JP2017211270A - Manufacturing method for heat flow measurement device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a manufacturing method for a heat flow measurement device with which it is possible to accurately measure the heat flow of a measurement object.SOLUTION: In a thermocouple sheet formation step S10, a thermocouple sheet 200 is formed by a thermocouple 20 and a first insulating sheet 210 and a second insulating sheet 220 covering both faces of the thermocouple 20. In a heat flux sensor member preparation step S20, an insulating substrate 100 in which conductive pastes 131 and 141 are buried, a surface protective member 110 having a surface wiring pattern 111 and a back protective member 120 having a back wiring pattern 121 are prepared. In a laminate formation step S30, the thermocouple sheet 200 is arranged on the side of the back protective member 120 that is opposite to the surface protective member 110 at a position where the surface protective member 110 and the back protective member 120 extend in the surface direction from the insulating substrate 100. In a one-piece press step S40, the laminate is heated while being pressurized in the lamination direction and a heat flux sensor 10 and the thermocouple 20 are formed in one piece.SELECTED DRAWING: Figure 6

Description

  The present invention relates to a method for manufacturing a heat flow measuring device in which a heat flux sensor and a thermocouple are integrally formed.

  2. Description of the Related Art Conventionally, a heat flux sensor that is formed in a thin plate shape and outputs a signal corresponding to the heat flux flowing between one surface in the thickness direction and the other surface is known.

  Patent Document 1 describes a heat flow measuring device in which a plurality of electrically independent heat flux sensors are simultaneously formed in the process of manufacturing one multilayer substrate. This heat flow measuring device reduces the individual performance differences among the plurality of heat flux sensors.

JP 2016-11950 A

  The heat flow measuring device described in Patent Document 1 can measure the heat flow generated from the inside of the measurement object by being attached to the surface of the measurement object. However, the heat flow on the surface of the measurement object is affected by the heat generated inside the measurement object and is also affected by changes in the outside air temperature. For this reason, the heat flow measuring device outputs a signal corresponding to the heat generated inside the measurement object and also outputs a signal corresponding to a change in the outside air temperature. Therefore, in the heat flow measurement in which the heat flow measuring device is attached to the surface of the measurement object, there is a problem that it becomes difficult to detect the heat generated inside the measurement object due to the temperature drift of the signal according to the change of the outside air temperature. .

  As a countermeasure, it is conceivable to provide a thermocouple in addition to the heat flux sensor for the heat flow measuring device. If a thermocouple is used to detect temperature changes on the surface of the object due to changes in the outside air temperature, the temperature drift from the heat flux sensor signal based on the signal output from the heat flux sensor and the signal output from the thermocouple. Can be reduced.

  However, when a heat flux sensor and a thermocouple are provided for the heat flow measuring device, there are the following problems.

  (1) If the heat flux sensor and the thermocouple are stacked and arranged in the thickness direction, the thickness of the heat flow measuring device increases. When such a heat flow measuring device is attached to the surface of the measurement object, the airflow near the surface of the measurement object is disturbed. Therefore, the output signal of the heat flux sensor and the output signal of the thermocouple accurately correspond to the heat flow on the surface of the measurement object due to the heat generated inside the measurement object and the heat flow on the surface of the measurement object due to changes in the outside air temperature. It doesn't become a thing. Therefore, in such a configuration, it is difficult for the heat flow measuring device to accurately detect the heat generated inside the measurement object.

  (2) Further, if the heat flux sensor and the thermocouple are arranged at positions separated in the surface direction, the heat flow detected by the heat flux sensor and the temperature change detected by the thermocouple are different from each other in the measurement object. It will be of position. In this case, the thermocouple signal and the heat flux sensor signal do not correspond to each other. Accordingly, even in such a configuration, it is difficult for the heat flow measuring device to reduce the influence of temperature drift from the signal of the heat flux sensor.

  An object of this invention is to provide the manufacturing method of the heat flow measuring apparatus which can detect the heat flow of a measuring object correctly in view of the said point.

In order to achieve the above object, according to the first aspect of the present invention, in the manufacturing method of the heat flow measuring apparatus, the first conductor (21) and the second conductor (22) made of metals having different thermoelectric power are connected. A thermocouple (20) having a joined portion (23), a first insulating sheet (210) covering the first conductor and the second conductor from one side in a direction intersecting the direction in which the first conductor and the second conductor are arranged. ), And forming a thermocouple sheet (200) having a second insulating sheet (220) covering the first conductor and the second conductor from the opposite side of the first insulating sheet (S10);
Insulating base material (100) in which a plurality of types of conductive pastes (131, 141) having different thermoelectric powers are embedded in a plurality of via holes to constitute the heat flux sensor (10), and the insulating base material in the plurality of conductive pastes A surface wiring pattern (111) connected to one end in the thickness direction of the substrate, a surface protection member (110) covering one surface (100a) in the thickness direction of the insulating substrate and the surface wiring pattern, and a plurality of conductivity The back surface wiring pattern (121) connected to the other ends in the thickness direction of the insulating base material in the paste, and the back surface protection member (120 that covers the other surface (100b) in the thickness direction of the insulating base material and the back surface wiring pattern. ) (S20),
At the position where the surface protection member and the back surface protection member extend in the surface direction from the insulating base material, a thermocouple sheet is arranged on the opposite side of the back surface protection member from the surface protection member, or the surface protection member and the back surface protection Arranging a thermocouple sheet between the members to form a laminate (S30);
The laminated body is heated while being pressed in the laminating direction, and a plurality of conductive pastes embedded in the plurality of via holes of the insulating base material are solid-sintered to form a plurality of conductors (130, 140), and the conductor and the surface The wiring pattern and the back surface wiring pattern are electrically connected, and the insulating base material, the surface protection member, the back surface protection member, and the thermocouple sheet are pressure-bonded, and the heat flux sensor and the thermocouple are integrally formed ( S40).

  According to this, it becomes possible to equalize the thickness of the location of the heat flux sensor provided in the heat flow measuring device and the thickness of the location of the thermocouple sheet, and to reduce the thickness of the heat flow measuring device. Therefore, when a heat flow measuring device is affixed to the surface of the measurement object, the turbulence of the airflow near the surface of the measurement object is suppressed. Therefore, the heat flow measuring device can accurately detect the heat flow of the measurement object by reducing temperature drift due to changes in the outside air temperature based on the output signal of the heat flux sensor and the output signal of the thermocouple.

  Moreover, according to this manufacturing method, it becomes possible to form a heat flow measuring device by performing a press process once with respect to an insulating base material, a surface protection member, a back surface protection member, a thermocouple sheet, etc. Therefore, it is possible to suppress the formation of wrinkles or gaps in these members.

  In addition, the code | symbol in the bracket | parenthesis of each said means shows an example of a corresponding relationship with the specific means as described in embodiment mentioned later.

It is a figure which shows typically the state which attached the heat flow measuring apparatus which concerns on 1st Embodiment of this invention to the measuring object. It is a schematic diagram of the II-II cross section of FIG. It is a graph which shows typically the output characteristic of the heat flux sensor which constitutes a heat flow measuring device, and the output characteristic of a thermocouple. It is a top view of the heat flow measuring device concerning a 1st embodiment. It is VV sectional drawing of FIG. It is a flowchart of the manufacturing method of the heat flow measuring device which concerns on 1st Embodiment. It is a flowchart of the manufacturing method of the thermocouple sheet | seat which comprises a heat flow measuring apparatus. It is explanatory drawing of the manufacturing method of the thermocouple sheet | seat which comprises a heat flow measuring apparatus. It is IX-IX sectional drawing of FIG. It is explanatory drawing of the manufacturing method of the thermocouple sheet | seat which comprises a heat flow measuring apparatus. It is explanatory drawing of the manufacturing method of the thermocouple sheet | seat which comprises a heat flow measuring apparatus. It is explanatory drawing of the manufacturing method of the thermocouple sheet | seat which comprises a heat flow measuring apparatus. It is explanatory drawing of the manufacturing method of the thermocouple sheet | seat which comprises a heat flow measuring apparatus. It is explanatory drawing of the manufacturing method of the thermocouple sheet | seat which comprises a heat flow measuring apparatus. It is a schematic diagram of the member for heat flux sensors which comprises a heat flow measuring apparatus. It is explanatory drawing of the manufacturing method of a heat flow measuring apparatus. It is explanatory drawing of the manufacturing method of a heat flow measuring apparatus. It is sectional drawing of the heat flow measuring apparatus which concerns on 2nd Embodiment of this invention. It is a top view of the XIX direction of FIG. It is explanatory drawing of the manufacturing method of the heat flow measuring apparatus of 2nd Embodiment. It is a top view of the thermocouple which comprises the heat flow measuring apparatus which concerns on 3rd Embodiment of this invention. It is a top view of the thermocouple which comprises the heat flow measuring apparatus which concerns on 4th Embodiment of this invention.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings. In the following embodiments, parts that are the same or equivalent to each other will be described with the same reference numerals.

