JP6737191B2 - Fuel injection valve and manufacturing method thereof - Google Patents

Fuel injection valve and manufacturing method thereof Download PDF

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JP6737191B2
JP6737191B2 JP2017008221A JP2017008221A JP6737191B2 JP 6737191 B2 JP6737191 B2 JP 6737191B2 JP 2017008221 A JP2017008221 A JP 2017008221A JP 2017008221 A JP2017008221 A JP 2017008221A JP 6737191 B2 JP6737191 B2 JP 6737191B2
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valve
fuel injection
polished state
fuel
diamond
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JP2018115629A (en
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経昭 南口
経昭 南口
暢也 小澤
暢也 小澤
亘 小田原
亘 小田原
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Denso Corp
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本発明は、弁ハウジングの噴孔から内燃機関へ燃料を噴射する燃料噴射弁及びその製造方法に、関する。 The present invention relates to a fuel injection valve for injecting fuel from an injection hole of a valve housing to an internal combustion engine and a method for manufacturing the same.

従来、噴孔よりも上流側にて弁ハウジングの有する円形内輪郭の弁座部に対し、弁ハウジング内に収容された弁部材の有する円形外輪郭の弁体部を同軸上に離着座させる燃料噴射弁は、広く知られている。このような燃料噴射弁では、弁座部に対する弁体部の離着座により噴孔からの燃料噴射が断続する。ここで、弁座部に対する弁体部の着座箇所では、それら両要素同士の摺動が製造公差の範囲で着座と同時的に生じるため、耐摩耗性が求められる。例えば省燃費への要求から燃圧上昇の傾向にある直噴ガソリンエンジン用等の燃料噴射弁では、摺動が生じる着座箇所での耐摩耗性を高めておくことを求められている。 Conventionally, a fuel for coaxially mounting and dismounting a valve body portion having a circular outer contour, which is included in a valve member housed in the valve housing, with respect to a valve seat portion having a circular inner contour, which is located upstream of the injection hole. Injection valves are widely known. In such a fuel injection valve, the fuel injection from the injection hole is intermittent due to the seating of the valve body with respect to the valve seat. Here, at the seated portion of the valve body portion with respect to the valve seat portion, the sliding of these two elements occurs simultaneously with the seating within the range of manufacturing tolerance, and therefore wear resistance is required. For example, in a fuel injection valve for a direct injection gasoline engine, which has a tendency to increase fuel pressure due to a demand for fuel economy, it is required to improve wear resistance at a seating position where sliding occurs.

こうした状況下、燃料噴射弁において弁部材とその相手部材との摺動部位の少なくとも一方にダイヤモンドライクカーボン（以下、ＤＬＣ）膜を設けて耐摩耗性を確保する技術が、特許文献１に開示されている。 Under such circumstances, Patent Document 1 discloses a technique for ensuring wear resistance by providing a diamond-like carbon (hereinafter, referred to as DLC) film on at least one of sliding portions of a valve member and its counterpart member in a fuel injection valve. ing.

特許第３８９１４３３号公報Japanese Patent No. 3891433

さて、特許文献１の開示技術では、弁部材の相手部材としてガイドが想定されていると共に、ＤＬＣ膜の厚さが０．３μｍ〜２．０μｍと比較的薄く設定されている。一方、例えば上述の如き直噴ガソリンエンジン用等の燃料噴射弁では、燃圧上昇に対応させるべく、弁座部及び弁体部の少なくとも一方にＤＬＣ膜を厚く成膜することで、繰り返しの衝突でも基材の露出が抑えられる程度に耐久性を高めておくことを求められている。 By the way, in the technique disclosed in Patent Document 1, a guide is assumed as a mating member of the valve member, and the thickness of the DLC film is set to a relatively thin thickness of 0.3 μm to 2.0 μm. On the other hand, for example, in a fuel injection valve for a direct injection gasoline engine as described above, a thick DLC film is formed on at least one of a valve seat portion and a valve body portion in order to cope with an increase in fuel pressure, so that repeated collisions are possible. It is required to enhance the durability so that the exposure of the base material can be suppressed.

そこで本発明者らは、弁座部及び弁体部の少なくとも一方にＤＬＣ膜を厚めの２μｍ超過にて成膜した結果、新たな問題の生じることを知見したのである。その問題とは、特許文献１の開示技術の如くＤＬＣ膜を成膜する基材の表面粗さを小さく抑えたとしても、厚い成膜直後のダイヤモンドライクカーボン膜では表面凹凸が大きくなって真円度が悪化する、というものである。ここで真円度の悪化は、着座状態での弁座部及び弁体部間にて油密性を低下させて燃料漏れを生じさせてしまうため、排ガス浄化の観点から望ましくないのである。 Therefore, the inventors of the present invention have found that a new problem occurs as a result of forming a DLC film on at least one of the valve seat portion and the valve body portion with a thickness exceeding 2 μm. The problem is that even if the surface roughness of the base material on which the DLC film is formed is suppressed to a small level as in the technique disclosed in Patent Document 1, the diamond-like carbon film immediately after the formation of a thick film has large surface irregularities and a perfect circle. The degree is worse. Here, the deterioration of the roundness is not desirable from the viewpoint of exhaust gas purification because it deteriorates the oil tightness between the valve seat portion and the valve body portion in the seated state and causes fuel leakage.

本発明は、以上説明した本発明者らの知見による真円度悪化のメカニズムに鑑みてなされたものであって、その目的は、耐摩耗性と耐久性と油密性とを確保する燃料噴射弁及びその製造方法を、提供することにある。 The present invention has been made in view of the mechanism of the deterioration of roundness based on the findings of the present inventors described above, and its purpose is to perform fuel injection ensuring wear resistance, durability and oil tightness. A valve and a manufacturing method thereof are provided.

以下、課題を達成するための発明の技術的手段について、説明する。尚、発明の技術的手段を開示する特許請求の範囲及び本欄に記載された括弧内の符号は、後に詳述する実施形態に記載された具体的手段との対応関係を示すものであり、発明の技術的範囲を限定するものではない。 The technical means of the invention for achieving the object will be described below. Incidentally, the reference numerals in parentheses described in the claims disclosing the technical means of the present invention and this column indicate the corresponding relationship with the specific means described in the embodiment described in detail later, It does not limit the technical scope of the invention.

上述の課題を解決するために開示された第一発明の燃料噴射弁は、
内燃機関へ燃料を噴射する噴孔（１８）、及び噴孔よりも上流側にて円形内輪郭の弁座部（１９）を有する弁ハウジング（１０）と、
弁ハウジング内に収容されており、弁座部に対して同軸上に離着座する円形外輪郭の弁体部（４８）を有し、当該離着座により噴孔からの燃料噴射を断続させる弁部材（４０）と、
弁座部及び弁体部のうち少なくとも一方である特定弁部は、
研磨状態の下地面（７０ａ）を有する基材（７０）と、
研磨状態の外表面（７１ａ）に０．６μｍ以下の真円度を与えているＤＬＣ膜（７４）を２μｍ超過の厚さにて有し、下地面に積層されている被覆層（７１）とを、含んで構成され、
ＤＬＣ膜は、特定弁部において、弁座部及び弁体部間での繰り返しの着座が生じる部分に、２．２以上且つ２．４以下の屈折率をもって成膜されている。 The fuel injection valve of the first invention disclosed to solve the above problems is
A valve housing (10) having an injection hole (18) for injecting fuel into the internal combustion engine, and a valve seat portion (19) having a circular inner contour upstream of the injection hole;
A valve member that is housed in a valve housing and has a circular outer contour valve body portion (48) that is seated and seated coaxially with respect to the valve seat portion, and that allows the fuel seat to be intermittently injected by the seating seat. (40),
The specific valve portion, which is at least one of the valve seat portion and the valve body portion,
A substrate (70) having a ground surface (70a) in a polished state;
A coating layer (71) having a DLC film (74) having a roundness of 0.6 μm or less on the polished outer surface (71a) with a thickness of more than 2 μm and being laminated on the base surface. Is configured to include,
The DLC film is formed with a refractive index of 2.2 or more and 2.4 or less at a portion where repeated seating occurs between the valve seat portion and the valve body portion in the specific valve portion .

このような第一発明によると、弁座部及び弁体部のうち少なくとも一方である特定弁部にて基材の下地面に積層されている被覆層は、耐摩耗性を確保するためのＤＬＣ膜を２μｍ超過の厚さにて有することで、耐久性も確保できる。しかも、研磨状態の下地面に積層された被覆層を構成する２μｍ超過の厚いＤＬＣ膜であっても、研磨状態の外表面にて真円度が０．６μｍ以下に抑えられることで、着座状態での弁座部及び弁体部間にて油密性を確保できる。 According to such a first invention, the coating layer laminated on the lower ground of the base material in the specific valve portion which is at least one of the valve seat portion and the valve body portion is a DLC for ensuring wear resistance. By having the film with a thickness of more than 2 μm, durability can be secured. Moreover, even if the DLC film that is thicker than 2 μm and constitutes the coating layer laminated on the ground surface in the polished state, the roundness of the outer surface in the polished state is suppressed to 0.6 μm or less, and the seated state It is possible to secure oil tightness between the valve seat portion and the valve body portion in.

