JP6822385B2 - Laser processing equipment - Google Patents

Description

The present invention relates to a laser processing apparatus that scans a laser beam onto an object to be processed for processing.

Conventionally, as this type of laser processing apparatus, a laser processing apparatus in which a head portion that scans a laser beam on an object to be processed and a laser oscillation unit are connected by a transmission member is known.
However, since there are individual differences in the above transmission members, there is a problem that the angle of the optical axis of the laser beam emitted from the transmission member to the head portion differs for each transmission member.
Therefore, conventionally, a laser processing apparatus capable of adjusting the angle of the optical axis of the laser light emitted from the transmission member has been proposed (Patent Document 1). This laser processing device includes a head portion (laser irradiation unit), a transmission member (optical fiber cable member) for transmitting laser light to the head portion, and a mounting member (detachment unit) for attaching the transmission member to the head portion. The mounting member is provided with an angle adjusting mechanism that adjusts the angle of the optical axis of the laser beam emitted from the transmission member. This angle adjusting mechanism is provided with a base member for fixing the transmission member to the head portion, and the base member is formed through a central hole having a diameter larger than the tip of the transmission member. The tip is inserted through its central hole. Further, the tip of the transmission member inserted into the central hole is held by a rotating member, and the rotating member is rotatably supported by a pair of shaft support members. Then, by rotating the rotating member, the angle of the optical axis of the laser beam is adjusted.

JP-A-2009-58792

However, in the above-mentioned conventional laser machining apparatus, in order to secure a range for rotating the tip of the transmission member, the central hole of the base member is formed to have a diameter larger than the tip of the transmission member, and the tip of the transmission member is formed. Since a gap is formed between the peripheral surface of the transmission member and the central hole, there is no sealing property at the boundary portion between the transmission member and the head portion. Therefore, foreign matter such as dust easily enters the inside of the head portion through the above gap.
That is, the above-mentioned conventional laser processing apparatus has a problem that the angle of the optical axis of the laser light emitted from the transmission member cannot be adjusted while ensuring the sealing property of the boundary portion between the transmission member and the head portion. ..

Therefore, the present invention was created in order to solve the above-mentioned problems, and is an optical axis of the laser beam emitted by the transmission member while ensuring the sealing property of the boundary portion between the transmission member and the head portion. It is an object of the present invention to provide a laser processing apparatus capable of adjusting an angle.

In order to achieve the above-mentioned object, the laser processing apparatus of the invention according to the present application has a head portion that scans the laser beam on the object to be processed, a transmission member that transmits the laser beam to the head portion, and a transmission member as the head portion. In a laser processing device including a mounting member to be mounted on the transmission member, the transmission member is provided with a mounting target portion to be mounted by the mounting member when the direction in which the head portion is present as viewed from the transmission member is forward. An outlet for emitting a laser beam is formed at the front end of the mounting target portion. Further, the mounting member has a housing space capable of accommodating the mounting target portion with its front end facing forward, and a housing body having openings communicating with the storage space at the front end and the rear end, respectively. A seal portion that is interposed between the outer peripheral surface of the mounting target portion housed in the space and the inner peripheral surface of the housing body and seals between the outer peripheral surface of the mounting target portion and the inner peripheral surface of the housing body. Is provided.
That is, since it is possible to seal between the outer peripheral surface of the mounting target portion provided on the transmission member and the inner peripheral surface of the accommodating body provided on the mounting member, the boundary portion between the transmission member and the head portion is sealed. Sex can be ensured.
Further, the mounting member is provided with a fixing through hole penetrating from the outer peripheral surface of the housing body into the housing space and a fixing through hole, and the mounting target portion housed in the housing space can be moved with respect to the housing body. It is provided with a fixing member that shifts from a movable state that enables it to a fixed state in which the mounting target portion accommodated in the accommodation space is fixed to the accommodation body. Further, the mounting member is formed with a gap between the outer peripheral surface of the mounting target portion accommodated in the accommodating space and the inner peripheral surface of the accommodating body. Then, when the fixing member is in a movable state, the laser processing apparatus is configured such that the mounting target portion accommodated in the accommodation space can swing with the seal portion as a fulcrum, and the relative position with respect to the accommodation body changes. By shifting to the fixed state, the fixing member fixes the mounting target portion to the housing body at the relative position after the change.
That is, since the mounting target portion accommodated in the accommodation space can be swung around the seal portion as a fulcrum, the angle of the optical axis of the laser beam emitted by the transmission member can be adjusted.

By implementing the laser processing apparatus of the invention according to the present application, it is possible to adjust the angle of the optical axis of the laser beam emitted by the transmission member while ensuring the sealing property of the boundary portion between the transmission member and the head portion. A processing device can be provided.

It is a perspective view which looked at the laser processing apparatus which concerns on embodiment of this application from diagonally right rear. It is a perspective view which shows the state which the attachment member and the optical isolator are removed from the laser processing apparatus shown in FIG. It is a right side view which shows typically the internal structure of the laser processing apparatus shown in FIG. It is a perspective view which looked at the mounting member and the optical isolator provided in the laser processing apparatus shown in FIG. 1 from the right front. It is an exploded perspective view of the mounting member and an optical isolator shown in FIG. FIG. 5 is an exploded perspective view of the mounting member and the optical isolator shown in FIG. 5 as viewed from the rear right. FIG. 5 is a perspective view in which the mounting member and the optical isolator shown in FIG. 4 are turned upside down. FIG. 7 is a cross-sectional view taken along the line AA of FIG. FIG. 5 is an enlarged cross-sectional view of each member constituting the mounting member shown in FIG. FIG. 8 is an enlarged cross-sectional view of a front end portion of the mounting member shown in FIG. It is a schematic diagram which shows how the laser light emitted from an optical isolator is incident on a galvano mirror before adjusting the inclination of the optical axis of a laser light. It is a schematic diagram which shows the state that the laser beam is emitted from an optical isolator before adjusting the inclination of the optical axis of a laser beam, (a) is a schematic diagram which looked at the attachment target part of an optical isolator from the front, (b). ) Is a schematic view of the containment body viewed from the right side. It is a schematic diagram which shows how the laser light emitted from an optical isolator is incident on a galvano mirror after adjusting the inclination of the optical axis of a laser light. It is a schematic diagram which shows how the laser beam is emitted from an optical isolator after adjusting the inclination of the optical axis of a laser beam, (a) is a schematic diagram which looked at the part to which the optical isolator is attached from the front, (b). ) Is a schematic view of the containment body viewed from the right side. It is a schematic diagram which shows an example of the range in which the inclination of the optical axis of a laser beam can be adjusted. It is sectional drawing of the attachment member and the optical isolator provided in the laser processing apparatus which concerns on other embodiment of this application.

