JP6680133B2 - Optical coupling module and method for manufacturing optical coupling module - Google Patents

Description

  The present invention relates to an optical coupling module and a method for manufacturing the optical coupling module.

  2. Description of the Related Art Conventionally, in an optical communication network or optical interconnection technology, an optical coupling module that optically couples an optical fiber and an optical waveguide of the optical device is used in inputting and outputting light between the optical fiber and the optical device. There is.

  For example, silicon photonics devices manufactured using silicon semiconductor technology have been actively studied as optical devices for realizing optical transceivers for optical interconnects.

  Generally, a silicon photonics device uses a silicon optical waveguide having a spot size of about 1 μm to propagate light within the device. On the other hand, the single mode optical fiber has a spot size of about 10 μm. Therefore, in inputting / outputting light between the silicon photonics device and the single-mode optical fiber, an optical coupling module having a spot size conversion function is used to prevent light loss in inputting / outputting light. .

  As such an optical coupling module, a grating coupler that inputs and outputs light in the upper surface direction of the silicon substrate, a spot size conversion waveguide that inputs and outputs light in the horizontal direction of the silicon substrate, and the like have been proposed.

  In general, in optical coupling between a single-mode optical fiber and an optical device, accuracy of about 1 μm is required for positioning optical components such as the optical fiber and the optical device in both the plane direction and the height direction.

  On the other hand, the mounting accuracy in the plane direction of the mounter for mounting general optical components is about several μm. Further, the mounting accuracy in the height direction is about several μm due to the influence of the thickness of the adhesive material used for fixing the optical component or the inclination when the optical component is mounted.

  With such a mounting accuracy, although it is possible to support a multimode optical fiber, it is insufficient for a single mode optical fiber.

  Therefore, usually, when optically coupling a single-mode optical fiber to an optical device, active mounting is performed by directly monitoring the light intensity and optimizing the mounting position of the optical component.

  However, an expensive mounting device is required for such an optical component mounting method.

JP, 2007-240756, A

Taira et al. , "Precision Assemble of Polymer Waveguide Components for Silicon Photonic Packaging" IEEE CPMT Symposium Japan (ICSJ), 2014, 63-66.

  Therefore, an optical coupling module as shown in FIG. 1 has been proposed.

  FIG. 1 is a diagram showing a conventional optical coupling module.

  The optical coupling module 110 includes a plurality of first optical waveguides 122, a first substrate 121 on which the plurality of first optical waveguides 122 are arranged, and a first optical element 120 having a pair of plugs 123. The plurality of first optical waveguides 122 and the first substrate 121 are made of resin.

  Further, the optical coupling module 110 has the same number of the second optical waveguides 132 as the first optical waveguides 122, the second substrate 131 on which the respective second optical waveguides 132 are arranged, and the second optical element having the pair of groove portions 133. And 130. The second substrate 131 is made of silicon, and the plurality of second optical waveguides 132 are spot size conversion waveguides made of silicon fine wire optical waveguides.

  The first substrate 121 is disposed on the second substrate 131 so that the plurality of first optical waveguides 122 are optically coupled to the corresponding second optical waveguides 132. Each first optical waveguide 122 of the first optical element 120 is optically coupled to a single mode optical fiber (not shown). The first optical element 120 optically couples each second optical waveguide 132 of the second optical element 130 with a single mode optical fiber (not shown).

  In the optical coupling module 110, the first optical element 120 is pressed toward the second optical element 130 so that the pair of plugs 123 fits into the pair of groove portions 133, thereby aligning in the horizontal direction and the vertical direction. Is done. Therefore, a desired optical coupling state between the first optical waveguide 122 and the second optical waveguide 132 can be obtained even by using a mounter having a mounting accuracy of several μm.

  In the optical coupling module 110, while the first optical element 120 is pressed toward the second optical element 130, the desired optical coupling state between the first optical waveguide 122 and the second optical waveguide 132 is maintained. can get.

  However, when the pressing of the first optical element 120 is stopped, the positional relationship between the first optical waveguide 122 and the second optical waveguide 132 shifts. Especially, the position in the height direction is displaced.

  Therefore, while the first optical element 120 is pressed toward the second optical element 130, the first substrate 121 and the second substrate 131 are bonded and fixed.

  Therefore, when the optical coupling module 110 shown in FIG. 1 is manufactured, a step of adhering the first substrate 121 and the second substrate 131 is provided, which causes a problem in that manufacturing takes time.

  Therefore, there is a demand for an optical coupling module that can easily perform optical coupling between an optical fiber and an optical device.

  An object of the present invention is to propose an optical coupling module and an optical coupling module manufacturing method capable of easily performing optical coupling between an optical fiber and an optical device.

  In one aspect, the optical coupling module includes a first optical waveguide, a first substrate on which the first optical waveguide is arranged, a pair of beam portions extending from opposite ends of the first substrate, and a pair of the pair of beam portions. A first optical element having a pair of abutting portions arranged at the ends of the beam portions, a second optical waveguide, and the second optical waveguide are arranged and have a thermal expansion coefficient higher than that of the pair of beam portions. A second optical element having a small second substrate and a pair of contact receiving portions that are disposed on the second substrate and that contact the pair of contact portions; and the first optical waveguide and the second optical element. The first substrate is arranged on the second substrate so as to be optically coupled to the optical waveguide, and each of the pair of beam portions is separated from the second substrate so that the first substrate is separated from the second substrate. The pair of abutting portions extend in opposite directions from the opposing ends, and the pair of abutting portions are abutted with each other. Is disposed between, and in contact with the pair of contact receiving portion, the pair of beam portions is pressed the first substrate toward the opposite sides in the second substrate.

  In another aspect, another optical coupling module includes a first optical waveguide, a first substrate on which the first optical waveguide is arranged, and a pair of beam portions extending from opposite ends of the first substrate. A first optical element having a pair of contact portions arranged at the ends of the pair of beam portions, a second optical waveguide, and the second optical waveguide, and more than the pair of beam portions. A second optical element having a second substrate having a small thermal expansion coefficient and a second optical element disposed on the second substrate and having a pair of contact receiving portions that contact the pair of contact portions; And the second optical waveguide are optically coupled to each other, the first substrate is disposed on the second substrate, and each of the pair of beam portions is arranged to approach the second substrate. The pair of contact receiving portions extend in opposite directions from the opposite ends of the first substrate. It is disposed between the abutment, which in contact with the pair of abutting portions, the pair of beam portions are pulled the first substrate from both sides toward the second substrate.

