JP6874587B2 - Laser processing equipment and detection method - Google Patents

Description

The present invention relates to a laser processing apparatus and a detection method.

Patent Document 1 discloses a laser diode and a laser marker provided with a fan for cooling the inside of a case containing a laser diode and a Peltier element for heating or cooling the laser diode. The air inside the case, which has become hotter than the outside due to the heat generated by the laser diode, is exhausted by the rotation of the fan, and the inside of the case is cooled.

Japanese Unexamined Patent Publication No. 2001-7433

By the way, in order to exhaust the air in the case, the case is generally provided with an exhaust port and an intake port. In addition, a dust-proof filter is attached to the intake port in order to prevent dust from entering the case through the intake port as the air is taken in. If the dust-proof filter is clogged, the air flow will be blocked and the cooling efficiency inside the case will decrease, so it will be necessary to replace the filter at an appropriate time. However, since the filter replacement time varies depending on the usage environment and the like, it has been desired to replace the filter at a time when the degree of clogging of the filter becomes large.

The present application has been proposed in view of the above problems, and an object of the present application is to provide a laser processing apparatus and a detection method capable of detecting clogging of a filter.

The present specification houses a light source unit, a heat sink that contacts the light source unit and dissipates heat generated from the light source unit, a first temperature sensor that detects the temperature, a light source unit, a heat sink, and a first temperature sensor. a casing, a fan for an air flow through the heat sink to the housing, a laser processing apparatus Ru and a filter for dust-proof, which is disposed upstream of the air flow when the fan rotates forward The first temperature sensor is located between the filter and the fan and is located in the air flow path . The light source is close to the laser diode, one surface is close to the laser diode, and the other surface is close to the heat sink. The laser processing apparatus has a first Pelche element, and the laser processing device has a degree of clogging of the filter and a change in temperature detected by the first temperature sensor with time in a state where the fan is rotating at a specified rotation speed. It includes a storage unit and a control unit in which correlation information indicating the correlation is stored in advance, and the correlation information is information in a state where the fan is reversed and the drive of the first Pelche element is stopped, and the control unit is , In the measurement operation mode, the acquisition process for acquiring the temperature detected by the first temperature sensor in the state where the fan is rotated at the specified rotation speed is compared with the temperature acquired in the acquisition process and the correlation information to filter. A determination process for determining the degree of clogging and an output process for outputting a signal indicating the degree of clogging determined in the determination process to the notification unit are executed, and the fan is reversed in the acquisition process. 1 discloses a laser processing apparatus according to claim state and to Rukoto stopping the driving of the Peltier element.

Further, the present specification describes a laser diode, a heat sink, a Perche element having one surface close to the laser diode and the other surface close to the heat sink, a temperature sensor for detecting temperature, a laser diode, and a Perche element. A housing for accommodating the heat sink and the temperature sensor, a fan for forming an air flow path passing through the heat sink in the housing by rotating, and a fan arranged on the upstream side of the flow path when the fan rotates in the normal direction. A detection method for detecting clogging of a fan of a laser processing device including a dustproof filter and a storage unit, in which a fan defines a temperature sensor arranged between the filter and the fan in a flow path. The first step of detecting the temperature in the state of rotating at the rotation speed of, and the degree of clogging of the filter and the temperature sensor in the state where the fan is rotating at the specified rotation speed, which is stored in the storage unit, are detected. a correlation information indicating a correlation between the temporal changes in temperature, by comparing the temperature and the temperature sensor detects at first step, a second step of detecting the clogging of the filter was detected in the second step eye It viewed including a third step of outputting a signal indicating the degree of clogging respect notifying unit, a correlation information fan is reversed, is information in a state in which the drive is stopped in the Peltier element, in a first step, Disclosed is a detection method characterized in that the fan is reversed to stop driving the Pelche element.

According to the present application, it is possible to provide a laser processing apparatus and a detection method capable of detecting clogging of a filter.

It is a perspective view which shows the right front of the laser processing apparatus excluding the housing body which concerns on this embodiment. It is a top view which shows the base of a laser processing apparatus. It is a perspective view which shows the left rear of the laser processing apparatus excluding the housing body. It is a bottom view which shows the base of a laser processing apparatus. It is a perspective view which shows the left front of the laser processing apparatus excluding the front panel and the housing body. It is a perspective view which shows the left front of the excitation laser part. It is a block diagram which shows the electric structure of a laser processing apparatus and a PC. It is a flowchart which shows the processing content of the determination process. It is a schematic diagram explaining the air flow in the excitation laser part when the side fan rotates in the normal direction. It is a figure explaining the correlation with the detection temperature with respect to the degree of clogging of a filter when a side fan rotates forward. It is a schematic diagram explaining the air flow in the excitation laser part when the side fan reverses. It is a figure explaining the correlation with the change of the detection temperature with respect to the elapsed time in the filter which the degree of clogging is different when the side fan reverses. It is a figure explaining the correlation with the detection temperature at time t1 of FIG. 12 with respect to the degree of clogging of a filter when the side fan reverses. It is a schematic diagram explaining the cross-sectional structure including a laser beam emitting part and a 2nd heat sink.

(Outline configuration of laser processing equipment)
The schematic configuration of the laser processing apparatus 1 according to the present embodiment will be described with reference to FIG. The laser processing apparatus 1 performs laser processing for marking characters, symbols, figures, etc. by irradiating the object to be processed with a two-dimensional scan of laser light based on the print data transmitted from the PC 7 (FIG. 7). Do. In the following description, laser machining may be referred to as printing. In the following description, the direction shown in FIG. 1 is used as the direction.

The laser processing apparatus 1 includes a housing 8, a base 11, a processing laser unit 6, an excitation laser unit 40, power supply units 52, 52, a plurality of circuit boards 45, and the like. The housing 8 has a substantially rectangular parallelepiped shape, and is composed of a front panel 8a, a back panel 8b, a bottom panel 8c, and a housing body 8d (see FIG. 9) that covers the left and right surfaces and the upper surface. Note that FIG. 1 shows a state in which the housing body 8d is removed. The housing 8 houses a base 11, frame plates 91, 91, a processing laser unit 6, an excitation laser unit 40, a plurality of circuit boards 45, and the like. The base 11 is attached to the bottom panel 8c. The processing laser unit 6 is arranged on the base 11. The excitation laser unit 40 is above the base 11 and is attached to the front side of the laser processing apparatus 1. The frame plates 91 and 91 are adjacent to each other, and are arranged so that the plate surface is substantially parallel to the left and right surfaces of the housing body from the substantially central portion to the rear end in the front-rear direction of the laser processing apparatus 1. The power supply units 52 and 52 are above the base 11 and are attached to the left side of the frame plates 91 and 91. The power supply units 52 and 52 are connected to a commercial power supply via a power supply cord (not shown). The power supply units 52 and 52 convert the AC power to be supplied into DC power and supply the power to each unit of the laser processing apparatus 1. The plurality of circuit boards 45 are mounted above the base 11 and on the right side of the frame plates 91 and 91.

The excitation laser unit 40 includes a laser diode unit 46, a first Peltier element 47 (FIG. 6), a first heat sink 48 (FIG. 6), and the like. The first vent 81 and the second vent 82 are arranged at the left and right ends of the first heat sink 48 on the left and right sides of the housing 8 for the air flow passing through the first heat sink 48, respectively. A filter 83, which is a dustproof filter, is attached to the inside of the first vent 81, and a side fan 84 that can rotate forward and reverse is attached to the inside of the second vent 82. When the side fan 84 rotates in the normal direction, an air flow from the first vent 81 to the second vent 82 is generated. That is, the filter 83 is arranged in the flow path of the air flow generated when the side fan 84 rotates in the normal direction and on the upstream side of the air flow. The details of the excitation laser unit 40 will be described later.

