flow generated from the inside of the object to be measured by attaching it to the surface of the object to be measured. However, the heat flow on the surface of the object to be measured is affected by the heat generated inside the object to be measured and also by the change in the outside air temperature. Therefore, the heat flow measuring device outputs a signal corresponding to the heat generated inside the object to be measured, and also outputs a signal corresponding to the change in the outside air temperature. Therefore, in heat flow measurement in which a heat flow measuring device is attached to the surface of the object to be measured, there is a problem that the signal corresponding to the change in the outside air temperature becomes a temperature drift and it becomes difficult to detect the heat generated inside the object to be measured. ..

As a countermeasure, it is conceivable to provide a thermocouple in addition to the heat flux sensor for the heat flow measuring device. If the temperature change on the surface of the object due to the change in the outside temperature is detected using the thermocouple, the temperature drifts from the signal of the heat flux sensor based on the signal output from the heat flux sensor and the signal output from the thermocouple. It is possible to reduce the influence of.

Therefore, the present inventors have constructed and studied a heat flow measuring device in which a heat flux sensor and a thermocouple sheet having a thermocouple are integrated. Specifically, the heat flux sensor in this heat flow measuring device is arranged in a state where the first and second interlayer connection members as thermoelectric conversion elements are connected in series inside the resin member having the thermoplastic resin. There is. Further, the thermocouple sheet in this heat flow measuring device is configured by arranging a thermocouple inside a resin member having a thermoplastic resin. The heat flow measuring device is integrated by fusing the resin member in the heat flux sensor and the resin member in the thermocouple sheet.

However, according to the study by the present inventors, it was confirmed that in this heat flow measuring device, peeling occurs from the end of the boundary between the resin member of the heat flux sensor and the resin member of the thermocouple sheet.

In view of the above points, the present invention is a heat flow measuring device in which a heat flux sensor and a thermocouple sheet having a thermocouple are integrated, and a heat flow measuring device capable of suppressing the heat flux sensor and the thermocouple sheet from peeling off. It is an object of the present invention to provide the manufacturing method.

The first aspect of claim 1 for achieving the above object is a heat flow measuring device in which a thermocouple sensor (10) and a thermocouple sheet (20) having a thermocouple (200) are integrated, and is a plate-shaped insulation. A plurality of first and second via holes (101, 102) penetrating the base material (100) in the thickness direction are formed, and the first and second via holes are thermocouple conversion elements formed of different metals. (130, 140) are embedded, and a surface protection member (110) composed of a thermoplastic resin is arranged on the surface (100a) side of the insulating base material, and the back surface of the insulating base material is arranged. The heat flux sensor in which the back surface protective member (120) composed of a thermoplastic resin is arranged on the (100b) side, and the first conductor (201) and the second conductor made of metals having different thermoelectric abilities. The thermocouple having the joint portion (203) to which (202) is connected contains a thermoplastic resin from one side in a direction intersecting the arrangement direction of the first conductor and the second conductor. The thermocouple sheet is covered with a first insulating sheet (210) and is covered with a second insulating sheet (220) configured from the other side in the intersecting direction and containing a thermoplastic resin. ing. The heat flux sensor and the thermocouple sheet are integrated by fusing the thermoplastic resins to each other, and the boundary end portion (A) at the boundary between the heat flux sensor and the thermocouple sheet. Is covered with a protective sheet (30) having a lower degree of crystallinity than the thermoplastic resin of the heat flux sensor constituting the boundary and the thermoplastic resin of the thermocouple sheet, and the heat flux sensor is covered with a protective sheet (30). The length of the front surface protection member and the back surface protection member along the surface direction of the insulation base material is longer than that of the insulation base material, and the portion of the back surface protection member that is longer than the insulation base material is the surface surface. The thermocouple sheet is bent toward the protective member and fused with the surface protective member, and the thermocouple sheet is sandwiched between the surface protective member and the surface protective member with a portion fused to the surface protector. Arranged on the opposite side and fused with the bent portion of the back surface protective member, the protective sheet covers the boundary end of the boundary farthest from the front surface protective member .

According to this, the boundary end between the heat flux sensor and the thermocouple sheet has a fusion strength with the thermoplastic resin at the boundary, rather than a fusion strength between the thermoplastic resins at the boundary. Covered with a protective sheet that raises the height. Therefore, it is possible to prevent the heat flux sensor and the thermocouple sheet from peeling off.

Further, claim 3 is a method for manufacturing a heat flow measuring device in which a heat flux sensor (10) and a heat flux sheet (20) having a heat flux pair (200) are integrated, and is a plate-shaped insulating base material. A plurality of first and second via holes (101, 102) penetrating in the thickness direction are formed in (100), and the conductive paste (130, 140) constituting the thermoelectric conversion element (130, 140) is formed in the first and second via holes. Prepare one filled with 131, 141), prepare a surface protection member (110) composed of a thermoplastic resin, and prepare a back surface protection member (120) composed of a thermoplastic resin. ), And the thermocouple having a joint portion (203) in which a first conductor (201) and a second conductor (202) made of metals having different thermoelectric abilities are connected is the first conductor. Is covered with a first insulating sheet (210) containing a thermoplastic resin from one side in a direction intersecting the arrangement direction of the second conductor and the second conductor, and is thermoplastic from the other side in the intersecting direction. The thermocouple sheet covered with a second insulating sheet (220) composed of a resin is prepared, and the back surface protective member, the insulating base material, and the front surface protective member are laminated in this order, and the thermoelectric force is provided. The thermoelectric conversion element is configured from the conductive paste by arranging the members for arranging the anti-sheets and heating while pressurizing from the stacking direction of the back surface protective member, the insulating base material, and the front surface protective member. While forming the heat flux sensor, the heat flux sensor and the heat flux sheet are integrated by fusing the thermoplastic resin that constitutes the heat flux sensor and the thermoplastic resin that constitutes the heat flux sheet. 30 and providing a) have rows and covering the border edge (a) is in the protective sheet, the at the boundary, said by preparing a surface protecting member, the surface of the insulating substrate from said insulating substrate By preparing the front surface protective member having a longer length along the direction and preparing the back surface protective member, the length along the surface direction of the insulating base material is longer than that of the insulating base material. By preparing the back surface protection member and arranging the member, the back surface protection member is on the front surface protection member side at a position where the front surface protection member and the back surface protection member are elongated in the surface direction from the insulating base material. Folded to the front The thermocouple sheet is arranged on the side opposite to the front surface protection member with the bent portion of the back surface protection member sandwiched between them .

According to this, a heat flow measuring device in which the boundary end between the heat flux sensor and the thermocouple sheet is covered with a protective sheet is manufactured. That is, a heat flow measuring device covered with a protective sheet in which the fusion strength between the thermoplastic resins at the boundary end constitutes the boundary is higher than the fusion strength between the thermoplastic resins at the boundary. Is manufactured. Therefore, a heat flow measuring device in which the heat flux sensor and the thermocouple sheet are suppressed from being peeled off is manufactured.

The reference numerals in parentheses attached to each component or the like indicate an example of the correspondence between the component or the like and the specific component or the like described in the embodiment described later.

It is a top view of the heat flow measuring apparatus in 1st Embodiment. It is sectional drawing along the line II-II in FIG. It is a figure which shows the experimental result about the heat treatment time and the crystallinity. It is a figure which shows the experimental result about the heat treatment time, and the CN expansion and contraction vibration of an imide ring. It is a figure which shows the experimental result about a wave number and an absorbance. It is a figure which shows the experimental result about the heat treatment time and the peel strength. It is a figure which shows the experimental result about the ultraviolet exposure amount and the peel intensity. It is a figure which shows the experimental result about the presence or absence of peeling or breakage in the case where there is no protective member, and the case where there is a protective member. It is a schematic diagram which shows the state which the heat flow measuring apparatus shown in FIG. 2 is installed in the measurement object. It is sectional drawing along the X-X line in FIG. It is a graph which shows typically the output characteristic of the heat flux sensor which constitutes a heat flow measuring apparatus, and the output characteristic of a thermocouple sheet. It is a flowchart which shows the manufacturing process of the heat flow measuring apparatus in 1st Embodiment. It is a flowchart which shows the thermocouple sheet forming process in FIG. FIG. 13 is a plan view showing a state in which the first insulating sheet and the thermocouple are laminated in the thermocouple laminate forming step in FIG. 13. It is sectional drawing along the XV-XV line in FIG. FIG. 13 is a plan view showing a state in which the first insulating sheet and the thermocouple in the thermocouple laminate forming step in FIG. 13 are laminated and fixed. FIG. 13 is a plan view showing a state in which the first insulating sheet, the thermocouple, and the second insulating sheet are laminated in the thermocouple laminate forming step in FIG. 13. It is sectional drawing which shows the pressing process in FIG. It is a top view which shows the cutting part which is cut in the cutting process in FIG. It is a top view which shows the thermocouple sheet cut in the cutting process in FIG. It is sectional drawing which shows the process of preparing the surface protection member in the member preparation process for a heat flux sensor in FIG. 12. It is sectional drawing which shows the process of preparing the insulating base material in the member preparation process for a heat flux sensor in FIG. 12. It is sectional drawing which shows the process of preparing the back surface protection member in the member preparation process for a heat flux sensor in FIG. 12. It is a top view which shows the protection member prepared in the protection sheet preparation process in FIG. It is a top view which shows the laminated body forming process in FIG. It is sectional drawing along the line XXIV-XXIV in FIG. It is a top view of the other side of the heat flow measuring apparatus in 2nd Embodiment. It is a top view which shows the cutting part which is cut in the cutting process in 2nd Embodiment.

