JP6801041B2 - Actuator - Google Patents

Description

The present invention relates to an actuator in which a rod can appear and disappear with respect to a housing.

Conventionally, in a part of a production line, for example, an actuator is temporarily stopped by projecting a rod from a housing to temporarily stop the flow of work flowing on a transport path, and by immersing the rod in the housing. It is used as a stopper device to restore the flow of the work on the transport path. As a kind of such a stopper device, for example, the escapement device of Patent Document 1 is known.

The escapement device of Patent Document 1 includes a cylindrical cylinder body (housing), and two cylinder chambers extending along the axial direction of the cylinder body are provided in the cylinder body so as to be arranged in parallel with each other. ing. A piston is housed in each cylinder chamber so as to be reciprocating. A piston rod that can appear and disappear with respect to the cylinder body is connected to each piston. Then, fluid is supplied and discharged to each cylinder chamber so that, for example, when one piston rod reaches the stroke end in the protruding direction with respect to the cylinder body, the other piston rod reaches the stroke end in the immersion direction. It has become.

Japanese Unexamined Patent Publication No. 2001-116013

By the way, in the configuration in which the operation of the two piston rods is controlled by supplying and discharging the fluid to each cylinder chamber as in the escapement device of Patent Document 1, the fluid supplied to each cylinder chamber moves from the cylinder body to the outside. A seal structure is required to prevent leakage. However, the seal structure deteriorates due to repeated movements of the piston rod, which may cause a problem in durability. Further, there is a demand for a device capable of performing stable operation even in an adverse environment where dust and the like are generated.

The present invention has been made to solve the above problems, and an object of the present invention is to provide an actuator which has excellent durability and can perform stable operation even in an adverse environment where dust or the like is generated. To do.

The actuator that solves the above problems includes a housing, two rods that can appear and disappear with respect to the housing, an electric motor built in the housing, and a rotational motion of an output shaft of the electric motor built in the housing. The housing has two through holes through which the two rods penetrate, and the two through holes extend in parallel with each other, and each includes a conversion mechanism for converting into a reciprocating linear motion of two rods. One end of the through hole in the axial direction is opened in the housing, and the other end of the through hole in the axial direction is opened outside the housing. Both of the two rods are connected to the electric motor. The base end of the two rods is present in the housing, and one of the two rods protrudes from one of the two through holes, so that the other of the two rods is immersed in the other of the two through holes. However, the amount of protrusion of one rod through one of the two through holes and the amount of immersion of the other rod through the other of the two through holes are the same so that the pressure change in the housing does not occur. is there.

It is preferable that the actuator is provided with a scraper that scrapes off foreign matter adhering to the outer peripheral surface of each rod and seals between each through hole and each rod.
In the actuator, the conversion mechanism includes an output rotating body that rotates integrally with the output shaft, a pair of bearing columns supported by the output rotating body, bearings fixed to each bearing column, and the above. A first cam plate connected to one of the two rods and a second cam plate connected to the other of the two rods are provided, and each of the first cam plate and the second cam plate is provided. It is preferable that the cam groove is provided in sliding contact with each bearing and is connected to the output rotating body via each bearing.

In the actuator, the two rods are cylindrical, and the output rotating body has a part of the first cam plate and a part of the second cam plate as the first cam plate and the second cam plate. The rotation of one of the two rods via the first cam plate and the rotation of the other of the two rods via the second cam plate are arranged at positions sandwiched on both sides in the plate thickness direction. It is preferable to have a pair of regulatory parts to regulate.

In the actuator, the conversion mechanism is attached to an output rotating body that rotates integrally with the output shaft, an output link strut supported by the output rotating body, a support shaft supported by the housing, and the support shaft. A driven rotating body that rotates with respect to the driven rotating body, a driven link strut supported by the driven rotating body, one end swingably supported by the output link strut, and the other end swingable by the driven link strut. For the link portion supported by the output rotating body, the output side bearing support supported by the output rotating body, the output side bearing fixed to the output side bearing support column, and the driven side bearing supported by the driven rotating body. A strut, a driven side bearing fixed to the driven side bearing strut, an output side cam plate connected to one of the two rods, and a driven side cam plate connected to the other of the two rods. The output side cam plate has an output side cam groove that is in sliding contact with the output side bearing and is connected to the output rotating body via the output side bearing, and the driven side cam plate is said to be driven. It is preferable that the driven side cam groove is slidably contacted with the side bearing and is connected to the driven rotating body via the driven side bearing.

In the actuator, the two rods are columnar, and the output rotating body is arranged at a position where a part of the output side cam plate is sandwiched between both sides in the plate thickness direction of the output side cam plate, and the output The driven rotating body has a pair of output side regulating portions that regulate the rotation of one of the two rods via the side cam plate, and the driven rotating body has a part of the driven side cam plate as a plate of the driven side cam plate. It is preferable to have a pair of driven side regulating portions that are arranged at positions sandwiched on both sides in the thickness direction and regulate the rotation of the other of the two rods via the driven side cam plate.

In the actuator, the output link strut moves around the output shaft with the rotation of the output rotating body, and the driven link strut moves around the support shaft with the rotation of the driven rotating body. The link portion moves in the same phase position as the rotation phase of the support column, and the link portion is rotatably supported by the output link support column and the second support portion rotatably supported by the driven link support column. The first support portion has a portion and a connecting portion that linearly connects the first support portion and the second support portion, and the first support portion sandwiches the output side bearing in the axial direction of the output link column. The second support portion is sandwiched between the pair of output side regulation portions, and the second support portion is sandwiched between the pair of driven side regulation portions that sandwich the driven side bearing in the axial direction of the driven link column, and is connected. The unit is offset from the virtual straight line connecting the central axis of the output link column and the central axis of the driven link column with respect to the output shaft and the support axis when viewed from the axial direction. It is good.

In the actuator, when the two rods appear and disappear in a direction orthogonal to the flow direction of the work flowing on the transport path and the protrusion amounts of the two rods with respect to the housing match, the two rods It is preferable that the tip of the work overlaps the work flowing on the transport path in the flow direction on the transport path in the work.

In the actuator, the housing may have a gas supply port used to supply an inert gas into the housing and a pressure detection port used to detect the pressure in the housing.

In the actuator, the first optical sensor and the second optical sensor, which are built in the housing and detect that one of the two rods is located at the protruding position and the other is located at the immersion position, are the rods. It is preferable that they are arranged so as to face each other in the axial direction .

According to the present invention, the durability is excellent, and stable operation can be performed even in a bad environment where dust and the like are generated.

FIG. 5 is a cross-sectional view showing an escapement device according to the first embodiment. 2-2 sectional view in FIG. FIG. 1 is a sectional view taken along line 3-3 in FIG. FIG. 1 is a sectional view taken along line 4-4 in FIG. (A) is a sectional view taken along line 5-5 in FIG. 1, and (b) is a partial sectional view relating to a pressure detection port. A timing chart for explaining the operation of the electric motor. FIG. 5 is a cross-sectional view showing a state in which the first rod is located at an immersion position and the second rod is located at a protruding position. FIG. 5 is a cross-sectional view showing a state in which the first rod is located at the protruding position and the second rod is located at the immersion position. (A) to (c) are schematic diagrams illustrating the operation of the escapement device. FIG. 6 is a cross-sectional view of the escapement device according to the second embodiment. 11-11 sectional view in FIG. FIG. 10 is a cross-sectional view taken along the line 12-12. FIG. 5 is a cross-sectional view showing a state in which the first rod is located at an immersion position and the second rod is located at a protruding position. FIG. 5 is a cross-sectional view showing a state in which the first rod is located at the protruding position and the second rod is located at the immersion position.

