JP6671660B2 - Power generation element - Google Patents

Description

  The present invention relates to a power generating element, and more particularly to a technique for generating power by converting vibration energy into electric energy.

  In order to effectively use limited resources, techniques for converting various forms of energy into electric energy and extracting the same have been proposed. One of the techniques is to convert vibration energy into electric energy and take it out. For example, in Patent Document 1 below, a piezoelectric element for power generation is formed by laminating layered piezoelectric elements, and the piezoelectric element for power generation is subjected to an external force. A piezoelectric power generating element that generates electric power by vibrating the piezoelectric element is disclosed. Patent Document 2 discloses a power generation element having a MEMS (Micro Electro Mechanical System) structure using a silicon substrate.

  On the other hand, Patent Literature 3 discloses a hammer head type structure in which a weight body is supported by a cantilever beam having one end fixed, and the weight body constituting the head portion is vibrated and arranged on a handle portion. A power generating element of a type in which power is generated by a power generating piezoelectric element is disclosed. Patent Document 4 discloses a piezoelectric element using a power generating element using the hammerhead-type structure and a structure that supports a weight body by an L-shaped plate-like bridge portion. .

The basic principle of these power generating elements is that vibration of the weight body causes periodic bending of the piezoelectric element, and charges generated based on stress applied to the piezoelectric element are taken out.
If such a power generation element is mounted on, for example, an automobile, a train, a ship, or the like, it becomes possible to extract vibration energy applied during transportation as electric energy. It is also possible to generate electricity by attaching it to a vibration source such as a refrigerator or an air conditioner.

JP-A-10-243667 JP 2011-152010 A US Patent Publication No. 2013/0154439 WO2015 / 033621

  As in the example described above, in the case of a power generating element that vibrates a weight body by vibration energy given from the outside and converts mechanical deformation caused by the vibration of the weight body into electric energy, in order to increase power generation efficiency, It is important to vibrate the weight body as efficiently as possible. However, in general, a mechanical resonance system has a specific resonance frequency determined according to its structure. If the frequency of vibration energy applied from the outside is close to the resonance frequency, the weight body is efficiently vibrated. However, if it is away from the resonance frequency, the weight body cannot be vibrated sufficiently.

  In the case of a power generating element having a MEMS structure as described in each of the above-mentioned patent documents, silicon or a metal is often used as a material of the mechanical structure. The frequency characteristic of a resonance system using such a material generally has a high peak value (Q value) at the resonance frequency, but has a tendency that the half width is narrow. This is because when the power generation element is used in a real environment, efficient power generation can be performed when the frequency of vibration given from the external environment is close to the resonance frequency inherent to the power generation element. If it is off, it means that sufficient power generation efficiency cannot be obtained.

  Normally, when designing a power generating element, a frequency of vibration that would be given from the outside in an actual use environment is assumed, and a device is devised so that a resonance frequency matches the assumed frequency. However, in an actual use environment, vibrations having various frequencies are mixed, and vibrations having a single frequency are not added. For this reason, even if the power generating element is designed assuming a specific vibration frequency, there are many cases where vibration including an unexpected frequency is applied in an actual use environment. In addition, since the resonance frequency of the structural portion made of silicon or metal also fluctuates due to external stress and temperature, even if vibration having the frequency expected at the time of design is given, efficient power generation is always performed. Not necessarily.

  Therefore, an object of the present invention is to provide a power generation element capable of expanding a frequency band in which power can be generated and efficiently generating power in various use environments.

(1) A first aspect of the present invention is a power generating element that generates power by converting vibration energy into electric energy,
The first flexible plate-like structure, the second flexible plate-like structure, and the first plate-like structure and the second plate-like structure are interconnected. A basic structure portion having a heterogeneous connection body connected to the base member and a pedestal supporting the plate-like structure having the first attribute;
A charge generating element that generates a charge based on the deformation of the basic structure,
Is established,
When the XYZ three-dimensional coordinate system is defined, the first attribute plate-like structure and the second attribute plate-like structure are arranged such that their plate surfaces are parallel to the XY plane,
The plate-like structure of the first attribute has a root end directly or indirectly connected to the pedestal, a tip end directly or indirectly connected to the intergeneric connector, and Extending in a direction parallel to the Y axis so that the direction toward the portion is the Y axis positive direction,
The plate-shaped structure of the second attribute has a root end directly or indirectly connected to the heterogeneous connector, and has a Y-axis negative direction so that the direction from the root end to the tip is the Y-axis negative direction. It extends in a direction parallel to the axis.

(2) A second aspect of the present invention provides the power generating element according to the first aspect described above,
The basic structure portion further includes a flexible plate-like structure having a third attribute, and a second structure interconnecting the plate-like structure having the third attribute and the plate-like structure having the second attribute. And an intergeneric connector,
The tip of the plate-shaped structure having the second attribute is directly or indirectly connected to the second inter-species connector,
The plate-like structure of the third attribute is arranged such that its plate surface is a plane parallel to the XY plane, and the root end is directly or indirectly connected to the second heterogeneous connector. It extends in a direction parallel to the Y axis so that the direction from the root end to the tip is the positive direction of the Y axis.

(3) A third aspect of the present invention provides the power generating element according to the first aspect described above,
The basic structure further includes a flexible plate-like structure having a third attribute to a plate-like structure having an n-th attribute (where n is an arbitrary natural number satisfying n ≧ 4), A (i-1) th heterogeneous connector connecting the plate-like structure and the plate-like structure having the (i-1) th attribute (where i is each natural number satisfying 3 ≦ i ≦ n); ,
The plate-like structure having the i-th attribute is arranged such that the plate surface thereof is parallel to the XY plane, and the root end is directly or indirectly connected to the (i-1) th heterogeneous connector. The tip is directly or indirectly connected to the i-th interspecies connector, or is a free end, and the direction from the root end to the tip is an odd number of i The case extends in a direction parallel to the Y axis so that the case is the positive direction of the Y axis, and if i is an even number, the direction is the negative direction of the Y axis.

(4) A fourth aspect of the present invention provides the power generating element according to the first to third aspects described above,
A plurality of plate-like structures having the same attribute and arranged in parallel so as to be parallel to each other are provided.

(5) A fifth aspect of the present invention provides the power generating element according to the first to fourth aspects described above,
A plurality of plate-like structures having the same attribute and arranged in series via an inter-general connector are provided.

(6) A sixth aspect of the present invention provides the power generating element according to the first to fifth aspects described above,
The heterogeneous connector or the homogeneous connector or both have an orthogonal portion extending in a direction orthogonal to the YZ plane, and a root end or a tip portion of a plate-like structure extending in a direction parallel to the Y axis. Is connected to a predetermined portion on the side surface of the orthogonal portion.

(7) A seventh aspect of the present invention is the power generating element according to the first to sixth aspects described above,
In this structure, a foremost end connecting member is connected to a tip end of a foremost plate-like structure.

(8) An eighth aspect of the present invention provides the power generating element according to the seventh aspect described above,
A foremost connector is provided which has the same attribute and interconnects the distal ends of a plurality of plate-like structures arranged in parallel so as to be parallel to each other.

(9) A ninth aspect of the present invention is the power generating element according to the first to eighth aspects described above,
When the basic structure portion has a main substrate having a plate surface parallel to the XY plane, and has a plate-shaped structure and a heterogeneous connector, and a homogenous connector, the homogenous connector, In the case of having a partial connection body, the foremost part connection body is constituted by a part of the main substrate.

  (10) The tenth aspect of the present invention is the power generation element according to the first to ninth aspects, wherein the basic structure portion includes a predetermined portion of the plate-like structure, a predetermined portion of the heterogeneous connector, It has a weight connected to at least one of a predetermined portion of the inter-connector and a predetermined portion of the foremost end connector.

(11) An eleventh aspect of the present invention is the power generating element according to the tenth aspect described above,
It has an orthogonal part extending in a direction orthogonal to the YZ plane, a positive wing part and a negative wing part extending from the orthogonal part in a direction parallel to the Y axis, and the projected image on the XY plane is U-shaped. By a U-shaped plate-shaped member having a shape of a shape, constitutes at least a part of the intergeneric connector, the intergeneric connector, and the foremost connector,
Taking the XY plane as a horizontal plane and defining a space having a positive X coordinate value as a positive space and a space having a negative X coordinate value as a negative space among spaces partitioned by the YZ plane,
The orthogonal portion is disposed at a position straddling the positive space and the negative space, the positive wing portion is disposed in the positive space, and the negative wing portion is disposed in the negative space. The weight body is arranged so as to extend all over the lower part of the side wing and the lower part of the negative wing.

(12) A twelfth aspect of the present invention is the power generating element according to the first to eleventh aspects,
Regarding a first resonance system that generates vibration due to the deformation of the plate-like structure having the first attribute, and a second resonance system that generates vibration due to the deformation of the plate-like structure having the second attribute, The spring constant of the first resonance system is set to be different from the spring constant of the second resonance system.

(13) A thirteenth aspect of the present invention provides the power generating element according to the twelfth aspect,
In a state where the pedestal is fixed, when a force F is applied in a predetermined action direction to the heterogeneous connector, a displacement generated in the above-described operating direction of the heterogeneous connector is d1, and k1 = F / d1. Is defined as the spring constant of the first resonance system,
When the force F is applied to the vibrating end of the plate-like structure of the second attribute in the above-mentioned working direction in a state where the heterogeneous connector is fixed, the displacement generated in the above-mentioned working direction of the vibrating end is d2, and k2 = F / d2 is defined as a spring constant of the second resonance system.

(14) A fourteenth aspect of the present invention provides the power generating element according to the twelfth or thirteenth aspect,
By changing one or more of the four parameters of the thickness, width, length, and material of at least two sets among the plurality of plate-like structures included in the basic structure portion, Are set so that the spring constant of the resonance system is different from the spring constant of the second resonance system.

(15) A fifteenth aspect of the present invention is the power generating element according to the first aspect described above,
A central plate-like structure having a first attribute, a positive plate-like structure and a negative plate-like structure having a second attribute, a central plate-like structure, a positive plate-like structure, and a negative plate-like structure; Having a heterogeneous connector connecting the structure and a pedestal supporting the central plate-shaped structure,
Taking the XY plane as a horizontal plane and defining a space having a positive X coordinate value as a positive space and a space having a negative X coordinate value as a negative space among spaces partitioned by the YZ plane,
The central plate-shaped structure is disposed on the YZ plane, the root end is directly or indirectly connected to the pedestal, and the tip end is directly or indirectly connected to the heterogeneous connector. , Extending in a direction parallel to the Y-axis so that the direction from the root end to the tip is the Y-axis positive direction, the positive-side plate-shaped structure is disposed in the positive-side space, Are directly or indirectly connected to the intergeneric connector, and extend in a direction parallel to the Y axis so that the direction from the root end to the tip is the Y axis negative direction,
The negative-side plate-like structure is disposed in the negative-side space, and the root end is directly or indirectly connected to the heterogeneous connector, and the direction from the root end to the tip is the Y-axis negative direction. It extends in a direction parallel to the Y-axis so that

(16) A sixteenth aspect of the present invention is directed to the power generating element according to the fifteenth aspect,
The basic structure further includes a first weight connected to the intergeneric connector, a second weight connected to the tip of the positive plate, and a negative plate. And at least one of a third weight body connected to the distal end.

(17) A seventeenth aspect of the present invention provides the power generating element according to the fifteenth aspect described above,
The basic structure further connects a first weight connected to the heterogeneous connector to a lower surface of the distal end of the positive plate-shaped structure and a lower surface of the distal end of the negative plate-shaped structure. And a weight body,
The second weight body moves below the central plate-shaped structure or a support member for supporting the root end of the central plate-shaped structure on the pedestal with respect to the central plate-shaped structure or the support member. It has a U-shaped structure so as to straddle while maintaining a predetermined distance.

(18) An eighteenth aspect of the present invention provides the power generation element according to the first aspect described above,
The basic structure portion includes a positive plate-like structure and a negative plate-like structure having a first attribute, a central plate-like structure having a second attribute, a positive plate-like structure, a negative plate-like structure, and a central plate-like structure. Heterogeneous connector for connecting the structure, and a pedestal supporting the positive plate-shaped structure and the negative plate-shaped structure,
Taking the XY plane as a horizontal plane and defining a space having a positive X coordinate value as a positive space and a space having a negative X coordinate value as a negative space among spaces partitioned by the YZ plane,
The positive-side plate-like structure is disposed in the positive-side space, the root end is directly or indirectly connected to the pedestal, and the distal end is directly or indirectly connected to the heterogeneous connector. , Extending in a direction parallel to the Y axis so that the direction from the root end toward the tip is the positive direction of the Y axis,
The negative-side plate-like structure is disposed in the negative-side space, the root end is directly or indirectly connected to the pedestal, and the tip is directly or indirectly connected to the heterogeneous connector. , Extending in a direction parallel to the Y axis so that the direction from the root end toward the tip is the positive direction of the Y axis,
The central plate-shaped structure is disposed on the YZ plane, and the root end is directly or indirectly connected to the heterogeneous connector, and the direction from the root end to the tip is the Y-axis negative direction. It extends in a direction parallel to the Y-axis so that

(19) A nineteenth aspect of the present invention is the power generating element according to the eighteenth aspect,
The basic structure further includes at least one of a first weight connected to the intergeneric connector, and a second weight connected to the tip of the central plate-shaped structure. Is provided.

(20) A twentieth aspect of the present invention is the power generating element according to the first aspect,
The basic structure portion includes a first positive side plate structure and a first negative side plate structure having a first attribute, and a second positive side plate structure and a second negative side plate structure having a second attribute. A body, a heterogeneous connector for connecting the first positive-side plate structure, the first negative-side plate-like structure, the second positive-side plate-like structure, and the second negative-side plate-like structure; And a pedestal supporting the first positive plate-shaped structure and the second negative plate-shaped structure.
Taking the XY plane as a horizontal plane and defining a space having a positive X coordinate value as a positive space and a space having a negative X coordinate value as a negative space among spaces partitioned by the YZ plane,
The first positive-side plate-like structure is disposed in the positive-side space, the root end is directly or indirectly connected to the pedestal, and the distal end is directly or indirectly connected to the heterogeneous connector. It extends in a direction parallel to the Y axis so that the direction from the root end to the tip is the positive direction of the Y axis,
The first negative-side plate-like structure is disposed in the negative-side space, and has a root end directly or indirectly connected to the pedestal and a front end directly or indirectly connected to the heterogeneous connector. It extends in a direction parallel to the Y axis so that the direction from the root end to the tip is the positive direction of the Y axis,
The second front-side plate-shaped structure is disposed in the front-side space, the root end is directly or indirectly connected to the intergeneric connector, and the direction from the root end to the front end is Y. Extending in a direction parallel to the Y axis so as to be in the negative axis direction,
The second negative-side plate-shaped structure is disposed in the negative-side space, the root end is directly or indirectly connected to the heterogeneous connector, and the direction from the root end to the distal end is Y. It extends in a direction parallel to the Y axis so as to be in the negative axis direction.

