JP2002254284A - Wire saw - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a wire saw that can work suppressing the deformation of right and left spindle bracket ribs and maintaining the straightness of a work with high accuracy. SOLUTION: A displacement sensor 39 is mounted on a work support mechanism 21, and a reference gauge 40 is provided to the upper part of at least one spindle bracket rib (33) of two spindle bracket ribs (33, 34). A coupling rib 35 is fitted between the two spindle bracket ribs (33, 34). The displacement sensor 39 detects the deformation of the bracket 14 by measuring the distance from the reference gauge 40. Based on detected results, the distance between the two spindle ribs (33, 34) is controlled by cooling or heating the coupling rib 35.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

[0001] The present invention relates to a method of using a wire,
The present invention relates to a wire saw for cutting a work having a crystal structure such as a semiconductor material, a magnetic material, and a ceramic, and more particularly to a wire saw having a straightness control function.

[0002]

2. Description of the Related Art Generally, a wire saw is provided with a plurality of processing rollers in parallel at predetermined intervals, and a plurality of annular grooves are formed at a predetermined pitch on the outer periphery of the processing rollers. One wire is spirally wound in the annular groove in order over each processing roller. A work support mechanism is provided corresponding to the wire between the processing rollers, and a work is detachably attached to a lower portion of the work support mechanism.

In the above-mentioned wire saw, a working fluid is supplied onto the wire while the wire is running in a linear direction, and in this state, the work is pressed against the wire by a work supporting mechanism to make contact with the work. Processing is to be performed. For this type of wire saw, a workpiece is pressed against the wire while supplying a working fluid containing free abrasive grains, and the workpiece is cut by a lapping action.
There is a type that cuts a workpiece while supplying a processing liquid such as oil or water using a wire to which abrasive grains are fixed in advance. In addition,
The other configuration is exactly the same, and there is a wire saw in which the position of the wire and the work is upside down.

FIG. 8 shows processing rollers 15, 16 and 17.
It is a conceptual diagram when the bracket 14 which supports the lower roller 17 (not shown) is viewed from above. As shown in the figure, the bracket 14 has a substantially U-shape, and includes a substrate portion 36 fixed to the frame of the wire saw main body and left and right spindle brackets provided substantially continuously to the substrate portion 36. It consists of ribs 33 and 34. A processing roller 1 is provided between the left and right spindle bracket ribs 33, 34.
Connecting ribs 35 are integrally provided in parallel with 5, 16, and 17. The connecting rib 35 has a concave longitudinal section, and is arranged along the rotation axis direction of the processing rollers 15, 16, 17.

In this type of wire saw, the working fluid supplied between the wire and the work is received by a tray disposed immediately below the processing roller, collected in a tank, and then passed through a circulation passage. It is designed to be used cyclically. The temperature of the working fluid is adjusted by a heat exchanger provided in the tank or the circulation passage, so that the working fluid at a predetermined temperature is supplied to a working portion between the wire and the workpiece. .

[0006]

However, when cutting a workpiece, frictional heat generated by cutting is added to the working fluid, and the temperature of the working fluid rises. The processing liquid whose temperature has risen immediately after processing is scattered to the bracket 14 or the connecting rib 35 supporting the processing roller by rotation of the processing roller and running of the wire, and the like. The temperature rises. Then, FIG.
As shown by the two-dot chain line, the left and right spindle bracket ribs 33 and 34 may be spread outward and deformed by the influence of heat. For example, in an operation in a low-temperature environment such as in the early morning of winter, since the connecting ribs 35 and the like are contracted, the left and right spindle bracket ribs 33 and 34 are deformed inward as shown by the dashed line in FIG. It is possible to do.

[0007] In particular, when the temperature of the bracket 14 and the connecting rib 35 changes due to the working fluid or the like during the time of processing while the workpiece is being sent vertically, the bracket 14 for supporting the processing rollers 15, 16, 17 is formed. When the shape is deformed, the positional accuracy of the processing rollers 15, 16, 17 decreases, and the positions of the annular grooves of the processing rollers 15, 16, 17 with respect to the workpiece change. Accordingly, since the wire position is displaced, the straightness of the cut surface of the work is affected, and it is difficult to maintain the straightness of the work with high accuracy.

The invention according to the present application has been made to solve the above-mentioned problems, and an object of the invention is to suppress deformation of left and right spindle bracket ribs to thereby reduce the processing roller. An object of the present invention is to provide a wire saw capable of controlling a displacement and a displacement of a wire and performing processing while maintaining straightness of a workpiece with high accuracy.

[0009]

According to a first aspect of the present invention, a plurality of rollers are rotatably supported by a side wall of a bracket having two opposing side walls. The wire is spirally wound around the plurality of rollers, and the wire is moved in the direction of the wire, and the work supporting mechanism on which the workpiece is mounted is moved toward the wire. By approaching,
In a wire saw for cutting the work, a displacement sensor is provided on the work support mechanism, and a displacement detection member is provided at a position facing the displacement sensor above at least one of the two side walls, A connecting member is provided between the two side walls, and the displacement sensor detects a displacement of the bracket by measuring a distance from the displacement detecting member, based on the detection result by the displacement sensor. A wire saw, wherein the distance between the two side walls is controlled by cooling or heating the connecting member.