Next, the processing laser unit 6 will be described in detail with reference to FIG. The processing laser unit 6 includes a laser light emitting unit 12, an optical shutter unit 13, an optical damper (not shown), a first guide light unit 15, a second guide light unit 16, a dichroic mirror 17, and a galvano scanner. It has 18, an fθ lens 19, and the like.

The laser light emitting unit 12 includes a laser oscillator unit 21, a beam expander 22, a second Peltier element 34, and the like. Excitation laser light, which is excitation light emitted from the excitation laser unit 40, is incident on the laser light emission unit 12 via the optical fiber F. The laser oscillator section 21 includes a cover 21a, a laser oscillator 21b (FIG. 14), a laser oscillator base 21c (FIG. 14), and a second thermistor 37. The laser oscillator 21b includes, for example, a YAG laser and a passive Q-switch (not shown). The laser oscillator 21b emits a pulsed laser beam for laser processing in response to the excitation laser beam incident through the optical fiber F. The beam expander 22 is provided coaxially with the laser oscillator 21b, and adjusts the beam diameter of the laser beam. The direction in which the laser oscillator 21b emits the laser beam is the front direction, and the direction orthogonal to the vertical direction and the front-rear direction is the left-right direction.

The optical shutter unit 13 has a shutter motor 26 and a flat plate-shaped shutter 27. The shutter 27 is attached to the motor shaft of the shutter motor 26 and rotates coaxially. When the shutter 27 is rotated to a position that blocks the optical path of the laser light emitted from the beam expander 22, the shutter 27 reflects the laser light to an optical damper (not shown). The optical damper absorbs the laser beam reflected by the shutter 27. On the other hand, when the shutter 27 is rotated to a position that does not block the optical path of the laser beam emitted from the beam expander 22, the laser beam emitted from the beam expander 22 is arranged in front of the optical shutter unit 13. It is incident on the dichroic mirror 17. The laser beam emitted from the beam expander 22 passes through the dichroic mirror 17 and enters the galvano scanner 18.

The first guide light unit 15 is arranged on the right side of the dichroic mirror 17. The first guide light unit 15 includes a guide light laser (not shown), a lens group (not shown), and the like. The guide light laser is, for example, a red semiconductor laser that emits visible laser light. The lens group converges the visible laser light into parallel light. The reflecting surface of the dichroic mirror 17 is arranged so as to be 45 degrees with respect to the optical path of the guide light which is the visible laser light emitted from the first guide light unit 15, and the reflecting surface of the guide light incident on the reflecting surface. Most of it is reflected toward the galvano scanner 18. Here, the optical path of the laser beam transmitted through the dichroic mirror 17 and the optical path of the guide light reflected by the dichroic mirror 17 coincide with each other. The guide light is used for aligning the object to be machined in the front-rear direction and the left-right direction during laser machining. The second guide light unit 16 is arranged on the right side of the galvano scanner 18. The second guide light unit 16 has a semiconductor laser (not shown) that emits visible laser light used for vertically aligning the object to be machined during laser machining.

The galvano scanner 18 is attached to the upper side of a through hole (not shown) formed at the front end of the base 11. The galvano scanner 18 includes a galvano X-axis motor 31 (FIG. 7), a galvano Y-axis motor 32 (FIG. 7), a main body 33, and the like. Each of the galvano X-axis motor 31 and the galvano Y-axis motor 32 has a motor shaft and a scanning mirror (not shown) attached to the tip of the motor shaft. The galvano X-axis motor 31 and the galvano Y-axis motor 32 are attached to the main body 33 so that their motor axes are orthogonal to each other and their scanning mirrors face each other. The rotation of the galvano X-axis motor 31 and the galvano Y-axis motor 32 causes each scanning mirror to rotate. As a result, the laser light and the guide light are two-dimensionally scanned.

The fθ lens 19 focuses the laser light and the guide light two-dimensionally scanned by the galvano scanner 18 on the object to be processed arranged below.

As shown in FIG. 3, the power supply units 52 and 52 are attached to the left side surface of the left frame plate 91. Further, the rear fan 85 is attached to the outside of the rear panel 8b. As shown in FIG. 4, a second heat sink 35 that mainly dissipates heat generated by the laser beam emitting unit 12 is attached to the base 11 in the space surrounded by the base 11 and the bottom panel 8c.

Next, the excitation laser unit 40 will be described in detail with reference to FIGS. 5 and 6. As shown in FIG. 5, the excitation laser unit 40 is located above the galvano scanner 18 and the like. As shown in FIG. 6, the excitation laser unit 40 has a first frame 92, a second frame 93, and the like in addition to the above configuration. The laser diode unit 46 includes a cover 46a, a laser diode element 46b (FIG. 9), a laser diode base 46c (FIG. 9), a first thermistor 49, and the like. The first frame 92 is a U-shaped plate-shaped member whose cross section opens downward, and its lower end is attached to the base 11 (FIG. 1). The second frame 93 is a U-shaped plate-shaped member whose cross section opens downward, and its lower end is attached to the upper surface of the first frame 92. The first heat sink 48 is housed in a space surrounded by the first frame 92 and the second frame 93. The laser diode portion 46 is arranged on the upper surface of the second frame 93. The first heat sink 48 has a plurality of plate-shaped fins 48a, and the fins 48a extend in the left-right direction, which is the direction from the first vent 81 to the second vent 82. The side thermistor 87 is arranged at the upper end of the resin spacer 88 attached to the upper surface of the first frame 92. The side surface thermistor 87 is a left end portion of the first heat sink 48, and is arranged at a substantially central portion in the front-rear direction of the first heat sink 48 so as to be separated from the first heat sink 48. That is, the side thermistor 87 is arranged at the center of the air flow generated when the side fan 84 rotates. Further, the side thermistor 87 is arranged at a position closer to the filter 83 than the first heat sink 48. The laser diode section 46 is optically connected to the laser oscillator 21b via an optical fiber F. The laser diode element 46b emits an excitation laser beam having a power corresponding to the current value of the drive current supplied from the excitation laser driver 51 into the optical fiber F.

(Electrical configuration of laser processing equipment)
Next, the electrical configuration of the laser processing apparatus 1 will be described with reference to FIG. 7.
The laser processing device 1 is connected to the PC 7 so as to be capable of bidirectional communication, and performs laser processing based on the print data created by the PC 7.

The PC 7 includes a CPU 71, a RAM 72, a ROM 73, a control circuit 74, an HDD (Hard Disk Drive) 75, a keyboard 76, a mouse 77, an LCD 78, and the like. Application software for laser machining is pre-installed on the PC7. Firmware and the like are stored in the ROM 73. The RAM 72 is used as a main storage device for the CPU 71 to execute various processes. Further, the HDD 75 stores a processing program, character parameter information, and the like. The CPU 71, RAM 72, ROM 73, and HDD 75 are connected to each other by a bus line (not shown). The control circuit 74 is electrically connected to the keyboard 76, the mouse 77, the LCD 78, and the like, and converts the operation received by the keyboard 76 and the mouse 77 into a signal and outputs the signal to the CPU 71. In addition, the LCD 78 displays a display screen in response to a command from the CPU 71.

The PC 7 receives a processing command from the user, creates print data, and outputs the print data to the controller 5. The print data is data in which XY coordinate data indicating the shape of a processing pattern drawn by laser light in laser processing and processing condition data indicating laser processing conditions are associated with the XY coordinate data.

