JP6872709B1 - Surface polishing jig, characteristic detection device and surface polishing device - Google Patents

Surface polishing jig, characteristic detection device and surface polishing device Download PDF

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JP6872709B1
JP6872709B1 JP2020004882A JP2020004882A JP6872709B1 JP 6872709 B1 JP6872709 B1 JP 6872709B1 JP 2020004882 A JP2020004882 A JP 2020004882A JP 2020004882 A JP2020004882 A JP 2020004882A JP 6872709 B1 JP6872709 B1 JP 6872709B1
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JP2021112775A (en
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鈴木 哲也
哲也 鈴木
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Pulstec Industrial Co Ltd
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Abstract

【課題】 絶縁層が全面にある研磨対象物であっても、効率よく表面研磨を行うことができる表面研磨用治具を提供する。
【解決手段】 円筒状電極11の内側に円筒状絶縁体12を配置し、円筒状絶縁体12の内側は研磨用工具40を通過可能な貫通孔12aである第1電極部と、絶縁層がある研磨対象物に磁石である平板電極15を接触させて固定させる第2電極部と、第1電極部の貫通孔12aに研磨用工具40を挿入したとき、円筒状電極11、研磨用工具40、研磨対象物及び第2電極部の平板電極15の順で成り立つ回路の特性を検出する特性検出装置を、円筒状電極11と平板電極15にそれぞれ接続可能にする2つの接続部13,14とを備える。
【選択図】図2
PROBLEM TO BE SOLVED: To provide a surface polishing jig capable of efficiently performing surface polishing even for an object to be polished having an insulating layer on the entire surface.
SOLUTION: A cylindrical insulator 12 is arranged inside a cylindrical electrode 11, and the inside of the cylindrical insulator 12 has a first electrode portion which is a through hole 12a through which a polishing tool 40 can pass, and an insulating layer. When the polishing tool 40 is inserted into the second electrode portion for contacting and fixing the flat plate electrode 15 which is a magnet to a certain object to be polished and the through hole 12a of the first electrode portion, the cylindrical electrode 11 and the polishing tool 40 , The two connection portions 13 and 14 that enable the characteristic detection device for detecting the characteristics of the circuit consisting of the object to be polished and the flat plate electrode 15 of the second electrode portion to be connected to the cylindrical electrode 11 and the flat plate electrode 15, respectively. To be equipped with.
[Selection diagram] Fig. 2

Description

本発明は、表面に絶縁層がある研磨対象物を金属の面が現れるまで研磨する際に使用する表面研磨用治具、該表面研磨用治具に接続する特性検出装置、及び該特性検出装置からの信号線を接続可能である又は該特性検出装置を内部に含む表面研磨装置に関する。 The present invention relates to a surface polishing jig used when polishing an object to be polished having an insulating layer on the surface until a metal surface appears, a characteristic detection device connected to the surface polishing jig, and the characteristic detection device. The present invention relates to a surface polishing device to which a signal line from the above can be connected or includes the characteristic detection device inside.

従来から、金属物体である測定対象物にX線を照射して、該測定対象物で発生する回折X線によりX線回折像を撮像し、撮像された回折像から該測定対象物の残留応力等を測定するX線回折測定装置が知られている。このX線回折測定装置により測定を行うためには、測定対象物の素材である金属が表面に出ている必要がある。よって、測定対象物の表面に塗装による層や樹脂をコートした層のように、測定対象物の素材とは別の層がある場合はこの層を研磨により除去する必要がある。金属物体である測定対象物をX線回折測定装置により測定する場合、X線が照射される箇所のみ素材の金属が表面に出ていればよいので、該測定対象物の表面を研磨するときは、研磨装置として電気ドリルのドリル刃を軸方向に掘り下げが少ない刃(例えばエンドミル)にした装置を用いることがよく行われている。そのような研磨装置により表面研磨を行うとき、素材の金属が表面に出たか否かは目視により確認することができるが、目視による確認では、研磨対象物の表面を研磨しすぎてしまうことが多く効率が悪い。そこで、研磨装置の研磨用の刃と研磨対象物との導通状態を検出し、導通が検出されたことにより素材の金属が表面にでたことを検出する手段をとることがある。回転する工具を用いた加工において、工具と加工対象物との間の導通状態を検出する方法としては、例えば以下の特許文献1に示されているように、工具と加工対象物との間に電圧を印加し、電流を検出する方法がある。また、以下の特許文献2に示されているように、工具と導通状態にある箇所の近傍の周囲に電極を設けることでコンデンサを形成し、該電極と加工対象物との間に交流電圧を印加したときの電流を検出する方法もある。 Conventionally, an object to be measured, which is a metal object, is irradiated with X-rays, an X-ray diffraction image is imaged by the diffraction X-ray generated by the object to be measured, and the residual stress of the object to be measured is obtained from the imaged diffraction image. An X-ray diffraction measuring device for measuring the above is known. In order to perform measurement with this X-ray diffraction measuring device, it is necessary that the metal that is the material of the object to be measured is exposed on the surface. Therefore, if there is a layer different from the material of the measurement target, such as a layer by painting or a layer coated with resin on the surface of the measurement target, it is necessary to remove this layer by polishing. When measuring an object to be measured, which is a metal object, with an X-ray diffractometer, the metal of the material needs to be exposed only at the location where the X-ray is irradiated. Therefore, when polishing the surface of the object to be measured. As a polishing device, it is common practice to use a device in which the drill blade of an electric drill is a blade (for example, an end mill) with less digging in the axial direction. When surface polishing is performed by such a polishing device, it is possible to visually confirm whether or not the metal of the material has come out on the surface, but in the visual confirmation, the surface of the object to be polished may be excessively polished. Many inefficient. Therefore, a means may be taken to detect the conduction state between the polishing blade of the polishing apparatus and the object to be polished, and to detect that the metal of the material has come out on the surface due to the detection of the continuity. In machining using a rotating tool, as a method of detecting the conduction state between the tool and the machined object, for example, as shown in Patent Document 1 below, between the tool and the machined object. There is a method of applying a voltage and detecting a current. Further, as shown in Patent Document 2 below, a capacitor is formed by providing an electrode around the vicinity of a portion in a conductive state with the tool, and an AC voltage is applied between the electrode and the object to be processed. There is also a method of detecting the current when applied.

特開平5−190374号公報Japanese Unexamined Patent Publication No. 5-190374 特開2002−233933号公報JP-A-2002-233933

金属物体である測定対象物をX線回折測定する装置には、本願出願人が製造販売している装置のように、小型で測定対象物がある場所まで運搬して測定を行うことができる装置があるが、そのような装置で測定する金属物体には全面に塗装がされている等、絶縁層で全面が覆われている場合がある。そのような金属物体を表面研磨する場合、従来の技術を用いて工具と研磨対象物との間の導通状態を検出するには、研磨対象物の測定箇所とは別の箇所を研磨して電極を接続することで、工具と研磨対象物との間に電圧を印加できる状態にしなければならない。このため、X線回折測定のための研磨と電圧印加のための研磨をそれぞれ行わなければならず、目視により素材の金属が表面に出たことを確認する場合より効率はかえって悪くなる。よって、現状、研磨装置を研磨対象物がある場所まで運搬して該対象物の表面を研磨する場合は、目視により金属が表面に出たことを確認しており、効率が悪い。 The device for measuring X-ray diffraction of a measurement object, which is a metal object, is a device that is small and can be transported to a place where the measurement object is located, such as the device manufactured and sold by the applicant of the present application. However, there are cases where the entire surface of a metal object measured by such a device is covered with an insulating layer, such as being painted on the entire surface. When surface polishing such a metal object, in order to detect the conduction state between the tool and the object to be polished using the conventional technique, the electrode is polished at a point different from the measurement point of the object to be polished. Must be connected so that a voltage can be applied between the tool and the object to be polished. For this reason, polishing for X-ray diffraction measurement and polishing for voltage application must be performed respectively, and the efficiency is rather worse than when it is visually confirmed that the metal of the material has come out on the surface. Therefore, at present, when the polishing device is transported to a place where the object to be polished is to be polished and the surface of the object is polished, it is visually confirmed that the metal has come out on the surface, which is inefficient.

本発明はこの問題を解消するためなされたもので、その目的は、表面に絶縁層がある研磨対象物を金属の面が現れるまで研磨する際に使用される、研磨用工具と研磨対象物との間の導通状態を検出するための表面研磨用治具であって、絶縁層で全面が覆われている研磨対象物であっても、余計な研磨を行うことなく、効率よく表面研磨を行うことができる表面研磨用治具を提供することにある。また、該表面研磨用治具に接続して該導通状態を精度よく検出する特性検出装置を提供することにある。さらに、該特性検出装置からの信号線を接続可能である又は該特性検出装置を内部に含む表面研磨装置であって、表面研磨作業を容易にする表面研磨装置を提供することにある。 The present invention has been made to solve this problem, and an object of the present invention is to use a polishing tool and an object to be polished, which are used when polishing an object to be polished having an insulating layer on the surface until a metal surface appears. It is a surface polishing jig for detecting the conduction state between the two, and even if the object to be polished is entirely covered with an insulating layer, the surface is efficiently polished without extra polishing. It is an object of the present invention to provide a surface polishing jig which can be used. Another object of the present invention is to provide a characteristic detection device that is connected to the surface polishing jig to accurately detect the conduction state. Further, it is an object of the present invention to provide a surface polishing device to which a signal line from the characteristic detecting device can be connected or which includes the characteristic detecting device inside and which facilitates a surface polishing operation.

上記目的を達成するために、本発明の特徴は、円筒状の電極の内側に円筒状の絶縁体を配置し、円筒状の絶縁体の内側は研磨用工具を通過可能な貫通孔である第1電極部と、磁石の部分を有し、絶縁層がある研磨対象物に電極を接触させて固定させる第2電極部と、第1電極部の貫通孔に研磨用工具を挿入したとき、第1電極部の電極、研磨用工具、研磨対象物及び第2電極部の電極の順で成り立つ回路の特性を検出する特性検出装置を、第1電極部の電極と第2電極部の電極にそれぞれ接続可能にする2つの接続部とを備える表面研磨用治具としたことにある。 In order to achieve the above object, the feature of the present invention is that a cylindrical insulator is arranged inside the cylindrical electrode, and the inside of the cylindrical insulator is a through hole through which a polishing tool can pass. When a polishing tool is inserted into the through hole of the first electrode portion, the second electrode portion which has a magnet portion and the electrode is brought into contact with and fixed to the object to be polished having an insulating layer, and the first electrode portion, the first electrode portion and the second electrode portion are fixed. A characteristic detection device that detects the characteristics of the circuit consisting of the electrodes of the 1 electrode section, the polishing tool, the object to be polished, and the electrodes of the 2nd electrode section is installed on the electrodes of the 1st electrode section and the electrodes of the 2nd electrode section, respectively. It is a surface polishing jig provided with two connecting portions that enable connection.

これによれば、研磨対象物の研磨箇所が、表面研磨用治具の第1電極部の貫通孔の直下になるように表面研磨用治具を研磨対象物にセットし、表面研磨用治具の第1電極部の貫通孔に研磨用工具を挿入すると、第1電極部の電極と第2電極部の電極との間は、第1電極部の電極と研磨用工具から成り立つ第1のコンデンサと、研磨用工具と研磨対象物の導通状態から成り立つスイッチと、第2電極部の電極と研磨対象物から成り立つ第2のコンデンサからなる回路とみなすことができる。そして、この回路の特性は、研磨用工具と研磨対象物との間の導通状態(スイッチのON、OFF)により大きく変わるので、研磨用工具を回転させて表面研磨を行う間、表面研磨用治具の接続部に特性検出装置を接続して、第1電極部の電極と第2電極部の電極との間の回路の特性を検出すれば、特性が大きく変わるタイミングを検出することで研磨用工具と研磨対象物との導通を検出することができる。すなわち、絶縁層が全面にある研磨対象物であっても、余計な研磨を行うことなく、効率よく表面研磨を行うことができる。また、第2電極部は磁石を有するので、磁力を適正にすれば表面研磨の間、表面研磨用治具を研磨対象物に固定することができ、研磨対象物が水平でなくても表面研磨用治具をセットすることができる。なお、回路の特性を検出するとは、回路に何らかの作用を行ったときに回路が有する何らかの物理量を検出するということである。 According to this, the surface polishing jig is set on the polishing target so that the polishing portion of the polishing target is directly below the through hole of the first electrode portion of the surface polishing jig, and the surface polishing jig is set. When a polishing tool is inserted into the through hole of the first electrode portion of the above, a first capacitor composed of the electrode of the first electrode portion and the polishing tool is provided between the electrode of the first electrode portion and the electrode of the second electrode portion. It can be regarded as a circuit including a switch consisting of a polishing tool and a conduction state of the object to be polished, and a second capacitor composed of the electrode of the second electrode portion and the object to be polished. Since the characteristics of this circuit change greatly depending on the conduction state (switch ON / OFF) between the polishing tool and the object to be polished, the surface polishing jig is used while the polishing tool is rotated to polish the surface. If a characteristic detection device is connected to the connection part of the tool and the characteristics of the circuit between the electrodes of the first electrode part and the electrodes of the second electrode part are detected, the timing at which the characteristics change significantly is detected for polishing. It is possible to detect the continuity between the tool and the object to be polished. That is, even if the object to be polished has an insulating layer on the entire surface, the surface can be efficiently polished without performing extra polishing. Further, since the second electrode portion has a magnet, the surface polishing jig can be fixed to the object to be polished during surface polishing if the magnetic force is adjusted appropriately, and the surface is polished even if the object to be polished is not horizontal. A jig can be set. Note that detecting the characteristics of a circuit means detecting some physical quantity of the circuit when some action is performed on the circuit.