(First Embodiment)
Hereinafter, the first embodiment in which the actuator is embodied in an escapement device which is a kind of stopper device will be described with reference to FIGS. 1 to 9.

As shown in FIGS. 1 and 2, the housing 11 of the escapement device 10 includes a main body housing 14 in which two columnar rods 12 and 13 can appear and disappear, and a motor housing 15 connected to the main body housing 14. Have.

The main body housing 14 has a main body portion 14a and a cover 14b that covers the main body portion 14a. The main body 14a includes a first through hole 16a as a through hole through which the first rod 12 which is one of the two rods 12 and 13 penetrates, and a second rod 13 which is the other of the two rods 12 and 13. It has a rectangular parallelepiped-shaped block body 141 in which a second through hole 16b is formed as a through hole to penetrate. Therefore, the housing 11 has two through holes 16a and 16b. The first through hole 16a and the second through hole 16b extend in parallel with each other. Therefore, the first rod 12 and the second rod 13 extend in parallel with each other.

As shown in FIG. 1, an annular slide bearing 17a is provided between both ends in the axial direction of the first through hole 16a and the first rod 12. An annular slide bearing 17b is provided between both ends in the axial direction of the second through hole 16b and the second rod 13.

A scraper 18a is provided between the first through hole 16a and the first rod 12 to scrape off foreign matter and the like adhering to the outer peripheral surface of the first rod 12 inside the first through hole 16a. The scraper 18a is arranged in the first through hole 16a on the protruding direction side of the first rod 12 with respect to the both slide bearings 17a, and is fitted into the first through hole 16a. The scraper 18a also has a sealing function for sealing between the first through hole 16a and the first rod 12.

A scraper 18b is provided between the second through hole 16b and the second rod 13 to scrape off foreign matter and the like adhering to the outer peripheral surface of the second rod 13 inside the second through hole 16b. The scraper 18b is arranged in the second through hole 16b on the protruding direction side of the second rod 13 with respect to both slide bearings 17b, and is fitted into the second through hole 16b. The scraper 18b also has a sealing function for sealing between the second through hole 16b and the second rod 13.

As shown in FIGS. 1 and 2, the main body portion 14a has a flat plate-shaped bottom wall 142 that is attached to the bottom surface of the block body 141 and extends along the axial direction of the first rod 12 and the second rod 13. The block body 141 and the bottom wall 142 are connected by bolts 143. A circular positioning hole 14h is formed in the bottom wall 142. Then, the space 14k is partitioned in the main body housing 14 by the block body 141, the bottom wall 142, and the cover 14b. An elongated cable insertion hole 14p is formed in the bottom wall 142.

As shown in FIG. 2, the motor housing 15 is connected to the main body housing 14 so that the opening 15a of the motor housing 15 is located on the bottom wall 142 side. An electric motor 19 (stepping motor) is built in the motor housing 15. The electric motor 19 has a positioning convex portion 19b that is fitted into the positioning hole 14h. Then, the positioning convex portion 19b is incorporated in the motor housing 15 in a state of being positioned on the bottom wall 142 by being fitted into the positioning hole 14h. Therefore, the positioning hole 14h is closed by the positioning convex portion 19b. The inside of the motor housing 15 and the space 14k communicate with each other through the cable insertion hole 14p.

The cover 14b is attached to the main body 14a in a state where the sealing property with the main body 14a is ensured. Specifically, the caulking material S1 is applied between the cover 14b and the main body 14a to seal the cover 14b and the main body 14a. Although not shown, the liquid gasket is applied to the mating surface between the cover 14b and the main body 14a to seal the cover 14b and the main body 14a. Further, the motor housing 15 is attached to the main body housing 14 in a state where the sealing property with the main body housing 14 is ensured. Specifically, the caulking material S1 is applied between the motor housing 15 and the main body housing 14 to seal the space between the motor housing 15 and the main body housing 14. Therefore, the inside of the motor housing 15 and the space 14k are ensured to have a sealing property with the outside of the housing 11.

The output shaft 19a of the electric motor 19 projects into the space 14k through the positioning hole 14h. The space 14k contains a conversion mechanism 20 that converts the rotational motion of the output shaft 19a into the reciprocating linear motion of the first rod 12 and the second rod 13.

The conversion mechanism 20 is fixed to an output rotating body 21 that rotates integrally with the output shaft 19a, a pair of columnar bearing columns 22 and 23 supported by the output rotating body 21, and bearing columns 22 and 23. Bearings 24 and 25 as followers, a flat plate-shaped first cam plate 26 connected to the first rod 12, and a flat plate-shaped second cam plate 27 connected to the second rod 13 are provided. .. Bearings 24 and 25 are ball bearings having an inner ring, an outer ring and a ball.

The output rotating body 21 is a substantially circular circle arranged at a position where a part of the first cam plate 26 and a part of the second cam plate 27 are sandwiched between both sides of the first cam plate 26 and the second cam plate 27 in the plate thickness direction. It has a pair of plate-shaped regulating portions 21a and 21b and a cylindrical connecting portion 21c that connects the pair of regulating portions 21a and 21b to each other. The pair of regulating portions 21a and 21b regulate the rotation of the first rod 12 via the first cam plate 26 and the rotation of the second rod 13 via the second cam plate 27. The connecting portion 21c has an insertion hole 21h through which the output shaft 19a is inserted.

The pair of restricting portions 21a and 21b are formed with circular hole-shaped insertion holes 21d into which both ends of the bearing column 22 are inserted. The bearing column 22 is supported by a pair of restricting portions 21a and 21b by inserting both ends of each bearing column 22 into the insertion holes 21d. Further, the pair of restricting portions 21a and 21b are formed with circular hole-shaped insertion holes 21e into which both ends of the bearing column 23 are inserted. The bearing column 23 is supported by a pair of restricting portions 21a and 21b by inserting both ends of each bearing column 23 into the insertion holes 21e. The bearings 24 and 25 are arranged between the pair of regulating portions 21a and 21b. In this way, the output rotating body 21 supports the bearings 24 and 25 and regulates the rotation of the first cam plate 26 and the second cam plate 27. As a result, the first rod 12 and the second rod 13 perform a reciprocating linear motion in a state where the rotation is restricted.

Both insertion holes 21d and 21e are located on both sides of the insertion hole 21h in a plan view, and are located 180 degrees apart from the pair of restricting portions 21a and 21b in the rotation direction of the output rotating body 21. Have been placed. Therefore, the columns 22 and 23 for both bearings are located on both sides of the output shaft 19a, and are arranged at positions 180 degrees apart from the output rotating body 21 in the rotation direction of the output rotating body 21. ..

As shown in FIG. 3, the first cam plate 26 is connected to the end of the first rod 12 in the immersion direction. A flat surface portion 12a is formed on the outer peripheral surface of the end portion of the first rod 12 in the immersion direction. Then, at the end of the first rod 12 in the immersion direction, a step portion 12b extending along the radial direction of the first rod 12 and connecting the flat surface portion 12a and the outer peripheral surface of the first rod 12 is formed.