Hereinafter, embodiments of the present invention will be described with reference to the drawings. In each of the following embodiments, the parts that are the same or equal to each other will be described with the same reference numerals.

(First Embodiment)
The first embodiment will be described with reference to the drawings. As shown in FIGS. 1 and 2, the heat flow measuring device 1 of the present embodiment is configured by integrating a heat flux sensor 10 and a thermocouple sheet 20 having a thermocouple 200. In FIG. 1, assuming that the surface protection member 110 described later is transparent or translucent, the positions of the plurality of surface wiring patterns 111 are shown by solid lines.

First, the configuration of the heat flux sensor 10 will be described.

In the heat flux sensor 10, the insulating base material 100, the front surface protection member 110, and the back surface protection member 120 are integrated, and the first and second interlayer connection members 130 and 140 are alternately connected in series inside the integrated body. It is said to have a structure. In this embodiment, the first and second interlayer connection members 130 and 140 correspond to thermoelectric conversion elements.

The insulating base material 100 is in the form of a plate-like film composed of a flexible thermoplastic resin. A plurality of first via holes 101 and second via holes 102 penetrating in the thickness direction are alternately formed on the insulating base material 100. In the present embodiment, the insulating base material 100 is configured by laminating a thermoplastic polyimide, a thermoplastic polyetherimide, and a thermoplastic polyimide in this order. The thermoplastic polyimide is a portion that functions as a fusion layer when it is joined to another member.

The first interlayer connecting member 130 is arranged in the first via hole 101, and the second interlayer connecting member 140 is embedded in the second via hole 102. That is, the first interlayer connecting member 130 and the second interlayer connecting member 140 are embedded in the insulating base material 100 so as to be staggered.

The first interlayer connection member 130 and the second interlayer connection member 140 are made of thermoelectric materials such as metals and semiconductors having different thermoelectric abilities so as to exert the Seebeck effect. For example, in the first interlayer connection member 130, the powder of the Bi (bismas) -Sb (antimon) -Te (tellu) alloy constituting the P type maintains the crystal structure of a plurality of metal atoms before sintering. It is composed of a solid-phase sintered metal compound. Further, for example, the second interlayer connection member 140 is a metal compound in which the powder of the Bi-Te alloy constituting the N type is solid-phase sintered so as to maintain the crystal structure of a plurality of metal atoms before sintering. It is composed.

In FIG. 1, which is a plan view of the heat flow measuring device 1, the first and second interlayer connection members 130 and 140 are hidden by the surface wiring pattern 111 described later, but for the sake of easy understanding, the first and second interlayers are hidden. The positions of the connecting members 130 and 140 are indicated by broken lines, and hatching is applied to them.

The surface protection member 110 is in the form of a plate-like film composed of a thermoplastic resin, and is arranged so as to cover the surface 100a of the insulating base material 100. In the present embodiment, the surface protection member 110 is configured by laminating a thermoplastic polyimide, a thermosetting polyimide, and a thermoplastic polyimide in this order. The thermoplastic polyimide is a portion that functions as a fusion layer when it is joined to another member.

Further, the surface protection member 110 is formed longer in one of the surface directions than the insulating base material 100, and extends from the insulating base material 100 in one of the surface directions. In FIG. 2, the surface protection member 110 extends to the right side of the paper surface from the insulating base material 100.

The surface protection member 110 is formed with a plurality of surface wiring patterns 111 in which a copper foil or the like is patterned on one side 110a facing the insulating base material 100. The plurality of surface wiring patterns 111 are electrically connected to one end of the first interlayer connection member 130 and one end of the second interlayer connection member 140 adjacent thereto.

The back surface protective member 120 is in the form of a plate-shaped film composed of a thermoplastic resin, and is arranged so as to cover the back surface 100b of the insulating base material 100. In the present embodiment, the back surface protective member 120 is configured by laminating a thermoplastic polyimide, a thermosetting polyimide, and a thermoplastic polyimide in this order. The thermoplastic polyimide is a portion that functions as a fusion layer when it is joined to another member.

Further, the back surface protective member 120 is formed longer in one of the surface directions than the insulating base material 100, and extends from the insulating base material 100 in one of the surface directions. In FIG. 2, the back surface protective member 120 extends to the right side of the paper surface from the insulating base material 100.

The back surface protective member 120 is formed with a plurality of back surface wiring patterns 121 in which copper foil or the like is patterned on the one surface 120a side facing the insulating base material 100. The plurality of back surface wiring patterns 121 are electrically connected to the other end of the first interlayer connection member 130 and the other end of the second interlayer connection member 140 adjacent thereto.

More specifically, the front surface wiring pattern 111 and the back surface wiring pattern 121 are formed so that the first interlayer connection member 130 and the second interlayer connection member 140 adjacent to each other are alternately folded and connected. That is, the front surface wiring pattern 111 and the back surface wiring pattern 121 are formed so that the first interlayer connection member 130 and the second interlayer connection member 140 are connected in series.

Further, the back surface protection member 120 is bent toward the surface protection member 110 at a position extending in the plane direction from the insulating base material 100, and is fused with the surface protection member 110. The back surface protection member 120 extends longer than the front surface protection member 110, and a part of the front surface 120a is exposed from the surface protection member 110.

Of the back surface wiring patterns 121, the portions that are the ends of the first and second interlayer connection members 130 and 140 connected in series are the extension wirings 122 and 123, and the back surface protection member 120 is the insulating base material 100. It is also extended to a position that extends in the plane direction. Further, the extension wirings 122 and 123 in the back surface wiring pattern 121 are extended to a portion where the back surface protection member 120 extends further than the front surface protection member 110 and are exposed at the portion. The extension wirings 122 and 123 in the back surface wiring pattern 121 function as pad portions 124 and 125 in which the exposed portions are electrically connected to the wiring portions 43 and 44 described later.

The above is the configuration of the heat flux sensor 10. Then, in such a heat flux sensor 10, when the heat flux flows between one surface and the other surface in the thickness direction, one end of the first and second interlayer connection members 130 and 140 and the other end thereof. There is a temperature difference with the end. At this time, in the heat flux sensor 10, thermoelectromotive force is generated in the first and second interlayer connection members 130 and 140 due to the Seebeck effect. Therefore, the heat flux sensor 10 outputs this thermoelectromotive force as a sensor signal (for example, a voltage signal).

Next, the configuration of the thermocouple sheet 20 will be described.

The thermocouple sheet 20 is configured by integrating the thermocouple 200, the first insulating sheet 210, and the second insulating sheet 220, and has a substantially rectangular shape in a plane. The thermocouple 200 is configured by joining the first conductor 201 and the second conductor 202, which are made of metals having different thermoelectric abilities, by welding or the like so as to exert the Seebeck effect. The portion where the first conductor 201 and the second conductor 202 are joined becomes a joint portion 203 for detecting the temperature. The first conductor 201 and the second conductor 202 of the present embodiment are made of a metal foil.

The first insulating sheet 210 and the second insulating sheet 220 are configured to contain a thermoplastic resin and are in the form of a plate-shaped film. In the present embodiment, the first insulating sheet 210 and the second insulating sheet 220 have a laminated structure in which a thermoplastic polyimide, a thermosetting polyimide, and a thermoplastic polyimide are laminated in this order. The thermoplastic polyimide is a portion that functions as a fusion layer when it is joined to another member.

