JP2018009677A - Valve and seal component - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a valve capable of recovering an airtight performance of an outlet through component replacement, and repeatedly usable.SOLUTION: A valve includes a body 10 in which an inflow passage 12 and an outflow passage 14 of high pressure gas are provided, and a valve body 71 which opens and closes the inflow passage 12. An outlet 15 is integrally provided in the body 10, and the outlet 15 communicates with the outflow passage 14, and has an almost cylindrical wall part constituted so as to connect with a piping. An inner diameter of the wall part is set in accordance with the kind of high pressure gas, and a seal component 2 provided separately from the body 10 is replaceably connected to the inside of the wall part. An annular metal seal portion 2b for forming air tight connection with a piping side is projected to the front face of the seal component 2, an O ring 2d for forming air tight connection with the outlet 15 is mounted on the rear of the seal component 2, and a gas passage hole 2c penetrating into the metal seal part 2b and the inside of the O ring 2d and communicated with the outflow passage 14 is provided in the center of the seal component 2.SELECTED DRAWING: Figure 1

Description

  The present invention relates to a valve that allows high-pressure gas stored in a cylinder to flow into a pipe, and a replaceable seal part used in the outlet of the valve.

  Conventionally, high-pressure gas stored in a cylinder is used in general industries and semiconductor manufacturing processes. A valve used for filling and supplying high-pressure gas is directly connected to the cylinder. The high-pressure gas in the cylinder is connected to the gas pipe through a valve. As a cylinder valve, there are a diaphragm type valve and a pack type valve. The diaphragm valve includes a metal diaphragm that bends as the valve body moves. Diaphragm type valves can increase the airtightness inside the valve by the diaphragm. Such a diaphragm type valve is applied to supply of a special material gas for semiconductors, for example. On the other hand, the pack-type valve ensures airtightness in the valve by a combination of packing and O-ring. Such a pack type valve has a simple structure and can supply a large amount of gas.

  Hereinafter, a diaphragm type cylinder valve designed by Koda Co., Ltd., one of the joint applicants, will be described with reference to FIGS.

  FIG. 3 is a cross-sectional view showing a single diaphragm valve 100 that is not connected to a cylinder and piping. In FIG. 3, the diaphragm valve 100 includes a main body 10, a spindle 20, a handle 30, a ground nut 40, a spindle receiving portion 50, a diaphragm 60, a seating stem 70, a retainer 80, and a diaphragm pressing portion 90. And a plurality of disc springs 110.

  The main body 10 is provided with a hollow portion 11, a high-pressure gas inflow passage 12, and an outflow passage 14. Both the inflow path 12 and the outflow path 14 open into the hollow portion 11. In the hollow portion 11, an assembly of a spindle receiving portion 50, a diaphragm 60, a seating stem 70, a retainer 80, a diaphragm pressing portion 90, and a plurality of disc springs 110 is housed. A seat disk (valve element) 71 for opening and closing the opening of the inflow passage 12 is attached to the lower end surface of the seating stem 70.

  The seating stem 70 is screwed to the lower end side of the retainer 80 in a state of passing through the center of the circular diaphragm 60. Thereby, the inner peripheral part of the diaphragm 60 is clamped between the seating stem 70 and the retainer 80 in an airtight state. A diaphragm pressing portion 90 is attached to the lower end side of the retainer 80. The diaphragm holding part 90 is pressed by the lower end surface of the gland nut 40, and clamps the outer peripheral part of the diaphragm 60 in an airtight state. Thereby, the diaphragm 60 forms the closing valve chamber 13 in the hollow portion 11. In the closing valve chamber 13, the lower end side of the seating stem 70 including the seat disk 71 is located. Further, a plurality of disc springs 110 are stacked on the diaphragm pressing portion 90, and the spindle receiving portion 50 is screwed onto the upper end side of the retainer 80. A flat seat 51 is provided on the upper end surface of the spindle receiving portion 50.

  On the other hand, the hollow portion 11 is closed by the ground nut 40 in a state where the above-described assembly is accommodated. The spindle 20 is screwed to the ground nut 40. A handle 30 is fixed to the upper end of the spindle 20. When the handle 30 is rotated, the spindle 20 linearly moves up and down at a screw pitch. As the spindle 20 moves linearly, the diaphragm 60 is deformed and the seating stem 70 moves up and down. Thereby, the seat disk 71 opens and closes the opening of the inflow passage 12.

