JP6834322B2 - Parts inspection tray and parts inspection method - Google Patents

Description

The present invention relates to a tray for parts inspection by a probe and a parts inspection method using the tray.

Conventionally, when inspecting a product of a plurality of parts, there is a method of inspecting the parts side by side on an inspection table. For example, when inspecting rod-shaped or linear parts, a method is known in which a groove-shaped fixing portion is formed on an inspection table and the parts are placed inside the fixing portion (see Patent Document 1).

Japanese Patent Application Laid-Open No. 01-097877

By the way, when the inspection item of a part is appearance or surface color, it is easy to inspect a plurality of parts at once by embedding a camera, a color sensor, etc. around the part or the bottom of a fixed part. It becomes. On the other hand, when inspecting the electrical and mechanical characteristics of a part using a probe (probe needle, probe needle), the probe comes into close contact with various parts of the part, so the inspection device and the part Interference with can occur. For example, when the tip of the probe is brought into contact with the terminal region (land) provided on the surface of the component, a portion other than the tip of the probe may interfere with the uneven shape of the component. Such interference can be eliminated by arranging the individual components in a separated state. However, if the layout interval of individual parts is widened, the size of the inspection table becomes large and the amount of movement of the probe increases, so that the inspection efficiency may decrease. In addition, the space for installing the inspection table becomes large, and the space utilization efficiency may decrease.

One aspect is aimed at improving inspection efficiency.

In one aspect, the parts inspection tray is provided with a mounting table and a suction port. The mounting table is formed in a terrace shape having a plurality of terraces and a plurality of terraces cliff, each of the plurality of components to be inspected with the probe is at a position in contact with each terrace cliff of the plurality of terraces cliff , It is placed on each terrace surface of the plurality of terrace surfaces. The suction port is provided on each terrace surface of the plurality of terrace surfaces or each terrace cliff of the plurality of terrace cliffs, and the component is sucked and fixed to the above-mentioned stand.

Inspection efficiency can be improved.

It is a perspective view of a part inspection tray. It is a figure which shows typically the structure of the inspection apparatus. It is a schematic vertical sectional view of a mounting table. It is a schematic perspective view which shows the tip of a probe enlarged. It is a flowchart for demonstrating the part inspection method. It is a perspective view which shows the part inspection tray as a comparative example.

Hereinafter, a parts inspection tray and a parts inspection method as an embodiment will be described with reference to the drawings. However, the embodiments shown below are merely examples, and there is no intention of excluding various modifications and applications of techniques not specified in the embodiments. That is, the present embodiment can be variously modified (for example, in combination with the embodiments and modified examples) without departing from the spirit of the present embodiment.

[1. Constitution]
FIG. 1 is a perspective view of the parts inspection tray 10. The component inspection tray 10 is a pedestal on which the component 11 is placed so that the position of the component 11 can be stably fixed and held when the component 11 is inspected with a probe. The component inspection tray 10 is provided with a plurality of mounting locations so that a plurality of components 11 can be mounted at the same time. When the shape of the component 11 is a long shape, the shape of the mounting portion is also formed into a long groove shape corresponding to the shape of the component 11. In this embodiment, as shown in FIG. 1, a component inspection tray 10 in which six mounting locations corresponding to the long-shaped component 11 are provided is illustrated.

FIG. 2 is a diagram schematically showing a configuration of an inspection device 20 including a parts inspection tray 10. The inspection device 20 is provided with a mounting unit 12, a probe unit 8, and an imaging unit 17. The mounting portion 12 is a portion to which the component inspection tray 10 is mounted. A movable mounting portion stage 13 is provided below the mounting portion 12. By operating the mounting portion stage 13, the position and angle (for example, the horizontal position, the rotation angle about the vertical axis, etc.) of the component inspection tray 10 mounted on the mounting portion 12 can be changed.

The probe portion 8 is a portion for bringing the probe into close contact with various parts of the component 11. The probe portion 8 is provided with a probe needle 9 (probe), a probe arm 14, and a probe stage 15. As shown in FIG. 3, the probe needle 9 is attached to the lower surface side of the probe arm 14, and projects obliquely downward from the tip of the probe arm 14. The tip of the probe needle 9 has a shape bent so as to go vertically downward. The base end of the probe arm 14 is supported by a movable probe stage 15. By operating the probe stage 15, the position and angle of the probe needle 9 attached to the probe arm 14 (for example, the position in the vertical direction, the rotation angle around the vertical axis, and the extending direction of the probe arm 14 are parallel to each other. The rotation angle around the axis, etc.) can be changed.

The imaging unit 17 is a portion for confirming the appearance and arrangement state of the component 11, the proximity of the probe and the component 11, the contact state, and the like with an image. The image pickup unit 17 is provided with a camera 16 (imaging device) that photographs the upper surface side of the component inspection tray 10. Further, a movable camera stage 18 is provided below the camera 16. By operating the camera stage 18, the position and angle of the camera 16 (for example, the horizontal position, the vertical position, etc.) can be changed.

