JP6710374B2 - Valve and seal parts - Google Patents

Description

TECHNICAL FIELD The present invention relates to a valve that allows high-pressure gas stored in a cylinder to flow into a pipe, and a replaceable seal part used for an outlet of the valve.

Conventionally, high pressure gas stored in a cylinder has been used in general industries and semiconductor manufacturing processes. A valve used for filling and supplying high-pressure gas is directly connected to the cylinder. The high pressure gas in the cylinder is connected to the gas pipe via a valve. As valves for cylinders, there are diaphragm type valves and pack type valves. The diaphragm valve includes a metal diaphragm that bends as the valve body moves. The diaphragm type valve can increase the airtight performance inside the valve by the diaphragm. Such a diaphragm valve is applied to supply of a special material gas for semiconductors, for example. On the other hand, in the pack type valve, the airtightness inside the valve is secured by the combination of the packing and the O ring. Such a pack-type valve has a simple structure and can supply a large amount of gas.

Hereinafter, a diaphragm type cylinder valve designed by Koda Co., Ltd., which is one of the co-applicants, will be described with reference to FIGS. 3 to 5.

FIG. 3 is a cross-sectional view showing a single diaphragm type valve 100 which is not connected to a cylinder or a pipe. In FIG. 3, a diaphragm valve 100 includes a main body 10, a spindle 20, a handle 30, a gland nut 40, a spindle receiving portion 50, a diaphragm 60, a seating stem 70, a retainer 80, and a diaphragm pressing portion 90. And a plurality of disc springs 110.

The main body 10 is provided with a hollow portion 11, an inflow passage 12 and an outflow passage 14 for high-pressure gas. Both the inflow path 12 and the outflow path 14 open into the hollow portion 11. An assembly of a spindle receiving portion 50, a diaphragm 60, a seating stem 70, a retainer 80, a diaphragm pressing portion 90, and a plurality of disc springs 110 is housed in the hollow portion 11. A seat disc (valve body) 71 for opening and closing the opening of the inflow passage 12 is attached to the lower end surface of the seating stem 70.

The seating stem 70 is screwed onto the lower end side of the retainer 80 while penetrating the center of the circular diaphragm 60. As a result, the inner peripheral portion of the diaphragm 60 is sandwiched between the seating stem 70 and the retainer 80 in an airtight state. A diaphragm pressing portion 90 is attached to the lower end side of the retainer 80. The diaphragm pressing portion 90 is pressed against the lower end surface of the gland nut 40 and holds the outer peripheral portion of the diaphragm 60 in an airtight state. As a result, the diaphragm 60 forms the closing valve chamber 13 inside the hollow portion 11. The lower end side of the seating stem 70 including the seat disc 71 is located in the closing valve chamber 13. Further, a plurality of disc springs 110 are laminated on the diaphragm pressing portion 90, and the spindle receiving portion 50 is screwed onto the upper end side of the retainer 80. A flat seat 51 is provided on the upper end surface of the spindle receiving portion 50.

On the other hand, the hollow portion 11 is closed by the gland nut 40 in a state where the above-mentioned assembly is stored. The spindle 20 is screwed into the ground nut 40. A handle 30 is fixed to the upper end of the spindle 20. When the handle 30 is rotated, the spindle 20 moves linearly in the vertical direction at the screw pitch. With the linear movement of the spindle 20, the diaphragm 60 is deformed and the seating stem 70 moves up and down. As a result, the seat disk 71 opens and closes the opening of the inflow path 12.

A male screw 10 a is provided on the lower end side of the main body 10. A cylinder (not shown) is directly connected to the male screw 10a. The high-pressure gas filled in the cylinder enters the closing valve chamber 13 from the inflow passage 12 and flows to the outflow passage 14. The outflow passage 14 communicates with the outlet 15. The outlet 15 has a substantially cylindrical wall portion, and an external thread 15a is provided on the outer wall surface thereof.

Here, as shown in FIG. 3, an outlet cap 16 is attached to the outlet 15 of the unused diaphragm type valve 100. The inner wall surface of the outlet cap 16 is provided with a female screw 16a screwed into the male screw 15a of the outlet 15. The outlet cap 16 closes the outlet 15 in an airtight state.

