JP2019030901A - Laser processing device and detection method - Google Patents

Abstract

To provide a laser processing device capable of detecting clogging of a filter, and a detection method.SOLUTION: A side surface thermistor 87 is arranged between a filter 83 and a side surface fan 84 and in a flow channel of air flow caused when the side surface fan 84 rotates. The larger a degree of clogging by dust of the filter 83 becomes, the slower a flow rate of air flowing through the flow channel becomes, so that a temperature of the air in the flow channel rises by heat radiated by a first heat sink 48. The side surface thermistor 87 can detect the temperature of the air reflecting the degree of clogging of the side surface fan 84 because the thermister is arranged between the filter 83 and the side surface fan 84.SELECTED DRAWING: Figure 6

Description

  The present invention relates to a laser processing apparatus and a detection method.

  Patent Document 1 discloses a laser marker including a laser diode and a fan that cools the inside of a case that houses a Peltier element that heats or cools the laser diode. The air in the case, which has become hotter than the outside due to heat generated by the laser diode or the like, is exhausted by the rotation of the fan and the inside of the case is cooled.

JP 2001-7433 A

  Incidentally, in order to exhaust the air in the case, the case is generally provided with an exhaust port and an intake port. Further, a dust-proof filter is attached to the intake port in order to prevent dust from entering the case through the intake port with the intake air. When clogging occurs in the dustproof filter, the air flow is delayed and the cooling efficiency in the case is lowered, so that the filter needs to be replaced at an appropriate time. However, since the replacement time of the filter varies depending on the use environment or the like, replacement at a time when the degree of clogging of the filter has increased has been desired.

  This application is proposed in view of said subject, Comprising: It aims at providing the laser processing apparatus and detection method which can detect clogging of a filter.

  The present specification houses a light source unit, a heat sink that contacts the light source unit and dissipates heat emitted from the light source unit, a first temperature sensor that detects temperature, a light source unit, a heat sink, and a first temperature sensor. A housing, a fan for forming an air flow passing through the heat sink in the housing, and a dust-proof filter disposed on the upstream side of the air flow when the fan rotates forward, and the first temperature sensor includes: Disclosed is a laser processing apparatus, which is disposed between a filter and a fan and disposed in a flow path of an air flow.

  The present specification also includes a laser diode, a heat sink, a Peltier element in which one surface is close to the laser diode, and the other surface is close to the heat sink, a temperature sensor for detecting temperature, a laser diode, a Peltier element, A heat sink and a housing that houses a temperature sensor, a fan that rotates to form a flow path of air passing through the heat sink in the housing, and an upstream side of the flow path when the fan rotates forward A detection method for detecting clogging of a fan of a laser processing apparatus including a dust-proof filter and a storage unit, wherein a temperature sensor disposed between the filter and the fan in the flow path is defined by the fan The step of detecting the temperature in a state where the fan is rotating at a rotational speed of, and the state where the fan is rotating at a specified rotational speed, which is stored in the storage unit The filter detects clogging by comparing the correlation information indicating the correlation between the degree of filter clogging and the temperature change detected by the temperature sensor with the temperature detected by the temperature sensor in the detecting step. A detection method comprising the steps of:

  According to the present application, it is possible to provide a laser processing apparatus and a detection method capable of detecting clogging of a filter.

It is a perspective view which shows the right front of the laser processing apparatus except the housing body which concerns on this embodiment. It is a top view which shows the base of a laser processing apparatus. It is a perspective view which shows the left rear of the laser processing apparatus except a housing body. It is a bottom view which shows the base of a laser processing apparatus. It is a perspective view which shows the left front of the laser processing apparatus except a front panel and a housing | casing main body. It is a perspective view which shows the left front of the laser part for excitation. It is a block diagram which shows the electrical structure of a laser processing apparatus and PC. It is a flowchart which shows the processing content of a determination process. It is a schematic diagram explaining the air flow in the laser part for excitation when a side fan rotates forward. It is a figure explaining the correlation with the detected temperature with respect to the degree of clogging of a filter when a side fan rotates forward. It is a schematic diagram explaining the air flow in the laser part for excitation when a side fan reverses. It is a figure explaining the correlation with the change of the detected temperature with respect to the elapsed time in the filter from which the degree of clogging differs when a side fan reverses. It is a figure explaining the correlation with the detected temperature in the time t1 of FIG. 12 with respect to the degree of clogging of a filter when a side fan reversely rotates. It is a schematic diagram explaining the cross-sectional structure containing a laser beam emission part and a 2nd heat sink.

(Schematic configuration of laser processing equipment)
A schematic configuration of the laser processing apparatus 1 according to the present embodiment will be described with reference to FIG. The laser processing apparatus 1 performs laser processing for marking a character, a symbol, a figure, or the like by irradiating a processing target with a laser beam two-dimensionally based on print data transmitted from the PC 7 (FIG. 7). Do. In the following description, laser processing may be described as printing. In the following description, the direction shown in FIG.

  The laser processing apparatus 1 includes a housing 8, a base 11, a processing laser unit 6, an excitation laser unit 40, power supply units 52 and 52, and a plurality of circuit boards 45. The housing 8 has a substantially rectangular parallelepiped shape, and includes a front panel 8a, a back panel 8b, a bottom panel 8c, and a housing body 8d (see FIG. 9) that covers the left and right surfaces and the top surface. FIG. 1 shows a state in which the housing body 8d is removed. The housing 8 accommodates therein a base 11, frame plates 91 and 91, a processing laser unit 6, an excitation laser unit 40, a plurality of circuit boards 45, and the like. The base 11 is attached to the bottom panel 8c. The processing laser unit 6 is disposed on the base 11. The excitation laser unit 40 is attached above the base 11 and on the front side of the laser processing apparatus 1. The frame plates 91 and 91 are adjacent to each other, and are arranged so that the plate surfaces are substantially parallel to the left and right surfaces of the housing body from the substantially center portion to the rear end of the laser processing apparatus 1 in the front-rear direction. The power supply units 52 and 52 are mounted on the left side of the frame plates 91 and 91 above the base 11. The power supply units 52 and 52 are connected to a commercial power supply via a power cord (not shown). The power supply units 52 and 52 convert supplied AC power into DC power and supply the power to each unit of the laser processing apparatus 1. The plurality of circuit boards 45 are attached to the right side of the frame plates 91 and 91 above the base 11.

