JP6817875B2 - Force sensor - Google Patents

Description

Embodiments of the present invention relate to, for example, a force sensor applied to a robot.

The force sensor (also called a 6-axis force sensor) includes forces Fx, Fy, and Fz in the X-axis, Y-axis, and Z-axis directions, and moments Mx, My, around the axes of the X-axis, Y-axis, and Z-axis, respectively. It is a sensor capable of measuring Mz (see, for example, Patent Document 1 and Patent Document 2).

In Patent Document 1 and Patent Document 2, the force sensor has a force sensor chip as a strain-causing body. The force sensor chip has a frame-shaped support portion, a square-shaped working portion, and a T-shaped connecting portion that connects the support portion and the acting portion, and a plurality of strain resistance elements are formed by connecting the connecting portion and the acting portion. It is provided on the surface of the boundary of.

Japanese Unexamined Patent Publication No. 2010-25736 Japanese Unexamined Patent Publication No. 2008-292510

In the force sensor chip, a plurality of strain resistance elements are directly arranged on the surface of the connecting portion and the acting portion. For this reason, it has been difficult to independently set the sensitivity and allowable torque (maximum torque) of the strain resistance element as a strain sensor and the mechanical strength of the force sensor chip as a strain generator.

An embodiment of the present invention provides a force sensor capable of independently setting the sensitivity and allowable torque of a strain sensor and the mechanical strength of a strain-causing body.

The force sensor of the present embodiment has a square frame shape having four corners and four sides, and has a first structure having four first protrusions provided on each of the four sides, and four. A cross-shaped second structure having one corner portion and four second protrusions, the four corner portions of the first structure, and the four corner portions of the second structure are connected to each other. , Provided between the four third structures having a shape including a bent portion, the four first protrusions of the first structure, and the four second protrusions of the second structure. It includes a substrate having a rigidity lower than the rigidity of the third structure, and four strain sensors having a plurality of resistors provided on the surface of the substrate .

The plan view which shows an example of the force sensor which concerns on 1st Embodiment. The plan view which takes out one of the strain sensors shown in FIG. FIG. 2 is a cross-sectional view taken along the line III-III of FIG. FIG. 5 is a plan view shown for explaining the relationship between the first strain sensor to the fourth strain sensor shown in FIG. 1 and a plurality of bridge circuits. The figure which shows concretely the bridge circuit included in the 1st strain sensor to the 4th strain sensor shown in FIG. The figure which shows the relationship between each bridge circuit and a resistor. The figure which shows the relationship between each bridge circuit and 6 axes. The figure which shows an example of the operation of a bridge circuit. The figure which shows another example of the operation of a bridge circuit. The plan view which shows the modification of 1st Embodiment. The perspective view which shows an example of the force sensor which concerns on 2nd Embodiment. The perspective view which shows a part of FIG.

Hereinafter, embodiments will be described with reference to the drawings. In the figure, the same parts are designated by the same reference numerals.

(First Embodiment)
FIG. 1 shows a force sensor according to the first embodiment. The force sensor (also referred to as a first strain generator) 10 includes a first strain sensor 14, a second strain sensor 15, a third strain sensor 16, and a fourth strain sensor 17.

The first strain generating body 10 includes a first structure (first region) 11, a second structure (second region) 12, and a third structure (third region) 13 as a plurality of connecting portions. A first strain sensor 14, a second strain sensor 15, a third strain sensor 16, and a fourth strain sensor 17 are arranged between the first structure 11 and the second structure 12.

The first structure 11 has, for example, a substantially quadrangular frame shape, and has four corners and four sides. Each of the four corners of the first structure 11 has a first insertion port 11a for inserting, for example, a bolt (not shown). The first structure 11 is fixed to a first movable body or a body to be measured as a force sensor main body by bolts inserted into each first insertion port 11a.

Each of the four sides of the first structure 11 has a first protrusion 11b. Specifically, each first protrusion 11b is provided on the inner side surface at substantially the center of each of the four sides. The height of the surface of the first protrusion 11b is equal to the height of the first structure 11. That is, the thickness of each side of the first structure 11 and the thickness of the first protrusion 11b are made equal.

The second structure 12 is, for example, substantially cross-shaped, and the height of the surface of the second structure 12 is equal to the height of the surface of the first structure 11. That is, the thickness of the second structure 12 is equal to the thickness of the first structure 11.