A second invention according to the present application is the wire saw according to the first invention, wherein the measurement and the control are performed during the processing of the work.

Further, in a third invention according to the present application, the connecting member has a medium flow path, and the medium is circulated through the medium flow path to cool or heat the connecting member. A wire saw according to the first or second aspect of the invention.

A fourth invention according to the present application is characterized in that the connection member is cooled or heated by adjusting the temperature or the flow rate of the medium based on the detection result by the displacement sensor. A wire saw according to a third aspect of the present invention.

Further, a fifth invention according to the present application is the wire saw according to the third or fourth invention, wherein the medium is a working fluid.

According to a sixth aspect of the present invention, the displacement detecting member is a member separate from the bracket,
The wire saw according to any one of the first to fifth inventions, wherein a material forming the displacement detection member has a smaller coefficient of thermal expansion than a material forming the bracket. .

Furthermore, a seventh invention according to the present application is characterized in that the surface of the connecting member is covered with a cover so that the working liquid is not directly applied to the connecting member. A wire saw according to any one of the above.

[0016]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS [First Embodiment] A first embodiment of the present invention will be described below with reference to FIGS.
1 is a perspective view of the wire saw, FIG. 2 is a front view of the wire saw, FIG. 3 is a right side view of the wire saw, and FIG. 4 is a plan view of the wire saw. (Overall Structure of Wire Saw) First, the overall structure of the wire saw device will be briefly described with reference to FIGS. As shown in the side view of FIG.
2 stands. A cutting mechanism 13 is mounted via a bracket 14 in front of the column 12 (left side in FIG. 3). The cutting mechanism 13 has a plurality of processing rollers 15, 16, 17 rotatably supported by a bracket 14, and the processing rollers 15, 16, 17 are arranged in parallel with each other at a predetermined interval. Have been. As shown in FIG. 2, a plurality of annular grooves 15a, 16a, 17a are formed at a predetermined pitch on the outer circumference of the processing rollers 15, 16, 17, respectively. In FIG. 2, for ease of understanding, the illustration of the wires is omitted, and the number of the annular grooves 15a, 16a, 17a is drawn smaller than the actual number.

A wire 18 made of a single wire is continuously spirally wound around each of the annular grooves 15a, 16a, 17a of the processing rollers 15, 16, 17. As shown in FIG. 4, a wire traveling motor 19 is provided on the bracket 14.
The processing rollers 15, via a transmission mechanism (not shown)
16 and 17 are driven to rotate. The rotation of the processing rollers 15, 16, 17 causes the wire 1
8 travels at a predetermined traveling speed. The traveling of the wire 18 is repeated so as to advance forward and backward by a fixed amount and to move forward stepwise as a whole. The wire 1
As 8, not only a normal wire but also a fixed abrasive wire having abrasive grains (for example, diamond abrasive grains) adhered to the surface of the wire can be used.

As shown in FIG. 3, above the bracket 14, a working fluid supply nozzle 20 connected to a working fluid supply circuit (not shown) is provided. A water-based or oil-based processing liquid is supplied onto the wire 18. As the working fluid, a working fluid containing free abrasive grains can be used, or a working fluid containing no free abrasive grains, such as oil or water, can be used in processing using a fixed abrasive wire.

Above the working fluid supply nozzle 20, a work support mechanism 21 is supported on the column 12 so as to be vertically movable, and a work 22 having a plurality of crystal structures made of a hard and brittle material is set below the work support mechanism 21. Two guide rails 12a are provided in parallel on the front side wall surface of the column 12 in the vertical direction, and the work support mechanism 21 is fitted to the guide rails 12a so as to be vertically movable. Column 1
A work lifting / lowering motor 23 is disposed on the workpiece 2. By controlling the rotation of the work lifting / lowering motor 23, the work supporting mechanism 21 can be moved up and down via a ball screw or the like (not shown). Work support mechanism 21
Is vertically and accurately moved up and down following the guide rail 12a.

During operation of the wire saw, the wire 18 is connected to the processing rollers 15, 16, 1 of the cutting mechanism 13.
The work supporting mechanism 21 is moved down toward the cutting mechanism 13 while traveling between the seven positions. At this time, the processing liquid is supplied from the processing liquid supply nozzle 20 onto the wire 18, and
By pressing the work 22 against the wire 18, the work 22 is simultaneously sliced into a wafer.

As shown in FIG. 4, a pair of reel mechanisms 24 are provided behind the apparatus base 11, and
And a take-up reel 26 for taking up the wire 18. The device base 11 has a pair of reel rotation motors 27 and 28 composed of servomotors capable of changing the rotation direction and rotation speed.
Are arranged, and reels 25 and 26 are connected to their motor shafts. The reel rotation motors 27 and 28 are reversible, and after the winding of the wire 18 onto one of the reels 26 is completed, the reel 26 is switched to the wire feeding side and the other reel 25 is switched to the wire winding side. is there.

A traverse mechanism 29 is mounted on the apparatus base 11 adjacent to the reel mechanism 24. The traverse mechanism 29 is used to take out the wire 18 from the pay-out reel 25 and wind the wire 18 to the take-up reel 26. The wire 18 is guided while traversing up and down. And the reel mechanism 2
4 and the reels 25 and 26 rotate, and the reel 2
The wire 18 is fed out from the 5 to the cutting mechanism 13, and the processed wire 18 is wound up on a take-up reel 26.