In the first cam plate 26, one of the pair of planes located in the plate thickness direction is in contact with the plane portion 12a of the first rod 12, and the side surface located in the direction orthogonal to the plate thickness direction is the first rod 12. In a state of being in contact with the step portion 12b of the above, the rod 28 is connected to the first rod 12. Further, a bolt 29 is screwed into the axial end surface 12e of the first rod 12 located in the immersion direction via a washer 29a. The first cam plate 26 is sandwiched between the washer 29a and the stepped portion 12b, and the movement of the first rod 12 with respect to the first rod 12 in the axial direction is restricted.

Since the connection structure of the second cam plate 27 to the second rod 13 is the same as the connection structure of the first cam plate 26 to the first rod 12 described with reference to FIG. 3, detailed description thereof will be omitted. ..

As shown in FIG. 1, each of the first cam plate 26 and the second cam plate 27 has cam grooves 26a and 27a that are in sliding contact with the bearings 24 and 25, respectively. The cam grooves 26a and 27a are U-shaped in a plan view. The first cam plate 26 and the second cam plate 27 are connected to the output rotating body 21 via bearings 24 and 25, respectively.

A first light-shielding body 31 is attached to an end surface of the first cam plate 26 opposite to the cam groove 26a. The first light-shielding body 31 is continuous with the plate-shaped first mounting portion 31a attached to the first cam plate 26 and the first mounting portion 31a, and is formed by bending from the first mounting portion 31a. It has a part 31b. The first light-shielding portion 31b is located on the immersion direction side of the first rod 12 with respect to the first cam plate 26.

The first mounting portion 31a has a first elongated hole 31h extending in the axial direction of the first rod 12. Two first mounting bolts 31c are inserted into the first elongated hole 31h, and the two first mounting bolts 31c are screwed into the end face of the first cam plate 26 opposite to the cam groove 26a. , The first mounting portion 31a is mounted on the first cam plate 26. By adjusting the insertion position of the two first mounting bolts 31c with respect to the first elongated hole 31h, it is possible to adjust the mounting position of the first light-shielding body 31.

A second light-shielding body 32 is attached to the end surface of the second cam plate 27 on the side opposite to the cam groove 27a. The second light-shielding body 32 is continuous with the plate-shaped second mounting portion 32a attached to the second cam plate 27 and the second mounting portion 32a, and is formed by bending from the second mounting portion 32a. It has a part 32b. The second light-shielding portion 32b is located on the immersion direction side of the second rod 13 with respect to the second cam plate 27.

The second mounting portion 32a has a second elongated hole 32h extending in the axial direction of the second rod 13. Two second mounting bolts 32c are inserted into the second elongated hole 32h, and the two second mounting bolts 32c are screwed into the end face of the second cam plate 27 opposite to the cam groove 27a. , The second mounting portion 32a is mounted on the second cam plate 27. The mounting position of the second light-shielding body 32 can be adjusted by adjusting the insertion position of the two second mounting bolts 32c with respect to the second elongated hole 32h.

Further, the escapement device 10 has a light receiving / receiving type first optical sensor 33 and a second optical sensor 34. The first optical sensor 33 is arranged to face the axial direction of the first rod 12, and the second optical sensor 34 is arranged to face the axial direction of the second rod 13.

As shown in FIG. 4, the first optical sensor 33 is arranged to face the first light projecting unit 33a that emits light and the first light projecting unit 33a, and emits light emitted from the first light projecting unit 33a. It has a first light receiving unit 33b that receives light. Then, the first light-shielding portion 31b of the first light-shielding body 31 can pass between the first light-emitting unit 33a and the first light-receiving unit 33b. When the first light-shielding unit 31b passes between the first light-emitting unit 33a and the first light-receiving unit 33b, the first light-shielding unit 31b blocks the light emitted from the first light-emitting unit 33a.

The second light sensor 34 is arranged to face the second light projecting unit 34a that emits light and the second light projecting unit 34a, and the second light receiving unit 34b that receives the light emitted from the second light projecting unit 34a. And have. Then, the second light-shielding portion 32b of the second light-shielding body 32 can pass between the second light-emitting unit 34a and the second light-receiving unit 34b. When the second light-shielding unit 32b passes between the second light-emitting unit 34a and the second light-receiving unit 34b, the second light-shielding unit 32b blocks the light emitted from the second light-emitting unit 34a.

As shown in FIG. 5A, the motor housing 15 includes a waterproof motor connector 15b that is airtightly fixed to the motor housing 15 and a sensor connector 15c. Inside the motor housing 15, there is a motor cable C1 that connects the motor waterproof connector 15b and the electric motor 19, a first sensor cable C2 that connects the sensor connector 15c and the first optical sensor 33, and a sensor connector. A second sensor cable C3 that connects the 15c and the second optical sensor 34 is provided.

One end of the motor cable C1 is connected to the motor waterproof connector 15b, and the other end of the motor cable C1 is connected to the cable connection portion 19c of the electric motor 19. One end of the first sensor cable C2 is connected to the sensor connector 15c, and the other end of the first sensor cable C2 is inserted into the space 14k from inside the motor housing 15 via the cable insertion hole 14p. 1 It is connected to the optical sensor 33. One end of the second sensor cable C3 is connected to the sensor connector 15c, and the other end of the second sensor cable C3 is inserted into the space 14k from inside the motor housing 15 via the cable insertion hole 14p. 2 It is connected to the optical sensor 34.

In the main body housing 14, a mounting plate 14e is provided on the end surface on the side where the first rod 12 and the second rod 13 appear and disappear with respect to the main body housing 14. The mounting plate 14e is fixed to the end surface of the block body 141 by bolts 141e. The mounting plate 14e is used to mount the escapement device 10 at an optimum position on a belt conveyor which is a part of a production line described later. Specifically, there is a groove for fixing on the side surface of the belt conveyor, and an escapement device is obtained by screwing a plurality of holes 142e formed in the mounting plate 14e into a nut inserted in the groove of the belt conveyor. 10 is attached to the belt conveyor.

As shown in FIGS. 2, 3, 4 and 5 (a), the main body housing 14 has a gas supply port 14c used for supplying an inert gas into the main body housing 14. The gas supply port 14c of the present embodiment is composed of a hole 141c penetrating the bottom wall 142 and a groove 142c recessed in the bottom surface of the block body 141 and communicating with the hole 141c. The groove 142c communicates with the space 14k. A joint 143c is attached to the hole 141c. An inert gas supply source P1 is connected to the joint 143c. Then, an inert gas is supplied to the space 14k from the supply source P1 via the gas supply port 14c.

Further, the main body housing 14 has a pressure detecting port 14d used for detecting the pressure in the main body housing 14. The pressure detection port 14d of the present embodiment is composed of a hole 141d penetrating the bottom wall 142 and a groove 142d recessed in the bottom surface of the block body 141 and communicating with the hole 141d. The groove 142d communicates with the space 14k. Further, as shown in FIG. 5B, a joint 143d is attached to the hole 141d. A detection unit P2 that detects the pressure inside the motor housing 15 and the space 14k is connected to the joint 143d via the pressure detection port 14d. In the present embodiment, the pressure inside the motor housing 15 and the space 14k is detected by the detection unit P2 via the pressure detection port 14d, so that the pressure inside the motor housing 15 and the space 14k is maintained at a positive pressure. Has been done.