The first insulating sheet 210 is arranged so as to cover the thermocouple 200 from one side in a direction intersecting the arrangement direction of the first conductor 201 and the second conductor 202. The second insulating sheet 220 is arranged so as to cover the thermocouple 200 from the side opposite to the first insulating sheet 210. That is, the thermocouple sheet 20 has a configuration in which the thermocouple 200 is covered with the first insulating sheet 210 and the second insulating sheet 220.

Further, the first insulating sheet 210 is formed longer than the second insulating sheet 220 in one of the surface directions, and extends from the second insulating sheet 220 in one of the surface directions. The first conductor 201 and the second conductor 202 constituting the thermocouple 200 are exposed from the second insulating sheet 220 side at a position where the first insulating sheet 210 extends longer than the second insulating sheet 220. .. Therefore, in the thermocouple sheet 20, the pad portion 204 in which the portion of the first conductor 201 and the second conductor 202 exposed from the second insulating sheet 220 is electrically connected to the wiring portions 41 and 42 described later. , 205.

The above is the configuration of the thermocouple sheet 20. In such a thermocouple sheet 20, when a temperature difference occurs between the joint portion 203 and the portion on the pad portions 204 and 205 (for example, the detection portion 40 described later), a thermoelectromotive force is applied to the joint portion 203 due to the Seebeck effect. Occurs. Therefore, the thermocouple sheet 20 outputs this thermoelectromotive force as a sensor signal (for example, a voltage signal).

The heat flow measuring device 1 is configured by integrating the heat flux sensor 10 and the thermocouple sheet 20. Specifically, in the present embodiment, in the heat flux sensor 10, the portion of the back surface protection member 120 extending in the surface direction from the insulating base material 100 is bent toward the surface protection member 110 and fused with the surface protection member 110. I'm wearing it. Further, the thermocouple sheet 20 is arranged on the side opposite to the front surface protection member 110 with the back surface protection member 120 interposed therebetween at the position where the front surface protection member 110 and the back surface protection member 120 are fused. The thermocouple sheet 20 is integrated with the heat flux sensor 10 by fusing the first and second insulating sheets 210 and 220 with the back surface protective member 120. Specifically, in the present embodiment, the thermoplastic polyimide constituting the back surface protective member 120 and the thermoplastic polyimides constituting the first and second insulating sheets 210 and 220 are fused and integrated.

Hereinafter, in the heat flow measuring device 1, the surface of the surface protection member 110 opposite to the one surface 110a is referred to as one surface 1a of the heat flow measuring device 1, and the surface opposite to the one surface 1a is also referred to as the other surface 1b.

Here, as described above, in the heat flow measuring device 1 in which the heat flux sensor 10 and the thermocouple sheet 20 are integrated, peeling may occur from the end of the boundary between the heat flux sensor 10 and the thermocouple sheet 20. There is sex. That is, there is a possibility that peeling may occur from the end of the boundary between the back surface protective member 120 in the heat flux sensor 10 and the first and second insulating sheets 210 and 220 in the thermocouple sheet 20.

Therefore, the present inventors have diligently investigated the cause of such peeling. Then, although the clear principle is not clear, the present inventors estimated as follows based on the characteristics of the thermoplastic resin. That is, it is estimated that the fusion strength of the thermoplastic resin decreases as the crystallinity increases. Therefore, the present inventors have a high crystallinity between the thermoplastic resin of the back surface protective member 120 in the heat flux sensor 10 and the thermoplastic resins of the first and second insulating sheets 210 and 220 in the thermocouple sheet 20. Therefore, it is presumed that the fusion strength between the back surface protective member 120 and the first and second insulating sheets 210 and 220 is lowered. The degree of crystallinity indicates the ratio of crystallinity to the whole when crystalline and amorphous are mixed, and it means that the larger the crystallinity, the higher the ratio of crystalline. ..

That is, as will be described in detail later, when the heat flow measuring device 1 is manufactured, the heat treatment is performed a plurality of times. Therefore, the present inventors assumed that the crystallinity of the thermoplastic resin is advanced by the heat treatment. Then, the present inventors investigated the relationship between the heat treatment time and the crystallinity in the thermoplastic resin by using the oblique incident X-ray diffraction method (that is, the In-Plane diffraction method), and conducted the experiment shown in FIG. I got the result. Note that FIG. 3 shows the experimental results obtained by heat-treating at 320 ° using polyimide, which is a thermoplastic resin.

As shown in FIG. 3, the crystallinity is 7% when the heat treatment is not performed (that is, the heat treatment time in FIG. 3 is 0) and when the heat treatment is performed for 10 minutes. However, when the heat treatment was performed for 480 minutes, it was 13%. That is, it is confirmed that the crystallinity increases as the heat treatment is performed for a long time. The oblique incident X-ray diffraction method is a method generally used for measuring a crystallization degree of about 30%, and an error is included when measuring a crystallization degree of less than 10%. Conceivable. Therefore, it is presumed that the reason why the crystallinity is the same between the case where the heat treatment is not performed and the case where the heat treatment is performed for 10 minutes is due to an error.

Therefore, the present inventors conducted the following experiments in order to investigate the state of the thermoplastic resin while the heat treatment time was between 0 and 10 minutes. That is, the present inventors cannot directly derive the crystallinity, but can evaluate the crystallinity by the composition change before and after the heat treatment, etc., and the Fourier transform infrared spectrophotometer (that is, FT-IR). ) Was used to examine the CN expansion and contraction vibration of the imide ring. Then, the present inventors obtained the experimental results shown in FIGS. 4 and 5. As for the relationship between the CN expansion and contraction vibration of the imide ring and the crystallinity, the CN expansion and contraction vibration of the imide ring is inhibited as the crystallinity increases (that is, the crystallization progresses), so that the imide ring It is shown that the smaller the CN expansion / contraction vibration of the above, the higher the crystallinity.

As shown in FIGS. 4 and 5, it is confirmed that the CN expansion / contraction vibration of the imide ring becomes smaller as the heat treatment time is lengthened. Therefore, it is confirmed that the crystallinity is increased by executing the heat treatment. In Sample 3 in FIGS. 4 and 5, the CN expansion and contraction vibration of the imide ring is larger than that in Sample 2, but it is presumed to be a measurement error.

Then, the present inventors conducted a heat treatment on a resin member made of a thermoplastic resin, and then prepared and examined a sample in which copper wiring was heat-bonded, and examined the relationship between the heat treatment time and the peel strength. The experimental results shown in FIG. 6 were obtained. Note that FIG. 6 shows the results when the heat treatment time is 320 ° C. Further, the thermoplastic resin here is polyimide.

As shown in FIG. 6, it is confirmed that the peel strength decreases as the heat treatment time increases. That is, it is confirmed that the fusion strength of the thermoplastic resin decreases as the crystallinity increases.

The present inventors also considered that the fusion strength between the copper wiring and the resin member is improved by performing the roughening treatment by irradiating the surface of the resin member made of the thermoplastic resin with ultraviolet rays. .. However, as a result of actual examination, as shown in FIG. 7, the peel strength hardly changed even when the surface was roughened. From this, it is presumed that the fusion strength of the thermoplastic resin depends on the crystallinity. FIG. 7 shows the results when a resin member made of a thermoplastic resin is heat-treated at 320 ° C. for 480 minutes, and then irradiated with ultraviolet rays to thermocompression-bond the copper wiring.

Therefore, as shown in FIG. 2, the heat flow measuring device 1 of the present embodiment is made of a thermoplastic resin in a portion constituting the boundary so as to cover the end of the boundary between the heat flux sensor 10 and the thermocouple sheet 20. Also, a protective sheet 30 having a small degree of crystallinity is arranged.

In the present embodiment, as will be described in detail later, the heat flow measuring device 1 is arranged so that the other surface 1b side faces the measurement object 2 as shown in FIG. Then, in the heat flow measuring device 1 arranged in this way, it is assumed that the portion on the thermocouple sheet 20 side is pulled along the substantially normal direction with respect to the one surface 1a and the other surface 1b. That is, the heat flow measuring device 1 arranged in this way separates the heat flux sensor 10 and the thermocouple sheet 20 from the heat flux sensor 10 and the thermocouple sheet 20 at the end of the boundary between the heat flux sensor 10 and the thermocouple sheet 20 at the portion farthest from the surface 1a. The largest stress is applied. Further, in the present embodiment, as will be described later, in the heat flow measuring device 1, the end portions on the pad portions 124, 125, 204, and 205 sides are pressed by the shielded wire 45. That is, the end portions on the pad portions 124, 125, 204, and 205 sides of the end portions of the boundary between the heat flux sensor 10 and the thermocouple sheet 20 are pressed by the shielded wire 45 and are difficult to peel off.

