JP6697961B2 - Ultraviolet sterilizer, ultraviolet sterilization method, and ultrapure water production system - Google Patents

Description

  The present invention relates to an ultraviolet sterilizer and an ultraviolet sterilization method, and more particularly to an ultraviolet sterilizer and an ultraviolet sterilization method used for sterilizing a branch portion of a flow path of a pure water producing device.

  In recent years, as the degree of integration of semiconductor devices (LSIs) has improved, the influence of contamination of ultrapure water on the surface of a substrate such as a silicon substrate has become a problem, and ionic substances, fine particles, and organic substances have become a problem. , Ultrapure water containing very few impurities such as metals and dissolved gases is required. In particular, in the semiconductor manufacturing process, the organic substances in the cleaning water are carbonized in the heat treatment process to cause short circuits between lines and insulation failure. Therefore, ultrapure water with a particularly low total organic carbon concentration (TOC) is required. ..

  In general, an ultrapure water production system is composed of a pretreatment section, a primary pure water production section, and a secondary pure water production section. The pretreatment section is a section that removes suspended solids and colloidal substances in raw water by a flocculation/precipitation/filtration device or the like to generate pretreated water. The primary pure water production section is a section for removing most of soluble substances such as ions and fine particles in pretreated water by means of a reverse osmosis membrane device (RO), a two-bed, three-column device, or the like. The secondary pure water producing section is a final stage section for the purpose of precision finishing of the primary pure water obtained in the primary pure water producing section.

  In such an ultrapure water production system, ionic organic substances are adsorbed and removed by an ion exchange resin device or the like. The nonionic organic substance is decomposed into carbon dioxide and a low molecular weight organic acid by an ultraviolet oxidation device or the like, and then the generated organic acid is adsorbed and removed by an ion exchange resin device or the like. The organic substances to be removed in the production of ultrapure water include organic substances derived from raw water, as well as organic substances derived from bacteria and microorganisms generated in pipes in each device and in each device.

  As an ultraviolet oxidation device for decomposing organic substances, for example, a device using a low-pressure ultraviolet lamp that emits ultraviolet light having a wavelength of 180 to 190 nm or 250 to 260 nm is generally used. Further, a light emitting diode that emits ultraviolet rays having a wavelength of 360 to 400 nm and an ultraviolet oxidation device using a photocatalyst have also been proposed (for example, refer to Patent Document 1).

  Further, as a method of sterilizing water by ultraviolet rays without using a photocatalyst, by irradiating a liquid or gas flowing in the pressurized space with ultraviolet rays, a large amount of gas or liquid under pressure can be efficiently emitted by ultraviolet rays. A method using an ultraviolet sterilizer for sterilization has been proposed (for example, refer to Patent Document 2).

JP, 2007-136372, A JP, 2016-64111, A

  By the way, generally, an ultrapure water production system may have a branch pipe in the flow path of the water to be treated. There is a possibility that a part, so-called accumulated water will be generated. When bacteria and microorganisms accumulate in such pooled water, they adhere to the wall surface of the pipes and proliferate, eventually forming colonies and further forming biofilms, which are difficult to remove by washing.

  In the conventional ultraviolet sterilizer, such accumulated water may not be surely sterilized, and there is a drawback that the effect is limited. In addition, since the shape of the light source that emits ultraviolet rays is limited and no consideration is given to reliably irradiate the area of the accumulated water of the branch pipe with ultraviolet rays, the accumulated water in the minute space in the branch pipe is It was extremely difficult to sterilize.

  The present invention has been made in order to solve the above problems, it is possible to effectively sterilize the pooled water of the fine space such as branch pipe connection portion, an ultraviolet sterilizer, an ultraviolet sterilization method and ultra pure. The purpose is to provide a water production system.

  The ultraviolet sterilizer of the present invention has a main pipe that serves as a flow path for the water to be treated and a branch pipe connected to the main pipe, and is attached to a position facing the opening of the connection portion of the branch pipe of the main pipe. The light source is a treated water pipe having a hole, a lens watertightly attached to the attachment hole of the treated water pipe, and an ultraviolet light emitting diode that emits ultraviolet rays having an emission peak wavelength in the range of 230 to 290 nm. An ultraviolet irradiation device, the ultraviolet light emitting diode is disposed on the back side of the lens, with the light emitting surface thereof facing the lens side, the lens is the ultraviolet light emitted from the light source of the ultraviolet irradiation device. It has an optical characteristic of diffusing or converging the ultraviolet rays so that the predetermined amount of light is irradiated into the opening of the branch pipe.

