JP6922955B2 - Polarizing microscope - Google Patents

Description

The present invention relates to a polarizing microscope including a polarizer and an analyzer.

Some optical microscopes for observing the surface of a sample function as a polarizing microscope by being provided with a polarizer and an analyzer (see, for example, Patent Document 1 below). In a polarizing microscope, visible light emitted from a visible light source is incident on a polarizer and is transmitted through the polarizer to generate linearly polarized light. Then, the sample is irradiated with linearly polarized light transmitted through the polarizer, and the light (transmitted light or reflected light) from the sample passes through the analyzer and is incident on the camera.

The polarizing microscope includes a rotation mechanism for rotating the analyzer and a slide mechanism for sliding the analyzer and the rotation mechanism. The detector is rotated by a rotation mechanism, so that the angle relative to the polarizer changes. As a result, among the light from the sample, the light transmitted through the analyzer and incident on the camera changes, and the polarized image can be observed by photographing the change with the camera.

On the other hand, when the detector and the rotating mechanism are slid by the slide mechanism and the detector is retracted from the optical path, the light from the sample directly enters the camera without passing through the detector. In this case, the optical image can be observed by photographing the visible light from the sample with a camera.

Japanese Unexamined Patent Publication No. 2012-211771

However, in the conventional polarizing microscope as described above, it is necessary to provide both a rotation mechanism and a slide mechanism. Therefore, in the case of electric power, a power source such as a motor must be provided for each of the rotation mechanism and the slide mechanism, and in the case of manual operation, a plurality of gripping portions for the operator to grip and operate must be provided. Must be. Therefore, there is a problem that the structure becomes complicated.

The present invention has been made in view of the above circumstances, and an object of the present invention is to provide a polarizing microscope having a simplified structure.

(1) The polarizing microscope according to the present invention includes a light source, a polarizer, an analyzer, and a moving mechanism. The light source irradiates the sample with light. The polarizer is arranged on the optical path from the light source to the sample, and transmits the light from the light source to generate linearly polarized light whose plane of polarization is along the first direction. The detector is arranged on the optical path of light after the sample is irradiated, and the plane of polarization transmits linearly polarized light along the second direction. By relatively moving the polarizer and the analyzer, the moving mechanism has an orthogonal state in which the first direction and the second direction are orthogonal to each other, and the first direction and the second direction. Can be transitioned between a parallel state in which is extended in parallel and a retracted state in which the polarizer or the analyzer is not present on the optical path.

According to such a configuration, it is possible to make a transition between the orthogonal state, the parallel state, and the retracted state by using one moving mechanism that moves the polarizer and the analyzer relatively. Therefore, it is not necessary to separately provide a mechanism for transitioning between the orthogonal state and the parallel state and a mechanism for transitioning to the retracted state, so that a polarizing microscope having a simplified structure can be provided.

(2) The moving mechanism may rotate the polarizer or the analyzer around the rotation axis.

According to such a configuration, it is possible to make a transition between the orthogonal state, the parallel state, and the retracted state by a simple mechanism that only adjusts the rotation angle of the polarizer or the analyzer.

(3) The rotation axis may pass through the center of gravity of the polarizer or the analyzer.

According to such a configuration, since the rotation axis of the rotatable polarizer or analyzer is not eccentric, it is possible to prevent the polarizer or analyzer from rotating due to gravity. Therefore, it is not necessary to provide a stopper or a brake for preventing the polarizer or the analyzer from rotating due to gravity, so that the structure can be further simplified.

(4) The polarizer or the detector transitions between the orthogonal state, the parallel state, and the retracted state by rotating at a rotation angle of 90 ° or more and less than 360 ° about the rotation axis. You may.

According to such a configuration, the transition between the orthogonal state, the parallel state, and the retracted state can be made only by adjusting the rotation angle of the polarizer or the analyzer in the range of 90 ° or more and less than 360 ° about the rotation axis. be able to. Since it is possible to make a transition between the orthogonal state and the parallel state at a rotation angle of 90 °, it is possible to make a transition to the retracted state by rotating the polarizer or the analyzer to a rotation angle higher than that.

(5) The polarizer or the analyzer has a shape having a notch in a part of a disk, and may be in the retracted state when the notch is located on an optical path.