  In one aspect, a method of manufacturing an optical coupling module is such that a first optical waveguide, a first substrate on which the first optical waveguide is arranged, and diagonally opposite directions from the opposite ends of the first substrate. A first optical element having a pair of beam portions extending in the direction of, and a pair of abutting portions arranged at the ends of the pair of beam portions, a second optical waveguide, and the second optical waveguide are arranged, The first substrate has a second substrate having a thermal expansion coefficient smaller than that of the pair of beams and a pair of contact receiving portions arranged on the second substrate and contacting the pair of contact portions. And a second optical element in which the distance between the pair of contact receiving portions is shorter than the distance between the pair of contact receiving portions, at the first temperature, between the pair of contact receiving portions. The pair of abutting portions are located on the first substrate, and the pair of beam portions face the first substrate while being separated from the second substrate. The first optical element is arranged on the second optical element such that the first optical waveguide and the second optical waveguide face each other so as to extend in opposite directions from the respective end portions, and the pair of beams are arranged. The temperature of the portion to a second temperature higher than the first temperature, the pair of beam portions extend due to thermal expansion, and the pair of contact portions contact the pair of contact receiving portions. Thus, the pair of beam portions press the first substrate from both sides toward the second substrate, and optically couple the first optical waveguide and the second optical waveguide.

  Further, in one aspect, another method of manufacturing an optical coupling module is configured such that a first optical waveguide, a first substrate on which the first optical waveguide is arranged, and an opposite end portion of the first substrate in opposite directions. A first optical element having a pair of beam portions extending obliquely to each other and a pair of abutting portions arranged at ends of the pair of beam portions; a second optical waveguide; and a second optical waveguide And a second substrate having a thermal expansion coefficient smaller than that of the pair of beam portions, and a pair of contact receiving portions that are disposed on the second substrate and contact the pair of contact portions. At a temperature, using the second optical element in which the distance between the pair of contact portions is shorter than the distance between the pair of contact receiving portions, the pair of beam portions are moved from the first temperature to each other. And the pair of beam portions are extended by thermal expansion while the temperature is raised to a second temperature which is also higher than that of the pair of contact portions. The contact receiving portion is located so that the pair of beam portions extend in opposite directions from the opposite ends of the first substrate while approaching the second substrate, and the first optical waveguide and the second optical waveguide. The first optical element is arranged on the second optical element so that the waveguide faces each other, and the pair of beam portions are cooled to a third temperature lower than the second temperature, and the pair of beam portions are connected to each other. The beam portions shrink due to thermal contraction, and the pair of contact portions come into contact with the pair of contact receiving portions, so that the pair of beam portions move the first substrate from both sides toward the second substrate. It is pulled to optically couple the first optical waveguide and the second optical waveguide.

  As one aspect, the optical coupling module can easily perform optical coupling between the optical fiber and the optical device.

  Further, as one aspect, in the method of manufacturing an optical coupling module, an optical coupling module capable of easily performing optical coupling between an optical fiber and an optical device can be obtained.

  The objects and advantages of the invention will be realized and obtained by means of the components and combinations particularly pointed out in the claims.

  Both the foregoing general description and the following detailed description are exemplary and explanatory and do not limit the invention described in the claims.

It is a figure which shows the optical coupling module of a prior art example. FIG. 2A is a plan view of a first embodiment of an optical coupling module disclosed in this specification, and FIG. 2B is a cross-sectional view taken along line X1-X1 of FIG. FIG. 6 is a diagram (No. 1) explaining the manufacturing method of the first embodiment of the optical coupling module disclosed in the specification. FIG. 6 is a diagram (No. 2) explaining the manufacturing method of the first embodiment of the optical coupling module disclosed in the specification. (A) is a plan view of a modified example of the first embodiment of the optical coupling module disclosed in this specification, and (B) is a cross-sectional view taken along line X2-X2 of FIG. 5 (A). FIG. 6A is a plan view of a second embodiment of the optical coupling module disclosed in this specification, and FIG. 6B is a sectional view taken along line YY of FIG. FIG. 9 is a diagram (No. 1) explaining the manufacturing method of the second embodiment of the optical coupling module disclosed in the specification. FIG. 6 is a diagram (No. 2) explaining the manufacturing method of the second embodiment of the optical coupling module disclosed in the specification. 9A is a plan view of a third embodiment of the optical coupling module disclosed in this specification, and FIG. 9B is a cross-sectional view taken along line ZZ of FIG. 9A. FIG. 9 is a diagram (No. 1) explaining the manufacturing method of the third embodiment of the optical coupling module disclosed in the specification. FIG. 9 is a diagram (No. 2) for explaining the manufacturing method of the third embodiment of the optical coupling module disclosed in the specification.

  Hereinafter, a first preferred embodiment of the optical coupling module disclosed in the present specification will be described with reference to the drawings. However, the technical scope of the present invention is not limited to those embodiments, but extends to the inventions described in the claims and their equivalents.

  2A is a plan view of the first embodiment of the optical coupling module disclosed in this specification, and FIG. 2B is a cross-sectional view taken along line X1-X1 of FIG. 2A.

  The optical coupling module 10 of the present embodiment includes a first optical element 20 having a first substrate 21 on which a plurality of first optical waveguides 22 are arranged, and a second substrate 31 on which a plurality of second optical waveguides 32 are arranged. The second optical element 30 having is provided.

  The second optical element 30 is a silicon photonics device, and the second substrate 31 is made of silicon. Further, each second optical waveguide 32 is a spot size conversion waveguide formed by a silicon thin wire optical waveguide. Each of the second optical waveguides 32 is optically coupled to, for example, a light generation unit, a light detection unit, a light modulation unit, or the like (not shown) and propagates an optical signal.

  Each first optical waveguide 22 of the first optical element 20 is optically coupled to a single mode optical fiber (not shown). The first optical element 20 optically couples each second optical waveguide 32 of the second optical element 30 with a single mode optical fiber (not shown).

  The first optical element 20 extends obliquely in opposite directions from a plurality of first optical waveguides 22, a first substrate 21 on which the plurality of first optical waveguides 22 are arranged, and opposite ends of the first substrate 21. It has a pair of beam parts 23 and a pair of contact parts 24 arranged at the ends of the pair of beam parts 23.

  Each of the first optical waveguides 22 extends in a direction in which light is propagated at a predetermined interval. Each of the first optical waveguides 22 is arranged so as to be exposed on one surface of the first substrate 21. Hereinafter, in this specification, a direction in which the first optical waveguide 22 extends is also referred to as a longitudinal direction. Further, in this specification, the direction orthogonal to the longitudinal direction is also referred to as the width direction.

  Each of the pair of beam portions 23 has a vertically long plate shape extending in the longitudinal direction. The pair of beam portions 23 are arranged symmetrically with respect to the widthwise center line (not shown) of the first substrate 21. The pair of beam portions 23 preferably have flexibility or elasticity. Each beam portion 23 has one end in the width direction joined to the first substrate 21 and the other end in the width direction joined to the contact portion 24.

  Each of the pair of beam portions 23 extends in the opposite direction from each of the opposite end portions of the first substrate 21 so as to be separated from the second substrate 31.

  The second optical element 30 includes the same number of the second optical waveguides 32 as the first optical waveguides 22, the second optical waveguides 32, and the second substrate 31 having a smaller thermal expansion coefficient than the pair of beam portions 23. , And a pair of contact receiving portions 33 that are in contact with the pair of contact portions 24.