The laser processing device 1 includes a controller 5, an excitation laser driver 51, a first Pelche driver 53, a second Pelche driver 54, a galvano driver 36, a side fan driver 55, a rear fan driver 56, and the like. The controller 5 includes a CPU 61, a RAM 62, a ROM 63, an NVRAM 64, and the like. Further, the controller 5 is electrically connected to the side thermistor 87, the first thermistor 49, and the second thermistor 37. Specifically, resistors are connected in series to each of the side thermistor 87, the first thermistor 49, and the second thermistor 37, and the resistance connected in series to each of the first thermistor 49 and the second thermistor 37 A predetermined voltage is applied, and a signal obtained by converting the voltage applied to each of the side thermistor 87, the first thermistor 49, and the second thermistor 37 into a digital value is input to the controller 5. In the following description, a signal obtained by converting the voltage applied to each thermistor into a digital value is referred to as a signal indicating the detection temperature of each thermistor. Further, the value obtained by converting the signal indicating the detection temperature of each thermistor into the temperature may be described as the detection temperature. The controller 5 and the various drivers described above are realized by, for example, a plurality of circuit boards 45 on which various electronic components (not shown) such as a processor (not shown) that functions as a CPU 61 are mounted. The controller 5 is connected so as to be able to communicate with various drivers.

The CPU 61 controls various drivers and the like by executing various programs stored in the ROM 63. The RAM 62 is used as a main storage device for the CPU 61 to execute various processes. The CPU 61, RAM 62, ROM 63, and NVRAM 64 are connected to each other by a bus line (not shown). The CPU 61 controls various drivers based on the print data output from the PC 7. For example, the CPU 61 instructs the excitation laser driver 51 to drive the laser diode element 46b with the drive current value calculated based on the print data. Further, the CPU 61 instructs the galvano driver 36 to drive the galvano X-axis motor 31 and the galvano Y-axis motor 32 so that the drive angle and the rotation speed are calculated based on the print data. Further, the CPU 61 instructs the first Peltier driver 53 to control the first Peltier element 47 so that the detected temperature becomes the target temperature based on the signal indicating the detected temperature of the first thermistor 49. Since the power of the excitation laser beam emitted from the laser diode element 46b fluctuates depending on the temperature, the temperature of the laser diode element 46b is controlled. Similarly, the CPU 61 instructs the second Peltier driver 54 to control the second Peltier element 34 so that the detected temperature becomes the target temperature based on the signal indicating the detected temperature of the second thermistor 37. Further, the CPU 61 rotates the side fan 84 and the rear fan 85 on the side fan driver 55 and the rear fan driver 56 based on the signals indicating the detected temperatures of the side thermistor 87, the first thermistor 49, and the second thermistor 37. And order to stop. The NVRAM 64 is a non-volatile memory realized by, for example, a flash memory. The CPU 61 accumulates, for example, the operating time from when the power of the laser processing apparatus 1 is turned on to when it is turned off, and stores the accumulated accumulated operating time in the NVRAM 64. Further, the NVRAM 64 stores in advance the first correlation information 65, the second correlation information 66, and the third correlation information 67 used in the determination process described later.

(Determination process)
Next, the determination process executed by the CPU 61 will be described with reference to FIG. When the print data is transmitted from the PC 7, the CPU 61 performs laser processing based on the print data. Specifically, the CPU 61 emits laser light from the laser light emitting unit 12 in the laser processing process to drive the galvano scanner 18. In the laser processing, the side fan 84 is rotated in the normal direction. When the CPU 61 finishes the laser processing process, it stops driving the laser diode element 46b and the first Peltier element 47, shifts to the measurement operation mode, and starts the determination process shown in FIG.

When the determination process is started, the CPU 61 reads the cumulative operating time from the NVRAM 64 and acquires it (S1), and determines whether or not the cumulative operating time is equal to or less than the first threshold value stored in the NVRAM 64 in advance (S3). When it is determined that the cumulative operating time is equal to or less than the first threshold value (S3: YES), the CPU 61 starts driving the laser diode element 46b with the same current value as when the first correlation information 65 was created, and the same as in the laser machining process. The drive of the first Peltier element 47 is started (S4). After a lapse of a predetermined time, the CPU 61 stops driving the laser diode element 46b (S5). Specifically, the CPU 61 causes the excitation laser driver 51 to stop supplying the drive current to the laser diode element 46b. Next, the drive of the first Peltier element 47 is stopped (S7). Specifically, the CPU 61 causes the first Peltier driver 53 to stop supplying the drive current to the first Peltier element 47. Next, the side fan driver 55 is instructed to rotate the side fan 84 in the normal rotation at the same rotation speed as when the first correlation information 65 is created (S9). Next, after the elapse of a predetermined time after executing step S9, a signal indicating the detected temperature of the side thermistor 87 is acquired (S11). Specifically, the CPU 61 stores the value of the signal indicating the detection temperature of the side thermistor 87 in the RAM 62. Next, the degree of clogging is calculated by comparing the value stored in the RAM 62 with the first correlation information 65 stored in the NVRAM 64 (S13).

Step S13 will be described with reference to FIGS. 9 and 10. FIG. 9 is a schematic view of the excitation laser unit 40 viewed from the front. The excitation laser unit 40 has a structure in which the first heat sink 48, the first Peltier element 47, the laser diode base 46c, and the laser diode element 46b are in contact with each other and stacked in this order from the bottom. Grease may be applied between the laser diode base 46c and the laser diode element 46b. Further, the first thermistor 49 is arranged in the vicinity of the laser diode element 46b, and the first Peltier element 47, the laser diode base 46c, the laser diode element 46b, and the first thermistor 49 are covered with the cover 46a. The laser diode element 46b driven with the same current value as when the first correlation information 65 was created generates heat, and the first Peltier element 47 cools the first surface 47a adjacent to the laser diode element 46b and becomes the first heat sink 48. The adjacent second surface 47b side is heated. Heat is conducted from the first Peltier element 47 to the first heat sink 48. In steps S5 and S7 of the determination process, the driving of the laser diode element 46b and the first Peltier element 47 is stopped.

By the way, in step S9, since the side fan 84 is rotated in the normal direction, an air flow is generated in the direction of the arrow shown in FIG. Here, the greater the degree of clogging of the filter 83, the smaller the flow rate of air taken in from the first vent 81, so that the efficiency of heat exchange is poor, and the temperature near the side thermistor 87 is about the temperature outside the housing 8. It takes a long time to cool down. That is, the correlation between the degree of clogging of the filter 83 and the temperature detected by the first thermistor 49 is a positive correlation as shown in FIG. The first correlation information 65 is, for example, a mathematical formula showing this correlation. The first correlation information 65 is determined, for example, after the laser diode element 46b is driven at a specified current value before the laser processing apparatus 1 is shipped, and then the normal rotation of the side fan 84 is started at a specified rotation speed. The information is created based on the signal indicating the detection temperature of the first thermistor 49 after the lapse of time, and is, for example, the information stored in the NVRAM 64 at the time of shipment of the laser processing apparatus 1. The degree of clogging is a value indicated as a percentage, and is defined by the blockage rate of the filter 83. The degree of clogging in the state where the filter 83 is not attached to the inside of the first vent 81 is 0%, and the degree of clogging in the state where the filter 83 is completely closed is 100%. The first correlation information 65 is created based on the detection temperature of the side thermistor 87 with some sample filters 83 having a blockage rate of 0 to 100% attached to the inside of the first vent 81. To. If the temperature when the blockage rate is 0% is the temperature Tmin and the temperature when the blockage rate is 100% is the temperature Tmax, for example, the first correlation information 65 is a function of a straight line connecting the temperature Tmin and the temperature Tmax. is there.

