JP2018146274A - Electrode structure of electromagnetic flowmeter - Google Patents

Electrode structure of electromagnetic flowmeter Download PDF

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JP2018146274A
JP2018146274A JP2017038984A JP2017038984A JP2018146274A JP 2018146274 A JP2018146274 A JP 2018146274A JP 2017038984 A JP2017038984 A JP 2017038984A JP 2017038984 A JP2017038984 A JP 2017038984A JP 2018146274 A JP2018146274 A JP 2018146274A
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electrode
electrode structure
metal film
corrosion
resistant metal
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JP6754312B2 (en
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和子 奥畑
Kazuko Okuhata
和子 奥畑
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Azbil Corp
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Azbil Corp
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/56—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using electric or magnetic effects
    • G01F1/58—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using electric or magnetic effects by electromagnetic flowmeters

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Abstract

PROBLEM TO BE SOLVED: To provide an electrode structure of an electromagnetic flowmeter, the structure allowing a stable measurement if an anticorrosive metal film is scratched.SOLUTION: Since a signal electrode 1 covers the head part 2a of an electrode body 2 made of a conductive rigid body with an insulating layer 3 and an anticorrosive metal film 4 covers the surface of the insulating layer 3, the surface of the insulating layer 3 alone is exposed if the anticorrosive metal layer 4 is scratched, and the value of an output signal does not become unstable.SELECTED DRAWING: Figure 1

Description

本発明は、管路内を流れる流体の流量に応じた起電力を信号電極を通して取り出すように構成された電磁流量計の電極構造に関する。   The present invention relates to an electrode structure of an electromagnetic flow meter configured to extract an electromotive force corresponding to a flow rate of a fluid flowing in a pipe line through a signal electrode.

従来より、この種の電磁流量計は、測定管内を流れる流体の流れ方向に対して直交する方向に磁界を作る励磁コイルと、この励磁コイルが作る磁界と直交する方向に対向して測定管の内周面に設けられた信号電極とを有し、励磁コイルが作る磁界により測定管内を流れる流体に発生する起電力を信号電極より取り出すようにしている（例えば、特許文献１参照）。   Conventionally, this type of electromagnetic flowmeter has an excitation coil that creates a magnetic field in a direction perpendicular to the flow direction of the fluid flowing in the measurement tube, and a measurement tube that faces the direction perpendicular to the magnetic field created by the excitation coil. And an electromotive force generated in the fluid flowing in the measurement tube by the magnetic field generated by the excitation coil, which is extracted from the signal electrode (see, for example, Patent Document 1).

図５に従来の電磁流量計の電極構造の縦断面図を示す。同図において、１０（１０Ａ）は外挿形の信号電極であり、管路２０の外側から取り付けられている。この信号電極１０Ａは、円柱形の軸部１１−１と円板状のシール部１１−２とが一体化された電極本体１１を備えている。軸部１１−１の下方部１１−１ａは管路２０内に位置し、管路２０内を流れる流体に接液する。軸部１１−１の上方部１１−１ｂは、管路２０の外側に位置し、リード線１２が接続される。このリード線１２を通して、管路２０内を流れる流体の流量に応じた起電力が取り出される。   FIG. 5 shows a longitudinal sectional view of an electrode structure of a conventional electromagnetic flow meter. In the figure, reference numeral 10 (10A) denotes an extrapolated signal electrode, which is attached from the outside of the pipe line 20. The signal electrode 10A includes an electrode body 11 in which a cylindrical shaft portion 11-1 and a disc-shaped seal portion 11-2 are integrated. A lower portion 11-1 a of the shaft portion 11-1 is located in the pipe line 20 and is in contact with the fluid flowing in the pipe line 20. The upper part 11-1b of the shaft part 11-1 is located outside the pipe line 20, and the lead wire 12 is connected thereto. Through this lead wire 12, an electromotive force corresponding to the flow rate of the fluid flowing in the pipe line 20 is taken out.