Therefore, in the present embodiment, assuming that the portion of the boundary between the heat flux sensor 10 and the thermocouple sheet 20 that is farthest from one surface 1a is the boundary end A, the boundary is covered so as to cover the boundary end A. A protective sheet 30 having a lower crystallinity than the thermoplastic resin in the portion constituting the above is arranged. In other words, the protective sheet 30 having a smaller thermal history than the thermoplastic resin of the portion constituting the boundary is arranged so as to cover the boundary end portion A. That is, the protective sheet 30 so as to cover the boundary end portion A has a higher fusion strength with the thermoplastic resin at the portion constituting the boundary than the fusion strength between the thermoplastic resins at the portion constituting the boundary. Have been placed. As a result, it is possible to suppress the occurrence of peeling from the boundary end portion A.

In the present embodiment, the protective sheet 30 is in the form of a film containing a thermoplastic resin, and is made of, for example, a thermoplastic polyimide. In the present embodiment, the thermoplastic resin of the portion constituting the boundary is the thermoplastic polyimide in the back surface protection member 120 and the thermoplastic polyimide in the first and second insulating sheets 210 and 220.

Further, in the present embodiment, the protective sheet 30 has a size in which the portion of the second insulating sheet 220 opposite to the first insulating sheet 210 is completely covered. Therefore, in the present embodiment, the other surface 1b in the heat flow measuring device 1 is composed of the back surface protective member 120 and the protective sheet 30 of the heat flux sensor 10.

The above is the configuration of the heat flow measuring device 1 in the present embodiment. Then, the present inventors have determined whether or not the heat flow measuring device 1 in which the protective sheet 30 is arranged and the heat flow measuring device 1 in which the protective sheet 30 is not provided are peeled off or broken when bent. The experimental results shown in FIG. 8 were obtained. In addition, in FIG. 8, the case where peeling or breakage did not occur is shown as “O”, and the case where peeling or breakage occurred is shown as “X”. Further, “without protective sheet” in FIG. 8 means that the heat flow measuring device 1 is not provided with the protective sheet 30, and the other surface 1b of the heat flow measuring device 1 is the back surface protective member 120 of the heat flux sensor 10 and the thermocouple sheet. It is a heat flow measuring device 1 composed of the second insulating sheet 220 of 20. That is, “without protective sheet” means the heat flow measuring device 1 in which the boundary end portion A is located on the other surface 1b.

As shown in FIG. 8, when the protective sheet 30 is not arranged, it is confirmed that peeling occurs when the curvature R is 9.5 mm or less. The curvature R of 9.5 mm corresponds to bending at about 90 °. That is, the curvature R of 9.5 mm means that the portion of the surface protection member 110 located on the first and second interlayer connection members 130 and 140 and the portion of the surface protection member 110 located on the thermocouple sheet 20. It means that the heat flow measuring device 1 is bent so that the angle formed with the portion to be formed is about 90 °.

On the other hand, in the heat flow measuring device 1 of the present embodiment in which the protective sheet 30 is arranged, it is confirmed that peeling does not occur even when the curvature R is 9.5 mm. Further, in the heat flow measuring device 1 of the present embodiment, it is confirmed that peeling does not occur even if the curvature R is 6.5 mm. The curvature R of 6.5 mm corresponds to bending at about 180 °. That is, the curvature R of 6.5 mm means that the portion of the surface protection member 110 located on the first and second interlayer connection members 130 and 140 and the portion of the surface protection member 110 located on the thermocouple sheet 20. It means that the heat flow measuring device 1 is bent so that the angle formed with the portion to be formed is about 180 °.

Then, in the heat flow measuring device 1 of the present embodiment, it was confirmed that the base metal fracture occurred when the heat flow measuring device 1 was completely bent. That is, in the heat flow measuring device 1 of the present embodiment, the occurrence of peeling can be suppressed by arranging the protective sheet 30.

Such a heat flow measuring device 1 is used by being attached to the surface 3 of the object to be measured 2, for example, as shown in FIGS. 9 and 10. In FIG. 9, the heat generation source 4 inside the measurement object 2 is schematically shown by a broken line.

For example, as shown in FIGS. 9 and 10, the heat flow measuring device 1 is arranged via the joining member 5 with the other surface 1b facing the measurement object 2 side. As the joining member 5, a double-sided tape, an adhesive, or the like is used.

Then, the pad portions 124 and 125 of the heat flux sensor 10 are connected to the wiring portions 41 and 42, respectively. The pad portions 204 and 205 of the thermocouple sheet 20 are connected to the wiring portions 43 and 44, respectively. Each of the wiring units 41 to 44 passes through the inside of the tubular shielded wire 45 and is connected to the detection unit 40. As a result, the output signal of the heat flux sensor 10 and the output signal of the thermocouple sheet 20 are input to the detection unit 40, respectively.

Further, in the present embodiment, the shielded wire 45 is composed of a heat-shrinkable tube, and is fixed to the heat flow measuring device 1 so as to accommodate the pad portions 124, 125, 204, 205. Specifically, it is fixed to the surface protective member 110, the protective sheet 30, etc. near the pad portions 124, 125, 204, 205 in the heat flow measuring device 1. Therefore, the ends of the pad portions 124, 125, 204, and 205 at the boundary between the heat flux sensor 10 and the thermocouple sheet 20 are in a state of being pressed by the shielded wire 45, which makes it difficult to peel off. ..

Further, the shielded wire 45 of the present embodiment is provided with a conductor (not shown) for preventing the intrusion of electromagnetic waves from the outside. This conductor is formed in a cylindrical shape so as to surround the wiring inside the shielded wire 45. Then, the conductor is electrically connected to the object to be measured 2 through the wiring unit 46, and is also connected to the ground 47 in the detection unit 40. This makes it possible to reduce noise with respect to the voltage signals output by the heat flux sensor 10 and the thermocouple sheet 20.

The detection unit 40 includes a CPU (abbreviation of Central Processing Unit), RAM (abbreviation of Random Access Memory), ROM (abbreviation of Read Only Memory), flash memory, and the like. Then, the detection unit 40 executes the program stored in the ROM and the flash memory by the CPU, and uses the RAM as a work area at the time of execution. The detection unit 40 realizes the function described in the program by such operation of the CPU. The RAM, ROM, and flash memory are non-transitional substantive storage media.

Specifically, the detection unit 40 transfers the heat generated by the heat generation source 4 inside the measurement object 2 from the inside of the measurement object 2 to the surface 3, so that the output signal of the heat flux sensor 10 and the thermocouple sheet The heat flow flowing through the surface 3 is measured based on the output signal of 20. The detection unit 40 may be capable of calculating the amount of heat generated by the heat generation source 4 of the measurement target 2 based on the heat flow measured on the surface 3 of the measurement target 2.

Here, an example of the output signal of the heat flux sensor 10 and the output signal of the thermocouple sheet 20 detected by the detection unit 40 will be described with reference to FIG. 11. In FIG. 11, the output signal of the thermocouple sheet 20 is schematically shown by the solid line A, and the output signal of the heat flux sensor 10 is schematically shown by the solid line B.

In this example, it is assumed that the outside air temperature gradually rises from time t0 to time t4 and gradually decreases from time t4 to time t8. Further, it is assumed that the temperature of the detection unit 40 is substantially constant from the time t0 to the time t8.

The temperature of the surface 3 of the object to be measured 2 rises with an increase in the outside air temperature, and decreases with a decrease in the outside air temperature. Therefore, as shown by the solid line A, the output signal of the thermocouple sheet 20 gradually increases from time t0 to time t4, and gradually decreases from time t4 to time t8.

On the other hand, the heat flux on the surface 3 of the measurement object 2 flows from the outside air side to the measurement object 2 side as the outside air temperature rises, and flows from the measurement object 2 side to the outside air side as the outside air temperature decreases. Therefore, as shown by the solid line B, the output signal of the heat flux sensor 10 gradually decreases from time t0 to time t4, and gradually increases from time t4 to time t8. That is, the output signal of the thermocouple sheet 20 and the output signal of the heat flux sensor 10 show behavior in the opposite direction to the heat flow flowing on the surface 3 of the object 2 to be measured due to the change in the outside temperature.