[Construction of laser processing equipment]
The configuration of the laser processing apparatus according to the embodiment of the present invention will be described with reference to the drawings.
In the following description, the direction in which the laser head 50 is present (the direction in which the laser light is emitted) as viewed from the optical isolator 40 is the front, and the direction 180 degrees opposite to the direction is the rear. Further, the direction perpendicular to the front-back direction is defined as the vertical direction, and the direction horizontally orthogonal to the front-back direction is defined as the left-right direction.
As shown in FIG. 1, the laser processing apparatus 1 of this embodiment is an example of a laser head 50 which is an example of a head portion that scans a laser beam on a processing object and an example of a transmission member that transmits the laser light to the laser head 50. The optical isolator 40 is provided, a mounting member 10 for mounting the optical isolator 40 to the laser head 50, and a cover 80 for covering the periphery of the mounting member 10 and the optical isolator 40. The laser head 50 is connected to a laser controller (not shown) that controls the laser head 50, and the laser controller is connected to a computer (not shown) that controls the laser controller. The optical isolator 40 is connected to a laser oscillator provided in the laser controller. The optical isolator 40 prevents the laser light reflected in the optical path, the so-called return light, from the laser light emitted from the laser oscillator from returning to the laser oscillator.

The laser head 50 includes a box-shaped case 51. The case 51 includes a top plate 52, a right side plate 53, a left side plate facing the right side plate 53 (not shown in the figure), a back plate 54, and a front plate facing the back plate 54 (not shown in the figure). (Not shown in the figure). A cable connector 56 to which a power cable, a signal line output from a laser controller, and the like are connected is attached to the back plate 54. As shown in FIG. 2, a handle 57 used for lifting the laser head 50 is attached to the back plate 54.
As shown in FIG. 3, a galvano scanner 59 is arranged inside the case 51. The galvano scanner 59 two-dimensionally scans the laser beam L emitted forward from the optical isolator 40 downward in two dimensions, and includes a galvano mirror 59a and a rotation mechanism (not shown) for rotating the galvano mirror 59a. Be prepared. Below the galvano scanner 59, an fθ lens 55, which is an example of a condensing lens that collects the laser light scanned by the galvano scanner 59 onto the object to be processed, is arranged. That is, the laser head 50 scans the laser beam L emitted from the optical isolator 40 onto the object to be processed to process the object to be processed.

[Optical isolator configuration]
Next, the configuration of the optical isolator 40 will be described with reference to the drawings.
As shown in FIG. 5, the optical isolator 40 includes a housing 42, a mounting target portion 41 projecting forward from the front end of the housing 42, a connector 43 projecting from the rear end of the housing 42, and a rear end of the connector 43. A plug 44 connected to the housing and an optical fiber cable 45 connected to the rear end of the plug 44 are provided. A known optical element that allows light to pass in only one direction and blocks light in the opposite direction is provided in the housing 42. The attachment target portion 41 is a portion to be attached to the attachment member 10, and in this embodiment, the central axis is formed in a cylindrical shape extending in the front-rear direction. The opening of the front end 41b of the mounting target portion 41 is closed by a lid 41c, and an exit port 41d for emitting laser light forward is formed through the lid 41c in the front-rear direction. Specifically, as shown in FIG. 10, the lid 41c is formed along the inner peripheral surface 41e at a portion of the inner peripheral surface 41e of the mounting target portion 41 located slightly behind the front end 41b.

[Structure of mounting member]
Next, the configuration of the mounting member 10 will be described with reference to the drawings.
The mounting member 10 is an housing body 20, a housing body mounting member 30, an O-ring 60 which is an example of a seal portion, adjustment screw holes 22a to 22c which are examples of adjustment through holes, and an example of a pressing member. A certain adjusting screw 70 (FIG. 9), a fixing screw hole 23 which is an example of a fixing through hole, and a fixing screw 71 which is an example of a fixing member are provided. The accommodating body 20 accommodates and fixes the mounting target portion 41 of the optical isolator 40, and the housing body 20 is formed in a cylindrical shape having an inner diameter larger than the outer diameter of the mounting target portion 41. Further, as shown in FIGS. 9 and 11, the accommodating body 20 has an accommodating space K inside which the mounting target portion 41 can be accommodated with its front end 41b facing forward. The accommodation space K is formed in a columnar shape corresponding to the outer shape of the mounting target portion 41. Further, the accommodating body 20 has an opening 24a communicating with the accommodating space K at the front end 24 and an opening 25a communicating with the accommodating space K at the rear end 25. The opening 25a of the rear end 25 is formed in a size that allows the front end 41b of the mounting target portion 41 to be inserted, and the opening 24a of the front end 24 is the mounting target portion 41 housed in the accommodation space K. The front end 41b is formed to have a size that allows it to project forward (FIG. 8). As shown in FIGS. 8 and 10, there is a gap S between the outer peripheral surface 41a of the mounting target portion 41 of the optical isolator 40 housed in the housing space K of the housing body 20 and the inner peripheral surface 21c of the housing body 20. Is formed. This gap S is a space required for swinging the mounting target portion 41 with the O-ring 60 as a fulcrum.

