JP6707963B2 - Positioning device - Google Patents

Description

The present invention relates to a positioning device.

A rotating mechanism that rotates a stage in a process chamber in a vacuum atmosphere or a special gas atmosphere, and a positioning device that slides the stage are used in a carrier device, a machine tool, or a semiconductor manufacturing device. Patent Document 1 below describes a lithographic apparatus (positioning apparatus) that has a wall that surrounds a vacuum chamber and is provided with an opening, and a sliding seal plate that seals the opening. In Patent Document 1, high-pressure gas is supplied to the gap between the wall and the sliding seal plate to generate a high-pressure region in the gap, thereby sealing the wall and the sliding seal plate in a non-contact manner. ..

JP 2000-331930 A

For example, there is a case where the work is positioned in a gas replacement environment such as a vapor deposition device, or a case where the work is positioned in an environment in which dust is typified by additive manufacturing. In such a positioning device, if the gas in the space for positioning the work flows out, the drive mechanism for positioning the work may be defective. In Patent Document 1, an exhaust passage for discharging the gas supplied to the gap is provided, but the configuration becomes complicated, and if the space for positioning the workpiece is a foreign matter environment, the exhaust passage is clogged. there's a possibility that.

It is an object of the present invention to provide a positioning device having a simple structure and capable of suppressing the gas in the space for positioning and inspecting a work from flowing out.

A positioning device according to one aspect of the present invention includes a plate-shaped member that divides a first space surrounded by a housing and a second space different from the first space, the plate-shaped member disposed in the first space, and the plate-shaped member. In a plane parallel to the surface of the plate-shaped member facing the first space and having a gap while covering the hole provided in the member. A movably provided stage, a drive mechanism disposed in the second space, a connecting shaft that is inserted into the hole of the plate-like member and connects the stage and the drive mechanism, and the plate-like The gas is supplied to the gap by opening the gap outside the hole of the member and supplying the gas to the gap, thereby causing the gas to flow into the first space in the direction from the second space toward the first space. And an air supply unit.

A positioning device according to one aspect of the present invention is provided on a plate member and a first space side of the plate member, faces the plate member with a gap, and includes A stage provided movably in a plane parallel to the surface on the side of one space, a drive mechanism provided on the side opposite to the plate-like member with respect to the stage, and a gas opening in the gap by opening in the gap. By supplying, the space between the first space between the plate-shaped member and the stage and the second space outside the first space is sealed, and from the second space to the first space. And an air supply part that allows the gas to flow into the first space side in a direction toward.

According to this configuration, the first space and the second space are sealed by supplying the gas from the air supply unit to the gap between the plate-shaped member and the stage. By supplying the gas from the air supply unit, the gas flows in the direction from the second space to the first space. Therefore, it is possible to suppress the gas in the first space from flowing out. Further, it is not necessary to provide a pipe or passage for discharging the gas in the gap. Therefore, with a simple configuration, it is possible to prevent the gas in the first space for positioning and inspecting the work from flowing out.

In the positioning device according to one aspect of the present invention, the air supply unit is provided in a slit shape around the hole. According to this structure, a gas flow in the direction from the second space to the first space is generated in the entire circumference along the circumferential direction of the hole, so that the gas in the first space surely flows out. Can be suppressed.

In the positioning device according to one aspect of the present invention, the gap includes a first gap closer to the first space than the air supply part and a second gap closer to the second space than the air supply part. .. According to this, the direction of the gas passing through the first gap and the second gap can be adjusted by adjusting the gap between the first gap and the gap between the second gaps.

In the positioning device according to one aspect of the present invention, the gas flows into the first space through the first gap and also flows into the second space through the second gap. According to this, since a part of the gas supplied to the gap flows into the first space through the first gap, it is possible to suppress the gas in the first space from flowing out.

In the positioning device according to one aspect of the present invention, the interval of the first gap is larger than the interval of the second gap. According to this, due to the so-called ejector effect, a negative pressure in which the gas in the second space flows into the first space is generated in the second gap. Therefore, it is possible to suppress the gas in the first space from flowing out.

In the positioning device according to one aspect of the present invention, the plate-shaped member is provided with a protrusion that protrudes toward the stage. According to this, it is easy to adjust the gap between the plate member and the stage. Further, since the strength of the plate-shaped member is improved, it is possible to suppress variation in the size of the gap.

In the positioning device according to one aspect of the present invention, the protrusion is provided in an annular shape. According to this, since the negative pressure in which the gas in the second space flows into the first space through the gap is generated in the entire circumference along the circumferential direction of the hole, the gas in the first space is reliably It is possible to suppress the outflow into the two spaces.

In the positioning device according to an aspect of the present invention, a seal member that faces the radially outer surface of the protrusion with a third gap is provided, and the air supply unit includes the third gap. According to this, the gas is supplied to the first gap and the second gap through the third gap. Then, a gap is formed between the seal member and the plate member. The gas supplied from the third gap flows into the first space side through the gap between the seal member and the plate-shaped member. Alternatively, the gas in the second space flows into the first space side. Further, by providing the seal member, the gap between the stage and the seal member can be easily adjusted, and the third gap can be easily adjusted.

In the positioning device according to an aspect of the present invention, the third gap is smaller than the first gap and smaller than the second gap. According to this, the flow velocity of the gas passing through the third gap is increased, so that it is possible to reliably generate the negative pressure in which the gas in the second space flows into the first space through the first gap and the second gap. it can.

