JP6970603B2 - Metal leaf manufacturing equipment, electrode plate and metal leaf manufacturing method - Google Patents

Metal leaf manufacturing equipment, electrode plate and metal leaf manufacturing method Download PDF

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JP6970603B2
JP6970603B2 JP2017235856A JP2017235856A JP6970603B2 JP 6970603 B2 JP6970603 B2 JP 6970603B2 JP 2017235856 A JP2017235856 A JP 2017235856A JP 2017235856 A JP2017235856 A JP 2017235856A JP 6970603 B2 JP6970603 B2 JP 6970603B2
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electrode plate
subdivided
bodies
electrodeposition drum
outer peripheral
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JP2019099897A (en
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信幸 八幡
健二 金井
洋 田中
康秀 上野
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Nippon Steel Kozai Co Ltd
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Nippon Steel and Sumikin Kozai Co Ltd
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Description

本発明は、金属箔製造装置,電極板及び金属箔の製造方法に関するものである。 The present invention relates to a metal leaf manufacturing apparatus, an electrode plate, and a method for manufacturing a metal foil.

従来から、例えば特許文献1に開示されるように、電解液が溜められる電解槽と、一部が電解液に浸漬するように電解槽内に設けられる電着ドラム(陰極)と、この電着ドラムの外周面と所定間隔で対向するように設けられ電解液に浸漬する電極板(陽極)とを有し、電着ドラムと電極板との間に電圧を印加することで電着ドラムの外周面に金属箔を電着生成する金属箔製造装置が知られている。 Conventionally, for example, as disclosed in Patent Document 1, an electrolytic cell in which an electrolytic solution is stored, an electrodeposition drum (cathode) provided in the electrolytic cell so that a part of the electrolytic cell is immersed in the electrolytic cell, and the electrodeposition thereof. It has an electrode plate (acoustic) that is provided so as to face the outer peripheral surface of the drum at predetermined intervals and is immersed in the electrolytic solution, and the outer periphery of the electrodeposition drum is applied by applying a voltage between the electrodeposition drum and the electrode plate. A metal foil manufacturing apparatus that electrolyzes and generates a metal foil on a surface is known.

ところで、このような金属箔製造装置は装置毎に個性があり、電着ドラムの外周面及び電極板(電着ドラムとの対向面)を精度良く加工しても、製造される金属箔の箔厚(電着ドラム外周面の幅方向における箔厚)は装置毎に一定の偏りが生じる。 By the way, such a metal foil manufacturing apparatus has individuality for each apparatus, and even if the outer peripheral surface of the electrodeposition drum and the electrode plate (the surface facing the electrodeposition drum) are processed with high accuracy, the metal foil is produced. The thickness (foil thickness in the width direction of the outer peripheral surface of the electrodeposited drum) has a certain deviation for each device.

そのため、従来は例えば電極板の上方側端部近傍に複数の補助陽極を追加しこれらを個別に制御したり(特許文献1及び2)、金属箔の生成を抑制する遮蔽板を電着ドラムと電極板との間に設けたりして(特許文献3)、所望の部位の金属箔生成量を増減させることで、箔厚が電着ドラム外周面の幅方向において均一となるようにしている。 Therefore, conventionally, for example, a plurality of auxiliary anodes are added near the upper end of the electrode plate and these are individually controlled (Patent Documents 1 and 2), or a shielding plate that suppresses the formation of metal foil is used as an electrodeposition drum. By providing it between the electrode plate and the metal foil (Patent Document 3) and increasing or decreasing the amount of metal foil generated at a desired portion, the foil thickness is made uniform in the width direction of the outer peripheral surface of the electrodeposited drum.

しかしながら、補助陽極を電極板と個別に制御する場合には、電源や制御機構を別途調達する必要があり、導入には多大なコストがかかる。また、遮蔽板を用いる場合には、完成した金属箔製造装置の個性を確認するための試験を行い、この試験結果をもとに遮蔽板の形状を設計して製造する必要があり、試験及び設計に多大な労力がかかる。 However, when the auxiliary anode is controlled individually from the electrode plate, it is necessary to procure a power supply and a control mechanism separately, and the introduction is very costly. In addition, when using a shielding plate, it is necessary to carry out a test to confirm the individuality of the completed metal leaf manufacturing equipment, and to design and manufacture the shape of the shielding plate based on this test result. It takes a lot of effort to design.

特開2012−107266号公報Japanese Unexamined Patent Publication No. 2012-107266 特許第3416620号公報Japanese Patent No. 34166620 特開平9−143784号公報Japanese Unexamined Patent Publication No. 9-143784

本発明は、上述のような現状に鑑みなされたもので、装置の個性に応じて予め導電性コーティング膜の被覆態様が異なる複数種の細分割体を作製することで、コスト安に電着ドラムの外周面の幅方向における箔厚の調整が可能となる極めて実用的な金属箔製造装置,電極板及び金属箔の製造方法を提供するものである。 The present invention has been made in view of the current situation as described above, and by producing a plurality of types of subdivided bodies having different coating modes of the conductive coating film in advance according to the individuality of the apparatus, the electrodeposition drum can be cost-effectively. It provides an extremely practical metal leaf manufacturing apparatus, an electrode plate, and a metal foil manufacturing method capable of adjusting the foil thickness in the width direction of the outer peripheral surface of the metal leaf.

添付図面を参照して本発明の要旨を説明する。 The gist of the present invention will be described with reference to the accompanying drawings.

