JP6885554B1 - Rotary parts transfer device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a rotary component transfer device capable of stably controlling a load applied from a support member to an electronic component to a predetermined value or less. SOLUTION: The rotating body 11 has a supporting member 12 which is attached to the rotating body 11 so as to be able to advance and retreat in an arrangement in which a centrifugal force generated by the rotation of the rotating body 11 is applied in a forward direction and supports an electronic component W. In a rotary component transport device that transports an electronic component W, a drive source that moves the support member 12 by generating at least one of a force for advancing the support member 12 and a force for retracting the support member 12 while the rotating body 11 is stopped. 25 and the support member 12 where centrifugal force is generated by the rotation of the rotating body 11 are hindered from advancing, the support member 12 is fixed, and when the support member 12 is moved by the drive source 25, the fixing of the support member 12 is released. The means 21 is provided. [Selection diagram] Fig. 2

Description

The present invention relates to a rotary component transfer device for transporting electronic components.

Conventionally, in a facility for acquiring and transporting an electronic component from a wafer, a suction member for sucking the electronic component advances and retreats, and a device for acquiring the electronic component from the wafer (see Patent Document 1) and a rotation to which the suction member is attached. A device for rotating a body to convey an electronic component adsorbed on a suction member (see Patent Document 2) and a device in which a suction member is freely attached to a rotating body are used.

A device in which a suction member is freely attached to a rotating body supports a suction member that tries to move forward (moves to the outer peripheral side of the rotating body) by an elastic member such as a coil spring due to centrifugal force generated when the rotating body rotates. This prevents the suction member from advancing beyond a predetermined value. When the electronic component attached to the wafer is sucked by the suction member, a force resisting the elastic force of the elastic member is generated by the operation of a driving means such as a motor to move the suction member forward.

The load applied to the electronic component when the suction member comes into contact with the electronic component is the difference between the force generated by the driving means and the elastic force of the elastic member. Conventionally, since no other member or the like is attached to the suction member and the suction member is lightweight, an elastic member having a small elastic modulus has been adopted. Therefore, it has been possible to stably adjust the load applied to the electronic component when the suction member comes into contact with the electronic component to a predetermined value or less. Since electronic components are damaged when a large load is applied, it is important to keep the load applied to the electronic components below a predetermined value.

JP-A-11-186298 Japanese Unexamined Patent Publication No. 2006-108193

However, when trying to mount a motor or the like on the suction member, it is necessary to adopt an elastic member having a larger elastic modulus than the conventional elastic member, and the elastic force of the elastic member is generated by a driving means that generates a force larger than that of the conventional driving means. The suction member will be advanced against the above. In this case, there arises a problem that it is not possible to stably control the load applied to the electronic component to be equal to or less than a predetermined value.
The present invention has been made in view of such circumstances, and provides a rotary component transfer device capable of stably controlling a load applied to an electronic component from a support member such as a suction member to a predetermined value or less. The purpose.

The rotary parts transporting device according to the present invention according to the above object is attached to the rotating body so as to be able to advance and retreat in an arrangement in which the centrifugal force generated by the rotation of the rotating body is applied in the forward direction to support the electronic parts. In a rotary component transfer device that has a support member and conveys the electronic component, at least one of a force for advancing the support member and a force for retracting the support member is generated while the rotating body is stopped. The drive source for moving the support member and the support member for which centrifugal force is generated by the rotation of the rotating body are prevented from advancing, the support member is fixed, and the support member is supported when the support member is moved by the drive source. It includes a stopping means for releasing the fixing of the member, and an elastic member for generating an elastic force for moving the support member in a direction opposite to the direction in which the support member is moved by the drive source .

The rotary parts transporting device according to the present invention is a drive source for moving a support member by generating at least one of a force for advancing the support member and a force for retracting the support member while the rotating body is stopped, and rotation of the rotating body. The support member is fixed by preventing the support member from advancing due to the centrifugal force, and the support member is provided with a stopping means for releasing the fixation when the support member is moved by the drive source. It is not necessary to prevent the member from advancing beyond a predetermined value by using an elastic member having a larger elastic modulus than the conventional elastic member, and it is possible to control the load applied to the electronic component from the advancing support member to be stably below the predetermined value. Is.

