JP6977930B2 - Resonator cavity structure - Google Patents

Resonator cavity structure Download PDF

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JP6977930B2
JP6977930B2 JP2017227897A JP2017227897A JP6977930B2 JP 6977930 B2 JP6977930 B2 JP 6977930B2 JP 2017227897 A JP2017227897 A JP 2017227897A JP 2017227897 A JP2017227897 A JP 2017227897A JP 6977930 B2 JP6977930 B2 JP 6977930B2
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copper foil
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JP2019100703A (en
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一房 野田
雅弘 堀部
悠人 加藤
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National Institute of Advanced Industrial Science and Technology AIST
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Description

本発明は共振器キャビティ構造に関し、より詳細には平衡形円板共振器のキャリブレーション用治具に関する。 The present invention relates to a resonator cavity structure, and more particularly to a jig for calibrating a balanced disk resonator.

平衡形円板共振器を用いて誘電体の誘電率を測定する方法が知られている。
図３（Ａ）に示すように、平衡形円板共振器３０は、基台により支持された導体からなる円板状の下板３２と、下板３２の上方に昇降可能に配置された導体からなる円板状の上板３４とを有している。
図３（Ａ）〜（Ｃ）に示すように、それら上板３４および下板３２の中心に電磁波を通過させる励振口３２０２、３４０２が形成され、上板３４は平面視した場合、下板３２の励振口３２０２に上板３４の励振口３４０２を合致させて昇降される。
この測定方法では、下板３２の上面に被測定物が載置され、上板３４が下降することで上板３４と下板３２との間に測定物を挟持し、上板３４の励振口３４０２と下板３２の励振口３２０２の軸心が合致された状態で下板３２と上板３４とを挟持する。
そして、下板３２の励振口３２０２と、上板３４の励振口３４０２とにそれぞれ電極３６、３８を挿入し、その状態で上板３４または下板３２の一方の励振口から被測定物に電磁波を放射し、被測定物を通過した電磁波を上板３４または下板３２の他方の励振口を介して測定することにより被測定物の誘電率を測定する。 A method of measuring the dielectric constant of a dielectric using a balanced disk resonator is known.
As shown in FIG. 3A, the balanced disk resonator 30 has a disk-shaped lower plate 32 made of a conductor supported by a base and a conductor arranged so as to be able to move up and down above the lower plate 32. It has a disk-shaped upper plate 34 made of.
As shown in FIGS. 3A to 3C, an excitation port 3202 or 3402 for passing an electromagnetic wave is formed at the center of the upper plate 34 and the lower plate 32, and the upper plate 34 is the lower plate 32 when viewed in a plan view. The excitation port 3202 of the upper plate 34 is aligned with the excitation port 3402 of the upper plate 34 and is moved up and down.
In this measuring method, the object to be measured is placed on the upper surface of the lower plate 32, and the object to be measured is sandwiched between the upper plate 34 and the lower plate 32 by lowering the upper plate 34, and the excitation port of the upper plate 34 is used. The lower plate 32 and the upper plate 34 are sandwiched in a state where the axes of the excitation port 3202 of the lower plate 32 and the lower plate 32 are aligned with each other.
Then, the electrodes 36 and 38 are inserted into the excitation port 3202 of the lower plate 32 and the excitation port 3402 of the upper plate 34, respectively, and in that state, electromagnetic waves are emitted from one of the excitation ports of the upper plate 34 or the lower plate 32 to the object to be measured. The dielectric constant of the object to be measured is measured by measuring the electromagnetic wave that has passed through the object to be measured through the other excitation port of the upper plate 34 or the lower plate 32.