(21) A twenty-first aspect of the present invention provides the power generating element according to the twentieth aspect described above,
A first weight connected to the heterogeneous connector, a second weight connected to the tip of the second positive-side plate-like structure, And a third weight connected to the distal end of the negative-side plate-like structure.

(22) A twenty-second aspect of the present invention provides the power generating element according to the twentieth aspect described above,
The basic structure further includes a foremost end connection body connected to both a front end of the second positive side plate-like structure and a front end of the second negative side plate-like structure; At least one of a first weight connected to the body and a second weight connected to the foremost end connection body is provided.

(23) A twenty-third aspect of the present invention provides the power generating element according to the first aspect described above,
The basic structure portion includes a first positive side plate structure and a first negative side plate structure having a first attribute, and a second positive side plate structure and a second negative side plate structure having a second attribute. Body, a central plate-like structure having a third attribute, a first positive plate-like structure, a first negative plate-like structure, a second positive plate-like structure, and a second negative plate-like structure A second heterogeneous connector connecting the second positive-side plate-like structure, the second negative-side plate-like structure, and the central plate-like structure; And a pedestal that supports the first positive-side plate-shaped structure and the first negative-side plate-shaped structure.
Taking the XY plane as a horizontal plane and defining a space having a positive X coordinate value as a positive space and a space having a negative X coordinate value as a negative space among spaces partitioned by the YZ plane,
The first front-side plate-like structure is disposed in the front-side space, the root end is directly or indirectly connected to the pedestal, and the tip end is directly or indirectly connected to the first heterogeneous connector. Are connected to each other, and extend in a direction parallel to the Y axis so that the direction from the root end toward the tip is the Y axis positive direction,
The first negative plate-shaped structure is disposed in the negative space, and has a root end directly or indirectly connected to the pedestal, and a tip end directly or indirectly connected to the first heterogeneous connector. Are connected to each other, and extend in a direction parallel to the Y axis so that the direction from the root end toward the tip is the Y axis positive direction,
The second front-side plate-like structure is disposed in the front-side space, and has a root end directly or indirectly connected to the first interspecies connector, and a tip end connected to the second heterogeneous connection. It is directly or indirectly connected to the interconnector, and extends in a direction parallel to the Y axis so that the direction from the root end to the tip is the Y axis negative direction,
The second negative plate-shaped structure is disposed in the negative space, the root end is directly or indirectly connected to the first heterogeneous connector, and the distal end is connected to the second heterogeneous connection. It is directly or indirectly connected to the interconnector, and extends in a direction parallel to the Y axis so that the direction from the root end to the tip is the Y axis negative direction,
The central plate-shaped structure is disposed on the YZ plane, the root end is directly or indirectly connected to the second heterogeneous connector, and the direction from the root end to the distal end is Y. It extends in a direction parallel to the Y axis so as to be in the positive axis direction.

(24) A twenty-fourth aspect of the present invention provides the power generating element according to the twenty-third aspect,
The basic structure further includes a first weight connected to the first inter-connector, a second weight connected to the second inter-connector, and a central plate-shaped member. And a third weight connected to the distal end of the structure.

(25) A twenty-fifth aspect of the present invention is the power generating element according to the first aspect described above,
A first central plate-like structure having a first attribute, a positive-side plate-like structure, a negative-side plate-like structure having a first attribute, a second central plate-like structure having a second attribute, A connecting member for connecting the central plate-shaped structure to the positive-side plate-shaped structure and the negative-side plate-shaped structure, and connecting the positive-side plate-shaped structure and the negative-side plate-shaped structure to the second central plate-shaped structure And a pedestal supporting the first central plate-shaped structure,
Taking the XY plane as a horizontal plane and defining a space having a positive X coordinate value as a positive space and a space having a negative X coordinate value as a negative space among spaces partitioned by the YZ plane,
The first central plate-shaped structure is disposed on the YZ plane, the root end is directly or indirectly connected to the pedestal, and the tip end is directly or indirectly connected to the inter-general connector. It extends in a direction parallel to the Y axis so that the direction from the root end to the tip is the positive direction of the Y axis,
The positive-side plate-like structure is disposed in the positive-side space, and the root end is directly or indirectly connected to the intergeneric connector, and the tip is directly or indirectly connected to the heterogeneous connector. It extends in a direction parallel to the Y axis so that the direction from the root end to the tip is the positive direction of the Y axis,
The negative plate-like structure is arranged in the negative space, and the root end is directly or indirectly connected to the intergeneric connector, and the tip is directly or indirectly connected to the heterogeneous connector. It extends in a direction parallel to the Y axis so that the direction from the root end to the tip is the positive direction of the Y axis,
The second central plate-shaped structure is disposed on the YZ plane, the root end is directly or indirectly connected to the heterogeneous connector, and the direction from the root end to the distal end is Y. It extends in a direction parallel to the Y axis so as to be in the negative axis direction.

(26) A twenty-sixth aspect of the present invention is the power generating element according to the twenty-fifth aspect described above,
The basic structure further includes a first weight connected to the intergeneric connector, a second weight connected to the heterogeneous connector, and a tip of the second central plate-shaped structure. And a third weight body connected to the portion.

(27) A twenty-seventh aspect of the present invention provides the power generating element according to the twenty-sixth aspect,
Having all of a first weight, a second weight, and a third weight,
A tip end connector connected to the tip of the second central plate-shaped structure,
The intergeneric connector has an orthogonal portion extending in a direction orthogonal to the YZ plane, a positive wing portion and a negative wing portion extending from the orthogonal portion in the negative Y-axis direction, and is projected onto the XY plane. The image is constituted by a plate-shaped member having a U-shape,
The foremost end connector has an orthogonal portion extending in a direction orthogonal to the YZ plane, a positive wing portion and a negative wing portion extending in the Y-axis positive direction from the orthogonal portion, and The projection image is constituted by a plate-shaped member having a U-shape,
The first weight is connected to all the lower surfaces of the orthogonal portion, the positive wing portion, and the negative wing portion of the intergeneric connector, and is constituted by a structure whose projected image on the XY plane has a U-shape. And
The third weight body is connected to all the lower surfaces of the orthogonal portion, the positive wing portion, and the negative wing portion of the front end connection body, and the projected image on the XY plane has a U-shaped configuration. It is configured as such.

(28) A twenty-eighth aspect of the present invention relates to a power generating element that generates power by converting vibration energy into electric energy,
The first flexible plate-like structure, the second flexible plate-like structure, and the first plate-like structure and the second plate-like structure are interconnected. A basic structure portion having a heterogeneous connection body connected to the base member and a pedestal supporting the plate-like structure having the first attribute;
A charge generating element that generates a charge based on the deformation of the basic structure,
Is established,
When the XYZ three-dimensional coordinate system is defined, the first attribute plate-like structure and the second attribute plate-like structure are arranged such that their plate surfaces are parallel to the XY plane,
The plate-like structure of the first attribute has a root end directly or indirectly connected to the pedestal, a tip end directly or indirectly connected to the heterogeneous connector, and at least a portion thereof, A first attribute Y-axis path portion extending in a direction parallel to the Y-axis so that the direction from the root end toward the tip is the Y-axis positive direction;
In the plate-like structure of the second attribute, the root end is directly or indirectly connected to the intergeneric connector, and at least a part thereof has a direction from the root end to the front end which is defined as a negative Y-axis direction. In this case, a second attribute Y-axis path portion extending in a direction parallel to the Y-axis is included.

(29) A twenty-ninth aspect of the present invention provides the power generating element according to the twenty-eighth aspect described above,
A plurality of plate-like structures having the same attribute and arranged in parallel with each other are provided.

(30) A thirtieth aspect of the present invention is the power generating element according to the twenty-eighth or twenty-ninth aspect,
In this structure, a foremost end connecting member is connected to the tip of the foremost plate-like structure.

(31) According to a thirty-first aspect of the present invention, in the power generating element according to the thirtieth aspect,
A forefront connector having the same attribute and interconnecting the distal ends of a plurality of plate-like structures arranged in parallel with each other is provided.

(32) A thirty-second aspect of the present invention provides the power generating element according to the twenty-eighth to thirty-first aspects described above,
When the basic structure portion has a main substrate having a plate surface parallel to the XY plane, the plate-like structure and the inter-heterogeneous connector, and when having the foremost connector, the foremost connector is , And a part of the main substrate.

(33) A thirty-third aspect of the present invention is the power generating element according to the twenty-eighth to thirty-second aspects described above,
The basic structure portion has a weight connected to at least one of a predetermined portion of the plate-shaped structure, a predetermined portion of the connector between heterogeneous members, and a predetermined portion of the front end portion of the connection body. is there.

(34) A thirty-fourth aspect of the present invention provides the power generating element according to the twenty-eighth aspect described above,
One or both of the plate-like structure of the first attribute and the plate-like structure of the second attribute include an X-axis path extending in a direction parallel to the X-axis and a Y-axis path extending in a direction parallel to the Y-axis. , And the projected image on the XY plane has an L-shaped portion having an L-shaped shape.

(35) A thirty-fifth aspect of the present invention is the power generating element according to the thirty-fourth aspect,
The basic structure portion includes a first positive side plate structure and a first negative side plate structure having a first attribute, and a second positive side plate structure and a second negative side plate structure having a second attribute. A body, a heterogeneous connector for connecting the first positive-side plate structure, the first negative-side plate-like structure, the second positive-side plate-like structure, and the second negative-side plate-like structure; A pedestal that supports the first positive plate-shaped structure and the first negative plate-shaped structure, and a leading end that interconnects the tips of the second positive plate-shaped structure and the second negative plate-shaped structure. And a connecting body,
Taking the XY plane as a horizontal plane and defining a space having a positive X coordinate value as a positive space and a space having a negative X coordinate value as a negative space among spaces partitioned by the YZ plane,
The first positive-side plate-like structure is disposed in the positive-side space, the root end is directly or indirectly connected to the pedestal, and the distal end is directly or indirectly connected to the heterogeneous connector. It extends in a direction parallel to the Y axis so that the direction from the root end to the tip is the positive direction of the Y axis,
The first negative-side plate-like structure is disposed in the negative-side space, and has a root end directly or indirectly connected to the pedestal and a front end directly or indirectly connected to the heterogeneous connector. It extends in a direction parallel to the Y axis so that the direction from the root end to the tip is the positive direction of the Y axis,
The second positive-side plate-shaped structure is disposed in the positive-side space and includes a positive-side X-axis path extending in a direction parallel to the X-axis and a positive-side Y-axis path extending in a direction parallel to the Y-axis. The root end of the positive-side X-axis path is directly or indirectly connected to the heterogeneous connector, and the tip of the positive-side X-axis path is the root of the positive-side Y-axis path. The tip of the positive-side Y-axis path portion is directly or indirectly connected to the foremost end connector, and the second positive-side plate-like structure is a projection image on the XY plane. Has an L-shape,
The second negative plate-shaped structure is disposed in the negative space, and includes a negative X-axis path portion extending in a direction parallel to the X axis and a negative Y axis path portion extending in a direction parallel to the Y axis. The root end of the negative X-axis path is directly or indirectly connected to the heterogeneous connector, and the tip of the negative X-axis path is the root of the negative Y-axis path. The distal end of the negative Y-axis path portion is directly or indirectly connected to the foremost end connector, and the second negative plate-shaped structure is a projection image on the XY plane. Are L-shaped.

(36) A thirty-sixth aspect of the present invention is the power generating element according to the thirty-fourth aspect,
The basic structure portion includes a first positive side plate structure and a first negative side plate structure having a first attribute, and a second positive side plate structure and a second negative side plate structure having a second attribute. A body, a heterogeneous connector for connecting the first positive-side plate structure, the first negative-side plate-like structure, the second positive-side plate-like structure, and the second negative-side plate-like structure; A pedestal that supports the first positive plate-shaped structure and the first negative plate-shaped structure, and a leading end that interconnects the tips of the second positive plate-shaped structure and the second negative plate-shaped structure. And a connecting body,
Taking the XY plane as a horizontal plane and defining a space having a positive X coordinate value as a positive space and a space having a negative X coordinate value as a negative space among spaces partitioned by the YZ plane,
The first positive-side plate-shaped structure is disposed in the positive-side space, and has a first positive-side Y-axis path portion extending in a direction parallel to the Y-axis and a first positive side extending in a direction parallel to the X-axis. An X-axis path portion, and a root end of the first positive-side Y-axis path portion is directly or indirectly connected to the pedestal. The first positive X-axis path is connected to the root end of the first positive-side X-axis path, and the distal end of the first positive-side X-axis path is directly or indirectly connected to the heterogeneous connector. The positive side plate-like structure has an L-shaped projected image on the XY plane,
The first negative-side plate-shaped structure is disposed in the negative-side space, and has a first negative-side Y-axis path portion extending in a direction parallel to the Y-axis and a first negative-side portion extending in a direction parallel to the X-axis. An X-axis path section, a root end of the first negative Y-axis path section is directly or indirectly connected to the pedestal, and a tip end of the first negative Y-axis path section is The first positive X-axis path is connected to the root end of the first positive X-axis path, and the distal end of the first negative X-axis path is directly or indirectly connected to the heterogeneous connector. The negative side plate-like structure has an L-shaped projected image on the XY plane,
The second positive-side plate-like structure is disposed in the positive-side space, and has a second positive-side X-axis path extending in a direction parallel to the X-axis and a second positive-side path extending in a direction parallel to the Y-axis. A root end of the second positive-side X-axis path portion is directly or indirectly connected to the heterogeneous connector, and has a Y-axis path portion. The distal end is connected to the root end of the second positive Y-axis path, and the distal end of the second positive Y-axis path is directly or indirectly connected to the distal end connector. The second front-side plate-like structure has an L-shaped projection image on the XY plane,
The second negative-side plate-like structure is disposed in the negative-side space, and has a second negative-side X-axis path portion extending in a direction parallel to the X-axis and a second negative-side path extending in a direction parallel to the Y-axis. A root end of the second negative X-axis path portion is directly or indirectly connected to the heterogeneous connector, and has a Y-axis path portion. The distal end is connected to the root end of the second negative Y-axis path, and the distal end of the second negative Y-axis path is directly or indirectly connected to the distal end connector. The second negative-side plate-like structure is such that the projected image on the XY plane forms an L-shape.