  Each second optical waveguide 32 extends in the longitudinal direction with a predetermined space. The intervals and positions of the respective second optical waveguides 32 are determined so as to face the corresponding first optical waveguides 22. Each second optical waveguide 32 is arranged so as to be exposed on one surface of the second substrate 31.

  The pair of contact receiving portions 33 are arranged on the second substrate 31 so as to face each other with a gap. The pair of contact receiving portions 33 are a pair of protruding portions protruding from the second substrate 31. Hereinafter, the pair of contact receiving portions 33 will also be referred to as a pair of protruding portions.

  The pair of contact portions 24 are arranged between the pair of protrusions 33 and are in contact with the pair of protrusions 33.

  The first substrate 21 is arranged on the second substrate 31 so that the plurality of first optical waveguides 22 are optically coupled to the corresponding second optical waveguides 32. The substrate 21 is pushed toward the second substrate 31 from both sides. The pair of beam portions 23 push the contact portion 24 with the same force as pushing the first substrate 21.

  The force by which the pair of beam portions 23 press the first substrate 21 toward the second substrate 31 from both sides will be described in detail later, but the thermal expansion coefficient of the first optical element 20 including the pair of beam portions 23, It occurs based on the difference from the coefficient of thermal expansion of the second substrate 31. As described above, the thermal expansion coefficient of the second substrate 31 is smaller than the thermal expansion coefficient of the pair of beam portions 23.

  By pressing the first substrate 21 from both sides toward the second substrate 31, the first optical element 20 is moved in the longitudinal direction and the width direction with respect to the second optical element 30, and the first optical element 20 is perpendicular to the surface of the second optical element 30. Movement in different directions is restricted. In this way, the positional relationship between each first optical waveguide 22 and the corresponding second optical waveguide 32 is accurately determined. Therefore, a good optical coupling state between each first optical waveguide 22 and the corresponding second optical waveguide 32 is secured.

From the viewpoint described above, the difference between the linear thermal expansion coefficient of the pair of beam portions 23 and the linear thermal expansion coefficient of the second substrate 31 is 10 × 10 ⁻⁶ (1 / K) or more, particularly 40 to 60 × 10 ^{−. 6} (1 / K) or more, and more preferably at ^{50~400 × 10 -6 (1 / K} ) or more.

  From the viewpoint of increasing the force with which the pair of beam portions 23 press the first substrate 21 from both sides toward the second substrate 31, the thermal expansion coefficient of the first substrate 21 and / or the pair of abutting portions 24 is the second It is preferably larger than the substrate 31.

  In addition, the thermal expansion coefficient of the first substrate 21 is preferably smaller than that of the pair of beam portions 23 from the viewpoint of reducing the change in the distance between the first optical waveguides 22 due to thermal expansion.

Examples of materials for forming the pair of beam portions 23 include polyetherimide (PEI) resin (coefficient of linear thermal expansion: about 50 × 10 ⁻⁶ (1 / K)), polyethylene terephthalate (PET) resin (coefficient of linear thermal expansion). : 17 to 40 × 10 ⁻⁵ (1 / K)), acrylic resin (coefficient of linear thermal expansion: about 7 to 8 × 10 ⁻⁵ (1 / K)), polycarbonate resin (coefficient of linear thermal expansion: about 7 × 10) ^-5 (1 / K)) and acrylonitrile-butadiene-styrene plastic (ABS) (coefficient of linear thermal expansion: 6 to 13 × 10 ^-5 (1 / K)).

  As the material for forming the first substrate 21 and the pair of contact portions 24, the same material as the pair of beam portions 23 can be used. In addition, it is preferable to use a material that transmits visible light as the material for forming the first substrate 21 from the viewpoint that the positional relationship between the first optical waveguide 22 and the second optical waveguide 32 can be confirmed.

As the material for forming the second substrate 31, for example, silicon (coefficient of linear thermal expansion: about 2.4 × 10 ⁻⁶ (1 / K)), quartz glass (coefficient of linear thermal expansion: about 0.5 × 10 ^−6). (1 / K)), gallium arsenide (coefficient of linear thermal expansion: about 6.9 × 10 ⁻⁶ (1 / K)), indium phosphorus (coefficient of linear thermal expansion: about 4.5 × 10 ⁻⁶ (1 / K) )).

  As a material for forming the pair of protrusions 33, the same material as that for the second substrate 31 can be used.

  Next, a method for manufacturing the above-described optical coupling module 10 of the present embodiment will be described below with reference to FIGS. 3 and 4.

  First, as shown in FIG. 3A, at the first temperature, the pair of contact portions 24 are located between the pair of protruding portions 33, and the pair of beam portions 23 are separated from the second substrate 31 while The first optical element 20 is placed on the second optical element 30 so as to extend in the opposite direction from each of the opposite ends of the first substrate 21 and so that each first optical waveguide 22 faces the corresponding second optical waveguide 32. Is located in.

  At the first temperature, the length L1 in the width direction of the first optical element 20 (the distance between the pair of contact portions 24) is shorter than the length L2 between the pair of protruding portions 33. Therefore, the first optical element 20 can be easily arranged on the second optical element 30 so that each first optical waveguide 22 faces the corresponding second optical waveguide 32.

In the present embodiment, the pair of beam portions 23, the first substrate 21, and the pair of contact portions 24 forming the first optical element 20 are made of polyetherimide (PEI) resin (coefficient of linear thermal expansion: about 50 × 10 ^{−). 6} (1 / K)). The second substrate 31 and the pair of protrusions 33 forming the second optical element 30 are made of silicon (coefficient of linear thermal expansion: about 2.4 × 10 ⁻⁶ (1 / K)). The linear thermal expansion coefficient of the first optical element 20 including the pair of beam portions 23 is one digit larger than the linear thermal expansion coefficient of the second substrate 31.

  When the first temperature is 25 ° C., the dimension of the first substrate 21 in the longitudinal direction is 3 mm and the dimension in the width direction is 2 mm. The widthwise dimension of the beam portion 23 and the contact portion 24 is 1 mm. Therefore, the dimension of the first optical element 20 in the longitudinal direction is 3 mm, and the dimension in the width direction (length L1) is 4 mm (4000 μm). Eight first optical waveguides 22 are arranged on the first substrate 21 at intervals of 250 μm.

  Further, at the first temperature (25 ° C.), the length L2 between the pair of protrusions 33 is 4.010 mm (4010 μm).

  Next, as shown in FIG. 3 (B), the pair of beam portions 23 are heated to a second temperature (150 ° C.) higher than the first temperature (25 ° C.). In the present embodiment, the entire first optical element 20 and the second optical element 30 are heated to the second temperature (150 ° C.).

  Then, the first optical element 20 including the pair of beam portions 23 extends due to thermal expansion, and the pair of contact portions 24 contact the pair of projecting portions 33, whereby the pair of beam portions 23 cover the first substrate 21. The first optical waveguide 22 and the second optical waveguide 32 are optically coupled by pressing from both sides toward the second substrate 31.

  At the second temperature (150 ° C.), in the free state, the widthwise dimension (length L1) of the first optical element 20 is extended by about 20 μm as compared with the first temperature (25 ° C.). On the other hand, at the second temperature (150 ° C.), the length L2 between the pair of protrusions 33 extends in the free state by about 1 μm as compared with the first temperature (25 ° C.).