また、本発明の他の特徴は、第1電極部の貫通孔の中心軸を略中心軸にした円柱形状又は角柱形状の凹部であって、研磨対象物がプレートに締め込まれたボルトの頭部である場合、この頭部と嵌合する大きさにされている凹部を備える表面研磨用治具としたことにある。 Further, another feature of the present invention is a cylindrical or prismatic concave portion having the central axis of the through hole of the first electrode portion as a substantially central axis, and the head of a bolt in which the object to be polished is tightened to the plate. In the case of a portion, the surface polishing jig is provided with a recess sized to fit the head.

これによれば、研磨対象物がプレートに締め込まれたボルトの頭部である場合は、この頭部に凹部を嵌め込んで表面研磨用治具を固定すればよく、研磨対象物がプレートである場合は、そのまま表面研磨用治具を固定すればよいので、様々な研磨対象物に対して上述した表面研磨用治具を用いて表面研磨を行うことができる。 According to this, when the object to be polished is the head of a bolt tightened to the plate, a recess may be fitted into the head to fix the surface polishing jig, and the object to be polished is the plate. In some cases, the surface polishing jig may be fixed as it is, so that the surface polishing can be performed on various objects to be polished by using the surface polishing jig described above.

また、本発明の他の特徴は、上述した表面研磨用治具の接続部に接続する特性検出装置において、第1電極部の電極と貫通孔に挿入した研磨用工具から形成されるコンデンサと、第2電極部の電極と研磨対象物から形成されるコンデンサとに、充電と放電を設定された周期で繰り返し行う充放電回路であって、充電の際、アースと第1電極部の電極との間及びアースと第2電極部の電極との間で等しい量の電荷が移動するようにされている充放電回路と、充放電回路により充電と放電が繰り返し行われているとき、充放電回路の所定の箇所における電圧又は電流の強度を検出する強度検出回路とを備えるようにしたことにある。 Another feature of the present invention is the capacitor formed from the electrode of the first electrode portion and the polishing tool inserted into the through hole in the characteristic detection device connected to the connection portion of the surface polishing jig described above. It is a charge / discharge circuit that repeatedly charges and discharges the electrode of the second electrode portion and the capacitor formed from the object to be polished at a set cycle, and during charging, the ground and the electrode of the first electrode portion are connected to each other. A charge / discharge circuit in which an equal amount of charge is transferred between the space and between the ground and the electrode of the second electrode portion, and a charge / discharge circuit when charging and discharging are repeatedly performed by the charge / discharge circuit. It is provided with an intensity detection circuit for detecting the intensity of voltage or current at a predetermined location.

これによれば、研磨対象物のアースの有無によらず、研磨用工具と研磨対象物との間の導通状態(スイッチのON、OFF)により、第1電極部の電極の電位は大きく変わる。また、研磨対象物のアースの有無によらず、研磨用工具と研磨対象物との間が導通したとき、充電の際のそれぞれのコンデンサへの電荷の移動量は等しいとともに略一定になるので、第1電極部の電極の電位は略一定になる。よって、強度検出回路が適切な箇所の電圧又は電流の強度を検出するようにすれば、検出した強度を予め設定した強度と比較することで、精度よく研磨用工具と研磨対象物との導通を検出することができる。また、充放電回路は直流電源を用いて構成できるので、特性検出装置をバッテリを用いたものにすることができ、特性検出装置を小型にできるとともに研磨対象物の場所に制限されないものにすることができる。 According to this, the potential of the electrode of the first electrode portion changes greatly depending on the conduction state (switch ON / OFF) between the polishing tool and the object to be polished regardless of whether or not the object to be polished is grounded. Further, regardless of whether the polishing object is grounded or not, when the polishing tool and the polishing object are electrically connected, the amount of electric charge transferred to each capacitor during charging is equal and substantially constant. The potential of the electrode of the first electrode portion becomes substantially constant. Therefore, if the strength detection circuit detects the strength of the voltage or current at an appropriate location, the detected strength can be compared with the preset strength to accurately conduct the continuity between the polishing tool and the object to be polished. Can be detected. Further, since the charge / discharge circuit can be configured by using a DC power supply, the characteristic detection device can be made by using a battery, the characteristic detection device can be made small, and the location of the object to be polished is not restricted. Can be done.

また、本発明の他の特徴は、上述した表面研磨用治具の接続部に接続する特性検出装置において、 第1電極部の電極と貫通孔に挿入した研磨用工具から形成されるコンデンサと第2電極部の電極と研磨対象物から形成されるコンデンサとを回路内のコンデンサの1つとして、交流電流において抵抗を有する素子及び交流電源から構成されるブリッジ回路と、ブリッジ回路の交流電源が交流電圧を印加したとき、ブリッジ回路の並列回路間を橋渡しする箇所の電圧又は電流の強度を検出する強度検出回路とを備えるようにしたことにある。 Another feature of the present invention is the capacitor formed from the electrode of the first electrode portion and the polishing tool inserted into the through hole in the characteristic detection device connected to the connection portion of the surface polishing jig described above. Two The electrodes of the electrode part and the capacitor formed from the object to be polished are used as one of the capacitors in the circuit, and the bridge circuit composed of the element having resistance in the alternating current and the alternating current power supply and the alternating current power supply of the bridge circuit are alternating current. When a voltage is applied, a strength detection circuit for detecting the strength of the voltage or current at a portion bridging between parallel circuits of the bridge circuit is provided.

これによれば、研磨対象物のアースの有無によらず、研磨用工具と研磨対象物との間の導通状態(スイッチのON、OFF)により、ブリッジ回路の並列回路間を橋渡しする箇所の電圧又は電流の強度は大きく変動する。よって、強度検出回路により電圧又は電流の強度を検出し、検出した強度を予め設定した強度と比較するようにすれば、精度よく研磨用工具と研磨対象物との導通を検出することができる。 According to this, regardless of whether the polishing object is grounded or not, the voltage at the point where the parallel circuit of the bridge circuit is bridged is determined by the conduction state (switch ON / OFF) between the polishing tool and the polishing object. Or the intensity of the current fluctuates greatly. Therefore, if the intensity of voltage or current is detected by the intensity detection circuit and the detected intensity is compared with the preset intensity, the continuity between the polishing tool and the object to be polished can be detected with high accuracy.

また、本発明の他の特徴は、上述した表面研磨用治具の接続部に接続する特性検出装置が出力する特性に基づく信号を入力可能である表面研磨装置において、第1電極部の貫通孔に挿入する研磨用工具を回転駆動させる駆動手段と、特性検出装置から入力した特性に基づく信号により、駆動手段の作動と停止を制御する制御手段とを備えるようにしたことにある。 Another feature of the present invention is the through hole of the first electrode portion in the surface polishing apparatus capable of inputting a signal based on the characteristic output by the characteristic detecting apparatus connected to the connection portion of the surface polishing jig described above. It is provided with a driving means for rotationally driving the polishing tool to be inserted into the device and a control means for controlling the operation and stopping of the driving means by a signal based on the characteristic input from the characteristic detection device.

これによれば、特性検出装置が出力する特性に基づく信号により、制御手段が研磨用工具と研磨対象物との導通を検出して駆動手段を停止させれば、作業者は表面研磨装置を作動させて研磨対象物を研磨することに集中すればよいので、研磨作業の効率がよくなる。なお、この場合、表面研磨装置は特性検出装置とは別にあり、特性検出装置からの信号線を接続する形態と、表面研磨装置が特性検出装置を内部に含む形態の両方がある。 According to this, if the control means detects the continuity between the polishing tool and the object to be polished by the signal based on the characteristic output by the characteristic detection device and stops the driving means, the operator operates the surface polishing device. Since it is sufficient to concentrate on polishing the object to be polished, the efficiency of the polishing work is improved. In this case, the surface polishing device is separate from the characteristic detecting device, and there are both a form in which a signal line from the characteristic detecting device is connected and a form in which the surface polishing device includes the characteristic detecting device inside.

本発明の一実施形態に係る表面研磨用治具の外観図である。It is an external view of the surface polishing jig which concerns on one Embodiment of this invention. 図1の表面研磨用治具を研磨対象物にセットし、表面研磨装置の研磨用工具を表面研磨用治具の貫通孔に挿入した時の部分断面図である。It is a partial cross-sectional view when the surface polishing jig of FIG. 1 is set on the object to be polished, and the polishing tool of the surface polishing apparatus is inserted into the through hole of the surface polishing jig. 図2の状態における表面研磨用治具に特性検出装置を接続したときの、表面研磨用治具の2つの接続部間で成り立つ回路を示した図である。It is a figure which showed the circuit which holds between the two connection parts of the surface polishing jig when the characteristic detection apparatus is connected to the surface polishing jig in the state of FIG. 表面研磨用治具に接続される特性検出装置の一実施形態に係る構成図である。It is a block diagram which concerns on one Embodiment of the characteristic detection apparatus connected to the surface polishing jig. 図4の特性検出装置のローパスフィルタが出力する電圧強度に相当する信号強度が、研磨用工具と研磨対象物との間の導通状態により変化することを示した図である。FIG. 5 is a diagram showing that the signal strength corresponding to the voltage strength output by the low-pass filter of the characteristic detection device of FIG. 4 changes depending on the conduction state between the polishing tool and the polishing object. 表面研磨用治具に接続される特性検出装置の別の実施形態に係る構成図である。It is a block diagram which concerns on another embodiment of the characteristic detection apparatus connected to the surface polishing jig. 図4又は図6の特性検出装置が出力する信号を研磨用工具の駆動制御に使用する表面研磨装置の構成を示した図である。It is a figure which showed the structure of the surface polishing apparatus which uses the signal output by the characteristic detection apparatus of FIG. 4 or FIG. 6 for drive control of a polishing tool.

本発明の一実施形態に係る表面研磨用治具の構造について図1乃至図3を用いて説明する。図1は表面研磨用治具1の外観図であり、図2は、表面研磨用治具1を研磨対象物にセットし、表面研磨装置4の研磨用工具40を表面研磨用治具1の貫通孔12aに挿入したときを、表面研磨用治具1のみを断面図にして示した図である。本実施形態において、研磨対象物はプレートPtに締結されているボルトBtの頭部であり、プレートPt及びボルトBtは表面に塗装による絶縁膜が形成されているものである。そして、図1及び図2に示す表面研磨用治具1を用いた表面研磨は、研磨用工具40を回転させてボルトBtの頭部の一部から絶縁膜を除去し、ボルトBtの素材の金属を表面に出すためのものであり、表面研磨用治具1は、研磨用工具40とボルトBtとの導通状態を検出するために用いられるものである。なお、ボルトBtの素材の金属を表面に出す目的は、背景技術にて説明したように、本願出願人にとってはX線回折測定を可能にするためであるが、これに限定されず、対象物の一部において素材の金属を表面に出す必要があれば、どのような目的であってもよい。 The structure of the surface polishing jig according to the embodiment of the present invention will be described with reference to FIGS. 1 to 3. FIG. 1 is an external view of the surface polishing jig 1, and FIG. 2 shows that the surface polishing jig 1 is set on the object to be polished and the polishing tool 40 of the surface polishing device 4 is set on the surface polishing jig 1. It is a figure which showed only the surface polishing jig 1 as a cross-sectional view when it was inserted into a through hole 12a. In the present embodiment, the object to be polished is the head of the bolt Bt fastened to the plate Pt, and the plate Pt and the bolt Bt have an insulating film formed by painting on the surface thereof. Then, in the surface polishing using the surface polishing jig 1 shown in FIGS. 1 and 2, the polishing tool 40 is rotated to remove the insulating film from a part of the head of the bolt Bt, and the material of the bolt Bt is made of the material. The surface polishing jig 1 is used to expose the metal to the surface, and the surface polishing jig 1 is used to detect the conduction state between the polishing tool 40 and the bolt Bt. The purpose of exposing the metal of the material of the bolt Bt to the surface is to enable X-ray diffraction measurement for the applicant of the present application as described in the background technology, but the object is not limited to this. It may have any purpose as long as it is necessary to expose the metal of the material to the surface in a part of the above.

