JP6743619B2 - Method of manufacturing mechanical part and method of manufacturing timepiece - Google Patents

Description

The present invention relates to a method of manufacturing a mechanical component and a method of manufacturing a timepiece.

A timepiece such as a mechanical timepiece is equipped with many mechanical parts such as gears. A mechanical component such as a gear has a shaft member inserted and fixed in a through hole formed in the center of a rotating member having a plurality of teeth formed on the outer periphery thereof. Recently, a base material containing silicon has been used as a material for a timepiece. Since mechanical parts made of silicon are lighter than those made of metal, they are suitable as a material for parts having a small inertial force, and are expected to improve energy transmission efficiency. Silicon also has the advantage that it has a high degree of freedom in shape and can improve processing accuracy.

For example, in Patent Document 1, a metal film (stress relaxation layer) is formed on the inner wall surface (inner peripheral surface) of the through hole in order to insert and fix the shaft member into the through hole of the rotating member made of a base material containing silicon. Techniques for doing so are disclosed.

Japanese Patent No. 5892181

However, in the method of manufacturing a mechanical component described in Patent Document 1, since a step for forming a metal film on the inner wall surface of the through hole of the rotating member is required, the step becomes complicated and the manufacturing cost increases. There was a problem that there is a risk of

The present invention has been made to solve at least a part of the problems described above, and can be realized as the following modes or application examples.

Application Example 1 A method of manufacturing a mechanical component according to this application example includes a step of etching a base material containing silicon to form a rotary member having a through hole, and inserting a shaft member into the through hole of the rotary member. And a step of performing an oxidation process after the step of performing the positioning.

A mechanical component formed by processing a material containing silicon using photolithography and etching has advantages that it is lighter than a mechanical component made of metal, has a high degree of freedom in shape, and has high processing accuracy.
According to this application example, after the shaft member is inserted and positioned in the through hole of the rotating member made of the base material containing silicon, the oxidation treatment for forming the silicon oxide film on the surface of the rotating member is performed. By filling the gap between the through hole and the shaft member with the silicon oxide film formed on the inner wall of the hole, it is possible to provide a mechanical component in which the shaft member is firmly fixed to the rotating member.
Further, since the silicon oxide film formed by the oxidation treatment is formed in the through hole with a substantially uniform thickness regardless of the size of the gap with the shaft member, the center of the through hole and the center of the shaft of the shaft member are It is possible to fix the shaft member to the rotating member in a state where they are matched.
Further, the silicon oxide film formed on the surface of the rotating member made of the base material containing silicon can improve the mechanical strength of the mechanical component in which the shaft member is fixed to the rotating member.

Application Example 2 In the method of manufacturing a mechanical component according to the application example described above, the step of performing the oxidation treatment is characterized by performing a thermal oxidation treatment.

According to the thermal oxidation treatment of this application example, a dense silicon oxide film having a sufficient thickness can be formed in a relatively short time, so that the shaft member is firmly fixed to the rotating member and the mechanical strength is high. It is possible to efficiently manufacture mechanical parts.

Application Example 3 In the method of manufacturing a mechanical component according to the application example described above, the thermal oxidation treatment is performed by a steam oxidation method.

According to this application example, since the vapor oxidation method has a higher growth rate of the silicon oxide film than the dry oxidation method, the silicon oxide film is formed more efficiently and the shaft member is fixed to the rotating member. You can

Application Example 4 In the method of manufacturing a mechanical component according to the application example described above, the shaft member is made of tantalum (Ta) or tungsten (W).

According to this application example, tantalum and tungsten have sufficient rigidity as a shaft member and have sufficient heat resistance against the temperature of oxidation treatment such as thermal oxidation treatment performed at a high temperature of 1000° C. or higher. In addition, since it is a material having high workability, it can be suitably used as a material for the shaft member.

Application Example 5 In the method of manufacturing a mechanical component according to the application example described above, the shaft member is made of a material containing silicon.

According to this application example, since the silicon oxide film is formed not only on the surface of the rotary member but also on the surface of the shaft member by the oxidation treatment step, the shaft member is formed in the through hole of the rotary member in a shorter time and stronger Can be firmly fixed.