(First embodiment)
A first embodiment of the present invention will be described with reference to the drawings. As shown in FIGS. 1 and 2, the heat flow measuring device 1 of the present embodiment is configured such that a heat flux sensor 10 and a thermocouple 20 are integrally formed.

  The heat flux sensor 10 includes an insulating base material 100, a surface protection member 110 that covers one surface in the thickness direction of the insulating base material 100, and a back surface protection member 120 that covers the other surface. The insulating base material 100 is embedded with a plurality of interlayer connection members 130 and 140 made of metals having different thermoelectric powers so as to exhibit the Seebeck effect. A front surface wiring pattern 111 and a back surface wiring pattern 121 for connecting a plurality of interlayer connection members 130 and 140 in series are formed on the front surface protection member 110 and the back surface protection member 120, respectively. The heat flux sensor 10 outputs a signal corresponding to the thermoelectromotive force generated in the interlayer connection members 130 and 140 according to the heat flux flowing between one surface in the thickness direction and the other surface. The thickness direction of the heat flux sensor 10 is the stacking direction of the insulating base material 100, the surface protection member 110, and the back surface protection member 120. Further, the interlayer connection members 130 and 140 of the present embodiment correspond to “conductors” recited in the claims.

  The thermocouple sheet 200 includes a thermocouple 20, a first insulating sheet 210, and a second insulating sheet 220. The thermocouple 20 is obtained by joining a first conductor 21 and a second conductor 22. The 1st conductor 21 and the 2nd conductor 22 are comprised from the metal foil from which thermoelectric power differs, respectively. A portion where the first conductor 21 and the second conductor 22 are joined is referred to as a joint portion 23. The thermocouple 20 is a thermoelectromotive force generated in the thermocouple 20 in accordance with a temperature difference between the junction 23 and the detection unit 30 connected to the first conductor 21 and the second conductor 22 through wirings 34 and 35. Output a signal according to. The first insulating sheet 210 covers the thermocouple 20 from one side in a direction intersecting the direction in which the first conductor 21 and the second conductor 22 are arranged. The second insulating sheet 220 covers the thermocouple 20 from the side opposite to the first insulating sheet 210. The details of the configuration of the heat flux sensor 10 and the thermocouple sheet 200 will be described later.

  The heat flow measuring device 1 can be used by being attached to the surface 3 of the measurement object 2. In FIG. 2, the heat generation source 4 inside the measurement object 2 is schematically indicated by a broken line.

  The wirings 31 and 32 connected to the pad portions 124 and 125 at the ends of the back surface wiring pattern 121 of the heat flux sensor 10 pass through the inside of the tubular shield wire 33 and are connected to the detection unit 30. Wirings 34 and 35 connected to the first conductor 21 and the second conductor 22 of the thermocouple 20 also pass through the inside of the tubular shield wire 33 and are connected to the detection unit 30. Thereby, the output signal of the heat flux sensor 10 and the output signal of the thermocouple 20 are input to the detection unit 30.

  The detection unit 30 includes a microcomputer and its peripheral devices. Based on the output signal of the heat flux sensor 10 and the output signal of the thermocouple 20, the detection unit 30 generates heat generated by the heat generation source 4 inside the measurement object 2 from the inside of the measurement object 2 to the surface 3. It is possible to measure the heat flow that travels through the surface 3. The detection unit 30 may be capable of calculating the amount of heat generated by the heat generation source 4 of the measurement object 2 based on the heat flow measured on the surface 3 of the measurement object 2.

  The shield wire 33 has a conductor for preventing electromagnetic waves from entering from the outside. The conductor of the shield wire 33 is formed in a cylindrical shape so as to surround the wiring inside the shield wire 33, and is electrically connected to the measurement object 2 through the wiring 36 or the like. The conductor of the shield wire 33 is preferably connected to the ground 37. Thereby, it is possible to reduce the noise with respect to the voltage signal which the heat flux sensor 10 and the thermocouple 20 output.

  In FIG. 3, an example of an output signal of the thermocouple 20 detected by the detection unit 30 is schematically shown by a solid line A, and an example of an output signal of the thermal flow rate sensor at that time is schematically shown by a solid line B.

  In this example, it is assumed that the outside air temperature gradually increases from time t0 to time t4 and gradually decreases from time t4 to time t8. Further, the temperature of the detection unit 30 is assumed to be substantially constant from time t0 to time t8.

  The temperature of the surface 3 of the measurement object 2 rises as the outside air temperature rises and falls as the outside air temperature falls. Therefore, as shown by the solid line A, the output signal of the thermocouple 20 gradually increases from time t0 to time t4, and gradually decreases from time t4 to time t8.

  On the other hand, the heat flux on the surface 3 of the measurement object 2 flows from the outside air side to the measurement object 2 side as the outside air temperature increases, and flows from the measurement object 2 side to the outside air side as the outside air temperature decreases. Therefore, as shown by the solid line B, the output signal of the heat flux sensor 10 gradually decreases from time t0 to time t4, and gradually increases from time t4 to time t8. That is, the output signal of the thermocouple 20 and the output signal of the heat flux sensor 10 exhibit behaviors opposite to the heat flow that flows on the surface 3 of the measurement object 2 due to a change in the outside air temperature.

  Here, it is assumed that heat is generated in the heat generation source 4 inside the measurement object 2 between the time t1 and the time t2 and between the time t5 and the time t6. At this time, the heat generated by the heat generation source 4 is transmitted from the inside of the measurement object 2 to the surface 3, and a heat flow flows through the surface 3. Therefore, both the output signal of the thermocouple 20 and the output signal of the heat flux sensor 10 rise between time t1 and time t2, and the output signal and heat flux of the thermocouple 20 rise between time t2 and time t3. Both of the output signals of the sensor 10 are lowered. Further, the output signal of the thermocouple 20 and the output signal of the heat flux sensor 10 both rise from time t5 to time t6, and the output signal and heat flux of the thermocouple 20 rise from time t6 to time t7. Both of the output signals of the sensor 10 are lowered. That is, the output signal of the thermocouple 20 and the output signal of the heat flux sensor 10 indicate that the heat generated by the heat generation source 4 inside the measurement object 2 is transmitted through the measurement object 2 and the surface of the measurement object 2 The behavior of the same direction with respect to the heat flow through 3 is shown.

  Therefore, the detection unit 30 compares the output signal of the heat flux sensor 10 and the output signal of the thermocouple 20 to remove the heat flow that flows on the surface 3 of the measurement object 2 due to a change in the outside air temperature, and It is possible to measure only the heat flow flowing on the surface 3 of the measurement object 2 by the heat generated by the internal heat generation source 4.

  Next, the configuration of the heat flux sensor 10 and the thermocouple sheet 200 provided in the heat flow measuring device 1 will be described.

  As shown in FIGS. 4 and 5, in the heat flux sensor 10, the insulating base material 100, the surface protection member 110, and the back surface protection member 120 are integrated, and the first and second interlayer connections are made inside the integrated body. The members 130 and 140 are alternately connected in series.

  The insulating base material 100 is formed in a plate shape from a flexible thermoplastic resin film or thermosetting resin film. A plurality of first via holes 101 and second via holes 102 are formed in the insulating base material 100 in the thickness direction.

  A first interlayer connection member 130 is disposed in the first via hole 101, and a second interlayer connection member 140 is embedded in the second via hole 102. That is, the first interlayer connection member 130 and the second interlayer connection member 140 are embedded in the insulating base material 100 so as to alternate.