  Therefore, at the second temperature (150 ° C.), the widthwise dimension (length L1) of the first optical element 20 is slightly less than 10 μm longer than the length L2 between the pair of protrusions 33 in the free state. The portion that is slightly less than 10 μm longer than the length L2 between the pair of protruding portions 33 is absorbed mainly by the bending of the pair of beam portions 23. Further, the bending of the pair of beam portions 23 causes a force of pressing the first substrate 21 toward the second substrate 31 from both sides by the pair of beam portions 23.

  In this way, movement of the first optical element 20 in the longitudinal direction and width direction with respect to the second optical element 30 and movement of the first optical element 20 in the direction perpendicular to the surface of the second optical element 30 are restricted. The states shown in FIGS. 2A and 2B correspond to the states of FIG. 3B. In this way, the optical coupling module 10 of the present embodiment is obtained.

  For example, in the step of FIG. 3A, the first optical element 20 can be mounted on the second optical element 30 by using a mounter having a positional mounting accuracy of several μm. Then, in the step of FIG. 3B, based on the difference in thermal expansion coefficient between the first optical element 20 and the second optical element 30, the distance between each first optical waveguide 22 and the corresponding second optical waveguide 32 is increased. The positional relationship of is automatically and accurately determined. Therefore, the time for using the mounter can be shortened, so that the yield for manufacturing the optical coupling module can be improved and the manufacturing cost can be reduced.

  The arrangement of each first optical waveguide 22 in the first optical element 20 can be determined so as to correspond to each second optical waveguide 32 in the second optical element 30.

  The second temperature can be determined based on the first temperature, the difference in coefficient of thermal expansion, the positional relationship between the pair of beam portions 23 and the pair of protruding portions 33, and the like.

  Next, as shown in FIG. 4A, at the second temperature, the first substrate 21 and the second substrate 31 are bonded using the adhesive 40. As the adhesive 40, for example, a photocurable adhesive can be used. In addition, at a first temperature shown in FIG. 3A, a thermosetting adhesive is applied between the first substrate 21 and the second substrate 31, and the temperature is raised to the second temperature. The first substrate 21 and the second substrate 31 may be bonded together.

  Next, as shown in FIG. 4B, the optical coupling module 10 is cooled to a temperature lower than the second temperature, for example, room temperature (25 ° C.). The first optical element 20 and the second optical element 30 including the pair of beam portions 23 thermally contract. The pair of beam portions 23 and the pair of abutting portions 24 may be reduced in widthwise dimension due to thermal contraction, and the pair of abutting portions 24 may not come into contact with the pair of protruding portions 33. The force by which the pair of beam portions 23 press the first substrate 21 toward the second substrate 31 from both sides is reduced or disappears, but the first substrate 21 and the second substrate 31 are adhered using the adhesive 40. Therefore, the optical coupling state between the first optical waveguide 22 and the second optical waveguide 32 is maintained even at room temperature.

  According to the optical coupling module 10 of the present embodiment described above, the single mode optical fiber optically coupled to the second optical waveguide 32 of the first optical element 20 and the second optical element 30 which is an optical device are provided. Optical coupling between them can be performed easily with high accuracy.

  In addition, in the above-described embodiment, the first optical element 20 was formed using polyetherimide, but the first substrate 21 and other constituent elements may be formed using different materials. Good. For example, the first substrate 21 may be formed using polyetherimide, and the pair of beam portions 23 and the pair of contact portions 24 may be formed using polyethylene terephthalate. In this case, since the coefficient of linear thermal expansion of polyethylene terephthalate is larger than that of polyetherimide, the second temperature can be set lower than that in the above-described embodiment.

  Further, in the above-described embodiment, the first temperature is room temperature (25 ° C.), but the first temperature may be low (for example, −50 ° C.) and the second temperature may be room temperature. In this case, at room temperature, a pair of beam portions 23 generate a force to press the first substrate 21 toward the second substrate 31 from both sides, so that the first substrate 21 and the second substrate 31 do not have to be bonded to each other. Good.

  Next, a modified example of the optical coupling module 10 of the first embodiment described above will be described below with reference to FIG.

  5A is a plan view of a modification of the first embodiment of the optical coupling module disclosed in this specification, and FIG. 5B is a cross-sectional view taken along line X2-X2 of FIG. 5A.

  In the optical coupling module of this modified example, the module of the first substrate 21 of the first optical element 20 is different from that of the first embodiment described above.

  In the first optical element 20, the slit 25 is arranged between the adjacent first optical waveguides 22. The slit 25 is arranged side by side with the first optical waveguide 22 so as to extend in the longitudinal direction.

  In the state where the pair of beam portions 23 press the first substrate 21 from both sides toward the second substrate 31, a stress that compresses in the width direction acts on the first substrate 21. At this time, the deformation of the slit 25 can reduce the distortion of the first substrate 21 and suppress the change of the distance between the first optical waveguides 22.

  Next, another embodiment of the above-described optical coupling module will be described below with reference to FIGS. For the points that are not particularly described in the other embodiments, the detailed description of the above-described first embodiment is appropriately applied. Further, the same components are designated by the same reference numerals.

  FIG. 6 (A) is a plan view of a second embodiment of the optical coupling module disclosed in this specification, and FIG. 6 (B) is a sectional view taken along line YY of FIG. 6 (A).

  In the optical coupling module 10 of the present embodiment, the pair of contact portions of the first optical element 20 and the pair of contact receiving portions of the second optical element 30 are different from those in the first embodiment described above.

  A pair of groove portions 34 provided on the second substrate 31 are arranged in the second optical element 30. The pair of groove portions 34 are arranged on the second substrate 31 so as to face each other with a gap. The pair of groove portions 34 are open on the side where the first optical element 20 is arranged. The groove portion 34 has a first side surface 34a and a second side surface 34b that faces the first side surface 34a with a space therebetween.

  The pair of contact receiving portions of the second optical element 30 are the first side surfaces 34a of the pair of groove portions provided on the second substrate. Hereinafter, the pair of contact receiving portions will also be referred to as the first side surfaces 34a of the pair of groove portions.

  Each of the pair of contact portions 24 of the first optical element 20 has a vertically long plate shape extending in the longitudinal direction. One end of the contact portion 24 in the width direction is joined to the beam portion 23. A portion of the contact portion 24 on the other end portion side in the width direction is in contact with the first side surface 34a of the groove portion. The dimension of the groove portion 34 in the width direction is larger than the thickness of the contact portion 24. The contact portion 24 preferably has flexibility or elasticity.

  The pair of contact portions 24 are arranged between the first side surfaces 34a of the pair of groove portions and are in contact with the first side surfaces 34a of the pair of groove portions.

  The pair of contact portions 24 have a first side surface 24a that contacts the first side surface 34a of the groove and a second side surface 24b.