  A male screw 10 a is provided on the lower end side of the main body 10. A cylinder (not shown) is directly connected to the male screw 10a. The high-pressure gas filled in the cylinder enters the closing valve chamber 13 from the inflow path 12 and flows to the outflow path 14. The outflow channel 14 communicates with the outlet 15. The outlet 15 has a substantially cylindrical wall portion, and a male screw 15a is provided on the outer wall surface thereof.

  Here, as shown in FIG. 3, an outlet cap 16 is attached to the outlet 15 of the unused diaphragm valve 100. On the inner wall surface of the outlet cap 16, a female screw 16 a that is screwed into the male screw 15 a of the outlet 15 is provided. The outlet cap 16 closes the outlet 15 in an airtight state.

  On the other hand, when the diaphragm valve 100 is used, the outlet cap 16 is removed from the outlet 15, and a pipe connection 17 shown in FIG. 4 is connected to the outlet 15. Also on the inner wall surface of the connection 17, a female screw 17 a that is screwed into the male screw 15 a of the outlet 15 is provided.

  FIG. 5 is a partially enlarged view showing an airtight structure of the connection 17 and the outlet 15. An annular metal seal portion 17 b is integrally formed on the end surface of the connection 17. A metal gasket 17c is attached in front of the metal seal portion 17 through an O-ring. On the other hand, an annular metal seal portion 15 b is integrally formed on the bottom surface of the outlet 15. The metal seal portion 17b of the connection 17 and the metal seal portion 15b of the outlet 15 are both pressed against the metal gasket 17c to form an airtight connection. The outlet cap 16 described above also includes airtight structures 16b and 16c similar to the connection 17 shown in FIG.

JP 2008-32113 A JP 2003-74798 A

  However, the conventional diaphragm valve 100 described above has a problem in that the hermetic connection with the pipe cannot be maintained over a long period of time, and the product life is short. That is, when the high-pressure gas in the cylinder is emptied, it is necessary to release the airtight connection between the outlet 15 of the diaphragm valve 100 and the pipe connection 17 and fill the cylinder with the high-pressure gas. If the connection 17 and the outlet cap 16 are repeatedly attached to and detached from the outlet 15, the metal seal portion 15b of the outlet 15 is worn out. Moreover, the metal seal part 15b of the outlet 15 may deteriorate due to corrosion. The conventional diaphragm valve 100 is discarded when the airtight performance of the metal seal portion 15b is lowered.

  Here, as shown in FIG. 5, the outer diameter φMM of the connection 17 and the inner diameter φNN of the outlet 15 are determined according to domestic and foreign standards such as Japanese JIS standard, US CGA standard or CGA DISS standard, and British BS. It may be determined based on a standard, a German DIN standard, a French NF standard, or the like. The inner diameter φNN of the outlet 15 improved in order to solve the problem of the metal seal portion 15b described above must conform to domestic and foreign standards.

  An object of the present invention is to provide a valve and a seal component that can recover the airtight performance of the outlet by replacing the components and can be used repeatedly.

(1) In order to achieve the above object, a valve according to the present invention is a valve for discharging a high-pressure gas stored in a cylinder to a pipe, and is made of a metal provided with an inflow passage and an outflow passage for the high-pressure gas. A main body and a valve body that opens and closes the inflow passage. The main body is provided with an outlet, and the outlet communicates with the outflow passage and is configured to be connectable to the pipe. It has a cylindrical wall portion, and the inner diameter of the wall portion is determined according to the type of the high-pressure gas, and a metal seal part provided separately from the main body is replaceable in the wall portion An annular metal seal portion is formed on the front surface of the seal component to form an airtight connection with the pipe side, and an airtight connection with the outlet is formed on the back surface of the seal component. O-ring to attach Wherein the center of the seal part, through the inside of the metal seal portion and the O-ring, and is a structure in which the gas passage hole is provided which communicates with the outlet channel.

(2) Preferably, in the valve of the above (1), a male screw that is screwed to the inner wall surface of the outlet is provided on the outer peripheral surface of the seal component, and all or one of the sectional shapes of the gas passage holes of the seal component are provided. The part has a hexagonal shape that fits the hexagonal wrench.

