JP6793893B1 - レーザ増幅装置および極端紫外光発生装置 - Google Patents
レーザ増幅装置および極端紫外光発生装置 Download PDFInfo
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Abstract
Description
図1は、実施の形態1のレーザ増幅装置10を備える極端紫外光発生装置100の構成を示す図である。極端紫外光をEUV(Extreme Ultraviolet)光とも呼び、極端紫外光発生装置をEUV光発生装置とも呼ぶ。EUV光発生装置100は、露光装置の光源として使用され、波長13.5nmのEUV光を発生する。EUV光発生装置100は、レーザ増幅装置10と、EUV光発生器40とを備える。
図14は実施の形態2に係るレーザ増幅装置110を備える極端紫外光発生装置200の構成を示す図である。図14では、レーザ増幅装置110は、レーザ発振器20、伝送光学系120およびレーザ増幅器30を有する。伝送光学系120は、偏光ビームスプリッタ70と、電気光学素子71と、偏光ビームスプリッタ72と、ビームスプリッタ73と、波形測定センサ74と、ミラー75とを備える。電気光学素子71と偏光ビームスプリッタ70と偏光ビームスプリッタ72は、光アイソレータおよびパルス波形の整形器の両方として機能する。波形測定センサ74は、レーザ増幅器30に入射される前のパルスレーザ光の波形Iinを測定する。
図24は実施の形態3に係るレーザ増幅装置130を備える極端紫外光発生装置300の構成を示す図である。図24では、レーザ増幅装置130は、レーザ発振器20、ミラー27およびマルチパスレーザ増幅器31を有する。図24では、図3に示した極端紫外光発生装置100におけるレーザ増幅器30がマルチパスレーザ増幅器31に置換されている。図3において、入射レーザパルス25のフルエンスEinがレーザ増幅器30の飽和フルエンスEsよりも十分に大きい場合、レーザ増幅器30に蓄積されたエネルギーを十分に引き出すことができ、高い増幅出力を得ることができる。しかし、入射レーザパルス25のフルエンスEinがレーザ増幅器30の飽和フルエンスEsよりも小さい場合では、レーザ増幅器30に蓄積されたエネルギーを十分に引き出すことができない。その結果、パルスの短縮効果も十分に得ることができない。そこで、入射レーザパルス25のフルエンスEinがレーザ増幅器30の飽和フルエンスEsよりも小さい場合には、図24に示すように、マルチパスレーザ増幅器31を採用することで、エネルギー引き出し効率をより上昇させることができる。その結果、高い増幅出力を得ることができ、結果として、高いEUV光出力を得ることができる。図24ではパス数が5の5パス増幅器を例示しているが、パス数は2以上の数であれば良く、パス数は5に限定されるものではない。
図29は、図14または図21に示したレーザ増幅装置110のレーザ増幅器30から出力されるパルスレーザ光35のパルス波形を推論する推論装置90を示す図である。推論装置90は、データ取得部91と、推論部92を備える。データ取得部91は、図14または図21に示した波形測定センサ74で測定した増幅前のレーザパルス波形Iinを取得する。推論部92は、学習済モデル記憶部93を利用して、レーザ増幅器30で増幅した後のレーザパルス波形を推論する。すなわち、学習済モデル記憶部93に記憶された学習済モデルに、データ取得部91で取得したレーザパルス波形Iinを入力することで、推論部92で推論された増幅後のパルス波形Ioifを推論部92から出力することができる。この推論装置90を用いて、推論された増幅後のパルス波形IoifがEUV光発生に最適な5ns〜30nsのパルスとなるように、増幅前のパルス波形を、図14に示した電気光学素子71、偏光ビームスプリッタ70および偏光ビームスプリッタ72から成るパルス整形器によって最適化しても良い。この最適化によって、高出力EUV光を発生させることができる。
Claims (7)
- 炭酸ガスを含む混合ガスを有する第1レーザ活性媒質を有し、半値全幅が15nsから200nsまでの間のパルスレーザ光を発振させるレーザ発振器と、
炭酸ガスを含む混合ガスを有する第2レーザ活性媒質を有し、前記レーザ発振器から発振される前記パルスレーザ光が前記第2レーザ活性媒質を通過することによって、半値全幅が5nsから30nsの間のパルスレーザ光に短縮されて出力されるレーザ増幅器と、
を備え、
前記レーザ発振器から出力されるパルスレーザ光の強度が、最大強度の10%まで上昇してから前記最大強度の90%まで上昇するまでの時間である立ち上がり時間を、前記レーザ発振器から出力されるパルスレーザ光の半値全幅によって除した値が0.72より小さいことを特徴とするレーザ増幅装置。 - 前記レーザ発振器と前記レーザ増幅器との間の前記パルスレーザ光の光路に設置される第1の偏光ビームスプリッタを含む少なくとも一つの偏光ビームスプリッタと、
前記第1の偏光ビームスプリッタと前記レーザ発振器との間の前記パルスレーザ光の光路に設置され、入射されたパルスレーザ光の一部のみが前記第1の偏光ビームスプリッタを透過できるように90度偏光制御を行う電気光学素子と、