In the positioning device according to one aspect of the present invention, the first gap is provided between the seal member and the stage, and the second gap is provided between the protrusion and the stage. That is, even if the seal member is arranged on the first space side and the protrusion is arranged on the second space side with respect to the seal member, it is possible to suppress the gas from flowing into the first space with a simple structure. it can.

According to the present invention, it is possible to provide a positioning device having a simple structure and capable of suppressing the gas in the space for positioning and inspecting a work from flowing out.

FIG. 1 is a sectional view schematically showing the positioning device according to the first embodiment. FIG. 2 is a cross-sectional view showing the seal structure of the positioning device according to the first embodiment. FIG. 3 is a sectional view taken along the line III-III′ of FIG. 1. FIG. 4 is a cross-sectional view showing the seal structure of the positioning device according to the modified example of the first embodiment. FIG. 5 is a cross-sectional view showing the seal structure of the positioning device according to the second embodiment. FIG. 6 is a cross-sectional view schematically showing the positioning device according to the third embodiment. FIG. 7 is a sectional view schematically showing the positioning device according to the fourth embodiment. FIG. 8 is a cross-sectional view schematically showing the positioning device according to the fifth embodiment.

Modes (embodiments) for carrying out the invention will be described in detail with reference to the drawings. The present invention is not limited to the contents described in the embodiments below. Further, the constituent elements described below include those that can be easily conceived by those skilled in the art and those that are substantially the same. Furthermore, the components described below can be combined as appropriate. It should be noted that the drawings are shown by appropriately changing the actual dimensions and shapes for the description of the embodiments.

(First embodiment)
FIG. 1 is a sectional view schematically showing the positioning device according to the first embodiment. FIG. 2 is a cross-sectional view showing the seal structure of the positioning device according to the first embodiment. FIG. 1 shows a cross section of the positioning device 10 taken along a plane including the central axis of the connecting shaft 32 and parallel to the central axis. The positioning device 10 is a device for linearly or rotationally moving a work arranged in a closed space, such as a machine tool, a transfer device, a semiconductor manufacturing device, or a nanoimprinting device that performs molding in a depressurized space. Is applicable to. The positioning device 10 of the present embodiment positions a work in a device in which a work is positioned in a gas replacement environment such as a vapor deposition device, or in an environment in which dust is typified by additive manufacturing (additive manufacturing). It can be applied to devices and the like.

Here, additive manufacturing is a lamination processing technique for forming materials by laminating materials such as resin and metal powder. Additive manufacturing is, for example, a powder spray method that irradiates a laser to melt and mix powdery materials, or a metal powder is laid on a processing table and radiated with a laser, and the metal powder of the laser-irradiated portion There is a powder bed type in which molding is performed by melting and solidifying.

Although FIG. 1 shows an example in which one axis can be moved in the left-right direction for the sake of clarity, the present invention is not limited to this. For example, in addition to the movement in the left-right direction, a biaxial movement capable of moving in the front-back direction in FIG. 1 and a rotational movement may be possible.

As shown in FIG. 1, the positioning device 10 of the present embodiment includes a housing 20, a support portion 28, a plate-shaped member 20a, a stage 30, a drive stage 34, and a connecting shaft 32. The first space P surrounded by the housing 20 is a closed space for maintaining a specific environment and performing work positioning, processing, inspection, and the like. The closed space is not limited to being completely closed from the outside, and may be any space that can maintain a specific environment suitable for work. The first space P is applicable to various environments such as vacuum, reduced pressure, gas replacement (reduced pressure or positive pressure), spaces having different temperatures, a clean environment, and a foreign material environment.

The support portion 28 is arranged on the surface plate 55 and supports the housing 20. The second space R surrounded by the support portion 28 is provided with a drive mechanism and the like for moving the stage 30. The second space R is separated from the first space P, and has an environment different from that of the first space P. The support portion 28 may have a frame shape capable of supporting the housing 20, or may have a bottom portion capable of accommodating a drive mechanism and the like therein.

In the present embodiment, the first space P is a space surrounded by the housing 20 including the plate member 20a and the stage 30. The second space R is a space surrounded by the support portion 28, the plate-shaped member 20a, the stage 30, and the surface plate 55.

The stage 30 is arranged in the first space P. The stage 30 covers the hole 20c of the plate-shaped member 20a and faces the upper surface of the plate-shaped member 20a with a gap 24. The stage 30 is a plate-shaped member having a first surface 30a and a second surface 30b opposite to the first surface 30a. The stage 30 may have a circular shape or another shape such as an oval shape, a square shape, or a rectangular shape when viewed from above. One end of the connecting shaft 32 is connected to the first surface 30 a of the stage 30, and the stage 30 can be moved by one axis in the left-right direction in FIG. 1 as the connecting shaft 32 moves. As described above, the stage 30 may be biaxially movable in the front-back direction of FIG. 1 or may be rotationally movable. A work (not shown) or the like is placed or fixed on the second surface 30b of the stage 30, and the work or the like is positioned.

The drive stage 34 is arranged in the second space R. The drive stage 34 is disposed below the plate-shaped member 20a and is connected to the other end of the connecting shaft 32. The driving force is transmitted from an external driving unit (not shown) to the driving stage 34, and the driving stage 34 can move in the left-right direction in FIG. A linear motor is used for the drive unit, for example. The drive unit may be a mechanism that combines a drive motor and a ball screw. In this case, the drive motor generates a rotational drive force, and the ball screw converts this rotational drive force into a uniaxial drive force and transmits it to the drive stage 34. As shown in FIG. 1, the connecting shaft 32 is arranged at a distance from the plate-shaped member 20a at least in the left-right direction of FIG. That is, the diameter of the hole 20c is larger than the diameter of the connecting shaft 32 so as to allow the movement of the connecting shaft 32. This allows the stage 30 to move in the in-plane direction via the connecting shaft 32 as the drive stage 34 moves.