  The first substrate 21 is arranged on the second substrate 31 so that the plurality of first optical waveguides 22 are optically coupled to the corresponding second optical waveguides 32. The substrate 21 is pushed toward the second substrate 31 from both sides. The pair of beam portions 23 push the contact portion 24 with the same force as pushing the first substrate 21.

  The force of the pair of beam portions 23 pressing the first substrate 21 toward the second substrate 31 from both sides is due to the thermal expansion coefficient of the first optical element 20 including the pair of beam portions 23 and the heat of the second substrate 31. It occurs based on the difference from the expansion coefficient. The thermal expansion coefficient of the second substrate 31 is smaller than the thermal expansion coefficient of the pair of beam portions 23.

  Next, a method for manufacturing the above-described optical coupling module 10 of the present embodiment will be described below with reference to FIGS. 7 and 8.

  First, as shown in FIG. 7A, at the first temperature, the pair of contact portions 24 are located between the first side surfaces 34a of the pair of groove portions, and the pair of beam portions 23 are separated from the second substrate 31. The first optical element 20 emits the second light so that the first optical element 22 extends in the opposite direction from the opposite ends of the first substrate 21 while being separated, and the first optical waveguide 22 faces the corresponding second optical waveguide 32. It is arranged on the element 30.

  At the first temperature, the length (width between the pair of contact portions 24) L1 in the width direction of the first optical element 20 is shorter than the length L2 between the first side surfaces 34a of the pair of groove portions. Therefore, the first optical element 20 can be easily arranged on the second optical element 30 so that each first optical waveguide 22 faces the corresponding second optical waveguide 32. The length L1 is also the distance between the first side surfaces 24a of the pair of contact portions.

In the present embodiment, the pair of beam portions 23, the first substrate 21, and the pair of contact portions 24 forming the first optical element 20 are made of polyetherimide (PEI) resin (coefficient of linear thermal expansion: about 50 × 10 ^{−). 6} (1 / K)). The second substrate 31 including the pair of groove portions 34 is formed of silicon (coefficient of linear thermal expansion: about 2.4 × 10 ⁻⁶ (1 / K)). The linear thermal expansion coefficient of the first optical element 20 including the pair of beam portions 23 is one digit larger than the linear thermal expansion coefficient of the second substrate 31.

  When the first temperature is 25 ° C., the dimension of the first substrate 21 in the longitudinal direction is 3 mm and the dimension in the width direction is 2 mm. The widthwise dimension of the beam portion 23 and the contact portion 24 is 1 mm. Therefore, the dimension of the first optical element 20 in the longitudinal direction is 3 mm, and the dimension in the width direction (length L1) is 4 mm (4000 μm).

  Further, at the first temperature (25 ° C.), the length L2 between the first side surfaces 34a of the pair of grooves is 4.010 mm (4010 μm).

  Next, as shown in FIG. 7 (B), the pair of beam portions 23 is heated to a second temperature (150 ° C.) higher than the first temperature (25 ° C.). In the present embodiment, the entire first optical element 20 and the second optical element 30 are heated to the second temperature (150 ° C.).

  Then, the first optical element 20 including the pair of beam portions 23 extends due to thermal expansion, and the pair of contact portions 24 contact the first side surfaces 34a of the pair of groove portions, so that the pair of beam portions 23 become first. The substrate 21 is pressed toward the second substrate 31 from both sides to optically couple the first optical waveguide 22 and the second optical waveguide 32.

  The first side surface 24a of the contact portion 24 contacts the first side surface 34a of the groove portion.

  At the second temperature (150 ° C.), the width (dimension L1) in the width direction of the first optical element 20 is extended by about 20 μm more than at the first temperature (25 ° C.). On the other hand, at the second temperature (150 ° C.), the length L2 between the first side faces 34a of the pair of grooves extends about 1 μm longer than at the first temperature (25 ° C.).

  Therefore, at the second temperature (150 ° C.), the dimension (length L1) in the width direction of the first optical element 20 is a little less than 10 μm than the length L2 between the first side surfaces 34a of the pair of grooves in the free state. become longer. The portion of the pair of groove portions, which is slightly less than 10 μm longer than the length L2 between the first side surfaces 34a, is absorbed mainly by the bending of the pair of beam portions 23 and the pair of contact portions 24. Further, the pair of beam portions 23 and the pair of abutting portions 24 are bent to generate a force by which the pair of beam portions 23 press the first substrate 21 toward the second substrate 31 from both sides.

  In this way, movement of the first optical element 20 in the longitudinal direction and width direction with respect to the second optical element 30 and movement of the first optical element 20 in the direction perpendicular to the surface of the second optical element 30 are restricted. The states shown in FIGS. 6A and 6B correspond to the states of FIG. 7B. In this way, the optical coupling module 10 of the present embodiment is obtained.

  Next, as shown in FIG. 8A, at the second temperature, the first substrate 21 and the second substrate 31 are bonded using the adhesive 40. As the adhesive 40, for example, a photocurable adhesive can be used.

  Next, as shown in FIG. 8B, the optical coupling module 10 is cooled to a temperature lower than the second temperature, for example, room temperature (25 ° C.). The first optical element 20 and the second optical element 30 including the pair of beam portions 23 thermally contract. The force by which the pair of beam portions 23 press the first substrate 21 toward the second substrate 31 from both sides is reduced or disappears, but the first substrate 21 and the second substrate 31 are adhered using the adhesive 40. Therefore, the optical coupling state between the first optical waveguide 22 and the second optical waveguide 32 is maintained even at room temperature.

  According to the above-described optical coupling module of the present embodiment, the same effect as that of the first embodiment is obtained.

  Next, a third embodiment of the optical waveguide disclosed in this specification will be described below.

  9A is a plan view of a third embodiment of the optical coupling module disclosed in this specification, and FIG. 9B is a cross-sectional view taken along line ZZ of FIG. 9A.

  In the optical coupling module 10 of the present embodiment, the pair of beam portions 23 and the pair of contact portions 24 of the first optical element 20 and the pair of contact receiving portions of the second optical element 30 have the above-described first embodiment. Is different from.

  A pair of groove portions 35 provided on the second substrate 31 are arranged in the second optical element 30. The pair of groove portions 35 are arranged on the second substrate 31 so as to face each other with a gap. The pair of groove portions 35 are open on the side where the first optical element 20 is arranged. The groove portion 35 has a first side surface 35a and a second side surface 35b opposed to the first side surface 35a with a gap.

  The pair of contact receiving portions of the second optical element 30 are the second side surfaces 35b of the pair of groove portions provided on the second substrate. Hereinafter, the pair of contact receiving portions of the second optical element 30 are also referred to as the second side surfaces 35b of the pair of groove portions.

  Each of the pair of beam portions 23 of the first optical element 20 extends in the opposite direction from each of the opposite end portions of the first substrate 21 so as to approach the second substrate 31.

  Each of the pair of contact portions 24 of the first optical element 20 has a vertically long plate shape extending in the longitudinal direction. A portion of the contact portion 24 on one end side in the width direction is joined to the beam portion 23. A portion of the contact portion 24 on the other end side in the width direction is in contact with the second side surface 35b of the groove portion. The dimension of the groove portion 35 in the width direction is larger than the thickness of the contact portion 24. The contact portion 24 preferably has flexibility or elasticity.

