JP6885034B2 - Optics and projectors - Google Patents

Description

The present invention relates to optical devices and projectors.

Conventionally, there are known projectors that modulate the light emitted from a light source device according to image information and project an image on a projection surface such as a screen. Further, in recent years, a projector provided with a light source device that emits brighter light is known in order to enable projection of a brighter image. In such a projector, the heat generated by the optical element to which the light emitted from the light source device is incident becomes remarkable, and therefore, a technique for cooling the optical element using a liquid has been proposed (for example, Patent Documents). 1).

The projector described in Patent Document 1 includes an optical device having an optical element (liquid crystal panel) and a liquid cooling device. In addition to the liquid crystal panel, the optical device includes an optical element holder that holds the liquid crystal panel.
The optical element holder includes an opening, a panel support frame for supporting the liquid crystal panel, and a liquid flow tube. The liquid flow tube is bent in a U shape and is formed so as to surround the image forming region of the liquid crystal panel in three directions in a plan view, and the liquid flows inside. The panel support frame includes an incident side support frame and an outgoing side support frame that sandwich the liquid flow pipe.
The liquid cooling device includes a liquid pumping unit, a tank, a heat exchange unit, and a plurality of liquid circulation members, and circulates the liquid in the liquid flow pipe.

Japanese Unexamined Patent Publication No. 2011-197390

However, in the technique described in Patent Document 1, since the liquid flow tube is formed so as to surround the image forming region of the liquid crystal panel in three directions, the liquid is not circulated in the remaining one direction, so that cooling is performed. There is a problem that it becomes insufficient. Therefore, in order to improve the cooling capacity, a method of increasing the flow rate of the liquid by thickening the liquid flow tube, or a method of increasing the bending points of the liquid flow tube so as to surround the image forming region in substantially four directions. However, there are the following issues. That is, if the liquid flow tube is made thicker, there is a problem that the optical element holder and the optical device become larger. If the number of bending points of the liquid flow pipe is increased, it is difficult to process the liquid, and it is necessary to circulate the liquid at a high pressure. Therefore, a high power one is required for the liquid pumping part and the pressure loss becomes large. When the pressure loss becomes large, the liquid tends to volatilize or leak from between the connecting members for circulating the liquid, so that the leaked liquid may adhere to other members in the projector and cause a problem. In addition, there is a problem that the tank becomes large because it is necessary to accumulate a large amount of liquid.

The present invention has been made to solve at least a part of the above-mentioned problems, and can be realized as the following forms or application examples.

[Application Example 1] The optical device according to the present application example is an optical device including an optical element arranged on the optical axis of incident light and a holding portion for holding the optical element, and the holding portion. The unit has an inflow portion into which the liquid supplied from the outside of the holding portion flows in, and a flow path inside which the liquid from the inflow portion flows, which is arranged in an annular shape along the peripheral edge of the optical element. A flow path forming portion and an outflow portion for causing the liquid flowing through the flow path to flow out of the holding portion are provided, and the inflow portion and the outflow portion are provided with respect to the flow path forming portion. It is characterized in that it is arranged on the same side.

According to this configuration, since the holding portion for holding the optical element includes the inflow portion, the flow path forming portion having the flow path, and the outflow portion described above, the liquid is supplied to the inflow portion. Therefore, the liquid can be circulated in the flow path. As a result, the optical element that generates heat due to the incident light is efficiently cooled. That is, since the flow path is formed in an annular shape along the peripheral edge of the optical element, the heat of the optical element can be transferred to the liquid from the region surrounding the optically effective region in which the light of the optical element is incident. In addition, compared to a configuration in which a liquid is circulated using a member (pipe-shaped member or the like) different from the holding portion, the number of members intervening between the optical element and the liquid is reduced, so that the heat of the optical element is efficiently converted into a liquid. It becomes possible to convey.
Therefore, since the temperature rise of the optical element is efficiently suppressed, the deterioration of the optical element is suppressed, and it is possible to provide an optical device capable of reliably exhibiting the optical characteristics of the optical element.
In addition, since it can be configured with a smaller number of parts than a configuration in which a liquid is circulated using a member different from the holding portion, it is possible to reduce manufacturing man-hours and component costs, and to provide an optical device capable of miniaturization. ..
Further, since the inflow part and the outflow part are formed on the same side with respect to the flow path forming part, the members connected to the inflow part and the outflow part are compactly arranged in order to circulate the liquid in the flow path. It becomes possible. Therefore, it is possible to provide an optical device that can contribute to the miniaturization of devices and devices equipped with this optical device.

[Application Example 2] In the optical device according to the above application example, the flow path is from the first flow path portion in which a part of the liquid flowing in from the inflow portion is diverted in the first direction and the inflow portion. A second flow path portion in which the remaining portion of the inflowing liquid intersects the first direction and is diverted in a second direction, and a third flow path in which the liquid flowing through the first flow path portion flows in the second direction. The fourth flow path portion where the liquid flowing through the road portion and the third flow path portion flows in the third direction opposite to the first direction, and the liquid flowing through the second flow path portion joins. It is preferable that the liquid flowing through the fourth flow path portion flows out from the outflow portion.

According to this configuration, an annular flow path is formed in the first flow path portion to the fourth flow path portion. This makes it possible to provide a flow path close to the optically effective region of the optical element having a rectangular optically effective region. Therefore, since the heat of the optical element can be transferred to the liquid more efficiently, it is possible to provide an optical device in which the temperature rise of the optical element is further suppressed.

[Application Example 3] In the optical device according to the above application example, it is preferable that the second flow path portion is provided with a narrowed portion that is partially narrowed.

According to this configuration, the liquid flowing in from the inflow portion follows the first flow path portion, the third flow path portion, and the fourth flow path portion, and the second flow path portion. It flows to the outflow portion via the second path that joins the fourth flow path portion. That is, the first path is formed longer than the second path.
Therefore, the temperature of the liquid flowing through the first flow path gradually rises as it advances to the first flow path portion, the third flow path portion, and the fourth flow path portion, so that the temperature of the liquid flowing through the fourth flow path portion is high. Is higher than the temperature of the liquid flowing through the first flow path portion and the second flow path portion. In a configuration without a constriction, the temperature difference is significant. That is, in the configuration in which the constricted portion is not provided, the temperature distribution on the surface of the optical element is such that the hottest portion is biased from the center of the surface toward the fourth flow path portion.
On the other hand, according to this configuration, since the second flow path portion is provided with a narrowed portion that is partially narrowed, the flow velocity of the liquid flowing through the second flow path portion becomes slower, so that the optical element becomes more optical. Heat is transmitted. As a result, the temperature difference between the temperature of the liquid flowing through the fourth flow path and the temperature of the liquid flowing through the second flow path becomes small, so that the temperature distribution on the surface of the optical element is such that the hottest part is the surface. It becomes a well-balanced one that approaches the center of the. Therefore, the optical element suppresses the bias in the surface of the optical characteristics that change the state of the incident light.