また、開示された第二発明の製造方法は、第一発明の燃料噴射弁を製造する方法であって、
基材に超仕上げを施すことにより、下地面を研磨状態に形成する第一研磨工程（Ｓ２０）と、
ＤＬＣ膜を有する被覆層を、研磨状態の下地面に積層する積層工程（Ｓ３０）と、
ＤＬＣ膜に超仕上げを施すことにより、外表面を研磨状態に形成する第二研磨工程（Ｓ４０）とを、含む。
さらに、開示された第三発明の製造方法は、
内燃機関へ燃料を噴射する噴孔（１８）、及び噴孔よりも上流側にて円形内輪郭の弁座部（１９）を有する弁ハウジング（１０）と、
弁ハウジング内に収容されており、弁座部に対して同軸上に離着座する円形外輪郭の弁体部（４８）を有し、当該離着座により噴孔からの燃料噴射を断続させる弁部材（４０）と、
弁座部及び弁体部のうち少なくとも一方である特定弁部は、
研磨状態の下地面（７０ａ）を有する基材（７０）と、
研磨状態の外表面（７１ａ）に０．６μｍ以下の真円度を与えているＤＬＣ膜（７４）を２μｍ超過の厚さにて有し、下地面に積層されている被覆層（７１）とを、含んで構成されている燃料噴射弁を製造する方法であって、
基材に超仕上げを施すことにより、下地面を研磨状態に形成する第一研磨工程（Ｓ２０）と、
ＤＬＣ膜を有する被覆層を、研磨状態の下地面に積層する積層工程（Ｓ３０）と、
ＤＬＣ膜に超仕上げを施すことにより、外表面を研磨状態に形成する第二研磨工程（Ｓ４０）とを、含み、
第二研磨工程では、研磨状態の下地面との真円度差が０．２μｍ以下の研磨状態に外表面を形成する。 The disclosed method of manufacturing the second invention is a method of manufacturing the fuel injection valve of the first invention,
A first polishing step (S20) for forming a ground surface in a polished state by subjecting the base material to superfinishing;
A laminating step (S30) of laminating a coating layer having a DLC film on a ground surface in a polished state,
A second polishing step (S40) of forming the outer surface in a polished state by subjecting the DLC film to superfinishing.
Further, the manufacturing method of the disclosed third invention is
A valve housing (10) having an injection hole (18) for injecting fuel into the internal combustion engine, and a valve seat portion (19) having a circular inner contour upstream of the injection hole;
A valve member that is housed in a valve housing and has a circular outer contour valve body portion (48) that is seated and seated coaxially with respect to the valve seat portion, and that allows the fuel seat to be intermittently injected through the seat hole. (40),
The specific valve portion, which is at least one of the valve seat portion and the valve body portion,
A base material (70) having a ground surface (70a) in a polished state;
A coating layer (71) having a DLC film (74) having a roundness of 0.6 μm or less on the polished outer surface (71a) with a thickness of more than 2 μm and being laminated on the base surface. A method of manufacturing a fuel injection valve including:
A first polishing step (S20) for forming a ground surface in a polished state by subjecting the base material to superfinishing;
A laminating step (S30) of laminating a coating layer having a DLC film on a ground surface in a polished state,
A second polishing step (S40) of forming the outer surface into a polished state by subjecting the DLC film to superfinishing,
In the second polishing step, the outer surface is formed in a polished state having a circularity difference of 0.2 μm or less from the ground surface of the polished state.

このような第二発明では、第一研磨工程の超仕上げによって基材の下地面が研磨状態に形成された後、積層工程にて当該下地面に積層される被覆層のうちＤＬＣ膜が与える外表面も、第二研磨工程の超仕上げによって研磨状態に形成される。これにより特定弁部では、ＤＬＣ膜を２μｍ超過の厚さに形成して耐摩耗性及び耐久性を確保できるだけでなく、研磨状態の外表面真円度を０．６μｍ以下に抑えて油密性を確保できる。 In such a second invention, after the lower ground of the substrate is formed into a polished state by the superfinishing of the first polishing step, the outer layer provided by the DLC film in the coating layer laminated on the underlying surface in the laminating step. The surface is also formed into a polished state by superfinishing in the second polishing step. As a result, in the specific valve part, not only can the DLC film be formed to a thickness of over 2 μm to ensure wear resistance and durability, but also the outer surface roundness in the polished state can be suppressed to 0.6 μm or less and oil tightness can be ensured. Can be secured.

一実施形態による燃料噴射弁を示す断面図である。It is a sectional view showing a fuel injection valve by one embodiment. 図１の燃料噴射弁を部分的に拡大して示す断面図である。It is sectional drawing which expands and shows the fuel injection valve of FIG. 1 partially. 図２に示す基材及び被覆層について説明するための断面図である。It is sectional drawing for demonstrating the base material and coating layer shown in FIG. 図１の燃料噴射弁におけるＤＬＣ膜の厚さと真円度との関係を示すグラフである。3 is a graph showing the relationship between the DLC film thickness and the roundness in the fuel injection valve of FIG. 1. 図１の燃料噴射弁におけるＤＬＣ膜の屈折率と摩耗量との関係を示すグラフである。3 is a graph showing the relationship between the refractive index and wear amount of the DLC film in the fuel injection valve of FIG. 図１の燃料噴射弁におけるＤＬＣ膜の真円度と油密性との関係を示すグラフである。3 is a graph showing a relationship between circularity and oil tightness of a DLC film in the fuel injection valve of FIG. 1. 図１の燃料噴射弁におけるＤＬＣ膜の厚さと基材に対する真円度差との関係を示すグラフである。3 is a graph showing the relationship between the thickness of the DLC film and the circularity difference with respect to the base material in the fuel injection valve of FIG. 1. 図１の燃料噴射弁の製造方法を説明するためのフローチャートである。6 is a flowchart for explaining a method of manufacturing the fuel injection valve of FIG. 1. 図８の準備工程Ｓ１０を説明するための断面図である。It is sectional drawing for demonstrating the preparation process S10 of FIG. 図８の第一研磨工程Ｓ２０を説明するための模式図である。It is a schematic diagram for demonstrating the 1st polishing process S20 of FIG. 図８の積層工程Ｓ３０を説明するための模式図である。It is a schematic diagram for demonstrating the lamination process S30 of FIG. 図８の第二研磨工程Ｓ４０を説明するための模式図である。It is a schematic diagram for demonstrating the 2nd polishing process S40 of FIG. 図２の変形例を示す断面図である。It is sectional drawing which shows the modification of FIG. 図２の変形例を示す断面図である。It is sectional drawing which shows the modification of FIG.

以下、本発明の一実施形態を図面に基づいて説明する。 An embodiment of the present invention will be described below with reference to the drawings.

図１に示すように本発明の一実施形態による燃料噴射弁１は、「内燃機関」としての直噴ガソリンエンジンに設置される。燃料噴射弁１は、ガソリンエンジンにおいて気筒内の燃焼室へと燃料を噴射する。尚、燃料噴射弁１は、ガソリンエンジンの燃焼室に連通する吸気通路へと燃料を噴射するもの等であってもよい。 As shown in FIG. 1, a fuel injection valve 1 according to an embodiment of the present invention is installed in a direct injection gasoline engine as an “internal combustion engine”. The fuel injection valve 1 injects fuel into a combustion chamber in a cylinder of a gasoline engine. The fuel injection valve 1 may be one that injects fuel into an intake passage that communicates with a combustion chamber of a gasoline engine.

（基本構成）
まず、燃料噴射弁１の基本構成を説明する。燃料噴射弁１は、弁ハウジング１０、固定コア２０、可動コア３０、弁部材４０、スプリング５０，５１及び電磁駆動部６０を備えている。 (Basic configuration)
First, the basic configuration of the fuel injection valve 1 will be described. The fuel injection valve 1 includes a valve housing 10, a fixed core 20, a movable core 30, a valve member 40, springs 50 and 51, and an electromagnetic drive unit 60.

弁ハウジング１０は、磁気回路部材１２、入口部材１３及びノズル部材１４等から構成されている。円筒状の磁気回路部材１２は、第一磁性部１２０、非磁性部１２１及び第二磁性部１２２を、軸方向の閉弁側から開弁側へ向かってこの順で、有している。金属磁性体からなる各磁性部１２０，１２２と、金属非磁性体からなる非磁性部１２１とは、例えばレーザ溶接等により結合されている。非磁性部１２１は、第一磁性部１２０と第二磁性部１２２の間における磁束の短絡を遮断している。 The valve housing 10 includes a magnetic circuit member 12, an inlet member 13, a nozzle member 14, and the like. The cylindrical magnetic circuit member 12 has a first magnetic part 120, a non-magnetic part 121, and a second magnetic part 122 in this order from the valve closing side to the valve opening side in the axial direction. The magnetic portions 120 and 122 made of a metal magnetic material and the non-magnetic portion 121 made of a metal non-magnetic material are coupled by, for example, laser welding. The non-magnetic part 121 blocks a short circuit of magnetic flux between the first magnetic part 120 and the second magnetic part 122.

第二磁性部１２２において非磁性部１２１とは反対側端部には、入口部材１３が同軸上に固定されている。金属からなる円筒状の入口部材１３は、燃料ポンプからの燃料供給を受ける燃料流入口１５を、形成している。この燃料流入口１５へと供給される燃料を濾過するために入口部材１３内には、燃料フィルタ１６が位置決め状態にて収容されている。 The inlet member 13 is coaxially fixed to an end portion of the second magnetic portion 122 opposite to the non-magnetic portion 121. The cylindrical inlet member 13 made of metal forms a fuel inlet 15 that receives fuel supplied from the fuel pump. In order to filter the fuel supplied to the fuel inlet 15, a fuel filter 16 is accommodated in the inlet member 13 in a positioned state.