  The second side surfaces 35b of the pair of groove portions are arranged between the pair of contact portions 24 and are in contact with the pair of contact portions 24.

  The pair of contact portions 24 has a first side surface 24a and a second side surface 24b that contacts the second side surface 35b of the groove.

  The first substrate 21 is arranged on the second substrate 31 so that the plurality of first optical waveguides 22 are optically coupled to the corresponding second optical waveguides 32. The substrate 21 is pulled from both sides toward the second substrate 31. The pair of beam portions 23 pulls the contact portion 24 with the same force as pulling the first substrate 21.

  The force of the pair of beam portions 23 pulling the first substrate 21 from both sides toward the second substrate 31 is the thermal expansion coefficient of the first optical element 20 including the pair of beam portions 23 and the thermal expansion of the second substrate 31. It occurs based on the difference from the coefficient. The thermal expansion coefficient of the second substrate 31 is smaller than the thermal expansion coefficient of the pair of beam portions 23.

  Next, a method of manufacturing the above-described optical coupling module 10 of the present embodiment will be described below with reference to FIGS. 10 and 11.

  First, as shown in FIG. 10 (A), at the first temperature, the length L1 between the pair of contact portions 24 is shorter than the length L2 between the second side surfaces 35b of the pair of grooves. Therefore, it is not yet performed to bring the pair of contact portions 24 into contact with the second side surfaces 35b of the pair of grooves and place the first optical element 20 on the second optical element 30. The length L1 is also the distance between the second side surfaces 24b of the pair of contact portions.

In the present embodiment, the pair of beam portions 23, the first substrate 21, and the pair of contact portions 24 forming the first optical element 20 are made of polyetherimide (PEI) resin (coefficient of linear thermal expansion: about 50 × 10 ^{−). 6} (1 / K)). The second substrate 31 including the pair of groove portions 35 is formed of silicon (coefficient of linear thermal expansion: about 2.4 × 10 ⁻⁶ (1 / K)). The linear thermal expansion coefficient of the first optical element 20 including the pair of beam portions 23 is one digit larger than the linear thermal expansion coefficient of the second substrate 31.

  When the first temperature is 25 ° C., the dimension of the first substrate 21 in the longitudinal direction is 3 mm and the dimension in the width direction is 2 mm. The widthwise dimension of the beam portion 23 and the contact portion 24 is 1 mm. Therefore, the dimension of the first optical element 20 in the longitudinal direction is 3 mm, and the dimension in the width direction thereof is 4 mm. The length L1 between the pair of contact portions 24 is 3.7 mm (3700 μm), and the thickness of the contact portion 24 is 150 μm.

  Further, at the first temperature (25 ° C.), the length L2 between the second side surfaces 35b of the pair of grooves is 3.71 mm (3710 μm). The length between the first side surfaces 35a of the pair of grooves is 4.21 mm.

  At the first temperature, the length L1 between the pair of contact portions 24 is about 10 μm shorter than the length L2 between the second side surfaces 35b of the pair of grooves.

  Next, as shown in FIG. 10 (B), the pair of beam portions 23 is heated to a second temperature (150 ° C.) higher than the first temperature (25 ° C.). In the present embodiment, the entire first optical element 20 and the second optical element 30 are heated to the second temperature (150 ° C.).

  Then, the first optical element 20 including the pair of beam portions 23 extends due to thermal expansion.

  At the second temperature (150 ° C.), the width of the first optical element 20 extends about 20 μm more than that at the first temperature (25 ° C.). As a result, the length L1 between the pair of abutting portions 24 is also extended by about 20 μm from that at the first temperature (25 ° C.). On the other hand, at the second temperature (150 ° C.), the length L2 between the second side faces 35b of the pair of groove portions is extended by about 1 μm as compared with the case of the first temperature (25 ° C.). That is, at the second temperature, the distance L1 between the pair of contact portions 24 is about 10 μm longer than the length L2 between the second side surfaces 35b of the pair of grooves.

  Next, as shown in FIG. 11A, at the second temperature (150 ° C.), with the pair of beam portions 23 extended by thermal expansion, the pair of groove portions of the pair of groove portions are formed between the pair of contact portions 24. The second side surfaces 35b are located so that the pair of beam portions 23 extend in opposite directions from the opposite end portions of the first substrate 21 while approaching the second substrate 31, and the first optical waveguide 22 and the second optical waveguide The first optical element 20 is arranged on the second optical element 30 so as to face 32.

  As described above, the distance L1 between the pair of contact portions 24 is longer than the length L2 between the second side surfaces 35b of the pair of grooves, so that each first optical waveguide 22 corresponds to the corresponding second optical waveguide 32. The first optical element 20 can be easily arranged on the second optical element 30 so as to face each other.

  Next, as shown in FIG. 11B, the temperature of the pair of beam portions 23 is lowered to room temperature (25 ° C.) lower than the second temperature (150 ° C.). In the present embodiment, the entire temperature of the first optical element 20 and the second optical element 30 is lowered to room temperature (25 ° C.). The first optical element 20 and the second optical element 30 including the pair of beam portions 23 thermally contract.

  Then, the first optical element 20 including the pair of beam portions 23 contracts due to thermal contraction, and the pair of contact portions 24 contact the second side surfaces 35b of the pair of groove portions, so that the pair of beam portions 23 become first. The first substrate 21 is pulled from both sides toward the second substrate 31 to optically couple the first optical waveguide 22 and the second optical waveguide 32.

  The second side surface 24b of the contact portion 24 contacts the second side surface 35b of the groove portion.

  At room temperature (25 ° C.), the length L1 between the pair of contact portions 24 is about 10 μm shorter than the length L2 between the second side surfaces 35b of the pair of grooves in the free state. A portion that is shorter than the length L2 between the second side surfaces 35b of the pair of grooves by about 10 μm is absorbed mainly by the bending of the pair of beam portions 23 and the pair of contact portions 24. Further, the pair of beam portions 23 and the pair of abutting portions 24 are bent to generate a force by which the pair of beam portions 23 pull the first substrate 21 from both sides toward the second substrate 31. The first optical element 20 and the second optical element 30 may be adhered to each other with an adhesive.

  According to the above-described optical coupling module of the present embodiment, the same effect as that of the first embodiment is obtained.

  The first substrate 21 of the first optical element 20 of this embodiment may have a slit as shown in FIG.

  In a state where the pair of beam portions 23 pull the first substrate 21 from both sides toward the second substrate 31, a stress pulling in the width direction acts on the first substrate 21. At this time, the deformation of the slit 25 can reduce the distortion of the first substrate 21 and suppress the change of the distance between the first optical waveguides 22.

  In the present invention, the optical coupling module and the method for manufacturing the optical coupling module of the above-described embodiments can be appropriately modified without departing from the spirit of the present invention. In addition, the constituent features of one embodiment or the modification can be appropriately applied to other embodiments.