In steps S4 to S9, the driving states of the laser diode element 46b, the first Peltier element 47, and the side fan 84 are set to the same driving states as when the first correlation information 65 was created, so that the first correlation information 65 The state of the laser processing device 1 at the time of creation is reproduced. Therefore, the blockage rate of the filter 83 can be calculated by comparing the detection temperature of the side thermistor 87 with the first correlation information 65. Specifically, the calculated value calculated by substituting the detection temperature of the side thermistor 87 into the function of the first correlation information 65 is the degree of clogging in step S13.

Returning to FIG. 8, the CPU 61 then outputs a signal indicating the calculated degree of clogging to the PC 7 (S15), and ends the determination process. When a signal indicating the degree of clogging is input, the PC 7 displays, for example, the degree of clogging on the LCD 78. The user can determine whether or not it is time to replace the filter by looking at the displayed degree of clogging.

On the other hand, if it is determined that the cumulative operating time is not equal to or less than the first threshold value (S3: NO), then the CPU 61 determines whether or not the cumulative operating time is equal to or less than the second threshold value stored in advance in the NVRAM 64 (S17). .. The second threshold value is a value larger than the first threshold value. When it is determined that the cumulative operating time is equal to or less than the second threshold value (S17: YES), the CPU 61 starts driving the laser diode element 46b with the same current value as when the second correlation information 66 was created, and the same as in the laser machining process. The driving of the first Peltier element 47 is started (S20). After the lapse of a predetermined time, the CPU 61 stops driving the laser diode element 46b in the same manner as in step S5 (S21). Next, similarly to step S7, the CPU 61 stops driving the first Peltier element 47 (S23). Next, the CPU 61 instructs the side fan driver 55 to reverse the side fan 84 at the same rotation speed as when the second correlation information 66 was created (S25). Next, after the elapse of a predetermined time after executing step S25, the CPU 61 acquires a signal indicating the temperature from the side thermistor 87 in the same manner as in step S11 (S27). Next, the CPU 61 calculates the degree of clogging by comparing the value stored in the RAM 62 with the second correlation information 66 stored in the NVRAM 64 (S29).

Step S29 will be described with reference to FIG. FIG. 11 is a schematic view of the vicinity of the excitation laser unit 40 viewed from the front side, as in FIG. 9. In step S25, since the side fan 84 is reversed, an air flow is generated in the direction of the arrow shown in FIG. When the degree of clogging of the filter 83 increases, the ratio of the flow rate of the air exhausted from the first vent 81 to the flow rate of the air taken in from the second vent 82 decreases, and retention occurs inside the filter 83. .. The laser diode element 46b driven with the same current value as when the second correlation information 66 was created generates heat, and the temperature near the laser diode element 46b has not dropped to about the temperature outside the housing 8, and the housing 8 The temperature is higher than the outside temperature. Further, the first Peltier element 47 drives the first heat sink 48 to have heat, and the air flow passing through the first heat sink 48 causes air having a temperature higher than the temperature outside the housing 8 to flow. It stays near the side thermistor 87, and the temperature near the side thermistor 87 rises with the elapsed time.

FIG. 12 is a diagram schematically showing a change in the detection temperature of the side thermistor 87 according to the elapsed time. The second correlation information 66 is the same information as the first correlation information 65. Here, the second correlation information 66 is set to the detection temperature of the side thermistor 87 in a state where the filter 83 as a sample having the occlusion rate of a%, b%, and c% is attached to the inside of the first vent 81. It shall be created based on. When the filter 83 having the occlusion rate of a%, b%, and c% is attached to the laser machining apparatus 1, the change in the detection temperature of the side thermistor 87 is, for example, the characteristics A and B shown in FIG. Suppose it becomes like C. Assuming that the temperatures of the characteristics A, B, and C of the time t1 elapsed after the start of the reversal of the side fan 84 are the temperatures Ta, Tb, and Tc, respectively, the temperature characteristics with respect to the degree of clogging are shown in FIG. 13, for example. Will be shown. For example, the linear function shown in FIG. 13 is the second correlation information 66. In steps S21 to S25, the driving states of the laser diode element 46b, the first Peltier element 47, and the side fan 84 are set to the same driving states as when the second correlation information 66 was created, so that the second correlation information 66 can be driven. The state of the laser processing device 1 at the time of creation is reproduced. Therefore, the degree of clogging of the filter 83 can be calculated by comparing the detected temperature of the side thermistor 87 with the second correlation information 66.

Returning to FIG. 8, the CPU 61 then proceeds to step S15 after executing step S29. On the other hand, when it is determined that the cumulative operating time is not equal to or less than the second threshold value (S17: NO), the CPU 61 starts driving the laser diode element 46b with the same current value as when the third correlation information 67 was created, which is the same as the laser machining process. To start driving the first Peltier element 47 (S30). After the lapse of a predetermined time, the CPU 61 stops driving the laser diode element 46b in the same manner as in step S5 (S31). Next, the CPU 61 controls the first Peltier driver 53 to heat the second surface 47b in contact with the first thermistor 49 of the first Peltier element 47 with a drive current having the same current value as when the third correlation information 67 was created. (S33). Next, the CPU 61 instructs the side fan driver 55 to reverse the side fan 84 at the same rotation speed as when the third correlation information 67 was created (S35). Next, after the elapse of a predetermined time after executing step S35, the CPU 61 acquires a signal indicating the temperature from the side thermistor 87 in the same manner as in step S11 (S37). Next, the CPU 61 calculates the degree of clogging by comparing the value stored in the RAM 62 with the third correlation information 67 stored in the NVRAM 64 (S39). Since the third correlation information 67 is the same information as the second correlation information 66, the description thereof will be omitted.

The state of the first Peltier element 47 is different from the state of the laser processing device 1 when it is determined to be YES in step S17 and the state of the laser processing device 1 when it is determined to be NO in step S17. In both cases, the side fan 84 reverses, so that an air flow as shown in FIG. 11 is generated. However, when NO is determined in step S17, the first Peltier element 47 is the second surface on the first heat sink 48 side. In order to heat 47b, air at a controlled temperature stays in the vicinity of the side thermistor 87. Therefore, the degree of clogging calculated using the third correlation information 67 when it is determined to be NO in step S17 uses the second correlation information 66 when it is determined to be YES in step S17. The accuracy is better than the calculated degree of clogging.

Further, the degree of clogging calculated by using the first correlation information 65 when it is determined to be YES in step S3 is calculated by using the second correlation information 66 when it is determined to be YES in step S17. The accuracy is worse than the degree of clogging. If YES is determined in step S3, the side fan 84 rotates in the normal direction, so that the air outside the housing 8 hits the side thermistor 87. Therefore, the detection temperature of the side thermistor 87 is easily affected by the temperature of the air outside the housing 8. On the other hand, if YES is determined in step S17, the side fan 84 reverses, so that the air in the first heat sink 48 hits the side thermistor 87. Therefore, the air warmed by the first heat sink 48 to which the heat generated by driving the laser diode element 46b and the first Peltier element 47 before the execution of step S21 hits the side thermistor 87. Therefore, the detection temperature of the side thermistor 87 is not easily affected by the temperature of the air outside the housing 8.

If YES is determined in step S3, the side fan 84 is rotated in the normal direction as in the laser machining process. On the other hand, if NO is determined in step S3, the side fan 84 is reversed unlike the laser machining process. If YES is determined in step S17, the driving of the first Peltier element 47 is stopped in step S23, whereas if NO is determined in step S17, the first Peltier element 47 is stopped in step S33. 1 The driving of the Peltier element 47 is started. As described above, the control becomes complicated in the order of YES in step S3, YES in step S17, and NO in step S17.