電解液1が溜められる電解槽2と、この電解槽2に設けられる電着ドラム3と、表面が前記電着ドラム3の外周面と対向するように前記電解槽2内に設けられる電極板4とを有する金属箔製造装置であって、前記電極板4の表面は前記電着ドラム3の外周面に沿った凹湾曲面に設定され、また、この電極板4の表面には導電性コーティング膜13が被覆され、更に、この電極板4は前記電着ドラム3の軸方向に所定長の横幅を有し且つ縦が所定長を有する分割体10,11が複数並設された分割構造とされ、また、この分割体10,11のうち少なくとも1つは更に分割された細分割体12が複数並設された細分割構造とされ、この細分割構造の分割体11は、前記導電性コーティング膜13の被覆態様が異なる複数種類の前記細分割体12を組み合わせて構成されていることを特徴とする金属箔製造装置に係るものである。 The electrolytic cell 2 in which the electrolytic solution 1 is stored, the electrodeposition drum 3 provided in the electrolytic cell 2, and the electrode plate 4 provided in the electrolytic cell 2 so that the surface faces the outer peripheral surface of the electrodeposition drum 3. The surface of the electrode plate 4 is set to a concave curved surface along the outer peripheral surface of the electrodeposition drum 3, and the surface of the electrode plate 4 is covered with a conductive coating film. 13 is covered, and the electrode plate 4 has a divided structure in which a plurality of divided bodies 10 and 11 having a predetermined width in the axial direction of the electrodeposition drum 3 and having a predetermined length in the vertical direction are arranged side by side. Further, at least one of the divided bodies 10 and 11 has a subdivided structure in which a plurality of further subdivided subdivided bodies 12 are arranged side by side, and the subdivided body 11 having this subdivided structure is the conductive coating film. The present invention relates to a metal foil manufacturing apparatus, which is configured by combining a plurality of types of the subdivided bodies 12 having different coating modes of 13.

また、請求項1記載の金属箔製造装置において、前記電着ドラム3の外周面に電着生成された金属箔Aを剥離して巻き取る巻取部14を備え、この巻取部14による金属箔Aの剥離位置Xに最も近い前記分割体11を前記細分割構造としたことを特徴とする金属箔製造装置に係るものである。 Further, in the metal foil manufacturing apparatus according to claim 1, a winding unit 14 for peeling and winding the metal leaf A generated by electrodeposition is provided on the outer peripheral surface of the electrodeposition drum 3, and the metal by the winding unit 14 is provided. The present invention relates to a metal leaf manufacturing apparatus characterized in that the divided body 11 closest to the peeling position X of the foil A has the finely divided structure.

また、請求項1,2いずれか1項に記載の金属箔製造装置において、前記電極板4は前記電着ドラム3の外周面に沿って複数並設され、前記各電極板4のうち、最も上方側の分割体11を夫々前記細分割構造としたことを特徴とする金属箔製造装置に係るものである。 Further, in the metal leaf manufacturing apparatus according to any one of claims 1 and 2, a plurality of the electrode plates 4 are arranged side by side along the outer peripheral surface of the electrodeposition drum 3, and the most of the electrode plates 4 thereof. The present invention relates to a metal leaf manufacturing apparatus characterized in that each of the upper divided bodies 11 has the above-mentioned subdivided structure.

また、請求項1〜3いずれか1項に記載の金属箔製造装置において、前記細分割体12は夫々同一の電源に接続されていることを特徴とする金属箔製造装置に係るものである。 Further, in the metal leaf manufacturing apparatus according to any one of claims 1 to 3, the subdivided body 12 relates to the metal foil manufacturing apparatus, each of which is connected to the same power source.

また、請求項1〜4いずれか1項に記載の金属箔製造装置において、前記細分割構造の分割体11は、前記導電性コーティング膜13が全部若しくは一部に設けられていない少なくとも1つ以上の前記細分割体12を含むことを特徴とする金属箔製造装置に係るものである。 Further, in the metal leaf manufacturing apparatus according to any one of claims 1 to 4, at least one or more of the divided bodies 11 having the finely divided structure are not provided with the conductive coating film 13 in whole or in part. The present invention relates to a metal leaf manufacturing apparatus comprising the subdivided body 12 of the above.

また、請求項5記載の金属箔製造装置において、前記細分割体12の前記導電性コーティング膜13が設けられていない部位にはチタン酸化膜が設けられていることを特徴とする金属箔製造装置に係るものである。 Further, in the metal leaf manufacturing apparatus according to claim 5, a titanium oxide film is provided at a portion of the subdivided body 12 where the conductive coating film 13 is not provided. It is related to.

また、電解液1が溜められる電解槽2と、この電解槽2に設けられる電着ドラム3と、表面が前記電着ドラム3の外周面と対向するように前記電解槽2内に設けられる電極板4と、前記電着ドラム3の外周面に電着生成された金属箔Aを剥離して巻き取る巻取部14とを有する金属箔製造装置における前記電極板4であって、前記電極板4の表面は前記電着ドラム3の外周面に沿った凹湾曲面に設定され、また、この電極板4の表面には導電性コーティング膜13が被覆され、更に、この電極板4は前記電着ドラム3の軸方向に所定長の横幅を有し且つ縦が所定長を有する分割体10,11が複数並設された分割構造とされ、また、この分割体10,11のうち少なくとも1つは更に分割された細分割体12が複数並設された細分割構造とされ、この細分割構造の分割体11は、前記導電性コーティング膜13の被覆態様が異なる複数種類の前記細分割体12を組み合わせて構成されていることを特徴とする電極板に係るものである。 Further, the electrolytic tank 2 in which the electrolytic solution 1 is stored, the electrodeposition drum 3 provided in the electrolytic tank 2, and the electrodes provided in the electrolytic tank 2 so that the surface faces the outer peripheral surface of the electrodeposition drum 3. The electrode plate 4 in a metal foil manufacturing apparatus having a plate 4 and a winding portion 14 for peeling and winding the metal foil A electrolyzed and generated on the outer peripheral surface of the electrodeposition drum 3. The electrode plate 4. The surface of 4 is set to a concave curved surface along the outer peripheral surface of the electrodeposition drum 3, and the surface of the electrode plate 4 is coated with a conductive coating film 13, and the electrode plate 4 is further electrolyzed. It has a divided structure in which a plurality of divided bodies 10 and 11 having a predetermined width in the axial direction of the landing drum 3 and having a predetermined length in the vertical direction are arranged side by side, and at least one of the divided bodies 10 and 11. Is a subdivided structure in which a plurality of further subdivided subdivided bodies 12 are arranged side by side, and the subdivided body 11 having this subdivided structure is a plurality of types of the subdivided bodies 12 having different coating modes of the conductive coating film 13. The present invention relates to an electrode plate characterized by being configured by combining the above.