The second structure 12 has four second protrusions 12a, and each second protrusion 12a faces each first protrusion 11b of the first structure 11 at a predetermined interval. The second structure 12 has a second insertion port 12b for inserting, for example, a bolt (not shown) corresponding to each second protrusion 12a. The second structure 12 is fixed to a second movable body or a body to be measured as a force sensor main body by bolts inserted into each second insertion port 12b.

For example, the four third structures 13 are provided between the four corners of the first structure 11 and the four corners of the second structure 12, respectively. Each third structure 13 has, for example, a substantially quadrangular frame shape and has four corners. The first corner portion of each third structure 13 is provided at the corner portion of the first structure 11, and the third corner portion diagonal to the first corner portion of the third structure 13 is the second structure. Twelve are provided at the corner between two adjacent second protrusions 12a.

The first structure 11, the second structure 12, and the third structure 13 are made of metal, for example, stainless steel (SUS), and have substantially the same thickness along the Z direction shown in the drawing. However, the thickness is not limited to this, and the thicknesses of the first structure 11, the second structure 12, and the third structure 13 may be set respectively. Further, the first structure 11 and the third structure 13 have predetermined widths in the X-axis and Y-axis directions shown in the drawings.

Since the third structure 13 has a quadrangular frame shape, it can be deformed in multiple directions including the X-axis, Y-axis, and Z-axis directions shown in the figure. Therefore, the second structure 12 is made movable in multiple directions with respect to the first structure 11 by the third structure 13.

The first strain sensor 14, the second strain sensor 15, and the third strain sensor 16 are located between the four first protrusions 11b of the first structure 11 and the four second protrusions 12a of the second structure 12. And a fourth strain sensor 17 is provided. The forces Fx, Fy, Fz in the X-axis, Y-axis, and Z-axis directions and the moments Mx, My, and Mz around the X-axis, Y-axis, and Z-axis are detected by the first strain sensor 14 to the fourth strain sensor 17. To.

FIG. 2 shows a part of FIG. 1 taken out and shows a mounting portion of the first strain sensor 14. The configuration of the mounting portion of the second strain sensor 15, the third strain sensor 16, and the fourth strain sensor 17 is the same as the configuration of the mounting portion of the first strain sensor 14, and the second strain sensor 15, the third strain sensor 16 Since the configuration of the fourth strain sensor 17 is the same as the configuration of the first strain sensor 14, the description thereof will be omitted.

In FIG. 2, the first strain sensor 14 includes a substrate (second strain generating body) 21, a plurality of resistors 22 composed of, for example, thin film resistors as strain gauges, a plurality of wiring patterns 23, and a plurality of terminals. 24 is provided.

The substrate 21 is made of a rectangular metal plate, for example, stainless steel (SUS). The rigidity of the substrate 21 is smaller than the rigidity of the third structure 13. One end of the substrate 21 is welded to the first protrusion 11b, and the other end is welded to, for example, the second protrusion 12a. The reference numeral Wp indicates a welded portion.

The method of attaching the substrate 21 to the first protrusion 11b and the second protrusion 12a is not limited to welding, and may be bonded by, for example, an adhesive.

Since one end of the substrate 21 is fixed to the first protrusion 11b and the other end is fixed to the second protrusion 12a, the intermediate portion between the one end and the other end can be deformed. ..

The plurality of resistors 22, the plurality of wiring patterns 23, and the plurality of terminals 24 are provided in the intermediate portion of the substrate 21.

One end and the other end of each resistor 22 are connected to one end of the wiring pattern 23, and the other end of each wiring pattern 23 is connected to the terminal 24, respectively.

The plurality of resistors 22 include four resistors Sa1, Sa2, Sb1, and Sb2 on the four first structure 11 sides and four resistors Ra1, Ra2, Rb1, and Rb2 on the four second structure 12 sides. Includes.

Eight first terminals 24a and eight second terminals 24b are arranged between the four resistors Sa1, Sa2, Sb1, Sb2 and the four resistors Ra1, Ra2, Rb1 and Rb2. Each of the first terminals 24a is connected to one end and the other end of the resistors Sa1, Sa2, Sb1 and Sb2 by the wiring pattern 23, and each of the second terminals 24b is connected to the resistors Ra1, Ra2 and Rb1 by the wiring pattern 23. , Rb2 is connected to one end and the other end, respectively.

By appropriately connecting each of the first terminal 24a and each of the second terminal 24b, the resistors Sa1, Sa2, Sb1, Sb2 and the resistors Ra1, Ra2, Rb1 and Rb2 are used to form two bridge circuits described later. Is configured.

FIG. 3 shows a cross section along the line III-III shown in FIG.