As shown in FIG. 9, a step portion 26 for fitting the O-ring 60 is continuously provided in the circumferential direction along the inner peripheral surface 21c in the portion of the inner peripheral surface 21c of the accommodating body 20 near the front end 24. It is formed. As shown in FIG. 5, a plurality of pin insertion holes 21d and a plurality of screw holes 21e are formed in the front end 24 of the housing body 20 toward the rear, respectively. The pin insertion hole 21d is a hole for inserting a positioning pin (not shown) when the housing body 20 is mounted on the fixing plate 31 of the housing body mounting member 30, and in this embodiment, the front end 24 is located in the left-right direction. It is formed in two places. Further, the screw hole 21e is a hole for screwing a fixing screw (not shown) for fixing the housing body 20 to the fixing plate 31 of the housing body mounting member 30. In this embodiment, the screw holes 21e are formed at four positions in the circumferential direction of the front end 24.

Further, as shown in FIGS. 6, 7, 9 and 12, the adjusting screw holes 22a to 22c are formed through the outer peripheral surface 21 of the accommodating body 20 into the accommodating space K, respectively, and the accommodating body 20 is formed. It is arranged at three locations in the outer peripheral direction at a portion near the rear end 25. The adjusting screw holes 22a to 22c are the same, but in this embodiment, the adjusting screw holes are designated by different reference numerals in order to distinguish the arrangement positions of the adjusting screw holes. As shown in FIG. 12, in this embodiment, the adjusting screw holes 22a to 22c are located at positions where the outer peripheral surface 21 is divided into three equal parts in the outer peripheral direction with the central axis of the housing body 20 as the center, that is, from the central axis. They are arranged at an arrangement angle separated by 120 degrees. The nominal length of each adjusting screw 70 screwed into the adjusting screw holes 22a to 22c so as to advance and retreat presses the outer peripheral surface 41a of the mounting target portion 41 housed in the accommodation space K and shakes the mounting target portion 41. It is the length that can be moved. Further, in order to finely adjust the swing amount of the mounting target portion 41, it is preferable that the length protruding into the accommodation space K can be finely adjusted, and for that purpose, the pitch of the adjusting screw 70 is smaller. preferable. In this embodiment, the adjusting screw holes 22a to 22c have a pitch smaller than the pitch of the fixing screw holes 23, and each adjusting screw 70 has a pitch smaller than the pitch of the fixing screws 71. Therefore, each adjusting screw 70 has a configuration in which the amount of swing of the mounting target portion 41 can be finely adjusted more easily than each fixing screw 71.

Further, in this embodiment, the fixing screw holes 23 are arranged at a total of 6 locations, and are formed through the outer peripheral surface 21 of the accommodating body 20 into the accommodating space K, respectively. Three of the six locations are arranged at three locations in the outer peripheral direction at locations closer to the rear end 25 than the adjusting screw holes 22a to 22c, and are adjacent to the rear of the adjusting screw holes 22a to 22c, respectively. ing. Further, the other three locations are arranged at three locations in the outer peripheral direction at the portion near the front end 24 of the housing body 20, and are arranged at the same arrangement angle as the adjusting screw holes 22a to 22c arranged near the rear end 25. Has been done. The nominal length of each fixing screw 71 screwed into each fixing screw hole 23 so as to be able to advance and retreat is to press the outer peripheral surface 41a of the mounting target portion 41 housed in the accommodating space K to hold the mounting target portion 41 into the accommodating body 20. It is a length that can be fixed to. In this embodiment, each fixing screw hole 23 has a diameter larger than the diameter of each adjusting screw hole 22a to 22c, and each fixing screw 71 has a diameter larger than the diameter of each adjusting screw 70. Therefore, the fixing screw 71 can fix the mounting target portion 41 to the housing body 20 with a tightening torque larger than that of the adjusting screw 70.

The housing body mounting member 30 is for mounting the fixing plate 31 fixed to the laser head 50, the fixing bolt 32 (FIG. 1) for fixing the fixing plate 31 to the laser head 50, and the housing body 20 to the fixing plate 31. It is equipped with a mounting screw (not shown). As shown in FIGS. 5 and 6, the fixing plate 31 is formed in a flat plate shape having a rectangular shape in a plan view. A pin insertion hole 31d for inserting a positioning pin when mounting the housing body 20 is formed through the fixing plate 31 from the front plate surface 31a (FIG. 5) to the rear plate surface 31b (FIG. 6). There is. In this embodiment, the pin insertion holes 31d are formed at a total of two positions corresponding to the pin insertion holes 21d formed at the front end 24 of the housing body 20. Further, in the fixing plate 31, a screw insertion hole 31e for inserting a fixing screw for fixing the housing body 20 is formed to penetrate from the front plate surface 31a (FIG. 5) to the rear plate surface 31b (FIG. 6). Has been done. Each screw insertion hole 31e is a through hole (so-called stupid hole) in which a female screw is not formed. In this embodiment, the screw insertion holes 31e are formed at a total of four positions corresponding to the screw holes 21e formed at the front end 24 of the housing body 20. Further, in the fixing plate 31, a bolt insertion hole 31f for inserting the fixing bolt 32 is formed to penetrate from the rear plate surface 31b to the front plate surface 31a. Each bolt insertion hole 31f is a through hole (so-called stupid hole) in which a female screw is not formed. The fixing bolt 32 is a bolt for fixing the fixing plate 31 to the fixing portion 58 (FIG. 2) provided on the back plate 54 of the laser head 50. Bolt holes 58b for fastening the fixing bolts 32 are formed in the fixing portion 58 of the laser head 50 at a total of four locations in the four corner directions of the fixing portion 58 (FIG. 2). In this embodiment, the bolt insertion holes 31f are formed at a total of four locations corresponding to the bolt holes 58b (FIG. 2). Each fixing bolt 32 is inserted into the corresponding bolt insertion hole 31f and fastened to the corresponding bolt hole 58b. In this way, since the fixing plate 31 can be fixed to the laser head 50 from the outside of the laser head 50, the fixing work efficiency can be improved as compared with the case of fixing from the inside of the laser head 50. As shown in FIGS. 1 and 4, in a state where the housing body 20 is fixed to the fixing plate 31, the fixing plate 31 exhibits a shape that projects outward from the periphery of the front end 24 of the housing body 20 in a brim shape. There is.