また、請求項7記載の電極板において、前記巻取部14による金属箔Aの剥離位置Xに最も近い前記分割体11を前記細分割構造としたことを特徴とする電極板に係るものである。 Further, in the electrode plate according to claim 7, the electrode plate is characterized in that the divided body 11 closest to the peeling position X of the metal leaf A by the winding portion 14 has the subdivided structure. ..

また、請求項7,8いずれか1項に記載の電極板において、前記電極板4は前記電着ドラム3の外周面に沿って複数並設され、前記各電極板4のうち、最も上方側の分割体11を夫々前記細分割構造としたことを特徴とする電極板に係るものである。 Further, in the electrode plate according to any one of claims 7 and 8, a plurality of the electrode plates 4 are arranged side by side along the outer peripheral surface of the electrodeposition drum 3, and the uppermost side of each of the electrode plates 4 is provided. The present invention relates to an electrode plate characterized in that each of the divided bodies 11 has the above-mentioned subdivided structure.

また、請求項7〜9いずれか1項に記載の電極板において、前記細分割体12は夫々同一の電源に接続されていることを特徴とする電極板に係るものである。 Further, in the electrode plate according to any one of claims 7 to 9, the subdivided body 12 is related to an electrode plate characterized in that each of the subdivided bodies 12 is connected to the same power source.

また、請求項7〜10いずれか1項に記載の電極板において、前記細分割構造の分割体11は、前記導電性コーティング膜13が全部若しくは一部に設けられていない少なくとも1つ以上の前記細分割体12を含むことを特徴とする電極板に係るものである。 Further, in the electrode plate according to any one of claims 7 to 10, at least one or more of the divided bodies 11 having the subdivided structure are not provided with the conductive coating film 13 in whole or in part. It relates to an electrode plate characterized by containing the subdivided body 12.

また、請求項11記載の電極板において、前記細分割体12の前記導電性コーティング膜13が設けられていない部位にはチタン酸化膜が設けられていることを特徴とする電極板に係るものである。 The present invention relates to the electrode plate according to claim 11, wherein a titanium oxide film is provided at a portion of the subdivided body 12 where the conductive coating film 13 is not provided. be.

また、電解液1が溜められる電解槽2と、この電解槽2に設けられる電着ドラム3と、表面が前記電着ドラム3の外周面と対向するように前記電解槽2内に設けられる電極板4とを有する金属箔製造装置を用いた金属箔の製造方法であって、前記電極板4の表面は前記電着ドラム3の外周面に沿った凹湾曲面に設定され、また、この電極板4の表面には導電性コーティング膜13が被覆され、更に、この電極板4は前記電着ドラム3の軸方向に所定長の横幅を有し且つ縦が所定長を有する分割体10,11が複数並設された分割構造とされ、また、この分割体10,11のうち少なくとも1つは更に分割された細分割体12が複数並設された細分割構造とされて、前記導電性コーティング膜13の被覆態様が異なる複数種類の前記細分割体12を適宜組み合わせて配置することで前記電極板4と前記電着ドラム3の外周面との通電度合いを調整して前記電着ドラム3の外周面に箔厚が可及的に均一な前記金属箔Aを電着生成することを特徴とする金属箔の製造方法に係るものである。 Further, the electrolytic tank 2 in which the electrolytic solution 1 is stored, the electrodeposition drum 3 provided in the electrolytic tank 2, and the electrodes provided in the electrolytic tank 2 so that the surface faces the outer peripheral surface of the electrodeposition drum 3. It is a method of manufacturing a metal foil using a metal foil manufacturing apparatus having a plate 4, and the surface of the electrode plate 4 is set to a concave curved surface along the outer peripheral surface of the electrodeposition drum 3, and the electrode is also set. The surface of the plate 4 is coated with a conductive coating film 13, and further, the electrode plate 4 has a width of a predetermined length in the axial direction of the electrodeposition drum 3 and a length of the divided bodies 10 and 11 having a predetermined length. Is a divided structure in which a plurality of the divided bodies 10 and 11 are arranged side by side, and at least one of the divided bodies 10 and 11 is a subdivided structure in which a plurality of further divided subdivided bodies 12 are arranged side by side. By appropriately combining and arranging a plurality of types of the subdivided bodies 12 having different coating modes of the film 13, the degree of energization between the electrode plate 4 and the outer peripheral surface of the electrodeposition drum 3 is adjusted to adjust the degree of energization of the electrodeposition drum 3. The present invention relates to a method for producing a metal foil, which comprises forming the metal foil A having a thickness as uniform as possible on the outer peripheral surface by electrodeposition.

本発明は上述のように、装置の個性に応じて予め導電性コーティング膜の被覆態様が異なる複数種の細分割体を作製することで、コスト安に電着ドラムの外周面の幅方向における箔厚の調整が可能となる極めて実用的な金属箔製造装置,電極板及び金属箔の製造方法となる。 As described above, in the present invention, by producing a plurality of types of subdivided bodies having different coating modes of the conductive coating film in advance according to the individuality of the apparatus, the foil in the width direction of the outer peripheral surface of the electrodeposition drum can be inexpensively produced. It is an extremely practical metal foil manufacturing device, electrode plate, and metal foil manufacturing method that can adjust the thickness.

本実施例の概略説明側断面図である。It is schematic explanation side sectional drawing of this Example. 分割体及び細分割体の配置例を説明する概略説明図である。It is a schematic explanatory drawing explaining the arrangement example of the divided body and the subdivided body. 分割体及び細分割体の配置例を説明する概略説明図である。It is a schematic explanatory drawing explaining the arrangement example of the divided body and the subdivided body. 分割体及び細分割体の配置例を説明する概略説明図である。It is a schematic explanatory drawing explaining the arrangement example of the divided body and the subdivided body. 分割体及び細分割体の配置例を説明する概略説明図である。It is a schematic explanatory drawing explaining the arrangement example of the divided body and the subdivided body. 従来例の概略説明図である。It is a schematic explanatory drawing of the conventional example.

