JP6952401B2 - Resistance temperature detector - Google Patents

Description

The present invention relates to a resistance temperature detector in which resistance wiring and leads are provided on an insulating substrate made of a ceramic sintered body.

As a temperature measuring body for temperature detection used in an exhaust gas sensor or the like, one using a change in the electrical resistance of a metal material depending on the temperature is known. For example, a resistance temperature detector having an insulating substrate made of a ceramic sintered body such as an aluminum oxide sintered body, a resistance wiring including an electrode provided on the insulating substrate, and a lead is used.

Japanese Unexamined Patent Publication No. 11-12214

However, in the case of the above-mentioned resistance temperature detector, the following problems may occur. That is, for example, the stress due to the vibration of the equipment when measuring the temperature of the exhaust gas from the equipment having a combustion part such as an internal combustion engine, a gas turbine, or a boiler, or the stress when handling the thermometer is applied to the reed, and the reed and the electrode There is a possibility that the connection strength between the lead and the electrode is lowered, the connection portion between the lead and the electrode is reduced, and the resistance of the connection portion between the lead and the electrode is increased.

The thermometer according to one aspect of the present invention includes an insulating substrate, resistance wiring provided on the insulating substrate, first and second electrodes provided on one main surface of the insulating substrate, and the first electrode. It has an electrode and a lead connected to each of the second electrode, and has a recess on the surface of the lead.
, Contiguous with the recess in plan view, and a frame-like projection surrounding the recess.

According to one temperature sensing element according to an aspect of the present invention, the stress by the above configuration, eg if the internal combustion engine or gas turbine, due to vibration of the device in case of measuring the temperature of the exhaust gas from the device having a combustion section such as a boiler, Alternatively, even if stress is applied to the lead during handling of the resistance temperature detector, the stress is dispersed in the covering member covered with the lead by the recess and the protruding portion connected to the inner wall of the recess, and the connection strength between the lead and the electrode is reduced. It is difficult for the connection portion between the lead and the electrode to become small, and it is possible to suppress a change in resistance in the resistance thermometer due to poor bonding between the lead and the electrode. As a result, the resistance temperature detector can be made to have high detection accuracy of the temperature change.

(A) is a perspective view showing a resistance temperature detector of the present invention, and (b) is an exploded perspective view of (a). It is a top view excluding the covering member of the temperature measuring body shown in FIG. 1 (a). It is an enlarged plan view of the main part in the part A of the resistance temperature detector shown in FIG. FIG. 3 is a vertical cross-sectional view taken along the line AA including the covering member of the resistance temperature detector shown in FIG. It is a vertical cross-sectional view in line BB including the covering member of the temperature measuring body shown in FIG.

The resistance temperature detector according to the embodiment of the present invention will be described with reference to the accompanying drawings. The distinction between the top and bottom in the following description is for convenience, and does not limit the top and bottom when a resistance temperature detector or the like is actually used.

As shown in FIGS. 1 to 5, an insulating substrate 1 in which a plurality of insulating layers 1a (6 layers are shown in the example shown in FIG. 1) are laminated, and an electrode 3 provided on the main surface of the insulating substrate 1 The insulating substrate 1 has resistance wirings 2 (may be provided in a single layer) provided in multiple layers in the thickness direction. Temperature measurement is performed by utilizing the fact that the electrical resistance of the resistance wiring 2 changes according to the temperature. That is, the temperature of the environment or the like in which the resistance temperature detector 10 or the like is located is calculated and detected from the measured value of the electrical resistance of the resistance wiring 2. The electrode 3 may be formed not only on the upper surface of the insulating substrate 1 but also on the lower surface. Further, the insulating substrate 1 composed of a single-layer insulating layer may be used.

The insulating substrate 1 has a flat plate shape such as a square plate shape, and is a substrate portion for electrically insulating and providing the resistance wiring 2. The insulating substrate 1 is made of a ceramic sintered body such as an aluminum oxide-based sintered body, an aluminum nitride-based sintered body, a mulite-based sintered body, a glass-ceramic sintered body, or a zirconia-based ceramic (zirconium oxide-based sintered body). It is formed. The insulating substrate 1 is formed by laminating a plurality of insulating layers 1a made of such a ceramic sintered body.