  The excitation laser unit 40 includes a laser diode unit 46, a first Peltier element 47 (FIG. 6), a first heat sink 48 (FIG. 6), and the like. For the air flow passing through the first heat sink 48, a first vent 81 and a second vent 82 are disposed at the left and right ends of the first heat sink 48 on the left and right sides of the housing 8, respectively. A filter 83, which is a dustproof filter, is attached to the inside of the first vent 81, and a side fan 84 that can be rotated forward and reverse is attached to the inside of the second vent 82. In addition, when the side fan 84 rotates forward, an air flow from the first vent 81 toward the second vent 82 is generated. That is, the filter 83 is disposed in the flow path of the air flow generated when the side fan 84 is rotated forward and upstream of the air flow. The details of the excitation laser unit 40 will be described later.

  Next, the processing laser unit 6 will be described in detail with reference to FIG. The processing laser unit 6 includes a laser beam emitting unit 12 that emits a laser beam, an optical shutter unit 13, an optical damper (not shown), a first guide beam unit 15, a second guide beam unit 16, a dichroic mirror 17, and a galvano scanner. 18, and fθ lens 19.

  The laser beam emitting unit 12 includes a laser oscillator unit 21, a beam expander 22, a second Peltier element 34, and the like. Excitation laser light, which is excitation light emitted from the excitation laser section 40, is incident on the laser light emitting section 12 via the optical fiber F. The laser oscillator unit 21 includes a cover 21a, a laser oscillator 21b (FIG. 14), a laser oscillator base 21c (FIG. 14), and a second thermistor 37. The laser oscillator 21b includes, for example, a YAG laser (not shown) and a passive Q switch. The laser oscillator 21b emits pulsed laser light for performing laser processing in accordance with the excitation laser light incident through the optical fiber F. The beam expander 22 is provided coaxially with the laser oscillator 21b, and adjusts the beam diameter of the laser light. The direction in which the laser oscillator 21b emits laser light is the front direction, and the direction perpendicular to the up and down direction and the front and rear direction is the left and right direction.

  The optical shutter unit 13 includes a shutter motor 26 and a flat shutter 27. The shutter 27 is attached to the motor shaft of the shutter motor 26 and rotates coaxially. When the shutter 27 is rotated to a position where the optical path of the laser light emitted from the beam expander 22 is blocked, the shutter 27 reflects the laser light to an optical damper (not shown). The optical damper absorbs the laser light reflected by the shutter 27. On the other hand, when the shutter 27 is rotated to a position that does not block the optical path of the laser light emitted from the beam expander 22, the laser light emitted from the beam expander 22 is disposed on the front side of the optical shutter unit 13. The light enters the dichroic mirror 17. The laser light emitted from the beam expander 22 passes through the dichroic mirror 17 and enters the galvano scanner 18.

  The first guide light unit 15 is disposed on the right side of the dichroic mirror 17. The first guide light unit 15 includes a guide light laser (not shown) and a lens group (not shown). The guide light laser is, for example, a red semiconductor laser that emits visible laser light. The lens group converges visible laser light into parallel light. The reflecting surface of the dichroic mirror 17 is disposed at 45 degrees with respect to the optical path of the guide light that is the visible laser beam emitted from the first guide light unit 15, and guide light incident on the reflecting surface is arranged. Most of the light is reflected toward the galvano scanner 18. Here, the optical path of the laser light transmitted through the dichroic mirror 17 and the optical path of the guide light reflected by the dichroic mirror 17 coincide. The guide light is used for positioning the workpiece in the front-rear direction and the left-right direction during laser processing. The second guide light unit 16 is disposed on the right side of the galvano scanner 18. The second guide light unit 16 includes a semiconductor laser (not shown) that emits visible laser light used for vertical alignment of the workpiece during laser processing.

  The galvano scanner 18 is attached to the upper side of a through hole (not shown) formed in the front end portion of the base 11. The galvano scanner 18 includes a galvano X-axis motor 31 (FIG. 7), a galvano Y-axis motor 32 (FIG. 7), a main body 33, and the like. Each of the galvano X-axis motor 31 and the galvano Y-axis motor 32 has a scanning mirror (not shown) attached to the motor shaft and the tip of the motor shaft. The galvano X-axis motor 31 and the galvano Y-axis motor 32 are attached to the main body 33 such that the motor axes are orthogonal to each other and the scanning mirrors face each other. As the galvano X-axis motor 31 and the galvano Y-axis motor 32 rotate, each scanning mirror rotates. Thereby, the laser light and the guide light are two-dimensionally scanned.

  The fθ lens 19 condenses the laser light and the guide light that are two-dimensionally scanned by the galvano scanner 18 on the object to be processed disposed below.

  As shown in FIG. 3, the power supply units 52, 52 are attached to the left side surface of the left frame plate 91. The back fan 85 is attached to the outside of the back panel 8b. In the space surrounded by the base 11 and the bottom panel 8c, as shown in FIG. 4, a second heat sink 35 that dissipates mainly heat generated by the laser beam emitting section 12 is attached to the base 11.

  Next, the excitation laser unit 40 will be described in detail with reference to FIGS. As shown in FIG. 5, the excitation laser unit 40 is located above the galvano scanner 18 and the like. As shown in FIG. 6, the excitation laser unit 40 includes a first frame 92, a second frame 93, and the like in addition to the above configuration. The laser diode section 46 includes a cover 46a, a laser diode element 46b (FIG. 9), a laser diode base 46c (FIG. 9), a first thermistor 49, and the like. The first frame 92 is a U-shaped plate member whose cross section opens downward, and its lower end is attached to the base 11 (FIG. 1). The second frame 93 is a U-shaped plate member whose cross section opens downward, and a lower end portion is attached to the upper surface of the first frame 92. The first heat sink 48 is accommodated in a space surrounded by the first frame 92 and the second frame 93. A laser diode portion 46 is disposed on the upper surface of the second frame 93. The first heat sink 48 has a plurality of plate-like fins 48 a, and the fins 48 a extend in the left-right direction, which is a direction from the first vent 81 to the second vent 82. The side thermistor 87 is disposed at the upper end of the resin spacer 88 attached to the upper surface of the first frame 92. The side surface thermistor 87 is disposed at the left end portion of the first heat sink 48 and at a substantially central portion in the front-rear direction of the first heat sink 48 so as to be separated from the first heat sink 48. In other words, the side thermistor 87 is disposed at the center of the air flow generated when the side fan 84 rotates. The side thermistor 87 is disposed at a position closer to the filter 83 than the first heat sink 48. The laser diode unit 46 is optically connected to the laser oscillator 21b through the optical fiber F. The laser diode element 46 b emits excitation laser light having power corresponding to the current value of the drive current supplied from the excitation laser driver 51 into the optical fiber F.

(Electric configuration of laser processing equipment)
Next, the electrical configuration of the laser processing apparatus 1 will be described with reference to FIG.
The laser processing apparatus 1 is connected to the PC 7 so as to be capable of bidirectional communication, and performs laser processing based on print data created by the PC 7.

