JP6754312B2 - Electrode structure of electromagnetic flowmeter - Google Patents

Electrode structure of electromagnetic flowmeter Download PDF

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JP6754312B2
JP6754312B2 JP2017038984A JP2017038984A JP6754312B2 JP 6754312 B2 JP6754312 B2 JP 6754312B2 JP 2017038984 A JP2017038984 A JP 2017038984A JP 2017038984 A JP2017038984 A JP 2017038984A JP 6754312 B2 JP6754312 B2 JP 6754312B2
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electrode
corrosion
metal film
resistant metal
electrode structure
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JP2018146274A (en
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和子 奥畑
和子 奥畑
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Azbil Corp
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Azbil Corp
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/56—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using electric or magnetic effects
    • G01F1/58—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using electric or magnetic effects by electromagnetic flowmeters

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Description

本発明は、管路内を流れる流体の流量に応じた起電力を信号電極を通して取り出すように構成された電磁流量計の電極構造に関する。 The present invention relates to an electrode structure of an electromagnetic flow meter configured to take out an electromotive force corresponding to the flow rate of a fluid flowing in a pipeline through a signal electrode.

従来より、この種の電磁流量計は、測定管内を流れる流体の流れ方向に対して直交する方向に磁界を作る励磁コイルと、この励磁コイルが作る磁界と直交する方向に対向して測定管の内周面に設けられた信号電極とを有し、励磁コイルが作る磁界により測定管内を流れる流体に発生する起電力を信号電極より取り出すようにしている（例えば、特許文献１参照）。 Conventionally, this type of electromagnetic flowmeter has an exciting coil that creates a magnetic field in a direction orthogonal to the flow direction of the fluid flowing in the measuring tube, and a measuring tube that faces the direction orthogonal to the magnetic field created by this exciting coil. It has a signal electrode provided on the inner peripheral surface, and the electromotive force generated in the fluid flowing in the measuring tube due to the magnetic field generated by the exciting coil is taken out from the signal electrode (see, for example, Patent Document 1).

図５に従来の電磁流量計の電極構造の縦断面図を示す。同図において、１０（１０Ａ）は外挿形の信号電極であり、管路２０の外側から取り付けられている。この信号電極１０Ａは、円柱形の軸部１１−１と円板状のシール部１１−２とが一体化された電極本体１１を備えている。軸部１１−１の下方部１１−１ａは管路２０内に位置し、管路２０内を流れる流体に接液する。軸部１１−１の上方部１１−１ｂは、管路２０の外側に位置し、リード線１２が接続される。このリード線１２を通して、管路２０内を流れる流体の流量に応じた起電力が取り出される。 FIG. 5 shows a vertical cross-sectional view of the electrode structure of the conventional electromagnetic flowmeter. In the figure, 10 (10A) is an extrapolated signal electrode, which is attached from the outside of the pipeline 20. The signal electrode 10A includes an electrode body 11 in which a cylindrical shaft portion 11-1 and a disk-shaped seal portion 11-2 are integrated. The lower portion 11-1a of the shaft portion 11-1 is located in the pipeline 20 and comes into contact with the fluid flowing in the pipeline 20. The upper portion 11-1b of the shaft portion 11-1 is located outside the pipeline 20 to which the lead wire 12 is connected. Through the lead wire 12, an electromotive force corresponding to the flow rate of the fluid flowing in the pipeline 20 is taken out.

