JP6840590B2 - Calibration system, calibration jig, calibration method, and calibration program - Google Patents

Description

The present invention relates to a calibration system, a calibration jig, a calibration method, and a calibration program for calibrating a coordinate measuring machine.

Conventionally, a three-dimensional measuring machine has been known which includes a non-contact probe having an irradiation unit and an imaging unit that irradiate light to measure the shape of a work in a non-contact manner and performs three-dimensional shape measurement using a photocutting method. (See, for example, Patent Document 1).

Japanese Unexamined Patent Publication No. 2009-12206

In the three-dimensional shape measurement using the optical cutting method, since the positions of the irradiation unit and the imaging unit are different, it is necessary to convert the coordinate system corresponding to the captured image into a coordinate system based on the irradiation position. Therefore, in the three-dimensional shape measurement using the optical cutting method, in order to accurately convert the coordinate system, the calibration work of associating the coordinate position in the captured image captured by the imaging unit with the coordinate position based on the irradiation position. Need to be done.

In the conventional calibration work, the non-contact probe is moved to a plurality of positions, a linear laser beam is irradiated at each of the plurality of positions to image the calibration ball, and the calibration ball reflected in each of the plurality of captured images. The correspondence between the coordinates corresponding to the emission line and the coordinates indicating the irradiation position of the laser beam on the calibration sphere when the irradiation position is used as a reference is specified. Then, based on the correspondence specified in each of the plurality of captured images, when the coordinates of the plurality of captured images are transformed, the parameters of the transformation matrix such that the converted emission line constitutes one sphere are set. Identify.

However, in the conventional calibration work using a calibration ball, since the calibration ball is imaged, a systematic error occurs at a place where the inclination of the irradiated laser beam with respect to the traveling direction is large, and the position of the calibration ball measured from the captured image is determined. There is a problem that the correspondence between the coordinates of the captured image captured by the probe and the coordinates with respect to the irradiation unit cannot be accurately specified due to a deviation of an amount that cannot be ignored in the calibration.

Therefore, the present invention has been made in view of these points, and is a calibration system capable of accurately specifying the correspondence between the coordinates of the captured image captured by the probe and the coordinates with reference to the irradiation unit. It is an object of the present invention to provide a calibration jig, a calibration method, and a calibration program.

The calibration system according to the first aspect of the present invention is a calibration system including a three-dimensional measuring machine, a calibration jig, and a computer, and the three-dimensional measuring machine generates a first captured image. It has a probe including a first imaging unit and an irradiation unit that irradiates a laser beam, and the calibration jig is provided so as to overlap the second imaging unit that generates a second imaging image and the second imaging unit. The computer has an index for specifying a position in the second imaging unit, a transmission plate that reflects a part of the incident light and allows the other part to pass through, and the computer controls the irradiation unit. The irradiation control unit that irradiates the transmission plate with the laser beam and the first imaging image generated by the first imaging unit imaging the transmission plate while the transmission plate is irradiated with the laser beam. The first acquisition unit to be acquired, the second acquisition unit that acquires the second captured image generated by the second imaging unit while the transmission plate is irradiated with the laser beam, and the first captured image are captured. Based on the position of the laser beam and the position of the index, the position of the laser beam reflected in the second captured image, and the position of the index, the coordinates corresponding to the first captured image and the second captured image It has a specific part that specifies the relationship with the corresponding coordinates.

The transmission plate may have a plurality of the indexes provided at predetermined intervals.
The second imaging unit and the transmission plate have a rectangular shape, the transmission plate has a plurality of slit-shaped indexes extending in the lateral direction, and the irradiation unit irradiates a linear laser beam. The irradiation control unit controls the irradiation unit to irradiate the linear laser light in the longitudinal direction of the transmission plate, and the specific unit corresponds to the linear laser light reflected in the first captured image. The relationship between the coordinates of the plurality of positions to be used and the plurality of coordinates corresponding to the second captured image may be specified.

The computer further includes a movement control unit that moves the probe in the normal direction of the calibration jig, and the movement control unit moves the probe to each of a plurality of positions in the normal direction of the calibration jig. The irradiation control unit moves the irradiation control unit to irradiate the irradiation unit with a laser beam at each of the plurality of positions, and the acquisition unit emits the first captured image and the second captured image at each of the plurality of positions. The specific unit may specify the relationship between the coordinates corresponding to the first captured image and the coordinates corresponding to the second captured image at each of the plurality of positions.

