JP2015068713A - Shape measurement device, structure manufacturing system, shape measurement method, structure manufacturing method, shape measurement program and recording medium - Google Patents

Abstract

PROBLEM TO BE SOLVED: To allow a shape of a measured object to be measured in a more appropriate condition.SOLUTION: A shape measurement device has: a probe that includes an illumination part and a photographing part; a measurement range setting part that sets a measurement range where a position of an image of a pattern is detected in a photograph range by the photographing part; a lighting control area setting part that sets a lighting control area where luminance of the photographed image is detected in the photograph area of the photograph part; a lighting control part that controls an amount of projection light by the illumination part, an amount of light reception to be received by the photographing part, an amount of exposure light when acquiring image data by the photographing part or an input/output characteristic of the photographing part in accordance with the luminance of the photographed image detected in the lighting control area; and a lighting control area settable range setting part that sets a lighting control area settable range enabling the lighting control area to be set in the photograph range by the photographing part on the basis of position information on the measurement area in the photograph range by the photographing part.

Description

  The present invention relates to a shape measuring device, a structure manufacturing system, a shape measuring method, a structure manufacturing method, a shape measuring program, and a recording medium.

  The shape measuring apparatus includes an irradiation unit that irradiates a measured object with a predetermined pattern of light such as slit light, and an imaging unit that captures a pattern image drawn by the light irradiated on the measurement target region. There is an optical measuring device using the above (see, for example, Patent Document 1). Patent Document 1 describes a displacement sensor that detects an image included in a set measurement target region from image data acquired by imaging and measures the displacement of the measurement target.

International Publication No. 2001/057471

  Such a shape measuring apparatus adjusts the light amount of the pattern light irradiated from the irradiation unit or the exposure condition of the image pickup unit when measuring the shape of the object to be measured, so that saturation is generated in the pattern light image. An image of pattern light that is not black and has no blackout is acquired. Some shape measuring apparatuses determine the amount of light and exposure conditions of pattern light at the time of measurement based on pixel values in a dimming area that is selectively selected within the imaging range of the imaging unit. This light control region is preferably the same range as the measurement range for detecting the position of the pattern light image on the image data. On the other hand, the pixel value of the pattern light image is lower even within the measurement range. When there is a place or a place to be higher, it may be preferable to select a range having an appropriate pixel value in the pattern light image. The shape measurement device may not be able to detect the pattern image to be detected unless the dimming area is set appropriately so that the pattern light image can be selected with an appropriate pixel value, and the shape measurement accuracy is reduced. Resulting in.

  The present invention has been made in consideration of the above points. A shape measuring apparatus, a structure manufacturing system, a shape measuring method, and a structure manufacturing capable of selecting image data under appropriate conditions from an image of pattern light. It is an object to provide a method, a shape measurement program, and a recording medium.

  According to the first aspect of the present invention, an irradiation unit that projects a line-shaped pattern onto a measurement region of the object to be measured or scans the pattern in at least one direction, and the projection of the pattern by the irradiation unit. A probe including an imaging unit that captures an image of a pattern projected onto the object to be measured from a direction different from the direction and outputs image data, and a position of the image of the pattern within an imaging range by the imaging unit A measurement range setting unit that sets a measurement range to be detected, a light control region setting unit that sets a light control region for detecting the brightness of a captured image within the imaging range of the imaging unit, and the light control region Depending on the detected brightness of the photographed image, the amount of light emitted from the irradiating unit, the amount of received light received by the imaging unit, the exposure amount when the image data is acquired by the imaging unit, or the input of the imaging unit Control output characteristics Based on the position information of the measurement range within the imaging range by the imaging unit and the dimming control unit, the dimming area setting range that allows the dimming area to be set within the imaging range by the imaging unit is set There is provided a shape measuring device having a light control region settable range setting unit.

  According to the second aspect of the present invention, a molding apparatus that molds the structure based on design information relating to the shape of the structure, and a first aspect that measures the shape of the structure molded by the molding apparatus. There is provided a structure manufacturing system including: a shape measuring device; and a control device that compares the design information with shape information indicating the shape of the structure measured by the shape measuring device.

  According to the third aspect of the present invention, a line-shaped pattern is projected onto the measurement region of the object to be measured, or the pattern is projected while scanning in at least one direction, and the pattern is projected from a direction different from the pattern projection direction. An image of a pattern projected on the object to be measured is captured by an image sensor to acquire image data, and the shape of the object to be measured is measured based on the position of the pattern image in the measurement area of the image data. A shape measurement method, wherein a measurement range for detecting a position of the pattern image is set within an imaging range for capturing the pattern image, and the measurement range within the imaging range for capturing the pattern image Based on the position information, set a dimmable area settable range within the range where the image data is formed, and detect the brightness of the photographed image based on the dimmable area settable range And a light emission amount when projecting the pattern, and a light reception when acquiring the image data, according to the brightness of the captured image detected in the light control region. And a control method for controlling an input / output characteristic of the image sensor when acquiring the image data.

  According to the fourth aspect of the present invention, the structure is molded based on the design information related to the shape of the structure, and the shape of the molded structure is measured by the shape measuring method of the third aspect. And a method of manufacturing the structure including comparing the shape information indicating the measured shape of the structure with the design information.

  According to the fifth aspect of the present invention, a line-shaped pattern is projected onto the measurement region of the object to be measured, or the pattern is projected while scanning in at least one direction, and the pattern is projected from a direction different from the projection direction of the pattern. An image of a pattern projected on the object to be measured is captured by an image sensor to acquire image data, and the shape of the object to be measured is measured based on the position of the pattern image in the measurement area of the image data. A shape measurement program, comprising: setting a measurement range for detecting a position of the pattern image within an imaging range for capturing the pattern image; and an imaging range for capturing the pattern image. Based on the position information of the measurement range, setting a dimmable area settable range within the imaging range for capturing an image of the pattern, and based on the dimmable area settable range Setting a dimming area for detecting the brightness of the photographed image, and a light projection amount for projecting the measurement area according to the brightness of the photographed image detected in the dimming area, Controlling the amount of received light when acquiring image data, the amount of exposure when acquiring the image data with the imaging unit, or the input / output characteristics of the image sensor when acquiring the image data A shape measurement program is provided.

  According to the sixth aspect of the present invention, there is provided a computer-readable recording medium that records the shape measurement program of the fifth aspect.

  In the present invention, the shape of the object to be measured can be measured under more appropriate conditions.

FIG. 1 is a perspective view showing a shape measuring apparatus according to this embodiment. FIG. 2 is a schematic diagram showing the configuration of the shape measuring apparatus of the present embodiment. FIG. 3 is a block diagram showing a schematic configuration of the control device of the shape measuring apparatus of the present embodiment. FIG. 4 is an explanatory diagram for explaining the measurement operation of the shape measuring apparatus according to the present embodiment. FIG. 5 is an explanatory diagram for explaining an example of a screen displayed on the shape measuring apparatus of the present embodiment. FIG. 6 is an explanatory diagram for explaining the measurement operation of the shape measuring apparatus according to the present embodiment. FIG. 7 is a flowchart showing an example of the measuring operation of the shape measuring apparatus according to the present embodiment. FIG. 8 is a flowchart showing an example of the operation of setting the light control range of the shape measuring apparatus according to the present embodiment. FIG. 9A is an explanatory diagram for explaining a measurement operation of the shape measuring apparatus according to the present embodiment. FIG. 9B is an explanatory diagram for explaining a measurement operation of the shape measuring apparatus according to the present embodiment. FIG. 10A is an explanatory diagram for explaining a measurement operation of the shape measuring apparatus according to the present embodiment. FIG. 10B is an explanatory diagram for explaining a measurement operation of the shape measuring apparatus according to the present embodiment. FIG. 10C is an explanatory diagram for explaining a measurement operation of the shape measuring apparatus according to the present embodiment. FIG. 11 is a schematic diagram showing a configuration of a system having a shape measuring apparatus. FIG. 12 is a diagram showing the configuration of the structure manufacturing system of the present embodiment. FIG. 13 is a flowchart showing the structure manufacturing method of the present embodiment.