It is explanatory drawing of the rotary parts transfer apparatus which concerns on one Embodiment of this invention. It is explanatory drawing which shows the suction member and the mechanism which moves it forward and backward. (A) and (B) are explanatory views explaining how the suction member advances. (A) and (B) are explanatory views explaining how the suction member retracts.

Subsequently, an embodiment embodying the present invention will be described with reference to the attached drawings, and the present invention will be understood.
As shown in FIGS. 1 and 2, the rotary component transporting device 10 according to the embodiment of the present invention has a rotating body 11 and a rotating body in such an arrangement that centrifugal force generated by the rotation of the rotating body 11 is applied in the forward direction. It is a device that is attached to 11 so as to be able to advance and retreat, has a suction member 12 that is an example of a support member that supports the electronic component W, and conveys the electronic component W. Hereinafter, a detailed description will be given.

As shown in FIGS. 1 and 2, the rotating body 11 has a disk shape, is horizontally arranged, and is based on a rotating shaft 11a vertically arranged by intermittent operation of a motor (not shown) connected to the rotating body 11. Then, the rotation and the stop at a predetermined angle are repeated. As shown in FIG. 2, a plurality of rod-shaped guides 13 arranged along the radial direction of the rotating body 11 are fixed to the upper surface of the rotating body 11, and two slide blocks 14 are attached to each guide 13. A plate-shaped base base 15 horizontally arranged via the base 15 is attached so as to be able to advance and retreat.

A motor 16 to which a suction member 12 is connected to an output shaft is fixed to the upper surface of each base base 15. Therefore, each suction member 12 can move forward and backward together with the motor 16, the base base 15, and the slide block 14 in the radial direction outside and inside of the rotating body 11 (that is, the motor 16 can move forward and backward together with the suction member 12). It is attached to the body 11). In the present embodiment, the forward direction and the backward direction of the suction member 12 correspond to the radial outer side of the rotating body 11 and the radial inner side of the rotating body 11, respectively.
The output shaft of the motor 16 is arranged in the radial direction of the rotating body 11 and is connected to the center of the suction member 12. The motor 16 generates a force for rotating the suction member 12 around the axis of the suction member 12 (with reference to the center) by the rotation of the output shaft. In FIG. 1, the description of the guide 13 and the base base 15 and the like is omitted.

In the present embodiment, a unit having one suction member 12, one guide 13, two slide blocks 14, one base base 15, and one motor 16 is used as a component support unit 17 on the outer periphery of the rotating body 11. Eight component support units 17 (suction members 12) are provided along the same pitch at equal pitches.
The rotating body 11 rotates by 45 ° (clockwise rotation about the rotation axis 11a ) corresponding to the arrangement pitch of the component support unit 17 (suction member 12) by one rotation operation. Therefore, the rotary component transfer device 10 is provided with eight stop positions of the component support unit 17 (suction member 12).

In each component support unit 17, the suction member 12 is located outside the rotating body 11 in the radial direction with respect to the motor 16 and projects to the outside of the rotating body 11 in a plan view. The suction member 12 with which a vacuum pump (not shown) is communicated sucks the electronic component W by vacuum pressure, and releases the sucked electronic component W by opening the atmosphere or breaking the vacuum.

The electronic component W that is attracted to the suction member 12 is, for example, a diode, a transistor, a capacitor, an inductor, or an IC (Integrated Circuit), and is vertically arranged and fixed by a wafer ring R as shown in FIGS. 1 and 2. It is attached to the wafer sheet S. Although FIGS. 1 and 2 show that two electronic components W are attached to the wafer sheet S, a large number (for example, several hundred) of electronic components W are actually attached. ing.