好適と考える本発明の実施形態を、図面に基づいて本発明の作用を示して簡単に説明する。 Embodiments of the present invention which are considered to be suitable will be briefly described by showing the operation of the present invention based on the drawings.

電極体4には導電性コーティング膜13が存在する部分と存在しない部分があり、導電性コーティング膜13が設けられた部分は対向する電着ドラム3の外周面と(電解液1を介して)良好に通電し、導電性コーティング膜13がない部分は通電し難い。従って、電極体4の分割体10,11のうち、細分割構造の分割体11は、装置の個性に合わせて適宜細分割体12を組み合わせることで、導電性コーティング膜13が存在する部分と存在しない部分とを簡単に自由に設定して電着ドラム3の外周面との通電度合いを調整でき、補助陽極や遮蔽板を別途用いる必要なく電着ドラム3の外周面の幅方向における箔厚を均一化することが可能となる。 The electrode body 4 has a portion where the conductive coating film 13 is present and a portion where the conductive coating film 13 is not present, and the portion where the conductive coating film 13 is provided is the outer peripheral surface of the opposed electrodeposition drum 3 (via the electrolytic solution 1). It is well energized, and it is difficult to energize the portion without the conductive coating film 13. Therefore, among the divided bodies 10 and 11 of the electrode body 4, the divided body 11 having the subdivided structure is present with the portion where the conductive coating film 13 is present by appropriately combining the subdivided bodies 12 according to the individuality of the apparatus. The degree of energization with the outer peripheral surface of the electrodeposition drum 3 can be adjusted by easily and freely setting the parts that do not, and the foil thickness in the width direction of the outer peripheral surface of the electrodeposition drum 3 can be adjusted without the need to use an auxiliary anode or a shielding plate separately. It becomes possible to make it uniform.

即ち、例えば、当該電着ドラム3の個性により、該電着ドラム3の外周面の幅方向において箔厚が厚くなる部分がある場合には、その部分に対応する位置に導電性コーティング膜13がない細分割体12を配置し、箔厚が薄くなる部分がある場合には、その部分に対応する位置に導電性コーティング膜13が全体に設けられた細分割体12を配置し、それらの間の部分には、その部分に対応する位置に半分だけ導電性コーティング膜13が設けられた細分割体12を配置する等、予め用意した複数種類の細分割体12を適宜組み合わせるだけの簡単な作業により、電着ドラム3等の装置の個性に応じて箔厚を調整でき、よって、可及的に均一な金属箔を得ることが可能となる。 That is, for example, if there is a portion where the foil thickness becomes thicker in the width direction of the outer peripheral surface of the electrodeposition drum 3 due to the individuality of the electrodeposition drum 3, the conductive coating film 13 is provided at a position corresponding to that portion. If there is a part where the foil thickness becomes thin, place the subdivided body 12 provided with the conductive coating film 13 at the position corresponding to the part, and place the subdivided body 12 between them. A simple task of appropriately combining a plurality of types of subdivided bodies 12 prepared in advance, such as arranging a subdivided body 12 provided with a conductive coating film 13 at a position corresponding to that part. Therefore, the foil thickness can be adjusted according to the individuality of the device such as the electrodeposition drum 3, and thus it is possible to obtain a metal foil as uniform as possible.

本発明の具体的な実施例について図面に基づいて説明する。 Specific examples of the present invention will be described with reference to the drawings.

本実施例は、電解液1が溜められる電解槽2と、この電解槽2に設けられる電着ドラム3と、表面が前記電着ドラム3の外周面と対向するように前記電解槽2内に設けられる電極板4とを有する金属箔製造装置であって、前記電極板4の表面は前記電着ドラム3の外周面に沿った凹湾曲面に設定され、また、この電極板4の表面には導電性コーティング膜13が被覆され、更に、この電極板4は前記電着ドラム3の軸方向に所定長の横幅を有し且つ縦が所定長を有する分割体10,11が複数並設された分割構造とされ、また、この分割体10,11のうち少なくとも1つは更に分割された細分割体12が複数並設された細分割構造とされ、この細分割構造の分割体11は、前記導電性コーティング膜13の被覆態様が異なる複数種類の前記細分割体12を組み合わせて構成されているものである。 In this embodiment, the electrolytic cell 2 in which the electrolytic solution 1 is stored, the electrodeposition drum 3 provided in the electrolytic cell 2, and the inside of the electrolytic cell 2 so that the surface faces the outer peripheral surface of the electrodeposition drum 3. A metal foil manufacturing apparatus having an electrode plate 4 provided, the surface of the electrode plate 4 is set to a concave curved surface along the outer peripheral surface of the electrodeposition drum 3, and the surface of the electrode plate 4 is set to a concave curved surface. Is coated with a conductive coating film 13, and further, the electrode plate 4 is provided with a plurality of divided bodies 10 and 11 having a predetermined width in the axial direction and a predetermined length in the vertical direction of the electrodeposition drum 3. Further, at least one of the divided bodies 10 and 11 is a subdivided structure in which a plurality of further subdivided subdivisions 12 are arranged side by side, and the subdivided body 11 of this subdivided structure is The conductive coating film 13 is configured by combining a plurality of types of the subdivided bodies 12 having different coating modes.