As shown in FIG. 11, the mounting target portion 41 is accommodated in the accommodation space K with its front end 41b protruding forward from the opening 24a of the front end 24 of the accommodation body 20. As shown in FIGS. 6 and 10, a fitting recess 31g for fitting the front end 41b of the mounting target portion 41 is formed on the rear plate surface 31b of the fixing plate 31. The peripheral wall 31h of the fitting recess 31g is formed in a shape (ring shape in this embodiment) corresponding to the shape of the front end 41b of the mounting target portion 41. Further, a passage port 31c for passing the laser beam L emitted from the emission port 41d of the mounting target portion 41 housed in the housing body 20 is formed through the bottom wall 31i of the fitting recess 31g in the front-rear direction. ing. Further, the fixing portion 58 of the laser head 50 is formed with an incident port 58a into which the laser beam L that has passed through the passing port 31c of the fixing plate 31 is incident (FIG. 2). As described above, since the fitting recess 31g for fitting the front end 41b of the mounting target portion 41 is formed on the rear plate surface 31b of the fixing plate 31, the front end 41b of the mounting target portion 41 is formed into the fitting recess 31g. The mounting target portion 41 can be easily positioned with respect to the fixing plate 31 simply by fitting.

Further, as shown in FIGS. 8 and 10, between the outer peripheral surface 41a of the mounting target portion 41 of the optical isolator 40 housed in the housing space K of the housing body 20 and the inner peripheral surface 21c of the housing body 20. An O-ring 60 is interposed between the outer peripheral surface 41a of the mounting target portion 41 and the inner peripheral surface 21c of the housing body 20. Specifically, the O-ring 60 is fitted and in close contact with the step portion 26 formed at the front end 24 of the housing body 20, and further, the step portion 26 and the step portion 41a of the outer peripheral surface 41a of the mounting target portion 41 It is held by a portion facing the portion 26 and a portion of the rear plate surface 31b of the fixing plate 31 facing the step portion 26. In other words, the O-ring 60 is held by three members, a fixing plate 31, an accommodating body 20, and an attachment target portion 41. That is, since the O-ring 60 is surrounded by the rear plate surface 31b of the fixing plate 31, the step portion 26, and the outer peripheral surface 41a of the mounting target portion 41 from four directions, it is difficult to deviate from the mounting position. There is. Due to the mounting structure of the O-ring 60, the sealing property (dustproof and waterproof effect) of the boundary portion between the fixing plate 31 and the housing body 20 and the mounting target portion 41, that is, the boundary portion between the optical isolator 40 and the laser head 50 Sealing property is ensured. Further, the O-ring 60 is arranged in front of any of the adjusting screw holes 22a to 22c and the fixing screw holes 23. As a result, foreign matter such as dust can be prevented from entering the inside of the laser head 50 through the adjusting screw holes 22a to 22c and the fixing screw holes 23. Further, the cover 80 is formed in a rectangular parallelepiped shape, and is arranged so as to wrap the entire housing 42 of the housing 20 and the optical isolator 40. As a result, foreign matter such as dust can be prevented from entering from the boundary portion between the housing 20 and the housing 42, and the sealing property can be improved. Further, since the housing 20 and the optical isolator 40 can be prevented from colliding with an object or the like, the optical axis A of the laser beam L emitted from the optical isolator 40 can be prevented from shifting.

The mounting target portion 41 housed in the storage space K of the housing body 20 can swing around the O-ring 60 as a fulcrum. Specifically, the mounting target portion 41 has 360 as a fulcrum with the O-ring 60 as a fulcrum within a range in which the rear end of the outer peripheral surface 41a abuts on the inner peripheral surface 21c of the rear end 25 of the housing body 20. It can swing in the direction of degree. Further, as shown in FIG. 10, in a state where the front end 41b of the mounting target portion 41 is fitted into the fitting recess 31g, between the outer peripheral surface 41a of the mounting target portion 41 and the peripheral wall 31h of the fitting recess 31g. A gap ΔS is formed. This gap ΔS is a gap required for the mounting target portion 41 to swing with the O-ring 60 as a fulcrum, that is, a so-called play space. Specifically, when the mounting target portion 41 swings around the O-ring 60 as a fulcrum, the movement of the outer peripheral surface 41a near the front end 41b of the mounting target portion 41 is not restricted by the inner peripheral surface 21c of the housing body 20. Space.
In this way, since the mounting target portion 41 can swing with the O-ring 60 mounted on the outer peripheral surface 41a in the vicinity of the front end 41b as a fulcrum, the swing angle of the mounting target portion 41 can be adjusted. The inclination angle θ of the optical axis A (FIG. 11) of the laser beam L (FIG. 3) emitted forward from the outlet 41d of the mounting target portion 41 can be adjusted.

By the way, the swing angle of the mounting target portion 41 with respect to the O-ring 60, that is, the angle of the optical axis A (FIG. 11) is determined by the adjusting screws 70 provided in the adjusting screw holes 22a to 22c so as to be able to advance and retreat. It can be adjusted by the amount of advance / retreat, but even if the amount of advance / retreat is the same, the positions of the adjustment screw holes 22a to 22c, that is, the positions where each adjustment screw 70 presses the mounting target portion 41 are from the O-ring 60. The farther it is, the smaller the corresponding adjustment angle can be.
Therefore, in the laser machining apparatus 1 of this embodiment, the distance from the O-ring is made as long as possible by arranging the adjusting screw holes 22a to 22c at positions close to the rear end 25 of the housing body 20. Therefore, the angle of the optical axis A can be finely adjusted.