Each of the mounting portion stage 13, the probe stage 15, and the camera stage 18 is connected to an electronic control device (not shown), and the operating state of each is controlled according to a predetermined program. The electronic control device has a built-in processor (CPU, central processing unit), memory (main memory, main storage device), auxiliary storage device, interface device, recording medium drive, etc., and is connected to each other via an internal bus so that they can communicate with each other. Will be done.

The processor is a central processing unit that incorporates a control unit (control circuit), an arithmetic unit (arithmetic circuit), a cache memory (register group), and the like. A memory is a storage device for storing programs and data being worked on, and includes ROM (Read Only Memory) and RAM (Random Access Memory). On the other hand, an auxiliary storage device is a memory device that stores data and firmware that are retained for a longer period of time than memory, and includes non-volatile memory such as flash memory and EEPROM (Electrically Erasable Programmable Read-Only Memory). Is done. The interface device controls the input and output (I / O) between the electronic control device and the outside.

The recording medium drive is a reading device that reads information recorded and stored on a recording medium (removable medium) such as an optical disk or a semiconductor memory. The program executed by the electronic control device may be recorded and saved in the memory, or may be recorded and saved in the auxiliary storage device. Alternatively, the program may be recorded and stored on the recording medium, and the program written on the recording medium may be read into the electronic control device via the recording medium drive.

The structure of the component inspection tray 10 will be described in detail. Of the part inspection tray 10, the portion on the upper surface side on which the part 11 is placed is called a mounting table 1.
As shown in FIG. 1, the approximate shape of the mounting table 1 is a terrace shape. The terrace surface 2 and the terrace cliff 3 are provided on the platform 1. The number of terraces 2 and terraces 3 is plural. The height of the terrace surface 2 is set to a height different from that of the adjacent terrace surface 2, and the height of each terrace surface 2 increases monotonically from the lowest terrace surface to the highest terrace surface. The height is set. Preferably, the height of each terrace surface 2 is set so that the height increases stepwise (that is, the height difference from the adjacent terrace surface 2 becomes constant).

The terrace surface 2 is a planar (for example, planar, curved surface, etc.) portion that contacts the lower surface of the component 11, and is generally horizontal. On the other hand, the terrace cliff 3 is a planar (for example, planar, curved surface, etc.) portion that contacts the side surface of the component 11, and is generally vertical. However, the specific surface shapes of the terrace surface 2 and the terrace cliff 3 can be appropriately changed according to the shape of the component 11 in contact with each of them.

As shown in FIG. 3, a passage for sucking and fixing the component 11 to the mounting table 1 is provided inside the component inspection tray 10. The suction port 4, which is the exit portion of the passage, is arranged on either the terrace surface 2 or the terrace cliff 3. The suction port 4 is arranged at a position on the surface of the terrace surface 2 or the terrace cliff 3 in contact with the component 11. Reference numeral 19 in FIGS. 1 and 3 is a pump connection port 19 connected to a suction pump (not shown). By sucking air with the suction pump, the component 11 is sucked onto the mounting table 1, and the position of the component 11 is stably fixed and held.

A convex portion 5 is projected from the end edge of the terrace surface 2 connected to the terrace cliff 3 on the lower side. As shown in FIG. 3, the convex portion 5 has a shape in which a protruding corner portion where the terrace surface 2 and the terrace cliff 3 meet is projected in the vertically upward direction. The convex portion 5 may be extended along the extending direction of the component 11 mounted on the mounting table 1 to be formed as a ridge. By providing the convex portion 5, the component 11 placed on the terrace surface 2 is prevented from falling. Further, an inclined surface 6 is formed at a protruding corner portion where the top surface of the convex portion 5 and the terrace cliff 3 on the lower side of the convex portion 5 are in contact with each other. The inclined surface 6 is a portion that forms an inclined surface with respect to both the top surface of the convex portion 5 and the terraced cliff 3 below the convex portion 5. By chamfering the protruding corner portion in this way, the workability of placing and removing the component 11 is improved.

A recess 7 is provided at the end of the terrace surface 2 connected to the terrace cliff 3 on the upper side. As shown in FIG. 3, the recess 7 is a portion having a shape in which the inside corner portion where the terrace surface 2 and the terrace cliff 3 are in contact with each other is recessed toward the inside of the mounting table 1. The recess 7 may be extended along the extending direction of the component 11 mounted on the mounting table 1 to form a groove. By providing the recess 7, the component 11 placed on the terrace surface 2 is less likely to interfere with the inside corner portion, and the component 11 is more likely to come into surface contact with the terrace surface 2 and the terrace cliff 3.