Next, the operation of the first embodiment will be described.
The waterproof connector 15b for the motor and the connector 15c for the sensor are connected to a dedicated controller (not shown). The CPU in the dedicated controller has a built-in control program for performing the operation shown in FIG. When an abnormality is detected, such as when the electric motor 19 is stopped by an external force, an abnormality signal is transmitted from the dedicated controller to the host controller. The dedicated controller receives the operation start signals SG1 and SG2 from the host controller to control the electric motor 19 as follows.

The solid line L10 in FIG. 6 shows the change in the rotation angle of the output shaft 19a of the electric motor 19.
As shown in FIG. 7, the light emitted from the first light emitting unit 33a is shielded by the first light emitting unit 31b, and the light emitted from the second light emitting unit 34a is received by the second light receiving unit 34b. It is assumed that the operation start signal SG1 used for the drive control of the electric motor 19 becomes LOW in this state. Then, the electric motor 19 is driven, and the output shaft 19a rotates clockwise at a constant speed when viewed from the output shaft 19a side of the electric motor 19. Then, the output rotating body 21 rotates clockwise integrally with the output shaft 19a, and the bearing columns 22 and 23 move around the output shaft 19a as the output rotating body 21 rotates. Then, the first rod 12 moves in the protruding direction with respect to the main body housing 14 via the first cam plate 26 while the bearing 24 and the cam groove 26a are in sliding contact with each other, and the bearing 25 and the cam groove 27a are in sliding contact with each other. The 2 rod 13 moves in the immersion direction with respect to the main body housing 14 via the second cam plate 27.

When the first rod 12 starts to move in the protruding direction with respect to the main body housing 14 from the immersion position, the first light-shielding body 31 also moves in the protruding direction integrally with the first rod 12, so that the first light projecting unit 33a The emitted light is no longer shielded by the first light-shielding unit 31b, and the light emitted from the first light-emitting unit 33a of the first light sensor 33 is received by the first light-receiving unit 33b.

As shown in FIG. 8, when the second rod 13 moves from the protruding position to the main body housing 14 in the immersion direction, the second light-shielding portion 32b of the second light-shielding body 32 becomes the second light-emitting portion 34a. The light that has passed between the second light receiving unit 34b and emitted from the second light emitting unit 34a of the second light sensor 34 is blocked by the second light shielding unit 32b. As a result, the light emitted from the first light emitting unit 33a of the first light sensor 33 is received by the first light receiving unit 33b, and the light emitted from the second light emitting unit 34a of the second light sensor 34 is received. The second light-shielding portion 32b is in a light-shielded state.

As shown in FIG. 6, when the light from the first light emitting unit 33a is received by the first light receiving unit 33b and the light from the second light emitting unit 34a is blocked by the second light emitting unit 32b, the output is output. The deceleration of the shaft 19a is started and stopped at a preset number of pulses. As a result, the first rod 12 is positioned at the protruding position with respect to the main body housing 14, and the second rod 13 is positioned at the immersion position with respect to the main body housing 14.

As shown in FIG. 8, the light emitted from the first light emitting unit 33a is received by the first light receiving unit 33b, and the light emitted from the second light emitting unit 34a is shielded by the second light emitting unit 32b. When the operation start signal SG2 used for the drive control of the electric motor 19 becomes LOW in this state, the electric motor 19 is driven and the output shaft 19a rotates counterclockwise at a constant speed. Then, the output rotating body 21 rotates counterclockwise integrally with the output shaft 19a, and the bearing columns 22 and 23 rotate around the output shaft 19a clockwise as the output rotating body 21 rotates. Moves in the opposite direction to the rotation of. Then, the first rod 12 moves in the immersion direction with respect to the main body housing 14 via the first cam plate 26 while the bearing 24 and the cam groove 26a are in sliding contact with each other, and the bearing 25 and the cam groove 27a are in sliding contact with each other. The 2 rod 13 moves in the projecting direction with respect to the main body housing 14 via the second cam plate 27.

When the second rod 13 starts to move in the protruding direction with respect to the main body housing 14 from the immersion position, the second light-shielding body 32 also moves in the protruding direction integrally with the second rod 13, so that the second light projecting unit 34a The emitted light is no longer shielded by the second light-shielding unit 32b, and the light emitted from the second light-emitting unit 34a of the second light sensor 34 is received by the second light-receiving unit 34b.

As shown in FIG. 7, when the first rod 12 moves from the protruding position to the main body housing 14 in the immersion direction, the first light-shielding portion 31b of the first light-shielding body 31 becomes the first light-emitting portion 33a. The light that has passed between the first light receiving unit 33b and emitted from the first light emitting unit 33a of the first light sensor 33 is blocked by the first light shielding unit 31b. As a result, the light emitted from the first light projecting unit 33a of the first light sensor 33 is blocked by the first shading unit 31b, and the light emitted from the second light projecting unit 34a of the second light sensor 34 is blocked. The light is received by the second light receiving unit 34b.

As shown in FIG. 6, when the light from the first light emitting unit 33a is blocked by the first light emitting unit 31b and the light from the second light emitting unit 34a is received by the second light receiving unit 34b, the output is output. The deceleration of the shaft 19a is started and stopped at a preset number of pulses. As a result, the first rod 12 is positioned at the immersion position with respect to the main body housing 14, and the second rod 13 is positioned at the protruding position with respect to the main body housing 14.

As described above, in the escapement device 10 of the present embodiment, the second rod 13 is immersed in the second through hole 16b as the first rod 12 protrudes in the first through hole 16a. The amount of protrusion of the first rod 12 through the first through hole 16a and the amount of immersion of the second rod 13 through the second through hole 16b are the same.

As shown in FIG. 9A, such an escapement device 10 allows the flow of a plurality of workpieces W1 (for example, pallets) flowing on the transport path R1 (for example, a belt conveyor) in a part of a production line, for example. It is used when temporarily stopped and only the work W1 located on the most downstream side in the flow direction of the work W1 is sent out on the transport path R1. For example, the escapement device 10 relates to the transport path R1 so that the first rod 12 is located downstream of the second rod 13 in the flow direction of the work W1 (the direction indicated by the arrow X1 in FIG. 9). Be placed. Then, the first rod 12 and the second rod 13 appear and disappear in a direction orthogonal to the flow direction of the work W1 flowing on the transport path R1.

The work W1 has a square block shape, and of the four corners, notches W2 are formed at two adjacent corners along the outer peripheral surface of the work W1 in the circumferential direction. The width H1 sandwiched by both notches W2 in the work W1 is smaller than the width H2 between the tip of the first rod 12 and the tip of the second rod 13. The work W1 flows on the transport path R1 so that the notch W2 is arranged so as to face the escapement device 10.

Then, when the first rod 12 reaches the protruding position, the tip of the first rod 12 protrudes onto the transport path R1, and the work W1 located on the most downstream side in the flow direction of the work W1 comes into contact with the first rod 12. .. As a result, the flow of the plurality of works W1 flowing on the transport path R1 is temporarily stopped.