Further, as shown in FIG. 1, a wafer sheet S'to which the electronic component W is attached is provided on the opposite side of the wafer sheet S with reference to the rotating body 11. The wafer sheet S'is fixed to the wafer ring R'in a state of being arranged parallel to the wafer sheet S.
With the rotating body 11 stopped, the suction member 12 of one component supporting unit 17 is arranged so as to face the wafer sheet S, and the opposite side of the component supporting unit 17 with reference to the center of the rotating body 11. The suction member 12 of the component support unit 17 arranged on the wafer sheet S'is arranged so as to face the wafer sheet S'.

As shown in FIG. 2, the standing piece 18 which is a ferromagnetic material is fixed to the base base 15 inside the rotating body 11 in the radial direction, and the rod 19 penetrating the standing piece 18 is fixed to the rotating body 11. The support member 20 that horizontally supports the above is fixed. The support member 20 is arranged inside the rotating body 11 in the radial direction with respect to the standing piece 18, and between the support member 20 and the standing piece 18, a permanent magnet which is an example of a stopping means fixed to the supporting member 20 is provided. 21 are arranged.

The radial outer end of the rotating body 11 of the rod 19 is located radially outer of the rotating body 11 than the radial outer end of the rotating body 11 of the permanent magnet 21, and the rod 19 has both ends. A coil spring 22 (an example of an elastic member) fixed to each of the support member 20 and the standing piece 18 is attached.
In a plan view, the upper end of the hanging body 24 vertically arranged on the outside of the rotating body 11 is connected to the radial outer end of the rotating body 11 of the base base 15. Each of the standing piece 18 and the hanging body 24 is a member constituting the component support unit 17.

While the rotating body 11 is rotating, as shown in FIG. 2, the permanent magnet 21 is in a state where the standing piece 18 is brought into close contact with the permanent magnet 21 by magnetic force against the centrifugal force generated in the component support unit 17, that is, the component. The support unit 17 is maintained in a fixed state. In the present embodiment, the position of the suction member 12 when the standing piece 18 is in close contact with the permanent magnet 21 is the retracted position. Therefore, the permanent magnet 21 hinders the advancing of the attracting member 12 in which the centrifugal force is generated by the rotation of the rotating body 11 due to the magnetic force, and fixes the attracting member 12 in the retracted position.

Further, below the rotating body 11, a voice coil motor 25 (an example of a drive source) and a voice coil motor (an example of a drive source) (not shown) are located at a position facing the wafer sheet S and a position facing the wafer sheet S'. Are provided respectively. The voice coil motor 25 has a movable shaft 26 that can move in the radial direction of the rotating body 11, and has a hanging body 24 that corresponds to a component support unit 17 in which the suction member 12 is stopped facing the wafer sheet S. 26 can push the rotating body 11 outward in the radial direction to advance the suction member 12 (part support unit 17) toward the wafer sheet S. In the present embodiment, the position of the suction member 12 when the suction member 12 comes into contact with the electronic component W attached to the wafer sheet S is set as the forward position.

The voice coil motor arranged to face the wafer sheet S'has the same structure as the voice coil motor 25, and the hanging body 24 corresponding to the component support unit 17 in which the suction member 12 is stopped facing the wafer sheet S'. Can be pushed outward in the radial direction of the rotating body 11 by the movable shaft to advance the suction member 12 (part maintenance unit 17) toward the wafer sheet S'. In the present embodiment, the position of the suction member 12 when the electronic component W sucked on the suction member 12 is attached to the wafer sheet S'is the forward position.

The rotary component transfer device 10 acquires the electronic component W attached to the wafer sheet S by the suction member 12, sucks the electronic component W, and attaches the electronic component W to the wafer sheet S'on which the electronic component W is not attached. The operation of the process will be described below.
As shown in FIG. 2, the voice coil motor 25 operates and the movable shaft 26 of the rotating body 11 is in a state where the suction member 12 that does not suck the electronic component W is temporarily stopped at a position facing the wafer sheet S. It moves outward in the radial direction (forward direction of the suction member 12).

As shown in FIG. 3A, the movable shaft 26 comes into contact with the hanging body 24 and advances the component support unit 17 (suction member 12) toward the wafer sheet S. As a result, as shown in FIG. 3B, the suction member 12 advances from the retracted position to the forward position, and comes into contact with and attracts the electronic component W attached to the wafer sheet S.
At this time, the voice coil motor 25 generates a force larger than the force for fixing the standing piece 18 by the permanent magnet 21 to advance the component support unit 17.