The reflectance and transmittance of the incident light in the index may be different from the reflectance and transmittance of the incident light in other regions of the transmission plate.
The number of pixels of the second imaging unit may be larger than the number of pixels of the first imaging unit.

The calibration jig according to the second aspect of the present invention is a calibration jig used for calibrating a three-dimensional measuring machine having a probe including a first imaging unit for generating a first image and an irradiation unit for irradiating a laser beam. It is a jig, which is provided so as to overlap the second imaging unit and the second imaging unit that generates the second image, and has an index for specifying the position in the second imaging unit, and is one of the incident light. It has a transmission plate that reflects the portion and allows the other portion to pass through.

The calibration method according to the third aspect of the present invention is a method of calibrating a three-dimensional measuring machine using a calibration jig executed by a computer, and the three-dimensional measuring machine generates a first captured image. It has a probe including one imaging unit and an irradiation unit that irradiates a laser beam, and the calibration jig is provided so as to overlap the second imaging unit that generates a second imaging image and the second imaging unit. It has an index for specifying the position in the second imaging unit, has a transmission plate that reflects a part of the incident light and allows the other part to pass through, and controls the irradiation unit to the transmission plate. The step of irradiating the laser beam, the first image captured by the first imaging unit by imaging the transmission plate while the transmission plate is irradiated with the laser beam, and the laser beam on the transmission plate. The step of acquiring the second captured image generated by the second imaging unit in a state of being irradiated with, the position of the laser beam and the position of the index reflected in the first captured image, and the second captured image. It has a step of specifying the relationship between the coordinates corresponding to the first captured image and the coordinates corresponding to the second captured image based on the position of the laser beam and the position of the index reflected in the image.

The calibration program according to the fourth aspect of the present invention is a calibration program for a three-dimensional measuring machine using a calibration jig, and the three-dimensional measuring machine is a first imaging unit that generates a first captured image. The calibration jig has a probe including an irradiation unit for irradiating a laser beam and a second imaging unit, and the calibration jig is provided so as to overlap the second imaging unit and the second imaging unit. It has an index for specifying the position in the unit, has a transmission plate that reflects a part of the incident light and allows the other part to pass through, and controls the irradiation unit to the transmission plate. An irradiation control unit that irradiates a laser beam, the first image captured image generated by the first imaging unit imaging the transmission plate while the transmission plate is irradiated with the laser light, and the laser on the transmission plate. The acquisition unit that acquires the second captured image generated by the second imaging unit in a state of being irradiated with light, the position of the laser beam and the position of the index that appear in the first captured image, and the second image. It functions as a specific unit that specifies the relationship between the coordinates corresponding to the first captured image and the coordinates corresponding to the second captured image based on the position of the laser beam and the position of the index reflected in the captured image. ..

According to the present invention, there is an effect that the correspondence between the coordinates of the captured image captured by the probe and the coordinates with respect to the irradiation unit can be accurately specified.

It is a figure which shows the structure of the calibration system which concerns on this embodiment. It is a figure which shows the structure of the calibration jig which concerns on this embodiment. It is a figure which shows the structure of the computer which concerns on this embodiment. It is a flowchart which shows the flow of the process which concerns on the calibration of the coordinate measuring machine which concerns on this embodiment. It is a figure which shows an example of the 1st captured image and the 2nd captured image which concerns on this embodiment. It is a figure which shows the change of the intensity of the emission line of the sheet light in the u coordinate (ui) which concerns on this embodiment.

[Configuration of calibration system S]
FIG. 1 is a diagram showing a configuration of a calibration system S according to the present embodiment. The calibration system S includes a three-dimensional measuring machine 1, a calibration jig 2, and a computer 3, and is a system used for calibrating the three-dimensional measuring machine 1.

The coordinate measuring machine 1 includes a probe 11 that can move in three axial directions. The probe 11 includes an irradiation unit 111 that irradiates a linear laser beam (hereinafter referred to as sheet light) and an imaging unit 112 that generates a first captured image.

The calibration jig 2 has an image sensor as a second imaging unit that generates a second captured image, and a transmission plate. The transmissive plate has an index for specifying the position of the sheet light LS reflected in the second image generated by the image sensor, reflects a part of the sheet light LS and allows the other part to pass through.