As shown in FIG. 9B, the first rod 12 moves in the immersion direction with respect to the main body housing 14, and the second rod 13 moves in the protruding direction with respect to the main body housing 14. Then, when the protrusion amounts of the first rod 12 and the second rod 13 with respect to the main body housing 14 match, the tips of the first rod 12 and the second rod 13 move with respect to the work W1 flowing on the transport path R1. It overlaps in the flow direction on the transport path R1 in. At this time, the tips of the first rod 12 and the second rod 13 are located in each notch W2 of the work W1.

As shown in FIG. 9C, when the first rod 12 reaches the immersion position and the second rod 13 reaches the protrusion position, the tip of the first rod 12 with respect to the work W1 flowing on the transport path R1. The work W1 does not overlap in the flow direction on the transport path R1. As a result, only the work W1 located on the most downstream side in the flow direction of the work W1 is delivered on the transport path R1.

In the first embodiment, the following effects can be obtained.
(1) By converting the rotational motion of the output shaft 19a driven by the electric motor 19 into the reciprocating linear motion of the first rod 12 and the second rod 13 by the conversion mechanism 20, the first rod 12 and the second rod 13 become the main body housing. It moves in the haunting direction with respect to 14. Therefore, for example, as in the conventional escapement device, the fluid supplied to each cylinder chamber is supplied from the housing to the outside, as in the configuration in which the operation of the two rods is controlled by supplying and discharging the fluid to each cylinder chamber. It does not require a seal structure to prevent leakage and has excellent durability. Further, the amount of protrusion of the first rod 12 through the first through hole 16a and the amount of immersion of the second rod 13 through the second through hole 16b are the same. Therefore, even if the first rod 12 and the second rod 13 perform the infestation operation with respect to the main body housing 14, there is no change in the volume inside the motor housing 15 and the space 14k, and the pressure inside the motor housing 15 and the space 14k is increased. There is no change. Therefore, since fluid does not flow in and out between the inside of the motor housing 15 and the space 14k and the outside of the housing 11, even if the escapement device 10 is used in an adverse environment where dust or the like is generated, the housing 11 It is suppressed that external dust and the like are drawn into the housing 11. Therefore, it is possible to prevent dust and the like from adversely affecting the drive of the electric motor 19, and stable operation can be performed even in an adverse environment where dust and the like are generated.

(2) Between the first through hole 16a and the first rod 12, and between the second through hole 16b and the second rod 13, on the outer peripheral surface of the first rod 12 or the outer peripheral surface of the second rod 13. Scrapers 18a and 18b are provided to scrape off the adhering dust and the like. According to this, it is possible to prevent dust and the like adhering to the outer peripheral surface of the first rod 12 or the outer peripheral surface of the second rod 13 from entering the housing 11.

(3) The conversion mechanism 20 includes an output rotating body 21, a pair of bearing columns 22 and 23 supported by the output rotating body 21, bearings 24 and 25 fixed to the bearing columns 22 and 23, and a third. A first cam plate 26 connected to the 1 rod 12 and a second cam plate 27 connected to the second rod 13 are provided. Each of the first cam plate 26 and the second cam plate 27 has cam grooves 26a and 27a that are in sliding contact with the bearings 24 and 25, and is connected to the output rotating body 21 via the bearings 24 and 25, respectively. Such a configuration is suitable as a configuration for converting the rotational motion of the output shaft 19a driven by the electric motor 19 into the reciprocating linear motion of the first rod 12 and the second rod 13.

(4) The output rotating body 21 is arranged at a position where a part of the first cam plate 26 and a part of the second cam plate 27 are sandwiched between both sides of the first cam plate 26 and the second cam plate 27 in the plate thickness direction. It has a pair of regulating portions 21a and 21b. According to this, even if the first rod 12 and the second rod 13 are columnar, the rotation of the first rod 12 via the first cam plate 26 and the second cam by the pair of regulating portions 21a and 21b. The rotation of the second rod 13 via the plate 27 can be regulated.

For example, by making the first rod 12 and the second rod 13 a square columnar shape, the rotation of the first rod 12 and the second rod 13 can be easily regulated, but in order to improve the sealing property, the corners can be easily regulated. A mold seal member is required. In the square sealing member, the pressure acting on the first rod 12 and the second rod 13 is difficult to be constant, and the sealing property is deteriorated and the durability is also deteriorated. Therefore, since the first rod 12 and the second rod 13 can be formed in a columnar shape, the cost can be reduced and the sealing property, slidability, and load bearing property can be improved. Further, since the first cam plate 26 and the second cam plate 27 are sandwiched by the pair of regulating portions 21a and 21b, high rigidity can be obtained even if the first cam plate 26 and the second cam plate 27 are miniaturized. ..

(5) When the protrusion amounts of the first rod 12 and the second rod 13 with respect to the main body housing 14 match, the tips of the first rod 12 and the second rod 13 work with respect to the work W1 flowing on the transport path R1. They overlap in the flow direction on the transport path R1 in W1. According to this, for example, in a part of the production line, the flow of a plurality of works W1 flowing on the transport path R1 is temporarily stopped, and only the work W1 located on the most downstream side in the flow direction of the work W1 is transported. It can be used as an escapement device 10 used when transmitting on R1. Further, for example, as compared with the structure in which the second rod 13 operates while the first rod 12 is stopped, the stop time can be reduced, so that the tact time can be increased.

(6) The main body housing 14 has a gas supply port 14c used for supplying an inert gas into the main body housing 14. According to this, since the pressure inside the motor housing 15 and the space 14k can be made positive, it is possible to effectively prevent the invasion of gaseous foreign matter accompanied by diffusion. It can also be used to prevent the intrusion of liquid due to the capillary phenomenon. Further, the gas supply port 14c can be used as a port for checking the airtightness inside the motor housing 15 and in the space 14k without supplying the inert gas from the gas supply port 14c to the main body housing 14. it can. Further, when used in combination with a configuration in which the volume of the internal space does not change, the internal pressure is stabilized and the flow rate consumption in the pressure adjusting operation of the pressure regulator is reduced.

(7) The main body housing 14 has a pressure detecting port 14d used for detecting the pressure in the main body housing 14. According to this, even if the supply of the inert gas is stopped or the pressure inside the motor housing 15 and the space 14k cannot be maintained at a positive pressure due to damage to the seal portion or the like, the control device By monitoring the internal pressure with the detection unit P2 connected to the pressure detection port 14d on the side, an abnormality can be detected and the production line can be automatically stopped. This function not only ensures the durability of the equipment from the influence of dust and dew condensation, but also prevents serious accidents such as fire due to the intrusion of atmosphere such as flammable gas.

(8) Each of the scrapers 18a and 18b also has a sealing function for sealing between the first through hole 16a and the first rod 12, or between the second through hole 16b and the second rod 13. According to this, it is possible to further prevent dust and the like outside the housing 11 from being drawn into the housing 11.

(9) According to the present embodiment, even if the main body housing 14 of the first rod 12 and the second rod 13 is moved to and from the main body housing 14, there is no change in the volume inside the motor housing 15 and the space 14k, and the motor housing 15 There is no change in pressure inside and in space 14k. Therefore, fluid does not easily flow in and out between the inside of the motor housing 15 and the space 14k and the outside of the housing 11, and even if the escapement device 10 is used in an adverse environment where dust or the like is generated, the outside of the housing 11 Dust and the like are suppressed from being drawn into the housing 11. Therefore, even if the sealing surface pressure on the first rod 12 and the second rod 13 of the scrapers 18a and 18b is lowered, it is difficult for dust and the like outside the housing 11 to be drawn into the housing 11. Therefore, the operation of the first rod 12 and the second rod 13 can be made smoother than when the sealing surface pressure on the first rod 12 and the second rod 13 in the scrapers 18a and 18b is high.