[Application Example 4] In the optical device according to the above application example, at least a part of the liquid flowing through the second flow path portion is placed in the fourth direction opposite to the third direction in the flow path. It is preferable that a detour portion for detouring is formed.

In the configuration without the detour portion, the temperature of the liquid flowing through the fourth flow path portion flows through the first flow path portion and the second flow path portion, as in the configuration without the constriction portion described above. It is higher than the temperature of the liquid, and the temperature difference becomes remarkable.
According to this configuration, since the above-mentioned detour portion is provided in the flow path, at least a part of the liquid flowing through the second flow path portion (second path) invades the fourth flow path portion. , It merges with the liquid that has reached the fourth flow path portion via the first path. As a result, the temperature of the liquid in the fourth flow path portion becomes lower than the temperature of the liquid in the fourth flow path portion having no bypass portion. Therefore, the fourth flow path side of the optical element is cooled more efficiently, and the temperature distribution on the surface of the optical element is closer to the center to be more balanced. Therefore, the temperature rise of the optical element is further suppressed, and the deviation of the optical characteristics in the surface is further suppressed.

[Application Example 5] In the optical device according to the above application example, the optical element is preferably an optical modulation device that modulates incident light.

According to this configuration, the optical modulator as an optical element is efficiently cooled by the liquid flowing into the holding portion, so that the temperature rise is suppressed. Therefore, it is possible to provide an optical device provided with an optical element that modulates the incident light by exhibiting its own optical characteristics for a long period of time.

[Application Example 6] The projector according to the present application example includes a light source that emits light, an optical device according to any one of the above items in which light emitted from the light source is incident, and the optical device. It is characterized by including a projection optical device that projects an image corresponding to light and a liquid cooling device that circulates a liquid in the optical device.

According to this configuration, since the projector is provided with the above-mentioned optical device and liquid cooling device, the optical element is efficiently cooled even in a configuration including a light source that emits high-luminance light, and the optical element is efficiently cooled for a long period of time. It is possible to project bright images and images with good image quality.
Further, as compared with the configuration in which the liquid is circulated using a member different from the holding portion, the degree of freedom in the shape of the flow path can be increased, so that the liquid can be circulated at a low pressure. As a result, in order to circulate the liquid, it is possible to reduce the size and power of the device (for example, a pump or the like) provided in the liquid cooling device.
In addition, since the liquid can be circulated at a low pressure, it is possible to prevent the liquid from volatilizing or leaking from the connection part between the holding part for circulating the liquid in the optical device and the liquid cooling device or the connection part in the liquid cooling device. It becomes possible to do. As a result, it is possible to prevent the liquid from adhering to other members in the projector, and it is possible to reduce the amount of the liquid to be provided. Therefore, it is possible to provide a projector equipped with a compact, low power consumption liquid cooling device.

The schematic diagram which shows the schematic structure of the projector of 1st Embodiment. The perspective view of the optical apparatus of 1st Embodiment and the tubular member connected to the holding part of an optical apparatus. A perspective view of a member having the same configuration as that of FIG. 2 as viewed from the light emitting side. The figure which shows typically the main structure of the liquid cooling apparatus of 1st Embodiment. The exploded perspective view of the optical apparatus of 1st Embodiment and the tubular member connected to the holding part. An exploded perspective view of the holding portion of the first embodiment. An exploded perspective view of the holding portion of the first embodiment. Sectional drawing of the optical apparatus of 1st Embodiment. Sectional drawing of the optical apparatus of 1st Embodiment. 2 is a perspective view of the optical device of the second embodiment and a tubular member connected to the optical device. The figure which shows the simulation result in the optical apparatus of 2nd Embodiment. An exploded perspective view of the holding portion of the third embodiment. The figure which shows the simulation result in the optical apparatus of 3rd Embodiment.

Hereinafter, the projector according to the present embodiment will be described with reference to the drawings.
The projector of the present embodiment modulates the light emitted from the light source according to the image information, and magnifies and projects the modulated light on a projection surface such as a screen.

(First Embodiment)
[Main configuration of projector]
FIG. 1 is a schematic view showing a main configuration of the projector 1 of the present embodiment.
As shown in FIG. 1, the projector 1 includes an exterior housing 2 constituting the exterior, a control unit (not shown), an optical unit 3 having a light source device 31, a liquid cooling device 4, and an air cooling device 9. Although not shown, the projector 1 includes a power supply device that supplies electric power to the light source device 31, the control unit, and the like, and an exhaust device that exhausts the warm air in the outer housing 2 to the outside.

Although detailed illustration is omitted, the exterior housing 2 is configured by combining a plurality of members. Although not shown, the exterior housing 2 is provided with an intake port for taking in outside air, an exhaust port for exhausting warm air inside the exterior housing 2 to the outside, and the like.

The control unit is equipped with a CPU (Central Processing Unit), a ROM (Read Only Memory), a RAM (Random Access Memory), etc., and functions as a computer, and is involved in controlling the operation of the projector 1, for example, projecting an image. Control, control related to driving of the liquid cooling device 4 and the air cooling device 9, and the like are performed.

The optical unit 3 optically processes and projects the light emitted from the light source device 31 under the control of the control unit.
As shown in FIG. 1, the optical unit 3 includes an integrator illumination optical system 32, a color separation optical system 33, an electro-optical device 34 having an optical modulation device 341 described later, and a cloth as a color synthesis optical device, in addition to the light source device 31. It includes a dichroic prism 344, a projection optical device 35, and an optical component housing 36 for arranging these optical components at predetermined positions on the optical path.

The light source device 31 includes a discharge type light source 311 including an ultra-high pressure mercury lamp, a metal halide lamp, and the like, a reflector 312, and the like. The light source device 31 reflects the light emitted from the light source 311 by the reflector 312 and emits it toward the integrator illumination optical system 32.

The integrator illumination optical system 32 includes a first lens array 321 and a second lens array 322, a polarization conversion element 323, and a superimposing lens 324.
The first lens array 321 has a configuration in which small lenses are arranged in a matrix, and divides the light emitted from the light source device 31 into a plurality of partial lights. The second lens array 322 has substantially the same configuration as the first lens array 321, and the partial light is substantially superposed on the surface of the optical modulation device 341 together with the superimposing lens 324. The polarization conversion element 323 has a function of aligning the random light emitted from the second lens array 322 with substantially one type of polarized light that can be used in the optical modulation device 341.

The color separation optical system 33 includes dicroic mirrors 331 and 332 and reflection mirrors 333 to 336, and the light emitted from the integrator illumination optical system 32 is red light (hereinafter referred to as “R light”) and green light (hereinafter referred to as “G”). It has a function of separating into three colors of light (referred to as "light") and blue light (hereinafter referred to as "B light") and guiding the light to the light modulator 341.