As shown in FIG. 3, the traverse mechanism 2
A tension holding mechanism 30 and a guide mechanism 31 are disposed between the cutting mechanism 9 and the cutting mechanism 13. And the cutting mechanism 13
Both sides of the wire 18 wound between the processing rollers 15, 16, 17 are mounted on the tension holding mechanism 30 via the respective guide rollers 32 of the guide mechanism 31. In this state, a predetermined tension is applied to the wire 18 between the processing rollers 15, 16, 17 by the tension holding mechanism 30. Thus, the tension holding mechanism 30
The wire 18 to which a predetermined tension has been applied is wound around the reels 25 and 26 via the traverse mechanism 29.

(Work Attachment Structure to Work Support Mechanism) Next, a structure for attaching the work 22 to the work support mechanism 21 will be described with reference to FIG. In general, an ingot has a crystal orientation, and it is necessary to cut the wire 18 by running the wire 18 based on the crystal orientation. Therefore, when attaching the work 22 to the work support mechanism 21, it is necessary to adjust the crystal orientation of the work 22. First, the work 22 is attached to the mounting plate 4 as a work holding jig.
Attach to 2. The intermediate plate 4 is attached to the mounting plate 42
Attached via 1. The intermediate plate 41 is made of carbon having a substantially rectangular parallelepiped shape. The upper surface is flat, and the lower surface is concavely curved so that the outer peripheral surface of the cylindrical work 22 is fitted.

When the work 22 is bonded to the intermediate plate 41, it is not always necessary to detect the accurate crystal orientation of the work 22 and to bond the work 22. For example, a notch groove, an orientation flat or the like is arranged downward. Then, it is fixed to the intermediate plate 41 with the crystal orientation roughly adjusted. The work 22 has an outer peripheral surface formed by an intermediate plate 41.
And fixed by an adhesive or the like. Then, the intermediate plate 41 is attached and fixed to the lower surface of the mounting plate 42 with an adhesive or the like. The intermediate plate 41 is partially cut by the wire 18 together with the work 22 at the time of working with the wire saw, and is removed from the mounting plate 42 after finishing the working. And
The next new intermediate plate 41 is glued to the mounting plate 42.

As shown in FIGS. 1 and 2, the mounting plate 42 has an engaging arm 42 projecting left and right when viewed from the front.
a and is substantially T-shaped. On the other hand, the work support mechanism 21 includes an azimuth adjustment mechanism 44, and includes two left and right locking portions 43a below the azimuth adjustment mechanism 44. The left and right locking portions 43a have a prismatic shape extending horizontally from the back plate 43b toward the front of the wire saw, and the lower surface of the engagement arm 42a is placed on the upper surface of the locking portion 43a.

Then, the mounting plate 42 is connected to the back plate 43b.
, The mounting plate 42 is positioned. Further, a fixing screw 45 is screwed into a through hole formed in the mounting plate 42 and screwed to the back plate 43b, whereby the mounting plate 42 is fixed to the azimuth adjusting mechanism 44. Thereafter, the orientation of the work 22 is rotated in the tilting direction (clockwise or counterclockwise on the plane of FIG. 2) and in the horizontal rotation direction by the orientation adjusting mechanism 44 to adjust the crystal orientation.

(Bracket Structure) Next, the bracket 14
Will be described. As described with reference to FIG. 8, the bracket 14 has a substantially U-shape. The spindle bracket ribs 33 and 34 of FIG. Between the left and right spindle bracket ribs 33, 34, there are processing rollers 15,
A connecting rib 35 is provided in parallel with the connecting ribs 16 and 17. Also,
As shown in FIG. 3, above the connecting rib 35, a mesh-shaped tray 59 for receiving ingot chips, debris, and the like that fall due to the cutting process is provided.
It is removably mounted between 34.

FIG. 5 is a perspective view of the connecting rib 35. FIG.
As shown in FIG. 5, the connecting rib 35 has a concave shape whose cross section is open upward, and has a bottom 35a and left and right side walls 35b.
Further, a cover 60 is provided on the surface of the connecting rib 35 so as to cover the upper surface and the side surface so that the processing liquid whose temperature after processing has increased in temperature does not directly contact the connecting rib 35. The cover 60 is arranged with a gap so as to form an air space between the cover 60 and the connection rib 35, and is fixed to the connection rib 35 by screwing at several places. Thereby, the thermal influence on the connecting rib 35 from the working fluid can be reduced.
The cover 60 is preferably formed using a material having a lower thermal conductivity than the material of the connecting rib 35.

The connecting rib 35 is provided so that its longitudinal direction is parallel to the processing rollers 15, 16, 17 and both ends in the longitudinal direction are provided on the left and right spindle bracket ribs 3.
3, 34 are connected to opposing inner wall surfaces. In the present embodiment, both end portions of the connection rib 35 are formed continuously and integrally with the left and right spindle bracket ribs 33 and 34. However, as the connecting rib 35,
The one formed separately from the spindle bracket ribs 33, 34 may be fixed to the left and right spindle bracket ribs 33, 34 by fastening means such as bolts.