第一磁性部１２０において非磁性部１２１とは反対側端部には、ノズル部材１４が同軸上に固定されている。金属からなる有底円筒状のノズル部材１４は、燃料を流通させる燃料通路１７を、磁気回路部材１２と共同して内周側に形成している。ノズル部材１４は、噴孔１８及び弁座部１９を有している。 The nozzle member 14 is coaxially fixed to the end of the first magnetic part 120 opposite to the non-magnetic part 121. The bottomed cylindrical nozzle member 14 made of metal has a fuel passage 17 through which the fuel flows in cooperation with the magnetic circuit member 12 on the inner peripheral side. The nozzle member 14 has a nozzle hole 18 and a valve seat portion 19.

噴孔１８は、弁ハウジング１０の中心軸線Ｃ周りに複数設けられている。各噴孔１８は、ノズル部材１４を貫通する貫通孔状に、形成されている。これにより各噴孔１８は、外部となる燃焼室と、燃料通路１７との間を連通する。 A plurality of injection holes 18 are provided around the central axis C of the valve housing 10. Each injection hole 18 is formed in the shape of a through hole penetrating the nozzle member 14. As a result, each injection hole 18 communicates between the combustion chamber, which is the outside, and the fuel passage 17.

図１，２に示すように弁座部１９は、ノズル部材１４のうち燃料通路１７を囲む内周面において、各噴孔１８よりも上流側となる開弁側に設けられている。弁座部１９は、中心軸線Ｃと心合わせされた円錐面状（即ち、テーパ面状）に形成され、下流側となる閉弁側へ向かうほど縮径している。これにより弁座部１９は、中心軸線Ｃに垂直な横断面における円形の内輪郭を、中心軸線Ｃに沿う所定長さの軸方向領域にて有している。 As shown in FIGS. 1 and 2, the valve seat portion 19 is provided on the inner peripheral surface of the nozzle member 14 that surrounds the fuel passage 17 on the valve opening side that is upstream of the respective injection holes 18. The valve seat portion 19 is formed in a conical surface shape (that is, a tapered surface shape) that is aligned with the central axis C, and the diameter thereof is reduced toward the valve closing side which is the downstream side. As a result, the valve seat portion 19 has a circular inner contour in a cross section perpendicular to the central axis C in an axial region of a predetermined length along the central axis C.

図１に示すように、金属磁性体からなる円筒状の固定コア２０は、弁ハウジング１０のうち磁気回路部材１２内に同軸上に収容されている。固定コア２０は、非磁性部１２１及び第二磁性部１２２の内周面に固定されている。固定コア２０内には、金属からなる円筒状のアジャスティングパイプ２４が同軸上に圧入されている。固定コア２０は、上流側の燃料流入口１５と連通する連通通路２２を、アジャスティングパイプ２４と共同して内周側に形成している。連通通路２２は、上流側の燃料流入口１５から流入した燃料を下流側へと導く。 As shown in FIG. 1, a cylindrical fixed core 20 made of a magnetic metal is coaxially housed in the magnetic circuit member 12 of the valve housing 10. The fixed core 20 is fixed to the inner peripheral surfaces of the non-magnetic portion 121 and the second magnetic portion 122. A cylindrical adjusting pipe 24 made of metal is coaxially press-fitted into the fixed core 20. The fixed core 20 has a communication passage 22 that communicates with the fuel inlet 15 on the upstream side in cooperation with the adjusting pipe 24 on the inner peripheral side. The communication passage 22 guides the fuel flowing from the fuel inlet 15 on the upstream side to the downstream side.

金属磁性体からなる円筒状の可動コア３０は、弁ハウジング１０のうち磁気回路部材１２内の燃料通路１７に同軸上に収容されている。可動コア３０は、固定コア２０よりも下流側となる閉弁側に、位置している。可動コア３０は、開弁側と閉弁側とへの往復移動に伴って非磁性部１２１及び第一磁性部１２０の内周面と摺動可能に、配置されている。可動コア３０は、軸方向に延伸する円筒孔状の軸方向孔３４を、中心軸線Ｃと心合わせして内周側に有している。 The cylindrical movable core 30 made of a magnetic metal is coaxially housed in the fuel passage 17 in the magnetic circuit member 12 of the valve housing 10. The movable core 30 is located on the valve closing side, which is the downstream side of the fixed core 20. The movable core 30 is arranged so as to be slidable on the inner peripheral surfaces of the non-magnetic portion 121 and the first magnetic portion 120 as the movable core 30 reciprocates between the valve opening side and the valve closing side. The movable core 30 has a cylindrical hole-shaped axial hole 34 extending in the axial direction on the inner peripheral side in alignment with the central axis C.

金属非磁性体からなる細長円柱状（即ち、ニードル状）の弁部材４０は、弁ハウジング１０のうち磁気回路部材１２及びノズル部材１４内の燃料通路１７に同軸上に収容されている。弁部材４０は、軸方向に延伸する円柱状の弁軸部４２を、中心軸線Ｃと心合わせして有している。弁軸部４２は、軸方向孔３４内を同軸上に嵌通している。これにより弁部材４０は、開弁側と閉弁側とへの往復移動に伴って可動コア３０と一体移動又は軸方向孔３４の内周面に対して相対摺動可能に、配置されている。 The elongated cylindrical (ie, needle-shaped) valve member 40 made of a metal non-magnetic material is coaxially housed in the fuel passage 17 in the magnetic circuit member 12 and the nozzle member 14 of the valve housing 10. The valve member 40 has a cylindrical valve shaft portion 42 that extends in the axial direction, aligned with the central axis C. The valve shaft portion 42 is coaxially fitted in the axial hole 34. As a result, the valve member 40 is arranged so as to move integrally with the movable core 30 as the valve member 40 reciprocates to the valve opening side and the valve closing side, or to be slidable relative to the inner peripheral surface of the axial hole 34. ..

弁部材４０は、弁軸部４２から外周側に突出する円形鍔状（即ち、フランジ状）の突部４４を、中心軸線Ｃと心合わせして有している。突部４４は、弁部材４０の開弁側端部に設けられている。突部４４は、固定コア２０内に同軸上に嵌入されている。これにより突部４４は、開弁側と閉弁側とへの往復移動に伴って固定コア２０の内周面と摺動可能に、配置されている。 The valve member 40 has a circular brim-shaped (that is, flange-shaped) protrusion 44 protruding from the valve shaft portion 42 to the outer peripheral side, aligned with the central axis C. The protrusion 44 is provided at the valve opening side end of the valve member 40. The protrusion 44 is coaxially fitted in the fixed core 20. As a result, the protrusion 44 is arranged so as to be slidable on the inner peripheral surface of the fixed core 20 with the reciprocating movement to the valve opening side and the valve closing side.

突部４４は、軸方向孔３４よりも大径に形成されている。突部４４のうち閉弁側を向く軸方向端面４４ａは、可動コア３０のうち開弁側を向く軸方向端面３０ａと接離可能に、配置されている。これにより軸方向端面４４ａ，３０ａ同士の接触時には、開弁側と閉弁側とへの往復移動に伴って弁部材４０及び可動コア３０が一体移動可能となっている。 The protrusion 44 has a larger diameter than the axial hole 34. The axial end surface 44a of the protrusion 44 facing the valve closing side is arranged so as to be able to come into contact with and separate from the axial end surface 30a of the movable core 30 facing the valve opening side. As a result, when the axial end surfaces 44a and 30a come into contact with each other, the valve member 40 and the movable core 30 can be integrally moved with the reciprocating movement to the valve opening side and the valve closing side.

弁部材４０は、弁軸部４２及び突部４４に跨って貫通する燃料孔４６を、内周側に有している。燃料孔４６は、連通通路２２と燃料通路１７との間を連通している。これにより燃料孔４６は、弁部材４０及び可動コア３０の任意の移動位置において、上流側の連通通路２２から下流側の燃料通路１７へと燃料を流通させる。 The valve member 40 has a fuel hole 46 penetrating the valve shaft 42 and the protrusion 44 on the inner peripheral side. The fuel hole 46 communicates between the communication passage 22 and the fuel passage 17. As a result, the fuel hole 46 allows the fuel to flow from the communication passage 22 on the upstream side to the fuel passage 17 on the downstream side at an arbitrary movement position of the valve member 40 and the movable core 30.

図１，２に示すように弁部材４０は、弁軸部４２のうち燃料通路１７に露出する外周面に、弁体部４８を有している。弁体部４８は、弁部材４０の閉弁側端部に設けられ、突部４４とは反対側となる弁座部１９側に位置している。弁体部４８は、中心軸線Ｃと心合わせされた円錐面状（即ち、テーパ面状）に形成され、下流側と閉弁側へ向かうほど縮径している。これにより弁体部４８は、中心軸線Ｃに垂直な横断面における円形の外輪郭を、中心軸線Ｃに沿う所定長さの軸方向領域にて有している。 As shown in FIGS. 1 and 2, the valve member 40 has a valve body portion 48 on the outer peripheral surface of the valve shaft portion 42 exposed to the fuel passage 17. The valve body portion 48 is provided at the valve closing side end portion of the valve member 40, and is located on the valve seat portion 19 side opposite to the protrusion 44. The valve body portion 48 is formed in a conical surface shape (that is, a tapered surface shape) that is aligned with the central axis C, and the diameter is reduced toward the downstream side and the valve closing side. Thereby, the valve body portion 48 has a circular outer contour in a transverse section perpendicular to the central axis C in an axial region of a predetermined length along the central axis C.