図1に示すように、表面研磨用治具1は円柱状であり、円柱状の本体部10の底面10bにリング状の平板電極15を取り付け、中心軸に貫通孔12aが形成されている構造をしている。本体部10は樹脂からできており、平板電極15は磁石からできている。これにより、表面研磨用治具1は軽量で容易に持ち運びができ、プレートPtの素材が鉄等の磁性体であれば、研磨する箇所が貫通孔12aの直下になるようプレートPtに固定することができる。プレートPtは上述したように塗装による絶縁膜が形成されたものなので、平板電極15をプレートPtに吸着させると、プレートPtの素材である金属と平板電極15とは絶縁膜を挟んで近傍で対峙することになり、コンデンサが形成されていると見なすことができる。そして、表面研磨用治具1がプレートPtに固定されれば、このコンデンサのキャパシタンスは一定である。また、本体部10は、側面10eに、後述する特性検出装置2との間をケーブルで接続するための接続部13,14が固定されている。接続部13,14は陸式ターミナルであり、バナナプラグを差し込むことでケーブルを接続することができる。なお、接続部13,14が表面研磨用治具1のどの箇所と導通しているかについては、後述する。 As shown in FIG. 1, the surface polishing jig 1 is cylindrical, and a ring-shaped flat plate electrode 15 is attached to the bottom surface 10b of the columnar main body 10, and a through hole 12a is formed in the central axis. I am doing. The main body 10 is made of resin, and the flat plate electrode 15 is made of magnet. As a result, the surface polishing jig 1 is lightweight and can be easily carried. If the material of the plate Pt is a magnetic material such as iron, the surface polishing jig 1 is fixed to the plate Pt so that the polishing portion is directly below the through hole 12a. Can be done. Since the plate Pt has an insulating film formed by painting as described above, when the flat plate electrode 15 is attracted to the plate Pt, the metal which is the material of the plate Pt and the flat plate electrode 15 face each other with the insulating film in between. Therefore, it can be considered that the capacitor is formed. Then, if the surface polishing jig 1 is fixed to the plate Pt, the capacitance of this capacitor is constant. Further, the main body portion 10 has connection portions 13 and 14 fixed to the side surface 10e for connecting to the characteristic detection device 2 described later with a cable. The connection portions 13 and 14 are land-type terminals, and cables can be connected by inserting a banana plug. It should be noted that which part of the surface polishing jig 1 the connecting portions 13 and 14 are conducting with each other will be described later.

図2に示すように、本体部10の底面10bには本体部10と中心軸を略同一にした円柱形状の凹部10aが形成され、凹部10aの大きさは研磨対象のボルトBtの頭部に嵌合する大きさになっている。これにより、ボルトBtの頭部が凹部10aに嵌め込まれるよう表面研磨用治具1をプレートPtにセットすると、貫通孔12aの直下がボルトBtの頭部の中心になる。 As shown in FIG. 2, a cylindrical recess 10a having a central axis substantially the same as that of the main body 10 is formed on the bottom surface 10b of the main body 10, and the size of the recess 10a is set on the head of the bolt Bt to be polished. It is sized to fit. As a result, when the surface polishing jig 1 is set on the plate Pt so that the head of the bolt Bt is fitted into the recess 10a, the center of the head of the bolt Bt is directly below the through hole 12a.

図2に示すように、本体部10は、本体部10と中心軸を略同一にした貫通孔が形成され、その貫通孔に金属の円筒状電極11が入れられて固定されている。円筒状電極11の金属は電気伝導率が高ければよく、例えば銅である。そして、円筒状電極11の内側には樹脂の円筒状絶縁体12が固定されており、円筒状絶縁体12の内側が貫通孔12aであり、その径は研磨用工具40の径よりやや大きくなっている。これにより、表面研磨用治具1を貫通孔12aの直下がボルトBtの頭部になるようプレートPtにセットした後、研磨用工具40を貫通孔12aに挿入すると、図2に示すように研磨用工具40の先端はボルトBtの頭部に到達する。このとき、金属である研磨用工具40の近傍の周囲を円筒状電極11が囲っているので、コンデンサが形成されていると見なすことができる。また、円筒状電極11の長さは、本体部10の中心軸に開けられた貫通孔の長さ、及び円筒状絶縁体12の長さよりやや短くなっており、円筒状電極11の上端の上及び円筒状電極11の下端の下には、本体部10の面に凹みがないように薬剤を硬化させた絶縁用のシール材18,19が塗布されている。すなわち、円筒状電極11の内側には円筒状絶縁体12があり、上端及び下端はシールされているので、円筒状電極11は別の物に接触することはないようになっている。これにより、研磨用工具40がその中心軸方向の横方向に位置が変化しても、また、ボルトBtの頭部の表面研磨により切り粉が発生しても、研磨用工具40と円筒状電極11とは短絡せず、研磨作業中、研磨用工具40と円筒状電極11とで形成されるコンデンサは保たれ続ける。 As shown in FIG. 2, the main body 10 is formed with a through hole having a central axis substantially the same as that of the main body 10, and a metal cylindrical electrode 11 is inserted into the through hole and fixed. The metal of the cylindrical electrode 11 may have a high electrical conductivity, for example, copper. A resin cylindrical insulator 12 is fixed inside the cylindrical electrode 11, and the inside of the cylindrical insulator 12 is a through hole 12a, the diameter of which is slightly larger than the diameter of the polishing tool 40. ing. As a result, after setting the surface polishing jig 1 on the plate Pt so that the head of the bolt Bt is directly below the through hole 12a, and then inserting the polishing tool 40 into the through hole 12a, polishing is performed as shown in FIG. The tip of the tool 40 reaches the head of the bolt Bt. At this time, since the cylindrical electrode 11 surrounds the vicinity of the metal polishing tool 40, it can be considered that a capacitor is formed. Further, the length of the cylindrical electrode 11 is slightly shorter than the length of the through hole formed in the central axis of the main body 10 and the length of the cylindrical insulator 12, and is above the upper end of the cylindrical electrode 11. And below the lower end of the cylindrical electrode 11, sealing materials 18 and 19 for insulation are coated so that the surface of the main body 10 is not dented and the chemical is cured. That is, since the cylindrical insulator 12 is inside the cylindrical electrode 11 and the upper end and the lower end are sealed, the cylindrical electrode 11 does not come into contact with another object. As a result, even if the position of the polishing tool 40 changes in the lateral direction in the central axis direction, or even if chips are generated due to surface polishing of the head of the bolt Bt, the polishing tool 40 and the cylindrical electrode It is not short-circuited with 11, and the capacitor formed by the polishing tool 40 and the cylindrical electrode 11 continues to be maintained during the polishing operation.

円筒状絶縁体12は樹脂であれば絶縁性の点ではよいが、研磨作業中、回転する研磨用工具40が接触する可能性があるので、樹脂の中でもこの接触に対する耐性がある材質のものがよい。例えばポリテトラフルオロエチレン(PTFE)は摩擦係数が小さいため潤滑性がよく、耐候性及び耐熱性もよいので、円筒状絶縁体12の材質に適している。また、シール材18,19は、塗布が容易で硬化後、絶縁性、耐候性及び耐熱性がよければよく、例えばシリコーンである。なお、以下、本体部10と中心軸を略同一にした貫通孔に円筒状電極11を挿入して固定し、その円筒状電極11の内側に円筒状絶縁体12を挿入して固定し、さらに円筒状電極11の上端及び下端をシールすることで形成された部分を第1電極部という。また、磁石である平板電極15を本体部10の底面10bに固定した部分を第2電極部という。 If the cylindrical insulator 12 is made of resin, it is good in terms of insulating properties, but since there is a possibility that the rotating polishing tool 40 may come into contact with the cylindrical insulator 12, the resin made of a material resistant to this contact is selected. Good. For example, polytetrafluoroethylene (PTFE) has a small coefficient of friction, so that it has good lubricity, and also has good weather resistance and heat resistance, so that it is suitable as a material for the cylindrical insulator 12. Further, the sealing materials 18 and 19 are good as long as they are easy to apply and have good insulation, weather resistance and heat resistance after curing, and are, for example, silicone. Hereinafter, the cylindrical electrode 11 is inserted and fixed in a through hole having substantially the same central axis as the main body 10, and the cylindrical insulator 12 is inserted and fixed inside the cylindrical electrode 11, and further. The portion formed by sealing the upper end and the lower end of the cylindrical electrode 11 is referred to as a first electrode portion. Further, a portion in which the flat plate electrode 15 which is a magnet is fixed to the bottom surface 10b of the main body portion 10 is referred to as a second electrode portion.

図2に示すように、本体部10は、側面10eから中心軸の貫通孔に向かって貫通孔10cが形成されており、貫通孔10cには貫通孔10cの全長から接続部13の差込部13aの長さを減算した長さより微量に長い導線16が入れられている。そして、側面10eから貫通孔10cに接続部13の差込部13aが挿入され、接続部13は側面10eで固定されているので、導線16は円筒状電極11と差込部13aに押し付けられている。これにより、接続部13の内部の導電箇所は円筒状電極11と導通している。また、本体部10は、底面10bから上方に向かって貫通孔10dが形成されており、貫通孔10dには貫通孔10dの全長より微量に長い導線17が入れられ、底面10bに磁石である平板電極15が固定されているので、導線17は平板電極15に押し付けられている。そして、貫通孔10dの上端よりやや低い位置に向かって側面10eから貫通孔10fが形成され、この貫通孔10fに接続部14の差込部14aが挿入されている。接続部14は側面10eで固定され、差込部14aの長さは貫通孔10fより微量に長いので、導線17は差込部14aに押しつけられている。これにより、接続部14の内部の導電箇所は磁石である平板電極15と導通している。 As shown in FIG. 2, the main body 10 has a through hole 10c formed from the side surface 10e toward the through hole of the central axis, and the through hole 10c has an insertion portion of the connection portion 13 from the entire length of the through hole 10c. A conducting wire 16 which is slightly longer than the length obtained by subtracting the length of 13a is inserted. Then, since the insertion portion 13a of the connecting portion 13 is inserted from the side surface 10e into the through hole 10c and the connecting portion 13 is fixed by the side surface 10e, the conducting wire 16 is pressed against the cylindrical electrode 11 and the insertion portion 13a. There is. As a result, the conductive portion inside the connecting portion 13 is conducting with the cylindrical electrode 11. Further, in the main body 10, a through hole 10d is formed upward from the bottom surface 10b, a conducting wire 17 slightly longer than the total length of the through hole 10d is inserted in the through hole 10d, and a flat plate which is a magnet is inserted in the bottom surface 10b. Since the electrode 15 is fixed, the conductor 17 is pressed against the flat plate electrode 15. Then, a through hole 10f is formed from the side surface 10e toward a position slightly lower than the upper end of the through hole 10d, and the insertion portion 14a of the connecting portion 14 is inserted into the through hole 10f. Since the connecting portion 14 is fixed by the side surface 10e and the length of the insertion portion 14a is slightly longer than that of the through hole 10f, the conducting wire 17 is pressed against the insertion portion 14a. As a result, the conductive portion inside the connecting portion 14 is electrically connected to the flat plate electrode 15 which is a magnet.

以下に、表面研磨用治具1の製作方法について説明する。まず、樹脂を成形して図1及び図2の本体部10のように円柱状にし、成形した本体部10の中心軸に円筒状電極11の外径と略同じ径の貫通孔を開け、底面10bからボルトBtの頭部が嵌め込むことができる凹部10aを、本体部10の中心軸と中心軸を略同一にして開ける。次に、本体部10の側面10eから導線16を挿入できる大きさの貫通孔10cを本体部10の中心軸に向かって開け、底面10bから導線17を挿入できる大きさの貫通孔10dを、側面10eからの長さが接続部14の差込部14aの長さと同程度となる位置であって貫通孔10cの直下となる位置から上方に向かって、適正な長さとなるよう開ける。次に、本体部10の中心軸に開けた貫通孔に接着剤を塗布した後、円筒状電極11を挿入して、上端及び下端が本体部10の面よりやや奥側になるよう固定し、円筒状電極11の内側に接着材を塗布して樹脂の円筒状絶縁体12を挿入して、上端及び下端が本体部10の面と同じ位置になるようにして固定する。次に、絶縁用のシール材18,19の薬剤を円筒状電極11の上端と下端に凹み部分が埋まるように塗布して硬化させる。次に、側面10eから貫通孔10cに導線16を挿入し、接続部13の差込部13aを挿入して接続部13を側面10eに接着剤で固定する。次に、底面10bから貫通孔10dに導線17を挿入し、底面10bの所定の箇所に接着剤を塗布した後、磁石である平板電極15を押し当てて固定し、貫通孔10fに接続部14の差込部14aを挿入して接続部14を側面10eに接着剤で固定する。これにより表面研磨用治具1が完成する。 The method of manufacturing the surface polishing jig 1 will be described below. First, the resin is molded into a columnar shape as shown in the main body 10 of FIGS. 1 and 2, and a through hole having a diameter substantially the same as the outer diameter of the cylindrical electrode 11 is formed in the central axis of the molded main body 10 to form a bottom surface. A recess 10a into which the head of the bolt Bt can be fitted from 10b is opened with the central axis and the central axis of the main body 10 substantially the same. Next, a through hole 10c having a size capable of inserting the conducting wire 16 from the side surface 10e of the main body portion 10 is opened toward the central axis of the main body portion 10, and a through hole 10d having a size capable of inserting the conducting wire 17 from the bottom surface 10b is formed on the side surface. The length from 10e is about the same as the length of the insertion portion 14a of the connecting portion 14, and the opening is made so as to have an appropriate length upward from the position directly below the through hole 10c. Next, after applying an adhesive to the through hole formed in the central axis of the main body 10, the cylindrical electrode 11 is inserted and fixed so that the upper end and the lower end are slightly behind the surface of the main body 10. An adhesive is applied to the inside of the cylindrical electrode 11, a resin cylindrical insulator 12 is inserted, and the upper end and the lower end are fixed so as to be at the same positions as the surface of the main body 10. Next, the chemicals of the sealing materials 18 and 19 for insulation are applied to the upper and lower ends of the cylindrical electrode 11 so that the recessed portions are filled and cured. Next, the conducting wire 16 is inserted into the through hole 10c from the side surface 10e, the insertion portion 13a of the connecting portion 13 is inserted, and the connecting portion 13 is fixed to the side surface 10e with an adhesive. Next, the conducting wire 17 is inserted from the bottom surface 10b into the through hole 10d, an adhesive is applied to a predetermined portion of the bottom surface 10b, and then the flat plate electrode 15 which is a magnet is pressed and fixed, and the connection portion 14 is connected to the through hole 10f. The insertion portion 14a of the above is inserted, and the connection portion 14 is fixed to the side surface 10e with an adhesive. As a result, the surface polishing jig 1 is completed.