FIG. 4 is an enlarged perspective view showing a tip portion of the probe needle 9. In the present embodiment, it is assumed that each of the plurality of probe needles 9 is inspected to measure the dark current by bringing the tip of the probe needle 9 into contact with the land 21 of the component 11. At the time of inspection, the position and angle of the probe arm 14 are controlled so that the plurality of probe needles 9 come into contact with different lands. Further, the pressure when the tip of the probe needle 9 is pressed against the land 21 is controlled to a predetermined pressure.

[2. flowchart]
FIG. 5 is a flowchart for explaining an inspection method of the component 11 by the probe needle 9. First, as shown in FIG. 3, a terrace-shaped mounting table 1 having a terrace surface 2 and a terrace cliff 3 is prepared (step A1). The shape of the mounting table 1 is preferably a shape having a convex portion 5. The convex portion 5 is formed at a protruding corner portion between the terrace surface 2 and the terrace cliff 3. Further, preferably, the convex portion 5 is provided with the inclined surface 6. The inclined surface 6 has a surface shape that is inclined with respect to both the top surface of the convex portion 5 and the terraced cliff 3 below the convex portion 5. More preferably, the recess 7 is provided at the entrance of the terrace surface 2 and the terrace cliff 3.

Subsequently, the component 11 is placed on the mounting table 1 (step A2). At this time, the side surface of the component 11 is brought into surface contact with the terrace cliff 3, and the bottom surface (lower surface) of the component 11 is brought into surface contact with the terrace surface 2. Further, by operating the suction pump connected to the pump connection port 19 and sucking air from the suction port 4, the component 11 is sucked onto the mounting table 1 and fixed (step A3). After that, the probe stage 15 is controlled so that the tip of the probe needle 9 comes into contact with the land 21 of the component 11, and the inspection by the probe needle 9 is performed (step A4).

[3. Action, effect]
(1) In the present embodiment, the mounting table 1 is formed in a terrace shape, and the component 11 is placed on each terrace surface 2. Further, the component 11 placed on the terrace surface 2 is fixed at a position where the side surface thereof contacts the terrace cliff 3. This makes it possible to prevent the occurrence of interference between the probe needle 9 and the component 11 (for example, interference between the jumper wire 22 of the component 11 adjacent to the component 11 to be inspected by the probe needle 9 and the probe arm 14). ..

In addition, when a layout in which the positions of the respective parts 11 are different in the longitudinal direction is adopted as in the comparative example shown in FIG. 6, the above-mentioned interference can be prevented. However, by widening the layout interval of the individual parts 11, the size of the mounting table 1 is increased, and the moving distance of the probe needle 9 is increased, so that the inspection efficiency is lowered. Further, since the space for installing the mounting table 1 becomes large, it is necessary to prepare the inspection device 20 having a large size of the mounting unit 12, which reduces the space utilization efficiency. On the other hand, in the present embodiment, the moving distance of the probe needle 9 can be shortened, and the inspection efficiency can be improved. Further, since the space for installing the mounting table 1 is small, the inspection can be performed using the compact inspection device 20, and the space utilization efficiency can be improved.

Further, by fixing the component 11 in contact with the terrace surface 2 and the terrace cliff 3, it is possible to stabilize the mounting posture and the mounting state of the component 11 to be inspected, and the inclination of the component 11 can be increased. It is possible to suppress the occurrence of inspection defects due to misalignment. Therefore, the inspection efficiency can be improved. Further, when the component 11 is mounted on the mounting table 1, the terrace cliff 3 functions as a member (ruler) that gives a reference position for positioning the component 11. Therefore, the operator can easily perform the work of placing the component 11 in the correct position, and the workability can be improved.

(2) In the present embodiment, the convex portion 5 is provided at the end side of the terrace surface 2 connected to the terrace cliff 3 on the lower side. By providing the convex portion 5 on the component inspection tray 10, it is possible to prevent the component 11 mounted on the terrace surface 2 from falling or slipping, and it is possible to improve the workability of mounting and removing the component 11. .. Therefore, the inspection efficiency can be improved.

(3) In the present embodiment, the inclined surface 6 is formed at the protruding corner portion where the top surface of the convex portion 5 and the terrace cliff 3 on the lower side of the convex portion 5 are in contact with each other. By chamfering the protruding corner between the top surface of the convex portion 5 and the terrace cliff 3 in this way, the workability of mounting and removing the component 11 can be improved, and the inspection efficiency can be improved. Can be done.

(4) In the present embodiment, the recess 7 is provided at the end of the terrace surface 2 connected to the terrace cliff 3 on the upper side. By providing the recess 7 at the connection point between the terrace surface 2 and the terrace cliff 3 on the upper side in this way, it is possible to prevent the component 11 from interfering with the inside corner portion and improve the positioning accuracy of the component 11. be able to. Therefore, the inspection efficiency can be improved.