この電磁流量計の電極構造において、電極本体１１の材料として、耐食性の高い金属（以下、単に耐食性の金属と呼ぶ。）、例えば白金が用いられる（例えば、特許文献２参照）。すなわち、電磁流量計では、腐食性の溶液では測定ができないまたは不安定になる問題が発生するため、安定して測定することができる白金が電極本体１１の材料として用いられる。しかし、無垢の白金では、強度不足で作れない形状の電極があったり、高価になるという問題がある。 In the electrode structure of this electromagnetic flowmeter, a metal having high corrosion resistance (hereinafter, simply referred to as a corrosion resistant metal), for example platinum, is used as the material of the electrode body 11 (see, for example, Patent Document 2). That is, in the electromagnetic flowmeter, there is a problem that measurement cannot be performed or becomes unstable with a corrosive solution, so platinum that can be stably measured is used as the material of the electrode body 11. However, with solid platinum, there are problems that there are electrodes with shapes that cannot be made due to insufficient strength, and that they are expensive.

そこで、図６に示すように、電極本体１１の材料としてステンレス鋼を用い、軸部１１−１の下方部１１−１ａからシール部１１−２の周面１１−２ａまでを白金によるメッキ層（耐食性の金属膜）１３で覆うような構造が考えられている。すなわち、メッキ層１３で覆われた軸部１１−１の下方部１１−１ａを接液部１４とし、この接液部１４を管路２０内を流れる流体に接液させた信号電極１０（１０Ｂ）とすることが考えられている。 Therefore, as shown in FIG. 6, stainless steel is used as the material of the electrode body 11, and the plating layer (platinum) is used from the lower portion 11-1a of the shaft portion 11-1 to the peripheral surface 11-2a of the seal portion 11-2. A structure is considered in which the corrosion-resistant metal film) 13 is covered. That is, the lower portion 11-1a of the shaft portion 11-1 covered with the plating layer 13 is used as the wetted portion 14, and the wetted portion 14 is brought into contact with the fluid flowing in the pipeline 20 of the signal electrode 10 (10B). ) Is considered.

特開平４−３１９６２２号公報Japanese Unexamined Patent Publication No. 4-319622 実開平２−１６０２４号公報Jikkenhei 2-1604

しかしながら、図６に示したような電極構造では、安価とすることはできるが、管路２０内を流れる流体の中に摩耗性の物体、例えばスラリー状の物体が混入しているような場合には、メッキ層１３が摩耗して電極本体１１（ステンレス鋼）が露出し、リード線１２を通して取り出される起電力の値が不安定となる。すなわち、信号電極１０Ｂからの出力信号の値が不安定となり、安定した測定が損なわれる。 However, the electrode structure as shown in FIG. 6 can be inexpensive, but when a wearable object, for example, a slurry-like object is mixed in the fluid flowing in the conduit 20. The plating layer 13 is worn and the electrode body 11 (stainless steel) is exposed, and the value of the electromotive force taken out through the lead wire 12 becomes unstable. That is, the value of the output signal from the signal electrode 10B becomes unstable, and stable measurement is impaired.

本発明は、このような課題を解決するためになされたもので、その目的とするところは、耐食性の金属膜に傷がついても、安定した測定を行うことができる電磁流量計の電極構造を提供することにある。 The present invention has been made to solve such a problem, and an object of the present invention is to provide an electrode structure of an electromagnetic flowmeter capable of performing stable measurement even if a corrosion-resistant metal film is damaged. To provide.

このような目的を達成するために本発明は、管路内を流れる流体の流量に応じた起電力を信号電極を通して取り出すように構成された電磁流量計の電極構造において、信号電極（１）は、流体に接液する接液部（６）を備え、接液部は、流体に接液する耐食性の金属膜（４）と、耐食性の金属膜によってその表面が覆われた絶縁部材（３）とを備えることを特徴とする。 In order to achieve such an object, the present invention presents the signal electrode (1) in the electrode structure of an electromagnetic flowmeter configured to take out an electromotive force corresponding to the flow rate of a fluid flowing in a pipeline through a signal electrode. The wetted portion is provided with a wetted portion (6) that comes into contact with the fluid, and the wetted portion includes a corrosion-resistant metal film (4) that comes into contact with the fluid and an insulating member (3) whose surface is covered with the corrosion-resistant metal film. It is characterized by having.