The insulating substrate 1 can be manufactured by the following method, for example, when each insulating layer 1a is made of an aluminum oxide sintered body. First, raw material powders such as silicon oxide (SiO ₂ ), magnesium oxide (MgO) and manganese oxide (Mn ₂ O ₃ ) are added to the powder of aluminum oxide (Al ₂ O _{3) as a sintering aid, and further suitable.} Binders, solvents and plasticizers are added and then the mixture is kneaded into a slurry. After that, a ceramic green sheet is obtained by molding into a sheet by a conventionally known doctor blade method, calendar roll method, etc., the ceramic green sheet is appropriately punched, and a plurality of the ceramic green sheets are laminated (or as needed). It is manufactured by firing at a high temperature (about 1300 to 1600 ° C). Each of the plurality (or singular) ceramic green sheets becomes the insulating layer 1a. The insulating substrate 1 contains glass having calcium (Ca), magnesium (Mg) and the like.

The resistance wiring 2 is formed of platinum, which is a metal material whose electrical resistance changes with temperature, or a metal material containing platinum as a main component. In detecting a change in the electrical resistance of a metal material in response to a temperature change in response to a temperature, it is preferable that the absolute value of the electrical resistance of the resistance wiring at a reference temperature (for example, a so-called normal temperature of about 25 ° C.) is large.

This is due to the following reasons. That is, the change in the electric resistance according to the temperature change of the resistance wiring 2 occurs at a constant ratio regardless of the magnitude (absolute value) of the electric resistance at the reference temperature. That is, the larger the value of the electric resistance at the reference temperature, the larger the absolute value of the change in the electric resistance with the temperature change. The larger the absolute value of this change in electrical resistance, the less susceptible it is to noise (fluctuation in electrical resistance due to factors other than temperature changes). It also makes measurement easier. Therefore, it is preferable that the resistance wiring 2 has a large electrical resistance at its reference temperature. Therefore, the metal material such as platinum is linear (that is, the length of the section for measuring the electric resistance is long, which is an effective form for increasing the absolute value of the electric resistance).

For components other than platinum in metal materials containing platinum as the main component, the components (types) and addition amounts are appropriately adjusted for the purpose of adjusting the temperature resistance coefficient (TCR) of the resistance wiring 2 and improving heat resistance. Be selected. Examples of components other than platinum include metal materials of platinum group elements such as palladium, rhodium, and iridium, gold, and the like. For example, when the linearity of the change in electrical resistance with respect to the temperature change of the resistance wiring 2 is important, the platinum content is preferably large.

The metal material containing platinum as a main component contains platinum in a proportion of about 80% by mass or more. Platinum and other components may form an alloy or may exist as crystal particles independent of each other. The resistance wiring 2 may contain an additive other than the metal component, such as platinum or a metal material containing platinum as a main component. Examples of the additive include particles of an inorganic substance similar to that contained in the insulating substrate 1, such as aluminum oxide. The additive material is added, for example, for matching the firing shrinkage ratio between the resistance wiring 2 and the insulating layer 1a.

The resistance wiring 2 is formed by, for example, applying a metal paste prepared by kneading platinum powder together with an organic solvent and a binder to a predetermined pattern on the main surface of a ceramic green sheet to be an insulating layer 1a and simultaneously firing. be able to.

Opposite via a connecting conductor 5 (through conductor) described later, which connects one end (first end) of the resistance wiring 2 to the first end, the second end, and each resistance wiring 2 of each layer. The electrical resistance to and from the side end (second end) is measured, for example, in an external electrical circuit. This electrical resistance changes according to the temperature of the resistance wiring 2, and the temperature of the resistance wiring 2 changes according to the temperature of the environment (external temperature) in which the resistance temperature detector 10 or the like is located. That is, the external temperature is detected by detecting the electrical resistance between the first and second ends of the resistance wiring 2.

