JP6952446B2 - 縁部プレナムシャワーヘッドアセンブリを含む堆積装置 - Google Patents
縁部プレナムシャワーヘッドアセンブリを含む堆積装置 Download PDFInfo
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- 239000007789 gas Substances 0.000 claims description 396
- 239000000758 substrate Substances 0.000 claims description 92
- 238000002347 injection Methods 0.000 claims description 85
- 239000007924 injection Substances 0.000 claims description 85
- 238000012545 processing Methods 0.000 claims description 43
- 238000000034 method Methods 0.000 claims description 40
- 238000000151 deposition Methods 0.000 claims description 33
- 239000012530 fluid Substances 0.000 claims description 25
- 230000002093 peripheral effect Effects 0.000 claims description 19
- 238000004891 communication Methods 0.000 claims description 18
- 230000008021 deposition Effects 0.000 claims description 17
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims description 17
- 239000000463 material Substances 0.000 claims description 15
- 239000011261 inert gas Substances 0.000 claims description 5
- 239000000523 sample Substances 0.000 claims description 5
- 239000004065 semiconductor Substances 0.000 claims description 4
- 229910010293 ceramic material Inorganic materials 0.000 claims description 3
- 239000002184 metal Substances 0.000 claims 2
- 238000004062 sedimentation Methods 0.000 claims 2
- 230000000149 penetrating effect Effects 0.000 claims 1
- 238000005229 chemical vapour deposition Methods 0.000 description 7
- 239000000203 mixture Substances 0.000 description 6
- 238000000231 atomic layer deposition Methods 0.000 description 5
- 238000005137 deposition process Methods 0.000 description 4
- 238000006243 chemical reaction Methods 0.000 description 3
- 230000001276 controlling effect Effects 0.000 description 3
- 150000002500 ions Chemical class 0.000 description 3
- 239000002243 precursor Substances 0.000 description 3
- 238000010926 purge Methods 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 238000004590 computer program Methods 0.000 description 2
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- 230000004907 flux Effects 0.000 description 2
- 230000007935 neutral effect Effects 0.000 description 2
- 238000005240 physical vapour deposition Methods 0.000 description 2
- 238000012546 transfer Methods 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 1