The first strain sensor 14 includes, for example, a substrate 21, an insulating film 21a, a resistor 22, an adhesive film 21b, a wiring pattern 23, an adhesive film 21c, and a glass film 21d as a protective film.

Specifically, the insulating film 21a is provided on the substrate 21, and the resistor 22 composed of, for example, Cr—N is provided on the insulating film 21a. A wiring pattern 23 made of, for example, copper (Cu) is provided on the resistor 22 with an adhesive film 21b interposed therebetween. An adhesive film 21c is provided on the wiring pattern 23, and the adhesive film 21c, the wiring pattern 23, the adhesive film 21b, the resistor 22 and the insulating film 21a are covered with, for example, a glass film 21d. The adhesive film 21b enhances the adhesion between the wiring pattern 23 and the resistor 22, and the adhesive film 21c enhances the adhesion between the wiring pattern 23 and the glass film 21d. The adhesive films 21b and 21c are conductive films containing, for example, chromium (Cr).

The configuration of the first strain sensor 14 to the fourth strain sensor 17 is not limited to this, and can be deformed.

Further, the resistors Sa1, Sa2, Sb1, Sb2 and the resistors Ra1, Ra2, Rb1 and Rb2 have the same configuration, but may have different configurations.

FIG. 4 shows two bridge circuits included in each of the first strain sensor 14 to the fourth strain sensor 17. The first distortion sensor 14 includes the bridge circuits Ba1 and Bb1, the second distortion sensor 15 includes the bridge circuits Ba2 and Bb2, the third distortion sensor 16 includes the bridge circuits Ba3 and Bb3, and the fourth distortion sensor 17 Includes bridge circuits Ba4 and Bb4.

5 (a) and 5 (b) schematically show two bridge circuits included in the first strain sensor 14 to the fourth strain sensor 17.

FIG. 5A shows the bridge circuits Ba1, Ba2, Ba3, and Ba4, and FIG. 5B shows the bridge circuits Bb1, Bb2, Bb3, and Bb4.

In FIGS. 5A and 5B, the resistors Sa1, Sa3, Sa5, Sa7, Sa2, Sa4, Sa6, Sa8, Sb1, Sb3, Sb5, Sb7, Sb2, Sb4, Sb6, Sb8, and the resistors Ra1, Ra3. , Ra5, Ra7, Ra2, Ra4, Ra6, Ra8, Rb1, Rb3, Rb5, Rb7, Rb2, Rb4, Rb6, Rb8 are the first strain sensor 14, the second strain sensor 15, the third strain sensor 16, and the third strain sensor 16, respectively. The resistor of the 4-distortion sensor 17 is shown.

Since the configurations of the first strain sensor 14 to the fourth strain sensor 17 are the same, the first strain sensor 14 will be described.

In the first distortion sensor 14, the bridge circuit Ba1 includes resistors Sa1 and Sa2, and resistors Ra1 and Ra2, and the bridge circuit Bb1 includes resistors Sb1 and Sb2, and resistors Rb1 and Rb2.

In the bridge circuit Ba1 shown in FIG. 5A, one end of the resistor Sa1 is connected to one end of the resistor Ra1, and one end of the resistor Sa2 is connected to one end of the resistor Ra2. The other end of the resistor Sa1 is connected to the other end of the resistor Ra2, and the power supply E is supplied to the connection point between the resistor Sa1 and the resistor Ra2. The other end of the resistor Sa2 and the other end of the resistor Ra1 are grounded. The output voltage V− is output from the connection point between the resistor Sa1 and the resistor Ra1, and the output voltage V + is output from the connection point between the resistor Sa2 and the resistor Ra2.

In the bridge circuit Bb1 shown in FIG. 5B, one end of the resistor Sb1 is connected to one end of the resistor Sb2, and the power supply E is supplied to the connection point between the resistor Sb1 and the resistor Sb2. One end of the resistor Rb1 is connected to one end of the resistor Rb2, and the connection point between the resistor Rb1 and the resistor Rb2 is grounded. The other end of the resistor Sb1 is connected to the other end of the resistor Rb1, and the output voltage V− is output from the connection point between the resistor Sb1 and the resistor Rb1. The other end of the resistor Sb2 is connected to the other end of the resistor Rb2, and the output voltage V + is output from the connection point between the resistor Sb2 and the resistor Rb2.

FIG. 6 schematically shows the bridge circuits Ba1, Bb1, the bridge circuits Ba2, Bb2, the bridge circuits Ba3, Bb4, and the bridge circuits Ba4, Bb4 included in the first strain sensor 14 to the fourth strain sensor 17.