図2に示す表面研磨装置4の駆動部分は1つの例であり、表面研磨装置4が研磨用工具40と絶縁がされており、研磨用工具40を回転させることで研磨対象物であるボルトBtの頭部を研磨できるものであれば、どのような装置であってもよい。図2に示す表面研磨装置4は、研磨用工具40が固定部41に挿入されてねじ42を締め込むことで固定され、回転軸45は先端がフランジ部44に固定され、固定部41のフランジ41aと樹脂でできている絶縁体43を介して絶縁体のねじで固定されることで、表面研磨装置4は研磨用工具40と絶縁されている。また、研磨用工具40は回転することにより先端が対象物を研磨することができるものであれば、どのようなものでもよい。 The driving portion of the surface polishing device 4 shown in FIG. 2 is an example. The surface polishing device 4 is insulated from the polishing tool 40, and the bolt Bt, which is an object to be polished, is formed by rotating the polishing tool 40. Any device may be used as long as it can polish the head of the device. The surface polishing device 4 shown in FIG. 2 is fixed by inserting the polishing tool 40 into the fixing portion 41 and tightening the screw 42, and the tip of the rotating shaft 45 is fixed to the flange portion 44, and the flange of the fixing portion 41 is fixed. The surface polishing device 4 is insulated from the polishing tool 40 by being fixed with the screws of the insulator via the insulator 43 made of 41a and resin. Further, the polishing tool 40 may be any tool as long as the tip can polish the object by rotating.

図3は、上述した構造の表面研磨用治具1を研磨対象物にセットし、研磨用工具40を表面研磨用治具1の貫通孔12aに挿入し、表面研磨用治具1の接続部13,14に特性検出装置2を接続したとき、接続部13,14の間で形成されている回路を示した図である。言い換えると、図2の状態で接続部13,14に特性検出装置2を接続したとき、接続部13,14の間で形成されている回路を示した図である。上述したように接続部13は円筒状電極11に導通しており、接続部14は磁石である平板電極15に導通している。そして、円筒状電極11は樹脂である円筒状絶縁体12が内側に固定され、円筒状絶縁体12の貫通孔12aには研磨用工具40が挿入されており、円筒状電極11と研磨用工具40は近接しているので、コンデンサC1が形成されているとすることができ、このコンデンサC1は接続部13に導通しているとすることができる。また、研磨用工具40は表面研磨装置4側には絶縁体43により導通しておらず、研磨前は研磨対象物であるボルトBtとプレートPtにも導通していないが、ボルトBtの頭部を研磨してボルトBtの金属の素材と接触すると研磨対象物に導通するので、スイッチSWが形成されているとすることができる。また、磁石である平板電極15は絶縁層を介してプレートPtに接触しているので、コンデンサC2が形成されているとすることができ、このコンデンサC2は接続部14に導通しているとすることができる。 In FIG. 3, the surface polishing jig 1 having the above-described structure is set on the object to be polished, the polishing tool 40 is inserted into the through hole 12a of the surface polishing jig 1, and the connection portion of the surface polishing jig 1 is shown. It is a figure which showed the circuit formed between the connection part 13 and 14 when the characteristic detection device 2 was connected to 13 and 14. In other words, it is a figure which showed the circuit formed between the connection part 13, 14 when the characteristic detection device 2 is connected to the connection part 13, 14 in the state of FIG. As described above, the connecting portion 13 is conducting to the cylindrical electrode 11, and the connecting portion 14 is conducting to the flat plate electrode 15 which is a magnet. A cylindrical insulator 12 which is a resin is fixed to the inside of the cylindrical electrode 11, and a polishing tool 40 is inserted into the through hole 12a of the cylindrical insulator 12. The cylindrical electrode 11 and the polishing tool Since the 40s are close to each other, it can be assumed that the capacitor C1 is formed, and that the capacitor C1 is conducting to the connection portion 13. Further, the polishing tool 40 does not conduct to the surface polishing device 4 side due to the insulator 43, and does not conduct to the bolt Bt and the plate Pt, which are the objects to be polished, before polishing, but the head of the bolt Bt. When the bolt Bt comes into contact with the metal material of the bolt Bt, it conducts to the object to be polished, so that it can be said that the switch SW is formed. Further, since the flat plate electrode 15 which is a magnet is in contact with the plate Pt via the insulating layer, it can be assumed that the capacitor C2 is formed, and it is assumed that the capacitor C2 is conducting to the connection portion 14. be able to.

図3に示す回路から分かるように、スイッチSWがONになると(研磨用工具40とボルトBtの素材が接触すると)、接続部13,14の間はコンデンサC1とコンデンサC2が直列した回路であり、コンデンサC1とコンデンサC2のキャパシタンスをそれぞれC1、C2とすると、全体のキャパシタンスは、{C1・C2/(C1+C2)}となる。また、スイッチSWがOFFであれば(研磨用工具40とボルトBtの素材が接触しないと)、スイッチSWはキャパシタンスが略0のコンデンサと見なすことができるので、全体のキャパシタンスは略0になる。すなわち、スイッチSWのON、OFFで(研磨用工具40のボルトBtの素材に対する接触の有無で)、接続部13,14の間のキャパシタンスは大きく変化する。よって、特性検出装置2として接続部13,14の間のキャパシタンスの変化により大きく変化する特性を検出できる装置を接続し、特性検出装置2が検出する特性が大きく変わるタイミングを検出することで研磨用工具40と研磨対象物との導通を検出することができる。 As can be seen from the circuit shown in FIG. 3, when the switch SW is turned on (when the polishing tool 40 and the material of the bolt Bt come into contact with each other), the capacitor C1 and the capacitor C2 are connected in series between the connection portions 13 and 14. Assuming that the capacitances of the capacitors C1 and C2 are C1 and C2, respectively, the total capacitance is {C1 · C2 / (C1 + C2)}. Further, if the switch SW is OFF (unless the polishing tool 40 and the material of the bolt Bt come into contact with each other), the switch SW can be regarded as a capacitor having a capacitance of substantially 0, so that the total capacitance becomes substantially 0. That is, the capacitance between the connecting portions 13 and 14 changes greatly depending on whether the switch SW is turned on or off (depending on whether or not the bolt Bt of the polishing tool 40 is in contact with the material). Therefore, for polishing, a device capable of detecting a characteristic that greatly changes due to a change in capacitance between the connection portions 13 and 14 is connected as the characteristic detection device 2, and a timing at which the characteristic detected by the characteristic detection device 2 changes significantly is detected. The continuity between the tool 40 and the object to be polished can be detected.

上記説明からも理解できるように、上記実施形態の表面研磨用治具1においては、円筒状電極11の内側に樹脂である円筒状絶縁体12を配置し、円筒状絶縁体12の内側は研磨用工具40を通過可能な貫通孔12aである第1電極部と、絶縁層がある研磨対象物に磁石である平板電極15を接触させて固定させる第2電極部と、第1電極部の貫通孔12aに研磨用工具40を挿入したとき、第1電極部の円筒状電極11、研磨用工具40、研磨対象物及び第2電極部の平板電極15の順で成り立つ回路の特性を検出する特性検出装置2を、第1電極部の円筒状電極11と第2電極部の平板電極15にそれぞれ接続可能にする2つの接続部13,14とを備えている。 As can be understood from the above description, in the surface polishing jig 1 of the above embodiment, the cylindrical insulator 12 which is a resin is arranged inside the cylindrical electrode 11, and the inside of the cylindrical insulator 12 is polished. Penetration of the first electrode portion which is a through hole 12a through which the tool 40 can pass, the second electrode portion which contacts and fixes the flat plate electrode 15 which is a magnet to the object to be polished having an insulating layer, and the first electrode portion. When the polishing tool 40 is inserted into the hole 12a, the characteristic of detecting the characteristics of the circuit consisting of the cylindrical electrode 11 of the first electrode portion, the polishing tool 40, the object to be polished, and the flat plate electrode 15 of the second electrode portion in this order. The detection device 2 is provided with two connecting portions 13 and 14 that enable the detection device 2 to be connected to the cylindrical electrode 11 of the first electrode portion and the flat plate electrode 15 of the second electrode portion, respectively.

これによれば、研磨対象物の研磨箇所が、表面研磨用治具1の第1電極部の貫通孔12aの直下になるように表面研磨用治具1を研磨対象物にセットし、表面研磨用治具1の第1電極部の貫通孔12aに研磨用工具を挿入すると、第1電極部の円筒状電極11と第2電極部の平板電極15との間は、第1電極部の円筒状電極11と研磨用工具40から成り立つコンデンサC1と、研磨用工具40と研磨対象物の導通状態から成り立つスイッチSWと、第2電極部の平板電極15と研磨対象物から成り立つコンデンサC2からなる回路とみなすことができる。そして、この回路の特性は、研磨用工具40と研磨対象物との間の導通状態(スイッチSWのON、OFF)により大きく変わるので、研磨用工具40を回転させて表面研磨を行う間、表面研磨用治具1の接続部13,14に特性検出装置2を接続して、第1電極部の円筒状電極11と第2電極部の平板電極15との間の回路の特性を検出すれば、特性が大きく変わるタイミングを検出することで研磨用工具40と研磨対象物との導通を検出することができる。すなわち、絶縁層が全面にある研磨対象物であっても、余計な研磨を行うことなく、効率よく表面研磨を行うことができる。また、第2電極部の平板電極15は磁石であるので、磁力を適正にすれば表面研磨の間、表面研磨用治具1を研磨対象物に固定することができ、研磨対象物が水平でなくても表面研磨用治具1をセットすることができる。 According to this, the surface polishing jig 1 is set on the polishing object so that the polishing portion of the object to be polished is directly below the through hole 12a of the first electrode portion of the surface polishing jig 1, and the surface is polished. When a polishing tool is inserted into the through hole 12a of the first electrode portion of the jig 1, the cylindrical electrode 11 of the first electrode portion and the flat plate electrode 15 of the second electrode portion are connected to the cylinder of the first electrode portion. A circuit consisting of a capacitor C1 composed of a shape electrode 11 and a polishing tool 40, a switch SW composed of a conduction state of the polishing tool 40 and an object to be polished, and a capacitor C2 composed of a flat plate electrode 15 of a second electrode portion and an object to be polished. Can be regarded as. The characteristics of this circuit vary greatly depending on the conduction state (switch SW ON / OFF) between the polishing tool 40 and the object to be polished. Therefore, while the polishing tool 40 is rotated to polish the surface, the surface is polished. If the characteristic detection device 2 is connected to the connection portions 13 and 14 of the polishing jig 1 to detect the characteristics of the circuit between the cylindrical electrode 11 of the first electrode portion and the flat plate electrode 15 of the second electrode portion. By detecting the timing at which the characteristics change significantly, the continuity between the polishing tool 40 and the object to be polished can be detected. That is, even if the object to be polished has an insulating layer on the entire surface, the surface can be efficiently polished without performing extra polishing. Further, since the flat plate electrode 15 of the second electrode portion is a magnet, the surface polishing jig 1 can be fixed to the polishing target during surface polishing if the magnetic force is adjusted appropriately, and the polishing target is horizontal. The surface polishing jig 1 can be set without it.

また、上記実施形態の表面研磨用治具1においては、第1電極部の貫通孔12aの中心軸を略中心軸にした円柱形状の凹部10aであって、研磨対象物がプレートPtに締め込まれたボルトBtの頭部である場合、この頭部と嵌合する大きさにされている凹部10aを備えている。これによれば、研磨対象物がプレートPtに締め込まれたボルトBtの頭部である場合は、この頭部に凹部10aを嵌め込んで表面研磨用治具1を固定すればよく、研磨対象物がプレートPtである場合は、そのまま表面研磨用治具1を固定すればよいので、様々な研磨対象物に対して表面研磨用治具1を用いて表面研磨を行うことができる。 Further, in the surface polishing jig 1 of the above embodiment, the surface polishing jig 1 is a cylindrical recess 10a having the central axis of the through hole 12a of the first electrode portion as a substantially central axis, and the object to be polished is tightened into the plate Pt. In the case of the head of the rolled bolt Bt, a recess 10a sized to fit the head is provided. According to this, when the object to be polished is the head of the bolt Bt tightened to the plate Pt, the recess 10a may be fitted into the head to fix the surface polishing jig 1 and the object to be polished. When the object is a plate Pt, the surface polishing jig 1 may be fixed as it is, so that the surface polishing jig 1 can be used to polish various objects to be polished.