(Second Embodiment)
Hereinafter, a second embodiment in which the actuator is embodied in an escapement device which is a kind of stopper device will be described with reference to FIGS. 10 to 14. In the embodiments described below, the duplicated description will be omitted or simplified by assigning the same reference numerals to the same configurations as those in the first embodiment already described. In the second embodiment, the width between the tip of the first rod 12 and the tip of the second rod 13 is larger than that of the first embodiment.

As shown in FIG. 10, the conversion mechanism 40 includes an output rotating body 41 that rotates integrally with the output shaft 19a, an output link column 42 supported by the output rotating body 41, and a support shaft supported by the main body housing 14. It includes a 43, a driven rotating body 44 that rotates with respect to the support shaft 43, and a driven link column 45 that is supported by the driven rotating body 44.

As shown in FIG. 11, one end of the support shaft 43 is supported by the support plate 43a attached to the block body 141, and the other end is supported by the bottom wall 142.
As shown in FIG. 10, the conversion mechanism 40 includes a link portion 46 in which one end is swingably supported by the output link strut 42 and the other end is swingably supported by the driven link strut 45. There is. Further, the conversion mechanism 40 is supported by the output side bearing column 47 supported by the output rotating body 41, the output side bearing 48 as a follower fixed to the output side bearing column 47, and the driven rotating body 44. It includes a driven side bearing support column 49 and a driven side bearing 50 as a follower fixed to the driven side bearing support column 49. The output side bearing 48 and the driven side bearing 50 are ball bearings having an inner ring, an outer ring, and a ball.

Further, the conversion mechanism 40 includes an output side cam plate 51 connected to the second rod 13 and a driven side cam plate 52 connected to the first rod 12. The output side cam plate 51 has an output side cam groove 51a that is in sliding contact with the output side bearing 48. The output side cam plate 51 is connected to the output rotating body 41 via the output side bearing 48. Further, the driven side cam plate 52 has a driven side cam groove 52a that is in sliding contact with the driven side bearing 50. The driven side cam plate 52 is connected to the driven rotating body 44 via the driven side bearing 50.

As shown in FIG. 11, the output rotating body 41 is arranged at a position where a part of the output side cam plate 51 is sandwiched between both sides of the output side cam plate 51 in the plate thickness direction, and is a pair of substantially disk-shaped output side restrictions. It has a part 41a. The pair of output-side regulating units 41a regulate the rotation of the second rod 13 via the output-side cam plate 51. The pair of output-side restricting portions 41a are formed with circular insertion holes 41b into which both ends of the output-side bearing columns 47 are inserted. The output-side bearing column 47 is supported by a pair of output-side regulating portions 41a by inserting both ends of the output-side bearing column 47 into the insertion holes 41b. The output side bearing 48 is arranged between the pair of output side regulation portions 41a.

The driven rotating body 44 has a pair of substantially disk-shaped driven side regulating portions 44a arranged at positions where a part of the driven side cam plate 52 is sandwiched between both sides of the driven side cam plate 52 in the plate thickness direction. The pair of driven side regulating units 44a regulate the rotation of the first rod 12 via the driven side cam plate 52. The pair of driven side restricting portions 44a are formed with circular hole-shaped insertion holes 44b into which both ends of the driven side bearing columns 49 are inserted. The driven side bearing column 49 is supported by a pair of driven side restricting portions 44a by inserting both ends of the driven side bearing column 49 into the insertion holes 44b. The driven side bearing 50 is arranged between the pair of driven side regulating portions 44a.

As shown in FIG. 10, the output link column 42 moves around the output shaft 19a as the output rotating body 41 rotates. The driven link column 45 moves around the support shaft 43 at the same phase position as the rotation phase of the output link column 42 as the driven rotating body 44 rotates. The link portion 46 includes a first support portion 46a rotatably supported by the output link strut 42, a second support portion 46b rotatably supported by the driven link strut 45, and a first support portion 46a and a first support portion 46a. It has a long plate-shaped connecting portion 46c that linearly connects the two supporting portions 46b.

As shown in FIG. 12, the first support portion 46a is sandwiched between a pair of output side regulation portions 41a that sandwich the output side bearing 48 in the axial direction of the output link column 42. Therefore, the first support portion 46a is sandwiched between the pair of output side regulation portions 41a in the axial direction of the output link column 42 and is arranged on the same plane as the output side bearing 48. The pair of output-side restricting portions 41a are formed with circular insertion holes 41c into which both ends of the output link columns 42 are inserted. The output link strut 42 is supported by a pair of output side restricting portions 41a by inserting both ends of the output link strut 42 into the insertion holes 41c. The bearing 42a fixed to the output link column 42 is arranged between the pair of output side regulating portions 41a. The first support portion 46a is rotatably supported by the output link column 42 via the bearing 42a.

The second support portion 46b is sandwiched between a pair of driven side regulating portions 44a that sandwich the driven side bearing 50 in the axial direction of the driven link column 45. Therefore, the second support portion 46b is sandwiched between the pair of driven side regulating portions 44a in the axial direction of the driven link column 45 and is arranged on the same plane as the driven side bearing 50. The pair of driven side regulating portions 44a are formed with circular hole-shaped insertion holes 44c into which both ends of the driven link columns 45 are inserted. The driven link strut 45 is supported by a pair of driven side regulating portions 44a by inserting both ends of the driven link strut 45 into the insertion holes 44c. The bearing 45a fixed to the driven link column 45 is arranged between the pair of driven side regulating portions 44a. The second support portion 46b is rotatably supported by the driven link column 45 via the bearing 45a.

As shown in FIG. 10, the connecting portion 46c connects the central axis L1 of the output link column 42 and the central axis L2 of the driven link column 45 when viewed from the axial direction of the output link column 42 and the driven link column 45. It is offset from the virtual straight line L3 so as to be separated from the output shaft 19a and the support shaft 43.

Next, the operation of the second embodiment will be described.
From the state shown in FIG. 13, when the electric motor 19 is driven and the output shaft 19a rotates clockwise, the output rotating body 41 rotates clockwise integrally with the output shaft 19a, and the output link column 42 rotates the output. The link portion 46 moves around the output shaft 19a as the body 41 rotates, and the link portion 46 moves toward the driven rotating body 44 as the output rotating body 41 rotates. As a result, the driven link column 45 moves around the support shaft 43 at the same phase position as the rotation phase of the output link column 42, and the driven rotating body 44 rotates in synchronization with the output rotating body 41.

As shown in FIG. 14, the output side bearing support column 47 moves around the output shaft 19a as the output rotating body 41 rotates, and the driven side bearing support column 49 moves as the driven rotating body 44 rotates. Move around. Then, the first rod 12 moves in the protruding direction with respect to the main body housing 14 via the driven side cam plate 52 while the driven side bearing 50 and the driven side cam groove 52a are in sliding contact with each other, and the output side bearing 48 and the output side cam The second rod 13 moves in the immersion direction with respect to the main body housing 14 via the output side cam plate 51 while being in sliding contact with the groove 51a.