In the above configuration, when a force and / or a moment (torque) is applied to the first structure 11 and the second structure 12, the third structure 13 is deformed and the first structure 11 is subjected to a second force. 2 The position of the structure changes. Therefore, the first strain sensor 14 to the fourth strain sensor 17 are deformed. With the deformation of the first strain sensor 14 to the fourth strain sensor 17, the bridge circuits Ba1, Bb1, the bridge circuits Ba2, Bb2, the bridge circuits Ba3, Bb4, and the bridge included in the first strain sensor 14 to the fourth strain sensor 17 The balance between the output voltage V− and the output voltage V + of the circuits Ba4 and Bb4 is lost, and a signal corresponding to the applied force and / or moment is detected.

FIG. 7 shows the relationship between the bridge circuit and the detected force and moment.

As shown in FIG. 7, the force Fx in the X-axis direction is detected by the bridge circuits Bb1 and Bb3. The force Fy in the Y-axis direction is detected by the bridge circuits Bb2 and Bb4. The force Fz in the Z-axis direction is detected by the bridge circuits Ba1, Ba2, Ba3, and Ba4.

The moment Mx around the X-axis is detected by the bridge circuits Ba1 and Ba3. The moment My around Y is detected by the bridge circuits Ba2 and Ba4. The moment Mz around the Z axis is detected by the bridge circuits Bb1, Bb2, Bb3, and Bb4.

FIG. 8 shows, for example, an example of the operation of the bridge circuit Bb1. The bridge circuit Bb1 detects a force in the main plane (X direction and / or Y direction shown in FIG. 4) of the strain generating body 10. The output voltage Vout of the bridge circuit Bb1 is obtained from the output voltage V + and the output voltage V- by the equation (1).

Vout = (V + − V-)
= (R1 / (R1 + R2) -R3 / (R3 + R4)) · E ... (1)
In FIG. 8,
R1 is the resistance value of the resistor Sb1, R2 is the resistance value of the resistor Sb2, R3 is the resistance value of the resistor Rb2, R4 is the resistance value of the resistor Rb1, and no force or moment is applied and there is no distortion. In, R1 = R2 = R3 = R4 = R. ΔR is the value of the change in resistance value.

FIG. 9 shows, for example, an example of the operation of the bridge circuit Ba1. The bridge circuit Ba1 detects a force in the direction perpendicular to the main surface of the strain generating body 10 (Z-axis direction). The output voltage Vout of the bridge circuit Ba1 is obtained from the output voltage V + and the output voltage V- by the equation (1).

In FIG. 9,
R1 is the resistance value of the resistor Sa1, R2 is the resistance value of the resistor Sa2, R3 is the resistance value of the resistor Ra2, R4 is the resistance value of the resistor Ra1, and no force or moment is applied and there is no distortion. In, R1 = R2 = R3 = R4 = R. ΔR is the value of the change in resistance value.

(Effect of the first embodiment)
According to the first embodiment, the first structure 11 and the second structure 12 are connected by the third structure 13, and the third structure 13 has a substantially quadrangular frame shape and is deformed in multiple directions. It is possible to do. Therefore, the first structure 11 and the second structure 12 can move in the multi-axis direction via the third structure 13. Further, the first strain sensor 14 to the fourth strain sensor 17, each including two bridge circuits, are provided between the first structure 11 and the second structure 12. Therefore, the sensor output in the 6-axis direction can be obtained from the output voltage of the first strain sensor 14 to the fourth strain sensor 17.

Moreover, the first strain sensor 14 to the fourth strain sensor 17 are provided separately from the third structure 13, and the substrate (second strain generator) constituting the first strain sensor 14 to the fourth strain sensor 17. The rigidity of 21 is smaller than that of the third structure 13. Therefore, regardless of the configuration of the substrate 21 provided on the first strain sensor 14 to the fourth strain sensor 17 that determines the sensitivity of the force sensor, the first structure 11 and the second structure as the first strain generating body The rigidity of the force sensor 10 can be determined only by the body 12 and the third structure 13. Therefore, it is possible to facilitate the structural design of the force sensor 10.

Further, the first strain sensor 14 to the fourth strain sensor 17 can be independently designed regardless of the first structure 11, the second structure 12, and the third structure 13, and the first strain sensor can be designed independently. It is possible to improve the sensitivity of the 14th to 4th strain sensors 17. Therefore, it is possible to measure forces and moments in the multiaxial direction with high accuracy.