Therefore, the voice coil motor 25 moves the suction member 12 by generating a force for moving the suction member 12 forward from the retracted position to the forward position while the rotating body 11 is stopped, and the permanent magnet 21 is the voice coil motor 25. When the suction member 12 is moved forward (that is, when the suction member 12 is moved) due to the operation of the suction member 12, the suction member 12 is released from being fixed at the retracted position. The advancement of the suction member 12 from the retracted position to the advanced position by the voice coil motor 25 is not always performed when the rotating body 11 is stopped, but is performed as necessary. Here, with the suction member 12 arranged at the forward position, the upright piece 18 (part support unit 17) is given an elastic force inward in the radial direction from the coil spring 22.

After the suction member 12 sucks the electronic component W at the forward position, the movable shaft 26 moves inward in the radial direction of the rotating body 11 (in the backward direction of the suction member 12) as shown in FIG. 4A, and the component The support unit 17 (suction member 12) retracts together with the electronic component W to which the suction member 12 is sucked by the elastic force applied to the standing piece 18 from the coil spring 22.

Here, the coil spring 22 is a drive that moves the suction member 12 in a direction opposite to the direction in which the suction member 12 is moved by the voice coil motor 25 (that is, an elastic force that retracts the suction member 12 from the forward position to the backward position. It is designed to generate force). Therefore, as shown in FIG. 4B, the movable shaft 26 moves inward in the radial direction of the rotating body 11 until it does not come into contact with the hanging body 24, so that the suction member 12 is arranged at the retracted position. In the present embodiment, the coil spring 22 has a natural length in a state where the suction member 12 is arranged at the retracted position.

As a result, the erection body 18 is in close contact with the permanent magnet 21, and the component support unit 17 (suction member 12) is fixed by the magnetic force of the permanent magnet 21 with the suction member 12 arranged at the retracted position.
Then, the rotating body 11 rotates, and the suction member 12 moves together with the sucking electronic component W. The electronic component W sucked on the suction member 12 is arranged so as to face the wafer sheet S'by repeating the rotation and stopping of the rotating body 11 a plurality of times (four times in the present embodiment). In the present embodiment, the electronic component W adsorbed on the suction member 12 is rotated by the motor 16 as necessary before being arranged so as to face the wafer sheet S', and the angle with respect to the wafer sheet S'. Is adjusted.

The component support unit 17 in which the suction member 12 is temporarily stopped facing the wafer sheet S'is attracted to the suction member 12 by moving the movable shaft 26 outward in the radial direction by the operation of the voice coil motor 25. It advances toward the wafer sheet S'with the electronic component W. As a result, the suction member 12 advances from the retracted position to the forward position, and the electronic component W sucked by the suction member 12 is attached to the wafer sheet S'.

Then, the suction member 12 releases the suction state (support state) of the electronic component W, and the component support unit 17 is moved inward in the radial direction of the rotating body 11 of the movable shaft 26 by the elastic force of the coil spring 25. Retreat, whereby the erection piece 18 comes into contact with the permanent magnet 21 and the suction member 12 is placed and fixed in the retracted position. The component support unit 17 in which the suction member 12 is fixed at the retracted position moves by the rotation of the rotating body 11.

The rotary parts transporting device 10 described so far has a permanent magnet 21 as a stopping means for fixing the suction member 12 while the rotating body 11 is rotating, but the stopping means is not limited to the permanent magnet 21. For example, instead of the permanent magnet 21, an electromagnet that is energized to generate a magnetic force can be adopted. When an electromagnet is used as the stopping means, the electromagnet prevents the advancing of the suction member 12 in which centrifugal force is generated by the rotation of the rotating body 11 by the generation of magnetic force. When the suction member 12 advances due to the advance of the movable shaft 26, the electromagnetic force may be de-energized so as not to generate the magnetic force, or the state in which the magnetic force is generated may be maintained.