この発明において、流体に接液する信号電極の接液部は、耐食性の金属膜で絶縁部材の表面が覆われている。これにより、本発明では、耐食性の金属膜に傷がついても、絶縁部材の表面が露出するのみとなる。このため、信号電極からの出力信号の値が不安定となることがない。 In the present invention, the surface of the insulating member is covered with a corrosion-resistant metal film at the wetted portion of the signal electrode that comes into contact with the fluid. As a result, in the present invention, even if the corrosion-resistant metal film is scratched, only the surface of the insulating member is exposed. Therefore, the value of the output signal from the signal electrode does not become unstable.

例えば、本発明では、信号電極を導電性の剛体（２Ａ，２Ｂ）を備えたものとする。そして、耐食性の金属膜（４）と導電性の剛体（２Ａ，２Ｂ）との間に挟まれた絶縁層（３）として、絶縁部材を設けるようにする。例えば、本発明では、信号電極（２Ｃ，２Ｄ）を絶縁性の剛体を備えたものとする。そして、絶縁性の剛体（２Ｃ，２Ｄ）の一部（２ａ，２−１ａ）として、絶縁部材を設けるようにする。 For example, in the present invention, the signal electrode is provided with a conductive rigid body (2A, 2B). Then, an insulating member is provided as an insulating layer (3) sandwiched between the corrosion-resistant metal film (4) and the conductive rigid body (2A, 2B). For example, in the present invention, the signal electrodes (2C, 2D) are provided with an insulating rigid body. Then, an insulating member is provided as a part (2a, 2-1a) of the insulating rigid body (2C, 2D).

なお、上記説明では、一例として、発明の構成要素に対応する図面上の構成要素を、括弧を付した参照符号によって示している。 In the above description, as an example, the components on the drawing corresponding to the components of the invention are indicated by reference numerals in parentheses.

以上説明したことにより、本発明によれば、耐食性の金属膜によって絶縁部材の表面を覆うようにしたので、耐食性の金属膜に傷がついても、絶縁部材の表面が露出するのみとなり、信号電極からの出力信号の値が不安定となることがなく、安定した測定を行うことができるようになる。 As described above, according to the present invention, the surface of the insulating member is covered with the corrosion-resistant metal film. Therefore, even if the corrosion-resistant metal film is damaged, the surface of the insulating member is only exposed, and the signal electrode The value of the output signal from is not unstable, and stable measurement can be performed.

図１は、本発明に係る電磁流量計の電極構造の第１例（実施の形態１）を示す縦断面図である。FIG. 1 is a vertical cross-sectional view showing a first example (Embodiment 1) of the electrode structure of the electromagnetic flowmeter according to the present invention. 図２は、実施の形態１において信号電極を外挿形とした例を示す図である。FIG. 2 is a diagram showing an example in which the signal electrode is extrapolated in the first embodiment. 図３は、本発明に係る電磁流量計の電極構造の第２例（実施の形態２）を示す縦断面図である。FIG. 3 is a vertical cross-sectional view showing a second example (embodiment 2) of the electrode structure of the electromagnetic flowmeter according to the present invention. 図４は、実施の形態２において信号電極を外挿形とした例を示す図である。FIG. 4 is a diagram showing an example in which the signal electrode is extrapolated in the second embodiment. 図５は、従来の電磁流量計の電極構造の縦断面図である。FIG. 5 is a vertical cross-sectional view of the electrode structure of the conventional electromagnetic flowmeter. 図６は、白金によるメッキ層を形成するようにした従来の電磁流量計の電極構造の縦断面図である。FIG. 6 is a vertical cross-sectional view of the electrode structure of a conventional electromagnetic flowmeter in which a plating layer made of platinum is formed.

以下、本発明の実施の形態を図面に基づいて詳細に説明する。 Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.