  Hereinafter, the present invention will be described in detail with reference to the drawings. The present invention is not limited by the following modes for carrying out the invention (hereinafter referred to as embodiments). In addition, constituent elements in the following embodiments include those that can be easily assumed by those skilled in the art, those that are substantially the same, and those in a so-called equivalent range. Furthermore, the constituent elements disclosed in the following embodiments can be appropriately combined.

  In the following description, an XYZ orthogonal coordinate system is set, and the positional relationship of each part will be described with reference to this XYZ orthogonal coordinate system. The Z-axis direction is set, for example, in the vertical direction, and the X-axis direction and the Y-axis direction are set, for example, in directions that are parallel to the horizontal direction and orthogonal to each other. In addition, the rotation (inclination) directions around the X, Y, and Z axes are the θX, θY, and θZ axis directions, respectively.

(This embodiment)
FIG. 1 is a diagram illustrating an appearance of a shape measuring apparatus 1 according to the present embodiment. FIG. 2 is a schematic diagram showing a schematic configuration of the shape measuring apparatus of the present embodiment. FIG. 3 is a block diagram showing a schematic configuration of the control device of the shape measuring apparatus of the present embodiment.

  The shape measuring apparatus 1 measures a three-dimensional shape of an object to be measured (object to be measured) M using, for example, a light cutting method. The shape measuring device 1 includes a probe moving device 2, an optical probe 3, a control device 4, a display device 5, an input device 6, and a holding and rotating device 7. In the shape measuring apparatus 1, the optical probe 3 captures an image of the object M to be measured that is held by a holding and rotating device 7 provided on the base B. Further, in the present embodiment, the probe moving device 2 and the holding and rotating device 7 serve as a moving mechanism that relatively moves the probe and the object M to be measured.

  The probe moving device 2 has a position on the three-dimensional space of the optical probe 3 and a pattern projected from the optical probe 3 to be described later so that the imaging range (field of view) of the optical probe 3 comes to the measurement target region of the object M to be measured. The optical probe with respect to the object to be measured M is positioned so that the projection direction and the direction of the pattern projected on the measurement target area of the object to be measured M are positioned and the imaging range of the optical probe 3 is scanned on the object to be measured M. 3 is for moving. As shown in FIG. 2, the probe moving device 2 includes a drive unit 10 and a position detection unit 11. The drive unit 10 includes an X moving unit 50X, a Y moving unit 50Y, a Z moving unit 50Z, a first rotating unit 53, and a second rotating unit 54.

  The X moving part 50X is provided to be movable with respect to the base B in the direction of the arrow 62, that is, in the X axis direction. The Y moving unit 50Y is provided so as to be movable in the direction of the arrow 63, that is, in the Y-axis direction with respect to the X moving unit 50X. The Y moving unit 50Y is provided with a holding body 52 extending in the Z-axis direction. The Z moving part 50Z is provided so as to be movable with respect to the holding body 52 in the direction of the arrow 64, that is, in the Z-axis direction. The X moving unit 50X, the Y moving unit 50Y, and the Z moving unit 50Z move together with the first rotating unit 53 and the second rotating unit 54 to move the optical probe 3 in the X axis direction, the Y axis direction, and the Z axis direction. The mechanism is configured.

  The first rotating unit 53 rotates the optical probe 3 supported by a holding member (holding unit) 55 described later around a rotation axis (rotating axis) 53 a parallel to the X axis, that is, in the direction of the arrow 65 to rotate the optical probe 3. In particular, the projection direction of the pattern projected from the optical probe 3 onto the measurement object M can be changed. The second rotating portion 54 rotates the optical probe 3 supported by the holding member 55 around an axis parallel to a direction in which a first holding portion 55A, which will be described later, extends, that is, in the direction of the arrow 66, and the attitude of the optical probe 3 In particular, the direction of the pattern projected from the optical probe 3 can be changed. The shape measuring apparatus 1 has a reference sphere 73a or a reference sphere 73b used for correcting the relative position between the optical probe 3 and the holding member 55 holding the optical probe 3.

  The drive of these X movement part 50X, Y movement part 50Y, Z movement part 50Z, the 1st rotation part 53, and the 2nd rotation part 54 is based on the detection result of the position detection part 11 comprised by an encoder apparatus etc. It is controlled by the control device 4.

  The optical probe 3 includes a light source device 8 and an imaging device 9 and is supported by a holding member 55. The holding member 55 extends in a direction perpendicular to the rotation axis 53a, and is supported by the first rotating portion 53. The first holding portion (first portion, first member) 55A, and the measurement object M of the first holding portion 55A. A second holding portion (second portion, second member) 55B provided at an end portion on the far side with respect to the shaft and extending in parallel with the rotation axis 53a is formed in a substantially L shape orthogonal to the second holding portion. The optical probe 3 is supported at the end of 55B on the + X side. The position of the rotation axis 53 a of the first rotating unit 53 is arranged closer to the object to be measured M than the optical probe 3. A counter balance 55c is provided at the end of the first holding portion 55A on the side closer to the object M to be measured. Therefore, when no driving force is generated in the first rotating part 53, the extending direction of the first holding part 55A is in the Z-axis direction as shown in FIG.

  As shown in FIGS. 1 and 2, the holding and rotating device 7 includes a table 71 that holds the object M, a rotation driving unit 72 that rotates the table 71 in the θZ axis direction, that is, the direction of the arrow 68, and the table 71. And a position detector 73 for detecting the position in the rotation direction. The position detection unit 73 is an encoder device that detects the rotation of the rotary shaft of the table 71 or the rotation drive unit 72. The holding and rotating device 7 rotates the table 71 by the rotation driving unit 72 based on the result detected by the position detecting unit 73. The holding and rotating device 7 rotates the table 71 to rotate the measurement object M in the direction of the arrow 68 around the rotation axis center AX.

  By the way, the light source device (irradiation unit) 8 of the optical probe 3 is controlled by the control device 4 and irradiates the measurement region of the object M to be measured held by the holding and rotating device 7 with the line-shaped measurement light. A light source 12 and an illumination optical system 13 are provided. The light source 12 of this embodiment includes a laser diode, for example. The light source 12 may include a solid light source such as a light emitting diode (LED) other than the laser diode. Further, the light emission amount of the light source 12 of this embodiment is controlled by the control device 4. In particular, it is controlled by a dimming control unit 36 in the control device 4.

  The illumination optical system 13 adjusts the spatial light intensity distribution of the light emitted from the light source 12. The illumination optical system 13 of this embodiment includes, for example, a cylindrical lens. The illumination optical system 13 may be one optical element or may include a plurality of optical elements. The light emitted from the light source 12 is emitted in the first direction from the light source device 8 toward the object to be measured M, with the spot being expanded in the direction in which the cylindrical lens has positive power. As shown in FIG. 2, when the light is emitted from the light source device 8 and projected onto the object to be measured M, the light is rotated when projected onto the object to be measured M having a surface orthogonal to the emission direction from the light source device 8. A direction parallel to the axis 53a is taken as the longitudinal direction, and a linear pattern parallel to the rotation axis 53a is obtained. Further, the line pattern has a predetermined length in the longitudinal direction on the DUT M.

  The longitudinal direction of the line pattern can be changed by the second rotating unit 54 described above. By changing the longitudinal direction of the line-shaped pattern according to the spreading direction of the surface of the object to be measured M, it is possible to efficiently measure.

  The illumination optical system 13 may include a diffractive optical element such as CGH, and the spatial light intensity distribution of the illumination light beam L emitted from the light source 12 may be adjusted by the diffractive optical element. In the present embodiment, the projection light whose spatial light intensity distribution is adjusted may be referred to as pattern light. The illumination light beam L is an example of pattern light. By the way, when the direction of the pattern is referred to in this specification, the direction of the longitudinal direction of the line pattern is shown.

