JP6939640B2 - 画像検査装置および画像検査方法 - Google Patents

画像検査装置および画像検査方法 Download PDF

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Publication number
JP6939640B2
JP6939640B2 JP2018030930A JP2018030930A JP6939640B2 JP 6939640 B2 JP6939640 B2 JP 6939640B2 JP 2018030930 A JP2018030930 A JP 2018030930A JP 2018030930 A JP2018030930 A JP 2018030930A JP 6939640 B2 JP6939640 B2 JP 6939640B2
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Japan
Prior art keywords
light emitting
light
unit
emitting position
image
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English (en)
Japanese (ja)
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JP2019144202A (ja
Inventor
加藤　豊
豊 加藤
伸悟 稲積
伸悟 稲積
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Omron Corp
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Omron Corp
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Priority to JP2018030930A priority Critical patent/JP6939640B2/ja
Priority to CN201910026835.7A priority patent/CN110186927B/zh
Priority to EP19151856.2A priority patent/EP3531115B1/en
Priority to US16/247,597 priority patent/US11536667B2/en
Publication of JP2019144202A publication Critical patent/JP2019144202A/ja
Priority to JP2021143272A priority patent/JP7176600B2/ja
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
    • G01B11/2513—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object with several lines being projected in more than one direction, e.g. grids, patterns
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
    • G01B11/2518—Projection by scanning of the object
    • G01B11/2527—Projection by scanning of the object with phase change by in-plane movement of the patern
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/47—Scattering, i.e. diffuse reflection
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/47—Scattering, i.e. diffuse reflection
    • G01N2021/4704—Angular selective
    • G01N2021/4711—Multiangle measurement
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
    • G01N2021/8887—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges based on image processing techniques

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Engineering & Computer Science (AREA)
  • Signal Processing (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP2018030930A 2018-02-23 2018-02-23 画像検査装置および画像検査方法 Active JP6939640B2 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2018030930A JP6939640B2 (ja) 2018-02-23 2018-02-23 画像検査装置および画像検査方法
CN201910026835.7A CN110186927B (zh) 2018-02-23 2019-01-11 图像检查装置以及图像检查方法
EP19151856.2A EP3531115B1 (en) 2018-02-23 2019-01-15 Image inspection apparatus and image inspection method
US16/247,597 US11536667B2 (en) 2018-02-23 2019-01-15 Image inspection apparatus and image inspection method
JP2021143272A JP7176600B2 (ja) 2018-02-23 2021-09-02 画像検査装置および画像検査方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2018030930A JP6939640B2 (ja) 2018-02-23 2018-02-23 画像検査装置および画像検査方法

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JP2021143272A Division JP7176600B2 (ja) 2018-02-23 2021-09-02 画像検査装置および画像検査方法

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JP2019144202A JP2019144202A (ja) 2019-08-29
JP6939640B2 true JP6939640B2 (ja) 2021-09-22

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JP2018030930A Active JP6939640B2 (ja) 2018-02-23 2018-02-23 画像検査装置および画像検査方法
JP2021143272A Active JP7176600B2 (ja) 2018-02-23 2021-09-02 画像検査装置および画像検査方法

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US (1) US11536667B2 (enExample)
EP (1) EP3531115B1 (enExample)
JP (2) JP6939640B2 (enExample)
CN (1) CN110186927B (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7665291B2 (ja) * 2020-03-30 2025-04-21 株式会社島津製作所 走査型プローブ顕微鏡および走査型プローブ顕微鏡における光軸調整方法
JP7392582B2 (ja) * 2020-06-12 2023-12-06 オムロン株式会社 検査システムおよび検査方法
CN115790402B (zh) * 2022-10-25 2023-07-21 北京泊菲莱科技有限公司 一种球型光源尺寸测量方法及装置

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6618123B2 (en) * 2000-10-20 2003-09-09 Matsushita Electric Industrial Co., Ltd. Range-finder, three-dimensional measuring method and light source apparatus
US7193697B2 (en) * 2005-07-25 2007-03-20 Chroma Ate Inc. Apparatus for feature detection
WO2007026690A1 (ja) * 2005-08-31 2007-03-08 Ccs Inc. 同軸光照射装置
JP2008185380A (ja) * 2007-01-29 2008-08-14 Nikon Corp 形状測定装置
JP2009164033A (ja) * 2008-01-09 2009-07-23 Konica Minolta Holdings Inc 有機エレクトロルミネッセンス素子の製造方法、有機エレクトロルミネッセンス素子、表示装置及び照明装置
JP5055191B2 (ja) * 2008-04-24 2012-10-24 パナソニック株式会社 ３次元形状計測方法および装置
JP2014096253A (ja) * 2012-11-08 2014-05-22 Yamagata Prefecture 透視性を有する面状光源及びそれを用いた撮像方法
US20150015701A1 (en) * 2013-07-10 2015-01-15 Faro Technologies, Inc. Triangulation scanner having motorized elements
DE102013111761B4 (de) 2013-10-25 2018-02-15 Gerhard Schubert Gmbh Verfahren und Scanner zum berührungslosen Ermitteln der Position und dreidimensionalen Form von Produkten auf einer laufenden Fläche
JP2015148583A (ja) * 2014-02-10 2015-08-20 稔 新村 パターン投影用発光装置
JP6424020B2 (ja) * 2014-06-09 2018-11-14 株式会社キーエンス 画像検査装置、画像検査方法、画像検査プログラム及びコンピュータで読み取り可能な記録媒体並びに記録した機器
JP5866586B1 (ja) 2015-09-22 2016-02-17 マシンビジョンライティング株式会社 検査用照明装置及び検査システム
KR102597579B1 (ko) * 2015-10-21 2023-11-01 프린스톤 옵트로닉스, 인크. 코딩된 패턴 투영기
WO2018168510A1 (ja) * 2017-03-17 2018-09-20 東レ株式会社 円筒体表面検査装置および円筒体表面検査方法
US10542245B2 (en) * 2017-05-24 2020-01-21 Lg Electronics Inc. Mobile terminal and method for controlling the same
US20180367722A1 (en) * 2017-06-14 2018-12-20 Canon Kabushiki Kaisha Image acquisition device and image acquisition method

Also Published As

Publication number Publication date
JP2019144202A (ja) 2019-08-29
US11536667B2 (en) 2022-12-27
JP2021183989A (ja) 2021-12-02
JP7176600B2 (ja) 2022-11-22
CN110186927A (zh) 2019-08-30
EP3531115A1 (en) 2019-08-28
CN110186927B (zh) 2022-03-04
US20190265170A1 (en) 2019-08-29
EP3531115B1 (en) 2023-07-05

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