JP6788183B2 - Surface shape measuring device - Google Patents

Description

The present invention relates to a surface shape measuring device for measuring the surface shape of a work.

As a surface shape measuring device for measuring the surface shape of a work, a roundness measuring device for measuring the roundness or straightness of a work is known. The roundness measuring device has a trapezoidal base, a mounting table rotatably provided on the base on which the workpiece is placed, a column erected on the base, and a vertical movement along the column. A possible carriage, an arm provided so as to be movable in the horizontal direction with respect to the carriage, and a detector attached to the tip of the arm are provided (see Patent Document 1).

The carriage moves in the vertical direction along the column while frictionally sliding on the side surface of the column by a drive mechanism driven by a motor (drive source) provided on the column. At this time, if the sliding surface on which the carriage slides on the side surface of the column is not covered with lubricating oil (lubricant), the sliding surface may rust or the carriage may stick to the column. The measurement accuracy of the roundness measuring device may decrease or the measurement may become impossible. Therefore, in the roundness measuring device, it is necessary to periodically supply lubricating oil to the sliding surface of the column in order to continuously perform high-precision measurement. The operation of supplying the lubricating oil is usually performed manually by the operator.

JP-A-2015-06648

By the way, there is a problem that it takes time and effort for the operator to directly supply the lubricating oil to the plurality of sliding surfaces (front surface, back surface, side surface, etc.) of the column. In particular, the work of supplying to each sliding surface at a high place is not only very troublesome, but also causes a problem that the work is dangerous. Therefore, there has been a strong demand for improvement in the lubricating oil supply work.

FIG. 17 is a perspective view of a column 100 of a conventional example in which the operation of supplying lubricating oil to the sliding surface is improved. As shown in FIG. 17, the column 100 of the conventional example is formed with a supply hole (not shown) extending in parallel in the vertical direction from the upper surface 100a thereof toward the inside. Further, a liquid flow path 101 extending to the above-mentioned supply hole is formed on the plurality of sliding surfaces 100b on which the carriage (not shown) slides on the side surface of the column 100. Further, a supply port 102 is attached to the opening of the supply hole opened on the upper surface 100a. Then, by supplying the lubricating oil from the lubricating oil supply unit (oil pump or the like) (not shown) to the supply port portion 102, the lubricating oil is supplied to each sliding surface 100b of the column 100 through the liquid flow path 101 from this supply hole. Is supplied. As a result, the lubricating oil can be automatically supplied to each sliding surface 100b of the column 100, so that the lubricating oil supply work can be significantly improved.

However, in the column 100 of the conventional example shown in FIG. 17, the length of each liquid flow path 101 varies depending on the variation in the distance from the supply hole described above to each sliding surface 100b. Therefore, even when a certain amount of lubricating oil is supplied to the supply port portion 102, it is supplied from each liquid flow path 101 to each sliding surface 100b due to variations in the length of each liquid flow path 101. The amount of lubricating oil supplied varies. As a result, when the amount of lubricating oil supplied to a part of the sliding surfaces 100b in each sliding surface 100b is increased, the carriage floats with respect to the part of the sliding surfaces 100b. The posture of the carriage is tilted. As a result, the measurement accuracy of the workpiece by the roundness measuring device may decrease.

Further, in the conventional column 100, it is necessary to form a supply hole (not shown) on the upper surface 100a and a liquid flow path 101 on each sliding surface 100b, and machining is performed on a plurality of surfaces. There is a need. For this reason, in the conventional column 100, there arises a problem that the processing required for supplying the lubricating oil becomes complicated and the cost increases.

Further, even in the roundness measuring device adopting the conventional column 100, when the carriage is moved in the vertical direction, it is necessary to drive the motor provided in the column 100. Therefore, the motor generates heat due to the driving (driving current) of the motor, and this heat is conducted to the column 100, so that the temperature varies in the vertical direction of the column 100. As a result, the column 100 may be deformed, and the accuracy of measuring the roundness of the work by the roundness measuring device may decrease.

The present invention has been made in view of such circumstances, and provides a surface shape measuring device capable of supplying a lubricant to a sliding surface of a column at low cost without lowering the measurement accuracy. With the goal.

The surface shape measuring device for achieving the object of the present invention includes a base, a column standing on the base and extending in the vertical direction, and a carriage supported by the column so as to be movable in the vertical direction along the column. A detector supported by a carriage that detects the displacement of the stylus in contact with the workpiece, a storage section formed on the upper surface of the column to store the lubricant, and a storage portion formed and stored on the upper surface of the column. A plurality of supply grooves communicating with each other, and the lubricant stored in the storage portion is supplied to the plurality of sliding surfaces on which the carriage slides in the side surface of the column. , Equipped with.

According to this surface shape measuring device, the storage portion and each supply groove can be formed by machining the upper surface (one surface) of the column, and the path length of the lubricant flowing to each sliding surface of the column can be easily shortened. Can be matched to.

The surface shape measuring device according to another aspect of the present invention includes a moving mechanism provided on the column to move the carriage in the vertical direction, and a driving source provided on the upper surface side of the column to drive the moving mechanism. As a result, the heat generated from the drive source can be absorbed by the lubricant in the storage portion, and the heat transferred from the drive source to the column can be reduced. As a result, the amount of thermal deformation at the upper end of the column can be significantly reduced, so that a decrease in the measurement accuracy of the work can be suppressed. In addition, a lubricant that stores heat is supplied from the storage unit to each sliding surface through each supply groove, and then the entire region (including substantially the entire region) of each sliding surface is covered with the lubricant. , The entire area of each sliding surface is warmed by the lubricant. As a result, the variation in temperature in the vertical direction of the column is reduced, so that the decrease in the measurement accuracy of the workpiece due to the thermal deformation of the column can be further suppressed.