The external temperature is, for example, the temperature of various types of combustion exhaust gas, and it may be necessary to detect a high temperature of about several hundred to 1,000 ° C. The resistance wiring 2 is formed of platinum or a metal material containing platinum as a main component because the stability at such a high temperature and the linearity of the change in electrical resistance according to the temperature are good. For example, the resistance temperature detector 10 having the electrode 3 is mounted (connected) to an external substrate (not shown) including an electric circuit (external electric circuit) for resistance detection as described above to form a sensor device. The sensor device is mounted in the part where the object to be measured exists (gas flow path, etc.).

Further, if the resistance wiring 2 is exposed to the outside air, it is unnecessary to have an electric resistance due to adhesion of foreign matter or destruction due to accidental collision with the external board or other parts mounted on the external board. May change. In order to prevent this, the resistance wiring 2 is provided between the layers of the plurality of insulating layers 1a. In other words, the resistance wiring 2 is provided inside the insulating substrate 1 and is not exposed to the outside. When the resistance wiring 2 is an insulating substrate 1 made of a single-layer insulating layer, an insulating film or an insulating layer may be provided to cover the resistance wiring 2. The insulating film or insulating layer covering the resistance wiring 2 is formed of the same ceramic sintered body as the insulating layer 1a.

Further, the electrodes 3 (first electrode 3a, second electrode 3b) provided on the resistance temperature detector 10 are portions for connecting the resistance wiring 2 to an external substrate including an external electric circuit. The electrode 3 can be formed by the same method using, for example, a metal material (platinum or the like) similar to that of the resistance wiring 2. The electrode 3 in the resistance temperature detector 10 of the embodiment is a rectangular pattern made of platinum. The electrode 3 may have another shape.

Since the electrode 3 may be placed in a high temperature environment together with the resistance temperature detector 10 as described later, the electrode 3 is made of a metal material having high oxidation resistance at high temperatures, such as a platinum group metal containing platinum or gold. It is preferable to have.

The reed 4 has, for example, a cylindrical shape and is connected to the electrode 3, that is, the first electrode 3a and the second electrode 3b. Like the resistance wiring 2, it is made of a metal material containing platinum, and may be made of pure platinum. .. The reed 4 is connected to the electrode 3 by, for example, ultrasonic bonding means using a horn including quadrangular pyramid-shaped protrusions arranged in a staggered manner in a plan view. Although FIGS. 3 to 5 show a connection portion (A portion) in which the lead 4 is connected to the second electrode 3b, the connection portion in which the lead 4 is connected to the first electrode 3a has the same configuration. It has become.

In the present embodiment, the electrical connection between the electrode 3, the resistance wiring 2 and each resistance wiring 2 is made by a connecting conductor (so-called via conductor) 5 penetrating the insulating layer 1a in the thickness direction.

The connecting conductor 5 is formed of, for example, a conductor material (metal material) containing a metal material (platinum or the like) as a main component, similar to the resistance wiring 2. Examples of such a metal material include platinum or a material containing platinum as a main component and an inorganic filler such as alumina added. The inorganic filler is for matching the shrinkage rate and shrinkage behavior of the connecting conductor 5 and the insulating substrate 1 when they are formed by simultaneous firing, for example.

The connecting conductor 5 is formed by filling, for example, a platinum metal paste similar to that forming the resistance wiring 2 into the through holes provided in advance in the ceramic green sheet to be the insulating layer 1a, and firing them at the same time. be able to. The through hole can be provided in the ceramic green sheet by, for example, a mechanical drilling process using a metal pin or a drilling process using a laser beam. In this case, the particles of the inorganic filler as described above may be added to the metal paste.