ところでこの測定方法では、被測定物の測定を行なう前に、測定時の誤差を補正するキャリブレーション（ゼロ点調整）が行なわれる。
キャリブレーションを行なうため、下板３２の上面には励振口３２０２と同軸の環板状の凸部３２０４が設けられ、上板３４の下面には凸部３２０４が収容される凹部３４０４が設けられている。
キャリブレーションを行なうにあたっては、以下の治具が用いられている。
図３（Ｂ）に示すように、治具４０は、円形の銅箔４２と環板状のフィルム４４とを備えている。
銅箔４２は、励振口３２０２、３４０２よりも大きな外径の円形を有し、厚さは例えば５０μｍと極めて薄い。
フィルム４４は誘電率が低く、中心に円形の銅箔４２の外径と同一内径の中心孔４４０２が形成されており、厚さは、銅箔４２よりも薄く、外径は、下板３２に設けられた環板状の凸部３２０４に合致する寸法で形成されている。 By the way, in this measurement method, before measuring the object to be measured, calibration (zero point adjustment) for correcting an error at the time of measurement is performed.
In order to perform calibration, a ring plate-shaped convex portion 3204 coaxial with the excitation port 3202 is provided on the upper surface of the lower plate 32, and a concave portion 3404 in which the convex portion 3204 is housed is provided on the lower surface of the upper plate 34. There is.
The following jigs are used for calibration.
As shown in FIG. 3B, the jig 40 includes a circular copper foil 42 and a ring plate-shaped film 44.
The copper foil 42 has a circular shape with an outer diameter larger than that of the excitation ports 3202 and 3402, and the thickness is extremely thin, for example, 50 μm.
The film 44 has a low dielectric constant, and a center hole 4402 having the same inner diameter as the outer diameter of the circular copper foil 42 is formed in the center, the thickness is thinner than the copper foil 42, and the outer diameter is the lower plate 32. It is formed with dimensions that match the provided ring plate-shaped convex portion 3204.

治具の使用方法は以下の通りである。
まず、フィルム４４の外周を下板３２の環板状の凸部３２０４に当て付けて下板３２の上面に載置する。
次に、銅箔４２の外周をフィルム４４の中心孔４４０２の外周に合わせ、銅箔４２を中心孔４４０２に挿入しフィルム４４の内側で下板３２の上面に載置する。
次に、上板３４の励振口３４０２と下板３２の励振口３２０２の軸心を合致させて下板３２を下降し、それら上板３４と下板３２との間に銅箔４２を挟持する。
その状態で上板３４または下板３２の一方の励振口に配置した電極から被測定物に電磁波を放射し、銅箔４２を通過した電磁波を上板３４または下板３２の他方の励振口に配置した電極を介して測定し、その測定結果に基づいてキャリブレーションを行なう。 The method of using the jig is as follows.
First, the outer periphery of the film 44 is applied to the ring plate-shaped convex portion 3204 of the lower plate 32 and placed on the upper surface of the lower plate 32.
Next, the outer circumference of the copper foil 42 is aligned with the outer circumference of the center hole 4402 of the film 44, the copper foil 42 is inserted into the center hole 4402, and the copper foil 42 is placed inside the film 44 on the upper surface of the lower plate 32.
Next, the lower plate 32 is lowered by aligning the axes of the excitation port 3402 of the upper plate 34 and the excitation port 3202 of the lower plate 32, and the copper foil 42 is sandwiched between the upper plate 34 and the lower plate 32. ..
In that state, electromagnetic waves are radiated from the electrodes arranged in one of the excitation ports of the upper plate 34 or the lower plate 32 to the object to be measured, and the electromagnetic waves that have passed through the copper foil 42 are sent to the other excitation ports of the upper plate 34 or the lower plate 32. Measurement is performed through the placed electrodes, and calibration is performed based on the measurement results.

特開２００３−３４４４６６号公報Japanese Unexamined Patent Publication No. 2003-344466

しかしながら、上記従来技術では、銅箔４２が薄いため、銅箔４２の外周をフィルム４４の中心孔４４０２の外周に合わせ、銅箔４２を中心孔４４０２に挿入する作業が容易ではないことから、銅箔４２の外周部がフィルム４４の中心孔４４０２からはみ出すことがある。
この状態で上板３４と下板３２とで銅箔４２が挟持されると、銅箔４２が変形して使用不能となるため、被測定物の誘電率の測定の効率を高めることができず、何らかの改善が求められている。
本発明は上記事情に鑑みなされたものであって、その目的は、銅箔の変形を防止でき被測定物の誘電率の測定の効率を高める上で有利な平衡形円板共振器のキャリブレーション用治具を提供することにある。 However, in the above-mentioned prior art, since the copper foil 42 is thin, it is not easy to align the outer circumference of the copper foil 42 with the outer circumference of the center hole 4402 of the film 44 and insert the copper foil 42 into the center hole 4402. The outer peripheral portion of the foil 42 may protrude from the center hole 4402 of the film 44.
If the copper foil 42 is sandwiched between the upper plate 34 and the lower plate 32 in this state, the copper foil 42 is deformed and becomes unusable, so that the efficiency of measuring the dielectric constant of the object to be measured cannot be improved. , Some improvement is required.
The present invention has been made in view of the above circumstances, and an object thereof is to calibrate a balanced disc resonator which is advantageous in preventing deformation of a copper foil and increasing the efficiency of measuring the dielectric constant of a measured object. To provide jigs.