第1電極部の円筒状電極11と第2電極部の平板電極15との間の回路の特性を検出するとは、該回路に何らかの作用を行ったときに該回路が有する何らかの物理量を検出するということであり、作用と物理量は様々なものが考えられる。よって、表面研磨用治具1に接続する特性検出装置は様々な形態の装置が考えられるが、図4に示す特性検出装置2は精度よく該回路の特性の変化を検出できるとともに、小型であって研磨対象物の場所に制限されないものである。特性検出装置2は、表面研磨用治具1の接続部13,14に接続され、接続部13,14の間のキャパシタンスの変化により大きく変化する特性を検出することで、スイッチSWがONになる(研磨用工具40とボルトBtの素材が接触する)タイミングを検出する装置である。この特性検出装置2は、表面研磨用治具1の接続部13,14と同様の陸式ターミナルである接続部27,28を有し、両側の先端がバナナプラグになっているケーブルを接続部13,14と接続部27,28にそれぞれ差し込むことで、接続部13と接続部27、及び接続部14と接続部28を接続することができる。これは図3では、接続部27とコンデンサC1とを、及び接続部28とコンデンサC2とを接続することである。 To detect the characteristics of a circuit between the cylindrical electrode 11 of the first electrode portion and the flat plate electrode 15 of the second electrode portion means to detect some physical quantity of the circuit when any action is performed on the circuit. Therefore, various actions and physical quantities can be considered. Therefore, various types of characteristic detection devices can be considered as the characteristic detection device connected to the surface polishing jig 1, but the characteristic detection device 2 shown in FIG. 4 can accurately detect changes in the characteristics of the circuit and is compact. The location of the object to be polished is not restricted. The characteristic detection device 2 is connected to the connection portions 13 and 14 of the surface polishing jig 1, and the switch SW is turned on by detecting the characteristic that greatly changes due to the change in the capacitance between the connection portions 13 and 14. It is a device that detects the timing (the polishing tool 40 and the material of the bolt Bt come into contact with each other). This characteristic detection device 2 has connection portions 27 and 28, which are land-type terminals similar to the connection portions 13 and 14 of the surface polishing jig 1, and connects cables having banana plugs at the ends on both sides. By inserting the 13 and 14 into the connecting portions 27 and 28, respectively, the connecting portion 13 and the connecting portion 27 and the connecting portion 14 and the connecting portion 28 can be connected. This is to connect the connection portion 27 and the capacitor C1 and the connection portion 28 and the capacitor C2 in FIG.

スイッチ20は押されるごとに信号をON−OFF回路21に出力し、ON−OFF回路21は信号が入力するごとに、作動信号と停止信号を順に出力する。また、ON−OFF回路21は後述する比較回路32から信号が入力すると停止信号を出力する。ON−OFF回路21の作動信号と停止信号は、パルス列信号発振回路22、定電流出力回路23及び定電流出力回路24に入力し、パルス列信号発振回路22は作動信号が入力すると設定された周期のパルス列信号を出力し、定電流出力回路23,24は設定された強度の電流が流れるよう電圧が印加される。パルス列信号発振回路22が出力するパルス列信号はスイッチ回路25,26に入力し、スイッチ回路25,26はパルスが入力するごとにスイッチを切り替える。すなわち、停止状態からスイッチ20を押すと、図3におけるコンデンサC1とコンデンサC2は所定の周期で充電と放電が繰り返される。 The switch 20 outputs a signal to the ON-OFF circuit 21 each time the switch 20 is pressed, and the ON-OFF circuit 21 outputs an operation signal and a stop signal in order each time a signal is input. Further, the ON-OFF circuit 21 outputs a stop signal when a signal is input from the comparison circuit 32 described later. The operation signal and stop signal of the ON-OFF circuit 21 are input to the pulse train signal oscillation circuit 22, the constant current output circuit 23, and the constant current output circuit 24, and the pulse train signal oscillation circuit 22 has a period set when the operation signal is input. A pulse train signal is output, and a voltage is applied to the constant current output circuits 23 and 24 so that a current of a set intensity flows. The pulse train signal output by the pulse train signal oscillation circuit 22 is input to the switch circuits 25 and 26, and the switch circuits 25 and 26 switch the switch each time a pulse is input. That is, when the switch 20 is pressed from the stopped state, the capacitors C1 and C2 in FIG. 3 are repeatedly charged and discharged at a predetermined cycle.

スイッチSWがON状態(研磨用工具40とボルトBtの素材が接触の状態)では、スイッチ回路25のスイッチとスイッチ回路26のスイッチは、一定の周期で切り替えがされるので、最も充電がされた時点での電荷量は一定になり、定電流出力回路23のマイナス極側、定電流出力回路24のプラス極側はアース端子29に接続されることでアースされているので、コンデンサC1,C2のキャパシタンスが一定であれば、接続部13,27と接続部14,28の電位(円筒状電極11と平板電極15の電位)は一定である。また、放電は、コンデンサC1,C2の間で電荷が移動するが、定電流出力回路23と定電流出力回路24は等しい強度の電流が出力するよう設定されており、スイッチ回路25,26のそれぞれのスイッチは、同じタイミングで切り替えがされるので、コンデンサC1,C2の電荷量は常に等しく、最も放電がされる時点での接続部13,27と接続部14,28の電位(円筒状電極11と平板電極15の電位)も一定である。これは、研磨対象物であるプレートPtのアースの有無によらない。スイッチ回路25,26のスイッチが早い周期で切り替えがされると、スイッチドキャパシタの回路となり、接続部13,27と接続部14,28の電位(円筒状電極11と平板電極15の電位)は常に一定の電位を有するようになる。そして、この電位はコンデンサC1,C2のキャパシタンスで定まる。 When the switch SW is ON (the polishing tool 40 and the material of the bolt Bt are in contact with each other), the switch of the switch circuit 25 and the switch of the switch circuit 26 are switched at regular intervals, so that they are most charged. The amount of charge at the time is constant, and the negative pole side of the constant current output circuit 23 and the positive pole side of the constant current output circuit 24 are grounded by being connected to the ground terminal 29, so that the capacitors C1 and C2 are grounded. If the capacitance is constant, the potentials of the connecting portions 13 and 27 and the connecting portions 14 and 28 (the potentials of the cylindrical electrode 11 and the flat plate electrode 15) are constant. Further, in the discharge, the electric charge moves between the capacitors C1 and C2, but the constant current output circuit 23 and the constant current output circuit 24 are set to output currents of equal strength, and the switch circuits 25 and 26, respectively. Since the switches of are switched at the same timing, the charge amounts of the capacitors C1 and C2 are always the same, and the potentials of the connecting portions 13 and 27 and the connecting portions 14 and 28 at the time of the most discharge (cylindrical electrode 11). And the potential of the flat plate electrode 15) are also constant. This does not depend on the presence or absence of grounding of the plate Pt, which is the object to be polished. When the switches of the switch circuits 25 and 26 are switched at an early cycle, the circuit becomes a switched capacitor, and the potentials of the connecting portions 13 and 27 and the connecting portions 14 and 28 (potentials of the cylindrical electrode 11 and the flat plate electrode 15) become. It will always have a constant potential. Then, this potential is determined by the capacitance of the capacitors C1 and C2.

スイッチSWがOFF状態(研磨用工具40とボルトBtの素材が非接触の状態)では、スイッチSWはキャパシタンスが略0のコンデンサと見なすことができるので、コンデンサC1,スイッチSW及びコンデンサC2の全体もキャパシタンス0のコンデンサと見なすことができる。このときは、充電において定電流出力回路23と定電流出力回路24は設定された印加電圧の上限となり、定電流を流すことができず、コンデンサC1,C2は充電がされない。しかし、定電流出力回路23のマイナス極側、定電流出力回路24のプラス極側はアースされているので、接続部13,14の電位(円筒状電極11と平板電極15の電位)は略0の電位で一定になる。なお、これは、プレートPtがアースされていない場合である。もし、プレートPtがアースされている場合は、充電においてはコンデンサC2には定電流出力回路24により電荷が移動するが、コンデンサC1には電荷が移動しない。そして、放電においては、充電がされたコンデンサC1とそうでないコンデンサC2の間で電荷が移動する。この状態で、スイッチ回路25,26のスイッチが早い周期で切り替えがされると、接続部13,27と接続部14,28の電位(円筒状電極11と平板電極15の電位)は、ある電位を有するようになる。しかし、接続部13,27の電位(円筒状電極11の電位)は、マイナス側の電位となる。 When the switch SW is in the OFF state (the material of the polishing tool 40 and the bolt Bt is not in contact with each other), the switch SW can be regarded as a capacitor having a capacitance of substantially 0, so that the entire capacitors C1, the switch SW and the capacitor C2 are also It can be regarded as a capacitor with zero capacitance. At this time, in charging, the constant current output circuit 23 and the constant current output circuit 24 become the upper limit of the set applied voltage, the constant current cannot flow, and the capacitors C1 and C2 are not charged. However, since the negative electrode side of the constant current output circuit 23 and the positive electrode side of the constant current output circuit 24 are grounded, the potentials of the connecting portions 13 and 14 (potentials of the cylindrical electrode 11 and the flat plate electrode 15) are substantially 0. It becomes constant at the potential of. This is a case where the plate Pt is not grounded. If the plate Pt is grounded, the electric charge is transferred to the capacitor C2 by the constant current output circuit 24 during charging, but the electric charge is not transferred to the capacitor C1. Then, in the discharge, the electric charge moves between the charged capacitor C1 and the uncharged capacitor C2. In this state, when the switches of the switch circuits 25 and 26 are switched at an early cycle, the potentials of the connecting portions 13 and 27 and the connecting portions 14 and 28 (the potentials of the cylindrical electrode 11 and the flat plate electrode 15) become a certain potential. To have. However, the potentials of the connecting portions 13 and 27 (the potentials of the cylindrical electrodes 11) are on the negative side.

すなわち、接続部13,27の電位(円筒状電極11の電位)は、プレートPtがアースされていない場合は、スイッチSWがOFFからON状態になると(研磨用工具40とボルトBtの素材が非接触の状態から接触の状態になると)、略0からコンデンサC1,C2のキャパシタンスで定まる電位になり、プレートPtがアースされている場合は、マイナス側の電位からコンデンサC1,C2のキャパシタンスで定まる電位になる。よって、プレートPtのアースの有無によらず、スイッチSWがON状態における接続部13,27の電位(円筒状電極11の電位)より低い適切な電位を設定し、この設定した電位を接続部13,27の電位(円筒状電極11の電位)が超えたことを検出することで、研磨用工具40とボルトBtの素材の接触を検出することができる。図5は、プレートPtがアースされていない状態で、アースと接続部13,27(円筒状電極11)との間の電圧を、(a)スイッチSWがOFF状態と(b)スイッチSWがON状態のときで示した図である。図5が示すよう、スイッチSWがOFF状態とON状態では電圧強度は大きく違うので、0よりやや大きな強度を設定すれば、研磨用工具40とボルトBtの素材の接触を検出することができる。電圧検出回路30以降の回路および機器はこの検出のための回路及び機器である。なお、プレートPtがアースされている状態では、(a)スイッチSWがOFF状態では、電圧強度はマイナス側であるので、0よりやや大きな強度を設定していれば問題はない。 That is, the potentials of the connecting portions 13 and 27 (the potentials of the cylindrical electrodes 11) are such that when the plate Pt is not grounded and the switch SW is changed from OFF to ON (the materials of the polishing tool 40 and the bolt Bt are not used). (From the contact state to the contact state), the potential is determined by the capacitance of the capacitors C1 and C2 from approximately 0, and when the plate Pt is grounded, the potential is determined by the capacitance of the capacitors C1 and C2 from the negative potential. become. Therefore, regardless of whether the plate Pt is grounded or not, an appropriate potential lower than the potential of the connecting portions 13 and 27 (the potential of the cylindrical electrode 11) in the ON state of the switch SW is set, and the set potential is set to the connecting portion 13. By detecting that the potential of, 27 (the potential of the cylindrical electrode 11) has been exceeded, the contact between the polishing tool 40 and the material of the bolt Bt can be detected. In FIG. 5, when the plate Pt is not grounded, the voltage between the ground and the connecting portions 13 and 27 (cylindrical electrode 11) is applied, (a) the switch SW is OFF and (b) the switch SW is ON. It is the figure shown in the state. As shown in FIG. 5, since the voltage strength differs greatly between the OFF state and the ON state of the switch SW, if a strength slightly larger than 0 is set, the contact between the polishing tool 40 and the material of the bolt Bt can be detected. The circuits and devices after the voltage detection circuit 30 are circuits and devices for this detection. In the state where the plate Pt is grounded, (a) when the switch SW is OFF, the voltage strength is on the minus side, so there is no problem as long as the strength is set to be slightly larger than 0.