- 238000000429 assembly Methods 0.000 description 1
- 230000000712 assembly Effects 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 229910052743 krypton Inorganic materials 0.000 description 1
- DNNSSWSSYDEUBZ-UHFFFAOYSA-N krypton atom Chemical compound [Kr] DNNSSWSSYDEUBZ-UHFFFAOYSA-N 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 229910052754 neon Inorganic materials 0.000 description 1
- GKAOGPIIYCISHV-UHFFFAOYSA-N neon atom Chemical compound [Ne] GKAOGPIIYCISHV-UHFFFAOYSA-N 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 229920000307 polymer substrate Polymers 0.000 description 1
- 238000011112 process operation Methods 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 238000013515 script Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 229910052724 xenon Inorganic materials 0.000 description 1
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 description 1
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- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
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Description
Claims (19)
- 基板を処理するための堆積装置であって、
基板を中で処理し得る処理区域を含む真空チャンバと、
前記真空チャンバと流体連絡する第1のガス源および第2のガス源とを備え、前記第1のガス源が、処理中に第1のガスを前記真空チャンバ内に供給するように動作可能であり、前記第2のガス源が、処理中に第2のガスを前記真空チャンバ内に供給するように動作可能であり、
堆積装置がさらに、
シャワーヘッドアセンブリを備え、前記シャワーヘッドアセンブリが、表板および裏板を含み、前記裏板が、前記第1のガス源と流体連絡する第1のガス入口と、前記第2のガス源と流体連絡する第2のガス入口とを含み、前記表板が、下壁と、前記下壁の外周縁から垂直上方向に延びる外壁とを含み、前記外壁が、前記裏板の外周縁に封止され、それにより、前記表板と前記裏板との間に内側プレナムおよび縁部プレナムが形成され、前記表板が、前記内側プレナムを介して前記第1のガス入口と流体連絡する第1の通気性領域を含み、それにより、処理中に前記第1の通気性領域を通して前記第1のガスを供給することができ、前記表板がさらに、前記縁部プレナムを介して前記第2のガス入口と流体連絡する第2の通気性領域を含み、それにより、処理中に前記第2の通気性領域を通して第2のガスを供給することができ、前記内側プレナムと前記縁部プレナムとが互いに流体連絡せず、前記第1の通気性領域が、前記下壁の上面および下面を通って延びる第1の群のガス注入穴を備え、前記第2の通気性領域が、前記外壁の上面および前記下壁の前記下面を通って延びる第2の群のガス注入穴を備え、
前記第1の群のガス注入穴が、六角形パターンで配置され、
前記第2の群のガス注入穴が、六角形パターンで配置され、
前記第1の群のガス注入穴が、約3000個〜20000個以上のガス注入穴を含み、または
前記第2の群のガス注入穴が、約100個〜約2000個のガス注入穴を含み、
堆積装置がさらに、
前記堆積装置内で基板が処理されるときに、基板を上面に支持するように構成された基板ペデスタルアセンブリを備える
堆積装置。 - 請求項1に記載の堆積装置であって、
(a)前記第1の通気性領域が、前記下壁の上面および下面を通って延びる第1の群のガス注入穴を備え、前記第2の通気性領域が、前記外壁の上面および前記下壁の前記下面を通って延びる第2の群のガス注入穴を備える、または
(b)前記第1および第2の通気性領域が、前記下壁に形成され、前記下壁が、多孔性金属材料、多孔性半導体材料、もしくは多孔性セラミック材料から形成され、それにより、前記内側プレナムおよび前記縁部プレナムにそれぞれ供給される第1のガスおよび第2のガスが、前記下壁を通して供給され得る