Here, it is assumed that heat is generated in the heat generation source 4 inside the measurement object 2 between the time t1 and the time t2, and between the time t5 and the time t6. At this time, the heat generated by the heat generation source 4 is transmitted from the inside of the object to be measured 2 to the surface 3, and the heat flow flows on the surface 3. Therefore, both the output signal of the thermocouple sheet 20 and the output signal of the heat flux sensor 10 rise between the time t1 and the time t2, and the output signal of the thermocouple sheet 20 between the time t2 and the time t3. And the output signal of the heat flux sensor 10 are both descending. Further, both the output signal of the thermocouple sheet 20 and the output signal of the heat flux sensor 10 rise between the time t5 and the time t6, and the output signal of the thermocouple sheet 20 and the time t7 between the time t6 and the time t7. Both of the output signals of the heat flux sensor 10 are descending. That is, the output signal of the thermocouple sheet 20 and the output signal of the heat flux sensor 10 are such that the heat generated by the heat generation source 4 inside the measurement object 2 is transmitted to the inside of the measurement object 2 and the measurement object 2 has. It behaves in the same direction with respect to the heat flow flowing through the surface 3.

Therefore, the detection unit 40 can remove the heat flow flowing on the surface 3 of the measurement object 2 due to the change in the outside temperature by comparing the output signal of the heat flux sensor 10 with the output signal of the thermocouple sheet 20. Then, the detection unit 40 can detect only the heat flow flowing on the surface 3 of the measurement object 2 due to the heat generated by the heat generation source 4 inside the measurement object 2.

Next, a method of manufacturing the heat flow measuring device 1 will be described. In the following, a method of simultaneously manufacturing a plurality of heat flow measuring devices 1 will be described.

As shown in FIG. 12, the heat flow measuring device 1 of the present embodiment has a thermocouple sheet forming step S10, a heat flux sensor member preparing step S20, a protective sheet preparing step S30, a laminate forming step S40, and an integral pressing step. Manufactured by performing S50.

First, the thermocouple sheet forming step S10 in the manufacturing method of the heat flow measuring device 1 will be described. In the thermocouple sheet forming step, as shown in FIG. 13, the thermocouple sheet 20 is formed by performing the thermocouple preparation step S11, the thermocouple laminate forming step S12, the pressing step S13, and the cutting step S14.

Specifically, in the thermocouple preparation step S11, the first conductor 201 and the second conductor 202, which are made of metal foils having different thermoelectric abilities, are prepared. Then, the tips of the first conductor 201 and the second conductor 202 are joined to each other by welding or the like to form the joint portion 203. As a result, the thermocouple 200 is prepared.

Subsequently, in the thermocouple laminate forming step S12, as shown in FIGS. 14 and 15, the first release paper 61 and the first insulating sheet 210 are sequentially placed on the jig base 50 formed in a predetermined size. Deploy. Next, the end positioning jig 51 and the center positioning jig 52 are fixed to the jig base 50 from above the first release paper 61 and the first insulating sheet 210 with bolts 53, and the first release paper 61 and the first release paper 61 are fixed. 1 Fix the insulating sheet 210 to the jig base 50.

Specifically, the first release paper 61 and the first insulating sheet 210 have a flat rectangular shape. Then, the end positioning jig 51 is fixed to the jig base 50 so that the pair of opposite ends of the first release paper 61 and the first insulating sheet 210 are fixed to the jig base 50, respectively. That is, in this embodiment, the two end positioning jigs 51 are fixed to the jig base 50. Further, the central positioning jig 52 is arranged in the central portion between the two end positioning jigs 51, and the central positioning jig 52 is fixed to the jig base 50.

The end positioning jig 51 and the central positioning jig 52 of the present embodiment are formed with a plurality of groove portions 54 and 55 for positioning the thermocouple 200, respectively. Specifically, each end positioning jig 51 is formed with a plurality of groove portions 54 in a portion located on the other end positioning jig 51 side. The central positioning jig 52 is formed with a plurality of groove portions 55 in portions located on the side of each end positioning jig 51. Further, in the present embodiment, as the first release paper 61, for example, a thermosetting resin sheet or a thermoplastic resin sheet made of an aramid resin or the like is used. As the first insulating sheet 210, as described above, a thermosetting polyimide, a thermoplastic polyimide, and a thermosetting polyimide laminated in this order are used.

Then, the thermocouple 200 formed in the thermocouple preparation step S11 is arranged on the first insulating sheet 210. In the present embodiment, since the end positioning jig 51 and the central positioning jig 52 are formed with a plurality of groove portions 54 and 55, a plurality of groove portions 54 and 55 are formed on the first insulating sheet 210 in accordance with the groove portions 54 and 55. The thermocouple 200 is arranged. The plurality of thermocouples 200 are arranged in the direction in which the plurality of groove portions 54 and 55 provided in the end positioning jig 51 and the central positioning jig 52 are lined up, and face each other with the central positioning jig 52 interposed therebetween. Arranged like this. Further, in each thermocouple 200, the joint portion 203 is arranged so as to face the central positioning jig 52 side.

Subsequently, as shown in FIG. 16, the holding jig 56 is fixed to the jig base 50 from above the first release paper 61, the first insulating sheet 210, and the thermocouple 200 with bolts 53, and the first release is performed. The pattern 61, the first insulating sheet 210, and the thermocouple 200 are fixed to the jig base 50. Specifically, since the joint portion 203 of the thermocouple 200 is arranged toward the central positioning jig 52 side, the holding jig 56 is arranged on the portion opposite to the joint portion 203 side. As a result, the misalignment of the first release paper 61, the first insulating sheet 210, and the thermocouple 200 is suppressed. After that, the central positioning jig 52 is removed from the jig base 50.

Next, as shown in FIG. 17, the second insulating sheet 220 is arranged on the first release paper 61, the first insulating sheet 210, and the thermocouple 200. As a result, a laminated body of thermocouple 200 is formed. The second insulating sheet 220 is arranged on the first insulating sheet 210 so that the end portion of the thermocouple 200 opposite to the joint portion 203 is exposed while covering the joint portion 203 of the thermocouple 200. Further, as the second insulating sheet 220, as described above, a thermosetting polyimide, a thermoplastic polyimide, and a thermosetting polyimide laminated in this order are used.

Next, in the pressing step S13, the first insulating sheet 210, the thermocouple 200, and the second insulating sheet 220 are heated while being pressurized in the stacking direction (hereinafter, simply referred to as the stacking direction) to form the first insulating sheet 210. , The thermocouple 200 and the second insulating sheet 220 are integrated.

Specifically, as shown in FIG. 18, the jig base 50 on which the first insulating sheet 210, the thermocouple 200, and the second insulating sheet 220 are laminated is installed in the press machine 70. At this time, in the present embodiment, the second release paper 62 and the first cushioning material 81 are further arranged on the first insulating sheet 210. As the second release paper 62, for example, a thermosetting resin sheet or a thermoplastic resin sheet formed of an aramid resin or the like is used. Further, as the first cushioning material 81, for example, Teflon (registered trademark) or a polyimide resin is used.

Then, the press machine 70 heats the material while pressurizing it in the stacking direction, and fuses and integrates the first insulating sheet 210, the thermocouple 200, and the second insulating sheet 220. For example, in this step, the pressure of the press 70 is 2 MPa or more and the temperature is 300 ° C. or more. As a result, the thermoplastic resins (that is, the fused layers) of the first insulating sheet 210 and the second insulating sheet 220 are fused to each other, and the integrated sheet 20a having the plurality of thermocouples 200 shown in FIG. 19 is formed. Will be done.

The pressing step S13 is performed in a heated state. Therefore, the crystallization of the thermoplastic resin constituting the first insulating sheet 210 and the second insulating sheet 220 proceeds. Therefore, the first insulating sheet 210 and the second insulating sheet 220 are in a state where the crystallinity is higher after the pressing step S13 than before the pressing step S13.

Subsequently, in the cutting step S14, the integrated sheet 20a is cut at the first to fourth cutting points C1 to C4 shown by the alternate long and short dash line in FIG. As a result, as shown in FIG. 20, the thermocouple sheet 20 formed to a predetermined mounting size is formed. The thermocouple sheet 20 has a configuration having a plurality of thermocouples 200.

The above is the thermocouple sheet forming step S10. Next, the heat flux sensor member preparing step S20 in the manufacturing method of the heat flow measuring device 1 will be described. In the heat flux sensor member preparation step S20, as shown in FIG. 21A, the surface protection member 110 on which the surface wiring pattern 111 is formed is prepared. In the present embodiment, a copper foil is formed on the surface protection member 110 by thermocompression bonding or the like, and the copper foil is patterned to prepare the surface protection member 110 on which the surface wiring pattern 111 is formed. Since the surface protection member 110 is in a heated state when the copper foil is thermocompression bonded or the like, crystallization proceeds. Further, the surface protection member 110 is prepared to have a length in the surface direction longer than that of the insulating base material 100.