  The PC 7 includes a CPU 71, a RAM 72, a ROM 73, a control circuit 74, an HDD (Hard Disk Drive) 75, a keyboard 76, a mouse 77, an LCD 78, and the like. Application software for laser processing is installed in the PC 7 in advance. The ROM 73 stores firmware and the like. The RAM 72 is used as a main storage device for the CPU 71 to execute various processes. The HDD 75 stores a processing program, character parameter information, and the like. The CPU 71, RAM 72, ROM 73, and HDD 75 are connected to each other via a bus line (not shown). The control circuit 74 is electrically connected to the keyboard 76, the mouse 77, the LCD 78, and the like. The control circuit 74 converts an operation received by the keyboard 76 and the mouse 77 into a signal and outputs the signal to the CPU 71. Further, a display screen corresponding to a command from the CPU 71 is displayed on the LCD 78.

  The PC 7 receives a processing command from the user, creates print data, and outputs it to the controller 5. The print data is data in which XY coordinate data indicating the shape of a processing pattern drawn by laser light in laser processing and processing condition data indicating laser processing conditions are associated with the XY coordinate data.

  The laser processing apparatus 1 includes a controller 5, an excitation laser driver 51, a first Peltier driver 53, a second Peltier driver 54, a galvano driver 36, a side fan driver 55, a rear fan driver 56, and the like. The controller 5 includes a CPU 61, a RAM 62, a ROM 63, an NVRAM 64, and the like. The controller 5 is electrically connected to the side thermistor 87, the first thermistor 49, and the second thermistor 37. Specifically, a resistance is connected in series to each of the side thermistor 87, the first thermistor 49, and the second thermistor 37, and the resistance connected in series to each of the first thermistor 49 and the second thermistor 37 is A predetermined voltage is applied, and a signal obtained by converting the voltage applied to each of the side thermistor 87, the first thermistor 49, and the second thermistor 37 into a digital value is input to the controller 5. In the following description, a signal obtained by converting a voltage applied to each thermistor into a digital value is referred to as a signal indicating a detected temperature of each thermistor. In addition, a value obtained by converting a signal indicating the detected temperature of each thermistor into a temperature may be described as a detected temperature. The controller 5 and the various drivers described above are realized by a plurality of circuit boards 45 on which various electronic components (not shown) such as a processor (not shown) functioning as the CPU 61 are mounted. The controller 5 is connected to be able to communicate with various drivers.

  The CPU 61 controls various drivers and the like by executing various programs stored in the ROM 63. The RAM 62 is used as a main storage device for the CPU 61 to execute various processes. The CPU 61, the RAM 62, the ROM 63, and the NVRAM 64 are connected to each other by a bus line (not shown). The CPU 61 controls various drivers based on the print data output from the PC 7. For example, the CPU 61 instructs the excitation laser driver 51 to drive the laser diode element 46b with the drive current value calculated based on the print data. In addition, the CPU 61 instructs the galvano driver 36 to drive the galvano X-axis motor 31 and the galvano Y-axis motor 32 so that the drive angle and rotation speed calculated based on the print data are obtained. Further, the CPU 61 instructs the first Peltier driver 53 to control the first Peltier element 47 so that the detected temperature becomes the target temperature based on the signal indicating the detected temperature of the first thermistor 49. The laser diode element 46b is controlled in temperature because the power of the emitted excitation laser light varies depending on the temperature. Similarly, the CPU 61 instructs the second Peltier driver 54 to control the second Peltier element 34 so that the detected temperature becomes the target temperature based on the signal indicating the detected temperature of the second thermistor 37. Further, the CPU 61 rotates the side fan 84 and the rear fan 85 to the side fan driver 55 and the rear fan driver 56 based on signals indicating the detected temperatures of the side thermistor 87, the first thermistor 49, and the second thermistor 37. And order to stop. The NVRAM 64 is a non-volatile memory realized by, for example, a flash memory. For example, the CPU 61 accumulates the operation time from when the laser processing apparatus 1 is turned on until it is turned off, and stores the accumulated operation time in the NVRAM 64. Further, the NVRAM 64 stores in advance first correlation information 65, second correlation information 66, and third correlation information 67 used in a determination process described later.

(Determination process)
Next, determination processing executed by the CPU 61 will be described with reference to FIG. When the print data is transmitted from the PC 7, the CPU 61 performs laser processing based on the print data. Specifically, in the laser processing, the CPU 61 emits laser light from the laser light emitting unit 12 and drives the galvano scanner 18. In the laser processing, the side fan 84 is rotated forward. When completing the laser processing, the CPU 61 stops driving the laser diode element 46b and the first Peltier element 47, shifts to the measurement operation mode, and starts the determination process shown in FIG.

  When the CPU 61 starts the determination process, the CPU 61 reads and acquires the accumulated operation time from the NVRAM 64 (S1), and determines whether or not the accumulated operation time is equal to or less than a first threshold value stored in the NVRAM 64 in advance (S3). If it is determined that the accumulated operation time is equal to or less than the first threshold value (S3: YES), the CPU 61 starts driving the laser diode element 46b with the same current value as when the first correlation information 65 is created, and is similar to the laser processing. The driving of the first Peltier element 47 is started (S4). After a predetermined time has elapsed, the CPU 61 stops driving the laser diode element 46b (S5). Specifically, the CPU 61 causes the excitation laser driver 51 to stop supplying the drive current to the laser diode element 46b. Next, the driving of the first Peltier element 47 is stopped (S7). Specifically, the CPU 61 causes the first Peltier driver 53 to stop supplying drive current to the first Peltier element 47. Next, the side fan driver 55 is instructed to cause the side fan 84 to rotate forward at the same rotational speed as when the first correlation information 65 was created (S9). Next, after executing step S9, after a predetermined time has elapsed, a signal indicating the detected temperature of the side thermistor 87 is acquired (S11). Specifically, the CPU 61 stores a value of a signal indicating the detected temperature of the side surface thermistor 87 in the RAM 62. Next, the clogging degree is calculated by comparing the value stored in the RAM 62 with the first correlation information 65 stored in the NVRAM 64 (S13).

  Step S13 will be described with reference to FIGS. FIG. 9 is a schematic view of the excitation laser unit 40 viewed from the front. The excitation laser unit 40 has a structure in which the first heat sink 48, the first Peltier element 47, the laser diode base 46c, and the laser diode element 46b are stacked in contact with each other in this order from the bottom. Note that grease may be applied between the laser diode base 46c and the laser diode element 46b. A first thermistor 49 is disposed in the vicinity of the laser diode element 46b, and the first Peltier element 47, the laser diode base 46c, the laser diode element 46b, and the first thermistor 49 are covered with a cover 46a. The laser diode element 46b driven at the same current value as that at the time of creating the first correlation information 65 generates heat, the first Peltier element 47 cools the first surface 47a adjacent to the laser diode element 46b, and the first heat sink 48 The adjacent second surface 47b side is heated. Heat is conducted from the first Peltier element 47 to the first heat sink 48. In steps S5 and S7 of the determination process, the driving of the laser diode element 46b and the first Peltier element 47 is stopped.