Application Example 6 The timepiece manufacturing method according to this application example is the method of manufacturing a mechanical component according to any one of the application examples described above in any one of a barrel wheel, a dial wheel, an escape wheel, an pallet fork, and a balance with hairspring. It is characterized by including an assembly step of assembling a movement using the manufactured mechanical parts.

According to this application example, the process includes the step of assembling the movement using the mechanical part manufactured by the method for manufacturing the mechanical part according to any one of the above-mentioned application examples. Therefore, the center of the through hole of the rotating member and the shaft of the shaft member are included. While the rotating member and the shaft member are firmly fixed in a state where they match the center of the, the mechanical parts that are lighter than the mechanical parts made of metal and whose inertial force is suppressed are It is possible to configure a movement that is highly accurate in operation.
Therefore, it is possible to manufacture a highly accurate timepiece having excellent reliability and durability.

The top view of the movement front side of the timepiece which concerns on embodiment. The top view of the escape mechanism of a movement. The perspective view of an escape mechanism. Sectional drawing which follows the AA line of FIG. The top view of the escape wheel gear part as a rotating member. The flowchart which shows the manufacturing method of the escape wheel & pinion as a mechanical component. It is explanatory drawing for demonstrating an escape wheel making process, Comprising: Partial sectional drawing equivalent to the D section of FIG. It is explanatory drawing for demonstrating an escape wheel making process, Comprising: Partial sectional drawing equivalent to the D section of FIG.

Embodiments of the present invention will be described below with reference to the drawings. In the present embodiment, as an example of the mechanical component of the present invention, an escape wheel, which is one of the gears constituting the timepiece component in the movement of the mechanical timepiece, will be described as an example. Further, in each of the following drawings, in order to make each layer and each member a recognizable size, each layer and each member may be shown on a scale different from the actual scale.

[Mechanical clock]
First, the mechanical timepiece 1 will be described. FIG. 1 is a plan view of the movement front side of a mechanical timepiece as a timepiece according to this embodiment.
As shown in FIG. 1, the mechanical timepiece 1 of the present embodiment includes a movement 10 and a casing (not shown) that houses the movement 10.

The movement 10 has a base plate 11 that constitutes a substrate. A dial (not shown) is arranged on the back side of the main plate 11. The wheel train incorporated on the front side of the movement 10 is referred to as a front wheel train, and the wheel train incorporated on the back side of the movement 10 is referred to as a back wheel train.
A winding stem guide hole 11a is formed in the main plate 11, and a winding stem 12 is rotatably incorporated therein. The position of the winding stem 12 in the axial direction is determined by a switching device having a lever 13, a bolt 14, a bolt spring 15, and a backing plate 16. Further, a pinion wheel 17 is rotatably provided on the guide shaft portion of the winding stem 12.

Under such a configuration, the winding stem 12 is rotated in a state in which the winding stem 12 is in the first winding stem position (0th step) closest to the inside of the movement 10 along the rotation axis direction. Then, the pinion wheel 17 rotates through the rotation of a clutch wheel (not shown). Then, when the pinion wheel 17 rotates, the round hole wheel 20 meshing with the wheel rotates. When the round wheel 20 rotates, the square wheel 21 that meshes with it also rotates. Further, as the ratchet wheel 21 rotates, a mainspring (power source) (not shown) housed in the barrel wheel 22 is wound up.

The front train wheel of the movement 10 includes, in addition to the barrel wheel (machine part) 22 described above, a second wheel (machine part) 25, a third wheel (machine part) 26 and a fourth wheel (machine part), which are so-called number wheels. )27, and has the function of transmitting the rotational force of the barrel wheel 22. Further, on the front side of the movement 10, an escapement mechanism 30 and a speed control mechanism 31 for controlling the rotation of the front train wheel are arranged.

The center wheel & pinion 25 is a gear that meshes with the barrel wheel 22. The third wheel & pinion 26 is a gear that meshes with the second wheel & pinion 25. The fourth wheel & pinion 27 is a gear meshing with the third wheel & pinion 26.
The escapement mechanism 30 is a mechanism that controls the rotation of the above-described front train wheel, and includes an escape wheel (mechanical part) 35 that meshes with the fourth wheel & pinion 27, and the escape wheel 35 that escapes regularly. And an pallet fork (machine part) 36 for rotating.
The speed control mechanism 31 is a mechanism that controls the speed of the escapement mechanism 30 described above, and includes a balance with hairspring 40 (mechanical component) 40.

