JP6783490B1 - Drive device and fluid pressure drive valve - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a drive device and a fluid pressure drive valve which can detect a state inside a cylinder and can improve the accuracy of abnormality diagnosis and predictive maintenance. SOLUTION: A drive device 12 is provided with a cylindrical cylinder 120 covered at both ends, a pair of pistons 122A and 122B provided in the cylinder 120 so as to be reciprocally linearly movable, and connected via a piston rod 121, and a piston. A coil spring 123 provided on one side, an air supply / discharge port 124 formed on the other side of the piston, and drive state sensors 49 arranged at both ends of the cylinder 120 in the sliding direction of the piston rod 121. To be equipped. [Selection diagram] Fig. 2

Description

The present invention relates to a drive device and a fluid pressure drive valve.

Conventionally, various methods and means for diagnosing an abnormality as to whether or not an abnormality has occurred in an actuator are known. For example, Patent Document 1 discloses an actuator including a sensor that detects the position of a piston with respect to a cylinder.

Japanese Unexamined Patent Publication No. 2015-14990

In order to improve the operating rate and reliability of the actuator and various systems to which the actuator is applied, not only post-maintenance to grasp the abnormality when an abnormality occurs, but also predictive maintenance to grasp the signs of the abnormality should be performed. It is hoped that it will be realized. However, although the actuator disclosed in Patent Document 1 detects the position of the piston with respect to the cylinder as described above, the sensor is arranged on the outer peripheral surface of the cylinder. Therefore, the state inside the cylinder cannot be directly detected, and there is a risk that the accuracy of abnormality diagnosis and predictive maintenance will deteriorate.

The present invention has been made in view of such circumstances, and is capable of detecting the state inside the cylinder, and improving the accuracy of abnormality diagnosis and predictive maintenance of the drive device and fluid pressure. The purpose is to provide a drive valve.

The present invention solves the above problems, and the drive device according to the embodiment of the present invention is
A cylindrical cylinder that covers both ends,
A pair of pistons provided in the cylinder so as to be reciprocally linearly movable and connected via a piston rod,
A drive state sensor arranged at one end or both ends of the cylinder in the sliding direction of the piston rod.
To be equipped.

Further, the fluid pressure drive valve according to the embodiment of the present invention is
Main valve and
The drive device that drives the main valve and
A solenoid valve that controls the supply and discharge of the driving fluid to the driving device,
At least prepare.

According to the drive device and the fluid pressure drive valve according to the embodiment of the present invention, the drive state sensors are arranged at one end or both ends in the cylinder in the sliding direction of the piston rod. The drive state sensor measures, for example, the position of the piston with respect to the cylinder, the acceleration of the cylinder, the temperature and humidity in the cylinder, and the like as the state of the drive device. Therefore, when the drive device and the fluid pressure drive valve are provided with the drive state sensor, it is possible to monitor the state inside the cylinder, and it is possible to improve the accuracy of abnormality diagnosis and predictive maintenance.

It is sectional drawing which shows an example of the fluid pressure drive valve 10 which concerns on embodiment of this invention. It is the schematic which shows the example of the drive device which concerns on embodiment of this invention. It is sectional drawing which shows an example of the solenoid valve 1 which concerns on embodiment of this invention. It is a block diagram which shows an example of the solenoid valve 1 which concerns on embodiment of this invention. It is a schematic diagram which shows the mounting example of a plurality of sensors 4 on the substrate 5 which concerns on embodiment of this invention.

Hereinafter, an embodiment of the present invention will be described with reference to the accompanying drawings.

(Embodiment)
FIG. 1 is a cross-sectional view showing an example of a fluid pressure drive valve 10 according to an embodiment of the present invention.

The fluid pressure drive valve 10 opens and closes the main valve 11 by driving the main valve 11 arranged in the middle of the pipe 100 and the valve shaft 13a connected to the main valve 11 according to the fluid pressure of the driving fluid. The drive device 12 is provided, and the solenoid valve 1 having a function of controlling the supply and discharge of the drive fluid to the drive device 12 is provided.

The fluid pressure drive valve 10 is installed in, for example, a pipe 100 through which various gases, oil, etc. flow in the plant equipment, and is an emergency shutoff for shutting off the flow of the pipe 100 in the event of an emergency stop such as when an abnormality occurs in the plant equipment. Used as a valve. The installation location and application of the fluid pressure drive valve 10 are not limited to the above examples.

Air (air) A is supplied to the fluid pressure drive valve 10 from the air supply source 14 as an example of the drive fluid, and the air A from the air supply source 14 is passed through the first air pipe 140. Is supplied to the solenoid valve 1, and is further supplied to the drive device 12 via the second air pipe 141. Further, the fluid pressure drive valve 10 includes a communication cable 150 for transmitting and receiving various data between the external device 15 and the solenoid valve 1, and a power cable 160 for supplying electric power from the external power supply 16 to the solenoid valve 1. And are connected. The driving fluid is not limited to the above-mentioned air A, and may be another gas or a liquid (for example, oil).

The external device 15 is composed of, for example, a computer for plant management (including a local server and a cloud server), a diagnostic computer used by a maintenance inspector, or an external storage unit such as a USB memory or an external HDD. There is. The communication between the external device 15 and the solenoid valve 1 may be wireless communication.