Further, the first strain sensor 14 to the fourth strain sensor 17 can be attached between the first structure 11 and the second structure 12 by welding. Therefore, it is possible to simplify the production.

Further, in the first strain sensor 14 to the fourth strain sensor 17, a plurality of terminals 24 are arranged in the central portion of the substrate 21, and by appropriately connecting these terminals 24, it is possible to form two bridge circuits. Has been done. Therefore, it is possible to easily form two different bridge circuits.

(Modification example)
In the first embodiment, the third structure 13 has a quadrangular frame shape. However, it is not limited to this.

FIG. 10 shows a modified example of the first embodiment.

In FIG. 10, the third structure 31 has an S shape, one end of the third structure 31 is provided at a corner of the first structure 11, and the other end of the second structure 12 It is provided at the corner between two adjacent second protrusions 12a.

In this modification, since the third structure 31 has an S-shape, it can be deformed in multiple directions including the X-axis, Y-axis, and Z-axis directions shown in the figure. Therefore, the second structure 12 is made movable in multiple directions with respect to the first structure 11 by the third structure 13. Therefore, the same effect as that of the first embodiment can be obtained by the configuration of the modified example.

Further, as the shape of the third structure 31, for example, an L shape, a ring shape, or the like can be applied.

(Second Embodiment)
11 and 12 show a second embodiment.

In the first embodiment, the first strain sensor 14 to the fourth strain sensor 17 are arranged at positions different from the third structure 13. On the other hand, in the second embodiment, the first strain sensor 14 to the fourth strain sensor 17 and the third structure 41 are arranged at the same position.

In FIGS. 11 and 12, the force sensor (also referred to as a first strain generating body) 40 includes a first strain sensor 14, a second strain sensor 15, a third strain sensor 16, and a fourth strain sensor 17. There is.

The first strain generating body 40 includes a first structure (first region) 41, a second structure (second region) 42, and a third structure (third region) 43 as a plurality of connecting portions. A first strain sensor 14, a second strain sensor 15, a third strain sensor 16, and a fourth strain sensor 17 are arranged between the first structure 41 and the second structure 42.

Similar to the first embodiment, the first structure 41 has, for example, a substantially quadrangular frame shape, and has four corners and four sides. Each of the four corners of the first structure 11 has a first insertion port 11a for inserting, for example, a bolt (not shown). The first structure 11 is fixed to a first movable body (not shown) as a force sensor main body by bolts inserted into each first insertion port 11a.

An intermediate portion of each side of the first structure 41 has a first protrusion 11b. The height of the surface of the first protrusion 11b is equal to the height of the first structure 41. That is, the thickness of each side of the first structure 41 and the thickness of the first protrusion 11b are made equal.

The second structure 42 is, for example, substantially quadrangular, and the height of the surface of the second structure 12 is equal to the height of the surface of the first structure 11. That is, the thickness of the second structure 12 is equal to the thickness of the first structure 11.

The second structure 42 has a second insertion port 12b at four corners for inserting, for example, a bolt (not shown). The second structure 12 is fixed to a second movable body (not shown) as a force sensor main body by bolts inserted into each second insertion port 12b.

The third structure 43 is provided between the first protrusion 11b of the first structure 11 and the intermediate portion of each side of the second structure 42, respectively.

As shown in FIG. 12, one end of the third structure 43 is connected to the first protrusion 11b of the first structure 41, and the other end is connected to the second structure 42.

The height of the surface 43a of the third structure 43 is lower than the height of the surfaces of the first structure 11, the first protrusion 11b, and the second structure 12. That is, the thickness of the third structure 43 is thinner than the thickness of the first structure 11, the first protrusion 11b, and the second structure 12.

Both side surfaces of the third structure 43 adjacent to the surface 43a have recesses 43b. Therefore, the width of the third structure 43 is narrower than the width of the first protrusion 11b.

As described above, the width of the third structure 43 is narrower than the width of the first protrusion 11b, and the thickness is lower than the thickness of the first structure 11, the first protrusion 11b, and the second structure 12. There is. Therefore, the third structure 43 can be deformed in multiple directions with respect to the force applied to the first structure 41 and the second structure 42, and the second structure 12 is the second structure. The three structures 13 allow the first structure 11 to move in multiple directions including the X-axis, Y-axis, and Z-axis directions shown in the figure.