According to such a configuration, it is possible to make a transition to the retracted state by using the notched portion by a simple configuration in which a polarizer or an analyzer is formed in a shape having a notch in a part of the disk. can.

(6) The light source may include a visible light source that irradiates the sample with visible light and an infrared light source that irradiates the sample with infrared light. In this case, the polarizer and the analyzer may be arranged on the optical path of visible light emitted from the visible light source.

According to such a configuration, when observing with visible light in an infrared microscope, simply moving the polarizer and the analyzer relatively using a moving mechanism is required to move between the orthogonal state, the parallel state, and the retracted state. It can be transitioned.

(7) The polarizer and the analyzer may be arranged on the optical path of infrared light emitted from the infrared light source.

According to such a configuration, when observing with infrared light in an infrared microscope, only the polarizer and the analyzer are relatively moved by using a moving mechanism, and the state is between the orthogonal state, the parallel state, and the retracted state. You can make a transition with.

According to the present invention, it is not necessary to separately provide a mechanism for transitioning between the orthogonal state and the parallel state and a mechanism for transitioning to the retracted state, so that a polarizing microscope having a simplified structure is provided. be able to.

It is the schematic which showed the structural example of the infrared microscope which functions as a polarizing microscope which concerns on one Embodiment of this invention. It is a schematic diagram for demonstrating the change of the direction of linearly polarized light when the detector is rotated. It is a schematic diagram for demonstrating the change of the direction of linearly polarized light when the detector is rotated. It is a schematic diagram for demonstrating the change of the direction of linearly polarized light when the detector is rotated. It is a figure which showed an example of the specific structure of an analyzer. It is a figure which showed other example of the specific structure of an analyzer.

1. 1. Configuration of Infrared Microscope FIG. 1 is a schematic view showing a configuration example of an infrared microscope 100 functioning as a polarizing microscope according to an embodiment of the present invention. The infrared microscope 100 can irradiate a sample with infrared light and visible light. The infrared microscope 100 includes a sample stage 1, an infrared light source 2, a visible light source 3, a detector 4, a camera 5, a beam splitter 6, a Cassegrain mirror 200, and the like.

A sample to be analyzed is placed on the sample stage 1. The sample stage 1 is configured to be movable in the horizontal direction (XY direction) and the vertical direction (Z direction), for example. In this embodiment, a pair of Cassegrain mirrors 200 are installed above and below the sample stage 1 with the sample stage 1 in between.

The Cassegrain mirror 200 (upper Cassegrain mirror 200A) installed above the sample stage 1 and the Cassegrain mirror 200 (lower Cassegrain mirror 200B) installed below the sample stage 1 have the same configuration. It has, but the direction in which it is installed is different. The upper Cassegrain mirror 200A and the lower Cassegrain mirror 200B are arranged coaxially so that their respective axes extend in the vertical direction.

The infrared light source 2 is composed of an FTIR (Fourier transform infrared spectrophotometer), and can generate an interference wave of infrared light by using a fixed mirror and a moving mirror (not shown). The infrared light emitted from the infrared light source 2 is irradiated onto the sample stage 1 via the Cassegrain mirror 200. When performing reflection measurement, infrared light emitted from the infrared light source 2 is sequentially reflected by the reflection mirrors 21, 22, 23, 24, 25, 26, 27, and then introduced into the upper Cassegrain mirror 200A from above. Will be done.

The reflection mirror 25 is composed of, for example, a parabolic mirror whose reflection surface is a parabolic surface, and infrared light incident on the reflection mirror 25 as parallel light is collected by being reflected by the reflection mirror 25. NS. As shown by the broken line in FIG. 1, the reflection mirror 25 can change the angle of the reflection surface by rotating. When the transmission measurement is performed, the angle of the reflection mirror 25 is changed so that the infrared light emitted from the infrared light source 2 is sequentially reflected by the reflection mirrors 21, 22, 23, 24, and then the reflection mirror 25. , 28, 29 are reflected in sequence, and are introduced into the lower Casegren mirror 200B from below.