In the present embodiment, the fluid pressure drive valve 10 adopts an airless closing method. Therefore, during steady operation, the main valve 11 is fully opened by supplying air A (air supply) from the air supply source 14 to the drive device 12 via the solenoid valve 1, and during emergency stop or test operation. The main valve 11 is fully closed by discharging air A (exhaust) from the drive device 12 via the solenoid valve 1. The fluid pressure drive valve 10 may adopt an airless open system. In that case, the fluid pressure drive valve 10 is fully opened by supplying air A to the drive device 12, and the air A is discharged from the drive device 12. The main valve 11 may be fully closed.

The main valve 11 is composed of, for example, a valve called a ball valve. As a configuration example thereof, the main valve 11 includes a valve box 110 arranged in the middle of the pipe 100 and a ball-shaped valve body 111 rotatably provided in the valve box 110, and is an upper portion of the valve body 111. A valve shaft 13a is connected to the valve shaft 13a. The valve body 111 rotates in the valve box 110 in response to the valve shaft 13a being rotated from 0 degrees to 90 degrees, and the main valve 11 is switched between a fully open state (state shown in FIG. 1) and a fully closed state. Be done. The valve used as the main valve 11 is not limited to the ball valve, and may be another type such as a butterfly valve.

The drive device 12 is arranged between the main valve 11 and the solenoid valve 1, for example, and is configured as a single-actuated air cylinder mechanism. As a configuration example thereof, the drive device 12 has a spring chamber 127 and a cylinder chamber 128, and is provided with a cylindrical cylinder 120 covering both ends so as to be reciprocally linearly movable in the cylinder, and is connected via a piston rod 121. Air connected to the pair of pistons 122A and 122B, the coil spring 123 provided in the spring chamber 127 formed on the first piston 122A side, and the cylinder chamber 128 formed on the second piston 122B side. A transmission mechanism 125 provided at a portion where the supply / discharge port 124, a spindle 13b arranged so as to penetrate the cylinder 120 along the radial direction, and the piston rod 121 are orthogonal to each other, and a cylinder in the sliding direction of the piston rod 121. A drive state sensor 49 arranged at one end or both ends of the 120 is provided. The drive device 12 is not limited to the single-acting type, and may be configured in another form such as a double-acting type. In the case of the double operation type, an air supply / exhaust port connected to the space surrounded by the first piston 122A and the cylinder 120 is formed in the cylinder 120, and air supply separately provided from the solenoid valve 1 instead of the coil spring 123 is provided. The exhaust path may be connected to the air supply / exhaust port.

The first piston 122A is urged in the direction of closing the main valve 11 by the coil spring 123 provided in the spring chamber 127. The second piston 122B is pressed in the direction of opening the main valve 11 against the urging force of the coil spring 123 by the air A (air supply) supplied from the air supply / exhaust port 124 to the cylinder chamber 128. The transmission mechanism 125 is composed of, for example, a rack and pinion mechanism, a scotch yoke mechanism, a link mechanism, a cam mechanism, etc., and converts the reciprocating linear motion of the piston rod 121 into rotation and transmits it to the spindle 13b of the drive device 12. To do.

FIG. 2 is a schematic view showing an example of a drive device 12 to which the machine learning device or the like according to the embodiment of the present invention is applied. FIG. 2A shows an example in which the transmission mechanism 125 is a rack and pinion mechanism, and FIG. 2B shows an example in which the transmission mechanism 125 is a Scotch yoke mechanism.

For example, when the transmission mechanism 125 is a rack and pinion mechanism, the piston 122 and the piston rod 121 make a reciprocating linear motion by supplying air to the cylinder 120 or exhausting the air A from the cylinder 120. Then, the rack 125a, which moves in the same manner as the piston rod 121, makes a reciprocating linear motion. Subsequently, the pinion 125b that contacts and meshes with the rack 125a rotates. Then, the spindle 13b, which rotates in the same manner as the pinion 125b, rotates.

When the transmission mechanism 125 is a Scotch yoke mechanism, the piston 122 and the piston rod 121 make a reciprocating linear motion by supplying air to the cylinder 120 or exhausting the air A from the cylinder 120. Then, the shaft 125c, which moves in the same manner as the piston rod 121, makes a reciprocating linear motion. Subsequently, the yoke 125d that is eccentrically contacted with the shaft 125c and assembled is rotated. Then, the spindle 13b, which rotates in the same manner as the yoke 125d, rotates.

The drive device 12 has stoppers 126A and 126B that regulate the movements of the pistons 122A and 122B, respectively. In the example shown in FIGS. 2A and 2B, the stoppers 126A and 126B are formed by bolts installed on the piston rod 121 shaft of the cylinder cases 120A and 120B. A drive state sensor 49 that detects at least one state in the cylinder 120 can be attached to at least one of the stoppers 126A and 126B. The drive state sensor 49 may be arranged at at least one end (one end or both ends) in the cylinder 120 in the sliding direction of the piston rod 121 as shown by the broken line in the drawing.

As described above, in the drive device 12 according to the embodiment of the present invention, the drive state sensor 49 for detecting at least one state in the cylinder 120 is attached to at least one of the stoppers 126A and 126B, whereby the cylinder 120 At least one of the states can be detected directly. Therefore, at least one state in the cylinder 120 can be detected with high accuracy.