  The imaging device (imaging unit) 9 includes an imaging device 20, an imaging optical system 21, a diaphragm 23, and a diaphragm driving unit 24. The illumination light beam L emitted from the light source device 8 to the object to be measured M is reflected and scattered on the surface of the object to be measured M, and at least a part thereof enters the imaging optical system 21. The imaging optical system 21 connects the image of the line pattern projected on the surface of the object to be measured M by the light source device 8 together with the image of the object to be measured M to the image sensor 20 by the imaging optical system 21. The image sensor 20 captures an image formed by the imaging optical system 21. The image processing unit 25 generates image data from the light reception signal received by the image sensor 20. The diaphragm 23 has an opening whose size can be changed, and the amount of light passing through the imaging optical system 21 can be controlled by changing the size of the opening. The size of the opening of the diaphragm 23 can be adjusted by the diaphragm driving unit 24. The diaphragm driving unit 24 is controlled by the control device 4. In particular, it is controlled by a dimming control unit 36 in the control device 4.

  The imaging optical system 21 includes an object surface 21 a on a plane including the emission direction of the illumination light beam L as line light from the light source device 8 and the longitudinal direction of the spot shape of the illumination light beam L, and the light receiving surface 20 a of the image sensor 20. (Image plane) is in a conjugate relationship. The plane including the emission direction of the illumination light beam L from the light source device 8 and the longitudinal direction of the spot shape of the illumination light beam L is substantially parallel to the propagation direction of the illumination light beam L. By forming a surface conjugate with the light receiving surface 20a of the image sensor 20 along the propagation direction of the illumination light beam L, a focused image can be obtained regardless of the position of the surface of the object M to be measured. It is done.

  The control device 4 controls each part of the shape measuring device 1 and performs arithmetic processing based on the imaging result of the optical probe 3 and the positional information of the probe moving device 2 and the holding and rotating device 7 to obtain the shape information of the object M to be measured. get. The shape information in the present embodiment indicates at least one of the shape, size, unevenness distribution, surface roughness, and position (coordinates) of a point on the measurement target surface regarding at least a part of the measurement target M to be measured. Contains information. A display device 5 and an input device 6 are connected to the control device 4. As shown in FIG. 3, the control device 4 includes a control unit 32 and a storage unit 46.

  The control unit 32 generates a program for measuring the measurement object M, and controls the shape measurement operation of the measurement object M by each unit based on the generated program. The control unit 32 includes a measurement range setting unit 33, a light control region setting unit 34, a light control region settable range setting unit 35, a light control unit 36, a measurement unit 37, and an operation control unit 38. Have.

  The measurement range setting unit 33 determines the measurement range based on the data stored in the storage unit 46 and the input received by the input device 6. The measurement range is a range in which the position of the pattern image is detected from the image of the object M measured by the image processing unit 39.

  The dimming area setting unit 34 sets the dimming area based on the dimming area setting possible range set by the dimming area setting possible range setting unit 35. The dimming area is an area for detecting the brightness of the captured image within the imaging range of the imaging device 20. When detecting the position of the pattern from the image data, the image data captured by the image sensor 20 is arranged in the width direction of the image of the line pattern (or the direction orthogonal to the scanning direction if spot light scanning). The brightest pixel value is detected for each pixel column from the pixel columns to be processed. At that time, instead of searching all the way from one end to the other end of the pixel column of the image data, the brightest pixel value is searched for each pixel column only within the range set as the dimming region. The dimming area setting unit 34 can set the dimming area based on the data stored in the storage unit 46 and the input received by the input device 6 in addition to the dimming area setting possible range.

  The dimming area settable range setting unit 35 sets the dimming area settable range based on the position information of the measurement range. The light control area settable range is a range that is set based on the position information of the measurement range within the imaging range by the imaging unit, and is a range in which the light control area can be set. The dimming area settable range setting unit 35 can set the dimming area settable range based on the data stored in the storage unit 46 and the input received by the input device 6 in addition to the measurement range. .

  The dimming control unit 36 acquires the pixel value of the brightest pixel for each pixel row detected in the dimming region, and controls the amount of light emitted to the light source 12 according to the size of the acquired pixel value. A signal for controlling the diaphragm driving unit 24, a signal for controlling the exposure time during imaging by the image sensor 20, and the like are output. Regarding the control of the exposure time, the exposure time when acquiring one piece of image data is controlled, or the time when the imaging surface is exposed is controlled by a mechanical shutter (not shown) incorporated in the imaging device 20. Also good. Therefore, the dimming control unit 36 determines the amount of light emitted from the irradiation unit, the amount of received light received by the imaging unit, the exposure amount when the image data is acquired by the imaging unit, or the imaging unit according to the size of the acquired pixel value. Input / output characteristics (sensitivity or amplification factor for signals detected at each pixel of the image sensor), that is, various conditions (light control conditions) when image data is acquired by the optical probe 3 are controlled.

  The measurement unit 37 measures the shape of the object to be measured based on the position of the pattern image projected by the light source device 8 located within the measurement range of the image data. Based on the conditions controlled by the dimming control unit 36, the measuring unit 37 relatively moves the optical probe 3 and the object to be measured by the probe moving device 2 and the holding and rotating device 7, and a pattern image is projected. While moving the position, the imaging device 9 captures an image of the imaging area on which the pattern image is projected. In addition, the position information of the probe moving device 2 and the holding and rotating device 7 from the position detecting unit 11 is acquired at the timing when the image is picked up by the imaging device 9. The measurement unit 37 adds the positional information of the probe moving device 2 and the holding rotation device 7 from the position detection unit 11 acquired at the timing of imaging by the imaging device 9 and the image of the measurement range pattern image acquired by the imaging device 9. Based on the related imaging signal, the position where the pattern of the object to be measured M is projected is calculated, and the shape data of the object to be measured M is output. For example, the shape measuring apparatus 1 controls the moving speeds of the probe moving device 2 and the holding rotation device 7 based on the measurement point interval information input from the input device 6 by setting the imaging timing of the imaging device 9 to a constant interval. Yes.

  The operation control unit 38 controls the operation of each part of the shape measuring apparatus 1 including the probe moving device 2, the optical probe 3, and the holding and rotating device 7. The operation control unit 38 performs operation control of the probe moving device 2, the optical probe 3, and the holding and rotating device 7 based on the operation control information created by the control unit 32. Further, the control unit 32 controls the image acquisition operation by the optical probe 3.

  The storage unit 46 is a storage device that stores various programs and data, such as a hard disk and a memory. The storage unit 46 includes a condition table 46A and a shape measurement program 46B. The storage unit 46 stores various programs and data used for controlling the operation of the shape measuring apparatus 1 in addition to these programs and data. The condition table 46A stores conditions set by the control unit 32 and various conditions input in advance. The shape measurement program 46 </ b> B stores a program for executing processing of each unit of the control device 4. That is, the control apparatus 4 implement | achieves operation | movement of each part mentioned above by running the program memorize | stored in the shape measurement program 46B. The shape measurement program 46B includes both a program for measuring the object M to be measured generated by the control unit 32 and a program for the control unit 32 to generate the program. The shape measurement program 46B may be stored in the storage unit 46 in advance, but is not limited to this. The shape measurement program 46B may be read from a storage medium stored therein and stored in the storage unit 46, or may be acquired from the outside through communication.

  The control device 4 controls the drive unit 10 of the probe moving device 2 and the rotation drive unit 72 of the holding and rotating device 7 so that the relative positions of the optical probe 3 and the object to be measured M have a predetermined positional relationship. . Further, the control device 4 controls the dimming and the like of the optical probe 3 so that the projected line pattern on the object to be measured M is imaged with an optimum light amount. The control device 4 acquires the position information of the optical probe 3 from the position detection unit 11 of the probe moving device 2, and acquires data (captured image data) indicating an image obtained by capturing the measurement region from the optical probe 3. Then, the control device 4 associates the surface position of the measurement object M obtained from the captured image data corresponding to the position of the optical probe 3, the position of the optical probe 3, the projection direction of the line light, and the imaging direction of the imaging device. Thus, the shape information regarding the three-dimensional shape of the measurement target is calculated and acquired.

