JP6713203B2 - レーザ加工装置 - Google Patents

レーザ加工装置 Download PDF

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JP6713203B2
JP6713203B2 JP2016045386A JP2016045386A JP6713203B2 JP 6713203 B2 JP6713203 B2 JP 6713203B2 JP 2016045386 A JP2016045386 A JP 2016045386A JP 2016045386 A JP2016045386 A JP 2016045386A JP 6713203 B2 JP6713203 B2 JP 6713203B2
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laser
light intensity
transmittance
attenuator
intensity distribution
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JP2017159319A (ja
JP2017159319A5 (https=
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健 相場
健 相場
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Sumitomo Heavy Industries Ltd
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Sumitomo Heavy Industries Ltd
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Priority to CN201710120325.7A priority patent/CN107186336B/zh
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JP2016045386A 2016-03-09 2016-03-09 レーザ加工装置 Active JP6713203B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2016045386A JP6713203B2 (ja) 2016-03-09 2016-03-09 レーザ加工装置
CN201710120325.7A CN107186336B (zh) 2016-03-09 2017-03-02 激光加工装置

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JP2016045386A JP6713203B2 (ja) 2016-03-09 2016-03-09 レーザ加工装置

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JP2017159319A JP2017159319A (ja) 2017-09-14
JP2017159319A5 JP2017159319A5 (https=) 2019-02-14
JP6713203B2 true JP6713203B2 (ja) 2020-06-24

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Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7299597B2 (ja) * 2018-12-27 2023-06-28 国立大学法人 東京大学 レーザ加工におけるレーザ光強度への依存性の判定方法及びレーザ加工装置
JP7547060B2 (ja) * 2020-03-18 2024-09-09 株式会社ディスコ 検査装置および検査方法
JP7679323B2 (ja) * 2022-02-08 2025-05-19 東レエンジニアリング株式会社 レーザ加工装置およびチップ転写装置
US20250114856A1 (en) * 2023-10-06 2025-04-10 Rolls-Royce Plc Method for controlling a power beam process

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7009140B2 (en) * 2001-04-18 2006-03-07 Cymer, Inc. Laser thin film poly-silicon annealing optical system
JP2005116729A (ja) * 2003-10-07 2005-04-28 Sharp Corp レーザ加工装置およびレーザ加工方法

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JP2017159319A (ja) 2017-09-14

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