The linear bearings 35, 35 are arranged on the lower surface of the drive stage 34 and move integrally with the movement of the drive stage 34. The linear bearings 35, 35 are arranged in a right side region and a left side region with respect to the center position of the drive stage 34 in the left-right direction, respectively. The base member 37 is fixed on the surface plate 55, and the guide member 36 is provided on the base member 37. The two linear bearings 35, 35 are connected to a guide member 36 so that they can be smoothly moved along the extending direction of the guide member 36. With such a configuration, the drive stage 34 can smoothly move in the uniaxial direction when receiving a drive force from a drive unit such as a linear motor. Although omitted in FIG. 1, the drive stage 34 has a substantially rectangular shape when viewed from above. The guide member 36 and the linear bearings 35, 35 are arranged along one side of the drive stage 34, and are arranged on two opposite sides, respectively.

Next, the seal structure of the first space P will be described. As shown in FIGS. 1 and 2, in the positioning device 10 of this embodiment, a gap 24 is provided between the plate member 20 a and the stage 30. By supplying gas from the air supply pump 50 to the gap 24, the space between the plate-shaped member 20 a and the stage 30 is sealed.

The gap 24 includes a first gap 24A and a second gap 24B. The plate-shaped member 20a is provided with a protrusion 20b that protrudes toward the stage 30. The protrusion 20b is formed integrally with the plate-shaped member 20a. The present invention is not limited to this, and the protruding portion 20b may be provided as a separate member from the plate-shaped member 20a. Further, on the upper surface of the plate-shaped member 20a, the seal member 22 is arranged radially outside the protruding portion 20b. The upper surface 22c of the seal member 22 and the first surface 30a of the stage 30 face each other with a first gap 24A. As will be described later, the protrusion 20b and the seal member 22 are annular members that surround the hole 20c.

The protruding portion 20b is provided on the upper surface of the plate-shaped member 20a, and is provided at the end of the plate-shaped member 20a on the hole 20c side. The side surface 20d of the protrusion 20b is continuous with the end surface of the plate-shaped member 20a. However, the present invention is not limited to this, and the protrusion 20b may be disposed at a position facing the first surface 30a of the stage 30. May be. The upper surface 20e of the protrusion 20b and the first surface 30a of the stage 30 face each other with a second gap 24B. Since the protrusion 20b and the seal member 22 are provided in this manner, it is possible to easily manage the dimensions of the first gap 24A and the second gap 24B. In the present embodiment, the interval t1 of the first gap 24A is equal to the interval t2 of the second gap 24B. The interval t1 of the first gap 24A and the interval t2 of the second gap 24B are, for example, several hundreds μm or more and several mm or less. It is preferable that the interval t1 of the first gap 24A and the interval t2 of the second gap 24B are narrower. By doing so, the flow velocity of the gas passing through the first gap 24A and the second gap 24B is increased, so that the intrusion of foreign matter can be suppressed with a small gas flow rate. Further, since the plate-shaped member 20a is provided with the protruding portion 20b, the strength is improved. Therefore, the deformation of the plate-shaped member 20a is suppressed, and the variation of the dimensions of the first gap 24A and the second gap 24B can be suppressed.

As shown in FIG. 2, the seal member 22 has a first side surface 22d and a second side surface 22e. The first side surface 22d and the second side surface 22e face the outer surface 20f of the protrusion 20b with a gap. The first side surface 22d is arranged on the plate-shaped member 20a side, and the second side surface 22e is arranged on the stage 30 side. The first side surface 22d is provided at a position farther from the projecting portion 20b than the second side surface 22e, and a step is formed between the first side surface 22d and the second side surface 22e.

The first side surface 22d of the seal member 22 and the outer side surface 20f of the protruding portion 20b form an air supply groove 22a. The gap between the second side surface 22e of the seal member 22 and the outer side surface 20f of the protruding portion 20b constitutes a slit-shaped air supply portion 22b (third gap). The air supply portion 22b is continuous with the air supply groove 22a, extends in the direction from the air supply groove 22a toward the stage 30, and opens into the gap 24. 24 A of 1st clearance gaps are arrange|positioned rather than the air supply part 22b at the 1st space P side. The second gap 24B is arranged closer to the second space R than the air supply part 22b.

The air supply portion 22b is a throttle portion in which the third clearance gap t3 between the second side surface 22e and the outer side surface 20f is small, and the third clearance distance t3 is the width of the air supply groove 22a (first side surface 22d). And the outer surface 20f). The interval t3 of the third gap of the air supply unit 22b is, for example, several μm or more and several tens of μm or less. Since the air supply portion 22b is provided so that the two members of the protruding portion 20b and the seal member 22 face each other, the management of the interval t3 of the third gap is compared with the case where the throttle portion is formed in one member. It is easy. Further, since the air supply groove 22a is formed by forming the step in the seal member 22, the air supply portion 22b and the air supply groove 22a can be easily formed.

As shown in FIG. 1, gas is supplied from the air supply pump 50 to the air supply groove 22a. The gas is supplied from the air supply groove 22a to the gap 24 through the air supply portion 22b. The interval t3 of the third gap of the air supply unit 22b is smaller than the interval t1 of the first gap 24A and smaller than the interval t2 of the second gap 24B.