  In the ultraviolet sterilizer of the present invention, it is preferable that the attachment hole formed in the main pipe is formed at a position where the main pipe intersects with an axis near the end of the branch pipe.

  In the ultraviolet sterilizer of the present invention, it is preferable that a resistance measuring cell for measuring the resistivity of the water to be treated is arranged in the branch pipe.

  In the ultraviolet sterilizer of the present invention, it is preferable that the branch pipe is connected to the main pipe with the axis near the end of the branch pipe being inclined with respect to the axis of the main pipe.

  In the ultraviolet sterilizer of the present invention, it is preferable that the lens has an optical characteristic of diffusing the ultraviolet light emitted from the ultraviolet light emitting diode. Further, the lens is preferably made of quartz glass.

  In the ultraviolet sterilizer of the present invention, it is preferable that the main pipe is provided in an ultrapure water production system that produces ultrapure water.

  The ultraviolet sterilization method of the present invention, the inner wall surface of the treated water pipe having a main pipe to be a flow path of the treated water and a branch pipe connected to the main pipe, and the treated water in the treated water pipe An ultraviolet sterilization method for sterilizing, wherein a mounting hole is formed in the main pipe at a position facing an opening of a connecting portion of the branch pipe, a lens is watertightly mounted in the mounting hole, and an emission peak wavelength is 230 to 290 nm. Using an ultraviolet light emitting diode having a light source, the ultraviolet light emitted from the light source is diffused or converged by the lens, and a predetermined amount of the ultraviolet light emitted from the light source is irradiated into the opening of the branch pipe. Characterize.

  The ultrapure water production system of the present invention includes a pretreatment unit, a primary pure water production unit, and a secondary pure water production unit, and the primary pure water production unit and the secondary pure water production unit are mixed-bed ion exchange systems, respectively. An ultrapure water production system equipped with a resin device, comprising: a main pipe for discharging treated water of the mixed bed ion exchange resin device; and a branch pipe connected to at least one of the main pipes, 230 to 290 nm, a treated water pipe having a mounting hole formed at a position of the main pipe facing the opening of the connection portion of the branch pipe, a lens watertightly mounted in the mounting hole of the treated water pipe, And an ultraviolet irradiation device having an ultraviolet light emitting diode that emits ultraviolet light having an emission peak wavelength as a light source, and the ultraviolet light emitting diode is disposed on the back side of the lens with its light emitting surface facing the lens side. The lens has an optical characteristic of diffusing or converging the ultraviolet light so that a predetermined amount of the ultraviolet light emitted from the light source of the ultraviolet irradiation device is irradiated into the opening of the branch pipe. ..

  ADVANTAGE OF THE INVENTION According to the ultraviolet sterilization apparatus, the ultraviolet sterilization method, and the ultrapure water production system of the present invention, it is possible to effectively sterilize the accumulated water in the microscopic space such as the branch pipe connection portion.

It is the schematic showing the ultraviolet sterilization apparatus which concerns on embodiment. It is a schematic diagram showing an ultraviolet sterilizer when a resistivity measurement cell is inserted in a branch pipe. It is a schematic diagram showing the ultrapure water manufacturing system concerning an embodiment.

  Hereinafter, embodiments will be described in detail with reference to the drawings.

  FIG. 1 is a diagram schematically showing an ultraviolet sterilizer 1 according to an embodiment of the present invention. The ultraviolet sterilizer 1 is, for example, in an ultrapure water production system, in a treated water pipe 13 that includes a main pipe 13a that serves as a flow path for the treated water and a branch pipe 13b that is branched from the main pipe 13a. Be prepared.

  When accumulated water is generated in the pipe at the connecting portion between the main pipe 13a and the branch pipe 13b, bacteria 18 may accumulate in the accumulated water and adhere to the wall surface of the pipe to grow. The ultraviolet sterilizer 1 decomposes and kills the bacteria 18 mixed in the accumulated water by the ultraviolet light from the ultraviolet light emitting diode to sterilize the water to be treated and the inner wall surface of the pipe.

  The ultraviolet sterilizer 1 is provided with an ultraviolet irradiator that uses an ultraviolet light emitting diode 11 that emits ultraviolet light having an emission peak wavelength of 230 to 290 nm as a light source, and a lens 12. The ultraviolet irradiation device includes a power supply device 15 that drives the ultraviolet light emitting diode 11.