The computer 3 is communicably connected to the coordinate measuring machine 1 and the calibration jig 2. When calibrating the coordinate measuring machine 1 in the calibration system S, the calibration jig 2 is placed on the measuring panel of the coordinate measuring machine 1, and the sheet light LS is placed on the irradiation unit 111 of the calibration jig 2. Irradiate the transmission plate. The computer 3 acquires the first captured image generated by the imaging unit 112 and the second captured image generated by the image sensor in a state where the transmission plate of the calibration jig 2 is irradiated with the sheet light LS, and uses the first captured image as the first captured image. Based on the position of the sheet light LS to be captured and the position of the index, and the position of the sheet light LS to be captured and the position of the index, the coordinates corresponding to the first captured image and the coordinates corresponding to the second captured image Identify the relationship.

By making the coordinates corresponding to the second captured image captured by the image sensor correspond to the coordinates with reference to the irradiation unit 111, the calibration system S can perform the position of the coordinates of the captured image captured by the imaging unit 112 of the probe 11. And the correspondence relationship with the position of the coordinates with respect to the irradiation unit 111 can be specified. Further, since the second captured image does not include a systematic error like the captured image obtained by capturing the calibration ball, the position of the coordinates of the first captured image captured by the imaging unit 112 of the probe 11 and the irradiation unit 111 are used as a reference. It is possible to accurately identify the correspondence with the position of the coordinates.
Hereinafter, the detailed configuration of the calibration system S will be described.

[Construction of calibration jig 2]
FIG. 2 is a diagram showing a configuration of a calibration jig 2 according to the present embodiment. FIG. 2A is a plan view of the calibration jig 2, and FIG. 2B is a side view of the calibration jig 2. As shown in FIGS. 2A and 2B, the calibration jig 2 has an image sensor 21 and a transmission plate 22.

Both the image sensor 21 and the transmission plate 22 have a rectangular shape. Further, it is assumed that the light receiving surface of the image sensor 21 is a flat surface. The image sensor 21 has a plurality of pixels, detects incident light, and generates a second captured image. Here, it is assumed that the number of pixels of the image sensor 21 is larger than the number of pixels of the imaging unit 112. The image sensor 21 outputs the generated second captured image to the computer 3.

The transmission plate 22 is made of, for example, a half mirror or frosted glass. The transmission plate 22 is provided so as to be overlapped with the image sensor 21, and reflects a part of the incident light and passes the other part. Further, the transmission plate 22 scatters and reflects the incident light, and also scatters and passes the incident light. The transmission plate 22 has an index 221 for specifying a position on the image sensor 21. As shown in FIG. 2A, the index 221 has a slit shape extending in the lateral direction, and a plurality of indexes 221 are provided at a predetermined interval d.

The reflectance and transmittance of the incident light in the index 221 are different from the reflectance and transmittance of the incident light in other regions of the transmission plate 22. As a result, in the first captured image generated by the imaging unit 112 and the second captured image generated by the image sensor 21, the index 221 is displayed in a manner different from that of the other regions irradiated with the sheet light. The position of the index 221 can be specified from the captured image.

[Computer 3 configuration]
FIG. 3 is a diagram showing a configuration of a computer 3 according to the present embodiment. As shown in FIG. 3, the computer 3 includes a storage unit 31 and a control unit 32.

The storage unit 31 is, for example, a ROM, a RAM, or the like. The storage unit 31 stores various programs for operating the computer 3. The storage unit 31 stores a calibration program that causes the control unit 32 to function as the movement control unit 321, the irradiation control unit 322, the acquisition unit 323, and the specific unit 324, which will be described later. Further, the storage unit 31 stores information indicating the relationship between the coordinates corresponding to the first captured image and the coordinates corresponding to the second captured image according to the control of the control unit 32.

The control unit 32 is, for example, a CPU. The control unit 32 controls the functions related to the computer 3 by executing various programs stored in the storage unit 31. The control unit 32 includes a movement control unit 321, an irradiation control unit 322, an acquisition unit 323, and a specific unit 324. The details of each function of the control unit 32 will be described below with reference to a flowchart showing a flow of processing related to calibration of the coordinate measuring machine 1.

[Flow of processing related to calibration]
FIG. 4 is a flowchart showing a processing flow related to calibration of the coordinate measuring machine 1 according to the present embodiment.
First, the operator who calibrates the coordinate measuring machine 1 places the calibration jig 2 on the measuring panel of the coordinate measuring machine 1 (S10). Here, in the calibration jig 2, the normal direction of the image sensor 21 coincides with the Z-axis direction of the probe, and the sheet light emitted from the irradiation unit 111 is irradiated in the longitudinal direction of the transmission plate 22. It shall be placed. Further, it is assumed that the imaging position of the imaging unit 112 is shifted from directly above the transmission plate 22 in the lateral direction.

