JP6940155B2 - Diaphragm valve using diaphragm member - Google Patents

Description

The present invention relates to a diaphragm valve using da Iyafuramu member suitable to employ the diaphragm valve to flow the liquid of the high-purity chemical solution or ultrapure water in the semiconductor manufacturing device.

Conventionally, this type of diaphragm valve has a housing, a diaphragm that is supported so as to be displaced in the axial direction in the housing, and a diaphragm that is assembled to the housing and displaces the diaphragm in the axial direction. It is composed of a drive mechanism that drives.

When a diaphragm valve having such a configuration is used in a semiconductor manufacturing apparatus, a highly corrosive chemical solution such as a strong acid or a strong alkali is used as a high-purity chemical solution in the cleaning step or the peeling step in the semiconductor manufacturing apparatus. As the material for forming the diaphragm in the diaphragm valve, it is desirable to use a fluororesin having excellent chemical resistance such as acid resistance and alkali resistance.

Further, in the semiconductor manufacturing apparatus, since elution of metal components and organic substances from the diaphragm valve is not allowed, it is desirable to use a fluororesin having low elution property as the diaphragm forming material.

Further, in terms of the structure of the diaphragm valve as described above, it is desirable to use a fluororesin having excellent flexibility and capable of maintaining a long life.

From the above, it is required to use a fluororesin as a diaphragm forming material, which has chemical resistance, low elution property, excellent flexibility, and can maintain a long life.

Japanese Patent No. 5286330

By the way, in the diaphragm valve having the above-described configuration, further, since the contamination of the liquid by the particles from the diaphragm valve is not allowed in the semiconductor manufacturing apparatus, the liquid flowing in the flow path system in the diaphragm valve is carried by the diaphragm. It is necessary to isolate the diaphragm from the drive mechanism, and for that purpose, it is required that the diaphragm is integrally formed by the outer peripheral portion, the curved displacement portion and the central portion.

Here, when PTFE is used as the diaphragm forming material, PTFE cannot form a diaphragm of good quality by injection molding or extrusion molding because the melt flow rate of PTFE is low. Therefore, the diaphragm is formed by cutting a PTFE compression-molded round bar.

Although the life of the PTFE diaphragm formed by cutting is long, in a diaphragm valve using such a diaphragm, the curved displacement portion formed by cutting extends or extends on the surface of the diaphragm valve due to its operation. Since it is compressed, dust is generated from the curved displacement portion, although it is minute. However, such dust generation is within an allowable range when, for example, the wiring pitch of the silicon wafer manufactured by the semiconductor manufacturing apparatus is larger than 10 (nm).

When PFA is used instead of PTFE as the material for forming the diaphragm, the diaphragm is formed by cutting an injection-molded round bar, a compression-molded round bar, or an extruded round bar.

The life of the PFA diaphragm formed by cutting in this way is short. Further, the diaphragm valve using the PFA diaphragm formed by cutting in this way is a PTFE diaphragm formed by cutting on the surface of the curved displacement portion formed by cutting in accordance with the operation of the diaphragm valve. Since it is stretched or compressed in the same manner as the curved displacement portion, dust is slightly generated from the curved displacement portion.

Here, when PFA is adopted as a diaphragm forming material, and a diaphragm having a thick curved displacement portion is formed by injection molding using the PFA and a diaphragm is formed by cutting, the thickness is formed by injection molding or compression molding. When molded into a meat shape, crystallization at the curved displacement portion does not occur uniformly, the interface becomes the starting point of fracture and the life is shortened. Therefore, a diaphragm having such a curved displacement portion is rarely adopted. ..

On the other hand, in recent years, further miniaturization has been required in the production of semiconductor elements such as silicon wafers by semiconductor manufacturing equipment. For example, there is a request that the wiring pitch of a silicon wafer be 10 (nm) or less. Therefore, dust generation from the diaphragm valve is not allowed even for dust generation of particles having a size of several nm.

However, as described above, the diaphragm valve using the diaphragm formed by cutting causes stretching and compression on the surface of the curved displacement portion formed by cutting due to its operation, and accordingly, from the curved displacement portion. Although it is very small, it emits dust.

In such a case, it is not possible to cope with the situation where even the dust generation of particles having a size of several nm from the above-mentioned diaphragm valve is not allowed, and further improvement is made for the diaphragm having a curved displacement portion formed by cutting. Requested.

On the other hand, since the PFA film is thin, crystallization can be made uniform. Therefore, the PFA film is formed by extrusion molding or compression molding, and at least as a curved displacement portion of the diaphragm. It was recognized that if it was adopted, it would lead to the improvement of the above-mentioned diaphragm.

By the way, in the diaphragm valve, due to its configuration, when the diaphragm is displaced in a curved shape by the drive mechanism, the diaphragm is connected to the drive shaft of the drive mechanism at the central portion thereof.

However, since the diaphragm is film-like and very thin as described above, it is not possible to form a connecting portion required for connecting to the drive shaft of the drive mechanism at the central portion of the diaphragm. Therefore, it is extremely difficult to connect the central portion of the diaphragm to the drive shaft of the drive mechanism without the connecting portion.

To this end, it is conceivable to utilize a diaphragm valve configuration to which laser welding by the resin diaphragm sealing method described in Patent Document 1 is applied.

In the diaphragm valve referred to in Patent Document 1, for the purpose of sealing, the diaphragm is laser-welded to the flange portion of the lower housing at the flange portion thereof so as to seal the valve body chamber. Focusing on this, we came up with the idea that laser welding could be used to connect the central part of a PFA diaphragm to other members.

Therefore, in order to deal with the above, the present invention forms a diaphragm capable of suppressing the generation of dust of about several nm to the minimum in a film-like PFA that can secure flexibility and long life. While selecting it as a material, use an appropriate fluororesin auxiliary shaft in consideration of ease of assembly with other members, and even if the diaphragm is thin like a film, the auxiliary shaft and the central part of the diaphragm can be connected. and to provide a diaphragm valve using a folder Iyafuramu member such constitute a laser welding as the applied diaphragm structure.

Further, the diaphragm valve according to the present invention is according to the description of claim 1.
When the valve is opened, a liquid of high-purity chemical solution or ultrapure water flows from the inflow side to the outflow side, and when the valve is closed, the flow of the liquid is blocked.

In the diaphragm valve
A housing (100) having a cylindrical peripheral wall (130) and both opposing walls (110, 140) formed on the cylindrical peripheral wall so as to close the openings at both ends in the axial direction.
A partition wall (120) provided at an axially intermediate portion of the tubular peripheral wall and partitioning the hollow portion of the tubular peripheral wall between one facing wall (140) and the other facing wall (110) of the two facing walls. When,
A driving means (300) assembled between the one facing wall (140) and the partition wall (120) in the hollow portion of the cylindrical peripheral wall, and
Made of PFA, which is provided inside the housing and partitions the inside of the housing so as to form a liquid chamber (Ra) with the other facing wall (110) and an air chamber (Rb) with the partition wall. It is composed of both a film diaphragm (200) and a fluororesin auxiliary shaft that is laser-welded coaxially to the central part of the diaphragm and extends from the central part. It is equipped with a diaphragm member that is fitted so that it can slide in the through hole formed in the direction.
The drive means is integrally provided with the auxiliary shaft of the diaphragm member and a drive shaft coaxially connected to the extending end of the auxiliary shaft so that the shaft can move toward the air chamber or in the opposite direction. Naru,
The housing is an annular valve seat portion (111c) that faces the central portion of the diaphragm in the liquid chamber (Ra) and forms a valve portion together with the central portion, and the liquid is introduced from the inflow side via the annular valve seat portion. An inflow path (110b, 112) for flowing into the liquid chamber and an outflow path (113, 110c) for allowing the liquid in the liquid chamber to flow out to the outflow side are provided on the other facing wall (110).
When the diaphragm member is interlocked with the auxiliary shaft with the axial movement of the drive shaft toward the other facing wall (110) side, and the central portion of the diaphragm is seated on the annular valve seat portion (111c). , The valve portion is closed, and the diaphragm member is interlocked with the auxiliary shaft along with the axial movement of the drive shaft toward the one facing wall (140) side, and is annular at the central portion of the diaphragm. It is characterized in that the valve portion is opened when the valve seat portion is separated from the valve seat portion.

In this way, the diaphragm member is composed of both a PFA film-shaped diaphragm and a fluororesin auxiliary shaft that is laser-welded coaxially to the central portion of the diaphragm and extends from the central portion. Is connected to the drive shaft of the drive mechanism via a partition wall.

Here, as described above, since the connection between the central portion of the diaphragm and the auxiliary shaft is made by laser welding, the auxiliary shaft and the central portion of the diaphragm can be satisfactorily joined and connected.
Further, as described above, the diaphragm is formed as a film-shaped diaphragm by PFA. Therefore, even if the diaphragm is in the form of a film, it is formed as a diaphragm having excellent chemical resistance, low elution property, flexibility and long life, and which can suppress dust generation to the minimum (minimum). obtain.
Further, even if difficult to handle in thin da Iyafuramu, since the central portion of the diaphragm is an auxiliary shaft and the laser welding has been as described above, by holding the auxiliary shaft, a drive shaft, child connected to the center portion of the diaphragm As a result, the drive shaft, diaphragm and auxiliary shaft can be easily connected.

Thus, as described above, the diaphragm member, by means of the auxiliary shaft, since it is connected to a drive shaft of the drive mechanism through the partition wall, da Iyafuramu valve diaphragm member, by means of the auxiliary shaft, the other drive shaft When the central part of the diaphragm is seated on the annular valve seat part in conjunction with the axial movement toward the opposite wall side, the valve part is closed and the diaphragm member is attached to the drive shaft on the auxiliary shaft. The valve is opened when it is separated from the annular valve seat at the center of the diaphragm in conjunction with the axial movement toward one of the facing walls.

According to the above, to ensure work for the effect of the diaphragm member as described above is one component, and the drive shaft as described above, can ensure the operational effect of the diaphragm and the auxiliary shaft can be readily connected It is possible to provide a diaphragm valve.

The present invention, according to the serial mounting Claim 2, in the diaphragm valve of claim 1,
The driving means is
The one side chamber (131a) and the other side chamber (131b) are slidably fitted in the hollow portion of the cylindrical peripheral wall between the one facing wall and the partition wall along the axial direction, and the one facing wall is formed. A piston (310) that partitions the hollow portion of the cylindrical peripheral wall so as to be formed on the side and the partition wall side, and
A urging means (330) for urging the piston toward either the other concubine or one concubine is provided.
The drive shaft is characterized by being a piston shaft that extends integrally from the piston through the other side chamber and is coaxially connected to the extending end of the auxiliary shaft of the diaphragm member.

According to such a configuration, da Iyafuramu valve according to the present second aspect, the piston is urged toward the one of the chambers of the other side chamber and one side chamber by a biasing means with the slides, the piston The shaft is interlocked with the piston and the diaphragm is seated on the annular valve seat at its center via the auxiliary shaft, or the piston slides against the urging means by supplying airflow to one of the other chambers. As a result, the piston shaft interlocks with the piston and functions as an air-operated diaphragm valve that separates the diaphragm from the annular valve seat portion at the center thereof via the auxiliary shaft.