弁体部４８は、弁座部１９よりも上流側となる開弁側に位置することで、弁座部１９に対して同軸上に離着座可能に配置されている。これにより弁部材４０は、開弁側への移動に伴って弁体部４８を弁座部１９から離座させることで、各噴孔１８を燃料通路１７に対して開放する。その結果、燃料通路１７の燃料が各噴孔１８から燃焼室へと噴射される。一方で弁部材４０は、閉弁側への移動によって弁体部４８を弁座部１９に着座させることで、各噴孔１８を燃料通路１７に対して閉塞する。その結果、各噴孔１８からの噴射が停止する。このように弁部材４０は、往復移動に伴って弁体部４８を弁座部１９に対して離着座させる開閉弁作動により、各噴孔１８からの燃料噴射を断続させる。 The valve body portion 48 is located on the valve opening side, which is on the upstream side of the valve seat portion 19, so that the valve body portion 48 is arranged so as to be seated coaxially with respect to the valve seat portion 19. As a result, the valve member 40 separates the valve body portion 48 from the valve seat portion 19 as the valve member 40 moves toward the valve opening side, thereby opening each injection hole 18 to the fuel passage 17. As a result, the fuel in the fuel passage 17 is injected from each injection hole 18 into the combustion chamber. On the other hand, the valve member 40 closes each injection hole 18 to the fuel passage 17 by seating the valve body portion 48 on the valve seat portion 19 by moving toward the valve closing side. As a result, the injection from each injection hole 18 is stopped. In this way, the valve member 40 interrupts the fuel injection from each injection hole 18 by the opening/closing valve operation that causes the valve body portion 48 to be seated on/separated from the valve seat portion 19 with the reciprocating movement.

図１に示すように、金属からなる閉弁スプリング５０は、圧縮コイルスプリングである。閉弁スプリング５０は、弁ハウジング１０内のうち固定コア２０内の連通通路２２に、同軸上に収容されている。閉弁スプリング５０は、アジャスティングパイプ２４と突部４４との間に介装されている。これにより閉弁スプリング５０は、要素２４，４４間での圧縮に応じて弾性復原力を発生することで、弁部材４０を閉弁側へと付勢する。 As shown in FIG. 1, the valve closing spring 50 made of metal is a compression coil spring. The valve closing spring 50 is coaxially housed in the communication passage 22 in the fixed core 20 in the valve housing 10. The valve closing spring 50 is interposed between the adjusting pipe 24 and the protrusion 44. As a result, the valve closing spring 50 urges the valve member 40 toward the valve closing side by generating an elastic restoring force according to the compression between the elements 24 and 44.

金属からなる開弁スプリング５１は、圧縮コイルスプリングである。開弁スプリング５１は、弁ハウジング１０のうち磁気回路部材１２内の燃料通路１７に、同軸上に収容されている。開弁スプリング５１は、弁軸部４２の外周側にて可動コア３０と第一磁性部１２０との間に介装されている。これにより開弁スプリング５１は、要素３０，１２０間での圧縮に応じて弾性復原力を発生することで、可動コア３０を開弁側へと付勢する。 The valve opening spring 51 made of metal is a compression coil spring. The valve opening spring 51 is coaxially housed in the fuel passage 17 in the magnetic circuit member 12 of the valve housing 10. The valve opening spring 51 is interposed between the movable core 30 and the first magnetic portion 120 on the outer peripheral side of the valve shaft portion 42. As a result, the valve opening spring 51 urges the movable core 30 toward the valve opening side by generating an elastic restoring force according to the compression between the elements 30 and 120.

電磁駆動部６０は、ソレノイドコイル６１、樹脂ボビン６２、ターミナル６３及びコネクタ６４等から構成されている。ソレノイドコイル６１は、円筒状の樹脂ボビン６２に金属線材を巻回して形成されている。ソレノイドコイル６１は、固定コア２０の外周側に同軸上に配置されている。ソレノイドコイル６１は、磁性部１２０，１２２及び非磁性部１２１の外周面に樹脂ボビン６２を介して固定されている。金属からなるターミナル６３は、樹脂からなるコネクタ６４に埋設されている。ターミナル６３は、外部の制御回路と内部のソレノイドコイル６１との間を電気接続する。この電気接続によりソレノイドコイル６１への通電は、制御回路により制御可能となっている。 The electromagnetic drive unit 60 includes a solenoid coil 61, a resin bobbin 62, a terminal 63, a connector 64, and the like. The solenoid coil 61 is formed by winding a metal wire on a cylindrical resin bobbin 62. The solenoid coil 61 is coaxially arranged on the outer peripheral side of the fixed core 20. The solenoid coil 61 is fixed to the outer peripheral surfaces of the magnetic parts 120 and 122 and the non-magnetic part 121 via a resin bobbin 62. The terminal 63 made of metal is embedded in the connector 64 made of resin. The terminal 63 electrically connects the external control circuit and the internal solenoid coil 61. By this electrical connection, the energization of the solenoid coil 61 can be controlled by the control circuit.

以上の如き基本構成の燃料噴射弁１は、開弁作動及び開弁作動を実現する。まず開弁作動では、制御回路により通電されたソレノイドコイル６１が励磁することで、第一磁性部１２０、可動コア３０、固定コア２０及び第二磁性部１２２に磁束が案内される。即ち、それら要素１２０，３０，２０，１２２を磁束が通過するように、磁気回路が形成される。すると、互いに対向するコア２０，３０間には、可動コア３０を固定コア２０側へと吸引する磁気吸引力が発生する。この磁気吸引力を受けて可動コア３０は、軸方向端面３０ａに接触している突部４４を閉弁スプリング５０の弾性復原力に抗して押圧しながら、開弁側へと移動する。これにより、弁部材４０が可動コア３０と一体に開弁側へと移動することで、弁体部４８が弁座部１９から離座して燃料が各噴孔１８から噴射される。 The fuel injection valve 1 having the basic configuration as described above realizes the valve opening operation and the valve opening operation. First, in the valve opening operation, the solenoid coil 61 energized by the control circuit is excited to guide the magnetic flux to the first magnetic portion 120, the movable core 30, the fixed core 20, and the second magnetic portion 122. That is, a magnetic circuit is formed so that the magnetic flux passes through the elements 120, 30, 20, 122. Then, a magnetic attraction force that attracts the movable core 30 toward the fixed core 20 is generated between the cores 20 and 30 facing each other. Receiving this magnetic attraction force, the movable core 30 moves toward the valve opening side while pressing the protrusion 44 in contact with the axial end surface 30a against the elastic restoring force of the valve closing spring 50. As a result, the valve member 40 moves integrally with the movable core 30 toward the valve opening side, whereby the valve body portion 48 is separated from the valve seat portion 19 and fuel is injected from each injection hole 18.

次に開弁作動後の閉弁作動では、制御回路により通電の停止されたソレノイドコイル６１が消磁するので、コア２０，３０間の磁気吸引が消失する。このとき弁部材４０は、開弁スプリング５１よりも大きな弾性復原力を閉弁スプリング５０から受けることで、軸方向端面４４ａに接触している可動コア３０を押圧しながら、閉弁側へと移動する。これにより、弁部材４０が可動コア３０と一体に閉弁側へと移動することで、弁体部４８が弁座部１９に着座して各噴孔１８からの燃料噴射が停止する。 Next, in the valve closing operation after the valve opening operation, the solenoid coil 61, which has been deenergized by the control circuit, is demagnetized, so that the magnetic attraction between the cores 20 and 30 disappears. At this time, the valve member 40 receives a larger elastic restoring force than the valve opening spring 51 from the valve closing spring 50, and moves toward the valve closing side while pressing the movable core 30 in contact with the axial end surface 44a. To do. As a result, the valve member 40 moves integrally with the movable core 30 toward the valve closing side, whereby the valve body portion 48 is seated on the valve seat portion 19 and the fuel injection from each injection hole 18 is stopped.

（弁体部の詳細構成）
以下では、図２に拡大して示す弁座部１９及び弁体部４８のうち、「特定弁部」として本実施形態では機能する弁体部４８の詳細構成を、説明する。弁体部４８は、弁部材４０の基材（即ち、母材）７０と、当該基材７０を被覆する被覆層７１とを、含んで構成されている。 (Detailed structure of valve body)
In the following, of the valve seat portion 19 and the valve body portion 48 that are enlarged and shown in FIG. 2, the detailed configuration of the valve body portion 48 that functions in this embodiment as the “specific valve portion” will be described. The valve body portion 48 is configured to include a base material (that is, a base material) 70 of the valve member 40 and a coating layer 71 that covers the base material 70.

基材７０は、例えばマルテンサイト系ステンレス鋼等の鉄系金属から形成されている。弁体部４８を形成する箇所７５にて基材７０は、円形外輪郭の円錐面状（即ち、テーパ面状）を呈している。図２，３に示す基材７０の最外周面は、被覆層７１に対する下地面７０ａとなっている。下地面７０ａには、後に詳述する超仕上げによって鏡面加工が施されている。その結果として研磨状態となっている下地面７０ａには、真円度が０．０５μｍ以上且つ０．４μｍ以下の範囲にて与えられている。 The base material 70 is formed of an iron-based metal such as martensitic stainless steel. The base material 70 has a conical surface shape (that is, a tapered surface shape) with a circular outer contour at a portion 75 where the valve body portion 48 is formed. The outermost peripheral surface of the base material 70 shown in FIGS. 2 and 3 is a base surface 70 a for the coating layer 71. The ground surface 70a is mirror-finished by superfinishing, which will be described in detail later. As a result, the roundness is given to the ground surface 70a in a polished state in the range of 0.05 μm or more and 0.4 μm or less.