  The first interlayer connection member 130 and the second interlayer connection member 140 are made of thermoelectric materials such as metals and semiconductors having different thermoelectric powers so as to exhibit the Seebeck effect. For example, the first interlayer connection member 130 is a metal compound obtained by solid-phase sintering so that a powder of Bi-Sb-Te alloy constituting P-type maintains a crystal structure of a plurality of metal atoms before sintering. Composed. Further, for example, the second interlayer connection member 140 is a metal compound obtained by solid-phase sintering so that Bi-Te alloy powder constituting N-type maintains the crystal structure of a plurality of metal atoms before sintering. Composed.

  In FIG. 4, the first and second interlayer connection members 130 and 140 are hidden behind a surface wiring pattern 111 to be described later, but for convenience of explanation, the first and second interlayer connection members 130 and 140 are not visible. Is indicated by a broken line, and hatched there.

  The surface protection member 110 covers the surface 100 a of the insulating base material 100. The surface protection member 110 is made of a flexible thermoplastic resin film or thermosetting resin film. The surface protection member 110 is formed longer in one of the surface directions than the insulating base material 100 and extends from the insulating base material 100 in one of the surface directions.

  A plurality of surface wiring patterns 111 in which copper foil or the like is patterned are formed on the surface protection member 110 on the side of the surface 110 a facing the insulating base material 100. In FIG. 4, the positions of the plurality of surface wiring patterns 111 are indicated by solid lines on the assumption that the surface protection member 110 is transparent or translucent. The plurality of surface wiring patterns 111 are electrically connected to one end portion of the first interlayer connection member 130 and one end portion of the second interlayer connection member 140 adjacent thereto.

  The back surface protection member 120 covers the back surface 100 b of the insulating base material 100. The back surface protection member 120 is configured by a flexible thermoplastic resin film or a thermosetting resin film. The back surface protection member 120 is formed longer in one of the surface directions than the insulating base material 100 and extends from the insulating base material 100 in one of the surface directions. The back surface protection member 120 extends longer than the front surface protection member 110.

  The back surface protection member 120 is formed with a plurality of back surface wiring patterns 121 in which a copper foil or the like is patterned on the surface 120 a side facing the insulating base material 100. The plurality of backside wiring patterns 121 are electrically connected to the other end of the first interlayer connection member 130 and the other end of the second interlayer connection member 140 adjacent thereto.

  The first interlayer connection member 130 and the second interlayer connection member 140 that are adjacent to each other are connected to be alternately folded by the front surface wiring pattern 111 and the back surface wiring pattern 121. In this manner, the first interlayer connection member 130 and the second interlayer connection member 140 are connected in series by the front surface wiring pattern 111 and the back surface wiring pattern 121.

  In the back wiring pattern 121, the extension wirings 122 and 123, which are the ends of the first and second interlayer connection members 130 and 140 connected in series, have the back protection member 120 extending in one of the plane directions with respect to the insulating substrate 100. It is provided in the place. In the place where the back surface protection member 120 extends longer than the front surface protection member 110, the extended wirings 122 and 123 of the back surface wiring pattern 121 are exposed to the outside air. The portions where the extended wirings 122 and 123 are exposed to the outside become pad portions 124 and 125 that function as terminals for connecting the wirings.

  When the heat flux flows between one surface in the thickness direction and the other surface, the heat flux sensor 10 has a temperature at one end and the other end of the first and second interlayer connection members 130 and 140. There is a difference. At that time, a thermoelectromotive force is generated in the first and second interlayer connection members 130 and 140 by the Seebeck effect. The heat flux sensor 10 outputs this thermoelectromotive force as a sensor signal (for example, a voltage signal).

  Next, the configuration of the thermocouple sheet 200 will be described.

  The thermocouple sheet 200 has a structure in which the thermocouple 20, the first insulating sheet 210, and the second insulating sheet 220 are integrated. The thermocouple 20 is formed by welding a first conductor 21 and a second conductor 22 made of metals having different thermoelectric powers so as to exhibit the Seebeck effect. A location where the first conductor 21 and the second conductor 22 are joined becomes a joint 23 for detecting temperature. In addition, the 1st conductor 21 and the 2nd conductor 22 of this embodiment are comprised with the metal foil.

  The 1st insulating sheet 210 is comprised by the plate shape from the thermoplastic resin film or thermosetting resin film which has flexibility. The first insulating sheet 210 covers the thermocouple 20 from one side in a direction intersecting the direction in which the first conductor 21 and the second conductor 22 are arranged. The second insulating sheet 220 covers the thermocouple 20 from the side opposite to the first insulating sheet 210. The first insulating sheet 210 is formed longer in one of the surface directions than the second insulating sheet 220 and extends from the second insulating sheet 220 in one of the surface directions.

  At the place where the first insulating sheet 210 extends longer than the second insulating sheet 220, the first conductor 21 and the second conductor 22 constituting the thermocouple 20 are exposed to the outside air. The exposed portions become pad portions 24 and 25 that function as terminals for connecting the wiring.

  In the thermocouple 20, when a temperature difference occurs between the junction 23 and the detection unit 30, a thermoelectromotive force is generated in the junction 23 due to the Seebeck effect. The thermocouple 20 outputs this thermoelectromotive force as a sensor signal (for example, a voltage signal).

  The thermocouple sheet 200 is fixed at a position where the surface protection member 110 and the back surface protection member 120 extend from the insulating substrate 100 in the surface direction. Here, the insulating base material 100 constituting the heat flux sensor 10 has a recess 11 that is recessed from the side 12 on the thermocouple sheet 200 side to the interlayer connection members 130 and 140 side. The joint 23 of the thermocouple 20 included in the thermocouple sheet 200 enters the recess 11 included in the insulating base material 100. Therefore, the distance between the first and second interlayer connection members 130 and 140 of the heat flux sensor 10 and the joint portion 23 of the thermocouple 20 is short.

  In the present embodiment, the back surface protection member 120 is bent toward the surface protection member 110 at the position extending in the surface direction from the insulating base material 100, and is in close contact with the surface protection member 110. The thermocouple sheet 200 is fixed to the opposite side of the back surface protection member 120 to the front surface protection member 110 at a position where the front surface protection member 110 and the back surface protection member 120 are in close contact. In this state, of the back surface protection member 120 where the plurality of interlayer connection members 130 and 140 are disposed in the heat flux sensor 10, the surface 120 b opposite to the insulating base material 100, and the thermocouple sheet 200 are joined to the joint 23. The thermocouple sheet 200 at the place where the is disposed is aligned with the surface 200b opposite to the back surface protection member 120.

  In this specification, “two surfaces are aligned” includes not only a state where the two surfaces are aligned on the same plane but also a state where the surfaces are slightly shifted due to manufacturing tolerances or secular change.

  The thickness of the thermocouple sheet 200 is the same as or thinner than the thickness of the insulating substrate 100. Therefore, in the heat flow measuring device 1, the thickness T1 at the location where the thermocouple sheet 200 is provided is within the range of the thickness T2 where the heat flux sensor 10 is provided.

  Next, a method for manufacturing the heat flow measuring device 1 will be described. In addition, this manufacturing method manufactures a several heat flow measuring apparatus simultaneously.

  As shown in FIG. 6, this manufacturing method includes a thermocouple sheet forming step S10, a heat flux sensor member preparing step S20, a laminate forming step S30, and an integrated pressing step S40.

  First, the thermocouple sheet | seat formation process S10 is demonstrated among the manufacturing methods of the heat flow measuring apparatus 1. FIG. In the thermocouple sheet forming step S10, the thermocouple sheet 200 is formed by the thermocouple preparing step S11, the thermocouple laminate forming step S12, the pressing step S13, and the cutting step S14 shown in FIG.

  In the thermocouple preparation step S11, a first conductor 21 and a second conductor 22 made of metal foils having different thermoelectric power are prepared, and the tips are joined together by welding to form a joint 23. Thereby, the thermocouple 20 is prepared.