<Escape mechanism>
Next, the escape mechanism 30 of the movement 10 described above will be described in more detail. 2 is a plan view of the escape mechanism 30, FIG. 3 is a perspective view of the escape mechanism 30, and FIG. 4 is a sectional view taken along the line AA of FIG.
As shown in FIGS. 2 to 4, the escape wheel & pinion 35 of the escapement mechanism 30 is fixed to the escape wheel gear portion 101 as a rotating member and coaxially with the escape wheel gear portion 101 (axis O1). And a shaft member (rotating shaft) 102. In the following description, the direction along the axis O1 of the escape wheel gear 101 and the shaft member 102 is simply referred to as the axial direction, the direction orthogonal to the axis O1 is referred to as the radial direction, and the direction around the axis O1 is referred to as the circumferential direction.

FIG. 5 is a plan view of the escape wheel gear portion 101 as a rotating member.
As shown in FIGS. 2 to 5, the escape wheel gear portion 101 is made of a material having a crystal orientation, such as single crystal silicon, and has a surface 101a as one surface and another surface opposite to one surface. The back surface 101b as a surface is a flat surface and is a plate-like member having a uniform thickness over the entire surface. Specifically, the escape wheel gear portion 101 has a peripheral rim portion 111, a central hub portion 112, and a plurality of spoke portions 113 connecting the rim portion 111 and the hub portion 112.
On the outer peripheral surface of the rim portion 111, a plurality of tooth portions 114 formed in a special hook shape are provided so as to protrude outward in the radial direction. Pawls 144a and 144b of the pallet fork 36, which will be described later, come into contact with the tips of the plurality of tooth portions 114.

As shown in FIGS. 3 to 5, the hub portion 112 is a disc-shaped member arranged inside the rim portion 111, and a through hole 115 penetrating in the axial direction is formed in the central portion thereof. .. The through hole 115 has a circular shape in a plan view and penetrates from the front surface 101a along the axial direction to the back surface 101b.

Each spoke portion 113 radially extends from the outer peripheral edge of the hub portion 112 toward the inner peripheral edge of the rim portion 111, and connects the rim portion 111 and the hub portion 112.

The shaft member 102 has tenon portions 121a and 121b located at both ends in the axial direction, and an escape hook portion 122 that meshes with the gear portion of the fourth wheel & pinion 27 described above.
Of the tenon parts 121a and 121b, one end tenon part 121a located on one axial side is rotatably supported by a train wheel bridge (not shown), and the other tenon part 121b located on the other axial side is described above. The main plate 11 is rotatably supported.

The escape hook portion 122 is formed at one end of the shaft member 102 near the tenon portion 121a. Then, when the escape wheel pinion 122 is engaged with the fourth wheel & pinion 27 (see FIG. 1), the rotational force of the fourth wheel & pinion 27 is transmitted to the shaft member 102 so that the escape wheel & pinion 35 is rotated. ing.

The press-fitting shaft portion 123 is formed to have a larger diameter than the above-mentioned tenon portions 121a and 121b, and is inserted into the through hole 115 of the escape wheel gear portion 101 from the back surface 101b side. In this case, the press-fitting shaft portion 123 is arranged in the through hole 115 with a part thereof protruding from the escape wheel gear portion 101 toward the other end side in the axial direction.

Further, in the shaft member 102, a flange portion 124 protruding outward in the radial direction is formed between the escape pinion portion 122 and the press-fitting shaft portion 123. The flange portion 124 has a larger diameter than the opening of the through-hole 115 on the back surface 101b side, and the end surface located on the other end side in the axial direction contacts the back surface 101b of the hub portion 112.

In the escape wheel & pinion 35 thus configured, the plurality of tooth portions 114 mesh with the pallet fork 36 (see FIG. 2 ). The pallet fork 36 includes an pallet fork 142d formed in a T shape by three pallet forks 143, and an pallet fork 142f. The pallet fork 143d, which is a shaft, allows the pallet fork 142d to rotate. ing. Both ends of the pallet stem 142f are rotatably supported by the main plate 11 and the pallet bridge (not shown).