The drive state sensor 49 may be, for example, a position sensor 491, an acceleration sensor 492, a temperature / humidity sensor 493, or the like.

The position sensor 491 detects the position of the piston 122 or the piston rod 121 with respect to the cases 120A and 120B of the cylinder 120. The position sensor 491 is composed of an ultrasonic sensor, an infrared sensor, a hall sensor, a lead sensor, and the like. In the drive device 12, a large torque is applied to the contact portion between the cylinder 120 and the piston 122 whose relative position changes due to high-pressure air, and the contact portion of the transmission mechanism 125 that converts reciprocating linear motion into rotation, resulting in wear and deterioration. Or, there is a risk of abnormalities such as damage. Therefore, by detecting the position of the piston 122 with respect to the cylinder 120 and grasping the abnormality of the contact portion of the transmission mechanism 125, the accuracy of the abnormality diagnosis and the predictive maintenance can be improved. The position sensor 491 of the present embodiment is attached to the stoppers 126A and 126B, but may be attached to the cases 120A and 120B of the cylinder 120.

The acceleration sensor 492 detects the acceleration generated in the cylinder 120. Specifically, the acceleration sensor 492 includes vibration of the cylinder 120 generated when the piston 122 reciprocates linearly in the cylinder 120 and vibration of the cylinder 120 generated when the piston 122 collides with the stoppers 126A and 126B ( Impact) is detected as the acceleration of the cylinder 120. As the input pressure of the cylinder 120 increases, an abnormally fast jumping operation may repeatedly occur. At that time, a larger impact force is repeatedly generated on the piston rod 121 and the stoppers 126A and 126B than during normal operation. This impact force may damage the cylinder cases 120A and 120B. Therefore, by detecting the acceleration of the piston 122 or the piston rod 121 with respect to the cylinder cases 120A and 120B and grasping the abnormal vibration of the cylinder 120, the accuracy of the abnormality diagnosis and the predictive maintenance can be improved. Although the acceleration sensor 492 of the present embodiment is attached to the stoppers 126A and 126B, it may be attached to the cases 120A and 120B of the cylinder 120, and the attachment position to the stoppers 126A and 126B may be changed as appropriate, for example, the stopper. Instead of the base end portion of the 126A (see FIG. 2B), it may be attached to the tip end portion of the stopper 126A.

The temperature / humidity sensor 493 is attached to, for example, a tap hole formed in the cylinder 120, and detects the temperature and humidity of the air in the cylinder 120. The temperature / humidity sensor 493 is configured by combining a temperature sensor that detects temperature and a humidity sensor that detects relative humidity. As shown in FIG. 2, when the drive device 12 is a single-acting type, the air supply / discharge port 124a is connected to the solenoid valve 1, and the air supply / discharge ports 124b and 124c are open to the external environment. Therefore, the temperature / humidity sensor 493 detects the temperature and humidity of the air A (driving fluid) supplied / discharged from the solenoid valve 1 to the cylinder 120 via the air supply / discharge port 124a, and also supplies / discharges air from the external environment. The temperature and humidity of the outside air (outside air) supplied and discharged into the cylinder 120 via the ports 124b and 124c are detected. When the drive device 12 is a double-actuated type, the air supply ports 124a and 124b are connected to the electromagnetic valve 1 and the second piston 122B is defined from the electromagnetic valve 1 via the air supply ports 124a and 124b. Since air A is alternately supplied or exhausted to the left and right air chambers formed in the cylinder 120 and the air supply / exhaust port 124c is open to the external environment, the temperature / humidity sensor 493 is an electromagnetic valve. The temperature and humidity of the air A (driving fluid) supplied / discharged from 1 to the cylinder 120 via the air supply / discharge ports 124a and 124b are detected, and the temperature and humidity of the air A (driving fluid) are detected from the external environment into the cylinder 120 via the air supply / discharge port 124c. Detects the temperature and humidity of the supplied and discharged outside air (outside air). Condensation may occur in the cylinder 120 depending on the relative humidity. Depending on the state of dew condensation, rust and corrosion may occur in the cylinder 120, causing various malfunctions. Therefore, by detecting the temperature and humidity of the air in the cylinder 120 and grasping the relative humidity, it is possible to improve the accuracy of abnormality diagnosis and predictive maintenance. The temperature / humidity sensor 493 of the present embodiment is attached to the cases 120A and 120B of the cylinder 120, but may be attached to the stoppers 126A and 126B.

The valve shaft 13a of the main valve 11, the main shaft 13b of the drive device 12, and the shaft 13c of the solenoid valve 1 are each formed into a shaft shape in a rotatable state. The spindle 13b of the drive device 12 is arranged so as to penetrate the drive device 12. The valve shaft 13a of the main valve 11 and the shaft 13c of the solenoid valve 1 are linearly connected to the main shaft 13b of the drive device 12 via a coupling or the like, and rotate in synchronization with the drive.