電圧検出回路30は、アースと接続部13,27(円筒状電極11)との間の電圧を検出する回路であり、検出した電圧に相当する強度の信号を出力する。ローパスフィルタ31は、入力した信号から高い周波数の成分を除いた信号を出力する回路である。上述した説明では、研磨用工具40とボルトBtの素材が接触状態では、接続部13,27の電位(円筒状電極11の電位)は、プレートPtのアースの有無によらず略一定と説明したが、これはコンデンサC1のキャパシタンスが一定であるという前提がある。実際は、表面研磨が行われる間、研磨用工具40は回転しているうえに位置は小刻みに変動しており、コンデンサC1のキャパシタンスは細かく変動している。このため、接続部13,27の電位(円筒状電極11の電位)は細かい変動があり、電圧検出回路30が出力する信号も細かい変動がある。ローパスフィルタ31は、この細かい変動を入力した信号から除いて比較回路32に出力する回路である。 The voltage detection circuit 30 is a circuit that detects the voltage between the ground and the connection portions 13 and 27 (cylindrical electrode 11), and outputs a signal having a strength corresponding to the detected voltage. The low-pass filter 31 is a circuit that outputs a signal obtained by removing high-frequency components from the input signal. In the above description, when the polishing tool 40 and the material of the bolt Bt are in contact with each other, the potentials of the connecting portions 13 and 27 (the potentials of the cylindrical electrodes 11) are substantially constant regardless of the presence or absence of grounding of the plate Pt. However, this is based on the premise that the capacitance of the capacitor C1 is constant. In reality, while the surface polishing is performed, the polishing tool 40 is rotating and its position fluctuates little by little, and the capacitance of the capacitor C1 fluctuates finely. Therefore, the potentials of the connecting portions 13 and 27 (the potentials of the cylindrical electrodes 11) have fine fluctuations, and the signal output by the voltage detection circuit 30 also has fine fluctuations. The low-pass filter 31 is a circuit that removes this fine variation from the input signal and outputs it to the comparison circuit 32.

比較回路32は、入力した信号の強度が設定された強度以下では信号を出力せず、入力した信号の強度が設定された強度より大きくなると、信号をON−OFF回路21とブザー33に出力する。比較回路32に設定されている強度は、0よりやや大きな適切な強度であり、スイッチSWがON状態(研磨用工具40とボルトBtの素材が接触の状態)のときに入力する信号の強度において、想定される最も小さい強度より小さい強度である。これにより、研磨用工具40とボルトBtの素材と接触すると、ON−OFF回路21とブザー33に信号が入力する。ON−OFF回路21は上述したように比較回路32から信号が入力すると停止信号を出力し、これによりパルス列信号発振回路22、定電流出力回路23及び定電流出力回路24は作動を停止するので、接続部13,14は電位を有さなくなり、電圧検出回路30が出力する信号の強度は0になる。これにより、比較回路32に入力する信号の強度は設定された強度以下になり、比較回路32は信号を出力しなくなる。すなわち、研磨用工具40とボルトBtの素材が非接触状態から接触状態になったとき、比較回路32が信号を出力するのは一瞬であり、1回のパルス信号である。 The comparison circuit 32 does not output a signal when the strength of the input signal is lower than the set strength, and outputs a signal to the ON-OFF circuit 21 and the buzzer 33 when the strength of the input signal becomes higher than the set strength. .. The strength set in the comparison circuit 32 is an appropriate strength slightly larger than 0, and in the strength of the signal input when the switch SW is in the ON state (the polishing tool 40 and the material of the bolt Bt are in contact with each other). , Less than the smallest expected strength. As a result, when the polishing tool 40 comes into contact with the material of the bolt Bt, a signal is input to the ON-OFF circuit 21 and the buzzer 33. As described above, the ON-OFF circuit 21 outputs a stop signal when a signal is input from the comparison circuit 32, whereby the pulse train signal oscillation circuit 22, the constant current output circuit 23, and the constant current output circuit 24 stop operating. The connection portions 13 and 14 have no potential, and the signal strength output by the voltage detection circuit 30 becomes zero. As a result, the strength of the signal input to the comparison circuit 32 becomes equal to or lower than the set strength, and the comparison circuit 32 does not output the signal. That is, when the polishing tool 40 and the material of the bolt Bt change from the non-contact state to the contact state, the comparison circuit 32 outputs a signal for a moment, which is a single pulse signal.

ブザー33は比較回路32から信号が入力すると、設定された時間だけブザー音を発生させる機器である。作業者は表面研磨を開始した後、このブザー音を聞くことで研磨用工具40とボルトBtの素材が接触状態になったことを知ることができる。 The buzzer 33 is a device that generates a buzzer sound for a set time when a signal is input from the comparison circuit 32. After starting the surface polishing, the operator can know that the polishing tool 40 and the material of the bolt Bt are in contact with each other by listening to this buzzer sound.

上記説明からも理解できるように、上記実施形態の特性検出装置2においては、第1電極部の円筒状電極11と貫通孔12aに挿入した研磨用工具40から形成されるコンデンサC1と、第2電極部の平板電極15と研磨対象物から形成されるコンデンサC2とに、充電と放電を設定された周期で繰り返し行うパルス列信号発振回路22、定電流出力回路23,24及びスイッチ回路25,26からなる充放電回路であって、充電の際、アースと第1電極部の円筒状電極11との間及びアースと第2電極部の平板電極15との間で等しい量の電荷が移動するようにされている充放電回路と、充放電回路により充電と放電が繰り返し行われているとき、アースと円筒状電極11間の電圧の強度を検出する電圧検出回路30及びローパスフィルタ31からなる強度検出回路とを備えている。 As can be understood from the above description, in the characteristic detection device 2 of the above embodiment, the capacitor C1 formed from the cylindrical electrode 11 of the first electrode portion and the polishing tool 40 inserted into the through hole 12a, and the second From the pulse train signal oscillation circuit 22, the constant current output circuits 23, 24, and the switch circuits 25, 26, which repeatedly charge and discharge the flat plate electrode 15 of the electrode portion and the capacitor C2 formed from the object to be polished at a set cycle. In this charging / discharging circuit, an equal amount of charge is transferred between the ground and the cylindrical electrode 11 of the first electrode portion and between the ground and the flat plate electrode 15 of the second electrode portion during charging. A strength detection circuit including a voltage detection circuit 30 for detecting the strength of the voltage between the ground and the cylindrical electrode 11 and a low-pass filter 31 when charging and discharging are repeatedly performed by the charge / discharge circuit. And have.

これによれば、研磨対象物のアースの有無によらず、研磨用工具40と研磨対象物との間の導通状態(スイッチSWのON、OFF)により、円筒状電極11の電位は大きく変わる。また、研磨対象物のアースの有無によらず、研磨用工具40と研磨対象物との間が導通したとき、充放電の際のそれぞれのコンデンサC1,C2の電荷量は等しいとともに略一定になるので、円筒状電極11の電位は略一定になる。よって、強度検出回路がアースと円筒状電極11間の電圧の強度を検出すれば、検出した強度を予め設定した強度と比較することで、精度よく研磨用工具40と研磨対象物との導通を検出することができる。また、充放電回路は直流電源を用いて構成できるので、特性検出装置2をバッテリを用いたものにすることができ、特性検出装置2を小型にできるとともに研磨対象物の場所に制限されないものにすることができる。 According to this, the potential of the cylindrical electrode 11 changes greatly depending on the conduction state (switch SW ON / OFF) between the polishing tool 40 and the polishing object regardless of whether or not the polishing object is grounded. Further, regardless of whether or not the polishing object is grounded, when the polishing tool 40 and the polishing object are electrically connected, the charge amounts of the respective capacitors C1 and C2 at the time of charging and discharging are equal and substantially constant. Therefore, the potential of the cylindrical electrode 11 becomes substantially constant. Therefore, if the strength detection circuit detects the strength of the voltage between the ground and the cylindrical electrode 11, the detected strength can be compared with the preset strength to accurately conduct the polishing tool 40 and the object to be polished. Can be detected. Further, since the charge / discharge circuit can be configured by using a DC power supply, the characteristic detection device 2 can be made to use a battery, the characteristic detection device 2 can be made compact, and the location of the object to be polished is not limited. can do.

(変形例1)
上述したように、特性検出装置は様々な形態の装置が考えられるが、図6の構成図は、精度よく研磨用工具40と研磨対象物との導通を検出することができる、別の実施形態の特性検出装置2’を示した図である。この特性検出装置2’は、上述した特性検出装置2と同一である箇所を有しているので、図6では同一の箇所は同じ番号を付し、違う箇所は異なる番号を付している。特性検出装置2’の接続部27,28、スイッチ20及びON−OFF回路21は上述した特性検出装置2のものと同じである。
(Modification example 1)
As described above, various types of device can be considered as the characteristic detection device, but the configuration diagram of FIG. 6 is another embodiment capable of accurately detecting the continuity between the polishing tool 40 and the object to be polished. It is a figure which showed the characteristic detection apparatus 2'of. Since this characteristic detection device 2'has the same parts as the above-mentioned characteristic detection device 2, the same parts are given the same number and different parts are given different numbers in FIG. The connection portions 27, 28, the switch 20, and the ON-OFF circuit 21 of the characteristic detection device 2'are the same as those of the characteristic detection device 2 described above.

特性検出装置2’はコンデンサと抵抗を用いたブリッジ回路が形成されており、ブリッジ回路の並列回路間の橋渡しする箇所の電圧又は電流の強度が大きく変化したタイミングを検出することで、表面研磨用治具1の接続部13,14の間のキャパシタンスが大きく変化したタイミング(スイッチSWがOFFからONになったタイミング)を検出する。接続部13,14の間のコンデンサ、すなわち図3のコンデンサC1、スイッチSW及びコンデンサC2からなるコンデンサをコンデンサCjとすると、ブリッジ回路は、コンデンサCj及び抵抗R1とコンデンサC3及び抵抗R2との並列回路から構成される。交流電圧出力回路34は、ON−OFF回路21から作動信号が入力すると設定された強度の交流電圧を該並列回路に出力する。 In the characteristic detection device 2', a bridge circuit using a capacitor and a resistor is formed, and by detecting the timing when the voltage or current intensity of the bridge between the parallel circuits of the bridge circuit changes significantly, it is used for surface polishing. The timing at which the capacitance between the connection portions 13 and 14 of the jig 1 changes significantly (the timing at which the switch SW is turned from OFF to ON) is detected. Assuming that the capacitor between the connection portions 13 and 14, that is, the capacitor composed of the capacitor C1, the switch SW and the capacitor C2 in FIG. 3 is the capacitor Cj, the bridge circuit is a parallel circuit of the capacitor Cj and the resistor R1 and the capacitor C3 and the resistor R2. Consists of. The AC voltage output circuit 34 outputs an AC voltage of a set intensity to the parallel circuit when an operation signal is input from the ON-OFF circuit 21.

コンデンサC3のキャパシタンスはかなり小さな値にされ、抵抗R1と抵抗R2の抵抗は等しく、交流電流に対するコンデンサC3の抵抗より十分小さい値にされている。研磨用工具40と研磨対象物が非導通状態(スイッチSWがOFF状態)であれば、コンデンサCjのキャパシタンスは略0であり、交流電流に対する抵抗はかなり大きな値になるので、交流電圧が印加されたとき並列回路間の橋渡し箇所に十分大きな抵抗を入れた場合、橋渡し箇所の両端での電圧は0に近い強度になる。また、該橋渡し箇所をそのまま導通させた場合、橋渡し箇所に流れる電流は0に近い強度になる。そして、研磨用工具40と研磨対象物が導通状態(スイッチSWがON状態)になると、コンデンサCjの交流電流に対する抵抗はコンデンサC3の交流電流に対する抵抗より十分小さい値になるので、並列回路間の橋渡し箇所における上述した電圧又は電流は大きな強度になる。よって、研磨用工具40と研磨対象物が導通状態のときにおける並列回路間の橋渡し箇所の電圧又は電流において、想定される最も低い電圧又は電流強度より小さい適切な強度の電圧又は電流を設定値として定め、並列回路間の橋渡し箇所の電圧又は電流がこの設定値より大きくなったことを検出すれば、研磨用工具40とボルトBtの素材の接触を検出することができる。検波回路35以降の回路および機器はこの検出のための回路及び機器である。 The capacitance of the capacitor C3 is set to a considerably small value, and the resistances of the resistors R1 and R2 are equal to each other, which is sufficiently smaller than the resistance of the capacitor C3 to the alternating current. If the polishing tool 40 and the object to be polished are in a non-conducting state (switch SW is in the OFF state), the capacitance of the capacitor Cj is approximately 0, and the resistance to the AC current becomes a considerably large value, so that an AC voltage is applied. When a sufficiently large resistor is inserted at the bridge between the parallel circuits, the voltage across the bridge becomes a strength close to zero. Further, when the bridging portion is made conductive as it is, the current flowing through the bridging portion has a strength close to zero. When the polishing tool 40 and the object to be polished are in a conductive state (switch SW is ON), the resistance of the capacitor Cj to the alternating current becomes a value sufficiently smaller than the resistance of the capacitor C3 to the alternating current, so that the distance between the parallel circuits is sufficiently smaller. The above-mentioned voltage or current at the bridging point has a large intensity. Therefore, in the voltage or current of the bridge between the parallel circuits when the polishing tool 40 and the object to be polished are in a conductive state, a voltage or current having an appropriate intensity smaller than the lowest expected voltage or current intensity is set as a set value. If it is determined that the voltage or current at the bridge between the parallel circuits becomes larger than this set value, the contact between the polishing tool 40 and the material of the bolt Bt can be detected. The circuits and devices after the detection circuit 35 are circuits and devices for this detection.