(37) A thirty-seventh aspect of the present invention is the power generating element according to the twenty-eighth aspect described above,
One or both of the plate-like structure of the first attribute and the plate-like structure of the second attribute include an X-axis path extending in a direction parallel to the X-axis and a Y-axis path extending in a direction parallel to the Y-axis. And a curved connecting portion that connects the X-axis route portion and the Y-axis route portion with a curved route, such that the projected image on the XY plane has a J-shaped portion. It was made.

(38) A thirty-eighth aspect of the present invention provides the power generating element according to the thirty-seventh aspect,
The basic structure portion includes a first positive side plate structure and a first negative side plate structure having a first attribute, and a second positive side plate structure and a second negative side plate structure having a second attribute. A body, a heterogeneous connector for connecting the first positive-side plate structure, the first negative-side plate-like structure, the second positive-side plate-like structure, and the second negative-side plate-like structure; A pedestal that supports the first positive plate-shaped structure and the first negative plate-shaped structure, and a leading end that interconnects the tips of the second positive plate-shaped structure and the second negative plate-shaped structure. And a connecting body,
Taking the XY plane as a horizontal plane and defining a space having a positive X coordinate value as a positive space and a space having a negative X coordinate value as a negative space among spaces partitioned by the YZ plane,
The first positive-side plate-like structure is disposed in the positive-side space, the root end is directly or indirectly connected to the pedestal, and the distal end is directly or indirectly connected to the heterogeneous connector. It extends in a direction parallel to the Y axis so that the direction from the root end to the tip is the positive direction of the Y axis,
The first negative-side plate-like structure is disposed in the negative-side space, and has a root end directly or indirectly connected to the pedestal and a front end directly or indirectly connected to the heterogeneous connector. It extends in a direction parallel to the Y axis so that the direction from the root end to the tip is the positive direction of the Y axis,
The second positive-side plate-like structure is disposed in the positive-side space, and includes a positive-side X-axis path portion extending in a direction parallel to the X-axis, and a positive-side Y-axis path portion extending in a direction parallel to the Y-axis. A positive-side curved connecting portion that connects the positive-side X-axis path portion and the positive-side Y-axis path portion with a curved path, wherein the root end of the positive-side X-axis path portion is Directly or indirectly, the tip of the positive X-axis path is connected to the root end of the positive Y-axis path by a positive curved connection, and the tip of the positive Y-axis path is connected. The part is directly or indirectly connected to the foremost end connector, and the second front-side plate-like structure has a J-shaped projected image on the XY plane,
The second negative plate-shaped structure is disposed in the negative space, and includes a negative X-axis path portion extending in a direction parallel to the X axis and a negative Y axis path portion extending in a direction parallel to the Y axis. A negative-side curved connecting portion that connects the negative-side X-axis route portion and the negative-side Y-axis route portion with a curved route, wherein the root end of the negative-side X-axis route portion is connected to a heterogeneous connector. Directly or indirectly, the distal end of the negative X-axis path is connected to the root end of the negative Y-axis path by a negative curved connection, and the distal end of the negative Y-axis path is connected. The portion is directly or indirectly connected to the leading end connector, and the second negative-side plate-like structure is such that the projected image on the XY plane has a J-shape.

(39) A thirty-ninth aspect of the present invention is the power generating element according to the twenty-eighth aspect described above,
A root-side path extending in a direction parallel to the Y-axis, a relay path extending in a direction parallel to the X-axis, and a distal-side path extending in a direction parallel to the Y-axis. By connecting the root end side path portion, the relay path portion, and the front end side path portion in order from the root end to the tip end, the projected image on the XY plane forms a U-shape. It has a U-shaped portion.

(40) A fortieth aspect of the present invention is the power generating element according to the forty-ninth aspect,
The basic structure portion includes a first positive side plate structure and a first negative side plate structure having a first attribute, and a second positive side plate structure and a second negative side plate structure having a second attribute. A body, a heterogeneous connector for connecting the first positive-side plate structure, the first negative-side plate-like structure, the second positive-side plate-like structure, and the second negative-side plate-like structure; A pedestal that supports the first positive plate-shaped structure and the first negative plate-shaped structure, and a leading end that interconnects the tips of the second positive plate-shaped structure and the second negative plate-shaped structure. And a connecting body,
Taking the XY plane as a horizontal plane and defining a space having a positive X coordinate value as a positive space and a space having a negative X coordinate value as a negative space among spaces partitioned by the YZ plane,
The first positive-side plate-like structure is disposed in the positive-side space, the root end is directly or indirectly connected to the pedestal, and the distal end is directly or indirectly connected to the heterogeneous connector. It extends in a direction parallel to the Y axis so that the direction from the root end to the tip is the positive direction of the Y axis,
The first negative-side plate-like structure is disposed in the negative-side space, and has a root end directly or indirectly connected to the pedestal and a front end directly or indirectly connected to the heterogeneous connector. It extends in a direction parallel to the Y axis so that the direction from the root end to the tip is the positive direction of the Y axis,
The second positive-side plate-shaped structure is disposed in the positive-side space, and includes a positive-side root end-side path extending in a direction parallel to the Y-axis, a positive-side relay path extending in a direction parallel to the X-axis, A root end portion of the positive root end side path portion extending in a direction parallel to the Y axis, wherein the root end portion of the positive root end side path portion is directly or indirectly connected to the intergeneric connector, The tip of the side route portion is connected to the root end of the positive relay route portion, and the tip portion of the positive relay route portion is connected to the root end of the positive tip route portion. The tip of the side tip-side path portion is directly or indirectly connected to the tip end connector, and the second front-side plate-like structure has a U-shaped projection image on the XY plane. ,
The second negative plate-shaped structure is disposed in the negative space, and has a negative root end side path extending in a direction parallel to the Y axis, a negative relay path extending in a direction parallel to the X axis, and A negative-side tip end portion extending in a direction parallel to the Y-axis, wherein the root end of the negative-side root end portion is directly or indirectly connected to the heterogeneous connector; The tip of the side route portion is connected to the root end of the negative relay route portion, and the tip portion of the negative relay route portion is connected to the root end of the negative tip route portion. The distal end of the side distal path portion is directly or indirectly connected to the distal end connector, and the second negative plate-shaped structure has a U-shaped projected image projected on the XY plane. It is like that.

(41) A power generating element according to the forty-fifth, thirty-six, thirty-eighth aspects,
The basic structure further includes at least one of a first weight connected to the intergeneric connector and a second weight connected to the foremost connector. It is.

(42) A 42nd mode of the present invention is the power generating element according to the above 1st to 41st modes,
The basic structure is constituted by a structure that is plane-symmetric with respect to the YZ plane.

  (43) According to a forty-third aspect of the present invention, the basic structural portion which is a component of the power generating element according to the first to forty-second aspects is provided as a single component.

(44) A forty-fourth aspect of the present invention provides the power generating element according to the tenth to fourteenth, sixteenth, seventeenth, nineteenth, twenty-second, twenty-fourth, twenty-six, twenty-seventh, thirty-ninth aspects,
The basic structure portion includes a weight connected to the vibrating end of the plate-like structure having the first attribute, and a weight connected to the vibrating end of the plate-like structure having the second attribute. The resonance frequencies of the weights are set to be adjacent so that the spectral peak waveforms near the resonance frequencies of these two types of weights partially overlap each other.

(45) A forty-fifth aspect of the present invention is the power generating element according to the tenth to fourteenth, sixteenth, seventeenth, nineteenth, twenty-second, twenty-fourth, twenty-six, twenty-seventh, thirty-ninth aspects,
The basic structure is configured using an SOI substrate having a three-layer structure in which a silicon active layer, a silicon oxide layer, and a silicon base layer are stacked in this order,
The plate-shaped structure and the heterogeneous connector, and the homogenous connector when having the intergeneric connector, the frontmost connector when having the foremost connector, a single layer of the silicon active layer A structure or a two-layer structure of a silicon active layer and a silicon oxide layer,
The weight body is constituted by a two-layer structure of a silicon oxide layer and a silicon base layer or a single-layer structure of a silicon base layer;
The pedestal is constituted by a three-layer structure of a silicon active layer, a silicon oxide layer and a silicon base layer.

(46) A forty-sixth aspect of the present invention is a power generating element according to the tenth to fourteenth, sixteenth, seventeenth, nineteenth, twenty-second, twenty-fourth, twenty-six, twenty-seventh, thirty-ninth aspects,
An apparatus housing for accommodating the basic structure is further provided,
The pedestal is fixed to the device housing or is incorporated as a part of the device housing. A predetermined space is provided between the inner surface of the device housing and the outer surfaces of the plate-shaped structure and the weight body. Space is secured,
When the magnitude of the external vibration applied to the device housing is equal to or less than a predetermined reference level, the plate-like structure and the weight body vibrate in the space according to the external vibration,
When the magnitude of the external vibration exceeds a predetermined reference level, the plate-like structure and the weight contact the inner surface of the device housing according to the external vibration, and further displacement is limited. It is like that.

(47) A forty-seventh aspect of the present invention is directed to the power generating element according to the first to forty-sixth aspects,
The charge generation element has a piezoelectric element formed in a portion where the deformation of the plate-like structure occurs.

(48) A forty-eighth aspect of the present invention is directed to the power generating element according to the forty-seventh aspect,
A piezoelectric element, a lower electrode layer formed on the upper surface of the plate-shaped structure, a piezoelectric material layer formed on the upper surface of the lower electrode layer, and generating a charge based on stress, and a piezoelectric material layer formed on the upper surface of the piezoelectric material layer; And an upper electrode layer provided so that a charge of a predetermined polarity is supplied to each of the lower electrode layer and the upper electrode layer.

(49) A forty-ninth aspect of the present invention provides the power generating element according to the forty-eighth aspect described above,
A common lower electrode layer is formed on the upper surface of the plate-like structure, a common piezoelectric material layer is formed on the upper surface of the common lower electrode layer, and a plurality of electrically independent plural portions are formed at different positions on the upper surface of the common piezoelectric material layer. When the individual upper electrode layers are formed and the plate-shaped structure undergoes a specific deformation, electric charges of the same polarity are supplied to the individual upper electrode layers from the piezoelectric material layers.

(50) A fiftieth aspect of the present invention provides the power generating element according to the forty-ninth aspect,
When a central axis extending in a direction parallel to the Y axis is defined at the center of the upper surface of the plate-like structure, the central axis on both sides of the central axis on the root end side and the central axis on the tip side are respectively In this case, individual upper electrode layers are arranged.

(51) A 51st mode of the present invention is the power generating element according to the 49th or 50th mode described above,
A power generation circuit for rectifying a current generated between the common lower electrode layer and each of the individual upper electrode layers based on the electric charge generated in the piezoelectric element and extracting power therefrom is further provided.

(52) A 52nd aspect of the present invention is the power generating element according to the above 51st aspect,
The power generation circuit is for a capacitor element and a positive charge having a forward direction from each individual upper electrode layer toward the positive electrode side of the capacitor element for guiding the positive charge generated in each individual upper electrode layer to the positive electrode side of the capacitor element. A rectifying element, a rectifying element for negative charge having a forward direction from the negative electrode side of the capacitive element to each individual upper electrode layer in order to guide the negative charge generated in each individual upper electrode layer to the negative electrode side of the capacitive element, And the electrical energy converted from the vibration energy is smoothed by a capacitive element and supplied.

(53) A fifty-third aspect of the present invention relates to a power generating element that generates power by converting vibration energy into electric energy,
A basic structure having a plurality of flexible plate-like structures, one or more intermediate connectors for interconnecting the plate-like structures, and a pedestal supporting the plate-like structures;
A charge generating element that generates a charge based on the deformation of the basic structure,
Is established,
The individual plate-like structures are connected to the pedestal either directly or indirectly through intermediate connectors and other plate-like structures, and the pedestal is rooted by an aggregate of the plate-like structures and the intermediate connectors. A dendritic structure is formed,
When a path from the pedestal to the end of the tree-like structure is traced, the path may include a branch portion that branches into a plurality of paths on the way or a junction where the paths merge on the way. It was done.

(54) A fifty-fourth aspect of the present invention is the power generating element according to the fifty-third aspect,
The basic structure includes a first positive plate-like structure and a first negative plate-like structure, a second positive plate-like structure, a second negative plate-like structure, and a first positive plate-like structure. An intermediate connector connecting the body, the first negative plate-like structure, the second positive plate-like structure, and the second negative plate-like structure; a first positive plate-like structure; A pedestal that supports the side plate-like structure, and a foremost end connector that interconnects the distal ends of the second positive side plate-like structure and the second negative side plate-like structure,
When the XY plane is defined as a horizontal plane, and the space having a positive X coordinate value is defined as a positive space and the space having a negative X coordinate value is defined as a negative space in a space partitioned by a YZ plane, a first positive space is defined. The side plate-like structure and the second positive plate-like structure are arranged in the positive space, and the first negative plate-like structure and the second negative plate-like structure are arranged in the negative space. It is as if it were.

(55) A fifty-fifth aspect of the present invention is directed to the power generating element according to the fifty-fourth aspect,
The first positive side plate-like structure and the first negative side plate-like structure have a root end directly or indirectly connected to the pedestal and a front end directly or indirectly connected to the intermediate connector. And extends in a direction parallel to the Y axis so that the direction from the root end to the tip is the positive direction of the Y axis,
The second positive-side plate-like structure and the second negative-side plate-like structure have a root end directly or indirectly connected to the intermediate connector, and a distal end directly or indirectly connected to the most distal end connector. And extends in a direction parallel to the Y-axis so that the direction from the root end to the tip is the positive direction of the Y-axis.

