JP6909276B2 - Floating unit - Google Patents

Description

The present invention relates to a floating unit, particularly when a shaft member or the like is inserted into a hole of a part in which a hole is formed, in order to reliably insert the shaft member into the hole of the part. The present invention relates to a floating unit capable of correcting the deviation between the shaft member and the central shaft of the shaft member.

Conventionally, a floating unit described in Patent Document 1 has been proposed as a floating unit that is attached between a hand of an industrial robot or the like and a chuck and for surely inserting a shaft member into a hole of a part.

The floating unit described in Patent Document 1 includes a tubular main body having a bottom plate portion. A center boss is arranged inside the main body. Further, a ball for movably supporting the center boss with respect to the bottom plate portion of the main body is included, and an annular retainer is arranged around the center boss in order to arrange the balls in a predetermined positional relationship. .. Then, a center spring as a first spring member that applies a force in a direction that holds the center boss in the central portion of the retainer, and a second spring that applies a force in a direction that holds the center boss in the central portion of the bottom plate portion of the main body. Includes disc spring as a member.

The floating unit described in Patent Document 1 is also used when inserting a component in the horizontal direction. At that time, the center boss tries to maintain the position near the center of the floating unit by the action of the first spring member and the second spring member.

Japanese Unexamined Patent Publication No. 2016-203274

However, in the floating unit described in Patent Document 1, the function of maintaining the position of the center boss depends on the elastic force of the first spring member and the second spring member, and the floating unit makes the shaft body horizontal. When used in the direction, it was inevitable that some misalignment would occur due to the weight of the parts and shaft members held by the floating unit and the weight of the center boss and the like.

In particular, when inserting a precise part, if the position deviation due to the floating unit is added to the positioning error by the robot hand, the position deviation between the hole of the part and the shaft member exceeds the range of correction by the floating unit. It could be a thing.

Therefore, a main object of the present invention is to provide a floating unit that is unlikely to be displaced due to the weight of the held parts and shaft members and the weight of the center boss or the like even when the shaft is used in the horizontal direction. be.

Floating unit,
A bottom block with a bottom and
The main block, which is placed on the bottom block and has a space inside,
The shaft body placed inside the main body block and
A top plate that is attached to the shaft on the opposite side of the bottom block so as to cover the end of the main block at a distance from the end of the main block.
Multiple balls placed inside the body block to movably support the shaft against the bottom block,
A ring-shaped ball retainer, which is placed inside the main body block and is placed around the shaft to place the balls in a predetermined positional relationship.
It is arranged in the bottom block and has a first space to which a gas having a predetermined pressure is supplied. By supplying a gas having a predetermined pressure to the first space, the top plate is center-locked. Applying force, top plate center lock part,
A direction in which the shaft body is held from the surroundings by being arranged in the main body block and having a second space to which a gas having a predetermined pressure is supplied, and by supplying a gas having a predetermined pressure to the second space. It is a floating unit that includes an air cushion part that applies force to the gas.

Also, the floating unit is
A bottom block with a bottom and
The main block, which is placed on the bottom block and has a space inside,
With the center boss placed inside the main block,
A top plate attached to the center boss on the opposite side of the bottom block so as to cover the end of the main block at a distance from the end of the main block.
A plurality of first and second balls and a third ball, which are arranged inside the main body block and movably support the center boss with respect to the bottom block.
A ring-shaped ball retainer that is placed inside the main body block and is placed around the center boss to place the first ball in a predetermined positional relationship.
A ring-shaped first slide retainer, which is arranged inside the main body block and is arranged around the center boss to arrange the second ball in a predetermined positional relationship.
A ring-shaped second slide retainer, which is arranged inside the main body block and is arranged around the center boss to arrange the third ball in a predetermined positional relationship.
A ring-shaped first ball slider, which is placed inside the main body block and is placed around the center boss to move the second ball in one direction.
A ring-shaped second that is placed inside the body block and is placed around the center boss to move the second ball in one direction and the third ball in the other direction orthogonal to one direction. With a ball slider
A ring-shaped third ball slider, which is placed inside the main body block and is placed around the center boss to move the third ball in the other direction.
By being arranged in the bottom block and having a first space to which compressed air which is a gas having a predetermined pressure is supplied, compressed air which is a gas having a predetermined pressure is supplied to the first space. The top plate center lock part that applies force in the direction of center locking the top plate,
By being arranged in the main body block and having a second space to which compressed air which is a gas having a predetermined pressure is supplied, and by supplying compressed air which is a gas having a predetermined pressure to the second space. Including the air cushion part that applies force in the direction to hold the center boss from the surroundings,
The floating unit is a floating unit configured so that the top plate can move in a direction orthogonal to the central axis CL.

The floating unit according to the present invention is
A bottom block with a bottom and
The main block, which is placed on the bottom block and has a space inside,
The holder placed inside the main block and
A second ball backing plate, a positioning pin, and a pin holder arranged on the lower surface of the holder.
A top plate that is attached to the holder on the opposite side of the bottom block so as to cover the end of the main block at a distance from the end of the main block.
A plurality of first balls, which are arranged inside the main body block and rotatably support the holder with respect to the bottom block, and
A ring-shaped first ball backing plate and a third ball backing plate, which are arranged inside the main body block and are arranged around the holder to support the first ball,
A ring-shaped first ball retainer and a second ball retainer, which are arranged inside the main body block and are arranged around the holder to arrange the first balls in a predetermined positional relationship.
By being arranged in the bottom block and having a first space to which compressed air which is a gas having a predetermined pressure is supplied, compressed air which is a gas having a predetermined pressure is supplied to the first space. The top plate center lock part that applies force in the direction of center locking the top plate,
By being arranged in the main body block and having a second space to which compressed air which is a gas having a predetermined pressure is supplied, compressed air which is a gas having a predetermined pressure is supplied to the second space. The floating unit includes an air cushion portion that applies a force in a direction of holding the holder from the surroundings, and the floating unit is a floating unit configured so that the top plate can rotate about the central axis CL.

Further, the floating unit according to the present invention is
The top plate center lock part is
An air supply port for the top plate center lock that communicates with the first space to which a gas having a predetermined pressure is supplied from the outside,
A lock cylinder that has an air supply port for the top plate center lock and forms the bottom surface,
With the lock piston placed on the lock cylinder,
The lock guide fitted inside the lock piston and
Includes a piston guide that is urged by a spring member onto the lock piston and is reciprocating towards the lock cylinder and top plate while sliding in contact with the lock piston.
The first space is preferably formed between the upper surface of the lock cylinder and the lower surface of the lock piston.

Further, the floating unit according to the present invention is
The air cushion part
An air cushion air supply port that communicates with a second space to which a gas having a predetermined pressure is supplied from the outside,
A main body having an air cushion air supply port, an air cushion air supply groove, and a guide pin recess that communicate with each other,
The guide pin housed in the guide pin recess of the main body,
Including the main body cover that covers the upper part of the main body
The second space is preferably formed in an air cushion air supply groove and a guide pin recess arranged between the outer peripheral surface of the main body and the inner peripheral surface of the main body cover.

Further, the floating unit according to the present invention is
With the floating unit described in any one of the above,
It is preferable to include a reciprocating drive block attached to the bottom surface of the floating unit so that the floating unit can be reciprocated in the axial direction thereof.

According to the present invention, even if the shaft is used in the horizontal direction, a floating unit that is unlikely to be displaced due to the weight of the held parts and shaft members and the weight of the center boss or the like can be obtained.

The above-mentioned object, other object, feature and advantage of the present invention will be further clarified from the description of the embodiment for carrying out the following invention with reference to the drawings.

1 (a) is a front view showing a floating unit according to the first embodiment of the present invention, FIG. 1 (b) is a plan view thereof, and FIG. 1 (c) is a bottom view thereof. FIG. 2A is a cross-sectional view showing the internal structure of the floating unit shown in FIG. FIG. 2B is an exploded cross-sectional view of FIG. 2A. FIG. 3 is a cross-sectional view showing the internal structure of the floating unit shown in FIG. FIG. 4 is a cross-sectional view showing the internal structure of the floating unit shown in FIG. 5 (a) is a plan view of the lock cylinder viewed from below, FIG. 5 (b) is a cross-sectional view taken along the line AA, and FIG. 5 (c) is a cross-sectional view taken along the line BB. (D) is a cross-sectional view taken along the line CC. FIG. 6A is a plan view of the lock piston as viewed from above, and FIG. 6B is a cross-sectional view thereof. FIG. 7A is a plan view of the lock guide viewed from above, and FIG. 7B is a cross-sectional view thereof. 8 (a) is a plan view of the piston guide viewed from below, FIG. 8 (b) is a cross-sectional view taken along the line AA, and FIG. 8 (c) is a cross-sectional view taken along the line BB. 9 (a) is a plan view of the main body viewed from below, FIG. 9 (b) is a cross-sectional view taken along the line AA, and FIG. 9 (c) is a cross-sectional view taken along the line BB. d) is a cross-sectional view taken along the line CC. FIG. 10 is a plan view of the main body as viewed from above. FIG. 11A is a front view of the guide pin, and FIG. 11B is a perspective perspective view from above for explaining a state in which the guide pin is attached to the main body. FIG. 12 is a cross-sectional view of the ball backing plate. FIG. 13 (a) is a plan view of the center boss viewed from above, and FIG. 13 (b) is a cross-sectional view thereof. FIG. 14A is a cross-sectional view of the center collar, and FIG. 14B is a plan view seen from above. FIG. 15 (a) is a plan view of the ball retainer viewed from below, and FIG. 15 (b) is a cross-sectional view thereof. 16 (a) is a plan view of the first ball slider viewed from below, FIG. 16 (b) is a cross-sectional view taken along the line AA, and FIG. 16 (c) is a cross-sectional view taken along the line BB. .. FIG. 17 (a) is a cross-sectional view of the first slide retainer, FIG. 17 (b) is a plan view seen from below, and FIG. 17 (c) shows the first slide retainer and the second (intermediate). It is a plan perspective view seen from the lower side for explaining the positional relationship with the lower surface of the ball slider. FIG. 18A is a plan view of the second (intermediate) ball slider viewed from below, FIG. 18B is a cross-sectional view taken along the line AA, and FIG. 18C is a cross-sectional view taken along the line BB. It is a figure. 19 (a) is a cross-sectional view of the second slide retainer, FIG. 19 (b) is a plan view seen from below, and FIG. 19 (c) shows the second slide retainer and the second (intermediate). It is a plan perspective view seen from the lower side for explaining the positional relationship with the upper surface of the ball slider. 20A (a) is a cross-sectional view of the third ball slider, and FIG. 20A (b) is a plan view seen from below. FIG. 20B is an explanatory diagram showing the relationship between the first ball slider, the second (intermediate) ball slider, the third ball slider, the second ball, and the third ball. 21 (a) is a plan view of the main body cover as viewed from above, FIG. 21 (b) is a cross-sectional view taken along the line AA, and FIG. 21 (c) is a cross-sectional view taken along the line BB. 22 (a) is a plan view of the top plate viewed from above, FIG. 22 (b) is a cross-sectional view thereof, and FIG. 22 (c) is a plan view of the top plate viewed from below. FIG. 23 is a cross-sectional view showing an internal structure when the top plate of the floating unit shown in FIG. 1 is eccentric. FIG. 24 is a cross-sectional view showing an internal structure when the floating unit shown in FIG. 1 is center-locked. FIG. 25 is a front view showing a floating unit according to a second embodiment of the present invention. FIG. 26 is a cross-sectional view showing the internal structure of the reciprocating drive block shown in FIG. 25. 27 (a) is a plan view of the flange viewed from below, FIG. 27 (b) is a cross-sectional view taken along the line AA, and FIG. 27 (c) is a cross-sectional view taken along the line BB. FIG. 28 (a) is a plan view of the Z-axis cylinder viewed from below, and FIG. 28 (b) is a cross-sectional view thereof. FIG. 29 (a) is a plan view of the Z-axis piston viewed from above, and FIG. 29 (b) is a cross-sectional view thereof. FIG. 30 is a cross-sectional view of the linear bush. FIG. 31 is a cross-sectional view of the linear shaft. FIG. 32 is a cross-sectional view of the spacer. FIG. 33 is a plan view of the connecting flange as viewed from below. FIG. 34 is a cross-sectional view showing an internal structure when the reciprocating drive block is driven. 35 (a) is a front view showing a floating unit according to a third embodiment of the present invention, FIG. 35 (b) is a plan view seen from above, and FIG. 35 (c) is a plan view from below. It is a plan view as seen. FIG. 36A is a cross-sectional view showing the internal structure of the floating unit shown in FIG. 35. 36B is an exploded cross-sectional view of FIG. 36A. FIG. 36C is a cross-sectional view showing an internal structure when the top plate of the floating unit shown in FIG. 35 is eccentric. FIG. 37 is a cross-sectional view showing the internal structure of the floating unit shown in FIG. 35. FIG. 38 is a cross-sectional view showing the internal structure of the floating unit shown in FIG. 35. 39 (a) is a plan view of the piston guide viewed from above, FIG. 39 (b) is a cross-sectional view thereof, and FIG. 39 (c) is a plan view of the piston guide viewed from below. FIG. 40 is a plan perspective view seen from above for explaining a state in which the guide pin is attached to the main body. FIG. 41 (a) is a plan view of the holder as viewed from above, and FIG. 41 (b) is a front view thereof. FIG. 42 (a) is a cross-sectional view of the second ball backing plate, and FIG. 42 (b) is a plan view seen from below. FIG. 43 is a front view of the positioning pin. FIG. 44 (a) is a cross-sectional view of the pin holder, and FIG. 44 (b) is a plan view seen from below. FIG. 45 (a) is a cross-sectional view of the ball retainer, and FIG. 45 (b) is a plan view seen from below. FIG. 46 is a cross-sectional view of the third ball backing plate. FIG. 47 is a front view showing a floating unit according to a fourth embodiment of the present invention. FIG. 48A is a plan view of the internal structure of the top plate with the Z-direction extrusion mechanism shown in FIG. 47 as viewed from below, and FIG. 48B is a direction including the extrusion air supply port of the Z-direction extrusion mechanism. 48 (c) is a cross-sectional view of the Z-direction extrusion mechanism in the direction including the air cushion air supply port. FIG. 49 (a) is a plan view of the flange viewed from below, FIG. 49 (b) is a cross-sectional view in the direction including the air supply port for extrusion, and FIG. 49 (c) is an air supply port for air cushion. It is a cross-sectional view of the direction including. FIG. 50 (a) is a plan view of the cylinder as viewed from below, and FIG. 50 (b) is a cross-sectional view thereof. FIG. 51 (a) is a plan view of the guide viewed from below, and FIG. 51 (b) is a cross-sectional view thereof. FIG. 52 (a) is a plan view of the piston viewed from below, and FIG. 52 (b) is a cross-sectional view thereof. FIG. 53 (a) is a plan view of the top plate viewed from below, and FIG. 53 (b) is a cross-sectional view thereof. 54 is a diagram for explaining the operation of the Z-direction extrusion mechanism, FIG. 54 (a) is a cross-sectional view in the direction including the extrusion air supply port, and FIG. 54 (b) is an air cushion air supply port. It is sectional drawing in the direction including. FIG. 55 is a front view showing a floating unit according to a fifth embodiment of the present invention. FIG. 56A is a plan view of the internal structure of the top plate with the top plate horizontal holding cushion mechanism shown in FIG. 55 as viewed from above, and FIG. 56B is an air supply for the air cushion of the top plate horizontal holding cushion mechanism. It is a cross-sectional view in the direction including the mouth, and FIG. 56 (c) is a cross-sectional view in another direction. 57 (a) is a plan view of the flange viewed from above, FIG. 57 (b) is a cross-sectional view taken along the line AA, and FIG. 57 (c) is a cross-sectional view taken along the line BB, FIG. 57 (d). ) Is a plan view of the flange as viewed from below. FIG. 58 (a) is a plan view of the main body viewed from above, FIG. 58 (b) is a cross-sectional view taken along the line AA, and FIG. 58 (c) is a cross-sectional view taken along the line BB. FIG. 59 is a front view of the piston. FIG. 60 (a) is a plan view of the rotating ball receiver viewed from above, and FIG. 60 (b) is a cross-sectional view thereof. FIG. 61 (a) is a plan view of the rotating sphere seen from above, and FIG. 61 (b) is a cross-sectional view thereof. FIG. 62 (a) is a plan view of the lid viewed from above, and FIG. 62 (b) is a cross-sectional view thereof. FIG. 63 (a) is a plan view of the top plate viewed from above, FIG. 63 (b) is a cross-sectional view thereof, and FIG. 63 (c) is a plan view of the top plate viewed from below. FIG. 64 (a) is a plan view of the piston receiver viewed from below, and FIG. 64 (b) is a cross-sectional view thereof. FIG. 65 is a view for explaining the operation of the top plate horizontal holding cushion mechanism, and FIG. 65 (a) is a front view of the top plate with the top plate horizontal holding cushion mechanism when directed in the horizontal direction. 65 (b) is a cross-sectional view thereof. FIG. 66 is a right side view showing a floating unit according to a sixth embodiment of the present invention. FIG. 67 is a cross-sectional view showing the internal structure of the floating unit shown in FIG. 66 in the Z direction. FIG. 68 is a cross-sectional view showing the internal structure of the floating unit shown in FIG. 66 in the Z direction. FIG. 69 is a cross-sectional view showing the internal structure of the floating unit shown in FIG. 66 in the XY directions. 70 (a) is a plan view of the main body viewed from below, FIG. 70 (b) is a cross-sectional view taken along the line AA, and FIG. 70 (c) is a cross-sectional view taken along the line BB. 71 (a) is a plan view of the turntable as viewed from above, FIG. 71 (b) is a cross-sectional view taken along the line AA, and FIG. 71 (c) is a right side view. 72 (a) is a front view of the bearing pin holder, and FIG. 72 (b) is a cross-sectional view taken along the line AA. FIG. 73 is a cross-sectional view of the bearing pin. FIG. 74 (a) is a plan view seen from the lower side of the rotation weight, and FIG. 74 (b) is a cross-sectional view taken along the line AA. FIG. 75 (a) is a plan view of the bearing backing plate, and FIG. 75 (b) is a right side view thereof.

1. 1. First Embodiment The floating unit according to the first embodiment of the present invention will be described. 1 (a) is a front view showing a floating unit according to the first embodiment, FIG. 1 (b) is a plan view thereof, and FIG. 1 (c) is a bottom view thereof. 2A, 3 and 4, respectively, are cross-sectional views showing the internal structure of the floating unit shown in FIG. 1, and FIG. 2B is an exploded cross-sectional view of FIG. 2A.

The floating unit 10 includes a bottom block 2 including a lock cylinder 20 and a piston guide 26, a main body block 4 including a main body 30 and a main body cover 60, and a top plate 70. In the floating unit 10, the lock cylinder 20 side (also referred to as the lower side) is connected to the robot hand, and the top plate 70 side (also referred to as the upper side) is connected to the chuck.

In the description of the present invention, the left-right direction of FIG. 1A is the X direction, and the front and back directions orthogonal to the X direction are the Y direction. The direction in which the lock cylinder 20 and the top plate 90 orthogonal to the X and Y directions face each other is defined as the axial direction (also referred to as the Z direction). The line CL passing through the center of the floating unit 10 is also referred to as a center line or an axis.