  Next, in the thermocouple laminate forming step S12, as shown in FIGS. 8 and 9, the first release paper 51 and the second insulating sheet 220 are disposed on the jig base 40 formed in a predetermined size. The end positioning jig 41 and the intermediate positioning jig 42 are fixed to the jig base 40 with bolts 43 from above. As the first release paper 51, for example, a thermosetting resin sheet or a thermoplastic resin sheet formed from an aramid resin or the like is used. As the second insulating sheet 220, for example, a thermosetting resin sheet or a thermoplastic resin sheet formed from an aramid resin having an adhesive layer on the front surface and the back surface is used. The end positioning jig 41 and the intermediate positioning jig 42 are provided with a plurality of grooves 44 and 45 for positioning the thermocouple 20. A plurality of thermocouples 20 are arranged on the second insulating sheet 220 according to the plurality of grooves 44 and 45. The plurality of thermocouples 20 are arranged in a direction in which a plurality of groove portions 44 and 45 provided in the end portion positioning jig 41 and the intermediate positioning jig 42 are arranged, and face each other with the intermediate positioning jig 42 interposed therebetween. Are arranged as follows.

  Subsequently, as shown in FIG. 10, the holding jig 46 is fixed to the jig base 40 from above the first release paper 51, the second insulating sheet 220, and the thermocouple 20 with bolts 43. Thereby, the position shift of the 1st release paper 51, the 2nd insulating sheet 220, and the thermocouple 20 is prevented. Thereafter, the intermediate positioning jig 42 is removed from the jig base 40.

  Next, as shown in FIG. 11, the first insulating sheet 210 is disposed on the first release paper 51, the second insulating sheet 220, and the thermocouple 20. Thereby, the laminated body of the thermocouple 20 is formed. As the first insulating sheet 210, for example, a thermosetting resin sheet or a thermoplastic resin sheet formed from an aramid resin having an adhesive layer on the front surface and the back surface is used.

  Subsequently, as shown in FIG. 12, the jig base 40 is installed in the press machine 70, and the second release paper 52 and the first buffer material 61 are further arranged on the first insulating sheet 210. As the second release paper 52, for example, a thermosetting resin sheet or a thermoplastic resin sheet formed from an aramid resin or the like is used. As the first buffer material 61, for example, Teflon (registered trademark) is used.

  Next, in press process S13, the laminated body of the thermocouple 20 is heated while pressing in the laminating direction by the press machine 70, and the 1st insulating sheet 210, the thermocouple 20, and the 2nd insulating sheet 220 are crimped | bonded. The pressure of the press machine 70 at this time is 2 MPa or more, for example, and the temperature is 300 ° C. or more. Thereby, the adhesion layers which the 1st insulating sheet 210 and the 2nd insulating sheet 220 have joined, and it becomes the integrated sheet 201 of the state shown in FIG.

  Subsequently, in the cutting step S <b> 14, the integrated sheet 201 is cut at the positions indicated by the one-dot chain lines C <b> 1 to C <b> 4 in FIG. 13. Thereby, as shown in FIG. 14, the thermocouple sheet | seat 200 shape | molded by the predetermined mounting dimension is formed.

  Next, the heat flux sensor member preparation step S20 in the manufacturing method of the heat flow measuring device 1 will be described.

  As shown in FIGS. 15A, 15B, and 15C, in the heat flux sensor member preparing step S20, the insulating substrate 100, the front surface wiring pattern 111, the front surface protection member 110, the back surface wiring pattern 121, and the back surface protection. A member 120 is prepared.

  As shown in FIG. 15 (B), the insulating base material 100 includes a plurality of types of conductive pastes 131 and 141 having different thermoelectric powers embedded in a plurality of via holes 101 and 102 in order to constitute the heat flux sensor 10. It is. The insulating base material 100 may be composed of a plurality of layers, or may be composed of a single layer.

  An example of the manufacturing method of this insulating base material 100 is demonstrated. First, a plurality of first via holes 101 are formed in the insulating base material 100 by a drill or a laser. The plurality of first via holes 101 are filled with a first conductive paste 131 for forming a first interlayer connection member 130 by solid phase sintering. As a method (apparatus) for filling the first via hole 101 with the first conductive paste 131, a method (apparatus) described in Japanese Patent Application No. 2010-50356 by the present applicant may be adopted.

  Briefly, the insulating base material 100 is placed on a suction paper (not shown) laid on a holding table (not shown). Then, the first conductive paste 131 is filled into the first via hole 101 while the first conductive paste 131 is melted. As a result, most of the organic solvent of the first conductive paste 131 is adsorbed to the suction paper, and the alloy powder is placed in close contact with the first via hole 101.

  The first conductive paste 131 is a paste obtained by adding an organic solvent such as paraffin to powder of Bi—Sb—Te alloy in which metal atoms maintain a predetermined crystal structure.

  Next, a plurality of second via holes 102 are formed in the insulating base material 100 by a drill or a laser. The plurality of second via holes 102 are formed so as to be positioned between the plurality of first via holes 101 and the first via holes 101. The plurality of second via holes 102 are filled with a second conductive paste 141 for forming the second interlayer connection member 140 by solid phase sintering. The filling method of the second conductive paste 141 can be performed by the same method as the filling method of the first conductive paste 131 described above.

  The second conductive paste 141 is obtained by adding Bi-Te alloy powder in which metal atoms different from the metal atoms constituting the first conductive paste 131 maintain a predetermined crystal structure to an organic solvent such as terpine. A paste is used. Note that paraffin or the like may be used as the organic solvent of the second conductive paste 141.

  As shown in FIG. 15A, the surface wiring pattern 111 is connected to one end in the thickness direction of the insulating base material 100 in the plurality of conductive pastes 131 and 141. Further, the surface protection member 110 covers one surface in the thickness direction of the insulating base material 100 and the surface wiring pattern 111. The surface protection member 110 is longer in the surface direction than the insulating base material 100.

  An example of a method for manufacturing the surface wiring pattern 111 and the surface protection member 110 will be described. First, a copper foil or the like is formed on at least the surface of the surface protection member 110 that faces the insulating substrate 100. Then, the surface wiring pattern 111 is formed on the surface protection member 110 by appropriately patterning the copper foil.

  As shown in FIG. 15C, the back surface wiring pattern 121 is connected to the other ends in the thickness direction of the insulating base material 100 in the plurality of conductive pastes 131 and 141. The back surface protection member 120 covers the other surface in the thickness direction of the insulating base material 100 and the back surface wiring pattern 121. The back surface protection member 120 is longer in the surface direction than the insulating base material 100 and the surface protection member 110.

  An example of a method for manufacturing the back surface wiring pattern 121 and the back surface protection member 120 will be described. First, a copper foil or the like is formed on at least the surface of the back surface protection member 120 that faces the insulating substrate 100. And the back surface wiring pattern 121 is formed with respect to the back surface protection member 120 by patterning the copper foil suitably.

  Then, laminated body formation process S30 is demonstrated among the manufacturing methods of the heat flow measuring apparatus 1. FIG.

  As shown in FIGS. 16 and 17, the third release paper 53 is arranged on the lower press plate 71 of the press machine, and the thermocouple sheet 200 shown in FIG. 14 is arranged thereon. Subsequently, the back surface protection member 120 having the back surface wiring pattern 121 formed thereon is laminated on the third release paper 53 disposed on the lower press plate 71 and the thermocouple sheet 200, and then the back surface wiring pattern. An insulating base material 100 and a surface protection member 110 on which a surface wiring pattern 111 is formed are sequentially laminated on 121. Further, the fourth release paper 54 and the second cushioning material 62 are disposed on the surface protection member 110. As the third and fourth release paper 54, for example, a thermosetting resin sheet or a thermoplastic resin sheet formed from an aramid resin or the like is used. Further, as the second buffer material 62, for example, Teflon is used.

  Accordingly, the thermocouple sheet 200 is disposed on the opposite side of the back surface protection member 120 to the front surface protection member 110 at a position where the front surface protection member 110 and the back surface protection member 120 extend in the surface direction from the insulating base material 100. The Rukoto. At this time, a portion where at least the conductive pastes 131 and 141 are disposed on the surface 120b of the back surface protection member 120 on the opposite side to the insulating base material 100 and the back surface protection member 120 on the thermocouple sheet 200 on the opposite side. It is set as the state which aligned with the location where the junction part 23 is arrange | positioned at least among the surfaces 200b. It should be noted that the entire surface 120b of the back surface protection member 120 opposite to the insulating substrate 100 and the entire surface 200b of the thermocouple sheet 200 opposite to the back surface protection member 120 are aligned. Is preferred. Further, the joining portion 23 and the conductive pastes 131 and 141 are arranged close to each other so that the joining portion 23 of the thermocouple 20 included in the thermocouple sheet 200 enters the recess 11 included in the insulating base material 100. In this way, a laminate is formed.