(3) Preferably, in the valve of the above (1) or (2), the seal part is made of austenitic stainless steel, and the O-ring is made of nitrile butadiene rubber.

(4) Preferably, in any one of the above-mentioned valves (1) to (3), the outlet wall has an inner diameter of Japanese JIS standard, US CGA standard or CGA DISS standard, British BS standard, Germany In accordance with the DIN standard of France or the French NF standard.

(5) In order to achieve the above object, the seal part of the present invention is a metal seal part that is replaceably coupled to an outlet of a valve that allows high-pressure gas stored in a cylinder to flow into a pipe, An annular metal seal portion for forming an airtight connection with the pipe side is projected on the front surface of the seal component, and an O for forming an airtight connection with the outlet is provided on the back surface of the seal component. A ring is attached, and at the center of the seal part, a gas passage hole is provided which penetrates the inside of the metal seal portion and the O-ring and communicates with the high-pressure gas outflow passage.

(6) Preferably, a male screw that is screwed to the inner wall surface of the outlet is provided on the outer peripheral surface of the seal component of (5), and all or part of the cross-sectional shape of the gas passage hole of the seal component is hexagonal. Use a hexagonal configuration that fits the wrench.

(7) Preferably, the sealing component of (5) or (6) is made of austenitic stainless steel, and the O-ring is made of nitrile butadiene rubber.

  According to the valve and the seal part of the present invention, the airtight performance of the outlet can be recovered by exchanging the seal part, and the valve can be used repeatedly. Even if the seal part can be replaced, the inner diameter of the outlet conforms to various standards in Japan and overseas.

FIG. 1 is a cross-sectional view showing a diaphragm valve according to an embodiment of the present invention. FIG. 2A is a partially enlarged view showing a portion A of FIG. FIG. 2B is a perspective view showing a sealing component according to this embodiment. FIG. 3 is a cross-sectional view showing a conventional diaphragm valve in an unused state. FIG. 4 is a cross-sectional view showing a conventional diaphragm valve in use. FIG. 5 is a partially enlarged view showing part B of FIG.

  Hereinafter, a diaphragm valve and a seal part according to an embodiment of the present invention will be described with reference to the drawings. The present invention is characterized by a configuration including a replaceable seal part coupled to the outlet. Therefore, the present invention is not limited to the diaphragm type valve exemplified below, and can be applied to, for example, a pack type valve.

<Configuration of diaphragm type valve>
In FIG. 1, a diaphragm valve 1 according to this embodiment mainly includes a main body 10, a spindle 20, a handle 30, a gland nut 40, a spindle receiving portion 50, a diaphragm 60, a seating stem 70, and a retainer. 80, a diaphragm pressing portion 90, and a plurality of disc springs 110.

<< body >>
As shown in FIG. 1, the main body 10 is formed of a metal material having corrosion resistance, for example, stainless steel such as SUS316L. The main body 10 has an upper portion, a lower portion, and a portion protruding to the side.

  A hollow portion 11 is provided in the upper portion of the main body 10. In the hollow portion 11, an assembly of a spindle receiving portion 50, a diaphragm 60, a seating stem 70, a retainer 80, a diaphragm pressing portion 90, and a plurality of disc springs 110 is housed. A seat disk (valve element) 71 is attached to the lower end surface of the seating stem 70.

  The lower part of the main body 10 is a connection part with a cylinder (not shown). A male screw 10 a is provided on the lower outer surface of the main body 10. A cylinder (not shown) is directly connected to the male screw 10a. In the lower part of the main body 10, a high-pressure gas inflow passage 12 communicating with the hollow portion 11 is provided.

  A portion protruding to the side of the main body 10 is an outlet 15 for connecting a pipe connection 17 (see FIGS. 4 and 5). FIG. 1 shows an unused diaphragm valve 1, and an outlet cap 16 is attached to the outlet 15.

  The outlet 15 has a substantially cylindrical wall portion. The inner diameter φNN of the wall is determined according to the type of high-pressure gas. The inside of the wall portion communicates with the high-pressure gas outflow passage 14. Here, in the wall portion of the outlet 15 of the present embodiment, a metal seal component 2 provided separately from the main body 10 is coupled in a replaceable manner. Details of the seal component 2 will be described later.