The visible light source 3 emits visible light (for example, white) for observing the sample and irradiates the sample stage 1 through the Cassegrain mirror 200. The visible light emitted from the visible light source 3 is guided to the Cassegrain mirror 200 through an optical path that is mostly in common with the optical path of infrared light. The reflection mirror 24 is composed of, for example, a beam splitter, and visible light emitted from the visible light source 3 passes through the reflection mirror 24 and is guided on an optical path common to infrared light. The visible light transmitted through the reflection mirror 24 can be introduced from above into the upper casegren mirror 200A via the reflection mirrors 25, 26, and 27, and is reflected, similarly to the infrared light emitted from the infrared light source 2. It can also be introduced from below into the lower casegren mirror 200B via the mirrors 25, 28, 29.

The Cassegrain mirror 200 is provided with, for example, a primary mirror 201 and a secondary mirror 202. The primary mirror 201 has a reflecting surface formed of a spherical concave surface. On the other hand, the secondary mirror 202 has a reflecting surface formed of a spherical convex surface. The reflective surface of the secondary mirror 202 has a smaller diameter than the reflective surface of the primary mirror 201. The primary mirror 201 and the secondary mirror 202 are attached so that the centers of their respective reflecting surfaces are located on the same axis. More specifically, the reflecting surface of the secondary mirror 202 faces the reflecting surface of the primary mirror 201 at a distance.

Infrared light and visible light are reflected by the reflecting surface of the secondary mirror 202 and then reflected by the reflecting surface of the primary mirror 201. At this time, a part of the light reflected by the reflecting surface of the primary mirror 201 is shielded by the secondary mirror 202, but the other light is emitted from the side of the secondary mirror 202 and collected at the measurement position P. Be lit.

When the reflection measurement is performed, the infrared light and visible light introduced into the upper casegren mirror 200A are sequentially reflected by the secondary mirror 202 and the primary mirror 201, and then are sequentially reflected at the measurement position P on the sample stage 1 from above. It is focused. The reflected light from the sample placed at the measurement position P re-enters the upper Cassegrain mirror 200A, is sequentially reflected by the primary mirror 201 and the secondary mirror 202, and then is emitted upward from the upper Cassegrain mirror 200A.

On the other hand, when the transmission measurement is performed, the infrared light and visible light introduced into the lower casegren mirror 200B are sequentially reflected by the secondary mirror 202 and the primary mirror 201, and then at the measurement position P on the sample stage 1. It is focused from below. Then, the transmitted light from the sample placed at the measurement position P is incident on the upper Cassegrain mirror 200A. The light incident on the upper Cassegrain mirror 200A is sequentially reflected by the primary mirror 201 and the secondary mirror 202, and then emitted upward from the upper Cassegrain mirror 200A.

The light (reflected light or transmitted light) from the sample emitted upward from the upper Cassegrain mirror 200A is guided to the beam splitter 6. The beam splitter 6 transmits one of visible light and infrared light and reflects the other. In the present embodiment, a configuration in which the beam splitter 6 transmits visible light and reflects infrared light will be described, but the beam splitter 6 transmits infrared light and reflects visible light. You may.

The infrared light that is applied to the sample and is reflected or transmitted by the sample is reflected by the beam splitter 6 and then reflected by the reflection mirror 30 and incident on the detector 4. As a result, a detection signal is output from the detector 4, and reflection measurement or transmission measurement of the sample can be performed based on the detection signal. On the other hand, the visible light irradiated to the sample and reflected or transmitted by the sample is transmitted through the beam splitter 6 and then reflected by the reflection mirror 31 and incident on the camera 5. As a result, the image illuminated by visible light can be captured by the camera 5 and the image can be confirmed.

In the present embodiment, the polarizer 7 and the analyzer 8 are arranged on the optical path of visible light emitted from the visible light source 3. The polarizer 7 is arranged on the optical path from the visible light source 3 to the sample, and the analyzer 8 is arranged on the optical path of visible light after the sample is irradiated. Both the polarizer 7 and the analyzer 8 are arranged on the optical path of visible light only, and are arranged so as not to be located on the optical path of infrared light.