  In addition, in this specification, when it is referred to as “a state where two places are aligned,” it includes a state where the two positions are slightly aligned due to manufacturing tolerances in addition to aligning the two positions on the same plane. In addition, the case where “the entire surface is aligned” includes not only the alignment of the entire surface on the same plane but also a slight shift due to manufacturing tolerances.

  Next, of the manufacturing method of the heat flow measuring device 1, the integrated pressing step S40 will be described. In the integrated pressing step S40, the laminated body disposed between the lower press plate 71 and the upper press plate 72 of the press is heated while being pressed in the lamination direction in a vacuum state. The pressure of the press machine at this time is, for example, 10 MPa or more, and the temperature is 320 ° C. or more. Accordingly, the plurality of first and second conductive pastes 131 and 141 embedded in the plurality of via holes 101 and 102 of the insulating base material 100 are solid-sintered to form a plurality of first and second interlayer connection members 130, 140, and the first and second interlayer connection members 130, 140, the front surface wiring pattern 111, and the back surface wiring pattern 121 are electrically connected. Furthermore, the insulating base material 100, the surface protection member 110, the back surface protection member 120, and the thermocouple sheet 200 are pressure-bonded. By this one-time integrated pressing step S40, the laminated body is integrated, and the heat flux sensor 10 and the thermocouple 20 are integrally formed.

  In addition, the several heat flow measuring apparatus manufactured with the manufacturing method mentioned above is divided | segmented into the single heat flow measuring apparatus 1 at a next process.

  The heat flow measuring apparatus 1 according to the first embodiment described above has the following operational effects.

  (1) In the heat flow measuring apparatus 1 of the first embodiment, the thermocouple sheet 200 is fixed at a position where the surface protection member 110 or the back surface protection member 120 extends from the insulating substrate 100 in the surface direction.

  According to this, it is possible to reduce the thickness of the heat flow measuring device 1 as compared with the configuration in which the heat flux sensor 10 and the thermocouple 20 are stacked in the thickness direction. Therefore, when the heat flow measuring device 1 is attached to the surface 3 of the measurement object 2, the turbulence of the airflow in the vicinity of the surface 3 of the measurement object 2 is suppressed. Therefore, the heat flow measuring device 1 can accurately detect the heat flow of the measurement object 2 by reducing temperature drift due to changes in the outside air temperature based on the output signal of the heat flux sensor 10 and the output signal of the thermocouple 20.

  Further, by fixing the thermocouple sheet 200 at a position where the front surface protection member 110 or the back surface protection member 120 extends from the insulating base material 100 in the surface direction, the heat flux sensor 10 and the thermocouple 20 are brought closer to each other in the surface direction. It becomes possible to provide. Therefore, each of the heat flux sensor 10 and the thermocouple 20 detects the heat flow and temperature at substantially the same position of the measurement object 2. Therefore, the signal of the thermocouple 20 and the signal of the heat flux sensor 10 correspond to each other. As a result, the heat flow measuring device 1 can reduce the influence of the temperature drift from the signal of the heat flux sensor 10.

  (2) In 1st Embodiment, the surface 120b on the opposite side to the insulation base material 100 among the back surface protection members 120 in the location where the several interlayer connection members 130 and 140 are arrange | positioned at the heat flux sensor 10, and a thermocouple sheet | seat. The surface 200b opposite to the back surface protection member 120 of the thermocouple sheet 200 at the place where the joint portion 23 is disposed at 200 is aligned.

  According to this, when the heat flow measuring device 1 is attached to the surface 3 of the measurement object 2, the heat flux sensor 10 and the joint 23 of the thermocouple 20 are brought close to the surface 3 of the measurement object 2, and the measurement object The heat flux sensor 10 and the thermocouple sheet 200 can be brought into close contact with the surface 3 of 2. Therefore, the heat flow measuring device 1 can accurately detect the heat flow characteristics of the measurement object 2 based on the output signal of the heat flux sensor 10 and the output signal of the thermocouple 20.

  (3) In 1st Embodiment, the thickness T1 of the location in which the thermocouple sheet | seat was provided is in the range of the thickness T2 of the location in which the heat flux sensor 10 was provided.

  According to this, the thickness of the heat flow measuring device 1 can be reduced within the range of the thickness T2 of the heat flux sensor 10. Therefore, when the heat flow measuring device 1 is attached to the surface 3 of the measurement object 2, the turbulence of the airflow in the vicinity of the surface 3 of the measurement object 2 can be suppressed.

  (4) In 1st Embodiment, the junction part 23 of the thermocouple 20 which the thermocouple sheet | seat 200 has has entered into the recessed part 11 which the insulating base material 100 has.

  According to this, the heat flow measuring device 1 allows the heat flow and temperature at substantially the same location of the measurement object 2 by reducing the distance between the interlayer connection members 130 and 140 of the heat flux sensor 10 and the joint 23 of the thermocouple 20. Can be measured. Therefore, the heat flow measuring device 1 can accurately detect the heat flow characteristics of the measurement object 2 based on the output signal of the heat flux sensor 10 and the output signal of the thermocouple 20.

  The manufacturing method of the heat flow measuring device 1 of the first embodiment has the following operational effects.

  (5) The manufacturing method of the heat flow measuring device 1 according to the first embodiment is such that the front surface protection member 110 and the rear surface protection member 120 extend from the insulating base material 100 in the surface direction. A thermocouple sheet 200 is disposed on the opposite side of 110 to form a laminated body, and the laminated body is heated while being pressurized in the laminating direction. At this time, the conductive pastes 131 and 141 are solid-sintered to form the interlayer connection members 130 and 140, and the interlayer connection members 130 and 140 are electrically connected to the front surface wiring pattern 111 and the back surface wiring pattern 121, and The insulating substrate 100, the surface protection member 110, the back surface protection member 120, and the thermocouple sheet 200 are pressure-bonded. Thereby, the heat flux sensor 10 and the thermocouple 20 are integrally formed.

  According to this, it is possible to make the thickness of the heat flux sensor 10 provided in the heat flow measuring device 1 equal to the thickness of the thermocouple sheet 200 and to reduce the thickness of the heat flow measuring device 1. Therefore, when the heat flow measuring device 1 is attached to the surface 3 of the measurement object 2, the turbulence of the airflow in the vicinity of the surface 3 of the measurement object 2 is suppressed. Therefore, the heat flow measuring device 1 can accurately detect the heat flow of the measurement object 2 by reducing temperature drift due to changes in the outside air temperature based on the output signal of the heat flux sensor 10 and the output signal of the thermocouple 20.

  In addition, according to this manufacturing method, the heat flow measuring device 1 can be formed by pressing the insulating base material 100, the surface protection member 110, the back surface protection member 120, the thermocouple sheet 200, and the like once. It becomes possible. Therefore, it is possible to suppress the formation of wrinkles or gaps in these members.

  (6) In the manufacturing method of the first embodiment, when the integrated pressing step S40 is performed on the laminate, at least the conductive paste 131 of the surface 120b located on the opposite side of the insulating base material 100 in the back surface protection member 120. , 141 and the portion of the surface 200b opposite to the back surface protection member 120 in the thermocouple sheet 200 are aligned with at least the portion where the joint 23 is disposed.

  According to this, when the heat flow measuring device 1 is attached to the surface 3 of the measurement object 2, the heat flux sensor 10 and the joint 23 of the thermocouple 20 are brought closer to the surface 3 of the measurement object 2, The heat flux sensor 10 and the thermocouple sheet 200 can be brought into close contact with the surface 3 of the measurement object 2. Therefore, the heat flow measuring device 1 can accurately detect the heat flow characteristics of the measurement object 2 based on the output signal of the heat flux sensor 10 and the output signal of the thermocouple 20.