(56) According to a fifty-sixth aspect of the present invention, in the power generating element according to the fifty-fourth aspect,
The first positive-side plate-like structure has a first positive-side Y-axis path extending in a direction parallel to the Y-axis and a first positive-side X-axis path extending in a direction parallel to the X-axis. The root end of the first positive-side Y-axis path is directly or indirectly connected to the pedestal, and the tip of the first positive-side Y-axis path is connected to the first positive-side X-axis path. And the tip of the first positive-side X-axis path portion is directly or indirectly connected to the intermediate connector, and the first positive-side plate-like structure is connected to the XY plane. Has an L-shaped projection image,
The first negative plate-shaped structure has a first negative Y-axis path extending in a direction parallel to the Y axis and a first negative X-axis path extending in a direction parallel to the X axis. The root end of the first negative Y-axis path is directly or indirectly connected to the pedestal, and the tip of the first negative Y-axis path is connected to the first negative X-axis path. And the tip of the first negative X-axis path is connected directly or indirectly to the intermediate connector, and the first negative plate-shaped structure is connected to the XY plane. Has an L-shaped projection image,
The second positive-side plate-shaped structure has a second positive-side Y-axis path extending in a direction parallel to the Y-axis and a second positive-side X-axis path extending in a direction parallel to the X-axis. The root end of the second positive Y-axis path is directly or indirectly connected to the intermediate connector, and the tip of the second positive Y-axis path is connected to the second positive X-axis. The tip of the second positive-side X-axis path is connected directly or indirectly to the foremost end connector, and is connected to the root end of the path. Is an L-shaped projection image on the XY plane,
The second negative-side plate-like structure has a second negative-side Y-axis path extending in a direction parallel to the Y-axis and a second negative-side X-axis path extending in a direction parallel to the X-axis. The root end of the second negative Y-axis path is directly or indirectly connected to the intermediate connector, and the tip of the second negative Y-axis path is connected to the second negative X-axis. The tip of the second negative X-axis route is connected directly or indirectly to the distal end connector, and is connected to the root end of the route. Is such that the projected image on the XY plane forms an L-shape.

(57) A fifty-seventh aspect of the present invention provides the power generating element according to the above-described fifty-third to fifty-sixth aspects,
The basic structure further includes a weight connected to a predetermined portion.

(58) A fifty-eighth aspect of the present invention provides the power generating element according to the fifty-third to fifty-seventh aspects,
A power generating circuit for rectifying a current generated based on the electric charge generated in the electric charge generating element and extracting electric power is further provided.

  According to the power generating element of the present invention, the plate-like structure of the first attribute extending in the positive direction of the Y-axis and the plate-like structure of the second attribute extending in the negative direction of the Y-axis are connected to each other via the connector between heterogeneous elements. Therefore, a structure in which a plurality of resonance systems having different resonance frequencies are mixed along the same axis can be realized. For this reason, the frequency band in which power can be generated can be expanded as compared with the conventional example, and efficient power generation can be performed in various use environments.

  Further, as another approach, in the present invention, a power generating element in which a tree-like structure having a pedestal as a root formed by an aggregate of a plate-like structure and an intermediate connector can be formed. In this case, when the path from the pedestal to the end of the tree-like structure is traced, the path includes a branch portion that branches into a plurality of paths on the way or a junction where the paths merge on the way. By doing so, the frequency band in which power can be generated can be expanded, and power can be efficiently generated in various usage environments.

FIG. 1 is a perspective view showing a basic structure of a general power generation element proposed conventionally. FIG. 2 is a graph showing the amplitude A of the weight body 200 (tip point T) when vibration energy of various frequencies is externally applied to the pedestal 300 of the basic structure shown in FIG. FIG. 3 is a perspective view (partially a block diagram) showing the power generating element 1000 according to the first embodiment of the present invention. FIG. 4A is a top view of the basic structure of the power generating element 1000 shown in FIG. 3, and FIG. 4B is a side view thereof. FIG. 5 is a side sectional view of the basic structure of the power generating element 1000 shown in FIG. 3 cut along the YZ plane. FIG. 6 is a sectional side view of the basic structure of the power generating element 1000 shown in FIG. 4A taken along a cutting line 6-6. FIG. 7 is a conceptual diagram showing two types of resonance systems included in the basic structure of the power generating element 1000 shown in FIG. FIG. 8 is a schematic view showing some examples of resonance modes of a general plate-like structure, and shows a modification of the plate-like structure when a horizontal line is used as a reference position. FIG. 9 is a table summarizing a specific method for adjusting the resonance frequency fr of the weight body 200 in the resonance system having the single weight body 200 as shown in FIG. FIG. 10 is a graph showing the frequency characteristics of vibration at the end points T1 and T3 of each resonance system obtained as a result of performing a computer simulation on the basic structure of the power generating element 1000 shown in FIG. FIG. 11 is a graph showing the frequency characteristic of the power generation amount of the power generation element 1000 shown in FIG. 3 as a whole. FIGS. 12A and 12B are graphs showing frequency characteristics in a state where the resonance frequencies fr1 and fr2 are adjusted. FIG. 13 is a top view of a basic structure of a power generation element 1001 according to a modified example of the power generation element 1000 shown in FIG. 3 (illustration of the charge generation element 400 and the power generation circuit 500 is omitted). FIG. 14 is a front sectional view of the basic structure of the power generating element 1001 shown in FIG. 13 taken along a cutting line 14-14. FIG. 15A is a top view of a power generating element 1002 according to another modified example of the power generating element 1000 shown in FIG. 3, and FIG. 15B is a side sectional view of the power generating element 1000 cut along a YZ plane. (The illustration of 500 is omitted. The hatching in the top view is for clearly showing the shape pattern of the upper electrode layers E11 to E34 constituting the charge generation element 400, and is not for showing a cross section.) FIGS. 16A and 16B are diagrams showing the dimensions of each part of the power generating element 1002 shown in FIG. FIG. 17 is a top view of a power generating element 1003 according to still another modified example of the power generating element 1000 shown in FIG. 3 (illustration of the power generating circuit 500 is omitted. The hatching is an individual upper electrode layer constituting the charge generating element 400). The purpose is to clearly show the shape patterns of E10 and E25 to E36, and not to show the cross section.) FIG. 18 is a top view showing a preferred arrangement of the individual upper electrode layers E1 to E4 constituting the charge generating element formed on the upper surface of the general plate-shaped structure 20 (the hatching indicates the individual upper electrode layers E1 to E4). This is to clearly show the shape pattern of E4, but not to show a cross section.) FIG. 19 is a circuit diagram showing a specific configuration of the power generation circuit 500 used for the power generation element 1002 shown in FIG. FIG. 20A is a plan cross-sectional view of a power generating element 1500 with a device housing having a configuration in which the power generating element 1000 shown in FIG. 3 is housed in the device housing 310A (parallel to the XY plane and slightly above the XY plane). 20 (b) is a side sectional view taken along the YZ plane (illustration of the charge generation element 400 and the power generation circuit 500 is omitted). FIG. 21 is a plan cross-sectional view (a cross-sectional view cut along a plane parallel to the XY plane and slightly above the XY plane) of the power generating element 2000 with the device housing according to the second embodiment of the present invention. (The illustration of the power generation circuit 500 is omitted. Note that a part of the hatching is for showing the shape pattern of the upper electrode layer constituting the charge generating element and the joining region of the weight body, and is not for showing the cross section. .). FIG. 22 is a plan cross-sectional view (a cross-sectional view cut along a plane parallel to the XY plane and slightly above the XY plane) of the power generating element 3000 with the device housing according to the third embodiment of the present invention. (The illustration of the power generation circuit 500 is omitted. Note that a part of the hatching is for showing the shape pattern of the upper electrode layer constituting the charge generating element and the joining region of the weight body, and is not for showing the cross section. .). FIG. 23 is a plan cross-sectional view (a cross-sectional view cut along a plane parallel to the XY plane and slightly above the XY plane) of the power generating element 4000 with the device housing according to the fourth embodiment of the present invention. (The illustration of the power generation circuit 500 is omitted. Note that a part of the hatching is for showing the shape pattern of the upper electrode layer constituting the charge generating element and the joining region of the weight body, and is not for showing the cross section. .). FIG. 24 is a plan cross-sectional view (a cross-sectional view cut in a plane parallel to the XY plane and slightly above the XY plane) of the power generating element 5000 with the device housing according to the fifth embodiment of the present invention. (The illustration of the power generation circuit 500 is omitted. Note that a part of the hatching is for showing the shape pattern of the upper electrode layer constituting the charge generating element and the joining region of the weight body, and is not for showing the cross section. .). FIG. 25 is a plan cross-sectional view (a cross-sectional view cut in a plane parallel to the XY plane and slightly above the XY plane) of the power generating element 6000 with the device housing according to the sixth embodiment of the present invention. (The illustration of the power generation circuit 500 is omitted. Note that a part of the hatching is for showing the shape pattern of the upper electrode layer constituting the charge generating element and the joining region of the weight body, and is not for showing the cross section. .). FIG. 26 is a plan cross-sectional view (a cross-sectional view cut in a plane parallel to the XY plane and slightly above the XY plane) of the power generating element 7000 with the device housing according to the seventh embodiment of the present invention. (The illustration of the power generation circuit 500 is omitted. Note that a part of the hatching is for showing the shape pattern of the upper electrode layer constituting the charge generating element and the joining region of the weight body, and is not for showing the cross section. .). FIG. 27 is a plan cross-sectional view of a power generating element 7000A with a device housing according to a modification of the seventh embodiment shown in FIG. 26 (a cross section cut along a plane parallel to the XY plane and located slightly above the XY plane). (The illustration of the power generation circuit 500 is omitted. Note that a part of the hatching is for showing the shape pattern of the upper electrode layer constituting the charge generating element and the joining region of the weight body, and the cross section is shown.) Not shown). FIG. 28 is a plan cross-sectional view of a power generating element 7000B with a device housing according to another modification of the seventh embodiment shown in FIG. 26 (cut along a plane parallel to the XY plane and located slightly above the XY plane). (The illustration of the power generation circuit 500 is omitted. Note that some of the hatching is for showing the shape pattern of the upper electrode layer constituting the charge generation element and the joining region of the weight body, It does not show a cross section.) FIG. 29 is a plan view showing a variation of the upper electrode layer formed on the upper surface of the first negative-side plate-shaped structure 171 of the seventh embodiment shown in FIG. 26 (hatching indicates a region. And does not show a cross section.) FIG. 30 is a plan view showing a variation of the upper electrode layer formed on the upper surface of the second negative plate-shaped structure 174 of the seventh embodiment shown in FIG. 26 (the hatching indicates a region. And does not show a cross section.) FIG. 31 is a plan cross-sectional view (a cross-sectional view cut along a plane parallel to the XY plane and slightly above the XY plane) of the power generating element 8000 with the device housing according to the eighth embodiment of the present invention. (The illustration of the power generation circuit 500 is omitted. Note that a part of the hatching is for showing the shape pattern of the upper electrode layer constituting the charge generating element and the joining region of the weight body, and is not for showing the cross section. .). 32 (a), 32 (b) and 32 (c) are side sectional views showing an example of a preferred manufacturing process of the power generating element according to the present invention. FIG. 33 is a side sectional view showing an example in which the power generation element 1500B shown in FIG. FIG. 34 is a side sectional view showing a modification of the process shown in FIG. FIG. 35 is a top view showing a step of manufacturing the power generating element 6000 shown in FIG. 25 by the process according to the modification shown in FIG. 34 (hatching indicates a region of each part and shows a cross section). Not something.) FIG. 36 is a plan sectional view (a sectional view cut in a plane parallel to the XY plane and slightly above the XY plane) of the power generating element 9000 with the device housing according to the ninth embodiment of the present invention. (The illustration of the power generation circuit 500 is omitted. Note that a part of the hatching is for showing the shape pattern of the upper electrode layer constituting the charge generating element and the joining region of the weight body, and is not for showing the cross section. .). FIG. 37 is a plan cross-sectional view of a power generating element 9000A with a device housing according to a modification of the ninth embodiment shown in FIG. 36 (a cross section cut along a plane parallel to the XY plane and located slightly above the XY plane). (The illustration of the power generation circuit 500 is omitted. Note that a part of the hatching is for showing the shape pattern of the upper electrode layer constituting the charge generating element and the joining region of the weight body, and the cross section is shown.) Not shown).

  Hereinafter, the present invention will be described based on an illustrated embodiment.

<<<< §1. Previously proposed power generation elements >>>
First, for convenience of explanation, the basic structure of a conventional power generating element of a type that generates power by vibrating a weight attached to a plate-like structure will be briefly described. FIG. 1 is a perspective view showing a basic structure of a general power generation element proposed conventionally. Patent Document 4 (WO2015 / 033621) cited above also discloses a power generating element having a basic structure as shown in FIG.

  As shown in the figure, the basic structure includes a plate-shaped structure 100, a weight body 200 attached to the tip of the plate-shaped structure 100, and a pedestal 300 for fixing a root end of the plate-shaped structure 100. have. The pedestal 300 is attached to some vibration source, and the vibration energy supplied from this vibration source is converted into electric energy. The plate-like structure 100 is an elongated plate having a length L, a width w, and a thickness t extending from a root end fixed by the pedestal 300 to a free end, and the weight body 200 is a piece of this plate. It is supported by a cantilever structure. Moreover, since the plate-like structure 100 has flexibility, when vibration is applied to the pedestal 300, the weight 200 vibrates. As a result, the plate-like structure 100 is periodically bent.

  Although not shown, a charge generation element such as a piezoelectric element is attached to the surface of the plate-shaped structure 100, and charges are generated based on the deformation of the plate-shaped structure 100. Therefore, if a power generation circuit that rectifies and outputs a current generated based on the charge generated in the charge generation element is provided, the generated charge can be extracted as electric power. The arrangement of the piezoelectric element for efficiently taking out the electric charge is disclosed in the above-mentioned Patent Document 4 and the like, and thus the description thereof is omitted here.

  In the present application, an XYZ three-dimensional orthogonal coordinate system as shown in the figure is defined for the sake of convenience in describing the configuration and modification of the basic structure. On such a coordinate system, the plate-shaped structure 100 has a plate surface (upper surface and lower surface) parallel to the XY plane, and is an elongated plate extending from the root end to the tip along the Y axis. . In the illustrated example, the Y-axis is located at the center of the upper surface of the plate-shaped structure 100. Here, the Y axis is referred to as a reference axis, the origin O side of the plate-shaped structure 100 is referred to as a root end, and the tip point T side on the Y axis is referred to as a tip end. Therefore, the plate-shaped structure 100 extends from the root end to the tip along the reference axis Y, and is a flexible plate-shaped member. The weight 200 is a lower surface of the tip. Will be joined.

  Usually, the vibration energy transmitted from the external vibration source to the pedestal 300 includes an X-axis direction component, a Y-axis direction component, and a Z-axis direction component. Therefore, a force for displacing in the X-axis direction, the Y-axis direction, and the Z-axis direction is applied to the weight body 200. However, since the weight 200 is supported by the plate-like structure 100 having a shape as shown in the figure, the “easiness of displacement” differs for each direction. This is because, in a state where the position of the origin O in the figure (root end) is fixed, when the forces Fx, Fy, Fz in the respective coordinate axis directions are applied to the tip point T (tip), the plate-like structure is formed. This is because the spring constant of the body 100 is different depending on the direction of each coordinate axis. In general, the Z-axis direction is the direction in which displacement is most easily performed.