  The display device 5 is configured by, for example, a liquid crystal display device, an organic electroluminescence display device, or the like. The display device 5 displays measurement information related to the measurement by the shape measuring device 1. Measurement information includes, for example, image data captured by the image sensor 20, information indicating the position of the measurement area set in the imaging area of the image sensor 20, information indicating the position of the light control area, and light control area setting possible. Information indicating the position of the range can be displayed. The position information of the measurement area, the dimming area, and the dimmable area setting range is superimposed and displayed on the image data captured by the image sensor 20. In addition, setting information indicating settings related to measurement, progress information indicating the progress of measurement, shape information indicating the result of measurement, and the like are also included. The display device 5 of the present embodiment is supplied with image data indicating measurement information from the control device 4 and displays an image indicating measurement information according to the image data.

  The input device 6 is configured by various input devices such as a keyboard, a mouse, a joystick, a trackball, and a touch pad. The input device 6 receives various information input to the control device 4. The various information includes, for example, command information indicating a command (command) for causing the shape measuring device 1 to start measurement, setting information related to measurement by the shape measuring device 1, and an operation for manually operating at least a part of the shape measuring device 1. Includes information.

  In the shape measuring apparatus 1 of the present embodiment, the control device 4 includes a control unit 32 and a storage unit 46, and a display device 5 and an input device 6 are connected to the control device 4. In the shape measuring device 1, the control device 4, the display device 5, and the input device 6 may be, for example, a computer connected to the shape measuring device 1, or a host computer provided in a building where the shape measuring device 1 is installed. It is not limited to the building where the shape measuring device 1 is installed, and may be located away from the shape measuring device 1 and connected to the shape measuring device 1 using a communication means such as the Internet with a computer. . Moreover, the shape measuring apparatus 1 may hold | maintain the control apparatus 4, the display apparatus 5, and the input device 6 in a separate place. For example, apart from the computer including the input device 6 and the display device 5, for example, the shape measuring device 1 may be supported inside the optical probe 3. In this case, the information acquired by the shape measuring apparatus 1 is connected to a computer using a communication means.

  Next, an example of an operation for measuring the shape of the object to be measured by the shape measuring apparatus 1 having the above configuration will be described with reference to FIGS. 4 to 10C. FIG. 4 is an explanatory diagram for explaining the measurement operation of the shape measuring apparatus according to the present embodiment. FIG. 5 is an explanatory diagram for explaining an example of a screen displayed on the shape measuring apparatus of the present embodiment. FIG. 6 is an explanatory diagram for explaining the measurement operation of the shape measuring apparatus according to the present embodiment. FIG. 7 is a flowchart showing an example of the measuring operation of the shape measuring apparatus according to the present embodiment. FIG. 8 is a flowchart showing an example of the operation of setting the light control range of the shape measuring apparatus according to the present embodiment. 9A and 9B are explanatory diagrams for explaining the measurement operation of the shape measuring apparatus according to the present embodiment. 10A to 10C are explanatory diagrams for explaining the measurement operation of the shape measuring apparatus according to the present embodiment.

  Below, as shown in FIG. 4, it demonstrates as a case where the shape measuring apparatus 1 measures the shape of the to-be-measured object Ma in which the shape was formed repeatedly in the circumferential direction. The shape measuring apparatus 1 irradiates the teeth that are one unit of the repetitive shape of the measured object Ma with the illumination light beam L, and acquires an image of a pattern projected on the measured object Ma, thereby measuring the measured object Ma. Measure the shape. The shape measuring apparatus 1 according to the present embodiment obtains an image of a pattern projected on the measurement object Ma while moving the illumination light beam L along the direction of the tooth trace, thereby obtaining the shape of one tooth. Can be measured. The shape measuring apparatus 1 can measure the shape of the measurement object Ma by sequentially measuring the shape of the teeth of the measurement object Ma. The object to be measured Ma is a bevel gear in which teeth having substantially the same shape in design are formed at predetermined intervals in the circumferential direction. In the shape measuring apparatus 1 of the present embodiment, the measurement object Ma is a bevel gear, but the shape can be measured using objects of various shapes as the measurement object. Of course, when the DUT Ma is a gear, the type of gear is not particularly limited. In addition to the bevel gear, the shape measuring apparatus 1 also measures a spur gear, a helical gear, a helical gear, a worm gear, a pinion, a hypoid gear, and the like, and becomes the object to be measured Ma. The shape measuring apparatus 1 is not limited to measuring the shape of one tooth or measuring the entire shape of the object to be measured Ma, but can also measure the shape of any one point of the object to be measured Ma. it can.

  The shape measuring apparatus 1 displays a screen 100 shown in FIG. The screen 100 is displayed in a mode for setting conditions for measuring the shape of the workpiece Ma, for example, a teaching mode. The screen 100 includes an image window 102 and windows 104 and 106.

  As shown in FIG. 6, the image window 102 displays an image captured by the imaging device 9 and acquired. The image displayed in the image window 102 is an entire image within the imaging range by the imaging device 9. In the image displayed on the image window 102, the outer shape 140 of the object to be measured Ma, the patterns 142a, 142b, 142c formed by projecting the illumination light beam L onto the outer shape 140, and the illumination light beam L are projected onto the outer shape 140. In this case, the bright line 144 generated by the multiple reflection or irregular reflection of the illumination light beam L is included.

  In the image window 102, measurement ranges 150a and 150b, a dimming area settable range 152, and a dimming area 154 are displayed so as to overlap the image. The measurement ranges 150 a and 150 b are areas set by the measurement range setting unit 33. The dimming area settable range 152 is an area set by the dimming area settable range setting unit 35. The dimming area 154 is an area set by the dimming area setting unit 34. The dimmable area settable range 152 shown in FIG. 6 is a rectangular range that includes all of the measurement ranges 150a and 150b and circumscribes the measurement ranges 150a and 150b. In addition, the light control region settable range 152 is a longitudinal direction of an image of a line pattern formed when the illumination light beam L is projected onto the measurement object Ma having a flat and horizontal surface. And a direction perpendicular to the longitudinal direction is a rectangular range. The dimming area 154 is a range included in the dimming area settable range 152. In addition, operation | movement of the measuring range 150a, 150b, the light control area setting possible range 152, and the setting method of the light control area 154 is mentioned later.

  The window 104 has a measurement condition column 112 and a button 114. The measurement condition column 112 includes an acquisition method when acquiring a shape using the light cutting method, a scanning speed of the illumination light beam L, a distance pitch that is an interval for acquiring image data, a distance to be measured, the optical probe 3 and an object to be measured. Information such as the relative value movement distance in each direction with Ma is displayed. The control device 32 updates the information displayed in the measurement condition column 112 when various conditions are updated. The button 114 is a button that is operated when a pre-scan process or a scan process (measurement process) described later is started. When the control unit 32 detects that the button 114 is operated by an input to the input device 6, the control unit 32 performs a pre-scan process or a scan process (measurement process).

  The window 106 has a check box 120 for selecting whether or not to display various profiles related to the displayed image data, a dimming area selection point 122, a measurement range selection point 124, a range column 126, and a button 128. , 130. The check box 120 is a box for selecting whether or not to display a light intensity profile of an image and a histogram. The histogram is a distribution of the maximum luminance value for each column created by extracting the peak value in the width direction of the pattern on the line for each column of the image sensor. When the check box 120 is checked, the control unit 32 displays an image light amount distribution and a histogram of the maximum luminance value distribution over the image window 102. When the dimming area selection point 122 is checked, the coordinate position on the diagonal line of the dimming area range is displayed in the range column 126. When the measurement range selection point 124 is checked, the measurement range, that is, the measurement area where the image is acquired by the imaging device can be set in a rectangle. For the range of the measurement area, the coordinate position on the diagonal line of the measurement area is displayed in the range column 126. The button 128 is a button operated when the automatic light control process is started. The button 130 is a button operated when setting a range and a region on the selected side of the dimming region selection point 122 and the measurement range selection point 124.