As shown in FIGS. 1 to 5, the temperature measuring body 10 includes a rectangular plate-shaped insulating base 1, a resistance wiring 2 provided on the insulating base 1, and a first main surface provided on one main surface of the insulating base 1. It has an electrode 3a and a second electrode 3b, and a lead 4 connected to each of the first electrode 3a and the second electrode 3b, and is connected to a recess 4a and a recess 4a in a plan view on the surface of the lead 4. It has a frame-shaped projecting portion 4b that surrounds the recess 4a. By having such a configuration, for example, the stress due to the vibration of the equipment when measuring the temperature of the exhaust gas from the equipment having a combustion part such as an internal combustion engine, a gas turbine, or a boiler, or the stress when handling the temperature measuring body 10. Is connected to the recess 4a and the recess 4a in a plan view, and the protruding portion 4b enters the covering member 6 and the covering member 6 enters the recess 4a due to the frame-shaped protruding portion 4b surrounding the recess 4a. The stress is dispersed in the covering member 6 which is covered with the lead 4, and the connection strength between the lead 4 and the electrode 3 is hard to be lowered, and the connection portion between the lead 4 and the electrode 3 is hard to be small. , It is possible to suppress the change in the resistance of the temperature measuring body 10 due to the poor bonding between the lead 4 and the electrode 3. As a result, the resistance temperature detector 10 can be made to have high detection accuracy of the temperature change.

The recess 4a and the protrusion 4b connected to the inner wall of the recess 4a on the surface of the reed 4 are formed by a horn including a quadrangular pyramid-shaped convex portion arranged in a staggered manner in a plan view, for example, when the lead 4 is connected to the electrode 3. It is provided by a bonding means of ultrasonic bonding.

Further, as shown in FIGS. 3 to 5, the protruding portion 4b may protrude toward the outside of the recess 4a. By having such a configuration, for example, the stress due to the vibration of the equipment when measuring the temperature of the exhaust gas from the equipment having a combustion part such as an internal combustion engine, a gas turbine, or a boiler, or the stress when handling the temperature measuring body 10. Even if The stress is more dispersed in the covering member 6 which is covered with the lead 4 and the lead 4 is covered, the connection strength between the lead 4 and the electrode 3 is less likely to be lowered, and the connection portion between the lead 4 and the electrode 3 is smaller. It becomes difficult to do so, and it is possible to further suppress changes in the resistance of the temperature measuring body 10 due to poor bonding between the lead 4 and the electrode 3. As a result, the resistance temperature detector 10 can be made to have high detection accuracy of the temperature change.

Further, in a plan view, the protrusion 4b may be provided so as to surround the recess as shown in FIG. By having such a configuration, for example, the stress due to the vibration of the equipment when measuring the temperature of the exhaust gas from the equipment having a combustion part such as an internal combustion engine, a gas turbine, or a boiler, or the stress when handling the temperature measuring body 10. However, even if the lead 4 is joined in all plane directions, the protrusion 4b is connected to the inner wall of the recess 4a and the recess 4a and is provided so as to surround the recess 4a, so that the protrusion 4b is attached to the covering member 6. Further, the covering member 6 is configured to enter the recess 4a, the stress is effectively dispersed in the covering member 6 described later in which the lead 4 is covered, and the connection strength between the lead 4 and the electrode 3 is unlikely to be lowered. The connection portion with the electrode 3 is unlikely to be small, and it is possible to effectively suppress the change in the resistance of the temperature measuring body 10 due to the poor connection between the lead 4 and the electrode 3. As a result, the resistance temperature detector 10 can be made to have high detection accuracy of the temperature change.