Further, in the heat flux sensor member preparation step S20, as shown in FIG. 21B, the first and second conductive paste 131 constituting the first and second interlayer connection members 130 and 140 on the insulating base material 100, Prepare one filled with 141. For example, in this step, first, a plurality of first via holes 101 are formed in the insulating base material 100 by a drill, a laser, or the like. Then, a mask is appropriately arranged, and the first via hole 101 is filled with the first conductive paste 131 constituting the first interlayer connection member 130.

Next, a plurality of second via holes 102 are formed in the insulating base material 100 again by a drill, a laser, or the like. The plurality of second via holes 102 are formed so as to be located between the adjacent first via holes 101. That is, the second via hole 102 is formed so that the first and second via holes 101 and 102 are staggered. Then, a mask is appropriately arranged, and the second via hole 102 is filled with the second conductive paste 141 constituting the second interlayer connection member.

As the first conductive paste 131, a paste obtained by adding an organic solvent such as paraffin to a powder of a Bi-Sb-Te alloy in which a metal atom maintains a predetermined crystal structure is used. The second conductive paste 141 is made by adding an organic solvent such as telepine to a paste of a Bi—Te alloy powder in which a metal atom different from the metal atom constituting the first conductive paste 131 maintains a predetermined crystal structure. Is used. In this case, paraffin or the like may be used as the organic solvent for the second conductive paste 141.

Further, in the heat flux sensor member preparation step S20, as shown in FIG. 21C, the back surface protection member 120 on which the back surface wiring pattern 121 is formed is prepared. In the present embodiment, similarly to the front surface protection member 110, a copper foil is formed on the back surface protection member 120 by thermocompression bonding or the like, and the back surface protection member 120 on which the back surface wiring pattern 121 is formed is formed by patterning the copper foil. prepare. Since the back surface protection member 120 is in a heated state when the copper foil is thermocompression bonded or the like, crystallization proceeds. Further, the back surface protective member 120 is prepared to have a length in the surface direction longer than that of the insulating base material 100.

The above is the member preparation step S20 for the heat flux sensor. Next, the protective sheet preparation step S30 in the manufacturing method of the heat flow measuring device 1 is performed. In the protective sheet preparation step S30, the protective sheet 30 made of a thermoplastic resin is prepared. Specifically, from the first and second insulating sheets 210 and 220 after the thermocouple sheet forming step S10 is performed, and the back surface protection member 120 after the heat flux sensor member preparing step S20 is performed. A protective sheet 30 having a small degree of crystallinity is prepared. For example, such a protective sheet 30 is prepared which is made of thermoplastic polyimide and has not been heat-treated.

Further, as shown in FIG. 22, the protective sheet 30 of the present embodiment has a substantially rectangular shape. Then, when the protective sheet 30 is arranged below the thermocouple sheet 20 in the laminate forming step S40 described later, a recess portion 31 for improving the strength against torsion is formed at the end portion on the joint portion 203 side. Has been done.

Subsequently, the laminate forming step S40 in the manufacturing method of the heat flow measuring device 1 is performed. In the laminate forming step S40, as shown in FIGS. 23 and 24, a press machine 71 having a pair of lower press plates 71a and upper press plates 71b is prepared. Then, the back surface protective member 120, the insulating base material 100, the surface protective member 110, the thermocouple sheet 20, and the protective sheet 30 are arranged between the lower press plate 71a and the upper press plate 71b. Note that FIG. 23 also corresponds to the XXIII-XXIII cross section in FIG. 24.

Specifically, first, the third release paper 63 is arranged on the lower press plate 71a. Then, the protective sheet 30 is arranged on the third release paper 63, and the thermocouple sheet 20 is arranged on the protective sheet 30. At this time, the side of the protective sheet 30 opposite to the pads 204 and 205 of the thermocouple sheet 20 is made to protrude from the thermocouple sheet 20.

Then, the back surface protective member 120 on which the back surface wiring pattern 121 is formed is arranged so as to cover the third release paper 63, the protective sheet 30, and the thermocouple sheet 20. Next, the insulating base material 100 is arranged in a portion of the back surface protective member 120 that is different from the portion located on the protective sheet 30 and the thermocouple sheet 20. Then, the surface protection member 110 on which the surface wiring pattern 111 is formed is arranged on the insulating base material 100. Further, in the present embodiment, the fourth release paper 64 and the second cushioning material 82 are arranged on the surface protection member 110. As the third and fourth release papers 63 and 64, for example, a thermosetting resin sheet or a thermoplastic resin sheet formed of an aramid resin or the like is used. Further, as the second cushioning material 82, for example, Teflon or a polyimide resin is used.

In the present embodiment, the back surface protective member 120, the insulating base material 100, the front surface protective member 110, the thermocouple sheet 20, and the protective sheet 30 are arranged in this way. As a result, the thermocouple sheet 20 has the front surface protection member 110 and the back surface protection member 120 sandwiching the bent portion of the back surface protection member 120 at the position where the front surface protection member 110 and the back surface protection member 120 extend in the plane direction from the insulating base material 100. It is placed on the opposite side of 110.

After that, the integrated pressing step S50 in the manufacturing method of the heat flow measuring device 1 is performed. In the present embodiment, in the integrated press step S50, the laminate arranged between the lower press plate 71a and the upper press plate 71b of the press machine 71 is heated while being pressed in the lamination direction in a vacuum state. In this step, for example, the pressure of the press machine is 10 MPa or more and the temperature is 320 ° C. or more.

As a result, the first and second conductive pastes 131 and 141 embedded in the first and second via holes 101 and 102 of the insulating base material 100 are solid-sintered and the first and second interlayer connection members 130 and 140 are solid-sintered. It becomes. The first and second interlayer connection members 130 and 140 are electrically and mechanically connected to the front surface wiring pattern 111 and the back surface wiring pattern 121. Further, the insulating base material 100, the front surface protecting member 110, and the back surface protecting member 120 are fused to each other, and the back surface protecting member 120 and the first and second insulating sheets 210 and 220 in the thermocouple sheet 20 are fused. Further, the protective sheet 30 is fused with the back surface protective member 120 and the second insulating sheet 220. As a result, as shown in FIG. 2, the boundary end portion A is covered with the protective sheet 30. In this embodiment, in this way, the heat flux sensor 10 and the thermocouple 200 are integrated and the protective sheet 30 is arranged by one integrated pressing step S50.

Further, by arranging the protective sheet 30 as described above, the protective sheet 30 is subjected to the heat treatment only in the integral pressing step S50. Therefore, the protective sheet 30 has a shorter heat treatment time than the back surface protective member 120 and the second insulating sheet 220, and the crystallinity is small. Therefore, the fusion between the protective sheet 30 and the back surface protective member 120 and the second insulating sheet 220 is stronger than the fusion between the back surface protective member 120 and the second insulating sheet 220.

After that, although not particularly shown, a single heat flow measuring device 1 is manufactured by dividing the one subjected to the integrated pressing step S50.

As described above, in the present embodiment, the heat flux sensor 10 and the thermocouple sheet 20 are integrated. Then, in the heat flow measuring device 1, the thermocouple sheet 20 is fixed at a position where the front surface protection member 110 or the back surface protection member 120 extends in the surface direction from the insulating base material 100. Therefore, for example, the thickness of the heat flow measuring device 1 can be reduced as compared with a configuration in which the heat flux sensor 10 and the thermocouple sheet 20 are stacked and arranged in the thickness direction. As a result, when the heat flow measuring device 1 is attached to the surface 3 of the measurement object 2, the turbulence of the air flow in the vicinity of the surface 3 of the measurement object 2 is suppressed. Therefore, the heat flow measuring device 1 can reduce the temperature drift due to a change in the outside temperature or the like based on the output signal of the heat flux sensor 10 and the output signal of the thermocouple 200, and can accurately detect the heat flow of the measurement object 2.

Further, by fixing the thermocouple sheet 20 at a position where the front surface protection member 110 or the back surface protection member 120 extends in the surface direction from the insulating base material 100, the heat flux sensor 10 and the thermocouple 200 are placed close to each other in the surface direction. It will be possible to provide. Therefore, the heat flux sensor 10 and the thermocouple sheet 20 each detect the heat flow and the temperature at substantially the same position of the object 2 to be measured. Therefore, the output signal of the thermocouple sheet 20 and the output signal of the heat flux sensor 10 correspond to each other. As a result, the heat flow measuring device 1 can reduce the influence of temperature drift from the signal of the heat flux sensor 10.