As shown in FIGS. 1 to 4, the floating unit 10 is arranged inside the bottom block 2 having a bottom surface, the main body block 4 having an internal space arranged on the bottom block 2, and the main body block 4. A top plate attached to the center boss 36 so as to cover the end of the main body block 4 at a distance from the end of the main body block 4 on the opposite side of the bottom block 2 and the center boss (also referred to as a shaft body) 36. 70, and a plurality of first balls 43, second balls 47, and third balls 51, which are arranged inside the main body block 4 and movably support the center boss 36 with respect to the bottom block 2. A ring-shaped ball retainer 42 arranged inside the main body block 4 and arranged around the center boss 36 in order to arrange the first ball 43 in a predetermined positional relationship, and a second ball 47 at a predetermined position. A ring-shaped first slide retainer 46 arranged around the center boss 36 to be arranged in a relationship and a third ball 51 are arranged around the center boss 36 to be arranged in a predetermined positional relationship. A ring-shaped second slide retainer 50, a ring-shaped first ball slider 44 arranged around the center boss 36 for moving the second ball 47 in the Y direction, and a second ball 47. A ring-shaped second (intermediate) ball slider 48 arranged around the center boss 36 to move the third ball 51 in the Y direction and the third ball 51 in the X direction, and the third ball 51 in the X direction. A ring-shaped third ball slider 52 arranged around the center boss 36 and a first space arranged in the bottom block 2 to which compressed air, which is a gas having a predetermined pressure, is supplied. The top plate center lock portion 3 and the main body, which have S1 and apply a force in the direction of center-locking the top plate 70 by supplying compressed air which is a gas having a predetermined pressure to the first space S1. Having a second space S2 arranged in the block 4 to which compressed air, which is a gas having a predetermined pressure, is supplied, and compressed air, which is a gas having a predetermined pressure, is supplied to the second space S2. The floating unit 10 includes an air cushion portion 5 that applies a force in a direction of holding the center boss 36 from the surroundings, and the floating unit 10 is configured so that the top plate 70 can move in a direction orthogonal to the central axis CL. ing.

The bottom block 2 is arranged on the lock cylinder 20 forming the bottom surface and the lock cylinder 20, and is urged by the spring member 229 to reciprocate the lock piston 22 toward the lock cylinder 20 and the top plate 70. A lock guide 24 fitted inside the lock piston 22 and a piston guide 26 arranged on the lock piston 22 and in sliding contact with the lock piston 22 are included.

The top plate center lock portion 3 arranged on the bottom block 2 is a first space to which air having a predetermined pressure (typical value is 0.5 MPa, in other words, 5.8 kgf in terms of thrust) is supplied from the outside. A lock cylinder 20 having a top plate center lock air supply port 206 communicating with S1 and a top plate center lock air supply port 206 forming a bottom surface, and a spring member 229 arranged on the lock cylinder 20. A lock piston 22 that is urged and reciprocates toward the lock cylinder 20 and the top plate 70, a lock guide 24 fitted inside the lock piston 22, and a lock piston arranged on the lock piston 22. A first space S1 is formed between the upper surface of the lock cylinder 20 and the lower surface of the lock piston 22, including the piston guide 26 that is in sliding contact with the 22.

The "predetermined pressure" of the air supplied to the top plate center lock portion 3 is an air pressure having a thrust that can move the lock piston 22 toward the top plate 70 against the elastic force of the spring member 229. means.

The main body block 4 includes a main body 30, a guide pin 32 housed in the main body 30, and a main body cover 60 that covers the upper part of the main body 30.

The air cushion portion 5 arranged in the main body block 4 is provided with air having a predetermined pressure (representative pressure range is 0.3 MPa to 0.6 MPa, in other words, 3.5 kgf to 7.0 kgf) from the outside. A main body having an air cushion air supply port 608 communicating with the second space S2 to be supplied, an air cushion air supply port 608 communicating with each other, an air cushion air supply groove 318, and a guide pin recess 314. The second space S2 includes the air 30, the guide pin 32 housed in the guide pin recess 314 of the main body 30, and the main body cover 60 that covers the upper part of the main body 30, and the second space S2 is the air cushion air supply groove 318 of the main body 30. It is formed between the guide pin recess 314 and the inner peripheral surface of the main body cover 60.

The "predetermined pressure" of the air supplied to the air cushion portion 5 means an air pressure having a thrust that does not cause misalignment against the weight of the held parts and shaft members and the own weight of the center boss 36 and the like. do.

The bottom block 2 includes a lock cylinder 20, a lock piston 22, a lock guide 24, and a piston guide 26, as shown in FIGS. 2A to 4.
The main body block 4 includes a main body 30, a main body cover 60, and a guide pin 32.

Further, the top plate center lock portion 3 arranged in the bottom block 2 has a first space S1 to which a gas having a predetermined pressure is supplied, and a gas having a predetermined pressure is supplied to the first space S1. By doing so, a force is applied in the direction of center-locking the top plate 70.
The top plate center lock portion 3 includes a first space S1, an air supply port 206 for top plate center lock, a lock cylinder 20, a lock piston 22, a lock guide 24, a spring member 229, and a piston guide 26.

The air cushion portion 5 arranged in the main body block 4 has a second space S2 to which a gas having a predetermined pressure is supplied, and the gas having a predetermined pressure is supplied to the second space S2. , The force is applied in the direction of holding the center boss 36 from the surroundings.
The air cushion portion 5 includes a second space S2, an air supply port 608 for the air cushion, a main body 30, a guide pin 32, and a main body cover 60.

Hereinafter, a more detailed description will be given. The lock cylinder 20 forming the lowermost base of the bottom block 2 has a lock piston 22 arranged inside a concave portion having a circular shape in a plan view formed in the center thereof.
A piston guide 26 is arranged at the top of the lock cylinder 20 so as to cover the recess, leaving the central region of the recess of the lock cylinder 20.
The lock piston 22 is formed with a recess for arranging the lock guide 24 in the central region thereof, and the lock guide 24 is arranged in the recess of the lock guide 26.
A space is formed between the main part of the lock piston 22 in the plate state and the main part of the piston guide 26 in the plate state.
A spring member 229 is erected between the peripheral region of the main portion of the lock piston 22 and the main portion of the piston guide 26.

A first space S1 is formed between the upper surface of the flat plate-shaped main portion of the lock cylinder 20 and the lower surface of the flat plate-shaped main portion of the lock piston 22.

The lower part of the main body 30 is placed on the upper surface of the peripheral region of the flat plate-shaped main portion of the piston guide 26, and the main body 30 is attached to the piston guide 26.

The center boss 36 is inserted into the hollow portion provided in the central region of the main body 30 so as to extend upward from the lower portion along the center line CL.
The center boss 36 is supported by the first ball slider 44 described below.

When the main body 30 is mounted on the piston guide 26, the hemispherical convex portion (engagement convex portion 366) formed at the lower end of the center boss 36 mounted on the main body 30 side is a recessed portion of the lock guide 24. It is opposed to (inclined surface 24b).

The main body 30 constitutes a housing, and in the cavity inside the housing, in this order from the bottom, a ball backing plate 40, a ball retainer 42, a first ball slider 44, a first slide retainer 46, and a second (intermediate). A ball slider 48 and a second slide retainer 50 are arranged.

A ball backing plate 40 is fitted in the lower portion of the main body 30 in the hollow portion.
The ball backing plate 40 is placed and fixed on the piston guide 26.
A ball retainer 42 is movably placed on the upper surface of the ball backing plate 40.
In the ball retainer 42, the first ball 43 is fitted into the through hole 422, and the first ball 43 is exposed above and below the ball retainer 42.

The ball retainer 42 slides in a direction (XY directions) orthogonal to the center line CL.

A first ball slider 44 is arranged on the ball retainer 42 and the first ball 43.
The first ball slider 44 has a flat plate shape, and a center boss 36 is mounted in a through hole at the center thereof, and a center collar 38 is mounted so as to extend upward at a peripheral portion of the through hole. There is.
The center collar 38 is attached to the outer peripheral surface of the center boss 36.

The first ball slider 44 has a flat plate shape, and a first slide retainer 46 is attached to a surface thereof.
The first slide retainer 46 has a flat plate shape, and a second ball 47 is fitted into a through hole 462 extending from an upper surface to a lower surface.
A second (intermediate) ball slider 48 is arranged on the first slide retainer 46 and the second ball 47.
A second slide retainer 50 is arranged on the upper surface of the second (intermediate) ball slider 48.
A third ball slider 52 is arranged on the second (intermediate) ball slider 48 and on the second ball 47 held by the second slide retainer 50.
The third ball slider 52 is attached to the main body 30.
The second (intermediate) ball slider 48 slides in the direction (Y direction) connecting the front side and the back side.

The third ball slider 52 and the main body 30 communicate with each other in the axial direction between the bolt hole 52a of the third ball slider 52 and the bolt hole 30b of the main body 30, and are integrated by screwing the bolt 102. Will be done. The tip of the bolt 102 presses the upper surface of the second slide retainer 50.

The small-diameter tubular portion 302 of the main body 30 is provided with a through hole having a convex cross section, which penetrates from the outer peripheral surface side toward the inner side (center boss 36 side).
The shape-shaped through hole with a convex cross section is fitted into a portion where the tip of the guide pin 32 communicates with the inside, and the base side of the guide pin 32 is fitted, and the bottom surface of the base of the guide pin 32 and the small diameter tubular shape of the main body 30. A cavity is formed between the portions. The guide pin 32 includes four, a first guide pin 32a, a second guide pin 32b, a third guide pin 32c, and a fourth guide pin 32d. The first guide pin 32a, the second guide pin 32b, the third guide pin 32c, and the fourth guide pin 32d move in different directions depending on their arranged positions.

The small-diameter tubular portion 302 of the main body 30 is covered with the main body cover 62 so as to close the through hole having a convex cross section.

The main body cover 60 is attached to the upper surface of the main body 30 by using a bolt 104 screwed into the bolt hole 60b. As a result, the tubular shape of the main body shaft portion 322 and the main body cover 60 of the four first guide pins 32a and the second guide pins 32b and the third guide pins 32c and the fourth guide pins 32d housed in the main body 30. A second space S2 is formed between the inner peripheral surface of the portion 604 and the inner peripheral surface of the portion 604, respectively.
The second space S2 is formed in a part of the through hole having a convex cross section.

The main body cover 60 having an L-shaped cross section is overlapped and fixed so as to cover the upper end surface of the main body 30.
The end face on the inner side of the main body 30 and the end face on the inner side of the main body 30 are continuous and are formed so as to have a cylindrical shape.

A top plate 70 is attached to the upper end of the center boss 36.

Between the lock cylinder 20 and the lock piston 22, the first O-ring OR1 is formed on the contact surface (formed on the outer peripheral surface of the bottom plate portion 222) so that the compressed air in the first space S1 does not leak. It is fitted in the O-ring groove 230).

A fourth O-ring OR4 is arranged on the surface where the main body 30 and the guide pin 32 are in contact with each other.
A fourth O-ring OR4 is fitted in an O-ring groove 326 formed at the base of the guide pin 32.
Further, a second O-ring OR2 and a third O-ring OR3 for increasing the confidentiality of the second space S2 in contact with the main body 30 are arranged on the contact surface between the main body 30 and the main body cover 60. There is. The second O-ring OR2 and the third O-ring OR3 are fitted into the O-ring groove 316 and the O-ring groove 317 formed in the vicinity of the through hole having a convex cross section of the main body 30.

The first ball slider 44 moves in the front-rear direction (Y direction) and the left-right direction (X direction) on the first ball backing plate 40 by the rolling of the first ball 43.
The second (intermediate) ball slider 48 and the second slide retainer 50 are regulated to move only in the front-rear direction (Y direction).
The first guide pin 32a, the second guide pin 32b, the third guide pin 32c, and the fourth guide pin 32d can be independently moved in the front-rear direction (Y direction) and the left-right direction (X direction), respectively. Is.

A magnet for returning to the center is attached to the recess 606 of the main body cover 60 and the recess 704 of the top plate 70.

As shown in FIGS. 5 (a) to 5 (d), the lock cylinder 20 includes a disk-shaped bottom plate portion 202 and a cylindrical tubular portion 204.
The tubular portion 204 is formed above the bottom plate portion 202 so as to extend in a direction (axial direction) orthogonal to the bottom plate portion 202. The tubular portion 204 is formed on the outer peripheral edge portion of the bottom plate portion 202.

At the position of the tubular portion 204, the lock cylinder 20 is formed with four bolt holes 20a penetrating in the axial direction from the lower surface to the upper surface at equal intervals along the circumference thereof.
In the lock cylinder 20, at the position of the outer peripheral edge portion of the bottom surface 202b of the bottom plate portion 202, four female screw holes 20b extending to the tubular portion 204 in parallel with the axial direction at equal intervals along the circumference thereof are bolted. It is formed in the vicinity of the hole 20a.
Further, on the outer peripheral edge of the bottom surface 202b of the bottom plate portion 202, two positioning pin holes 20c are formed in the vicinity opposite to the female screw hole 20b with the bolt hole 20a in between so as to face each other 180 degrees apart. Has been done.
Two positioning pin holes 20d are formed on the upper end surface of the tubular portion 204 at positions corresponding to the positioning pin holes 20c in the axial direction. In a plan view, the bolt hole 20a, the female screw hole 20b, and the positioning pin holes 20c and 20d are arranged concentrically.

The lock cylinder 20 is formed with, for example, a top plate center lock air supply port 206 for supplying compressed air from the outer peripheral surface toward the center. As will be described later, the top plate center lock air supply port 206 is for supplying compressed air to the first space S1, and is, for example, a connection port connecting an air pump (not shown) and the floating unit 10. be. The top plate center lock air supply port 206 is arranged from the outer peripheral surface to the inner peripheral surface of the tubular portion 204 toward the center in the plan view of the tubular portion 204 and parallel to the bottom surface of the bottom plate portion 202. It is installed. The top plate center lock air supply port 206 is arranged above the upper surface 202a of the bottom plate portion 202.

A lock piston 22 is arranged on the inner bottom surface of the lock cylinder 20. The lock piston 22 is arranged on the lock cylinder 20, urged by the spring member 229, and reciprocates toward the lock cylinder 20 and the top plate 70.
As shown in FIGS. 6A and 6B, the lock piston 22 includes a disc-shaped bottom plate portion 222 and a cylindrical tubular portion 224.
The bottom plate portion 222 is formed so that its outer diameter fits inside the tubular portion 204 corresponding to the inner diameter of the tubular portion 204 of the lock cylinder 20.
The tubular portion 224 is formed above the bottom plate portion 222 so as to extend in a direction (axial direction) orthogonal to the bottom plate portion 222. The tubular portion 224 is formed inside the outer peripheral edge portion 226 of the bottom plate portion 222.
A plurality of spring member recesses 228 extending in parallel in the axial direction are formed on the outer peripheral edge portion 226 of the bottom plate portion 222 arranged outside the outer peripheral surface of the tubular portion 224 at equal intervals along the circumference thereof. ing.
On the lower surface of the bottom plate portion 222, a circular linear protrusion 225 is formed on the outer peripheral portion thereof. By placing the circular protrusion 225 on the inner bottom surface of the lock cylinder 20, a gap is secured between the lower surface of the bottom plate portion 222 and the inner bottom surface (upper surface) of the lock cylinder 20, and the first space S1 is created. It is formed.

On the outer peripheral surface of the bottom plate portion 222, an O-ring groove 230 having a concave cross-sectional view and an annular shape in a plan view is formed from the outside to the inside and over the entire circumference of the outer peripheral surface. The O-ring groove 230 is a groove for fitting the first O-ring OR1 for improving the airtightness so that the compressed air in the first space S1 does not leak.

The lock guide 24 is arranged on the upper surface 222a of the bottom plate portion 222 inside the tubular portion 224 of the lock piston 22.
As shown in FIGS. 7 (a) and 7 (b), the lock guide 24 has a thick flat plate shape, and the outer diameter thereof corresponds to the inner diameter of the tubular portion 224 of the lock piston 22. It is formed so as to fit inside the center boss 36, and its inner diameter is formed in a ring shape larger than the diameter of the hemisphere of the engaging convex portion 366 of the center boss 36 described later.
The lock guide 24 forms an inclined surface 24b of a mortar that has a large opening on the upper surface 24a side and a smaller opening diameter from the upper surface 24a side downward.
The inclined surface 24b slidably abuts on the engaging convex portion 366 of the center boss 36, presses the engaging convex portion 366 of the center boss 36 toward the central axis, and pushes the eccentric center boss 36. It is the part that acts directly to return to the basic position.

The piston guide 26 is arranged on the lock cylinder 20 and on the spring member 229 housed in the spring member recess 228 of the lock piston 22.
The piston guide 26 is a member inside the lock cylinder 20 that is urged by a spring member 229 to slidably hold the lock piston 22 in the Z direction (axial direction). The piston guide 26 is urged by the spring member 229 and slides into contact with the lock piston 22.
As shown in FIGS. 8 (a) to 8 (c), the piston guide 26 has a ring-shaped collar-shaped portion 262 and a direction orthogonal to the flange-shaped portion 262 inside the collar-shaped portion 262 and above the collar-shaped portion 262. Includes a cylindrical tubular portion 264 that projects in the axial direction).

As shown in FIG. 2 and the like, the tubular portion 264 accommodates the tubular portion 224 inside and the tubular portion 224 on the outer peripheral surface so that the tubular portion 224 of the lock piston 22 can slide in the axial direction. It is for supporting from.
The tubular portion 264 is formed so that its inner diameter matches the outer diameter of the tubular portion 224 of the lock piston 22.
The tubular portion 264 is formed so that its height is lower than the height of the tubular portion 224 of the lock piston 22. As a result, even when the lock piston 22 is located at the uppermost point, the upper surface of the tubular portion 224 of the lock piston 22 is located above the upper surface of the tubular portion 264 of the lock cylinder 20.
The tubular portion 264 is formed so that its outer diameter matches the inner diameter of the ball backing plate 40, which will be described later. The tubular portion 264 of the lock cylinder 20 is formed so that the upper surface thereof is located below the upper surface of the ball backing plate 40. Further, the tubular portion 264 of the lock cylinder 20 is formed so that the upper surface thereof is located above the lowest point of the convex portion (hemispherical surface) of the center boss 36.

At the position of the outer peripheral edge portion, the flange-shaped portion 262 is formed with four bolt holes 26a penetrating in the axial direction from the lower surface to the upper surface at equal intervals along the circumference thereof. Further, two positioning holes 26b are formed in the outer peripheral edge portion of the flange-shaped portion 262 so as to face each other at a distance of 180 degrees so as to penetrate from the lower surface to the upper surface in the axial direction. In a plan view, the bolt holes 26a and the positioning holes 20b are arranged concentrically.

The main body 30 is arranged on the piston guide 26.
The main body 30 is a member for slidably holding the center boss 36, which will be described later, in the horizontal direction (direction parallel to the surface including the X direction and the Y direction) inside the main body 30.
As shown in FIGS. 9 (a) to 9 (d) and FIG. 10, the main body 30 is formed in a substantially cylindrical shape having a space inside the main body 30, and the outer peripheral surface of the cylinder extends in the axial direction in the front view. It is formed like this.
The main body 30 includes a small-diameter tubular portion 302 formed in a cylindrical shape extending in the axial direction and a large-diameter tubular portion 304 formed in a cylindrical shape having an outer diameter larger than that of the small-diameter tubular portion 302 and extending in the axial direction. It is composed of.
The small-diameter tubular portion 302 is stacked on the upper portion of the large-diameter tubular portion 304 with a common center.