  The ultraviolet light emitting diode 11 is provided on the wall surface of the main pipe 13a so that the light emitting surface 11a is exposed inside the main pipe 13a. The ultraviolet light emitting diode 11 is arranged so as to irradiate the connecting portion between the main pipe 13a and the branch pipe 13b with ultraviolet light.

  The ultraviolet light emitting diode 11 is supplied with electric power by the power supply device 15 and emits ultraviolet light. Bacteria can be decomposed or killed by ultraviolet rays of 230 to 290 nm. Therefore, the ultraviolet light emitting diode 11 may be any one that emits ultraviolet light having an emission peak wavelength in the range of 230 to 290 nm. The ultraviolet light emitting diode 11 preferably emits ultraviolet light having an emission peak wavelength in the range of 250 to 260 nm. Further, the ultraviolet light emitting diode 11 may emit ultraviolet light having an emission peak wavelength near 200 nm, in addition to the ultraviolet light having the above wavelength.

The ultraviolet light emitting diode 11 has, for example, a semiconductor element that emits ultraviolet rays and a transparent sealing resin that encloses the semiconductor element. The outer surface of this transparent sealing resin constitutes the light emitting surface 11a. The shape of the light emitting surface 11a is not particularly limited and may be a substantially flat shape or a shape having a curvature such as a dome shape. The ultraviolet light emitting diode 11 may be of a chip type or a bullet type, but if it is a bullet type, it can be easily installed in the main pipe 13a. Regarding the size of the ultraviolet light emitting diode 11, for example, the size of the light emitting surface 11 a is about 4 to 16 mm ² . When the size of the light emitting surface 11a is in the above range, it is easy to install in the main pipe 13a, and most of the ultraviolet rays emitted from the light emitting diode 11 are directed to the irradiation area without being diffused to the outside of the irradiation area. It can be irradiated and is efficient.

  It is preferable that the ultraviolet light emitted from the ultraviolet light emitting diode 11 has a high straightness, that is, the spread angle of the ultraviolet light is small. This is because the higher the straightness of ultraviolet rays, the greater the amount of ultraviolet rays irradiated per unit area and the higher the sterilization efficiency. Further, the higher the straightness of the ultraviolet light emitted from the ultraviolet light emitting diode 11, the easier the adjustment of the light amount and the irradiation area by the lens 12 described later. The spread angle of the ultraviolet light emitted from the ultraviolet light emitting diode 11 is preferably, for example, 4 to 20° in order to efficiently irradiate the irradiation region with the ultraviolet light.

  The amount of ultraviolet radiation of the ultraviolet light emitting diode 11 can be adjusted to an output that can obtain the amount of light necessary for sterilizing bacteria in the irradiation region. In order to prevent the growth of bacteria in the irradiation area, for example, the ultraviolet radiation amount of the ultraviolet light emitting diode 11 is adjusted so that the bacteria can be irradiated with the amount of ultraviolet light that kills the bacteria within a time period in which the bacteria multiply twice. To do. At this time, for example, the loss of the amount of light due to the attenuation and scattering of ultraviolet rays due to the water in the lens 12 and the water to be treated 13 can be set to 40 to 60%. The amount of ultraviolet radiation of the ultraviolet light emitting diode 11 depends on the installation location of the ultraviolet sterilizer 1, the inner diameters of the main pipe 13a and the branch pipe 13b, the flow rate of the water to be treated, etc. , 1 mW to 30 mW, for example.

The lens 12 has an optical property of converging or diverging the ultraviolet light emitted from the ultraviolet light emitting diode 11. As a result, the lens 12 irradiates the ultraviolet light emitted from the ultraviolet light emitting diode 11 to a predetermined irradiation region with a predetermined light amount. The irradiation region is a region where bacteria easily attach, and specifically, is inside the opening of the connection portion of the branch pipe 13b with the main pipe 13a and in the vicinity of the opening. The light amount of the ultraviolet rays applied to the irradiation region by the lens 12 is a light amount capable of sterilizing the bacteria existing in the irradiation region, and is, for example, 5000 μW·sec/cm ^{2 to} 500,000 μW·sec/cm ² . If the amount of ultraviolet rays applied to the irradiation area is too small, the bactericidal effect may be insufficient, and if it is too large, the piping irradiated with ultraviolet rays may deteriorate.