When an electromagnet is adopted, an elastic member that retracts the suction member 12 from the forward position to the backward position by an elastic force is not always necessary, and the magnetic force generated in the electromagnet with the suction member 12 arranged in the forward position causes the attraction member 12 to stand up. The piece 18 may be attracted to the electromagnet and the suction member 12 may be arranged in the retracted position.

Further, as the stopping means, instead of the permanent magnet 21 and the electromagnet, an elevating pin attached to the rotating body 11 so as to be elevated and a drive mechanism for elevating and elevating the elevating pin can be adopted. The elevating pin rises and points the upper part into the hole provided in the lower part of the base base 15 to prevent the suction member 12 from advancing together with the base base 15 and the like, and descends to pull out the upper part from the hole of the base base 15. The base base 15 and the like and the suction member 12 are brought into a state where they can move forward.

Although the embodiments of the present invention have been described above, the present invention is not limited to the above-described embodiments, and all changes in conditions that do not deviate from the gist are within the scope of the present invention.
For example, the rotary component transfer device is not limited to the one that acquires electronic components from a wafer sheet, and may be one that acquires electronic components from another device (for example, another rotary component transfer device).
The support member that supports the electronic member is not limited to the suction member that attracts the electronic component by vacuum pressure. For example, a support member that clamps and supports the electronic component or a support member that attracts the electronic component by Coulomb force can be adopted.
Needless to say, the rotating body does not have to be disk-shaped. The rotation axes of the rotating body do not have to be arranged vertically, and may be arranged horizontally, for example.

It is also possible to design the support member to retract by the operation of the drive source while the rotating body is rotating. An example of retracting the support member is to retract the electronic component together with the support member and arrange the electronic component at a position in focus of the imaging means for imaging the electronic component. In this case, the drive source generates a force to retract the support member during the rotation of the rotating body to retract (move) the support member, and in order to advance the retracted support member, the drive source moves in the forward direction (that is, drives). An elastic member that generates an elastic force that moves the support member in a direction opposite to the direction in which the support member moves depending on the source can be adopted.

Then, as the drive source, for example, a servo motor can be adopted instead of the voice coil motor. When a servomotor is used as a drive source, the driving force of the servomotor is applied to the component support unit via a cam mechanism or the like.
Further, there may be no motor for rotating the support member. When the motor is adopted, the output shaft of the motor may not be directly connected to the support member but may be connected to the support member via a power transmission mechanism.

10: Rotary parts transfer device, 11: Rotating body, 11a: Rotating shaft, 12: Suction member, 13: Guide, 14: Slide block, 15: Base base, 16: Motor, 17: Parts support unit, 18: Standing Components, 19: Rod, 20: Support material, 21: Permanent magnet, 22: Coil spring, 24: Hanging body, 25: Voice coil motor, 26: Movable shaft, R, R': Wafering, S, S' : Wafer sheet, W: Electronic components

Claims (4)

A rotating body and a support member that is attached to the rotating body so as to be able to advance and retreat in an arrangement in which a centrifugal force generated by the rotation of the rotating body is applied in the forward direction and supports the electronic component, and carries the electronic component. In the type parts transfer device
While the rotating body is stopped, a drive source for moving the support member by generating at least one of a force for advancing the support member and a force for retreating the support member.
A stopping means that prevents the support member from advancing due to centrifugal force generated by the rotation of the rotating body, fixes the support member, and releases the fixation of the support member when the support member is moved by the drive source. ,
A rotary component transporting device including an elastic member that generates an elastic force for moving the support member in a direction opposite to the direction in which the support member moves by the drive source. In rotary component transferring apparatus according to claim 1, before Symbol stopping means, the rotary parts conveying apparatus characterized by a permanent magnet that prevents the advance of the support member by a magnetic force. The rotary parts transporting device according to claim 1, wherein the stopping means is an electromagnet that prevents the support member from advancing due to the generation of a magnetic force. In the rotary parts transporting device according to any one of claims 1 to 3, a force is applied to the rotating body so as to be able to advance and retreat together with the support member and rotate the support member around the axis of the support member. A rotary parts transfer device characterized by further including a generating motor.

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