Further, in a plan view, the recess 4a has a rectangular shape and may be arranged so as to be inclined with respect to the longitudinal direction of the lead 4. By having such a configuration, for example, the stress due to the vibration of the equipment when measuring the temperature of the exhaust gas from the equipment having a combustion part such as an internal combustion engine, a gas turbine, or a boiler, or the stress when handling the temperature measuring body 10. However, even if the lead 4 is joined in the longitudinal direction of the lead 4, the protruding portion 4b is connected to the inner wall of the recess 4a and the recess 4a and is arranged so as to be inclined with respect to the longitudinal direction of the lead 4. The 4b is inserted into the covering member 6 and the covering member 6 is inserted into the recess 4a, and the lead 4 is covered. The stress is effectively dispersed by the covering member 6 described later, and the connection strength between the lead 4 and the electrode 3 is increased. The connection portion between the lead 4 and the electrode 3 is difficult to be reduced, and the resistance in the temperature measuring body 10 due to poor bonding between the lead 4 and the electrode 3 can be more effectively suppressed. .. As a result, the resistance temperature detector 10 can be made to have high detection accuracy of the temperature change.

Further, in a plan view, the recesses 4a may be arranged in a staggered pattern as shown in FIGS. 2 and 3. By having such a configuration, for example, the stress due to the vibration of the equipment when measuring the temperature of the exhaust gas from the equipment having a combustion part such as an internal combustion engine, a gas turbine, or a boiler, or the stress when handling the temperature measuring body 10. However, even if the lead 4 is joined in all plane directions, the protrusions 4b connected to the inner wall of the recesses 4a and the recesses 4a arranged in a staggered manner cause the protrusions 4b to become the covering member 6 and the covering members. 6 is configured to enter the recess 4a, and the lead 4 is covered. The stress is effectively dispersed by the covering member 6 described later, and the connection strength between the lead 4 and the electrode 3 is unlikely to be lowered. It becomes difficult for the connecting portion to become small, and it is possible to more effectively suppress the change in the resistance of the temperature measuring body 10 due to the poor connection between the lead 4 and the electrode 3. As a result, the resistance temperature detector 10 can be made to have high detection accuracy of the temperature change.

Further, the temperature measuring body 10 of the embodiment of the present invention is made of a glass material, includes a recess 4a and a protruding portion 4b, and covers a connecting portion of the lead 4 with the first electrode 3a and the second electrode 3b. have. By having such a configuration, the covering member 6 is firmly bonded to the insulating substrate 1 and the like, and for example, when measuring the temperature of exhaust gas from a device having a combustion part such as an internal combustion engine, a gas turbine, and a boiler. Even if the stress due to the vibration of the equipment in the above or the stress during handling of the temperature measuring body 10 is applied to the lead 4, the stress is effectively dispersed in the covering member 6 and the connection strength between the lead 4 and the electrode 3 is lowered. It is difficult for the connection portion between the lead 4 and the electrode 3 to become small, and it is possible to effectively suppress a change in the resistance of the temperature measuring body 10 due to a poor connection between the lead 4 and the electrode 3. As a result, the resistance temperature detector 10 can be made to have high detection accuracy of the temperature change.

The covering member 6 is made of a glass material such as barium silicic acid-based glass or borosilicate glass, and can be manufactured by the following method.

First, a slurry prepared by adding and mixing an appropriate organic binder, solvent, etc. to raw material powder such as barium-silicic acid-based glass or borosilicate glass is prepared by using a dispenser or the like on the connection portion between the electrode 3 and the lead 4. In addition, it is excessively supplied in a mountain shape that completely covers these. Then, the insulating substrate 1 containing the slurry is fired at a high temperature (about 800 to 1200 ° C.) and cooled (cooled) to room temperature to produce a covering member 6 that completely covers the connection portion.

According to such a temperature measuring body 10, it is possible to assume that the detection accuracy of the temperature change is high.