The electro-optical device 34 includes three optical modulators 341 provided for each color light, an incident side polarizing plate 342 arranged on the light incident side and the light emitting side of each light modulator 341, and an emitting side polarizing plate 343. It includes a holding portion 5 (see FIG. 2) that holds each optical modulator 341, and a supporting portion (not shown). The optical modulator for R light is 341R, the optical modulator for G light is 341G, and the optical modulator for B light is 341B. The optical modulators 341R, 341G, 341B, the incident side polarizing plate 342 for each color light, and the emission side polarizing plate 343 are optical axes 34A for each color light emitted from the color separation optical system 33 (optical axis for R light). Is 34Ar, the optical axis for G light is 34Ag, and the optical axis for B light is 34Ab). The optical modulator 341 corresponds to an optical element arranged on the optical axis 34A of the incident light. Further, the holding unit 5 and the optical modulation device 341 held by the holding unit 5 are referred to as an optical device 50.

FIG. 2 is a perspective view of the optical device 50 and the tubular member 44 described later connected to the holding portion 5 of the optical device 50 as viewed from the light incident side. FIG. 3 is a perspective view of a member having the same configuration as that of FIG. 2 as viewed from the light emitting side.
As shown in FIG. 3, the optical modulation device 341 includes a transmissive liquid crystal panel 340, dustproof glasses 340N, 340S, and a flexible substrate 340F.
In the liquid crystal panel 340, a rectangular image forming region (a rectangular image forming region in which a liquid crystal is hermetically sealed between an element substrate made of glass or the like and an opposing substrate arranged to face the element substrate and minute pixels are formed in a matrix). (Not shown). The image forming region is an optically effective region for forming an image.

The dustproof glass 340N is arranged on the light incident side surface of the liquid crystal panel 340, and the dustproof glass 340S is arranged on the light emitting side surface of the liquid crystal panel 340.
The dustproof glasses 340N and 340S are made of, for example, quartz glass, sapphire, crystal, etc., and prevent dust from adhering to the surface of the liquid crystal panel 340. As a result, even if dust adheres to the dust-proof glass 340N or the dust-proof glass 340S, the position of the dust deviates from the focal position, so that the shadow of the dust becomes inconspicuous in the projected image.

One end of the flexible substrate 340F is connected to the element substrate of the liquid crystal panel 340, and the other end is connected to the control unit. In the optical modulation device 341, a drive signal according to the image information is input from the control unit via the flexible substrate 340F, the orientation state of the liquid crystal in the image forming region is controlled, and the incident colored light is modulated.

As shown in FIG. 2, the holding portion 5 is provided with an opening 521 through which the light L emitted from the incident side polarizing plate 342 (see FIG. 1) passes. The optical modulation device 341 of the present embodiment is fixed to the holding portion 5 by an adhesive. The holding units 5 that hold the optical modulators 341R, 341G, and 341B are referred to as 5R, 5G, and 5B, respectively. As will be described in detail later, a flow path 6 through which the liquid supplied from the liquid cooling device 4 flows is provided inside the holding portion 5. Then, the optical modulation device 341 is cooled by circulating the liquid between the holding unit 5 and the liquid cooling device 4. The holding portion 5 will be described in detail later.

Although detailed description is omitted, the support portion is formed of sheet metal or the like, supports the optical device 50, and is attached to the cross dichroic prism 344.

The cross dichroic prism 344 has a substantially square shape in a plan view in which four right-angled prisms are bonded together, and two dielectric multilayer films are formed at the interface where the right-angled prisms are bonded to each other. In the cross dichroic prism 344, the dielectric multilayer film reflects R light and B light modulated by the optical modulators 341R and 341B, and transmits G light modulated by the optical modulator 341G to transmit three colors. Synthesize modulated light.

The projection optical device 35 includes a plurality of lenses, and magnifies and projects the light synthesized by the cross dichroic prism 344 on the screen.

The liquid cooling device 4 circulates the liquid with the holding portion 5 of the optical device 50 to cool the light modulation device 341.
FIG. 4 is a diagram schematically showing a main configuration of the liquid cooling device 4.
As shown in FIG. 4, the liquid cooling device 4 includes a liquid pumping unit 41, a tank 42, a heat exchange device 43, a plurality of tubular members 44, and a cooling fan 45. The liquid pumping section 41, the tank 42, the heat exchange device 43, and the plurality of tubular members 44 form a circulation flow path 4F through which the liquid circulates with the holding section 5.

The liquid pumping unit 41 is a pump for sucking and pumping a liquid, and has a suction port for sucking the liquid and an outlet for pumping the liquid. Then, the liquid pumping unit 41 circulates the liquid in the circulation flow path 4F.

The tank 42 is made of a metal material such as aluminum and has an inflow port into which the liquid flows in and an outflow port in which the liquid flows out, and is formed hollow. Then, the tank 42 temporarily accumulates a liquid inside and supplies this liquid to the circulation flow path 4F. Examples of the liquid used in this embodiment include water and ethylene glycol.

As shown in FIG. 4, the heat exchange device 43 includes a heat receiving unit 431, a thermoelectric conversion element 432, and a heat radiating unit 433.
The heat receiving unit 431 is provided with a plurality of fine flow paths (not shown) through which liquid flows, and inflow ports and outlets communicating with the flow paths, and has a structure of a heat exchanger such as a so-called microchannel. ing. Then, the heat receiving unit 431 receives heat from the liquid that flows in from the inflow port and flows through the minute flow path.

The thermoelectric conversion element 432 includes, for example, a Peltier element having a heat absorbing portion and a heat generating portion, and the heat absorbing portion is connected to the heat receiving portion 431. When electric power is supplied, the thermoelectric conversion element 432 absorbs the heat of the heat receiving unit 431 at the endothermic unit, and the heat generating unit generates heat.

The heat radiating portion 433 is a so-called heat sink, and is formed of a metal material such as aluminum, and has a plurality of fins 433b protruding from one surface of the plate-shaped base portion 433a and the base portion 433a (one fin 433b in FIG. 4). Indicates). In the heat radiating portion 433, the base portion 433a is connected to the heat generating portion of the thermoelectric conversion element 432, and the heat of the heat generating portion is radiated.
The cooling fan 45 blows air to the heat radiating unit 433 to promote heat dissipation by the heat radiating unit 433.

The plurality of tubular members 44 are flexible members and are formed in a tubular shape through which liquid flows, and as shown in FIG. 4, each member (holding portions 5R, 5G, 5B, liquid pumping portion 41, tank 42, The heat receiving portions 431) are connected in an annular shape, and the circulation flow path 4F is formed with these members. Although FIG. 4 shows a configuration in which three holding portions 5 (holding portions 5R, 5G, 5B) are connected in series, a configuration in which the three holding portions 5 are connected in parallel may be used. Further, in FIG. 4, three holding portions 5 are connected so that the liquid flows in the order of the holding portions 5R, 5G, and 5B, but the order is not limited to this.