堆積装置。 - 請求項1に記載の堆積装置であって、
(a)前記シャワーヘッドアセンブリがさらにステムを備え、前記裏板が、前記ステムの下端部から横方向外側に延在し、前記ステムが、前記ステムを通って垂直に延び、前記第1のガス入口と流体連絡する第1のガス通路を有し、もしくは前記ステムが、前記ステムを通って垂直に延び、前記第1のガス入口と流体連絡する第1のガス通路と、前記ステムを通って垂直に延び、前記第2のガス入口と流体連絡する第2のガス通路とを有し、前記裏板が、前記第2のガス入口を介して前記第2のガス通路と流体連絡する少なくとも1つの横方向に延びるガス通路を含む、または
(b)前記裏板が、前記第2のガス入口と流体連絡する少なくとも1つの横方向に延びるガス通路を含み、前記第2のガス入口が、前記少なくとも1つの横方向に延びるガス通路を介して前記縁部プレナムと流体連絡する
堆積装置。 - 請求項1に記載の堆積装置であって、
前記内側プレナムが、前記裏板の下面と、前記表板の上面と、前記表板の前記外壁の下側内面との間にあり、
(a)前記外壁が、下側垂直面と、上側垂直面と、前記下側垂直面と前記上側垂直面との間に延びる水平面とを含み、前記縁部プレナムが、前記裏板の下面と、前記外壁の上端部と結合されているカバープレートの下面と、前記水平面と、前記上側垂直面との間に形成される、
(b)前記外壁が、その上面に環状溝部を含み、前記縁部プレナムが、前記環状溝部の表面と、前記裏板の外側縁部下面との間に形成される、または
(c)前記外壁が、その前記上面に環状溝部を含み、前記裏板が、その外側下面に、対向する環状溝部を含み、前記縁部プレナムが、前記対向する環状溝部の表面の間に環状空間を備える
堆積装置。 - 請求項1に記載の堆積装置であって、
(a)前記処理区域内で前記第1のガスおよび/または前記第2のガスを励起してプラズマ状態にするように適合されたRFエネルギー源、
(b)前記堆積装置によって実施されるプロセスを制御するように動作可能なシステム制御装置、
(c)前記堆積装置を制御するためのプログラム命令を備える非一時的なコンピュータ機械可読媒体、および/または
(d)前記処理区域から前記第1および第2のガスを排気するための、前記処理区域と流体連絡する真空源
を含む、堆積装置。 - 請求項1に記載の堆積装置アセンブリであって、
(a)前記第2の群のガス注入穴の各ガス注入穴の上部が、垂直に延び、前記ガス注入穴のそれぞれの下部よりも大きい直径を有し、前記それぞれの下部の長さが、前記第1の群のガス注入穴の各ガス注入穴の長さと少なくともほぼ同じであり、前記それぞれの下部の直径が、前記第1の群のガス注入穴のそれぞれのガス注入穴の直径と少なくともほぼ同じである、
(b)前記第2の群のガス注入穴それぞれの上部が、前記ガス注入穴の下部よりも大きい直径を有する、
(d)前記第1の群のガス注入穴が、同心円列で配置される、または、
(e)前記第2の群のガス注入穴が、1つまたは複数の同心円列で配置される、
堆積装置アセンブリ。 - 請求項1に記載の堆積装置であって、
前記裏板が、少なくとも4つの横方向に延びるガス通路と、前記裏板の前記第2のガス入口および前記少なくとも4つの横方向に延びるガス通路と流体連絡する拡散器とを含み、前記拡散器が、ガスが前記第2のガス入口を通して前記裏板の前記横方向に延びるガス通路に供給されるときに、前記横方向に延びるガス通路それぞれを通って流れるガス間の圧力差を減少させるように構成されている、堆積装置。 - 請求項3に記載の堆積装置であって、
前記裏板が、少なくとも4つの横方向に延びるガス通路と、前記裏板の前記第2のガス入口および前記少なくとも4つの横方向に延びるガス通路と流体連絡する拡散器とを含み、前記拡散器が、ガスが前記第2のガス入口を通して前記裏板の前記横方向に延びるガス通路に供給されるときに、前記横方向に延びるガス通路それぞれを通って流れるガス間の圧力差を減少させるように構成され、
前記拡散器が、前記ステムの前記第2のガス通路と流体連絡する一群の内側ガス開口と、前記裏板の前記少なくとも4つの横方向に延びるガス通路と流体連絡する一群の外側ガス開口とを有する上面を含み、前記一群の内側ガス開口が、壁によって前記一群の外側ガス開口から隔離され、前記一群の内側ガス開口が、前記一群の外側ガス開口の上面よりも下にある前記拡散器のチャネルを介して前記一群の外側ガス開口と流体連絡し、前記一群の内側ガス開口および前記一群の外側ガス開口が、ガスが前記ステムの前記第2のガス通路から前記裏板の前記横方向に延びるガス通路に供給されるときに、前記横方向に延びるガス通路それぞれを通って流れるガス間の圧力差を減少させるように構成され、前記拡散器がC字形リングであり、前記C字形リングの向かい合う端部が、温度プローブを中に有する裏板の部分を取り囲むように配置される、堆積装置。 - 請求項1に記載の堆積装置であって、
(a)前記表板が、その前記下壁から垂直上方向に延在する複数のポストを前記内側プレナム内に含み、前記ポストの上端部が、前記裏板を貫通する対応する開口に溶接され、前記開口内に前記ポストの前記上端部が位置される、
(b)前記表板が、中に埋め込まれたRF電極を含む、
(c)バッフルが、前記シャワーヘッドアセンブリの前記内側プレナム内に配設され、前記バッフルが、前記シャワーヘッドアセンブリに供給されるガスを前記内側プレナム全体にわたって一様に分散するように動作可能である、