上記目的を達成するために、本発明は、平衡形円板共振器のキャリブレーション用治具であって、１以上３以下の誘電率を有する均一の厚さの材料で円形に形成された第１フィルム部と、１以上３以下の誘電率を有する均一の厚さの材料で前記第１フィルム部の外径と同一の外径で形成されその外周を前記第１フィルム部の外周に合致させて前記第１フィルム部に載置され中心孔を有する第２フィルム部と、前記第２フィルム部の中心孔の内径と同一の外径を有し前記第１フィルム部に載置され前記中心孔に挿入された銅箔部と、１以上３以下の誘電率を有する均一の厚さの材料で前記第１フィルム部の外径と同一の外径で形成され、その外周を前記第２フィルム部の外周に合致させて前記第２フィルム部および前記銅箔部の上に載置された第３フィルム部とを備え、前記第１フィルム部に対して前記第２フィルム部と前記銅箔部とは接合され、かつ、前記第３フィルム部に対して前記第２フィルム部と前記銅箔部とは接合されていることを特徴とする。 In order to achieve the above object, the present invention is a calibration jig for a balanced disk resonator, which is made of a material having a dielectric constant of 1 or more and 3 or less and having a uniform thickness and formed in a circular shape. It is made of one film portion and a material having a dielectric constant of 1 or more and 3 or less and having the same outer diameter as the outer diameter of the first film portion, and its outer diameter is made to match the outer diameter of the first film portion. The second film portion mounted on the first film portion and having a center hole and the center hole mounted on the first film portion having the same outer diameter as the inner diameter of the center hole of the second film portion. The copper foil portion inserted into the film and a material having a dielectric constant of 1 or more and 3 or less and having the same outer diameter as the outer diameter of the first film portion are formed, and the outer periphery thereof is formed on the outer diameter of the second film portion. The second film portion and the third film portion placed on the copper foil portion are provided so as to match the outer periphery of the first film portion, and the second film portion and the copper foil portion are provided with respect to the first film portion. Is bonded, and the second film portion and the copper foil portion are bonded to the third film portion.

本発明のキャリブレーション用治具によれば、従来のような銅箔の外周をフィルムの中心孔の外周に合わせ、銅箔を中心孔に挿入して下板の上面に載置する面倒な作業を省略でき、また、銅箔がずれて変形して使用不能となる不具合を解消でき、被測定物の誘電率の測定の効率を高める上で有利となる。 According to the calibration jig of the present invention, the conventional troublesome work of aligning the outer periphery of the copper foil with the outer periphery of the center hole of the film, inserting the copper foil into the center hole, and placing the copper foil on the upper surface of the lower plate. It is possible to eliminate the problem that the copper foil is displaced and deformed and becomes unusable, which is advantageous in improving the efficiency of measuring the dielectric constant of the object to be measured.

キャリブレーション用治具の分解斜視図である。It is an exploded perspective view of the calibration jig. キャリブレーション用治具の断面図である。It is sectional drawing of the jig for calibration. （Ａ）は平衡形円板共振器の断面図、（Ｂ）は平衡形円板共振器の下板に従来のキャリブレーション用治具を載置した状態を示す断面図、（Ｃ）は平衡形円板共振器の下板と上板とで従来のキャリブレーション用治具を挟持した状態を示す断面図である。(A) is a cross-sectional view of a balanced disk resonator, (B) is a sectional view showing a state in which a conventional calibration jig is placed on the lower plate of the balanced disk resonator, and (C) is balanced. FIG. 5 is a cross-sectional view showing a state in which a conventional calibration jig is sandwiched between a lower plate and an upper plate of a shaped disk resonator.