Although detailed illustration is omitted, the air cooling device 9 includes a blower fan, a duct member that guides the air blown from the blower fan to the electro-optical device 34, and the like, an optical modulator 341, an incident side polarizing plate 342, and an injection. The optical component such as the side polarizing plate 343 is cooled. That is, the optical modulation device 341 is cooled by the liquid cooling device 4 and the air cooling device 9.

[Structure of holding part]
Here, the holding portion 5 in the optical device 50 will be described in detail. Each of the holding portions 5R, 5G, and 5B is formed in common, and the description will be made with attention paid to one holding portion 5.
FIG. 5 is an exploded perspective view of the tubular member 44 connected to the optical device 50 and the holding portion 5, and is a view seen from the light incident side. FIG. 6 is an exploded perspective view of the holding portion 5 as seen from the light incident side. FIG. 7 is an exploded perspective view of the holding portion 5 as seen from the light emitting side.

The holding portion 5 is formed by joining a first frame 7 and a second frame 8 formed by press working from a sheet metal such as aluminum. As shown in FIGS. 5 to 7, the first frame 7 and the second frame 8 are arranged so as to face each other in the direction along the optical axis 34A. The holding unit 5 is arranged on the light incident side of the light modulation device 341, the first frame 7 is located on the light modulation device 341 side, and the second frame 8 is opposite to the light modulation device 341 of the first frame 7. It is arranged so that it is located on the side.

As shown in FIGS. 5 and 6, the holding portion 5 has a rectangular outer shape when viewed from the direction along the optical axis 34A, and has an inflow portion 51, a flow path forming portion 52, and an outflow portion 53. ing.
The inflow portion 51 and the outflow portion 53 are provided on one side of the rectangular holding portion 5. In the following, for convenience of explanation, the side of the holding portion 5 where the inflow portion 51 and the outflow portion 53 are provided is viewed from the light incident side in a posture in which the inflow portion 51 and the outflow portion 53 are on the upper side. The right side of the holding portion 5 is described as "right side" (+ X side).

The inflow portion 51 is provided near one end on the upper side of the holding portion 5 (on the left side (−X side) in the present embodiment). The inflow portion 51 is formed in a cylindrical shape so that the tubular member 44 is connected and the liquid from the liquid cooling device 4 flows in.
The flow path forming portion 52 is arranged in an annular shape along the peripheral edge of the optical modulation device 341. The inner peripheral edge of the annular flow path forming portion 52 is an opening 521 through which the light L passes. The flow path forming portion 52 is formed so as to surround the rectangular optically effective region of the liquid crystal panel 340 when viewed from the light incident side, and a flow path 6 through which the liquid from the inflow portion 51 flows is provided inside. ing.

The outflow portion 53 is provided near the other end portion on the upper side of the holding portion 5 (on the right side (+ X side) in this embodiment). The outflow portion 53 is formed in a cylindrical shape so that the tubular member 44 is connected and the liquid flowing through the flow path 6 flows out. As described above, the inflow portion 51 and the outflow portion 53 are arranged on the same side (upper side) with respect to the flow path forming portion 52. A part of the duct member (not shown) in the air cooling device 9 is arranged on the opposite side of the holding portion 5 from the inflow portion 51 and the outflow portion 53, that is, below the electro-optical device 34.

Here, the shapes of the first frame 7 and the second frame 8 will be described in detail.
As shown in FIGS. 6 and 7, the first frame 7 has a first frame portion 72, a first standing portion 71, and recesses 73 and 74.
The first frame portion 72 has an opening along the inner peripheral edge of the annular flow path forming portion 52, and extends in a direction intersecting the optical axis 34A.
As shown in FIGS. 6 and 7, the first standing portion 71 stands up from the edge of the opening in the first frame portion 72 toward the second frame 8.
The first standing portion 71 forms the inner peripheral edge of the annular flow path forming portion 52, that is, the edge portion of the opening portion 521 (see FIG. 5) of the holding portion 5.

The recess 73 is a portion forming a part of the inflow portion 51, is provided on the upper left side of the first frame portion 72, and has a shape in which the second frame 8 side is recessed in a semi-cylindrical shape, as shown in FIG. ing. The recess 74 is a portion forming a part of the outflow portion 53, and as shown in FIG. 6, is provided on the upper right side of the first frame portion 72 and has a shape in which the second frame 8 side is recessed in a semi-cylindrical shape. ing.
Further, in the first frame portion 72, positioning holes 72h are formed in the vicinity of the recesses 73 and 74, respectively.

As shown in FIGS. 6 and 7, the second frame 8 has a second frame portion 82, a second upright portion 81, recesses 83 and 84, and an outer peripheral edge portion 85.
FIG. 8 is a cross-sectional view of the optical device 50 as viewed from below. FIG. 9 is a cross-sectional view of the optical device 50 as viewed from the left side (−X direction).
As shown in FIG. 6, the second frame portion 82 has an insertion opening 821 through which the first standing portion 71 can be inserted, and as shown in FIG. 8, faces the first frame portion 72 via a space. It is formed like this.
As shown in FIG. 7, the second standing portion 81 stands up from the edge of the insertion opening 821 toward the first frame 7 side and is formed in a rectangular shape in a plan view. As shown in FIG. 8, the first standing portion 81 is formed. It is formed so as to be laminated on the outer circumference of the 71, that is, on the side opposite to the opening 521 of the first standing portion 71.

The recess 83 is provided at a position facing the recess 73 of the first frame 7, and has a shape in which the first frame 7 side is recessed in a semi-cylindrical shape. Then, the recess 83 forms an inflow portion 51 together with the recess 73.
The recess 84 is provided at a position facing the recess 74 of the first frame 7, and has a shape in which the first frame 7 side is recessed in a semi-cylindrical shape. Then, the recess 84 forms an outflow portion 53 together with the recess 74.

The outer peripheral edge portion 85 is a portion bent toward the first frame 7 side with respect to the second frame portion 82, and is formed at an outer peripheral end portion other than the upper side of the recesses 83 and 84 as shown in FIG. There is. Then, as shown in FIGS. 8 and 9, the outer peripheral edge portion 85 is provided with an end portion 851 formed flat so as to be laminated on the first frame portion 72. Positioning holes 851h corresponding to the two positioning holes 72h of the first frame portion 72 are formed in the end portion 851.

Further, as shown in FIGS. 6 and 7, a narrowed portion 86 is formed in the second frame 8.
The narrowed portion 86 is provided on the upper side of the second standing portion 81 (the second flow path portion 62 described later), and the space between the second standing portion 81 and the upper outer peripheral edge portion 85 is partially narrowed in the vertical direction. That is, the upper outer peripheral edge portion 85 is formed so as to partially approach the second standing portion 81.