Here, the first threshold value and the second threshold value are values such as 2000 hours and 8000 hours, respectively. When the cumulative operating time is short, the degree of clogging of the filter 83 is small, and it is assumed that even if the degree of clogging is poor, it does not affect the judgment as to whether or not it is time to replace the filter 83. .. On the other hand, the longer the cumulative operating time, the greater the degree of clogging of the filter 83. Therefore, if the degree of clogging is calculated with high accuracy, the user can replace the filter 83 at a more appropriate time. In the determination process, complicated control is not required when the cumulative operating time is short, the degree of clogging is calculated when the load applied to the laser processing device 1 is small, and the degree of clogging is calculated when the cumulative operating time is long. Since it is calculated with high accuracy, the degree of clogging is calculated efficiently.

Here, the laser processing device 1 is an example of a laser processing device, the laser diode element 46b, the laser diode base 46c, and the first Peltier element 47 are examples of a light source unit, and the first heat sink 48 is an example of a heat sink. The fin 48a is an example of a fin, the side surface thermistor 87 is an example of a first temperature sensor and a temperature sensor, the housing 8 is an example of a housing, and the filter 83 is an example of a filter. Further, the first vent 81 is an example of the first vent, and the second vent 82 is an example of the second vent. The laser diode element 46b and the laser diode base 46c are examples of laser diodes, and the first Peltier element 47 is an example of a first Peltier element. Further, NVRAM 64 is an example of a storage unit, CPU 61 is an example of a control unit, steps S11, S27, and S37 are examples of acquisition processing, steps SS13, S29, and S39 are examples of determination processing, and step S15. Is an example of output processing. Further, the first correlation information 65 is an example of the correlation information and the first correlation information, the second correlation information 66 is an example of the correlation information and the second correlation information, and the third correlation information 67 is the correlation information and the third correlation. This is an example of information. The first threshold value is an example of the first predetermined time, and the second threshold value is an example of the second predetermined time.

According to the embodiment described above, the following effects are obtained.
The side thermistor 87 is located between the filter 83 and the side fan 84, and is arranged in the flow path of the air flow generated when the side fan 84 rotates. As the degree of clogging due to dust in the filter 83 increases, the flow velocity of the air flowing through the flow path decreases, so that the temperature of the air in the flow path rises due to the heat radiated by the first heat sink 48. Since the side thermistor 87 is arranged between the filter 83 and the side fan 84, it is possible to detect the temperature of the air reflecting the degree of clogging of the side fan 84.

Further, the side thermistor 87 is arranged so as to be separated from the first heat sink 48. As a result, the side thermistor 87 is less susceptible to the temperature due to radiation, heat conduction, etc. from the first heat sink 48, so that the temperature that more reflects the degree of clogging of the filter 83 can be detected.

Further, the side thermistor 87 is arranged at a position closer to the filter 83 than the first heat sink 48. As a result, the side thermistor 87 is less likely to be affected by the temperature due to radiation from the first heat sink 48, etc., so that the temperature that more reflects the degree of clogging of the filter 83 can be detected.

Further, the side thermistor 87 is arranged at the center of the air flow generated when the side fan 84 rotates. As a result, the side thermistor 87 can detect the temperature more accurately than when it is arranged at the end in the width direction.

Further, the fins 48a of the first heat sink 48 extend in the direction from the first vent 81 to the second vent 82. When the filter 83 is not clogged, air flows smoothly between the plurality of fins 48a, so that the change in the flow velocity depending on the degree of clogging of the filter 83 tends to be large. Therefore, the rate of change of the detection temperature of the side thermistor 87 with respect to the degree of clogging of the filter 83 becomes large, so that the degree of clogging can be calculated accurately.

If the CPU 61 determines YES in step S3 in the determination process, the CPU 61 drives the laser diode element 46b with the same specified current value as when the first correlation information 65 was created in step S4, and then the first The degree of clogging is calculated by comparing the detected temperature of the first thermistor 49 with the first correlation information 65 in a state where the side fan 84 is rotated at the same specified rotation speed as when the correlation information 65 is created. If YES is determined in step S17, the laser diode element 46b is driven with the same specified current value as when the second correlation information 66 was created in step S20, and then the second correlation information 66 is created. The degree of clogging is calculated by comparing the detected temperature of the first thermistor 49 with the second correlation information 66 in a state where the side fan 84 is rotated at the same specified rotation speed. If NO is determined in step S17, the laser diode element 46b is driven with the same specified current value as when the third correlation information 67 was created in step S30, and then the third correlation information 67 is created. The degree of clogging is calculated by comparing the detected temperature of the first thermistor 49 with the third correlation information 67 in a state where the side fan 84 is rotated at the same specified rotation speed. As described above, in each case, the detection temperature of the side thermistor 87 in the same state as when each of the first correlation information 65th to third correlation information 67 was created, and the corresponding first correlation information 65th to third correlation information 67. The degree of clogging can be calculated by comparing with each of the above.

Further, when the CPU 61 determines YES in step S3 in the determination process, the first correlation information 65 created in the state where the side fan 84 is rotated in the normal direction is used as the side surface in the state where the side fan 84 is rotated in the normal direction. The degree of clogging is calculated by comparing with the detection temperature of the thermistor 87. The degree of clogging can be calculated by setting the rotation direction of the side fan 84 as the same rotation direction as the laser machining process.

Further, when the CPU 61 determines YES in step S17 in the determination process, the CPU 61 displays the second correlation information 66 created in a state where the side fan 84 is reversed and the drive of the first Peltier element 47 is stopped. The degree of clogging is calculated by comparing with the detection temperature of the side surface thermistor 87 in a state where the fan 84 is reversed and the driving of the first Peltier element 47 is stopped. As the degree of clogging of the filter 83 increases, the flow rate of the air discharged through the filter 83 decreases with respect to the flow rate of the air taken into the housing 8 by the side fan 84, so that the first heat sink 48 Since the air warmed by the heat radiated stays in the vicinity of the filter 83 and the detection temperature of the first thermistor 49 rises, the degree of clogging can be accurately determined.

Further, the CPU 61 was created in a state where the side fan 84 is reversed and the second surface 47b of the first Peltier element 47 is heated when it is determined to be NO in step S17 in the determination process. The third correlation information 67 is compared with the detection temperature of the side thermistor 87 in a state where the side fan 84 is reversed and the second surface 47b of the first Peltier element 47 is heated. Calculate the degree. The air warmed by the heat radiated by the first heat sink 48 with the heating of the second surface 47b of the first Peltier element 47 stays in the vicinity of the filter 83, and the detection temperature of the first heat sink 48 rises, resulting in clogging. The degree of can be accurately determined.

Further, in the determination process, when the cumulative operating time is equal to or less than the first threshold value, the CPU 61 determines the detection temperature of the side thermistor 87 in the state where the side fan 84 is rotated forward, which is the same as when the first correlation information 65 is created. 1 The degree of clogging is calculated by comparing with the correlation information 65, and when the cumulative operating time is larger than the first threshold value and equal to or less than the second threshold value, the side fan 84 is reversed, which is the same as when the second correlation information 66 was created. The degree of clogging is calculated by comparing the detection temperature of the side thermistor 87 with the second correlation information 66 in a state where the driving of the first Pelche element 47 is stopped, and the cumulative operating time is equal to or less than the first threshold value. In this case, the detection temperature of the side thermistor 87 and the second surface thermistor 87 are controlled to reverse the side fan 84 and heat the second surface 47b of the first Pelche element 47, which is the same as when the second correlation information 66 is created. 3 The degree of clogging is calculated by comparing with the correlation information 67. As the cumulative operating time increases, the degree of clogging of the filter 83 increases. Therefore, by switching to a method that can determine the degree of clogging more accurately as the cumulative operating time increases, the laser machining apparatus 1 in the determination process 1 The user can replace the filter 83 at a more appropriate time while reducing the load on the filter 83. The laser processing apparatus 1 can efficiently calculate the degree of clogging.