The connecting rib 35 is provided with a plurality of through holes 37 in the concave thick portion along the longitudinal direction.
In FIG. 5, two straight through holes 3 are formed in the bottom 35a.
7 is provided, and one through hole 37 is provided in each of the left and right side wall portions 35b.

In the present invention, the left and right spindle bracket ribs 33, 34 are connected to prevent opening and closing (two-dot chain line in FIG. 8) and closing (single-dot chain line in FIG. 8) due to heat. A through hole 37 is provided in the rib 35. A medium, which is a fluid, is caused to flow through the through-hole 37 to control the thermal expansion of the connecting rib 35, thereby suppressing the deformation of the left and right spindle bracket ribs 33, 34. In the present embodiment, the case where oil is used as the medium flowing through the through hole 37 is described. However, the medium is not limited to oil, and any medium such as water or gas can be used as long as it is a heat transfer medium. May be used.

The oil serving as the medium is located on the near side (37 in FIG. 5).
a, 37b, 37c, 37d) from the back side (37e, 37e).
f, 37g, 37h), it is possible to flow in the same direction in all through holes 37, or to flow in different directions for each through hole 37.
For example, 37a → 37e, 37f → 37b, 37c → 3
It is also possible to flow oil in different directions in the adjacent through holes 37 as in 7g, 37h → 37d. In this way, by making the flowing direction of the oil different for each through hole 37, it is possible to prevent uneven thermal deformation of the connecting rib 35 due to the temperature gradient between the upstream portion and the downstream portion of the oil flowing in the through hole 37. Thus, the deformation of the left and right spindle bracket ribs 33, 34 can be controlled with higher precision.

(Measurement Mechanism of Bracket Displacement) Next, a mechanism for measuring the displacement of the bracket 14 will be described. As shown in FIG. 2, the work supporting mechanism 21 of the present application is provided with an arm member 38 made of a material having low thermal expansion on the side surface (the left side surface in FIG. 2) of the work supporting mechanism 21. The arm member 38 extends horizontally and laterally from the side surface of the work support mechanism 21, and is bent downward in an L-shape at the middle thereof. A displacement sensor 39 is provided at the tip of the arm member 38.

As this displacement sensor, there are a contact type and a non-contact type, but it is desirable to use a non-contact type displacement sensor from the viewpoint of reducing errors due to thermal displacement.
In the present embodiment, a laser beam or an electric signal is emitted from the tip of the displacement sensor 39 toward the measured object, and the laser light or the electric signal reflected on the measured object surface is received.
Non-contact type displacement sensor 39 for measuring displacement with an object to be measured
Is used.

On the other hand, on the upper surface of the left spindle bracket rib 33 of the bracket 14, a plate-like reference gauge 40 as a displacement detecting member is provided upward at a position facing the displacement sensor 39. As shown in FIG.
The reference gauge 40 has an elongated plate shape upward. Since the bottom portion is connected to the upper surface of the spindle bracket rib 33, a step portion is provided to increase the width, thereby enhancing the connection strength. The reference gauge 40 can be formed integrally with the spindle bracket rib 33, but can also be formed separately from the spindle bracket rib 33 and fixed by welding or the like. In the latter case, the reference gauge 40 is desirably formed using a material having a smaller coefficient of thermal expansion than the material of the spindle bracket rib 33 in order to prevent the reference gauge 40 from being deformed by heat transfer from the spindle bracket rib 33.

The plate surface of the reference gauge 40 is
5, 16 and 17 are arranged in the direction of the normal line, and the displacement sensor 39 is arranged so as to face the plate surface.
Is arranged. Then, a laser beam or an electric signal is emitted from the tip of the displacement sensor 39 toward the plate surface of the reference gauge 40, and the reflected laser beam or the electric signal is detected by the receiving unit of the displacement sensor 39, thereby displacing the reference gauge 40. The distance from the sensor 39 is measured. At this time, the displacement sensor 3
Numeral 9 is attached to an arm member 38 fixed to the work supporting mechanism 21. Even if the work supporting mechanism 21 moves up and down, it does not move in the axial direction of the processing rollers 15, 16, 17; The displacement detected by
It can be said that this is a displacement of the spindle bracket rib 33.

(Medium Flow Path) Next, the path of the medium flowing through the through hole 37 of the connecting rib 35 will be described with reference to FIG. FIG. 6 schematically shows a medium distribution route. As shown in the figure, the medium tank 58 stores oil serving as a medium. Medium tank 58
The oil inside is pumped up by a pump 46 and supplied to a connecting rib 35 through a flow control valve 54. The supplied oil flows through the through hole 37, and at that time, absorbs heat from the connecting rib 35 or releases heat to the connecting rib 35. The oil flowing through the through hole 37 is transported again to the medium tank 58 by the pump 47, and the oil circulates between the medium tank 58 and the connecting rib 35.

The oil in the medium tank 58 is pumped up by a pump 48 and transported to a heat exchanger 50 having a temperature controller 49. The heat exchanger 50 is controlled by the temperature controller 49 to adjust the oil to a predetermined temperature, and the oil whose temperature has been adjusted is transported to the medium tank 58 again.