Even with such an air actuated type diaphragm valve, that give achieves invention similar action effect according to claim 1.

Further, according to the third aspect of the present invention, the diaphragm valve according to the first aspect of the present invention.
The driving means is
A solenoid (420) fitted in the hollow portion of the cylindrical peripheral wall along the axial direction between the one facing wall and the partition wall.
A plunger (400b) that is axially movablely inserted into the solenoid as a drive shaft and extends toward the partition wall.
Provided with an urging means (400c) for urging the plunger toward the bulkhead or vice versa.
The plunger is characterized in that it is coaxially connected to the extension end of the auxiliary shaft of the diaphragm member at the extension end.

According to such a configuration, the diaphragm valve is urged towards or in the opposite direction to the partition wall with the slides, the auxiliary shaft is communicated dynamic to the sliding of the plunger the plunger by the biasing means is seated on the annular valve seat diaphragm at its center portion Te, some have is the the urging direction of the urging means against the biasing means on the basis of the magnetic attractive force plunger by the solenoid opposite with the slide in the direction, the auxiliary shaft functions as an electromagnetic actuated type diaphragm valve to separate from the annular valve seat diaphragm and communicating motion to the sliding of the plunger at the center portion.

Even such an electromagnetic actuated type diaphragm valve, that give achieves invention similar action effect according to claim 1.

Further, according to the fourth aspect of the present invention, in the diaphragm valve according to any one of the first to third aspects.
The diaphragm member is characterized by comprising a fluororesin reinforcing annular body (200b) laser-welded along the outer peripheral portion of one side surface of both sides of the diaphragm.

According to this, even if it is difficult to handle because the diaphragm is thin like a film, the reinforcing annular body can be formed into the diaphragm by the above-mentioned bonding structure of the outer peripheral portion of the diaphragm and the reinforcing annular body by laser welding. On the other hand, it can exert a reinforcing function. Therefore, as described above, by connecting the central portion of the diaphragm and the auxiliary shaft by laser welding, the auxiliary shaft and the central portion of the diaphragm can be satisfactorily joined and connected, and the diaphragm can be connected to the PFA. By being formed as a film-like diaphragm, even if the diaphragm is in the form of a film, it is a diaphragm with excellent chemical resistance, low elution, flexibility and long life, and minimizes dust generation ( While ensuring the effect of being able to be formed as a diaphragm that can be suppressed to a minimum). Diaphragm it is possible to provide a diaphragm valve which can make even reach created for effect that it can easily be handled without bend be thinner.

Further, according to the description of claim 5, the present invention is the diaphragm valve according to any one of claims 1 to 4.
The diaphragm member is characterized in that it is formed in a film shape by extruding or compression molding PFA with the diaphragm.

According to this , in the diaphragm member, by forming the diaphragm into a film shape by extruding or compression molding PFA, dust generation is less than that of forming the diaphragm by cutting, especially several nm. A diaphragm with a highly smooth surface that can suppress even the generation of particles of a size to the minimum (minimum), and has excellent chemical resistance, low elution, flexibility, and long life. By forming the diaphragm into a film shape by extruding or compression molding PFA, the diaphragm can be uniformly crystallized around its curved displacement portion, and the life of the diaphragm can be made uniform. it is possible to provide a diaphragm valve capable of achieving a work for effect that more may even longer.

Further, according to the sixth aspect of the present invention, the diaphragm valve according to the fifth aspect of the present invention.
In the diaphragm member, the auxiliary shaft has an outer diameter of 1 (mm) or more and 4 (mm) or less, and the diaphragm is 0.1 (mm) or more and 0.5 (mm) or less. It is characterized by having a thickness within a range.

According to this , in the diaphragm member as described above, by forming the diaphragm into a film shape by extruding or compression molding PFA, dust generation is generated as compared with forming the diaphragm by cutting. A diaphragm with a surface with high smoothness that can suppress even the generation of small particles, especially particles of several nm size, to the minimum (minimum), and has chemical resistance, low elution, flexibility, and long life. By forming the diaphragm into a film shape by extruding or compression molding PFA, the diaphragm can be uniformly crystallized around its curved displacement portion. can provide a diaphragm valve which more can more reliably reach forms a work for effect that the life of the diaphragm may be more longer becomes possible.
Here, an auxiliary shaft having an outer diameter of 4 (mm) or less may undergo thermal deformation at the auxiliary shaft or the central part of the diaphragm if it is welded to the central part of the diaphragm by heat, but the auxiliary shaft and the diaphragm may be thermally deformed. Since the joining with the central part of the is performed by laser welding, even if the outer diameter of the auxiliary shaft is 4 (mm) or less, the joining between the auxiliary shaft and the central part of the diaphragm can be performed without deformation. can. The outer diameter of the auxiliary shaft is set to 1 (mm) because it is difficult to form an auxiliary shaft having an outer diameter of less than 1 (mm).
Further, the reason why the thickness of the diaphragm is set to 0.1 (mm) or more is that if it is less than 0.1 (mm), the diaphragm is too thin and easily torn. Further, the reason why the diaphragm is set to 0.5 (mm) or less is that if the diaphragm is thicker than 0.5 (mm), it is too thick and difficult to bend.

The reference numerals in parentheses of each of the above means indicate the correspondence with the specific means described in the embodiments described later.

It is a vertical sectional view which shows the 1st Embodiment of the diaphragm valve to which this invention is applied. It is a process drawing which shows the process of laser welding the central part of the diaphragm of the diaphragm member in the 1st Embodiment with an auxiliary shaft. It is sectional drawing for demonstrating the laser welding with respect to the auxiliary shaft of the central part of the diaphragm in the said 1st Embodiment. It is a process drawing which shows the process of laser welding the outer peripheral part of the diaphragm of the diaphragm member in the 1st Embodiment with a reinforcing ring body. It is sectional drawing for demonstrating the laser welding of the reinforcing annular body with respect to the outer peripheral part of the diaphragm in the said 1st Embodiment. It is a partial longitudinal sectional view which shows the main part of the 2nd Embodiment of the diaphragm valve to which this invention is applied. It is sectional drawing for demonstrating the laser welding of the reinforcing annular body with respect to the outer peripheral part of the diaphragm in the 2nd Embodiment. It is a vertical sectional view which shows the 3rd Embodiment of the diaphragm valve to which this invention is applied. It is a vertical sectional view which shows the 4th Embodiment of the diaphragm valve to which this invention is applied.

Hereinafter, each embodiment of the present invention will be described with reference to the drawings.

(First Embodiment)
FIG. 1 shows a first embodiment of a diaphragm valve to which the present invention is applied. As the diaphragm valve, an air-operated diaphragm valve applied to a semiconductor manufacturing apparatus for manufacturing a semiconductor element is adopted.

The diaphragm valve is interposed in the piping system of the semiconductor manufacturing apparatus, and is configured to flow the liquid flowing through the piping system from the upstream side to the downstream side thereof. In the first embodiment, the liquid refers to a high-purity chemical liquid or an ultrapure water liquid, and is supplied to the piping system from a liquid supply source of the semiconductor manufacturing apparatus. Further, the liquid is required to be clean due to the nature of the semiconductor manufacturing apparatus.

As shown in FIG. 1, the diaphragm valve includes a cylindrical housing 100, a diaphragm member 200 assembled in the tubular housing 100, and an air-operated drive mechanism 300, and is configured as a normally closed diaphragm valve. ing. In the first embodiment, the air-operated drive mechanism 300 is also referred to as a drive mechanism 300 below.

The cylindrical housing 100 is composed of a lower housing member 100a and an upper housing member 100b.

As shown in FIG. 1, the lower housing member 100a includes a bottom wall 110 and a partition wall 120, and the bottom wall 110 is composed of a bottom wall main body 110a, an inflow cylinder 110b, and an outflow cylinder 110c. ..

The bottom wall main body 110a is formed in a rectangular cross section, and the bottom wall main body 110a has an upper wall portion 111 as shown in FIG.

Here, the upper wall portion 111 is composed of an inner annular wall portion 111a and an outer annular wall portion 111b, and the inner annular wall portion 111a is formed on the central side of the upper wall portion 111. The outer annular wall portion 111b is formed so as to project in an annular shape upward from the inner annular wall portion 111a on the outer peripheral side of the inner annular wall portion 111a.

Further, the bottom wall main body 110a has an annular valve seat portion 111c, and the annular valve seat portion 111c projects coaxially and annularly from the central portion of the inner annular wall portion 111a toward the partition wall 120 side. Is formed in. Here, the annular valve seat portion 111c is formed so as to communicate with the inside end opening portion of the inflow path portion 112 (described later).

The bottom wall main body 110a has an inflow path portion 112 and an outflow path portion 113, and the inflow path portion 112 extends from the annular valve seat portion 111c toward the inflow cylinder 110b in the bottom wall main body 110a. It is formed like this. The inflow path portion 112 communicates with the annular valve seat portion 111c at the inner end opening portion thereof.

On the other hand, the outflow path portion 113 is formed in the bottom wall main body 110a so as to extend from a part of the inner annular wall portion 111a toward the outflow cylinder 110c. Here, the outflow passage portion 113 is formed in the bottom wall main body 110a so as to open into the liquid chamber Ra (described later) from a part of the inner annular wall portion 111a at the inner end opening portion thereof. ..

The inflow cylinder 110b is formed in the bottom wall main body 110a so as to extend outward from the outer end opening of the inflow passage portion 112, and the inflow cylinder 110b flows into the upstream side of the piping system. It plays a role of communicating the road portion 112. On the other hand, the outflow cylinder 110c plays a role of communicating the outflow passage portion 113 to the downstream side of the piping system.

As shown in FIG. 1, the partition wall 120 has a partition wall main body 120a and an annular flange 120b, and the partition wall main body 120a has an outer annular wall portion of the upper wall portion 111 of the bottom wall main body 110a at its lower wall portion. It is fitted in 111b and is seated on the inner annular wall portion 111a via the diaphragm 200a of the diaphragm member 200 and the reinforcing annular body 200b (described later).

Further, the annular flange 120b is formed so as to annularly project outward along the radial direction from the axial intermediate portion of the bottom wall main body 110a, and the annular flange 120b is formed on the upper wall portion 111 of the bottom wall main body 110a. It is coaxially seated on the outer annular wall portion 111b of the. In this way, the partition wall 120 is coaxially assembled to the bottom wall main body 110a from above via the diaphragm 200a and the reinforcing annular body 200b.

Further, the partition wall 120 has a communication passage 121, and the communication passage 121 is formed in an L shape in the partition wall main body 120a as shown in FIG. Here, the communication passage 121 is opened to the outside of the partition wall 120 at the outer end opening portion thereof, and the inner end opening portion of the communication passage 121 is between the diaphragm 200a and the partition wall main body 120a. It is open in the formed air chamber Rb (described later).