Temperature detection using such a thermometer 10 is, for example, in the case of a measuring instrument that measures the temperature of exhaust gas from an internal combustion engine (gas turbine engine, diesel engine, etc.), a gas turbine, a boiler, or other device having a combustion part. If so, it is done as follows. That is, first, the resistance temperature detector 10 is mounted on an external board including the circuit for measuring electrical resistance as described above, and the lead 4 is electrically connected to a predetermined portion of the circuit on the external board to form a sensor device. Examples of the means of electrical connection include connection means such as solder-bonding the two. Next, the resistance temperature detector 10 mounted on the sensor device is mounted in the flow path of the exhaust gas. In this case, at least the resistance temperature detector 10 may be positioned in the exhaust gas, and other parts of the external substrate do not necessarily have to be positioned in the exhaust gas. After that, the electrical resistance between the first and second ends of the resistance thermometer 10 and the resistance wiring 2 included in the resistance temperature detector 10 changes according to the temperature of the exhaust gas, and this electrical resistance value is used for measuring the electric circuit. Measured in the circuit of. Based on the measured electrical resistance, for example, the temperature of the resistance wiring 2 is detected from the relationship of electrical resistance-temperature measured in advance, that is, the temperature of the portion where the resistance temperature detector 10 including the resistance wiring 2 is located. be able to.

The line width of the resistance wiring 2 includes conditions and productivity such as the accuracy of temperature measurement of the temperature to be detected, the temperature range, the thickness and length of the resistance wiring 2, the distance from the outer periphery of the insulating layer 1a to the resistance wiring 2, and the like. In addition, it is set as appropriate according to conditions such as economic efficiency.

For example, the temperature range to be detected is a high temperature range of about 500 to 1000 ° C., the resistance wiring 2 is made of platinum (so-called pure platinum having a platinum content of 99.99% by mass or more), and its thickness is about 5 to 5. 15
In the case of about μm, the line width of the resistance wiring 2 is set to, for example, about 20 to 200 μm.

Considering the thickness setting of the resistance wiring 2 and the like, it is preferable that the insulating layer 1a is made of a ceramic sintered body and the resistance wiring 2 is a thick film conductor. The resistance wiring 2 in this case is formed by, for example, simultaneous firing with an insulating substrate 1 (a plurality of insulating layers 1a). If the resistance wiring 2 is a thick film conductor, it is easy to make the thickness relatively thick, such as about 10 μm or more as described above. Further, since such a relatively thick resistance wiring 2 can be formed by co-fired with the insulating substrate 1, the strength of the bond between the resistance wiring 2 and the insulating substrate 1 and the productivity of the resistance temperature measuring body 10 are improved. It is advantageous. Further, the pattern of the resistance wiring 2 can be easily set only by adjusting the printing pattern of the metal paste that becomes the resistance wiring 2. Therefore, it is advantageous in terms of design freedom and productivity.

Further, as described above, the resistance wiring 2 has a meander shape having a plurality of straight portions arranged in parallel with each other and a plurality of folded portions connecting the ends of adjacent straight portions among the plurality of straight portions. Is. The folded portion connects the ends of a plurality of adjacent straight portions to each other at every other end. In other words, a plurality of straight portions and a plurality of folded portions are sequentially connected in series to form one meander-like pattern (meandering pattern).

When the resistance wiring 2 has a meander-like pattern, the relatively long resistance wiring 2 is sequentially folded and arranged, which is advantageous in providing the resistance wiring 2 as long as possible between one layer. Since the length of the resistance wiring 2 is longer, the electric resistance between the first and second ends of the resistance wiring 2 can be made larger. That is, for example, since the electrical resistance of the resistance wiring 2 at the reference temperature (normal temperature, etc.) is relatively large, the absolute value of the change in electrical resistance in response to the temperature change is large. Therefore, accurate temperature measurement becomes easy from normal temperature to a high temperature range such as about 1000 ° C.

Further, for example, as in the example of FIGS. 1 to 5, when the insulating layer 1a has a rectangular shape and the resistance wiring 2 has a meander shape, the straight portion and the folded-back portion of the meander-shaped resistance wiring 2 are formed. If the portions are arranged parallel to the outer periphery of the insulating layer 1a, the following effects can be obtained. That is, in this case, the distance from the outer circumference of the insulating layer 1a to the resistance wiring 2 closest to the outer circumference is made substantially the same in each of the straight portion and the folded portion. Therefore, there is a possibility that the distance from the outer periphery of the insulating layer 1a to the resistance wiring 2 becomes extremely short in each of the straight portion and the folded portion, so that the platinum of the resistance wiring 2 is easily sublimated to the outside. Is reduced.