As shown in FIGS. 2A to 4, the small-diameter tubular portion 302 accommodates approximately half of the upper side of the shaft portion of the center boss 36 inside so that the center boss 36 can slide in the horizontal direction, and is centered. The shaft portion of the boss 36 is supported from the outside.
On the inner peripheral surface of the small diameter tubular portion 302, a small inner diameter portion 306 having a small inner diameter thereof and a medium inner diameter portion 308 having an inner diameter larger than the inner diameter of the small inner diameter portion 306 are formed on the upper opening side.
The inner diameter of the small inner diameter portion 306 is larger than the outer diameter of the shaft portion of the center boss 36 to which the center collar 38 is mounted, and a predetermined dimension is provided between the outer peripheral surface of the center collar 38 and the inner peripheral surface of the small inner diameter portion 306. The gap is secured.
The inner diameter of the inner diameter portion 308 is formed so as to match the outer diameter of the third ball slider 52, which will be described later.

The outer peripheral surface of the small-diameter tubular portion 302 has a concave cross-sectional view from the outside to the inside and over the entire circumference of the outer peripheral surface at upper and lower sides and intermediate positions in the axial direction. An annular O-ring groove 316 and an O-ring groove 317 and an air cushion air supply groove 318 are formed in a plan view.
The O-ring groove 316 and the O-ring groove 317 are for fitting a second O-ring OR2 and a third O-ring OR3 for improving airtightness so that compressed air in the second space S2, which will be described later, does not leak. It is a groove of. The air cushion air supply groove 318 is a groove for supplying compressed air to the second space S2.

The outer peripheral surface of the small-diameter tubular portion 302 communicates with the small inner diameter portion 306 from the outer peripheral surface to the inner peripheral surface at equal intervals along the circumference thereof, and accommodates the guide pins 32 described later. Four guide pin recesses 314 are formed.
The guide pin recess 314 has a structure having a step having a large opening diameter on the outer peripheral surface side and a small opening diameter on the inner peripheral surface side.
The guide pin recess 314 extends from the outer peripheral surface of the small-diameter tubular portion 302 including the air cushion air supply groove 318 to the inner peripheral surface toward the center of the small-diameter tubular portion 302 in the plan view and in the axial direction. It is arranged in the direction orthogonal to.

On the upper end surface of the small diameter tubular portion 302, four bolt holes 30b are formed at equal intervals along the circumference thereof from the upper end surface to the inner diameter portion 308 in the axial direction.
The bolt holes 30b are arranged between the guide pin recesses 314 in a plan view.

A large inner diameter portion 310 having an inner diameter larger than the inner diameter of the middle inner diameter portion 308 is formed on the inner peripheral surface of the large diameter tubular portion 304. A female screw portion 312 is formed on the inner peripheral surface of the large inner diameter portion 310 by a predetermined dimension from the lower surface to the upper side in the axial direction.
The inner diameter of the large-diameter tubular portion 304 is formed to be larger than the outer diameter of the third ball slider 52.

On the lower end surface of the large-diameter tubular portion 304, four bolt holes extending axially from the lower end surface in the axial direction to the intermediate position of the large-diameter tubular portion 304 at equal intervals along the circumference thereof. 30a is formed. Further, there are two axially extending from the lower end face in the axial direction to a predetermined position of the large diameter tubular portion 304 so as to face the lower end surface of the large diameter tubular portion 304 at a distance of 180 degrees. A positioning pin hole 30c is formed. In a plan view, the bolt holes 30a and the positioning pin holes 30c are arranged concentrically.
The bolt hole 30a, the bolt hole 20a of the lock cylinder 20, and the bolt hole 26a of the piston guide 26 communicate with each other in the axial direction, and the bolt 100 is screwed into the main body 30, the lock cylinder 20, and the piston guide 26. And are integrated.
Further, when the bolt is screwed, the bolt is positioned by using the positioning pin hole 30c, the positioning pin hole 20d of the lock cylinder 20, and the positioning pin 108 inserted into the positioning pin hole 26b of the piston guide 26.

As shown in FIG. 11A, the guide pin 32 includes a columnar main body shaft portion 322 and a substantially hemispherical tip portion 324 formed at a position inside the outer diameter of the main body shaft portion 322.
The tip portion 324 is formed on one surface side of the main body shaft portion 322 in a direction in which the main body shaft portion 322 extends.
A fourth O-ring groove 326 having a concave cross-sectional view and an annular shape in a plan view is formed on the outer peripheral surface of the main body shaft portion 322 from the outside to the inside and over the entire circumference of the outer peripheral surface.
The O-ring groove 326 is a groove for fitting a fourth O-ring OR4 for improving airtightness so that compressed air in the second space S2 does not leak.

The guide pin 32 includes four, a first guide pin 32a, a second guide pin 32b, a third guide pin 32c, and a fourth guide pin 32d. The first guide pin 32a, the second guide pin 32b, the third guide pin 32c, and the fourth guide pin 32d are for the guide pin of the main body 30 from the tip portion 324 as shown in FIG. 11 (b). It is inserted into the recess 314 and is positioned by engaging with a step formed in the guide pin recess 314. As a result, the center boss 36 equipped with the center collar 38 can be moved from all sides by the tips 324 of the first guide pin 32a, the second guide pin 32b, the third guide pin 32c, and the fourth guide pin 32d. Evenly supported. However, the number of guide pins 32 is not limited to four, and may be a sufficient number to hold the weight of the held parts, and may be at least one.

A flat and ring-shaped ball backing plate 40 is arranged below the main body 30.
As shown in FIG. 12, the ball backing plate 40 has a male screw portion 402 formed on the outer peripheral surface thereof. As shown in FIG. 2 and the like, the ball backing plate 40 is fitted inside the large inner diameter portion 310 so that its outer diameter corresponds to the inner diameter of the large inner diameter portion 310 of the large diameter tubular portion 304 of the main body 30. It is formed. The male screw portion 402 can be screwed to the female screw portion 312 of the large inner diameter portion 310. As a result, the ball backing plate 40 can rollably support the ball held by the ball retainer, which will be described later, from below.
The ball backing plate 40 is formed so that its inner diameter matches the outer shape of the tubular portion 224 of the lock piston 22.

A center boss 36, which is a shaft body, is arranged at the position of the central shaft of the main body 30.
As shown in FIGS. 13 (a) and 13 (b), the center boss 36 has a columnar main body shaft portion 362 extending in the axial direction and a lower outer peripheral surface of the main body shaft portion 362 toward the outer side in the radial direction. It includes a flange-shaped portion 364 formed in a substantially annular shape so as to extend, and an engaging convex portion 366 having a shape that is convex downward from the center of the lower surface of the main body shaft portion 362 and is formed in a hemispherical shape.

On the upper surface of the main body shaft portion 362, one bolt hole 36a extending downward in the axial direction from the upper surface is formed at the position of the central portion.
Four positioning pin holes 36b extending in parallel in the axial direction from the upper surface downward are formed around the bolt holes 36a at equal intervals.

As shown in FIGS. 2A to 4, the main body shaft portion 362 is externally mounted with the cylindrical center collar 38 shown in FIGS. 14A and 14B.
The inner diameter of the center collar 38 matches the outer diameter of the main body shaft portion 362. The upper surface of the main body shaft portion 362 forms the same plane as the upper surface of the center collar 38 and is connected to the top plate 70. The lower surface of the center collar 38 is in contact with the upper surface of the first ball slider 44. The main body shaft portion 362 is formed so that its outer diameter matches the inner diameter of the first ball slider 44.

The engaging convex portion 366 is formed so as to face the upper surface 24a of the lock guide 24 at a predetermined distance. The engaging convex portion 366 is engaged with the inclined surface 24b of the upper surface 24a of the lock guide 24 to stop the movement of the center boss 36. The engaging convex portion 366 is formed so that its hemispherical lowest point is located below the upper surface 24a of the lock guide 24. The engaging convex portion 366 is formed so that its hemispherical diameter is smaller than the outer diameter of the main body shaft portion 362.

The flange-shaped portion 364 is supported so as to be movable in parallel with the surface including the X direction and the Y direction and not to move in the Z direction. The flange-shaped portion 364 is formed so that its outer diameter is larger than the inner diameter of the first ball slider 44. In the brim-shaped portion 364, the outer peripheral edge portions at positions facing each other at 180 degrees apart are cut out, and two straight portions 364a are formed. The straight portion 364a is locked to the rotation restricting protrusion 444 formed on the first ball slider 44.

A ball retainer 42 is arranged on the ball backing plate 40. As shown in FIGS. 15 (a) and 15 (b), the ball retainer 42 is formed in a substantially flat plate shape and a ring shape. The ball retainer 42 is formed with a plurality of through holes 422 arranged at equal intervals in the circumferential direction so as to penetrate the plane thereof. The outer diameter of the ball retainer 42 is formed to be smaller than the inner diameter of the large inner diameter portion 310 of the main body 30, and the inner diameter of the ball retainer 42 is formed to be larger than the maximum outer diameter of the center boss 36.

Then, as shown in FIGS. 2A to 4, the first ball 43 is fitted into the plurality of through holes 422. At this time, the upper and lower ends of the first ball 43 are exposed above and below the ball retainer 42. As a result, the ball retainer 42 and the first ball 43 are movably arranged on the ball backing plate 40 in parallel with the plane including the X and Y directions (hereinafter, also referred to as the XY plane).

A first ball slider 44 is arranged on the ball retainer 42 and the first ball 43.
As shown in FIGS. 16A and 16B, the first ball slider 44 is formed in a plate shape and a ring shape.
The outer diameter of the first ball slider 44 is formed to be smaller than the inner diameter of the large inner diameter portion 310 of the main body 30, and the inner diameter of the first ball slider 44 is large corresponding to the outer diameter of the main body shaft portion 362 of the center boss 36. It is formed in the air.
On the upper surface of the first ball slider 44, four parallel grooves 442 running in the Y direction are formed in the vicinity of both end portions of the ring facing each other and in the intermediate portion between the two.
On the lower surface of the first ball slider 44, two rotation restricting protrusions 444 having an arcuate plan view are interposed between the through holes in the center of the first ball slider 44, and the straight portions face the through holes. It is formed in parallel.
This makes it possible to prevent the first ball slider 44 from rotating around the center boss 36.

A first slide retainer 46 is arranged on the first ball slider 44.
As shown in FIGS. 17 (a) and 17 (b), the first slide retainer 46 is formed in a flat plate shape and a ring shape. The through hole formed in the central portion of the first slide retainer 46 is circular in a plan view.
The first slide retainer 46 is formed with three through holes 462 at positions facing each other with the central portion of the ring in between. At each position, three through holes 462 are formed so as to be linearly arranged in the Y direction.
Further, two through holes 462 facing each other in the Y direction are also formed in the intermediate portion between the three through holes 462. As shown in FIG. 17 (c), the distance between the through holes 462 formed at each position corresponds to the distance between the four grooves 442 running in the Y direction on the lower surface of the second (intermediate) ball slider 48 described later. And are formed equally.
On the outer circumference of the first slide retainer 46, two arcuate protrusions 464 facing each other are formed. The arcuate protrusion 464 is formed so as to be able to reduce the frictional resistance between the outer peripheral surface of the first slide retainer 46 and the inner peripheral surface of the large inner diameter portion 310 of the main body 30.

In the first slide retainer 46, the through holes 462 arranged in a straight line are arranged at positions corresponding to the grooves 442 of the first ball slider 44, and the second ball 47 is fitted into the through holes 462. Therefore, the first slide retainer 46 and the second ball 47 can be linearly displaced in the Y direction along the groove 442.

A second (intermediate) ball slider 48 is arranged on the first slide retainer 46 and the second ball 47.
As shown in FIGS. 18A to 18C, the second (intermediate) ball slider 48 is formed in a plate shape and a ring shape. The outer diameter of the second (intermediate) ball slider 48 is formed to be smaller than the inner diameter of the large inner diameter portion 310 of the main body 30, and the inner diameter of the second (intermediate) ball slider 48 is attached to the main body shaft portion 362 of the center boss 36. It is formed larger than the outer diameter of the center collar 38.
On the lower surface of the second (intermediate) ball slider 48, four parallel grooves 482 running in the Y direction are formed in the vicinity of both end portions of the ring facing each other and in the intermediate portion between the two. The four grooves 482 are formed linearly along the through hole 462 of the first slide retainer 46.
Therefore, the second ball 47 held by the first slide retainer 46 is parallel to the groove 442 of the first ball slider 44 by being arranged in the groove 482 on the lower surface of the second (intermediate) ball slider 48. Can be displaced to.

Further, on the upper surface of the second (intermediate) ball slider 48, four grooves 484 extending in a direction (X direction) orthogonal to the groove 482 formed on the lower surface are formed.
These grooves 484 are arranged so as to be parallel to each other running in the X direction in the vicinity of the opposite end portions of the ring and the intermediate portion between the two. The distance between the four grooves 484 is formed to be the same as the distance between the grooves 482 on the lower surface.

A second slide retainer 50 is arranged on the groove 484 on the upper surface of the second (intermediate) ball slider 48.
The second slide retainer 50 is formed in a flat plate shape and a ring shape as shown in FIGS. 19 (a) and 19 (b). The through hole formed in the central portion of the second slide retainer 50 is substantially square in a plan view. The second slide retainer 50 is formed with three through holes 502 at positions facing each other with the central portion of the ring in between. At each position, three through holes 502 are formed so as to be linearly arranged in the X direction.
Further, two through holes 502 facing each other in the X direction are also formed in the intermediate portion between the three through holes 502. As shown in FIG. 19 (c), the distance between the through holes 502 formed at each position is equal to the distance between the four grooves 484 running in the X direction on the upper surface of the second (intermediate) ball slider 48. It is formed.
The through hole 502 of the second slide retainer 50 is arranged parallel to the groove 484 on the upper surface of the second (intermediate) ball slider 48, and the third ball 51 is fitted into the through hole 502.
Therefore, on the upper and lower surfaces of the second (intermediate) ball slider 48, the second ball 47 and the third ball 51 are displaced in directions orthogonal to each other.

A third ball slider 52 is arranged on the second (intermediate) ball slider 48 and on the second ball 47 held by the second slide retainer 50.
As shown in FIGS. 20A (a) and 20A (b), the third ball slider 52 is formed in a plate shape and a ring shape. The outer diameter of the third ball slider 52 is formed to a size corresponding to the inner diameter of the inner diameter portion 308 of the main body 30, and the inner diameter of the third ball slider 52 is the main body of the center boss 36 equipped with the center collar 38. It is formed so as to be larger than the outer diameter of the shaft portion 362.
On the lower surface of the third ball slider 52, four parallel grooves 522 running in the X direction are formed in the vicinity of both end portions of the ring facing each other and in the intermediate portion between the two. The four grooves 522 are formed linearly in the X direction along the through hole 502 of the second slide retainer 50.

Further, the third ball slider 52 is formed with four bolt holes 52a that penetrate in the axial direction from the lower surface to the upper surface at equal intervals along the circumference of the outer peripheral edge portion.
The bolt hole 52a and the bolt hole 30b of the main body 30 communicate with each other in the axial direction, and by screwing the bolt 102, the main body 30 and the third ball slider 52 are integrated and at the tip of the bolt 102. Press the upper surface of the second slide retainer 50.

FIG. 20B is an explanatory diagram showing the relationship between the first ball slider 44, the second (intermediate) ball slider 48, the third ball slider 52, the second ball 47, and the third ball 51. The first ball slider 44, the second (intermediate) ball slider 48, and the third ball slider 52 are stacked in this order with the central axis CL as the center. However, for the sake of simplicity, the first slide retainer 46 and the second slide retainer 50 are not shown.

In the first ball slider 44 and the second (intermediate) ball slider 48, four grooves 442 extending in the Y direction formed on the upper surface of the first ball slider 44 sandwich a plurality of second balls 47 in between. It faces four grooves 482 extending in the Y direction formed on the lower surface of the second (intermediate) ball slider 48. Therefore, the first ball slider 44 and the second (intermediate) ball slider 48 can move in the Y direction with each other by the second ball 47 rolling. However, the first ball slider 44 and the second (intermediate) ball slider 48 cannot move in the X direction because the second ball 47 cannot move in the X direction.

In the second (intermediate) ball slider 48 and the third ball slider 52, four grooves 484 extending in the X direction formed on the upper surface of the second (intermediate) ball slider 48 sandwich the plurality of third balls 51. It faces four grooves 522 extending in the X direction formed on the lower surface of the third ball slider 52. Therefore, the second (intermediate) ball slider 48 and the third ball slider 52 can move to each other in the X direction by rolling the third ball 51. However, the second (intermediate) ball slider 48 and the third ball slider 52 cannot move in the Y direction because the third ball 51 cannot move in the Y direction.

The small-diameter tubular portion 302 of the main body 30 is covered with the main body cover 60.
As shown in FIGS. 21 (a) to 21 (c), the main body cover 60 includes a disk-shaped upper lid portion 602 and a cylindrical tubular portion 604.
The tubular portion 604 is formed below the upper lid portion 602 so as to extend in a direction (axial direction) orthogonal to the upper lid portion 602 and abut on a step of the large-diameter tubular portion 304 of the main body 30.
The tubular portion 604 is formed on the outer peripheral edge portion of the upper lid portion 602.

A hole 60a for inserting the center boss 36 is formed in the upper lid portion 602 of the main body cover 60 at the central portion.
Four bolt holes 60b that penetrate in the axial direction from the upper surface to the lower surface are formed around the holes 60a.
Two recesses 606 are formed on the upper surface of the upper lid portion 602 so as to face each other at a distance of 180 degrees with a hole 60a in between.

The main body cover 60 is formed with, for example, an air cushion air supply port 208 for supplying compressed air from the outer peripheral surface toward the center.
The air cushion air supply port 208 is for supplying compressed air to the second space S2, as will be described later.
The air cushion air supply port 208 is arranged from the outer peripheral surface to the inner peripheral surface of the tubular portion 604 toward the center in the plan view of the tubular portion 604 and parallel to the upper lid portion 602.
The air cushion air supply port 208 is arranged so as to communicate with the air cushion air supply groove 318 of the small diameter tubular portion 302 of the main body 30.

The main body cover 60 is attached to the upper surface of the main body 30 by using a bolt 104 screwed into the bolt hole 60b. As a result, a second space S2 is formed between the main body shaft portion 322 of the four guide pins 32 housed in the main body 30 and the inner peripheral surface of the tubular portion 604 of the main body cover 60, respectively.
Then, the air cushion air supply port 208 can evenly supply compressed air to each of the second spaces S2 through the air cushion air supply groove 318 that communicates with the second space S2.

A top plate 70 is mounted on the center boss 36.
The top plate 70 has a circular flat plate shape as shown in FIGS. 22 (a) to 22 (c).
A bolt hole 70a for attaching the center boss 36 is formed in the central portion of the top plate 70.
The top plate 70 is formed with four through holes 70b that penetrate in the axial direction from the upper surface to the lower surface at equal intervals along the circumference thereof. Two recesses 702 are formed on the upper surface of the top plate 70 so as to face each other at a distance of 180 degrees with a bolt hole 70a in between.
Four positioning pin holes 70c are formed around the bolt holes 70a on the lower surface of the top plate 70. Further, on the lower surface of the top plate 70, two recesses 704 are formed with bolt holes 70a in between so as to face each other at a distance of 180 degrees.
The top plate 70 is attached to the upper surface of the center boss 36 using bolts 106. At this time, since the recess 704 is formed in the top plate 70 and the recess 606 is formed in the upper surface of the main body cover 60, a gap is formed between the upper lid portion 602 of the main body cover 60 and the lower surface of the top plate 70. Secured.
Further, when the top plate 70 is attached to the upper surface of the center boss 36, the top plate 70 is positioned by using the positioning pin hole 36b of the center boss 36 and the positioning pin 110 inserted into the positioning pin hole 70c of the top plate 70.