The upper housing member 100b is formed in a rectangular cross section, and the upper housing member 100b is composed of a peripheral wall 130 and an upper wall 140. The peripheral wall 130 extends downward from the upper wall 140 in a cylindrical shape, and the hollow portion 131 of the peripheral wall 130 is formed in a circular cross-sectional shape on the inner peripheral surface thereof. Further, the peripheral wall 130 is coaxially and airtightly fitted to the partition wall main body 120a of the partition wall 120 from above via the O-ring 123 at the extension end opening thereof, and is seated on the annular flange 120b. There is.

As shown in FIG. 1, the diaphragm member 200 is composed of a diaphragm 200a, a reinforcing annular body 200b, and an auxiliary shaft 200c. The diaphragm 200a is sandwiched between the bottom wall main body 110a of the bottom wall 110 and the partition wall main body 120a of the partition wall 120 via the reinforcing annular body 200b at the outer peripheral portion 210 thereof. As a result, the diaphragm 200a has a liquid chamber Ra and an air chamber between the inner annular wall portion 111a and the partition wall main body 120a on the inner peripheral side of the outer annular wall portion 111b of the upper wall portion 111 of the bottom wall main body 110a. Partition with Rb.

Here, the liquid flowing from the upstream side of the piping system of the semiconductor manufacturing apparatus through the inflow tube 110b and the inflow path portion 112 of the bottom wall 110 flows into the liquid chamber Ra through the annular valve seat portion 111c. As a result, the liquid pressure is generated in the liquid chamber Ra to act on the lower surface 220 of the diaphragm 200a. On the other hand, the outside air flows into the air chamber Rb through the communication passage 121 of the partition wall 120. As a result, the outside air generates air pressure (atmospheric pressure) that acts on the upper surface 230 of the diaphragm 200a in the air chamber Rb.

The diaphragm 200a is formed of a predetermined fluororesin as a disk-shaped and film-shaped diaphragm.

In the first embodiment, the diaphragm 200a comes into contact with a high-purity chemical solution such as a highly corrosive chemical solution such as a strong acid or a strong alkali due to its configuration as a diaphragm valve. Therefore, the diaphragm 200a has acid resistance, alkali resistance, etc. It is desirable to have excellent chemical resistance.

Further, since elution of metal components and organic substances from the diaphragm 200a of the diaphragm valve and other constituent members is not allowed, it is desirable to use at least a fluororesin having low elution property as a material for forming the diaphragm.

Further, since the diaphragm 200a repeats curved displacement every time the diaphragm valve is opened and closed, it is desirable that the diaphragm 200a is at least excellent in flexibility and long life.

Therefore, in the first embodiment, as the above-mentioned predetermined fluororesin, tetrafluoroethylene / perfluoroalkyl which is excellent in chemical resistance, low elution property, heat resistance and corrosion resistance, and can secure flexibility and long life. A vinyl ether copolymer (PFA) is used. In the first embodiment, PFA is also used as a material for forming the cylindrical housing 100 and the partition wall 120.

Further, the diaphragm 200a is formed by PFA as a film-shaped diaphragm so as to have a thickness within a predetermined thickness range, for example, 0.5 (mm). In the first embodiment, the predetermined thickness range means a thickness range of 0.1 (mm) or more and 0.5 (mm) or less.

Here, the reason why it is set to 0.1 (mm) or more is that if it is less than 0.1 (mm), the diaphragm 200a is too thin and easily torn. Further, the reason why the diaphragm 200a is set to 0.5 (mm) or less is that if the diaphragm 200a is thicker than 0.5 (mm), it is too thick and difficult to bend.

The diaphragm 200a configured as described above serves as a valve body portion (hereinafter, also referred to as a valve body portion 240) facing the annular valve seat portion 111c at the central portion 240 thereof. This means that the valve body portion 240, together with the annular valve seat portion 111c, constitutes the valve portion of the diaphragm valve.

The reinforcing annular body 200b is for reinforcing the film-shaped diaphragm 200a, and the reinforcing annular body 200b is joined by laser welding from the lower surface 220 side of the diaphragm 200a along the outer peripheral portion 210 of the diaphragm 200a. There is. As a result, the reinforcing annular body 200b is integrally formed with the outer peripheral portion 210 of the diaphragm 200a.

In the first embodiment, the reinforcing annular body 200b is formed by injection molding into a columnar shape using PFA and then cutting into an annular shape as described later. Here, the reinforcing annular body 200b has an outer diameter equal to the outer diameter of the diaphragm 200a, and the radial width and thickness of the reinforcing annular body 200b are handled by reinforcing the film-shaped diaphragm 200a. It is set to each value suitable for facilitation.

The auxiliary shaft 200c is cylindrical, and the auxiliary shaft 200c is joined to the central portion 240 of the diaphragm 200a by laser welding at the lower portion thereof. As a result, the auxiliary shaft 200c is integrally formed with the central portion 240 of the diaphragm 200a. Further, the auxiliary shaft 200c has a female screw hole portion 260, and the female screw hole portion 260 is formed coaxially with the auxiliary shaft 200c from the upper side thereof.

In the first embodiment, the auxiliary shaft 200c is formed by injection molding into a columnar shape using PFA as described later. The outer diameter of the auxiliary shaft 200c is set to a value within a range of 1 (mm) or more and 4 (mm) or less.

Here, assuming that the outer diameter of the auxiliary shaft is 4 (mm) or less, when the auxiliary shaft having an outer diameter of 4 (mm) or less is joined to the central part of the diaphragm by heat, it becomes the central part of the auxiliary shaft or the diaphragm. This is because if the auxiliary shaft and the central portion of the diaphragm are joined by laser welding, the joint portion between the auxiliary shaft and the central portion of the diaphragm will not be deformed. The outer diameter of the auxiliary shaft is set to 1 (mm) or more because it is difficult to form an auxiliary shaft having an outer diameter of less than 1 (mm).

The lower portion of the auxiliary shaft 200c is formed at the central lower surface portion a so as to be orthogonal to the axis of the auxiliary shaft 200c, and the outer peripheral side lower surface portion b of the lower portion of the auxiliary shaft 200c is outward. It is formed in an arc shape with a cross section that is convex toward the surface (see FIG. 3).

The auxiliary shaft 200c configured in this way is slidably fitted from above the through hole portion 122 (see FIG. 1) coaxially formed in the partition wall main body 120a, and is driven as described later. It is connected to the piston shaft 320 of the mechanism 300 in the through hole portion 122. In the present embodiment, the axial length of the auxiliary shaft 200c is shorter than the axial thickness of the partition wall main body 120a.

The diaphragm member 200 configured as described above is integrally formed by the diaphragm 200a, the reinforcing annular body 200b, and the auxiliary shaft 200c. Then, when the auxiliary shaft 200c is pushed toward the liquid chamber Ra side by the piston shaft 320 under the urging force of the coil spring 330 as described later, the diaphragm 200 has the auxiliary shaft 200 at its curved displacement portion. The valve portion is closed by being pushed into the liquid chamber Ra by the 200c and displaced in a curved shape and seated on the annular valve seat portion 111c at the valve body portion 240. This means that the diaphragm valve is closed. The curved displacement portion of the diaphragm 200a refers to a film-like portion between the outer peripheral portion and the central portion of the diaphragm 200a.

On the other hand, as described later, the auxiliary shaft 200c displaces the diaphragm 200a in a curved shape in conjunction with the piston shaft 320 that slides against the urging force of the coil spring 330 according to the air pressure in the lower chamber 131a. When slid lower chamber 131b side, the diaphragm 200a is at the valve body 240, away from the annular valve seat 111c, opens the valve unit. This means that the diaphragm valve opens.

As shown in FIG. 1, the drive mechanism 300 is assembled inside the housing 100. The drive mechanism 300 includes a piston 310, a piston shaft 320, and a coil spring 330.

The piston 310 is airtightly and slidably fitted in the hollow portion 131 of the peripheral wall 130 of the housing member 100b via an O-ring 3, and the piston 310 is fitted on both sides of the peripheral wall 130 in the axial direction. The hollow portion 131 is partitioned into the upper chamber 131a and the lower chamber 131b. In the first embodiment, the piston 310 is formed by PFA together with the piston shaft 320.

Here, the upper chamber 131a is opened to the outside of the housing member 100b through the annular groove portion 141, the communication passage portion 142, and the opening portion 143 formed on the upper wall 140 of the housing member 100b.

The annular groove portion 141 is coaxially formed on the upper wall 140 from the inside of the upper chamber 131a in an annular shape. The opening portion 143 is formed in the outer peripheral portion of the upper wall 140, and the communication passage portion 142 is formed inside the upper wall 140 so as to communicate the annular groove portion 141 with the opening portion 143.

On the other hand, the lower chamber 131b is connected to a compressed air flow supply source (not shown) via a communication passage portion 133 and an opening portion 134 formed in the peripheral wall 130. As a result, the compressed air flow from the compressed air flow supply source is supplied to the inside of the lower chamber 131b through the opening portion 134 and the communication passage portion 133.

The opening portion 134 is formed in a part of the peripheral wall 130 below the opening portion 143 so as to pass through the communication passage portion 133 and communicate with the lower chamber 131b. The communication passage portion 133 is formed in a part of the peripheral wall 130 so that the opening portion 134 communicates with the inside of the lower chamber 131b.

The piston shaft 320 is formed so as to extend coaxially and integrally from the piston 310. As shown in FIG. 1, the piston shaft 320 includes a shaft main body portion 320a and a shaft-shaped male screw portion 320b, and the shaft main body portion 320a coaxially extends from the piston 310 through the lower chamber 131b. It is slidably fitted in the through hole portion 122 of the partition wall main body 120a via the O-ring 321.

The shaft-shaped male screw portion 320b extends coaxially and integrally from the extending end portion of the shaft main body portion 320a, and the shaft-shaped male screw portion 320b is fastened into the female screw hole portion 260 of the auxiliary shaft 200c. Has been done. As a result, the piston shaft 320a is slidably connected to the auxiliary shaft 200c in the through hole portion 122 of the partition wall main body 120a.

As shown in FIG. 1, the coil spring 330 is fitted in the annular groove portion 141 of the upper wall 140, and the coil spring 330 is sandwiched between the bottom portion of the annular groove portion 141 and the piston 310 to form a piston. The 310 is urged toward the lower chamber 131b.

In the drive mechanism 300 configured in this way, when the air pressure due to the compressed air flow from the compressed air supply source is not generated in the lower chamber 131b, the piston 310 moves to the lower chamber due to the urging force of the coil spring 330. is slid to 131b side, the piston shaft 320, the auxiliary shaft 200c by pressing the annular valve seat portion 111c side, a diaphragm 200a, an annular valve seat at the center portion 240 of its (the valve body portion 240) It makes strange position to be wearing seat to the part 111c.