以下、本発明の実施の形態を図面にしたがって説明する。
図１、図２に示すように、本実施の形態の平衡形円板共振器のキャリブレーション用治具１０は、第１フィルム部１２と、第２フィルム部１４と、第２フィルム部１６と、銅箔部１８とを備えている。
第１フィルム部１２は、１以上３以下の誘電率を有し１０μｍ以上３００μｍ以下の均一の厚さのフィルムで円形に形成されている。
第２フィルム部１４は、１以上３以下の誘電率を有し１０μｍ以上３００μｍ以下の均一の厚さの材料で第１フィルム部１２の外径と同一の外径で形成されその外周を第１フィルム部１２の外周に合致させて第１フィルム部１２に載置され中心孔１４０２を有している。
中心孔１４０２の外径は、平衡形円板共振器の励振口よりも大きく第２フィルム部１４よりも小さい外径で円形に形成され、例えば直径が１５ｍｍである。
第３フィルム部１６は、１以上３以下の誘電率を有し１０μｍ以上３００μｍ以下の均一の厚さの材料で第１フィルム部１２の外径と同一の外径で形成され、その外周を第２フィルム部１４の外周に合致させて第２フィルム部１４および後述する銅箔部１８の上に載置されている。 Hereinafter, embodiments of the present invention will be described with reference to the drawings.
As shown in FIGS. 1 and 2, the calibration jig 10 of the balanced disk resonator of the present embodiment includes a first film unit 12, a second film unit 14, and a second film unit 16. , A copper foil portion 18 is provided.
The first film portion 12 is formed in a circular shape with a film having a dielectric constant of 1 or more and 3 or less and a uniform thickness of 10 μm or more and 300 μm or less.
The second film portion 14 is made of a material having a dielectric constant of 1 or more and 3 or less and a uniform thickness of 10 μm or more and 300 μm or less, and is formed with the same outer diameter as the outer diameter of the first film portion 12, and the outer periphery thereof is the first. It is placed on the first film portion 12 so as to match the outer circumference of the film portion 12 and has a central hole 1402.
The outer diameter of the central hole 1402 is formed in a circular shape with an outer diameter larger than the excitation port of the balanced disk resonator and smaller than the second film portion 14, for example, having a diameter of 15 mm.
The third film portion 16 is made of a material having a dielectric constant of 1 or more and 3 or less and a uniform thickness of 10 μm or more and 300 μm or less, and is formed with the same outer diameter as the outer diameter of the first film portion 12. It is placed on the second film portion 14 and the copper foil portion 18 described later so as to match the outer periphery of the two film portions 14.

第１〜第３フィルム部１２、１４、１６の誘電率を１以上３以下としたのは、誘電率が１未満であると材料の入手が困難であり、３を超えると電磁波放射の影響があるためである。
また、第１〜第３フィルム部１２、１４、１６の厚さを１０μｍ以上３００μｍ以下としたのは、厚さが１０μｍに満たないと第１〜第３フィルム部１２、１４、１６が薄すぎるため取り扱い性を確保する効果が低下し、３００μｍを超えると電磁波放射の影響があるためである。
また、第１〜第３フィルム部１２、１４、１６の厚さを１０μｍ以上３００μｍ以下としたのは、キャリブレーション時に、フィルム部１２による影響をソフト的に修正でき、ゼロ点調整を正確に行なう上で有利となるためである。
本実施の形態では、第１〜第３フィルム部１２、１４、１６は、同一の材料で形成されており、したがって、厚さおよび誘電率は同一である。このような材料として、市販品である日本ゼオン株式会社の誘電率が２．５、厚さが２３μｍのシクロオレフィンポリマー（ゼオネックス（登録商標））が用いられている。
なお、第１〜第３フィルム部１２、１４、１６は、１以上３以下の誘電率を有する均一厚さの材料であればよく、従来公知の様々な材料が使用可能である。
第１〜第３フィルム部１２、１４，１６の外径は、下板に設けられた環状の凸部に合致する寸法で形成され、例えば、５０ｍｍである。 The reason why the dielectric constants of the first to third film portions 12, 14 and 16 are set to 1 or more and 3 or less is that it is difficult to obtain a material when the dielectric constant is less than 1, and when it exceeds 3, the influence of electromagnetic wave radiation is exerted. Because there is.
Further, the reason why the thickness of the first to third film portions 12, 14 and 16 is set to 10 μm or more and 300 μm or less is that the first to third film portions 12, 14 and 16 are too thin if the thickness is less than 10 μm. Therefore, the effect of ensuring handleability is reduced, and if it exceeds 300 μm, it is affected by electromagnetic wave radiation.
Further, the thickness of the first to third film portions 12, 14 and 16 is set to 10 μm or more and 300 μm or less because the influence of the film portion 12 can be softly corrected at the time of calibration and the zero point adjustment is performed accurately. This is because it is advantageous in the above.
In the present embodiment, the first to third film portions 12, 14 and 16 are made of the same material, and therefore have the same thickness and dielectric constant. As such a material, a cycloolefin polymer (Zeonex (registered trademark)) having a dielectric constant of 2.5 and a thickness of 23 μm, which is a commercially available product of ZEON CORPORATION, is used.
The first to third film portions 12, 14, and 16 may be any material having a dielectric constant of 1 or more and 3 or less and having a uniform thickness, and various conventionally known materials can be used.
The outer diameters of the first to third film portions 12, 14, and 16 are formed to have dimensions that match the annular protrusions provided on the lower plate, and are, for example, 50 mm.