  All examples and conditional language set forth herein are intended for educational purposes to help the reader develop a deeper understanding of the invention and concepts contributed by the inventor. All examples and conditional words given herein are to be construed as being not limited to such specifically stated examples and conditions. Also, such exemplary features in the specification are not related to exhibiting the superiority or inferiority of the present invention. While embodiments of the present invention have been described in detail, it should be understood that various changes, substitutions or modifications thereof can be made without departing from the spirit and scope of the invention.

  With regard to the above-described respective embodiments, the following supplementary notes are further disclosed.

(Appendix 1)
A first optical waveguide, a first substrate on which the first optical waveguide is arranged, a pair of beam portions extending from opposite end portions of the first substrate, and a pair arranged at the end portions of the pair of beam portions. A first optical element having a contact part of
A second optical waveguide, a second substrate on which the second optical waveguide is arranged, the thermal expansion coefficient of which is smaller than that of the pair of beam portions, and a pair which is arranged on the second substrate and contacts the pair of contact portions. A second optical element having a contact receiving portion of
Equipped with
The first substrate is disposed on the second substrate so that the first optical waveguide and the second optical waveguide are optically coupled, and each of the pair of beam portions is separated from the second substrate. Extending away from each opposite end of the first substrate in opposite directions,
The pair of contact portions are arranged between the pair of contact receiving portions and are in contact with the pair of contact receiving portions,
The pair of beam portions is an optical coupling module that pushes the first substrate from both sides toward the second substrate.

(Appendix 2)
A first optical waveguide, a first substrate on which the first optical waveguide is arranged, a pair of beam portions extending from opposite end portions of the first substrate, and a pair arranged at the end portions of the pair of beam portions. A first optical element having a contact part of
A second optical waveguide, a second substrate on which the second optical waveguide is arranged, the thermal expansion coefficient of which is smaller than that of the pair of beam portions, and a pair which is arranged on the second substrate and contacts the pair of contact portions. A second optical element having a contact receiving portion of
Equipped with
The first substrate is disposed on the second substrate so that the first optical waveguide and the second optical waveguide are optically coupled, and each of the pair of beam portions is provided on the second substrate. So as to approach, extending in opposite directions from respective opposite ends of the first substrate,
The pair of contact receiving portions are disposed between the pair of contact portions, and contact the pair of contact portions,
The pair of beam portions is an optical coupling module that pulls the first substrate from both sides toward the second substrate.

(Appendix 3)
3. The optical coupling module according to appendix 1 or 2, wherein each of the pair of contact receiving portions is a groove portion provided in the second substrate.

(Appendix 4)
The optical coupling module according to appendix 1, wherein each of the pair of contact receiving portions is a protruding portion protruding from the second substrate.

(Appendix 5)
5. The optical coupling module according to any one of appendices 1 to 4, wherein the thermal expansion coefficient of the first substrate is larger than that of the second substrate.

(Appendix 6)
6. The optical coupling module according to any one of appendices 1 to 5, wherein the thermal expansion coefficient of the first substrate is smaller than that of the pair of beam portions.

(Appendix 7)
7. The optical coupling module according to any one of appendices 1 to 6, wherein the pair of beam portions are arranged symmetrically with respect to the first substrate.

(Appendix 8)
A first optical waveguide, a first substrate on which the first optical waveguide is arranged, a pair of beam portions obliquely extending in opposite directions from opposite ends of the first substrate, and ends of the pair of beam portions. A first optical element having a pair of abutting portions arranged in the section,
A second optical waveguide, a second substrate on which the second optical waveguide is arranged, the thermal expansion coefficient of which is smaller than that of the pair of beam portions, and a pair which is arranged on the second substrate and contacts the pair of contact portions. A second optical element having a contact receiving portion, and a distance between the pair of contact portions is shorter than a distance between the pair of contact receiving portions at a first temperature;
Using,
At the first temperature, the pair of abutting portions are located between the pair of abutting receiving portions, and the pair of beam portions are opposed to each other at the end portions of the first substrate that are apart from the second substrate. The first optical element is disposed on the second optical element so that the first optical waveguide and the second optical waveguide face each other so as to extend in the opposite direction from
The pair of beam portions are heated to a second temperature higher than the first temperature, the pair of beam portions extend due to thermal expansion, and the pair of abutment portions receive the pair of abutment receivers. By abutting the first optical waveguide and the second optical waveguide, the pair of beam portions press the first substrate toward the second substrate from both sides to optically couple the first optical waveguide and the second optical waveguide. Module manufacturing method.

(Appendix 9)
9. The method for manufacturing an optical coupling module according to attachment 8, wherein the first substrate and the second substrate are bonded at the second temperature.

(Appendix 10)
10. The method for manufacturing an optical coupling module according to appendix 8 or 9, wherein each of the pair of contact receiving portions is a protruding portion protruding from the second substrate.

(Appendix 11)
10. The method of manufacturing an optical coupling module according to appendix 8 or 9, wherein each of the pair of contact receiving portions is a groove portion provided in the second substrate.

(Appendix 12)
A first optical waveguide, a first substrate on which the first optical waveguide is arranged, a pair of beam portions obliquely extending in opposite directions from opposite ends of the first substrate, and ends of the pair of beam portions. A first optical element having a pair of abutting portions arranged in the section,
A second optical waveguide, a second substrate on which the second optical waveguide is arranged, the thermal expansion coefficient of which is smaller than that of the pair of beam portions, and a pair which is arranged on the second substrate and contacts the pair of contact portions. A second optical element having a contact receiving portion, and a distance between the pair of contact portions is shorter than a distance between the pair of contact receiving portions at a first temperature;
Using,
The pair of beam portions are heated to a second temperature higher than the first temperature, and the pair of beam portions are extended by thermal expansion. A contact receiving portion is located so that the pair of beam portions extend in opposite directions from the opposite end portions of the first substrate while approaching the second substrate, and the first optical waveguide and the second optical waveguide. Arranging the first optical element on the second optical element so as to face the optical waveguide,
The pair of beam portions are cooled to a third temperature lower than the second temperature, the pair of beam portions are contracted by thermal contraction, and the pair of contact portions are the pair of contact receiving portions. The optical coupling module in which the pair of beam portions pulls the first substrate from both sides toward the second substrate, thereby optically coupling the first optical waveguide and the second optical waveguide. Manufacturing method.

(Appendix 13)
13. The method for manufacturing an optical coupling module according to appendix 12, wherein each of the pair of contact receiving portions is a groove portion provided in the second substrate.

(Appendix 14)
A first optical waveguide, a first substrate on which the first optical waveguide is arranged, a pair of beam portions extending from opposite end portions of the first substrate, and a pair arranged at the end portions of the pair of beam portions. A first optical element having a contact portion of
The first optical waveguide has a second optical waveguide, the second optical waveguide is disposed, a second substrate having a thermal expansion coefficient smaller than that of the pair of beam portions, and the second substrate is disposed on the second substrate. The first substrate is arranged on the second substrate so as to be optically coupled to the second optical waveguide in the second optical element having a contact portion and a pair of contact receiving portions capable of contacting each other; The pair of beam portions extend in opposite directions from opposite ends of the first substrate so as to be separated from the second substrate, and the pair of contact portions are disposed between the pair of contact receiving portions. The pair of contact portions are in contact with the pair of contact receiving portions, and the pair of beam portions can press the first substrate from both sides toward the second substrate. First optical element.