検波回路35は、内部に十分大きな抵抗を有し、並列回路間の橋渡し箇所の両端での電圧におけるエンベロープ(包絡線)に相当する信号を出力する。言い換えると、ブリッジ回路には交流電圧が印加されるため、橋渡し箇所の両端での電圧は時間軸に対して振動する電圧となり、検波回路35はこの振動の振幅強度に相当する強度の信号を出力する。なお、検波回路35は、これに替えて、橋渡し箇所をそのまま導通させ、橋渡し箇所に流れる電流におけるエンベロープ(包絡線)に相当する信号を出力するようにしてもよい。比較回路37は特性検出装置2の比較回路32と同じであり、入力した信号の強度が設定された強度以下では信号を出力せず、入力した信号の強度が設定された強度より大きくなると、信号をON−OFF回路21とブザー33に出力する。ON−OFF回路21は比較回路37から信号が入力すると停止信号を出力し、交流電圧出力回路34は電圧出力を停止するので検波回路35が出力する信号の強度は0になる。よって、特性検出装置2’においても比較回路37が信号を出力するのは一瞬であり、1回のパルス信号である。ブザー33は特性検出装置2のものと同じであり、作業者はブザー音を聞くことで、研磨用工具40とボルトBtの素材が接触状態になったことを知ることができる。 The detection circuit 35 has a sufficiently large resistance inside, and outputs a signal corresponding to an envelope (envelope) in the voltage at both ends of the bridge between the parallel circuits. In other words, since an AC voltage is applied to the bridge circuit, the voltage across the bridge is a voltage that vibrates with respect to the time axis, and the detection circuit 35 outputs a signal with a strength corresponding to the amplitude intensity of this vibration. To do. Instead of this, the detection circuit 35 may conduct the bridging portion as it is and output a signal corresponding to an envelope (envelope) in the current flowing through the bridging portion. The comparison circuit 37 is the same as the comparison circuit 32 of the characteristic detection device 2, and does not output a signal when the strength of the input signal is less than the set strength, and when the strength of the input signal becomes greater than the set strength, the signal is signaled. Is output to the ON-OFF circuit 21 and the buzzer 33. The ON-OFF circuit 21 outputs a stop signal when a signal is input from the comparison circuit 37, and the AC voltage output circuit 34 stops the voltage output, so that the strength of the signal output by the detection circuit 35 becomes zero. Therefore, even in the characteristic detection device 2', the comparison circuit 37 outputs a signal for a moment, and is a single pulse signal. The buzzer 33 is the same as that of the characteristic detection device 2, and the operator can know that the polishing tool 40 and the material of the bolt Bt are in contact with each other by listening to the buzzer sound.

上記説明からも理解できるように、上記実施形態の特性検出装置2’においては、第1電極部の円筒状電極11と貫通孔12aに挿入した研磨用工具40から形成されるコンデンサと第2電極部の平板電極15と研磨対象物から形成されるコンデンサとを回路内のコンデンサの1つとして、交流電流において抵抗を有するコンデンサC3、抵抗R1、抵抗R2及び交流電圧出力回路34から構成されるブリッジ回路と、ブリッジ回路の交流電圧出力回路34が交流電圧を印加したとき、ブリッジ回路の並列回路間を橋渡しする箇所の電圧又は電流の強度を検出する検波回路35とを備えている。 As can be understood from the above description, in the characteristic detection device 2'of the above embodiment, the capacitor and the second electrode formed from the cylindrical electrode 11 of the first electrode portion and the polishing tool 40 inserted into the through hole 12a. A bridge composed of a capacitor C3 having a resistance in an alternating current, a resistor R1, a resistor R2, and an alternating current voltage output circuit 34, with the flat plate electrode 15 and the capacitor formed from the object to be polished as one of the capacitors in the circuit. It includes a circuit and a detection circuit 35 that detects the strength of a voltage or current that bridges between parallel circuits of the bridge circuit when the AC voltage output circuit 34 of the bridge circuit applies an AC voltage.

これによれば、研磨対象物のアースの有無によらず、研磨用工具40と研磨対象物との間の導通状態(スイッチSWのON、OFF)により、ブリッジ回路の並列回路間を橋渡しする箇所の電圧又は電流の強度は大きく変動する。よって、検波回路35により電圧又は電流の強度を検出し、検出した強度を予め設定した強度と比較するようにすれば、精度よく研磨用工具40と研磨対象物との導通を検出することができる。 According to this, regardless of whether the polishing object is grounded or not, the location where the parallel circuit of the bridge circuit is bridged by the conduction state (switch SW ON / OFF) between the polishing tool 40 and the polishing object. The intensity of the voltage or current of is greatly fluctuated. Therefore, if the voltage or current intensity is detected by the detection circuit 35 and the detected intensity is compared with the preset intensity, the continuity between the polishing tool 40 and the polishing object can be detected accurately. ..

(変形例2)
上述した特性検出装置2及び特性検出装置2’による表面研磨は、ブザー33が発するブザー音により、作業者が研磨用工具40とボルトBtの素材が接触状態になったことを知り、手動で表面研磨装置4の作動を停止するが、これに替えて、研磨用工具40とボルトBtの素材が接触状態になったとき、自動で表面研磨装置4の作動を停止するようにしてもよい。図7に示す表面研磨装置4は、特性検出装置2からの信号を入力できるようにし、研磨用工具40とボルトBtの素材が接触状態になったとき、特性検出装置2から入力した信号により表面研磨装置4の作動を停止するようにしている。なお、図7は特性検出装置2を用いているが、特性検出装置2’でも説明は同じである。
(Modification 2)
In the surface polishing by the characteristic detection device 2 and the characteristic detection device 2'described above, the operator knows that the polishing tool 40 and the material of the bolt Bt are in contact with each other due to the buzzer sound generated by the buzzer 33, and the surface is manually polished. The operation of the polishing device 4 is stopped, but instead of this, the operation of the surface polishing device 4 may be automatically stopped when the polishing tool 40 and the material of the bolt Bt come into contact with each other. The surface polishing device 4 shown in FIG. 7 enables the signal from the characteristic detection device 2 to be input, and when the polishing tool 40 and the material of the bolt Bt are in contact with each other, the surface is subjected to the signal input from the characteristic detection device 2. The operation of the polishing device 4 is stopped. Although the characteristic detection device 2 is used in FIG. 7, the description is the same for the characteristic detection device 2'.

図7に示す特性検出装置2は、比較回路32の信号を出力する端子が設けられており、この端子と表面研磨装置4との間をケーブルで接続することで、比較回路32の信号をブザー33に対して出力する替わりに表面研磨装置4に出力するようになっている。表面研磨装置4にも、特性検出装置2からの信号を入力するための端子が用意されており、作業者は、表面研磨用治具1を研磨対象物にセットした後、表面研磨用治具1と特性検出装置2との間をケーブルで接続し、さらに特性検出装置2と表面研磨装置4との間をケーブルで接続する。 The characteristic detection device 2 shown in FIG. 7 is provided with a terminal for outputting the signal of the comparison circuit 32. By connecting this terminal and the surface polishing device 4 with a cable, the signal of the comparison circuit 32 is buzzed. Instead of outputting to 33, it is output to the surface polishing device 4. The surface polishing device 4 also has a terminal for inputting a signal from the characteristic detection device 2, and the operator sets the surface polishing jig 1 on the object to be polished and then sets the surface polishing jig 1. 1 and the characteristic detection device 2 are connected by a cable, and further, the characteristic detection device 2 and the surface polishing device 4 are connected by a cable.

図7に示す表面研磨装置4は、スイッチ49は押されるごとに信号をON−OFF回路47に出力し、ON−OFF回路47は信号が入力するごとに、作動信号と停止信号を順に出力する。また、ON−OFF回路47は特性検出装置2の比較回路32からの信号を入力すると停止信号を出力する。ON−OFF回路47の作動信号と停止信号は、回転駆動回路48に入力し、回転駆動回路48は作動信号が入力すると研磨用工具40を回転駆動するための駆動信号を出力し、停止信号が入力すると該駆動信号の出力を停止する。これにより、スイッチ49を押すと研磨用工具40が回転駆動し、上述したように研磨用工具40とボルトBtの素材が接触状態になり、比較回路32が信号を出力すると研磨用工具40の回転駆動は停止する。 The surface polishing device 4 shown in FIG. 7 outputs a signal to the ON-OFF circuit 47 each time the switch 49 is pressed, and the ON-OFF circuit 47 outputs an operation signal and a stop signal in order each time the signal is input. .. Further, the ON-OFF circuit 47 outputs a stop signal when a signal from the comparison circuit 32 of the characteristic detection device 2 is input. The operation signal and stop signal of the ON-OFF circuit 47 are input to the rotation drive circuit 48, and when the operation signal is input, the rotation drive circuit 48 outputs a drive signal for rotationally driving the polishing tool 40, and the stop signal is generated. When input, the output of the drive signal is stopped. As a result, when the switch 49 is pressed, the polishing tool 40 is rotationally driven, the polishing tool 40 and the material of the bolt Bt are in contact with each other as described above, and when the comparison circuit 32 outputs a signal, the polishing tool 40 is rotated. The drive stops.

上記説明からも理解できるように、上記実施形態の表面研磨装置4は特性検出装置2が出力する信号を入力可能にし、第1電極部の貫通孔12aに挿入する研磨用工具40を回転駆動させる回転駆動回路48と、特性検出装置2から入力した特性に基づく信号により、回転駆動回路48の作動と停止を制御するON−OFF回路47とを備えている。 As can be understood from the above description, the surface polishing device 4 of the above embodiment makes it possible to input a signal output by the characteristic detection device 2 and rotationally drives the polishing tool 40 to be inserted into the through hole 12a of the first electrode portion. It includes a rotation drive circuit 48 and an ON-OFF circuit 47 that controls the operation and stop of the rotation drive circuit 48 by a signal based on the characteristics input from the characteristic detection device 2.

これによれば、特性検出装置2が出力する特性に基づく信号により、ON−OFF回路47が研磨用工具40と研磨対象物との導通を検出して回転駆動回路48を停止させれば、作業者は表面研磨装置4を作動させて研磨対象物を研磨することに集中すればよいので、研磨作業の効率がよくなる。 According to this, if the ON-OFF circuit 47 detects the continuity between the polishing tool 40 and the object to be polished by the signal based on the characteristic output by the characteristic detection device 2, and stops the rotation drive circuit 48, the work is performed. Since the person only has to operate the surface polishing device 4 to concentrate on polishing the object to be polished, the efficiency of the polishing work is improved.

なお、本発明の実施にあたっては、上記実施形態および変形例に限定されるものではなく、本発明の目的を逸脱しない限りにおいて種々の変更が可能である。 The implementation of the present invention is not limited to the above-described embodiments and modifications, and various modifications can be made as long as the object of the present invention is not deviated.

上記実施形態の変形例である、特性検出装置2からの信号により表面研磨装置4の作動を自動停止させる形態においては、研磨用工具40と研磨対象物とが導通したタイミングで比較回路32から信号が出力されるようにした。しかし、第1電極部の円筒状電極11、研磨用工具40、研磨対象物及び第2電極部の平板電極15の順で成り立つ回路の特性に基づく信号であれば、どのような信号を特性検出装置2から表面研磨装置4へ出力してもよい。例えば、ローパスフィルタ31が出力する信号を表面研磨装置4へ出力し、表面研磨装置4内に上記実施形態の比較回路32と同じ回路を設けて、該回路からON−OFF回路47に信号を出力するようにしてもよい。 In the embodiment in which the operation of the surface polishing device 4 is automatically stopped by a signal from the characteristic detection device 2, which is a modification of the above embodiment, a signal is sent from the comparison circuit 32 at the timing when the polishing tool 40 and the object to be polished are electrically connected. Is output. However, any signal is detected as long as it is a signal based on the characteristics of a circuit consisting of the cylindrical electrode 11 of the first electrode portion, the polishing tool 40, the object to be polished, and the flat plate electrode 15 of the second electrode portion. The device 2 may output to the surface polishing device 4. For example, the signal output by the low-pass filter 31 is output to the surface polishing device 4, the same circuit as the comparison circuit 32 of the above embodiment is provided in the surface polishing device 4, and the signal is output from the circuit to the ON-OFF circuit 47. You may try to do it.

また、上記実施形態の変形例である、特性検出装置2からの信号により表面研磨装置4の作動を自動停止させる形態においては、特性検出装置2と表面研磨装置4との間をケーブルで接続するようにしたが、これに替えて、特性検出装置2自体を表面研磨装置4の内部に設けるようにしてもよい。これによれば、表面研磨作業を行う前に表面研磨用治具1と表面研磨装置4との間のみを接続すればよいので、作業効率がよくなる。 Further, in the embodiment in which the operation of the surface polishing device 4 is automatically stopped by a signal from the characteristic detecting device 2, which is a modification of the above embodiment, the characteristic detecting device 2 and the surface polishing device 4 are connected by a cable. However, instead of this, the characteristic detection device 2 itself may be provided inside the surface polishing device 4. According to this, since it is only necessary to connect between the surface polishing jig 1 and the surface polishing device 4 before performing the surface polishing work, the work efficiency is improved.