(d)前記外壁の軸方向厚さが、少なくとも、前記外壁の内側の前記下壁の軸方向厚さの2倍よりも大きい、および/または
(e)前記表板の前記外壁が、前記裏板の前記外周縁に冶金的に結合される
堆積装置。 - 基板を処理するための堆積装置のシャワーヘッドアセンブリであって、
表板および裏板を備え、
前記裏板が、第1のガス入口および第2のガス入口を含み、
前記表板が、下壁と、前記下壁の外周縁から垂直上方向に延びる外壁とを含み、前記外壁が、前記裏板の外周縁に封止され、それにより、前記表板と前記裏板との間に内側プレナムおよび縁部プレナムが形成され、前記表板が、前記内側プレナムを介して前記第1のガス入口と流体連絡する第1の通気性領域を含み、それにより、前記シャワーヘッドアセンブリが堆積装置内に取り付けられたときに、処理中に前記第1のガス入口に供給される第1のガスを前記第1の通気性領域を通して供給することができ、前記表板がさらに、前記縁部プレナムを介して前記第2のガス入口と流体連絡する第2の通気性領域を含み、それにより、前記シャワーヘッドアセンブリが堆積装置内に取り付けられたときに、処理中に第2のガス入口に供給される第2のガスを前記第2の通気性領域を通して供給することができ、前記内側プレナムと前記縁部プレナムとが互いに流体連絡せず、 前記第1の通気性領域が、前記下壁の上面および下面を通って延びる第1の群のガス注入穴を備え、前記第2の通気性領域が、前記外壁の上面および前記下壁の前記下面を通って延びる第2の群のガス注入穴を備え、
前記第1の群のガス注入穴が、六角形パターンで配置され、
前記第2の群のガス注入穴が、六角形パターンで配置され、
前記第1の群のガス注入穴が、約3000個〜20000個以上のガス注入穴を含み、または
前記第2の群のガス注入穴が、約100個〜約2000個のガス注入穴を含む、シャワーヘッドアセンブリ。 - 請求項10に記載のシャワーヘッドアセンブリであって、
(a)前記第1の通気性領域が、前記下壁の上面および下面を通って延びる第1の群のガス注入穴を備え、前記第2の通気性領域が、前記外壁の上面および前記下壁の前記下面を通って延びる第2の群のガス注入穴を備える、または
(b)前記第1および第2の通気性領域が、前記下壁に形成され、前記下壁が、多孔性金属材料、多孔性半導体材料、もしくは多孔性セラミック材料から形成され、それにより、前記内側プレナムおよび前記縁部プレナムにそれぞれ供給される第1のガスおよび第2のガスが、前記下壁を通して供給され得る
シャワーヘッドアセンブリ。 - 請求項10に記載のシャワーヘッドアセンブリであって、
(a)前記シャワーヘッドアセンブリがさらにステムを備え、前記裏板が、前記ステムの下端部から横方向外側に延在し、前記ステムが、前記ステムを通って垂直に延び、前記第1のガス入口と流体連絡する第1のガス通路を有し、もしくは前記ステムが、前記ステムを通って垂直に延び、前記第1のガス入口と流体連絡する第1のガス通路と、前記ステムを通って垂直に延び、前記第2のガス入口と流体連絡する第2のガス通路とを有し、前記裏板が、前記第2のガス入口を介して前記第2のガス通路と流体連絡する少なくとも1つの横方向に延びるガス通路を含む、または
(b)前記裏板が、前記第2のガス入口と流体連絡する少なくとも1つの横方向に延びるガス通路を含み、前記第2のガス入口が、前記少なくとも1つの横方向に延びるガス通路を介して前記縁部プレナムと流体連絡する
シャワーヘッドアセンブリ。 - 請求項10に記載のシャワーヘッドアセンブリであって、
前記内側プレナムが、前記裏板の下面と、前記表板の前記下壁の上面と、前記表板の前記外壁の下側内面との間にあり、
(a)前記外壁が、下側垂直面と、上側垂直面と、前記下側垂直面と前記上側垂直面との間に延びる水平面とを含み、前記縁部プレナムが、前記裏板の外面と、前記外壁の上端部と結合されているカバープレートの下面と、前記水平面と、前記上側垂直面との間に形成される、
(b)前記外壁が、その前記上面に環状チャネルを含み、前記縁部プレナムが、前記環状チャネルの表面と、前記裏板の外側下面との間に形成される、または
(c)前記外壁が、その前記上面に環状チャネルを含み、前記裏板が、その外側下面に、対向する環状チャネルを含み、前記縁部プレナムが、前記対向する環状チャネルの表面間に環状空間を備える
シャワーヘッドアセンブリ。 - 請求項10に記載のシャワーヘッドアセンブリであって、
(a)前記第2の群のガス注入穴の各ガス注入穴の上部が、垂直に延び、前記ガス注入穴のそれぞれの下部よりも大きい直径を有し、前記それぞれの下部の長さが、前記第1の群のガス注入穴の各ガス注入穴の長さと少なくともほぼ同じであり、前記それぞれの下部の直径が、前記第1の群のガス注入穴のそれぞれのガス注入穴の直径と少なくともほぼ同じである、
(b)前記第2の群のガス注入穴それぞれの上部が、前記ガス注入穴の下部よりも大きい直径を有する、
(c)前記第1の群のガス注入穴が、六角形パターンで配置される、
(d)前記第1の群のガス注入穴が、同心円列で配置される、または、
(e)前記第2の群のガス注入穴が、1つまたは複数の同心円列で配置される、
シャワーヘッドアセンブリ。 - 請求項10に記載のシャワーヘッドアセンブリであって、