尚、下地面７０ａの真円度は、ＭＺＣ最小領域中心法に従って横断面の円形輪郭を挟む同心二円の半径差が最小となる中心座標を当該円形輪郭の中心と想定した場合に、かかる同心二円の半径差を意味している。そこで下地面７０ａの真円度は、弁体部４８の形成される軸方向領域内の任意の横断面にて、円形輪郭を挟む同心二円の半径差が上述の範囲を満たすように、設定される。 The circularity of the base surface 70a is the concentricity when the center coordinate where the radius difference between the two concentric circles sandwiching the circular contour of the cross section is the minimum is the center of the circular contour according to the MZC minimum area center method. It means the radius difference of two circles. Therefore, the roundness of the base surface 70a is set so that the radius difference between two concentric circles sandwiching the circular contour satisfies the above range in an arbitrary cross section in the axial region where the valve body portion 48 is formed. To be done.

被覆層７１は、下地面７０ａの周方向全域に亘って広がる、実質均一厚さの複合層状に積層されている。被覆層７１は、弁部材４０の大半部分を構成する基材７０のうち、本実施形態では弁体部４８の形成箇所７５にのみ設けられているが、基材５０の他の箇所まで跨って又は全体に設けられていてもよい。図３に示すように被覆層７１は、中間膜７２，７３及びＤＬＣ膜７４を有している。 The coating layer 71 is laminated in a composite layer having a substantially uniform thickness, which is spread over the entire area of the base surface 70a in the circumferential direction. In the present embodiment, the coating layer 71 is provided only in the formation portion 75 of the valve body portion 48 of the base material 70 that constitutes the majority of the valve member 40, but extends over other portions of the base material 50. Alternatively, it may be provided entirely. As shown in FIG. 3, the coating layer 71 has intermediate films 72 and 73 and a DLC film 74.

第一中間膜７２は、基材７０との親和性の高い、例えばクロム（Ｃｒ）等の金属から形成されている。第一中間膜７２は、下地面７０ａに直接成膜されている。第一中間膜７２の厚さは、成膜部分全体にて実質均一となる０．１μｍ程度に、設定されている。第二中間膜７３は、ＤＬＣ膜７４との親和性の高い、例えばタングステンカーバイド（ＷＣ）及びＤＬＣの合成材から形成されている。第二中間膜７３は、第一中間膜７２を介して下地面７０ａに成膜されている。第二中間膜７３の厚さは、成膜部分全体にて実質均一となる０．２μｍ程度に、設定されている。以上により中間膜７２，７３は、基材７０とＤＬＣ膜７４との間を繋いで密着力を確保する機能を発揮可能な限りにて、ＤＬＣ膜７４よりも十分に薄い合算厚さに設けられている。 The first intermediate film 72 is formed of a metal having a high affinity with the base material 70, such as chromium (Cr). The first intermediate film 72 is directly formed on the base surface 70a. The thickness of the first intermediate film 72 is set to about 0.1 μm, which is substantially uniform over the entire film formation portion. The second intermediate film 73 is formed of a synthetic material having a high affinity with the DLC film 74, for example, tungsten carbide (WC) and DLC. The second intermediate film 73 is formed on the base surface 70a via the first intermediate film 72. The thickness of the second intermediate film 73 is set to about 0.2 μm, which is substantially uniform over the entire film formation portion. As described above, the intermediate films 72 and 73 are provided with a total thickness sufficiently smaller than that of the DLC film 74 as long as the function of connecting the base material 70 and the DLC film 74 to each other and ensuring the adhesive force can be exerted. ing.

被覆層７１の最外殻部分をなすＤＬＣ膜７４は、例えば２０ａｔ％程度の水素を含むＤＬＣから形成されている。ＤＬＣ膜７４は、中間膜７２，７３を介して下地面７０ａに成膜されている。ＤＬＣ膜７４の厚さは、成膜部分全体にて実質均一となる値であって、図４，７に示す２μｍ超過且つ５μｍ以下の範囲に、設定されている。ここで、厚さが２μｍ以下のＤＬＣ膜とすると、弁座部１９及び弁体部４８間での着座時の衝撃に対して必要な耐久性が得られずに、基材７０までを露出させるおそれがある。一方、厚さが５μｍ超過のＤＬＣ膜とすると、中間膜７２，７３を介した基材７０への密着性が低下して、成膜不良や着座時の剥がれを招来するおそれがある。尚、ＤＬＣ膜７４の厚さについてさらに好適には、２．５μｍ以上且つ４．５μｍ以下の範囲に設定される。 The DLC film 74 forming the outermost shell of the coating layer 71 is formed of DLC containing hydrogen at about 20 at %, for example. The DLC film 74 is formed on the base surface 70a via the intermediate films 72 and 73. The thickness of the DLC film 74 is a value that is substantially uniform over the entire film formation portion, and is set within the range of more than 2 μm and 5 μm or less shown in FIGS. Here, if the DLC film has a thickness of 2 μm or less, the durability up to the impact between the valve seat portion 19 and the valve body portion 48 at the time of sitting is not obtained, and the base material 70 is exposed. There is a risk. On the other hand, if the DLC film has a thickness of more than 5 μm, the adhesion to the base material 70 via the intermediate films 72 and 73 may be reduced, which may lead to defective film formation and peeling at the time of sitting. The thickness of the DLC film 74 is more preferably set in the range of 2.5 μm or more and 4.5 μm or less.

ＤＬＣ膜７４には、膜硬さと相関する光学物理量としての屈折率が、図５に示す２．２以上且つ２．４以下の範囲に設定されている。ここで、屈折率が２．２未満のＤＬＣ膜とすると、弁座部１９及び弁体部４８間での繰り返しの着座による摩耗量が図５の如き許容上限値（燃料噴射弁の作動回数が５０００万回後に０．５μｍ程度）を上回って、耐摩耗性を低下させるおそれがある。一方、屈折率を２．４超過のＤＬＣ膜とすると、成膜に必要な温度が上昇して、外乱等に起因した成膜温度不足による成膜不良を招来するおそれがある。 In the DLC film 74, the refractive index as an optical physical quantity that correlates with the film hardness is set in the range of 2.2 or more and 2.4 or less shown in FIG. Here, assuming that the DLC film has a refractive index of less than 2.2, the wear amount due to repeated seating between the valve seat portion 19 and the valve body portion 48 has an allowable upper limit value as shown in FIG. After 50 million times, the abrasion resistance may be decreased to about 0.5 μm). On the other hand, if the DLC film has a refractive index of more than 2.4, the temperature required for film formation rises, which may lead to film formation failure due to insufficient film formation temperature due to disturbance or the like.

尚、屈折率は、９００ｎｍ〜１６００ｎｍ程度の波長にてＤＬＣ膜７４へと照射した光の最外周面（即ち、後述する外表面７１ａ）での反射成分と、ＤＬＣ膜７４を透過した当該光の最内周面での反射成分とにつき、光干渉法に従って光路差による位相ずれに起因した光干渉スペクトルを測定し、当該光干渉スペクトルに現れるスペクトル強度から算出される。これにより、最外周面が円錐面状のＤＬＣ膜７４に対して、適正な耐摩耗性を与えることが可能となる。 In addition, the refractive index is the reflection component at the outermost peripheral surface (that is, the outer surface 71a described later) of the light irradiated to the DLC film 74 at a wavelength of about 900 nm to 1600 nm and the light transmitted through the DLC film 74. With respect to the reflection component on the innermost peripheral surface, an optical interference spectrum caused by a phase shift due to an optical path difference is measured according to the optical interference method, and calculated from the spectrum intensity appearing in the optical interference spectrum. This makes it possible to impart appropriate wear resistance to the DLC film 74 whose outermost peripheral surface is a conical surface.

図３に示すＤＬＣ膜７４の最外周面は、被覆層７１の外表面７１ａとなっている。外表面７１ａには、後に詳述する超仕上げによって鏡面加工が施されている。その結果として研磨状態となっている外表面７１ａには、図４，６に示す０．０５μｍ以上且つ０．６μｍ以下の範囲にて真円度が与えられている。ここで、真円度が０．６μｍ超過の外表面とすると、着座状態の弁座部１９及び弁体部４８間での燃料漏れ量によって表される油密性が、図６の如き許容上限値（燃料圧力８ＭＰａの条件で０．５ｃｃ／ｍｉｎ程度）を上回るおそれがある。一方、製品回転用の調整砥石スピンドルの回転振れ精度の限界から、真円度は０．０５μｍ未満にすることが困難である。尚、外表面７１ａの真円度についてさらに好適には、０．０５μｍ以上且つ０．４μｍ以下の範囲に設定される。 The outermost peripheral surface of the DLC film 74 shown in FIG. 3 is the outer surface 71 a of the coating layer 71. The outer surface 71a is mirror-finished by superfinishing which will be described in detail later. As a result, the outer surface 71a, which is in a polished state, is given a roundness in the range of 0.05 μm or more and 0.6 μm or less shown in FIGS. Here, assuming that the outer surface has a roundness of more than 0.6 μm, the oil tightness represented by the fuel leakage amount between the seated valve seat portion 19 and the valve body portion 48 has an allowable upper limit as shown in FIG. The value (about 0.5 cc/min when the fuel pressure is 8 MPa) may be exceeded. On the other hand, it is difficult to set the roundness to less than 0.05 μm due to the limit of the rotational runout accuracy of the adjusting grindstone spindle for rotating the product. The roundness of the outer surface 71a is more preferably set in the range of 0.05 μm or more and 0.4 μm or less.