The first frame 7 and the second frame 8 are positioned with each other by inserting jigs into the positioning holes 72h and 851h, and are positioned between the first frame portion 72 and the end portion 851, and the first standing portion 71 and the second. It is connected to the upright portion 81 by, for example, brazing. Then, by connecting the first frame 7 and the second frame 8, a holding portion 5 having an inflow portion 51, a flow path forming portion 52, and an outflow portion 53 is formed. The holding portion 5 is sealed except for the upper side of the inflow portion 51 and the outflow portion 53, and a flow path 6 communicating with the inflow portion 51 and the outflow portion 53 is provided in the flow path forming portion 52. As shown in FIG. 8, the flow path 6 is provided in an annular shape on the outside of the second upright portion 81 between the first frame portion 72 and the second frame portion 82 and on the inside of the end portion 851. In this way, the flow path 6 is formed by joining the first frame 7 and the second frame 8.

Further, the thickness of the flow path forming portion 52, that is, the size in the direction along the optical axis 34A is formed to be smaller than the size (outer diameter dimension) of the inflow portion 51 and the outflow portion 53. Then, as shown in FIG. 8, the holding portion 5 is arranged so that the first frame portion 72 of the first frame 7 faces the optical modulation device 341. In the light modulation device 341, the dustproof glass 340N is fixed to the first frame portion 72 via an adhesive.
As shown in FIG. 8, the flow path 6 is provided so as to partially overlap the optical modulation device 341 when viewed from the direction along the optical axis 34A. Specifically, the flow path 6 is provided with an overlap OL from the end of the optical modulation device 341.

Here, the flow of the liquid sent from the flow path 6 and the liquid cooling device 4 will be described in detail with reference to FIG. 7.
As shown in FIG. 7, the flow path 6 has a first flow path portion 61, a second flow path portion 62, a third flow path portion 63, and a fourth flow path portion 64 arranged in an annular shape. ..
The first flow path portion 61 is provided on the left side (−X direction) of the opening 521, below the inflow portion 51, and extends downward. The second flow path portion 62 is provided above the opening 521 and extends from below the inflow portion 51 to the right (+ X direction). The third flow path portion 63 is provided below the opening 521 and extends from below the first flow path portion 61 to the right (+ X direction). The fourth flow path portion 64 is provided on the right side (+ X direction) of the opening 521, and extends upward from the right side (+ X direction) of the third flow path portion 63. Further, the second flow path portion 62 is connected above the fourth flow path portion 64.

The liquid sent from the liquid cooling device 4 flows from the inflow section 51 through the flow path 6, and then flows out from the outflow section 53 to the outside of the holding section 5, that is, to the liquid cooling device 4. Specifically, as shown in FIG. 7, a part of the liquid flowing in from the inflow portion 51 is diverted downward in the first flow path portion 61, and the rest is crossed downward in the second flow path portion 62 on the right. It is split in the direction (+ X direction).
Then, the liquid that has flowed through the first flow path portion 61 changes its direction at the third flow path portion 63 and flows to the right (+ X direction). The liquid that has flowed through the third flow path portion 63 is changed in direction at the fourth flow path portion 64 and flows upward, and the liquid that has flowed through the second flow path portion 62 merges. The liquid that has flowed through the fourth flow path portion 64 flows out from the outflow portion 53 to the liquid cooling device 4. The lower part corresponds to the first direction, and the right side corresponds to the second direction. The upper part on the side opposite to the lower part (first direction) corresponds to the third direction.

In this way, the liquid flowing in from the inflow section 51 flows through the first flow path section 61, the third flow path section 63, and the fourth flow path section 64, and the first path 60A and the second flow path section. It flows out from the outflow section 53 to the liquid cooling device 4 via the second path 60B that follows 62 and joins the fourth flow path section 64.

The optical modulator 341 is cooled by the liquid flowing through the flow path 6. Specifically, the heat of the photomodulator 341 generated by the incident light is transferred to the liquid via the first frame 7. Further, since the flow path 6 is formed in an annular shape along the peripheral edge of the optical modulation device 341, the heat of the optical modulation device 341 is transferred from the region surrounding the optically effective region (image forming region) of the optical modulation device 341 to a liquid. It is transmitted. Then, the liquid flowing out from the holding portions 5R, 5G, and 5B arranged in series follows the circulation flow path 4F and flows into the heat exchange device 43. The liquid that has flowed into the heat exchange device 43 is cooled by absorbing heat in the heat exchange device 43. Then, the liquid cooled by the heat exchange device 43 flows into the holding unit 5 (holding unit 5R in this embodiment) again to cool the light modulation device 341. As described above, the heat absorbed by the heat exchange device 43 is dissipated from the heat dissipation unit 433 of the heat exchange device 43. Then, the heat radiated from the heat radiating unit 433 is discharged to the outside of the projector 1 from the exhaust port of the outer housing 2 by an exhaust device (not shown).

Further, since the holding unit 5 is arranged on the light incident side of the optical modulator 341, a part of the light directed to the optical apparatus 50 (leakage light or the like toward the outside of the optically effective region of the optical modulator 341) is retained. The portion 5 is also irradiated, but since the flow path 6 is provided with an overlap OL (see FIG. 8) from the end of the optical modulator 341, the holding portion 5 that generates heat due to the irradiated light. It becomes difficult for heat to be transferred to the optical modulator 341. That is, since the liquid is interposed between the irradiated portion (mainly the second frame portion 82 of the second frame 8) irradiated with the light of the holding portion 5 and the light modulation device 341, the light is irradiated. The heat of the irradiated portion generated by light is less likely to be transmitted to the light modulation device 341.

Further, since the second flow path portion 62 is provided with the narrowed portion 86, the liquid flowing through the second flow path portion 62 (second path 60B) is compared with the configuration in which the narrowed portion 86 is not provided. The flow velocity becomes slow. As a result, the temperature distribution on the surface of the optical modulation device 341 is such that the hottest portion is closer to the center of the surface than in the configuration in which the narrowed portion 86 is not provided.
That is, since the first path 60A is formed longer than the second path 60B, the liquid flowing through the first path 60A is the first flow path portion 61, the third flow path portion 63, and the fourth flow path portion 64. The temperature gradually rises as it progresses. Therefore, the temperature of the liquid flowing through the fourth flow path portion 64 is higher than the temperature of the liquid flowing through the first flow path portion 61 and the second flow path portion 62. However, since the narrowed portion 86 is provided, the flow velocity of the liquid flowing through the second flow path portion 62 becomes slower, so that the heat of the photomodulator 341 is more transferred and the liquid flowing through the fourth flow path portion 64 is transferred. The temperature difference between the temperature and the temperature of the liquid flowing through the second flow path portion 62 becomes small. As a result, the temperature distribution on the surface of the optical modulation device 341 is balanced so that the hottest portion approaches the center of the surface.