In the surface shape measuring device according to another aspect of the present invention, a lubricant having a supply port for supplying a lubricant to a storage portion and flowing from the supply port to each of a plurality of sliding surfaces through a plurality of supply grooves. The shapes of the plurality of supply grooves are adjusted according to the path length of the above. As a result, it is possible to suppress variations in the supply amount of the lubricant supplied to each sliding surface. As a result, a decrease in the measurement accuracy of the work can be suppressed.

In the surface shape measuring device according to another aspect of the present invention, a cover covering the upper surface of the column is provided, and the cover is provided with a supply port portion. As a result, when the lubricant is supplied into the storage portion from the supply port portion, the lubricant is prevented from overflowing from the storage portion or each supply groove and flowing to a place other than the sliding surface.

In the surface shape measuring apparatus according to another aspect of the present invention, the lubricant has a higher specific heat than the column. The heat generated by the drive source can be absorbed by the lubricant. Further, by covering each sliding surface with the lubricant, it is possible to suppress the variation in the temperature distribution in the vertical direction of the column.

The surface shape measuring device according to another aspect of the present invention includes a lubricant supply unit that supplies a lubricant into the storage unit and supplies the lubricant from a plurality of supply grooves to a plurality of sliding surfaces. As a result, the lubricant can be automatically supplied to each sliding surface.

In the surface shape measuring device according to another aspect of the present invention, the lubricant supply unit supplies the lubricant every time the moving distance of the carriage reaches a certain distance or every time a certain time elapses. As a result, the lubricant can be automatically supplied to each sliding surface.

The surface shape measuring apparatus of the present invention can supply the lubricant to the sliding surface of the column at low cost without deteriorating the measurement accuracy.

It is the schematic of the roundness measuring apparatus which measures the roundness of a work. It is sectional drawing of a column and a carriage. It is the top view of the column with the cover removed. It is the top view of the column with the cover removed. It is a perspective view of a column with a cover attached. It is an exploded perspective view of a cover and a column. It is a block diagram which shows the electrical structure of a control device. It is explanatory drawing for demonstrating the path length of the lubricating oil which flows from the lubricating oil supply part to each sliding surface of a column. In the column of the comparative example, it is explanatory drawing for demonstrating the path length of the lubricating oil which flows from a lubricating oil supply part to each sliding surface. It is explanatory drawing for demonstrating the comparative example which provided the motor on the lower surface side of a column. It is explanatory drawing for demonstrating the advantage of providing a motor on the upper surface side of a column. It is explanatory drawing for demonstrating that the temperature of a column is made uniform by the lubricating oil supplied from a storage part. It is a top view which showed each supply groove of another Embodiment 1. FIG. It is a top view of the upper surface of the column of another embodiment 2. It is sectional drawing of the supply groove and the supply groove of another Embodiment 3 different from the supply groove of the said embodiment. It is a perspective view of the detector rotation type roundness measuring apparatus. It is a perspective view of the column of the conventional example which improved the supply work of lubricating oil to a sliding surface.

[Configuration of roundness measuring device]
FIG. 1 is a schematic view of a roundness measuring device 10 for measuring the roundness of a work W. The roundness measuring device 10 corresponds to the surface shape measuring device of the present invention. As shown in FIG. 1, the roundness measuring device 10 includes a base 12, a mounting table 13 (also referred to as a rotary table), a rotary drive unit 14, a column 15 (also referred to as a support column), and a carriage 16 (slider). A horizontal arm 17, a detector holder 18, and a detector 19 are provided.

The base 12 is a support base (base) that supports each part of the roundness measuring device 10. A loading platform 13 and a column 15 are provided on the upper surface of the base 12. Further, inside the base 12, a rotation drive unit 14 is provided at a position vertically below the loading platform 13.

The loading platform 13 is rotatably provided on the upper surface of the base 12 about a rotation axis parallel to the vertical direction. The mounting table 13 is tilted and adjusted so that the upper surface is horizontal. Then, the work W, which is an object to be measured for roundness, is placed on the upper surface of the loading platform 13.

The rotation drive unit 14 is composed of, for example, a motor (not shown) and a drive transmission mechanism, and rotates the loading platform 13 around its rotation axis. As a result, the work W placed on the upper surface of the loading platform 13 also rotates about the rotation axis of the loading platform 13.

The column 15 has a shape extending in the vertical direction, and stands on the upper surface of the base 12 at a lateral position in the horizontal direction of the loading platform 13. A carriage 16 is attached to the column 15 so as to be movable in the vertical direction. Further, a moving mechanism for moving the carriage 16 in the vertical direction is provided inside the column 15, and a motor 21 which is a drive source for driving the moving mechanism is provided on the upper surface of the column 15. There is.

A horizontal arm 17 is attached to the carriage 16 so as to be movable in the horizontal direction. A detector holder 18 is attached to the tip of the horizontal arm 17.

The detector holder 18 has a substantially L-shape, one end of which is attached to the tip of the horizontal arm 17, and the other end of which the detector 19 is attached.