Two pallet beams 143 out of the three pallet fork beams 143 are provided with claw stones 144a and 144b, and an pallet fork 145 is attached to the tip of the remaining one of the pallet fork beams 143. The nail stones 144a and 144b are rubies formed in a rectangular column shape, and are bonded and fixed to the pallet beam 143 with an adhesive or the like.

In the pallet fork 36 configured in this manner, the pawl stone 144a or the pawl stone 144b comes into contact with the tip of the tooth portion 114 of the escape wheel 35 when rotated around the pallet fork pallet 142f. .. At this time, the pallet beam 143, to which the pallet fork 145 is attached, comes into contact with a dote pin (not shown), so that the pallet fork 36 is prevented from further rotating in the same direction. As a result, the rotation of the escape wheel & pinion 35 is also temporarily stopped.

[Method for manufacturing escape wheel]
Next, a method for manufacturing the escape wheel & pinion 35 as the mechanical component described above will be described.
FIG. 6 is a flowchart showing a method for manufacturing the escape wheel & pinion 35 as a mechanical component, and FIGS. 7A and 7B are explanatory diagrams for explaining the steps for producing the escape wheel & pinion 35. It is a fragmentary sectional view corresponding to the D section.

In FIG. 6, the manufacturing method of the escape wheel & pinion 35 of the present embodiment includes a step of forming a gear portion (gang escape gear portion) 101 as a rotating member, a step of preparing a shaft member 102, and these steps. And a step of assembling the gear portion 101 and the shaft member 102, which have been prepared through.
In the step of forming the gear portion 101, first, a base material (wafer) 200 containing silicon is prepared (step S1).

Next, a photoresist is applied to the front surface 200a of the base material 200 by, for example, a spin coating method or a spray coating method (step S2), and a back surface mask material is arranged on the back surface 200b of the base material 200 (step S3). As the photoresist, either a negative type material or a positive type material can be adopted. Further, the back surface mask material has a mask performance capable of protecting the back surface 200b of the base material 200 from etching when the base material 200 is etched in the step of etching the base material 200 which will be described later, and in the step of etching. Later, a resin material having a property that can be surely removed is selected and applied.
Each of the photoresist and the backside mask material applied to the base material 200 is cured at a predetermined temperature. However, when there is a large difference between the curing condition of the photoresist and the curing condition of the backside mask material, the photoresist and the backside surface are cured. If the curing conditions are separately performed with the mask material and the curing conditions for the photoresist and the curing conditions for the back surface coating material are the same or similar, the curing process can be performed at the same time to improve the efficiency of the process.
The photoresist coating process and the backside mask material coating process may be performed in reverse order for convenience of setting the process sequence in consideration of the curing conditions of each resin material.

Next, the photoresist is exposed by a photolithography technique (step S4) and then developed (step S5), and a mask (etching mask) corresponding to the plan view outer shape of the escape wheel gear portion 101 is formed. Then, a photoresist pattern to be the following is formed.

Next, the outer shape of the through hole 115 and the escape wheel gear part 101 is formed by etching the base material 200 using the above-mentioned photoresist pattern as a mask (step S6). Specifically, deep reactive ion etching (DRIE=Deep Reactive Ion Etching) is performed to etch the base material 200 so as to penetrate the base material 200 in the thickness direction, so that the outer shape of the escape wheel gear portion 101 is changed. Obtainable. Here, since the inner surface (inner wall) of the penetrating portion such as the through hole 115 formed by the opening of the photoresist pattern is protected by the back surface mask material formed on the back surface 200b of the base material 200, from the back surface 200b. The inner surface shape of the penetrating portion does not change without being etched.

Then, by performing a removing step of removing the photoresist pattern by the photoresist and the backside mask material (step S7), the escape wheel gear portion 101 described above is obtained, and the step of forming the escape wheel gear portion 101 is performed. finish. The resin can be removed by wet etching with fuming nitric acid or an organic solvent capable of dissolving and peeling the photoresist pattern (photoresist) and the backside mask material, or oxygen plasma ashing.