(Appendix 15)
A first optical waveguide, a first substrate on which the first optical waveguide is arranged, a pair of beam portions extending from opposite end portions of the first substrate, and a pair arranged at the end portions of the pair of beam portions. A first optical element having a contact portion of
The first optical waveguide has a second optical waveguide, the second optical waveguide is disposed, a second substrate having a thermal expansion coefficient smaller than that of the pair of beam portions, and the second substrate is disposed on the second substrate. The first substrate is arranged on the second substrate so as to be optically coupled to the second optical waveguide in the second optical element having a contact portion and a pair of contact receiving portions capable of contacting each other; The pair of beam portions extend in opposite directions from opposite ends of the first substrate so as to approach the second substrate, and the pair of contact receiving portions are disposed between the pair of contact portions. The pair of contact portions are in contact with the pair of contact receiving portions, and the pair of beam portions can pull the first substrate from both sides toward the second substrate. The first optical element.

10 Optical Coupling Module 20 First Optical Element 21 First Substrate 22 First Optical Waveguide 23 Beam Section 24 Abutting Section 24a First Side Surface 24b Second Side Surface 25 Slit 30 Second Optical Element 31 Second Substrate 32 Second Optical Waveguide 33 Projection (contact receiving part)
34 Groove 34a First side surface (contact receiving portion)
34b 2nd side surface 35 Groove part 35a 1st side surface 35b 2nd side surface (contact receiving part)
40 Adhesive Material 110 Optical Coupling Module 120 First Optical Element 121 First Substrate 122 First Optical Waveguide 123 Plug 130 Second Optical Element 131 Second Substrate 132 Second Optical Waveguide 133 Groove

Claims (9)

A first optical waveguide, a first substrate on which the first optical waveguide is arranged, a pair of beam portions extending from opposite end portions of the first substrate, and a pair arranged at the end portions of the pair of beam portions. A first optical element having a contact part of
A second optical waveguide, a second substrate on which the second optical waveguide is arranged, the thermal expansion coefficient of which is smaller than that of the pair of beam portions, and a pair which is arranged on the second substrate and contacts the pair of contact portions. A second optical element having a contact receiving portion of
Equipped with
The first substrate is disposed on the second substrate so that the first optical waveguide and the second optical waveguide are optically coupled, and each of the pair of beam portions is separated from the second substrate. Extending away from each opposite end of the first substrate in opposite directions,
The pair of contact portions are arranged between the pair of contact receiving portions and are in contact with the pair of contact receiving portions,
The pair of beam portions is an optical coupling module that pushes the first substrate from both sides toward the second substrate. A first optical waveguide, a first substrate on which the first optical waveguide is arranged, a pair of beam portions extending from opposite end portions of the first substrate, and a pair arranged at the end portions of the pair of beam portions. A first optical element having a contact part of
A second optical waveguide, a second substrate on which the second optical waveguide is arranged, the thermal expansion coefficient of which is smaller than that of the pair of beam portions, and a pair which is arranged on the second substrate and contacts the pair of contact portions. A second optical element having a contact receiving portion of
Equipped with
The first substrate is disposed on the second substrate so that the first optical waveguide and the second optical waveguide are optically coupled, and each of the pair of beam portions is provided on the second substrate. So as to approach, extending in opposite directions from respective opposite ends of the first substrate,
The pair of contact receiving portions are disposed between the pair of contact portions, and contact the pair of contact portions,
The pair of beam portions is an optical coupling module that pulls the first substrate from both sides toward the second substrate.   The optical coupling module according to claim 1, wherein each of the pair of contact receiving portions is a groove portion provided in the second substrate.   The optical coupling module according to claim 1, wherein each of the pair of contact receiving portions is a protruding portion protruding from the second substrate.   The optical coupling module according to claim 1, wherein the first substrate and the pair of contact portions have a coefficient of thermal expansion larger than that of the second substrate.   The optical coupling module according to claim 1, wherein a thermal expansion coefficient of the first substrate is smaller than that of the pair of beam portions.   The optical coupling module according to claim 1, wherein the pair of beam portions are arranged symmetrically with respect to the first substrate. A first optical waveguide, a first substrate on which the first optical waveguide is arranged, a pair of beam portions obliquely extending in opposite directions from opposite end portions of the first substrate, and ends of the pair of beam portions. A first optical element having a pair of abutting portions arranged in the section,
A second optical waveguide, a second substrate on which the second optical waveguide is arranged, the thermal expansion coefficient of which is smaller than that of the pair of beam portions, and a pair which is arranged on the second substrate and contacts the pair of contact portions. A second optical element having a contact receiving portion, and a distance between the pair of contact portions is shorter than a distance between the pair of contact receiving portions at a first temperature;
Using,
At the first temperature, the pair of contact portions are located between the pair of contact receiving portions, and the pair of beam portions are respectively separated from the second substrate while facing the end portions of the first substrate. The first optical element is disposed on the second optical element so that the first optical waveguide and the second optical waveguide face each other so as to extend in the opposite direction from
The pair of beam portions are heated to a second temperature higher than the first temperature, the pair of beam portions extend due to thermal expansion, and the pair of abutment portions receive the pair of abutment receivers. By abutting the first optical waveguide and the second optical waveguide, the pair of beam portions press the first substrate toward the second substrate from both sides to optically couple the first optical waveguide and the second optical waveguide. Module manufacturing method. A first optical waveguide, a first substrate on which the first optical waveguide is arranged, a pair of beam portions obliquely extending in opposite directions from opposite end portions of the first substrate, and ends of the pair of beam portions. A first optical element having a pair of abutting portions arranged in the section,
A second optical waveguide, a second substrate on which the second optical waveguide is arranged, the thermal expansion coefficient of which is smaller than that of the pair of beam portions, and a pair which is arranged on the second substrate and contacts the pair of contact portions. A second optical element in which the distance between the pair of contact portions is shorter than the distance between the pair of contact receiving portions at the first temperature,
Using,
The pair of beam portions are heated to a second temperature higher than the first temperature and the pair of beam portions are extended by thermal expansion, and the pair of beam portions are provided between the pair of contact portions. A contact receiving portion is located so that the pair of beam portions extend in opposite directions from respective opposite end portions of the first substrate while approaching the second substrate, and the first optical waveguide and the second optical waveguide. Arranging the first optical element on the second optical element so as to face the waveguide,
The pair of beam portions are cooled to a third temperature lower than the second temperature, the pair of beam portions are contracted by thermal contraction, and the pair of contact portions are the pair of contact receiving portions. The optical coupling module in which the pair of beam portions pulls the first substrate from both sides toward the second substrate, thereby optically coupling the first optical waveguide and the second optical waveguide. Manufacturing method.

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