  Of course, since the plate-shaped structure 100 has flexibility, the weight body 200 can be displaced in the Y-axis direction by expansion and contraction and warpage in the Y-axis direction, and the weight can be displaced in the X-axis direction. The weight 200 can also be displaced in the X-axis direction. However, here, a case where vibration energy in the Z-axis direction is applied to the pedestal 300 and the weight body 200 vibrates in the Z-axis direction will be considered as a representative example.

  In general, a resonance system has a resonance frequency fr unique to the system, and the closer the frequency f of the vibration given from the outside to the resonance frequency fr, the more the resonance frequency f resonates with the given vibration and the larger the amplitude A Will occur. FIG. 2 is a graph showing the amplitude A of the weight body 200 (tip point T) when vibration energy of various frequencies is externally applied to the pedestal 300 of the basic structure shown in FIG. When the frequency f is plotted on the horizontal axis and the amplitude A is plotted on the vertical axis, a peak waveform P appears at a position of a predetermined resonance frequency fr as shown in the figure (for the sake of convenience, portions other than the peak waveform P are represented by flat straight lines). Although shown, in practice this is not a perfect straight line).

  Of course, since the spring constant of the plate-shaped structure 100 differs for each coordinate axis direction, the value of the resonance frequency fr of the weight 200 also differs for each coordinate axis direction. The graph of FIG. 2 shows a case where the weight body 200 vibrates in a specific coordinate axis direction (here, the Z axis direction), and the resonance frequency fr indicates a resonance frequency for vibration in the coordinate axis direction. I have. Further, as described later, the plate-shaped structure 100 has a plurality of resonance modes according to the number of nodes, and the resonance frequency differs for each resonance mode. Therefore, here, a case where the vibration is performed in the primary resonance mode will be considered.

  After all, when the basic structure shown in FIG. 1 is grasped as one resonance system, in order to efficiently vibrate the weight body 200 in the primary resonance mode in the Z-axis direction, the base 300 is vibrated at the resonance frequency fr. I just need. In other words, in order for the power generating element to efficiently generate power, it is necessary to externally apply vibration energy having a resonance frequency fr. When the frequency of the applied vibration energy deviates from the resonance frequency fr, the power generation efficiency decreases. I do.

  On the other hand, silicon or metal is often used as a material for a power generation element using MEMS technology suitable for mass production. In a resonance system using such a material, the peak waveform P in the graph of FIG. Although the peak value (Q value) is high, the half width h tends to be narrow. For this reason, in the case of the conventional power generation element illustrated in FIG. 1, when the frequency of the vibration given from the external environment is close to the resonance frequency fr, efficient power generation can be performed. If it is off, the power generation efficiency will drop sharply.

  Therefore, conventionally, a design has been made in which the frequency of vibration that would be given from the outside in an actual use environment is assumed, and the resonance frequency matches the assumed frequency. However, as already pointed out as a problem, in an actual use environment, vibrations having various frequencies are mixed, and vibrations having a single frequency are not added. For this reason, there are many cases where vibration including an unexpected frequency is applied. In addition, since the resonance frequency of the structural portion made of silicon or metal also fluctuates due to external stress and temperature, even if vibration having the frequency expected at the time of design is given, efficient power generation is always performed. Not necessarily.

  As described above, the conventional power generating element illustrated in FIG. 1 has a problem that the frequency band in which power can be generated is narrow, and power generation cannot always be performed sufficiently efficiently depending on the actual use environment. The present invention has been made to solve such a problem, and an object of the present invention is to provide a power generating element capable of expanding a frequency band in which power can be generated and performing efficient power generation in various use environments. And

<<<< §2. Configuration of First Embodiment >>>
Here, the configuration of the first embodiment of the present invention will be described. FIG. 3 is a perspective view (partially a block diagram) showing the power generating element 1000 according to the first embodiment. As shown, the power generation element 1000 includes a main substrate 110, a weight group 210, a pedestal 310, a charge generation element 400, and a power generation circuit 500. Here, the physical components configured by the main substrate 110, the weight body group 210, and the pedestal 310 will be referred to as basic structural portions. In FIG. 3, the basic structure is shown as a perspective view, and the charge generating element 400 and the power generation circuit 500 are shown as a block diagram. The feature of the power generating element 1000 is the unique structure of the basic structure shown as a perspective view. Hereinafter, this unique structure will be described.

  Here, as in §1, an XYZ three-dimensional orthogonal coordinate system as shown is defined, and the Y axis is referred to as a reference axis. This power generating element 1000 also employs a structure in which the weight body is supported by a cantilever made of a plate-like structure, as in the conventional power generating element shown in FIG. 1, and converts vibration energy into electric energy. Generates power.

  The main substrate 110 is a plate-shaped structure having an E-shape in plan view. As shown in the drawing, a central plate-shaped structure 111, a heterogeneous connector 112, a negative-side plate-shaped structure 113, and a positive-side plate-shaped structure It is constituted by four parts of the body 114. The heterogeneous connector 112 serves to connect plate-like structures having different attributes to each other as described later. The negative plate-like structure 113 is a component arranged in a region where the X coordinate value is negative, and the positive plate-like structure 114 is a component arranged in a region where the X coordinate value is positive.

  Here, for the sake of convenience, the main substrate 110 will be described by dividing it into the four parts described above. However, the main substrate 110 is a single integrated E-shaped substrate. In the E-shaped substrate described above, the portion plays a specific role. The main substrate 110 may be made of any material as long as it can form a flexible member, but is preferably made of silicon or metal in practical use.

  On the other hand, the weight group 210 is constituted by three sets of weight bodies 211, 212, and 213 as shown in the figure, and each is connected to a predetermined position on the lower surface of the main substrate 110. Specifically, the weight body 211 is connected to the lower surface of the heterogeneous connecting body 112, and the weight body 212 is connected to the lower surface of the tip (left end in the drawing) of the negative plate-shaped structure 113. The weight body 213 is connected to the lower surface of the front end portion (left end portion in the figure) of the positive side plate-like structure 114. Each of the weight bodies 211, 212, and 213 may be made of any material as long as the material has a sufficient mass to generate vibration. In this case, it is preferable to use a metal such as SUS (iron), copper, or tungsten, or silicon, ceramic, glass, or the like.

  The pedestal 310 is a component that supports and fixes the root end (left end in the drawing) of the central plate-shaped structure 111. As will be described later, actually, the pedestal 310 is fixed to the device housing of the power generation element 1000 and plays a role of transmitting vibration energy from a vibration source to the central plate-shaped structure 111. FIG. 3 illustrates a pedestal 310 having a rectangular parallelepiped block shape. The pedestal 310 may have any shape as long as it can support and fix the central plate-shaped structure 111. Any material may be used.

  The heterogeneous connecting body 112 and the weight body 211 connected to the lower surface thereof are supported in a cantilever structure with respect to the pedestal 310 by a central plate-like structure 111 extending along the Y axis. Since the central plate-shaped structure 111 has flexibility, it bends when an external force acts, and the end point T1 is displaced with respect to the origin O. Therefore, when vibration energy is applied to the pedestal 310, the central plate-like structure 111 periodically bends, and the weight 211 vibrates. As will be described later, such vibration becomes the vibration of the first resonance system I.

  On the other hand, the weight body 212 is supported in a cantilever structure with respect to the heterogeneous connecting body 112 by the negative side plate-like structure 113 extending in a direction parallel to the Y axis. Since at least a portion of the negative-side plate-like structure 113 to which the weight body 212 is not connected has flexibility, when an external force acts, the end-point T3 is displaced relative to the end-point T2 ( In the case of this example, no significant bending occurs at the portion where the weight body 212 is connected). Therefore, when vibration energy is applied to the heterogeneous connection body 112, the negative plate-like structure 113 periodically bends, and the weight body 212 vibrates. As will be described later, such vibration becomes the vibration of the second resonance system II.

  Similarly, the weight body 213 is supported by the positive-side plate-shaped structure 114 extending in a direction parallel to the Y-axis in a cantilever structure with respect to the heterogeneous connector 112. Since at least a portion of the positive-side plate-shaped structure 114 to which the weight body 213 is not connected has flexibility, when an external force acts, the end-point T5 is displaced with respect to the end-point T4 ( In the case of this example, no significant bending occurs at the portion where the weight body 213 is connected). Therefore, when vibration energy is applied to the heterogeneous connector 112, the positive-side plate-like structure 114 periodically bends, and the weight 213 vibrates. This vibration is also the vibration of the second resonance system II.

  Thus, since the origin O, which is the base point of the first resonance system I, is fixed to the pedestal 310, the vibration end T1 of the first resonance system I vibrates based on the origin O. On the other hand, the end points T2 and T4, which are the base points of the second resonance system II, vibrate according to the vibration of the end point T1, and the vibration ends T3 and T5 of the second resonance system II are vibrating. Vibrates with reference to the end points T2 and T4 of. In other words, this basic structure constitutes a complex composite vibration system in which the first resonance system I and the second resonance system II are nested. As will be described later, the object of the present invention to widen the frequency band in which power can be generated is achieved by configuring such a complex synthetic vibration system.

  The charge generation element 400 illustrated as a block diagram in FIG. 3 is a component (for example, a piezoelectric element) that generates an electric charge based on the deformation of the plate-like structures 111, 113, and 114, and is illustrated as a block diagram. The power generation circuit 500 is a component that rectifies a current generated based on the charge generated in the charge generation element 400 and extracts power. The configuration and operation of the charge generation element 400 and the power generation circuit 500 will be described in §5.

  FIG. 4A is a top view of the basic structure of the power generating element 1000 shown in FIG. 3, and FIG. 4B is a side view thereof. In the present application, as shown in the drawing, an XYZ three-dimensional orthogonal coordinate system in which an XY plane is taken as a horizontal plane is defined, and a space having a positive X coordinate value is defined as a positive space and a negative X coordinate among spaces partitioned by the YZ plane. A space having a value is defined as a negative space. As described above, the basic structure includes the main substrate 110, the weight body group 210, and the pedestal 310. Here, as shown, the main substrate 110 includes a central plate-shaped structure 111 disposed on the Y axis, a negative-side plate-shaped structure 113 disposed in the negative-side space, and a positive plate-shaped structure 113 disposed in the positive-side space. It is an E-shaped substrate having a side plate-like structure 114 and a heterogeneous connector 112.

The heterogeneous connector 112 is a plate-like component extending in the X-axis direction, and has a function of connecting the central plate-like structure 111 and the negative-side plate-like structure 113 and a function of connecting the central plate-like structure 111 to the positive plate-like structure. It has a function of connecting to the side plate-like structure 114. Each of the three sets of plate-like structures 111, 113, and 114 is a plate-like component extending in the Y-axis direction, and is connected to the heterogeneous connector 112.
However, only the left end of the central plate-shaped structure 111 is connected to the pedestal 310.

  In the present application, of the two end portions of each plate-shaped structure, a portion closer to the pedestal 310 on the connection path to the pedestal 310 is referred to as a root end portion, and a portion farther from the pedestal 310 is referred to as a tip portion. For example, in the case of the central plate-shaped structure 111, the left side of the figure is closer to the pedestal 310 than the right side, so the left end side is the root end and the right end is the tip end. On the other hand, in the case of the negative plate-shaped structure 113 and the positive plate-shaped structure 114, the left side of the figure is closer to the pedestal 310 than the right side, focusing on the spatial positional relationship. However, considering the connection path to the pedestal 310, the end point T3 is connected to the pedestal 310 through a path of T3-T2-T1-O, and the end point T5 is connected to the pedestal 310 through a path of T5-T4-T1-O. It is connected to the. Therefore, on the connection path, the right side of the figure is closer to the pedestal 310 than the left side, so that the right end is the root end and the left end is the tip end.

  Here, for convenience of description, one of two attributes is given to each plate-like structure. The first attribute is an attribute given to a plate-like structure extending in a direction parallel to the Y axis so that the direction from the root end to the tip is the positive direction of the Y axis. In this case, the central plate-shaped structure 111 is a plate-shaped structure having the first attribute. On the other hand, the second attribute is an attribute given to a plate-like structure extending in a direction parallel to the Y-axis so that the direction from the root end toward the tip is the Y-axis negative direction. In the illustrated example, the negative plate-shaped structure 113 and the positive plate-shaped structure 114 are plate-shaped structures having the second attribute.

  In short, in the case of the embodiment shown in FIG. 4 (a), the central plate-like structure 111 having the first attribute is arranged on the YZ plane, the root end is connected to the pedestal 310, Are connected to the heterogeneous connector 112 and extend in a direction parallel to the Y axis so that the direction from the root end to the tip is the positive direction of the Y axis. In addition, the negative-side plate-like structure 113 having the second attribute is disposed in the negative-side space, the root end is connected to the heterogeneous connector 112, and the direction from the root end to the front end is changed. The positive-side plate-like structure 114, which extends in a direction parallel to the Y-axis so as to be in the Y-axis negative direction and also has the second attribute, is disposed in the positive-side space, and the root end portion is a heterogeneous member. It is connected to the connector 112 and extends in a direction parallel to the Y axis so that the direction from the root end to the tip is the Y axis negative direction.

  The heterogeneous connector 112 serves to connect the plate-like structure having the first attribute and the plate-like structure having the second attribute to each other, and literally, "a plate-like structure having different attributes. Components to be interconnected ". Since the plate-like structure having the first attribute and the plate-like structure having the second attribute have a relationship in which the direction from the root end to the tip is reversed, a cantilever structure extending from the pedestal 310 is formed. The route (in the example of FIG. 4A, the route passing through O-T1-T2-T3 or the route passing through O-T1-T4-T5) is turned back at the inter-generic connector 112. The intergeneric connector 112 serves as a turning point.

  Three sets of weight bodies 211, 212, and 213 are connected to the lower surface of the main substrate 110. In FIG. 4 (a), a part of the outline of the weight body is drawn by a broken line. The weight body 211 is a rectangular parallelepiped structure having the same planar shape as the heterogeneous connector 112, and is connected to the lower surface of the heterogeneous connector 112. On the other hand, the weight body 212 is a rectangular parallelepiped structure having a square planar shape connected to the lower surface of the distal end portion of the negative-side plate-like structure 113, and the weight body 213 is formed of the positive-side plate-like structure 114. It is a rectangular parallelepiped structure having a square planar shape connected to the lower surface of the tip.