Separately from the step of forming the escape wheel gear portion 101, a step of preparing the shaft member 102 prepares the shaft member 102 separately formed by machining such as cutting or grinding (step S11). .. The shaft member 102 has sufficient rigidity as a shaft body, and has sufficient heat resistance against the temperature of oxidation treatment such as thermal oxidation treatment performed at a high temperature of 1000° C. or higher in the step of performing the oxidation treatment described later. It is preferably made of the material tantalum (Ta) or tungsten (W). Tantalum and tungsten are particularly suitable as the material of the shaft member 102 because they are materials having excellent workability such as cutting and grinding in addition to the materials having excellent rigidity and heat resistance described above.

Next, a step of inserting and positioning the shaft member 102 prepared in the preparation step described above into the through hole 115 of the escape wheel gear portion 101 as the rotary member formed in the formation step described above is performed (step S21). ..
FIG. 7A shows a state in which the shaft member 102 is inserted and positioned in the through hole 115 of the escape wheel gear portion 101 in the process of creating the escape wheel & pinion 35. As shown in FIG. 7A, the diameter of the opening of the through hole 115 of the escape wheel gear portion 101 is larger than the diameter of the press-fitting shaft portion 123 arranged in the through hole 115 of the shaft member 102. There is. Specifically, the diameter of the through hole 115 is such that the inner wall surface 200c of the through hole 115 is not chipped when the shaft member 102 is inserted into the through hole 115, and the escape wheel gear portion 101 is provided. The diameter of the press-fitting shaft portion 123 of the shaft member 102 is larger than the diameter of the press-fitting shaft portion 123 so that the positioning state of the shaft member 102 can be maintained. For example, when the diameter of the press-fitting shaft portion 123 of the shaft member 102 is 320 μm, the diameter of the opening of the through hole 115 is formed to be about 322 μm.
Further, as shown in FIG. 7A, when the shaft member 102 is inserted into the through hole 115 of the escape wheel gear portion 101 and positioned, the inner wall surface 200c of the through hole 115 and the shaft member 102 (press-fit shaft portion 123) are Does not have to be uniform at various points in the circumferential direction of the shaft member 102, and the axis O1 of the shaft member 102 and the center of the escape wheel gear portion 101 (center of the through hole 115) deviate within a predetermined range. May be.

After the shaft member 102 is inserted and positioned in the through hole 115 of the escape wheel gear portion 101 described above, the surface of the escape wheel gear portion 101 as a rotating member is then made of silicon dioxide (SiO ₂ ). An oxidation process for forming an oxide film is performed (step S22 in FIG. 6). The oxidation treatment is preferably a thermal oxidation treatment performed at a high temperature of 1000° C. or higher, for example. By the thermal oxidation process, a dense silicon oxide film having a predetermined thickness can be formed in a relatively short time. In this embodiment, thermal oxidation treatment is performed by the steam oxidation method. In the steam oxidation method, the silicon oxide film grows faster than the dry oxidation method in the thermal oxidation process, so that the silicon oxide film having a desired thickness can be formed more efficiently.

FIG. 7B shows a state after the oxidation process in the process of creating the escape wheel & pinion 35. As shown in FIG. 7B, after the shaft member 102 is inserted and positioned in the through hole 115 of the escape wheel gear portion 101 made of the base material 200 containing silicon, silicon dioxide is deposited on the surface of the escape wheel gear portion 101. Since the silicon oxide film 250 made of is formed, the silicon oxide film 250 formed on the inner wall surface 200c of the through hole 115 fills the gap between the through hole 115 and the press-fitting shaft portion 123 of the shaft member 102, so that the through hole is formed. The press-fitting shaft portion 123 is fitted in 115. Thereby, the escape wheel & pinion 35 can be provided as a mechanical component in which the shaft member 102 is firmly fixed to the escape wheel gear portion 101.
In addition, the silicon oxide film 250 formed by the oxidation treatment has the inner wall surface 200c of the through hole 115 and the inner wall surface 200c of the base hole regardless of the size of the gap between the through hole 115 and each part of the shaft member 102 (the press-fitting shaft portion 123). The material 200 is formed on the front surface 200a and the back surface 200b with a substantially uniform thickness. As a result, as shown in FIG. 7A, when the shaft member 102 is inserted into the through hole 115 of the escape wheel gear portion 101 and positioned, the inner wall surface 200c of the through hole 115 and the shaft member 102 (press-fit shaft portion 123). 7B even when the gap between the shaft member 102 is not uniform in the circumferential direction of the shaft member 102 or the axis O1 of the shaft member 102 and the center of the escape wheel gear portion 101 (the center of the through hole 115) are deviated from each other. As shown in, the silicon oxide film 250 formed on the front surface (front surface 200a and back surface 200b) of the base material 200 and the inner wall surface 200c of the through hole 115 with a uniform thickness allows the center of the through hole 115 and the axis of the shaft member to The shaft member 102 can be fixed to the escape wheel gear portion 101 as a rotating member in a state where the centers thereof match.
Further, since the shaft member 102 formed by machining such as cutting or grinding has irregularities such as minute scratches on its surface, the silicon oxide film 250 of the escape wheel gear portion 101 is formed on these irregularities. By entering, the so-called anchor effect works and the effect that the shaft member 102 is more firmly fixed to the through hole 115 of the escape wheel gear portion 101 is obtained.