この電磁流量計の電極構造において、電極本体１１の材料として、耐食性の高い金属（以下、単に耐食性の金属と呼ぶ。）、例えば白金が用いられる（例えば、特許文献２参照）。すなわち、電磁流量計では、腐食性の溶液では測定ができないまたは不安定になる問題が発生するため、安定して測定することができる白金が電極本体１１の材料として用いられる。しかし、無垢の白金では、強度不足で作れない形状の電極があったり、高価になるという問題がある。   In the electrode structure of this electromagnetic flow meter, a metal having high corrosion resistance (hereinafter simply referred to as a corrosion-resistant metal), for example, platinum is used as the material of the electrode body 11 (see, for example, Patent Document 2). That is, in the electromagnetic flow meter, there is a problem that the corrosive solution cannot be measured or becomes unstable. Therefore, platinum that can be measured stably is used as the material of the electrode body 11. However, in the case of pure platinum, there are problems that there are electrodes in a shape that cannot be made due to insufficient strength, and that it becomes expensive.

そこで、図６に示すように、電極本体１１の材料としてステンレス鋼を用い、軸部１１−１の下方部１１−１ａからシール部１１−２の周面１１−２ａまでを白金によるメッキ層（耐食性の金属膜）１３で覆うような構造が考えられている。すなわち、メッキ層１３で覆われた軸部１１−１の下方部１１−１ａを接液部１４とし、この接液部１４を管路２０内を流れる流体に接液させた信号電極１０（１０Ｂ）とすることが考えられている。   Therefore, as shown in FIG. 6, stainless steel is used as the material of the electrode body 11, and a platinum plating layer (from the lower portion 11-1 a of the shaft portion 11-1 to the peripheral surface 11-2 a of the seal portion 11-2 ( A structure that is covered with a (corrosion-resistant metal film) 13 is considered. That is, the lower part 11-1a of the shaft part 11-1 covered with the plating layer 13 is used as the liquid contact part 14, and the signal electrode 10 (10B) in which the liquid contact part 14 is in contact with the fluid flowing in the pipe line 20 is used. ) Is considered.

特開平４−３１９６２２号公報JP-A-4-319622 実開平２−１６０２４号公報Japanese Utility Model Publication No.2-16044

しかしながら、図６に示したような電極構造では、安価とすることはできるが、管路２０内を流れる流体の中に摩耗性の物体、例えばスラリー状の物体が混入しているような場合には、メッキ層１３が摩耗して電極本体１１（ステンレス鋼）が露出し、リード線１２を通して取り出される起電力の値が不安定となる。すなわち、信号電極１０Ｂからの出力信号の値が不安定となり、安定した測定が損なわれる。   However, the electrode structure as shown in FIG. 6 can be made inexpensive, but in the case where a wearable object such as a slurry-like object is mixed in the fluid flowing in the pipe 20. The electrode layer 11 (stainless steel) is exposed due to wear of the plating layer 13, and the value of the electromotive force taken out through the lead wire 12 becomes unstable. That is, the value of the output signal from the signal electrode 10B becomes unstable, and stable measurement is impaired.

本発明は、このような課題を解決するためになされたもので、その目的とするところは、耐食性の金属膜に傷がついても、安定した測定を行うことができる電磁流量計の電極構造を提供することにある。   The present invention has been made in order to solve such problems, and an object of the present invention is to provide an electrode structure of an electromagnetic flowmeter that can perform stable measurement even if a corrosion-resistant metal film is damaged. It is to provide.

このような目的を達成するために本発明は、管路内を流れる流体の流量に応じた起電力を信号電極を通して取り出すように構成された電磁流量計の電極構造において、信号電極（１）は、流体に接液する接液部（６）を備え、接液部は、流体に接液する耐食性の金属膜（４）と、耐食性の金属膜によってその表面が覆われた絶縁部材（３）とを備えることを特徴とする。   In order to achieve such an object, the present invention provides an electrode structure of an electromagnetic flowmeter configured to extract an electromotive force according to a flow rate of a fluid flowing in a pipe line through a signal electrode. And a wetted part (6) in contact with the fluid, wherein the wetted part has a corrosion-resistant metal film (4) in contact with the fluid and an insulating member (3) whose surface is covered with the corrosion-resistant metal film It is characterized by providing.