  Both the high-pressure gas inflow path 12 and the outflow path 14 described above open to the lower end side of the hollow portion 11. By closing the lower end side of the hollow portion 11 with a disk-shaped diaphragm 60, the closing valve chamber 13 is formed. In the closing valve chamber 13, the lower end side of the seating stem 70 including the seat disk 71 is located. The opening of the high-pressure gas inflow passage 12 is opened and closed by a seat disk 71.

<< Spindle and handle >>
The spindle 20 is a shaft member for opening and closing the sheet disk 71. The spindle 20 is made of, for example, stainless steel such as SUS304 having corrosion resistance. A male screw for attaching the handle 30 is provided at the upper end of the spindle 20. The handle 30 is fixed to the upper end portion of the spindle 20 by fastening a nut to the male screw. The handle 30 is made of an aluminum alloy such as ADC12, for example.

  The lower end portion of the spindle 20 has a larger diameter than the upper end portion. A male screw is provided on the outer periphery of the lower end portion of the large diameter. This male screw is screwed into the female screw of the ground nut 40. Accordingly, when the handle 30 is rotated, the spindle 20 linearly moves in the vertical direction in the drawing (that is, the opening / closing direction of the seat disk 71) at the pitch of the screw.

  The end surface of the lower end portion of the spindle 20 is a convex curved surface. The convex curved surface comes into contact with a flat seat 51 assembled to the spindle receiving portion 50. The rotational motion and linear motion of the spindle 20 are transmitted to the spindle receiving portion 50 through slight surface contact between the convex curved surface at the lower end thereof and the flat seat 51.

<< Ground nut >>
The ground nut 40 is screwed into a female screw provided on the inner wall surface of the hollow portion 11 of the main body 10. The ground nut 40 seals the hollow portion 11 of the main body 10 and rotatably supports the spindle 20. When the ground nut 40 is screwed into the main body 10, the diaphragm pressing portion 90 is pressed by its annular lower end surface.

  The ground nut 40 is made of, for example, stainless steel such as SUS303 or SUS304, or brass (brass) such as C3604BD that has been plated with nickel to give corrosion resistance. In particular, brass (brass) such as C3604BD that has been nickel-plated to provide corrosion resistance is preferable.

<< Spindle receiving part >>
The spindle receiver 50 includes a flat seat 51 and a male screw. The flat seat 51 receives a convex curved surface at the lower end of the spindle 20. The abutment surface of the flat seat 51 is a flat surface, and slightly contacts the convex curved surface at the lower end of the spindle 20. The spindle receiver 50 is made of, for example, stainless steel such as SUS304 having corrosion resistance. Further, the flat seat 51 is formed, for example, by quenching and hardening carbon tooling steel such as JIS SK5 having higher hardness than the spindle receiving portion 50. By setting the flat seat 51 to a high hardness, it is possible to prevent wear, deformation, and seizure of the spindle receiving portion 50 due to contact with the convex curved surface at the lower end portion of the spindle 20.

<< Diaphragm >>
The diaphragm 60 seals the closing valve chamber 13 of the main body 10 while allowing the opening / closing operation of the seat disk 71. The diaphragm 60 can be deformed in a direction orthogonal to its diametrical direction. As the operation amount (deformation amount) of the diaphragm 60 increases, the distance between the seat disk 71 and the opening of the inflow passage 12 increases, and the gas flow rate per unit time increases. A through hole is provided at the center of the diaphragm 60. The male screw portion of the seating stem 70 is inserted into the through hole.

  The inner peripheral portion (around the through hole) of the diaphragm 60 is sandwiched between the seating stem 70 and the retainer 80 in an airtight state. That is, in this embodiment, the diaphragm 60 is not welded to the seating stem 70. With this configuration, the worn or deteriorated diaphragm 60 and the seating stem 70 can be separated from the retainer 80 and replaced. The diaphragm 60 is formed of a material that has excellent corrosion resistance and can withstand the high pressure of the closing valve chamber 13. The diaphragm 60 is made of, for example, stainless steel of SUS316L or SUS304.

<< Seating Stem >>
A male screw is provided on the upper portion of the seating stem 70. The male screw is inserted into the through hole of the diaphragm 60 and screwed into the female screw of the retainer 80. On the other hand, a recess is formed in the lower end surface of the seating stem 70. In this recess, the sheet disk 71 is fixed by caulking. The seating stem 70 is formed of a material having mechanical strength capable of withstanding the strong tightening torque of the retainer 80 and having corrosion resistance, for example, stainless steel such as SUS630.