The polarizer 7 transmits visible light from the visible light source 3 to generate linearly polarized light whose plane of polarization is along the first direction. That is, of the visible light incident on the polarizer 7, only the light vibrating along the first direction passes through the polarizer 7 and irradiates the sample as linearly polarized light. The polarizer 7 is arranged so as to be orthogonal to the optical axis of the visible light from the visible light source 3. The linearly polarized light irradiated to the sample is reflected or transmitted by the sample, so that the vibration direction becomes irregular, and then it is incident on the analyzer 8.

The detector 8 transmits linearly polarized light whose plane of polarization is along the second direction. That is, of the reflected light or transmitted light from the sample, only the light vibrating along the second direction passes through the analyzer 8 and is incident on the camera 5 as linearly polarized light. The detector 8 is arranged so as to be orthogonal to the optical axis of the reflected light or the transmitted light from the sample.

In the present embodiment, the analyzer 8 is rotatably held around a rotation axis A orthogonal to the analyzer 8. The rotation axis A extends parallel to the optical axis of the reflected light or transmitted light from the sample incident on the analyzer 8. The detector 8 is rotationally driven around the rotation axis A by a rotation mechanism (movement mechanism) 9 including a drive source such as a motor.

By rotating the analyzer 8 around the rotation axis A using the rotation mechanism 9, the relative rotation angle of the analyzer 8 with respect to the polarizer 7 is changed, and the reflected light or transmission from the sample incident on the camera 5 is changed. The light can be changed. By changing the image captured by the camera 5 in this way, the polarization characteristics of the sample can be observed.

2. Rotational movement of the detector FIGS. 2A to 2C are schematic views for explaining a change in the direction of linearly polarized light when the detector 8 is rotated. In the present embodiment, the analyzer 8 is formed in a shape having a notch 82 in a part of the disk 81. The rotation axis A of the analyzer 8 is located at the center of, for example, a disk 81, and a notch 82 is formed in a portion of a certain angle range θ about the rotation axis A.

In this example, the angle range θ is 90 °, but the present invention is not limited to this. The angle range θ is preferably less than 180 °, more preferably 90 ° or more and less than 180 °. That is, the portion of the analyzer 8 excluding the notch 82 is preferably 180 ° or more and less than 360 ° with respect to the rotation axis A, and more preferably 180 ° or more and less than 270 °.

When the sample is not placed at the measurement position P, the light L incident on the analyzer 8 is linearly polarized light along the first direction D1. The passing position of the light L is located on the orbit of the analyzer 8 (disk 81) rotating about the rotation axis A, and also on the orbit of the notch 82. Therefore, by rotating the analyzer 8 around the rotation axis A, the second direction D2, which is the vibration direction of the light passing through the detector 8, can be changed relative to the first direction D1. At the same time, the light L can be in a state of passing through the notch 82.

The state of FIG. 2A is an orthogonal state in which the first direction D1 and the second direction D2 are orthogonal to each other. This state is called cross Nicol, and light L, which is linearly polarized light along the first direction D1, cannot pass through the analyzer 8. On the other hand, the state of FIG. 2B is a parallel state in which the first direction D1 and the second direction D2 extend in parallel. In this state, the light L, which is linearly polarized light along the first direction D1, can pass through the analyzer 8 as it is.

The state of FIG. 2C is a retracted state in which the detector 8 is not on the optical path of the light L. This state is called open Nicol, and the notch 82 is located on the optical path of the light L. Therefore, the light L, which is linearly polarized light along the first direction D1, passes through the notch 82 without passing through the analyzer 8.

As described above, in the present embodiment, by rotating the detector 8 around the rotation axis A, it is possible to make a transition between the orthogonal state, the parallel state, and the retracted state. In this example, by rotating the analyzer 8 clockwise by 90 ° from the orthogonal state of FIG. 2A, the angle between the first direction D1 and the second direction D2 is continuously changed, and the parallel state of FIG. 2B is obtained. Can be transitioned to. Further, by further rotating the detector 8 clockwise by 180 ° from the state shown in FIG. 2B, the state can be changed to the retracted state shown in FIG. 2C.

That is, in the present embodiment, by rotating the analyzer 8 at a rotation angle of 270 ° about the rotation axis L, it is possible to make a transition between the orthogonal state, the parallel state, and the retracted state. However, the rotation angle is not limited to 270 °, and can be any rotation angle that can be transitioned between the orthogonal state, the parallel state, and the retracted state. In this case, the rotation angle is preferably 90 ° or more and less than 360 °, and more preferably 180 ° or more and 270 ° or less.