〔実施の形態１〕
図１は本発明に係る電磁流量計の電極構造の第１例（実施の形態１）を示す縦断面図である。同図において、１（１Ａ）は内挿形の信号電極であり、管路２０の内側から取り付けられている。この信号電極１Ａは、リベット状の電極本体２（２Ａ）を備え、この電極本体２Ａの頭部２ａを管路２０内に位置させている。 [Embodiment 1]
FIG. 1 is a vertical cross-sectional view showing a first example (Embodiment 1) of the electrode structure of the electromagnetic flowmeter according to the present invention. In the figure, 1 (1A) is an interpolated signal electrode, which is attached from the inside of the pipeline 20. The signal electrode 1A includes a rivet-shaped electrode body 2 (2A), and the head portion 2a of the electrode body 2A is located in the pipeline 20.

この信号電極１Ａにおいて、電極本体２Ａは導電性の剛体とされており、管路２０内に位置する電極本体２Ａの頭部２ａは絶縁層３で覆われている。また、この電極本体２Ａの頭部２ａを覆った絶縁層３は、さらに耐食性の金属膜４によってその表面が覆われている。すなわち、この信号電極１Ａには、耐食性の金属膜４と電極本体（導電性の剛体）２との間に挟まれた絶縁層３として、本発明でいう絶縁部材が設けられている。 In the signal electrode 1A, the electrode body 2A is a conductive rigid body, and the head portion 2a of the electrode body 2A located in the conduit 20 is covered with the insulating layer 3. Further, the surface of the insulating layer 3 covering the head portion 2a of the electrode body 2A is further covered with a corrosion-resistant metal film 4. That is, the signal electrode 1A is provided with the insulating member according to the present invention as an insulating layer 3 sandwiched between the corrosion-resistant metal film 4 and the electrode body (conductive rigid body) 2.

また、電極本体２Ａの胴部２ｂにはその上方部にネジ山２ｃが形成されており、このネジ山２ｃを管路２０の外側に位置させて図示されていないナットで締め付けることによって、信号電極１Ａが管路２０に取り付けられている。また、電極本体２Ａの胴部２ｂには、管路２０の外側において、リード線５が接続されている。このリード線５を通して、管路２０内を流れる流体の流量に応じた起電力が取り出される。 Further, a thread 2c is formed above the body 2b of the electrode body 2A, and the thread 2c is located outside the pipeline 20 and tightened with a nut (not shown) to obtain a signal electrode. 1A is attached to the pipeline 20. Further, a lead wire 5 is connected to the body portion 2b of the electrode body 2A on the outside of the pipeline 20. Through the lead wire 5, an electromotive force corresponding to the flow rate of the fluid flowing in the pipeline 20 is taken out.

なお、本実施の形態において、導電性の剛体である電極本体２Ａの材料としては、金属，ガラス状カーボン，導電性樹脂などの強度のある導電性物質が用いられている。また、耐食性の金属膜４は、Ｐｔ膜，Ｔｉ膜，Ａｕ膜，Ｔａ膜，ＷＣ膜などとされている。また、絶縁層３の材料としては、電極本体２Ａと耐食性の金属膜４との密着性が確保できるものとして、セラミック（ＳｉＣ、Ａｌ2Ｏ3、ＺｒＯ2、Ｙ2Ｏ3、Ｓｉ3Ｎ4、ＳｉＯ），絶縁性の高い樹脂等が用いられている。 In the present embodiment, as the material of the electrode body 2A, which is a conductive rigid body, a strong conductive substance such as metal, glassy carbon, or conductive resin is used. The corrosion-resistant metal film 4 is a Pt film, a Ti film, an Au film, a Ta film, a WC film, or the like. Further, as the material of the insulating layer 3, ceramics (SiC, Al 2 O 3 , ZrO 2 , Y 2 O 3 , Si 3 N 4) are used so that the adhesion between the electrode body 2A and the corrosion-resistant metal film 4 can be ensured. , SiO), highly insulating resin, etc. are used.