(Another example of judgment processing 1)
Next, another example 1 of the processing content when NO is determined in step S17 in the determination processing will be described. In the above, it has been explained that the degree of clogging is calculated by comparing the detection temperature of the side thermistor 87 with the third correlation information 67, but the detection temperature of the side thermistor 87 is corrected based on the detection temperature of the second thermistor 37. However, the processing content may be such that the degree of clogging is calculated by comparing the corrected temperature with the correlation information.

Specifically, in step S37, the CPU 61 acquires a signal indicating the detection temperature of the second thermistor 37 in a state where the driving of the second Peltier element 34 is stopped. Next, the detection temperature of the side thermistor 87 is corrected based on the detection temperature of the second thermistor 37. The corrected temperature is calculated by subtracting the detection temperature of the second thermistor 37 from the detection temperature of the side thermistor 87, for example. Next, in step S39, the degree of clogging is calculated by comparing the corrected temperature with the correlation information. The correlation information in this case is information indicating the correlation between the degree of clogging and the corrected temperature.

The structure of the second heat sink 35 and the laser beam emitting unit 12 in the vertical direction will be described with reference to FIG. The laser beam emitting unit 12 has a structure in which the second heat sink 35, the base 11, the second Peltier element 34, the laser oscillator base 21c, and the laser oscillator 21b are in contact with each other and stacked in this order from the bottom. A second thermistor 37 is arranged in the vicinity of the laser oscillator 21b, and the second Peltier element 34, the laser oscillator base 21c, the laser oscillator 21b, and the first thermistor 49 are covered with the cover 21a. The heat generated by the laser oscillator section 21 and the power supply section 52 is transferred to the base 11. The heat transferred to the base 11 is dissipated by the air flow passing through the second heat sink 35 due to the rotation of the second heat sink 35 and the rear fan 85.

As shown in FIG. 6, since the front and rear surfaces and the upper surface of the side thermistor 87 and the first heat sink 48 are covered with the second frame 93, it is difficult for air to flow from other spaces in the housing 8. However, since it is not completely isolated, air flows into the vicinity of the side thermistor 87 from other spaces in the housing 8. Therefore, the detected temperature of the side thermistor 87 is affected by the temperature in other spaces in the housing 8. Therefore, by correcting the detection temperature of the side thermistor 87 based on the detection temperature of the second thermistor 37, the degree of clogging can be calculated at a temperature that reflects the degree of clogging of the filter 83.

Here, the laser oscillator 21b is an example of a solid-state laser, the second Peltier element 34 is an example of a second Peltier element, and the second thermistor 37 is an example of a second temperature sensor. According to the configuration of another example 1 of this determination process, the degree of clogging is calculated based on the corrected temperature based on the detection temperature of the second thermistor 37, so that the degree of clogging is calculated with high accuracy.

(Another example of judgment processing 2)
Further, in addition to the process of another example 1 of the determination process, a process of controlling the heating of the second surface 47b of the first Peltier element 47 so that the detection temperature of the first thermistor 49 becomes a predetermined temperature is added. It may be configured to execute the determination process.

Specifically, in step S33, the CPU 61 contacts the laser diode element 46b of the first Peltier element 47 so that the detection temperature of the first thermistor 49 becomes the same target temperature as when the correlation information used in step S39 is created. The first Peltier driver 53 is started to control the cooling of the first surface 47a. As a result, the second surface 47b on the first heat sink 48 side is heated by the first Peltier element 47. Here, the target temperature is, for example, a temperature lower than the target temperature of the laser processing process, for example, 10 ° C. As a result, air having a more accurately controlled temperature stays in the vicinity of the filter 83, and the detection temperature of the side thermistor 87 rises, so that the degree of clogging can be accurately determined. Further, if the target temperature is set to be lower than the target temperature of the laser machining process, the rate of change of the detected temperature of the side thermistor 87 becomes large, so that the degree of clogging can be calculated accurately. The correlation information in this case is information in a state where the first Peltier element 47 is controlled so that the detection temperature of the first thermistor 49 becomes a predetermined target temperature.

Here, the first thermistor 49 is an example of the third temperature sensor. According to the configuration of another example 2 of this determination process, the temperature of the first thermistor 49 and the first thermistor 49 of the first Peltier element 47 are set to be the same target temperature as the correlation information used for calculating the degree of clogging. Since the adjacent second surface 47b is heated, air having a predetermined temperature is applied to the first thermistor 49, and the degree of clogging is calculated with good accuracy.

Needless to say, the present invention is not limited to the above-described embodiment, and various improvements and changes can be made without departing from the spirit of the present invention.
For example, in the above, it has been described that the determination process is executed after the laser processing process is executed, but the present invention is not limited to this. The determination process may be executed according to the instruction of the user, or the determination process may be executed at predetermined time intervals. The configuration in which the determination process is executed at predetermined time intervals is as follows. Specifically, for example, the power supply unit 52 includes a timer for measuring the time, and supplies power to the controller 5 when a preset predetermined time elapses. When the power is supplied, the CPU 61 starts the determination process. The predetermined time is, for example, one month. According to this configuration, the determination process is performed without the user giving an instruction, so that the convenience of the laser processing device 1 is improved.

Further, in the above description, it has been described that the laser diode element 46b and the first Peltier element 47 are driven in steps S4, S20, and S30 of the determination process, but the present invention is not limited to this. Even if the first Peltier element 47 is not driven, the heat of the laser diode element 46b is transferred to the first heat sink 48 via the first Peltier element 47, and the temperature of the first heat sink 48 rises. The degree can be calculated. However, since the thermal conductivity of the first Peltier element 47 is low, the degree of clogging can be calculated more accurately by executing the process of driving the first Peltier element 47. This is because the temperature of the first heat sink 48 rises more when the process of driving the first Peltier element 47 is executed, so that the rate of change of the detected temperature of the side thermistor 87 becomes larger.

Further, in the above description, it has been described that the driving of the laser diode element 46b is stopped in steps S5, S21 and S31 of the determination process, and the driving of the first Peltier element 47 is stopped in steps S7, S23 and S33. Not limited to. The detection temperature of the side thermistor 87 may be acquired while at least one of the laser diode element 46b and the first Peltier element 47 is being driven. In this case, the correlation information may be created in a state where at least one of the laser diode element 46b and the first Peltier element 47 is driven so that the correlation information is in the same state.

Further, in the above, the laser diode element 46b is driven in the determination process in order to ensure that the first heat sink 48 has heat, but the present invention is not limited to this. The degree of clogging may be calculated based on the detection temperature of the side thermistor 87 in a state where neither the laser diode element 46b nor the first Peltier element 47 is driven. This is because the first heat sink 48 tends to be in a state of having heat due to an external influence. In particular, when the power supply unit 52, the circuit board 45, etc. are driven, the heat of the power supply unit 52, the circuit board 45 is transferred, transferred, and radiated, so that the first heat sink 48 has heat. Become.

Further, in the above description, it has been described that the determination process is limited to the method of calculating the degree of clogging using any of the first correlation information 65th to the third correlation information 67 according to the cumulative operating time. Not done. For example, the laser machining apparatus 1 may be configured to perform at least one of the three clogging degree calculation methods using each of the first correlation information 65th to the third correlation information 67.

Further, the order of steps S5, S7, and S9 in the determination process is not limited to the above, and the order may be changed. The same applies to the order of steps S21, S23, S25 and the order of steps S31, S33, S35.