On the other hand, when the compressed air flow from the compressed air supply source is supplied into the lower chamber 131b through the opening 134 and the communication passage portion 133, the piston 310 responds to the air pressure due to the compressed air in the lower chamber 131b. The air in the upper chamber 131a is discharged to the outside from the annular groove portion 141, the communication passage portion 142 and the opening portion 143 against the urging force of the coil spring 330, and the piston shaft 320 slides toward the upper chamber 131a side. In conjunction with the sliding direction of the piston 310, the diaphragm 200a is curvedly displaced in the direction away from the annular valve seat portion 111c at the valve body portion, which is the central portion 240 thereof, via the auxiliary shaft 200c.

Next, in manufacturing the diaphragm valve configured as described above, a method of laser welding the diaphragm 200a of the diaphragm member 200 with the reinforcing annular body 200b and the auxiliary shaft 200c will be described.

For laser welding of the diaphragm 200a, the reinforcing annular body 200b, and the auxiliary shaft 200c, a diaphragm 200a, a reinforcing annular body 200b, and an auxiliary shaft 200c formed as separate parts are prepared. Since the diaphragm 200a is formed as a single separate component in this way, it can be formed as a convenient diaphragm having no limitation on its use.

In the first embodiment, the diaphragm 200a is prepared by molding by an extrusion molding method with PFA. The extrusion molding by the extrusion molding method is performed, for example, as follows.

The pellet-shaped PFA prepared in advance is heated and melted by an extrusion molding machine. After that, the heated and melted PFA is press-fitted into the film-shaped cavity in the mold and gradually cooled to form a film. The molded product thus molded is punched into a disk shape corresponding to the diaphragm 200a. As a result, the diaphragm 200a is formed as a film-shaped diaphragm.

The reason why the extrusion molding method using PFA was adopted in forming the diaphragm 200a as described above is based on the following grounds.

For example, when a diaphragm is formed by cutting a material made of PFA, cutting marks are formed on the surface of the diaphragm. Therefore, when the diaphragm produced by such cutting comes into contact with the flowing liquid in the liquid chamber Ra of the diaphragm valve, particles, for example, minute particles having a size of several nm are minute due to the cutting marks of the diaphragm. If the liquid is peeled off from the diaphragm and dusted and mixed into the liquid, the liquid cannot be kept clean.

This causes poor quality of products manufactured by semiconductor manufacturing equipment, for example, silicon wafers having a wiring pitch of 10 (nm) or less. Therefore, it is necessary to surely prevent the mixing of particles into the liquid in the diaphragm valve, for example, the mixing of particles having a size of several nm into the liquid.

Further, it is difficult to form a diaphragm into a film by injection molding of PFA, and even if it can be formed into a film, it is difficult to form a long-life diaphragm having excellent flexibility. be.

Therefore, in the first embodiment, the diaphragm 200a is formed into a film by molding by an extrusion molding method. As a result, the film-shaped diaphragm extruded by the extrusion molding machine has a very good smooth surface, that is, a so-called smooth surface of several nm size particles formed on each surface thereof. It is a diaphragm that can suppress dust generation to the minimum, and can be formed as a diaphragm having a long life with excellent chemical resistance, low elution property, and flexibility.

Further, laser welding of the auxiliary shaft 200c and the central portion 240 of the diaphragm 200a is performed as follows. First, in the auxiliary shaft holding step S1 shown in FIG. 2, the auxiliary shaft 200c is held so as to be positioned so that the female screw hole portion 260 is opened downward as shown in FIG. At this time, the holding is performed so that the female screw hole portion 260 is vertically positioned on its axis.

After that, in the diaphragm mounting step S2, the diaphragm 200a is mounted on the auxiliary shaft 200c so as to be located on the lower surface of the lower portion of the auxiliary shaft 200c at the central portion 240 thereof (see FIG. 3). ..

Then, in the pressing plate mounting step S3, the pressing plate Q is mounted on the central portion 240 so as to coaxially face the auxiliary shaft 200c via the central portion 240 of the diaphragm 200a.

Here, the holding plate Q is made of glass that easily transmits laser light, and is formed in a disk shape so as to have a predetermined thickness and a predetermined outer diameter. The glass that easily transmits the laser light has high thermal conductivity. The pressing plate Q may generally be a pressing member having light transmission and thermal conductivity, and the pressing member may have any shape regardless of whether or not it has a plate shape. It may be.

As described above, since the holding plate Q is a glass that easily transmits the laser light as described above, the holding plate Q is difficult to absorb the laser light. Further, since the above-mentioned glass forming the holding plate Q has high thermal conductivity, it is easy to absorb the heat of the central portion 240 of the diaphragm 200a in the mounted state with respect to the central portion 240 of the diaphragm 200a. In the first embodiment, the predetermined outer diameter of the holding plate Q is set to be larger than the outer diameter of the auxiliary shaft 200c.

Further, the predetermined thickness of the holding plate Q is selected as follows. In a state where the holding plate Q is placed on the central portion 240 of the diaphragm 200a as described above, the laser beam is passed through the holding plate Q and the boundary between the central portion 240 of the diaphragm 200a and the auxiliary shaft 200c as described later. When the laser beam is converged to the vicinity of the surface, the laser beam transmits the pressing plate Q well, and the pressing plate Q absorbs the heat generated in the central portion 240 of the diaphragm 200a due to the laser beam. It is selected so as to satisfactorily suppress the temperature rise of the central portion 240 of the diaphragm 220.

After the pressing plate Q is placed on the central portion 240 of the diaphragm 200a as described above, in the next pressing step S4 against the pressing plate, the pressing plate Q is pressed from above by an appropriate press machine (not shown). As shown by the arrow P in FIG. 3, the diaphragm 200a is pressed toward the central portion 240. At this time, the pressing plate Q is pressed on the lower surface of the diaphragm 200a over the entire upper surface of the central portion 240 of the diaphragm 200a with a uniform pressing force.

In the next laser light irradiation step S5 in such a pressing state, the laser light is irradiated toward the pressing plate Q by the laser device L (see FIG. 3) as follows.

Explaining the configuration of the laser device L for the irradiation, the laser device L is configured to emit laser light at its emitting portion. Here, the laser apparatus is configured such that the laser light from the emitting portion is converged on a focal point separated from the lens system by a predetermined focal length by a lens system (not shown). Further, the laser device L is configured so that the emission intensity of the laser light from the emitting portion thereof can be adjusted.

Then, when the laser device L irradiates the pressing plate Q with the laser beam, the diaphragm 200a is directed so that the laser device L faces the outer peripheral portion of the central portion 240 of the diaphragm 200a at its exit portion. It is maintained directly above the outer peripheral portion of the central portion 240 of the. In the first embodiment, the convergence point of the laser light of the laser device L, that is, the focal point of the lens system is the boundary portion between the outer peripheral portion of the central portion 240 of the diaphragm 200a and the corresponding portion of the auxiliary shaft 200c. Hereinafter, it corresponds to the vicinity of the portion F (hereinafter, also referred to as the irradiation portion F) on the central portion-the boundary between the auxiliary shafts (see FIG. 3).

Here, the laser device L rotates around the axis of the holding plate Q while converging the laser light on the circumference along the circumference including the vicinity of the irradiation site F at the boundary between the central portion and the auxiliary shaft. It has become like.

At this time, the height of the diaphragm 200a of the laser device L with respect to the outer peripheral portion of the central portion 240 so that the focal point of the lens system of the laser device L coincides with the vicinity of the irradiation portion F of the boundary portion between the central portion and the auxiliary shaft. Is adjusted in position.

Further, the portion including the central portion 240 of the diaphragm 200a and the lower portion a on the central side of the lower portion of the auxiliary shaft 200c is a circumferential region centered on the vicinity of the irradiation portion F of the boundary portion between the central portion and the auxiliary shaft. The emission intensity of the laser light from the laser device L is adjusted so that it can be melted in the melting region).

Here, since the melting point of PFA is about 320 (° C.), the laser device L uses its emission intensity to set the heating temperature of the vicinity of the irradiation site F of the boundary between the central portion and the auxiliary shaft to the melting point of PFA. It is set to be slightly higher than.

However, considering that the holding plate Q absorbs heat from the outer peripheral edge of the central portion of the diaphragm 200a due to its high thermal conductivity, the vicinity of the irradiation portion F at the boundary between the central portion and the auxiliary shaft Even if the heating temperature for PFA rises above the melting point of the PFA, the vicinity of the irradiation site F so that the melting region centered on the vicinity of the irradiation site F at the boundary between the central portion and the auxiliary shaft remains within the predetermined region. The emission intensity of the laser beam is set as a predetermined emission intensity.

In other words, in the laser device L, the irradiation intensity of the laser light emitted along the molten region including the vicinity of the irradiation portion F of the boundary between the central portion and the auxiliary shaft is uniformly the predetermined irradiation intensity. Is set to. The above-mentioned predetermined region is, for example, in a mounted state of the central portion 240 of the diaphragm 200a on the auxiliary shaft 200c, at least not including the upper surface portion of the central portion 240 of the diaphragm 200a and the lower portion of the auxiliary shaft 200c. A region that does not include a portion other than the portion that includes the central lower surface portion a.

Then, when the laser device L emits laser light as shown in FIG. 3 in association with its operation, the laser light is emitted from the outer peripheral edge of the holding plate Q and the diaphragm 200a as shown in FIG. The outer peripheral edge portion of the central portion 240 is transmitted in each thickness direction, and converges in the vicinity of the irradiation portion F of the boundary portion between the central portion and the auxiliary shaft, which is sequentially displaced in the circumferential direction.

Therefore, while maintaining such irradiation by the laser beam, under the setting of the emission intensity of the laser beam of the laser device L as described above, the lower surface of the central portion 240 of the diaphragm 200a and the lower portion of the auxiliary shaft 200c on the central side. The portion including the portion a is sequentially heated by the laser beam along the circumferential direction of the boundary portion between the central portion and the auxiliary shaft, and locally centered on the vicinity of the irradiation portion F according to the moving position of the laser device L. .. Along with this, the outer peripheral edge of the central portion 240 of the diaphragm 200a and the corresponding portion of the auxiliary shaft 200c with respect to the outer peripheral edge portion are along the circumferential direction, centering on the vicinity of the irradiation portion F of the boundary portion between the central portion and the auxiliary shaft. It is locally and sequentially melted.

In the first embodiment as described above, in the local heating as described above, the heating temperature for the central portion 240 of the diaphragm 200a is the lower surface (auxiliary shaft) of the central portion 240 of the diaphragm 200a under the endothermic action of the pressing plate Q. The surface on the side of 200c) is gradually lowered toward the surface on the opposite side, and the auxiliary shaft 200c is gradually lowered from the central portion 240 side of the diaphragm 200a toward the upper surface of the central portion 240. Therefore, the central portion 240 of the auxiliary shaft 200c and the diaphragm 200a will melt together in the predetermined region described above.

While maintaining such irradiation by the laser beam, the laser apparatus L rotates so that the laser beam is sequentially converged along the circumference including the vicinity of the irradiation portion F of the boundary between the central portion and the auxiliary shaft. I will continue.