On the other hand, when the diaphragm valve 100 is used, the outlet cap 16 is removed from the outlet 15, and the pipe connection 17 shown in FIG. 4 is connected to the outlet 15. The inner wall surface of the connection 17 is also provided with a female screw 17a screwed into the male screw 15a of the outlet 15.

FIG. 5 is a partially enlarged view showing an airtight structure of the connection 17 and the outlet 15. An annular metal seal portion 17b is integrally formed on the end surface of the connection 17. In front of the metal seal portion 17, a metal gasket 17c is attached via an O-ring. On the other hand, an annular metal seal portion 15b is integrally formed on the bottom surface of the outlet 15. Both the metal seal portion 17b of the connection 17 and the metal seal portion 15b of the outlet 15 are pressed against the metal gasket 17c to form an airtight connection. The outlet cap 16 described above also includes airtight structures 16b and 16c similar to the connection 17 shown in FIG.

JP, 2008-32113, A JP, 2003-74798, A

However, the conventional diaphragm valve 100 described above has a problem that the airtight connection with the pipe cannot be maintained for a long period of time and the product life is short. That is, when the high-pressure gas in the cylinder becomes empty, it is necessary to release the airtight connection between the outlet 15 of the diaphragm valve 100 and the connection 17 of the pipe and fill the cylinder with the high-pressure gas. When the connection 17 and the outlet cap 16 are repeatedly attached to and detached from the outlet 15, the metal seal portion 15b of the outlet 15 is worn. Further, the metal seal portion 15b of the outlet 15 may be deteriorated due to corrosion. Then, the conventional diaphragm valve 100 is discarded when the airtightness of the metal seal portion 15b deteriorates.

Here, as shown in FIG. 5, the outer diameter φMM of the connection 17 and the inner diameter φNN of the outlet 15 are based on domestic and international standards, for example, Japanese JIS standard, American CGA standard or CGA DISS standard, British BS. It may be determined based on the standard, the German DIN standard, the French NF standard, or the like. The inner diameter φNN of the outlet 15 that has been improved to solve the above-described problems of the metal seal portion 15b must comply with domestic and international standards.

It is an object of the present invention to provide a valve and a seal part that can restore the airtight performance of an outlet by replacing parts and can be used repeatedly.

(1) In order to achieve the above object, the valve of the present invention is a valve that allows high-pressure gas stored in a cylinder to flow out to a pipe, and is made of metal provided with an inflow passage and an outflow passage of the high-pressure gas. A main body and a valve body that opens and closes the inflow passage, the main body is integrally provided with an outlet, the outlet communicates with the outflow passage, and is configured to be connectable to the pipe. It has a cylindrical wall part, the inner diameter of the wall part is determined according to the type of the high pressure gas, and inside the wall part, a metal seal part provided separately from the main body can be replaced. , A ring-shaped metal seal portion for forming an airtight connection with the piping side is provided on the front surface of the seal component, and an airtight connection with the outlet is formed on the back surface of the seal component. An O-ring for mounting is attached, and a gas passage hole that penetrates the inside of the metal seal portion and the O-ring and communicates with the outflow passage is provided in the center of the seal component.

(2) Preferably, in the valve according to the above (1), a male screw that is screwed onto the inner wall surface of the outlet is provided on the outer peripheral surface of the seal component, and the cross-sectional shape of the gas passage hole of the seal component is all or one. The part has a hexagonal shape that fits a hexagonal wrench.

(3) Preferably, in the valve of (1) or (2), the sealing component is made of austenitic stainless steel and the O-ring is made of nitrile butadiene rubber.

(4) Preferably, in the valve according to any one of the above (1) to (3), the inner diameter of the wall portion of the outlet is Japanese JIS standard, US CGA standard or CGA DISS standard, British BS standard, Germany. According to the DIN standard or the French NF standard.