銅箔部１８は、０．５μｍ以上５０μｍ以下の均一の厚さで第２フィルム部１４の中心孔１４０２の内径と同一の外径を有し第１フィルム部１２に載置され中心孔１４０２に挿入されている。
ここで、銅箔部１８の厚さを０．５μｍ以上５０μｍ以下としたのは、厚さが０．５μｍに満たないと銅箔部１８が薄すぎるため取り扱い性を確保する効果が低下し、５０μｍを超えると電磁波放射の影響があるためである。
第１〜第３フィルム部１２、１４，１６の円形の中心と銅箔部１８の円形の中心とは合致している。
図２に示すように、第１フィルム部１２に対して第２フィルム部１４と銅箔部１８とは接合され、かつ、第３フィルム部１６に対して第２フィルム部１４と銅箔部１８とは接合されている。
本実施の形態では、第１フィルム部１２に対する第２フィルム部１４と銅箔部１８との接合、および、第３フィルム部１６に対する第２フィルム部１４と銅箔部１８との接合は、熱圧着によりなされている。
なお、接着剤を用いるなど従来公知の様々な接合方法が採用可能であるが、本実施の形態のように熱圧着で接合すると、簡単に確実に接合する上で有利となる。 The copper foil portion 18 has an outer diameter of 0.5 μm or more and 50 μm or less and has the same outer diameter as the inner diameter of the center hole 1402 of the second film portion 14, and is placed in the first film portion 12 and placed in the center hole 1402. It has been inserted.
Here, the reason why the thickness of the copper foil portion 18 is set to 0.5 μm or more and 50 μm or less is that if the thickness is less than 0.5 μm, the copper foil portion 18 is too thin and the effect of ensuring handleability is reduced. This is because if it exceeds 50 μm, it is affected by electromagnetic wave radiation.
The circular centers of the first to third film portions 12, 14, and 16 coincide with the circular centers of the copper foil portions 18.
As shown in FIG. 2, the second film portion 14 and the copper foil portion 18 are joined to the first film portion 12, and the second film portion 14 and the copper foil portion 18 are joined to the third film portion 16. Is joined with.
In the present embodiment, the bonding between the second film portion 14 and the copper foil portion 18 with respect to the first film portion 12 and the bonding between the second film portion 14 and the copper foil portion 18 with respect to the third film portion 16 are thermal. It is made by crimping.
Various conventionally known joining methods such as using an adhesive can be adopted, but joining by thermocompression bonding as in the present embodiment is advantageous for easy and reliable joining.

本実施の形態の平衡形円板共振器のキャリブレーション用治具１０を用いれば、キャリブレーションを行なうにあたって、キャリブレーション用治具１０の外周を下板の環状の凸部に当て付け、キャリブレーション用治具１０を下板の上面に載置する。
この作業により平衡形円板共振器の励振口の中心にその中心を合致した状態で銅箔部１８が下板上に配置されることになる。
したがって、従来のように銅箔の外周をフィルムの中心孔の外周に合わせ、銅箔を中心孔に挿入して下板の上面に載置する面倒な作業を省略できる。
また、銅箔がフィルムの中心孔からずれ、その状態で下板と上板とが挟持されることで銅箔が変形して使用不能となる不具合を解消でき、被測定物の誘電率の測定の効率を高める上で有利となる。 If the calibration jig 10 of the balanced disk resonator of the present embodiment is used, the outer periphery of the calibration jig 10 is applied to the annular convex portion of the lower plate to perform calibration. The jig 10 is placed on the upper surface of the lower plate.
By this work, the copper foil portion 18 is arranged on the lower plate in a state where the center of the excitation port of the balanced disk resonator is aligned with the center.
Therefore, it is possible to omit the troublesome work of aligning the outer periphery of the copper foil with the outer periphery of the center hole of the film, inserting the copper foil into the center hole, and placing the copper foil on the upper surface of the lower plate as in the conventional case.
In addition, it is possible to solve the problem that the copper foil is displaced from the center hole of the film and the lower plate and the upper plate are sandwiched in that state, which causes the copper foil to be deformed and become unusable, and the dielectric constant of the object to be measured is measured. It is advantageous in increasing the efficiency of.