をさらに備えることを特徴とする請求項1に記載のレーザ増幅装置。 - 前記電気光学素子は、入射されたパルスレーザ光の前半部および後半部が前記第1の偏光ビームスプリッタで反射され中央部のみが透過されるパルス幅整形が行われるように、前記90度偏光制御を行うことを特徴とする請求項2に記載のレーザ増幅装置。
- 前記混合ガスは、ガス圧が20Torrから100Torrの間であることを特徴とする請求項1から3のいずれか1項に記載のレーザ増幅装置。
- 前記レーザ増幅器は、前記パルスレーザ光が前記第2レーザ活性媒質に入射してから出射するまで光路であるパスを複数備えることを特徴とする請求項1から4のいずれか1項に記載のレーザ増幅装置。
- 前記レーザ増幅器に入射される前記パルスレーザ光の強度の時系列波形を示す第1の信号および前記レーザ増幅器から出射される前記パルスレーザ光の強度の時系列波形を示す第2の信号を取得するデータ取得部と、
前記第1の信号と前記第2の信号とに基づき、前記第1の信号を前記レーザ増幅器に入射させた場合に出力される前記パルスレーザ光の強度の時系列波形を推定するための学習を実行する学習部と、
前記学習部で学習した結果に基づき、前記第1の信号を前記レーザ増幅器に入射させた場合に出力されるパルスレーザ光の強度の時系列信号を推定する推定部と、
をさらに備えることを特徴とする請求項1から5のいずれか1項に記載のレーザ増幅装置。 - 請求項1から6のいずれか1項に記載のレーザ増幅装置と、
前記レーザ増幅装置から出力された前記パルスレーザ光をターゲットに照射して極端紫外光を発生する極端紫外光発生器と、
を備えることを特徴とする極端紫外光発生装置。
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JP2006505960A (ja) * | 2002-07-31 | 2006-02-16 | サイマー インコーポレイテッド | 2室放電ガスレーザ用制御システム |
JP2006128157A (ja) * | 2004-10-26 | 2006-05-18 | Komatsu Ltd | 極端紫外光源装置用ドライバレーザシステム |
JP2012216769A (ja) * | 2011-03-29 | 2012-11-08 | Gigaphoton Inc | レーザシステム、レーザ光生成方法、および極端紫外光生成システム |
JP2013084971A (ja) * | 2012-12-03 | 2013-05-09 | Gigaphoton Inc | 極端紫外光源用ドライバレーザ |
US20180123314A1 (en) * | 2016-10-31 | 2018-05-03 | Innoven Energy Llc | Lookthrough Compression Arrangement |
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- 2020-03-16 WO PCT/JP2020/011525 patent/WO2021186508A1/ja active Application Filing
- 2020-03-16 JP JP2020542335A patent/JP6793893B1/ja active Active
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JP2006505960A (ja) * | 2002-07-31 | 2006-02-16 | サイマー インコーポレイテッド | 2室放電ガスレーザ用制御システム |
JP2006128157A (ja) * | 2004-10-26 | 2006-05-18 | Komatsu Ltd | 極端紫外光源装置用ドライバレーザシステム |
JP2012216769A (ja) * | 2011-03-29 | 2012-11-08 | Gigaphoton Inc | レーザシステム、レーザ光生成方法、および極端紫外光生成システム |
JP2013084971A (ja) * | 2012-12-03 | 2013-05-09 | Gigaphoton Inc | 極端紫外光源用ドライバレーザ |
US20180123314A1 (en) * | 2016-10-31 | 2018-05-03 | Innoven Energy Llc | Lookthrough Compression Arrangement |
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JPWO2021186508A1 (ja) | 2021-09-23 |
KR20220130226A (ko) | 2022-09-26 |
CN115244801A (zh) | 2022-10-25 |
US20230051665A1 (en) | 2023-02-16 |
DE112020006895T5 (de) | 2022-12-29 |
WO2021186508A1 (ja) | 2021-09-23 |
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