The solenoid valve 1 has a function of controlling the supply and discharge of air A to the drive device 12, and is, for example, a three-way solenoid valve of a normally closed type (“open” when energized, “closed” when not energized) at two positions. It is configured as. The solenoid valve 1 has a spool portion 2 that switches the flow path through which the air A flows inside the accommodating portion 6 that functions as a housing of the indoor type or explosion-proof type solenoid valve 1, and is in an energized state (when energized or not energized). It is provided with a solenoid unit 3 that displaces the spool unit 2 accordingly. The solenoid valve 1 is not limited to a two-position, normally closed type three-way solenoid valve, but may be a three-position solenoid valve, a normally open type, a four-way solenoid valve, or the like, and is composed of various formations based on any combination. You may be. Further, in the present embodiment, the solenoid valve 1 is used as a pilot valve in the fluid pressure drive valve 10, but the application of the solenoid valve 1 is not limited to this.

The spool portion 2 has an input port 20 connected to the air supply source 14 via the first air pipe 140, an output port 21 connected to the drive device 12 via the second air pipe 141, and a drive device. It is provided with an exhaust port 22 for discharging the air from 12.

The solenoid unit 3 displaces the spool unit 2 so as to communicate between the input port 20 and the output port 21 when energized, and communicates between the output port 21 and the exhaust port 22 when the power is off. , The spool portion 2 is displaced.

Therefore, when the solenoid valve 1 is energized, the air A (air supply) from the air supply source 14 is the first air pipe 140, the input port 20, the output port 21, and the second air pipe 141. The second piston 122B is pressed and the coil spring 123 is compressed by flowing in this order and being supplied to the air supply / discharge port 124. Then, when the valve shaft 13a of the main valve 11 connected to the main shaft 13b by the connector is rotated via the piston rod 121 and the transmission mechanism 125 by the amount that the piston rod 121 moves according to the compression of the coil spring 123. The valve body 111 rotates in the valve box 110, and the main valve 11 is operated in the fully opened state.

On the other hand, when the solenoid valve 1 is in the non-energized state, the air A (exhaust) in the cylinder 120 flows from the air supply / exhaust port 124 to the second air pipe 141, the output port 21, and the exhaust port 22 in this order. By being discharged to the outside air, the pressing force of the second piston 122B is reduced, and the coil spring 123 is restored from the compressed state. Then, when the valve shaft 13a of the main valve 11 connected to the main shaft 13b by the connector is rotated by the amount that the piston rod 121 moves in response to the restoration of the coil spring 123, the inside of the valve box 110 The valve body 111 rotates and the main valve 11 is operated in a fully closed state.

(About the configuration of the solenoid valve)
FIG. 3 is a cross-sectional view showing an example of the solenoid valve 1 according to the embodiment of the present invention.

In addition to the spool portion 2 and the solenoid portion 3 described above, the solenoid valve 1 includes a plurality of sensors 4 for acquiring the state of each portion of the solenoid valve 1 and a substrate 5 on which at least one of the plurality of sensors 4 is mounted. A spool portion 2, a solenoid portion 3, a plurality of sensors 4, and a housing portion 6 for accommodating the substrate 5 are provided.

The accommodating unit 6 is adjacent to the first accommodating unit 60 accommodating the spool unit 2 and the first accommodating unit 60, and also accommodates the solenoid unit 3, the plurality of sensors 4, and the substrate 5. A terminal box 62 to which the communication cable 150 and the power cable 160 are connected is provided. The first accommodating portion 60 and the second accommodating portion 61 are made of a metal material such as aluminum.

The first accommodating portion 60 has openings (not shown) that function as input ports 20, output ports 21, and exhaust ports 22, respectively.

The second housing portion 61 includes a cylindrical housing 610 in which both ends (first housing end portion 610a and second housing end portion 610b) are open, a body 611 arranged inside the housing 610, and a second housing portion 61. A solenoid cover 612 that covers the solenoid portion 3 fixed to the housing end portion 610a of 1 from the outside air, and a terminal box cover 613 that covers the terminal box 62 fixed to the second housing end portion 610b from the outside air are provided.

The housing 610 is formed on the shaft insertion port 610c formed in the lower part thereof and into which the shaft 13c is inserted, the body insertion port 610d formed in the upper part thereof and into which the body 611 is inserted, and the second housing end portion 610b side. It has a cable insertion port 610e into which the communication cable 150 and the power cable 160 are inserted.

The first accommodating portion 60 and the second accommodating portion 61 are branched from the input side flow path 26 so as to penetrate the body 611, and between the input side flow path 26 and the first pressure sensor 40. A first flow path 63 that communicates, a second flow path 64 that branches from the output side flow path 27 and communicates between the output side flow path 27 and the second pressure sensor 41, a spool portion 2 and a solenoid. A spool flow path 65 through which air A for interlocking with the portion 3 flows is formed.

The spool portion 2 includes a spool hole 23 formed in a second accommodating portion 61 that functions as a spool case, a spool valve 24 that is movably arranged in the spool hole 23, and a spool that urges the spool valve 24. The spring 25, the input side flow path 26 communicating between the input port 20 and the spool hole 23, the output side flow path 27 communicating between the output port 21 and the spool hole 23, the exhaust port 22 and the spool hole 23. It is provided with an exhaust flow path 28 that communicates between the two.

The solenoid unit 3 is arranged in a solenoid case 30, a solenoid coil 31 housed in the solenoid case 30, a movable iron core 32 movably arranged in the solenoid coil 31, and a fixed state in the solenoid coil 31. A fixed iron core 33 and a solenoid spring 34 for urging the movable iron core 32 are provided.