As described above, the holding portion 5 has a flow path forming portion 52 having an annular flow path 6, an inflow portion 51 and an outflow portion 53 arranged on the same side with respect to the flow path forming portion 52. Then, the optical modulation device 341 is held by the holding unit 5 and cooled by the liquid supplied to the flow path 6.

As described above, according to the present embodiment, the following effects can be obtained.
(1) The optical modulation device 341 is cooled by the liquid flowing through the annular flow path 6 provided in the holding portion 5. Further, as compared with the configuration in which the liquid is circulated using a member (pipe-shaped member) different from the holding portion 5, the number of members interposed between the optical modulation device 341 and the liquid is reduced, so that the heat of the optical modulation device 341 is reduced. , Efficiently transmitted to the liquid. As a result, in the optical device 50, the liquid is supplied to the inflow section 51, so that the light modulation device 341 that generates heat due to the incident light is efficiently cooled.
Therefore, since the temperature rise of the optical modulation device 341 is efficiently suppressed, the deterioration of the optical modulation device 341 is suppressed, and it is possible to provide the optical device 50 capable of reliably exhibiting the optical characteristics of the optical modulation device 341.
Further, since it can be configured with a smaller number of parts than a configuration in which a liquid is circulated using a member different from the holding portion 5, it is possible to provide an optical device 50 capable of reducing manufacturing man-hours and component costs and reducing the size. Become.

(2) In the holding portion 5, since the inflow portion 51 and the outflow portion 53 are arranged on the same side with respect to the flow path forming portion 52, the tubular member 44 connected to the inflow portion 51 and the outflow portion 53 is compact. It is possible to place it in.
Further, since the inflow portion 51 and the outflow portion 53 are arranged on the same side (upper side), the members can be efficiently arranged below the holding portion 5. In the present embodiment, a part of the duct member (not shown) in the air cooling device 9 is arranged below the holding portion 5, that is, below the electro-optical device 34. This makes it possible to provide a projector 1 provided with a liquid cooling device 4 and an air cooling device 9 and capable of efficiently cooling a cooling target while suppressing an increase in size.

(3) An annular flow path 6 is formed in the first flow path portions 61 to the fourth flow path portions 64. This makes it possible to provide the flow path 6 close to the optically effective region of the optical modulation device 341 having the rectangular optically effective region (image forming region). Therefore, since the heat of the light modulation device 341 can be transferred to the liquid more efficiently, it is possible to provide the optical device 50 in which the temperature rise of the light modulation device 341 is further suppressed.

(4) A narrowed portion 86 is provided in the flow path 6 of the holding portion 5, and the optical modulation device 341 has a well-balanced temperature distribution in which the portion near the center of the surface has the highest temperature. As a result, even if the projected image has a temperature distribution that causes color unevenness or the like, it is possible to simplify the image processing for correcting the color unevenness or the like.

(5) The holding portion 5 is formed by connecting the first frame 7 and the second frame 8. As a result, even if the structure has a flow path 6 through which the liquid flows, the holding portion 5 can be formed by easy processing and suppressing an increase in manufacturing man-hours.

(6) Since the optical modulation device 341 as an optical element is efficiently cooled by the liquid flowing into the holding unit 5, the temperature rise is suppressed. Therefore, it is possible to provide an optical device 50 provided with an optical modulation device 341 that exhibits its own optical characteristics and modulates incident light over a long period of time.

(7) Since the projector 1 includes an optical device 50 and a liquid cooling device 4, the light modulation device 341 is efficiently cooled even in a configuration including a light source 311 that emits high-luminance light, and the light modulation device 341 is efficiently cooled for a long period of time. It is possible to project bright images and images with good image quality.
Further, as compared with the configuration in which the liquid is circulated using a member different from the holding portion 5, the degree of freedom in the shape of the flow path 6 can be increased, so that the liquid can be circulated at a low pressure. This makes it possible to reduce the size and power of the liquid pumping unit 41 for circulating the liquid.
Further, since the liquid can be circulated at a low pressure, it is possible to prevent the liquid from volatilizing or leaking from the connection portion between the members in the circulation flow path 4F. As a result, it is possible to prevent the liquid from adhering to other members in the projector 1, and it is possible to reduce the amount of the liquid to be provided. Therefore, it is possible to provide the projector 1 provided with the small-sized, low power consumption liquid cooling device 4.

(Second Embodiment)
Hereinafter, the optical device 250 according to the second embodiment will be described with reference to the drawings. In the following description, the same components as those in the first embodiment are designated by the same reference numerals, and detailed description thereof will be omitted or simplified.
The optical device 250 of the present embodiment includes a holding unit 25 that is different from the holding unit 5 of the optical device 50 of the first embodiment.
FIG. 10 is a perspective view of the optical device 250 and the tubular member 44 connected to the optical device 250 as viewed from the light incident side.

As shown in FIG. 10, the holding portion 25 has a flow path forming portion 52 having an annular flow path 6, an inflow portion 51 and an outflow portion 53 arranged on the same side with respect to the flow path forming portion 52. It has a shape that does not include the narrowed portion 86 (see FIG. 6) included in the holding portion 5 of the first embodiment. The cross-sectional shape of the flow path 6 is formed substantially the same over the first flow path portions 61 to the fourth flow path portions 64.

FIG. 11 is a diagram showing simulation results of the temperature of the liquid in the holding portion 25 in the optical device 250 and the surface temperature of the optical modulation device 341. Note that FIG. 11 is a view seen from the light incident side of the optical device 250.
As shown in FIG. 11, the liquid flowing in from the inflow section 51 is the first path 60A (first flow path section 61, third flow path section 63, and fourth flow path section 64), and the second path 60B. It flows out from the outflow portion 53 to the liquid cooling device 4 via the (second flow path portion 62).
When viewed from the light incident side, the optical modulation device 341 is cooled with the optically effective region surrounded by the flow path 6, and it goes without saying that the temperature is higher than the temperature of the liquid. Further, the temperature of the optical modulation device 341 rises as the distance from the flow path 6 increases, but the temperature is cooled to a temperature or lower at which the quality is sufficiently maintained.

As described above, according to the present embodiment, the following effects can be obtained in addition to the effects (1) to (3) and (5) to (7) of the first embodiment.
Since the cross-sectional shape of the flow path 6 is formed substantially the same over the first flow path portion 61 to the fourth flow path portion 64, the liquid can be circulated in the flow path 6 at a lower pressure. Therefore, it is possible to further prevent the liquid from volatilizing and leaking, and to simply configure the connection between the holding portion 25 and the tubular member 44.