Subsequently, the movement control unit 321 moves the probe 11 to a preset measurement start position (S20). The movement control unit 321 may determine the measurement start position based on the mounting position of the calibration jig 2 and move the probe 11 to the measurement start position.

Subsequently, the irradiation control unit 322 controls the irradiation unit 111 of the probe 11 to irradiate the transmission plate 22 of the calibration jig 2 with the sheet light (S30). Specifically, the irradiation control unit 322 controls the irradiation unit 111 to irradiate the sheet light in the longitudinal direction of the transmission plate 22. The irradiation control unit 322 irradiates the sheet light so that both ends of the transmission plate 22 in the longitudinal direction are irradiated with the sheet light.

Subsequently, the acquisition unit 323 receives the first image captured by the imaging unit 112 of the probe 11 in a state where the transmission plate 22 of the calibration jig 2 is irradiated with the sheet light, and the image sensor. The second captured image generated by 21 is acquired (S40). For example, the acquisition unit 323 generates a first image to be captured by causing the image pickup unit 112 to image a region including the transmission plate 22 at the timing when the irradiation unit 111 irradiates the transmission plate 22 with the sheet light, and the image pickup unit 112 generates a first image. The first captured image is acquired. Further, the acquisition unit 323 causes the image sensor 21 to generate a second captured image at the timing when the irradiation unit 111 irradiates the transmission plate 22 with the sheet light, and acquires the second captured image from the image sensor 21.

Subsequently, the specific unit 324 attaches to the first captured image based on the position of the sheet light and the position of the index 221 reflected in the first captured image and the position of the sheet light and the position of the index 221 reflected in the second captured image. The relationship between the corresponding coordinates and the coordinates corresponding to the second captured image is specified (S50).

FIG. 5 is a diagram showing an example of a first captured image and a second captured image according to the present embodiment. As shown in FIG. 5, the bright line BL1 of the sheet light is displayed in the first captured image, and the bright line BL2 of the sheet light is displayed in the second captured image. Here, the horizontal direction in the first captured image is the u-axis, the vertical direction is the v-axis, the horizontal direction in the second captured image is the X-axis, and the vertical direction is the Y-axis.

The identification unit 324 specifies the v-coordinate indicating the center position of the emission line BL1 at each of the u-coordinates that can be taken in the first captured image. For example, the identification unit 324 sets i = 0 and specifies the coordinates (ui, vi) in the first captured image based on the emission line BL1. FIG. 6 is a diagram showing the intensity of the emission line corresponding to the u coordinate (ui). The identification unit 324 specifies the v coordinate corresponding to the u coordinate (ui) to the coordinate value vi having the strongest emission line intensity. As a result, one coordinate (ui, vi) is specified in the first captured image.

Subsequently, the specific unit 324 refers to the u coordinate (ui) from the second captured image based on the positions of the plurality of indexes 221 captured in the first captured image and the positions of the plurality of indexes 221 captured in the second captured image. The X coordinate (Xi) corresponding to is specified. Further, the identification unit 324 specifies the Y coordinate corresponding to the X coordinate (Xi) to the coordinate value Yi having the strongest emission line intensity. Further, the identification unit 324 specifies the Z coordinate corresponding to the second captured image based on the position of the probe 11. Thereby, the coordinates (Xi, Yi) and the Z coordinates on the second captured image corresponding to the coordinates (ui, vi) in the first captured image are specified.

Here, since the transmission plate 22 is provided with a plurality of indexes 221 at predetermined intervals, the specific unit 324 receives the second image based on the index 221 close to the coordinates (ui, vi) in the first image. The coordinates (Xi, Yi) on the image can be specified with high accuracy. Further, since the number of pixels of the image sensor 21 is larger than the number of pixels of the imaging unit 112, the resolution of the second captured image is higher than the resolution of the first captured image. Thereby, the coordinates (Xi, Yi) on the second captured image corresponding to the coordinates (ui, vi) in the first captured image can be specified with high accuracy.

By performing the above processing while increasing i by 1, the specific unit 324 has the coordinates of a plurality of positions corresponding to the sheet light reflected in the first captured image and the coordinates of the plurality of positions corresponding to the second captured image. Identify the relationship.

Subsequently, the movement control unit 321 determines whether or not the probe 11 has moved to the specified position. Here, the defined position is, for example, a position where the locus of the sheet light captured in the first captured image is not captured in the first captured image due to the movement of the probe 11 in the Z direction. When it is determined that the movement control unit 321 has moved to the specified position, the process according to this flowchart is terminated, and when it is determined that the process has not moved to the specified position, the process is transferred to S70.