  The lens 12 is disposed on the light emitting surface 11a of the ultraviolet light emitting diode 11, and seals the light emitting surface 11a exposed in the main pipe 13a in a watertight manner. The material of the lens 12 is water resistant and transmits ultraviolet rays having an emission peak wavelength in the range of 230 to 290 nm emitted from the ultraviolet light emitting diode 11, and is made of, for example, quartz such as natural quartz glass or synthetic quartz glass. It is glass.

  The shape of the lens 12 is a shape having the above-mentioned optical characteristics, and can be appropriately designed according to the range and position of the irradiation area to be irradiated with ultraviolet rays, and the amount of ultraviolet rays irradiated to the irradiation area.

  The shape of the lens 12 is, for example, a lens having both main surfaces spherical, a lens having one of the main surfaces spherical and the other surface flat, and an aspherical lens having one or both of the main surfaces other than spherical and flat. However, the present invention is not limited to this. For example, the lens 12 is a convex lens that converges the ultraviolet light emitted from the ultraviolet light emitting diode 11, a concave lens that diverges the ultraviolet light, or the like. For example, in the case of using the ultraviolet light emitting diode 11 having a higher straightness, it is possible to use a concave lens that diverges the ultraviolet light so that the ultraviolet light emitted from the ultraviolet light emitting diode 11 is applied to the entire irradiation area.

  The thickness and size of the lens 12 are designed so that a predetermined amount of ultraviolet light emitted from the ultraviolet light emitting diode 11 is applied to the irradiation area.

  The ultraviolet sterilizer 1 is provided with, for example, a mounting hole in the treated water pipe 13 at a position facing the opening of the connecting portion of the branch pipe 13b, and a lens 12 is fitted and fixed in the mounting hole. It is installed by disposing and fixing the ultraviolet light emitting diode 11 so that the ultraviolet light is emitted.

Mounting hole is mainly a pipe 13a, the axis L _b of the end portion near the branch pipe 13b is preferably formed at the intersection. Thereby, the ultraviolet sterilizer 1 irradiates the ultraviolet rays in a direction substantially parallel to the axis L _b of the branch pipe 13b, and thus can irradiate the irradiation region with a larger amount of ultraviolet rays.

  The number of the ultraviolet sterilizers 1 installed in the treated water pipe 13 may be one or two or more. When two or more ultraviolet ray sterilizers 1 are installed, the shape of each lens 12 is designed so that the ultraviolet rays are concentrated on a desired irradiation area. By using two or more ultraviolet sterilizers 1, the amount of light applied to the irradiation area can be increased, and thus the sterilization effect can be improved.

When two or more ultraviolet ray sterilizers 1 are installed in the treated water pipe 13, the ultraviolet ray sterilizers 1 may be arranged along the outer periphery of the main pipe 13a, for example. it may be arranged parallel to the axis _{L a} of 13a. When two or more ultraviolet sterilizers 1 are installed, the ultraviolet sterilizers of these two or more ultraviolet sterilizers are designed so that the amount of ultraviolet radiation falls within the above preferable range.

  The main pipe 13a and the branch pipe 13b of the to-be-treated water pipe 13 are made of a material that hardly elutes components into the ultrapure water. Examples of such a material include polyvinyl chloride (PVC), polyphenylene sulfide (PPS), polyvinylidene fluoride (PVDF), fiber reinforced plastic (FRP), tetrafluoroethylene/perfluoroalkyl vinyl ether copolymer (PFA), Examples of the material include, but are not limited to, stainless steel.

  The branch pipe 13b is connected to a connection port provided in the main pipe 13a by a joint or the like, for example. Moreover, you may create and use the to-be-processed water piping 13 of the shape which has the main piping 13a and the branch piping 13b with the said material.

  In the treated water pipe 13, a valve or the like is inserted so that the treated water flows through the branch pipe 13b as necessary. This valve is, for example, a sampling valve that collects sample water for measuring water quality. Further, in order to measure the water quality of the water to be treated, a water quality measuring device such as a resistivity meter, a conductivity meter, or a thermometer may be inserted in the branch pipe 13b. If bacteria are mixed in the sample water for water quality measurement, the water quality cannot be measured accurately. Therefore, it is effective to install the ultraviolet sterilizer 1 of the present embodiment at a location where sample water for water quality measurement is collected or at a location of the main pipe 13a where water quality is measured.