(Third Embodiment)
Hereinafter, the optical device 150 according to the third embodiment will be described with reference to the drawings. In the following description, the same components as those in the first embodiment are designated by the same reference numerals, and detailed description thereof will be omitted or simplified.
The optical device 150 of the present embodiment includes a holding unit 15 that is different from the holding unit 5 of the optical device 50 of the first embodiment.
FIG. 12 is an exploded perspective view of the holding portion 15 of the present embodiment, and is a view seen from the light emitting side.

As shown in FIG. 12, the holding unit 15 includes a first frame 7 in the holding unit 5 of the first embodiment and a second frame 18 having a shape different from that of the second frame 8 in the holding unit 5, and the first frame 18 is provided. The frame 7 and the second frame 8 are joined to each other. An annular flow path 6 is provided inside the holding portion 15 as in the holding portion 5.

The second frame 18 does not have the narrowed portion 86 (see FIG. 7) included in the second frame 8 of the first embodiment, but has a vertical wall 181 provided in the flow path 6. That is, the holding portion 15 of the present embodiment has a shape in which a vertical wall 181 is provided on the holding portion 25 of the second embodiment. The standing wall 181 corresponds to a detour.
As shown in FIG. 12, the standing wall 181 is provided between the second standing portion 81 and the outer peripheral edge portion 85 on the right side (+ X side) in the fourth flow path portion 64. Further, the standing wall 181 extends from substantially the center of the second standing portion 81 in the vertical direction to the upper outer peripheral edge portion 85.

The direction of the liquid flowing through the second flow path portion 62 is changed by the standing wall 181 and flows downward between the standing wall 181 and the second standing portion 81. The liquid flowing downward between the standing wall 181 and the second standing portion 81 is changed in direction by the liquid flowing through the third flow path portion 63 at the end of the standing wall 181 and is changed in the fourth flow path portion 64. , It merges with the liquid that has flowed through the third flow path portion 63, and flows upward (third direction) between the vertical wall 181 and the outer peripheral edge portion 85 on the right side (+ X side). The lower part corresponds to the fourth direction.

In this way, the vertical wall 181 diverts the liquid flowing through the second flow path portion 62 downward (fourth direction) opposite to the upper one (third direction). Then, by providing the vertical wall 181 in the flow path 6, the liquid flowing through the second flow path portion 62 and the liquid flowing through the third flow path portion 63 merge in the fourth flow path portion 64. , The temperature rise of the liquid in the fourth flow path portion 64 is suppressed. That is, the temperature rise of the optical modulation device 341 is further suppressed.

Here, it will be described that the temperature rise of the optical modulation device 341 is further suppressed by providing the vertical wall 181 as compared with the optical device 250 of the second embodiment in which the vertical wall 181 is not provided.
FIG. 13 is a diagram showing the simulation results of the optical device 150 of the present embodiment, and is a diagram showing the temperature of the liquid in the holding unit 15 and the surface temperature of the optical modulation device 341. Note that FIG. 13 is a view of the optical device 150 viewed from the light incident side (viewed from the side opposite to FIG. 12).

In the optical device 150, the liquid flowing through the second flow path portion 62 and the liquid flowing through the third flow path portion 63 merge in the fourth flow path portion 64, and thus, as shown in FIGS. 11 and 13. In addition, the temperature of the liquid in the third flow path portion 63 and the fourth flow path portion 64 is lower in the optical device 150 than in the optical device 250.

Then, the surface temperature of the light modulation device 341 in the optical device 150 is lower than the surface temperature of the light modulation device 341 in the optical device 250. Further, in the temperature distribution on the surface of the optical modulation device 341, the high temperature range in which the highest temperature is reached is smaller in the optical device 150 than in the optical device 250. Specifically, the high temperature range 150H (see FIG. 13) of the optical modulation device 341 in the optical device 150 is smaller than the high temperature range 250H (see FIG. 11) of the optical modulation device 341 in the optical device 250. Further, the high temperature range 150H in the optical device 150 is closer to the center of the surface of the optical modulation device 341 than the high temperature range 250H in the optical device 250, and the temperature distribution is balanced.

As described above, the holding portion 15 of the optical device 150 is provided with the vertical wall 181 in the flow path 6, so that the first path 60A (the first flow path portion 61, the third flow path portion 63, and the third flow path portion 63, and the first path 60A) are provided. The liquid flowing through the second path 60B (the path following the second flow path portion 62), which is shorter than the fourth flow path portion 64), invades the subsequent stage (fourth flow path portion 64) of the first path 60A. 4 The temperature rise of the liquid in the flow path portion 64 is suppressed.

As described above, according to the present embodiment, the following effects can be obtained in addition to the effects of the second embodiment.
(1) A vertical wall 181 is provided in the flow path 6 of the holding portion 15, and the temperature rise of the liquid in the fourth flow path portion 64 is suppressed, so that the temperature rise of the optical modulation device 341 is further suppressed. ..

(2) The temperature distribution on the surface of the optical modulation device 341 is such that the high temperature range 150H is well-balanced near the center of the surface of the optical modulation device 341, so that the projected image has color unevenness or the like. Even if there is a case where the color is distributed, it is possible to simplify the image processing for correcting the color unevenness and the like.

The present invention is not limited to the above-described embodiment, and various changes and improvements can be added to the above-described embodiment. A modified example will be described below.

(Modification example 1)
In the above embodiment, the optical modulation device 341 is configured as an optical element held by the holding unit 5 through which the liquid flows, but the optical modulation device 341 is not limited to the optical modulation device 341, and other optical components are configured as the optical element. May be good. Examples of this optical element include an incident side polarizing plate 342 and an emitting side polarizing plate 343. Further, the optical unit 3 may be configured to include a retardation plate, a compensating element for compensating for the phase difference of light, and the like, and these retardation plates, the compensating element, and the like may be configured as an optical element.

(Modification 2)
The narrowed portion 86 in the first embodiment is formed so as to be partially narrowed in the vertical direction, but is partially narrowed in the joining direction in which the two members (first frame and second frame) are joined. It may be formed as follows. In the case of this configuration, it is possible to adjust in the direction of increasing the amount of squeezing in the state where the two members are joined. Therefore, for example, it is possible to form a holding portion compatible with a plurality of models of the projector 1. It will be possible. That is, the two members are joined in advance with the amount of squeezing small or without the amount of squeezing, and for example, the amount of squeezing is adjusted by corresponding to a light source device having different brightness of the emitted light, and the optics The element can be cooled efficiently.

(Modification example 3)
The vertical wall 181 (detour portion) of the third embodiment is configured to bypass almost all the liquid flowing through the second flow path portion 62, but is a part of the liquid flowing through the second flow path portion 62. The detour portion may be configured so as to detour. That is, the detour portion may be configured so that at least a part of the liquid flowing through the second flow path portion 62 is detoured.