In S70, the movement control unit 321 moves the probe 11 in the Z direction (normal direction of the image sensor 21) by a predetermined amount. By moving the probe 11 in the Z direction, the position of the sheet light reflected in the first captured image changes in the v-axis direction (vertical direction in the first captured image). After that, when the processing of S70 is completed, the control unit 32 shifts the processing to S30.

After that, by repeating the processes of S30 to S70, in the calibration system S, the movement control unit 321 moves the probe 11 to each of a plurality of positions in the normal direction of the calibration jig 2, and the irradiation control unit 322 The irradiation unit 111 is irradiated with sheet light at each of the plurality of positions, the acquisition unit 323 acquires the first captured image and the second captured image at each of the plurality of positions, and the specific unit 324 obtains the first captured image and the second captured image. The relationship between the coordinates corresponding to the first captured image and the coordinates corresponding to the second captured image is specified at each of the plurality of positions.

When the probe 11 is moved in the Z direction, the position of the sheet light reflected in the first captured image changes in the v-axis direction. Therefore, the specific unit 324 is on the second captured image each time the probe 11 is moved in the Z direction. In the new coordinates on the first captured image in which the correspondence with the coordinates of is not specified, the correspondence with the coordinates on the second captured image can be specified.

Further, the specific unit 324 simply moves the probe 11 in the Z direction, and at new coordinates on the first captured image whose correspondence with the coordinates on the second captured image is not specified, on the second captured image. It is possible to specify the correspondence with the coordinates of. Therefore, as compared with the case of specifying the correspondence between the coordinates on the first captured image and the coordinates on the second captured image using the calibration sphere, the coordinates on the first captured image and the coordinates on the second captured image Correspondence can be identified at high speed.

[Modification example]
In the above-described embodiment, the irradiation unit 111 irradiates the transmission plate 22 with the sheet light, but the present invention is not limited to this. For example, the irradiation unit 111 may perform scanning by oscillating a point light that irradiates a point of the transmission plate 22 with a laser beam. Then, the specific unit 324 specifies the relationship between the coordinates corresponding to the first captured image and the coordinates corresponding to the second captured image based on the first captured image and the second captured image in the state of being irradiated with the point light. You may.

[Effect in this embodiment]
As described above, in the calibration system S according to the present embodiment, the computer 3 is
The irradiation control unit 322 that controls the irradiation unit 111 to irradiate the transmission plate 22 with the laser light, and the first imaging generated by the imaging unit 112 imaging the transmission plate 22 while the transmission plate 22 is irradiated with the laser light. The acquisition unit 323 that acquires the image and the second captured image generated by the image sensor 21 while the transmission plate 22 is irradiated with the laser beam, the position of the laser beam and the position of the index reflected in the first captured image, and the position of the index. It has a specific unit 324 that specifies the relationship between the coordinates corresponding to the first captured image and the coordinates corresponding to the second captured image based on the position of the laser beam and the position of the index captured in the second captured image.

Since the second captured image is an image generated by the image sensor and does not include a systematic error, the calibration system S sets the position of the coordinates of the captured image captured by the imaging unit 112 of the probe 11 and the irradiation unit 111. It is possible to accurately identify the correspondence with the position of the reference coordinates.

Although the present invention has been described above using the embodiments, the technical scope of the present invention is not limited to the scope described in the above embodiments. It will be apparent to those skilled in the art that various changes or improvements can be made to the above embodiments. It is clear from the description of the claims that such modified or improved forms may also be included in the technical scope of the present invention.

1 Coordinate-measuring machine 11 Probe 111 Irradiation unit 112 Imaging unit 2 Calibration jig 21 Image sensor 22 Transmission plate 3 Computer 31 Storage unit 32 Control unit 321 Movement control unit 322 Irradiation control unit 323 Acquisition unit 324 Specific unit S Calibration system

Claims (9)