When the solenoid valve 1 is switched from the non-energized state to the energized state, the solenoid coil 31 generates an electromagnetic force when the coil current flows through the solenoid coil 31 in the solenoid unit 3, and the movable iron core is generated by the electromagnetic force. When the 32 is sucked into the fixed iron core 33 against the urging force of the solenoid spring 34, the flow state of the air A flowing through the spool flow path 65 is switched. Then, in the spool portion 2, the flow state of the air A flowing through the spool flow path 65 is switched, so that the spool valve 24 is moved against the urging force of the spool spring 25, so that the input port 20 and the exhaust are exhausted. The state of communicating with the port 22 can be switched to the state of communicating with the input port 20 and the output port 21.

The substrate 5 includes a first substrate 50 arranged so that the substrate surfaces 500A and 500B are arranged along the shaft 13c inserted from the shaft insertion port 610c, and a second substrate 51 arranged close to the terminal box 62. , A third substrate 52 arranged close to the solenoid unit 3 is provided.

Of the substrate surfaces 500A and 500B of the first substrate 50, the body 611, the solenoid unit 3, and the third substrate 52 are arranged on the first substrate surface 500A side. The second substrate 51 and the terminal box 62 are arranged on the second substrate surface 500B side opposite to the first substrate surface 500A side.

The sensor 4 mounted on the first substrate 50 includes, for example, a first pressure sensor 40 that measures the fluid pressure of air A flowing through the input side flow path 26 and the first flow path 63, and an output side flow path. The electromagnetic valve 1 is passed through the main shaft 13b of the drive device 12 by the rotation of the main valve 11 from the valve shaft 13a and the second pressure sensor 41 that measures the fluid pressure of the air A flowing through the 27 and the second flow path 64. Includes a main valve opening sensor 42 that measures the rotation angle when the shaft 13c of the shaft 13c rotates and acquires valve opening information of the main valve 11 according to the rotation angle. As a result, the first pressure sensor 40, the second pressure sensor 41, and the main valve opening sensor 42 are integrated on one substrate (first substrate 50), so that the solenoid valve 1 and the fluid pressure drive valve 10 are integrated. The monitoring function required to properly diagnose whether or not the sensor has operated normally can be realized with a simple configuration.

The main valve opening sensor 42 is composed of, for example, a magnetic sensor, measures the magnetic strength generated by the permanent magnet 131 attached to the shaft 13c, and determines the magnetic strength of the main valve 11 according to the magnetic strength. Acquire valve opening information.

The main valve opening sensor 42 is located at a position facing the outer periphery of the shaft 13c in the first board surface 500A of the first board 50 arranged along the shaft 13c inserted from the shaft insertion port 610c. It is placed in. As a result, the main valve opening sensor 42 mounted on the first substrate 50 and the shaft 13c can be arranged close to each other in the accommodating portion 6 without wasting the arrangement space. The valve opening information can be accurately acquired.

The main valve opening degree sensor 42 is mounted on the first substrate 50 closer to the shaft insertion port 610c than the first pressure sensor 40 and the second pressure sensor 41. As a result, the first flow path 63 communicating with the first pressure sensor 40 and the second flow path 64 communicating with the second pressure sensor 41 are separated from the main valve opening sensor 42 and the shaft 13c. Since it is arranged at the position, the shape and arrangement of the first flow path 63 and the second flow path 64 can be simplified.

The sensor 4 mounted on the third substrate 52 includes, for example, a magnetic sensor 46 that measures the magnetic strength generated by the solenoid unit 3. When the solenoid valve 1 is supplied with electric power from the external power source 16, the magnetic sensor 46 determines the magnetic strength generated by the solenoid portion 3 being energized and the coil current flowing through the solenoid coil 31. measure.

FIG. 4 is a block diagram showing an example of the fluid pressure drive valve 10 according to the embodiment of the present invention. FIG. 5 is a schematic view showing an example of mounting a plurality of sensors 4 on the substrate 5 according to the embodiment of the present invention. Note that FIG. 5 does not strictly indicate the position where each sensor 4 is mounted on the substrate 5, and each sensor 4 is mounted on any of the first to third substrates 50 to 52. It shows the mounting state of the sensor.

As an example of electrical configuration, the fluid pressure drive valve 10 includes a control unit 7 for controlling the fluid pressure drive valve 10 and an external device, in addition to the above-mentioned first to third substrates 50 to 52 and a plurality of sensors 4. A communication unit (external transmission unit) 8 having a function of communicating with the 15 and a power supply circuit unit 9 connected to the external power supply 16 are provided.

The plurality of sensors 4 refer to the solenoid unit 3 in addition to the above-mentioned first pressure sensor 40, second pressure sensor 41, main valve opening sensor 42 and magnetic sensor 46 as a sensor group for measuring the physical quantity of each unit. A voltage sensor 43 for measuring the supply voltage, a current / resistance sensor 44 for measuring the current value when the solenoid unit 3 is energized and a resistance value when the solenoid unit is not energized, and a temperature sensor 45 for measuring the internal temperature of the accommodating unit 6. It includes a drive state sensor 49 that measures the state of the drive device 12.

In addition, the plurality of sensors 4 measure at least one of the total energization time for the solenoid unit and the current energization continuous time as the operation time of the solenoid unit 3 as a sensor group for acquiring information on the operation history of each unit. A total of 47 and an operation counter 48 for counting the number of operations of each of the solenoid valve 1, the drive device 12, and the main valve 11 are provided.