この電極構造において、流体に接液する信号電極１Ａの接液部６は、電極本体（導電性の剛体）２Ａの頭部２ａが絶縁層３と耐食性の金属膜４とで覆われた２層構造とされており、絶縁層３の表面が耐食性の金属膜４で覆われている。これにより、耐食性の金属膜４に傷がついても、絶縁層（絶縁部材）３の表面が露出するのみとなる。このため、信号電極１Ａからの出力信号の値が不安定となることがなく、安定した測定を行うことができる。 In this electrode structure, the wetted portion 6 of the signal electrode 1A that comes into contact with the fluid is a two-layer in which the head portion 2a of the electrode body (conductive rigid body) 2A is covered with the insulating layer 3 and the corrosion-resistant metal film 4. It has a structure, and the surface of the insulating layer 3 is covered with a corrosion-resistant metal film 4. As a result, even if the corrosion-resistant metal film 4 is scratched, only the surface of the insulating layer (insulating member) 3 is exposed. Therefore, the value of the output signal from the signal electrode 1A does not become unstable, and stable measurement can be performed.

なお、図１では、信号電極１を内挿形としたが、外挿形としてもよい。図２に、信号電極１を外挿形とした例を示す。 Although the signal electrode 1 is an interpolated type in FIG. 1, it may be an extrapolated type. FIG. 2 shows an example in which the signal electrode 1 is extrapolated.

図２において、信号電極１（１Ｂ）は、管路２０の外側から取り付けられている。この信号電極１Ｂにおいて、電極本体２（２Ｂ）は軸部２−１とシール部２−２とが一体化された導電性の剛体とされており、この電極本体２Ｂの軸部２−１の下方部２−１ａを管路２０内に位置させている。なお、図示してはいないが、電極本体２（２Ｂ）のシール部２−２は上側からバネによって押し付けられている。 In FIG. 2, the signal electrode 1 (1B) is attached from the outside of the pipeline 20. In the signal electrode 1B, the electrode body 2 (2B) is a conductive rigid body in which the shaft portion 2-1 and the seal portion 2-2 are integrated, and the shaft portion 2-1 of the electrode body 2B is formed. The lower portion 2-1a is located in the pipeline 20. Although not shown, the seal portion 2-2 of the electrode body 2 (2B) is pressed by a spring from above.

この信号電極１Ｂにおいて、電極本体２Ｂの軸部２−１の下方部２−１ａは、絶縁層３と耐食性の金属膜４とで覆われた２層構造とされており、絶縁層３の表面が耐食性の金属膜４で覆われている。すなわち、この信号電極１Ｂにおいても、図１に示した信号電極１Ａと同様、耐食性の金属膜４と電極本体（導電性の剛体）２との間に挟まれた絶縁層３として、本発明でいう絶縁部材が設けられている。 In the signal electrode 1B, the lower portion 2-1a of the shaft portion 2-1 of the electrode body 2B has a two-layer structure covered with the insulating layer 3 and the corrosion-resistant metal film 4, and the surface of the insulating layer 3 is formed. Is covered with a corrosion-resistant metal film 4. That is, in the signal electrode 1B as well, as in the signal electrode 1A shown in FIG. 1, the insulating layer 3 sandwiched between the corrosion-resistant metal film 4 and the electrode body (conductive rigid body) 2 is used in the present invention. An insulating member is provided.

この電極構造において、流体に接液する信号電極１Ｂの接液部６は、信号電極１Ｂの軸部２−１の下方部２−１ａが絶縁層３と耐食性の金属膜４とで覆われた２層構造とされており、絶縁層３の表面が耐食性の金属膜４で覆われている。これにより、耐食性の金属膜４に傷がついても、絶縁層（絶縁部材）３の表面が露出するのみとなる。このため、信号電極１Ｂからの出力信号の値が不安定となることがなく、安定した測定を行うことができる。 In this electrode structure, in the wetted portion 6 of the signal electrode 1B that comes into contact with the fluid, the lower portion 2-1a of the shaft portion 2-1 of the signal electrode 1B is covered with the insulating layer 3 and the corrosion-resistant metal film 4. It has a two-layer structure, and the surface of the insulating layer 3 is covered with a corrosion-resistant metal film 4. As a result, even if the corrosion-resistant metal film 4 is scratched, only the surface of the insulating layer (insulating member) 3 is exposed. Therefore, the value of the output signal from the signal electrode 1B does not become unstable, and stable measurement can be performed.