From the state shown in FIG. 14, when the electric motor 19 is driven and the output shaft 19a rotates counterclockwise, the output rotating body 41 rotates counterclockwise integrally with the output shaft 19a. Then, the output link column 42 moves around the output shaft 19a in the direction opposite to the clockwise rotation of the output shaft 19a as the output rotating body 41 rotates, and the link portion 46 rotates the output rotating body 41. As a result, it moves toward the output rotating body 41. As a result, the driven link support 45 moves around the support shaft 43 at the same phase position as the rotation phase of the output link support 42 in the direction opposite to that when the output shaft 19a is rotated clockwise, and the driven rotating body 44 moves. In synchronization with the output rotating body 41, the output shaft 19a rotates in the direction opposite to the clockwise rotation.

As shown in FIG. 13, the output side bearing support column 47 moves around the output shaft 19a in the direction opposite to that when the output shaft 19a rotates clockwise as the output rotating body 41 rotates, and the driven side bearing As the driven rotating body 44 rotates, the support column 49 moves around the support shaft 43 in the direction opposite to that when the output shaft 19a rotates clockwise. Then, the first rod 12 moves in the immersion direction with respect to the main body housing 14 via the driven side cam plate 52 while the driven side bearing 50 and the driven side cam groove 52a are in sliding contact with each other, and the output side bearing 48 and the output side cam The second rod 13 moves in the projecting direction with respect to the main body housing 14 via the output side cam plate 51 while being in sliding contact with the groove 51a.

Therefore, according to the second embodiment, in addition to the effects similar to the effects (1), (2), (5) to (9) of the first embodiment, the following effects can be obtained.
(10) Since the distance between the first rod 12 and the second rod 13 needs to be adjusted to the size of the work W1, in the case of the first embodiment, when the size of the work W1 becomes large, the first cam plate 26 and the first cam plate 26 and the first The length of the 2 cam plate 27 needs to be increased according to the size of the work W1. When the lengths of the first cam plate 26 and the second cam plate 27 become longer, the thrust applied from the cam grooves 26a and 27a to the first rod 12 or the second rod 13 via the bearings 24 and 25 becomes the bearings 24 and 25. The force point generated at the contact position with the cam grooves 26a and 27a and the position of the stroke center of the first rod 12 or the second rod 13 deviate from each other. Therefore, the force applied to the slide bearings 17a and 17b increases, the frictional force with the slide bearings 17a and 17b increases, and the thrust of the first rod 12 or the second rod 13 decreases. Further, since a strong repetitive moment acts on the joint portion between the first rod 12 and the second rod 13 and the first cam plate 26 and the second cam plate 27, the first cam plate 26 and the second cam plate 27 When the length becomes long, a problem arises in durability due to deformation, wear, loosening of screws, etc. of the joint portion between the first rod 12 and the second rod 13 and the first cam plate 26 and the second cam plate 27.

The situation where the strongest moment is applied to the joint between the first rod 12 and the second rod 13 and the first cam plate 26 and the second cam plate 27 is that some abnormality occurs when the first rod 12 or the second rod 13 protrudes. This is the case when the tip of the first rod 12 or the second rod 13 collides with the work W1. Even in such a situation, the lengths of the first cam plate 26 and the second cam plate 27 are set in order to secure the joint strength between the first rod 12 and the second rod 13 and the first cam plate 26 and the second cam plate 27. It is necessary to make it as short as possible. Incidentally, the distance from the center of the first rod 12 or the second rod 13 to the contact points of the cam grooves 26a and 27a with the bearings 24 and 25 should be three times or less the diameter of the first rod 12 and the second rod 13. Is desirable.

According to the second embodiment, even if the size of the work W1 is increased, the output side cam plate 51 and the driven side cam plate 52 corresponding to the first cam plate 26 and the second cam plate 27 of the first embodiment It can be dealt with by changing the length of the link portion 46 according to the size of the work W1 without increasing the length of the motor 19, facilitating the change of the arrangement direction of the electric motor 19, and sharing other components. can do.

(11) Even if the first rod 12 and the second rod 13 are columnar, the pair of output side regulating portions 41a and the pair of driven side regulating portions 44a of the second rod 13 via the output side cam plate 51. The rotation and the rotation of the first rod 12 via the driven side cam plate 52 can be regulated. For example, by making the first rod 12 and the second rod 13 a square columnar shape, the rotation of the first rod 12 and the second rod 13 can be easily regulated, but in order to improve the sealing property, the corners can be easily regulated. A mold seal member is required. In the square sealing member, the pressure acting on the first rod 12 and the second rod 13 is difficult to be constant, and the sealing property is deteriorated and the durability is also deteriorated. Therefore, since the first rod 12 and the second rod 13 can be formed in a columnar shape, the cost can be reduced and the sealing property, slidability, and load bearing property can be improved. Further, since the output side cam plate 51 and the driven side cam plate 52 are sandwiched between the pair of output side regulating portions 41a and the pair of driven side regulating portions 44a, the output side cam plate 51 and the driven side cam plate 52 are miniaturized. Can also obtain high rigidity.

(12) The connecting portion 46c is from a virtual straight line L3 connecting the central axis L1 of the output link column 42 and the central axis L2 of the driven link column 45 when viewed from the axial direction of the output link column 42 and the driven link column 45. It is offset so as to be separated from the output shaft 19a and the support shaft 43. According to this, the first support portion 46a is sandwiched between the pair of output side regulation portions 41a that sandwich the output side bearing 48, and the second support portion 46b is sandwiched between the pair of driven side regulation portions 44a that sandwich the driven side bearing 50. Even if it is sandwiched, it is possible to prevent the connecting portion 46c from interfering with the output link strut 42 and the driven link strut 45 when the connecting portion 46c moves. Therefore, it is not necessary to arrange the link portion 46 above the output rotating body 41 and the driven rotating body 44 in the axial direction of the output link column 42 and the driven link column 45, and the shafts of the output link column 42 and the driven link column 45. The physique in the direction can be miniaturized. By reducing the size together with (4) in this way, the foreign matter invading portion can be minimized.

In addition, each of the above-mentioned embodiments may be changed as follows.
-In each of the above embodiments, the main body housing 14 does not have to have the pressure detection port 14d.

-In each of the above embodiments, the main body housing 14 does not have to have the gas supply port 14c and the pressure detection port 14d.
-In the second embodiment, the link portion 46 may be arranged above the output rotating body 41 and the driven rotating body 44 in the axial direction of the output link support 42 and the driven link support 45.

In the second embodiment, when the connecting portion 46c is viewed from the axial direction of the output link column 42 and the driven link column 45, the central axis L1 of the output link column 42 and the central axis L2 of the driven link column 45 are connected. It does not have to be offset so as to be separated from the connecting virtual straight line L3 with respect to the output shaft 19a and the support shaft 43.

-In each of the above embodiments, the rods 12 and 13 may be, for example, a square columnar shape.
-In each of the above embodiments, a scraper 18a may be provided between the slide bearing 17a and the first rod 12, or a scraper 18b may be provided between the slide bearing 17b and the second rod 13. Good.