即ち、本実施例は、図1に図示したように、電解液1(硫酸銅液)が溜められる電解槽2と、一部が電解液1に浸漬するように電解槽2内に設けられる電着ドラム3(陰極)と、この電着ドラム3の外周面と所定間隔で対向するように設けられ電解液1に浸漬する電極板4(陽極)とを有し、電着ドラム3と電極板4との間に電圧を印加することで電着ドラム3の外周面に金属箔A(銅箔)を電着生成(メッキ)するものであり、電極板4を所定の形状としたものである。所定厚さとなった金属箔Aは、巻取部14により剥離位置Xで電着ドラム3から剥離せしめられ巻取ロール15に巻き取られる。図中符号16はガイドロールである。 That is, in this embodiment, as shown in FIG. 1, an electrolytic cell 2 in which the electrolytic cell 1 (copper sulfate solution) is stored and an electric electrode provided in the electrolytic cell 2 so that a part of the electrolytic cell 1 is immersed in the electrolytic cell 1 are provided. It has an electrodeposition drum 3 (cathode) and an electrode plate 4 (anode) provided so as to face the outer peripheral surface of the electrodeposition drum 3 at predetermined intervals and immersed in the electrolytic solution 1, and the electrodeposition drum 3 and the electrode plate. A metal foil A (copper foil) is electrolyzed (plated) on the outer peripheral surface of the electrodeposition drum 3 by applying a voltage between the electrode plate 4 and the electrode plate 4 to have a predetermined shape. .. The metal foil A having a predetermined thickness is peeled off from the electrodeposition drum 3 at the peeling position X by the take-up portion 14, and is taken up by the take-up roll 15. Reference numeral 16 in the figure is a guide roll.

また、電極板4は電着ドラム3の外周面に沿って複数並設されている。本実施例では、電極板4は電着ドラム3の浸漬部分の左側及び右側と夫々対向するように左右一対設けられている。電極板4の表面は電着ドラム3の外周面と対応する凹湾曲面に設定される。 Further, a plurality of electrode plates 4 are arranged side by side along the outer peripheral surface of the electrodeposition drum 3. In this embodiment, a pair of left and right electrode plates 4 are provided so as to face the left side and the right side of the immersion portion of the electrodeposition drum 3, respectively. The surface of the electrode plate 4 is set to a concave curved surface corresponding to the outer peripheral surface of the electrodeposition drum 3.

図中、符号5は電極板4を設ける基体、7は電解液1を電着ドラム3と電極板4との対向間隙に供給する液供給部、8は電着ドラム3の回転軸、9は電極板4が取り付けられた基体5を支持する支持体である。 In the figure, reference numeral 5 is a substrate on which the electrode plate 4 is provided, 7 is a liquid supply unit that supplies the electrolytic solution 1 to the facing gap between the electrodeposition drum 3 and the electrode plate 4, 8 is the rotation axis of the electrodeposition drum 3, and 9 is. It is a support that supports the substrate 5 to which the electrode plate 4 is attached.

各部を具体的に説明する。 Each part will be explained concretely.

電極板4はチタン製であり、長手方向(電着ドラム3の周方向)において分割された複数の長方形状(帯状)の分割体10,11から成る分割構造とされ、この分割体10,11のうち少なくとも1つは幅方向において更に分割された正方形状の細分割体12から成る細分割構造とされている(図2〜図5参照)。分割体10,11の縦の長さは電極板4の分割数に応じて設定され、横幅は電着ドラム3の幅と同じか若干幅広に設定される。この細分割構造の分割体11は、前記導電性コーティング膜13の被覆態様(設け方)が異なる複数種類の前記細分割体12を組み合わせて構成されている。 The electrode plate 4 is made of titanium and has a divided structure composed of a plurality of rectangular (strip-shaped) divided bodies 10 and 11 divided in the longitudinal direction (circumferential direction of the electrodeposition drum 3). At least one of them has a subdivided structure composed of a square subdivided body 12 further divided in the width direction (see FIGS. 2 to 5). The vertical length of the divided bodies 10 and 11 is set according to the number of divided parts of the electrode plate 4, and the horizontal width is set to be the same as or slightly wider than the width of the electrodeposited drum 3. The subdivided body 11 having this subdivided structure is configured by combining a plurality of types of the subdivided bodies 12 having different coating modes (methods) of the conductive coating film 13.

また、本実施例は、少なくとも巻取部14による金属箔Aの剥離位置Xに最も近い分割体11を前記細分割構造としている(少なくとも金属箔の電着生成過程の終盤で微調整を行うため。)。具体的には、各電極板4のうち、最も上方側(電解液1の液面側)の分割体11を夫々前記細分割構造としている。 Further, in this embodiment, at least the divided body 11 closest to the peeling position X of the metal foil A by the winding portion 14 has the finely divided structure (at least in order to make fine adjustments at the final stage of the electrodeposition generation process of the metal foil). .). Specifically, among the electrode plates 4, the divided bodies 11 on the uppermost side (liquid surface side of the electrolytic solution 1) each have the subdivided structure.

また、細分割構造の分割体11は、少なくとも2つ以上、好ましくは5つ以上の細分割体12で構成される構成とすれば良い。本実施例では6つの細分割体12で構成している。また、細分割体12は夫々同一の電源(図示省略)に接続されている。この電源は他の分割体10とも共通であり、細分割体12だけを特別に制御するものではなく、各分割体10,11は同様に制御される。 Further, the divided body 11 having a subdivided structure may be configured to be composed of at least two or more, preferably five or more subdivided bodies 12. In this embodiment, it is composed of six subdivided bodies 12. Further, each of the subdivided bodies 12 is connected to the same power source (not shown). This power supply is common to the other divided bodies 10, and does not specially control only the subdivided body 12, but the divided bodies 10 and 11 are controlled in the same manner.

各分割体10,11の電着ドラム3の外周面との対向面(表面)には、導電性コーティング膜13(酸化イリジウムコーティング膜)が成膜(被覆)されている。なお、他の導電性コーティング膜13を採用しても良い。本実施例の導電性コーティング膜13は(120℃〜200℃で30分以上加熱して硬化・乾燥させる)焼付塗装により形成されている。この際、分割体10,11の導電性コーティング膜13を設けない部位には、同時にチタン酸化膜が形成される。このチタン酸化膜により導電性コーティング膜13がない部分は耐食性が良好となり且つ一層通電し難い部分となる。 A conductive coating film 13 (iridium oxide coating film) is formed (coated) on the facing surface (surface) of each of the divided bodies 10 and 11 with the outer peripheral surface of the electrodeposition drum 3. In addition, another conductive coating film 13 may be adopted. The conductive coating film 13 of this example is formed by baking coating (heating at 120 ° C to 200 ° C for 30 minutes or more to cure and dry). At this time, a titanium oxide film is formed at the same time in the portions of the divided bodies 10 and 11 where the conductive coating film 13 is not provided. Due to this titanium oxide film, the portion without the conductive coating film 13 has good corrosion resistance and is more difficult to energize.

