JP6826121B2 - 外れ値検出を通じた特徴選択及び自動処理窓監視 - Google Patents
外れ値検出を通じた特徴選択及び自動処理窓監視 Download PDFInfo
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Classifications
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- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B19/00—Programme-control systems
- G05B19/02—Programme-control systems electric
- G05B19/418—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM]
- G05B19/41875—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM] characterised by quality surveillance of production
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- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06N—COMPUTING ARRANGEMENTS BASED ON SPECIFIC COMPUTATIONAL MODELS
- G06N20/00—Machine learning
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- G—PHYSICS
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- G06N—COMPUTING ARRANGEMENTS BASED ON SPECIFIC COMPUTATIONAL MODELS
- G06N20/00—Machine learning
- G06N20/10—Machine learning using kernel methods, e.g. support vector machines [SVM]
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
- H01L22/10—Measuring as part of the manufacturing process
- H01L22/12—Measuring as part of the manufacturing process for structural parameters, e.g. thickness, line width, refractive index, temperature, warp, bond strength, defects, optical inspection, electrical measurement of structural dimensions, metallurgic measurement of diffusions
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- H—ELECTRICITY
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
- H01L22/20—Sequence of activities consisting of a plurality of measurements, corrections, marking or sorting steps
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- H—ELECTRICITY
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
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- H01L22/20—Sequence of activities consisting of a plurality of measurements, corrections, marking or sorting steps
- H01L22/24—Optical enhancement of defects or not directly visible states, e.g. selective electrolytic deposition, bubbles in liquids, light emission, colour change
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- H—ELECTRICITY
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
- H01L22/30—Structural arrangements specially adapted for testing or measuring during manufacture or treatment, or specially adapted for reliability measurements
- H01L22/34—Circuits for electrically characterising or monitoring manufacturing processes, e. g. whole test die, wafers filled with test structures, on-board-devices incorporated on each die, process control monitors or pad structures thereof, devices in scribe line
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- G—PHYSICS
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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Description
本願は、2016年1月6日付米国暫定特許出願第62/275700号に基づく優先権を主張するものであるので、この参照を以て当該暫定特許出願の開示内容を本願に繰り入れることにする。
Claims (20)
- クラシファイア生成方法であって、
一組のダイ画像を有するウェハ画像を少なくとも1枚受け取るステップと、
プロセッサを用い、上記一組のダイ画像に基づきウェハのメディアンダイ及びそのウェハの標準偏差を生成するステップと、