Further, as an example of the determination process, a process of calculating the degree of clogging (for example, step S13) has been illustrated, but the present invention is not limited to this. For example, the NVRAM 64 stores a threshold value for determining the degree of clogging in advance, and determines whether or not the detected temperature or the calculated degree of clogging is equal to or greater than the threshold value for determining the degree of clogging to be stored. It may be configured. In the case of this configuration, the threshold value for determining the degree of clogging may be a value indicating the temperature or a value indicating the degree of clogging. Further, the threshold value for determining the degree of clogging may be a value corresponding to the replacement time of the filter 83.

Further, in the above description, the first correlation information 65 has been described as a function of a straight line connecting the temperature Tmin and the temperature Tmax, but the present invention is not limited to this. For example, it may be a set of a plurality of linear functions, a curved function, a table of detected temperatures with respect to the degree of obstruction, and the like.

Further, in the above, as the correlation information, the correlation in which the degree of clogging is on the X-axis and the detection temperature after a predetermined time is on the Y-axis is illustrated, but the correlation is not limited to this. For example, the correlation may be such that the degree of clogging is on the X-axis and the time until reaching a predetermined temperature is on the Y-axis. Further, for example, the correlation may be such that the degree of clogging is on the X-axis and the rate of change of the detected temperature per unit time is on the Y-axis.

Further, in the above description, it has been explained that the target temperature in step S33 of the determination process is lower than that of the laser processing process, but the temperature is not limited to this.

Further, in the explanation of Another Example 1 of the determination process, it has been described that the detection temperature of the second thermistor 37 is subtracted from the detection temperature of the side thermistor 87 to correct the correction, but the present invention is not limited to this. For example, the data of the rate of change of the detection temperature of the side thermistor 87 with respect to the rate of change of the detection temperature of the second thermistor 37 may be measured in advance and corrected based on the data.

Further, in the above, the LCD 78 of the PC 7 is illustrated as the notification unit, but the present invention is not limited to this. For example, when the laser processing apparatus includes a display, the degree of clogging may be output to the display displayed by the laser processing apparatus. Further, the degree of clogging may be output to a communication terminal provided with a display that can communicate with the laser processing device 1.

Further, in the above, the thermistor has been exemplified as the temperature sensor, but the present invention is not limited to this, and for example, a thermocouple, a resistance temperature detector, or the like may be used.

1 Laser processing equipment 8 Housing 21b Laser oscillator 34 Second Peltier element 37 Second thermistor 46b Laser diode element 46c Laser diode base 47 First Peltier element 48 First heat sink 48a Fin 49 First thermistor 61 CPU
64 NVRAM
81 1st vent 82 2nd vent 83 Filter 87 Side thermistor

Claims (14)