In this floating unit 10, as shown in FIG. 11B, four guide pins 32 pressed and supported by compressed air in the second space S2 evenly distribute the center boss 36 equipped with the center collar 38 from all sides. Supports. The pressure of the compressed air in the second space S2 is set to an optimum value depending on the weights of the held parts and shaft members and the weight of the center boss or the like. By adopting such a configuration, it is possible to increase the maintenance force of the state in which the center position of the top plate 70 and the center position of the main body 30 coincide with each other, that is, the basic position.
Therefore, even if the floating unit 10 is mounted in the horizontal direction, the top plate 70 is unlikely to deviate from the basic position. Therefore, even when the shaft member is inserted into the hole of the part by using the part or the shaft member held by the floating unit mounted in the horizontal direction, the part or the shaft member does not fall from the basic position, and the part The central axis of the hole and the central axis of the shaft member can be aligned.

The floating unit 10 having the above configuration has a second position in advance in order to correct the displacement due to the weight of the held parts and shaft members and the weight of the center boss or the like even if the shaft is used in the horizontal direction. By supplying compressed air to the space S2, four first guide pins 32a and second guide pins 32b and third guide pins 32c and fourth guide pins whose rear end faces are pressed by the compressed air. By 32d, the center boss 36 equipped with the center collar 38 is evenly supported independently from each side by the tip portion 324 of the guide pin 32. As a result, the center position of the center boss 36 can be aligned with the center axis of the floating unit 10 even if the weight of the parts and the shaft members and the weight of the center boss or the like are generated. As a result, even if the shaft is used in the horizontal direction, the position shift due to the weight of the held parts and shaft members and the weight of the center boss and the like is unlikely to occur, and the state of the basic position shown in FIGS. A floating unit 10 that can be strongly maintained is obtained.

The adoption of the air cushion portion 5 having an air cushion structure makes it possible to change the pressure of the compressed air by using a precision regulator or the like, and the first guide pin 32a, the second guide pin 32b, and the third guide pin 32b. The guide pin 32c and the fourth guide pin 32d can change the force for pressing the center boss 36. As a result, a floating unit 10 that can be adjusted so as to exert an optimum pressing force against the weight of the held parts and the shaft member and the own weight of the center boss or the like can be obtained. For example, when the weight of the held component is 3 kg, holding it with compressed air exhibiting a thrust of 5 kgf causes a problem that the holding force is too strong and the copying cannot be performed smoothly. Therefore, when the weight of the held part is 3 kg, it is held by compressed air which exerts a thrust of 3 kgf, and when the weight of the held part is 5 kg, it is held by compressed air which exerts a thrust of 5 kgf. However, it can be easily changed by using a precision regulator or the like.

Next, when the shaft member is inserted into the hole of the component using the floating unit 10, if the central axis of the hole of the component and the central axis of the shaft member are displaced in the X direction by, for example, 2 mm, the top plate The 70 is displaced in the X direction by 2 mm from the basic position shown in FIGS. 2 to 4. As the top plate 70 shifts, the center boss 36 connected to the top plate 70 also shifts in the X direction.

Then, of the first guide pin 32a and the second guide pin 32b facing in the X direction, the second guide pin 32b retracts in the X direction, and the second space S2 of the second guide pin 32b is compressed. NS.

Further, the first ball slider 44 fixed to the tip end side of the center boss 36 moves in the X direction by utilizing the rotational movement of the first ball 43 held by the ball retainer 42. Then, the second (intermediate) ball slider 48, which is arranged on the first ball slider 44 via the second ball 47 (the one held by the first slide retainer 46), is also the same. Since the second ball 47 in contact with the groove 482 formed on the lower surface in the Y direction rotates in the X direction and does not move, it moves in the X direction while being fixed to the first ball slider 44.

Then, as the second (intermediate) ball slider 48 moves in the X direction, the second slide comes into contact with the groove 484 facing the X direction formed on the upper surface of the second (intermediate) ball slider 48. The third ball 51 held by the retainer 50 will rotate and move in the X direction. Therefore, as shown in FIG. 23, the center position of the center boss 36 is eccentric, and the center axis of the hole of the component and the center axis of the shaft member are aligned. By inserting the shaft member into the hole of the part in this state, the shaft member can be inserted into the hole of the part without bending the shaft member.

Then, compressed air is supplied to the first space S1 until the floating unit 10 holds the next component or the shaft member after the work of inserting the shaft member into the hole of the component is completed. As a result, as shown in FIG. 24, the lock piston 22 moves upward against the elastic force of the spring member 229, and the inclined surface 24b formed on the lock guide 24 is engaged with the center boss 36. It slidably abuts on the hemisphere of the portion 366 and presses the engaging convex portion 366 of the center boss 36 toward the central axis.

Then, the first ball slider 44 fixed to the tip end side of the center boss 36 utilizes the rotational movement of the first ball 43 held by the ball retainer 42 toward the original position in the X direction (). It moves (in the X direction opposite to when the shaft member is inserted into the hole of the part). Then, the second (intermediate) ball slider 48, which is arranged on the first ball slider 44 via the second ball 47 (the one held by the first slide retainer 46), is also the same. Since the second ball 47 in contact with the groove 482 formed on the lower surface in the Y direction rotates in the X direction and does not move, the ball 47 is fixed to the first ball slider 44 and returned to the original position in the X direction. Move towards.

Then, as the second (intermediate) ball slider 48 moves toward the original position in the X direction, it comes into contact with the groove 484 facing the X direction formed on the upper surface of the second (intermediate) ball slider 48. The third ball 51 held by the second slide retainer 50 will rotate and move toward the original position in the X direction. In this way, the eccentric center boss 36 can be center-locked.

After that, when the supply of compressed air to the first space S1 is stopped, the lock piston 22 moves downward by using the elastic force of the spring member 229 until it hits the upper surface 202a of the lock cylinder 20, and the floating unit. 10 is returned to the basic position in the state shown in FIGS. 2A and 3 and 4.

Further, when a load is applied to the top plate 70 when the shaft member is inserted into the hole of the component, the lower surface of the top plate 70 hits the upper surface of the main body cover 60, and the displacement of the top plate 70 is received by the main body cover 60. Therefore, even a small floating unit 10 can obtain a large load bearing capacity.

The floating unit 10 has a top plate by adopting a configuration in which the second ball 47 and the third ball 51 move in directions orthogonal to each other on the upper and lower surfaces of the second (intermediate) ball slider 48. The configuration can be such that the 70 does not rotate. Therefore, it is suitable for inserting the shaft member into the hole of the part in the state where the top plate 70 is not rotating.

2. Second Embodiment Next, the floating unit according to the second embodiment of the present invention will be described. FIG. 25 is a front view showing a floating unit according to the second embodiment. The floating unit 130 according to the second embodiment has a reciprocating drive block 120 attached to the bottom surface of the floating unit 10 according to the first embodiment described above. Therefore, the detailed description of the floating unit 10 will be omitted.

FIG. 26 is a cross-sectional view showing the internal structure of the reciprocating drive block 120 of the floating unit 130 shown in FIG. 25. The reciprocating drive block 120 includes a flange 75, a Z-axis cylinder 85, and a connecting flange 95.

As shown in FIGS. 27 (a) to 27 (c), the flange 75 is formed in a substantially disk shape. A Z-axis piston recess 752 for inserting the Z-axis piston 77 of the Z-axis cylinder 85, which will be described later, is formed in the central portion of the upper surface 750a of the flange 75. The inner diameter of the Z-axis piston recess 752 corresponds to the outer diameter of the Z-axis piston 77, and the Z-axis piston 77 can move while sliding in contact with the inner peripheral surface of the Z-axis piston hole 852. The flange 75 is formed with four bolt holes 75a penetrating in the Z direction from the lower surface 750b to the upper surface 750a at equal intervals along the circumference thereof. The flange 75 has four through holes 75b extending in parallel in the Z direction at equal intervals along its circumference in the vicinity of the bolt holes 75a. Further, the flange 75 is formed in the vicinity of the flange 75 on the opposite side of the bolt hole 75a with four female screw holes 75c sandwiched between the through holes 75b at equal intervals along the circumference thereof. Two pin holes 75d are formed between the bolt hole 75a and the female screw hole 75c on the outer peripheral edge of the lower surface 750b of the flange 75 so as to face each other at a distance of 180 degrees. In plan view, the bolt holes 75a and the female screw holes 75c are arranged on concentric circles, and the through holes 75b and the pin holes 75d are arranged on different concentric circles.

The flange 75 is formed with, for example, a Z-direction air air cushion air supply port 754 for supplying compressed air from the outer peripheral surface toward the center. The air supply port 754 for the Z-direction air air cushion is for supplying compressed air (for example, 0.3 MPa to 0.6 MPa) to the third space S3, as will be described later. The air supply port 754 for the Z-direction air air cushion extends from the outer peripheral surface of the flange 75 to the vicinity of the recess 752 for the Z-axis piston toward the center in the plan view of the flange 75 and in parallel with the flange 75. It is arranged so as to bend 90 degrees upward in the Z direction and open to the upper surface 750a of the flange 75. This opening communicates with the large inner diameter portion 852c of the Z-axis cylinder 85, which will be described later.

A Z-axis cylinder 85 is arranged on the flange 75. As shown in FIGS. 28 (a) and 28 (b), the Z-axis cylinder 85 is formed in a substantially disk shape. A Z-axis piston hole 852 having a circular cross section for inserting a Z-axis piston 77 penetrating in the Z direction from the lower surface 850b to the upper surface 850a is formed in the central portion of the Z-axis cylinder 85. On the inner peripheral surface of the Z-axis piston hole 852, there are a small inner diameter portion 852a having a small inner diameter on the upper opening side, a medium inner diameter portion 852b having an inner diameter larger than the inner diameter of the small inner diameter portion 852a, and an inner diameter portion 852b. It forms a large inner diameter portion 852c having a larger inner diameter. The Z-axis cylinder 85 is formed with four linear shaft holes 854 extending in parallel in the Z direction at equal intervals along its circumference. On the inner peripheral surface of the linear shaft hole 854, a small inner diameter portion 854a having a small inner diameter and a large inner diameter portion 854b having an inner diameter larger than the inner diameter of the small inner diameter portion 854a are formed on the upper opening side. The Z-axis cylinder 85 has four female screw holes 85a extending in parallel in the Z direction at equal intervals along its circumference in the vicinity of the linear shaft hole 854. Further, the Z-axis cylinder 85 is formed in the vicinity of the linear shaft hole 854 with four through holes 85b sandwiched between the female screw holes 85a at equal intervals along the circumference thereof. On the lower surface 850b of the Z-axis cylinder 85, an O-ring groove 856 having a concave cross-sectional view and an annular shape in a plan view is formed over the entire circumference at a position away from the Z-axis piston hole 852. The O-ring groove 856 is a groove for fitting a fifth O-ring OR5 for improving airtightness so that compressed air in the third space S3, which will be described later, does not leak.

The Z-axis piston 77 is housed inside the Z-axis piston hole 852 of the Z-axis cylinder 85. As shown in FIGS. 29 (a) and 29 (b), the Z-axis piston 77 is formed in a substantially columnar shape. Four bolt holes 77a extending parallel to the Z direction are formed on the upper surface of the Z-axis piston 77. The outer diameter of the Z-axis piston 77 corresponds to the inner diameter of the small inner diameter portion 852a of the Z-axis cylinder 85, and the Z-axis piston 77 can move while sliding in contact with the inner peripheral surface of the Z-axis piston hole 852. On the outer peripheral surface of the Z-axis piston 77, an O-ring having a concave cross-sectional view and an annular shape in a plan view is formed between a pair of annular protrusions 772a and 772b at an intermediate position in the Z direction. A ring groove 774 is formed. Further, on the outer peripheral surface of the Z-axis piston 77, an O-ring groove 776 having a concave cross-sectional view and an annular shape in a plan view is provided at a lower position in the Z direction from the outside to the inside and over the entire circumference of the outer peripheral surface. Is formed. The O-ring groove 774 and the O-ring groove 776 are grooves for fitting the sixth O-ring OR6 and the seventh O-ring OR7 for improving the airtightness so that the compressed air in the third space S3 does not leak. Is.

Inside the linear shaft hole 854 of the Z-axis cylinder 85, the linear shaft 81 to which the cylindrical linear bush 79 shown in FIG. 30 is extrapolated is housed. As shown in FIG. 31, the linear shaft 81 is formed in a columnar shape. One bolt hole 81a extending parallel to the Z direction is formed on the upper surface of the linear shaft 81. The outer diameter of the linear shaft 81 corresponds to the inner diameter of the small inner diameter portion 854a of the linear shaft hole 854, and the linear shaft 81 is in sliding contact with the inner peripheral surface of the linear shaft hole 854 and the inner peripheral surface of the linear bush 79. It is movable. The linear shaft 81 to which the linear bush 79 is extrapolated is passed through the spacer 83 shown in FIG. 32, and is arranged directly on the flange 75 in such a state.

A connection flange 95 is arranged on the Z-axis cylinder 85. As shown in FIG. 33, the connection flange 95 is formed in a substantially disk shape. A recess 952 for a Z-axis piston having a circular plan view is formed in the central portion of the lower surface of the connecting flange 95. The inner diameter of the Z-axis piston recess 952 coincides with the outer diameter of the Z-axis piston 77. At the position of the Z-axis piston recess 952, four bolt holes 95a penetrating from the upper surface to the lower surface in the Z direction are formed at equal intervals along the circumference thereof. The bolt hole 95a is formed at a position communicating with the bolt hole 77a of the Z-axis piston 77. Therefore, the Z-axis cylinder 85 and the connection flange 95 are connected by screwing the bolt 132 into the bolt hole 95a and the bolt hole 77a. Further, the connection flange 95 can be stably moved by screwing the bolts 134 screwed along the circumference of the connection flange 95 at equal intervals into the bolt holes 81a of the linear shaft 81. Further, four bolt holes 95b are formed on the outer peripheral edge of the connection flange 95 at equal intervals along the circumference thereof and penetrate from the lower surface to the upper surface in the Z direction. The reciprocating drive block 120 is connected to the bottom surface of the floating unit 10 by using the bolt 136 screwed into the bolt hole 95b.

In the reciprocating drive block 120 having the above configuration, the third space S3 is the peripheral portion of the Z-axis piston recess 752 on the upper surface 750a of the flange 75, and the O-ring grooves 774 and O on the outer peripheral surface of the Z-axis piston 77. It is formed in a portion between the ring groove 776 and a region surrounded by a stepped portion between the inner diameter portion 852b and the large inner diameter portion 852c of the Z-axis cylinder 85. When compressed air (for example, 0.3 MPa to 0.6 MPa) is supplied to the third space S3, the Z-axis piston 77 moves upward as shown in FIG. 34. The movement of the Z-axis piston 77 is performed until the annular projection 772a of the Z-axis piston 77 comes into contact with the step between the small inner diameter portion 852a and the medium inner diameter portion 852b of the Z-axis cylinder 85 and stops. As a result, the connection flange 95 and the floating unit 10 connected to the Z-axis piston 77 are moved upward in the Z direction.

3. 3. Third Embodiment Next, the floating unit according to the third embodiment of the present invention will be described. 35 (a) is a front view showing the floating unit according to the third embodiment, FIG. 35 (b) is a plan view thereof, and FIG. 35 (c) is a bottom view thereof. 36A and 37 and 38 are cross-sectional views showing the internal structure of the floating unit shown in FIG. 35, respectively, and FIG. 36B is an exploded cross-sectional view of FIG. 36A. FIG. 36C is a cross-sectional view showing an internal structure when the top plate of the floating unit shown in FIG. 35 is eccentric. In the floating unit 140 according to the third embodiment, the top plate 71 rotates. The details of the parts and parts similar to those used in the first embodiment described above will be omitted.

As shown in FIGS. 35 to 38, the floating unit 140 is arranged inside the bottom block 12 having a bottom surface, the main body block 14 having an internal space arranged on the bottom block 12, and the main body block 14. The holder 61, the second ball backing plate 62 and the positioning pin 63 and the pin holder 64 arranged on the lower surface of the holder 61, and the main body on the opposite side of the bottom block 12 at a distance from the end of the main body block 14. A top plate 71 attached to the holder 61 so as to cover the end of the block 14, and a plurality of first plates arranged inside the main body block 14 for rotatably supporting the holder 61 with respect to the bottom block 12. The ball 43 and the ring-shaped first ball backing plate 40 and the third ball backing plate 48 arranged inside the main body block 14 and arranged around the holder 61 to support the first ball 43. , A ring-shaped first ball retainer 66 and a second ball retainer 67 arranged inside the main body block 14 and around the holder 61 to arrange the first ball 43 in a predetermined positional relationship. And has a first space S1 which is arranged in the bottom block 12 and is supplied with compressed air which is a gas having a predetermined pressure, and is supplied to the first space S1 which is a gas which is a gas having a predetermined pressure. A second unit is supplied with compressed air, which is a gas having a predetermined pressure and is arranged in the top plate center lock portion 13 and the main body block 14, which applies a force in the direction of center-locking the top plate 71. Including the air cushion portion 15 which has the space S2 of the above and applies a force in the direction of holding the holder 61 from the surroundings by supplying compressed air which is a gas having a predetermined pressure to the second space S2. The floating unit 140 is configured so that the top plate 71 can rotate about the central axis CL.

The bottom block 12 is arranged on the lock cylinder 21 forming the bottom surface and the lock cylinder 21, and is urged by the spring member 229 to reciprocate the lock piston 23 toward the lock cylinder 21 and the top plate 71. And a piston guide 26 that is arranged on the lock piston 23 and is in sliding contact with the lock piston 23.

The top plate center lock portion 13 arranged on the bottom block 12 is a first space to which a gas having a predetermined pressure (typical value is 0.5 MPa, in other words, 5.8 kgf in terms of thrust) is supplied from the outside. A lock cylinder 21 having a top plate center lock air supply port 206 communicating with S1 and a top plate center lock air supply port 206 forming a bottom surface, and a spring member 229 arranged on the lock cylinder 21. The first includes a lock piston 23 that is urged and reciprocating toward the lock cylinder 21 and the top plate 71, and a piston guide 26 that is arranged on the lock piston 23 and is in sliding contact with the lock piston 23. The space S1 is formed between the upper surface of the lock cylinder 21 and the lower surface of the lock piston 23.

The "predetermined pressure" of the air supplied to the top plate center lock portion 13 is an air pressure having a thrust that can move the lock piston 23 toward the top plate 71 against the elastic force of the spring member 229. means.

The main body block 14 includes a main body 30, a guide pin 32 housed in the main body 30, and a main body cover 60 that covers the upper part of the main body 30.
The air cushion portion 15 arranged in the main body block 14 is provided with air having a predetermined pressure (representative pressure range is 0.3 MPa to 0.6 MPa, in other words, 3.5 kgf to 7.0 kgf) from the outside. A main body having an air cushion air supply port 608 communicating with the second space S2 to be supplied, an air cushion air supply port 608 communicating with each other, an air cushion air supply groove 318, and a guide pin recess 314. The second space S2 includes the air 30, the guide pin 32 housed in the guide pin recess 314 of the main body 30, and the main body cover 60 that covers the upper part of the main body 30, and the second space S2 is the air cushion air supply groove 318 of the main body 30. It is formed between the guide pin recess 314 and the inner peripheral surface of the main body cover 60.

The "predetermined pressure" of the air supplied to the air cushion portion 5 means an air pressure having a thrust that does not cause misalignment against the weight of the held parts and shaft members and the weight of the holder 61 and the like. ..