The detector 19 has a stylus 23 and a displacement detection unit such as a differential transformer (not shown), detects the displacement of the stylus 23 in contact with the work W, and detects the displacement indicating this displacement. The signal (electrical signal) is output to the control device 25 (see FIG. 7).

When measuring the roundness of the work W, the carriage 16 and the horizontal arm 17 are driven to bring the stylus 23 into contact with the measurement position of the work W (the outer peripheral surface in this embodiment). Next, while rotating the work W via the mounting table 13 by the rotation drive unit 14, the displacement detection signal is acquired from the detector 19, and the displacement detection signal for one rotation of the work W is transmitted to the control device 25 (FIG. 7). Output to). As a result, the control device 25 processes (analyzes) the displacement detection signal input from the detector 19, and generates measurement data indicating the roundness of the work W.

[Structure of column and carriage]
FIG. 2 is a cross-sectional view of the column 15 and the carriage 16. FIG. 3 is a top view of the column 15 and the carriage 16 as viewed from above. In FIG. 3, the motor 21 shown in FIG. 2 and the motor bracket 33 and the cover 41 described later are removed.

As shown in FIGS. 2 and 3, the column 15 has a substantially concave shape when viewed from above. Hereinafter, among the four side surfaces of the column 15, the side surface on the side holding the horizontal arm 17 is abbreviated as the front side surface, the side surface opposite to the front side surface is abbreviated as the rear side surface, and the remaining two side surfaces are referred to as the lateral side surface. Abbreviated.

The column 15 is configured by connecting a plurality of columnar members extending in the vertical direction in the horizontal direction (see FIGS. 5 and 6), or is composed of a single member. A storage chamber 31 for storing the lead screw 30 is formed on the back side surface of the concave column 15.

A ceiling portion 32 forming the ceiling of the storage chamber 31 is formed at the upper end of the column 15 and above the storage chamber 31. In the present embodiment, the ceiling portion 32 is formed at a position one step lower than the column upper surface 15a, which is the upper surface of the column 15, but even if the ceiling portion 32 is formed at the same height position as the column upper surface 15a. Good.

A motor 21 for raising and lowering the carriage 16 is mounted on the ceiling portion 32 via a substantially annular motor bracket 33 with the motor rotation shaft 21a facing downward. The motor rotating shaft 21a projects into the storage chamber 31 through a shaft through hole 35 (see FIG. 3) parallel to the vertical direction formed in the ceiling portion 32.

A lead screw 30 extending in the vertical direction along the column 15 is stored in the storage chamber 31. The lower end of the lead screw 30 is rotatably supported on the bottom of the column 15 (or the upper surface of the base 12). On the other hand, the upper end of the lead screw 30 is connected to the motor rotation shaft 21a described above. As a result, the lead screw 30 rotates integrally with the motor rotation shaft 21a in accordance with the rotation of the motor rotation shaft 21a by the motor 21.

The carriage 16 supports the above-mentioned horizontal arm 17 so as to be movable in the horizontal direction, and moves in the vertical direction along the column 15. The carriage 16 has a column insertion hole 16a through which the column 15 is inserted. The column insertion hole 16a extends in the vertical direction and has a substantially rectangular shape when viewed from above.

Among the inner wall surfaces forming the column insertion hole 16a of the carriage 16, the inner wall surface facing the back side surface (storage chamber 31) of the column 15 has a screw portion 37 screwed with the lead screw 30 in the storage chamber 31. It is provided. The screw portion 37 constitutes the moving mechanism of the present invention together with the lead screw 30 described above. As a result, the lead screw 30 is rotated by the motor 21, and the screw portion 37 moves in the vertical direction, and the carriage 16 moves in the vertical direction along the column 15 via the screw portion 37. The moving mechanism for moving the carriage 16 in the vertical direction by the driving force of the motor 21 is not limited to the configuration using the lead screw 30, and various known moving mechanisms may be adopted.

Each inner wall surface forming the column insertion hole 16a of the carriage 16 rubs against the side surface (front side surface, back side surface, and side surface) of the column 15 when the carriage 16 moves in the vertical direction along the column 15. A sliding member 39 that slides is provided.

For example, in the present embodiment, two sets of a pair of sliding members 39 that come into contact with two upper and lower positions on both sides of the front side surface are provided on the inner wall surface of the column insertion hole 16a facing the front side surface of the column 15. Further, two sets of a pair of sliding members 39 that come into contact with the upper and lower two places on both sides of the back side surface are provided on the inner wall surface of the column insertion hole 16a facing the back side surface of the column 15. Further, a pair of sliding members 39 that come into contact with the upper and lower two places of the lateral side surface are provided on the inner wall surface of the column insertion hole 16a facing the lateral side surface of the column 15, respectively. As a result, in the present embodiment, the side surfaces (front side surface, back side surface, and side surface) of the column 15 include six sliding surfaces 40 that slide with the sliding member 39 of the carriage 16.

The number and position of the sliding surfaces 40 (sliding members 39) may be changed as appropriate. Further, the inner wall surface of the carriage 16 may be directly slid to each side surface of the column 15 without the intervention of the sliding member 39.