  Hereinafter, an example of the processing operation of the shape measuring apparatus 1 will be described with reference to FIG. For example, when the teaching mode is selected, the control unit 32 of the shape measuring apparatus 1 displays the screen 100 shown in FIG. 5 and executes the processing shown in FIG. Further, other processing described later is also realized by executing processing in each unit of the control unit 32 based on a program stored in the storage unit.

  When the teaching mode is selected, the control unit 32 presets the measurement range, the light control region, and the light control region settable range to the entire range that can be imaged by the imaging device 8. Next, the image data is transferred from the imaging device 8 to the control unit 32, and the image data is displayed on the window 102. When such a state is reached, it is determined whether or not the measurement range has been set (step S12). Here, the control unit 32 sets the measurement range when a range smaller than the entire range that can be captured by the imaging device 9, that is, a range smaller than the entire range of the acquired image data is set as the measurement range. It is determined that The method for setting the measurement range can be specified by enclosing part of the image data in an arbitrary shape such as a circle, rectangle, or ellipse on the window 102. For example, after the measurement range selection point 124 is selected and the button 130 is operated, the control unit 32 sets the range specified by the user as the measurement range. Further, the control unit 32 may set the measurement range based on information set in the condition table 46A. In addition, the control unit 32 may extract a pattern image on which the illumination light beam is projected from the image acquired by the imaging device 9, and may use a range where the pattern image is extracted as a measurement range.

  When the control unit 32 determines that the measurement range is set (Yes in step S12), the measurement range setting unit 33 performs measurement range setting processing based on the position coordinates of the image data, and the conditions of the storage unit 46 are determined. Writing to the table 46A (step S14). The control unit 32 sets a range smaller than the range that can be captured by the imaging device 9 as the measurement range. Next, the setting process of the light control area | region settable range is performed (step S15). The maximum coordinate value amax and minimum coordinate value amin of the horizontal axis a of the image data shown in FIG. 6 and the maximum coordinate value bmax and minimum coordinate value bmin of the vertical axis b are acquired from the area information set in the measurement range. The dimming area settable range setting unit 35 of the control unit 32 sets the dimming area settable range 152 based on the maximum coordinate value and the minimum coordinate value of each axis. As shown in FIG. 6, with respect to the vertical axis b, the maximum coordinate value and the minimum coordinate value are both set to have a margin for several pixels, the maximum coordinate value is set to b′max, and the minimum coordinate value is set. The value b′min may be set. Of course, the maximum coordinate value and the minimum coordinate value of each axis on both the vertical axis and the horizontal axis may be used as the boundary coordinate values of the light control area settable range as they are. The light control area settable range is preferably a range that includes all the measurement ranges and circumscribes at least one of the measurement ranges, but is not limited thereto, and does not need to include the measurement ranges. It does not have to be. In addition, the set condition for determining the dimmable area settable range may be set by the user, or the shape measuring apparatus 1 may set it automatically. The light control area setting unit 34 also sets the light control area to the same range as the light control area settable range. These set dimming area setting range and dimming area are written in the condition table 46A of the storage unit 46 by the control unit 32.

  When it is determined that there is no measurement range setting (No in step S12), or when the measurement range setting process is performed, the control unit 32 determines whether the dimming area is set by the input device 6 (step S12). S16).

  When it is determined that the dimming area is set (Yes in step S16), the control unit 32 performs dimming area setting processing by the dimming area setting unit 34 (step S18).

  Hereinafter, the dimming range setting process will be described with reference to FIG. As described above, the control unit 32 acquires the measurement range by the dimming area settable range setting unit 35 (step S40) and sets the dimming area settable range 152 (step S42). For example, as shown in FIG. 6, a range circumscribing all the measurement ranges is set as a light control region settable range. In addition, it is good also considering the range circumscribing at least one location of a measurement range including all the measurement ranges as a light control area | region setting possible range.

  Next, the control unit 32 displays the light control area settable range set on the image data (step S43). Specifically, the measurement range and the light control region settable range are displayed in an overlapping manner on the image window 102 of the display device 5. Thereby, the user can confirm the range set as the measurement range and the light control region settable range in the imaging region that can be imaged by the imaging device 9.

  After displaying the measurement range and the light control area settable range, the control unit 32 determines whether there is an instruction to set the light control area settable range as the light control range (step S44). If the control unit 32 determines that there is an instruction to set the light control area settable range as the light control range (Yes in step S44), the control unit 32 proceeds to step S48. When it is determined that there is no instruction for setting the light control area settable range as the light control range (No in step S44), the control unit 32 determines whether there is an instruction for the light control range (step S46). When it is determined that there is no instruction regarding the light control range (No in step S46), the control unit 32 proceeds to step S48. If the control unit 32 determines Yes in step S44 or No in step S46, the dimming region setting unit 34 sets the dimming region settable range as the dimming range (step S48), and ends this process.

  When it is determined that there is an instruction for the light control range (Yes in step S46), the control unit 32 determines whether the instruction range is included in the light control area settable range (step S50). When it is determined that the instruction range is not included in the dimmable area setting range (No in step S50), the control unit 32 instructs the dimming area setting unit 34 to specify a range that does not exceed the dimming area setting range. Is adjusted to set a light control area (step S52). Specifically, a measurement range 162 is set in a range 160 that can be imaged by the imaging device 8 illustrated in FIG. 9A, and a dimming area settable range 164 is set based on the measurement range 162. In this embodiment, the range 160 is an image displayed in the image window. In this state, when the range 166 is designated as an instruction to set the dimming range, a range where the range 166 and the dimming region settable range 164 overlap is set as the dimming region 168. When the control unit 32 determines that the designated range is included in the dimmable region settable range (Yes in step S50), the dimming region setting unit 34 sets the designated range to the dimming range ( Step S54).

  After setting the light control region (light control range) in step S48, step S52, or step S54, the control unit 32 displays the set light control region (step S55). Specifically, the light control region is displayed in an overlapping manner on the image window 102 of the display device 5. Thereby, the user can confirm the range set as the light control region in the photographing region that can be photographed by the imaging device 9.

  Returning to FIG. 7, the description will be continued. When it is determined that the light control area is not set (No in step S16), or when the light control area setting process is performed, the control unit 32 determines whether to perform pre-scanning (step S20). Here, the pre-scan refers to the position where the line light is irradiated by moving the optical probe 3 and the object to be measured relative to each other based on the set conditions, moving the position where the pattern image is projected. This is processing to be displayed on the device 5. While relatively moving the object to be measured, image data including an image of a line pattern acquired by the imaging device 9 at a predetermined frame rate is displayed one after another. At the same time, the measurement ranges 150a and 150b, the dimming area settable range 152, and the dimming area 154 may be continuously displayed while being superimposed on the image data. When it is determined that the pre-scan is to be executed (Yes in Step S20), the control unit 32 executes the pre-scan process (Step S22).

  When it is determined that the pre-scan is not performed (No in Step S20) or when the pre-scan process is performed, the control unit 32 determines whether the setting is completed (Step S24). When it is determined that the setting has not been completed (No in Step S24), the control unit 32 returns to Step S12 and executes the above-described process again.

  The control unit 32 generates the shape measurement program when the measurement range position information and the dimming range position information stored in the storage unit 46 and the measurement conditions such as the scanning path of the optical probe 3 are set (step S28). ). The control unit 32 generates a shape measurement program for measuring the object to be measured Ma including the measurement range, the light control region, the light control method, and the measurement coordinate calculation region, and stores the shape measurement program in the storage unit 46. Specifically, the control unit 32 determines a measurement path and a measurement speed based on various conditions, a movement path in the XYZ-axis direction by the probe moving device 2, a rotation speed in the Zθ direction by the holding and rotating device 7, and the optical probe 3. A shape measurement program including information on the determined operation, information on the determined operation, information on the set dimming conditions, and information on a measurement range for extracting the position of the pattern image from the acquired image Generate.