Here, the interval t3 of the third gap of the air supply portion 22b is the distance between the second side surface 22e of the seal member 22 and the outer side surface 20f of the protrusion 20b in the direction perpendicular to the second side surface 22e of the seal member 22. is there. The interval t1 of the first gap 24A is the distance between the upper surface 22c of the seal member 22 and the first surface 30a of the stage 30 in the direction perpendicular to the upper surface 22c of the seal member 22. The interval t2 of the second gap 24B is the distance between the upper surface 20e of the protrusion 20b and the first surface 30a of the stage 30 in the direction perpendicular to the upper surface 20e of the protrusion 20b.

In the present embodiment, the interval t1 of the first gap 24A is equal to the interval t2 of the second gap 24B. Therefore, the resistance of the gas passing through the first gap 24A and the resistance of the gas passing through the second gap 24B become substantially equal. Therefore, the gas supplied from the air supply unit 22b branches into the first gap 24A and the second gap 24B and flows. The gas supplied from the air supply unit 22b flows in the first gap 24A in the direction indicated by the arrow F1 and flows into the first space P, and flows in the second gap 24B in the direction indicated by the arrow F2 to generate the second gas. It flows into the space R.

As described above, since a part of the gas supplied from the air supply unit 22b flows into the first space P through the first gap 24A, the gas in the first space P flows out to the second space R side. Is suppressed. Therefore, even when the first space P is a gas replacement environment or an environment in which dust flies, the gas and dust in the first space P flow into the second space R, and the linear bearings 35, 35, the drive stage 34, etc. Can be prevented from being contaminated.

Further, the positioning device 10 of the present embodiment provides the first gap 24A, the second gap 24B, and the air supply portion 22b with the stage 30, the protruding portion 20b, and the seal member 22, and supplies the positive pressure gas to the air supply portion 22b. By supplying, the seal structure of the first space P can be realized. Therefore, even if the first space P is an environment such as a decompression space or an environment in which dust flies, it is possible to supply gas to the air supply unit 22b without providing an exhaust type seal or a magnetic seal. P seal is possible. That is, it is possible to reduce the size of the positioning device 10.

Furthermore, it is not necessary to provide the exhaust portion 20b, the seal member 22, and the plate-shaped member 20a with pipes or grooves for exhausting air. Therefore, it is possible to suppress the gas in the first space P from flowing out to the second space R side with a simple configuration.

FIG. 3 is a sectional view taken along the line III-III′ of FIG. 1. As shown in FIG. 3, the protrusion 20 b and the seal member 22 are annular members centered on the central axis Zr of the connecting shaft 32. In the present embodiment, the projecting portion 20b and the seal member 22 are substantially rectangular in plan view. However, the present invention is not limited to this, and the protrusion 20b and the seal member 22 may have other shapes such as a circle and a square. The seal member 22 is arranged radially outside the protruding portion 20b. As described above, the gap between the second side surface 22e of the seal member 22 and the outer side surface 20f of the protrusion 20b constitutes the air supply portion 22b. The air supply portion 22b has a slit shape, and is continuously provided in an annular shape along the circumferential direction of the protruding portion 20b and the seal member 22.

Although not shown in FIG. 3, the air supply groove 22a, the first gap 24A, and the second gap 24B shown in FIGS. 1 and 2 are also continuous along the circumferential direction of the protrusion 20b and the seal member 22. Will be provided.

With such a configuration, the gas is supplied to the air supply unit 22b, so that the flow of the gas flowing into the first space P through the first gap 24A and the second space R through the second gap 24B. The flow of the inflowing gas is generated around the entire circumference of the air supply unit 22b in the circumferential direction. The flow of gas flowing into the first space P through the first gap 24A is radially generated from the air supply portion 22b to the outside in the radial direction. Further, the flow of gas flowing into the second space R through the second gap 24B is generated inward in the radial direction from the air supply portion 22b and in the direction toward the central axis Zr of the connecting shaft 32.

Further, by making the intervals t3 (see FIG. 2) of the third gaps of the air supply unit 22b equal in the circumferential direction, the gas flow becomes uniform along the circumferential direction of the air supply unit 22b. become. Therefore, it is possible to suppress the gas in the first space P from flowing out to the second space R side along the entire circumference of the first gap 24A in the circumferential direction.

Further, the air supply groove 22a is provided along the entire circumference of the air supply portion 22b. As described above, the space between the air supply grooves 22a, that is, the space between the first side surface 22d of the seal member 22 and the outer surface 20f of the protrusion 20b shown in FIG. 2 is equal to the third space of the air supply portion 22b. Is larger than the interval t3. Since the resistance of the gas passing through the air supply groove 22a is small, the gas is evenly supplied along the circumferential direction of the air supply portion 22b. Therefore, the gas from the air supply pump 50 may be supplied to one or a plurality of positions of the air supply groove 22a, and the number of gas supply passages provided in the housing 20 may be reduced to reduce the configuration. It can be simplified.

(Modification)
FIG. 4 is a cross-sectional view showing the seal structure of the positioning device according to the modified example of the first embodiment. In the positioning device 10A of this modification, the interval t1 of the first gap 24A is larger than the interval t2 of the second gap 24B. The interval t1 of the first gap 24A is, for example, about several hundred μm or more and several mm or less. The interval t2 of the second gap 24B is, for example, several tens of μm or more and 1.0 mm or less. Further, the interval t3 of the third gap of the air supply portion 22b is smaller than the interval t1 of the first gap 24A and smaller than the interval t2 of the second gap 24B.