On the other hand, the displacement sensor 39 provided on the work support mechanism 21 is connected to the amplifier 51. Amplifier 51
Transmits the displacement information from the displacement sensor 39 to the control unit 52 and the temperature controller 49. The control unit 52 is connected to the motor 53 and controls the rotation of the motor 53. Motor 5
3 controls the opening and closing of the flow control valve 54,
To control the flow rate of oil passing through. Further, the temperature controller 49 controls the heat exchanger 50 based on the information from the amplifier 51.
And the temperature of the oil in the medium tank 58 is adjusted.

As described above, the amount of deformation of the bracket 14 detected by the displacement sensor 39 is fed back to the temperature and flow rate of the oil to control the thermal expansion of the connecting rib 35, so that the bracket can be shaped appropriately. Processing can be performed while maintaining the state.

Next, the operation of the wire saw configured as described above will be described with reference to FIGS. First, the work 22 is attached to the work support mechanism 21. The work 22 is bonded to the mounting plate 42 via the intermediate plate 41 as described above. Then, the crystal orientation of the work 22 bonded to the mounting plate 42 is measured using an X-ray crystal orientation measurement device (not shown).

After measuring the crystal orientation of the work 22, the engaging arm 42a of the mounting plate 42 is placed on the locking portion 43a. Then, the mounting plate 42 is positioned at a predetermined position by pressing the mounting plate 42 toward the rear plate 43b. A fixing screw 45 is screwed into a through hole formed in the mounting plate 42 and screwed to the back plate 43 b, and the mounting plate 42 is fixed to the azimuth adjustment mechanism 44. Thereafter, the crystal orientation of the work 22 is adjusted based on the crystal orientation of the work 22 measured by the X-ray crystal orientation measurement device. The crystal orientation is adjusted by the orientation adjustment mechanism 44.
By rotating the azimuth of the work 22 in the tilting direction and the horizontal rotation direction.

The processing rollers 15, 16, and 17 are rotated to move the wire 18 in the linear direction. Then, as shown in FIG. 6, the processing liquid is supplied from the processing liquid supply nozzle 20 toward the wire 18. By rotating the work lifting motor 23, the work support mechanism 21 is lowered toward the traveling wire 18, and the work 22 is cut into a wafer having a predetermined thickness.

During the above processing, the work supporting mechanism 21
The displacement of the reference gauge 40 is measured by the displacement sensor 39 provided in the above. Since the reference gauge 40 is fixed to the upper surface of the spindle bracket rib 33, the displacement of the reference gauge 40 is measured while the work support mechanism 21 is moving down, so that the spindle bracket rib 3 is moved.
3 can be measured continuously.

As shown in FIG. 6, displacement information measured by the displacement sensor 39 is sequentially or at predetermined time intervals.
The signal is transmitted to the control unit 52 and the temperature controller 49 via the amplifier 51. Then, the control unit 52 controls the rotation of the motor 53 and adjusts the opening and closing of the flow control valve 54, thereby controlling the flow rate of the oil passing through the flow control valve 54. Also,
The temperature controller 49 controls the heat exchanger 50 based on information from the amplifier 51, and adjusts the temperature of the oil in the medium tank 58.

For example, a case in which the left and right spindle bracket ribs 33 and 34 of the bracket 14 are deformed outward due to the scattering of the processing liquid whose temperature has increased during the processing of the workpiece 22 will be specifically described. When the bracket 14 is opened outward, the displacement sensor 39
It is detected that the distance from the reference gauge 40 is short, that is, that the spindle bracket rib 33 has moved outward.

The displacement information detected by the displacement sensor 39 is transmitted to the control unit 52 and the temperature controller 4 via the amplifier 51.
9 is transmitted. If the information from the amplifier 51 indicates that the spindle bracket rib 33 has opened outward, the temperature controller 49 controls the heat exchanger 50 to lower the temperature of the oil in the medium tank 58. . On the other hand, the control unit 52 rotates the motor 53 to open the flow control valve 54, and increases the flow rate of the oil passing through the flow control valve 54.

Then, the cooled oil flows through the through hole 37 of the connecting rib 35 to cool the connecting rib 35. At this time, the connecting rib 35 cooled by the oil
Is reduced in length due to heat shrinkage. Since both ends of the connection rib 35 are connected to the left and right spindle bracket ribs 33 and 34 as described above, the contraction of the connection rib 35 causes the left and right spindle bracket ribs 33 and 34 to contract.
Are deformed in a direction to attract each other. When the displacement detected by the displacement sensor 39 does not detect the predetermined value, that is, the deformation of the bracket 14, the control unit 52 rotates the motor 53 and closes the flow control valve 54 based on the displacement information from the amplifier 51. .

In the above specific example, the amplifier 51
Is transmitted to both the control unit 52 and the temperature controller 49, but may be a mechanism that transmits only the control unit 52 or the temperature controller 49. For example,
A mechanism may be used in which the temperature of the oil in the medium tank 58 is set to a predetermined low temperature by the heat exchanger 50, and the flow rate of the oil is adjusted only by opening and closing the flow control valve 54 by the control unit 52. In this case, when the flow control valve 54 is opened, the flow rate of the oil increases, so that the connecting rib 3
5 is cooled. When the flow control valve 54 is closed, the oil does not flow, so that the connection rib 35 is not cooled.