Further, in the present embodiment, the boundary end portion A between the heat flux sensor 10 and the thermocouple sheet 20 is covered with a protective sheet 30 having a lower crystallinity than the thermoplastic resin constituting the boundary. That is, the boundary end portion A is covered with a protective sheet 30 in which the fusion strength with the thermoplastic resin at the portion constituting the boundary is higher than the fusion strength between the thermoplastic resins at the portion constituting the boundary. There is. Therefore, as shown in FIG. 8, it is possible to prevent the heat flux sensor 10 and the thermocouple sheet 20 from peeling off.

(Second Embodiment)
The second embodiment will be described. In this embodiment, the shape of the thermocouple sheet 20 is changed from that of the first embodiment. Others are the same as those in the first embodiment, and thus description thereof will be omitted here.

In the heat flow measuring device 1 of the present embodiment, as shown in FIG. 25, the thermocouple sheet 20 has a recess 206 formed at the end portion on the joint portion 203 side. That is, the first and second insulating sheets 210 and 220 of the thermocouple sheet 20 are formed with recesses 206 at the ends on the joint 203 side. The protective sheet 30 is inserted into the recess 206. Therefore, the thermocouple sheet 20 has a structure in which the protective sheet 30 is fused to the side surface intersecting with the other surface 1b.

In such a heat flow measuring device 1, the cutting portion may be changed in the cutting step S14 in the thermocouple sheet forming step S10. That is, as shown in FIG. 26, in the cutting step S14, the second and third cutting points C2 and C3 may be changed so that the recess 206 is formed in the portion on the joint portion 203 side. By forming such a thermocouple sheet 20, the protective sheet 30 is also arranged in the recess 206 when the integral pressing step S50 is performed.

As described above, in the present embodiment, the recess 206 is formed in the thermocouple sheet 20, and the protective sheet 30 is also arranged in the recess 206. That is, the protective sheet 30 is also arranged on the side surface of the thermocouple sheet 20. Therefore, the fusion area between the protective sheet 30 and the thermocouple sheet 20 can be increased, and the fusion strength between the protective sheet 30 and the thermocouple sheet 20 can be improved.

(Other embodiments)
The present invention is not limited to the above-described embodiment, and can be appropriately modified within the scope of the claims.

For example, in each of the above embodiments, the heat flow measuring device 1 has been described as an example of arranging the heat flow measuring device 1 on the surface of the measuring object 2, but it may be embedded inside the measuring object 2.

Further, in each of the above embodiments, the protective sheet 30 may be sized to cover the boundary end portion A. For example, in each of the above embodiments, the portions of the second insulating sheet 220 on the pad portions 204 and 205 may be exposed from the protective sheet 30. That is, if the boundary end portion A is covered with the protective sheet 30, the heat flow measuring device 1 may be configured to have the back surface protective member 120, the protective sheet 30, and the second insulating sheet 220 on the other surface 1b. good.

Further, in each of the above embodiments, the protective sheet 30 may be arranged after the heat flux sensor 10 and the thermocouple sheet 20 are integrated. Specifically, after the heat flux sensor 10 and the thermocouple sheet 20 are arranged and the integrated pressing step S50 is performed, the protective sheet 30 is further arranged and the integrated pressing process S50 is performed again to arrange the protective sheet 30. You may try to do it. Even if the heat flow measuring device 1 is manufactured in this way, the heat treatment time of the protective sheet 30 is shorter, so that the crystallinity of the protective sheet 30 is determined by the back surface protective member 120 and the first and second insulating sheets. It is smaller than 210 and 220.

Further, in each of the above embodiments, in the heat flow measuring device 1, even if the protective sheet 30 is arranged at the boundary end portion between the heat flux sensor 10 and the thermocouple sheet 20 at a place other than the boundary end portion A. good. For example, the protective sheet 30 may be arranged so as to cover the entire boundary end portion between the heat flux sensor 10 and the thermocouple sheet 20.

Further, in each of the above embodiments, for example, the insulating base material 100 may be composed of only one type of thermoplastic resin. Similarly, the front surface protection member 110 and the back surface protection member 120 may be composed of only one type of thermoplastic resin.

Further, in the first embodiment, the back surface protection member 120 in the heat flux sensor 10 may not be bent, and the thermocouple sheet 20 may be arranged between the front surface protection member 110 and the back surface protection member 120. Even with such a configuration, by covering the boundary end between the heat flux sensor 10 and the thermocouple sheet 20 with the protective sheet 30, it is possible to prevent the heat flux sensor 10 and the thermocouple sheet 20 from peeling off. Similarly, the heat flux sensor 10 and the thermocouple sheet 20 may be laminated.

Further, in each of the above embodiments, the thickness of the protective sheet 30 can be appropriately changed. However, as shown in FIGS. 9 and 10, when the other surface 1b of the heat flow measuring device 1 is arranged so as to face the measurement target 2 side, it is preferable that the protective sheet 30 is thinned. As a result, the thermal resistance of the protective sheet 30 is lowered, and the heat of the measurement object 2 can be detected with high accuracy. Similarly, as shown in FIGS. 9 and 10, when the other surface 1b of the heat flow measuring device 1 is arranged toward the measurement object 2, the second insulating sheet 220 may also be thinned. preferable. That is, in the heat flow measuring device 1, it is preferable that the film thickness and the like are adjusted so that the thermal resistance of the member arranged between the joint portion 203 of the thermocouple 200 and the object to be measured 2 becomes small. Therefore, for example, when one surface 1a of the heat flow measuring device 1 is arranged toward the measurement object 2, it is preferable that the first insulating sheet 210 is thinned.

(summary)
According to the first aspect shown in part or all of the above-described embodiment, in the heat flow measuring device, a plurality of first and second via holes penetrating in the thickness direction are formed in the plate-shaped insulating substrate. At the same time, thermoelectric conversion elements made of different metals are embedded in the first and second via holes, and a surface protection member composed of a thermoplastic resin is arranged on the surface side of the insulating base material. In addition, it is equipped with a heat flux sensor in which a back surface protective member composed of a thermoplastic resin is arranged on the back surface side of the insulating base material. In the heat flow measuring device, thermocouples having a joint portion in which a first conductor and a second conductor made of metals having different thermoelectric abilities are connected intersect with each other in the arrangement direction of the first conductor and the second conductor. A thermocouple sheet covered with a first insulating sheet containing a thermoplastic resin from one side in the direction and covered with a second insulating sheet containing a thermoplastic resin from the other side in the intersecting direction. It is equipped with. The heat flux sensor and the thermocouple sheet are integrated by fusing the thermoplastic resins to each other. The boundary end at the boundary between the heat flux sensor and the thermocouple sheet is covered with a protective sheet having a smaller degree of crystallization than the thermoplastic resin of the heat flux sensor and the thermoplastic resin of the thermocouple sheet constituting the boundary. It has been.

Further, according to the second aspect, in the heat flux sensor, the length of the front surface protection member and the back surface protection member is longer than that of the insulating base material along the surface direction of the insulating base material, and the heat flux sensor is insulated from the back surface protection members. The portion longer than the base material is bent toward the surface protection member and fused with the surface protection member. The thermocouple sheet is arranged on the side opposite to the front surface protection member with the portion fused to the front surface protection member of the back surface protection member interposed therebetween, and is fused with the bent portion of the back surface protection member. The protective sheet covers the boundary end portion of the boundary farthest from the surface protective member.

According to this, it becomes possible to provide the heat flux sensor and the thermocouple at positions closer to each other in the plane direction as compared with the case where the heat flux sensor and the thermocouple sheet are laminated. Therefore, the heat flux sensor and the thermocouple sheet detect the heat flow and temperature at the same position, respectively. Therefore, the output signal of the thermocouple sheet and the output signal of the heat flux sensor correspond to each other, and the influence of the temperature drift can be reduced from the signal of the heat flux sensor.

Further, according to the third viewpoint, the thermocouple sheet has a recess formed in the boundary side portion, and the protective sheet is also arranged in the recess. According to this, the fusion area between the protective sheet and the thermocouple sheet can be increased, and the fusion strength between the protective sheet and the thermocouple sheet can be improved.