Since the gap between the air supply units 22b is small, the gas supplied from the air supply pump 50 has a large flow velocity when passing through the air supply unit 22b. Therefore, due to the ejector effect, a negative pressure from the second space R toward the air supply portion 22b is generated in the first gap 24A and the second gap 24B near the air supply portion 22b. Due to this negative pressure, as shown in FIG. 4, the gas in the second space R flows in the second gap 24B in the direction shown by the arrow F2.

As described above, the interval t2 of the second gap 24B is smaller than the interval t1 of the first gap 24A. Therefore, the resistance of the gas passing through the second gap 24B becomes larger than the resistance of the gas passing through the first gap 24A. Therefore, the gas supplied from the air supply unit 22b flows in the direction indicated by the arrow F1 through the first gap 24A having a low resistance.

As described above, the gas supplied from the air supply unit 22b flows into the first space P through the first gap 24A. Further, the negative pressure generated by the ejector effect causes the gas in the second space R to flow into the first space P through the first gap 24A and the second gap 24B. As a result, according to the positioning apparatus 10A of the present modification, it is possible to suppress the gas in the first space P for positioning and inspecting the work from flowing into the second space R.

Further, the negative pressure generated by the ejector effect causes the gas in the first space P to flow into the second space R through the first gap 24A and the second gap 24B. As a result, according to the positioning device 10 of the present embodiment, the gas is suppressed from flowing into the first space P where the work is positioned and inspected. Therefore, the turbulence of the airflow in the first space P is suppressed, and the generation of the pressure distribution and the temperature distribution in the first space P can be suppressed. Therefore, even when the first space P is a gas replacement environment or an environment in which dust flies, the gas and dust in the first space P flow into the second space R, and the linear bearings 35, 35, the drive stage 34, etc. Can be surely suppressed from being contaminated.

Further, by providing the first gap 24A, the second gap 24B, and the air supply unit 22b, and supplying the gas of positive pressure to the air supply unit 22b, the gas in the second space R is removed from the first space 24A and the second space 24A. It is possible to generate a negative pressure that flows into the first space P side through 24B. That is, since the first gap 24A, the second gap 24B, and the air supply unit 22b function as a negative pressure generating mechanism, a pump that generates negative pressure, a pipe and a groove for sucking gas in the first space P are provided. No need. Therefore, the negative pressure generating mechanism can be realized with a simple structure.

In addition, in this modification, the interval t2 of the second gap 24B is smaller than the interval t1 of the first gap 24A. Not limited to this, the interval t2 of the second gap 24B may be larger than the interval t1 of the first gap 24A. In this case, the resistance of the gas passing through the second gap 24B can be increased by making the radial length of the second gap 24B longer than the radial length of the first gap 24A.

(Second embodiment)
FIG. 5 is a cross-sectional view showing the seal structure of the positioning device according to the second embodiment. In addition, about the structure similar to embodiment mentioned above, the same code|symbol may be attached|subjected and description may be abbreviate|omitted. The positioning device 10B of this embodiment is different in that the air supply groove 22h and the air supply portion 22i are provided between the seal member 22 and the plate-shaped member 20a. Although the interval t2 of the second gap 24B is equal to the interval t1 of the first gap 24A in FIG. 5, the interval t2 of the second gap 24B is smaller than the interval t1 of the first gap 24A. It may be configured.

In the present embodiment, the seal member 22 has a lower surface 22f and a recess 22g that is recessed above the lower surface 22f. The lower surface 22f faces the upper surface 20g of the plate member 20a with a fourth gap, and an air supply unit 22i is formed between the lower surface 22f of the seal member 22 and the upper surface 20g of the plate member 20a. It An air supply groove 22h is formed between the recess 22g of the seal member 22 and the upper surface 20g of the plate-shaped member 20a. The air supply portion 22i is provided continuously with the air supply groove 22h and extends radially inward with respect to the air supply groove 22h. The air supply portion 22i is a narrowed portion having a smaller gap between the air supply groove 22h and the upper surface 20g of the plate-shaped member 20a.

The interval t4 of the fourth gap of the air supply portion 22i is smaller than the interval t3 of the third gap formed between the second side surface 22e of the seal member 22 and the outer side surface 20f of the protrusion 20b. That is, the interval t3 of the third gap between the seal member 22 and the protrusion 20b can be made larger than the interval t4 of the fourth gap, and the dimensional management of the interval t3 of the third gap is easy. Therefore, the positioning device 10B of this embodiment can be easily manufactured. The interval t3 of the third gap is, for example, about several hundred μm or more and about 1.0 mm or less. The interval t4 of the fourth gap is, for example, about several μm or more and several tens of μm or less.

Gas from the air supply pump 50 (see FIG. 1) is supplied to the air supply groove 22h. Since the gap of the air supply unit 22i is small, the gas supplied from the air supply pump 50 has a large flow velocity when passing through the air supply unit 22i. The gas that has passed through the air supply portion 22i is supplied to the gap 24 through the third gap between the seal member 22 and the protruding portion 20b. As a result, the gas supplied from the air supply unit 22b branches into the first gap 24A and the second gap 24B and flows. Since a part of the gas supplied from the air supply unit 22b flows into the first space P through the first gap 24A, the gas in the first space P is suppressed from flowing out to the second space R side. ..

When the interval t2 of the second gap 24B is smaller than the interval t1 of the first gap 24A, a negative pressure is generated due to the above-described ejector effect, and the gas in the second space R becomes the first gap 24A and It flows into the first space P through the second gap 24B. In addition, the gas supplied from the air supply unit 22i flows into the first space P through the first gap 24A. As a result, the gas in the first space P for positioning and inspecting the work is suppressed from flowing out to the second space.