As a result, the portion of the lower portion of the auxiliary shaft 200c including the lower surface portion a on the central side and the central portion 240 of the diaphragm 200a are centered on the molten region including the vicinity of the irradiation portion F of the boundary portion between the central portion and the auxiliary shaft. Over the predetermined region, it is heated by a laser beam to uniformly melt and weld together. After that, by stopping the emission of the laser light from the laser device L, the portion of the lower part of the auxiliary shaft 200c including the lower surface portion a on the central side and the central portion 240 of the diaphragm 200a are cured through natural cooling.

Here, as described above, the predetermined region is at least the upper surface portion of the central portion 240 of the diaphragm 200a in the mounted state with respect to the portion including the central lower surface portion a of the lower portion of the auxiliary shaft 200c of the central portion 240 of the diaphragm 200a. Since it is a region that does not include a portion other than the portion including the central lower surface portion a in the lower portion of the auxiliary shaft 200c, the central portion 240 of the diaphragm 200a is the portion including the central lower surface portion a in the lower portion of the auxiliary shaft 200c. The central portion 240 of the diaphragm 200a does not melt to the joint surface with the holding plate Q in the state of being placed on the auxiliary shaft 200c, and the portion of the lower part of the auxiliary shaft 200c including the central lower surface portion a is the relevant portion. The parts other than the above are not melted on the auxiliary shaft 200c. Therefore, the auxiliary shaft 200c and the diaphragm 200a can be welded to each other while maintaining their original shapes.

After that, in the pressing plate removing step S6 of FIG. 2, the pressing plate Q is removed from the central portion 240 of the diaphragm 200a. As a result, the auxiliary shaft 200c and the central portion 240 of the diaphragm 200a are welded and hardened to each other, and a connection configuration is formed by integrally joining the auxiliary shaft 200c and the central portion of the diaphragm 200a by laser welding.

Based on the above, the auxiliary shaft 200c and the central portion of the diaphragm 200a can be satisfactorily joined and connected while ensuring convenience before laser welding as a single component of the diaphragm 200a. Along with this, the inner seal of the liquid chamber Ra is satisfactorily formed under the integrated configuration of the outer peripheral portion 210 and the central portion 240 of the diaphragm 200a and the curved displacement portion which is a portion between the outer peripheral portion 210 and the central portion 240. Can be secured.

Further, laser welding of the outer peripheral portion 210 of the diaphragm 200a and the reinforcing annular body 200b is performed as follows.

After the integrated connection configuration of the auxiliary shaft 200c and the central portion of the diaphragm 200a is formed by laser welding as described above, in the holding step S1a of the reinforcing annular body shown in FIG. 4, the reinforcing annular body 200c is formed. Hold it horizontally on its upper surface (see FIG. 5).

After that, in the diaphragm mounting step S2a, the diaphragm 200a is mounted on the reinforcing annular body 200b so as to be located on the reinforcing annular body 200b at the outer peripheral portion 210 thereof (see FIG. 5). ..

Then, in the mounting step S3a of the annular holding plate, the annular holding plate Q1 is mounted on the outer peripheral portion 210 of the diaphragm 200a so as to coaxially face the reinforcing annular body 200b via the outer peripheral portion 210 of the diaphragm 200a. (See FIG. 5).

Here, the annular pressing plate Q1 is made of the same material as the material for forming the pressing plate Q, and is formed in an annular shape so as to have a predetermined thickness and a predetermined outer inner diameter. Therefore, the annular pressing plate Q1 has the same characteristics as the pressing plate Q, that is, light transmission and high thermal conductivity.

Therefore, the annular holding plate Q1 is difficult to absorb the laser light due to its light transmission. Further, due to its high thermal conductivity, the annular holding plate Q1 easily absorbs the heat of the outer peripheral portion 210 of the diaphragm 200a in the mounted state on the outer peripheral portion 210 of the diaphragm 200a.

In addition, the predetermined thickness of the annular pressing plate Q1 is such that the annular pressing plate Q1 is placed on the outer peripheral portion 210 of the diaphragm 200a as described above, and the laser beam is applied to the annular pressing plate Q1 as described later. When the laser light converges in the vicinity of the boundary surface between the outer peripheral portion 210 of the diaphragm 200a and the reinforcing annular body 200b, the laser light is satisfactorily transmitted through the annular holding plate Q1 and the annular holding plate Q1 is caused by the laser light. Therefore, the heat generated in the outer peripheral portion 210 of the diaphragm 200a is absorbed, and the temperature rise of the outer peripheral portion 210 of the diaphragm 220 is satisfactorily suppressed. Further, the predetermined outer diameter of the annular pressing plate Q1 is selected to be larger than the outer diameter of the reinforcing annular body 200b, and the predetermined inner diameter of the annular pressing plate Q1 is selected to be smaller than the inner diameter of the reinforcing annular body 200b.

After the annular pressing plate Q1 is placed on the outer peripheral portion 210 of the diaphragm 200a as described above, in the next pressing step S4a against the annular pressing plate, the annular pressing plate Q1 is subjected to an appropriate press machine (from above the annular pressing plate Q1). (Not shown), as shown by the arrow P1 in FIG. 5, is pressed toward the outer peripheral portion 210 of the diaphragm 200a. At this time, the annular pressing plate Q1 is pressed on the lower surface of the diaphragm 200a over the entire upper surface of the outer peripheral portion 210 of the diaphragm 200a with a uniform pressing force.

In the next laser light irradiation step S5a in such a pressing state, the laser light is irradiated toward the annular pressing plate Q1 by the above-mentioned laser device L (see FIG. 6) as follows. ..

When irradiating the annular holding plate Q1 with the laser beam by the laser device L, the outer peripheral portion 20 of the diaphragm 200a is directed so that the laser device L faces the outer peripheral portion 210 of the diaphragm 200a at its exit portion. It is maintained directly above. In the first embodiment, the convergence point of the laser light of the laser device L, that is, the focus of the lens system is the boundary portion between the outer peripheral portion 210 of the diaphragm 200a and the reinforcing annular body 200b with respect to the outer peripheral portion 210 (hereinafter, the outer peripheral portion). -Corresponds to the vicinity of the portion F1 (hereinafter, also referred to as the irradiation portion F1) on the reinforcing annular body boundary portion (see FIG. 5).

Here, the laser device L is around the axis of the annular holding plate Q1 while converging the laser light on the circumference along the circumference including the vicinity of the irradiation portion F1 of the boundary portion between the outer peripheral portion and the reinforcing annular body. It is designed to rotate to.

At this time, the height of the diaphragm 200a of the laser device L with respect to the outer peripheral portion 210 is set so that the focal point of the lens system of the laser device L coincides with the vicinity of the irradiation portion F1 of the boundary portion between the outer peripheral portion and the reinforcing annular body. The position is adjusted.

Further, the laser device L so that the outer peripheral portion 210 of the diaphragm 200a and the upper surface side portion of the reinforcing annular body 200b can be melted around the vicinity of the irradiation portion F1 at the boundary portion between the outer peripheral portion and the reinforcing annular body. The emission intensity of the laser beam from is adjusted.

Specifically, the laser device L makes the heating temperature for the vicinity of the irradiation portion F1 of the outer peripheral portion-reinforcing annular body boundary portion slightly higher than the melting point of PFA in terms of its emission intensity. It is set.

However, in consideration of the fact that the annular holding plate Q1 absorbs the heat of the outer peripheral portion 210 of the diaphragm 200a due to its high thermal conductivity, the vicinity of the irradiation portion F1 of the outer peripheral portion-reinforcing annular body boundary portion. Even if the heating temperature for PFA rises above the melting point of PFA, the melting region centered on the vicinity of the irradiation site F1 at the boundary between the outer peripheral portion and the reinforcing annular body is predetermined as in the case of the pressing plate Q. The emission intensity of the laser beam with respect to the vicinity of the irradiation site F1 is set as a predetermined emission intensity so as to fit within the region.

Then, when the laser device L emits a laser beam in association with its rotational operation, the laser beam causes the annular holding plate Q1 and the outer peripheral portion 210 of the diaphragm 200a to be oriented in each thickness direction, as shown in FIG. It passes through and converges in the vicinity of the irradiation site F1 at the boundary between the outer peripheral portion and the reinforcing annular body, which is sequentially displaced.

Therefore, while maintaining such irradiation by the laser beam, the outer peripheral portion 210 of the diaphragm 200a and the upper surface side portion of the reinforcing annular body 200b are formed under the setting of the emission intensity of the laser beam of the laser device L as described above. Along the circumferential direction of the outer peripheral portion-reinforcing annular body boundary portion, the laser beam is sequentially heated locally around the vicinity of the irradiation site F1 according to the moving position of the laser device L. Along with this, the outer peripheral portion 210 of the diaphragm 200a and the upper surface side portion of the reinforcing annular body 200b are locally located along the circumferential direction around the vicinity of the irradiation portion F1 of the outer peripheral portion-reinforcing annular body boundary portion. Sequentially, it is melted.

In the first embodiment, in the local heating as described above, the heating temperature of the diaphragm 200a with respect to the outer peripheral portion 210 is the lower surface (reinforcement) of the outer peripheral portion 210 of the diaphragm 200a under the endothermic action of the annular holding plate Q1. The surface of the annular body 200b is gradually lowered toward the surface opposite to the surface of the annular body 200b, and the reinforcing ring 200b is directed from the outer peripheral portion 210 side of the diaphragm 200a in the direction opposite to the upper surface of the outer peripheral portion 210. And gradually decrease. Therefore, the reinforcing annular body 200b and the outer peripheral portion 210 of the diaphragm 200a are both melted in the predetermined region described above.

While maintaining such irradiation with the laser beam, the laser device L transmits the laser beam along the circumferential region (melted region) including the vicinity of the irradiation portion F1 at the boundary portion between the outer peripheral portion and the reinforcing annular body. It rotates so that it converges in sequence.

As a result, the upper surface side portion of the reinforcing annular body 200b and the outer peripheral portion 210 of the diaphragm 200a are centered on the circumferential region including the vicinity of the irradiation portion F1 of the outer peripheral portion-reinforcing annular body boundary portion. Over the region, it is heated by laser light, melts uniformly, and welds together. After that, by stopping the emission of the laser light from the laser device L, the upper surface side portion of the reinforcing annular body 200b and the outer peripheral portion 210 of the diaphragm 200a are cured through natural cooling. Therefore, the reinforcing annular body 200b and the diaphragm 200a can be welded to each other while maintaining their original shapes.

After that, in the annular pressing plate removing step S6a of FIG. 4, the annular pressing plate Q1 is removed from the outer peripheral portion 210 of the diaphragm 200a. As a result, in a state where the reinforcing annular body 200b and the outer peripheral portion 210 of the diaphragm 200a are welded and cured to each other, an integral joint configuration is formed between the reinforcing annular body 200b and the outer peripheral portion of the diaphragm 200a by laser welding. NS. Along with this, a seal between the reinforcing annular body 200b and the outer peripheral portion 210 of the diaphragm 200a can be satisfactorily secured.