Connection mode of the main pipe 13a and the branch pipe 13b, for example, arranged substantially perpendicular to the axis _{L a} of the axis _{L b} is the main pipe 13a of the end near the branch pipe 13b, the axis _{L b} terminus near the branch pipe 13b Is an arrangement in which the main pipe 13a is connected with being inclined with respect to the axis L _a of the main pipe 13a, and is not particularly limited.

  The inner diameters of the main pipe 13a and the branch pipe 13b are appropriately set according to the structure of the apparatus in which the main pipe 13a is installed. For example, in the ultrapure water production system, the inner diameter of the main pipe 13a is, for example, 10 to 200 mm. If the inner diameter of the branch pipe 13b is smaller than that of the main pipe 13a, accumulated water is likely to be generated, so that a great effect can be obtained. The inner diameter of the branch pipe 13b is, for example, 5 to 50 mm.

  According to the ultraviolet sterilizer 1 of the present embodiment, it is possible to effectively sterilize the accumulated water and the like at the connection portion between the main pipe 13a and the branch pipe 13b. Therefore, it is possible to prevent bacteria and microorganisms from accumulating in the accumulated water. Further, since an ultraviolet light emitting diode, which is extremely small in size as compared with a low-pressure ultraviolet lamp or the like, is used as a light source of ultraviolet light, there is a high degree of freedom in installation location and installation method, and a desired irradiation area can be effectively sterilized.

  FIG. 2 is a diagram schematically showing the ultraviolet sterilizer 2 installed in the treated water pipe 13 in which the measurement cell of a water quality measuring instrument such as a resistivity meter is inserted into the branch pipe 13b. In FIG. 2, components having the same functions as those of the ultraviolet sterilizer 1 shown in FIG. 1 are designated by the same reference numerals, and redundant description will be omitted.

In the treated water pipe 131 in which the ultraviolet sterilizer 2 is installed, the axis L _c near the end of the branch pipe 131 _b is connected to the main pipe 131 a with an inclination with respect to the axis L _d . A resistivity meter 19 is arranged in the branch pipe 131b.

  The resistivity meter 19 includes a measuring cell 19a that contacts the water to be treated to measure the resistivity, and the measuring cell 19a is inserted and arranged in the branch pipe 131b. When bacteria are generated and proliferated in the vicinity of the measurement cell 19a, the water quality cannot be measured accurately. By installing the ultraviolet sterilizer 2 of the embodiment, such a concern can be eliminated. Further, since the ultraviolet sterilizer 2 uses the ultraviolet light emitting diode 11 as a light source, it is easy to miniaturize and the power consumption is small. Therefore, it is possible to efficiently and effectively sterilize the accumulated water in the fine space such as the branch pipe connecting portion.

(Ultrapure water production system)
FIG. 3 is a diagram schematically showing an ultrapure water production system 3 including the ultraviolet sterilization apparatus 1 of the first embodiment. The ultrapure water production system 3 includes a pretreatment unit 31, a primary pure water production unit 41, and a secondary pure water production unit 51.

  The pretreatment unit 31 includes a coagulation/filtration/precipitation device and the like, and removes suspended matter and the like in the raw water to generate pretreated water. Raw water is, for example, city water, well water, industrial water, and used ultrapure water obtained by collecting and treating ultrapure water used in semiconductor manufacturing plants, but is not limited thereto.

  The primary pure water producing unit 41 removes most of the ionic components and non-ionic components in the pretreated water to generate primary pure water. The primary pure water production unit 41 includes a two-bed, three-tower type device (2B3T) 42, a reverse osmosis membrane device (RO) 43, an ultraviolet oxidation device (TOC), which is composed of a cation exchange resin device, a decarboxylation tower and an anion exchange resin device. -UV) 44 and a mixed bed type ion exchange resin device (MB) 45. In the primary pure water production unit 41, a two-stage RO device in which a reverse osmosis membrane device (RO) is arranged instead of the two-bed, three-column type device (2B3T) 42 may be used. The ultraviolet oxidizer 44 irradiates the water to be treated with ultraviolet rays having a peak wavelength of 180 to 190 nm by a low-pressure ultraviolet lamp or a light emitting diode to decompose organic substances. The primary pure water produced by the primary pure water producing unit 41 is stored in the tank 46.