この発明において、流体に接液する信号電極の接液部は、耐食性の金属膜で絶縁部材の表面が覆われている。これにより、本発明では、耐食性の金属膜に傷がついても、絶縁部材の表面が露出するのみとなる。このため、信号電極からの出力信号の値が不安定となることがない。   In the present invention, the surface of the insulating member is covered with a corrosion-resistant metal film in the liquid contact portion of the signal electrode that contacts the fluid. Thus, in the present invention, even if the corrosion-resistant metal film is damaged, the surface of the insulating member is only exposed. For this reason, the value of the output signal from the signal electrode does not become unstable.

例えば、本発明では、信号電極を導電性の剛体（２Ａ，２Ｂ）を備えたものとする。そして、耐食性の金属膜（４）と導電性の剛体（２Ａ，２Ｂ）との間に挟まれた絶縁層（３）として、絶縁部材を設けるようにする。例えば、本発明では、信号電極（２Ｃ，２Ｄ）を絶縁性の剛体を備えたものとする。そして、絶縁性の剛体（２Ｃ，２Ｄ）の一部（２ａ，２−１ａ）として、絶縁部材を設けるようにする。   For example, in the present invention, the signal electrode is provided with a conductive rigid body (2A, 2B). Then, an insulating member is provided as an insulating layer (3) sandwiched between the corrosion-resistant metal film (4) and the conductive rigid bodies (2A, 2B). For example, in the present invention, the signal electrodes (2C, 2D) are provided with an insulating rigid body. Then, an insulating member is provided as a part (2a, 2-1a) of the insulating rigid body (2C, 2D).

なお、上記説明では、一例として、発明の構成要素に対応する図面上の構成要素を、括弧を付した参照符号によって示している。   In the above description, as an example, constituent elements on the drawing corresponding to the constituent elements of the invention are indicated by reference numerals with parentheses.

以上説明したことにより、本発明によれば、耐食性の金属膜によって絶縁部材の表面を覆うようにしたので、耐食性の金属膜に傷がついても、絶縁部材の表面が露出するのみとなり、信号電極からの出力信号の値が不安定となることがなく、安定した測定を行うことができるようになる。   As described above, according to the present invention, since the surface of the insulating member is covered with the corrosion-resistant metal film, even if the corrosion-resistant metal film is damaged, only the surface of the insulating member is exposed, and the signal electrode The value of the output signal from is not unstable, and stable measurement can be performed.

図１は、本発明に係る電磁流量計の電極構造の第１例（実施の形態１）を示す縦断面図である。FIG. 1 is a longitudinal sectional view showing a first example (Embodiment 1) of an electrode structure of an electromagnetic flowmeter according to the present invention. 図２は、実施の形態１において信号電極を外挿形とした例を示す図である。FIG. 2 is a diagram showing an example in which the signal electrode is extrapolated in the first embodiment. 図３は、本発明に係る電磁流量計の電極構造の第２例（実施の形態２）を示す縦断面図である。FIG. 3 is a longitudinal sectional view showing a second example (Embodiment 2) of the electrode structure of the electromagnetic flowmeter according to the present invention. 図４は、実施の形態２において信号電極を外挿形とした例を示す図である。FIG. 4 is a diagram showing an example in which the signal electrode is extrapolated in the second embodiment. 図５は、従来の電磁流量計の電極構造の縦断面図である。FIG. 5 is a longitudinal sectional view of an electrode structure of a conventional electromagnetic flow meter. 図６は、白金によるメッキ層を形成するようにした従来の電磁流量計の電極構造の縦断面図である。FIG. 6 is a longitudinal sectional view of an electrode structure of a conventional electromagnetic flow meter in which a platinum plating layer is formed.

以下、本発明の実施の形態を図面に基づいて詳細に説明する。   Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.

〔実施の形態１〕
図１は本発明に係る電磁流量計の電極構造の第１例（実施の形態１）を示す縦断面図である。同図において、１（１Ａ）は内挿形の信号電極であり、管路２０の内側から取り付けられている。この信号電極１Ａは、リベット状の電極本体２（２Ａ）を備え、この電極本体２Ａの頭部２ａを管路２０内に位置させている。 [Embodiment 1]
FIG. 1 is a longitudinal sectional view showing a first example (Embodiment 1) of an electrode structure of an electromagnetic flowmeter according to the present invention. In the figure, reference numeral 1 (1A) denotes an interpolated signal electrode, which is attached from the inside of the conduit 20. The signal electrode 1A includes a rivet-shaped electrode body 2 (2A), and the head 2a of the electrode body 2A is positioned in the pipe line 20.