(5) In order to achieve the above object, the seal component of the present invention is a metal seal component that is replaceably coupled to an outlet of a valve that allows high-pressure gas stored in a cylinder to flow into a pipe. An annular metal seal portion for forming an airtight connection with the pipe side is projected on the front surface of the sealing component, and an O-shaped metal seal portion for forming an airtight connection with the outlet is provided on the rear surface of the sealing component. A ring is attached, and a gas passage hole that penetrates the inside of the metal seal portion and the O-ring and communicates with the outflow passage of the high-pressure gas is provided in the center of the seal component.

(6) Preferably, the outer peripheral surface of the seal component of the above (5) is provided with a male screw screwed into the inner wall surface of the outlet, and all or part of the cross-sectional shape of the gas passage hole of the seal component is hexagonal. Use a hexagonal structure that fits a wrench.

(7) Preferably, the sealing component of (5) or (6) is made of austenitic stainless steel, and the O-ring is made of nitrile butadiene rubber.

According to the valve and the seal component of the present invention, the airtight performance of the outlet can be restored by replacing the seal component, and the valve can be repeatedly used. Even if the seal parts are replaceable, the inner diameter of the outlet complies with various standards in Japan and overseas.

FIG. 1 is a sectional view showing a diaphragm valve according to an embodiment of the present invention. FIG. 2A is a partially enlarged view showing a portion A of FIG. FIG. 2B is a perspective view showing the seal component according to the present embodiment. FIG. 3 is a cross-sectional view showing a conventional diaphragm type valve in an unused state. FIG. 4 is a sectional view showing a conventional diaphragm type valve in use. FIG. 5 is a partially enlarged view showing part B of FIG.

Hereinafter, a diaphragm valve and a seal component according to an embodiment of the present invention will be described with reference to the drawings. It should be noted that the present invention is characterized by a configuration including a replaceable seal part that is coupled to the outlet. Therefore, the present invention is not limited to the diaphragm type valve illustrated below, but can be applied to, for example, a pack type valve.

<Structure of diaphragm type valve>
1, a diaphragm valve 1 according to the present embodiment mainly includes a main body 10, a spindle 20, a handle 30, a gland nut 40, a spindle receiving portion 50, a diaphragm 60, a seating stem 70, and a retainer. 80, a diaphragm pressing portion 90, and a plurality of disc springs 110.

<<<Main body>>>
As shown in FIG. 1, the main body 10 is formed of a metal material having corrosion resistance, for example, stainless steel such as SUS316L. The main body 10 has an upper portion, a lower portion, and a side protruding portion.

A hollow portion 11 is provided on the upper portion of the main body 10. An assembly of a spindle receiving portion 50, a diaphragm 60, a seating stem 70, a retainer 80, a diaphragm pressing portion 90, and a plurality of disc springs 110 is housed in the hollow portion 11. A seat disc (valve body) 71 is attached to the lower end surface of the seating stem 70.

The lower portion of the main body 10 serves as a connection portion with a cylinder (not shown). A male screw 10 a is provided on the lower outer surface of the body 10. A cylinder (not shown) is directly connected to the male screw 10a. An inflow passage 12 for high-pressure gas, which communicates with the hollow portion 11, is provided in the lower portion of the main body 10.

The portion projecting to the side of the main body 10 is an outlet 15 for connecting a pipe connection 17 (see FIGS. 4 and 5). FIG. 1 shows an unused diaphragm valve 1, and an outlet cap 16 is attached to the outlet 15.

The outlet 15 has a substantially cylindrical wall portion. The inner diameter φNN of this wall portion is determined according to the type of high-pressure gas. The inside of the wall portion communicates with the outflow passage 14 for high-pressure gas. Here, in the wall portion of the outlet 15 of the present embodiment, the metal seal component 2 provided separately from the main body 10 is replaceably coupled. Details of the seal component 2 will be described later.

Both the inflow passage 12 and the outflow passage 14 for the high-pressure gas described above open to the lower end side of the hollow portion 11. The closing valve chamber 13 is formed by sealing the lower end side of the hollow portion 11 with the disk-shaped diaphragm 60. The lower end side of the seating stem 70 including the seat disc 71 is located in the closing valve chamber 13. The opening of the high-pressure gas inflow path 12 is opened and closed by the seat disk 71.