(Third Embodiment)
FIG. 6 is a cross-sectional view schematically showing the positioning device according to the third embodiment. In the positioning device 10C of the present embodiment, the first space P is provided between the plate member 40 and the stage 30A, and the linear bearings 35, 35 are connected below the stage 30A. different. That is, the positioning device 10C of the present embodiment does not have the housing 20, the connecting shaft 32, the drive table 34, and the like shown in the first embodiment.

As shown in FIG. 6, the positioning device 10C of the present embodiment includes a support portion 28A provided on the surface plate 55, a plate member 40 provided on the support portion 28A, a stage 30A, and a linear member. It includes bearings 35, 35, a guide member 36, and a base member 37. The plate member 40 is a flat plate member having a first surface 40a and a second surface 40b opposite to the first surface 40a. The plate member 40 is provided so as to cover the opening of the support portion 28A. A stage 30A and a drive mechanism such as linear bearings 35, 35 are arranged in a space surrounded by the plate member 40, the support portion 28A, and the surface plate 55.

A drive mechanism including linear bearings 35, 35, a guide member 36, and a base member 37 is provided on the surface plate 55. The stage 30A is connected on the linear bearings 35, 35. The stage 30A faces the plate member 40 with a predetermined gap 25. In the present embodiment, the space surrounded by the stage 30A and the plate member 40 is the first space P for positioning the work W and the like. The space outside the first space P, that is, the space surrounded by the plate member 40, the stage 30A, the support portion 28A, and the surface plate 55 is the second space R. In the second space R, linear bearings 35, 35, etc. that support the stage 30A so as to be movable in one axis direction or two axis directions are arranged.

The stage 30A has a plate-shaped mounting portion 30Aa and a side portion 30Ab provided on the outer peripheral side of the mounting portion 30Aa. The work W is placed on the placement unit 30Aa. The side portion 30Ab is provided on the surface of the mounting portion 30Aa that faces the plate member 40. The side portion 30Ab is an annular member and is provided continuously along the circumferential direction of the mounting portion 30Aa. The stage 30A has a concave shape in the cross-sectional view with the mounting portion 30Aa and the side portion 30Ab. The plate member 40 extends to the outside in the radial direction of the side portion 30Ab, and is fixed to the support portion 28A at the outside of the side portion 30Ab in the radial direction.

The upper surface 30Ae of the side portion 30Ab faces the first surface 40a of the plate member 40 with the first gap 25A. At the upper part of the side portion 30Ab, a step is provided on the outer side in the radial direction with respect to the upper surface 30Ae, and the seal member 22A is provided at this step. The seal member 22A faces the outer surface 30Ad at the upper portion of the side portion 30Ab. In addition, the upper surface 22Ac of the seal member 22A faces the first surface 40a of the plate member 40 with the second gap 25B.

The first side surface 22Ad of the seal member 22A and the outer side surface 30Ad of the side portion 30Ab form an air supply groove 22Aa. The slit-shaped air supply portion 22Ab (third gap) is formed by the gap between the second side surface 22Ae of the seal member 22A and the outer side surface 30Ad of the side portion 30Ab. The air supply portion 22Ab is continuous with the air supply groove 22Aa, extends in the direction from the air supply groove 22Aa toward the plate member 40, and opens into the gap 25. The first gap 25A is arranged closer to the first space P than the air supply portion 22Ab. The second gap 25B is arranged closer to the second space R than the air supply part 22Ab.

As shown in FIG. 6, gas is supplied from the air supply pump 50 to the air supply groove 22Aa. The gas is supplied from the air supply groove 22Aa to the gap 25 through the air supply unit 22Ab. The interval of the third gap of the air supply unit 22Ab is smaller than the interval ta1 of the first gap 25A and smaller than the interval ta2 of the second gap 25B.

The interval ta1 of the first gap 25A is equal to the interval ta2 of the second gap 25B. Therefore, the resistance of the gas passing through the first gap 25A and the resistance of the gas passing through the second gap 25B become substantially equal. Therefore, the gas supplied from the air supply unit 22Ab branches into the first gap 25A and the second gap 25B and flows. The gas supplied from the air supply unit 22Ab flows into the first space P through the first gap 25A and flows into the second space R through the second gap 25B.

As described above, the seal structure can be realized by the gap 25 between the stage 30A and the plate member 40. Since a part of the gas supplied from the air supply unit 22Ab flows into the first space P through the first gap 25A, the gas in the first space P is suppressed from flowing out to the second space R side. .. Therefore, even when the first space P is a gas replacement environment or an environment in which dust flies, the gas and dust in the first space P flow out into the second space R and the linear bearings 35, 35, etc. are contaminated. Can be suppressed. Further, in the positioning device 10C of the present embodiment, the linear bearings 35, 35 are directly connected to the stage 30A, so that the configuration can be simplified and the size can be reduced.

In FIG. 6, the interval ta1 of the first gap 25A is equal to the interval ta2 of the second gap 25B, but as described above, the interval ta1 of the first gap 25A is larger than the interval ta2 of the second gap 25B. It may have a large configuration. In this case, the gas in the second space R flows into the first space P through the first gap 25A and the second gap 25B due to the so-called ejector effect. This reliably suppresses the gas in the first space P from flowing out to the second space R side.

(Fourth Embodiment)
FIG. 7 is a sectional view schematically showing the positioning device according to the fourth embodiment. In the positioning device 10D shown in FIG. 7, the stage 30B is a plate-shaped member having a first surface 30Ba and a second surface 30Bb opposite to the first surface 30Ba. The work W is placed on the first surface 30Ba of the stage 30B, and the work W is positioned and the like. The linear bearings 35, 35 are connected to the second surface 30Bb of the stage 30B.