この信号電極１Ａにおいて、電極本体２Ａは導電性の剛体とされており、管路２０内に位置する電極本体２Ａの頭部２ａは絶縁層３で覆われている。また、この電極本体２Ａの頭部２ａを覆った絶縁層３は、さらに耐食性の金属膜４によってその表面が覆われている。すなわち、この信号電極１Ａには、耐食性の金属膜４と電極本体（導電性の剛体）２との間に挟まれた絶縁層３として、本発明でいう絶縁部材が設けられている。   In the signal electrode 1 </ b> A, the electrode body 2 </ b> A is a conductive rigid body, and the head 2 a of the electrode body 2 </ b> A located in the duct 20 is covered with the insulating layer 3. The insulating layer 3 covering the head 2a of the electrode body 2A is further covered with a corrosion-resistant metal film 4. That is, the signal electrode 1A is provided with an insulating member in the present invention as the insulating layer 3 sandwiched between the corrosion-resistant metal film 4 and the electrode body (conductive rigid body) 2.

また、電極本体２Ａの胴部２ｂにはその上方部にネジ山２ｃが形成されており、このネジ山２ｃを管路２０の外側に位置させて図示されていないナットで締め付けることによって、信号電極１Ａが管路２０に取り付けられている。また、電極本体２Ａの胴部２ｂには、管路２０の外側において、リード線５が接続されている。このリード線５を通して、管路２０内を流れる流体の流量に応じた起電力が取り出される。   The body 2b of the electrode body 2A has a thread 2c formed in the upper part thereof. The thread 2c is positioned outside the conduit 20 and is tightened with a nut (not shown) to thereby form a signal electrode. 1A is attached to the conduit 20. Further, the lead wire 5 is connected to the body 2b of the electrode body 2A on the outside of the pipe line 20. Through this lead wire 5, an electromotive force corresponding to the flow rate of the fluid flowing in the pipe line 20 is taken out.

なお、本実施の形態において、導電性の剛体である電極本体２Ａの材料としては、金属，ガラス状カーボン，導電性樹脂などの強度のある導電性物質が用いられている。また、耐食性の金属膜４は、Ｐｔ膜，Ｔｉ膜，Ａｕ膜，Ｔａ膜，ＷＣ膜などとされている。また、絶縁層３の材料としては、電極本体２Ａと耐食性の金属膜４との密着性が確保できるものとして、セラミック（ＳｉＣ、Ａｌ2Ｏ3、ＺｒＯ2、Ｙ2Ｏ3、Ｓｉ3Ｎ4、ＳｉＯ），絶縁性の高い樹脂等が用いられている。 In the present embodiment, a strong conductive substance such as a metal, glassy carbon, or conductive resin is used as the material of the electrode body 2A that is a conductive rigid body. The corrosion-resistant metal film 4 is a Pt film, a Ti film, an Au film, a Ta film, a WC film, or the like. The insulating layer 3 is made of ceramic (SiC, Al 2 O 3 , ZrO 2 , Y 2 O 3 , Si 3 N 4) , which can ensure adhesion between the electrode body 2A and the corrosion-resistant metal film 4. , SiO), highly insulating resin, and the like are used.

この電極構造において、流体に接液する信号電極１Ａの接液部６は、電極本体（導電性の剛体）２Ａの頭部２ａが絶縁層３と耐食性の金属膜４とで覆われた２層構造とされており、絶縁層３の表面が耐食性の金属膜４で覆われている。これにより、耐食性の金属膜４に傷がついても、絶縁層（絶縁部材）３の表面が露出するのみとなる。このため、信号電極１Ａからの出力信号の値が不安定となることがなく、安定した測定を行うことができる。   In this electrode structure, the liquid contact portion 6 of the signal electrode 1A that is in contact with the fluid has two layers in which the head 2a of the electrode body (conductive rigid body) 2A is covered with the insulating layer 3 and the corrosion-resistant metal film 4. The surface of the insulating layer 3 is covered with a corrosion-resistant metal film 4. Thereby, even if the corrosion-resistant metal film 4 is damaged, only the surface of the insulating layer (insulating member) 3 is exposed. For this reason, the value of the output signal from the signal electrode 1A does not become unstable, and stable measurement can be performed.