Hereinafter, a more detailed description will be given. The lock cylinder 20 forming the lowermost base of the bottom block 2 has a lock piston 22 arranged inside a concave portion having a circular shape in a plan view formed in the center thereof.
A piston guide 26 is arranged at the top of the lock cylinder 20 so as to cover the recess, leaving the central region of the recess of the lock cylinder 20.
The lock piston 22 is formed with a recess for arranging the lock guide 24 in the central region thereof, and the lock guide 24 is arranged in the recess of the lock guide 26.
A space is formed between the main part of the lock piston 22 in the plate state and the main part of the piston guide 26 in the plate state.
A spring member 229 is erected between the peripheral region of the main portion of the lock piston 22 and the main portion of the piston guide 26.

A first space S1 is formed between the upper surface of the flat plate-shaped main portion of the lock cylinder 20 and the lower surface of the flat plate-shaped main portion of the lock piston 22.

The lower part of the main body 30 is placed on the upper surface of the peripheral region of the flat plate-shaped main portion of the piston guide 26, and the main body 30 is attached to the piston guide 26.

The main body 30 has a holder 61 and a pin holder 64 inserted in a hollow portion provided in the central region thereof so as to extend upward from the lower portion along the center line CL.
The holder 61 and the pin holder 64 are supported by the first second (intermediate) ball backing plate 62 described below.

When the main body 30 is mounted on the piston guide 26, the positioning pin 63 formed at the lower end of the holder 61 mounted on the main body 30 side is opposed to the recessed portion (inclined surface 233) of the lock piston 23. ing.

The main body 30 constitutes a housing, and in the cavity inside the housing, in this order from the bottom, a ball backing plate 40, a first ball retainer 66, a second (intermediate) ball backing plate 62, and a second ball retainer. 67, a third ball backing plate 68 is arranged.

A ball backing plate 40 is fitted in the lower portion of the main body 30 in the hollow portion.
The ball backing plate 40 is placed and fixed on the piston guide 26.
A first ball retainer 66 is movably placed on the upper surface of the ball backing plate 40.
In the first ball retainer 66, the first ball 43 is fitted into the through hole, and the first ball 43 is exposed above and below the first ball retainer 66.

The first ball retainer 66 slides in a direction (Y direction) orthogonal to the center line CL.

A second (intermediate) ball backing plate 62 is arranged on the ball retainer 42 and the first ball 43.
The second (intermediate) ball backing plate 62 has a flat plate shape, and a positioning pin 63 is mounted in a through hole at the center thereof.

The second (intermediate) ball backing plate 62 has a flat plate shape, and a second ball retainer 67 is attached to the upper surface thereof.
The second ball retainer 67 has a flat plate shape, and the first ball 43 is fitted into a through hole extending from an upper surface to a lower surface.
A third ball backing plate 68 is arranged on the second ball retainer 67 and the first ball 43.
The third ball backing plate 68 is attached to the main body 30.
The second (intermediate) ball backing plate 62 slides in the direction (X direction) connecting the front side and the back side.

The third ball slider 52 and the main body 30 communicate with each other in the axial direction between the bolt hole 52a of the third ball slider 52 and the bolt hole 30b of the main body 30, and are integrated by screwing the bolt 102. Will be done. The tip of the bolt 102 presses the upper surface of the second slide retainer 50.

The small-diameter tubular portion 302 of the main body 30 is provided with a through hole having a convex cross section, which penetrates from the outer peripheral surface side toward the inner side (center boss 36 side).
The shape-shaped through hole with a convex cross section is fitted into a portion where the tip of the guide pin 32 communicates with the inside, and the base side of the guide pin 32 is fitted, and the bottom surface of the base of the guide pin 32 and the small diameter tubular shape of the main body 30. A cavity is formed between the portions. The guide pin 32 includes four, a first guide pin 32a, a second guide pin 32b, a third guide pin 32c, and a fourth guide pin 32d. The first guide pin 32a, the second guide pin 32b, the third guide pin 32c, and the fourth guide pin 32d move in different directions depending on their arranged positions.

The small-diameter tubular portion 302 of the main body 30 is covered with the main body cover 62 so as to close the through hole having a convex cross section.

The main body cover 60 is attached to the upper surface of the main body 30 by using a bolt 104 screwed into the bolt hole 60b. As a result, the tubular shape of the main body shaft portion 322 and the main body cover 60 of the four first guide pins 32a and the second guide pins 32b and the third guide pins 32c and the fourth guide pins 32d housed in the main body 30. A second space S2 is formed between the inner peripheral surface of the portion 604 and the inner peripheral surface of the portion 604, respectively.
The second space S2 is formed in a part of the through hole having a convex cross section.

The main body cover 60 having an L-shaped cross section is overlapped and fixed so as to cover the upper end surface of the main body 30.
The end face on the inner side of the main body 30 and the end face on the inner side of the main body 30 are continuous and are formed so as to have a cylindrical shape.

A top plate 70 is attached to the upper end of the center boss 36.

Between the lock cylinder 21 and the lock piston 22, the first O-ring OR1 is formed on the contact surface (formed on the outer peripheral surface of the bottom plate portion 222) so that the compressed air in the first space S1 does not leak. It is fitted in the O-ring groove 240).

A fourth O-ring OR4 is arranged on the surface where the main body 30 and the guide pin 32 are in contact with each other.
A fourth O-ring OR4 is fitted in an O-ring groove 326 formed at the base of the guide pin 32.
Further, a second O-ring OR2 and a third O-ring OR3 for increasing the confidentiality of the second space S2 in contact with the main body 30 are arranged on the contact surface between the main body 30 and the main body cover 60. There is.
The second O-ring OR2 and the third O-ring OR3 are fitted into the O-ring groove 316 and the O-ring groove 317 formed in the vicinity of the through hole having a convex cross section of the main body 30.

The first guide pin 32a, the second guide pin 32b, the third guide pin 32c, and the fourth guide pin 32d can be independently moved in the front-rear direction (Y direction) and the left-right direction (X direction), respectively. Is.

A magnet for returning to the center is attached to the recess 606 of the main body cover 60 and the recess 704 of the top plate 71.

The lock cylinder 21 has substantially the same shape as the lock cylinder 20 described in the first embodiment. That is, the lock cylinder 21 includes a disk-shaped bottom plate portion 202 and a cylindrical tubular portion 204, as in the lock cylinder 20 shown in FIGS. 5 (a) to 5 (d). The tubular portion 204 is formed so as to extend in a direction (Z direction) orthogonal to the bottom plate portion 202 on the upper side of the bottom plate portion 202. The tubular portion 204 is formed on the outer peripheral edge portion of the bottom plate portion 202. However, as shown in FIGS. 36A to 38, a positioning recess 212 for inserting the positioning convex portion 235 of the lock piston 23, which will be described later, is formed on the upper surface of the bottom plate portion 202. The top plate center lock air supply port 206 extends from the outer peripheral surface of the tubular portion 204 to the inner peripheral surface of the positioning recess 212 toward the center of the tubular portion 204 in a plan view and parallel to the bottom plate portion 202. It is arranged. The top plate center lock air supply port 206 is arranged above the upper surface of the positioning recess 212.

A lock piston 23 is arranged on the inner bottom surface of the lock cylinder 21. The lock piston 23 of the third embodiment corresponds to a combination of the lock piston 22 and the lock guide 24 of the first embodiment. That is, as shown in FIGS. 39 (a) to 39 (c), the lock piston 23 includes a disk-shaped bottom plate portion 232 and a columnar portion 234. The bottom plate portion 232 is formed so that its outer diameter fits inside the tubular portion 204 corresponding to the inner diameter of the tubular portion 204 of the lock cylinder 21. The columnar portion 234 is formed so as to extend in a direction (Z direction) orthogonal to the bottom plate portion 232 on the upper side of the bottom plate portion 232. The columnar portion 234 is formed inside the outer peripheral edge portion 236 of the bottom plate portion 232.
Three lock guide holes 23a are concentrically formed on the upper surface of the columnar portion 234. The outer diameter of the lock guide hole 23a is formed to be larger than the diameter of the hemisphere of the engaging convex portion 636 of the positioning pin 63, which will be described later. The lock guide hole 23a forms an inclined surface 233 of the mortar, which has a large opening on the upper surface side and a smaller opening diameter from the upper surface side to the bottom. A hole 233a having a small diameter is formed in the central portion of the inclined surface 233. The inclined surface 233 slidably abuts on the engaging convex portion 636 of the positioning pin 63 and presses the engaging convex portion 636 of the positioning pin 63 toward the central axis, so that the eccentric positioning pin 63 is basically used. It is the part that acts directly to return to the position.

A plurality of spring member recesses 238 extending in parallel in the Z direction are formed at equal intervals along the circumference of the outer peripheral edge portion 236 of the bottom plate portion 232 arranged outside the outer peripheral surface of the columnar portion 234. Has been done. On the lower surface of the bottom plate portion 232, a rectangular positioning convex portion 235 extending in the diameter direction is formed in the central portion thereof. By inserting the positioning convex portion 235 into the positioning concave portion 212 of the lock cylinder 21, a gap is secured between the end surface 235a of the positioning convex portion 235 and the inner peripheral surface of the positioning concave portion 212, and a first space is secured. As S1 is formed, the side surface 235b of the positioning convex portion 235 and the inner peripheral surface of the positioning concave portion 212 are in sliding contact with each other so as to be reciprocating in the Z direction. When compressed air (typical value: 0.5 MPa) is supplied to the first space S1, the compressed air also flows between the upper surface of the lock cylinder 21 and the lower surface of the lock piston 23, and the compressed air also flows into the first space S1. Is expanded.

On the outer peripheral surface of the bottom plate portion 232, an O-ring groove 240 having a concave cross section and an annular shape in a plan view is formed from the outside to the inside and over the entire circumference of the outer peripheral surface. The O-ring groove 240 is a groove for fitting the first O-ring OR1 for improving the airtightness so that the compressed air in the first space S1 does not leak.

The piston guide 26 is arranged on the lock cylinder 21 and on the spring member 229 housed in the spring member recess 238 of the lock piston 23. Since the piston guide 26 is the same as that shown in FIGS. 8 (a) to 8 (c) described in the first embodiment, detailed description thereof will be omitted. The piston guide 26 is a member that is urged by a spring member 229 inside the lock cylinder 21 to hold the lock piston 23 so as to be reciprocating while sliding in the Z direction.

The main body 30 is arranged on the piston guide 26. Since the structure of the main body 30 is the same as that shown in FIGS. 9 (a) to 9 (d) and FIG. 10 described in the first embodiment, detailed description thereof will be omitted. The main body 30 is formed so as to have a substantially cylindrical shape, and is formed so that the outer peripheral surface of the cylinder extends in the Z direction when viewed from the front. The main body 30 is for holding the holder 61, the second ball backing plate 62, the positioning pin 63, and the pin holder 64, which will be described later, so as to be movable in the horizontal direction (direction parallel to the surface including the XY direction). It is a member of.

Since the guide pin 32 is the same as that shown in FIG. 11A described in the first embodiment, detailed description thereof will be omitted. As shown in FIG. 40, the guide pin 32 is inserted into the guide pin recess 314 of the main body 30 from the tip portion 324, and is positioned by a step formed in the guide pin recess 314. As a result, the holder 61 is evenly supported from all sides by the tip portion 324 of the guide pin 32. However, the number of guide pins 32 is not limited to four, and may be a sufficient number to hold the weight of the held parts, and may be at least one.

A flat and ring-shaped first ball backing plate 40 is arranged below the main body 30. Since the first ball backing plate 40 is the same as that shown in FIG. 12 described in the first embodiment, detailed description thereof will be omitted. As shown in FIGS. 36A to 38, the first ball backing plate 40 has an outer diameter inside the large inner diameter portion 310 corresponding to the inner diameter of the large inner diameter portion 310 of the large diameter tubular portion 304 of the main body 30. It is formed to fit. A male screw portion 402 is formed on the outer peripheral surface of the first ball backing plate 40. The male screw portion 402 can be screwed to the female screw portion 312 of the large inner diameter portion 310. As a result, the first ball backing plate 40 can rotatably support the first ball 43 held by the ball retainer 66, which will be described later, from below.

A holder 61 is arranged at the position of the central axis of the main body 30. The holder 61 forms a shaft body (corresponding to the center boss 36 of the first embodiment) together with the second ball backing plate 62, the positioning pin 63, and the pin holder 64, which will be described later. As shown in FIGS. 41 (a) and 41 (b), the holder 61 is formed in a columnar shape extending in the Z direction. On the upper surface 611a of the holder 61, three bolt holes 61a, which are arranged at equal intervals at the outer peripheral portion and extend in parallel in the Z direction downward from the upper surface 611a, are formed concentrically. In the central portion of the holder 61 in the Z direction, recesses 612 are formed at equal intervals around the outer peripheral surface. The guide pin 32 is in contact with the recess 612. The holder 61 is connected to the lower surface of the top plate 71 so that its central axis is on the same line as the central axis of the top plate 71.

A second (intermediate) ball contact plate 62 is arranged on the lower surface 611b of the holder 61. The second (intermediate) ball backing plate 62 is formed in a disk shape as shown in FIGS. 42 (a) and 42 (b). The outer diameter of the second (intermediate) ball backing plate 62 is smaller than the inner diameter of the large inner diameter portion 310 of the large diameter tubular portion 304 of the main body 30. A holder recess 626 having a circular plan view is formed in the central portion of the upper surface 622a of the second (intermediate) ball backing plate 62. The inner diameter of the holder recess 626 corresponds to the outer diameter of the holder 61. A pin holder recess 628 having a circular plan view is formed in the central portion of the lower surface 622b of the second (intermediate) ball backing plate 62. The inner diameter of the pin holder recess 628 corresponds to the outer diameter of the pin holder 64, which will be described later. At the position of the holder recess 626, three bolt holes 62a and three positioning pin holes 62b penetrating in the Z direction from the upper surface 622a to the lower surface 622b are alternately formed at equal intervals along the circumference thereof. The bolt hole 62a is formed at a position communicating with the bolt hole 61a of the holder 61.

Further, a positioning pin 63 is arranged on the lower surface 611b of the holder 61. As shown in FIG. 44, the positioning pin 63 has a large-diameter portion 632, a columnar shaft portion 634 having a smaller outer diameter than the large-diameter portion 632 and extending in the Z direction, and a shape protruding downward from the lower surface of the shaft portion 634. It includes an engaging convex portion 636 formed in a hemispherical shape. In the positioning pin 63, the large diameter portion 632 is fitted into the positioning pin hole 62b of the second ball contact plate 62 so that the engaging convex portion 636 faces downward in the Z direction.

The engaging protrusion 636 is formed so as to face the lock guide hole 23a on the upper surface of the lock piston 23 at a predetermined distance. The engaging convex portion 366 is engaged with the inclined surface 233 of the lock guide hole 23a to prevent the holder 61 from moving. The engaging convex portion 636 is formed so that the lowest point of the hemisphere thereof is located below the upper surface of the lock piston 23.

A pin holder 64 is arranged on the lower surface 622b of the second ball backing plate 62. The pin holder 64 is formed in a disk shape as shown in FIGS. 44 (a) and 44 (b). The pin holder 64 is alternately formed with three bolt holes 64a and three positioning pin holes 64b penetrating in the Z direction from the upper surface 642a to the lower surface 642b at equal intervals along the circumference thereof. The bolt hole 64a is formed at a position communicating with the bolt hole 62a of the second (intermediate) ball backing plate 62.

A first ball retainer 66 is arranged on the ball backing plate 40. As shown in FIGS. 45 (a) and 45 (b), the first ball retainer 66 is formed in a flat plate shape and a ring shape. The first ball retainer 66 is formed with a plurality of through holes 662 arranged at equal intervals in the circumferential direction so as to penetrate the plane thereof. The outer diameter of the first ball retainer 66 is formed to be smaller than the inner diameter of the large inner diameter portion 310 of the main body 30, and the inner diameter of the first ball retainer 66 is formed to be larger than the outer diameter of the pin holder 64.

Then, as shown in FIGS. 36A to 38, the first ball 43 is fitted into the plurality of through holes 662. At this time, the upper and lower ends of the first ball 43 are exposed above and below the first ball retainer 66. As a result, the first ball retainer 66 and the first ball 43 are arranged on the ball backing plate 40 so as to be movable in parallel with the surface including the X direction and the Y direction.

Further, as shown in FIGS. 36 to 38, the second ball retainer 67 sandwiches the second (intermediate) ball backing plate 62 in the Z direction on the side opposite to the first ball retainer 66. Have been placed. The second ball retainer 67 is formed in a flat plate shape and a ring shape. The second ball retainer 67 is similar to the first ball retainer 66 shown in FIG. 45, and a plurality of through holes 662 arranged at equal intervals in the circumferential direction are formed so as to penetrate the plane thereof. There is. The outer diameter of the second ball retainer 67 is formed to be smaller than the inner diameter of the large inner diameter portion 310 of the main body 30, and the inner diameter of the second ball retainer 67 is formed to be larger than the outer diameter of the holder 61. Then, the first ball 43 is fitted into the plurality of through holes 662. At this time, the upper and lower ends of the first ball 43 are exposed above and below the second ball retainer 67. As a result, the second ball retainer 67 and the first ball 43 are movably arranged on the second (intermediate) ball backing plate 62 in parallel with the surface including the X and Y directions.

A third ball backing plate 68 is arranged on the third ball 51 held by the second ball retainer 67. As shown in FIG. 46, the third ball backing plate 68 is formed in a plate shape and a ring shape. The outer diameter of the third ball backing plate 68 is formed to have a size corresponding to the inner diameter of the inner diameter portion 308 of the main body 30, and the inner diameter of the third ball backing plate 68 is larger than the outer diameter of the holder 61. Is formed in.

The small-diameter tubular portion 302 of the main body 30 is covered with the main body cover 60. Since the structure of the main body cover 60 is substantially the same as that shown in FIGS. 21 (a) to 21 (c) described in the first embodiment, detailed description thereof will be omitted. A hole 60a for inserting the holder 61 is formed in the upper lid portion 602 of the main body cover 60 at the central portion. The main body cover 60 is formed with, for example, an air cushion air supply port 608 for supplying compressed air from the outer peripheral surface toward the center. The air supply port 608 for the air cushion is for supplying compressed air to the second space S2. The air cushion air supply port 608 is arranged so as to communicate with the air cushion air supply groove 318 of the small diameter tubular portion 302 of the main body 30.

The main body cover 60 is attached to the upper surface of the main body 30 by using bolts 104. As a result, a second space S2 is formed between the main body shaft portion 322 of the four guide pins 32 housed in the main body 30 and the inner peripheral surface of the tubular portion 604 of the main body cover 60, respectively. Then, the air cushion air supply port 608 can evenly supply compressed air to each of the second spaces S2 through the air cushion air supply groove 318 that communicates with the second space S2.

As shown in FIGS. 36A to 38, a top plate 71 is mounted on the holder 61. The top plate 71 has a circular flat plate shape, and its outer diameter is formed to be smaller than the outer diameter of the main body cover 60. A bolt hole 70a for screwing three bolts 112 for attaching the holder 61 is formed in the central portion of the top plate 70. The top plate 71 is formed with four through holes 70b penetrating from the upper surface to the lower surface in the Z direction at equal intervals along the circumference thereof. Two recesses 702 are formed on the upper surface of the top plate 71 so as to face each other at a distance of 180 degrees with a bolt hole 70a in between. Further, on the lower surface of the top plate 71, two recesses 704 are formed with bolt holes 70a in between so as to face each other at a distance of 180 degrees. The top plate 71 is attached to the upper surface of the holder 61 by using bolts 112. At this time, the recess 704 is formed in the top plate 71 and the recess 606 is formed in the upper surface of the main body cover 60. A gap is secured between the upper lid portion 602 of the main body cover 60 and the lower surface of the top plate 71. The top plate 71 can rotate about the central axis of the main body 30.