  The structure of each of these weights is clearly shown in the side view shown in FIG. 4B and the side sectional views shown in FIGS. FIG. 4 (b) is a side view showing a state where the basic structure shown in FIG. 4 (a) is observed from below in FIG. 4 (a). FIG. 5 is a side sectional view of the basic structure shown in FIG. 4A cut along the YZ plane. FIG. 6 is a sectional view of the basic structure shown in FIG. FIG. As can be seen from these figures, the position of the bottom surface of each of the weight bodies 211, 212, and 213 is set slightly above the position of the bottom surface of the pedestal 310. This is because, when the bottom surface of the pedestal 310 is fixed to the device housing, a slight space is maintained between the device housing and the bottom surfaces of the weights 211, 212, and 213. is there. Each of the weight bodies 211, 212, and 213 vibrates in the apparatus housing using this space.

<<<< §3. Features of basic structure with multiple resonance systems >>>
In §2, it has been simply described that the basic structure of the power generation element 1000 includes a plurality of resonance systems, and that a complex synthetic vibration system is configured as a whole. Here, the characteristics of the specific vibration modes of the plurality of resonance systems and the resonance frequencies thereof will be described in more detail.

  In the basic structure shown in FIG. 4A, the weight body 211 is supported on the pedestal 310 in a cantilever structure by the central plate-like structure 111, and a path from the pedestal 310 to the weight body 211 is provided. Is a path from the origin O to the end point T1. On the other hand, the weight body 212 is supported on the pedestal 310 by a cantilever structure including the central plate-shaped structure 111, the heterogeneous connecting body 112, and the negative-side plate-shaped structure 113. The path to the weight body 212 is a path that follows O-T1-T2-T3. Similarly, the weight body 213 is supported on the pedestal 310 by a cantilever structure including the central plate-shaped structure 111, the heterogeneous connecting body 112, and the positive side plate-shaped structure 114. The route to the body 213 is a route that follows O-T1-T4-T5.

  As described above, the three sets of weight bodies 211, 212, and 213 are all supported by the pedestal 310 in a cantilever structure. However, since the paths of the cantilever structure are different, separate resonance systems are respectively provided. Is configured. FIG. 7 is a conceptual diagram showing two types of resonance systems included in the basic structure.

  FIG. 7A shows a first resonance system I that generates vibration due to deformation of the central plate-shaped structure 111 having the first attribute. This figure shows a state in which the end point T1 located at the distal end is displaced while the origin O located at the root end of the central plate-shaped structure 111 is fixed. Here, this resonance system is considered as a simple model constituted by a flexible plate-like structure 111 composed of one line and a mass point m located at an end point T1. The solid line in the figure shows the system in a stationary state, and the broken line shows the system in a vibrating state. In the vibrating state, the plate-like structure 111 is deformed as shown by a broken line, and the end point T1 is displaced from the position T1 (0) in the stationary state to the upper position T1 (+) or from the lower position T1 (-). Repeat the displacement.

  As shown in FIG. 4A, the total load of the heterogeneous connector 112, the negative plate-like structure 113, the positive plate-like structure 114, and the weights 211, 212, and 213 is applied to the end point T1. And the central plate-like structure 111 plays a role of supporting these loads. Therefore, the mass point m in the model of FIG. 7A is a point having the entire mass of the constituent elements 211, 212, 213, 112, 113, 114.

  In the basic structure of the conventional power generating element shown in FIG. 1, the plate-like structure 111 is embodied by the plate-like structure 100 and the mass point m is embodied by the weight 200 in the resonance system I shown in FIG. Equivalent to Such a resonance system has frequency characteristics as shown in the graph of FIG. 2, and its amplitude A has a peak waveform P at a position of a predetermined resonance frequency fr. In the case of the resonance system I shown in FIG. 7A, the value of the resonance frequency fr1 is determined by the spring constant of the plate-like structure 111 and the mass of the mass m (the entire components 211, 212, 213, 112, 113, 114). Of the resonance frequency fr1 can be adjusted by adjusting these values.

  On the other hand, FIG. 7B shows a second resonance system II which generates vibration due to deformation of the negative side plate-like structure 113 having the second attribute (due to deformation of the positive side plate-like structure 114). The same applies to a resonance system that generates vibration.) This figure shows a state in which the end point T3 located at the distal end is displaced while the end point T2 located at the root end of the negative-side plate-like structure 113 is fixed. Here, too, this resonance system is considered as a simple model composed of the flexible plate-like structure 113 composed of one line and the mass point m located at the end point T3. Again, the solid line shows the system in the stationary state, and the broken line shows the system in the oscillating state. In the vibrating state, the plate-like structure 113 is deformed as shown by a broken line, and the end point T3 is displaced from the position T3 (0) in the stationary state to the upper position T3 (+) or from the lower position T3 (-). Repeat the displacement.

  As shown in FIG. 4A, a load of the weight body 212 is applied to the end point T3, and the negative plate-like structure 113 plays a role of supporting the load. Therefore, the mass point m in the model of FIG. 7B is a point having the mass of the weight body 212. In the case of the resonance system II shown in FIG. 7B, the value of the resonance frequency fr2 is determined by the spring constant of the plate-like structure 113 and the mass of the mass point m (the mass of the weight body 212). Can be adjusted to adjust the value of the resonance frequency fr2.

  However, in the case of the basic structure shown in FIG. 4, the end point T2 shown as the fixed point in the model of FIG. 7B is connected to the end point T1 shown as the displacement point in the model of FIG. 7A. Have been. Therefore, in practice, the end point T2 is not a fixed point but a point that vibrates together with the end point T1, and the second resonance system II is a system that is entirely vibrated by the first resonance system I. Therefore, the basic structure shown in FIG. 4 constitutes a complicated combined vibration system in which the first resonance system I and the second resonance system II are nested.

  FIG. 7 (c) is a diagram showing such a synthetic vibration system as a simple model. FIG. 7 (b) shows the position of the end point T1 of the first resonance system I shown in FIG. 7 (a). The second resonance system II is grafted. Actually, as the second resonance system II, two sets of a system for the negative plate-shaped structure 113 and a system for the positive plate-shaped structure 114 are incorporated. Therefore, this combined vibration system includes a resonance system I for the central plate-like structure 111, a resonance system II for the negative-side plate-like structure 113, and a resonance system II for the positive-side plate-like structure 114. Here, the two sets of the resonance systems II function as the "weight of the resonance system I" connected to the end point T1, so that the resonance system I includes the two sets of the resonance systems II in their entirety. Will be.

  FIG. 7C shows a state where the end point T1 has been displaced to the upper position T1 (+) and the end point T3 has been displaced to the predetermined position T3 (b). Here, the position T3 (b) is determined according to the position of the end point T3 shown in FIG. 7 (b). As described above, the resonance frequency fr1 of the resonance system I is determined by the spring constant of the plate-like structure 111 and the mass of the mass point m (load applied to the end point T1), and the resonance frequency fr2 of the resonance system II is determined by the plate-like structure It is determined by the spring constant of 113 or 114 and the mass of the mass point m (load applied to the end point T3 or T5). Therefore, by adjusting these values, the values of the resonance frequencies fr1 and fr2 can be adjusted. However, since the entire resonance system II functions as a weight of the resonance system I, the adjustment performed on the resonance system II also affects the resonance system I.

  Note that the modification of each plate-like structure shown by a solid line or a broken line in FIG. 7 shows a state in which each resonance system resonates in a primary resonance mode. It may vibrate in mode.

  FIG. 8 is a schematic view showing some examples of resonance modes of a general plate-like structure, and shows a modification of the plate-like structure when a horizontal line is used as a reference position. The curve in the figure shows the plate-like structure, the left end (root end) is fixed, and the right end (tip) is a free end. In the drawing, the direction of the stress acting on the upper surface of the plate-like structure in each deformation state is indicated by an arrow. Specifically, a white arrow indicates that “stress that extends in the longitudinal direction” acts on the upper surface, and a black arrow indicates that “stress that contracts in the longitudinal direction” acts on the upper surface.

  FIG. 8A shows a modified mode of the primary resonance mode, in which a gentle curve which is convex upward as a whole is drawn. In such a deformed state, a stress extending in the longitudinal direction acts on the upper surface of the plate-like structure (see white arrows). Conversely, a stress that contracts in the longitudinal direction acts on the lower surface of the plate-shaped structure, but here, only the expansion and contraction of the upper surface is focused.

  On the other hand, FIG. 8B shows a modified mode of the secondary resonance mode. In the vicinity of the root end, the curve becomes a gentle curve that is convex downward, but beyond that, the curve becomes a gentle curve that is convex upward. Become. As a result, a stress that contracts in the longitudinal direction acts on the upper surface of the root end portion of the plate-like structure (see black arrows), and a stress that extends in the longitudinal direction acts on the upper surface ahead (see white arrows). Similarly, FIG. 8 (c) shows a deformation mode of the tertiary resonance mode, in which the curve has a more complicated shape, and a partially shrinking stress (see black arrow) and an elongating stress (see white arrow) are shown. Works. Although illustration is omitted, the deformation mode of the plate-like structure is further complicated in the fourth or higher order resonance mode.

  Each resonance mode shown in FIG. 8 is for the plate-like structure 100 in a simple resonance system as exemplified in FIG. 1, and a graph of frequency characteristics shows a resonance frequency according to the order of the resonance mode. In general, as the order of the resonance mode increases, the peak position shifts to a higher frequency.

  Of course, the resonance mode in this simple resonance system cannot be directly applied to the synthetic vibration system as shown in FIG. 7C, but in any case, each of the plate-like structures 111, 113, and 113 shown in FIG. The deformation mode of 114 changes variously according to the frequency of the vibration given from the external environment, and the direction of the stress applied to each part also changes. Actually, each of the plate-like structures 111, 113, and 114 shown in FIG. 3 vibrates in a plurality of resonance modes, and the peak of the resonance frequency appears at a plurality of positions. The stress generated on the surface is largest in the deformation mode by the primary resonance mode shown in FIG. 8A, and the vibration by the primary resonance mode contributes most to the power generation. Therefore, hereinafter, the operation and effect of the present invention will be described assuming that each plate-like structure vibrates in the primary resonance mode.

<<<< §4. Adjustment of resonance frequency >>>>>
An object of the present invention is to provide a power generation element capable of expanding a frequency band in which power can be generated and efficiently generating power in various use environments. Therefore, in the present invention, as in the embodiment shown in FIG. 3, a basic structure which behaves as a composite vibration system including a plurality of resonance systems is employed. As described above, each resonance system has its own resonance frequency fr, and each resonance frequency fr is determined by the spring constant of the plate-like structure and the mass of the weight. Therefore, by adjusting the spring constant and the mass of the weight of each plate-like structure, the resonance frequency fr of each resonance system can be shifted in a desired direction on the frequency axis, and the frequency band in which power can be generated is expanded. Can be. This is the basic principle of the present invention.

  FIG. 9 is a table summarizing specific methods for adjusting the resonance frequency fr of the weight body 200 in a simple resonance system having a single weight body 200 as shown in FIG. Specific adjustment methods shown in this table include a method of changing the shape and material of the plate-shaped structure 100 (a method of changing the spring constant of the plate-shaped structure 100) and a method of changing the mass of the weight 200. They are roughly divided into

  As the former, for the plate-shaped structure 100 shown in FIG. 1, a method of changing the thickness t (dimension in the Z-axis direction), a method of changing the width w (dimension in the X-axis direction), and a length L (dimension in the Y-axis direction) ) And a method of changing the material (Young's modulus E). First, when the thickness t of the plate-shaped structure 100 is reduced, the resonance frequency fr decreases, and when the thickness t is increased, the resonance frequency fr increases. Similarly, if the width w of the plate-shaped structure 100 is reduced, the resonance frequency fr decreases, and if the width w is increased, the resonance frequency fr increases. The longer the length L (the length of the resonance system) of the plate-like structure 100, the lower the resonance frequency fr. The shorter the length L, the higher the resonance frequency fr. Finally, if the material of the plate-like structure 100 is made softer (the Young's modulus E is made smaller), the resonance frequency fr becomes lower, and if the material is made harder (the Young's modulus E is made larger), the resonance frequency fr becomes higher. .

  On the other hand, the latter is a method of changing the mass m of the weight body, and specifically includes a method of changing the size and a method of changing the material (specific gravity). In any case, the resonance frequency fr decreases as the mass m increases (heavier), and the resonance frequency fr increases as the mass m decreases (lighter).

  The adjustment method shown in the table of FIG. 9 is based on the premise that a resonance system having a single weight body 200 as shown in FIG. 1 is used. 3 can be applied to the basic structure.

  In the former method of changing the shape and material of the plate-like structure, there are four parameters to be changed, namely, a thickness t, a width w, a length L, and a material (Young's modulus E). Of course, these four parameters are used. May be changed in combination. Changing these four parameters is nothing but changing the spring constant of the resonance system. Of course, as a method of shifting the resonance frequency, there is also a method of changing the mass m of the weight body. Therefore, the former method of changing the shape and the material of the plate-like structure and the latter method of changing the mass m of the weight body. And can also be used in combination.

  Subsequently, a frequency characteristic of the entire power generation amount of the power generation element 1000 shown in FIG. 3 will be described. FIG. 10 is a graph showing frequency characteristics of vibrations at the end points T1 and T3, which are vibration points of each resonance system, obtained as a result of performing a computer simulation on the basic structure of the power generating element 1000 shown in FIG. The horizontal axis of the graph indicates the frequency f of the vibration (vibration in the Z-axis direction in this example) externally applied to the power generating element 1000, and the vertical axis of the graph indicates the end point T1 or the end point excited based on the external vibration. The amplitude A of T3 is shown.

  Specifically, FIG. 10A is a frequency characteristic showing an amplitude A at an end point T1 which is a vibration point of the first resonance system I, and a large peak waveform P11 appears at the position of the frequency value fr1. , A small peak waveform P12 appears at the position of the frequency value fr2. On the other hand, FIG. 10B is a frequency characteristic showing an amplitude A at an end point T3 which is a vibration point of the second resonance system II. A large peak waveform P22 appears at the position of the frequency value fr2. A small peak waveform P21 appears at the position of fr1.

  Here, the frequency value fr1 is a resonance frequency in the primary resonance mode unique to the first resonance system I, and the frequency value fr2 is a resonance frequency in the primary resonance mode unique to the second resonance system II. It is. In the basic structure shown in FIG. 3, the plate-like structures 111, 113, and 114 have the same thickness t, but have slightly different widths w and lengths L. More specifically, as shown in FIG. 4A, the plate-like structure 111 constituting the first resonance system I has a larger size than the plate-like structures 113 and 114 constituting the second resonance system II. The width w is small and the length L is long. Therefore, referring to the table of FIG. 9, the plate-like structure 111 constituting the first resonance system I has a spring constant k that is greater than that of the plate-like structures 113 and 114 constituting the second resonance system II. As a result, the resonance frequency fr1 of the first resonance system I is lower than the resonance frequency fr2 of the second resonance system II as far as the comparison of the spring constants of the plate-like structures is concerned.