-In each of the above embodiments, the scrapers 18a and 18b, and the seal of the gap between the main body 14a and the cover 14b that determines the degree of airtightness may be seals that can prevent adverse effects on the environment. For example, in order to prevent the intrusion of dust, each seal portion may have a gap smaller than or equal to the size of the dust. When the dust is large, the scrapers 18a and 18b are unnecessary, and the seal between the main body 14a and the cover 14b and the caulking material S1 are unnecessary, and the gap may be set to a gap smaller than the size of the dust. Then, the gas supply port 14c and the pressure detection port 14d can be omitted. Depending on the size of the dust, the pressure inside the motor housing 15 and in the space 14k does not change due to the operation, so that the function is satisfied even if the gap opening is arranged at the lower part. The functions of the main body housing 14 forming the gap and the screw fixing of the joint portion between the main body portion 14a and the cover 14b are satisfied as long as they do not come off.

-In each of the above embodiments, the actuator includes one rod, and the housing has two through-holes, one through which one end of the rod penetrates and the other through which the other end penetrates. The amount of protrusion of one end of the rod via one and the amount of immersion of the rod through the other of the two through holes may be the same.

-In each of the above embodiments, there may be a gap between the cover 14b and the main body 14a, or between the motor housing 15 and the main body housing 14. In this case, these gaps are such that dust and the like cannot enter the housing 11.

-In each of the above embodiments, the bearings 24 and 25 as followers, the output side bearing 48 and the driven side bearing 50 may be bearings other than ball bearings such as needle bearings and slide bearings.
-In each of the above embodiments, the type of the electric motor 19 is not particularly limited, and may be, for example, a servomotor.

-In each of the above embodiments, the actuator may be embodied in a stopper device other than the escapement device 10.
-In each of the above embodiments, the actuator may be used for purposes other than the stopper device.

R1 ... Transport path, W1 ... Work, 10 ... Escapement device (actor), 11 ... Housing, 12, 13 ... Rod, 14c ... Gas supply port, 14d ... Pressure detection port, 16a, 16b ... Through hole, 18a , 18b ... Scraper, 19 ... Electric motor, 19a ... Output shaft, 20, 40 ... Conversion mechanism, 21,41 ... Output rotating body, 21a, 21b ... Pair of regulation parts, 22, 23 ... Bearing columns, 24, 25 ... Bearing, 26 ... 1st cam plate, 26a, 27a ... Cam groove, 27 ... 2nd cam plate, 41a ... Pair of output side regulating parts, 42 ... Output link strut, 43 ... Support shaft, 44 ... Driven rotating body, 44a ... Pair of driven side regulating parts, 45 ... Driven link columns, 46 ... Link parts, 46a ... First support parts, 46b ... Second support parts, 46c ... Connecting parts, 47 ... Output side bearing columns, 48 ... Output side Bearings, 49 ... Driven bearing columns, 50 ... Driven side bearings, 51 ... Output side cam plates, 51a ... Output side cam grooves, 52 ... Driven side cam plates, 52a ... Driven side cam grooves.

Claims (8)

With the housing
Two rods that can appear and disappear with respect to the housing,
The electric motor built into the housing and
It is equipped with a conversion mechanism built in the housing and converting the rotational motion of the output shaft of the electric motor into the reciprocating linear motion of the two rods.
Said housing, said with two rods will have a two through holes through, for detecting a gas supply port used for supplying the inert gas into the housing, the pressure within the housing have a pressure sensing port used for,
The two through holes extend parallel to each other, one end in the axial direction of each through hole opens in the housing, and the other end in the axial direction of each through hole opens out of the housing.
In both of the two rods, the base end of each rod connected to the electric motor is present in the housing.
As one of the two rods protrudes from one of the two through holes, the other of the two rods immerses in the other of the two through holes, and the pressure inside the housing does not change. As described above, the actuator is characterized in that the amount of protrusion of one rod through one of the two through holes is the same as the amount of immersion of the other rod through the other of the two through holes. The actuator according to claim 1, further comprising a scraper that scrapes off foreign matter adhering to the outer peripheral surface of each rod and seals between each through hole and each rod. The conversion mechanism includes an output rotating body that rotates integrally with the output shaft, a pair of bearing columns supported by the output rotating body, a bearing fixed to each bearing column, and the two rods. A first cam plate connected to one of the two rods and a second cam plate connected to the other of the two rods are provided.
Claim 1 or claim, wherein each of the first cam plate and the second cam plate has a cam groove that is in sliding contact with each bearing and is connected to the output rotating body via each bearing. 2. The actuator according to 2. The two rods are columnar and
The output rotating body is arranged at a position where a part of the first cam plate and a part of the second cam plate are sandwiched between the first cam plate and the second cam plate in the plate thickness direction. It is characterized by having a pair of regulating portions that regulate the rotation of one of the two rods via one cam plate and the rotation of the other of the two rods via the second cam plate. The actuator according to claim 3. The conversion mechanism rotates with respect to an output rotating body that rotates integrally with the output shaft, an output link strut supported by the output rotating body, a support shaft supported by the housing, and the support shaft. One end is swingably supported by the driven rotating body, the driven link strut supported by the driven rotating body, and the output link strut, and the other end is swingably supported by the driven link strut. Link part and
The output side bearing column supported by the output rotating body, the output side bearing fixed to the output side bearing column, the driven side bearing column supported by the driven rotating body, and the driven side bearing support. A driven side bearing fixed to a support column, an output side cam plate connected to one of the two rods, and a driven side cam plate connected to the other of the two rods are provided.
The output side cam plate has an output side cam groove that is in sliding contact with the output side bearing, and is connected to the output rotating body via the output side bearing.
The driven side cam plate has a driven side cam groove which is slidably contacted with the driven side bearing, and is connected to the driven rotating body via the driven side bearing. The actuator described in. The two rods are columnar and
The output rotating body is arranged at a position where a part of the output side cam plate is sandwiched between both sides in the plate thickness direction of the output side cam plate, and rotation of one of the two rods via the output side cam plate. Has a pair of output side regulators that regulate
The driven rotating body is arranged at a position where a part of the driven cam plate is sandwiched between both sides of the driven cam plate in the plate thickness direction, and the rotation of the other of the two rods via the driven cam plate. The actuator according to claim 5, wherein the actuator has a pair of driven side regulating units for regulating the above. The output link strut moves around the output shaft as the output rotating body rotates.
The driven link strut moves around the support shaft at the same phase position as the rotation phase of the output link strut as the driven rotating body rotates.
The link portion includes a first support portion rotatably supported by the output link strut, a second support portion rotatably supported by the driven link strut, the first support portion, and the second support portion. It has a connecting part that connects the support part linearly,
The first support portion is sandwiched between the pair of output side regulation portions that sandwich the output side bearing in the axial direction of the output link column.
The second support portion is sandwiched between the pair of driven side regulating portions that sandwich the driven side bearing in the axial direction of the driven link strut.
When viewed from the axial direction, the connecting portion is offset so as to be separated from the output shaft and the support shaft from the virtual straight line connecting the central axis of the output link column and the central axis of the driven link column. The actuator according to claim 6, wherein the actuator is provided. A first optical sensor and a second optical sensor, which are built in the housing and detect that one of the two rods is located in the protruding position and the other is located in the immersion position, are respectively located in the axial direction of the rods. The actuator according to any one of claims 1 to 7 , wherein the actuators are arranged so as to face each other.