Light source and
A heat sink that comes into contact with the light source and dissipates heat generated from the light source.
The first temperature sensor that detects the temperature and
A housing for accommodating the light source unit, the heat sink, and the first temperature sensor.
A fan that forms an air flow through the heat sink in the housing,
A laser processing apparatus including a dustproof filter arranged on the upstream side of the air flow when the fan rotates in the normal direction.
The first temperature sensor is located between the filter and the fan and is arranged in the flow path of the air flow.
The light source unit includes a laser diode and a first Peltier element whose one surface is close to the laser diode and the other surface is close to the heat sink.
The laser processing device is
A memory in which correlation information indicating the correlation between the degree of clogging of the filter and the change over time of the temperature detected by the first temperature sensor in a state where the fan is rotating at a predetermined rotation speed is stored in advance. Department and
With a control unit
The correlation information is information in a state where the fan is reversed and the drive of the first Peltier element is stopped.
The control unit is in the measurement operation mode.
An acquisition process for acquiring the temperature detected by the first temperature sensor in a state where the fan is rotated at the specified rotation speed, and
A determination process for determining the degree of clogging of the filter by comparing the temperature acquired in the acquisition process with the correlation information.
An output process of outputting a signal indicating the degree of clogging determined in the determination process to the notification unit is executed.
In the acquisition process, the fan is reversed, features and, Relais chromatography The processing apparatus to a state of stopping the driving of the first Peltier element. Light source and
A heat sink that comes into contact with the light source and dissipates heat generated from the light source.
The first temperature sensor that detects the temperature and
A housing for accommodating the light source unit, the heat sink, and the first temperature sensor.
A fan that forms an air flow through the heat sink in the housing,
A laser processing apparatus including a dustproof filter arranged on the upstream side of the air flow when the fan rotates in the normal direction .
The first temperature sensor is located between the filter and the fan and is arranged in the flow path of the air flow.
The light source unit includes a laser diode and a first Peltier element whose one surface is close to the laser diode and the other surface is close to the heat sink.
The laser processing device is
A memory in which correlation information indicating the correlation between the degree of clogging of the filter and the change over time of the temperature detected by the first temperature sensor in a state where the fan is rotating at a predetermined rotation speed is stored in advance. Department and
With a control unit
The correlation information is information in a state where the fan is reversed and the other surface of the first Peltier element is heated.
The control unit is in the measurement operation mode.
An acquisition process for acquiring the temperature detected by the first temperature sensor in a state where the fan is rotated at the specified rotation speed, and
A determination process for determining the degree of clogging of the filter by comparing the temperature acquired in the acquisition process with the correlation information.
An output process of outputting a signal indicating the degree of clogging determined in the determination process to the notification unit is executed.
In the acquisition process, the fan is reversed, said other surface characteristics and, Relais chromatography The processing apparatus to a state of being heated in the first Peltier element. Light source and
A heat sink that comes into contact with the light source and dissipates heat generated from the light source.
The first temperature sensor that detects the temperature and
A housing for accommodating the light source unit, the heat sink, and the first temperature sensor.
A fan that forms an air flow through the heat sink in the housing,
A laser processing apparatus including a dustproof filter arranged on the upstream side of the air flow when the fan rotates in the normal direction.
The first temperature sensor is located between the filter and the fan and is arranged in the flow path of the air flow.
The light source unit includes a laser diode and a first Peltier element whose one surface is close to the laser diode and the other surface is close to the heat sink.
The laser processing device is
A memory in which correlation information indicating the correlation between the degree of clogging of the filter and the change over time of the temperature detected by the first temperature sensor in a state where the fan is rotating at a predetermined rotation speed is stored in advance. Department and
With a control unit
The storage unit contains the first correlation information which is the correlation information when the fan is rotating in the normal direction, and the correlation information which is the correlation information when the fan is reversed and the driving of the first Peltier element is stopped. 2 Correlation information and the third correlation information which is the correlation information in a state where the fan is reversed and the other surface of the first Peltier element is heated are stored in advance.
The control unit is in the measurement operation mode.
An acquisition process for acquiring the temperature detected by the first temperature sensor in a state where the fan is rotated at the specified rotation speed, and
A determination process for determining the degree of clogging of the filter by comparing the temperature acquired in the acquisition process with the correlation information.
An output process of outputting a signal indicating the degree of clogging determined in the determination process to the notification unit is executed.
When the cumulative operating time of the laser processing apparatus is equal to or less than the first predetermined time, the fan is rotated in the normal direction in the acquisition process and compared with the first correlation information in the determination process.
When the cumulative operating time of the laser processing apparatus is longer than the first predetermined time and equal to or less than the second predetermined time, the fan is reversed in the acquisition process to stop the drive of the first Peltier element, and the determination process is performed. Compare with the second correlation information
When the cumulative operating time of the laser processing apparatus is longer than the second predetermined time, the fan is reversed in the acquisition process to heat the other surface of the first Peltier element, and the third correlation information is generated in the determination process. Comparative characteristics and, Relais chromatography the processing device to a. Light source and
A heat sink that comes into contact with the light source and dissipates heat generated from the light source.
The first temperature sensor that detects the temperature and
A housing for accommodating the light source unit, the heat sink, and the first temperature sensor.
A fan that forms an air flow through the heat sink in the housing,
A laser processing apparatus including a dustproof filter arranged on the upstream side of the air flow when the fan rotates in the normal direction.
The first temperature sensor is located between the filter and the fan and is arranged in the flow path of the air flow.
The light source unit includes a laser diode and a first Peltier element whose one surface is close to the laser diode and the other surface is close to the heat sink.
The laser processing device is
After the laser diode is driven at a specified current value, the degree of clogging of the filter and the change over time of the temperature detected by the first temperature sensor in a state where the fan is rotating at a specified rotation speed. A storage unit in which correlation information indicating the correlation of
With a control unit
The correlation information is information in a state where the fan is reversed and the drive of the first Peltier element is stopped.
The control unit is in the measurement operation mode.
After driving the laser diode with the specified current value, the acquisition process of acquiring the temperature detected by the first temperature sensor in a state where the fan is rotated at the specified rotation speed, and
A determination process for determining the degree of clogging of the filter by comparing the temperature acquired in the acquisition process with the correlation information.
An output process of outputting a signal indicating the degree of clogging determined in the determination process to the notification unit is executed.
In the acquisition process, the fan is reversed, features and, Relais chromatography The processing apparatus to a state of stopping the driving of the first Peltier element. Light source and
A heat sink that comes into contact with the light source and dissipates heat generated from the light source.
The first temperature sensor that detects the temperature and
A housing for accommodating the light source unit, the heat sink, and the first temperature sensor.
A fan that forms an air flow through the heat sink in the housing,
A laser processing apparatus including a dustproof filter arranged on the upstream side of the air flow when the fan rotates in the normal direction.
The first temperature sensor is located between the filter and the fan and is arranged in the flow path of the air flow.
The light source unit includes a laser diode and a first Peltier element whose one surface is close to the laser diode and the other surface is close to the heat sink.
The laser processing device is
After the laser diode is driven at a specified current value, the degree of clogging of the filter and the change over time of the temperature detected by the first temperature sensor in a state where the fan is rotating at a specified rotation speed. A storage unit in which correlation information indicating the correlation of
With a control unit
The correlation information is information in a state where the fan is reversed and the other surface of the first Peltier element is heated.
The control unit is in the measurement operation mode.
After driving the laser diode with the specified current value, the acquisition process of acquiring the temperature detected by the first temperature sensor in a state where the fan is rotated at the specified rotation speed, and
A determination process for determining the degree of clogging of the filter by comparing the temperature acquired in the acquisition process with the correlation information.
An output process of outputting a signal indicating the degree of clogging determined in the determination process to the notification unit is executed.
In the acquisition process, the fan is reversed, said other surface characteristics and, Relais chromatography The processing apparatus to a state of being heated in the first Peltier element. Light source and
A heat sink that comes into contact with the light source and dissipates heat generated from the light source.
The first temperature sensor that detects the temperature and
A housing for accommodating the light source unit, the heat sink, and the first temperature sensor.
A fan that forms an air flow through the heat sink in the housing,
A laser processing apparatus including a dustproof filter arranged on the upstream side of the air flow when the fan rotates in the normal direction.
The first temperature sensor is located between the filter and the fan and is arranged in the flow path of the air flow.
The light source unit includes a laser diode and a first Peltier element whose one surface is close to the laser diode and the other surface is close to the heat sink.
The laser processing device is
After the laser diode is driven at a specified current value, the degree of clogging of the filter and the change over time of the temperature detected by the first temperature sensor in a state where the fan is rotating at a specified rotation speed. A storage unit in which correlation information indicating the correlation of
With a control unit
The storage unit contains the first correlation information which is the correlation information when the fan is rotating in the normal direction, and the correlation information which is the correlation information when the fan is reversed and the driving of the first Peltier element is stopped. 2 Correlation information and the third correlation information which is the correlation information in a state where the fan is reversed and the other surface of the first Peltier element is heated are stored in advance.
The control unit is in the measurement operation mode.
After driving the laser diode with the specified current value, the acquisition process of acquiring the temperature detected by the first temperature sensor in a state where the fan is rotated at the specified rotation speed, and
A determination process for determining the degree of clogging of the filter by comparing the temperature acquired in the acquisition process with the correlation information.
An output process of outputting a signal indicating the degree of clogging determined in the determination process to the notification unit is executed.
When the cumulative operating time of the laser processing apparatus is equal to or less than the first predetermined time, the fan is rotated in the normal direction in the acquisition process and compared with the first correlation information in the determination process.
When the cumulative operating time of the laser processing apparatus is longer than the first predetermined time and equal to or less than the second predetermined time, the fan is reversed in the acquisition process to stop the drive of the first Peltier element, and the determination process is performed. Compare with the second correlation information
When the cumulative operating time of the laser processing apparatus is longer than the second predetermined time, the fan is reversed in the acquisition process to heat the other surface of the first Peltier element, and the third correlation information is generated in the determination process. Comparative characteristics and, Relais chromatography the processing device to a. The laser processing apparatus according to any one of claims 1 to 6, wherein the first temperature sensor is arranged apart from the heat sink. The laser processing apparatus according to claim 7, wherein the first temperature sensor is arranged at a position closer to the filter than the heat sink. The laser processing apparatus according to any one of claims 1 to 8 , wherein the first temperature sensor is arranged at a central portion of the air flow. The housing has a first vent located upstream of the flow path and a second vent located downstream of the flow path when the fan rotates in the normal direction.
The heat sink is
The laser processing apparatus according to any one of claims 1 to 9 , further comprising fins extending in a direction extending from the first vent to the second vent. The control unit
The laser processing apparatus according to any one of claims 1 to 10, wherein the measurement operation mode is executed at predetermined time intervals. Stored in the housing,
A solid-state laser using the laser diode as an excitation source,
A second Peltier element in close proximity to the solid-state laser,
A second temperature sensor for detecting the temperature of the solid-state laser is provided.
The control unit
In the determination process, the temperature corrected in the acquisition process is compared with the correlation information based on the temperature detected by the second temperature sensor with the drive of the second Peltier element stopped. The laser processing apparatus according to claim 2 or 5. A third temperature sensor for detecting the temperature of the laser diode is provided.
The control unit
The laser processing according to claim 12 , wherein in the acquisition process, the other surface of the first Peltier element is controlled to be heated so that the temperature detected by the third temperature sensor becomes a predetermined temperature. apparatus. A laser diode, a heat sink, a Peltier element having one surface close to the laser diode and the other surface close to the heat sink, a temperature sensor for detecting temperature, the laser diode, the Peltier element, and the heat sink. And a housing for accommodating the temperature sensor, a fan for forming an air flow path passing through the heat sink in the housing by rotating, and an upstream side of the flow path when the fan rotates in the normal direction. A detection method for detecting clogging of the fan of a laser processing device including an arranged dustproof filter and a storage unit.
In the first step, the temperature sensor arranged between the filter and the fan in the flow path detects the temperature in a state where the fan is rotating at a predetermined rotation speed.
Correlation information stored in the storage unit, which indicates the correlation between the degree of clogging of the filter in a state where the fan is rotating at the specified rotation speed and the change over time of the temperature detected by the temperature sensor, by comparing the temperature detected by the temperature sensor in the first step, a second step of detecting the clogging of the filter,
Look including a third step of outputting with respect to notification unit a signal indicating the degree of the detected clogged in the second step,
The correlation information is information in a state where the fan is reversed and the driving of the Peltier element is stopped.
A detection method according to the first step, wherein the fan is reversed to stop driving the Peltier element.

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