[4. Addendum]
The following appendices are disclosed with respect to the embodiment including the following modification.
(Appendix 1)
A mounting table formed in a terrace shape having a terrace surface and a terrace cliff, and mounted on the terrace surface at a position where a plurality of parts inspected by a probe come into contact with the terrace cliff.
A parts inspection tray provided on the terrace surface or the terrace cliff, and provided with a suction port for sucking and fixing the parts to the above-mentioned stand.
(Appendix 2)
Addendum 1 is characterized in that it is provided with a convex portion that is projected from the lower end of the terrace surface and is connected to the terrace cliff and prevents the parts placed on the terrace surface from falling. Parts inspection tray.
(Appendix 3)
The component inspection tray according to Appendix 2, further comprising an inclined surface forming an inclined surface with respect to both the top surface of the convex portion and the terraced cliff on the lower side of the convex portion.
(Appendix 4)
The component inspection tray according to any one of Items 1 to 3, further comprising a recess formed by recessing an end side of the terrace surface connected to the terrace cliff on the upper side.

(Appendix 5)
Prepare a terrace-shaped platform with terraces and terraces.
A plurality of parts to be inspected by the probe are placed on the terrace surface at a position in contact with the terrace cliff.
A component inspection method, characterized in that the component is sucked and fixed to a suction port provided on the terrace surface or the terrace cliff.
(Appendix 6)
It is characterized in that the above-mentioned stand is provided with a convex portion that is projected from the lower end of the terrace surface and is connected to the terrace cliff and prevents the parts placed on the terrace surface from falling. , The parts inspection method according to Appendix 5.
(Appendix 7)
The part inspection method according to Appendix 6, wherein an inclined surface forming an inclined surface with respect to both the top surface of the convex portion and the terraced cliff on the lower side of the convex portion is provided on the above-mentioned stand. ..
(Appendix 8)
The part inspection according to any one of Supplementary note 5 to 7, wherein a recess formed by recessing the end side connected to the terrace cliff on the upper side of the terrace surface is provided on the above-mentioned stand. Method.

[5. Modification example]
In the above-described embodiment, the case where the shape of the component 11 is a long shape has been described in detail, but the specific shape of the component 11 is not limited to this. For example, the component 11 may have a cubic shape, a rectangular parallelepiped shape, a tubular shape, a spherical shape, or an ellipsoidal spherical shape. Further, in the above-described embodiment, the parts 11 are arranged adjacent to each other in the short side direction of the long shape, but the specific layout of the parts 11 is not limited to this. For example, the parts 11 may be arranged adjacent to each other in the long side direction of the long shape.

1 Mounting stand 2 Terrace surface 3 Terrace cliff 4 Suction port 5 Convex part 6 Inclined surface 7 Recessed surface 8 Probe part 9 Probe needle (probe)
10 Parts inspection tray 11 Parts 12 Mounting part 13 Mounting part Stage 14 Probe arm 15 Probe stage 16 Camera 17 Imaging unit 18 Camera stage 19 Pump connection port 20 Inspection device 21 Land 22 Jumper wire

Claims (6)

It is formed in a terrace shape having a plurality of terraces and a plurality of terraces cliff, each of the plurality of components to be inspected with the probe is at a position in contact with each terrace cliff of the plurality of terraces cliff, the plurality of terraces A mounting table to be placed on each terrace surface of the surface,
A component inspection provided on each terrace surface of the plurality of terrace surfaces or each terrace cliff of the plurality of terrace cliffs, and provided with a suction port for sucking and fixing the component to the above-mentioned stand. tray. The first aspect of the terraced surface is provided with a convex portion that is projected from an edge connected to the terraced cliff on the lower side and prevents the component placed on the terraced surface from falling. Described parts inspection tray. At the protruding corner portion of the convex portion where the top surface of the convex portion and the terrace cliff below the convex portion are in contact with each other, the top surface of the convex portion and the terrace cliff below the convex portion The part inspection tray according to claim 2, wherein an inclined surface forming an inclined surface is formed with respect to both of the two. The component inspection tray according to any one of claims 1 to 3, further comprising a recess formed by recessing an end side of the terrace surface connected to the terrace cliff on the upper side. Each of the plurality of parts is placed on each of the plurality of terrace surfaces having different heights.
The parts inspection tray according to any one of claims 1 to 4, wherein the parts inspection tray is characterized in that. Providing a mounting base formed in terrace shape having a plurality of terraces and a plurality of terraces cliff,
Each of the plurality of components to be inspected with the probe, at a position in contact with each terrace cliff of the plurality of terraces cliff, placed on each terrace surface of the plurality of terraces,
A component inspection method, characterized in that the component is sucked and fixed to a suction port provided on each terrace surface of the plurality of terrace surfaces or each terrace cliff of the plurality of terrace cliffs.

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