(Modification example 4)
The optical device 50 of the above embodiment has a configuration in which the flow path forming unit 52 is arranged on the light incident side of the light modulation device 341, but includes the flow path forming unit arranged on the light emission side of the light modulation device 341. There may be. Further, the flow path forming portions may be provided on both sides (light incident side and light emitting side) of the optical modulation device 341.

(Modification 5)
The holding portions 5, 15 and 25 of the above embodiment are configured by combining two members, but the holding portion is composed of one member by a three-dimensional object modeling device such as a 3D printer using metal powder or the like. You may. In the case of this configuration, since the wall thickness forming the inner peripheral edge of the flow path forming portion can be formed thinner than the wall thickness (thickness of the first standing portion 71 and the second standing portion 81) in the above embodiment, the flow path 6 is optically formed. It is possible to get closer to the effective area. Further, since the end portion 851 in the above embodiment is not required, a smaller holding portion can be made.

(Modification 6)
The optical modulation device 341 (optical element) of the above embodiment is held by the holding portion 5 by using an adhesive, but the present invention is not limited to this configuration. For example, a holding member arranged on the opposite side of the holding portion 5 of the optical element may be provided, and the optical element may be held by sandwiching the optical element between the holding portion 5 and the holding member.

(Modification 7)
The liquid cooling device 4 of the above embodiment includes the tank 42, but a configuration without the tank 42 is also possible.

(Modification 8)
The light source device 31 of the above embodiment is configured to have a discharge type light source 311, but is not limited to the discharge type, and is configured to include lamps of other types, solid light sources such as light emitting diodes and lasers, and the like. There may be.
Further, as shown in FIG. 1, the optical unit 3 of the above-described embodiment is configured such that the direction in which the light source device 31 emits light and the direction in which the projection optical device 35 projects light are the same. The direction in which the light source device 31 emits light and the direction in which the projection optical device 35 projects light may be different from each other.

(Modification 9)
The projector 1 of the above-described embodiment employs a so-called three-plate system including three optical modulators 341R, 341G, and 341B corresponding to R light, G light, and B light, but the present invention is not limited to this. A single plate system may be adopted, or a configuration including two or four or more optical modulation devices 341 may be provided.
Further, although the light modulation device 341 of the above embodiment is configured to have the transmissive liquid crystal panel 340, it may be configured by the reflective liquid crystal panel. Further, as the optical modulation device, a micromirror type optical modulation device, for example, a DMD (Digital Micromirror Device) or the like may be used.

1 ... Projector, 4 ... Liquid cooling device, 5,5R, 5G, 5B, 15, 25 ... Holding part, 6 ... Flow path, 7 ... 1st frame, 8, 18 ... 2nd frame, 34A ... Optical axis, 35 ... Projection optical device, 50, 150, 250 ... Optical device, 51 ... Inflow section, 52 ... Flow path forming section, 53 ... Outflow section, 61 ... First flow path section, 62 ... Second flow path section, 63 ... 3 flow path portion, 64 ... 4th flow path portion, 86 ... constriction portion, 181 ... standing wall (detour portion), 311 ... light source, 341, 341R, 341G, 341B ... optical modulator (optical element).

Claims (8)

Optical elements arranged on the optical axis of the incident light,
A holding portion for holding the optical element is provided.
The holding portion includes an inflow portion into which a liquid supplied from the outside of the holding portion flows in, and an inflow portion.
A flow path forming portion which is arranged in an annular shape along the peripheral edge of the optical element and has a flow path inside which the liquid from the inflow portion flows.
It is provided with an outflow portion that allows the liquid that has flowed through the flow path to flow out of the holding portion.
The flow path includes a first flow path portion that extends in the first direction and allows a part of the liquid that has flowed in from the inflow portion to flow in the first direction.
A second flow path portion that extends in a second direction intersecting the first direction and allows the remaining portion of the liquid that has flowed in from the inflow portion to flow in the second direction.
A third that extends in the second direction and allows the liquid that has flowed through the first flow path to flow in the second direction.
Channel part and
The liquid that extends in the third direction opposite to the first direction and flows through the third flow path portion is the third.
It has a fourth flow path portion that circulates in the direction,
The outflow portion causes the liquid that has flowed through the second flow path portion and the liquid that has flowed through the fourth flow path portion to flow out to flow out.
The inflow portion and the outflow portion are arranged on the same side with respect to the flow path forming portion .
The flow path diverts at least a part of the liquid flowing through the second flow path portion in the first direction.
An optical device having a detour portion for merging with a liquid flowing through the fourth flow path portion. Optical elements arranged on the optical axis of the incident light,
A holding portion for holding the optical element is provided.
The holding portion includes an inflow portion into which a liquid supplied from the outside of the holding portion flows in, and an inflow portion.
A flow path forming portion which is arranged in an annular shape along the peripheral edge of the optical element and has a flow path inside which the liquid from the inflow portion flows.
It is provided with an outflow portion that allows the liquid that has flowed through the flow path to flow out of the holding portion.
The flow path includes a first flow path portion that extends in the first direction and allows a part of the liquid that has flowed in from the inflow portion to flow in the first direction.
A second flow path portion that extends in a second direction intersecting the first direction and allows the remaining portion of the liquid that has flowed in from the inflow portion to flow in the second direction.
A third that extends in the second direction and allows the liquid that has flowed through the first flow path to flow in the second direction.
Channel part and
The liquid that extends in the third direction opposite to the first direction and flows through the third flow path portion is the third.
It has a fourth flow path portion that circulates in the direction,
In the outflow portion, the liquid flowing through the second flow path portion and the liquid flowing through the fourth flow path portion are combined.
Let the flushed liquid flow out
The inflow portion and the outflow portion are arranged on the same side with respect to the flow path forming portion.
An optical device characterized in that a narrowed portion that is partially narrowed is provided only in the second flow path portion. The optical device according to claim 2.
The optical device is characterized in that the narrowed portion is formed by being partially narrowed in a direction perpendicular to the optical axis. The optical device according to claim 2.
The holding portion is a first frame arranged so as to face each other in a direction along the optical axis.
And with a second frame
The constricted portion is formed in the joining direction in which the first frame and the second frame are joined to each other.
An optical device characterized in that it is partially narrowed and formed. The optical device according to any one of claims 1 to 4.
An optical device, characterized in that the optical element is in contact with the holding portion so that the peripheral edge of the optical element and the flow path overlap in a direction along the optical axis. The optical device according to any one of claims 1 to 5.
The extending direction in which the flow path extends is paired with the direction along the optical axis of the light incident on the optical element.
An optical device characterized by intersecting with each other. The optical device according to any one of claims 1 to 6.
The optical element is an optical device that is an optical modulation device that modulates incident light. A light source that emits light and
The optical device according to any one of claims 1 to 7, wherein the light emitted from the light source is incident.
A projection optical device that projects an image according to the light emitted from the optical device, and
A projector including a liquid cooling device for circulating a liquid in the optical device.

Images