また、上記実施形態及び変形例における特性検出装置2,2’では、ブザー33のブザー音により、作業者が研磨用工具40とボルトBtの素材の接触を知るようにした。しかし、作業者が研磨用工具40とボルトBtの素材の接触を知ることができれば、ブザー音以外の手段を用いてもよい。例えば、ランプの発光によってもよいし、メータの指針によってもよい。また、いくつかの手段を組み合わせてもよい。 Further, in the characteristic detection devices 2 and 2'in the above-described embodiment and the modified example, the operator is made to know the contact between the polishing tool 40 and the material of the bolt Bt by the buzzer sound of the buzzer 33. However, if the operator can know the contact between the polishing tool 40 and the material of the bolt Bt, a means other than the buzzer sound may be used. For example, it may be based on the light emission of a lamp or the pointer of a meter. Moreover, you may combine some means.

また、上記実施形態における特性検出装置2では、第1電極部の円筒状電極11の電位(アースと円筒状電極11間の電圧)を検出するようにしたが、研磨用工具40とボルトBtの素材が接触状態になることで変化する特性であれば、別の特性を検出するようにしてもよい。例えば、第1電極部の円筒状電極11とアース間を抵抗を介して接続し、円筒状電極11とアース間で流れる電流を検出するようにしてもよい。 Further, in the characteristic detection device 2 in the above embodiment, the potential (voltage between the ground and the cylindrical electrode 11) of the cylindrical electrode 11 of the first electrode portion is detected, but the polishing tool 40 and the bolt Bt are used. If the property changes when the material comes into contact with the material, another property may be detected. For example, the cylindrical electrode 11 of the first electrode portion and the ground may be connected via a resistor to detect the current flowing between the cylindrical electrode 11 and the ground.

また、上記実施形態における特性検出装置2では、スイッチドキャパシタの回路を用いて研磨用工具40とボルトBtの素材が接触状態になることで、第1電極部の円筒状電極11の電位(アースと円筒状電極11間の電圧)が大きく変化することを検出するようにした。また、変形例における特性検出装置2’では、ブリッジ回路を用いて研磨用工具40とボルトBtの素材が接触状態になることで、ブリッジ回路の並列回路間を橋渡しする箇所の電圧又は電流が大きく変化することを検出するようにした。しかし、研磨対象物の場所が限定されており、特性検出装置を持ち運ぶ頻度が少なければ、上記実施形態及び変形例で示した装置以外の特性検出装置を用いてもよい。例えば、接続部13,14間に交流電圧を印加したときに、接続部13,14間で流れる電流の強度を検出する方法の装置を用いてもよい。 Further, in the characteristic detection device 2 in the above embodiment, the potential (earth) of the cylindrical electrode 11 of the first electrode portion is brought into contact with the polishing tool 40 and the material of the bolt Bt by using the circuit of the switched capacitor. And the voltage between the cylindrical electrodes 11) are detected to change significantly. Further, in the characteristic detection device 2'in the modified example, the polishing tool 40 and the material of the bolt Bt are brought into contact with each other by using the bridge circuit, so that the voltage or current at the portion bridging between the parallel circuits of the bridge circuit becomes large. Changed to detect change. However, if the location of the object to be polished is limited and the frequency of carrying the characteristic detection device is low, a characteristic detection device other than the device shown in the above-described embodiment and modification may be used. For example, a device of a method of detecting the intensity of the current flowing between the connecting portions 13 and 14 when an AC voltage is applied between the connecting portions 13 and 14 may be used.

また、上記実施形態における表面研磨用治具1は、ボルトBtの頭部に嵌合する凹部10aを円柱形状にしたが、ボルトBtの頭部に嵌合するならば、円柱形状に替えて角柱形状にしてもよい。また、上記実施形態における表面研磨用治具1は、凹部10aを設けることで、ボルトBtの頭部を研磨することも平板であるプレートPtを研磨することもできるようにしたが、研磨対象物が平板に限定されているならば、凹部10aは設けないようにしてもよい。 Further, in the surface polishing jig 1 in the above embodiment, the recess 10a that fits into the head of the bolt Bt has a cylindrical shape, but if it fits into the head of the bolt Bt, it is replaced with a prism. It may be shaped. Further, the surface polishing jig 1 in the above embodiment is provided with the recess 10a so that the head of the bolt Bt can be polished and the plate Pt, which is a flat plate, can be polished. If is limited to a flat plate, the recess 10a may not be provided.

また、上記実施形態における表面研磨用治具1は、第2電極部の平板電極15は全体が磁石であるようにした。しかし、表面研磨用治具1を研磨対象物にセットし、研磨用工具40を貫通孔12aに挿入して表面研磨を行ったとき、磁石の研磨対象物に対する吸着力が表面研磨用治具1が動くことのないものであれば、平板電極15の一部分が磁石であるようにしてもよいし、平板電極15の近傍に磁石を設けてもよい。なお、特許請求の範囲に記載されている磁石の部分を有する第2電極部とは、平板電極15の近傍に磁石を設けている場合も含むものとする。 Further, in the surface polishing jig 1 in the above embodiment, the flat plate electrode 15 of the second electrode portion is entirely a magnet. However, when the surface polishing jig 1 is set on the object to be polished and the polishing tool 40 is inserted into the through hole 12a to perform surface polishing, the attractive force of the magnet to the object to be polished is increased by the surface polishing jig 1. As long as it does not move, a part of the flat plate electrode 15 may be a magnet, or a magnet may be provided in the vicinity of the flat plate electrode 15. The second electrode portion having the magnet portion described in the claims includes the case where the magnet is provided in the vicinity of the flat plate electrode 15.

また、上記実施形態における表面研磨用治具1は、本体部10を円柱形状にしたが、研磨対象物にセットし、研磨用工具40を貫通孔12aに挿入したとき、第1電極部の円筒状電極11、研磨用工具40、研磨対象物及び第2電極部の平板電極15の順で成り立つ回路ができるならば、形状はどのような形状であってもよい。例えば直方体形状でもよいし、六角柱形状でもよい。 Further, in the surface polishing jig 1 in the above embodiment, the main body 10 is formed into a cylindrical shape, but when the main body 10 is set in the object to be polished and the polishing tool 40 is inserted into the through hole 12a, the cylinder of the first electrode portion is formed. The shape may be any shape as long as a circuit can be formed in which the shape electrode 11, the polishing tool 40, the object to be polished, and the flat plate electrode 15 of the second electrode portion are formed in this order. For example, it may be a rectangular parallelepiped shape or a hexagonal prism shape.

また、上記実施形態における表面研磨用治具1は、本体部10の材質を樹脂(プラスチック)にしたが、絶縁性が高く軽量で運搬が容易であれば、樹脂以外の材質を用いたものでもよい。例えば、ゴムや陶器を用いたものでもよい。 Further, in the surface polishing jig 1 in the above embodiment, the material of the main body 10 is made of resin (plastic), but if the material is high in insulation, lightweight and easy to carry, a material other than resin may be used. Good. For example, rubber or earthenware may be used.

1…表面研磨用治具、2,2’…特性検出装置、4…表面研磨装置、10…本体部、10a…凹部、10b…底面、10c,10d…貫通孔、10e…側面、10f…貫通孔、11…円筒状電極、12…円筒状絶縁体、12a…貫通孔、13,14…接続部、13a,14a…差込部、15…平板電極、16,17…導線、18,19…シール材、25,26…スイッチ回路、27,28…接続部、29…アース端子、40…研磨用工具、41…固定部、41a…フランジ、42…ねじ、43…絶縁体、44…フランジ部、45…回転軸、Bt…ボルト、Pt…プレート 1 ... Surface polishing jig, 2, 2'... Characteristic detection device, 4 ... Surface polishing device, 10 ... Main body, 10a ... Recess, 10b ... Bottom surface, 10c, 10d ... Through hole, 10e ... Side surface, 10f ... Penetration Holes, 11 ... Cylindrical electrodes, 12 ... Cylindrical insulators, 12a ... Through holes, 13, 14 ... Connections, 13a, 14a ... Inserts, 15 ... Flat plate electrodes, 16, 17 ... Leads, 18, 19 ... Sealing material, 25, 26 ... Switch circuit, 27, 28 ... Connection part, 29 ... Earth terminal, 40 ... Polishing tool, 41 ... Fixed part, 41a ... Flange, 42 ... Screw, 43 ... Insulator, 44 ... Flange part , 45 ... Rotating shaft, Bt ... Bolt, Pt ... Plate

Claims (5)

円筒状の電極の内側に円筒状の絶縁体を配置し、前記円筒状の絶縁体の内側は研磨用工具を通過可能な貫通孔である第1電極部と、
磁石の部分を有し、絶縁層がある研磨対象物に電極を接触させて固定させる第2電極部と、
前記第1電極部の貫通孔に前記研磨用工具を挿入したとき、前記第1電極部の電極、前記研磨用工具、前記研磨対象物及び前記第2電極部の電極の順で成り立つ回路の特性を検出する特性検出装置を、前記第1電極部の電極と前記第2電極部の電極にそれぞれ接続可能にする2つの接続部とを備えることを特徴とする表面研磨用治具。
A cylindrical insulator is arranged inside the cylindrical electrode, and the inside of the cylindrical insulator is a first electrode portion which is a through hole through which a polishing tool can pass.
A second electrode part that has a magnet part and has an insulating layer to bring the electrode into contact with the object to be polished and fix it.
When the polishing tool is inserted into the through hole of the first electrode portion, the characteristics of the circuit consisting of the electrode of the first electrode portion, the polishing tool, the object to be polished, and the electrode of the second electrode portion in this order. A surface polishing jig, characterized in that the characteristic detection device for detecting the above is provided with two connecting portions that can be connected to the electrode of the first electrode portion and the electrode of the second electrode portion, respectively.
請求項1に記載の表面研磨用治具において、
前記第1電極部の貫通孔の中心軸を略中心軸にした円柱形状又は角柱形状の凹部であって、前記研磨対象物がプレートに締め込まれたボルトの頭部である場合、前記頭部と嵌合する大きさにされている凹部を備えることを特徴とする表面研磨用治具。
In the surface polishing jig according to claim 1,
When the concave portion has a cylindrical shape or a prismatic shape with the central axis of the through hole of the first electrode portion as a substantially central axis and the object to be polished is the head of a bolt tightened to the plate, the head. A surface polishing jig characterized by having a recess sized to fit with.
請求項1又は請求項2に記載の表面研磨用治具の接続部に接続する特性検出装置において、
前記第1電極部の電極と前記貫通孔に挿入した研磨用工具から形成されるコンデンサと、前記第2電極部の電極と研磨対象物から形成されるコンデンサとに、充電と放電を設定された周期で繰り返し行う充放電回路であって、充電の際、アースと前記第1電極部の電極との間及びアースと前記第2電極部の電極との間で等しい量の電荷が移動するようにされている充放電回路と、
前記充放電回路により充電と放電が繰り返し行われているとき、前記充放電回路の所定の箇所における電圧又は電流の強度を検出する強度検出回路とを備えることを特徴とする特性検出装置。
In the characteristic detection device connected to the connection portion of the surface polishing jig according to claim 1 or 2.
Charging and discharging were set for the capacitor formed from the electrode of the first electrode portion and the polishing tool inserted into the through hole, and the capacitor formed from the electrode of the second electrode portion and the object to be polished. It is a charge / discharge circuit that repeats in a cycle so that an equal amount of charge moves between the ground and the electrode of the first electrode portion and between the ground and the electrode of the second electrode portion during charging. Charge / discharge circuit and
A characteristic detection device including a strength detection circuit that detects the intensity of voltage or current at a predetermined position of the charge / discharge circuit when charging and discharging are repeatedly performed by the charge / discharge circuit.
請求項1又は請求項2に記載の表面研磨用治具の接続部に接続する特性検出装置において、
前記第1電極部の電極と前記貫通孔に挿入した研磨用工具から形成されるコンデンサと前記第2電極部の電極と研磨対象物から形成されるコンデンサとを回路内のコンデンサの1つとして、交流電流において抵抗を有する素子及び交流電源から構成されるブリッジ回路と、
前記ブリッジ回路の交流電源が交流電圧を印加したとき、前記ブリッジ回路の並列回路間を橋渡しする箇所の電圧又は電流の強度を検出する強度検出回路とを備えることを特徴とする特性検出装置。
In the characteristic detection device connected to the connection portion of the surface polishing jig according to claim 1 or 2.
A capacitor formed from the electrode of the first electrode portion and the polishing tool inserted into the through hole, and a capacitor formed from the electrode of the second electrode portion and the object to be polished are used as one of the capacitors in the circuit. A bridge circuit consisting of an element having resistance in AC current and an AC power supply,
A characteristic detection device including a strength detection circuit that detects the strength of a voltage or current at a portion bridging between parallel circuits of the bridge circuit when the AC power supply of the bridge circuit applies an AC voltage.
請求項1又は請求項2に記載の表面研磨用治具の接続部に接続する特性検出装置が出力する前記特性に基づく信号を入力可能である表面研磨装置において、
前記第1電極部の貫通孔に挿入する研磨用工具を回転駆動させる駆動手段と、
前記特性検出装置から入力した特性に基づく信号により、前記駆動手段の作動と停止を制御する制御手段とを備えることを特徴とする表面研磨装置。
In a surface polishing apparatus capable of inputting a signal based on the characteristics output by the characteristic detecting apparatus connected to the connection portion of the surface polishing jig according to claim 1 or 2.
A driving means for rotationally driving the polishing tool to be inserted into the through hole of the first electrode portion, and
A surface polishing apparatus comprising: a control means for controlling operation and stop of the drive means by a signal based on a characteristic input from the characteristic detection device.
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