前記裏板が、少なくとも4つの横方向に延びるガス通路と、前記裏板の前記第2のガス入口および前記少なくとも4つの横方向に延びるガス通路と流体連絡する拡散器とを含み、前記拡散器が、ガスが前記第2のガス入口を通して前記裏板の前記横方向に延びるガス通路に供給されるときに、前記横方向に延びるガス通路それぞれを通って流れるガス間の圧力差を減少させるように構成されている、シャワーヘッドアセンブリ。 - 請求項12に記載のシャワーヘッドアセンブリであって、
前記裏板が、少なくとも4つの横方向に延びるガス通路と、前記裏板の前記第2のガス入口および前記少なくとも4つの横方向に延びるガス通路と流体連絡する拡散器とを含み、前記拡散器が、ガスが前記第2のガス入口を通して前記裏板の前記横方向に延びるガス通路に供給されるときに、前記横方向に延びるガス通路それぞれを通って流れるガス間の圧力差を減少させるように構成され、
前記拡散器が、前記ステムの前記第2のガス通路と流体連絡する一群の内側ガス開口と、前記裏板の前記少なくとも4つの横方向に延びるガス通路と流体連絡する一群の外側ガス開口とを有する上面を含み、前記一群の内側ガス開口が、壁によって前記一群の外側ガス開口から隔離され、前記一群の内側ガス開口が、前記一群の外側ガス開口の上面よりも下にある前記拡散器のチャネルを介して前記一群の外側ガス開口と流体連絡し、前記一群の内側ガス開口および前記一群の外側ガス開口が、ガスが前記ステムの前記第2のガス通路から前記裏板の前記横方向に延びるガス通路に供給されるときに、前記横方向に延びるガス通路それぞれを通って流れるガス間の圧力差を減少させるように構成され、前記拡散器が、C字形リングであり、前記C字形リングの向かい合う端部が、温度プローブを中に受け取るように構成された裏板の部分を取り囲むように配置される、シャワーヘッドアセンブリ。 - 請求項10に記載のシャワーヘッドアセンブリであって、
(a)前記表板が、その前記下壁から垂直上方向に延在する複数のポストを前記内側プレナム内に含み、前記ポストの上端部が、前記裏板の対応する開口に溶接され、前記開口内に前記ポストの前記上端部が位置される、
(b)前記表板が、中に埋め込まれたRF電極を含む、
(c)バッフルが、前記シャワーヘッドアセンブリの前記内側プレナム内に配設され、前記バッフルが、前記シャワーヘッドアセンブリに供給されるガスを前記内側プレナム全体にわたって一様に分散するように動作可能である、
(d)前記外壁の軸方向厚さが、少なくとも、前記外壁の内側の前記下壁の軸方向厚さの2倍よりも大きい、および/または
(e)前記表板の前記外壁が、前記裏板の前記外周縁に冶金的に結合される
シャワーヘッドアセンブリ。 - 堆積装置内の基板の上面に材料を堆積する方法であって、
前記堆積装置の真空チャンバ内に配設された基板ペデスタルアセンブリの上面に基板を支持するステップと、
第1のガスを、第1のガス源から、シャワーヘッドアセンブリを通して、前記基板の上面の上方の前記真空チャンバの内側処理区域に供給するステップであって、前記第1のガスが、前記シャワーヘッドアセンブリの内側プレナムを通して前記内側処理区域に供給され、前記内側プレナムが、第1の群のガス注入穴と流体連絡し、前記第1の群のガス注入穴が、前記シャワーヘッドアセンブリの表板の下壁の上面および下面を通って延び、それにより、前記第1のガスが前記基板の前記上面の上方の前記内側処理区域に供給されるステップと、
同時に、第2のガスを、第2のガス源から、前記シャワーヘッドアセンブリを通して、前記基板の前記上面の上方の前記真空チャンバの処理区域に供給するステップであって、前記第2のガスが、前記シャワーヘッドアセンブリの縁部プレナムを通して外側処理区域に供給され、前記縁部プレナムが、第2の群のガス注入穴と流体連絡し、前記第2の群のガス注入穴が、前記下壁の外周縁から垂直上方向に延びる外壁の上面と、前記シャワーヘッドアセンブリの前記表板の前記下壁の前記下面とを通って延び、それにより、前記第2のガスが前記基板の前記上面の上方の前記外側処理区域に供給されるステップと、
前記第1のガス、または前記第1と第2のガスを励起してプラズマにするステップと、
前記第2のガスの前記供給によって、前記第1のガスから発生されるプラズマを前記外側処理区域内で局所的に修正するステップと、
前記基板の前記上面に材料を一様に堆積するステップと
を含む方法。 - 請求項18に記載の方法であって、
前記第2のガスの前記供給によって、前記第1のガスから発生される前記プラズマを前記外側処理区域内で局所的に修正するステップが、1種もしくは複数種の不活性ガスを前記外側処理区域に供給することによって、前記外側処理区域内で発生された前記プラズマを改良または抑制するステップを含み、および/または、前記第1のガスから発生される前記プラズマを前記外側処理区域内で局所的に修正するステップが、不活性チューニングガスを前記外側処理区域に供給するステップを含む、方法。
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US10253412B2 (en) | 2019-04-09 |
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