As shown in FIG. 40, the floating unit 140 having the above configuration has four first guide pins 32a and second guide pins 32b and a third guide pin 32b pressed and supported by compressed air in the second space S2. The guide pin 32c and the fourth guide pin 32d support the holder 61 independently and evenly from all sides. The pressure of the compressed air in the second space S2 is set to an optimum value (recommended pressure range: 0.2 MPa to 0.7 MPa) depending on the weight of the held parts and shaft members and the weight of the center boss and the like. .. By adopting such a configuration, it is possible to increase the maintenance force of the state in which the center position of the top plate 71 and the center position of the main body 30 coincide with each other, that is, the basic position. Therefore, even if the floating unit 140 is mounted in the horizontal direction, the top plate 71 is unlikely to deviate from the basic position. Therefore, even when the shaft member is inserted into the hole of the part by using the part or the shaft member held by the floating unit 140 mounted in the horizontal direction, the part or the shaft member does not fall from the basic position, and the part The central axis of the hole can be aligned with the central axis of the shaft member.

Using this floating unit 140, for example, when inserting a shaft member into a hole of a part, if the central axis of the hole of the part and the central axis of the shaft member are deviated, the ball retainers 66 and 67 and the ball retainer As the first first ball 43 held by 66 and 67 rotates, the center position of the holder 61 (in other words, the center position of the top plate 71) is eccentric as shown in FIG. 36C, and the parts The central axis of the hole and the central axis of the shaft member are aligned. By inserting the shaft member into the hole of the part in this state, the shaft member can be inserted into the hole of the part without bending the shaft member.

Then, until the work of inserting the shaft member into the hole of the component is completed and the floating unit 140 holds the next component or the shaft member, compressed air (representative value: 0. 5 MPa) is supplied. As a result, the lock piston 23 moves upward against the elastic force of the spring member 229, and the inclined surface 23a formed on the lock piston 23 slides on the hemisphere of the engaging convex portion 636 of the positioning pin 63. The engaging convex portion 636 of the positioning pin 63 is pressed toward the central axis by movably contacting the holder 61, and the eccentric holder 61 is center-locked. After that, the supply of compressed air to the first space S1 is stopped, and the floating unit 140 is returned to the basic position shown in FIGS. 36A and 37 and 38 by utilizing the elastic force of the spring member 229. ..

Further, the floating unit 140 adopts a configuration in which the second ball 47 and the third ball 51 move in directions orthogonal to each other on the upper and lower surfaces of the second (intermediate) ball slider 48 of the first embodiment. Therefore, the top plate 71 can rotate.

4. Fourth Embodiment Next, the floating unit according to the fourth embodiment of the present invention will be described. FIG. 47 is a front view showing the floating unit according to the fourth embodiment. The floating unit 150 according to the fourth embodiment is obtained by attaching a top plate 1070 with a Z-direction extrusion mechanism 1005 to the upper surface of the floating unit 10 according to the first embodiment described above. Therefore, the detailed description of the floating unit 10 will be omitted.

FIG. 48A is a plan view of the internal structure of the top plate 1070 with the Z-direction extrusion mechanism 1005 shown in FIG. 47 as viewed from below, and FIG. 48B is a lock of the top plate 1070 with the Z-direction extrusion mechanism 1005. FIG. 48 (c) is a cross-sectional view in the direction including the air supply port for air cushion, and FIG. 48 (c) is a cross-sectional view in the direction including the air supply port for air cushion of the top plate 1070 with the Z-direction extrusion mechanism 1005. The Z-direction extrusion mechanism 1005 includes a flange 1010 and a cylinder 1020.

As shown in FIGS. 49 (a) to 49 (c), the flange 1010 is formed in a substantially disk shape. The flange 1010 is formed with, for example, a Z-direction air cushion air supply port 1114 for supplying compressed air from the outer peripheral surface toward the center. The Z-direction air cushion air supply port 1114 is for supplying compressed air (for example, 0.3 MPa to 0.6 MPa) to the fourth space S4, as will be described later. The air supply port 1114 for the Z-direction air cushion extends 90 degrees upward in the Z direction after extending from the outer peripheral surface of the flange 1010 to the central portion in a plan view of the flange 1010 and parallel to the flange 1010. It is arranged so as to open on the upper surface 1110a of 1010. An O-ring groove 1114a is formed in this opening. The opening communicates with the hole 1030a of the cylindrical portion 1132 of the guide 1030 described later.

Further, the flange 1010 has an angle of 90 degrees with respect to the air cushion air supply port 1114 in the Z direction in a plan view, and is a lock air supply port for supplying compressed air from the outer peripheral surface toward the center. 1116 is formed. The lock air supply port 1116 is for supplying compressed air (for example, 0.3 MPa to 0.6 MPa) to the fifth space S5, as will be described later. The lock air supply port 1116 extends from the outer peripheral surface of the flange 1010 to the vicinity of the opening of the Z-direction air cushion air supply port 1114 located at the center in a plan view and extends parallel to the flange 1010. It is arranged so as to bend 90 degrees upward in the Z direction and open to the upper surface 1110a of the flange 1010. This opening communicates with the large inner diameter portion 1122b of the cylinder 1020, which will be described later.

The flange 1010 is formed with four bolt holes 1010a penetrating in the Z direction from the lower surface 1110b to the upper surface 1110a at equal intervals along the circumference thereof. The upper surface 1110a of the flange 1010 is formed with shaft recesses 1010b for inserting the shaft 1060, which will be described later, at equal intervals along the circumference thereof. The inner diameter of the shaft recess 1010b corresponds to the outer diameter of the shaft 1060, and the shaft 1060 can move while sliding in contact with the inner peripheral surface of the shaft recess 1010b. The flange 1010 has four female screw holes 1010d formed between the bolt holes 1010a and the shaft recesses 1010b at equal intervals along the circumference thereof. Further, in the flange 1010, four bolt holes 1010c extending in parallel in the Z direction at equal intervals along the circumference of the opening of the air cushion air supply port 1114 for the Z direction located at the center of the upper surface 1110a are formed in the Z direction. It is formed near the opening of the air cushion air supply port 1114a. In a plan view, the bolt hole 1010a, the shaft recess 1010b, and the female screw hole 1010d are arranged concentrically, and the bolt hole 1010c is arranged on another concentric circle.

A cylinder 1020 is arranged on the flange 1010. The cylinder 1020 is formed in a substantially disk shape as shown in FIGS. 50 (a) and 50 (b). A piston hole 1122 having a circular cross section is formed in the central portion of the cylinder 1020 for inserting a piston 1040 described later that penetrates from the lower surface 1120b to the upper surface 1120a in the Z direction. On the inner peripheral surface of the piston hole 1122, a small inner diameter portion 1122a having a small inner diameter located on the upper opening side and a large inner diameter portion 1122b having an inner diameter larger than the inner diameter of the small inner diameter portion 1122a are formed. On the inner peripheral surface of the lower opening of the large inner diameter portion 1122b, an O-ring groove 1124 having a concave cross section and an annular shape in a plan view is formed over the entire circumference. The O-ring groove 1124 is a groove for fitting a tenth O-ring OR10 for improving airtightness so that compressed air in the fifth space S5 does not leak.

The cylinder 1020 has four shaft holes 1126 extending in parallel in the Z direction at equal intervals along its circumference in the vicinity of the shaft holes 1126. On the inner peripheral surface of the shaft hole 1126, a small inner diameter portion 1126a having a small inner diameter is formed on the upper opening side, and a large inner diameter larger than the inner diameter of the small inner diameter portion 1126a extending toward the lower opening side is formed. The inner diameter portion 1126b is formed. After the cylindrical bush 1052 is fitted into the large inner diameter portion 1126b, the annular collar 1050 prevents the bush 1052 from coming off (see FIG. 48 (b)). The inner diameters of the collar 1050 and bush 1052 are equal to the inner diameter of the small inner diameter portion 1126a of the shaft hole 1126.

The cylinder 1020 is formed with four bolt holes 1020a extending in parallel in the Z direction at equal intervals along the circumference of the cylinder 1020 with the shaft holes 1126 in between. In plan view, the shaft holes 1126 and the bolt holes 1020a are arranged concentrically. The bolt hole 1020a is formed at a position communicating with the bolt hole 1010a of the flange 1010. Therefore, the cylinder 1020 and the flange 1010 are connected by screwing the bolt 1012 into the bolt hole 1020a and the bolt hole 1010a.

Further, on the flange 1010, a guide 1030 is arranged at the center thereof. The guide 1030 has a cylindrical portion 1132 and a circular collar portion 1134, as shown in FIGS. 51 (a) and 51 (b). The cylindrical portion 1132 is formed with a hole 1030a having a circular cross section that penetrates from the lower surface 1130b to the upper surface 1130a in the Z direction. The lower surface 1130b side of the hole 1030a communicates with the Z-direction air cushion air supply port 1114 of the flange 1010, and the upper surface 1130a side communicates with the fourth space S4. On the outer peripheral surface of the upper part of the cylindrical portion 1132, an O-ring groove 1136 having a concave cross-sectional view and an annular shape in a plan view is formed over the entire circumference. The O-ring groove 1136 is a groove for fitting a ninth O-ring OR9 for improving airtightness so that compressed air in the fourth space S4 does not leak. A circular collar portion 1134 is provided on the lower surface 1130b side of the guide 1030. The circular collar portion 1134 is formed with four bolt holes 1030b extending in parallel in the Z direction at equal intervals along the circumference thereof. The bolt hole 1030b is formed at a position communicating with the bolt hole 1010c of the flange 1010. Therefore, the guide 1030 and the flange 1010 are connected by screwing the bolt 1014 into the bolt hole 1030b and the bolt hole 1010c.

The piston 1040 is housed inside the piston hole 1122 of the cylinder 1020. The piston 1040 is formed in a substantially columnar shape as shown in FIGS. 52 (a) and 52 (b). Four bolt holes 1040a extending parallel to the Z direction are formed on the upper surface 1140a of the piston 1040. As for the outer diameter of the piston 1040, the substantially upper half in the Z direction corresponds to the inner diameter of the small inner diameter portion 1122a of the cylinder 1020, and the substantially lower half corresponds to the inner diameter of the large inner diameter portion 1122b of the cylinder 1020. It can move in the Z direction while sliding in contact with the inner peripheral surface of the piston hole 1122. At a position below the outer peripheral surface of the piston 1040, an O-ring groove 1146 having a concave cross-sectional view and an annular shape in a plan view is formed between a pair of annular protrusions 1144a and 1144b over the entire circumference of the outer peripheral surface. Has been done. The O-ring groove 1146 is a groove for fitting the eleventh O-ring OR11 for improving the airtightness so that the compressed air in the fifth space S5 does not leak.

A recess 1142 capable of accommodating the guide 1030 is formed on the lower surface 1140b of the piston 1040. The recess 1142 has a large inner diameter portion 1142a that accommodates the circular flange portion 1134 of the guide 1030 and a small inner diameter portion 1142b that accommodates the cylindrical portion 1132 of the guide 1030. The inner diameter of the large inner diameter portion 1142a is set to be larger than the outer diameter of the circular flange portion 1134 of the guide 1030. On the other hand, the inner diameter of the small inner diameter portion 1142b corresponds to the outer diameter of the cylindrical portion 1132 of the guide 1030, and the cylindrical portion 1132 of the guide 1030 can move in the Z direction while sliding in contact with the inner peripheral surface of the small inner diameter portion 1142b. be.

A top plate 1070 is arranged on the piston 1040. As shown in FIGS. 53 (a) and 53 (b), the top plate 1070 is formed in a substantially disk shape. A piston recess 1072 having a circular plan view is formed in the central portion of the lower surface 1170b of the top plate 1070. The inner diameter of the piston recess 1072 coincides with the outer diameter of the upper surface 1140a of the piston 1040. At the position of the piston recess 1072, four bolt holes 1070a penetrating from the upper surface to the lower surface in the Z direction are formed at equal intervals along the circumference thereof. The bolt hole 1070a is formed at a position communicating with the bolt hole 1040a of the piston 1040. Therefore, the piston 1040 and the top plate 1070 are connected by screwing the bolt 1016 into the bolt hole 1070a and the bolt hole 1040a.

Further, at the outer position of the piston recess 1072, four bolt holes 1070b penetrating from the upper surface to the lower surface in the Z direction are formed at equal intervals along the circumference thereof. By screwing the bolt 1018 screwed into the bolt hole 1070b into the bolt hole 1060a of the columnar shaft 1060, four columnar shafts 1060 extending in the Z direction are attached to the lower surface of the top plate 1070 (FIG. 48 (b)). Each of the four columnar shafts 1060 is housed in a shaft hole 1126 of the cylinder 1020. The outer diameter of the columnar shaft 1060 corresponds to the inner diameter of the small inner diameter portion 1126a of the shaft hole 1126, and the cylindrical shaft 1060 is the inner peripheral surface of the small inner diameter portion 1126a of the shaft hole 1126 and the inside of the bush 1052. It can move while sliding on the peripheral surface, the inner peripheral surface of the collar 1050, and the inner peripheral surface of the shaft recess 1010b of the flange 1010. The four columnar shafts 1060 can stably move the top plate 1070. Further, on the outer peripheral edge portion of the top plate 1070, six through holes 1070c penetrating from the lower surface to the upper surface in the Z direction are formed at equal intervals along the circumference thereof.

The top plate 1070 with the Z-direction extrusion mechanism 1005 is connected to the upper surface of the top plate 70 of the floating unit 10 by utilizing the female screw holes 1010d of the flange 1010.

In the top plate 1070 with the Z-direction extrusion mechanism 1005 having the above configuration, the fourth space S4 is formed in a region surrounded by the upper surface 1130a of the guide 1030 and the small inner diameter portion 1142b of the piston 1040. Further, the fifth space S5 is the upper surface 1110a of the flange 1010, the cylindrical portion 1132 and the circular flange portion 1134 of the guide 1030, the large inner diameter portion 1122b of the cylinder 1020, and the lower surface 1140b and the large inner diameter portion of the piston 1040. It is formed in a region surrounded by 1142a. The fourth space S4 has a function of mainly imparting an elastic force in the Z direction to the piston 1040 when compressed air (for example, 0.3 MPa to 0.6 MPa) is supplied. The fifth space S5 has a function of mainly moving the stroke position of the piston 1040 in the Z direction when compressed air (for example, 0.3 MPa to 0.6 MPa) is supplied (for example, the fourth embodiment). In the case of, the stroke amount in the Z direction is 5 mm). The movement of the piston 1040 is performed until the annular projection 1144a of the piston 1040 comes into contact with the step between the small inner diameter portion 1122a and the large inner diameter portion 1122b of the cylinder 1020 and stops. When the supply of compressed air to the fourth space S4 and the fifth space S5 is stopped, the piston 1040 is locked as shown in FIG. 54. As a result, by adjusting the air pressure of the compressed air to the fourth space S4 and the fifth space S5, the Z direction suitable for the top plate 1070 connected to the piston 1040 without changing the structure. It is possible to impart the elastic force of. On the other hand, when a metal spring is used, it is necessary to change the length and material thickness of the metal spring in order to obtain an appropriate elastic force, and there is a problem that the structure must be changed.

5. Fifth Embodiment Next, the floating unit according to the fifth embodiment of the present invention will be described. FIG. 55 is a front view showing the floating unit according to the fifth embodiment. The floating unit 160 according to the fifth embodiment has a top plate 1270 with a top plate horizontal holding cushion mechanism 1205 attached to the upper surface of the floating unit 10 according to the first embodiment described above. Therefore, the detailed description of the floating unit 10 will be omitted.

FIG. 56A is a plan view of the internal structure of the top plate 1270 with the top plate horizontal holding cushion mechanism 1205 shown in FIG. 55 as viewed from above, and FIG. 56B is an air cushion of the top plate horizontal holding cushion mechanism 1205. FIG. 56 (c) is a cross-sectional view in a direction including the air supply port 1214, and FIG. 56 (c) is a cross-sectional view in another direction. The top plate horizontal holding cushion mechanism 1205 includes a flange 1210 and a main body 1220.

As shown in FIGS. 57 (a) to 57 (d), the flange 1210 includes a disc-shaped bottom plate portion 1212 and a circular convex portion 1213 provided at the center of the upper surface 1212a of the bottom plate portion 1212. The bottom plate portion 1212 is formed with, for example, an air cushion air supply port 1214 for supplying compressed air from the outer peripheral surface toward the center. The air cushion air supply port 1214 is for supplying compressed air (for example, 0.2 MPa to 0.7 MPa) to the sixth space S6, as will be described later. The air supply port 1214 for the air cushion extends 90 degrees upward in the Z direction from the outer peripheral surface of the bottom plate portion 1212 toward the center in a plan view of the bottom plate portion 1212 and extends parallel to the bottom plate portion 1212. It is arranged so as to open to the upper surface 1212a of the 1212. This opening communicates with the annular recess 1215 formed on the upper surface 1212a of the bottom plate portion 1212.

The annular recess 1215 is formed on the outside of the circular convex portion 1213 and on the outer peripheral edge portion of the bottom plate portion 1212 along the circumference of the circular convex portion 1213. The annular recess 1215 secures a gap between the lower surface of the piston 1250 described later and the upper surface 1212a of the bottom plate portion 1212 to form the sixth space S6. On the inside and outside of the annular recess 1215, an O-ring groove 1216 and an O-ring groove 1217 having a concave cross section and an annular shape in a plan view are provided apart from the annular recess 1215, respectively, over the entire circumference of the annular recess 1215. It is formed. The O-ring groove 1216 and the O-ring groove 1217 are for fitting the twelfth O-ring OR12 and the thirteenth O-ring OR13 for improving the airtightness so that the compressed air in the sixth space S6 does not leak, respectively. It is a groove. In the annulus recess 1215, four bolt holes 1210a extending in the Z direction are formed at equal intervals.

The circular convex portion 1213 is formed so as to extend in a direction (Z direction) orthogonal to the bottom plate portion 1212 on the upper side of the bottom plate portion 1212. The circular convex portion 1213 is formed with a concave portion 1219 for a rotating sphere having a concave cross section and a circular plan view. The rotary ball recess 1219 extends from the upper surface of the circular convex portion 1213 to the lower portion of the bottom plate portion 1212 in the Z direction. A hole 1218 for removing a machining mark left during machining is formed in the central portion of the bottom surface 1219a of the rotary ball recess 1219. The hole 1218 penetrates from the bottom surface 1219a to the bottom surface 1212b of the bottom plate portion 1212 in the Z direction.
Female screw holes 1210b are formed at equal intervals on the outer peripheral edge of the lower surface 1212b of the bottom plate portion 1212.

The main body 1220 is arranged on the flange 1210. As shown in FIGS. 58 (a) to 58 (c), the main body 1220 is formed in a substantially disk shape. A rotating sphere hole 1222 having a circular cross section is formed in the central portion of the main body 1220 for inserting the rotating sphere 1240 described later that penetrates from the lower surface 1320b to the upper surface 1320a in the Z direction. A female screw portion 1324 is formed on the upper half of the inner peripheral surface 1322 of the rotary ball hole 1222. An inclined surface 1326 that descends toward the outside is formed on the outer peripheral edge portion of the upper surface 1320a of the main body 1220. In the case of the fifth embodiment, the inclination angle of the inclined surface 1326 is set to, for example, 15 °.

The main body 1220 has eight piston holes 1224 extending in parallel in the Z direction at equal intervals along its circumference in the vicinity of the rotary ball hole 1222. On the inner peripheral surface of the piston hole 1224, a small inner diameter portion 1224a having a small inner diameter is formed on the upper opening side, and a large inner diameter larger than the inner diameter of the small inner diameter portion 1224a extending toward the lower opening side is formed. The inner diameter portion 1224b is formed. The piston 1250 is fitted into the large inner diameter portion 1224b with its tip end facing up.