<< Spindle and handle >>
The spindle 20 is a shaft member for opening and closing the sheet disk 71. The spindle 20 is formed of, for example, stainless steel such as SUS304 having corrosion resistance. A male screw for attaching the handle 30 is provided on the upper end of the spindle 20. The handle 30 is fixed to the upper end of the spindle 20 by fastening a nut to the male screw. The handle 30 is formed of, for example, an aluminum alloy such as ADC12.

The lower end of the spindle 20 has a larger diameter than the upper end. A male screw is provided on the outer periphery of the lower end portion of the large diameter. The male screw is screwed into the female screw of the gland nut 40. As a result, when the handle 30 is rotated, the spindle 20 linearly moves in the vertical direction in the figure (that is, the opening/closing direction of the seat disk 71) at the pitch of the screw.

The end surface of the lower end of the spindle 20 is a convex curved surface. The convex curved surface abuts on the flat seat 51 assembled to the spindle receiving portion 50. The rotational movement and the linear movement of the spindle 20 are transmitted to the spindle receiving portion 50 through a slight surface contact between the convex curved surface of the lower end portion and the flat seat 51.

<<Grand nut>>
The ground nut 40 is screwed into a female screw provided on the inner wall surface of the hollow portion 11 of the main body 10. The ground nut 40 seals the hollow portion 11 of the main body 10 and rotatably supports the spindle 20. The ground nut 40 presses the diaphragm pressing portion 90 with its annular lower end surface when screwed into the main body 10.

The ground nut 40 is formed of, for example, stainless steel such as SUS303 or SUS304, or brass (brass) such as C3604BD plated with nickel to have corrosion resistance. In particular, brass (brass) such as C3604BD plated with nickel to have corrosion resistance is preferable.

<< Spindle receiving part >>
The spindle receiver 50 has a flat seat 51 and a male screw. The flat seat 51 receives the convex curved surface of the lower end portion of the spindle 20. The abutment surface of the flat seat 51 is a flat surface, and is slightly in surface contact with the convex curved surface of the lower end portion of the spindle 20. The spindle receiver 50 is formed of, for example, stainless steel such as SUS304 having corrosion resistance. Further, the flat seat 51 is formed, for example, by quench hardening treatment of carbon tool steel such as JIS SK5 having a hardness higher than that of the spindle receiving portion 50. By making the flat seat 51 have high hardness, it is possible to prevent wear, deformation, and seizure of the spindle receiving portion 50 due to contact with the convex curved surface of the lower end portion of the spindle 20.

<< diaphragm >>
The diaphragm 60 seals the closing valve chamber 13 of the main body 10 while allowing the opening/closing operation of the seat disk 71. The diaphragm 60 can be deformed in a direction orthogonal to its diametrical direction. The larger the operation amount (deformation amount) of the diaphragm 60, the larger the distance between the seat disk 71 and the opening of the inflow passage 12, and the larger the gas flow rate per unit time. A through hole is provided at the center of the diaphragm 60. The male screw portion of the seating stem 70 is inserted into this through hole.

The inner peripheral portion (around the through hole) of the diaphragm 60 is sandwiched between the seating stem 70 and the retainer 80 in an airtight state. That is, in this embodiment, the diaphragm 60 is not welded to the seating stem 70. With this configuration, the worn or deteriorated diaphragm 60 and the seating stem 70 can be separated from the retainer 80 and replaced. The diaphragm 60 is formed of a material having excellent corrosion resistance and capable of withstanding the high pressure of the closing valve chamber 13. The diaphragm 60 is formed of, for example, stainless steel such as SUS316L and SUS304.

<< seating stem >>
A male screw is provided on the upper portion of the seating stem 70. The male screw is inserted into the through hole of the diaphragm 60 and screwed into the female screw of the retainer 80. On the other hand, a recess is formed on the lower end surface of the seating stem 70. The seat disk 71 is caulked and fixed in the recess. The seating stem 70 is formed of a material having mechanical strength capable of withstanding the strong tightening torque of the retainer 80 and having corrosion resistance, for example, stainless steel such as SUS630.