さらに、外表面７１ａの真円度について下地面７０ａの真円度との差は、図７に示す０μｍ以上且つ０．２μｍ以下の範囲に設定されている。これは、後に詳述する各面７０ａ，７１ａへの超仕上げによって外表面７１ａの真円度を、０．６μｍ以下まで抑え易くするためである。 Further, the difference between the roundness of the outer surface 71a and the roundness of the base surface 70a is set in the range of 0 μm or more and 0.2 μm or less shown in FIG. This is because it is easy to suppress the circularity of the outer surface 71a to 0.6 μm or less by superfinishing the surfaces 70a and 71a, which will be described in detail later.

尚、下地面７０ａの真円度と同様に外表面７１ａの真円度は、ＭＺＣ最小領域中心法に従って横断面の円形輪郭を挟む同心二円の半径差を、意味している。そこで外表面７１ａの真円度は、弁体部４８の形成される軸方向領域内の任意の横断面にて、円形輪郭を挟む同心二円の半径差が上述の範囲を満たすように、設定される。 The circularity of the outer surface 71a as well as the circularity of the base surface 70a means the difference in radius between two concentric circles that sandwich the circular contour of the cross section according to the MZC minimum area center method. Therefore, the circularity of the outer surface 71a is set so that the radius difference between the two concentric circles sandwiching the circular contour satisfies the above range in an arbitrary cross section in the axial region where the valve body portion 48 is formed. To be done.

（製造方法）
以下では、燃料噴射弁１の製造方法として特に、弁体部４８を有した弁部材４０を製造する方法を説明する。 (Production method)
In the following, a method for manufacturing the valve member 40 having the valve body portion 48 will be particularly described as a method for manufacturing the fuel injection valve 1.

まず、図８に示す準備工程Ｓ１０では、基材７０において弁軸部４２の弁体部４８を形成する箇所７５の下地面７０ａに被覆層７１が積層されていない弁部材４０を、図９に示すように準備する。 First, in the preparation step S10 shown in FIG. 8, the valve member 40 in which the covering layer 71 is not laminated on the lower ground 70a of the base material 70 where the valve body portion 48 of the valve shaft portion 42 is formed is shown in FIG. Prepare as shown.

続いて、図８に示す第一研磨工程Ｓ２０では、準備工程Ｓ１０にて準備した弁部材４０の基材７０に超仕上げを施すことで、下地面７０ａを研磨状態に形成する。具体的に第一研磨工程Ｓ２０では図１０に示すように、回転ローラ１０００，１００１間に挟んだ弁部材４０を中心軸線Ｃまわりに回転させながら、例えばキュービックボロンナイト（ｃＢＮ）等の砥石１００２を基材７０に押し当てて振動させる。 Subsequently, in a first polishing step S20 shown in FIG. 8, the base surface 70a is formed in a polished state by superfinishing the base material 70 of the valve member 40 prepared in the preparation step S10. Specifically, in the first polishing step S20, as shown in FIG. 10, while rotating the valve member 40 sandwiched between the rotary rollers 1000 and 1001 around the central axis C, a grindstone 1002 such as cubic boronite (cBN) is removed. The substrate 70 is pressed and vibrated.

このときまず、ローラ１０００，１００１の回転速度を３５０ｒｐｍ、砥石１００２の押し当て圧を０．０１９ＭＰａ、加工時間を０．５ｓにそれぞれ設定した荒処理を、実施する。次に、ローラ１０００，１００１の回転速度を４００ｒｐｍ、砥石１００２の押し当て圧を０．０１９ＭＰａ、加工時間を３ｓにそれぞれ設定した中間処理を、実施する。さらに、ローラ１０００，１００１の回転速度を４００ｒｐｍ、砥石１００２の押し当て圧を０．０１９ＭＰａ、加工時間を１ｓにそれぞれ設定した仕上げ処理を、行う。以上の各処理を含む超仕上げによって研磨された下地面７０ａには、０．０５μｍ以上且つ０．４μｍ以下の真円度が与えられることとなる。 At this time, first, rough processing is performed in which the rotation speed of the rollers 1000 and 1001 is 350 rpm, the pressing pressure of the grindstone 1002 is 0.019 MPa, and the processing time is 0.5 s. Next, an intermediate process is performed in which the rotation speeds of the rollers 1000 and 1001 are 400 rpm, the pressing pressure of the grindstone 1002 is 0.019 MPa, and the processing time is 3 s. Further, finishing processing is performed in which the rotation speeds of the rollers 1000 and 1001 are 400 rpm, the pressing pressure of the grindstone 1002 is 0.019 MPa, and the processing time is 1 s. The roundness of 0.05 μm or more and 0.4 μm or less is given to the base surface 70a polished by the superfinishing including the above processes.

さらに続いて、図８に示す積層工程Ｓ３０では、第一研磨工程Ｓ２０にて研磨状態となった下地面７０ａに中間膜７２，７３及びＤＬＣ膜７４を順次成膜することで、同面７０ａに被覆層７１を積層する。具体的に積層工程Ｓ３０では、まず図１１（ａ）に示すように、真空チャンバ１００３内に弁部材４０を投入した状態下、アルゴンイオン（Ａｒ＋）及び水素イオン（Ｈ＋）を基材７０に衝突させることで、下地面７０ａ上の酸化皮膜を除去する。次に図１１（ｂ）に示すように、真空チャンバ１００３内に弁部材４０を収容した状態下、Ａｒ＋を衝突させたターゲット１００４から放出されるターゲット材料原子を基材７０に付着させる。このとき、ターゲット１００４にＣｒを採用することで第一中間膜７２を０．１μｍの厚さに成膜後、ターゲット１００４をＷＣに変更してからＤＬＣを加えていくことで第二中間膜７３を０．２μｍの厚さに成膜する。 Further subsequently, in the laminating step S30 shown in FIG. 8, the intermediate films 72 and 73 and the DLC film 74 are sequentially formed on the ground surface 70a which has been polished in the first polishing step S20, so that the same surface 70a is formed. The coating layer 71 is laminated. Specifically, in the stacking step S30, first, as shown in FIG. 11A, with the valve member 40 placed in the vacuum chamber 1003, argon ions (Ar + ) and hydrogen ions (H + ) are added to the base material 70. The oxide film on the base surface 70a is removed by colliding with. Next, as shown in FIG. 11B, in the state where the valve member 40 is housed in the vacuum chamber 1003, the target material atoms emitted from the target 1004 collided with Ar + are attached to the base material 70. At this time, after adopting Cr as the target 1004 to form the first intermediate film 72 to a thickness of 0.1 μm, the target 1004 is changed to WC and then DLC is added to add the second intermediate film 73. To a thickness of 0.2 μm.

さらに、積層工程Ｓ３０では図１１（ｃ）に示すように、真空チャンバ１００３内に弁部材４０を収容した状態下、アセチレン（Ｃ２Ｈ２）ガスをプラズマ分解して基材７０上で再結合させる。これにより、２μｍ超過且つ５μｍ以下の厚さと、２．２以上且つ２．４以下の屈折率とをもって、ＤＬＣ膜７４が成膜される。 Further, in the stacking step S30, as shown in FIG. 11C, in a state where the valve member 40 is housed in the vacuum chamber 1003, acetylene (C 2 H 2 ) gas is plasma decomposed and recombined on the base material 70. Let As a result, the DLC film 74 is formed with a thickness of more than 2 μm and 5 μm or less and a refractive index of 2.2 or more and 2.4 or less.

最後に、図８に示す第二研磨工程Ｓ４０では、積層工程Ｓ３０にて積層された被覆層７１のうち最外殻のＤＬＣ膜７４に超仕上げを施すことで、外表面７１ａを研磨状態に形成する。具体的に第二研磨工程Ｓ４０では図１２に示すように、回転ローラ１０００，１００１間に挟んだ弁部材４０を中心軸線Ｃまわりに回転させながら、例えばダイヤモンド等の砥石１００５を被覆層７１に押し当てて振動させる。 Finally, in the second polishing step S40 shown in FIG. 8, the outer surface 71a is formed into a polished state by superfinishing the outermost shell DLC film 74 of the coating layers 71 stacked in the stacking step S30. To do. Specifically, in the second polishing step S40, as shown in FIG. 12, while the valve member 40 sandwiched between the rotating rollers 1000 and 1001 is rotated around the central axis C, a grindstone 1005 such as diamond is pressed against the coating layer 71. Apply and vibrate.