  On the other hand, the mass m of the weight of the first resonance system I is the total mass of the components 211, 212, 213, 112, 113, and 114 as shown in FIG. On the other hand, the mass m of the weight of the second resonance system II is the mass of the weight body 212 as shown in FIG. Therefore, the weight of the first resonance system I is heavier than the weight of the second resonance system II. Referring to the table of FIG. 9, the weight of the first resonance system I is also higher. Is lower than the resonance frequency fr2 of the second resonance system II.

  As a result, in the case of the basic structure shown in FIG. 3, the resonance frequency fr1 is lower than the resonance frequency fr2. The graphs shown in FIGS. 10A and 10B show frequency characteristics that match such a theoretical analysis result.

  Therefore, when the vibration is externally applied to the pedestal 310 shown in FIG. 3 and the frequency f of the external vibration is gradually increased from the lower side, the following phenomenon is observed. First, when the frequency f of the applied external vibration reaches the resonance frequency fr1, the amplitude A of the end point T1 sharply increases as shown in the peak waveform P11 of FIG. This is because the first resonance system I involved in the vibration of the end point T1 has reached its unique resonance frequency fr1. At this time, since the second resonance system II has not yet reached the specific resonance frequency fr2, the amplitude A of the end point T3 should be extremely small.

  However, actually, the first resonance system I and the second resonance system II are nested as shown in FIG. 7 (c), and both are physically connected. It will have a mutual effect on the vibration. In other words, when the frequency f of the external vibration reaches the resonance frequency fr1 and the amplitude A of the end point T1 sharply increases as shown in the peak waveform P11, the amplitude A of the end point T3 increases due to the influence. The small peak waveform P21 shown in FIG. 10B is a peak waveform generated under such influence. In short, when an external vibration having a frequency corresponding to the resonance frequency fr1 of the end point T1 is given, not only does the amplitude of the end point T1 suddenly increase, but also the phenomenon that the amplitude of the end point T3 increases due to the influence.

Subsequently, considering the case where the frequency f of the external vibration reaches the resonance frequency fr2, the amplitude A of the end point T3 sharply increases as shown in the peak waveform P22 of FIG. This is because the second resonance system II involved in the vibration of the end point T3 has reached its unique resonance frequency fr2.
At this time, under the influence, the amplitude A of the end point T1 also increases. The small peak waveform P12 shown in FIG. 10A is a peak waveform generated under such influence. In short, when an external vibration having a frequency corresponding to the resonance frequency fr2 of the end point T3 is given, not only does the amplitude of the end point T3 sharply increase, but also the effect that the amplitude of the end point T1 increases.

  FIG. 10 (b) shows the frequency characteristics of the vibration at the end point T3 (the end point of the negative plate-shaped structure 113). The vibration of the end point T5 (the end point of the positive side plate-shaped structure 114) is shown. The frequency characteristics are also exactly the same.

  As a result, when an external vibration having the resonance frequency fr1 is applied to the pedestal 310 of the power generating element 1000 shown in FIG. 3, the weight A shown in the peak waveform P11 of FIG. Therefore, vibration having an amplitude A as shown by a peak waveform P21 in FIG. 10B is generated in the weight bodies 212 and 213. When an external vibration having the resonance frequency fr2 is applied, the weight 211 has a vibration having an amplitude A as shown by a peak waveform P12 in FIG. Causes vibration having an amplitude A as shown in the peak waveform P22 of FIG. 10 (b).

  Therefore, if the charge generated by the charge generating element 400 based on the deformation of the central plate-like structure 111, the negative plate-like structure 113, and the positive plate-like structure 114 is rectified by the power generation circuit 500 and taken out, The frequency characteristic of the power generation amount of the entire power generation element 1000 is as shown in the graph of FIG. That is, a first peak waveform P1 (half width h1) of the power generation amount is obtained at the position of the resonance frequency fr1 of the first resonance system I, and the second peak of the power generation amount is obtained at the position of the resonance frequency fr2 of the second resonance system II. A peak waveform P2 (half width h2) is obtained. In FIG. 11, for convenience, the height and width of the two peak waveforms P1 and P2 are the same, but in actuality, the height and width of each of the peak waveforms P1 and P2 correspond to the basic structure shown in FIG. It is determined by conditions such as dimensions and materials of each part of the part.

  Since the power generation amount shown on the vertical axis of FIG. 11 is the total power generation amount of the entire power generation element 1000, the first peak waveform P1 shown in FIG. Not only the amount of power generation based on the deformation of the structure 111 but also the amount of power generation based on the deformation of the negative plate-like structure 113 and the positive plate-like structure 114 constituting the second resonance system II is included. Similarly, the second peak waveform P2 indicates the total power generation amount based on the deformation of each of the plate-like structures 111, 113, and 114.

  In the case of the conventional power generating element shown in FIG. 1, efficient power generation is performed only when external vibration having a frequency near the resonance frequency fr shown in the graph of FIG. The band must be as narrow as the half width h. On the other hand, in the case of the power generating element 1000 according to the present invention shown in FIG. 3, peak waveforms P1 and P2 are obtained at the positions of the resonance frequencies fr1 and fr2, respectively, as shown in the graph of FIG. , Fr2 can be efficiently generated when an external vibration having a frequency in the vicinity of fr2 is applied, and the frequency band in which power can be generated can be extended to about the illustrated frequency band R1.

  Of course, the illustrated frequency band R1 is not a continuous band that covers the entire range of the frequencies fr1 to fr2, but a so-called “missing state” band. Therefore, efficient power generation is not performed for all external vibrations having a frequency in the range of fr1 to fr2. However, compared to the power generation characteristics of the conventional power generation element shown in the graph of FIG. The effect of widening the band is obtained.

  As described above, in the basic structure of the power generating element 1000 shown in FIG. 3, the plate-like structure 111 having the first attribute and the plate-like structures 113 and 114 having the second attribute are connected by the heterogeneous connector 112. The connected plate-like structures having the first attribute and the plate-like structures having the second attribute have a relationship in which the directions from the root end to the tip end are reversed. For this reason, all the plate-like structures extend in the direction along the same reference axis Y, but since they are folded back at the heterogeneous connector 112, the entire basic structure is relatively compact. The power generation element can be housed in a space, and the entire power generation element can be reduced in size.

  Moreover, with the above structure, a nested synthetic vibration system can be formed by a plurality of plate-like structures extending in the direction along the same reference axis Y. As shown in the frequency characteristics of FIG. The peaks P1 and P2 of a relatively large power generation amount can be provided at a plurality of locations, and the effect of expanding the frequency band in which power can be generated can be obtained. This is an important operation and effect of the present invention.

  In addition, when designing the power generating element according to the present invention, it is possible to shift the positions of the peaks P1 and P2 of the power generation amount by changing the spring constant and the mass of the weight for the plurality of resonance systems. is there.

  As described above, comparing the graph of the conventional apparatus shown in FIG. 2 with the graph of the apparatus according to the present invention shown in FIG. 11, in the latter, the peak waveform has increased to two sets. It extends to about frequency band R1. Therefore, when it is assumed that the vibration that would be given from the outside in the actual use environment of the power generation element 1000 would be a vibration including a frequency component in the illustrated frequency band R1, the frequency characteristic shown in FIG. Is very favorable. In particular, when the main frequency components of the external vibration in the actual use environment are fr1 and fr2, the frequency characteristics shown in FIG. 11 are exactly ideal.

  However, when the assumed frequency components of the external vibration are distributed in a wider range, the resonance frequency fr1 of the peak waveform P1 (the resonance frequency of the first resonance system I) is shifted to the left so as to be lower. It is preferable that the resonance frequency fr2 of the peak waveform P2 (the resonance frequency of the second resonance system II) is shifted to the right so as to be higher. FIG. 12A is a graph showing the result of such adjustment. The resonance frequency fr1 of the peak waveform P1 is adjusted to fr1 (-), and the peak waveform P1 shifts to the left to become a peak waveform P1 '. Further, the resonance frequency fr2 of the peak waveform P2 is adjusted to fr2 (+), and the peak waveform P2 is shifted rightward to become a peak waveform P2 '.

  As a result, in the case of the graph of FIG. 12A, the entire frequency band is extended to R2. Of course, in this frequency band, R2 is not a continuous band covering the entire range of frequencies fr1 (-) to fr2 (+), but a band of "missing state", but the frequencies fr1 (-) to fr2 ( When an external vibration including a frequency component in the range of +) is given, preferable frequency characteristics are exhibited. In particular, when the main frequency components are fr1 (-) and fr2 (+), the frequency characteristics shown in FIG. 12A are ideal.

  Conversely, when the frequency components of the assumed external vibration are distributed in a narrower range, the resonance frequency fr1 of the peak waveform P1 is shifted to the right so as to be higher in the frequency characteristics shown in FIG. It is preferable to make an adjustment to shift the resonance frequency fr2 of the peak waveform P2 to the left so as to be lower. FIG. 12B is a graph showing the result of such adjustment. The resonance frequency fr1 of the peak waveform P1 is adjusted to fr1 (+), and the peak waveform P1 shifts to the right. Further, the resonance frequency fr2 of the peak waveform P2 is adjusted to fr2 (-), and the peak waveform P2 shifts to the left. As a result, the two peak waveforms are fused to form a fused peak waveform PP having a half width hh wider than the half widths h1 and h2.

  In the case of the graph of FIG. 12B, the entire frequency band is R3, which is narrower than the frequency band R1 of the graph of FIG. 11, but since the fusion peak waveform PP is formed, the frequency band R3 Is a continuous band covering the entire range of frequencies fr1 (+) to fr2 (-). Therefore, when an external vibration including a frequency component near the frequency fr1 (+) to fr2 (-) is given, the frequency characteristic shown in FIG. 12B becomes an ideal characteristic.

  In the case of a power generation element having a frequency characteristic as shown in the graph of FIG. 12 (b), the basic structure portion includes a weight 211 connected to the vibrating end of the plate-like structure 111 having the first attribute, Weights 212 and 213 connected to the vibrating ends of the plate-like structures 113 and 114 having the second attribute, respectively. The spectral peak waveforms near the resonance frequency of these two types of weights are mutually reciprocal. The resonance frequencies of the weights are set to be adjacent to each other so as to partially overlap. In this way, when a design is made such that a plurality of spectral peak waveforms are adjacent to each other, a wider fused peak waveform PP can be formed, so that efficient power generation can be performed over a wide and continuous frequency band. become.

  In practical use, it is preferable to design a power generation element having appropriate frequency characteristics in consideration of the frequency component of external vibration generated in an actual use environment. For that purpose, it is necessary to adjust the resonance frequencies fr1 and fr2 of the first resonance system I and the second resonance system II in desired directions. Of course, when the frequency component of the assumed external vibration is high overall or low overall, it is also necessary to adjust the frequency band itself to move left and right along the frequency axis f.

  In order to adjust the resonance frequency fr of each resonance system, as shown in the table of FIG. 9, a method of adjusting the plate-like structure (a method of adjusting the spring constant) and a method of adjusting the mass of the weight body. is there. When the method of adjusting the spring constant is adopted, the first resonance system I that generates vibration due to the deformation of the plate-like structure of the first attribute, and the deformation due to the deformation of the plate-like structure of the second attribute. The second resonance system II that generates vibration may be set so that the spring constant k1 of the first resonance system I and the spring constant k2 of the second resonance system II are different. By performing such a setting, at least two sets of resonance frequencies fr1 and fr2 can be set to different values, and an effect of expanding a frequency band capable of generating power can be obtained as compared with a resonance system having a single resonance frequency. Can be

  Here, as shown in FIG. 7A, the spring constant k1 of the first resonance system I is a predetermined value with respect to the end point T1 (the heterogeneous connection body 112) with the point O (pedestal) fixed. When a force F is applied in the direction of action (for example, the Z-axis direction in the illustrated example), the displacement of the end point T1 in the direction of action is defined as d1, and is defined as a value k1 given by the equation k1 = F / d1. can do.

  Similarly, the spring constant k2 of the second resonance system II is, as shown in FIG. 7B, the end point T2 or the end point T3 or T5 (the second attribute When a force F is applied to the plate-like structure 113 or 114 in the above-mentioned acting direction to the acting direction, a displacement generated in the acting direction of the end point T3 or T5 in the acting direction is given by d2 by the following equation. Value k2.

  Actually, since the spring constant differs depending on the direction of displacement, a separate spring constant is defined for each direction. For example, as shown in FIGS. 7A and 7B, a spring constant calculated based on displacements d1 and d2 generated when a force F is applied in the Z-axis direction is a spring constant in the Z-axis direction. It turns out that. Therefore, in practical use, the design may be performed in consideration of the spring constant relating to the typical vibration direction of the external vibration which is assumed to occur in the actual use environment.

  As shown in the table of FIG. 9, the parameters affecting the spring constant are four parameters of the thickness, width, length, and material of the plate-like structure. Therefore, in order to set the two sets of resonance frequencies fr1 and fr2 to different values and to obtain the effect of expanding the frequency band in which power can be generated, at least two sets of the plurality of plate-like structures included in the basic structure are required. By changing one or more of the four parameters of thickness, width, length, and material, the spring constant of the first resonance system and the spring constant of the second resonance system are different. Should be set to.

  Of course, the resonance frequency can be adjusted by changing the mass of the weight body. The resonance frequency can also be adjusted by changing the position of the weight body (this is equivalent to changing the length of the plate-like structure).

  FIG. 13 is a top view of a basic structure of a power generating element 1001 according to a modified example of the power generating element 1000 shown in FIG. 3, and FIG. 14 is a sectional view of the basic structure of the power generating element 1001 shown in FIG. FIG. 14 is a front sectional view taken along line 14. The difference between the power generating element 1000 shown in FIG. 3 and the power generating element 1001 shown in FIG. 13 is that the pair of weights 212 and 213 in the former is replaced by a single weight 215 in the latter. Is that the center plate-like structure 111 in the above is constituted by a root end side structure 111a and a tip end side structure 111b in the latter.

  That is, the basic structure of the power generating element 1001 includes a first weight 211 connected to the lower surface of the heterogeneous connecting body 112, a lower surface of the tip end of the negative-side plate-like structure 113, and a positive-side plate-like structure 114. And a second weight body 215 connecting the lower surface of the distal end of the weight member. The first weight 211 shown in FIG. 13 is exactly the same as the first weight 211 shown in FIG. On the other hand, as shown in the cross-sectional view of FIG. 14, the second weight body 215 straddles below the root-end-side structure 111a while maintaining a predetermined distance with respect to the root-end-side structure 111a. Has a U-shaped structure.