  The secondary pure water producing unit 51 supplies the primary pure water in the tank 46 to remove a trace amount of organic substances and a trace amount of fine particles in the primary pure water. The secondary pure water producing unit 51 includes an ultraviolet oxidation device (TOC-UV) 52, a membrane degassing device (MDG) 53, a non-regeneration type mixed bed type ion exchange resin device (Polisher) 54, and an ultrafiltration device (UF). It is configured by combining 55. The ultrapure water obtained in the secondary pure water production unit 51 is supplied to a point of use (POU) 56, which is the place of use. The ultrapure water obtained in the secondary pure water producing unit 51 has, for example, a TOC concentration of 5 μg C/L or less and a resistivity of 17.5 MΩ·cm or more.

  The ultrapure water production system 3 includes a non-regeneration type mixed-bed ion exchange resin device (in the secondary pure water production unit 51, which is provided in the subsequent stage of the mixed bed ion exchange resin device (MB) 45 of the primary pure water production unit 41. A resistivity meter 19 is provided after the Polisher 54. To the discharge pipe (main pipe 13a) of the mixed-bed ion exchange resin device (MB) 45 and the treated water discharge pipe (main pipe 13a) of the non-regeneration type mixed-bed ion-exchange resin device (Polisher) 54, The branch pipe 13b is connected, and the measuring cell 19a is inserted into each of the branch pipes 13b, whereby the resistivity meter 19 is installed.

  Further, the ultrapure water production system 3 includes the ultraviolet sterilizer 1 of the above embodiment. The ultraviolet sterilizer 1 is installed so that the light emitting surface 11a of the ultraviolet light emitting diode 11 is located on the wall surface of the main pipe 13a facing the connection port of the branch pipe 13b.

  When measuring the water quality in the ultrapure water production system 3, if bacteria are generated and proliferated in the vicinity of the measurement cell 19a, the water quality cannot be accurately measured. By installing the ultraviolet sterilizer 1 of the embodiment, such a concern can be eliminated and it is effective. Further, since the ultraviolet sterilizer 1 uses the ultraviolet light emitting diode 11 as a light source, it is easy to miniaturize and the power consumption is small. In particular, in the case of producing ultrapure water of extremely high purity, the effect of improving the water quality can be obtained by effectively sterilizing the pooled water in the fine space such as the branch pipe connecting portion. Further, in the case of producing high-purity ultrapure water, the number of units of the ultrapure water production system increases, but according to the ultraviolet sterilizer 1 of the embodiment, the degree of freedom of installation is high and the installation space is also large. Since it can be made small, it is also suitable for such a large-scale ultrapure water production system.

  In the ultrapure water production system 3, the resistivity meter 19 was provided at the subsequent stage of the mixed bed type ion exchange resin device (MB) 45 and the non-regeneration type mixed bed type ion exchange resin device (Polisher) 54. Although the embodiment has been described, the location of the resistivity meter 19 is not limited to this, and the resistivity meter 19 may be disposed at the subsequent stage of the ultrafiltration device 55. The number of resistivity meters 19 installed in the ultrapure water production system 3 may be one or two or more. The number of installed resistivity meters 19 is appropriately set as necessary. Moreover, the number of installed ultraviolet sterilizers 1 can be changed as appropriate.

  Further, in the ultrapure water production system 3, the mode in which the ultraviolet sterilizer 1 is installed at the location where the resistivity meter 19 is arranged is shown. For example, when a conductivity meter is used as the water quality measuring device, reverse osmosis is performed. The conductivity meter and the ultraviolet sterilizer 1 are installed in combination at the subsequent stage of the membrane device 43. When a thermometer is used as the water quality measuring device, for example, the thermometer and the ultraviolet sterilizer 1 are installed in combination in the subsequent stage of a heat exchanger (not shown) installed in the subsequent stage of the tank 46. .. In these cases as well, the same effect as when the resistivity meter 19 and the ultraviolet sterilizer 1 are used in combination is obtained.

  1, 2... Ultraviolet sterilizer, 3... Ultrapure water production system, 11... Ultraviolet light emitting diode, 11a... Light emitting surface, 12... Lens, 13, 131... Treated water pipe, 13a, 131a... Main pipe, 13b, 131b... Branch pipe, 15... Power supply device, 18... Bacteria, 19... Resistivity meter, 19a... Measuring cell, 31... Pretreatment unit, 41... Primary pure water production unit, 42... Two-bed, three-tower type device device ( 2B3T), 43... Reverse osmosis membrane device (RO), 44... Ultraviolet oxidation device (TOC-UV), 45... Mixed bed type ion exchange resin device, 46... Tank, 51... Secondary pure water production section, 52... UV ray Oxidizer (TOC-UV), 53... Membrane deaerator (MDG), 54... Non-regenerative mixed bed type ion exchange resin device (Polisher), 55... Ultrafiltration device (UF), 56... Use point (POU) ).