The first strain sensor 14, the second strain sensor 15, the third strain sensor 16, and the fourth strain sensor 17 are provided between the first structure 11 and the second structure 12, respectively. Specifically, a plurality of protrusions 44 are provided on the surface of the first protrusion 11b of the first structure 11 and the surface of the second structure 12 corresponding to the first protrusion 11b, respectively. , The first strain sensor 14, the second strain sensor 15, the third strain sensor 16, and the other end and the other end of the fourth strain sensor 17 are held. The intermediate portion provided with the resistor 22 of the first strain sensor 14, the second strain sensor 15, the third strain sensor 16, and the fourth strain sensor 17 is separated from the third structure 43.

In this state, the first strain sensor 14, the second strain sensor 15, the third strain sensor 16, and the fourth strain sensor 17 are fixed to the first protrusion 11b and the second structure 12 by welding, for example. The fixing method is not limited to this, and for example, fixing with an adhesive or the like can be used.

The configurations of the first strain sensor 14, the second strain sensor 15, the third strain sensor 16, and the fourth strain sensor 17 may be the same as those in the first embodiment, but may be different.

In the above state, when a force and / or a moment (torque) is applied to the first structure 41 and the second structure 42, the third structure 43 is deformed and the first structure 41 is subjected to a second force. 2 The position of the structure changes. Therefore, the first strain sensor 14 to the fourth strain sensor 17 are deformed. With the deformation of the first strain sensor 14 to the fourth strain sensor 17, the bridge circuits Ba1, Bb1, the bridge circuits Ba2, Bb2, the bridge circuits Ba3, Bb4, and the bridge included in the first strain sensor 14 to the fourth strain sensor 17 The balance between the output voltage V− and the output voltage V + of the circuits Ba4 and Bb4 is lost, and a signal corresponding to the applied force and / or moment is detected.

(Effect of the second embodiment)
The same effect as that of the first embodiment can be obtained by the second embodiment.

Moreover, in the second embodiment, the third structure 43 is provided in the intermediate portion of each side of the first structure 41 and the intermediate portion of each side of the second structure 42. Therefore, assuming that the length of one side of the second structure 42 is equal to the length of one side of the second structure 12 shown in the first embodiment, the length of one side of the first structure 41 is set to the first embodiment. It can be shorter than the length of one side of the first structure 11 shown. Therefore, it is possible to reduce the size of the first strain generating body 40.

In addition, the present invention is not limited to each of the above embodiments as it is, and at the implementation stage, the components can be modified and embodied within a range that does not deviate from the gist thereof. In addition, various inventions can be formed by appropriately combining the plurality of components disclosed in each of the above embodiments. For example, some components may be removed from all the components shown in the embodiments. In addition, components across different embodiments may be combined as appropriate.

10, 40 ... Force sensor (first strain generator), 11, 41 ... First structure (first region), 12, 42 ... Second structure (second region), 13, 43 ... Third structure Body (third region), 14 ... 1st strain sensor, 15 ... 2nd strain sensor, 16 ... 3rd strain sensor, 17 ... 4th strain sensor, 21 ... substrate (2nd strain generator), 22 ... resistor , Ba1, Bb1, Ba2, Bb2, Ba3, Bb3, Ba4, Bb4 ... Bridge circuit.

Claims (4)

A first structure having a quadrangular frame shape having four corners and four sides and having four first protrusions provided on each of the four sides.
A cross-shaped second structure having four corners and four second protrusions,
The four corners of the first structure and the four corners of the second structure are connected to each other, and the four third structures having a shape including a bent portion and the like.
A substrate provided between the four first protrusions of the first structure and the four second protrusions of the second structure and having a rigidity smaller than that of the third structure, and the above. Four strain sensors with multiple resistors provided on the surface of the substrate,
A force sensor characterized by comprising. The force sensor according to claim 1, wherein the shape of the third structure is a quadrangular frame shape . The shape of the third structure, S-shape, L-shape, the force sensor according to claim 1, characterized in that one of the ring. A first structure having a quadrangular frame shape having four corners and four sides and having four protrusions provided on each of the four sides.
A second structure having a thickness equal to the thickness of the first structure, which is a quadrangle having four sides,
Four fourths provided between the four protrusions of the first structure and the four sides of the second structure and having a thickness thinner than the thickness of the first structure and the second structure. 3 structures and
The four protrusions of the first structure and the four sides of the second structure are provided apart from the third structure to provide a rigidity smaller than that of the third structure. A substrate to be provided, four strain sensors having a plurality of resistors provided on the surface of the substrate, and
A force sensor characterized by comprising.

Images