3. 3. Specific Configuration Example of Analyzer FIG. 3A is a diagram showing an example of a specific configuration of the analyzer 8. In this example, the analyzer 8 is formed by forming the notch 82 with respect to the disk 81 in an angle range of 90 °. The detector 8 includes a main body 83 that transmits linearly polarized light along the second direction D2, and a holding portion 84 that holds the outer periphery of the main body 83.

The holding portion 84 has a configuration in which an outer frame 841 formed in a hollow circular shape and ribs 842 formed along the notch 82 are integrally formed. The holding portion 84 is formed of, for example, resin or metal. The holding portion 84 is a member having a thickness larger than that of the film-shaped main body 83, and the weight per unit area is heavier than that of the main body 83. Therefore, the center of gravity of the analyzer 8 is deviated from the center of the disk 81, and in the present embodiment, the rotation axis A is arranged so as to pass through the center of gravity of the analyzer 8.

FIG. 3B is a diagram showing another example of the specific configuration of the analyzer 8. In this example, the semicircular plate-shaped analyzer 8 is formed by forming the notch 82 with respect to the disk 81 in an angle range of 180 °. The detector 8 includes a main body 85 that transmits linearly polarized light along the second direction D2, and a holding portion 86 that holds the outer periphery of the main body 85.

The holding portion 86 is formed in a hollow semicircular shape. The holding portion 86 is formed of, for example, resin or metal. The holding portion 86 is a member having a thickness larger than that of the film-shaped main body 85, and the weight per unit area is heavier than that of the main body 85. Therefore, the center of gravity of the analyzer 8 is deviated from the center of the disk 81, and in the present embodiment, the rotation axis A is arranged so as to pass through the center of gravity of the analyzer 8.

4. Action Effect (1) In the present embodiment, as shown in FIGS. 2A to 2C, one moving mechanism (rotating mechanism 9) that relatively moves the polarizer 7 and the analyzer 8 is used, and the orthogonal state is parallel. It is possible to make a transition between the state and the retracted state. Therefore, it is not necessary to separately provide a mechanism for transitioning between the orthogonal state and the parallel state and a mechanism for transitioning to the retracted state, so that the infrared microscope 100 having a simplified structure can be provided. can.

(2) In particular, since the moving mechanism is composed of a rotating mechanism 9 that rotates and moves the detector 8 around the rotation axis A, it is a simple mechanism that only adjusts the rotation angle of the detector 8 and is orthogonal. Transitions can be made between states, parallel states and retracted states.

(3) Further, as illustrated in FIG. 3A or FIG. 3B, if the rotation axis A passes through the center of gravity of the analyzer 8, the rotation axis A of the analyzer 8 to be rotationally moved is biased. Since it is not minded, it is possible to prevent the detector 8 from rotating due to gravity. Therefore, it is not necessary to provide a stopper or a brake for preventing the detector 8 from rotating due to gravity, so that the structure can be further simplified. Such an effect becomes particularly remarkable when the rotation axis A extends in a direction intersecting the vertical direction (for example, in the horizontal direction).

(4) Further, in the present embodiment, only by adjusting the rotation angle of the analyzer 8 within a range of 90 ° or more and less than 360 ° (for example, 270 °) about the rotation axis A, the orthogonal state, the parallel state, and the retracted state can be obtained. You can make transitions between states. Since it is possible to make a transition between the orthogonal state and the parallel state at a rotation angle of 90 °, it is possible to make a transition to the retracted state by rotating the detector 8 to a rotation angle higher than that.

(5) Further, in the present embodiment, as illustrated in FIG. 3A or FIG. 3B, the analyzer 8 is formed in a shape having a notch 82 in a part of the disk 81 by a simple configuration. It is possible to make a transition to the retracted state by using the portion of the notch 82.

5. Modification Example (1) In the above embodiment, the configuration in which the analyzer 8 is arranged on the optical path of visible light emitted from the visible light source 3 has been described. In this case, when observing with visible light in the infrared microscope 100, the orthogonal state, the parallel state, and the retracted state are simply moved by using the moving mechanism (rotating mechanism 9) to relatively move the polarizer 7 and the analyzer 8. Can be transitioned between.