なお、図１では、信号電極１を内挿形としたが、外挿形としてもよい。図２に、信号電極１を外挿形とした例を示す。   In FIG. 1, the signal electrode 1 is an interpolated shape, but may be an extrapolated shape. FIG. 2 shows an example in which the signal electrode 1 is extrapolated.

図２において、信号電極１（１Ｂ）は、管路２０の外側から取り付けられている。この信号電極１Ｂにおいて、電極本体２（２Ｂ）は軸部２−１とシール部２−２とが一体化された導電性の剛体とされており、この電極本体２Ｂの軸部２−１の下方部２−１ａを管路２０内に位置させている。なお、図示してはいないが、電極本体２（２Ｂ）のシール部２−２は上側からバネによって押し付けられている。   In FIG. 2, the signal electrode 1 (1 </ b> B) is attached from the outside of the pipe line 20. In the signal electrode 1B, the electrode body 2 (2B) is a conductive rigid body in which the shaft portion 2-1 and the seal portion 2-2 are integrated. The shaft portion 2-1 of the electrode body 2B The lower part 2-1a is positioned in the pipe line 20. Although not shown, the seal part 2-2 of the electrode body 2 (2B) is pressed from above by a spring.

この信号電極１Ｂにおいて、電極本体２Ｂの軸部２−１の下方部２−１ａは、絶縁層３と耐食性の金属膜４とで覆われた２層構造とされており、絶縁層３の表面が耐食性の金属膜４で覆われている。すなわち、この信号電極１Ｂにおいても、図１に示した信号電極１Ａと同様、耐食性の金属膜４と電極本体（導電性の剛体）２との間に挟まれた絶縁層３として、本発明でいう絶縁部材が設けられている。   In this signal electrode 1B, the lower part 2-1a of the shaft part 2-1 of the electrode body 2B has a two-layer structure covered with the insulating layer 3 and the corrosion-resistant metal film 4, and the surface of the insulating layer 3 Is covered with a corrosion-resistant metal film 4. That is, in this signal electrode 1B as well as the signal electrode 1A shown in FIG. 1, the insulating layer 3 sandwiched between the corrosion-resistant metal film 4 and the electrode main body (conductive rigid body) 2 is used in the present invention. An insulating member is provided.

この電極構造において、流体に接液する信号電極１Ｂの接液部６は、信号電極１Ｂの軸部２−１の下方部２−１ａが絶縁層３と耐食性の金属膜４とで覆われた２層構造とされており、絶縁層３の表面が耐食性の金属膜４で覆われている。これにより、耐食性の金属膜４に傷がついても、絶縁層（絶縁部材）３の表面が露出するのみとなる。このため、信号電極１Ｂからの出力信号の値が不安定となることがなく、安定した測定を行うことができる。   In this electrode structure, the wetted part 6 of the signal electrode 1B that is in contact with the fluid has the lower part 2-1a of the shaft part 2-1 of the signal electrode 1B covered with the insulating layer 3 and the corrosion-resistant metal film 4. It has a two-layer structure, and the surface of the insulating layer 3 is covered with a corrosion-resistant metal film 4. Thereby, even if the corrosion-resistant metal film 4 is damaged, only the surface of the insulating layer (insulating member) 3 is exposed. For this reason, the value of the output signal from the signal electrode 1B does not become unstable, and stable measurement can be performed.