The control unit 7 processes information indicating the state of each part of the fluid pressure drive valve 10 acquired by the plurality of sensors 4, and energizes the microcontroller 70 that controls each part of the fluid pressure drive valve 10 and the solenoid unit 3. It includes a valve test switch 71 that controls the state and opens and closes the main valve 11 during a test operation.

The microcontroller 70 is a processor such as a CPU (Central Processing Unit) (
It includes an internal storage unit 702 composed of a ROM (Read Only Memory), a RAM (Random Access Memory), and the like (not shown).

The internal storage unit 702 contains a set value when the fluid pressure drive valve 10 operates, temporary storage data when the fluid pressure drive valve 10 operates, and a fluid pressure drive valve that controls the operation of the fluid pressure drive valve 10. The control program etc. are stored.

The processor of the microcontroller 70 executes a monitoring process for monitoring the state of each part of the fluid pressure drive valve 10 by a plurality of sensors 4 by executing a fluid pressure drive valve control program stored in the internal storage unit 702. It functions as an abnormality determination unit 701 that determines whether or not an abnormality has occurred in the drive device 12 based on the state of the drive device 12 measured by the processing unit 700 and the drive state sensor 49.

During steady operation, the monitoring processing unit 700 is at least one of the plurality of sensors 4 regardless of whether or not the main valve 11 is opened / closed (hereinafter, referred to as “first monitored sensor 4A”). Is used to execute the "first monitoring process" for monitoring the state of the fluid pressure drive valve 10. Further, the monitoring processing unit 700 uses at least one of the plurality of sensors 4 (hereinafter, referred to as “second monitored sensor 4B”) during unsteady operation in which the main valve 11 is opened and closed. The "second monitoring process" for monitoring the state of the fluid pressure drive valve 10 is executed. The first monitored sensor 4A is, for example, all of the plurality of sensors 4 (first pressure sensor 40, second pressure sensor 41, main valve opening sensor 42, voltage sensor 43, current / resistance sensor 44). , Temperature sensor 45, magnetic sensor 46, operating time total 47, operation counter 48, and drive state sensor 4
9), but is not limited to these examples. Further, the second monitoring target sensor 4B is, for example, the second pressure sensor 41 and the main valve opening degree sensor 42, but is not limited to these examples.

In the first monitoring process, the monitoring processing unit 700 obtains the state of the fluid pressure drive valve 10 acquired by the first monitored sensor 4A in the first sampling period (for example, every 10 seconds) as the first acquired data. The first acquired data is sequentially transmitted to the external device 15 via the communication unit 8 each time it is acquired.

In the second monitoring process, the monitoring process unit 700 performs a second sampling cycle (for example, at 10 msec intervals) shorter than the first sampling cycle during the operation period in which the fluid pressure drive valve 10 is operated. The state of the fluid pressure drive valve 10 acquired by the monitored sensor 4B is acquired as the second acquisition data, respectively. Then, the monitoring processing unit 700 internally sets the acquired data group configured by associating the second acquired data acquired within the operation period with the acquired acquisition time of each of the second acquired data as temporary storage data. It is stored in the storage unit 702. Then, the acquired data group stored in the internal storage unit 702 is transmitted to the external device 15 at a predetermined timing.

The abnormality determination unit 701 determines whether or not an abnormality has occurred in the drive device 12 by executing a plurality of abnormality determination processes for the state of the drive device 12 measured by the drive state sensor 49.

For example, in the abnormality determination unit 701, as the first abnormality determination process, the drive state sensor 49 detects the position of the piston 122 with respect to the cylinder 120 when the drive device 12 is operated, and the abnormality determination unit 701 and the detection value of the other sensor 4 at that time are used. By comparing the relative relationship of the above with the pre-stored relative relationship during normal operation, it is determined whether or not an abnormality has occurred. Further, as a second abnormality determination process, the abnormality determination unit 701 detects the acceleration generated in the drive device 12 by the drive state sensor 49, and determines whether or not an acceleration (vibration or impact) larger than that during normal operation is generated. By making a judgment, it is judged whether or not an abnormality has occurred. Further, the abnormality determination unit 701 detects the internal temperature and humidity of the drive device 12 by the drive state sensor 49 as a third abnormality determination process, and determines whether or not the relative humidity is larger than a predetermined threshold value. , Judge whether or not an abnormality has occurred. The abnormality determination unit 701 may execute the above-mentioned abnormality determination process using the data from the drive state sensor 49, or the above-mentioned abnormality determination process using the temporary storage data stored in the internal storage unit 702. May be executed.

The valve test switch 71 receives a command from the microcontroller 70 when a predetermined test operation condition is satisfied, and as a test operation, a full stroke test (hereinafter, referred to as “FST”) or a partial stroke of the solenoid valve 1 is performed. A test (hereinafter referred to as "PST") is executed.

The FST diagnoses an abnormality in the fluid pressure drive valve 10 by operating the main valve 11 from the fully open state to the fully closed state and returning it to the fully open state. The PST partially closes the main valve 11 from the fully open state to a predetermined opening state and returns it to the fully open state, without operating the main valve 11 in the fully closed state (that is, without stopping the plant equipment). , The abnormality of the fluid pressure drive valve 10 is diagnosed.