このときまず、ローラ１０００，１００１の回転速度を３５０ｒｐｍ、砥石１００５の押し当て圧を０．０１７ＭＰａ、加工時間を０．５ｓにそれぞれ設定した荒処理を、実施する。次に、ローラ１０００，１００１の回転速度を４００ｒｐｍ、砥石１００５の押し当て圧を０．０１７ＭＰａ、加工時間を３ｓにそれぞれ設定した中間処理を、実施する。さらに、ローラ１０００，１００１の回転速度を４００ｒｐｍ、砥石１００５の押し当て圧を０．０１７ＭＰａ、加工時間を１ｓにそれぞれ設定した仕上げ処理を、行う。以上の各処理を含む超仕上げによって研磨された外表面７１ａには、下地面７０ａの真円度とは０以上且つ０．２μｍの差となるように、０．０５μｍ以上且つ０．６μｍ以下の真円度が与えられることとなる。 At this time, first, rough processing is performed in which the rotation speed of the rollers 1000 and 1001 is 350 rpm, the pressing pressure of the grindstone 1005 is 0.017 MPa, and the processing time is 0.5 s. Next, an intermediate process is performed in which the rotation speed of the rollers 1000 and 1001 is 400 rpm, the pressing pressure of the grindstone 1005 is 0.017 MPa, and the processing time is 3 s. Further, finishing processing is performed in which the rotation speeds of the rollers 1000 and 1001 are 400 rpm, the pressing pressure of the grindstone 1005 is 0.017 MPa, and the processing time is 1 s. The outer surface 71a polished by the superfinishing including each of the above treatments has a difference of 0 μm or more and 0.2 μm or less from the roundness of the base surface 70a, and the outer diameter of 0.05 μm or more and 0.6 μm or less. Roundness will be given.

尚、こうした各工程Ｓ１０〜Ｓ４０を経て製造された弁部材４０等が、別途製造された弁ハウジング１０内に収容されることで、燃料噴射弁１の製造は完了する。 The manufacturing of the fuel injection valve 1 is completed by accommodating the valve member 40 and the like manufactured through the processes S10 to S40 in the separately manufactured valve housing 10.

（作用効果）
以上説明した燃料噴射弁１及びその製造方法による作用効果を、以下に説明する。 (Action effect)
The operation and effect of the fuel injection valve 1 and the manufacturing method thereof described above will be described below.

燃料噴射弁１によると、弁座部１９及び弁体部４８のうち後者である「特定弁部」にて基材７０の下地面７０ａに積層されている被覆層７１は、耐摩耗性を確保するためのＤＬＣ膜７４を図４，７の如く２μｍ超過の厚さにて有することで、耐久性も確保できる。しかも、研磨状態の下地面７０ａに積層された被覆層７１を構成する２μｍ超過の厚いＤＬＣ膜７４であっても、研磨状態の外表面７１ａにて真円度が図４，６の如く０．６μｍ以下に抑えられることで、着座状態での弁座部１９及び弁体部４８間にて図６の如く油密性を確保できる。尚、本実施形態との比較のために図４，６，７には、研磨なしのＤＬＣ膜７４の場合が示されている。 According to the fuel injection valve 1, the coating layer 71 laminated on the lower ground surface 70a of the base material 70 at the latter "specific valve portion" of the valve seat portion 19 and the valve body portion 48 ensures wear resistance. By having the DLC film 74 for this purpose with a thickness of more than 2 μm as shown in FIGS. Moreover, even with the thick DLC film 74 of more than 2 μm forming the coating layer 71 laminated on the ground surface 70a in the polished state, the roundness of the outer surface 71a in the polished state is as shown in FIGS. By suppressing the thickness to 6 μm or less, oil tightness can be secured between the valve seat portion 19 and the valve body portion 48 in the seated state as shown in FIG. For comparison with this embodiment, FIGS. 4, 6 and 7 show the case of the DLC film 74 without polishing.

また燃料噴射弁１によると、製品回転用の調整砥石スピンドルの回転振れ精度の限界から、ＤＬＣ膜７４の外表面７１ａには、０．０５μｍ以上の真円度を与えることが好ましい。 Further, according to the fuel injection valve 1, it is preferable to give the outer surface 71a of the DLC film 74 a roundness of 0.05 μm or more from the limit of the rotational runout accuracy of the adjusting grindstone spindle for product rotation.

さらに燃料噴射弁１によると、ＤＬＣ膜７４の屈折率を図５の如く２．２以上とすることで、弁座部１９及び弁体部４８間での着座時に懸念されるＤＬＣ膜７４の摩耗量を低減して、耐摩耗性を高めることができる。それと共に、ＤＬＣ膜７４の屈折率を図５の如く２．４以下とすることで、ＤＬＣ膜７４の成膜に必要な温度を可及的に低く抑えて、外乱等に起因した成膜温度不足によるＤＬＣ膜７４の成膜不良を抑止できる。 Further, according to the fuel injection valve 1, by setting the refractive index of the DLC film 74 to be 2.2 or more as shown in FIG. 5, the wear of the DLC film 74 which may occur during the seating between the valve seat portion 19 and the valve body portion 48. The amount can be reduced to increase wear resistance. At the same time, by setting the refractive index of the DLC film 74 to be 2.4 or less as shown in FIG. 5, the temperature necessary for forming the DLC film 74 can be suppressed as low as possible, and the film forming temperature caused by disturbance or the like can be suppressed. It is possible to prevent the film formation defect of the DLC film 74 due to the shortage.

またさらに燃料噴射弁１によると、ＤＬＣ膜７４の厚さを図４，７の如く５μｍ以下とすることで、ＤＬＣ膜７４の密着性を確保し得る。故に、密着不足によるＤＬＣ膜７４の成膜不良を抑止できると共に、弁座部１９及び弁体部４８間での着座時に懸念されるＤＬＣ膜７４の剥がれも抑止できる。 Further, according to the fuel injection valve 1, the adhesion of the DLC film 74 can be secured by setting the thickness of the DLC film 74 to 5 μm or less as shown in FIGS. Therefore, it is possible to prevent defective formation of the DLC film 74 due to insufficient adhesion, and it is also possible to prevent peeling of the DLC film 74, which is a concern during seating between the valve seat portion 19 and the valve body portion 48.

加えて燃料噴射弁１の製造方法では、第一研磨工程Ｓ２０の超仕上げによって基材７０の下地面７０ａが研磨状態に形成された後、積層工程Ｓ３０にて当該下地面７０ａに積層される被覆層７１のうちＤＬＣ膜７４が与える外表面７１ａも、第二研磨工程Ｓ４０の超仕上げによって研磨状態に形成される。これにより「特定弁部」としての弁体部４８では、ＤＬＣ膜７４を図４，７の如く２μｍ超過の厚さに形成して耐摩耗性及び耐久性を確保できるだけでなく、研磨状態にした外表面７１ａの真円度を図４，６の如く０．６μｍ以下に抑えて油密性を確保できる。 In addition, in the method for manufacturing the fuel injection valve 1, after the lower ground surface 70a of the base material 70 is formed into a polished state by the superfinishing in the first polishing step S20, the coating that is stacked on the underlying surface 70a in the stacking step S30. The outer surface 71a of the layer 71 provided by the DLC film 74 is also formed in a polished state by the superfinishing in the second polishing step S40. As a result, in the valve body portion 48 as the "specific valve portion", the DLC film 74 is formed to a thickness of more than 2 μm as shown in FIGS. The roundness of the outer surface 71a can be suppressed to 0.6 μm or less as shown in FIGS.

また加えて燃料噴射弁１の製造方法では、第二研磨工程Ｓ４０の超仕上げによって基材７０の下地面７０ａとの真円度差が０.２μm以下となる研磨状態に、ＤＬＣ膜７４の外表面７１ａが形成される。これによれば、第一研磨工程Ｓ２０の超仕上げによって基材７０の下地面７０ａを研磨状態にしておくことで、当該下地面７０ａに積層される被覆層７１のうちＤＬＣ膜７４が外表面７１ａに与える真円度を、第二研磨工程Ｓ４０の超仕上げによって図４，６の如き０．６μｍ以下まで簡単に抑え得る。故に、油密性を確保する効果の信頼性を、高めることができる。 In addition, in the manufacturing method of the fuel injection valve 1, the superfinishing in the second polishing step S40 causes the outside of the DLC film 74 to be in a polished state in which the circularity difference with the lower ground surface 70a of the base material 70 is 0.2 μm or less. The surface 71a is formed. According to this, the lower surface 70a of the base material 70 is kept in a polishing state by the superfinishing in the first polishing step S20, so that the DLC film 74 in the coating layer 71 laminated on the base surface 70a is the outer surface 71a. The roundness given to the above can be easily suppressed to 0.6 μm or less as shown in FIGS. 4 and 6 by superfinishing in the second polishing step S40. Therefore, the reliability of the effect of ensuring oil tightness can be enhanced.

（他の実施形態）
以上、本発明の一実施形態について説明したが、本発明は、当該実施形態に限定して解釈されるものではなく、本発明の要旨を逸脱しない範囲内において種々の実施形態に適用することができる。 (Other embodiments)
Although one embodiment of the present invention has been described above, the present invention should not be construed as being limited to the embodiment, and may be applied to various embodiments without departing from the scope of the present invention. it can.

具体的に変形例１では、図１３に示す「特定弁部」としての弁座部１９を形成する基材７０の下地面７０ａに対して、ＤＬＣ膜７４（図３参照）を有する被覆層７１が積層されていてもよい。変形例２では、図１４に示す「特定弁部」としての弁座部１９及び弁体部４８をそれぞれ形成する基材７０の下地面７０ａに対して、ＤＬＣ膜７４（図３参照）を有する被覆層７１が積層されていてもよい。 Specifically, in the modified example 1, the coating layer 71 having the DLC film 74 (see FIG. 3) is formed on the lower ground surface 70a of the base material 70 forming the valve seat portion 19 as the “specific valve portion” shown in FIG. May be laminated. In the second modification, the DLC film 74 (see FIG. 3) is provided on the lower ground surface 70a of the base material 70 forming the valve seat portion 19 and the valve body portion 48 as the “specific valve portion” shown in FIG. 14, respectively. The coating layer 71 may be laminated.