〔実施の形態２〕
図３は本発明に係る電磁流量計の電極構造の第２例（実施の形態２）を示す縦断面図である。この電極構造の図１に示した電極構造と異なる点は、信号電極１の電極本体２を絶縁性の剛体とし、この電極本体２の頭部２ａおよび胴部２ｂを覆うように耐食性の金属膜４を設け、この耐食性の金属膜４にリード線５を接続している点にある。 [Embodiment 2]
FIG. 3 is a longitudinal sectional view showing a second example (Embodiment 2) of the electrode structure of the electromagnetic flowmeter according to the present invention. This electrode structure is different from the electrode structure shown in FIG. 1 in that the electrode body 2 of the signal electrode 1 is an insulating rigid body, and a corrosion-resistant metal film is formed so as to cover the head 2a and the body 2b of the electrode body 2. 4 and the lead wire 5 is connected to the corrosion-resistant metal film 4.

この信号電極１（１Ｃ）において、管路内２０内に位置する電極本体２（２Ｃ）の頭部２ａは耐食性の金属膜４で覆われている。すなわち、電極本体（絶縁性の剛体）２Ｃの頭部２ａが、本発明でいう絶縁部材として耐食性の金属膜４で覆われている。   In the signal electrode 1 (1C), the head 2a of the electrode body 2 (2C) located in the pipe line 20 is covered with a corrosion-resistant metal film 4. That is, the head 2a of the electrode body (insulating rigid body) 2C is covered with the corrosion-resistant metal film 4 as an insulating member in the present invention.

なお、本実施の形態において、絶縁性の剛体である電極本体２Ｃの材料としては、耐食性の金属膜４との密着性が確保できるものとして、セラミック（ＳｉＣ、Ａｌ2Ｏ3、ＺｒＯ2、Ｙ2Ｏ3、Ｓｉ3Ｎ4、ＳｉＯ），絶縁性の高い樹脂等が用いられている。また、耐食性の金属膜４は、Ｐｔ膜，Ｔｉ膜，Ａｕ膜，Ｔａ膜，ＷＣ膜などとされている。 In the present embodiment, the material of the electrode body 2C, which is an insulating rigid body, is a ceramic (SiC, Al 2 O 3 , ZrO 2 , Y, etc.) that can ensure adhesion to the corrosion-resistant metal film 4. 2 O 3 , Si 3 N 4 , SiO), a highly insulating resin, or the like is used. The corrosion-resistant metal film 4 is a Pt film, a Ti film, an Au film, a Ta film, a WC film, or the like.

この電極構造において、流体に接液する信号電極１Ｃの接液部６は、電極本体（絶縁性の剛体）２Ｃの頭部２ａが耐食性の金属膜４で覆われた構造とされている。これにより、耐食性の金属膜４に傷がついても、電極本体２Ｃの頭部（絶縁部材）２ａの表面が露出するのみとなる。このため、信号電極１Ｃからの出力信号の値が不安定となることがなく、安定した測定を行うことができる。   In this electrode structure, the liquid contact portion 6 of the signal electrode 1C that contacts the fluid has a structure in which the head 2a of the electrode body (insulating rigid body) 2C is covered with a corrosion-resistant metal film 4. Thereby, even if the corrosion-resistant metal film 4 is damaged, only the surface of the head (insulating member) 2a of the electrode body 2C is exposed. For this reason, the value of the output signal from the signal electrode 1C does not become unstable, and stable measurement can be performed.

なお、図３では、信号電極１を内挿形としたが、外挿形としてもよい。図４に、信号電極１を外挿形とした例を示す。   In FIG. 3, the signal electrode 1 is an interpolated shape, but may be an extrapolated shape. FIG. 4 shows an example in which the signal electrode 1 is extrapolated.

図４において、信号電極１（１Ｄ）は、管路２０の外側から取り付けられている。この信号電極１Ｄにおいて、電極本体２（２Ｄ）は軸部２−１とシール部２−２とが一体化された絶縁性の剛体とされており、この電極本体２Ｄの軸部２−１の下方部２−１ａを管路２０内に位置させている。   In FIG. 4, the signal electrode 1 (1 </ b> D) is attached from the outside of the pipe line 20. In the signal electrode 1D, the electrode body 2 (2D) is an insulating rigid body in which the shaft portion 2-1 and the seal portion 2-2 are integrated. The shaft portion 2-1 of the electrode body 2D The lower part 2-1a is positioned in the pipe line 20.