FIG. 4 is a top view of the column 15 with the cover 41 removed. As shown in FIGS. 2 to 4, the upper surface 15a of the column has a concave storage portion 44 (also referred to as a pool portion) for storing the lubricating oil 42 (corresponding to the lubricant of the present invention) supplied to each sliding surface 40. ) Is formed. The storage portion 44 is formed in a concave shape when viewed from above, corresponding to the shape of the concave column upper surface 15a, but the shape is not particularly limited.

Further, on the upper surface 15a of the column, six supply grooves 45 for supplying the lubricating oil 42 stored in the storage portion 44 to each of the six sliding surfaces 40 described above of the column 15 are formed. Has been done. One end of each supply groove 45 opens in the storage portion 44 (that is, communicates with the storage portion 44), and the other end portion opens on the corresponding sliding surface 40. As a result, the lubricating oil 42 in the storage portion 44 is supplied to each sliding surface 40 via each supply groove 45.

Here, in the present embodiment, the width (cross-sectional area) of each supply groove 45 is formed to be the same. Further, in the present embodiment, the formation position and shape of the storage portion 44 formed on the column upper surface 15a are adjusted so that the lengths of the supply grooves 45 are the same. As a result, variations in the amount of lubricating oil 42 supplied to each sliding surface 40 due to the length and width of each supply groove 45 can be suppressed.

The type of the lubricating oil 42 is not particularly limited, but a material having a higher specific heat than the material forming the column 15 [for example, iron (specific heat: about 0.5 J / g · K)] is used. The specific heat of the lubricating oil 42 of this embodiment is, for example, about 2.0 J / g · K.

FIG. 5 is a perspective view of the column 15 with the cover 41 attached, and FIG. 6 is an exploded perspective view of the cover 41 and the column 15. As shown in FIGS. 2, 5 and 6, the column upper surface 15a is covered with the cover 41. As a result, the upper surface of the storage portion 44 and the upper surface of each supply groove 45 are also covered with the cover 41. As a result, when the lubricating oil 42 is supplied into the storage unit 44 from the supply port portion 46 described later, the lubricating oil 42 overflows from the storage unit 44 or each supply groove 45 and flows to a place other than the sliding surface 40. Is prevented. That is, the lubricating oil 42 can be reliably supplied to each sliding surface 40.

The cover 41 is provided with a supply port 46 for supplying the lubricating oil 42 into the storage 44. One end of the supply port 46 penetrates the cover 41 and opens in the storage 44, and the other end is connected to the lubricating oil supply 47 (see FIG. 2) via a supply pipe or the like (not shown). ..

The lubricating oil supply unit 47 corresponds to the lubricant supply unit of the present invention, and although not shown, it is composed of a storage tank for the lubricating oil 42, an oil pump, and the like. The lubricating oil supply unit 47 supplies the lubricating oil 42 into the storage unit 44 from the supply port unit 46 via a supply pipe or the like (not shown). Then, the lubricating oil 42 is supplied to each sliding surface 40 through each supply groove 45 by the pressure applied from the lubricating oil supply unit 47 to the lubricating oil 42 in the storage unit 44. The lubricating oil 42 may be manually supplied by the lubricating oil supply unit 47, but in the present embodiment, it is automatically supplied by the control device 25 (see FIG. 7) of the roundness measuring device 10.

FIG. 7 is a block diagram showing an electrical configuration of the control device 25. Note that FIG. 7 illustrates only the configuration related to the supply of the lubricating oil 42 in the control device 25, the configuration for controlling other operations of the roundness measuring device 10, and the output from the detector 19 described above. The configuration for analyzing the displacement detection signal to obtain the measurement data of the roundness of the work W is a known technique and is not shown.

As shown in FIG. 7, as the control device 25, various arithmetic processing devices such as a personal computer are used. The control device 25 functions as a motor control unit 25a, a timer 25b, a supply control unit 25c, and the like by executing a predetermined control program.

The motor control unit 25a controls the drive of the motor 21 to move the carriage 16 in the vertical direction along the column 15. Further, the motor control unit 25a drives the motor 21 automatically or manually by the operator after the lubricating oil 42 is supplied to each sliding surface 40, and moves the carriage 16 up and down along the column 15. Move back and forth multiple times in the direction. As a result, the entire region of each sliding surface 40 is covered with the lubricating oil 42 having a substantially uniform thickness.

Further, each time the lubricating oil 42 is supplied to each sliding surface 40, the motor control unit 25a counts and supplies the rotation speed of the motor 21 until the next lubricating oil 42 is supplied. Output to the control unit 25c. The information on the rotation speed of the motor 21 is information indicating the moving distance that the carriage 16 has moved since the lubricating oil 42 was supplied.

The timer 25b counts the elapsed time until the next lubricating oil 42 is supplied each time the lubricating oil 42 is supplied to each sliding surface 40, and supplies information indicating the elapsed time. Output to the control unit 25c.

The supply control unit 25c controls the supply of the lubricating oil 42 to the storage unit 44 by the lubricating oil supply unit 47. Specifically, the supply control unit 25c calculates the moving distance that the carriage 16 has moved since the previous supply of the lubricating oil 42, based on the count result of the rotation speed of the motor 21 input from the motor control unit 25a. Then, when the moving distance reaches a certain distance, the lubricating oil supply unit 47 is made to supply the lubricating oil 42 to the storage unit 44. That is, the supply control unit 25c causes the lubricating oil supply unit 47 to supply the lubricating oil 42 to the storage unit 44 every time the moving distance of the carriage 16 reaches a certain distance.