<<Retainer>>
The retainer 80 is formed of, for example, stainless steel such as SUS304. A diaphragm pressing portion 90 and a disc spring 110 are attached to the outside of the retainer 80. A female screw is formed on the inner wall surface of the retainer 80. The male screw of the spindle receiver 50 is screwed onto the upper side of this female screw. The male screw of the seating stem 70 is screwed onto the lower side of this female screw via the diaphragm 60. As a result, the spindle receiver 50, the retainer 80, the diaphragm 60, and the seating stem 70 are connected to each other. The spindle receiver 50, the retainer 80, and the seating stem 70 move in the opening/closing direction of the seat disk 71 with the linear movement of the spindle 20.

<< diaphragm holding part >>
The diaphragm pressing portion 90 is formed of, for example, stainless steel such as SUS304. The diaphragm pressing portion 90 is a thick disk-shaped member and has substantially the same diameter as the diaphragm 60. Such a diaphragm holding portion 90 is hermetically fixed in the hollow portion 11 of the main body 10 via an O-ring. The diaphragm pressing portion 90 is pressed by the annular lower end surface of the gland nut 40 and holds the outer peripheral portion of the diaphragm 60 in an airtight state.

<< disk spring >>
The plurality of disc springs 110 are formed of, for example, stainless steel such as SUS304. The disc springs 110 are alternately stacked with their front and back reversed. Each disc spring 110 generates an urging force in the upward direction (the opening direction of the seat disc 71) in the drawing between the spindle receiving portion 50 and the diaphragm pressing portion 90.

<<Sheet Disc>>
The seat disc 71 opens and closes the opening of the inflow passage 12 in the closing valve chamber 13 to control gas flow. The seat disk 71 is made of a resin material that has excellent airtightness and does not easily deform even after being used for many years. The sheet disk 71 is formed of, for example, PCTFE, PVDF, polyamide or the like. As a material for the sheet disk 71, PCTFE is particularly suitable.

<<<Seal parts>>
As described above, the replaceable seal component 2 is coupled to the outlet 15 of the diaphragm valve 1 of this embodiment. The seal component 2 is a metal component separate from the main body 10, and is made of, for example, austenitic stainless steel such as SUS316L or SUS304. FIG. 2A is a partially enlarged cross-sectional view of a portion A in FIG. 1, showing a state where the seal component 2 and the outlet 15 are connected. Further, FIG. 2B shows the appearance of the single seal component 2. Hereinafter, the seal component 2 of the present embodiment will be described in detail.

As shown in FIGS. 2A and 2B, the seal component 2 of the present embodiment is screwed onto the inner wall surface of the outlet 15. That is, the female screw 15c is provided on the inner wall surface of the outlet 15. Corresponding to this, the outer peripheral surface of the seal component 2 is provided with a male screw 2a screwed into the female screw 15c. Further, a gas passage hole 2c is formed in the center of the seal component 2. The gas passage hole 2c has a hexagonal cross-sectional shape suitable for a hexagon wrench (not shown). With such a configuration, the seal member 2 of this embodiment can be easily attached to and detached from the outlet 15 using a hexagon wrench.

On the front surface of the seal component 2, an annular metal seal portion 2b is provided so as to project. The metal seal portion 2b is pressed against the metal gaskets 16c and 17c of the outlet cap 16 or the connection 17 to form an airtight connection. On the other hand, an O-ring 2d is attached to the back surface of the seal component 2. The O-ring 2d is pressed against the bottom surface and the side surface of the outlet 15 to form an airtight connection. The gas passage hole 2c described above penetrates the inside of the metal seal portion 2b and the O-ring 2d and communicates with the outflow passage 14 of the high pressure gas. The O-ring 2d is formed of, for example, nitrile butadiene rubber.

<Effects of diaphragm type valve>
According to the diaphragm valve 1 and the seal component 2 of the present embodiment, the airtight performance of the outlet 15 can be restored by replacing the seal component 2, and the diaphragm valve 1 can be repeatedly used. ..