この信号電極１Ｄにおいて、電極本体２Ｄは、その全てが耐食性の金属膜４で覆われている。すなわち、この信号電極１Ｄにおいても、図３に示した信号電極１Ｃと同様、電極本体（絶縁性の剛体）２の軸部２−１の下方部２−１ａが、本発明でいう絶縁部材として耐食性の金属膜４で覆われている。   In the signal electrode 1D, the electrode body 2D is entirely covered with a corrosion-resistant metal film 4. That is, also in this signal electrode 1D, as in the case of the signal electrode 1C shown in FIG. 3, the lower portion 2-1a of the shaft portion 2-1 of the electrode body (insulating rigid body) 2 is used as an insulating member in the present invention. Covered with a corrosion-resistant metal film 4.

この電極構造において、流体に接液する信号電極１Ｄの接液部６は、信号電極１Ｄの軸部２−１の下方部２−１ａが耐食性の金属膜４で覆われた構造とされている。これにより、耐食性の金属膜４に傷がついても、信号電極１Ｄの軸部２−１の下方部（絶縁部材）２−１ａの表面が露出するのみとなる。このため、信号電極１Ｄからの出力信号の値が不安定となることがなく、安定した測定を行うことができる。   In this electrode structure, the liquid contact portion 6 of the signal electrode 1D that is in contact with the fluid has a structure in which the lower portion 2-1a of the shaft portion 2-1 of the signal electrode 1D is covered with a corrosion-resistant metal film 4. . Thereby, even if the corrosion-resistant metal film 4 is damaged, only the surface of the lower portion (insulating member) 2-1a of the shaft portion 2-1 of the signal electrode 1D is exposed. For this reason, the value of the output signal from the signal electrode 1D does not become unstable, and stable measurement can be performed.

なお、図３に示した電極構造では、電極本体２Ｃの胴部２ｂの上面２ｄは耐食性の金属膜４で覆われていないが、この部分も耐食性の金属膜４で覆うようにしてもよい。すなわち、電極本体２Ｃの全てを耐食性の金属膜４で覆うようにしてもよい。また、図４に示した電極構造では、電極本体２Ｄの全てを耐食性の金属膜４で覆うようにしているが、図３に示した電極構造と同様、電極本体２Ｄの一部を残して耐食性の金属膜４で覆うようにしてもよい。   In the electrode structure shown in FIG. 3, the upper surface 2d of the body 2b of the electrode body 2C is not covered with the corrosion-resistant metal film 4, but this portion may also be covered with the corrosion-resistant metal film 4. That is, the entire electrode body 2C may be covered with the corrosion-resistant metal film 4. Further, in the electrode structure shown in FIG. 4, the entire electrode body 2D is covered with the corrosion-resistant metal film 4. However, like the electrode structure shown in FIG. The metal film 4 may be covered.

また、言うまでもないが、上述した実施の形態１，２の電極構造では、耐食性の金属膜４を用いた構造としているので、従来の図６に示された電極構造と同様、安価でかつその形状についても柔軟に対応することができる電極構造となる。   Needless to say, since the electrode structures of the first and second embodiments described above have a structure using the corrosion-resistant metal film 4, they are inexpensive and have the same shape as the conventional electrode structure shown in FIG. It becomes the electrode structure which can respond flexibly.

〔実施の形態の拡張〕
以上、実施の形態を参照して本発明を説明したが、本発明は上記の実施の形態に限定されるものではない。本発明の構成や詳細には、本発明の技術思想の範囲内で当業者が理解し得る様々な変更をすることができる。 [Extension of the embodiment]
The present invention has been described above with reference to the embodiment. However, the present invention is not limited to the above embodiment. Various changes that can be understood by those skilled in the art can be made to the configuration and details of the present invention within the scope of the technical idea of the present invention.

１（１Ａ〜１Ｄ）…信号電極、２（２Ａ〜２Ｄ）…電極本体、２ａ…頭部、２ｂ…胴部、２−１…軸部、２−１ａ…下方部、２−２…シール部、３…絶縁層、４…耐食性の金属膜、５…リード線、６…接液部。   DESCRIPTION OF SYMBOLS 1 (1A-1D) ... Signal electrode, 2 (2A-2D) ... Electrode main body, 2a ... Head, 2b ... Body, 2-1 ... Shaft part, 2-1a ... Lower part, 2-2 ... Sealing part DESCRIPTION OF SYMBOLS 3 ... Insulating layer, 4 ... Corrosion-resistant metal film, 5 ... Lead wire, 6 ... Liquid contact part.