According to the manufacturing method of the escape wheel & pinion 35 (mechanical component) of the present embodiment described above, the following effects can be obtained.
According to the present embodiment, after the shaft member 102 is inserted and positioned in the through hole 115 of the escape wheel gear portion 101 as the rotating member made of the base material 200 containing silicon, the escape wheel gear portion 101 is positioned. Since the oxidation treatment for forming the silicon oxide film 250 on the surface is performed, the gap between the through hole 115 and the shaft member 102 is filled with the silicon oxide film 250 formed on the inner wall surface 200c of the through hole 115, and thus the escape wheel gear. It is possible to provide the escape wheel & pinion 35 as a mechanical component in which the shaft member 102 is firmly fixed to the portion 101.

Further, since the silicon oxide film 250 formed by the oxidation process is formed in the through hole 115 with a substantially uniform thickness regardless of the size of the gap between the press-fitting shaft portion 123 of the shaft member 102 and the through hole 115. The shaft member 102 can be fixed to the escape wheel gear portion 101 in a state where the center and the center of the shaft of the shaft member 102 (the axis O1) are aligned with each other.

In addition, in the above-described embodiment, the base material 200 made of a material containing silicon is processed by using a standard photolithography technique and etching, so that the precision mechanical component Gangi is a relatively simple process. The car 35 can be manufactured at low cost.
Further, at least a part of precision mechanical parts such as the escape wheel gear part 101 formed by processing the base material 200 containing silicon by the manufacturing method of the present embodiment is lighter than the metal mechanical parts, and There is an advantage that the degree of freedom of the shape is high and the outer shape can be formed with high accuracy.
Further, the escape wheel gear portion 101 made of the base material 200 containing silicon, which is relatively brittle and is likely to be chipped, has a significantly improved mechanical strength due to the silicon oxide film 250 formed in the step of performing the oxidation treatment. The effect is obtained.

Further, the method for manufacturing a mechanical component of the above-described embodiment is configured by relatively simple steps such as standard photolithography and oxidation treatment, so that the mechanical component can be manufactured at a high yield at a low cost. It is possible to provide a manufacturing method for obtaining the vehicle 35.

The present invention is not limited to the above-described embodiments, and various changes and improvements can be added to the above-described embodiments. Below, the modification of the manufacturing method of the escape wheel & pinion 35 (mechanical component) of the said embodiment is described.

(Modification)
In the above embodiment, it was described that tantalum or tungsten is preferable as the material of the shaft member 102, but the material is not limited to this. A material containing silicon may be used as the material of the shaft member 102.

According to such a configuration, after the shaft member 102 is inserted into the through hole 115 of the escape wheel gear portion 101 and positioned, the through hole of the escape wheel gear portion 101, which is a rotating member, is formed by the oxidation process. Since the silicon oxide film is formed not only on the surface including the inner wall surface 200c of 115 (the front surface 200a and the back surface 200b) but also on the surface of the shaft member 102, the escape wheel gear portion as a rotating member is stronger in a shorter time. The shaft member 102 can be firmly fixed to the through hole 115 of 101.