  After generating the shape measurement program, the control unit 32 determines whether to perform measurement (step S30). Here, the measurement means that the optical probe 3 and the object to be measured Ma are relatively moved based on the set conditions, the position where the pattern image is projected is moved, and the pattern image is projected within the measurement region. This is a process for measuring the shape by obtaining the coordinate value (point group data) of each part of the object to be measured. When it is determined that the measurement is to be performed (Yes in step S30), the control unit 32 repeats imaging of the imaging device 8 at a predetermined frame rate. The dimming control unit 36 obtains the maximum pixel value of each pixel column included in the dimming range from the photographed image data, and the dimming control unit 36 transmits the dimming control information to the light source device 8 and the imaging device 9. Is output (step S31). Next, based on the dimming conditions, the imaging device 9 captures an image of the pattern projected on the object Ma to be measured, and sends the image data at that time to the measurement unit 37 of the control unit 32 (step S32). Next, the measurement unit 37 obtains the position of the pattern image from the image data based on the measurement range information, and the pattern of the object to be measured Ma is determined from the position information of the probe moving device 2 and the position information of the pattern image. A three-dimensional coordinate value of the projected portion is calculated (step S33).

  The control unit 32 performs processing from step S12 to step S28 in FIG. 7, that is, processing other than the measurement processing until the creation of the shape measurement program as teaching processing, and executes it as processing in a mode different from the measurement processing. Also good. Moreover, the control part 32 does not need to perform step S20 and step S22. That is, the measurement range, the dimming area, and the dimmable area setting range may not be displayed on the display device 5.

  As described above, the control unit 32 of the present embodiment sets the dimming area settable range based on the measurement range, and restricts the range in which the dimming area can be set in the dimming area settable range. The light control area can be a range corresponding to the measurement range. Accordingly, it is possible to easily set the area where the pattern image is projected as the dimming area, and it is possible to suppress setting the area where no pattern image is projected as the dimming area. As described above, a more appropriate area can be easily set as the dimming area, and the dimming condition calculated based on the dimming area can be set as a more appropriate condition.

  For example, in the example illustrated in FIG. 6, the dimming area 154 is set within a range included in the dimming area settable range 152 set based on the measurement ranges 150 a and 150 b. In this way, by setting the dimming area 154 within the range included in the dimming area settable range 152, the measurement ranges 150a and 150b may include a range where strong reflection near the tooth tip is included. Dimming conditions can be set without being affected. In addition, when the range not including the tooth tip is set as the light control region 154 and the light control condition is set, the accuracy near the tooth tip is saturated and the accuracy is deteriorated, but it is a part that does not require accuracy in practice, and the shape High measurement accuracy can be maintained.

  The patterns 142a, 142b, and 142c are light that diffusely reflects the illumination light beam L, and the bright line 144 is light that is specularly reflected from the illumination light beam L. Here, in general, there is a difference of about 10 to 1000 times in the amount of return light between the diffusely reflected portion and the specularly reflected portion, and the light amount of the diffusely reflected portion is smaller than that of the specularly reflected portion. . For this reason, the bright line 144 is included in the dimming range, and when the dimming condition is set based on the light quantity of the bright line 144, it is incident as compared with the case where the dimming condition is set based on the light quantity of the patterns 142a, 142b, 142c. In some cases, the amount of light may be less than 1/1000, and if expressed with pixel values having only a few hundred gradations, the bright line 144 can be detected, but the patterns 142a, 142b, and 142c cannot be detected. . On the other hand, in the present embodiment, the dimming area 154 is set within the range included in the dimming area settable range 152, so that the range including the patterns 142a, 142b, and 142c is set in the dimming area 154. In addition, it is possible to make it difficult to set the range including the bright line 144 as the light control region 154.

  In addition, the control unit 32 of the present embodiment can set a plurality of measurement ranges by the measurement range setting unit 33, thereby selecting a range on which the pattern image is projected and setting the measurement range. it can. As a result, the possibility that a bright line or the like occurs in the measurement range can be reduced, and the shape measurement accuracy can be further increased.

  In addition, the control unit 32 according to the above embodiment captures the light control area by setting the range in which the light control area can be set as a rectangular range in which the longitudinal direction of the line pattern image and the direction orthogonal to the longitudinal direction are sides. The direction in which the image is read by the device 9 and the side of the light control area settable range can be the same direction. As a result, by specifying the two points of the start point and the end point, the rectangular dimmable area setting range can be specified, and the processing becomes simple. Note that the shape of the light control area settable range is not limited to a rectangle. In the range 160 shown in FIG. 9B, the light control area settable range 164a is a pentagon. In this way, the light control region settable range can be a closed shape combining triangles, pentagons or more polygons, circles, ellipses, arcs and straight lines.

  In the above-described embodiment, the dimming area is a rectangular range in which the longitudinal direction of the image of the line pattern and the direction orthogonal to the longitudinal direction are sides, so that the image reading device 9 reads the image. And the sides of the light control area settable range can be in the same direction. Thereby, a rectangular dimming area can be specified by specifying two points, a start point and an end point. As a result, calculations such as a histogram of the light control area can be simplified. The shape of the light control area is not limited to a rectangle. In the range 160 shown in FIG. 9B, the light control area settable range 164a is a pentagon. In this way, the light control region settable range can be a closed shape combining triangles, pentagons or more polygons, circles, ellipses, arcs and straight lines.

  In addition, the control unit 32 according to the present embodiment enables prescan processing to be performed, so that the variation in the image of the measurement range and the light control region when the object to be measured M and the illumination light beam L move relative to each other can be detected by the user. Can be visually confirmed. Thereby, a measurement range and a light control area | region can be set to a more suitable range and area | region.

  Moreover, the shape measuring apparatus 1 can set the measurement range to an arbitrary area. In the above-described embodiment, a region where a pattern image is formed is selected to have a plurality of measurement ranges. However, a wide range including the entire range where a pattern image is formed may be used as one measurement range. In this case, the measurement range may include a bright line, but by setting the dimming area based on the dimmable area setting range set based on the measurement range, only a part of the area is defined as the dimming area. can do. Thereby, dimming conditions can be made into appropriate conditions.

  Moreover, although the control part 32 set the light control conditions at the time of preparation of a shape measurement program, it is not limited to this. The control unit 32 may set the dimming condition based on the amount of light in the dimming area of the image at the time of measurement. Thereby, it can be set as the light control conditions suitable for the image acquired at the time of a measurement.

  In addition, both the dimming area setting range setting unit 35 and the dimming area setting unit 34 and the dimming control unit 36 may be arranged in the imaging device 9. In this case, the control unit 32 causes the imaging device 9 to output the maximum coordinate value and minimum coordinate value information of each axis of the measurement range from the measurement range setting unit 32. Then, the dimming area designation information and the dimming area settable range information input from the input device 6 via the control unit 32 are compared, and the dimming area setting unit 39 in the imaging device 9 compares the dimming area designation information with the dimming area setting unit 39. May be set. In addition, the dimming control unit 36 in the imaging device 9 acquires the distribution information of the maximum pixel value of each pixel column for the pixel values in the dimming region from the image processing unit 25 in the imaging device 9, Based on the information, exposure control of the image sensor 20 may be performed.