Claims (5)

管路内を流れる流体の流量に応じた起電力を信号電極を通して取り出すように構成された電磁流量計の電極構造において、
前記信号電極は、
前記流体に接液する接液部を備え、
前記接液部は、
前記流体に接液する耐食性の金属膜と、
前記耐食性の金属膜によってその表面が覆われた絶縁部材と
を備えることを特徴とする電磁流量計の電極構造。 In the electrode structure of the electromagnetic flow meter configured to extract the electromotive force according to the flow rate of the fluid flowing in the pipe line through the signal electrode,
The signal electrode is
A wetted part in contact with the fluid;
The liquid contact part is
A corrosion-resistant metal film in contact with the fluid;
An electrode structure for an electromagnetic flowmeter, comprising: an insulating member whose surface is covered with the corrosion-resistant metal film. 請求項１に記載された電磁流量計の電極構造において、
前記信号電極は、
導電性の剛体を備え、
前記絶縁部材は、
前記耐食性の金属膜と前記導電性の剛体との間に挟まれた絶縁層として設けられている
ことを特徴とする電磁流量計の電極構造。 In the electrode structure of the electromagnetic flowmeter according to claim 1,
The signal electrode is
With a conductive rigid body,
The insulating member is
An electrode structure for an electromagnetic flowmeter, wherein the electrode structure is provided as an insulating layer sandwiched between the corrosion-resistant metal film and the conductive rigid body. 請求項１に記載された電磁流量計の電極構造において、
前記信号電極は、
絶縁性の剛体を備え、
前記絶縁部材は、
前記絶縁性の剛体の一部として設けられている
ことを特徴とする電磁流量計の電極構造。 In the electrode structure of the electromagnetic flowmeter according to claim 1,
The signal electrode is
Insulating rigid body,
The insulating member is
An electrode structure for an electromagnetic flowmeter, wherein the electrode structure is provided as a part of the insulating rigid body. 請求項２に記載された電磁流量計の電極構造において、
前記流体に発生する起電力を取り出すためのリード線を備え、
前記耐食性の金属膜は、
前記導電性の剛体と接触しており、
前記リード線は、
前記管路の外側において前記導電性の剛体に接続されている
ことを特徴とする電磁流量計の電極構造。 In the electrode structure of the electromagnetic flowmeter according to claim 2,
Comprising a lead wire for extracting an electromotive force generated in the fluid;
The corrosion-resistant metal film is
In contact with the conductive rigid body;
The lead wire is
An electrode structure for an electromagnetic flowmeter, wherein the electrode structure is connected to the conductive rigid body outside the conduit. 請求項３に記載された電磁流量計の電極構造において、
前記流体に発生する起電力を取り出すためのリード線を備え、
前記耐食性の金属膜は、
前記絶縁部材につながる前記絶縁性の剛体の表面も覆うようにして形成されており、
前記リード線は、
前記管路の外側において前記耐食性の金属膜に接続されている
ことを特徴とする電磁流量計の電極構造。 In the electrode structure of the electromagnetic flowmeter according to claim 3,
Comprising a lead wire for extracting an electromotive force generated in the fluid;
The corrosion-resistant metal film is
It is formed so as to cover the surface of the insulating rigid body connected to the insulating member,
The lead wire is
An electrode structure for an electromagnetic flowmeter, wherein the electrode structure is connected to the corrosion-resistant metal film outside the conduit.
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US10663329B2 (en) 2017-12-15 2020-05-26 Azbil Corporation Electropotential detection electrode of electromagnetic flow meter
US10996087B2 (en) 2017-12-15 2021-05-04 Azbil Corporation Electropotential detection electrode of electromagnetic flow meter
US11092468B2 (en) 2017-12-15 2021-08-17 Azbil Corporation Electropotential detection electrode of electromagnetic flow meter
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