[How to adjust the tilt angle of the optical axis]
Next, a method of adjusting the tilt angle of the optical axis will be described with reference to the drawings.
Here, the optical isolator 40 will be described as having an inclination in the optical axis of the laser beam L emitted forward due to individual differences. In FIG. 11, reference numeral V indicates an optical axis of the original laser beam L when there is no individual difference in the optical isolator 40 (when it is not necessary to adjust the inclination of the optical axis), and this is used as a reference axis. Further, reference numeral A indicates an optical axis of the laser beam L emitted forward from the optical isolator 40. Reference numeral θ indicates the angle formed by the reference axis V and the optical axis A, that is, the inclination angle of the optical axis A. The reference numeral P indicates a target irradiation position where the laser beam should be originally irradiated on the galvano mirror 59a, and a mark (for example, + shape) representing the target irradiation position P as shown in FIG. 11 is displayed on the galvano mirror 59a. There is. In other words, the target irradiation position P indicates the intersection of the reference axis V and the galvanometer mirror 59a. Reference numeral C indicates an intersection of the reference axis V and the exit port 41d of the mounting target portion 41, and reference numeral R indicates an intersection of the optical axis A and the exit port 41d. In addition, in FIGS. 11 to 14, in order to make it easy to understand how the tilt angle θ of the optical axis A is adjusted, the tilt angle θ, the gap S, and the like are exaggerated from the actual size.

As shown in FIG. 11, the optical axis A is tilted by θ degrees with respect to the reference axis V. Further, as shown in FIG. 12, the intersection R of the optical axis A of the laser beam L emitted from the optical isolator 40 and the exit port 41d is displaced vertically below the intersection C of the reference axis V and the exit port 41d. There is. That is, the optical axis A is tilted vertically downward by θ degrees with respect to the reference axis V, and the laser beam L emitted from the optical isolator 40 is irradiated vertically downward with respect to the target irradiation position P. .. In the present embodiment, the tilt angle of the optical axis A is adjusted so that the laser beam L is irradiated to the target irradiation position P. When the tilt angle of the optical axis A is adjusted so that the laser beam L is irradiated to the target irradiation position P, the adjusted optical axis A has a tilt angle different from that of the reference axis V. The difference between the adjusted angle of the optical axis A and the angle of the reference axis V is adjusted by offsetting the rotation angle of the galvano scanner 59. Therefore, in order to correct the irradiation position of the laser beam L in the galvanometer mirror 59a, it is necessary to swing the mounting target portion 41 so that the optical axis A of the laser beam L is tilted vertically upward. As shown in FIG. 12A, three adjusting screw holes 22a to 22c are formed through the gap S in the outer peripheral direction of the outer peripheral surface 21 of the housing body 20, and each adjusting screw hole is formed. Adjustment screws 70 (FIG. 9) are provided on the 22a to 22c so that they can be moved forward and backward. Further, the adjusting screw hole 22a is provided directly below the central axis of the accommodating body 20 in the vertical direction. First, the adjusting screw 70 provided in the adjusting screw hole 22a is turned in the retracting direction (the direction in which the adjusting screw 70 is removed), and the portion of the mounting target portion 41 behind the O-ring 60 is set with the O-ring 60 as a fulcrum. Create a posture capable of swinging vertically downward (with the O-ring 60 as a fulcrum, the portion of the mounting target portion 41 in front of the O-ring 60 swings vertically upward).

Then, as shown in FIG. 14, the adjusting screw 70 screwed into the adjusting screw holes 22b and 22c is turned in the advancing direction (screwing direction), respectively, and the advancing amount of the adjusting screw 70 protruding into the gap S is adjusted. The number is increased, and the portion of the mounting target portion 41 behind the O-ring 60 is swung vertically downward with the O-ring 60 as a fulcrum. Then, as shown in FIG. 13, when the laser beam L emitted from the optical isolator 40 is irradiated to the target irradiation position P of the galvano mirror 59a, the adjustment screw holes 22b and 22c are screwed into the adjustment screw holes 22b and 22c, respectively. The screwing of the screw 70 is stopped, and the adjusting screw 70 retracted in the adjusting screw hole 22a is screwed in until it comes into contact with the mounting target portion 41 (FIG. 14A). As a result, the swing position of the mounting target portion 41 is fixed. Then, the fixing screws 71 are screwed into the fixing screw holes 23 to fix the mounting target portion 41 to the housing body 20. As a result, since the mounting target portion 41 is fixed to the housing body 20, there is no possibility that the optical axis A of the laser beam L emitted by the optical isolator 40 is displaced. That is, each fixing screw 71 is provided in each fixing screw hole 23, and accommodates the mounting target portion 41 accommodated in the accommodating space K from a movable state in which it can be moved with respect to the accommodating body 20. The mounting target portion 41 housed in the space K is shifted to a fixed state of being fixed to the housing body 20.
As described above, in the laser machining apparatus 1 of this embodiment, when each fixing screw 71 is in the movable state, the mounting target portion 41 housed in the accommodation space K can swing with the O-ring 60 as a fulcrum. Therefore, the position relative to the housing 20 is changed.