As shown in FIG. 59, each of the eight pistons 1250 has a columnar shaft portion 1252 and a disc-shaped base portion 1254. On the outer peripheral surface of the disk-shaped base portion 1254, an O-ring groove 1256 having a concave cross-sectional view and an annular shape in a plan view is formed over the entire circumference. The O-ring groove 1256 is a groove for fitting a 14th O-ring OR14 for improving airtightness so that compressed air in the sixth space S6 does not leak. In the piston 1250, the disk-shaped base portion 1254 is fitted to the large inner diameter portion 1224b of the main body 1220. The 14th O-ring OR14 is arranged on the surface where the main body 1220 and the piston 1250 are in contact with each other.

Further, the main body 1220 is formed with four bolt holes 1220a extending in parallel in the Z direction at equal intervals along the circumference thereof with the piston holes 1224 in between. In a plan view, the piston holes 1224 and the bolt holes 1220a are arranged concentrically. The bolt hole 1220a is formed at a position communicating with the bolt hole 1210a of the flange 1210. Therefore, the main body 1220 and the flange 1010 are connected by screwing the bolt 1290 into the bolt hole 1220a and the bolt hole 1210a. At this time, the fifteenth O-ring OR15 for improving the airtightness so that the compressed air in the sixth space S6 does not leak is arranged on the stepped surface where the head of the bolt 1290 and the main body 1220 are in contact with each other.

A rotating ball receiver 1230 is arranged on the bottom surface 1219a of the rotating ball recess 1219 of the flange 1210. As shown in FIGS. 60 (a) and 60 (b), the rotary ball receiver 1230 has a mortar shape, and the outer diameter of the rotary ball receiver 1230 corresponds to the inner diameter of the rotary ball recess 1219 of the flange 1210. It is formed so as to fit inside. The rotary ball receiver 1230 forms an inclined surface 1232 of a mortar that has a large opening on the upper surface 1330a side and a smaller opening diameter from the upper surface 1330a side to the bottom. The inclined surface 1232 abuts slidably on the rotating sphere 1240. A hole 1234 is formed in the central portion of the inclined surface 1232 for removing processing marks left during processing. The hole 1234 penetrates from the inclined surface 1232 to the lower surface 1330b of the rotating ball receiver 1230 in the Z direction.

The rotating ball 1240 is arranged on the inclined surface 1232 of the rotating ball receiver 1230. As shown in FIGS. 61 (a) and 61 (b), the rotating sphere 1240 has a sphere body portion 1242 and a disk-shaped base portion 1244. The sphere body portion 1242 is spherical except for the portion in contact with the upper disk-shaped base portion 1244, and its radius of curvature is equal to the radius of curvature of the inclined surface 1232 of the rotating sphere receiver 1230. Therefore, the ball body portion 1242 slidably abuts on the inclined surface 1232 of the rotating ball receiver 1230. On the upper surface of the disk-shaped base 1244, four bolt holes 1240a extending in parallel in the Z direction are formed at equal intervals along the circumference thereof.

The lid 1260 is screwed onto the main body 1220 with the rotating sphere 1240 mounted on the rotating sphere receiver 1230, so that the lid 1260 is pressed against the upper portion of the sphere main body portion 1242 of the rotating sphere 1240 to bring the rotating sphere 1240 into a rotating sphere. By holding it on the receiving 1230 side, the rotating ball 1240 is reliably positioned inside the rotating ball recess 1219 of the main body 1220.
The disk-shaped base 1244 of the rotating sphere 1240 projects upward by a predetermined length from the upper surface 1320a of the main body 1220. As a result, it is possible to secure a state in which the upper surface 1320a of the main body 1220 and the lower surface 1370b of the top plate 1270 are separated by an appropriate distance in the Z direction. The "predetermined length" of the disk-shaped base 1244 means that when the floating unit 160 is arranged in the horizontal direction and the top plate 1270 is tilted, the lower surface 1370b of the top plate 1270 comes into surface contact with the inclined surface 1326 of the main body 1220. It means the length that can be done.

As shown in FIGS. 62 (a) and 62 (b), the lid 1260 has an annular shape in a plan view, and a male screw portion 1262 is formed on the outer peripheral surface. The male screw portion 1262 is screwed to the female screw portion 1324 of the rotary ball hole 1222 of the main body 1220. The lid 1260 is formed so that its outer diameter corresponds to the inner diameter of the inner peripheral surface 1322 of the rotary ball hole 1222 of the main body 1220 and is fitted inside the rotary ball recess 1219. The inner peripheral surface of the lid 1260 has a triangular cross section protruding inward, and its inner diameter is formed so as to be smaller than the diameter of the sphere body portion 1242 of the rotating sphere 1240.

A top plate 1270 is arranged on the rotating sphere 1240. As shown in FIGS. 63 (a) to 63 (c), the top plate 1270 is formed in a substantially disk shape. At the center of the upper surface 1370a of the top plate 1070, four bolt holes 1270a penetrating from the upper surface to the lower surface in the Z direction are formed at equal intervals. The bolt hole 1270a is formed at a position communicating with the bolt hole 1240a of the rotating ball 1240. Therefore, the rotating sphere 1240 and the top plate 1070 are connected by screwing the bolt 1292 into the bolt hole 1270a and the bolt hole 1240a.
At positions outside the bolt holes 1270a, four through holes 1270b are formed at equal intervals to penetrate from the upper surface to the lower surface in the Z direction.

At the center of the lower surface 1370b of the top plate 1070, a pedestal portion 1274 having a circular plan view is formed so as to project from the lower surface 1370b. Through holes 1270b are located at equal intervals on the outer peripheral edge of the pedestal portion 1274. A concave portion 1276 for a rotating ball is formed in the central portion of the pedestal portion 1274. The inner diameter of the rotating sphere recess 1276 coincides with the outer diameter of the upper surface of the disk-shaped base 1244 of the rotating sphere 1240. Bolt holes 1270a are located at equal intervals along the circumference of the rotating ball recess 1276.

Further, eight circular piston receiving recesses 1272 in a plan view are formed at equal intervals along the outer circumference between the pedestal portion 1274 of the lower surface 1370b of the top plate 1270 and the outer circumference. A piston receiver 1280 is arranged in the piston receiving recess 1272. As shown in FIGS. 64 (a) and 64 (b), the piston receiving 1280 has a mortar shape, and its outer diameter fits inside the piston receiving recess 1272 corresponding to the inner diameter of the piston receiving recess 1272. It is formed to be crowded. The piston receiver 1280 forms an inclined surface 1282 of a mortar that has a large opening on the lower surface 1380b side and a smaller opening diameter from the lower surface 1380b side upward. The tip of the piston 1250 hits the center of the inclined surface 1282.

The top plate 1270 with the top plate horizontal holding cushion mechanism 1205 is connected to the upper surface of the top plate 70 of the floating unit 10 by utilizing the female screw holes 1210b of the lower surface 1212b of the flange 1210.

In the top plate 1270 with the top plate horizontal holding cushion mechanism 1205 having the above configuration, the sixth space S6 is the large inner diameter of the upper surface 1212a of the bottom plate portion 1212 of the flange 1210, the bottom surface of the piston 1250, and the piston hole 1224 of the main body 1220. It is formed in a region surrounded by the portion 1224b. The sixth space S6 has a function of pushing the piston 1250 in the Z direction along the piston hole 1224 of the main body 1220 when compressed air (for example, 0.2 MPa to 0.7 MPa) is supplied. The movement of the piston 1250 is performed until the disk-shaped base portion 1254 of the piston 1250 comes into contact with the step between the small inner diameter portion 124a and the large inner diameter portion 1244b of the main body 1220 and stops.

Then, with the supply of compressed air to the sixth space S6 stopped, the floating unit 160 is arranged in the horizontal direction for inserting the parts, as shown in FIGS. 65 (a) and 65 (b). Then, the top plate 1270 is tilted by its own weight, and the ball body portion 1242 of the rotating sphere 1240 slides on the inclined surface 1232 of the rotating sphere receiver 1230. At this time, the top plate 1270 tilts while pushing a part of the piston 1250 in the Z direction along the piston hole 1224 of the main body 1220. The inclination is performed up to an inclination angle (± 15 ° in the case of the fifth embodiment) at which the lower surface 1370b of the top plate 1270 abuts on the inclined surface 1326 of the main body 1220 and stops. Therefore, by supplying compressed air to the sixth space S6, the top plate 1270 can be returned to the horizontal position (perpendicular to the Z direction).
The rotation of the top plate 1270 is stopped by the top plate horizontal holding cushion mechanism 1205.

6. Sixth Embodiment Next, the floating unit according to the sixth embodiment of the present invention will be described. FIG. 66 is a right side view showing the floating unit according to the sixth embodiment. 67 and 68 are cross-sectional views showing the internal structure of the floating unit shown in FIG. 66 in the Z direction, respectively. FIG. 69 is a cross-sectional view showing the internal structure of the floating unit shown in FIG. 66 in the XY directions. The details of the parts and parts similar to those used in the first embodiment described above will be omitted.

As shown in FIGS. 66 to 69, the floating unit 170 is arranged inside the bottom block 2 having a bottom surface, the main body block 1404 having an internal space arranged on the bottom block 2, and the main body block 1404. A top plate attached to the center boss 36 so as to cover the end of the main body block 1404 at a distance from the end of the main body block 1404 on the opposite side of the bottom block 2 and the center boss (also referred to as a shaft body) 36. A plurality of first balls 43, second balls 47, and third balls arranged inside the main body 1430 of the main body block 1404 and for movably supporting the center boss 36 with respect to the bottom block 2. 51, a ring-shaped ball retainer 42 arranged inside the main body block 1404 and arranged around the center boss 36 to arrange the first ball 43 in a predetermined positional relationship, and a second ball 47. A ring-shaped first slide retainer 46 arranged around the center boss 36 to be arranged in a predetermined positional relationship, and a third ball 51 around the center boss 36 to be arranged in a predetermined positional relationship. A ring-shaped second slide retainer 50 to be arranged, a ring-shaped first ball slider 44 arranged around the center boss 36 to move the second ball 47 in the Y direction, and a second ball slider 44. A ring-shaped second (intermediate) ball slider 48 arranged around the center boss 36 to move the ball 47 in the Y direction and the third ball 51 in the X direction, and a third ball 51. A ring-shaped third ball slider 52 arranged around the center boss 36 and a third ball slider 52 arranged on the bottom block 2 to supply compressed air, which is a gas having a predetermined pressure, to move the force in the X direction. The top plate center lock portion 3 which has the space S1 of 1 and applies a force in the direction of center-locking the top plate 70 by supplying compressed air which is a gas having a predetermined pressure to the first space S1. The bearing pin 1470 is arranged on the rotating disk 1450 of the main body block 1404 and a predetermined pressure is applied by the elastic force of the spring member 1532, and a predetermined pressure is applied to the bearing pin 1470 by the spring member 1532. The floating unit 170 can move in the direction in which the top plate 70 is orthogonal to the central axis CL, including the spring member cushion portion 1405 that applies a force in the direction of holding the center boss 36 from one direction. Moreover, the turntable 1450 is configured so that it can rotate about the central axis CL.

Since the bottom block 2 is the same as that shown in FIGS. 1 to 8 described in the first embodiment, detailed description thereof will be omitted.

The main body block 1404 includes a main body 1430, a turntable 1450 that covers the upper part of the main body 1430, and a needle bearing 1520 arranged between the main body 1430 and the turntable 1450.
Includes bearing pins 1470 attached to the turntable 1450. The needle bearing 1520 has the ball on the circumference and facilitates the rotation of the turntable 1450.

The spring member cushion portion 1405 arranged in the rotating disk 1450 has an elastic force in the rotating disk 1450 having the bearing pin hole 1452, the bearing pin 1470 through which the bearing pin hole 1452 of the rotating disk 1450 is inserted, and the bearing pin 1470. Includes a spring member 1532 that applies a predetermined pressure, a bearing pin holder 1460 that is attached to a turntable 1450 and holds a bearing pin 1470, and a rotation weight 1480 that is attached to the bearing pin holder 1460.

The "predetermined pressure" due to the elastic force of the spring member 1532 of the spring member cushion portion 1405 has a thrust that does not cause misalignment against the weight of the held parts and the shaft member and the own weight of the center boss 36 and the like. It means elastic pressure.

Hereinafter, a more detailed description will be given.
The lower part of the main body 1430 is placed on the upper surface of the peripheral region of the flat plate-shaped main portion of the piston guide 26, and the main body 1430 is attached to the piston guide 26. The main body 1430 is a member for slidably holding the center boss 36 shown in FIG. 13 described in the first embodiment in the horizontal direction (direction parallel to the plane including the X direction and the Y direction) inside the main body 1430. Is.

The center boss 36 is inserted into each of the main body 1430 and the turntable 1450 so as to extend upward from the lower portion along the center line CL in the hollow portion provided in the central region thereof. A top plate 70 shown in FIG. 22 described in the first embodiment is attached to the upper end of the center boss 36.

When the main body 1430 is mounted on the piston guide 26, the hemispherical convex portion (engagement convex portion 366) formed at the lower end of the center boss 36 mounted on the main body 1430 side is a recessed portion of the lock guide 24. It is opposed to (inclined surface 24b).

The main body 1430 constitutes a housing, and in the cavity inside the main body 1430, the ball backing plate 40 and the ball retainer 42 and the ball retainer 42 shown in FIGS. 2A to 4 and 15 to 20B described in the first embodiment. A stacking structure of a ball slider 44, a first slide retainer 46, a second (intermediate) ball slider 48, and a second slide retainer 50 is arranged.

As shown in FIGS. 70 (a) to 70 (c), the main body 1430 is formed in a substantially cylindrical shape having a space inside thereof, and is formed so that the outer peripheral surface of the cylinder extends in the Z direction in the front view. Has been done.
The main body 1430 includes a small-diameter tubular portion 1432 formed in a cylindrical shape extending in the Z direction, and a medium-diameter tubular portion 1434 formed in a cylindrical shape having an outer diameter larger than that of the small-diameter tubular portion 1432 and extending in the Z direction. It is composed of a large-diameter tubular portion 1436 having a larger outer diameter than the medium-diameter tubular portion 1434 and formed in a cylindrical shape extending in the Z direction.
The large-diameter tubular portion 1436, the medium-diameter tubular portion 1434, and the small-diameter tubular portion 1432 are stacked in this order sharing a central axis from the lower side to the upper side in the Z direction.

As shown in FIGS. 67 and 68, the small-diameter tubular portion 1432 accommodates the central portion of the shaft portion of the center boss 36 inward so that the center boss 36 can also slide in the horizontal direction.
The inner diameter of the small inner diameter portion 1438 of the small diameter tubular portion 1432 is larger than the outer diameter of the shaft portion of the center boss 36 to which the center collar 38 is mounted, and is formed between the outer peripheral surface of the center collar 38 and the inner peripheral surface of the small inner diameter portion 1438. A gap of a predetermined size is secured between them.

On the outer peripheral surface of the small-diameter tubular portion 1432, a bearing receiving portion 1433 that extends outward in the lower position in the Z direction and has a rectangular cross-sectional view and an annular shape in a plan view over the entire circumference of the outer peripheral surface. Is formed. On the upper surface of the bearing receiving portion 1433, a convex portion 1500 in contact with the outer peripheral surface of the small-diameter tubular portion 1432 is formed in an annular shape in a plan view over the entire circumference of the outer peripheral surface.
The convex portion 1500 is for holding the needle bearing 1520.

On the upper end surface of the small-diameter tubular portion 1432, four bolt holes 1430b that penetrate the small-diameter tubular portion 1432 in the Z direction are formed at equal intervals along the circumference thereof. The bolt hole 1430b and the third ball slider 52 communicate with each other in the Z direction, and the bolt 102 is screwed into the bolt hole 1430b to integrate the main body 1430 and the third ball slider 52 and the tip of the bolt 102. Press the upper surface of the second slide retainer 50 with.

On the inner peripheral surface of the medium-diameter tubular portion 1434, a medium-inner diameter portion 1440 having an inner diameter larger than the inner diameter of the small inner diameter portion 1438 of the small-diameter tubular portion 1432 on the upper opening side, and a medium-inner diameter portion 1440 below the inner diameter portion It forms a large inner diameter portion 1442 having an inner diameter larger than the inner diameter of 1440. The inner diameter of the middle inner diameter portion 1440 is formed so as to match the outer diameter of the third ball slider 52.

The inner peripheral surface of the large-diameter tubular portion 1436 is formed by extending the large-diameter portion 1442 of the medium-diameter tubular portion 1434 in the Z direction. On the inner peripheral surface of the large-diameter portion 1442, a female screw portion 1444 is formed by a predetermined dimension on the upper side in the Z direction from the lower end surface of the large-diameter tubular portion 1436.
The inner diameter of the large-diameter tubular portion 1436 is formed to be larger than the outer diameter of the third ball slider 52.

On the lower end surface of the large-diameter tubular portion 1436, four bolt holes 1430a that penetrate the large-diameter tubular portion 1436 in the Z direction are formed at equal intervals along the circumference thereof. Further, two positioning pin holes extending upward from the lower end surface in the Z direction to a predetermined position of the large diameter tubular portion 1436 so as to face the lower end surface of the large diameter tubular portion 1436 at a distance of 180 degrees. 1430c is formed. In a plan view, the bolt holes 1430a and the positioning pin holes 1430c are arranged concentrically.
The bolt hole 1430a, the bolt hole 20a of the lock cylinder 20, and the bolt hole 26a of the piston guide 26 communicate with each other in the Z direction, and by screwing the bolt 100, the main body 30, the lock cylinder 20, and the piston guide 26 are connected. And are integrated.
Further, when the bolt 100 is screwed, the positioning pin hole 1430c, the positioning pin hole 20d of the lock cylinder 20, and the positioning pin 108 inserted into the positioning pin hole 26b of the piston guide 26 are used for positioning.

The turntable 1450 arranged on the upper side of the main body 1430 has a center boss 36 inserted in the upper half of the hollow portion provided in the central region thereof along the center line CL, and the center line is inserted in the lower half of the hollow portion. A small diameter tubular portion 1432 of the main body 1430 is housed along the CL.

As shown in FIGS. 71 (a) to 71 (c), the turntable 1450 is formed in a substantially cylindrical shape having a space inside thereof, so that the outer peripheral surface of the cylinder extends in the Z direction in the front view. It is formed. A part of the upper half of the outer peripheral surface of the cylinder is cut out to form a mounting surface 1448 for mounting the bearing pin holder 1460. At the center of the mounting surface 1448, a bearing pin through hole 1450a through which the bearing pin 1470 is inserted is provided, which penetrates from the mounting surface 1448 toward the inside (center boss 36 side). Bolt holes 1450b extending from the mounting surface 1448 toward the inside (center boss 36 side) are provided on both sides of the mounting surface 1448 in the XY directions.