  Hereinafter, it demonstrates in detail using FIG. 10A to FIG. 10C. The shape measuring apparatus 1 projects the illumination light beam L while relatively moving the optical probe 3 and the object to be measured Ma, and acquires an image of the projected pattern. Therefore, as shown in FIGS. 10A to 10C, the shape measuring apparatus 1 gradually changes the positions of the shape of the object to be measured Ma and the pattern with respect to the image. Specifically, the outer shape 180 of the object to be measured moves to the screen side from the screen window 102A toward the screen window 102B and from the screen window 102B to the screen window 102C. In the screen windows 102 </ b> A, 102 </ b> B, and 102 </ b> C, a dimming area 192 is set in a range included in the dimming area settable range 190. Further, the screen windows 102A, 102B, and 102C have the same range as the dimming area settable range 190 set as the measurement area. The shape measuring apparatus 1 can set the light control region 192 based on the light control region settable range 190, so that the portion where the bright spot 182 appears in the outer shape 180 in any image can be removed from the light control region 192. As described above, since the dimming area can be set to a narrow range, the dimming condition suitable for the acquired image can be obtained even when the dimming condition is set during measurement.

  As in this embodiment, the movement mechanism of the shape measuring apparatus 1 includes a first direction, a second direction orthogonal to the first direction, and a first direction orthogonal to the plane formed by the first direction and the second direction. It is preferable that the optical probe 3 and the object to be measured M (Ma) can be moved relative to each other in the direction 3, and the plane formed by the first direction and the second direction includes the radial direction. Thereby, the relative position can be moved in an arbitrary direction. In addition, the shape measuring apparatus 1 is not limited to the shape measuring apparatus 1, and various combinations can be used as a mechanism for moving the relative position between the measured object M and the pattern projected onto the measured object M. The shape measuring apparatus 1 may move either the optical probe 3 or the object M to be measured in the X-axis, Y-axis, or Z-axis direction, or may rotate around the X-axis, Y-axis, or Z-axis direction. Good. Further, the shape measuring apparatus 1 may be a mechanism that does not relatively move.

  Incidentally, although an example in which a line pattern is projected by the illumination optical system 13 of the optical probe 3 has been described, the present invention is not limited to this. For example, an optical system on which a dot-like spot pattern is projected onto the object to be measured M, and illumination optics having a deflection scanning mirror so that the spot pattern can be scanned in one direction on the surface of the object to be measured M. A system may be used. In this case, the longitudinal direction of the line pattern corresponds to the scanning direction of the deflection scanning mirror. Thus, the dot-shaped spot pattern is projected while scanning at least within the linear scanning range, and the linear scanning range becomes a line-shaped pattern.

  Although the shape measuring apparatus 1 of the said embodiment processed with one apparatus, you may combine two or more. FIG. 11 is a schematic diagram showing a configuration of a system having a shape measuring apparatus. Next, a shape measuring system 300 having a shape measuring device will be described with reference to FIG. The shape measuring system 300 includes a shape measuring device 1, a plurality (two in the figure) of shape measuring devices 1 a, and a program creation device 302. The shape measuring devices 1 and 1a and the program creating device 302 are connected by a wired or wireless communication line. The shape measuring apparatus 1a has the same configuration as that of the shape measuring apparatus 1 except that the shape measuring apparatus 1a does not include the measurement range setting unit 33, the light control region setting unit 34, and the light control region settable range setting unit 35. The program creation device 302 creates various settings and programs created by the control device 4 of the shape measuring device 1 described above. Specifically, the program creation device 302 includes a shape measurement program including information on a measurement range, a dimming area settable range and a dimming area, a measurement range, a dimming area settable range, and information on a dimming area. create. The program creation device 302 outputs the created program and data to the shape measuring devices 1 and 1a. The shape measuring device 1a acquires area and range information and a shape measuring program from the shape measuring device 1 and the program creation device 302, and performs processing using the acquired data and program. The shape measurement system 300 effectively uses the created data and program by executing measurement with the shape measurement device 1a using the data and program created by the shape measurement device 1 and the program creation device 302 as a measurement program. be able to. In addition, the shape measuring apparatus 1a can perform measurement without providing the measurement range setting unit 33, the dimming area setting unit 34, the dimming area setting possible range setting unit 35, and other units for performing other settings.

  Next, a structure manufacturing system including the above-described shape measuring apparatus will be described with reference to FIG. FIG. 12 is a block diagram of the structure manufacturing system. The structure manufacturing system 200 of this embodiment includes a shape measuring device 201, a design device 202, a forming device 203, a control device (inspection device) 204, and a repair device 205 as described in the above embodiment. Prepare. The control device 204 includes a coordinate storage unit 210 and an inspection unit 211.

  The design device 202 creates design information related to the shape of the structure, and transmits the created design information to the molding device 203. In addition, the design apparatus 202 stores the created design information in the coordinate storage unit 210 of the control apparatus 204. The design information includes information indicating the coordinates of each position of the structure.

  The molding apparatus 203 creates the above structure based on the design information input from the design apparatus 202. The molding of the molding apparatus 203 includes, for example, casting, forging, cutting, and the like. The shape measuring device 201 measures the coordinates of the created structure (measurement object) and transmits information (shape information) indicating the measured coordinates to the control device 204.

  The coordinate storage unit 210 of the control device 204 stores design information. The inspection unit 211 of the control device 204 reads design information from the coordinate storage unit 210. The inspection unit 211 compares information (shape information) indicating coordinates received from the shape measuring apparatus 201 with design information read from the coordinate storage unit 210. The inspection unit 211 determines whether or not the structure has been molded according to the design information based on the comparison result. In other words, the inspection unit 211 determines whether or not the created structure is a non-defective product. The inspection unit 211 determines whether or not the structure can be repaired when the structure is not molded according to the design information. When the structure can be repaired, the inspection unit 211 calculates a defective portion and a repair amount based on the comparison result, and transmits information indicating the defective portion and information indicating the repair amount to the repair device 205.

  The repair device 205 processes the defective portion of the structure based on the information indicating the defective portion received from the control device 204 and the information indicating the repair amount.

  FIG. 13 is a flowchart showing the flow of processing by the structure manufacturing system. In the structure manufacturing system 200, first, the design apparatus 202 creates design information related to the shape of the structure (step S101). Next, the shaping | molding apparatus 203 produces the said structure based on design information (step S102). Next, the shape measuring apparatus 201 measures the shape of the created structure (step S103). Next, the inspection unit 211 of the control device 204 inspects whether or not the structure is created according to the design information by comparing the shape information obtained by the shape measurement device 201 with the design information (step). S104).

  Next, the inspection unit 211 of the control device 204 determines whether or not the created structure is a good product (step S105). When the inspection unit 211 determines that the created structure is a non-defective product (Yes in step S105), the structure manufacturing system 200 ends the process. If the inspection unit 211 determines that the created structure is not a non-defective product (No in step S105), the inspection unit 211 determines whether the created structure can be repaired (step S106).

  In the structure manufacturing system 200, when the inspection unit 211 determines that the created structure can be repaired (Yes in Step S106), the repair device 205 performs reworking of the structure (Step S107), and the process of Step S103 is performed. Return to processing. When the inspection unit 211 determines that the created structure cannot be repaired (No in step S106), the structure manufacturing system 200 ends the process. Thus, the structure manufacturing system 200 ends the process of the flowchart shown in FIG.

  The structure manufacturing system 200 of the present embodiment can determine whether or not the created structure is a good product because the shape measuring apparatus 201 in the above embodiment can measure the coordinates of the structure with high accuracy. be able to. In addition, the structure manufacturing system 200 can repair the structure by reworking the structure when the structure is not a good product.

  Note that the repair process executed by the repair device 205 in the present embodiment may be replaced with a process in which the molding device 203 re-executes the molding process. In that case, when it determines with the test | inspection part 211 of the control apparatus 204 being able to repair, the shaping | molding apparatus 203 re-executes a shaping | molding process (forging, cutting, etc.). Specifically, for example, the molding apparatus 203 cuts a portion that should be originally cut but not cut in the structure. Thereby, the structure manufacturing system 200 can create a structure correctly.

  As described above, the preferred embodiments according to the present invention have been described with reference to the accompanying drawings, but the present invention is not limited to the examples. Various shapes, combinations, and the like of the constituent members shown in the above-described examples are examples, and various modifications can be made based on design requirements and the like without departing from the gist of the present invention.