この導電性コーティング膜13は、細分割構造でない分割体10は前記対向面(表面)の全面に設けられており、細分割構造の分割体11は前記対向面(表面)の一部に設けられている。 In the conductive coating film 13, the divided body 10 having a subdivided structure is provided on the entire surface of the facing surface (surface), and the divided body 11 having the subdivided structure is provided on a part of the facing surface (surface). ing.

即ち、本実施例では、導電性コーティング膜13が設けられていない細分割体12、若しくは、一部にのみ導電性コーティング膜13が設けられている(一部に導電性コーティング膜13が含まれていない)細分割体12の少なくともいずれかが含まれる。 That is, in this embodiment, the subdivided body 12 to which the conductive coating film 13 is not provided, or the conductive coating film 13 is provided only partially (the conductive coating film 13 is partially included). Does not include at least one of the subdivisions 12.

従って、細分割体12としては、全面に導電性コーティング膜13が設けられたもの(全面コーティング)、導電性コーティング膜13が一切設けられていないもの(コーティングなし)、導電性コーティング膜13が一部の領域にのみ設けられているもの(一部コーティング)の三種類がある。 Therefore, as the subdivided body 12, one is provided with a conductive coating film 13 on the entire surface (whole surface coating), one without any conductive coating film 13 (no coating), and one conductive coating film 13. There are three types (partially coated) that are provided only in the area of the part.

一部コーティングは、本実施例では、主に表面の50%に導電性コーティング膜13が設けられる構成とし、対向する辺の中点同士を結ぶ線や対角線で、導電性コーティング膜13を設ける領域と設けない領域とを分けた構成を図示しているが、これに限られるものではなく、導電性コーティング膜13を設ける面積の割合は、例えば表面の10%〜90%程度に適宜設定できる。また、導電性コーティング膜13の平面形状は適宜設定できる。即ち、導電性コーティング膜13の被覆態様は、細分割体12の表面における導電性コーティング膜13が設けられる割合、コーティング部位(またはコーティングされない部位)の平面形状、コーティング膜厚等を変えることで適宜設定できる。 In this embodiment, the partial coating is configured such that the conductive coating film 13 is mainly provided on 50% of the surface, and the area where the conductive coating film 13 is provided is a line or a diagonal line connecting the midpoints of the opposite sides. Although the configuration is shown in which the region is divided into the region and the region not provided, the ratio is not limited to this, and the ratio of the area where the conductive coating film 13 is provided can be appropriately set to, for example, about 10% to 90% of the surface. Further, the planar shape of the conductive coating film 13 can be appropriately set. That is, the coating mode of the conductive coating film 13 is appropriately changed by changing the ratio of the conductive coating film 13 on the surface of the subdivided body 12, the planar shape of the coated portion (or the uncoated portion), the coating film thickness, and the like. Can be set.

図2〜図5に図示したように、細分割体12は全面コーティング、コーティングなし、一部コーティングを自由に組み合わせて配置することで、装置の個性に応じた膜厚調整が可能となる。例えば、最も単純な配置は図2に図示したもので、両端部に全面コーティング、中央部にコーティングなしを配置して、電着ドラム3の外周面の幅方向両端部に比べて中央部で流れる電流を抑制し中央部の金属箔生成量を減少させて箔厚を均一化するものである。図3は図2より両端部の電流抑制量をより細かく調整するもので、図4及び図5は図4より中央部の電流抑制量をより細かく調整するものである。 As shown in FIGS. 2 to 5, the film thickness of the subdivided body 12 can be adjusted according to the individuality of the apparatus by arranging the subdivided body 12 with a full surface coating, no coating, or a partial coating in any combination. For example, the simplest arrangement is shown in FIG. 2, in which the entire surface is coated on both ends and the uncoated portion is arranged in the center, and the current flows in the center as compared with the widthwise ends of the outer peripheral surface of the electrodeposition drum 3. It suppresses the electric current and reduces the amount of metal foil produced in the central part to make the foil thickness uniform. FIG. 3 is for finely adjusting the current suppression amount at both ends from FIG. 2, and FIGS. 4 and 5 are for finely adjusting the current suppression amount at the central portion from FIG.

なお、図6は細分割構造の分割体11を用いない従来の電極板4’であり、この従来の電極板4’は全ての分割体10’の表面全面に一様に導電性コーティング膜13’を設けている。この場合、箔厚調整には、補助陽極や遮蔽板を別途用意する必要がある。 Note that FIG. 6 shows a conventional electrode plate 4'without using the divided body 11 having a finely divided structure, and the conventional electrode plate 4'is a conductive coating film 13 uniformly on the entire surface of all the divided bodies 10'. 'Is provided. In this case, it is necessary to separately prepare an auxiliary anode and a shielding plate for adjusting the foil thickness.

また、この従来の電極板4’の分割体10’または従来の一枚板の電極板の部位毎に、膜の有無や膜厚を設定して通電度合いを調整することも可能ではあるが、装置毎にその個性に応じた分割体10’または一枚板の電極板を用意する必要があり、本実施例に比しコスト性に劣る。 Further, although it is possible to adjust the degree of energization by setting the presence or absence of a film and the film thickness for each part of the divided body 10'of the conventional electrode plate 4'or the conventional single plate electrode plate. It is necessary to prepare a divided body 10'or a single electrode plate according to the individuality of each device, which is inferior in costability as compared with the present embodiment.