As described above, the diaphragm member 200 is integrally formed by the diaphragm 200a, the reinforcing annular body 200b, and the holding shaft 200c. Of the diaphragm member 200a configured in this way, the auxiliary shaft 200c is formed as a separate component from the piston shaft 320 of the drive mechanism 300. Therefore, according to the diaphragm member 200, it is possible to easily assemble the component parts such as the partition wall 120 between the drive mechanism 300 and the diaphragm 200a in the housing 100, and at least the diaphragm before laser welding. The convenience that the member 200 can be used in a diaphragm valve having various specifications can be ensured.

After the diaphragm member 200 is formed as described above, the diaphragm member 200 holds the auxiliary shaft 200c on the upper side, and the diaphragm 200a is used to prepare the upper wall portion 111 of the bottom wall 110 in advance. It is fitted inside the outer annular wall portion 111b and seated on the inner annular wall portion 111a via the reinforcing annular body 200b.

At this time, since the reinforcing annular body 200b is laser-welded to the outer peripheral portion of the diaphragm 200a, the reinforcing annular body 200b is placed on the inner annular wall inside the outer annular wall portion 111b of the upper wall portion 111 of the bottom wall 110. By seating on the portion 111a, the diaphragm 200a can be seated on the inner annular wall portion 111a via the reinforcing annular body 200b.

In other words, even if the diaphragm 200a is thin and difficult to handle, the reinforcing ring 200b can be formed by laser welding the outer peripheral portion 210 of the diaphragm 200a and the reinforcing ring 200b as described above. The diaphragm 200a can be easily fitted inside the outer annular wall portion 111b of the upper wall portion 111 and seated well on the inner annular wall portion 111a together with the reinforcing annular body 200b by exhibiting a reinforcing function.

Then, as shown in FIG. 1, the partition wall 120 faces the inner annular wall portion 111a via the diaphragm 200a at the partition wall main body 120a so as to face the diaphragm 200a at the inner end opening portion of the communication passage 121. As described above, it is fitted inside the outer annular wall portion 111b, and is assembled to the bottom wall 110 so as to be seated on the outer annular wall portion 111b at the annular flange portion 120b. As a result, under laser welding of the outer peripheral portion 210 of the diaphragm 200 with the reinforcing annular body 200b, the outer peripheral portion 210 of the diaphragm 200a passes through the reinforcing annular body 200b, and the inner peripheral annular wall portion 111a and the outer peripheral portion of the partition wall body 120a are formed. Since it is sandwiched between the portions, the seal inside the liquid chamber Ra can be satisfactorily secured as described above. As described above, when the partition wall 120 is assembled to the upper wall 110, the partition wall 120 is coaxially fitted to the auxiliary shaft 200c at the through hole portion 122 thereof.

Then, the piston shaft 320 is coaxially fastened into the female screw hole portion 260 of the auxiliary shaft 200c while being fitted into the through hole portion 122 of the partition wall 120 via the O-ring 321 at the axial male screw portion 320b. NS. At this time, as described above, the central portion 240 of the diaphragm 200a and the extending end portion of the auxiliary shaft 200c are joined by laser welding. Therefore, although the film-shaped diaphragm 200a described above is very thin, the diaphragm 200a is joined to the auxiliary shaft 200c at the central portion 240 by laser welding, so that the diaphragm 200a is joined to the piston shaft 320 at the central portion thereof. By screwing the axial male screw portion 320b of the piston shaft 320 into the female screw hole portion 260 of the auxiliary shaft 200c, the piston shaft 320, the diaphragm 200a and the auxiliary shaft 200c can be formed without having the connecting portion required for the connection. Can be easily connected.

After that, the upper housing member 100b accommodates the piston 310 in the hollow portion 131 of the peripheral wall 130 with the coil spring 330 prepared in advance fitted in the annular groove portion 141, and the tip thereof while accommodating the piston 310 via the O-ring 131. At the opening, the partition wall body 120a is fitted and seated on the annular flange portion 120b. This completes the manufacturing and assembly of the diaphragm valve.

In the first embodiment configured as described above, it is assumed that the air-operated diaphragm valve is in the closed state when the semiconductor element is manufactured by the semiconductor manufacturing apparatus.

At this time, in the air-operated diaphragm valve, the piston 310 slides downward in the upper housing member 110b based on the urging force of the coil spring 330.

Along with this, the piston shaft 320 seats the diaphragm 200a on the annular valve seat portion 111c at the valve body portion 240, which is the central portion 240 thereof, via the auxiliary shaft 200c. In such a closed state of the diaphragm valve, when the compressed air flow is supplied from the compressed air flow supply source into the lower chamber 131b through the opening 134 and the communication passage portion 133 of the upper housing member 100b, the piston 310 However, together with the piston shaft 320, the hollow portion 131 of the upper housing member 100b slides upward against the urging force of the coil spring 330 based on the pressure of the compressed air flow in the lower chamber 131b.

Along with this, the auxiliary shaft 200c is interlocked with the piston shaft 320, and the diaphragm 200a is pulled by the auxiliary shaft 200c at its central portion 240 and displaced in a curved manner toward the air chamber Rb side. Along with this, the diaphragm 200a separates from the annular valve seat portion 111c at its central portion 240. As a result, the diaphragm valve is opened.

In such a state, when the liquid is supplied from the liquid supply source to the upstream portion of the piping system, the liquid passes through the inflow cylinder 110b, the communication passage portion 112, and the annular valve seat portion 111c into the liquid chamber Ra. Inflow. The liquid that flows into the liquid chamber Ra in this way passes through the communication passage portion 113 and the outflow cylinder 110c and flows out into the downstream portion of the piping system.

In such a liquid flow process, the liquid flowing into the liquid chamber Ra as described above bends and displaces the diaphragm 200a to the air chamber Rb side or the liquid chamber Ra according to the fluctuation of the liquid pressure. It flows from the liquid chamber Ra through the communication passage portion 113 into the outflow cylinder 110c.

Here, the diaphragm 200a is a film-shaped diaphragm formed by extrusion molding with PFA as described above. Therefore, the diaphragm 200a has a good smooth surface on both sides thereof.

Therefore, even if the diaphragm valve is in the operating state, it goes without saying that particles caused by cutting marks do not separate from the diaphragm 200a due to contact with the liquid and are mixed in the liquid. That is, even the mixing of minute particles having a size of several nm into the liquid can be suppressed to the minimum (minimum). Further, such a thing is similarly established even if the central portion 240 of the diaphragm 200a is seated on the annular valve seat portion 111c or separated from the annular valve seat 111c in the operating state of the diaphragm valve.

From the above, the liquid flowing into the liquid chamber Ra is kept substantially clean by suppressing even the mixing of minute particles having a size of several nm to the minimum, and the communication passage portion 113 and the communication passage portion 113 and the liquid chamber Ra It flows out into the downstream part of the piping system through the outflow cylinder 110c.

Therefore, even if the liquid that has flowed out into the downstream portion of the piping system flows along the surface of a semiconductor wafer having a wiring pitch of, for example, 10 (nm) or less in the manufacture of a semiconductor element, particles having a size of several nm are generated. It does not adhere to the surface of the semiconductor wafer and cause a short circuit between wirings or other abnormalities. As a result, the quality of the manufactured semiconductor element can be maintained well.

Further, since the film-shaped diaphragm 200a is formed by extrusion molding using PFA as described above, dust generation of particles having a size of several nm can be suppressed to the minimum, and the flexibility is excellent and a long life is maintained. It can be formed as a possible diaphragm. Therefore, even if a diaphragm valve having such a diaphragm 200a is applied to a semiconductor manufacturing apparatus, the diaphragm 200a maintains a good bending operation for a long period of time. Therefore, the diaphragm valve is a diaphragm applied to the semiconductor manufacturing apparatus. As a valve, it can maintain good function for a long period of time.

(Second Embodiment)
FIG. 6 shows a main part of the second embodiment of the present invention. In the second embodiment, the diaphragm member formed by laser welding the reinforcing annular body 200b to the outer peripheral portion 210 of the diaphragm 200a from the upper surface side of the pneumatically operated diaphragm valve is the diaphragm described in the first embodiment. It is adopted instead of the member 200. The diaphragm member referred to in the second embodiment is also indicated by reference numeral 200 as in the first embodiment.

The diaphragm member 200 is composed of a diaphragm 200a, a reinforcing annular body 200b, and an auxiliary shaft 200c, as in the first embodiment. Also in the second embodiment, the auxiliary shaft 200c is laser-welded to the central portion 240 of the diaphragm 200a as in the first embodiment. Further, unlike the first embodiment, the reinforcing annular body 200b is laser-welded from the upper surface 230 side at the outer peripheral portion 210 of the diaphragm 200a.

Here, laser welding of the outer peripheral portion 210 of the diaphragm 200a formed by laser welding the auxiliary shaft 200c and the reinforcing annular body 200b is performed as follows, as in the first embodiment.

In the holding step S1a of the reinforcing ring body of FIG. 4, the reinforcing ring body 200b is held so as to be positioned horizontally on the upper surface thereof (see FIG. 7). Then, in the next diaphragm mounting step S2a, the diaphragm 200a is mounted on the reinforcing annular body 200b from above on the upper surface 230 thereof, unlike the first embodiment. At this time, the mounting is performed so that the outer peripheral portion 210 of the diaphragm 200a coaxially corresponds to the reinforcing annular body 200b.

After that, each process of the mounting step S3a of the annular pressing plate, the laser light irradiation step S5a, and the removing step S6a of the annular pressing plate is performed in the same manner as in the first embodiment. As a result, in a state where the reinforcing annular body 200b and the outer peripheral portion 210 of the diaphragm 200a are welded and cured to each other, an integral joint configuration is formed between the reinforcing annular body 200b and the outer peripheral portion of the diaphragm 200a by laser welding. NS.

As a result, with respect to laser welding between the reinforcing annular body 200b and the outer peripheral portion of the diaphragm 200a, the same action and effect as described in the first embodiment can be obtained while ensuring the convenience of the diaphragm 200a. It can also be achieved with the diaphragm member 200 of.

As described above, after the diaphragm member 200 according to the second embodiment is formed, the diaphragm member 200 is assembled to the lower housing member 100a as follows.

Here, in the bottom wall main body 110a of the lower housing member 100a described in the first embodiment, the upper wall portion 111 is added to the inner annular wall portion 111a and the outer annular wall portion 111b, and both inner annular walls. It is formed so as to have an intermediate side wall portion 111d between the portion 111a and the outer annular wall portion 111b.

Here, the inner side wall portion 111d is formed on the outer peripheral portion of the inner annular wall portion 111a, and the middle side wall portion 111d protrudes higher than the inner annular wall portion 111a. As a result, the bottom wall main body 111 is formed on the upper wall portion 111 so as to sequentially project upward in a stepwise manner over the inner annular wall portion 111a, the inner side wall portion 111d, and the outer annular wall portion 111b.