The first surface 30Ba of the stage 30B faces the first surface 40Aa of the plate member 40A. The first surface 40Aa of the plate member 40A is provided with a protrusion 41 that protrudes toward the stage 30B. The protrusion 41 is an annular member provided between the plate member 40A and the stage 30B and provided along the outer periphery of the stage 30B. In the present embodiment, the space surrounded by the plate member 40A, the stage 30B, and the protrusion 41 is the first space P. The outer side of the first space P, that is, the space surrounded by the surface plate 55, the support portion 28A, the plate member 40A, the protruding portion 41, and the stage 30B is the second space R.

The projecting portion 41 faces the stage 30B with a predetermined gap 26. The lower surface 41a of the protruding portion 41 faces the first surface 30Ba of the stage 30B with a first gap 26A. A lower surface 41b is provided in the lower portion of the protruding portion 41, at a position radially outward of the lower surface 41a and further away from the stage 30B than the lower surface 41a. A step is formed between the lower surface 41a and the lower surface 41b. The seal member 22B is provided on the lower surface 41b. The seal member 22B faces the lower outer surface 41c of the protrusion 41. In addition, the lower surface 22Bc of the seal member 22B faces the first surface 30Ba of the stage 30B with a second gap 26B.

The first side surface 22Bd of the seal member 22B and the outer side surface 41c of the protruding portion 41 form an air supply groove 22Ba. A slit-shaped air supply portion 22Bb (third gap) is formed by the gap between the second side surface 22Be of the seal member 22B and the outer side surface 41c of the protrusion 41. The air supply portion 22Bb is continuous with the air supply groove 22Ba, extends in the direction from the air supply groove 22Ba toward the stage 30B, and opens into the gap 26. 26 A of 1st clearance gaps are arrange|positioned rather than the air supply part 22Bb at the 1st space P side. The second gap 26B is arranged closer to the second space R than the air supply unit 22Bb.

As shown in FIG. 7, gas is supplied from the air supply pump 50 to the air supply groove 22Ba. The gas is supplied from the air supply groove 22Ba to the gap 26 through the air supply unit 22Bb. The interval of the third gap of the air supply unit 22Bb is smaller than the interval tb1 of the first gap 26A and smaller than the interval tb2 of the second gap 26B.

Further, the interval tb1 of the first clearance 26A is equal to the interval tb2 of the second clearance 26B. Therefore, the resistance of the gas passing through the first gap 26A and the resistance of the gas passing through the second gap 26B become substantially equal. The gas supplied from the air supply unit 22Bb branches into the first gap 26A and the second gap 26B and flows. The gas supplied from the air supply unit 22Bb flows into the first space P through the first gap 26A and flows into the second space R through the second gap 26B.

As described above, in the present embodiment, the protrusion 41 and the seal member 22B are provided on the plate member 40A, and the seal structure can be realized by the gap 26 between the stage 30B and the plate member 40A. Even in such a mode, a part of the gas supplied from the air supply unit 22Bb flows into the first space P through the first gap 26A, so that the gas in the first space P is in the second space R. The outflow to the side is suppressed. Further, also in this embodiment, since the linear bearings 35, 35 are directly connected to the second surface 30Bb of the stage 30B, the configuration of the positioning device 10D can be simplified and downsized.

In FIG. 7, the gap tb1 of the first gap 26A is equal to the gap tb2 of the second gap 26B, but as described above, the gap tb1 of the first gap 26A is larger than the gap tb2 of the second gap 26B. It may have a large configuration. In this case, a negative pressure in which the gas in the second space R flows into the first space P through the first gap 26A and the second gap 26B is generated due to the so-called ejector effect. This reliably suppresses the gas in the first space P from flowing out to the second space R side.

(Fifth Embodiment)
FIG. 8 is a cross-sectional view schematically showing the positioning device according to the fifth embodiment. Similar to the positioning device 10 of the first embodiment, the positioning device 10E of the present embodiment realizes a seal structure by supplying gas to the gap 24 between the stage 30 and the plate-shaped member 20Aa. In the positioning device 10E of the present embodiment, the housing 20A includes a plate-shaped member 20Ad that faces the second surface 30b of the stage 30. A hole portion 20Ag is provided in the plate member 20Ad. The hole 20Ag is provided at a position facing the stage 30. The operation shaft 52 is inserted through the hole 20Ag. The operation shaft 52 is a member for processing and inspecting the work W placed on the stage 30, and is movable in the vertical direction as shown by an arrow S.

The plate-shaped member 20Ad of the housing 20A faces the outer peripheral surface of the operation shaft 52 with a first gap 27A in the radial direction of the operation shaft 52. A seal member 29 is provided on the upper surface of the plate-shaped member 20Ad on the outer side in the radial direction of the hole 20Ag. The seal member 29 faces the outer peripheral surface of the operation shaft 52 with a second gap 27B. The first gap 27A and the second gap 27B are continuously provided in the direction along the axial direction of the operation shaft 52.

A groove is provided on the upper surface of the plate member 20Ad of the housing 20A at a position overlapping with the seal member 29. Thus, the air supply groove 20Ae and the air supply portion 20Af (third gap) are provided between the plate-shaped member 20Ad and the seal member 29. In the present embodiment, the seal member 29, the air supply groove 20Ae, and the air supply portion 20Af are each provided in an annular shape around the hole 20Ag. The air supply unit 20Af is a slit-shaped throttle unit. The air supply portion 20Af is continuous with the air supply groove 20Ae, extends in the direction from the air supply groove 20Ae toward the shaft member 52, and opens into the gap 27. The first gap 27A is arranged closer to the first space P than the air supply part 20Af. The second gap 27B is arranged on the external space side outside the housing 20A with respect to the air supply unit 20Af.