  (7) In the manufacturing method of 1st Embodiment, when performing laminated body formation process S30, the junction part 23 of the thermocouple 20 which the thermocouple sheet | seat 200 has enters the recessed part 11 which the insulating base material 100 has.

  According to this, since the distance between the interlayer connection members 130 and 140 of the heat flux sensor 10 and the joint portion 23 of the thermocouple 20 is reduced in the heat flow measuring device 1, the heat flow and temperature at substantially the same location of the measurement object 2. Can be measured. Therefore, the heat flow measuring device 1 can accurately detect the heat flow characteristics of the measurement object 2 based on the output signal of the heat flux sensor 10 and the output signal of the thermocouple 20.

  (8) In the manufacturing method of the first embodiment, the first insulating sheet 210 is disposed on one side of the thermocouple 20 and the second insulating sheet 220 is disposed on the other side in the thermocouple sheet forming step S10. The laminated body of the thermocouple 20 formed in this manner is heated while being pressed in the laminating direction, and the first insulating sheet 210, the thermocouple 20, and the second insulating sheet 220 are pressure bonded.

  According to this, even when a thin thermocouple 20 is used, it can be easily handled. Therefore, when the thermocouple sheet 200 is disposed at a position where the front surface protection member 110 and the back surface protection member 120 extend in the plane direction from the insulating base material 100, the thermocouple sheet 200 can be accurately and easily positioned with respect to the heat flux sensor 10. It can be carried out.

(Second Embodiment)
A second embodiment of the present invention will be described. In the second embodiment, the arrangement of the thermocouple sheet 200 is changed with respect to the first embodiment, and the other parts are the same as those in the first embodiment. Therefore, only different portions from the first embodiment will be described. .

  As shown in FIGS. 18 and 19, the thermocouple sheet 200 constituting the heat flow measuring device 1 of the second embodiment is a position where the surface protection member 110 and the back surface protection member 120 extend from the insulating base material 100 in the surface direction. In FIG. 5, it is fixed between the front surface protection member 110 and the back surface protection member 120. In this state, of the back surface protection member 120 where the plurality of interlayer connection members 130 and 140 are disposed in the heat flux sensor 10, the surface 120 b opposite to the insulating base material 100, and the thermocouple sheet 200 are joined to the joint 23. Of the back surface protection member 120 at the place where is disposed, the surface 120b opposite to the thermocouple sheet 200 is aligned.

  An insulating sheet 230 for short circuit prevention is provided between the thermocouple sheet 200 and the back surface protection member 120. This insulating sheet 230 for short circuit prevention includes the pad portions 24 and 25 of the thermocouple 20 included in the thermocouple sheet 200 and the pad portions 124 and 125 where the back surface wiring pattern 121 is exposed from the second insulating sheet 220 included in the thermocouple sheet 200. And prevent short circuit.

  The total thickness of the thermocouple sheet 200 and the short-circuit prevention insulating sheet 230 is the same as or thinner than the thickness of the insulating substrate 100. Therefore, in the heat flow measuring device 1, the thickness T1 at the location where the thermocouple sheet 200 is provided is within the range of the thickness T2 where the heat flux sensor 10 is provided.

  Next, the manufacturing method of the heat flow measuring apparatus 1 of 2nd Embodiment is demonstrated.

  Similarly to the first embodiment, the manufacturing method of the second embodiment includes a thermocouple sheet forming step S10, a heat flux sensor member preparing step S20, a laminate forming step S30, and an integrated pressing step S40. The thermocouple sheet forming step S10, the heat flux sensor member preparing step S20, and the integrated pressing step S40 are the same as the steps described in the first embodiment.

  In the laminated body forming step S30 of the second embodiment, as shown in FIG. 20, the back surface in which the back surface wiring pattern 121 is formed on the third release paper 53 disposed on the lower press plate 71 of the press machine. A protective member 120 is disposed. The insulating base material 100 and the thermocouple sheet 200 are arranged side by side on the back surface protection member 120, the surface protection member 110 on which the surface wiring pattern 111 is formed is disposed thereon, and further, the fourth release paper 54 is disposed. And the second cushioning material 62 is disposed.

  Thereby, the thermocouple sheet 200 is disposed between the front surface protection member 110 and the rear surface protection member 120 at a position where the front surface protection member 110 and the rear surface protection member 120 extend in the surface direction from the insulating base material 100. It becomes. At this time, at least the portion where the conductive pastes 131 and 141 are disposed on the surface 120b located on the opposite side of the insulating base material 100 in the back surface protection member 120 and the side opposite to the thermocouple sheet 200 in the back surface protection member 120. Of the surface 120b, at least a portion where the joint portion 23 is disposed is in a state substantially aligned on the same plane. Note that the entire surface 120b of the back surface protection member 120 opposite to the insulating substrate 100 and the entire surface 120b of the back surface protection member 120 opposite to the thermocouple sheet 200 are aligned. Is preferred. Further, the joining portion 23 and the conductive pastes 131 and 141 are arranged close to each other so that the joining portion 23 of the thermocouple 20 included in the thermocouple sheet 200 enters the recess 11 included in the insulating base material 100. In this way, a laminate is formed.

  Next, in the integrated pressing step S40, the laminated body disposed between the lower press plate 71 and the upper press plate 72 of the press is heated while being pressed in the lamination direction in a vacuum state. Accordingly, the plurality of first and second conductive pastes 131 and 141 embedded in the plurality of via holes 101 and 102 of the insulating base material 100 are solid-sintered to form a plurality of first and second interlayer connection members 130, 140, and the first and second interlayer connection members 130, 140, the front surface wiring pattern 111, and the back surface wiring pattern 121 are electrically connected. Furthermore, the insulating base material 100, the surface protection member 110, the back surface protection member 120, and the thermocouple sheet 200 are pressure-bonded. By this one-time integrated pressing step S40, the laminated body is integrated, and the heat flux sensor 10 and the thermocouple 20 are integrally formed.

  In the heat flow measuring device 1 of the second embodiment described above, the surface 120b opposite to the insulating base member 100 in the back surface protection member 120 at the place where the plurality of interlayer connection members 130 and 140 are arranged in the heat flux sensor 10. And the surface 120b on the opposite side to the thermocouple sheet 200 of the back surface protection member 120 at the location where the joint portion 23 is disposed on the thermocouple sheet 200 is aligned.

  Even with this configuration, compared to a configuration in which the thermocouple 20 is stacked on the surface opposite to the measurement target 2 in the heat flux sensor 10, the joint 23 of the thermocouple 20 is connected to the measurement target 2. It is possible to approach the surface 3. Further, the heat flux sensor 10 and the thermocouple sheet 200 can be brought into close contact with the surface 3 of the measurement object 2. Therefore, the heat flow measuring device 1 can accurately detect the heat flow characteristics of the measurement object 2 based on the output signal of the heat flux sensor 10 and the output signal of the thermocouple 20.

(Third embodiment)
A third embodiment of the present invention will be described. 3rd Embodiment changes the structure of the thermocouple 20 which the thermocouple sheet | seat 200 has with respect to 1st Embodiment, Since it is the same as that of 1st, 2nd Embodiment about others, 1st, Only parts different from the second embodiment will be described.

  In FIG. 21, only the thermocouple 20 included in the thermocouple sheet 200 constituting the heat flow measuring device 1 is shown. The thermocouple 20 is formed by welding a first conductor 21 and a second conductor 22 made of metal foils having different thermoelectric powers by welding or the like. A location where the first conductor 21 and the second conductor 22 are joined becomes a joint 23 for detecting temperature. The first conductor 21 has a first pad portion 24 for wiring connection at the end opposite to the joint portion 23. The second conductor 22 has a second pad portion 25 for wiring connection at the end opposite to the joint portion 23. Here, in the thermocouple 20 of the third embodiment, the width W 1 of the first conductor 21 excluding the first pad portion 24 is narrower than the width W 2 of the first pad portion 24. Further, the width W 3 of the second conductor 22 excluding the second pad portion 25 is narrower than the width W 4 of the second pad portion 25. When a temperature difference occurs between the junction 23 and the detection unit 30, the thermocouple 20 outputs a thermoelectromotive force generated in the junction 23 due to the Seebeck effect as a sensor signal.