本実施例は上述のように構成したから、電極体4の分割体10,11のうち、細分割構造の分割体11は、装置の個性に合わせて適宜細分割体12を組み合わせることで、導電性コーティング膜13が存在する部分と存在しない部分とを簡単に自由に設定して電着ドラム3の外周面との通電度合いを調整でき、補助陽極や遮蔽板を別途用いる必要なく電着ドラム3の外周面の幅方向における箔厚を均一化することが可能となる。 Since this embodiment is configured as described above, among the divided bodies 10 and 11 of the electrode body 4, the divided body 11 having a subdivided structure is conductive by appropriately combining the subdivided bodies 12 according to the individuality of the apparatus. The portion where the sex coating film 13 exists and the portion where it does not exist can be easily and freely set to adjust the degree of energization with the outer peripheral surface of the electrodeposition drum 3, and the electrodeposition drum 3 does not need to use an auxiliary anode or a shielding plate separately. It is possible to make the foil thickness uniform in the width direction of the outer peripheral surface of the surface.

従って、本実施例によれば、箔厚を均一化させることで金属箔厚さのバラつきによる伸びしわや変色を抑制でき、しかも、多くの電気回路(直流安定化電源や電流制御システム)を必要とせず導入コストの増大を抑制でき、遮蔽板のように装置完成後の設計及び製造にかかる期間を短縮して機会損失を抑制できる。 Therefore, according to this embodiment, by making the foil thickness uniform, it is possible to suppress stretching wrinkles and discoloration due to variations in the metal foil thickness, and moreover, many electric circuits (DC stabilized power supply and current control system) are required. However, it is possible to suppress an increase in introduction cost, shorten the period required for designing and manufacturing after the completion of the device like a shielding plate, and suppress opportunity loss.

よって、本実施例は、装置の個性に応じて予め導電性コーティング膜の被覆態様が異なる複数種の細分割体を作製することで、コスト安に電着ドラムの外周面の幅方向における箔厚の調整が可能となる極めて実用的なものとなる。 Therefore, in this embodiment, by producing a plurality of types of subdivided bodies having different coating modes of the conductive coating film in advance according to the individuality of the apparatus, the foil thickness in the width direction of the outer peripheral surface of the electrodeposition drum can be reduced at low cost. It becomes extremely practical that the adjustment of is possible.

1 電解液
2 電解槽
3 電着ドラム
4 電極板
10 分割体
11 分割体
12 細分割体
13 導電性コーティング膜
14 巻取部
A 金属箔
X 剥離位置
1 Electrolyte 2 Electrolytic cell 3 Electroplated drum 4 Electrode plate
10 splits
11 splits
12 subdivisions
13 Conductive coating film
14 Winding part A Metal leaf X Peeling position

Claims (13)