That is, when the connection 17 and the outlet cap 16 are repeatedly attached to and detached from the outlet 15, the metal seal portion 2b of the seal component 2 is worn. Further, the metal seal portion 2b of the seal component 2 may deteriorate due to corrosion. Even in such a case, the airtight performance of the outlet 15 can be recovered by replacing the seal component 2 whose metal seal portion 2b is worn or deteriorated with a new seal component 2. Further, the diaphragm valve 1 of the present embodiment is configured so that the worn or deteriorated diaphragm 60 and the seating stem 70 can be replaced. Therefore, by replacing the seal component 2, the diaphragm 60, and the seating stem 70, the diaphragm valve 1 can be repeatedly used for a long period of time.

Further, as shown in FIG. 2A, even when the seal component 2 of the present embodiment and the configuration for making the seal member 2 replaceable are applied to the outlet 15, the inner diameter φNN of the outlet 15 is Various other standards such as Japanese JIS standard, US CGA standard or CGA DISS standard, British BS standard, German DIN standard, or French NF standard can be adapted. As a result, the inner diameter φNN of the outlet 15 can be set to a dimension that is determined according to the type of high-pressure gas, and it is possible to prevent erroneous connection of the pipe connection 17.

1, 100 Diaphragm valve 2 Seal part 2a Male screw 2b Metal seal part 2c Gas passage hole 2d O-ring 10 Main body 10a Male screw 11 Hollow part 12 Inflow passage 13 Closed valve chamber 14 Outflow passage 15 Outlet 15a Male screw 15b Metal seal portion 15c Female screw 16 Outlet cap 16a Female screw 16b Metal seal part 16c Metal gasket 17 Connection 17a Female screw 17b Metal seal part 17c Metal gasket 18 Metal seal part 20 Spindle 30 Handle 40 Ground nut 50 Spindle receiving part 51 Flat seat 60 Diaphragm 70 Seating stem 71 Sheet disk (valve body)
80 retainer 90 diaphragm retainer 110 disc spring

Claims (7)

A valve for discharging high-pressure gas stored in a cylinder into a pipe,
A metal body provided with an inflow path and an outflow path for the high-pressure gas;
A valve body for opening and closing the inflow path,
An outlet is integrally provided on the main body,
The outlet has a substantially cylindrical wall portion that communicates with the outflow passage and is configured to be able to connect the pipe, the inner diameter of the wall portion is determined according to the type of the high-pressure gas, and the wall Inside the part, a metal seal part provided separately from the main body is replaceably coupled,
An annular metal seal portion for forming an airtight connection with the pipe side is projected on the front surface of the sealing component, and an O-shaped metal seal portion for forming an airtight connection with the outlet is provided on the rear surface of the sealing component. A ring is attached, and a gas passage hole that penetrates the inside of the metal seal portion and the O-ring and communicates with the outflow passage is provided in the center of the seal component.
A valve characterized by that. The outer peripheral surface of the sealing component is provided with a male screw threadedly engaged with the inner wall surface of the outlet, and all or a part of the cross-sectional shape of the gas passage hole of the sealing component is a hexagonal shape suitable for a hexagon wrench. The valve according to 1. The valve according to claim 1 or 2, wherein the sealing component is made of austenitic stainless steel, and the O-ring is made of nitrile butadiene rubber. The inner diameter of the wall of the outlet is determined based on Japanese JIS standard, American CGA standard or CGA DISS standard, British BS standard, German DIN standard, or French NF standard. The valve according to any one of items. A metal seal part exchangeably coupled to an outlet of a valve for discharging high-pressure gas stored in a cylinder into a pipe,
An annular metal seal portion for forming an airtight connection with the pipe side is projected on the front surface of the sealing component, and an O-shaped metal seal portion for forming an airtight connection with the outlet is provided on the rear surface of the sealing component. A ring is attached, and a gas passage hole that penetrates the inside of the metal seal portion and the O-ring and communicates with the outflow passage of the high-pressure gas is provided in the center of the seal component.
Seal parts characterized by The outer peripheral surface of the sealing component is provided with a male screw threadedly engaged with the inner wall surface of the outlet, and all or a part of the cross-sectional shape of the gas passage hole of the sealing component is a hexagonal shape suitable for a hexagonal wrench. The seal component according to item 5. The seal component according to claim 5 or 6, wherein the seal component is made of austenitic stainless steel, and the O-ring is made of nitrile butadiene rubber.