If the intersection of the optical axis A and the galvano mirror 59a is shifted vertically above the intersection of the reference axis V and the galvano mirror 59a (target irradiation position P), they are screwed into the adjusting screw holes 22b and 22c, respectively. The adjusted screw 70 is retracted, and the portion of the mounting target portion 41 behind the O-ring 60 is swung vertically upward to adjust so that the laser beam L is irradiated to the target irradiation position P. The mounting target portion 41 can be swung 360 degrees in any direction within a range in which the outer peripheral surface 41a of the outer peripheral surface 41a abuts on the inner peripheral surface 21c of the accommodating body 20 with the O-ring 60 as a fulcrum. Therefore, the inclination direction of the laser beam L can be adjusted in any direction such as a horizontal direction and an oblique direction other than the vertical direction.
In FIG. 15, reference numeral E indicates an adjustable range in the galvanometer mirror 59a capable of irradiating the target irradiation position P with the laser beam L by adjusting the tilt angle θ, and is emitted from the optical isolator 40 to be adjusted. If the laser beam L is irradiated within the adjustable range E, the tilt angle θ of the optical axis A can be adjusted to irradiate the laser beam L to the target irradiation position P. Further, reference numeral F indicates an example of a direction in which the inclination angle θ is adjusted, that is, a direction in which the mounting target portion 41 is swung. In this way, the mounting target portion 41 is swung around the O-ring 60 as a fulcrum even when the laser beam L emitted from the optical isolator 40 deviates from the target irradiation position P in the galvano mirror 59a by 360 degrees in any direction. Thereby, the inclination angle θ can be adjusted so that the laser beam L is irradiated to the target irradiation position P.
As described above, if the laser machining apparatus 1 of this embodiment is implemented, a simple operation of adjusting the screwing amount of each adjusting screw 70 and swinging the mounting target portion 41 with the O-ring 60 as a fulcrum is performed. Only by itself, the tilt angle θ of the optical axis of the laser beam L can be adjusted.

[Effect of Embodiment]
(1) In the laser processing apparatus 1 of the above-described embodiment, the O-ring 60 can seal between the outer peripheral surface 41a of the mounting target portion 41 and the inner peripheral surface 21c of the housing body 20, so that the optical isolator 40 It is possible to secure the sealing property of the boundary portion between the laser head 50 and the laser head 50. Further, in the laser processing apparatus 1 of the above-described embodiment, the mounting target portion 41 housed in the housing space K of the housing body 20 can be swung around the O-ring 60 as a fulcrum, so that the laser emitted by the optical isolator 40 is emitted. The tilt angle θ of the optical axis A of the light L can be adjusted.
Therefore, the laser processing apparatus 1 of the above-described embodiment sets the tilt angle θ of the optical axis A of the laser beam L emitted by the optical isolator 40 while ensuring the sealing property of the boundary portion between the optical isolator 40 and the laser head 50. Can be adjusted.
(2) Moreover, the optical axis of the laser beam L emitted by the optical isolator 40 by a simple operation of adjusting the amount of advancement / retreat of each adjustment screw 70 provided in each of the adjustment screw holes 22a to 22c so as to be able to advance / retreat. Since the tilt angle θ of A can be adjusted, the adjustment work efficiency can be improved.
Further, since the tilt angle θ of the optical axis A can be adjusted according to the amount of advance / retreat of the adjusting screw 70, that is, the rotation angle of the adjusting screw 70, the rotation angle of the adjusting screw 70 can be finely adjusted. , The tilt angle θ of the optical axis A can also be finely adjusted.

(3) Further, in the laser processing apparatus 1 of the above-described embodiment, since the O-ring 60 is arranged in front of any of the adjusting screw holes 22a to 22c, foreign matter such as dust can be removed from each adjusting screw hole. It can be prevented from entering the laser head 50 through 22a to 22c.
(4) Further, the mounting member 10 is provided in the fixing screw hole 23 and the fixing screw hole 23 penetrating from the outer peripheral surface 21 of the housing body 20 into the housing space K, and is mounted in the storage space K. A fixing screw 71 for fixing the target portion 41 to the housing body 20 is provided.
Therefore, the laser processing apparatus 1 of the above-described embodiment is adjusted because the mounting target portion 41 of the optical isolator 40 can be fixed to the accommodating body 20 after adjusting the inclination angle θ of the optical axis A of the laser beam L. The optical axis A can be made difficult to shift.
(5) Further, in the laser processing apparatus 1 of the above-described embodiment, the distance from the O-ring 60 to each of the adjusting screw holes 22a to 22c is larger than the distance from the O-ring 60 to each of the front fixing screw holes 23. Since it is long, the angle of the optical axis A is finely adjusted as compared with the case where the distance from the O-ring 60 to each of the adjusting screw holes 22a to 22c is less than or equal to the distance from the O-ring 60 to each of the fixing screw holes 23 in front. can do.

(6) Further, in the laser processing apparatus 1 of the above-described embodiment, since the O-ring is arranged in front of the foremost fixing screw hole 23, foreign matter such as dust passes through the fixing screw hole 23. It can be prevented from entering the laser head 50.
(7) Further, in the laser processing apparatus 1 of the above-described embodiment, the O-ring 60 is held by three members, the fixing plate 31, the housing body 20 and the mounting target portion 41 of the housing body mounting member 30. It is possible to make the O-ring 60 less likely to shift than when it is held by two members.
(8) Further, in the laser processing apparatus 1 of the above-described embodiment, since the mounting member 10 is composed of two members, the housing body 20 and the fixing plate 31, the mounting member 10 is more than the case where the mounting member 10 is made of one member. The creation of 10 can be facilitated. In particular, when the mounting member 10 is manufactured from one metal member, it takes a lot of time and effort to cut the mounting member 10 to form a brim portion protruding outward from the periphery of the front end 24 of the housing body 20, but the housing is accommodated. If the body 20 and the fixing plate 31 are manufactured separately, such labor is not required, so that the manufacturing efficiency can be improved.

(9) Further, since the laser machining apparatus 1 of the above-described embodiment has a structure in which the front end 41b of the mounting target portion 41 is fitted into the fitting recess 31g formed on the rear plate surface 31b of the fixing plate 31, it is fixed. The mounting target portion 41 can be easily positioned with respect to the plate 31.
(10) Further, in the laser processing apparatus 1 of the above-described embodiment, since the adjusting screw holes 22a to 22c are arranged on the outer peripheral surface 21 of the accommodating body 20 outside the laser head 50, each adjusting screw hole Compared with the case where 22a to 22c are arranged inside the laser head 50, it is easier to screw the adjusting screw 70 into each of the adjusting screw holes 22a to 22c, so that the laser light emitted from the optical isolator 40 is emitted. It is easy to adjust the tilt angle θ of the optical axis A of L.
(11) Further, in the laser processing apparatus 1 of the above-described embodiment, since the O-ring 60 has elasticity, the O-ring is elastically deformed when the mounting target portion 41 swings with the O-ring 60 as a fulcrum. The target portion 41 can be easily swung.
Further, since the O-ring 60 can be treated as one member, it is easier to handle and can be removed as compared with the case of sealing with a sealing agent.