Further, according to the fourth aspect, in the method of manufacturing the heat flow measuring device, a plurality of first and second via holes penetrating in the thickness direction are formed in the plate-shaped insulating base material, and the first and second via holes are formed. A material filled with a conductive paste constituting the thermoelectric conversion element is prepared. In the method of manufacturing the heat flow measuring device, a front surface protection member composed of a thermoplastic resin is prepared, and a back surface protection member composed of a thermoplastic resin is prepared. In the method of manufacturing a heat flow measuring device, a thermocouple having a joint portion in which a first conductor and a second conductor made of metals having different thermoelectric abilities are connected is arranged with respect to the arrangement direction of the first conductor and the second conductor. It was covered with a first insulating sheet containing a thermoplastic resin from one side in the intersecting direction, and covered with a second insulating sheet containing a thermoplastic resin from the other side in the intersecting direction. Prepare a thermocouple sheet. In the method of manufacturing the heat flow measuring device, the back surface protection member, the insulating base material, and the front surface protection member are laminated in this order, and the member arrangement for arranging the thermocouple sheet is performed. In the method of manufacturing a heat flow measuring device, a thermocouple conversion element is formed from a conductive paste by heating while pressurizing from the stacking direction of the back surface protection member, the insulating base material, and the front surface protection member, while forming a heat flux sensor. The heat flux sensor and the thermocouple sheet are integrated by fusing the thermoplastic resin constituting the heat flux sensor and the thermoplastic resin constituting the thermocouple sheet. In the method of manufacturing the heat flow measuring device, a protective sheet having a smaller degree of crystallization than the thermoplastic resin of the heat flux sensor forming the boundary between the heat flux sensor and the thermocouple sheet and the thermoplastic resin of the thermocouple sheet is prepared. Do that. Then, in the method of manufacturing the heat flow measuring device, the boundary end portion at the boundary is covered with a protective sheet.

Further, according to the fifth aspect, by preparing the surface protection member, the surface protection member having a longer length along the surface direction of the insulating base material than the insulating base material is prepared. By preparing the back surface protective member, a back surface protective member having a longer length along the surface direction of the insulating base material than the insulating base material is prepared. Then, by arranging the members, the back surface protection member is bent toward the front surface protection member at a position where the front surface protection member and the back surface protection member are elongated in the surface direction from the insulating base material, and the back surface protection member is bent. A thermocouple sheet is placed on the opposite side of the surface protection member with the removed portion sandwiched between them.

According to this, it is possible to manufacture a heat flow measuring device in which the heat flux sensor and the thermocouple are provided at positions closer to each other in the plane direction as compared with the case where the heat flux sensor and the thermocouple sheet are laminated. Therefore, the heat flux sensor and the thermocouple sheet detect the heat flow and temperature at the same position, respectively. Therefore, the output signal of the thermocouple sheet and the output signal of the heat flux sensor correspond to each other, and it is possible to manufacture a heat flow measuring device in which the influence of temperature drift is reduced from the signal of the heat flux sensor.

According to the sixth aspect, in the member arrangement, the thermocouple sheet is arranged on the protective sheet. By integrating, the heat flux sensor, the thermocouple sheet, and the protective sheet are integrated at the same time. According to this, it is possible to simplify the manufacturing process as compared with the case where the protective sheet is arranged in another process.

1 Heat flux measuring device 10 Heat flux sensor 20 Thermocouple sheet 30 Protective sheet 100 Insulation base material 101, 102 1st and 2nd via holes 130, 140 1st and 2nd thermoelectric conversion elements 110 Front surface protection member 120 Back surface protection member 200 Thermocouple 201 1st conductor 202 2nd conductor 203 Joint part 210 1st insulating sheet 220 2nd insulating sheet A Boundary end

Claims (4)

A heat flow measuring device in which a heat flux sensor (10) and a thermocouple sheet (20) having a thermocouple (200) are integrated.
A plurality of first and second via holes (101, 102) penetrating in the thickness direction are formed in the plate-shaped insulating base material (100), and the first and second via holes are formed of different metals from each other. The thermoelectric conversion element (130, 140) is embedded, and the surface protection member (110) composed of the thermoplastic resin is arranged on the surface (100a) side of the insulating base material, and the insulation is provided. The heat flux sensor in which the back surface protective member (120) composed of the thermoplastic resin is arranged on the back surface (100b) side of the base material, and the heat flux sensor.
The thermocouple having a joint portion (203) in which a first conductor (201) and a second conductor (202) made of metals having different thermoelectric abilities are connected is a thermocouple of the first conductor and the second conductor. It is covered with a first insulating sheet (210) composed of a thermoplastic resin from one side in an intersecting direction with respect to the arrangement direction, and is configured to contain a thermoplastic resin from the other side in the intersecting direction. The thermocouple sheet covered with the second insulating sheet (220) is provided.
The heat flux sensor and the thermocouple sheet are integrated by fusing the thermoplastic resins to each other.
The boundary end (A) at the boundary between the heat flux sensor and the thermocouple sheet has a smaller degree of crystallization than the thermoplastic resin of the heat flux sensor and the thermoplastic resin of the thermocouple sheet constituting the boundary. is covered with a protective sheet (30) was,
In the heat flux sensor, the front surface protection member and the back surface protection member are longer than the insulating base material along the surface direction of the insulation base material, and are longer than the insulation base material among the back surface protection members. The formed portion is bent toward the surface protection member and fused with the surface protection member.
The thermocouple sheet is arranged on the opposite side of the front surface protection member so as to sandwich the portion of the back surface protection member that is fused with the front surface protection member, and is fused with the bent portion of the back surface protection member. And
The protective sheet is a heat flow measuring device that covers the boundary end portion of the boundary farthest from the surface protective member. The thermocouple sheet has a recess (206) formed in a portion on the boundary side thereof.
The heat flow measuring device according to claim 1, wherein the protective sheet is also arranged in the recess. A method for manufacturing a heat flow measuring device in which a heat flux sensor (10) and a thermocouple sheet (20) having a thermocouple (200) are integrated.
A plurality of first and second via holes (101, 102) penetrating in the thickness direction are formed on the plate-shaped insulating base material (100), and thermoelectric conversion elements (130, 140) are placed in the first and second via holes. Prepare one filled with the constituent conductive paste (131, 141), and
To prepare a surface protection member (110) composed of a thermoplastic resin, and to prepare a surface protection member (110).
To prepare a back surface protective member (120) composed of a thermoplastic resin, and to prepare a back surface protective member (120).
The thermocouple having a joint portion (203) in which a first conductor (201) and a second conductor (202) made of metals having different thermoelectric abilities are connected is a thermocouple of the first conductor and the second conductor. It is covered with a first insulating sheet (210) composed of a thermoplastic resin from one side in an intersecting direction with respect to the arrangement direction, and is configured to contain a thermoplastic resin from the other side in the intersecting direction. To prepare the thermocouple sheet covered with the second insulating sheet (220) and to prepare the thermocouple sheet.
The back surface protection member, the insulating base material, and the surface protection member are laminated in this order, and the member arrangement for arranging the thermocouple sheet is performed.
By heating while pressurizing from the stacking direction of the back surface protection member, the insulating base material, and the surface protection member, the thermoelectric conversion element is formed from the conductive paste to form the heat flux sensor, and the heat flow is formed. The heat flux sensor and the thermocouple sheet are integrated by fusing the thermoplastic resin constituting the bundle sensor and the thermoplastic resin constituting the thermocouple sheet.
To prepare a protective sheet (30) having a lower degree of crystallization than the thermoplastic resin of the heat flux sensor and the thermoplastic resin of the thermocouple sheet constituting the boundary between the heat flux sensor and the thermocouple sheet. When,
There rows, and that the cover border edge (A) is in the protective sheet in the boundary,
By preparing the surface protection member, the surface protection member having a longer length along the surface direction of the insulating base material than the insulating base material is prepared.
By preparing the back surface protection member, the back surface protection member having a longer length along the surface direction of the insulating base material than the insulating base material is prepared.
By arranging the members, the back surface protection member is bent toward the front surface protection member at a position where the front surface protection member and the back surface protection member are elongated in the surface direction from the insulating base material, and the back surface protection member is protected. A method for manufacturing a heat flow measuring device, in which the thermocouple sheet is arranged on the side opposite to the surface protection member across the bent portion of the member. By arranging the members, the thermocouple sheet is arranged on the protective sheet.
The method for manufacturing a heat flow measuring device according to claim 3 , wherein the heat flux sensor, the thermocouple sheet, and the protective sheet are integrated at the same time.

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