変形例３では、例えばＤＬＣ膜７４に求められる摩耗量の許容上限値等に応じて、ＤＬＣ膜７４の屈折率が２．２未満又は２．４超過の値に設定されていてもよい。変形例４では、例えばＤＬＣ膜７４の成膜に必要な温度等に応じて、ＤＬＣ膜７４の屈折率が２．４超過の値に設定されていてもよい。変形例５では、例えばＤＬＣ膜７４に求められる基材７０への密着性等に応じて、ＤＬＣ膜７４の厚さが５μｍ超過の値に設定されていてもよい。変形例６では、例えば基材７０の下地面７０ａにて達成可能な真円度等に応じて、下地面７０ａとＤＬＣ膜７４の外表面７１ａとの真円度差が０．２μm超過の値に設定されていてもよい。 In Modification 3, for example, the refractive index of the DLC film 74 may be set to a value less than 2.2 or more than 2.4 depending on the allowable upper limit value of the wear amount required for the DLC film 74 and the like. In Modification 4, for example, the refractive index of the DLC film 74 may be set to a value exceeding 2.4 depending on the temperature or the like required for forming the DLC film 74. In Modification Example 5, the thickness of the DLC film 74 may be set to a value exceeding 5 μm depending on, for example, the adhesiveness to the base material 70 required for the DLC film 74. In Modification 6, for example, the roundness difference between the underlayer 70a and the outer surface 71a of the DLC film 74 exceeds 0.2 μm depending on the roundness that can be achieved on the lower ground 70a of the substrate 70. It may be set to.

１ 燃料噴射弁、１０ 弁ハウジング、１８ 噴孔、１９ 弁座部、４０ 弁部材、４８ 弁体部、７０ 基材、７０ａ 下地面、７１ 被覆層、７１ａ 外表面、７２ 第一中間膜、７３ 第二中間膜、７４ ＤＬＣ膜、１０００，１００１ ローラ、１００２，１００５ 砥石、１００３ 真空チャンバ、１００４ ターゲット、Ｃ 中心軸線、Ｓ１０ 準備工程、Ｓ２０ 第一研磨工程、Ｓ３０ 積層工程、Ｓ４０ 第二研磨工程 DESCRIPTION OF SYMBOLS 1 fuel injection valve, 10 valve housing, 18 injection hole, 19 valve seat part, 40 valve member, 48 valve body part, 70 base material, 70a lower ground, 71 coating layer, 71a outer surface, 72 first intermediate film, 73 Second intermediate film, 74 DLC film, 1000,1001 roller, 1002,1005 grindstone, 1003 vacuum chamber, 1004 target, C central axis, S10 preparation step, S20 first polishing step, S30 laminating step, S40 second polishing step

Claims (6)

内燃機関へ燃料を噴射する噴孔（１８）、及び前記噴孔よりも上流側にて円形内輪郭の弁座部（１９）を有する弁ハウジング（１０）と、
前記弁ハウジング内に収容されており、前記弁座部に対して同軸上に離着座する円形外輪郭の弁体部（４８）を有し、当該離着座により前記噴孔からの燃料噴射を断続させる弁部材（４０）と、
前記弁座部及び前記弁体部のうち少なくとも一方である特定弁部は、
研磨状態の下地面（７０ａ）を有する基材（７０）と、
研磨状態の外表面（７１ａ）に０．６μｍ以下の真円度を与えているダイヤモンドライクカーボン膜（７４）を２μｍ超過の厚さにて有し、前記下地面に積層されている被覆層（７１）とを、含んで構成され、
前記ダイヤモンドライクカーボン膜は、前記特定弁部において、前記弁座部及び前記弁体部間での繰り返しの着座が生じる部分に、２．２以上且つ２．４以下の屈折率をもって成膜されている燃料噴射弁。 A valve housing (10) having an injection hole (18) for injecting fuel into the internal combustion engine, and a valve seat portion (19) having a circular inner contour upstream of the injection hole;
The valve housing (48) is housed in the valve housing and has a circular outer contour that is seated on and off from the valve seat coaxially. The seat allows the fuel injection from the injection hole to be interrupted. A valve member (40) for
The specific valve portion, which is at least one of the valve seat portion and the valve body portion,
A substrate (70) having a ground surface (70a) in a polished state;
A coating layer (which has a diamond-like carbon film (74) having a roundness of 0.6 μm or less on the polished outer surface (71a) with a thickness of more than 2 μm and is laminated on the base surface ( 71) and are included ,
The diamond-like carbon film is formed with a refractive index of 2.2 or more and 2.4 or less on a portion of the specific valve portion where repeated seating occurs between the valve seat portion and the valve body portion. Fuel injection valve. 前記ダイヤモンドライクカーボン膜は、０．０５μｍ以上の真円度を前記外表面に与えている請求項１に記載の燃料噴射弁。 The fuel injection valve according to claim 1, wherein the diamond-like carbon film imparts a circularity of 0.05 μm or more to the outer surface. 前記ダイヤモンドライクカーボン膜は、５μｍ以下の厚さにて成膜されている請求項１又は２に記載の燃料噴射弁。 The diamond-like carbon film, a fuel injection valve according to claim 1 or 2 being deposited at a thickness of less than 5 [mu] m. 請求項１〜３のいずれかに記載の燃料噴射弁を製造する方法であって、
前記基材に超仕上げを施すことにより、前記下地面を研磨状態に形成する第一研磨工程（Ｓ２０）と、
前記ダイヤモンドライクカーボン膜を有する前記被覆層を、研磨状態の前記下地面に積層する積層工程（Ｓ３０）と、
前記ダイヤモンドライクカーボン膜に超仕上げを施すことにより、前記外表面を研磨状態に形成する第二研磨工程（Ｓ４０）とを、含む燃料噴射弁の製造方法。 A method of manufacturing a fuel injection valve according to any one of claims 1 to 3
A first polishing step (S20) of forming the base surface in a polished state by subjecting the base material to superfinishing;
A stacking step (S30) of stacking the coating layer having the diamond-like carbon film on the ground surface in a polished state,
A second polishing step (S40) of forming the outer surface into a polished state by subjecting the diamond-like carbon film to a superfinishing process, the method of manufacturing a fuel injection valve. 前記第二研磨工程では、研磨状態の前記下地面との真円度差が０．２μｍ以下の研磨状態に前記外表面を形成する請求項４に記載の燃料噴射弁の製造方法。 The method of manufacturing a fuel injection valve according to claim 4 , wherein in the second polishing step, the outer surface is formed in a polished state having a circularity difference of 0.2 μm or less with respect to the ground surface in the polished state. 内燃機関へ燃料を噴射する噴孔（１８）、及び前記噴孔よりも上流側にて円形内輪郭の弁座部（１９）を有する弁ハウジング（１０）と、 A valve housing (10) having an injection hole (18) for injecting fuel into the internal combustion engine, and a valve seat portion (19) having a circular inner contour upstream of the injection hole;
前記弁ハウジング内に収容されており、前記弁座部に対して同軸上に離着座する円形外輪郭の弁体部（４８）を有し、当該離着座により前記噴孔からの燃料噴射を断続させる弁部材（４０）と、 The valve housing (48) is housed in the valve housing and has a circular outer contour that is seated on and off from the valve seat coaxially. The seat allows the fuel injection from the injection hole to be interrupted. A valve member (40) for
前記弁座部及び前記弁体部のうち少なくとも一方である特定弁部は、 The specific valve portion, which is at least one of the valve seat portion and the valve body portion,
研磨状態の下地面（７０ａ）を有する基材（７０）と、 A substrate (70) having a ground surface (70a) in a polished state;
研磨状態の外表面（７１ａ）に０．６μｍ以下の真円度を与えているダイヤモンドライクカーボン膜（７４）を２μｍ超過の厚さにて有し、前記下地面に積層されている被覆層（７１）とを、含んで構成されている燃料噴射弁を製造する方法であって、 A coating layer (which has a diamond-like carbon film (74) having a roundness of 0.6 μm or less on the polished outer surface (71a) with a thickness of more than 2 μm and is laminated on the base surface ( 71) and a method of manufacturing a fuel injection valve including:
前記基材に超仕上げを施すことにより、前記下地面を研磨状態に形成する第一研磨工程（Ｓ２０）と、 A first polishing step (S20) of forming the base surface in a polished state by subjecting the base material to superfinishing;
前記ダイヤモンドライクカーボン膜を有する前記被覆層を、研磨状態の前記下地面に積層する積層工程（Ｓ３０）と、 A stacking step (S30) of stacking the coating layer having the diamond-like carbon film on the ground surface in a polished state,
前記ダイヤモンドライクカーボン膜に超仕上げを施すことにより、前記外表面を研磨状態に形成する第二研磨工程（Ｓ４０）とを、含み、 A second polishing step (S40) of forming the outer surface into a polished state by superfinishing the diamond-like carbon film,
前記第二研磨工程では、研磨状態の前記下地面との真円度差が０．２μｍ以下の研磨状態に前記外表面を形成する燃料噴射弁の製造方法。 In the second polishing step, the method of manufacturing a fuel injection valve, wherein the outer surface is formed in a polished state having a circularity difference of 0.2 μm or less from the ground surface in the polished state.
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