  Now, in step S9, since the side fan 84 is rotated forward, an air flow is generated in the direction of the arrow shown in FIG. Here, the greater the degree of clogging of the filter 83, the smaller the flow rate of the air taken in from the first vent 81, so that the heat exchange efficiency is poor, and the temperature near the side thermistor 87 is about the temperature outside the housing 8. It takes a long time to cool down. That is, the correlation between the degree of clogging of the filter 83 and the temperature detected by the first thermistor 49 is a positive correlation as shown in FIG. The first correlation information 65 is, for example, a mathematical expression indicating this correlation. The first correlation information 65 is, for example, predetermined after the forward rotation of the side fan 84 is started at a specified rotational speed after the laser diode element 46b is driven at a specified current value before the laser processing apparatus 1 is shipped. This is information created based on a signal indicating the detected temperature of the first thermistor 49 after the elapse of time, for example, information stored in the NVRAM 64 when the laser processing apparatus 1 is shipped. The degree of clogging is a value expressed as a percentage, and is defined by the blocking rate of the filter 83. The degree of clogging when the filter 83 is not attached to the inside of the first vent 81 is 0%, and the degree of clogging when the filter 83 is completely closed is 100%. The first correlation information 65 is created on the basis of the detected temperature of the side thermistor 87 in a state in which the filter 83 serving as some samples with a blockage rate of 0 to 100% is attached to the inside of the first vent 81. The If the temperature when the blockage rate is 0% is the temperature Tmin, and the temperature when the blockage rate is 100% is the temperature Tmax, for example, the first correlation information 65 is a function of a straight line connecting the temperature Tmin and the temperature Tmax. is there.

  In steps S4 to S9, the drive state of the laser diode element 46b, the first Peltier element 47, and the side fan 84 is set to the same drive state as that when the first correlation information 65 is created. The state of the laser processing apparatus 1 at the time of creation is reproduced. For this reason, the blockage rate of the filter 83 can be calculated by comparing the detected temperature of the side thermistor 87 with the first correlation information 65. Specifically, the calculated value calculated by substituting the detected temperature of the side thermistor 87 into the function of the first correlation information 65 is the degree of clogging in step S13.

  Returning to FIG. 8, next, the CPU 61 outputs a signal indicating the calculated degree of clogging to the PC 7 (S15), and ends the determination process. When the signal indicating the degree of clogging is input, the PC 7 displays, for example, the degree of clogging on the LCD 78. The user can determine whether it is time to replace the filter by viewing the displayed degree of clogging.

  On the other hand, if it is determined that the accumulated operation time is not less than or equal to the first threshold (S3: NO), the CPU 61 then determines whether or not the accumulated operation time is less than or equal to the second threshold stored in advance in the NVRAM 64 (S17). . Note that the second threshold value is larger than the first threshold value. If it is determined that the accumulated operating time is equal to or less than the second threshold value (S17: YES), the CPU 61 starts driving the laser diode element 46b with the same current value as when the second correlation information 66 is created, and similarly to the laser processing. Driving of the first Peltier element 47 is started (S20). After the predetermined time has elapsed, the CPU 61 stops driving the laser diode element 46b (S21), similarly to step S5. Next, as in step S7, the CPU 61 stops driving the first Peltier element 47 (S23). Next, the CPU 61 instructs the side fan driver 55 to reverse the side fan 84 at the same rotational speed as when the second correlation information 66 was created (S25). Next, after executing step S25, after a predetermined time has elapsed, the CPU 61 acquires a signal indicating the temperature from the side thermistor 87 as in step S11 (S27). Next, the value stored in the RAM 62 is compared with the second correlation information 66 stored in the NVRAM 64, and the CPU 61 calculates the degree of clogging as in step S13 (S29).

  Step S29 will be described with reference to FIG. FIG. 11 is a schematic view of the vicinity of the excitation laser unit 40 viewed from the front side, as in FIG. In step S25, since the side fan 84 is reversed, an air flow is generated in the direction of the arrow shown in FIG. When the degree of clogging of the filter 83 increases, the ratio of the flow rate of air exhausted from the first vent port 81 to the flow rate of air taken in from the second vent port 82 decreases, and stagnation occurs inside the filter 83. . The laser diode element 46b driven at the same current value as when the second correlation information 66 is generated generates heat, and the temperature in the vicinity of the laser diode element 46b has not dropped to the temperature outside the casing 8, and the casing 8 The temperature is higher than the outside temperature. In addition, the first heat sink 48 is also in a heated state by driving the first Peltier element 47, and air having a temperature higher than the temperature outside the housing 8 is generated by the air flow passing through the first heat sink 48. It stays in the vicinity of the side thermistor 87, and the temperature in the vicinity of the side thermistor 87 rises with time.

  FIG. 12 is a diagram schematically showing a change in the detected temperature of the side thermistor 87 according to the elapsed time. The second correlation information 66 is the same information as the first correlation information 65. Here, the second correlation information 66 indicates the detected temperature of the side thermistor 87 in a state in which the filter 83 that is a sample having a blockage rate of a%, b%, and c% is attached to the inside of the first vent 81. It shall be created based on this. Changes in the detected temperature of the side thermistor 87 when the filter 83 having the blockage rate of a%, b%, and c% is attached to the laser processing apparatus 1 are, for example, characteristics A, B, and B shown in FIG. Suppose that it becomes like C. Assuming that the temperatures of the characteristics A, B, and C at the elapse of time t1 from the start of the reverse rotation of the side fan 84 are the temperatures Ta, Tb, and Tc, respectively, the temperature characteristics with respect to the clogging degree are shown in FIG. As shown. For example, the linear function shown in FIG. 13 is the second correlation information 66. In steps S21 to S25, the driving state of the laser diode element 46b, the first Peltier element 47, and the side fan 84 is set to the same driving state as that when the second correlation information 66 is created. The state of the laser processing apparatus 1 at the time of creation is reproduced. Therefore, the degree of clogging of the filter 83 can be calculated by comparing the detected temperature of the side thermistor 87 with the second correlation information 66.