プロセッサを用い、ウェハのメディアンダイに基づき且つそのウェハの標準偏差に基づきセグメントマスクを生成するステップと、
プロセッサを用い、そのセグメントマスクを各ダイ画像に適用することで各ダイ画像に係る複数枚のセグメント化ダイ画像を生成するステップと、
プロセッサを用い各ダイを特徴値のベクトルで以て表現するステップと、
プロセッサを用い、そのベクトルに基づき各ダイ画像に係るダイ指標を計算するステップと、
プロセッサを用い、ダイ指標、セグメントマスク及びウェハ画像の統計的に有意な一通り又は複数通りの組合せを識別することでクラシファイアを生成するステップと、
を有する方法。 - 請求項1に記載の方法であって、そのダイ指標が各セグメント化ダイ画像に係る平均及び標準偏差を含む方法。
- 請求項1に記載の方法であって、そのダイ指標がダイの勾配画像のセグメント化ダイ画像に係る平均及び標準偏差を含む方法。
- 請求項3に記載の方法であって、各セグメント化ダイ画像に係る平均及び標準偏差がY勾配及びX勾配のうち少なくとも一方を含む方法。
- 請求項1に記載の方法であって、そのクラシファイアが1クラスマハラノビスクラシファイアである方法。
- 請求項1に記載の方法であって、そのクラシファイアが1クラスサポートベクタマシン(SVM)クラシファイアである方法。
- プロセス制御方法であって、
プロセス非コンプライアンスを検出可能でありマスキング済ダイ画像の指標の組合せに立脚する所定のクラシファイアを受け取るステップと、
一組のダイ画像を有するウェハ画像を受け取るステップと、
セグメントマスクを用いウェハ画像をマスキングするステップと、
プロセッサを用い上記一組のダイ画像中の各ダイを特徴値のベクトルで以て表現するステップと、
プロセッサを用い各ダイに係るダイ指標を計算するステップと、
プロセッサを用い、ウェハ画像の指標を、クラシファイアから得たダイ指標とセグメントマスクとの対応する組合せに基づき計算するステップと、
プロセッサを用い、また計算された指標に基づきクラシファイアを用いプロセス状態を判別するステップと、
を有する方法。 - 請求項7に記載の方法であって、そのクラシファイアが1クラスマハラノビスクラシファイアである方法。
- 請求項7に記載の方法であって、そのクラシファイアが1クラスサポートベクタマシン(SVM)クラシファイアである方法。
- 請求項7に記載の方法であって、そのダイ指標がセグメント化ダイ画像に係る平均及び標準偏差を含む方法。
- 請求項7に記載の方法であって、そのダイ指標がダイの勾配画像のセグメント化ダイ画像に係る平均及び標準偏差を含む方法。
- 請求項11に記載の方法であって、その平均及び標準偏差がY勾配及びX勾配のうち少なくとも一方を含む方法。
- 請求項7に記載の方法であって、更に、
プロセス状態で以て予測モデルを訓練するステップと、
プロセス状態に基づき製造ツールの推定対象パラメタを計算するステップと、
パラメタ推定結果をその製造ツールに伝えるステップと、
を有する方法。 - 請求項7に記載の方法であって、更に、ダイ画像を用いオートエンコーダを訓練するステップを有し、そのオートエンコーダが製造ツールの焦点及び露出スキューを判別するよう構成される方法。
- プロセス制御システムであって、
プロセッサと、
そのプロセッサと電子通信する格納デバイスと、
上記プロセッサと電子通信する通信ポートと、
を備え、上記プロセッサが、
ウェハの画像でありそれぞれ複数個のダイを有するウェハ画像複数枚を通信ポートにて受け取るよう、
各ウェハ画像をセグメントマスクを用いマスキングすることで一組のセグメント化ダイ画像を生成するよう、
上記一組のセグメント化ダイ画像中の各ダイを特徴値のベクトルで以て表現するよう、
各ダイに係るダイ指標を計算するよう、
各ウェハ画像の指標を、クラシファイアから得たダイ指標とセグメントマスクとの対応する組合せに基づき計算するよう、且つ
計算された指標に基づきクラシファイアを用いプロセス状態を判別するよう、
プログラミングされているプロセス制御システム。 - 請求項15に記載のプロセス制御システムであって、そのクラシファイアが1クラスマハラノビスクラシファイア及び1クラスサポートベクタマシン(SVM)クラシファイアのうち一方であるプロセス制御システム。
- 請求項15に記載のプロセス制御システムであって、そのダイ指標が各セグメント化ダイ画像から得た平均及び標準偏差を含むプロセス制御システム。
- 請求項15に記載のプロセス制御システムであって、そのダイ指標がダイの勾配画像のセグメント化ダイ画像に係る平均及び標準偏差を含むプロセス制御システム。
- 請求項18に記載のプロセス制御システムであって、その平均及び標準偏差がY勾配及びX勾配のうち少なくとも一方を含むプロセス制御システム。
- 請求項15に記載のプロセス制御システムであって、そのプロセッサが、更に、
別のウェハに関し各プログラムステップを反復するよう、且つ
各ウェハに係る統計的に有意な組合せに従いクラシファイアを精緻化するよう、
プログラミングされているプロセス制御システム。
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US201662275700P | 2016-01-06 | 2016-01-06 | |
US62/275,700 | 2016-01-06 | ||
US15/248,523 | 2016-08-26 | ||
US15/248,523 US10365639B2 (en) | 2016-01-06 | 2016-08-26 | Feature selection and automated process window monitoring through outlier detection |
PCT/US2017/012382 WO2017120370A1 (en) | 2016-01-06 | 2017-01-05 | Feature selection and automated process window monitoring through outlier detection |
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JP2019506739A JP2019506739A (ja) | 2019-03-07 |
JP6826121B2 true JP6826121B2 (ja) | 2021-02-03 |
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US (1) | US10365639B2 (ja) |
JP (1) | JP6826121B2 (ja) |
KR (1) | KR102476927B1 (ja) |
CN (1) | CN108475649B (ja) |
IL (1) | IL259969B (ja) |
TW (1) | TWI708301B (ja) |
WO (1) | WO2017120370A1 (ja) |
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