  For example, the shape measuring apparatus 1 in the above embodiment has exemplified the configuration in which the holding member 55 is cantilevered to hold the optical probe 3, but is not limited thereto, and may be configured to be held by both ends. By holding both ends, the deformation generated in the holding member 55 during rotation can be reduced, and the measurement accuracy can be improved.

  In the above-described embodiment, line light is irradiated as the illumination light beam L from the optical probe 3 and a line pattern reflected from the object to be measured is imaged. However, the type of the optical probe 3 is not limited to this. The illumination light emitted from the optical probe 3 may be in the form of being collectively irradiated onto a predetermined plane. For example, the method described in US Pat. No. 6,075,605 may be used. The illumination light emitted from the optical probe may be in the form of irradiating point spot light.

  In addition, the shape measuring apparatus is preferably used for measurement of an object to be measured having a concavo-convex shape having a repeated shape in the circumferential direction and extending in a direction different from the circumferential direction as in the above embodiment. be able to. The shape measuring apparatus can use the set conditions for measuring other repetitive shapes by setting a measurement range, a dimmable region settable range, and a dimming region for one of the repetitive shapes. The object to be measured is not limited to a shape having a repetitive shape in the circumferential direction and having an uneven shape extending in a direction different from the circumferential direction, and various shapes such as a shape not having a repetitive shape. It may be.

DESCRIPTION OF SYMBOLS 1 Shape measuring apparatus 2 Probe moving apparatus 3 Optical probe 4 Control apparatus 5 Display apparatus 6 Input apparatus 7 Holding | maintenance rotation apparatus 8 Light source apparatus 9 Imaging apparatus 10 Drive part 11 Position detection part 12 Light source 13 Illumination optical system 20 Imaging element 20a Light-receiving surface 21 Imaging optical system 21a Object surface 32 Control unit 33 Measurement range setting unit 34 Dimming region setting unit 35 Dimming region settable range setting unit 36 Dimming control unit 37 Measuring unit 38 Operation control unit 46 Storage unit 46A Condition table 46B Shape Measurement program 50X, 50Y, 50Z Moving part 52 Holding body 53 First rotating part 53a Rotating axis 54 Second rotating part 55 Holding member 55A First holding part 55B Second holding part 62, 63, 64, 65, 66, 68 Arrows 71 Table 72 Rotation drive unit 73a, 73b Reference sphere 100 Screen 102, 102A, 102 , 102C Image window 104, 106 Window 112 Measurement condition column 114, 128, 130 Button 120 Check box 122 Dimming area selection point 124 Measurement range selection point 126 Range column 140, 180 Outline 142a, 142b, 142c Pattern 144 Bright line 150a, 150b Measurement range 152, 190 Light control area settable range 154, 192 Light control area 182 Bright spot 200 Structure manufacturing system 201 Shape measuring device 202 Design device 203 Molding device 204 Control device 205 Repair device 210 Coordinate storage unit 211 Inspection unit 300 Shape Measurement system 302 Program creation device AX Center of rotation axis B Base M Object to be measured L Illumination beam

Claims (16)

An irradiation unit that projects a line pattern onto a measurement region of the object to be measured or projects the pattern while scanning the pattern in at least one direction, and a direction different from the projection direction of the pattern by the irradiation unit to the object to be measured. A probe including an imaging unit that captures an image of the projected pattern and outputs image data;
A measurement range setting unit for setting a measurement range for detecting the position of the image of the pattern within an imaging range by the imaging unit;
A dimming area setting unit for setting a dimming area for detecting the brightness of the captured image within the imaging range of the imaging unit;
Depending on the brightness of the captured image detected in the light control area, the amount of light emitted from the irradiating unit, the amount of received light received by the imaging unit, and the exposure amount when the image data is acquired by the imaging unit Or a dimming control unit that controls input / output characteristics of the imaging unit;
Based on position information of the measurement range within the imaging range by the imaging unit, a dimming region settable range for setting a dimming region settable range that allows the dimming region to be set within the imaging range by the imaging unit A shape measuring device having a setting unit.   The shape measuring apparatus according to claim 1, wherein the dimming area settable range setting unit sets the boundary of the dimming area settable range so as to be in contact with at least one place of the boundary of the measuring range.   The shape measuring apparatus according to claim 1, wherein the measurement range setting unit sets a plurality of the measurement ranges.   The shape measuring device according to claim 3, wherein the dimming area settable range setting unit sets a range including all of the measurement range as the dimming area settable range.   The shape measuring apparatus according to claim 4, wherein the light control region settable range setting unit sets a boundary of the light control region settable range so as to circumscribe the boundary of the measurement region.   The dimming area settable range setting unit sets a rectangular area whose sides are a longitudinal direction of the image of the line pattern and a direction orthogonal to the longitudinal direction as the dimming area settable range. The shape measuring apparatus according to claim 5.   The dimming area setting unit is the same as the dimming area setting possible range when the dimming area is not set or when the dimming area is set to a range wider than the dimming area setting possible range. The shape measuring apparatus according to claim 4, wherein a range is set in the dimming region. A display unit for displaying the image data;
The shape measuring apparatus according to claim 1, wherein the display unit displays the dimmable setting possible range so as to overlap the image data.   The shape measuring apparatus according to claim 8, wherein the display unit displays at least one of the measurement range and the light control region so as to overlap the image data.   The shape measurement according to any one of claims 1 to 9, further comprising a measurement unit that measures the shape of the object to be measured based on a position of an image of the pattern located within the measurement range of the image data. apparatus. A molding apparatus for molding the structure based on design information relating to the shape of the structure;
The shape measuring device according to any one of claims 1 to 10, which measures the shape of the structure formed by the forming device,
A structure manufacturing system comprising: a control device that compares shape information indicating the shape of the structure measured by the shape measuring device with the design information. A line pattern is projected onto the measurement area of the object to be measured, or the pattern is projected while being scanned in at least one direction, and an image of the pattern projected onto the object to be measured from a direction different from the pattern projection direction is obtained. A shape measurement method for obtaining image data by imaging and measuring the shape of the object to be measured based on the position of the image of the pattern in the measurement region of the image data,
Setting a measurement range for detecting a position of the pattern image within an imaging range for capturing the pattern image;
Setting a dimmable area settable range within a range for forming the image data based on position information of the measurement range within an imaging range for capturing an image of the pattern;
Setting a dimming area for detecting the brightness of a captured image based on the dimming area settable range;
In accordance with the brightness of the photographed image detected in the light control area, the amount of light projected onto the measurement area, the amount of light received when acquiring the image data, and the image data in the imaging unit Controlling the exposure amount when acquiring image data or the input / output characteristics when acquiring the image data.   The shape measurement method according to claim 12, wherein the dimming area is included in the dimming area settable range. Molding the structure based on design information regarding the shape of the structure;
Measuring the shape of the molded structure by the shape measuring method of claim 12 or 13,
Comparing shape information indicating the shape of the measured structure with the design information;
A structure manufacturing method comprising: A line pattern is projected onto the measurement area of the object to be measured, or the pattern is projected while being scanned in at least one direction, and an image of the pattern projected onto the object to be measured from a direction different from the pattern projection direction is obtained. A shape measurement program for obtaining image data by imaging and measuring the shape of the object to be measured based on the position of the image of the pattern in the measurement area of the image data,
On the computer,
Setting a measurement range for detecting a position of the pattern image within an imaging range for capturing the pattern image;
Setting a dimming area settable range within the imaging range for capturing the image of the pattern based on positional information of the measurement range within the imaging range for capturing the image of the pattern;
Setting a dimming area for detecting the brightness of a captured image based on the dimming area settable range;
In accordance with the brightness of the photographed image detected in the light control area, the amount of light projected onto the measurement area, the amount of light received when acquiring the image data, and the image data in the imaging unit A shape measurement program for controlling an exposure amount when acquiring image data or controlling input / output characteristics when acquiring the image data.   A recording medium that records the shape measurement program according to claim 15 and is readable by a computer.

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