Further, the supply control unit 25c causes the lubricating oil supply unit 47 to supply the lubricating oil 42 to the storage unit 44 when the elapsed time input from the timer 25b reaches a certain time. That is, the supply control unit 25c causes the lubricating oil supply unit 47 to supply the lubricating oil 42 to the storage unit 44 every time a certain time elapses (at regular time intervals).

The supply control unit 25c is made to supply the lubricating oil 42 every time the moving distance of the carriage 16 reaches a certain distance, or is made to supply the lubricating oil 42 every time a certain time elapses, or these. The operator or the device maker can set whether to execute the processes in parallel. Here, when these processes are executed in parallel, the lubricating oil supply unit 47 first satisfies either the condition that the moving distance of the carriage 16 reaches a certain distance or the condition that a certain time elapses. Is executed to supply the lubricating oil 42 to the storage unit 44, and the count values of the moving distance and the elapsed time of the carriage 16 are reset.

Further, the amount of lubricating oil 42 supplied from the lubricating oil supply unit 47 to the storage unit 44 at one time can also be set by the operator or the device manufacturer. The amount of lubricating oil 42 supplied at one time is, for example, the type of lubricating oil 42, the volume of the storage portion 44, the number, length and width of each supply groove 45, the number of sliding surfaces 40, and the number of sliding surfaces 40. It is determined based on the area and various parameter information including. Further, the supply amount of the lubricating oil 42 at one time may be determined by conducting an experiment or the like for each model of the roundness measuring device 10.

[Effect of Roundness Measuring Device of First Embodiment]
<First effect>
FIG. 8 is an explanatory diagram for explaining the path length of the lubricating oil 42 flowing from the lubricating oil supply portion 47 (supply port portion 46) to each sliding surface 40 of the column 15. FIG. 9 is an explanatory diagram for explaining the path length of the lubricating oil 42 flowing from the lubricating oil supply unit 47 to each sliding surface 100b in the column 100 of the comparative example shown in FIG. 17 described above.

As shown in FIG. 8, in the present embodiment, a storage portion 44 is formed on the upper surface 15a of the column, the lubricating oil 42 is temporarily stored in the storage portion 44, and then each slide is provided from the storage portion 44 via each supply groove 45. Lubricating oil 42 is supplied to the moving surface 40. Therefore, the path lengths of the lubricating oil 42 flowing from the lubricating oil supply unit 47 to each sliding surface 40 of the column 15 can be easily matched.

On the other hand, as shown in FIG. 9, in the column 100 of the comparative example (see FIG. 17), the lubricating oil 42 is directly supplied from the supply port portion 102 to each sliding surface 101b via each liquid flow path 101. Therefore, the length of each liquid flow path 101 tends to vary, and as a result, the supply amount of the lubricating oil 42 supplied from each liquid flow path 101 to each sliding surface 100b also varies. Therefore, in the column 100 of the comparative example, when the supply amount of the lubricating oil 42 to a part of the sliding surfaces 100b is increased, the carriage 16 may float and the measurement accuracy of the work W may be lowered. is there.

On the other hand, in the column 15 of the roundness measuring device 10 of the present embodiment, the path lengths of the lubricating oil 42 flowing to each sliding surface 40 of the column 15 can be easily matched, so that each sliding surface can be easily matched. Variations in the supply amount of the lubricating oil 42 supplied to each of the 40s can be suppressed. As a result, it is possible to prevent the occurrence of floating as in the comparative example, so that a decrease in the measurement accuracy of the work W can be suppressed.

Further, in the column 100 of the comparative example, it is necessary to form the liquid flow path 101 on the plurality of sliding surfaces 101b, and machining processing on the plurality of surfaces is required. However, in the present embodiment, the liquid flow path 101 is stored on the column upper surface 15a. Since it is sufficient to form the portion 44 and each supply groove 45, it is sufficient to perform machining on one surface, and the cost can be reduced. Further, since the number of pipes and joints required for supplying the lubricating oil 42 can be reduced (it becomes unnecessary on the downstream side of the supply port 46), the supply system of the lubricating oil 42 can be constructed at low cost. ..

<Second effect>
Further, in the present embodiment, the heat generated from the motor 21 provided on the upper surface side of the column 15 is generated by providing the storage portion 44 for storing the lubricating oil 42 having a higher specific heat than the material of the column 15 on the upper surface 15a of the column. The thermal deformation of the column 15 due to the above is reduced. Here, the reason why the motor 21 is provided on the upper surface side of the column 15 is as follows.

FIG. 10 is an explanatory diagram for explaining a comparative example in which the motor 21 is provided on the lower surface side of the column 15, that is, in the base 12. Further, FIG. 11 is an explanatory diagram for explaining the advantage of providing the motor 21 on the upper surface side of the column 15. As in the comparative example shown in FIG. 10, when the motor 21 is provided on the lower surface side of the column 15, that is, inside the base 12, the upper surface of the base 12 is thermally deformed by the heat generated from the motor 21, and the entire column 15 is formed. Will tilt. As a result, the measurement accuracy of the work W is significantly reduced.

On the other hand, when the motor 21 is provided on the upper surface side of the column 15 as in the present embodiment shown in FIG. 11, the upper end portion of the column 15 is thermally deformed by the heat generated from the motor 21. Here, the thermal deformation of the column 15 is, for example, thermal expansion deformation due to variation in the temperature distribution of the column 15, or deformation due to the bimetal effect when the column 15 is composed of a plurality of different metal columnar members. Is given as an example.