  In the third embodiment, with the above configuration, the heat capacity of the first conductor 21 excluding the first pad portion 24 can be reduced, and the heat capacity of the second conductor 22 excluding the second pad portion 25 can be reduced. Therefore, in the thermocouple 20, when a temperature difference occurs between the joint portion 23 and the detection portion 30, the heat of the joint portion 23 is suppressed from being transmitted to the first conductor 21 and the second conductor 22. Therefore, since the thermocouple 20 is suppressed from reducing the thermoelectromotive force generated at the joint 23 by heat transfer from the joint 23 to the first conductor 21 and the second conductor 22, the temperature of the joint 23 is reduced. It can be detected accurately.

  In the third embodiment, as in the first and second embodiments, the thermocouple sheet 200 is formed by covering the thermocouple 20 from both sides with the first insulating sheet 210 and the second insulating sheet 220. The Therefore, even when the width W1 of the first conductor 21 excluding the first pad portion 24 and the width W3 of the second conductor 22 excluding the second pad portion 25 are made thin, the thermocouple sheet 200 is easily handled. Is possible. Therefore, when the thermocouple sheet 200 is disposed at a position where the surface protection member 110 and the back surface protection member 120 extend in the plane direction from the insulating base material 100, the thermocouple sheet 200 can be accurately and easily positioned with respect to the heat flux sensor 10. It can be carried out.

(Fourth embodiment)
A fourth embodiment of the present invention will be described. In the fourth embodiment, the configuration of the thermocouple 20 included in the thermocouple sheet 200 is changed with respect to the first embodiment, and the others are the same as those in the first and second embodiments. Only parts different from the second embodiment will be described.

  In FIG. 22, only the thermocouple 20 included in the thermocouple sheet 200 constituting the heat flow measuring device 1 is shown. The thermocouple 20 is obtained by joining a first conductor 21 and a second conductor 22 made of linear members having different thermoelectric powers by welding or the like. A location where the first conductor 21 and the second conductor 22 are joined becomes a joint 23 for detecting temperature. A first pad 26 for wiring connection is attached to the first conductor 21 at the end opposite to the joint 23 by welding or the like. Further, a second pad 27 for wiring connection is attached to the second conductor 22 at the end opposite to the joint 23 by welding or the like. The width W5 of the first conductor 21 made of a linear member is narrower than the width W6 of the first pad 26. Further, the width W7 of the second conductor 22 made of a linear member is narrower than the width W8 of the second pad 27. When a temperature difference occurs between the junction 23 and the detection unit 30, the thermocouple 20 outputs a thermoelectromotive force generated in the junction 23 due to the Seebeck effect as a sensor signal.

  In the fourth embodiment, the heat capacity of the first conductor 21 and the heat capacity of the second conductor 22 can be reduced by the above-described configuration. Therefore, in the thermocouple 20, when a temperature difference occurs between the joint portion 23 and the detection portion 30, the heat of the joint portion 23 is suppressed from being transmitted to the first conductor 21 and the second conductor 22. Therefore, the thermocouple 20 is able to accurately detect the temperature of the junction 23 because the thermoelectromotive force generated in the junction 23 due to heat transfer to the first conductor 21 and the second conductor 22 is suppressed. .

  In the fourth embodiment, as in the first to third embodiments, the thermocouple sheet 200 is formed by covering the thermocouple 20 from both sides with the first insulating sheet 210 and the second insulating sheet 220. The Therefore, even when the width W5 of the first conductor 21 and the width W7 of the second conductor 22 are reduced, the thermocouple sheet 200 can be easily handled. Therefore, when the thermocouple sheet 200 is disposed at a position where the front surface protection member 110 and the back surface protection member 120 extend in the plane direction from the insulating base material 100, the thermocouple sheet 200 can be accurately and easily positioned with respect to the heat flux sensor 10. It can be carried out.

(Other embodiments)
The present invention is not limited to the embodiment described above, and can be appropriately changed within the scope described in the claims. Further, the above embodiments are not irrelevant to each other, and can be combined as appropriate unless the combination is clearly impossible. In each of the above-described embodiments, it is needless to say that elements constituting the embodiment are not necessarily indispensable except for the case where it is clearly indicated that the element is essential and the case where the element is clearly considered essential in principle. Yes. Further, in each of the above embodiments, when numerical values such as the number, numerical value, quantity, range, etc. of the constituent elements of the embodiment are mentioned, it is clearly limited to a specific number when clearly indicated as essential and in principle. The number is not limited to the specific number except for the case. Further, in each of the above embodiments, when referring to the shape, positional relationship, etc. of the component, etc., the shape, unless otherwise specified and in principle limited to a specific shape, positional relationship, etc. It is not limited to the positional relationship or the like.

  For example, in the above-described embodiment, the heat flow measurement device is used by being attached to the surface of the measurement object. However, the heat flow measurement device may be used by being embedded in the measurement object.

(Summary)
According to the first aspect shown in a part or all of the above-described embodiments, the method for manufacturing a heat flow measuring device includes a first conductor and a second conductor made of metals having different thermoelectric powers. A thermocouple having a junction, a first insulating sheet covering the first conductor and the second conductor from one side in a direction intersecting the direction in which the first conductor and the second conductor are arranged, and the first conductor and the second conductor Forming a thermocouple sheet having a second insulating sheet covering from the opposite side of the first insulating sheet, and a plurality of types of conductive pastes having different thermoelectric powers to form a plurality of via holes in order to constitute a heat flux sensor Covering an embedded insulating base, a surface wiring pattern connected to one end in the thickness direction of the insulating base in a plurality of conductive pastes, and one surface in the thickness direction of the insulating base and the surface wiring pattern Surface protection member, multiple leads A back surface wiring pattern connected to the other ends in the thickness direction of the insulating base material in the conductive paste, and a back surface protection member that covers the other surface in the thickness direction of the insulating base material and the back surface wiring pattern; At the position where the surface protection member and the back surface protection member extend in the surface direction from the insulating base material, a thermocouple sheet is arranged on the opposite side of the back surface protection member from the surface protection member, or the surface protection member and the back surface protection Forming a laminated body by placing a thermocouple sheet between the members, and heating the laminated body while applying pressure in the laminating direction to solidify a plurality of conductive pastes embedded in a plurality of via holes in the insulating base material A plurality of conductors are sintered to electrically connect the conductor, the front surface wiring pattern, and the back surface wiring pattern, and the insulating base material, the front surface protection member, the back surface protection member, and the thermocouple sheet are pressure-bonded. A heat flux sensor and a thermocouple comprising forming integrally.

  According to the second aspect, the thermocouple sheet is disposed on the opposite side of the back surface protection member to the front surface protection member at a position where the front surface protection member and the back surface protection member extend in the surface direction from the insulating base material. Is. When forming the heat flux sensor and the thermocouple integrally by heating while pressing the laminated body in the laminating direction, the conductive paste is disposed on the surface of the back surface protection member on the side opposite to the insulating substrate. It is set as the state which aligned the location and the location where the junction part was arrange | positioned among the surfaces on the opposite side to the back surface protection member in a thermocouple sheet | seat.

  According to this, when the heat flow measuring device is attached to the surface of the measurement object, the heat flux sensor and the thermocouple junction are brought close to the surface of the measurement object, and the heat flux sensor is placed on the surface of the measurement object. And the thermocouple sheet can be brought into close contact with each other. Therefore, the heat flow measuring device can accurately detect the heat flow characteristics of the measurement object based on the output signal of the heat flux sensor and the output signal of the thermocouple.

  According to the third aspect, the thermocouple sheet is disposed between the front surface protection member and the rear surface protection member at a position where the front surface protection member and the rear surface protection member extend in the surface direction from the insulating base material. is there. When forming the heat flux sensor and the thermocouple sheet integrally by pressing the laminated body in the laminating direction, the conductive paste is disposed on the surface of the back surface protection member that is located on the side opposite to the insulating base. And the place where the joint portion is arranged on the opposite surface of the back surface protection member to the thermocouple sheet.

  The heat flow measuring device manufactured by this manufacturing method also has a thermocouple junction part to be measured compared to a configuration in which a thermocouple is stacked on the opposite surface of the heat flux sensor. It is possible to get close to the surface. Further, the heat flux sensor and the thermocouple sheet can be brought into close contact with the surface of the measurement object. Therefore, the heat flow measuring device can accurately detect the heat flow characteristics of the measurement object based on the output signal of the heat flux sensor and the output signal of the thermocouple.