The FST and PST are executed in parallel with the second monitoring process by the monitoring process unit 700. Therefore, the fluid is determined by determining whether or not the operation is completed within a predetermined set time based on the state of the fluid pressure drive valve 10 acquired by each sensor 4 when the main valve 11 is operated. It is possible to diagnose an abnormality of the pressure drive valve 10. Further, by analyzing the time-series change of the state of the fluid pressure drive valve 10 acquired by each sensor 4 when the main valve 11 is operated (for example, comparing with the time-series change at the normal time), the fluid pressure It is possible to diagnose an abnormality of the drive valve 10.

As test operation conditions, for example, the execution time or a specific designated date and time according to the execution frequency (for example, once a year) designated as the set value of the internal storage unit 702 has arrived, or the external device 15 (for example, once a year) has arrived. , A computer for plant management), or when the test execution button (not shown) provided on the fluid pressure drive valve 10 is operated by the administrator, the test operation condition is satisfied. The test run may be executed.

The communication unit 8 is a communication modem 80 that transmits / receives data to / from the external device 15 in accordance with the HART (Highway Addressable Remote Transducer) communication standard, and a loop current controller that inputs / outputs a control current (analog signal of 4 to 20 mA). It includes 81. When the communication modem 80 converts the data to be transmitted into a frequency signal, the loop current controller 81 transmits a superimposed signal obtained by superimposing the frequency signal on the control current to the external device 15. When the loop current controller 81 receives the superimposed signal from the external device 15 and separates the frequency signal from the superimposed signal, the communication modem 80 converts the frequency signal into data to be received.

The power supply circuit unit 9 is supplied from the external power supply 16 via the power cable 160 and the reverse voltage protection circuit 90 that protects the control unit 7 from the reverse voltage generated when the power cable 160 is reversely connected to the terminal box 62. It is provided with an internal power supply circuit 91 that converts the generated electric power into a predetermined voltage and current and supplies it to each part (solute unit 3, sensor 4, substrate 5, control unit 7, communication unit 8, etc.) of the fluid pressure drive valve 10.

As shown in FIG. 5, the first substrate 50 includes a first pressure sensor 40, a second pressure sensor 41, a main valve opening sensor 42, a voltage sensor 43, a current / resistance sensor 44, a temperature sensor 45, and an operation. A time meter 47, an operation counter 48, a control unit 7, a communication modem 80, and a reverse voltage protection circuit 90 are mounted. The loop current controller 81 and the internal power supply circuit 91 are mounted on the second substrate 51. The magnetic sensor 46 is mounted on the third substrate 52. The drive state sensor 49 is attached to the drive device 12.

The plurality of sensors 4 are not limited to the above sensors 40 to 49, and may further include sensors for acquiring information on other physical quantities and operation histories, and some of these sensors 40 to 49 may be provided. It may be omitted. Further, the mounting state of the sensors 40 to 48 when the plurality of sensors 4 are mounted on the substrates 50 to 52 is not limited to the example shown in FIG. 5, and may be appropriately changed. Further, the number of substrates 5 accommodated in the accommodating portion 6 and the arrangement of the substrates 50 to 52 with respect to the accommodating portion 6 may be appropriately changed.

Further, the sensors 40 to 49 are not limited to those in which each sensor is individually provided as shown in FIGS. 4 and 5, and the specific sensor also functions as another sensor. Sensors may not be provided individually. For example, the magnetic sensor 46 measures the magnetic strength generated by the solenoid unit 3, and the current / resistance sensor 44 obtains the current value when the solenoid unit 3 is energized based on the magnetic strength. It does not have to be provided individually. Further, the microcontroller 70 may have a built-in sensor function or a part of the sensor function. For example, the microcontroller 70 has a built-in operating time meter 47 and an operation counter 48. , The operation time meter 47 and the operation counter 48 may not be provided separately.

(Other embodiments)
Although the embodiment of the present invention has been described above, the present invention is not limited to the above embodiment and can be appropriately modified without departing from the technical idea of the present invention.

For example, in the above embodiment, the drive device 12 has been described as rotating the valve shaft 13a, but the valve shaft 13a may be driven in a reciprocating linear manner. In this case, as the main valve 11 whose opening / closing operation is performed in response to the reciprocating linear drive of the valve shaft 13a, for example, a type such as a gate valve or a globe valve may be used.

Further, as a configuration of the electromagnetic valve 1 in this case, the accommodating portion 6 has a shaft insertion port into which the shaft 13c driven by the drive device 12 in a reciprocating linear manner is inserted, and the shaft 13c is driven in a reciprocating linear manner. It houses a driving force transmission mechanism (for example, a rack and pinion mechanism, a scotch yoke mechanism, a link mechanism, a cam mechanism, etc.) that rotates a rotation shaft in conjunction with the above. The substrate surface of the first substrate 50 is arranged along the rotation axis, and the main valve opening sensor 42 is located around the axis of the rotation axis of the substrate surface of the first substrate 50. It may be placed at a position facing the outer circumference, and the rotation angle of the rotation shaft may be measured in order to obtain the valve opening degree of the main valve 11.