<< Retainer >>
The retainer 80 is made of stainless steel such as SUS304, for example. A diaphragm pressing portion 90 and a disc spring 110 are attached to the outside of the retainer 80. A female screw is formed on the inner wall surface of the retainer 80. The male screw of the spindle receiving portion 50 is screwed onto the upper side of the female screw. The male screw of the seating stem 70 is screwed into the lower side of the female screw via the diaphragm 60. Thereby, the spindle receiving part 50, the retainer 80, the diaphragm 60, and the seating stem 70 are mutually connected. The spindle receiver 50, the retainer 80, and the seating stem 70 move in the opening / closing direction of the seat disk 71 as the spindle 20 moves linearly.

<< Diaphragm holding part >>
The diaphragm pressing portion 90 is formed of stainless steel such as SUS304, for example. The diaphragm holding portion 90 is a thick disk-shaped member and has substantially the same diameter as the diaphragm 60. Such a diaphragm pressing portion 90 is hermetically fixed in the hollow portion 11 of the main body 10 via an O-ring. The diaphragm holding part 90 is pressed by the annular lower end surface of the ground nut 40, and holds the outer peripheral part of the diaphragm 60 in an airtight state.

<< Belleville spring >>
The plurality of disc springs 110 are made of stainless steel such as SUS304, for example. The disc springs 110 are overlapped with the front and back being alternately reversed. Each disc spring 110 generates an urging force in the upward direction in the drawing (the opening direction of the sheet disk 71) between the spindle receiving portion 50 and the diaphragm pressing portion 90.

<< Sheet Disc >>
The seat disk 71 opens and closes the opening of the inflow passage 12 in the closing valve chamber 13 to control gas flow. The seat disk 71 is formed of a resin material that is excellent in airtightness and does not easily deform even after many years of use. The sheet disc 71 is made of, for example, PCTFE, PVDF, polyamide, or the like. As a material of the sheet disk 71, PCTFE is particularly suitable.

<< Seal parts >>
As described above, the replaceable seal part 2 is coupled to the outlet 15 of the diaphragm valve 1 of the present embodiment. The seal component 2 is a metal component separate from the main body 10 and is formed of, for example, austenitic stainless steel such as SUS316L or SUS304. FIG. 2A is a partial enlarged cross-sectional view of a part A in FIG. FIG. 2B shows the appearance of the single seal part 2. Hereinafter, the seal component 2 of the present embodiment will be described in detail.

  As shown in FIGS. 2A and 2B, the seal component 2 of this embodiment is screwed onto the inner wall surface of the outlet 15. That is, an internal thread 15 c is provided on the inner wall surface of the outlet 15. Correspondingly, a male screw 2a that is screwed into the female screw 15c is provided on the outer peripheral surface of the seal component 2. Further, a gas passage hole 2 c is formed at the center of the seal part 2. The gas passage hole 2c has a hexagonal cross-sectional shape that fits a hexagon wrench (not shown). With such a configuration, the seal member 2 of the present embodiment can be easily attached to and detached from the outlet 15 using a hexagon wrench.

  An annular metal seal portion 2 b is projected from the front surface of the seal component 2. The metal seal portion 2b is pressed against the outlet cap 16 or the metal gaskets 16c and 17c of the connection 17 to form an airtight connection. On the other hand, an O-ring 2 d is attached to the back surface of the seal component 2. The O-ring 2d is pressed against the bottom and side surfaces of the outlet 15 to form an airtight connection. The gas passage hole 2c described above penetrates the inside of the metal seal portion 2b and the O-ring 2d and communicates with the high-pressure gas outflow passage 14. The O-ring 2d is formed of, for example, nitrile butadiene rubber.

<Effects of diaphragm type valve>
According to the diaphragm valve 1 and the seal component 2 of the present embodiment, the airtight performance of the outlet 15 can be recovered by replacing the seal component 2, and the diaphragm valve 1 can be used repeatedly. .