However, the configuration is not limited to such a configuration, and the detector 8 may be arranged on the optical path of the infrared light emitted from the infrared light source 2. In this case, when observing with infrared light in the infrared microscope 100, the transition between the orthogonal state, the parallel state, and the retracted state is performed only by relatively moving the polarizer and the analyzer using the moving mechanism. Can be done.

(2) In the above embodiment, a configuration in which the analyzer 8 is rotationally moved around the rotation axis A has been described. However, the configuration is not limited to such a configuration, and a configuration in which the polarizer 7 is rotationally moved around a rotation axis orthogonal to the polarizer 7 may be used. Further, if the structure is such that the polarizer 7 and the analyzer 8 are relatively moved, the configuration may be such that both the polarizer 7 and the analyzer 8 are rotationally moved, or the polarizer 7 and the detector 8 may be moved. At least one of the photons 8 may be moved in a mode other than rotation such as a slide.

(3) The moving mechanism for transitioning the polarizer 7 or the analyzer 8 between the orthogonal state, the parallel state, and the retracted state is not limited to a configuration including a drive source such as a motor like the rotating mechanism 9, but is a manual type. It may be. In this case, the moving mechanism may be provided with a lever for the operator to grasp and move the polarizer 7 or the analyzer 8.

(4) In the above embodiments, the case where the present invention is applied to the infrared microscope 100 has been described. However, the present invention is applicable not only to the infrared microscope 100 but also to a polarizing microscope not provided with the infrared light source 2.

1 Sample stage 2 Infrared light source 3 Visible light source 4 Detector 5 Camera 6 Beam splitter 7 Polarizer 8 Detector 9 Rotating mechanism 81 Disk 82 Notch 83 Main body 84 Holding part 85 Main body 86 Holding part 100 Infrared microscope

Claims (6)

A light source that irradiates the sample with light,
A polarizer that is arranged on the optical path from the light source to the sample and transmits the light from the light source to generate linearly polarized light whose plane of polarization is along the first direction.
An detector that is placed on the optical path of light after the sample is irradiated and whose plane of polarization transmits linearly polarized light along the second direction.
By rotating and moving only the detector among the polarizer and the analyzer around the rotation axis, an orthogonal state in which the first direction and the second direction are orthogonal to each other and the first direction And a moving mechanism capable of transitioning between a parallel state in which the second direction extends in parallel and a retracted state in which the detector is not present on the optical path .
The polarizing microscope has a shape having a notch in a part thereof, and is in the retracted state when the notch is located on an optical path. The polarizing microscope according to claim 1 , wherein the rotation axis passes through the center of gravity of the analyzer. The claim is characterized in that the detector makes a transition between the orthogonal state, the parallel state, and the retracted state by rotating at a rotation angle of 90 ° or more and less than 360 ° about the rotation axis. The polarizing microscope according to 1 or 2. The light source includes a visible light source that irradiates a sample with visible light and an infrared light source that irradiates an infrared light toward the sample.
The polarizing microscope according to any one of claims 1 to 3 , wherein the polarizing element and the analyzer are arranged on an optical path of visible light emitted from the visible light source. The light source includes a visible light source that irradiates a sample with visible light and an infrared light source that irradiates an infrared light toward the sample.
The polarizing microscope according to any one of claims 1 to 3 , wherein the polarizing element and the analyzer are arranged on an optical path of infrared light emitted from the infrared light source. A light source that irradiates the sample with light,
A polarizer that is arranged on the optical path from the light source to the sample and transmits the light from the light source to generate linearly polarized light whose plane of polarization is along the first direction.
An detector that is placed on the optical path of light after the sample is irradiated and whose plane of polarization transmits linearly polarized light along the second direction.
By relatively moving the polarizer and the analyzer, the orthogonal state in which the first direction and the second direction are orthogonal to each other and the parallel state in which the first direction and the second direction extend in parallel. It is provided with a moving mechanism capable of transitioning between a state and a retracted state in which the polarizer or the analyzer is not present on the optical path.
The polarizing microscope or the analyzer has a shape having a notch in a part of a disk, and is in the retracted state when the notch is located on an optical path.

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