[Mechanical watch manufacturing method]
Next, a method of manufacturing the mechanical timepiece of the invention will be described.
The method of manufacturing a mechanical timepiece of the invention includes a barrel wheel 22, a wheel & pinion (second wheel & pinion 25, third wheel & wheel 26, fourth wheel & pinion 27), an escape wheel & pinion 35 shown in any of FIGS. The movement 10 is made by using a mechanical component manufactured by any one of the mechanical components described in the escape wheel gear portion 101 of the above-described embodiment and the modified example as a representative example in either the pallet fork 36 or the balance with hairspring 40. It is characterized by including an assembling process for assembling.

Such a mechanical timepiece manufacturing method includes a step of assembling the movement 10 using the mechanical parts manufactured by the mechanical part manufacturing methods described in the above-described embodiments and modifications, so that the mechanical parts made of metal are included. The movement 10 having high energy transmission efficiency can be configured by a mechanical component that is lighter than the above and has a small inertial force.
Further, the center of the through hole of the rotary member in the mechanical component such as the through hole 115 of the escape wheel gear portion 101 and the shaft member 102 in the escape wheel & pinion 35 of the above embodiment and the center of the shaft of the shaft member. Since the matched mechanical parts are used, it can contribute to the improvement of the precision of the timepiece movement.
Therefore, it is possible to provide a highly accurate mechanical timepiece having excellent reliability and durability.

Although the embodiment of the present invention made by the inventor has been specifically described above, the present invention is not limited to the above-described embodiment, and various modifications may be made without departing from the scope of the invention. Is possible.

For example, in the above-described embodiment and modified examples, it is described that the material of the shaft member 102 of the escape wheel & pinion 35 as a mechanical component is preferably tantalum (Ta), tungsten (W), or silicon. Not limited to these, other materials may be used as long as they have heat resistance to the temperature of thermal oxidation treatment such as steam oxidation in the subsequent oxidation treatment step.

DESCRIPTION OF SYMBOLS 1... Mechanical timepiece, 10... Movement, 11... Main plate, 11a... Winding stem guide hole, 12... Winding stem, 17... Gear wheel, 20... Round hole wheel, 21... Square wheel, 22... barrel wheel, 25... Second wheel, 26... Third wheel, 27... Fourth wheel, 30... Escape mechanism, 31... Speed control mechanism, 35... Escape wheel as mechanical parts, 36... Ankle, 40... Balance wheel, 101... Rotation Gangi gear portion (gear portion) as a member, 102... Shaft member, 111... Rim portion, 112... Hub portion, 113... Spoke portion, 114... Tooth portion, 115... Through hole, 121a... One end tenon portion, 121b ... other end mortise part, 122... squeeze pinion part, 123... press-fitting shaft part, 124... flange part, 142d... pallet fork, 142f... pallet fork, 143... pallet beam, 144a, 144b... nail stone, 145... pallet fork , 200... Base material, 200a... Front surface, 200b... Back surface, 200c... Inner wall surface, 250... Silicon oxide film.

Claims (6)

A step of forming a rotating member having a through hole by etching a base material containing silicon,
Inserting the shaft member into the through hole of the rotating member and positioning the shaft member;
A step of performing an oxidation treatment after the step of positioning,
A method of manufacturing a mechanical component, comprising: The method of manufacturing a machine component according to claim 1,
A method of manufacturing a mechanical component, wherein the step of performing the oxidation treatment is a thermal oxidation treatment. The method for manufacturing a machine component according to claim 2,
The method of manufacturing a mechanical component, wherein the thermal oxidation treatment is performed by a steam oxidation method. The method for manufacturing a machine component according to claim 2 or 3,
The method of manufacturing a mechanical component, wherein the shaft member is made of tantalum (Ta) or tungsten (W). The method for manufacturing a mechanical component according to claim 1,
The method of manufacturing a mechanical component, wherein the shaft member is made of a material containing silicon. Assembly for assembling a movement by using a mechanical part manufactured by the method for manufacturing a mechanical part according to any one of claims 1 to 5 in a barrel complete, a watch wheel, an escape wheel, an pallet fork, and a balance with hairspring. A method for manufacturing a timepiece, including the steps.

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