Further, in this case, the width of the portion having a relatively wide line width is about the same between the straight portion and the folded portion, and further, between the outer periphery of the insulating layer 1a and each of the straight portion and the folded portion. The distances may be about the same. In this case, the distance from the outer circumference to the resistance wiring 2 is almost the same on almost the entire circumference of the outer circumference of the insulating layer 1a. Therefore, the possibility that the sublimation of platinum to the outside is promoted in a part of the resistance wiring 2 in the length direction can be further reduced.

Therefore, the resistance temperature detector 10 has a meander shape with respect to the resistance wiring 2 when the accuracy of temperature measurement, long-term reliability, etc. are emphasized, and its straight portion and folded portion are parallel to the outer circumference of the insulating layer 1a. It is preferably arranged in. When the insulating layer 1a (insulating substrate 1) has a quadrangular shape, for example, the resistance temperature detector is in the form of a multi-layered substrate in which a plurality of regions serving as such insulating substrates are arranged in a single mother substrate. When making 10, the arrangement is easy. That is, it is more advantageous in terms of productivity and economy as the resistance temperature detector 10.

In the examples of FIGS. 1 to 5, the shape of the insulating substrate 1 is a quadrangular (rectangular) plate, that is, a rectangular plate, and the resistance wiring 2 having a meander-like pattern has an insulating layer 1a whose straight line portion is rectangular. It is arranged along the long side direction of (interlayer). Further, the folded portion is arranged along the short side direction. In this case, when the metal paste to be the resistance wiring 2 is applied by a method such as screen printing, the following advantageous effects can be obtained. That is, in the printing method, bleeding is likely to occur in the metal paste at the folded portion (the boundary portion between the folded portion and the straight portion). Therefore, reducing the number of folds reduces bleeding and raises the overall resistance value of the resistance wiring 2. In this form, since the length of the straight portion is short and the number of folded portions is smaller than that in the case where the number of folded portions is large, it is easier to increase the overall resistance value.

The resistance temperature detector 10 of the present invention is not limited to the example of the above embodiment, and various modifications can be made within the scope of the gist of the present invention. For example, the resistance wiring 2 may be arranged between four or more layers. Further, the resistance wiring 2 of the resistance temperature detector 10 is not limited to the meander-shaped conductor, and may have another pattern.

1 ... Insulation substrate 1a ... Insulation layer 2 ... Resistance wiring 3 ... Electrode 3a ... First electrode 3b ... Second electrode 4 ... Lead 4a ... Recess 4b ... Protruding part 5 ...・ ・ Connecting conductor 6 ・ ・ ・ Covering member
10 ・ ・ ・ Resistance temperature detector

Claims (6)

With a rectangular plate-shaped insulating substrate,
With the resistance wiring provided on the insulating substrate,
The first electrode and the second electrode provided on one main surface of the insulating substrate, and
It has a lead connected to each of the first electrode and the second electrode, and has a lead.
On the surface of the lead, the recess and, contiguous with the recess in plan view, temperature sensing element, characterized in that it has a frame-shaped protrusion surrounding the recess. The recess is rectangular in plan view and has a rectangular shape.
The temperature measuring body according to claim 1, wherein the width of the protruding portion is larger at the side portion of the recess than at the corner portion of the recess. The temperature measuring body according to claim 1 or 2, wherein the protruding portion protrudes toward the outside of the recess. The temperature measuring body according to any one of claims 1 to 3, wherein the recess is rectangular in a plan view and is arranged so as to be inclined with respect to the longitudinal direction of the lead. The temperature measuring body according to any one of claims 1 to 4, wherein the recesses are arranged in a staggered manner in a plan view. Claims 1 to claim, wherein the coating member is made of a glass material, includes the recess and the protrusion, and covers the connection portion between the first electrode and the second electrode of the lead. Item 5. The temperature measuring body according to any one of Item 5.

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