As shown in FIG. 8, the air supply pump 50 supplies gas to the air supply groove 22a and the air supply groove 20Ae. The gas supplied to the air supply groove 20Ae is supplied to the gap 27 from the air supply groove 20Ae through the air supply unit 20Af. The interval of the third gap of the air supply unit 20Af is smaller than the interval tc1 of the first gap 27A and smaller than the interval tc2 of the second gap 27B.

The interval tc1 of the first gap 27A is equal to the interval tc2 of the second gap 27B. Therefore, the resistance of the gas passing through the first gap 27A and the resistance of the gas passing through the second gap 27B become substantially equal. The gas supplied from the air supply unit 20Af branches into the first gap 27A and the second gap 27B. The gas supplied from the air supply unit 20Af flows into the first space P through the first gap 27A and flows into the external space through the second gap 27B.

As described above, in the present embodiment, the seal structure can be realized by providing the gap 27 between the operation shaft 52 and the plate-shaped member 20Ad and supplying gas to the gap 27. Even in such a mode, since a part of the gas supplied from the air supply unit 20Af flows into the first space P through the first gap 27A, the gas in the first space P flows out to the external space. Is suppressed. Therefore, even when the first space P is a gas replacement environment or an environment in which dust flies, it is possible to suppress the gas and dust in the first space P from flowing out to the external space.

Although the interval tc1 of the first gap 27A is equal to the interval tc2 of the second gap 27B in FIG. 8, as described above, the interval tc1 of the first gap 27A is larger than the interval tc2 of the second gap 27B. It may have a large configuration. In this case, the gas in the external space flows into the first space P through the first gap 27A and the second gap 27B due to the so-called ejector effect. Thereby, it is possible to reliably suppress the gas in the first space P from flowing out to the second space R side. Further, in the present embodiment, since the second gap 27B between the seal member 29 and the operation shaft 52 is formed by providing the seal member 29, it is possible to easily manage the dimension of the interval tc2 of the second gap 27B. it can.

Although the first to fifth embodiments have been described above, the first to fifth embodiments are not limited by the contents described above. In addition, the above-described constituent elements include those that can be easily conceived by those skilled in the art, substantially the same elements, and so-called equivalent ranges. Furthermore, the components described above can be combined appropriately. Furthermore, at least one of various omissions, replacements, and changes of the constituent elements can be performed without departing from the spirit of the first to fifth embodiments.

10, 10A, 10B, 10C, 10D, 10E Positioning device 20, 20A Housing 20a, 20Ad, 40, 40A Plate-like member 20b, 41 Projection part 20c, 20Ag Hole part 22, 22A, 22B, 29 Sealing member 22a, 22h , 22Aa, 20Ae, 22Ba Air supply groove 22b, 22i, 22Ab, 20Af, 22Bb Air supply part 22g Recess 24, 25, 26, 27 Gap 24A, 25A, 26A, 27A First gap 24B, 25B, 26B, 27B Second Gap 28 Support portion 30 Stage 32 Connection shaft 34 Drive stage 50 Air supply pump 55 Surface plate P First space R Second space

Claims (11)

A plate-shaped member for partitioning a first space surrounded by a housing and a second space different from the first space;
The plate-shaped member is disposed in the first space, covers the hole provided in the plate-shaped member, and faces the surface of the plate-shaped member on the side of the first space with a gap. A stage provided so as to be movable in a plane parallel to the surface on the side of one space;
A drive mechanism arranged in the second space,
A connecting shaft that is inserted into the hole of the plate-shaped member and connects the stage and the drive mechanism,
The gas is supplied to the gap by opening the gap outside the hole of the plate-like member, so that the gas is directed toward the first space from the second space. Positioning device having an air supply part for flowing into the. A plate-shaped member,
It is provided on the first space side of the plate-like member, faces the plate-like member with a gap, and is movably provided in a plane parallel to the surface of the plate-like member on the first space side. With a stage
A drive mechanism connected to the stage ,
The plate member, the stage, and the drive mechanism are provided in this order in a direction perpendicular to the surface of the plate member on the first space side,
By opening the gap and supplying gas to the gap, a gap between the first space between the plate member and the stage and a second space outside the first space is sealed. In addition, the positioning device having an air supply unit that allows the gas to flow into the first space in a direction from the second space toward the first space. The positioning device according to claim 1, wherein the air supply unit is provided in a slit shape around the hole. The gap includes a first gap on the first space side of the air supply unit and a second gap on the second space side of the air supply unit. The positioning device according to item. The positioning device according to claim 4, wherein the gas flows into the first space through the first gap and flows into the second space through the second gap. The positioning device according to claim 4, wherein the interval of the first gap is larger than the interval of the second gap. The positioning device according to any one of claims 3 to 6, wherein the plate-shaped member is provided with a protrusion that protrudes toward the stage. The positioning device according to claim 7, wherein the protrusion is provided in an annular shape. A seal member is provided that faces the radially outer surface of the protrusion with a third gap,
The positioning device according to claim 7, wherein the air supply unit includes the third gap. The positioning device according to claim 9, wherein the third gap is smaller than the first gap and smaller than the second gap. The positioning device according to claim 9 or 10, wherein the first gap is provided between the seal member and the stage, and the second gap is provided between the protrusion and the stage.

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