On the other hand, the portions (center portion and lower end portion) other than the upper end portion of the column 15 are separated from the motor 21 and therefore do not undergo thermal deformation and maintain a posture perpendicular to the base 12. Therefore, when the carriage 16 is moving within the range from the lower end portion to the central portion of the column 15, the measurement accuracy of the roundness of the work W is sufficiently ensured. Therefore, in order to improve the measurement accuracy of the roundness of the work W, it is preferable to provide the motor 21 on the upper surface side of the column 15 as in the present embodiment.

Then, in the present embodiment, by forming the storage portion 44 in the vicinity of the motor 21, that is, on the upper surface 15a of the column, the lubricating oil 42 in the storage portion 44 absorbs the heat generated from the motor 21 from the motor 21. The heat transferred to the column 15 can be reduced. Therefore, the amount of thermal deformation at the upper end of the column 15 as shown in FIG. 11 can be significantly reduced. As a result, even when the carriage 16 is moved to the upper end side of the column 15, the decrease in the measurement accuracy of the roundness of the work W can be suppressed. That is, the storage unit 44 of the present embodiment suppresses a decrease in measurement accuracy of the work W due to thermal deformation of the column 15.

<Third effect>
FIG. 12 is an explanatory diagram for explaining that the temperature of the column 15 is made uniform by the lubricating oil 42 supplied from the storage unit 44. As described above, the heat generated from the motor 21 is absorbed by the lubricating oil 42 stored in the storage unit 44.

Then, as shown in FIG. 12, the lubricating oil 42 that stores heat is supplied from the storage unit 44 to each sliding surface 40 through each supply groove 45, and then the entire region (substantially all) of each sliding surface 40. When the region (including the region) is covered with the lubricating oil 42, the entire region of each sliding surface 40 is warmed by the lubricating oil 42. As a result, the temperature on the upper end side of the column 15 where the motor 21 is provided becomes higher, while the temperature on the lower end side fixed to the base 12 becomes lower, so that the temperature varies in the vertical direction of the column 15. Is reduced. As a result, it is possible to reduce thermal expansion deformation due to variations in the temperature distribution of the column 15, or thermal deformation due to the bimetal effect when the column 15 is composed of a plurality of different metal columnar members. As a result, a decrease in measurement accuracy of the work W due to thermal deformation of the column 15 can be further suppressed.

As described above, the roundness measuring device 10 of the present embodiment is supplied to each sliding surface 40 by forming the storage portion 44 of the lubricating oil 42 and each supply groove 45 on the upper surface 15a of the column. It is possible to reduce the variation in the supply amount of the lubricating oil 42 and the amount of thermal deformation of the column 15. As a result, the lubricating oil 42 can be supplied to each sliding surface 40 of the column 15 at low cost while enabling high-precision measurement without deteriorating the measurement accuracy of the work W.

[Other Embodiments of Roundness Measuring Device]
Next, the other embodiments 1 to 4 of the roundness measuring device 10 of the above embodiment will be described. Here, since the other embodiments 1 to 3 have basically the same configuration as the roundness measuring device 10 of the above embodiment, only the changes from the above embodiment will be described. Further, the other embodiment 4 adopts a measurement method different from that of the roundness measuring device 10 of the above embodiment. In the other embodiments 1 to 4, those having the same function or configuration as the above-described embodiments are designated by the same reference numerals and the description thereof will be omitted.

<Other Embodiment 1>
FIG. 13 is a top view showing each supply groove 45 of the other embodiment 1. In the above embodiment, by matching the length and width (cross-sectional area) of each supply groove 45, the supply amount of the lubricating oil 42 supplied to each sliding surface 40 through each supply groove 45 varies. Although it is reduced, the inside of the storage portion 44 is communicated with the outside through each supply groove 45, so that the space is not completely sealed. Therefore, Pascal's principle may not hold depending on the shape of the storage portion 44 and the arrangement of each supply groove 45. In such a case, the supply amount of the lubricating oil 42 for each supply groove 45 may vary. is there.

Therefore, as shown in FIG. 13, in the above embodiment, the shape of each supply groove 45 (shape related to the size of the groove cross-sectional area such as width and length) is adjusted, and each slide from each supply groove 45. The amount of lubricating oil 42 supplied to each of the moving surfaces 40 is matched. For example, when the supply amount of the lubricating oil 42 supplied from the supply groove 45 to the sliding surface 40 decreases as the distance from the supply port portion 46 to the supply groove 45 increases, the above-mentioned distance becomes longer. The width of the supply groove 45 may be gradually increased from D1 through D2 to D3 (D1 <D2 <D3) accordingly. Further, instead of or in accordance with the stepwise increase in the width of each supply groove 45, the length of the supply groove 45 may be stepwise shortened as the above-mentioned distance becomes longer.

Further, the supply of the lubricating oil 42 supplied from each supply groove 45 to each sliding surface 40 is obtained by experiment or simulation, and the shape of each supply groove 45 is adjusted according to the result, so that each supply groove 45 The amount of lubricating oil 42 supplied to each sliding surface 40 may be matched.