  Returning to FIG. 8, the CPU 61 then proceeds to step S15 after executing step S29. On the other hand, if it is determined that the accumulated operation time is not less than or equal to the second threshold value (S17: NO), the CPU 61 starts driving the laser diode element 46b with the same current value as when the third correlation information 67 is created, and is similar to the laser processing. The driving of the first Peltier element 47 is started (S30). After the predetermined time has elapsed, the CPU 61 stops driving the laser diode element 46b (S31), as in step S5. Next, the CPU 61 controls the first Peltier driver 53 to heat the second surface 47 b in contact with the first thermistor 49 of the first Peltier element 47 with the drive current having the same current value as when the third correlation information 67 is created. (S33). Next, the CPU 61 instructs the side fan driver 55 to reverse the side fan 84 at the same rotational speed as when the third correlation information 67 was created (S35). Next, after executing a step S35, after a predetermined time has elapsed, the CPU 61 obtains a signal indicating the temperature from the side thermistor 87 as in the step S11 (S37). Next, the value stored in the RAM 62 is compared with the third correlation information 67 stored in the NVRAM 64, and the CPU 61 calculates the degree of clogging as in step S13 (S39). Note that the third correlation information 67 is the same information as the second correlation information 66, and a description thereof will be omitted.

  The state of the first Peltier element 47 is different from the state of the laser processing apparatus 1 when determined as YES in step S17 and the state of the laser processing apparatus 1 when determined as NO at step S17. In both cases, since the side fan 84 is reversed, an air flow as shown in FIG. 11 is generated. However, if NO is determined in step S17, the first Peltier element 47 is the second surface on the first heat sink 48 side. In order to heat 47b, the air of the controlled temperature stays in the vicinity of the side thermistor 87. Therefore, the degree of clogging calculated using the third correlation information 67 when NO is determined in step S17 uses the second correlation information 66 when YES is determined in step S17. The accuracy is better than the calculated clogging degree.

  Further, the degree of clogging calculated using the first correlation information 65 when YES is determined in step S3 is calculated using the second correlation information 66 when YES is determined in step S17. The accuracy is worse than the degree of clogging. If YES is determined in step S <b> 3, the side fan 84 rotates forward, so that air outside the housing 8 hits the side thermistor 87. For this reason, the detected temperature of the side thermistor 87 is easily affected by the temperature of the air outside the housing 8. On the other hand, if YES is determined in step S <b> 17, the side fan 84 rotates in the reverse direction, so that the air in the first heat sink 48 strikes the side thermistor 87. Therefore, the air heated by the first heat sink 48 to which the heat generated by driving the laser diode element 46b and the first Peltier element 47 before the execution of step S21 strikes the side thermistor 87. For this reason, the detected temperature of the side thermistor 87 is not easily affected by the temperature of the air outside the housing 8.

  If YES is determined in step S3, side fan 84 is rotated forward in the same manner as laser processing. On the other hand, when it is determined NO in step S3, the side fan 84 is reversed unlike the laser processing. If YES is determined in step S17, the driving of the first Peltier element 47 is stopped in step S23, whereas if NO is determined in step S17, the first Peltier element 47 is changed in step S33. The drive of the 1 Peltier element 47 is started. As described above, the control becomes complicated in the order of YES in step S3, YES in step S17, NO in step S17.

  Here, the first threshold value and the second threshold value are values such as 2000 hours and 8000 hours, respectively. When the cumulative operation time is short, the degree of clogging of the filter 83 is small, and it is assumed that even if the accuracy of the degree of clogging is bad, the judgment as to whether or not it is time to replace the filter 83 is not so much affected. . On the other hand, as the cumulative operation time becomes longer, the degree of clogging of the filter 83 increases. For this reason, if the clogging degree is accurately calculated, the user can replace the filter 83 at a more appropriate time. In the determination process, when the accumulated operation time is short, complicated control is not required, the clogging degree is calculated in a state where the load applied to the laser processing apparatus 1 is small, and when the accumulated operation time is long, the clogging degree is calculated. Since it is calculated with high accuracy, the degree of clogging is calculated efficiently.

  Here, the laser processing apparatus 1 is an example of a laser processing apparatus, the laser diode element 46b, the laser diode base 46c, and the first Peltier element 47 are examples of a light source unit, and the first heat sink 48 is an example of a heat sink, The fin 48a is an example of a fin, the side thermistor 87 is an example of a first temperature sensor and a temperature sensor, the housing 8 is an example of a housing, and the filter 83 is an example of a filter. The first vent 81 is an example of a first vent, and the second vent 82 is an example of a second vent. The laser diode element 46b and the laser diode base 46c are examples of a laser diode, and the first Peltier element 47 is an example of a first Peltier element. The NVRAM 64 is an example of a storage unit, the CPU 61 is an example of a control unit, steps S11, S27, and S37 are examples of acquisition processing, and steps SS13, S29, and S39 are examples of determination processing, and step S15 Is an example of output processing. The first correlation information 65 is an example of correlation information and first correlation information, the second correlation information 66 is an example of correlation information and second correlation information, and the third correlation information 67 is correlation information and third correlation information. It is an example of information. The first threshold is an example of a first predetermined time, and the second threshold is an example of a second predetermined time.

As mentioned above, according to embodiment described, there exist the following effects.
The side thermistor 87 is located between the filter 83 and the side fan 84 and is disposed in the flow path of the air flow generated when the side fan 84 rotates. As the degree of clogging with dust in the filter 83 increases, the flow velocity of the air flowing through the flow path decreases. Therefore, the temperature of the air in the flow path increases due to the heat radiated from the first heat sink 48. Since the side thermistor 87 is disposed between the filter 83 and the side fan 84, the temperature of the air reflecting the degree of clogging of the side fan 84 can be detected.

  Further, the side thermistor 87 is disposed separately from the first heat sink 48. As a result, the side thermistor 87 is less affected by the temperature due to radiation, heat conduction, etc. from the first heat sink 48, so that it is possible to detect the temperature more reflecting the degree of clogging of the filter 83.

  The side thermistor 87 is disposed at a position closer to the filter 83 than the first heat sink 48. As a result, the side thermistor 87 is less susceptible to the temperature due to radiation from the first heat sink 48 and the like, so that the temperature more reflecting the degree of clogging of the filter 83 can be detected.

  The side thermistor 87 is disposed at the center of the air flow generated when the side fan 84 rotates. Thereby, the side surface thermistor 87 can detect temperature more accurately than arrange | positioning at the edge part of the width direction.

  Further, the fins 48 a of the first heat sink 48 extend in a direction from the first vent 81 toward the second vent 82. When the filter 83 is not clogged, air flows without a delay between the plurality of fins 48a, so that the change in the flow rate due to the degree of clogging of the filter 83 is likely to increase. For this reason, since the rate of change of the detected temperature of the side thermistor 87 with respect to the degree of clogging of the filter 83 increases, the degree of clogging can be accurately calculated.