Further, the above-mentioned driving force transmission mechanism may be arranged outside the accommodating portion 6, and in this case, a rotating shaft rotated by the driving force transmission mechanism is inserted from the shaft insertion port and at the same time. The substrate surface of the first substrate 50 is arranged along the rotation shaft inserted from the shaft insertion port, and the main valve opening sensor 42 of the shaft 13c obtains the valve opening of the main valve 11. Instead of the rotation angle, the rotation angle of the rotation shaft may be measured.

Further, in the above embodiment, the control unit 7 of the solenoid valve 1 has been described as functioning as the abnormality determination unit 701, but the abnormality determination unit 701 functions as one of the constituent elements constituting the drive device 12. However, it may be provided in a device other than the control unit 7 of the solenoid valve 1 (for example, a drive device 12, a drive device monitoring device for monitoring the state of the drive device 12, an external device 15, etc.).

As described above, according to the solenoid valve 1 and the fluid pressure drive valve 10 according to the above embodiment, the drive state sensor 49 is arranged at at least one end in the cylinder 120 in the sliding direction of the piston rod 121. The drive state sensor 49 measures, for example, the positions of the pistons 122A and 122B with respect to the cylinder 120, the acceleration of the cylinder 120, the temperature and humidity in the cylinder 120, and the like as the state of the drive device 12. Therefore, when the drive device 12 and the fluid pressure drive valve 10 are provided with the drive state sensor 49, it is possible to monitor the state inside the cylinder, and it is possible to improve the accuracy of abnormality diagnosis and predictive maintenance.

1 ... Solenoid valve, 2 ... Spool part, 3 ... Solenoid part,
4 ... Sensor, 4A ... First monitored sensor, 4B ... Second monitored sensor,
5 ... board, 6 ... accommodating unit, 7 ... control unit, 8 ... communication unit, 9 ... power supply circuit unit,
10 ... Fluid pressure drive valve, 11 ... Main valve, 12 ... Drive device,
13a ... valve shaft, 13b ... spindle, 13c ... shaft,
14 ... air supply source, 15 ... external device, 16 ... external power supply,
20 ... input port, 21 ... output port, 22 ... exhaust port,
23 ... Spool hole, 24 ... Spool valve, 25 ... Spool spring,
26 ... Input side flow path, 27 ... Output side flow path, 28 ... Exhaust flow path,
30 ... solenoid case, 31 ... solenoid coil,
32 ... Movable iron core, 33 ... Fixed iron core, 34 ... Solenoid spring,
40 ... 1st pressure sensor, 41 ... 2nd pressure sensor,
42 ... Main valve opening sensor, 43 ... Voltage sensor, 44 ... Current / resistance sensor,
45 ... Temperature sensor, 46 ... Magnetic sensor, 47 ... Operating time meter, 48 ... Operation counter, 49 ... Drive status sensor,
50 ... 1st substrate, 51 ... 2nd substrate, 52 ... 3rd substrate (board),
60 ... 1st containment, 61 ... 2nd containment, 62 ... Terminal box,
63 ... 1st flow path, 64 ... 2nd flow path, 65 ... Spool flow path,
70 ... Microcontroller, 71 ... Valve Test Switch,
80 ... communication modem, 81 ... loop current controller,
90 ... Reverse voltage protection circuit, 91 ... Internal power supply circuit,
100 ... Piping, 110 ... Valve box, 111 ... Valve body,
120 ... Cylinder, 121 ... Piston rod,
122A ... 1st piston, 122B ... 2nd piston,
123 ... Coil spring, 124 ... Air supply / exhaust port, 125 ... Transmission mechanism,
140 ... 1st air pipe, 141 ... 2nd air pipe,
150 ... communication cable, 160 ... power cable,
500A ... 1st substrate surface, 500B ... 2nd substrate surface,
610 ... housing, 610a ... first housing end,
610b ... Second housing end, 610c ... Shaft insertion slot, 610d ... Body insertion slot,
610e ... Cable insertion slot, 611 ... Body,
612 ... Solenoid cover, 613 ... Terminal box cover,
700 ... Monitoring processing unit, 701 ... Abnormality determination unit, 702 ... Internal storage unit, A ... Air

Claims (7)

A cylindrical cylinder that covers both ends,
A pair of pistons provided in the cylinder so as to be reciprocally linearly movable and connected via a piston rod,
A drive state sensor arranged at one end or both ends of the cylinder in the sliding direction of the piston rod.
Equipped with a,
The drive state sensor is a drive device that detects the temperature and humidity in the cylinder . A stopper attached to one end or both ends of the cylinder to regulate the movement of the piston is provided.
The drive device according to claim 1, wherein the drive state sensor is arranged on the stopper. The drive device according to claim 1 or 2, wherein the drive state sensor detects the position of the piston with respect to the cylinder. The drive device according to any one of claims 1 to 3, wherein the drive state sensor detects the acceleration of the cylinder. The drive device according to any one of claims 1 to 4 , further comprising a transmission mechanism that converts the reciprocating linear motion of the piston rod into rotation. Further, an abnormality determination unit for determining whether or not an abnormality has occurred in the drive device based on the state of the drive device acquired by the drive state sensor is provided.
The driving device according to any one of claims 1 to 5 . Main valve and
The driving device according to any one of claims 1 to 6 for driving the main valve.
A solenoid valve that controls the supply and discharge of the driving fluid to the driving device,
A fluid pressure driven valve characterized in that it comprises at least.

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