<Other Embodiment 2>
FIG. 14 is a top view of the column upper surface 15a of the second embodiment. In the above embodiment, one storage portion 44 is formed in almost the entire region of the column upper surface 15a, and the lubricating oil 42 is supplied from the storage portion 44 to each of the six supply grooves 45. On the other hand, for example, as shown in FIG. 14, in the other embodiment 2, two storage portions 44A are formed at both ends of the column upper surface 15a (both ends on the lateral side surface side of the column 15), and the cover 41 is formed. A supply port 46 corresponding to each storage unit 44A may be provided, and the lubricating oil 42 may be supplied from each storage unit 44A to each of the three supply grooves 45. The storage portions 44A may be formed at three or more locations on the upper surface 15a of the column, and the number of supply grooves 45 connected to the individual storage portions 44A may be appropriately changed.

By forming the plurality of storage portions 44A in this way, even if the space for forming the large storage portion 44 described in the above embodiment does not exist on the column upper surface 15a, each sliding from the column upper surface 15a. Lubricating oil 42 can be supplied to the surface 40. In addition, the options for the shape and arrangement of the storage unit 44A can be expanded.

Further, when the column 15 is configured by connecting a plurality of columnar members, when forming a storage portion 44 (see FIG. 4) that straddles the upper surfaces of the plurality of columnar members, the column 15 is formed for each columnar member. It becomes necessary to adjust the position of each part of the storage unit 44 with high accuracy. On the other hand, in the other embodiment 2, since one storage portion 44A may be formed on one columnar member, it is not necessary to consider the alignment of each columnar member, and the storage portion 44A can be easily formed. Can be done.

<Other Embodiment 3>
FIG. 15 is a cross-sectional view of the supply groove 45A and the supply groove 45B of the third embodiment, which are different from the supply groove 45 of the above embodiment. In the above embodiment, the lubricating oil 42 in the storage unit 44 is supplied from each supply groove 45 to each sliding surface 40 by the pressure applied from the lubricating oil supply unit 47 to the lubricating oil 42 in the storage unit 44. In the third embodiment, instead of applying pressure to the lubricating oil 42 in the storage portion 44, the lubricating oil 42 is supplied to each sliding surface 40 by utilizing the capillary phenomenon.

As shown in FIG. 15, the supply groove 45A and the supply groove 45B are formed to have a narrow groove width, so that the lubricating oil 42 in the storage portion 44 is sucked by the capillary phenomenon and the lubricating oil is applied to the corresponding sliding surface 40. 42 is supplied. Further, a plurality of narrow grooves 48 are formed on the inner wall surfaces of the supply groove 45A and the supply groove 45B along the groove formation direction. As a result, the capillary pressure can be further increased, so that the amount of lubricating oil 42 supplied to the sliding surface 40 by the supply groove 45A and the supply groove 45B can be increased.

Instead of forming the fine groove 48 on the inner wall surface of the supply groove 45A and the supply groove 45B, for example, a mesh material, a bound ultrafine wire, a porous material, or the like is arranged in the supply groove 45A and the supply groove 45B. , Capillary pressure may be increased.

In this way, by forming the supply groove 45A or the supply groove 45B capable of supplying the lubricating oil 42 to the sliding surface 40 by utilizing the capillary phenomenon on the column upper surface 15a, the control device 25 shown in FIG. 7 described above is formed. (Supply control unit 25c) can constantly supply the lubricating oil 42 to the sliding surface 40 without controlling the supply of the lubricating oil 42. In particular, when it is necessary to constantly operate the roundness measuring device 10, the configuration related to the supply control of the lubricating oil 42 to each sliding surface 40 (control device 25 in FIG. 7) becomes unnecessary. In this case, even if a storage tank (not shown) storing the lubricating oil 42 is arranged above the roundness measuring device 10 and the lubricating oil 42 is constantly supplied into the storage unit 44 from this storage tank. Good.

<Other Embodiment 4>
In the above embodiment, the table rotation type roundness measuring device 10 that measures the roundness while rotating the work W placed on the mounting table 13 (table) has been described. For example, as shown in FIG. In addition, the present invention can also be applied to a detector rotation type roundness measuring device 50 that rotates a detector 74 (see FIG. 16) instead of rotating a mounting table 13 (work W). Here, FIG. 16 is a perspective view of the detector rotation type roundness measuring device 50.

In the roundness measuring device 50, the base 52 is arranged at the lowermost portion and integrally supports each part of the device. Further, the base 52 is tilted and adjusted so that the upper surface becomes horizontal, and is placed on a desired measuring table or the like. An XY table 54 is arranged on the upper surface side of the base 52, and a column 56 is provided behind the XY table 54.

The XY table 54 is movably supported in the horizontal direction (XY axis direction) with respect to the base 52 by a support mechanism (not shown). Further, the XY table 54 has a horizontal table surface on the upper side thereof. The work W to be measured is placed on the table surface.

The column 56 is formed in a square columnar shape, and its lower end is fixed to the base 52 and has a shape extending in the vertical direction (vertical direction, Z-axis direction). A Z guide 58 is installed on the front surface of the column 56.

The Z guide 58 has, for example, two parallel longitudinal guide rails 58A and 58B. These guide rails 58A and 58B are provided along the vertical direction on the front surface of the column 56. The Z guide 58 movably supports the carriage 60 in the vertical direction along the front surface of the column 56.