Thus, in the second embodiment, in the diaphragm member 200 configured as described above, the diaphragm 200a is fitted in the outer wall portion 211a with the reinforcing annular body 200b positioned on the upper side. Then, the outer peripheral portion 210 is seated on the inner side wall portion 111d. Along with this, the reinforcing annular body 200b is fitted into the outer annular wall portion 111b from the upper side of the diaphragm 200a.

Next, as shown in FIG. 6, the outer annular wall portion of the partition wall main body 120a so that the partition wall 120 faces the diaphragm 200a at the inner end opening portion of the communication passage 121 via the reinforcing annular body 200b. It is fitted to the inside of 111b and seated on the reinforcing annular body 200b, and is assembled to the bottom wall 110 so as to be seated on the outer annular wall portion 111b at the annular flange portion 120b. At this time, the auxiliary shaft 200c is coaxially and slidably fitted in the through hole portion 122 of the partition wall 120.

As described above, unlike the first embodiment, the diaphragm member 200 has a structure in which the reinforcing annular body 200b is laser-welded to the outer peripheral portion 210 of the diaphragm 200a from the upper surface side thereof, but the auxiliary shaft 200c is provided. , It is formed as a separate part from the piston shaft 320 of the drive mechanism 300. Therefore, also in the second embodiment, it goes without saying that according to the diaphragm member 200, components such as a partition wall 120 can be easily assembled between the drive mechanism 300 and the diaphragm 200a in the housing 100. , The convenience that the diaphragm member 200 can be used in a diaphragm valve having various specifications can be ensured.

Then, the piston shaft 320 is coaxially fastened into the female screw hole portion 260 of the auxiliary shaft 200c while being fitted into the through hole portion 122 of the partition wall 120 via the O-ring 321 at the axial male screw portion 320b. NS. As described above, as described in the first embodiment, even if the diaphragm 200a does not have a connecting portion required for connecting to the piston shaft 320 at its central portion, the inside of the female screw hole portion 260 of the auxiliary shaft 200c By fastening the axial male screw portion 320b of the piston shaft 320 to the diaphragm 200a, the diaphragm 200a and the piston shaft 320 can be easily connected. Other configurations and effects are the same as those in the first embodiment.

(Third Embodiment)
FIG. 8 shows a third embodiment of a diaphragm valve to which the present invention is applied. In the third embodiment, as the diaphragm valve, an electromagnetically actuated diaphragm valve is adopted, unlike the air-operated diaphragm valve described in the first embodiment.

As shown in FIG. 8, the solenoid-operated diaphragm valve includes a cylindrical housing, a diaphragm member 200 described in the first embodiment, and an electromagnetically actuated drive mechanism 400, and is a normally closed type electromagnetic valve. It is configured as an actuated solenoid valve. In the third embodiment, the cylindrical housing is indicated by reference numeral 100 as in the first embodiment. Further, the electromagnetically actuated drive mechanism 400 is also hereinafter referred to as a drive mechanism 400.

The cylindrical housing 100 referred to in the third embodiment is composed of a lower housing member 100c and an upper housing member 100d. As shown in FIG. 8, the lower housing member 100c is composed of the bottom wall 110 and the partition wall 150 described in the first embodiment.

As shown in FIG. 8, the partition wall 150 has a partition wall main body 150a and an annular flange portion 150b, and the partition wall main body 150a has an outer annular wall of the upper wall portion 111 of the bottom wall main body 110a at its lower wall portion. It is fitted in the portion 111b and is seated on the inner annular wall portion 111a via the diaphragm 200a of the diaphragm member 200 and the reinforcing annular body 200b.

Further, the annular flange 150b is formed so as to annularly project outward along the radial direction from a portion of the outer peripheral portion of the partition wall main body 150a excluding the lower portion, and the annular flange 150b is formed so as to project from the outer peripheral portion of the partition wall main body 150a in an annular shape. It is coaxially seated on the outer annular wall portion 111b of the upper wall portion 111. In this way, the partition wall 150 is coaxially assembled to the bottom wall main body 110a from above via the diaphragm 200a and the reinforcing annular body 200b.

The upper housing member 100d is formed in a rectangular cross section like the upper housing member 100b described in the first embodiment, and the upper housing member 100d has a peripheral wall 170 and an upper wall 180. It is integrally formed of a magnetic material (for example, iron).

The peripheral wall 170 extends downward from the upper wall 180 in a cylindrical shape, and the peripheral wall 170 extends above the partition wall 150 together with the annular flange portion 160b (described later) of the guide member 160 at the extension end opening. It is assembled coaxially with.

The guide member 160 plays a role of guiding the plunger 400b (described later) in the axial direction thereof, and the guide member 160 is formed so as to integrally have the cylindrical portion 160a and the annular flange portion 160b. .. The annular flange portion 160b extends radially from the lower end of the cylindrical portion 160a so as to be parallel to the upper wall 180 so that the circular head 160a is coaxially positioned within the peripheral wall 170. The annular flange portion 160b is fixed to the outer peripheral portion of the annular flange portion 160b by caulking in the extension end opening of the peripheral wall 170. The cylindrical portion 160a extends coaxially from the inner peripheral portion of the annular flange portion 160b into the peripheral wall 170.

The diaphragm member 200 has the same configuration as the diaphragm member described in the first embodiment, and in the diaphragm member 200, the diaphragm 200a together with the reinforcing annular body 200b is the upper wall portion of the bottom wall main body 110a. Of 111, it is fitted on the inner peripheral side of the outer annular wall portion 111b.

Along with this, the diaphragm 200a is seated on the inner annular wall portion 111a of the upper wall portion 111 via the reinforcing annular body 200b, and the diaphragm 200a is inner annular on the inner peripheral side of the outer annular wall portion 111b. The wall portion 111a and the partition wall main body 150a are partitioned into the liquid chamber Ra and the air chamber Rb described in the first embodiment.

The auxiliary shaft 200c is slidably fitted in the through hole portion 151 formed coaxially with the central portion of the partition wall main body 150a. The above-mentioned air chamber Rb may be opened to the outside through the partition wall 150 inside the air chamber Rb, and the inside of the upper housing member 100d is passed between the through hole portion 151 of the partition wall body 150a and the auxiliary shaft 200c. You may try to communicate with.

The drive mechanism 400 includes a coil member 400a, a plunger 400b, a coil spring 400c, and a cylindrical stopper member 400d. The coil member 400a is coaxially fitted in the peripheral wall 170 of the upper housing member 100d. The coil member 400a has a cylindrical bobbin 410 and a solenoid 420. The tubular bobbin 410 is composed of a tubular portion 411 and upper and lower annular wall portions 412 and 413 extending outward in the radial direction from both ends in the axial direction of the tubular portion 411. The solenoid 420 is wound around the tubular portion 411 between the upper and lower annular wall portions 412 and 413.

The coil member 400a configured in this way is housed in the peripheral wall 170 at the tubular portion 411 of the tubular bobbin 410 so as to be fitted to the cylindrical portion 160a of the guide member 160 and the cylindrical stopper member 400d. ing. The solenoid 420 is connected to a power supply line H of a power source (not shown) at its upper end terminal via an upper annular wall portion 412 of the cylindrical bobbin 410.

Thus, in the coil member 400a configured in this way, when the solenoid 420 receives power from the power supply via the feeder line H and is excited, the solenoid 420 generates a magnetic attraction force. Further, when the solenoid 420 is shut off from the power source, the solenoid 420 is degaussed to stop the generation of magnetic attraction.

The plunger 400b is made of a magnetic material, and the plunger 400b is composed of a cylindrical plunger main body 430 and a male screw shaft portion 440. The plunger main body 430 is a cylindrical portion of a guide member 160. It is coaxially and slidably fitted in 160a. The male screw shaft portion 440 extends coaxially downward from the lower end portion of the plunger main body 430, and the male screw shaft portion 440 is fastened into the female screw hole portion 260 of the auxiliary shaft 200c.

The coil spring 400c is inserted into the insertion hole portion 431 formed coaxially from the upper end portion of the plunger main body portion 430 of the plunger 400b. Further, the stopper member 400d is coaxially fixed to the central portion of the upper wall 180 in the upper housing member 100d, and the cylindrical portion 160a of the guide member 160, the plunger main body portion 430 of the plunger 400b, and the coil spring 400c. It extends toward.

As a result, the coil spring 400c is sandwiched between the central portion of the extension end of the stopper member 400d and the bottom portion of the insertion hole portion 431 of the plunger main body 430, and the plunger 400b is attached toward the auxiliary shaft 200c. Momentum.

Then, in the drive mechanism 400, when the solenoid 420 generates a magnetic attraction force, the plunger-400b moves to the stopper member 400d side based on the magnetic attraction force against the urging force of the coil spring 400c. It is sucked and slides along the cylindrical portion 160a of the guide member 160 toward the extending end portion of the stopper member 400d, and the diaphragm 200a is separated from the annular valve seat portion 111c by the male screw shaft portion 440 via the auxiliary shaft 200c. Displace it in a curved shape.

On the other hand, when the generation of the magnetic attraction force of the solenoid 420 is stopped, the plunger 400b slides toward the partition wall 150 side under the urging force of the coil spring 400c, and the auxiliary shaft 200c is provided by the male screw shaft portion 440. The diaphragm 200a is displaced in a curved shape so as to be seated on the annular valve seat portion 111c. Other configurations are the same as those in the first embodiment.

In the third embodiment configured as described above, the electromagnetically actuated diaphragm valve is adopted as a diaphragm valve in place of the air-operated diaphragm valve described in the first embodiment.

According to this, the electromagnetically actuated diaphragm valve referred to in the third embodiment is an upper housing different from the upper housing member 100b and the air actuated drive mechanism 300 of the pneumatically actuated diaphragm valve described in the first embodiment. By having the member 100d and the electromagnetically actuated drive mechanism 400, the axial male screw portion 440 of the plunger 400b is fastened to the female screw hole portion 260 of the auxiliary shaft 200c, but the diaphragm member 200 and the lower housing member 100a are It is substantially the same as the first embodiment, except that the partition wall has a slightly different configuration.

Therefore, also in the third embodiment, since the central portion 240 of the diaphragm 200a has been laser-welded to the auxiliary shaft 200c as described above, the axial male screw portion 440 of the plunger 400b and the female screw hole portion 260 of the auxiliary shaft 200c are used. The plunger 400b, the diaphragm 200a and the auxiliary shaft 200c can be easily connected by fastening to.

Further, in the third embodiment, when the electromagnetically actuated diaphragm valve is interposed in the piping system of the semiconductor manufacturing apparatus instead of the air actuated diaphragm valve described in the first embodiment, the diaphragm member In the third embodiment, the operation of the diaphragm 200a and the auxiliary shaft 200c of the 200 is performed not by the operation of the piston 310 by the compressed air in the first embodiment, but by the operation of the plunger 400b by the magnetic attraction force. The opening / closing operation of the diaphragm valve and the configuration of the diaphragm member 200 are the same as those in the first embodiment, and the same effects as those in the first embodiment can be achieved.