Claims (9)

While having a main pipe that serves as a flow path for the water to be treated and a branch pipe connected to the main pipe, in the main pipe, a mounting hole is provided at a position facing an opening of a connecting portion between the branch pipe and the main pipe. The treated water pipe formed,
A lens watertightly mounted in the mounting hole of the water pipe to be treated,
An ultraviolet irradiation device using an ultraviolet light emitting diode that emits ultraviolet light having an emission peak wavelength of 230 to 290 nm as a light source,
The ultraviolet light emitting diode is arranged on the back side of the lens, with its light emitting surface facing the lens side,
The lens has an optical characteristic of diffusing or converging the ultraviolet light emitted from the ultraviolet light emitting diode, and is arranged so that a predetermined amount of the ultraviolet light is irradiated into the opening of the branch pipe,
The branch piping, the ultraviolet sterilizer, characterized in that the water quality measuring device is arranged for performing quality measurements of the water to be treated.   The said water quality measuring device is a resistivity measuring cell which measures the resistivity of the said to-be-processed water, The ultraviolet sterilizer of Claim 1 characterized by the above-mentioned.   3. The ultraviolet sterilizer according to claim 1, wherein the lens has an optical characteristic of diffusing the ultraviolet light emitted from the ultraviolet light emitting diode. Mounting holes formed in the main pipe, the main pipe and, according to claim 1 to 3 wherein the axis of the connecting portion near to the main pipe of the branch pipe, characterized in that it is formed at the intersection The ultraviolet sterilizer according to any one of 1. The branch pipe, according to claim 1 to 4 the axis of the connecting portion near to the main pipe of the branch pipe is tilted with respect to the axis of the main pipe, characterized in that it is connected to the main pipe The ultraviolet sterilizer according to any one of 1. The ultraviolet sterilizer according to any one of claims 1 to 5 , wherein the lens is made of quartz glass. The ultraviolet sterilizer according to any one of claims 1 to 6 , wherein the main pipe is provided in an ultrapure water production system that produces ultrapure water. An inner wall surface of a treated water pipe having a main pipe that is a flow path of the treated water and a branch pipe connected to the main pipe, and an ultraviolet sterilization method for sterilizing the treated water in the treated water pipe. ,
In the main pipe, a mounting hole is formed at a position facing an opening of a connecting portion between the branch pipe and the main pipe, and a lens is watertightly mounted in the mounting hole.
Using an ultraviolet light emitting diode having an emission peak wavelength in the range of 230 to 290 nm as a light source, emitting ultraviolet light from the light source,
The emitted ultraviolet rays are diffused or converged by the lens, and a predetermined amount of the ultraviolet rays is irradiated into the opening of the branch pipe,
Wherein disposed in the branch pipe, the use of a water quality measuring instrument for performing quality measurements of the water to be treated, prior Symbol ultraviolet sterilization method characterized by measuring the water quality of the water to be treated. A pretreatment unit, a primary pure water production unit and a secondary pure water production unit are provided.
The primary pure water production section and the secondary pure water production section are ultra pure water production systems each equipped with a mixed bed type ion exchange resin device,
While having a main pipe serving as a flow path of treated water treated by the mixed bed ion exchange resin device and a branch pipe connected to at least one of the main pipes, in the main pipe, the branch pipe and the A treated water pipe in which a mounting hole is formed at a position facing the opening of the connection portion with the main pipe;
A lens watertightly mounted in the mounting hole of the water pipe to be treated,
An ultraviolet irradiation device using an ultraviolet light emitting diode that emits ultraviolet light having an emission peak wavelength of 230 to 290 nm as a light source,
The ultraviolet light emitting diode is arranged on the back side of the lens, with its light emitting surface facing the lens side,
The lens has an optical characteristic of diffusing or converging the ultraviolet light emitted from the ultraviolet light emitting diode, and is arranged so that a predetermined amount of the ultraviolet light is irradiated into the opening of the branch pipe,
The branch in the piping, the ultrapure water production system, characterized in that the water quality measuring device for performing quality measurements of the water to be treated is arranged.

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