The carriage 60 moves in the vertical direction by a moving mechanism driven by a motor for raising and lowering the carriage (not shown). Here, as the moving mechanism and the motor for moving the carriage 60 in the vertical direction, for example, basically the same as those in the above embodiment (see FIG. 2) are used. In this case, the motor is attached to the upper surface of the column of the column 56. In the roundness measuring device 50, the motor may be provided in the carriage 60. In this case, the type of the moving mechanism for moving the carriage 60 in the vertical direction may be different from that of the above embodiment. Since the arrangement and configuration of the carriage elevating motor and the moving mechanism adopted in the detector rotation type roundness measuring device 50 are known techniques, detailed description thereof will be omitted here.

The Z table 62 rotatably supports the spindle 64 and incorporates a spindle drive mechanism (not shown) such as a motor that rotates the spindle 64.

The spindle 64 rotates around the central axis of the spindle 64 by the driving force of the spindle driving mechanism (not shown). The central axis of the spindle 64 is the rotation center (rotation axis) of the detector 74 described later, which rotates with respect to the work W (XY table 54). A support arm 66 is provided at the lower end of the spindle 64.

The support arm 66 has a shape extending in the horizontal direction, and a central portion thereof is fixed to the spindle 64. Further, the support arm 66 movably supports the slide block 68 on the lower surface side thereof in the horizontal direction.

The slide block 68 moves linearly in the horizontal direction along the lower surface of the support arm 66 manually or electrically. A detector holder 70 extending in the vertical direction is provided on the lower side of the slide block 68.

The detector holder 70 is formed in a columnar shape, and the upper end side thereof is fixed to the slide block 68 by a screw or the like. A detector 74 is provided on the lower end side of the detector holder 70. The detector 74 has a stylus 76 that comes into contact with the work W, and detects the amount of displacement of the tip of the stylus 76 in the horizontal direction from the reference position.

In the roundness measuring device 50 having the above configuration, the work W is placed on the XY table 54, and the XY table 54 is driven to align the center of the measurement portion of the work W with the rotation center of the detector 74. After that, the detector 74 is rotated by the spindle 64 to measure the circumference of the work W by the detector 74, and the roundness of the work W is calculated from this measurement data.

Even in such a detector rotation type roundness measuring device 50, it is necessary to supply the lubricating oil 42 to the sliding surface (surface of the Z guide 58) of the column 56 on which the carriage 60 slides. By forming the storage portion 44 and the supply groove 45 (not shown in FIG. 16) described in the embodiment on the upper surface of the column of the column 56, the same effect as that of the above embodiment can be obtained.

[Other]
In each of the above embodiments, the lubricating oil 42 is supplied to the sliding surface 40 of the column 15 (the same applies hereinafter to the sliding surface of the column 56), but instead of the lubricating oil 42, known known grease or the like is used. Various lubricants may be used.

In each of the above embodiments, as an example of the surface shape measuring device for measuring the surface shape of the work W, the roundness measuring device 10 for measuring the roundness of the work W has been described as an example, but the present invention has been described. It is not limited to the roundness measuring device. For example, various surface shape measuring devices for measuring various surface shapes of the work W such as straightness, parallelism, squareness, and surface roughness of the work W, which extend in the vertical direction erected on the base. The present invention can be applied to various surface shape measuring devices including a column, a carriage supported by the column, and a detector supported by the carriage.

10, 50 ... Roundness measuring device, 12, 52 ... Base, 15, 56 ... Column, 15a ... Column top surface, 16, 60 ... Carriage, 19, 74 ... Detector, 21 ... Motor, 25 ... Control device, 25c ... Supply control unit, 30 ... Lead screw, 39 ... Sliding material, 40 ... Sliding surface, 42 ... Lubricating oil, 44, 44A ... Storage unit, 45, 45A, 45B ... Supply groove, 47 ... Lubricating oil supply unit

Claims (7)

With the base
A column that stands on the base and extends vertically,
A carriage supported by the column so as to be movable in the vertical direction along the column,
A detector supported by the carriage that detects the displacement of the stylus in contact with the workpiece.
A storage unit formed on the upper surface of the column to store the lubricant,
A plurality of supply grooves formed on the upper surface of the column and communicating with the storage portion, and the carriage slides on the side surface of the column with the lubricant stored in the storage portion. Multiple supply grooves to supply to each sliding surface,
A surface shape measuring device comprising. A moving mechanism provided on the column to move the carriage in the vertical direction,
A drive source provided on the upper surface side of the column to drive the moving mechanism,
The surface shape measuring apparatus according to claim 1. A supply port for supplying the lubricant to the storage is provided.
Based on the path lengths of the lubricant flowing from the supply port portion to each of the plurality of sliding surfaces through the plurality of supply grooves, the width of the plurality of supply grooves is increased as the path length becomes longer. The surface shape measuring apparatus according to claim 1 or 2, wherein the length of the plurality of supply grooves is shortened as the path length becomes longer . A cover covering the upper surface of the column is provided.
The surface shape measuring device according to claim 3, wherein the cover is provided with the supply port portion. The surface shape measuring device according to any one of claims 1 to 4, wherein the lubricant has a specific heat higher than that of the column. The invention according to any one of claims 1 to 5, further comprising a lubricant supply unit that supplies the lubricant into the storage unit and supplies the lubricant from the plurality of supply grooves to the plurality of sliding surfaces. Surface shape measuring device. The surface shape measuring device according to claim 6, wherein the lubricant supply unit supplies the lubricant every time the moving distance of the carriage reaches a certain distance or a certain time elapses.

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