Next, the case where the left and right spindle bracket ribs 33 and 34 of the bracket 14 are deformed inward due to a cold wire saw device, for example, in the early morning operation in winter, will be specifically described. . When the bracket 14 is deformed inward, the displacement sensor 39 indicates that the distance from the reference gauge 40 has increased,
That is, it detects that the spindle bracket rib 33 has moved inward.

The displacement information detected by the displacement sensor 39 is transmitted to the control unit 52 and the temperature controller 4 via the amplifier 51.
9 is transmitted. If the information from the amplifier 51 indicates that the spindle bracket rib 33 has been deformed inward, the temperature controller 49
The heat exchanger 50 is controlled so as to increase the temperature of the oil in the heat exchanger 8. On the other hand, the control unit 52 rotates the motor 53 to open the flow control valve 54, and increases the flow rate of the oil passing through the flow control valve 54.

Then, the oil whose temperature has risen flows through the inside of the through hole 37 of the connecting rib 35 and raises the temperature of the connecting rib 35. At this time, the length of the connection rib 35 heated by the oil is increased by thermal expansion. As described above, since both ends of the connection rib 35 are connected to the left and right spindle bracket ribs 33 and 34, the connection rib 35
The left and right spindle bracket ribs 3
3, 34 are deformed in directions away from each other. When the displacement detected by the displacement sensor 39 does not detect a predetermined value, that is, the deformation of the bracket 14, the amplifier 51
The control unit 52 rotates the motor 53 and closes the flow control valve 54 according to the displacement information from the control unit 52.

In the above specific example, the amplifier 51
Is transmitted to both the control unit 52 and the temperature controller 49, but may be a mechanism that transmits only the control unit 52 or the temperature controller 49. For example,
A mechanism may be used in which the temperature of the oil in the medium tank 58 is set to a predetermined high temperature by the heat exchanger 50 and the flow rate of the oil is adjusted only by opening and closing the flow control valve 54 by the control unit 52. In this case, when the flow control valve 54 is opened, the flow rate of the oil increases, so that the connecting rib 3
5 is heated. When the flow control valve 54 is closed, the connection rib 35 is not heated because no oil flows.

As described above, in the present embodiment, the displacement sensor 39 is provided on the work supporting mechanism 21 and the spindle bracket rib 33 is provided with the reference gauge 40. Then, the displacement of the reference gauge 40, that is, the displacement of the spindle bracket rib 33 is measured by the displacement sensor 39, and based on the measured value, the connecting rib 3 is measured.
5 is cooled or heated. In this way, by thermally contracting or thermally expanding the connection rib 35 based on the displacement of the spindle bracket rib 33, deformation of the left and right spindle bracket ribs 33, 34 can be suppressed. As a result, the displacement of the processing rollers 15, 16, 17 can be suppressed, and furthermore, the fluctuation of the position of the wire can be suppressed, so that the straightness of the work can be maintained with high precision from the start of processing to the end of processing. Processing can be performed.

Second Embodiment Next, a second embodiment will be described with reference to FIG. In this embodiment,
In the first embodiment, the processing liquid is also used as a medium, and other configurations are the same. Therefore, the same reference numerals are used in the first embodiment to omit specific description.

As shown in FIG. 7, the medium flow path in the present embodiment is formed in a state where it is connected to a working fluid supply circuit 61 that sends a working fluid to the working fluid supply nozzle 20. The medium tank 58, that is, the processing liquid tank, stores the processing liquid supplied to the wire 18 during processing. The machining fluid is supplied to the wire 18 from the machining fluid supply nozzle 20 during machining, and the machining fluid that has flowed downward is collected by the machining fluid collection pan 55. In the processing fluid recovery pan 55,
An outlet 55a is provided, and a pump 56 is connected downstream of the outlet 55a. Then, the working fluid flowing into the working fluid collection pan 55 is sent out to the medium tank 58 by the pump 56. The working fluid in the medium tank 58 is
Heat exchanger 5 with temperature controller 49 by pump 48
After being supplied to 0 and heated or cooled to a predetermined temperature, it is circulated again to the medium tank 58.

The working fluid in the medium tank 58 is supplied to the connecting rib 35 and the working fluid supply nozzle 2 by the pump 57.
Transported to zero. The working fluid conveyed to the connecting rib 35 is
It flows through the through hole 37 provided in the connecting rib 35 and
5 is heated or cooled, and the medium tank 5 is
Collected to 8. On the other hand, the working fluid supplied to the working fluid supply nozzle 20 is supplied to the wire 18 and functions as a working fluid when the work 22 is cut. Thereafter, the fluid flows into the machining fluid recovery pan 55 and is discharged by the pump 56 into the outlet 55.
a to the medium tank 58.

As described above, in the present embodiment,
As a medium, a liquid different from the processing liquid is not separately flowing,
The same liquid as the processing liquid such as oil is also used as the medium. Thus, it is not necessary to provide another liquid tank, a pipe, or the like for the medium, and the circuit and the pipe configuration can be simplified.