電解液が溜められる電解槽と、この電解槽に設けられる電着ドラムと、表面が前記電着ドラムの外周面と対向するように前記電解槽内に設けられる電極板とを有する金属箔製造装置であって、前記電極板の表面は前記電着ドラムの外周面に沿った凹湾曲面に設定され、また、この電極板の表面には導電性コーティング膜が被覆され、更に、この電極板は前記電着ドラムの軸方向に所定長の横幅を有し且つ縦が所定長を有する分割体が複数並設された分割構造とされ、また、この分割体のうち少なくとも1つは更に分割された細分割体が複数並設された細分割構造とされ、この細分割構造の分割体は、前記導電性コーティング膜の被覆態様が異なる複数種類の前記細分割体を組み合わせて構成されていることを特徴とする金属箔製造装置。 A metal foil manufacturing apparatus having an electrolytic cell for storing an electrolytic solution, an electrodeposition drum provided in the electrolytic cell, and an electrode plate provided in the electrolytic cell so that the surface of the electrolytic cell faces the outer peripheral surface of the electrolytic cell. The surface of the electrode plate is set to a concave curved surface along the outer peripheral surface of the electrodeposition drum, and the surface of the electrode plate is coated with a conductive coating film, and the electrode plate is further covered with a conductive coating film. A plurality of divided bodies having a predetermined width in the axial direction and a predetermined length in the vertical direction are arranged side by side in the electrodeposition drum, and at least one of the divided bodies is further divided. A plurality of subdivided bodies are arranged side by side in a subdivided structure, and the subdivided body of this subdivided structure is configured by combining a plurality of types of the subdivided bodies having different coating modes of the conductive coating film. Characterized metal foil manufacturing equipment. 請求項1記載の金属箔製造装置において、前記電着ドラムの外周面に電着生成された金属箔を剥離して巻き取る巻取部を備え、この巻取部による金属箔の剥離位置に最も近い前記分割体を前記細分割構造としたことを特徴とする金属箔製造装置。 The metal leaf manufacturing apparatus according to claim 1 is provided with a winding portion on the outer peripheral surface of the electrodeposition drum for peeling and winding the metal foil generated by electrodeposition, and is most located at the peeling position of the metal foil by this winding portion. A metal leaf manufacturing apparatus characterized in that the near-divided body has the subdivided structure. 請求項1,2いずれか1項に記載の金属箔製造装置において、前記電極板は前記電着ドラムの外周面に沿って複数並設され、前記各電極板のうち、最も上方側の分割体を夫々前記細分割構造としたことを特徴とする金属箔製造装置。 In the metal leaf manufacturing apparatus according to any one of claims 1 and 2, a plurality of the electrode plates are arranged side by side along the outer peripheral surface of the electrodeposition drum, and the uppermost divided body of the electrode plates is provided. The metal leaf manufacturing apparatus, each of which has the above-mentioned subdivided structure. 請求項1〜3いずれか1項に記載の金属箔製造装置において、前記細分割体は夫々同一の電源に接続されていることを特徴とする金属箔製造装置。 The metal leaf manufacturing apparatus according to any one of claims 1 to 3, wherein the subdivided bodies are connected to the same power source. 請求項1〜4いずれか1項に記載の金属箔製造装置において、前記細分割構造の分割体は、前記導電性コーティング膜が全部若しくは一部に設けられていない少なくとも1つ以上の前記細分割体を含むことを特徴とする金属箔製造装置。 In the metal leaf manufacturing apparatus according to any one of claims 1 to 4, at least one of the subdivided bodies having the subdivided structure is not provided with the conductive coating film in whole or in part. A metal leaf manufacturing device characterized by including a body. 請求項5記載の金属箔製造装置において、前記細分割体の前記導電性コーティング膜が設けられていない部位にはチタン酸化膜が設けられていることを特徴とする金属箔製造装置。 The metal leaf manufacturing apparatus according to claim 5, wherein a titanium oxide film is provided at a portion of the subdivided body where the conductive coating film is not provided. 電解液が溜められる電解槽と、この電解槽に設けられる電着ドラムと、表面が前記電着ドラムの外周面と対向するように前記電解槽内に設けられる電極板と、前記電着ドラムの外周面に電着生成された金属箔を剥離して巻き取る巻取部とを有する金属箔製造装置における前記電極板であって、前記電極板の表面は前記電着ドラムの外周面に沿った凹湾曲面に設定され、また、この電極板の表面には導電性コーティング膜が被覆され、更に、この電極板は前記電着ドラムの軸方向に所定長の横幅を有し且つ縦が所定長を有する分割体が複数並設された分割構造とされ、また、この分割体のうち少なくとも1つは更に分割された細分割体が複数並設された細分割構造とされ、この細分割構造の分割体は、前記導電性コーティング膜の被覆態様が異なる複数種類の前記細分割体を組み合わせて構成されていることを特徴とする電極板。 The electrolytic tank in which the electrolytic solution is stored, the electrodeposition drum provided in the electrolytic tank, the electrode plate provided in the electrolytic tank so that the surface faces the outer peripheral surface of the electrodeposition drum, and the electrodeposition drum. The electrode plate in a metal foil manufacturing apparatus having a winding portion for peeling and winding the electrodeposited metal foil on the outer peripheral surface, and the surface of the electrode plate is along the outer peripheral surface of the electrodeposition drum. The surface of the electrode plate is set to a concave curved surface, and the surface of the electrode plate is coated with a conductive coating film. Further, the electrode plate has a width of a predetermined length in the axial direction of the electrodeposition drum and a predetermined length in the vertical direction. In addition, at least one of the divided structures is a subdivided structure in which a plurality of subdivided bodies having a plurality of subdivided bodies are arranged side by side. The divided body is an electrode plate characterized in that it is formed by combining a plurality of types of the finely divided bodies having different coating modes of the conductive coating film. 請求項7記載の電極板において、前記巻取部による金属箔の剥離位置に最も近い前記分割体を前記細分割構造としたことを特徴とする電極板。 The electrode plate according to claim 7, wherein the divided body closest to the peeling position of the metal foil by the winding portion has the subdivided structure. 請求項7,8いずれか1項に記載の電極板において、前記電極板は前記電着ドラムの外周面に沿って複数並設され、前記各電極板のうち、最も上方側の分割体を夫々前記細分割構造としたことを特徴とする電極板。 In the electrode plate according to any one of claims 7 and 8, a plurality of the electrode plates are arranged side by side along the outer peripheral surface of the electrodeposition drum, and the uppermost divided body of each of the electrode plates is formed. An electrode plate characterized by having the subdivided structure. 請求項7〜9いずれか1項に記載の電極板において、前記細分割体は夫々同一の電源に接続されていることを特徴とする電極板。 The electrode plate according to any one of claims 7 to 9, wherein the subdivided bodies are connected to the same power source. 請求項7〜10いずれか1項に記載の電極板において、前記細分割構造の分割体は、前記導電性コーティング膜が全部若しくは一部に設けられていない少なくとも1つ以上の前記細分割体を含むことを特徴とする電極板。 In the electrode plate according to any one of claims 7 to 10, the subdivided body having the subdivided structure includes at least one or more subdivided bodies to which the conductive coating film is not provided in whole or in part. An electrode plate characterized by including. 請求項11記載の電極板において、前記細分割体の前記導電性コーティング膜が設けられていない部位にはチタン酸化膜が設けられていることを特徴とする電極板。 The electrode plate according to claim 11, wherein a titanium oxide film is provided at a portion of the subdivided body where the conductive coating film is not provided. 電解液が溜められる電解槽と、この電解槽に設けられる電着ドラムと、表面が前記電着ドラムの外周面と対向するように前記電解槽内に設けられる電極板とを有する金属箔製造装置を用いた金属箔の製造方法であって、前記電極板の表面は前記電着ドラムの外周面に沿った凹湾曲面に設定され、また、この電極板の表面には導電性コーティング膜が被覆され、更に、この電極板は前記電着ドラムの軸方向に所定長の横幅を有し且つ縦が所定長を有する分割体が複数並設された分割構造とされ、また、この分割体のうち少なくとも1つは更に分割された細分割体が複数並設された細分割構造とされて、前記導電性コーティング膜の被覆態様が異なる複数種類の前記細分割体を適宜組み合わせて配置することで前記電極板と前記電着ドラムの外周面との通電度合いを調整して前記電着ドラムの外周面に箔厚が可及的に均一な前記金属箔を電着生成することを特徴とする金属箔の製造方法。 A metal foil manufacturing apparatus having an electrolytic tank for storing an electrolytic solution, an electrodeposition drum provided in the electrolytic tank, and an electrode plate provided in the electrolytic tank so that its surface faces the outer peripheral surface of the electrodeposition drum. The surface of the electrode plate is set to a concave curved surface along the outer peripheral surface of the electrodeposition drum, and the surface of the electrode plate is coated with a conductive coating film. Further, the electrode plate has a divided structure in which a plurality of divided bodies having a predetermined width in the axial direction of the electrodeposition drum and a predetermined length in the vertical direction are arranged side by side, and among the divided bodies. At least one is a subdivided structure in which a plurality of further subdivided bodies are arranged side by side, and the plurality of types of the subdivided bodies having different coating modes of the conductive coating film are appropriately combined and arranged. A metal foil characterized by adjusting the degree of energization between the electrode plate and the outer peripheral surface of the electrodeposition drum to electrodeposit and generate the metal foil having a foil thickness as uniform as possible on the outer peripheral surface of the electrodeposition drum. Manufacturing method.
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