１０ キャリブレーション用治具
１２ 第１フィルム部
１４ 第２フィルム部
１４０２ 中心孔
１６ 第３フィルム部
１８ 銅箔部 10 Calibration jig 12 1st film part 14 2nd film part 1402 Center hole 16 3rd film part 18 Copper foil part

Claims (5)

平衡形円板共振器のキャリブレーション用治具であって、
１以上３以下の誘電率を有する均一の厚さの材料で円形に形成された第１フィルム部と、
１以上３以下の誘電率を有する均一の厚さの材料で前記第１フィルム部の外径と同一の外径で形成されその外周を前記第１フィルム部の外周に合致させて前記第１フィルム部に載置され中心孔を有する第２フィルム部と、
前記第２フィルム部の中心孔の内径と同一の外径を有し前記第１フィルム部に載置され前記中心孔に挿入された銅箔部と、
１以上３以下の誘電率を有する均一の厚さの材料で前記第１フィルム部の外径と同一の外径で形成され、その外周を前記第２フィルム部の外周に合致させて前記第２フィルム部および前記銅箔部の上に載置された第３フィルム部とを備え、
前記第１フィルム部に対して前記第２フィルム部と前記銅箔部とは接合され、かつ、前記第３フィルム部に対して前記第２フィルム部と前記銅箔部とは接合されている、
ことを特徴とする平衡形円板共振器のキャリブレーション用治具。 A jig for calibrating a balanced disk resonator,
A first film portion formed in a circle made of a material having a dielectric constant of 1 or more and 3 or less and having a uniform thickness, and
The first film is made of a material having a dielectric constant of 1 or more and 3 or less and having the same outer diameter as the outer diameter of the first film portion, and the outer circumference thereof is made to match the outer circumference of the first film portion. The second film part, which is placed on the part and has a central hole,
A copper foil portion having the same outer diameter as the inner diameter of the center hole of the second film portion and placed on the first film portion and inserted into the center hole.
It is made of a material having a dielectric constant of 1 or more and 3 or less and having the same outer diameter as the outer diameter of the first film portion. It is provided with a film portion and a third film portion placed on the copper foil portion.
The second film portion and the copper foil portion are bonded to the first film portion, and the second film portion and the copper foil portion are bonded to the third film portion.
A jig for calibrating a balanced disk resonator. 前記第１、第２、第３フィルム部の厚さは、１０μｍ以上３００μｍ以下である、
ことを特徴とする請求項１記載の平衡形円板共振器のキャリブレーション用治具。 The thickness of the first, second, and third film portions is 10 μm or more and 300 μm or less.
The jig for calibrating a balanced disk resonator according to claim 1. 前記第１、第２、第３フィルム部は、同一の材料で形成されている、
ことを特徴とする請求項１または２記載の平衡形円板共振器のキャリブレーション用治具。 The first, second, and third film portions are made of the same material.
The jig for calibrating the balanced disk resonator according to claim 1 or 2. 前記銅箔部の厚さは、０．５μｍ以上５０μｍ以下である、
ことを特徴とする請求項１〜３の何れか１項記載の平衡形円板共振器のキャリブレーション用治具。 The thickness of the copper foil portion is 0.5 μm or more and 50 μm or less.
The jig for calibrating a balanced disk resonator according to any one of claims 1 to 3. 前記第１フィルム部に対する前記第２フィルム部と前記銅箔部との接合、および、前記第３フィルム部に対する前記第２フィルム部と前記銅箔部との接合は、熱圧着によりなされている、
ことを特徴とする請求項１〜４の何れか１項記載の平衡形円板共振器のキャリブレーション用治具。 The bonding between the second film portion and the copper foil portion with respect to the first film portion and the bonding between the second film portion and the copper foil portion with respect to the third film portion are performed by thermocompression bonding.
The jig for calibrating a balanced disk resonator according to any one of claims 1 to 4.
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