Next, a specific operation of the wire saw having the above configuration will be described. For example, a case will be described in which the connecting rib 35 thermally expands due to the heat of the working fluid whose temperature has increased due to the processing of the work 22 and the left and right spindle bracket ribs 33 and 34 of the bracket 14 are deformed outward. When the bracket 14 is opened outward,
The displacement sensor 39 detects that the distance from the reference gauge 40 is short, that is, that the spindle bracket rib 33 has moved outward.

The displacement information detected by the displacement sensor 39 during machining is sequentially or at predetermined time intervals.
1 to the control unit 52 and the temperature controller 49. If the information from the amplifier 51 indicates that the spindle bracket rib 33 has opened outward, the temperature controller 49 controls the heat exchanger 50 so as to lower the temperature of the working fluid in the medium tank 58. I do. On the other hand, the control unit 52
Turns the motor 53 to open the flow control valve 54 and increases the flow rate of the machining fluid passing through the flow control valve 54.

Then, the working fluid whose temperature has dropped flows through the through hole 37 of the connecting rib 35 to cool the connecting rib 35. At this time, the connecting rib 35 cooled by the working fluid
Is reduced in length due to heat shrinkage. Since both ends of the connection rib 35 are connected to the left and right spindle bracket ribs 33 and 34 as described above, the contraction of the connection rib 35 causes the left and right spindle bracket ribs 33 and 34 to contract.
Are deformed in a direction to attract each other.

Further, the working fluid whose temperature has decreased is supplied to the wire 18 from the working fluid supply nozzle 20. The working fluid supplied at this time is supplied by the operation of the temperature controller 49 at a temperature lower than that at the first time. When the displacement detected by the displacement sensor 39 does not detect the predetermined value, that is, the deformation of the bracket 14,
Based on the displacement information from the amplifier 51, the control unit 52 rotates the motor 53 to close the flow control valve 54.

As described above, the amount of deformation of the bracket 14 detected by the displacement sensor 39 is fed back to the temperature and the flow rate of the working fluid to control the thermal expansion of the connecting rib 35, so that the shape of the bracket 14 is made suitable. Processing can be performed while maintaining a proper state.

In the above specific example, the amplifier 51
Is transmitted to both the control unit 52 and the temperature controller 49 sequentially or at predetermined time intervals, but may be a mechanism that transmits only to either the control unit 52 or the temperature controller 49. . For example, it is also possible to adopt a configuration in which the temperature of the processing liquid in the medium tank 58 is adjusted by the temperature controller 49 and the heat exchanger 50 without providing the control unit 52, the motor 53, and the flow control valve 54. Further, the temperature controller and the heat exchanger for the medium may be provided separately from those for supplying the working fluid.

As described above, in this embodiment, when it is detected that the spindle bracket rib 33 is deformed outward, the working fluid whose temperature has decreased by the action of the temperature controller 49 is used. It is supplied from the processing liquid supply nozzle 20. As a result, the connection rib 3
5, the temperature of the working fluid scattered on the cooling water drops, and the connecting rib 35
In addition to cooling from the inside by the machining fluid flowing through the through hole 37, the factor that raises the temperature from the outside is removed, so that the heat can be effectively contracted.

Further, although a specific description is omitted, it is assumed that the spindle bracket rib 33 is deformed outward due to a cold wire saw device such as an early morning operation in winter. The working fluid whose temperature has risen is supplied from the working fluid supply nozzle 20 by the operation of the temperature controller 49. As a result, the temperature of the working fluid that scatters on the connecting rib 35 during processing increases, and
Is heated not only from the inside by the machining fluid flowing through the through-hole 37, but also from the outside, so that it can be thermally expanded effectively.

In the first and second embodiments, the reference gauge 40 is provided on the upper surface of the left spindle bracket rib 33 as shown in FIG.
Although the case where the displacement sensor 39 is provided on the left side of 1 is described, the present invention is not limited to this. For example, reference gauges may be provided on the upper surfaces of the left and right spindle bracket ribs 33 and 34, and displacement sensors may be provided on both left and right sides of the work support mechanism 21.

As described above, the invention according to the present application is characterized in that two opposed spindle bracket ribs 33, 3 are provided.
By means of the spindle bracket ribs 33, 34 of the bracket 14 having a plurality of working rollers 4, a plurality of processing rollers 15, 1
6, 17 are rotatably supported, and a wire 18 is spirally wound around the plurality of processing rollers 15, 16, 17 so that the wire 18 travels in the line direction. In the state, the work support mechanism 2 on which the work 22 is mounted
1 towards the wire 18,
In the wire saw for cutting the work 22, a displacement sensor 39 is provided on the work support mechanism 21, and the displacement sensor 39 is provided above at least one of the two spindle bracket ribs 33, 34. A reference gauge 40 is provided at a position opposed to the above, and a connecting rib 35 is provided between the two spindle bracket ribs 33 and 34.
By measuring the distance to the reference gauge 40, the displacement of the bracket 14 is detected, and the displacement sensor 39 is detected.
Is a wire saw that controls the interval between the two spindle bracket ribs 33 and 34 by cooling or heating the connecting rib 35 based on the detection result of the above.

The above-mentioned measurement and control are performed during the processing of the work 22.