(Fourth Embodiment)
FIG. 9 shows a fourth embodiment of the present invention. In the fourth embodiment, the electromagnetically actuated diaphragm valve employs the diaphragm member 200 (see FIGS. 6 and 7) and the lower housing member 100a described in the second embodiment, and the second embodiment. Instead of the upper housing member 100b and the air-operated drive mechanism 300 described above, the upper housing member 100d and the electromagnetically actuated drive mechanism 400 described in the third embodiment are used.

Here, the auxiliary shaft 200c is slidably fitted in the through hole portion 151 of the partition wall 150 through the reinforcing annular body 200b, and the plunger 400b is fitted in the female screw hole portion 260 of the auxiliary shaft 200c. The male screw shaft portion 440 of the above is tightened. In the fourth embodiment, the auxiliary shaft 200c and the shaft-shaped male screw portion 440 have a longer shaft length than the auxiliary shaft 200c and the shaft-shaped male screw portion 440 referred to in the third embodiment, whereby the reinforcing annular body is formed. It extends within 200b. Other configurations are the same as those in the second embodiment.

In the fourth embodiment configured as described above, the electromagnetically actuated diaphragm valve is adopted as a diaphragm valve in place of the air-operated diaphragm valve described in the second embodiment.

According to this, the electromagnetically actuated diaphragm valve referred to in the fourth embodiment is an upper housing different from the upper housing member 100b and the air actuated drive mechanism 300 of the pneumatically actuated diaphragm valve described in the second embodiment. By having the member 100d and the electromagnetically actuated drive mechanism 400, the axial male screw portion 440 of the plunger 400b is fastened to the central portion 240 of the diaphragm 200a via the reinforcing annular body 200b, but the diaphragm member 200 and the lower side thereof. The housing member 100a is substantially the same as the second embodiment except that the partition wall has a slightly different configuration.

Therefore, also in the fourth embodiment, since the central portion 240 of the diaphragm 200a has been laser-welded to the auxiliary shaft 200c as described above, the axial male screw portion 440 of the plunger 400b and the female screw hole portion 260 of the auxiliary shaft 200c are used. The plunger 400b, the diaphragm 200a and the auxiliary shaft 200c can be easily connected by fastening to.

Further, in the fourth embodiment, when the electromagnetically actuated diaphragm valve is interposed in the piping system of the semiconductor manufacturing apparatus instead of the air actuated diaphragm valve described in the second embodiment, the diaphragm member In the fourth embodiment, the operation of the diaphragm 200a and the auxiliary shaft 200c of the 200 is not the operation of the piston 310 by the compressed air in the second embodiment, but the plunger by the magnetic attraction force as in the third embodiment. Although it is performed by the operation of 400b, the opening / closing operation as the diaphragm valve and the configuration of the diaphragm member 200 are the same as those in the second embodiment, and the same effects as those in the second embodiment can be achieved.

In carrying out the present invention, the following various modifications are given without being limited to each of the above embodiments.

(1) In carrying out the present invention, the diaphragm 200a described in the above embodiment is not limited to a diaphragm formed by extruding PFA into a film by extrusion molding, but the PFA is formed into a film by a compression molding method. It may be a diaphragm formed by compression molding.

The compression molding method refers to a method in which PFA is filled in a mold and compressed into a film, and has chemical resistance, low elution, flexibility and length as in the case of molding the diaphragm 200a by the extrusion molding method. It is a film-like diaphragm having excellent life and high smoothness, and can be formed as a diaphragm capable of suppressing the dust generation property of particles having a size of several nm to the minimum. Also by this, the same action and effect as those of the above embodiment can be achieved.

(2) In carrying out the present invention, in the drive mechanism 300 described in the first or second embodiment, in FIG. 1 or FIG. 6, the coil spring 330 is placed in the lower chamber 131b, unlike the above embodiment. The piston 310 may be configured to be urged in the direction opposite to that of the partition wall 120. This means that the diaphragm valve functions as a normally open diaphragm valve.

As described above, even if the diaphragm valve described in the first or second embodiment operates as a normally open diaphragm valve, the operation is substantially the same as that in the first or second embodiment. The effect can be achieved.

(3) In carrying out the present invention, in the drive mechanism 400 described in the third or fourth embodiment, the coil spring 400c is referred to as the third or fourth embodiment in FIG. 8 or 9. Differently, the plunger 400b may be provided so as to urge the stopper member 400d. This means that the electromagnetically actuated diaphragm valve functions as a normally open diaphragm valve.

As described above, even if the electromagnetically actuated diaphragm valve described in the third or fourth embodiment operates as a normally open diaphragm valve, it is substantially the same as the third or fourth embodiment. Similar effects can be achieved.

(4) Further, in carrying out the present invention, the reinforcing ring body 200b may be abolished if necessary. In this case, the outer peripheral portion 210 of the diaphragm 200a is sandwiched between the outer peripheral portion of the partition wall main body 120a of the partition wall 120 and the inner annular wall portion 111a of the bottom wall main body 110a so as to be satisfactorily sealed.

(5) In carrying out the present invention, the piston shaft 320 described in the first embodiment has a female screw hole portion coaxially with the shaft main body portion 320a from the extending end portion side instead of the shaft-shaped male screw portion 320b. On the other hand, the auxiliary shaft 200c may be formed so that the axial male screw portion coaxially extends from the extending end portion thereof, thereby eliminating the female screw hole portion 260. In this case, the auxiliary shaft 200c is coaxially fastened to the female screw hole portion of the shaft body portion 320a of the piston shaft 320 by its axial male screw portion.

(6) Further, in carrying out the present invention, the plunger 400b described in the third or fourth embodiment is placed on the plunger main body 430 on the extension end side instead of the axial male screw portion 440. The female screw hole portion is formed coaxially from the above, while the auxiliary shaft 200c is formed so that the axial male screw portion extends coaxially from the extending end portion, thereby eliminating the female screw hole portion 260. May be good. In this case, the auxiliary shaft 200c is coaxially fastened to the female screw hole portion of the plunger 400b at its axial male screw portion.

(7) In carrying out the present invention, instead of the pressing plate Q, a ring-shaped pressing plate that plays the same role as the pressing plate Q may be adopted, and generally, the same as the pressing plate Q. It may be a holding member having a function.

100 ... Housing, 100a, 100c ... Lower housing member,
100b, 100d ... upper housing member, 110 ... bottom wall,
112, 113 ... Continuous passage part, 110b ... Inflow cylinder, 110c ... Outflow cylinder,
111c ... annular valve seat, 120, 150 ... partition wall, 130 ... tubular peripheral wall,
131a ... upper chamber, 131b ... lower chamber, 140 ... upper wall,
200 ... Diaphragm member, 200a ... Diaphragm,
200b ... Reinforcing ring body, 200c ... Auxiliary shaft, 300 ... Pneumatically operated drive mechanism,
310 ... Piston, 320 ... Piston shaft, 330, 400c ... Coil spring,
400 ... Electromagnetically actuated diaphragm valve, 400b ... Plunger, Ra ... Liquid chamber,
Rb ... air chamber, Q ... holding plate, Q1 ... annular holding plate.

Claims (6)

High purity chemical solution or ultrapure water liquid when opened by liquidity to the outflow side from the inflow side, and in the diaphragm valve for blocking the flow of the liquid when closed,
A housing having a cylindrical peripheral wall and both opposing walls formed on the cylindrical peripheral wall so as to close the openings at both ends in the axial direction so as to face each other.
A partition wall provided at an axially intermediate portion of the cylindrical peripheral wall and partitioning a hollow portion of the tubular peripheral wall between one facing wall and the other facing wall of both facing walls.
A driving means assembled between the one facing wall and the partition wall in the hollow portion of the cylindrical peripheral wall.
A PFA film diaphragm provided in the housing to partition the inside of the housing so as to form a liquid chamber between the housing and the other facing wall and an air chamber between the housing and the partition wall. in central該Da Iyafuramu are coaxially laser weld is composed of both the full fluororesin-made auxiliary shaft extending from the central portion, in the axial direction on the partition wall at the auxiliary shaft and a da Iyafuramu member which is fitted so as to be slidable in the formed comprising a through bore within,
The drive means integrally connects a drive shaft coaxially connected to the extending end of the auxiliary shaft so as to be axially movable toward the air chamber or in the opposite direction together with the auxiliary shaft of the diaphragm member. It is provided as a target
The housing is an annular valve seat portion that faces the central portion of the diaphragm in the liquid chamber and forms a valve portion together with the central portion, and the liquid is brought into the liquid chamber from the inflow side via the annular valve seat portion. An inflow path for flowing into the liquid chamber and an outflow path for allowing the liquid in the liquid chamber to flow out to the outflow side are provided on the other facing wall.
The diaphragm member is interlocked with the auxiliary shaft as the drive shaft moves toward the other facing wall side. When the central portion of the diaphragm is seated on the annular valve seat portion, the valve portion is closed, and the diaphragm member is moved to the one facing wall side of the drive shaft by the auxiliary shaft. A diaphragm valve characterized in that the valve portion is opened when the annular valve seat portion is separated from the annular valve seat portion at the central portion of the diaphragm in conjunction with the axial movement of the diaphragm. Before Symbol drive means,
The one side chamber and the other side chamber are slidably fitted between the one facing wall and the partition wall in the hollow portion of the cylindrical peripheral wall along the axial direction, and the one side chamber and the other side chamber are fitted on the one facing wall side and the partition wall. A piston that partitions the hollow portion of the cylindrical peripheral wall so as to be formed on the side,
The piston is provided with an urging means for urging the piston toward one of the other concubine and the one concubine.
The drive shaft is a piston shaft that extends integrally from the piston through the other side chamber and is coaxially connected to the extension end of the auxiliary shaft of the diaphragm member. Daiyafura arm valve according to 1. Before Symbol drive means,
A solenoid fitted in the hollow portion of the cylindrical peripheral wall along the axial direction between the one facing wall and the partition wall.
A plunger that is axially movablely inserted into the solenoid as the drive shaft and extends toward the partition wall side.
Provided with an urging means for urging the plunger toward or vice versa.
The plunger Daiyafura arm valve according to claim 1, in its extended end, characterized in that it is coaxially connected to the extending end portion of the auxiliary shaft of the diaphragm member. Before SL diaphragm member is any one of the preceding claims, characterized in that it comprises a fluorocarbon resin-made reinforcing annular member to be laser welded along the outer peripheral portion thereof on one side of both sides of the diaphragm Daiyafura arm valve according to One. The diaphragm valve according to any one of claims 1 to 4, wherein the diaphragm member is formed in a film shape by extruding or compression molding PFA with the diaphragm. Prior Symbol diaphragm member, wherein the auxiliary shaft has an outer diameter within the range of 4 (mm) or less in 1 (mm) or more, the diaphragm is 0.5 0.1 (mm) or more ( mm) The diaphragm valve according to claim 5, wherein the diaphragm valve has a thickness within the following range.

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