<Other Embodiments>
(1) A collar portion that projects outward from the periphery of the front end 24 of the housing body 20 is formed, and the collar portion is fixed to the fixing portion 58 from the outside of the laser head 50. You can also do it. Even when this configuration is implemented, the collar portion can be fixed to the fixing portion 58 of the laser head 50 from the outside of the laser head 50, so that the collar portion is more than a structure in which the collar portion is fixed from the inside of the laser head 50. Can be easily fixed to the laser head 50.
(2) Adjustment screw holes 22a to 22c may be formed at four or more locations in the circumferential direction of the outer peripheral surface 21 of the housing body 20, and adjustment screws 70 may be provided in each adjustment screw hole so as to be able to advance and retreat.
(3) A set screw can be used as each adjusting screw 70. Since the set screw does not have a head protruding outward from the tip of the cylindrical portion, the entire screw can be advanced to the depth of the adjusting screw holes 22a to 22c, so that the protruding portion is projected on the outer peripheral surface 21 of the housing body 20. Can be prevented from existing. In addition, since a space can be created between the head of the set screw and the opening surface of the adjustment screw hole, after adjusting the optical axis A, the space is filled with an adhesive or the like to prevent the set screw from rotating. Since this can be done, it is possible to prevent the optical axis A from being displaced due to the rotation of the set screw.
(4) The adjusting screw 70 may also serve as the fixing screw 71. In this case, the fixing screw hole 23 and the fixing screw 71 may not be provided. If this configuration is implemented, the step of screwing the fixing screw 71 into the fixing screw hole 23 to fix the housing 20 becomes unnecessary, so that the inclination angle θ of the optical axis A of the laser beam L emitted by the optical isolator 40 is eliminated. It is possible to improve the work efficiency for adjusting. Further, since the step of forming the fixing screw hole 23 in the housing body 20 and the fixing screw 71 are unnecessary, the cost of the mounting member 10 can be reduced accordingly.

(5) Instead of the adjusting screw, insert a member without a screw into the adjusting screw hole, and after adjusting the optical axis A, between the outer peripheral surface of the member and the inner peripheral surface of the adjusting screw hole. Can also be filled with an adhesive or the like to fix the above-mentioned member to the adjusting screw hole. When a member other than the screw is used as described above, a through hole (so-called stupid hole) in which a female screw is not formed may be used instead of the adjusting screw hole.
(6) Further, as the fixing screw 71, a set screw or a member on which no screw is formed can be used, and the above-mentioned adhesive or the like can be used as a method for fixing them. When the above member is used, a through hole (so-called stupid hole) in which a female screw is not formed may be used instead of the fixing screw hole.
(7) The adjustment screw holes 22a to 22c and the adjustment screw 70 may not be provided, and a grip portion for gripping the mounting target portion 41 and a moving device for moving the grip portion up, down, left and right may be provided. it can. FIG. 16 is a cross-sectional view of a mounting member and an optical isolator provided in the laser processing apparatus according to another embodiment of the present application. As shown in the figure, the accommodating body 20 is not provided with the adjusting screw holes 22a to 22c and the adjusting screw 70. Further, a part of the optical isolator 40 is gripped by the grip portion 93, and the grip portion 93 is attached to the XY stage 90. The XY stage 90 includes an X stage mechanism 91 and a Y stage mechanism 92. The X stage mechanism 91 has an X stage 91a to which the grip portion 93 is attached and an X direction adjustment knob 91b for adjusting the amount of movement of the X stage 91a in the left-right direction (X direction (direction orthogonal to the paper surface in FIG. 16)). And. The X stage 91a moves in the X direction in conjunction with a drive unit (not shown) such as a ball screw attached to the X direction adjustment knob 91b. The Y stage mechanism 92 includes a Y direction adjusting knob 92b for adjusting the amount of movement of the X stage 91a in the vertical direction (Y direction), and a link mechanism 92c for moving the X stage 91a in the vertical direction. By adjusting the amount of rotation of the X-direction adjusting knob 91b and the Y-direction adjusting knob 92b, the mounting target portion 41 is swung to adjust the tilt angle θ of the optical axis A of the laser beam L emitted by the optical isolator 40.
The XY stage 90 may be manually operated as described above, or may be electrically operated by using an actuator such as a motor. Further, in the case of electric power, it may be operated by computer control.
(8) If the mounting target portion 41 can be swung in the accommodating space K, the shapes of the accommodating body 20, the accommodating space K and the mounting target portion 41 are not limited, and the shape of a square column, a hexagonal column, or the like is not limited. It may have a prismatic shape or a flat tubular shape.
(9) Without using the fixing plate 31, a male screw is formed on the front end portion of the outer peripheral surface 21 of the housing body 20, and a female screw hole to be screwed with the male screw is formed through the fixing portion 58 of the laser head 50 to form the housing body. The front end portion of 20 may be configured to be screwed into the female screw hole to be fixed. On the contrary, a female screw is formed on the front end portion of the inner peripheral surface 21c of the housing body 20, and the male screw portion having the male screw screwed with the female screw formed on the peripheral surface is directed rearward from the fixed portion 58 of the laser head 50. It is also possible to form the housing body 20 so as to be formed so as to be screwed into the above-mentioned male screw portion to fix the front end of the housing body 20.