  In the determination process, if the CPU 61 determines YES in step S3, the CPU 61 drives the laser diode element 46b at the same prescribed current value as in the creation of the first correlation information 65 in step S4. The degree of clogging is calculated by comparing the detected temperature of the first thermistor 49 with the first correlation information 65 in a state where the side fan 84 is rotated at the same specified rotational speed as when the correlation information 65 is created. If YES is determined in step S17, the laser diode element 46b is driven at the same prescribed current value as that in the creation of the second correlation information 66 in step S20, and then the second correlation information 66 is created. The degree of clogging is calculated by comparing the detected temperature of the first thermistor 49 with the second correlation information 66 in a state where the side fan 84 is rotated at the same specified rotational speed. If NO is determined in step S17, the laser diode element 46b is driven at the same specified current value as in the creation of the third correlation information 67 in step S30, and then the third correlation information 67 is created. The degree of clogging is calculated by comparing the detected temperature of the first thermistor 49 with the third correlation information 67 in a state where the side fan 84 is rotated at the same specified rotational speed. Thus, in each case, the detected temperature of the side thermistor 87 in the same state as when each of the first correlation information 65 to the third correlation information 67 is created, and the corresponding first correlation information 65 to third correlation information 67. The degree of clogging can be calculated by comparing each of the above.

  Further, when it is determined YES in step S <b> 3 in the determination process, the CPU 61 uses the first correlation information 65 created in a state where the side fan 84 is normally rotated, and the side surface in a state where the side fan 84 is normally rotated. Compared with the temperature detected by the thermistor 87, the degree of clogging is calculated. The degree of clogging can be calculated with the rotation direction of the side fan 84 being the same rotation direction as the laser processing.

  Further, when the CPU 61 determines YES in step S <b> 17 in the determination process, the second correlation information 66 created in a state in which the side fan 84 is reversed and the driving of the first Peltier element 47 is stopped is displayed on the side surface. The degree of clogging is calculated by comparing with the detected temperature of the side thermistor 87 in a state where the fan 84 is reversed and the driving of the first Peltier element 47 is stopped. The greater the degree of clogging of the filter 83, the smaller the flow rate of air discharged through the filter 83 with respect to the flow rate of air taken into the housing 8 by the side fan 84. Since the air warmed by the heat dissipated stays in the vicinity of the filter 83 and the temperature detected by the first thermistor 49 rises, the degree of clogging can be accurately determined.

  In addition, when the CPU 61 determines NO in step S17 in the determination process, the CPU 61 is created in a state in which the side fan 84 is reversed and the second surface 47b of the first Peltier element 47 is controlled to be heated. The third correlation information 67 is compared with the detected temperature of the side thermistor 87 in the state where the side fan 84 is reversed and the second surface 47b of the first Peltier element 47 is controlled to be clogged. Calculate the degree. As the second surface 47b of the first Peltier element 47 is heated, the air reliably heated by the heat dissipated by the first heat sink 48 stays in the vicinity of the filter 83 and the detected temperature of the first heat sink 48 rises. Can be determined with high accuracy.

  In addition, in the determination process, when the cumulative operation time is equal to or less than the first threshold, the CPU 61 determines the same as the detection temperature of the side thermistor 87 in the state where the side fan 84 is rotated forward, as in the creation of the first correlation information 65. The degree of clogging is calculated by comparing with the first correlation information 65, and when the accumulated operating time is greater than the first threshold value and less than or equal to the second threshold value, the side fan 84 is reversed as when the second correlation information 66 is created. In a state where the driving of the first Peltier element 47 is stopped, the detected temperature of the side thermistor 87 is compared with the second correlation information 66 to calculate the degree of clogging, and the accumulated operation time is equal to or less than the first threshold value. In the case where the control is performed to reverse the side fan 84 and heat the second surface 47b of the first Peltier element 47 as in the creation of the second correlation information 66, the detected temperature of the side thermistor 87 and the second temperature By comparing the correlation information 67 to calculate the degree of clogging. Since the degree of clogging of the filter 83 increases as the cumulative operation time increases, the laser machining apparatus 1 in the determination process is switched by switching to a method that can determine the degree of clogging more accurately as the cumulative operation time increases. The user can replace the filter 83 at a more appropriate time, while reducing the load on the filter. The laser processing apparatus 1 can efficiently calculate the degree of clogging.

(Another example 1 of determination processing)
Next, another example 1 of the processing content when it is determined NO in step S17 in the determination processing will be described. In the above description, the detection temperature of the side thermistor 87 is compared with the third correlation information 67 to calculate the degree of clogging. However, the detection temperature of the side thermistor 87 is corrected based on the detection temperature of the second thermistor 37. Then, the content of processing for calculating the degree of clogging by comparing the corrected temperature and the correlation information may be used.

  Specifically, the CPU 61 acquires a signal indicating the detected temperature of the second thermistor 37 in a state where the driving of the second Peltier element 34 is stopped in step S37. Next, the detected temperature of the side thermistor 87 is corrected based on the detected temperature of the second thermistor 37. The corrected temperature is calculated by subtracting the detected temperature of the second thermistor 37 from the detected temperature of the side thermistor 87, for example. Next, in step S39, the corrected temperature and the correlation information are compared to calculate the degree of clogging. The correlation information in this case is information indicating the correlation between the clogging degree and the corrected temperature.

  The vertical structure of the second heat sink 35 and the laser beam emitting unit 12 will be described with reference to FIG. The laser beam emitting section 12 has a structure in which the second heat sink 35, the base 11, the second Peltier element 34, the laser oscillator base 21c, and the laser oscillator 21b are stacked in contact with each other in this order from the bottom. A second thermistor 37 is disposed in the vicinity of the laser oscillator 21b, and the second Peltier element 34, the laser oscillator base 21c, the laser oscillator 21b, and the first thermistor 49 are covered with the cover 21a. Heat generated by the laser oscillator unit 21 and the power supply unit 52 is transmitted to the base 11. The heat transmitted to the base 11 is dissipated by the air flow passing through the second heat sink 35 due to the rotation of the second heat sink 35 and the rear fan 85.

  As shown in FIG. 6, the front and rear surfaces and the upper surface of the side surface thermistor 87 and the first heat sink 48 are covered with the second frame 93, so that it is difficult for air to flow from other spaces in the housing 8. However, since it is not completely isolated, air flows into the vicinity of the side thermistor 87 from other spaces in the housing 8. Therefore, the detected temperature of the side thermistor 87 is affected by the temperature in the other space in the housing 8. Therefore, by correcting the detection temperature of the side thermistor 87 based on the detection temperature of the second thermistor 37, the degree of clogging can be calculated at a temperature reflecting the degree of clogging of the filter 83.