〔実施の形態２〕
図３は本発明に係る電磁流量計の電極構造の第２例（実施の形態２）を示す縦断面図である。この電極構造の図１に示した電極構造と異なる点は、信号電極１の電極本体２を絶縁性の剛体とし、この電極本体２の頭部２ａおよび胴部２ｂを覆うように耐食性の金属膜４を設け、この耐食性の金属膜４にリード線５を接続している点にある。 [Embodiment 2]
FIG. 3 is a vertical cross-sectional view showing a second example (embodiment 2) of the electrode structure of the electromagnetic flowmeter according to the present invention. The difference from the electrode structure shown in FIG. 1 is that the electrode body 2 of the signal electrode 1 is an insulating rigid body, and a corrosion-resistant metal film is provided so as to cover the head portion 2a and the body portion 2b of the electrode body 2. 4 is provided, and the lead wire 5 is connected to the corrosion-resistant metal film 4.

この信号電極１（１Ｃ）において、管路内２０内に位置する電極本体２（２Ｃ）の頭部２ａは耐食性の金属膜４で覆われている。すなわち、電極本体（絶縁性の剛体）２Ｃの頭部２ａが、本発明でいう絶縁部材として耐食性の金属膜４で覆われている。 In the signal electrode 1 (1C), the head portion 2a of the electrode body 2 (2C) located in the pipeline 20 is covered with a corrosion-resistant metal film 4. That is, the head portion 2a of the electrode body (insulating rigid body) 2C is covered with a corrosion-resistant metal film 4 as an insulating member according to the present invention.

なお、本実施の形態において、絶縁性の剛体である電極本体２Ｃの材料としては、耐食性の金属膜４との密着性が確保できるものとして、セラミック（ＳｉＣ、Ａｌ2Ｏ3、ＺｒＯ2、Ｙ2Ｏ3、Ｓｉ3Ｎ4、ＳｉＯ），絶縁性の高い樹脂等が用いられている。また、耐食性の金属膜４は、Ｐｔ膜，Ｔｉ膜，Ａｕ膜，Ｔａ膜，ＷＣ膜などとされている。 In the present embodiment, the material of the electrode body 2C, which is an insulating rigid body, is ceramic (SiC, Al 2 O 3 , ZrO 2 , Y) so that adhesion with the corrosion-resistant metal film 4 can be ensured. 2 O 3 , Si 3 N 4 , SiO), highly insulating resin, etc. are used. The corrosion-resistant metal film 4 is a Pt film, a Ti film, an Au film, a Ta film, a WC film, or the like.

この電極構造において、流体に接液する信号電極１Ｃの接液部６は、電極本体（絶縁性の剛体）２Ｃの頭部２ａが耐食性の金属膜４で覆われた構造とされている。これにより、耐食性の金属膜４に傷がついても、電極本体２Ｃの頭部（絶縁部材）２ａの表面が露出するのみとなる。このため、信号電極１Ｃからの出力信号の値が不安定となることがなく、安定した測定を行うことができる。 In this electrode structure, the wetted portion 6 of the signal electrode 1C that comes into contact with the fluid has a structure in which the head portion 2a of the electrode body (insulating rigid body) 2C is covered with a corrosion-resistant metal film 4. As a result, even if the corrosion-resistant metal film 4 is scratched, only the surface of the head (insulating member) 2a of the electrode body 2C is exposed. Therefore, the value of the output signal from the signal electrode 1C does not become unstable, and stable measurement can be performed.