1 Laser processing device 10 Mounting member 20 Housing body 21 Outer peripheral surface 21c Inner peripheral surface 22a to 22c Adjustment screw hole 23 Fixing screw hole 24 Front end 24a Opening 25 Rear end 25a Opening 30 Housing body mounting member 31 Fixing plate 31a Front Plate surface 31b Rear plate surface 31c Passage port 40 Optical isolator 41 Mounting target part 41a Outer surface 41b Front end 41d Exit port 42 Housing 45 Optical fiber cable 50 Laser head 55 fθ Lens 59 Galvano scanner 59a Galvano mirror 60 O-ring 70 Adjustment screw 71 Fixing screw 80 cover K accommodation space S gap

Claims (11)

A head that scans the laser beam onto the object to be machined,
A transmission member that transmits laser light to the head portion,
A laser processing apparatus including a mounting member for mounting the transmission member on the head portion.
When the direction in which the head portion exists as viewed from the transmission member is the front
The transmission member is provided with a mounting target portion to be mounted by the mounting member.
An exit port for emitting laser light is formed at the front end of the mounting target portion.
The mounting member
An accommodating body having an accommodating space capable of accommodating the mounting target portion with its front end facing forward, and having openings communicating with the accommodating space at the front end and the rear end, respectively.
It is interposed between the outer peripheral surface of the mounting target portion accommodated in the accommodation space and the inner peripheral surface of the housing body, and is interposed between the outer peripheral surface of the mounting target portion and the inner peripheral surface of the housing body. The seal part to seal and
A fixing through hole penetrating from the outer peripheral surface of the housing body into the housing space,
The mounting target portion accommodated in the accommodation space is moved from a movable state provided in the fixing through hole so that the mounting target portion accommodated in the accommodation space can be moved with respect to the accommodation body. It is provided with a fixing member that shifts to a fixed state that is fixed to the housing.
A gap is formed between the outer peripheral surface of the mounting target portion accommodated in the accommodation space and the inner peripheral surface of the accommodation body.
When the fixing member is in the movable state, the mounting target portion accommodated in the accommodating space can swing with the seal portion as a fulcrum, and the relative position with respect to the accommodating body is changed.
A laser processing apparatus characterized in that the fixing member fixes the mounting target portion to the housing at a relative position after the change by shifting to the fixed state. The laser processing apparatus according to claim 1, wherein the seal portion is arranged in front of the fixing through hole. The mounting member
A plurality of adjusting through holes formed through the accommodating space from the outer peripheral surface of the accommodating body and arranged in the outer peripheral direction of the accommodating body,
Each of the plurality of adjusting through holes is provided so as to be able to advance and retreat, and a plurality of pressing members capable of pressing the outer peripheral surface of the mounting target portion accommodated in the accommodation space are provided. The laser processing apparatus according to claim 1 or 2. The laser processing apparatus according to claim 3, wherein the seal portion is arranged in front of any of the plurality of adjusting through holes. The laser processing apparatus according to claim 3 or 4, wherein the distance from the seal portion to the adjustment through hole is longer than the distance from the seal portion to the fixing through hole. The laser processing apparatus according to any one of claims 3 to 5, wherein the adjusting through hole is arranged on an outer peripheral surface of the accommodating body outside the head portion. The mounting member
A housing body mounting member for mounting the front end of the housing body to the head portion is provided.
The laser processing apparatus according to any one of claims 1 to 6, wherein the seal portion is held by the housing body mounting member, the housing body, and the mounting target portion. At the front end of the housing, a collar portion is formed which projects outward from the periphery of the front end in a collar shape and is fixed to the head portion.
The laser processing apparatus according to any one of claims 1 to 6, wherein the collar portion is configured to be attachable to the head portion from the outside of the head portion. The mounting target portion has a cylindrical shape.
The opening at the rear end of the housing can be inserted into the front end of the mounting target portion, and has a diameter larger than the outer diameter of the mounting target portion.
The opening at the front end of the housing body has a diameter larger than that of the front end of the mounting target portion so that the front end of the mounting target portion housed in the housing space can protrude.
The housing body mounting member is formed in a flat plate shape, and the plate surface facing forward can be fixed to the head portion, and the front end of the mounting target portion can be fitted to the plate surface facing rearward. A joint recess is formed,
A passage port through which a laser beam emitted from the front end of the mounting target portion passes is formed on the bottom surface of the fitting recess.
The laser processing apparatus according to claim 7, wherein an incident port for incident laser light passing through the passing port is formed in the head portion. The laser processing apparatus according to any one of claims 1 to 9, wherein the sealing portion is an elastic O-ring. A head that scans the laser beam onto the object to be machined,
A transmission member that transmits laser light to the head portion,
A laser processing apparatus including a mounting member for mounting the transmission member on the head portion.
When the direction in which the head portion exists as viewed from the transmission member is the front
The transmission member is provided with a mounting target portion to be mounted by the mounting member.
An exit port for emitting laser light is formed at the front end of the mounting target portion.
The mounting member
An accommodating body having an accommodating space capable of accommodating the mounting target portion with its front end facing forward, and having openings communicating with the accommodating space at the front end and the rear end, respectively.
It is interposed between the outer peripheral surface of the mounting target portion accommodated in the accommodation space and the inner peripheral surface of the housing body, and is interposed between the outer peripheral surface of the mounting target portion and the inner peripheral surface of the housing body. The seal part to seal and
A plurality of adjusting through holes formed through the accommodating space from the outer peripheral surface of the accommodating body and arranged in the outer peripheral direction of the accommodating body,
Each of the plurality of adjusting through holes is provided so as to be able to advance and retreat, and a plurality of pressing members capable of pressing the outer peripheral surface of the mounting target portion accommodated in the accommodation space are provided.
A gap is formed between the outer peripheral surface of the mounting target portion accommodated in the accommodation space and the inner peripheral surface of the accommodation body.
A laser processing apparatus characterized in that the mounting target portion accommodated in the accommodation space is configured to be swingable with the seal portion as a fulcrum.

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