  Here, the laser oscillator 21b is an example of a solid-state laser, the second Peltier element 34 is an example of a second Peltier element, and the second thermistor 37 is an example of a second temperature sensor. According to the configuration of another example 1 of this determination processing, the clogging degree is calculated with a corrected temperature based on the temperature detected by the second thermistor 37, so that the clogging degree is calculated with high accuracy.

(Another example 2 of determination processing)
Further, in addition to the process of the alternative example 1 of the determination process, the process content includes a process of controlling the heating of the second surface 47b of the first Peltier element 47 so that the detected temperature of the first thermistor 49 becomes a predetermined temperature. It is good also as a structure which performs a determination process.

  Specifically, in step S33, the CPU 61 is in contact with the laser diode element 46b of the first Peltier element 47 so that the detected temperature of the first thermistor 49 becomes the same target temperature as that for creating the correlation information used in step S39. The first Peltier driver 53 is started to control the cooling of the first surface 47a. Thereby, the second surface 47 b on the first heat sink 48 side is heated by the first Peltier element 47. Here, the target temperature is a temperature lower than the target temperature of the laser processing, for example, 10 ° C., for example. As a result, air with a temperature controlled with higher accuracy stays in the vicinity of the filter 83 and the detected temperature of the side thermistor 87 rises, so that the degree of clogging can be determined with high accuracy. Further, if the target temperature is set lower than the target temperature for laser processing, the rate of change of the detected temperature of the side thermistor 87 is increased, so that the degree of clogging can be accurately calculated. The correlation information in this case is information in a state in which the first Peltier element 47 is controlled so that the detected temperature of the first thermistor 49 becomes a specified target temperature.

  Here, the first thermistor 49 is an example of a third temperature sensor. According to the configuration of the second example of this determination process, the first thermistor 49 of the first Peltier element 47 is arranged so that the temperature of the first thermistor 49 becomes the same target temperature as the correlation information used for calculating the degree of clogging. Since the adjacent second surface 47b is heated, air of a predetermined temperature is applied to the first thermistor 49, and the degree of clogging is calculated with high accuracy.

Needless to say, the present invention is not limited to the above-described embodiment, and various improvements and modifications can be made without departing from the spirit of the present invention.
For example, in the above description, the determination process is executed after the laser processing process, but the present invention is not limited to this. A configuration in which the determination process is executed according to a user instruction may be used, or a configuration in which the determination process is executed at predetermined time intervals may be employed. Specifically, for example, the power supply unit 52 includes a timer for measuring time, and supplies power to the controller 5 when a predetermined time has elapsed. When power is supplied, the CPU 61 starts a determination process. The predetermined time is, for example, one month. According to this configuration, since the determination process is performed without the user giving an instruction, the convenience of the laser processing apparatus 1 is improved.

  In the above description, the laser diode element 46b and the first Peltier element 47 are driven in the determination processing steps S4, S20, and S30. However, the present invention is not limited to this. Even if the first Peltier element 47 is not driven, the heat of the laser diode element 46b is transferred to the first heat sink 48 via the first Peltier element 47, and the temperature of the first heat sink 48 rises. The degree can be calculated. However, since the thermal conductivity of the first Peltier element 47 is low, the degree of clogging can be calculated with higher accuracy when the process of driving the first Peltier element 47 is executed. This is because, when the process of driving the first Peltier element 47 is executed, the temperature of the first heat sink 48 is further increased, so that the rate of change of the detected temperature of the side thermistor 87 is increased.

  In the above description, it has been described that the driving of the laser diode element 46b is stopped in steps S5, S21, and S31 of the determination process, and the driving of the first Peltier element 47 is stopped in steps S7, S23, and S33. It is not limited to. The detection temperature of the side thermistor 87 may be acquired in a state where at least one of the laser diode element 46b and the first Peltier element 47 is driven. In this case, the correlation information may be created in a state where at least one of the laser diode element 46b and the first Peltier element 47 is driven so as to be in the same state.

  In the above description, the laser diode element 46b is driven in the determination process in order to ensure that the first heat sink 48 has heat. However, the present invention is not limited to this. The clogging degree may be calculated based on the detected temperature of the side thermistor 87 in a state where neither the laser diode element 46b nor the first Peltier element 47 is driven. This is because the first heat sink 48 is likely to have heat due to external influences. In particular, when the power supply unit 52, the circuit board 45, and the like are driven, the heat of the power supply unit 52 and the circuit board 45 is transferred, transmitted, and radiated, so that the first heat sink 48 has the heat. Become.

  In the above description, it has been described that the determination process is performed by the method for calculating the degree of clogging using any one of the first correlation information 65 to the third correlation information 67 according to the accumulated operation time. Not. For example, the laser processing apparatus 1 may be configured to perform at least one of the three clogging degree calculation methods using each of the first correlation information 65 to the third correlation information 67.

  Further, the order of steps S5, S7, and S9 in the determination process is not limited to the above, and the order may be changed. The same applies to the order of steps S21, S23, and S25 and the order of steps S31, S33, and S35.

  Moreover, although the process (for example, step S13) which calculates the clogging degree was illustrated as an example of a determination process, it is not limited to this. For example, the NVRAM 64 stores a threshold for determining the degree of clogging in advance, and determines whether the detected temperature or the calculated degree of clogging is equal to or greater than a threshold for determining the stored degree of clogging. It is good also as a structure. In this configuration, the threshold for determining the degree of clogging may be a value indicating temperature or a value indicating the degree of clogging. The threshold value for determining the degree of clogging is preferably a value corresponding to the replacement time of the filter 83.

  In the above description, the first correlation information 65 is a function of a straight line connecting the temperature Tmin and the temperature Tmax. However, the present invention is not limited to this. For example, a set of a plurality of straight line functions, a curve function, a table of detected temperatures with respect to the degree of blockage, and the like may be used.

  In the above description, as the correlation information, the correlation is illustrated with the degree of clogging as the X axis and the detected temperature after a predetermined time has elapsed as the Y axis, but the correlation information is not limited thereto. For example, the correlation may be such that the degree of clogging is the X axis, and the time until reaching a predetermined temperature is the Y axis. Further, for example, the correlation may be such that the degree of clogging is the X axis and the change rate of the detected temperature per unit time is the Y axis.

  In the above description, the target temperature in step S33 of the determination process has been described as being lower than the laser processing, but the present invention is not limited to this.

  Further, in the description of the different example 1 of the determination process, it has been described that correction is performed by subtracting the detection temperature of the second thermistor 37 from the detection temperature of the side thermistor 87, but the present invention is not limited to this. For example, data of the change rate of the detected temperature of the side thermistor 87 with respect to the change rate of the detected temperature of the second thermistor 37 may be measured in advance and corrected based on the data.