The turntable 1450 has a first inner diameter portion 1454, a second inner diameter portion 1455 whose inner diameter is larger than the first inner diameter portion 1454, and a second inner diameter portion 1455 from the upper surface 1550a to the lower surface 1550b on the inner peripheral surface of the cylinder. A third inner diameter portion 1456 larger than the inner diameter portion 1455 and a fourth inner diameter portion 1457 having an inner diameter larger than the third inner diameter portion 1456 are formed.
The inner diameter of the first inner diameter portion 1454 is larger than the outer diameter of the shaft portion of the center boss 36 to which the center collar 38 is mounted, and is between the outer peripheral surface of the center collar 38 and the inner peripheral surface of the first inner diameter portion 1454. Is secured with a gap of a predetermined dimension.
The inner diameter of the second inner diameter portion 1455 is larger than the outer diameter of the small diameter tubular portion 1432 of the main body 1430, and between the outer peripheral surface of the small diameter tubular portion 1432 and the inner peripheral surface of the second inner diameter portion 1455, The needle bearing 1520 is arranged.
The inner diameter of the third inner diameter portion 1456 is larger than the outer diameter of the bearing receiving portion 1433 of the main body 1430, and a predetermined value is provided between the outer peripheral surface of the bearing receiving portion 1433 and the inner peripheral surface of the third inner diameter portion 1456. A dimensional gap is secured.
The inner diameter of the fourth inner diameter portion 1457 is equal to the outer diameter of the bearing backing plate 1510 described below. The fourth inner diameter portion 1457 is formed with an O-ring groove 1459 having a rectangular cross-sectional view and an annular shape in a plan view over the entire circumference of the inner peripheral surface thereof. The O-ring groove 1459 is a groove for fitting the 16th O-ring OR16 for fixing the bearing backing plate 1510 to the turntable 1450.

On the stepped surface 1551 between the first inner diameter portion 1454 and the second inner diameter portion 1455, a convex portion 1502 that protrudes downward in the Z direction and is in contact with the outer peripheral surface of the third inner diameter portion 1456 is formed on the outer peripheral surface. It is formed in an annular shape in a plan view over the entire circumference of the above.
The convex portion 1502 is for holding the needle bearing 1520.

A bearing pin holder 1460 is attached to the attachment surface 1448 of the turntable 1450. As shown in FIGS. 72 (a) and 72 (b), the bearing pin holder 1460 is formed with a bearing pin hole 1462 having a convex cross section at the center thereof. The bearing pin hole 1462 has a bearing pin accommodating portion 1462a provided on the mounting surface 1560a side and a screw portion 1462b provided on the open surface 1560b side. The bearing pin hole 1462 and the bearing pin through hole 1450a of the rotating disk 1450 communicate with each other in the Z direction.
Bolt through holes 1460a penetrating from the open surface 1560b side toward the mounting surface 1560a side (center boss 36 side) are provided on both sides of the open surface 1560b in the XY directions. The bolt hole 1460a and the bolt hole 1450b of the rotating disk 1450 communicate with each other in the Z direction, and the rotating disk 1450 and the bearing pin holder 1460 are integrated by screwing the bolt 1524.
Further, the lower surface 1561 of the bearing pin holder 1460 is formed with a bolt hole 1460b extending in the Z direction from the lower surface 1561 to the bolt through hole 1460a.

As shown in FIG. 67, the head portion 1472 of the bearing pin 1470 is movably accommodated in the bearing pin accommodating portion 1462a of the bearing pin accommodating portion 1462 while sliding in contact with the inner peripheral surface of the bearing pin accommodating portion 1462a. As shown in FIG. 73, the bearing pin 1470 has a head portion 1472 provided with a recess 1476 and a shaft portion 1474 on the same axis as the head portion 1472. A spring member 1532 is housed in the recess 1476.
The spring member 1532 is pressed by the threaded portion 1462b of the bearing pin hole 1462 of the bearing pin holder 1460 and the bolt 1522 screwed to the nut 1526 to provide an appropriate elastic force (held parts or shaft) to the bearing pin 1470. An elastic force having a thrust that does not cause misalignment against the weight of the member and the own weight of the center boss 36 or the like) is applied.
In the bearing pin 1470, the shaft portion 1474 is inserted through the bearing pin through hole 1450a of the rotating disk 1450, and the tip surface of the shaft portion 1474 can come into contact with the outer peripheral surface of the center collar 38.

A rotary weight 1480 is attached to the lower surface 1561 of the bearing pin holder 1460. As shown in FIGS. 74A and 74B, the rotary weight 1480 is provided with through holes 1480a for bolts penetrating from the lower surface 1580b toward the upper surface 1580a on both sides of the lower surface 1580b of the rotation weight 1480. ing.
The upper side of the inner surface of the rotating weight 1480 is a curved surface 1482 having a radius of curvature equal to the radius of curvature of the outer peripheral surface of the rotating disk 1450. The curved surface 1482 can come into surface contact with the outer peripheral surface of the turntable 1450 to stabilize the fixing of the rotation weight 1480.
The lower side of the inner surface of the rotation weight 1480 is a curved surface 1484 having a radius of curvature larger than the radius of curvature of the outer peripheral surface of the large-diameter tubular portion 1436 of the main body 1430. Since the curved surface 1484 does not come into contact with the outer peripheral surface of the main body 1430, the rotation of the turntable 1450 can be smoothed.

The turntable 1450 is attached to the top of the body 1430 via a needle bearing 1520 and a bearing backing plate 1510 and a ball 1522.

As shown in FIG. 67, the needle bearing 1520 has an annular shape, and has an annular inner pad 1520a, an annular outer pad 1520b whose inner diameter is larger than the outer diameter of the inner pad 1520a, and an inner pad. It has a plurality of balls 1520c arranged between the outer peripheral surface of the material 1520a and the inner peripheral surface of the outer contact material 1520b.

The lower end surface of the annular inner pad 1520a is placed by pressure contacting the upper surface of the convex portion 1500 of the small diameter tubular portion 1432 of the main body 1430, and the inner peripheral surface of the inner pad 1520a is the small diameter cylinder of the main body 1430. It is in pressure contact with the outer peripheral surface of the shaped portion 1432. As a result, a predetermined dimension is provided between the upper surface of the bearing receiving portion 1433 of the main body 1430, the stepped surface between the second inner diameter portion 1455 and the third inner diameter portion 1456, and the lower end surface of the outer padding material 1520b. The gap is secured.
On the other hand, the upper end surface of the annular outer contact material 1520b is pressed against the lower surface of the convex portion 1502 of the stepped surface 1511 of the rotating disk 1450, and the outer peripheral surface of the outer contact material 1520b is the second inner diameter portion 1455 of the rotating disk 1450. It is in pressure contact with the inner peripheral surface of. As a result, a gap having a predetermined dimension is secured between the upper surface of the small-diameter tubular portion 1432 of the main body 1430 and the upper end surface of the inner padding material 1520a and the stepped surface 1511 of the turntable 1450.
As a result, the turntable 1450 can rotate smoothly without coming into contact with the main body 1430.

The bearing backing plate 1510 is formed by abutting two semicircular bearing backing plates 1510 shown in FIG. 75 into a circular shape. The inner diameter of the inner peripheral surface 1510a of the bearing backing plate 1510 is larger than the outer diameter of the medium-diameter tubular portion 1434 of the main body 1430. The outer diameter of the outer peripheral surface 1510b of the bearing backing plate 1510 is equal to the inner diameter of the fourth inner diameter portion 1457 of the turntable 1450.

The bearing backing plate 1510 has a plurality of balls 1522 sandwiched between the bearing backing plate 1510 and the lower surface of the bearing receiving portion 1433, and the outer peripheral surface 1510b of the bearing backing plate 1510 is in contact with the inner peripheral surface of the fourth inner diameter portion 1457 of the turntable 1450. They are arranged so that they touch each other. The inner peripheral surface 1510a of the bearing backing plate 1510 has a gap of a predetermined dimension between the inner peripheral surface 1510a and the outer peripheral surface of the medium-diameter tubular portion 1434 of the main body 1430.
Then, by fitting the 16th O-ring OR16 into the O-ring groove 1459, the bearing backing plate 1510 is fixed to the turntable 1450, and a large locking force is generated between the main body 1430 and the turntable 1450. .. The bearing backing plate 1510 and the bearing backing plate 1510 and the ball 1522 form a bearing structure.

In the floating unit 170 having the above configuration, the bolt 1522 screwed to the bearing pin holder 1460 in advance is adjusted so that the tip surface of the bearing pin 1470 is on the outer peripheral surface of the center collar 38 without hindering the rotation of the turntable 1450. Keep them in contact with each other or close to each other with a small gap. Further, compressed air is supplied to the first space S1 to center lock the center boss 36.

When the floating unit 170 in this state is used with the shaft in the horizontal direction, the top plate 70 side of the center boss 36 equipped with the center collar 38 depends on the weight of the held parts and shaft members, and the weight of the center boss 36 and the like. Misalignment occurs. On the other hand, the turntable 1450 rotates so that the bearing pin holder 1460 is on the lower side due to its own weight such as the rotation weight 1480. As a result, the axial direction of the bearing pin 1470 and the misalignment direction of the center boss 36 on the top plate 70 side coincide with each other. As a result, the misaligned center boss 36 works to push the tip surface of the bearing pin 1470 and retract the bearing pin 1470. However, the bearing pin 1470 is provided with a predetermined elastic force (an elastic force having a thrust that does not cause misalignment against the weight of the held parts and the shaft member and its own weight such as the center boss 36) by the spring member 1532. Therefore, the center boss 36 can be held from one direction against the pushing force of the center boss 36 due to the misalignment. As a result, even if the shaft is used in the horizontal direction, the position shift due to the weight of the held parts and the shaft member and the weight of the center boss 36 and the like is unlikely to occur, and the state of the basic position shown in FIGS. 67 and 68. A floating unit 170 that can strongly maintain the above can be obtained.

The floating unit 170 has a structure in which the top plate 70 does not rotate, and is suitable for inserting a shaft member into a hole of a component in a state where the top plate 70 does not rotate.

As described above, the embodiments of the present invention are disclosed in the above description, but the present invention is not limited thereto.
That is, various changes can be made to the above-described embodiments with respect to the mechanism, shape, material, quantity, position, arrangement, etc., without departing from the scope of the technical idea and purpose of the present invention. They are, and they are included in the present invention.

2,12 Bottom block 3,13 Top plate center lock part 4,14 Main body block 5,15 Air cushion part 10,130,140,150,160,170 Floating unit 20 Lock cylinder 20a Bolt hole 20b Female screw hole 20c Pin hole 20d Pin hole 21 Lock cylinder 22, 23 Lock piston 24 Lock guide 24a Top surface 24b Inclined surface 26 Piston guide 26a Bolt hole 26b Pin hole 30 Main body 30a, 30b Bolt hole 30c, 36b Pin hole 32 Guide pin 32a First guide pin 32b 2nd guide pin 32c 3rd guide pin 32d 4th guide pin 36 Center boss 36a Bolt hole 37 Holder 38 Center collar 40 (1st) ball backing plate 42 Ball retainer 43 1st ball 44 1st ball Slider 46 First slide retainer 47 Second ball 48 Second (intermediate) ball slider 50 Second slide retainer 51 Third ball 52 Third ball slider 52a Bolt hole 60 Body cover 60a Hole 60b Bolt hole 61 Holder 61a Bolt hole 62 Second (intermediate) ball backing plate 62a Bolt hole 62b Positioning pin hole 63 Positioning pin 64 Pin holder 64a Bolt hole 64b Positioning pin hole 66 First ball retainer 67 Second ball retainer 68 Third ball Back plate 70,71 Top plate 70a Bolt hole 70b Through hole 70c Pin hole 75 Flange 75a Bolt hole 75b Through hole 75c Female screw hole 75d Pin hole 77 Z-axis piston 77a Bolt hole 79 Linear bush 81 Linear shaft 81a Bolt hole 83 85 Z-axis cylinder 85a Female screw hole 85b Through hole 95 Connection flange 95a Bolt hole 95b Bolt hole 100, 102, 104, 106, 112, 132, 136 Bolt 108, 110 pin 202 Bottom plate part 202a Top surface 202b Bottom surface 204 Cylindrical part 206 Top plate center lock air supply port 212 Positioning recess 222 Bottom plate 222a Top surface 224 Cylindrical 225 Circular protrusion 226 Outer peripheral edge 228 Spring member recess 229 Spring member 230 O-ring groove 233 Inclined surface 233a Hole 235 Positioning convex part 235a End surface 235b Side surface 238 Recessed part for spring member 240 O-ring groove 262 flange-shaped part 264 Cylindrical part 302 Small-diameter tubular part 304 Large-diameter tubular part 306 Small inner diameter part 308 Medium Inner diameter 310 Large inner diameter 312 Female thread 314 Guide pin recess 316 O-ring groove 317 O-ring groove 318 Air cushion air supply groove 322 Main body shaft 324 Tip 326 Fourth O-ring groove 362 Main body shaft 364 Shape 364a Straight part 366 Engagement convex part 402 O-ring part 422 O-ring hole 444 Rotation control protrusion 462 Through hole 464 Arc-shaped protrusion 482,484 Groove 502 Through hole 602 Top lid part 604 Cylindrical part 606 Recession 608 Air supply for air cushion Mouth 611a Top surface 611b Bottom surface 612 Recession 622a Top surface 622b Bottom surface 626 Holder recession 628 Pin holder recession 632 Large diameter part 634 Shaft 636 Engagement convex part 642a Top surface 642b Bottom surface 662 Through hole 702,704 Recession 750a Concave part 754 Z direction air Air supply port for air cushion 772a, 772b Circular protrusion 774 O-ring groove 776 O-ring groove 850a Upper surface 850b Lower surface 852 Z-axis piston hole 852a Small inner diameter part 852b Medium inner diameter part 852c Large inner diameter part 854 Linear shaft hole 854a Small inner diameter part 854b Large inner diameter part 856 O-ring groove 952 Z-axis piston recess 1005 Z direction extrusion mechanism 1010 Flange 1010a, 1010c Bolt hole 1010b Shaft recess 1010d Female screw hole 1012, 1014, 1016, 1018 Bolt 1020 Cylinder 1020a Bolt Hole 1030 Guide 1030b Bolt hole 1040 Piston 1040a Bolt hole 1050 Color 1052 Bush 1060 Cylindrical shaft 1070 Top plate 1070a, 1070b Bolt hole 1070c Through hole 1072 Piston recess 1110a Top surface 1110b Bottom surface O-ring 11 14 Groove 1116 Lock air supply port 1120a Upper surface 1120b Lower surface 1122 Piston hole 1122a Small inner diameter part 1122b Large inner diameter part 1124 O-ring groove 1126 Shaft hole 1126a Small inner diameter part 1126b Large inner diameter part 1130a Upper surface 1130b Lower surface 1132 Cylindrical part 1134 Circular flange part 1136, 1146 O-ring groove 1140a Upper surface 1140b 1142a Large inner diameter 1142b Small inner diameter 1144a, 1144b O-ring protrusion 1170a Upper surface 1170b Lower surface 1205 Top plate horizontal holding cushion mechanism 1210 Flange 1210a Bolt hole 1210b Female screw hole 1212 Bottom plate 1212a Upper surface 1212b Lower surface 1213 Circular convex Mouth 1215 Circular recess 1216, 1217 O-ring groove 1218, 1234 Hole 1219 Rotating ball recess 1219a Bottom surface 1220 Main body 1220a, 1240a Bolt hole 1222 Rotating ball hole 1224 Piston hole 1230 Rotating ball receiver 1232, 1326 Inclined surface 1240 Rotating ball 1242 Sphere body 1244 Disc-shaped base

1250 Piston 1252 Cylindrical shaft 1254 Disc-shaped base 1256 O-ring groove 1260 Lid 1262 Male thread 1270 Top plate 1270a Bolt hole 1270b Through hole 1272 Piston receiving recess 1274 Pedestal 1276 Rotating ball recess 1280 Piston receiving 1282 , 1292 Bolts 1320a, 1330a, 1370a Upper surface 1320b, 1330b, 1370b Lower surface 1322 Inner peripheral surface 1324 Female screw part 1404 Main body block 1405 Spring member Cushion part 1430 Main body 1430a, 1430b Bolt hole 1430c Positioning pin hole 1432 Small diameter Part 1434 Medium diameter tubular part 1436 Large diameter tubular part 1438 Small inner diameter part 1440 Medium inner diameter part 1442 Large inner diameter part 1444 Female thread part 1448 Mounting surface 1450 Rotating board 1450a Bearing pin through hole 1450b Bolt hole 1452 Bearing pin hole 1454 1st inner diameter 1455 2nd inner diameter 1456 3rd inner diameter 1457 4th inner diameter 1459 O-ring groove 1460 Bearing pin holder 1460a Through hole for bolt 1460b Bolt hole 1462 Hole for bearing pin 1462a Bearing pin housing 1462b Screw Part 1470 Bearing pin 1472 Head 1474 Shaft 1476 Recess 1480 Rotating weight 1480a Through hole for bolt 1482, 1484 Curved surface 1500, 1502 Convex part 1510 Bearing backing plate 1510a Inner peripheral surface 1510b Outer outer surface 1511 Step surface 1512 Ball 1520 Needle bearing Backing material 1520b Outer backing material 1520c Ball 1522 Bolt 1526 Nut 1532 Spring member 1550a, 1580a Top surface 1550b, 1580b Bottom surface 1551 Stepped surface 1560a Mounting surface 1560b Open surface 1561 Bottom surface S1 First space S2 Second space S3 4th space S5 5th space S6 6th space OR1 1st O-ring OR2 2nd O-ring OR3 3rd O-ring OR4 4th O-ring OR5 5th O-ring OR6 6th O-ring OR7 7th O-ring OR9 9th O Ring OR10 10th O-ring OR11 11th O-ring OR12 12th O-ring OR13 13th O-ring OR14 14th O-ring OR15 15th O-ring OR16 16th O-ring

Claims (4)

A bottom block with a bottom and
A main body block having an internal space, which is arranged on the bottom block,
A holder arranged inside the main body block and
A second ball backing plate, a positioning pin, and a pin holder arranged on the lower surface of the holder.
A top plate attached to the holder on the opposite side of the bottom block so as to cover the end of the main block at a distance from the end of the main block.
A plurality of first balls arranged inside the main body block to rotatably support the holder with respect to the bottom block.
A ring-shaped first ball backing plate and a third ball backing plate arranged inside the main body block and around the holder to support the first ball.
A ring-shaped first ball retainer and a second ball retainer, which are arranged inside the main body block and are arranged around the holder to arrange the first balls in a predetermined positional relationship.
The bottom block has a first space to which compressed air, which is a gas having a predetermined pressure, is supplied, and compressed air, which is a gas having a predetermined pressure, is supplied to the first space. By applying a force in the direction of center-locking the top plate, the top plate center lock portion and
A second space arranged in the main body block to which compressed air, which is a gas having a predetermined pressure, is supplied, and compressed air, which is a gas having a predetermined pressure, is supplied to the second space. The floating unit includes an air cushion portion that applies a force in a direction of holding the holder from the surroundings, and the floating unit is configured so that the top plate can rotate about the central axis CL. unit. The top plate center lock portion is
A top plate center lock air supply port communicating with the first space, to which a gas having a predetermined pressure is supplied from the outside,
A lock cylinder having the air supply port for the top plate center lock and forming the bottom surface,
A lock piston arranged on the lock cylinder, urged by a spring member, and reciprocating toward the lock cylinder and the top plate,
The lock guide fitted inside the lock piston and
Includes a piston guide that sits on top of the lock piston and slides into the lock piston,
The floating unit according to claim 1, wherein the first space is formed between an upper surface of the lock cylinder and a lower surface of the lock piston. The air cushion portion is
An air cushion air supply port communicating with the second space, to which a gas having a predetermined pressure is supplied from the outside,
A main body having the air cushion air supply port, an air cushion air supply groove, and a guide pin recess that communicate with each other.
The guide pin housed in the guide pin recess of the main body and
Includes a body cover that covers the top of the body
The first or claim that the second space is formed in the air supply groove for an air cushion and the recess for a guide pin arranged between the outer peripheral surface of the main body and the inner peripheral surface of the main body cover. Item 2. The floating unit according to item 2. The floating unit according to any one of claims 1 to 3,
A floating unit including a reciprocating drive block attached to the bottom surface of the floating unit to allow the floating unit to reciprocate in its axial direction.

Images