なお、図３では、信号電極１を内挿形としたが、外挿形としてもよい。図４に、信号電極１を外挿形とした例を示す。 Although the signal electrode 1 is an interpolated type in FIG. 3, it may be an extrapolated type. FIG. 4 shows an example in which the signal electrode 1 is extrapolated.

図４において、信号電極１（１Ｄ）は、管路２０の外側から取り付けられている。この信号電極１Ｄにおいて、電極本体２（２Ｄ）は軸部２−１とシール部２−２とが一体化された絶縁性の剛体とされており、この電極本体２Ｄの軸部２−１の下方部２−１ａを管路２０内に位置させている。 In FIG. 4, the signal electrode 1 (1D) is attached from the outside of the pipeline 20. In the signal electrode 1D, the electrode body 2 (2D) is an insulating rigid body in which the shaft portion 2-1 and the seal portion 2-2 are integrated, and the shaft portion 2-1 of the electrode body 2D is formed. The lower portion 2-1a is located in the pipeline 20.

この信号電極１Ｄにおいて、電極本体２Ｄは、その全てが耐食性の金属膜４で覆われている。すなわち、この信号電極１Ｄにおいても、図３に示した信号電極１Ｃと同様、電極本体（絶縁性の剛体）２の軸部２−１の下方部２−１ａが、本発明でいう絶縁部材として耐食性の金属膜４で覆われている。 In the signal electrode 1D, the electrode body 2D is entirely covered with a corrosion-resistant metal film 4. That is, also in this signal electrode 1D, as in the signal electrode 1C shown in FIG. 3, the lower portion 2-1a of the shaft portion 2-1 of the electrode body (insulating rigid body) 2 is used as the insulating member in the present invention. It is covered with a corrosion-resistant metal film 4.

この電極構造において、流体に接液する信号電極１Ｄの接液部６は、信号電極１Ｄの軸部２−１の下方部２−１ａが耐食性の金属膜４で覆われた構造とされている。これにより、耐食性の金属膜４に傷がついても、信号電極１Ｄの軸部２−１の下方部（絶縁部材）２−１ａの表面が露出するのみとなる。このため、信号電極１Ｄからの出力信号の値が不安定となることがなく、安定した測定を行うことができる。 In this electrode structure, the wetted portion 6 of the signal electrode 1D that comes into contact with the fluid has a structure in which the lower portion 2-1a of the shaft portion 2-1 of the signal electrode 1D is covered with a corrosion-resistant metal film 4. .. As a result, even if the corrosion-resistant metal film 4 is scratched, only the surface of the lower portion (insulating member) 2-1a of the shaft portion 2-1 of the signal electrode 1D is exposed. Therefore, the value of the output signal from the signal electrode 1D does not become unstable, and stable measurement can be performed.

なお、図３に示した電極構造では、電極本体２Ｃの胴部２ｂの上面２ｄは耐食性の金属膜４で覆われていないが、この部分も耐食性の金属膜４で覆うようにしてもよい。すなわち、電極本体２Ｃの全てを耐食性の金属膜４で覆うようにしてもよい。また、図４に示した電極構造では、電極本体２Ｄの全てを耐食性の金属膜４で覆うようにしているが、図３に示した電極構造と同様、電極本体２Ｄの一部を残して耐食性の金属膜４で覆うようにしてもよい。 In the electrode structure shown in FIG. 3, the upper surface 2d of the body portion 2b of the electrode body 2C is not covered with the corrosion-resistant metal film 4, but this portion may also be covered with the corrosion-resistant metal film 4. That is, the entire electrode body 2C may be covered with the corrosion-resistant metal film 4. Further, in the electrode structure shown in FIG. 4, the entire electrode body 2D is covered with the corrosion-resistant metal film 4, but as in the electrode structure shown in FIG. 3, a part of the electrode body 2D is left and corrosion resistance is maintained. It may be covered with the metal film 4 of the above.