  In the above description, the LCD 78 of the PC 7 is exemplified as the notification unit, but is not limited thereto. For example, when the laser processing apparatus is configured to include a display display, the degree of clogging may be output to the display display included in the laser processing apparatus. Further, the degree of clogging may be output to a communication terminal including a display that can communicate with the laser processing apparatus 1.

  In the above description, the thermistor is exemplified as the temperature sensor. However, the thermistor is not limited to this, and may be a thermocouple, a resistance temperature detector, or the like.

DESCRIPTION OF SYMBOLS 1 Laser processing apparatus 8 Case 21b Laser oscillator 34 2nd Peltier element 37 2nd thermistor 46b Laser diode element 46c Laser diode base 47 1st Peltier element 48 1st heat sink 48a Fin 49 1st thermistor 61 CPU
64 NVRAM
81 First vent 82 Second vent 83 Filter 87 Side thermistor

Claims (15)

A light source unit;
A heat sink that contacts the light source unit and dissipates heat generated from the light source unit;
A first temperature sensor for detecting temperature;
A housing for housing the light source unit, the heat sink, and the first temperature sensor;
A fan that forms an air flow through the heat sink in the housing;
A dustproof filter disposed upstream of the airflow when the fan rotates forward, and
The first temperature sensor is between the filter and the fan, and is disposed in the flow path of the air flow.   The laser processing apparatus according to claim 1, wherein the first temperature sensor is disposed apart from the heat sink.   The laser processing apparatus according to claim 2, wherein the first temperature sensor is disposed at a position closer to the filter than the heat sink.   4. The laser processing apparatus according to claim 1, wherein the first temperature sensor is disposed at a central portion of the air flow. 5. The housing has a first vent located upstream of the flow path and a second vent located downstream of the flow path when the fan rotates forward,
The heat sink is
5. The laser processing apparatus according to claim 1, further comprising a fin extending in a direction from the first ventilation port toward the second ventilation port. The light source unit includes a laser diode, and a first Peltier element having one surface close to the laser diode and the other surface close to the heat sink.
Stored in advance is correlation information indicating a correlation between the degree of clogging of the filter and the change over time of the temperature detected by the first temperature sensor in a state where the fan is rotating at a predetermined rotational speed. And
A control unit,
In the measurement operation mode, the control unit is
An acquisition process for acquiring the temperature detected by the first temperature sensor in a state where the fan is rotated at the specified rotational speed;
A determination process for comparing the temperature acquired in the acquisition process with the correlation information to determine the degree of clogging of the filter;
6. The laser processing apparatus according to claim 1, further comprising: an output process that outputs a signal indicating the degree of clogging determined in the determination process to a notification unit. The light source unit includes a laser diode, and a first Peltier element having one surface close to the laser diode and the other surface close to the heat sink.
The degree of clogging of the filter and the change over time of the temperature detected by the first temperature sensor in a state where the fan is rotating at a specified rotational speed after the laser diode is driven at a specified current value A storage unit in which correlation information indicating the correlation of
A control unit,
In the measurement operation mode, the control unit is
An acquisition process for acquiring the temperature detected by the first temperature sensor in a state where the fan is rotated at the specified rotational speed after the laser diode is driven at the specified current value;
A determination process for comparing the temperature acquired in the acquisition process with the correlation information to determine the degree of clogging of the filter;
6. The laser processing apparatus according to claim 1, further comprising: an output process that outputs a signal indicating the degree of clogging determined in the determination process to a notification unit. The correlation information is information in a state where the fan is rotating forward,
The controller is
The laser processing apparatus according to claim 6 or 7, wherein in the acquisition process, the fan is rotated forward. The correlation information is information in a state in which the fan is reversed and the driving of the first Peltier element is stopped,
The controller is
8. The laser processing apparatus according to claim 6, wherein, in the acquisition process, the fan is reversely rotated to stop driving the first Peltier element. 9. The correlation information is information in a state where the fan is reversed and the other surface of the first Peltier element is heated,
The controller is
8. The laser processing apparatus according to claim 6, wherein, in the acquisition process, the fan is reversed and the other surface of the first Peltier element is heated. The controller is
The laser processing apparatus according to claim 6, wherein the measurement operation mode is executed every predetermined time. The storage unit includes first correlation information that is the correlation information in a state where the fan is rotating forward, and first correlation information that is in a state where the fan is reversely rotated and driving of the first Peltier element is stopped. 2 correlation information, and 3rd correlation information which is the correlation information in a state where the fan is reversed and the other surface of the first Peltier element is heated are stored in advance.
The controller is
When the accumulated operating time of the laser processing apparatus is equal to or shorter than a first predetermined time, the fan is rotated forward in the acquisition process, and compared with the first correlation information in the determination process,
When the cumulative operating time of the laser processing apparatus is longer than a first predetermined time and not longer than a second predetermined time, the fan is reversed in the acquisition process to stop driving the first Peltier element, and the determination process Compare with the second correlation information,
When the accumulated operating time of the laser processing apparatus is longer than a second predetermined time, the fan is reversed in the acquisition process, the other surface of the first Peltier element is heated, and the third correlation information is determined in the determination process. The laser processing apparatus according to claim 6 or 7, wherein Housed in the housing,
A solid-state laser using the laser diode as an excitation source;
A second Peltier element proximate to the solid state laser;
A second temperature sensor for detecting the temperature of the solid-state laser,
The controller is
In the determination process, the correlation information is compared with the temperature obtained by correcting the temperature acquired in the acquisition process based on the temperature detected by the second temperature sensor in a state where the driving of the second Peltier element is stopped. The laser processing apparatus according to claim 10. A third temperature sensor for detecting the temperature of the laser diode;
The controller is
14. The laser processing according to claim 13, wherein in the acquisition process, control is performed to heat the other surface of the first Peltier element so that a temperature detected by the third temperature sensor becomes a predetermined temperature. apparatus. A laser diode, a heat sink, a Peltier element in which one surface is close to the laser diode and the other surface is close to the heat sink, a temperature sensor for detecting temperature, the laser diode, the Peltier element, the heat sink, And a casing that houses the temperature sensor, a fan that rotates to form a flow path of air passing through the heat sink in the casing, and an upstream side of the flow path when the fan rotates forward A detection method for detecting clogging of the fan of a laser processing apparatus comprising a dustproof filter and a storage unit,
The temperature sensor disposed between the filter and the fan in the flow path detecting a temperature in a state in which the fan is rotating at a specified rotational speed;
Correlation information stored in the storage unit and indicating a correlation between a degree of clogging of the filter in a state where the fan is rotating at the specified rotation speed and a change in temperature detected by the temperature sensor; Detecting the clogging of the filter by comparing with the temperature detected by the temperature sensor in the detecting step.

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