  That is, when the connection 17 and the outlet cap 16 are repeatedly attached to and detached from the outlet 15, the metal seal portion 2b of the seal component 2 is worn out. Further, the metal seal portion 2b of the seal component 2 may be deteriorated due to corrosion. Even in such a case, the airtight performance of the outlet 15 can be recovered by replacing the seal part 2 with the worn or deteriorated metal seal part 2b with a new seal part 2. Furthermore, the diaphragm type valve 1 of the present embodiment is configured such that the worn out or deteriorated diaphragm 60 and the seating stem 70 can be replaced. Therefore, the diaphragm type valve 1 can be used repeatedly over a long period of time by exchanging the seal component 2, the diaphragm 60, and the seating stem 70.

  Further, as shown in FIG. 2 (a), even when the seal part 2 of this embodiment and the configuration for making the seal member 2 replaceable are applied to the outlet 15, the inner diameter φNN of the outlet 15 is It can be adapted to various other standards such as Japanese JIS standard, US CGA standard or CGA DISS standard, British BS standard, German DIN standard, or French NF standard. Thereby, the inner diameter φNN of the outlet 15 can be set to a dimension determined according to the type of the high-pressure gas, and erroneous connection of the pipe connection 17 can be prevented.

DESCRIPTION OF SYMBOLS 1,100 Diaphragm type valve 2 Seal part 2a Male screw 2b Metal seal part 2c Gas passage hole 2d O-ring 10 Main body 10a Male screw 11 Hollow part 12 Inflow path 13 Closing valve chamber 14 Outflow path 15 Outlet 15a Male screw 15b Metal seal part 15c Female thread 16 Outlet cap 16a Female thread 16b Metal seal portion 16c Metal gasket 17 Connection 17a Female screw 17b Metal seal portion 17c Metal gasket 18 Metal seal portion 20 Spindle 30 Handle 40 Ground nut 50 Spindle receiving portion 51 Planar seat 60 Diaphragm 70 Seating stem 71 Seat disc (valve) body)
80 Retainer 90 Diaphragm retainer 110 Belleville spring

Claims (7)

A valve that discharges high-pressure gas stored in a cylinder to a pipe,
A metal body provided with an inflow path and an outflow path for the high-pressure gas;
A valve body for opening and closing the inflow path,
The main body is integrally provided with an outlet,
The outlet has a substantially cylindrical wall portion that communicates with the outflow path and is connectable to the pipe, and an inner diameter of the wall portion is determined according to a type of the high-pressure gas, and the wall In the part, a metal seal part provided separately from the main body is connected in an exchangeable manner,
An annular metal seal portion for forming an airtight connection with the pipe side is projected on the front surface of the seal component, and an O for forming an airtight connection with the outlet is provided on the back surface of the seal component. A ring is attached, and at the center of the seal part, a gas passage hole that penetrates the inside of the metal seal part and the O-ring and communicates with the outflow path is provided.
A valve characterized by that.   A male screw that is threadedly engaged with an inner wall surface of the outlet is provided on the outer peripheral surface of the seal component, and all or part of the cross-sectional shape of the gas passage hole of the seal component is a hexagon that fits a hexagon wrench. The valve according to 1.   The valve according to claim 1 or 2, wherein the seal part is made of austenitic stainless steel, and the O-ring is made of nitrile butadiene rubber.   The inner diameter of the wall portion of the outlet is defined based on Japanese JIS standard, US CGA standard or CGA DISS standard, British BS standard, German DIN standard, or French NF standard. The valve according to any one of the above. A metal seal part that is replaceably coupled to an outlet of a valve that discharges high-pressure gas stored in a cylinder to a pipe,
An annular metal seal portion for forming an airtight connection with the pipe side is projected on the front surface of the seal component, and an O for forming an airtight connection with the outlet is provided on the back surface of the seal component. A ring is attached, and in the center of the seal part, a gas passage hole is provided which penetrates the inside of the metal seal part and the O-ring and communicates with the outflow path of the high-pressure gas.
Seal parts characterized by that.   A male screw that is threadedly engaged with an inner wall surface of the outlet is provided on the outer peripheral surface of the seal component, and all or part of the cross-sectional shape of the gas passage hole of the seal component is a hexagon that fits a hexagon wrench. 5. The sealing part according to 5.   The seal part according to claim 5 or 6, wherein the seal part is made of austenitic stainless steel, and the O-ring is made of nitrile butadiene rubber.