また、言うまでもないが、上述した実施の形態１，２の電極構造では、耐食性の金属膜４を用いた構造としているので、従来の図６に示された電極構造と同様、安価でかつその形状についても柔軟に対応することができる電極構造となる。 Needless to say, since the electrode structures of the first and second embodiments described above have a structure using the corrosion-resistant metal film 4, they are inexpensive and have the same shape as the conventional electrode structure shown in FIG. It will be an electrode structure that can flexibly deal with the above.

〔実施の形態の拡張〕
以上、実施の形態を参照して本発明を説明したが、本発明は上記の実施の形態に限定されるものではない。本発明の構成や詳細には、本発明の技術思想の範囲内で当業者が理解し得る様々な変更をすることができる。 [Extension of Embodiment]
Although the present invention has been described above with reference to the embodiments, the present invention is not limited to the above embodiments. Various changes that can be understood by those skilled in the art can be made to the configuration and details of the present invention within the scope of the technical idea of the present invention.

１（１Ａ〜１Ｄ）…信号電極、２（２Ａ〜２Ｄ）…電極本体、２ａ…頭部、２ｂ…胴部、２−１…軸部、２−１ａ…下方部、２−２…シール部、３…絶縁層、４…耐食性の金属膜、５…リード線、６…接液部。 1 (1A to 1D) ... Signal electrode, 2 (2A to 2D) ... Electrode body, 2a ... Head, 2b ... Body, 2-1 ... Shaft, 2-1a ... Lower part, 2-2 ... Seal part 3, 3 ... Insulation layer, 4 ... Corrosion resistant metal film, 5 ... Lead wire, 6 ... Wet contact part.

Claims (3)

管路内を流れる流体の流量に応じた起電力を信号電極を通して取り出すように構成された電磁流量計の電極構造において、
前記信号電極は、
前記流体に接液する接液部と、
導電性を有する剛体とを備え、
前記接液部は、
前記流体に接液する耐食性の金属膜と、
前記耐食性の金属膜によってその表面が覆われた絶縁部材と
を備え、
前記耐食性の金属膜は、
前記導電性を有する剛体と接触している
ことを特徴とする電磁流量計の電極構造。 In the electrode structure of an electromagnetic flow meter configured to take out an electromotive force according to the flow rate of a fluid flowing in a pipeline through a signal electrode.
The signal electrode is
A wetted part that comes into contact with the fluid and
With a rigid body with conductivity ,
The wetted part is
A corrosion-resistant metal film that comes into contact with the fluid and
It is provided with an insulating member whose surface is covered with the corrosion-resistant metal film .
The corrosion-resistant metal film is
An electrode structure of an electromagnetic flowmeter, which is in contact with a rigid body having conductivity . 請求項１に記載された電磁流量計の電極構造において、
前記絶縁部材は、
前記耐食性の金属膜と前記導電性の剛体との間に挟まれた絶縁層として設けられている
ことを特徴とする電磁流量計の電極構造。 In the electrode structure of the electromagnetic flowmeter according to claim 1,
Before Symbol insulation member,
An electrode structure of an electromagnetic flowmeter, characterized in that it is provided as an insulating layer sandwiched between the corrosion-resistant metal film and the conductive rigid body. 請求項１に記載された電磁流量計の電極構造において、
前記流体に発生する起電力を取り出すためのリード線を備え、
前記リード線は、
前記管路の外側において前記導電性の剛体に接続されている
ことを特徴とする電磁流量計の電極構造。 In the electrode structure of the electromagnetic flowmeter according to claim 1,
A lead wire for extracting the electromotive force generated in the fluid is provided.
The lead wire is
An electrode structure of an electromagnetic flowmeter, which is connected to the conductive rigid body on the outside of the pipeline .
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