A calibration system equipped with a coordinate measuring machine, a calibration jig, and a computer.
The three-dimensional measuring machine is
It has a probe including a first imaging unit that generates a first captured image and an irradiation unit that irradiates a laser beam.
The calibration jig
A second imaging unit that generates a second captured image,
It is provided so as to be superimposed on the second imaging unit, has an index for specifying a position in the second imaging unit, and has a transmission plate that reflects a part of the incident light and allows the other part to pass through. ,
The computer
An irradiation control unit that controls the irradiation unit to irradiate the transmission plate with laser light,
The first image captured by the first imaging unit by imaging the transmission plate in a state where the transmission plate is irradiated with the laser light, and the first image in a state where the transmission plate is irradiated with the laser light. 2. An acquisition unit that acquires the second captured image generated by the imaging unit, and
Coordinates corresponding to the first captured image based on the position of the laser beam and the position of the index reflected in the first captured image and the position of the laser beam and the position of the index reflected in the second captured image. It has a specific unit that specifies the relationship between the light and the coordinates corresponding to the second captured image.
Calibration system. The transmission plate has a plurality of the indexes provided at predetermined intervals.
The calibration system according to claim 1. The second imaging unit and the transmission plate have a rectangular shape.
The transmission plate has a plurality of slit-shaped indexes extending in the lateral direction.
The irradiation unit irradiates a linear laser beam and emits light.
The irradiation control unit controls the irradiation unit to irradiate the linear laser beam in the longitudinal direction of the transmission plate.
The specific unit specifies the relationship between the coordinates of the plurality of positions corresponding to the linear laser beam captured in the first captured image and the plurality of coordinates corresponding to the second captured image.
The calibration system according to claim 1 or 2. The computer
Further, a movement control unit for moving the probe in the normal direction of the calibration jig is provided.
The movement control unit moves the probe to each of a plurality of positions in the normal direction of the calibration jig.
The irradiation control unit irradiates the irradiation unit with laser light at each of the plurality of positions.
The acquisition unit acquires the first captured image and the second captured image at each of the plurality of positions.
The specific unit specifies the relationship between the coordinates corresponding to the first captured image and the coordinates corresponding to the second captured image at each of the plurality of positions.
The calibration system according to any one of claims 1 to 3. The reflectance and transmittance of the incident light in the index are different from the reflectance and transmittance of the incident light in other regions of the transmission plate.
The calibration system according to any one of claims 1 to 4. The number of pixels of the second imaging unit is larger than the number of pixels of the first imaging unit.
The calibration system according to any one of claims 1 to 5. A calibration jig used for calibrating a coordinate measuring machine having a probe including a first imaging unit that generates a first captured image and an irradiation unit that irradiates a laser beam.
A second imaging unit that generates a second captured image,
A transmission plate which is provided so as to be superimposed on the second imaging unit, has an index for specifying a position in the second imaging unit, and reflects a part of the incident light and passes the other part.
Calibration jig with. A computer-executed method for calibrating a coordinate measuring machine using a calibration jig.
The coordinate measuring machine has a probe including a first imaging unit that generates a first captured image and an irradiation unit that irradiates a laser beam.
The calibration jig is provided so as to overlap the second imaging unit that generates the second image and the second imaging unit, has an index for specifying the position in the second imaging unit, and has an index for specifying the position of the incident light. It has a transparent plate that reflects one part and allows another part to pass through.
A step of controlling the irradiation unit to irradiate the transmission plate with laser light,
The first image captured by the first imaging unit by imaging the transmission plate in a state where the transmission plate is irradiated with the laser light, and the first image in a state where the transmission plate is irradiated with the laser light. 2 The step of acquiring the second captured image generated by the imaging unit, and
Coordinates corresponding to the first captured image based on the position of the laser beam and the position of the index reflected in the first captured image and the position of the laser beam and the position of the index reflected in the second captured image. And the step of specifying the relationship between the second captured image and the coordinates corresponding to the second captured image,
Calibration method with. This is a calibration program for a coordinate measuring machine that uses a calibration jig.
The coordinate measuring machine has a probe including a first imaging unit that generates a first captured image and an irradiation unit that irradiates a laser beam.
The calibration jig is provided so as to overlap the second imaging unit that generates the second image and the second imaging unit, has an index for specifying the position in the second imaging unit, and has an index for specifying the position of the incident light. It has a transparent plate that reflects one part and allows another part to pass through.
Computer,
An irradiation control unit that controls the irradiation unit to irradiate the transmission plate with laser light.
The first image captured by the first imaging unit by imaging the transmission plate in a state where the transmission plate is irradiated with the laser light, and the first image in a state where the transmission plate is irradiated with the laser light. 2. The acquisition unit that acquires the second captured image generated by the imaging unit, the position of the laser beam and the index that appear in the first captured image, and the position of the laser beam that appears in the second captured image. And a specific unit that specifies the relationship between the coordinates corresponding to the first captured image and the coordinates corresponding to the second captured image based on the position of the index.
A calibration program that functions as.