  According to the 4th viewpoint, the insulating base material has the recessed part dented from the edge | side of the thermocouple sheet side to the conductor side. When the thermocouple sheet is disposed at a position where the surface protection member and the back surface protection member extend in the plane direction from the insulating base material to form a laminate, the insulating base material has a thermocouple junction of the thermocouple sheet. It is set as the state which got into the recessed part.

  According to this, since the distance between the interlayer connection member of the heat flux sensor and the junction of the thermocouple is reduced, the heat flow measuring device can measure the heat flow and temperature at substantially the same location of the measurement object. . Therefore, the heat flow measuring device can accurately detect the heat flow characteristics of the measurement object based on the output signal of the heat flux sensor and the output signal of the thermocouple.

  According to a fifth aspect, a method of forming a thermocouple sheet includes preparing a thermocouple in which a first conductor and a second conductor are connected, and a direction in which the first conductor and the second conductor are arranged. A first insulating sheet is disposed on one side of the intersecting direction and a second insulating sheet is disposed on the other side to form a thermocouple laminate, and heating is performed while pressing the thermocouple laminate in the laminating direction. And crimping the first insulating sheet, the thermocouple, and the second insulating sheet.

  According to this, even when the thermocouple is made thin, it can be easily handled. Therefore, when the thermocouple sheet is disposed at a position where the surface protection member and the back surface protection member extend in the plane direction from the insulating base material, the thermocouple sheet can be accurately and easily positioned with respect to the heat flux sensor.

  According to the sixth aspect, the first conductor and the second conductor of the thermocouple are made of metal foil. The 1st conductor has the 1st pad part for wiring connection in the edge part on the opposite side to a junction part. The 2nd conductor has the 2nd pad part for wiring connection in the edge part on the opposite side to a junction part. The width of the first conductor excluding the first pad portion is narrower than the width of the first pad portion. The width of the second conductor excluding the second pad portion is narrower than the width of the second pad portion.

  According to this, it is possible to reduce the heat capacity of the first conductor excluding the first pad part and to reduce the heat capacity of the second conductor excluding the second pad part. Therefore, it is suppressed that the heat of a junction part is transmitted to the 1st conductor and the 2nd conductor. Therefore, the thermocouple can accurately detect the temperature of the junction.

  According to the 7th viewpoint, the 1st conductor and 2nd conductor of a thermocouple are comprised from the linear member. A first pad for wiring connection is attached to the first conductor at the end opposite to the joint. A second pad for wiring connection is attached to the end of the second conductor opposite to the joint.

  According to this, since the heat capacities of the first conductor and the second conductor are reduced, it is possible to suppress the heat of the joint from being transmitted to the first conductor and the second conductor. Therefore, the thermocouple can accurately detect the temperature of the junction.

S10 Thermocouple sheet formation process S20 Heat flux sensor member preparation process S30 Laminate body formation process S40 Integrated press process 100 Insulating base material 110 Surface protection member 120 Back surface protection member 200 Thermocouple sheet 210 First insulating sheet 220 Second insulating sheet

Claims (7)

A thermocouple (20) having a joint (23) to which a first conductor (21) and a second conductor (22) made of metals having different thermoelectric power are connected, the first conductor and the second conductor, The first insulating sheet (210) covering the first conductor and the second conductor from one side in the direction intersecting the direction in which the first and second conductors are arranged, and the first conductor and the second conductor are the first insulating sheet Forming a thermocouple sheet (200) having a second insulating sheet (220) covering from the opposite side (S10);
Insulating base material (100) in which a plurality of types of conductive pastes (131, 141) having different thermoelectric powers are embedded in a plurality of via holes to constitute the heat flux sensor (10), and the insulation in a plurality of the conductive pastes A surface wiring pattern (111) connected to one end in the thickness direction of the substrate, a surface protection member (110) covering one surface (100a) in the thickness direction of the insulating substrate and the surface wiring pattern, The back surface wiring pattern (121) connected to one end in the thickness direction of the insulating base material in the plurality of conductive pastes, and the other surface (100b) in the thickness direction of the insulating base material and the back surface wiring pattern Preparing a back surface protection member (120) that covers (S20);
In the position where the surface protection member and the back surface protection member extend in the surface direction from the insulating base material, the thermocouple sheet is disposed on the opposite side of the back surface protection member from the surface protection member, or Arranging the thermocouple sheet between the surface protection member and the back surface protection member to form a laminate (S30);
The laminate is heated while being pressed in the laminating direction, and the plurality of conductive pastes embedded in the plurality of via holes of the insulating base material are solid-sintered to form a plurality of conductors (130, 140). The conductor, the front surface wiring pattern, and the back surface wiring pattern are electrically connected, and the insulating base material, the front surface protection member, the back surface protection member, and the thermocouple sheet are pressure-bonded, and the heat flux The manufacturing method of the heat flow measuring apparatus including forming a sensor and the said thermocouple integrally (S40). When the laminated body is formed, the thermocouple on the opposite side of the back surface protection member to the front surface protection member at a position where the front surface protection member and the back surface protection member extend in the surface direction from the insulating base material. Place the sheet,
When the laminated body is heated while being pressed in the laminating direction to integrally form the heat flux sensor and the thermocouple, the surface (120b) of the back surface protection member positioned on the side opposite to the insulating base Of these, the portion where the conductive paste is disposed and the portion where the joint portion is disposed in the surface (200b) opposite to the back surface protection member of the thermocouple sheet are aligned. The manufacturing method of the heat flow measuring apparatus as described in any one of. When the laminate is formed, the thermocouple sheet is placed between the front surface protection member and the rear surface protection member at a position where the front surface protection member and the rear surface protection member extend in the surface direction from the insulating base material. Place and
When forming the heat flux sensor and the thermocouple sheet integrally by pressurizing the laminate in the laminating direction, the surface of the back surface protection member on the side opposite to the insulating substrate is the surface. The heat flow measurement according to claim 1, wherein a portion where the conductive paste is disposed and a portion where the joint portion is disposed on a surface of the back surface protection member opposite to the thermocouple sheet are aligned. Device manufacturing method. The insulating substrate is prepared having a recess (11) recessed from the side (12) on the thermocouple sheet side to the conductor side,
When the thermocouple sheet is disposed at a position where the surface protection member and the back surface protection member extend in the plane direction from the insulating substrate to form the laminate, the thermocouple sheet has the thermocouple. The manufacturing method of the heat flow measuring device according to any one of claims 1 to 3, wherein the joint portion is in a state of entering the concave portion of the insulating base material. In forming the thermocouple sheet,
Preparing the thermocouple having the joint to which the first conductor and the second conductor are connected (S11);
The first insulating sheet is disposed on one side of the direction intersecting the direction in which the first conductor and the second conductor are arranged, and the second insulating sheet is disposed on the other side to form a thermocouple laminate. Forming (S12);
5. The method according to claim 1, further comprising: heating the thermocouple laminate while pressurizing the thermocouple laminate in the laminating direction, and crimping the first insulating sheet, the thermocouple, and the second insulating sheet (S <b> 13). The manufacturing method of the heat flow measuring apparatus as described in any one of. In forming the thermocouple sheet, the first conductor and the second conductor of the thermocouple are prepared from a metal foil,
The first conductor has a first pad portion (24) for wiring connection at an end opposite to the joint portion,
The second conductor has a second pad portion (25) for wiring connection at an end opposite to the joint portion,
The width of the first conductor excluding the first pad portion is narrower than the width of the first pad portion,
6. The method of manufacturing a heat flow measuring device according to claim 1, wherein a width of the second conductor excluding the second pad portion is prepared smaller than a width of the second pad portion. In forming the thermocouple sheet, the first conductor and the second conductor of the thermocouple are prepared from linear members,
In the first conductor, a first pad (26) for wiring connection is attached to the end opposite to the joint,
The method for manufacturing a heat flow measuring device according to any one of claims 1 to 5, wherein a second pad (27) for wiring connection is attached to the second conductor at an end opposite to the joint. .

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