Further, the connecting rib 35 is a wire saw provided with a through hole 37 for cooling or heating the connecting rib 35 by flowing a medium through the through hole 37.

Further, the wire saw is characterized in that the connection rib 35 is cooled or heated by adjusting the temperature or flow rate of the medium based on the detection result of the displacement sensor 39.

Further, the wire saw is characterized in that the medium is a working fluid.

The reference gauge 40 is mounted on the bracket 14
And a material constituting the reference gauge 40 having a smaller coefficient of thermal expansion than a material constituting the bracket 14.

Further, the wire saw is characterized in that the surface of the connecting member 35 is covered with a cover 60 so that the working liquid is not directly applied to the connecting member 35.

[0076]

As described above, according to the present invention, it is possible to measure the change in the relative position between the workpiece-side displacement sensor and the bracket-side displacement detection member supporting the processing roller during the processing. . Thus, the displacement of the spindle bracket rib can be detected, and the displacement of the left and right spindle bracket ribs can be controlled by cooling or heating the connecting rib based on the detected value. As a result, the displacement of the processing roller can be suppressed, and the position of the wire with respect to the work can be suppressed, so that processing can be performed while maintaining the straightness of the work with high accuracy from the start to the end of processing. It can be carried out.

[Brief description of the drawings]

FIG. 1 is a perspective view of a wire saw device according to the present invention.

FIG. 2 is a front view of the wire saw according to the present invention.

FIG. 3 is a side view of the wire saw according to the present invention.

FIG. 4 is a plan view of a wire saw according to the present invention.

FIG. 5 is a perspective view showing a connecting rib according to the present invention.

FIG. 6 is a schematic diagram illustrating a flow path of a medium according to the first embodiment.

FIG. 7 is a schematic diagram illustrating a flow path of a medium according to the second embodiment.

FIG. 8 is a plan view showing a connection structure between a bracket and a connection rib.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 11 ... Device base 12 ... Column 13 ... Cutting mechanism 14 ... Bracket 15, 16, 17 ... Processing roller 15a, 16a, 17a ... Annular groove 18 ... Wire 19 ... Wire running motor 20 ... Processing liquid supply nozzle 21 ... Work Supporting mechanism 22 Workpiece 23 Workpiece elevating motor 24 Reel mechanism 25 Feeding reel 26 Winding reel 27, 28 Reel rotation motor 29 Traverse mechanism 30 Tension holding mechanism 31 Guide mechanism 32 Guide roller 33 , 34 ... Spindle bracket rib 35 ... Connecting rib 35a ... Bottom part 35b ... Left and right side wall part 36 ... Substrate part 37 ... Through hole 38 ... Arm member 39 ... Displacement sensor 40 ... Reference gauge 41 ... Intermediate plate 42 ... Mounting plate 42a ... Engagement Arm 43a: locking portion 43b: back plate 44: azimuth adjustment mechanism 45: fixed 46 ... Pump 47 ... Pump 48 ... Pump 49 ... Temperature controller 50 ... Heat exchanger 51 ... Amplifier 52 ... Control unit 53 ... Motor 54 ... Flow rate control valve 55 ... Working fluid collection pan 55a ... Discharge port 56 ... Pump 57 ... Pump 58 ... Medium tank 59 ... Receiving pan 60 ... Cover 61 ... Processing fluid supply circuit.

 ────────────────────────────────────────────────── ─── Continuing from the front page (72) Inventor Masafumi Aoki 1 Shinmeicho, Yokosuka-shi, Kanagawa F-term in Hihei Toyama Technical Center Co., Ltd. 3C058 AA05 AA07 AA13 AA14 AB04 AC02 AC04 BA02 BA07 BA08 CA01 CA04 CA05 CB01 DA03 3C069 AA01 BA06 BB03 CA03 CA04 EA01

Claims (7)

[Claims] 1. A plurality of rollers are rotatably supported by a side wall of a bracket having two opposing side walls, and a wire is spirally wound over the plurality of rollers. In a state where the wire is moved in the line direction, a work supporting mechanism on which a work is mounted is moved toward the wire, so that a wire saw for cutting the work is provided. A displacement detection member is provided at a position facing the displacement sensor above at least one of the two side walls, and a connection member is provided between the two side walls. The displacement of the bracket is detected by measuring a distance from the displacement detection member, and the connection member is cooled based on the detection result by the displacement sensor. By heating a wire saw, characterized in that to control the distance between the two side walls. 2. The wire saw according to claim 1, wherein the measurement and the control are performed during the processing of the work. 3. The connection member according to claim 1, wherein the connection member has a medium passage, and the connection member is cooled or heated by flowing a medium through the medium passage. Wire saw. 4. The wire saw according to claim 3, wherein the connection member is cooled or heated by adjusting a temperature or a flow rate of the medium based on a result of the detection by the displacement sensor. 5. The wire saw according to claim 3, wherein the medium is a working fluid. 6. The displacement detection member is formed of a member separate from the bracket, and a material constituting the displacement detection member has a smaller coefficient of thermal expansion than a material constituting the bracket. The wire saw according to any one of claims 1 to 5, characterized in that: 7. The wire saw according to claim 1, wherein a surface of the connecting member is covered with a cover so that a working liquid is not directly applied to the connecting member.