  Therefore, the second weight body 215 can be freely displaced without contacting the root end side structure 111a within a predetermined allowable range, and can be used as a weight of the second resonance system II. Can play a role. Since the weight 215 has a structural portion that straddles below the root-end-side structure 111a, its mass is larger than the total mass of the weights 212 and 213 of the power generating element 1000 shown in FIG. Larger, more efficient power generation can be expected. Of course, the weight body 215 has a structure in which the upper surface of the distal end of the negative-side plate-like structure 113 is connected to the upper surface of the distal end of the positive-side plate-like structure 114, and extends over the root end-side structure 111a. It doesn't matter.

  In the power generating element 1001, instead of the central plate-shaped structure 111 in the power generating element 1000, a structure in which a root end side structure 111a and a tip end side structure 111b are combined is used. This is because the root tip side structure 111a plays a role as a stopper. As shown in the front cross-sectional view of FIG. 14, the distal-end-side structure 111 b is a flexible plate-like structure having the same thickness as the plate-like structures 113 and 114. It is a component that performs the same function as the central plate-shaped structure 111. On the other hand, the root-end-side structure 111a has a larger thickness than the tip-end-side structure 111b, and is a structure having higher rigidity. The root end side structure 111a functions as a support member for supporting the root end of the front end side structure 111b (central plate-shaped structure) on the pedestal 310.

  In the power generating element 1001, even when the weight body 215 is displaced due to deflection of the tip-side structure 111b and the plate-like structures 113 and 114 due to vibration given from the outside, the root-end-side structure is not affected. The body 111a (supporting member) remains almost stationary while being fixed to the pedestal 310. For this reason, even when an excessive acceleration is applied, the weight body 215 comes into contact with the root-end-side structure 111a, so that excessive displacement of the weight body 215 is limited, and a thin structure is obtained. It is possible to prevent the body 111b, 113, 114 from being damaged. Of course, when the function as the stopper is unnecessary, the central plate-shaped structure 111 shown in FIG. 3 is used as it is instead of using the structure in which the root end side structure 111a and the tip end side structure 111b are combined. I just need.

  As described above, in the present invention, it is possible to design a power generating element having a desired frequency characteristic by changing any parameter shown in the table of FIG. However, since the two sets of resonance systems I and II included in the basic structure have a nested relationship as shown in FIG. 7 (c), changing the parameters of one resonance system and the other May affect the parameters of the resonance system. For example, in the basic structure shown in FIG. 3, when the thickness, width, length, and the like of the negative plate-like structure 113 and the positive plate-like structure 114 that constitute the second resonance system II are changed, the mass of these also increases. Since a change occurs, the mass of the weight of the first resonance system I changes as a result.

  In other words, if the thickness, width, length, and the like of the negative plate-like structure 113 and the positive plate-like structure 114 are designed to adjust the resonance frequency fr2 of the second resonance system II, The resonance frequency fr1 of the first resonance system I also fluctuates. For this reason, in order to design a power generation element having a desired frequency characteristic, a computer simulation is used to obtain a frequency characteristic after the design change, and a further design change is performed based on the result. It is preferable to do so.

<<<< §5. Charge generation element and power generation circuit >>>
In the power generation element 1000 shown in FIG. 3, the charge generation element 400 and the power generation circuit 500 are shown as a block diagram. Here, specific examples of these will be described. First, the charge generation element 400 will be described. As described above, when external vibration is applied to the pedestal 310, each of the plate-shaped structures 111, 113, and 114 is bent and deformed, and each of the weights 211, 212, and 213 vibrates. The charge generation element 400 is a component that generates a charge based on deformation of each of the plate-like structures 111, 113, and 114.

  As the charge generation element 400, for example, an electret can be used, but for the basic structure shown in FIG. 3, a layered piezoelectric element is formed on the surface of each of the plate-like structures 111, 113, and 114. Is preferred. The embodiment described below is an example in which a piezoelectric element is used as the charge generation element 400, and the piezoelectric element has a three-layer structure including a lower electrode layer, a piezoelectric material layer, and an upper electrode layer.

  FIG. 15A is a top view of a power generation element 1002 obtained by forming a piezoelectric element as the charge generation element 400 in the basic structure shown in FIG. 3, and FIG. FIG. 2 is a cross-sectional side view (a power generation circuit 500 is not shown). In other words, FIGS. 15 (a) and 15 (b) show a state in which the piezoelectric element 400 is added to the basic structure shown in FIGS. 4 (a) and 4 (b). The three-layer structure of the piezoelectric element 400 is clearly shown in the side sectional view of FIG. 15B as a layer formed on the upper surface of the central plate-shaped structure 111.

  As shown in FIG. 15B, the piezoelectric element 400 includes a lower electrode layer 410 formed on the upper surface of each of the plate-like structures 111, 113, and 114, and a lower electrode layer 410 formed on the upper surface of the lower electrode layer 410. And an upper electrode layer 430 formed on the upper surface of the piezoelectric material layer 420, and supplies electric charges of a predetermined polarity to the lower electrode layer 410 and the upper electrode layer 430, respectively. Has a function.

  Note that power generation by the piezoelectric element 400 is actually performed at a portion where the plate-like structures 111, 113, and 114 are deformed (a portion where the weight body is not joined). It is sufficient to form the piezoelectric element 400 only in the portion where the deformation occurs. However, in the case of the embodiment shown here, in order to simplify the manufacturing process, the lower electrode layer 410 and the piezoelectric material layer 420 are provided with an E-shaped main substrate 110 (central plate-like structure 111, inter-species connection). The body 112, the negative-side plate-like structure 113, and the positive-side plate-like structure 114) are formed over the entire upper surface, and only the upper electrode layer 430 is formed so as to be localized at predetermined locations.

  Rectangular figures E11 to E34 shown by hatching in the top view of FIG. 15A indicate individual individual upper electrode layers that are localized (the hatching in the top view indicates these individual upper electrode layers). This is for clearly illustrating the shape pattern of E11 to E34, and is not for illustrating a cross section.)

  When the basic structure is viewed from above, as shown in FIG. 15A, it is observed that twelve individual upper electrode layers E11 to E34 are arranged on the upper surface of the E-shaped piezoelectric material layer 420. it can. Under the E-shaped piezoelectric material layer 420, a lower electrode layer 410 also having an E-shape is disposed, and further below the lower electrode layer 410, a main substrate 110 also having an E-shape is disposed. FIG. 15B is a side cross-sectional view of the basic structure section cut along the YZ plane. The individual upper electrode layers E11 and E13 formed on the central plate-like structure 111 appear, and are located at the back. A part of the individual upper electrode layer E23 formed on the negative-side plate-like structure 113 appears.

  As a result, in the case of the embodiment shown in FIG. 15, a common lower electrode layer 410 is formed on the entire upper surface of the E-shaped main substrate 110 including the respective plate-like structures 111, 113, and 114. The common piezoelectric material layer 420 is formed on the upper surface of the common piezoelectric material layer 420, and a plurality of electrically independent individual upper electrode layers E11 to E34 are formed at different positions on the upper surface of the common piezoelectric material layer 420.

  16 (a) and 16 (b) are reference diagrams showing the dimensions of each part of the power generating element 1002 shown in FIG. 15, FIG. 16 (a) is a top view, and FIG. 16 (b) is a side view. . The dimensions of each part shown in FIG. 16 (a) are as follows. d1 = 0.5 mm, d2 = 0.8 mm, d3 = 0.2 mm, d4 = 0.3 mm, d5 = 0.5 mm, d6 = 1.0 mm, d7 = 0.3 mm, d8 = 0.2 mm, d9 = 0.3 mm, d10 = 1.0 mm, d11 = 0.4 mm. On the other hand, the dimensions of each part shown in FIG. 16B are as follows. t1 = 525 μm, t2 = 15 μm, t3 = 0.05 μm, t4 = 2 μm, t5 = 0.05 μm. Of course, these respective dimension values show the actual dimensions of the power generating element 1002 according to the embodiment of the present invention as an example, and the present invention is not limited by these dimension values at all.

  The piezoelectric material layer 420 has a property of causing polarization in the thickness direction by the action of stress that expands and contracts in the layer direction. Specifically, the piezoelectric material layer 420 can be configured by a piezoelectric thin film such as PZT (lead zirconate titanate) or KNN (potassium sodium niobate). Alternatively, a bulk type piezoelectric element may be used. Each of the electrode layers 410 and 430 may be made of any material as long as it is a conductive material. However, in practice, it may be made of a metal layer such as gold, platinum, aluminum, or copper. .

  When the above-described piezoelectric element is used as the charge generation element 400, it is optimal to use a silicon substrate as the main substrate 110. Generally, when the piezoelectric element is formed on the upper surface of the metal substrate and the piezoelectric element is formed on the upper surface of the silicon substrate according to the current manufacturing process, the latter is larger than the former piezoelectric constant. This is because the piezoelectric constant is about three times larger, and the power generation efficiency of the latter is overwhelmingly high. This is presumably because, when the piezoelectric element is formed on the upper surface of the silicon substrate, the crystal orientation of the piezoelectric element becomes uniform.

  When external vibration is applied to the pedestal 310, stress is applied to each part of the piezoelectric material layer 420 due to the bending of the main substrate 110. As a result, polarization occurs in the thickness direction of the piezoelectric material layer 420, and charges are generated in the upper electrode layer 430 and the lower electrode layer 410. In other words, the piezoelectric element 400 has a function of supplying charges of a predetermined polarity to the lower electrode layer 410 and the upper electrode layer 430 based on external vibration. Although not shown in the figure, wiring is provided between each electrode layer and the power generation circuit 500, and the electric charge generated by the piezoelectric element 400 is taken out as electric power by the power generation circuit 500.

  Of course, the shape and arrangement of the individual upper electrode layers formed on the plate-like structures 111, 113, 114 are not necessarily limited to the example shown in the top view of FIG. For example, FIG. 17 is a top view of a power generating element 1003 according to still another modified example of the power generating element 1000 shown in FIG. 3 (illustration of the power generating circuit 500 is omitted). Also in this top view, the hatching is for clearly showing the shape pattern of the individual upper electrode layer constituting the charge generation element 400, and is not for showing a cross section.

  In the case of the example shown in FIG. 17, a single individual upper electrode layer E10 is formed on the upper surface of the central plate-shaped structure 111 so as to cover almost the entire area, and on the upper surface of the negative-side plate-shaped structure 113, The individual upper electrode layers E25 and E26 are formed on both sides of the longitudinal axis L1 passing through the center, respectively. On the upper surface of the positive side plate-like structure 114, the individual upper electrode layers E35 are provided on the root end side. An individual upper electrode layer E36 is formed on the tip side.

  Of course, the power generation element 1003 employing the electrode arrangement as shown in FIG. 17 as the arrangement of the individual upper electrode layers can also generate power, but the power generation efficiency is as shown in FIG. The power generation element 1002 employing the electrode arrangement is better. This is because the arrangement of the individual upper electrode layers E11 to E34 shown in FIG. 15A causes the individual individual upper electrode layers E11 to E34 when the respective plate-like structures 111, 113 and 114 undergo a specific deformation. This is because consideration is given so that electric charges of the same polarity are supplied from the piezoelectric material layer 420 in each case.

  FIG. 18 is a top view showing a preferred arrangement of individual upper electrode layers for a general plate-like structure 20 having a left end fixed to the pedestal 10. As shown in the figure, a weight 30 is connected to the right end of the plate-shaped structure 20, and the weight 30 is supported on the pedestal 10 by a cantilever structure using the plate-shaped structure 20. Will be. Although not shown, in practice, a lower electrode layer is formed on the entire upper surface of the plate-like structure 20, and a piezoelectric material layer is formed on the entire upper surface thereof. The layers E1 to E4 are formed on the upper surface of the piezoelectric material layer. The hatching in the figure is to clearly show the shape pattern of the individual upper electrode layers E1 to E4, and does not show a cross section.

  The feature of the arrangement example shown in FIG. 18 is that, when a center axis extending in a direction parallel to the Y axis is defined at the center of the upper surface of the plate-like structure 20, both sides and the tip of the center axis on the root end side are defined. The point is that the individual upper electrode layers E1 to E4 are arranged on both sides of the central axis on the part side. Specifically, in the case of the illustrated example, the individual upper electrode layers E1 and E2 are arranged on both sides of the center axis on the root end side (left side in the figure) with the Y axis as the center axis. The individual upper electrode layers E3 and E4 are arranged on both sides of the central axis on the side of the section (right side in the figure).

  Generally, when such four sets of individual upper electrode layers E1 to E4 are arranged for one plate-shaped structure 20, when the plate-shaped structure 20 undergoes a specific deformation, each individual upper electrode layer E1 to E4 is formed. E4 is supplied with electric charges of the same polarity from the piezoelectric material layer.

  For example, if the weight 30 oscillates in the primary resonance mode (see FIG. 8A) in the Z-axis direction (the direction perpendicular to the plane of FIG. 18) with the pedestal 10 fixed, at a certain moment Either the compressive stress or the tensile stress acts on the region of the top surface on the root end side where the electrodes E1 and E2 are arranged, and the top surface on the tip end side where the electrodes E3 and E4 are arranged. The reverse stress acts on the region of. On the other hand, assuming that the weight body 30 vibrates in the primary resonance mode in the Y-axis direction, at any given moment, the entire area of the upper surface of the plate-like structure 20 has either the compressive stress or the tensile stress. Works. If the weight body 30 vibrates in the primary resonance mode in the X-axis direction, at a certain moment, the compressive stress or the tensile stress in the area of the upper surface where the electrodes E1 and E4 are arranged. The stress acts on the region of the upper surface where the electrodes E2 and E3 are arranged.

Therefore, when at least vibration in the primary resonance mode is assumed, charges of the same polarity are supplied to the individual upper electrode layers E1 to E4 at a certain point in time regardless of the direction in which the weight body 30 vibrates. You. For example, at a certain point in time, the polarity of the charge supplied to the individual upper electrode layer E1 is either positive or negative, and at a certain point, a certain portion in the individual upper electrode layer E1 has a positive charge and another No negative charge is supplied to any part.
The same applies to the individual upper electrode layers E2 to E4.

  As described above, it is important that the electric charge of the same polarity is always supplied to a certain individual upper electrode layer at a certain time in order to improve the power generation efficiency. For example, in the case of the embodiment shown in FIG. 17, only a single upper electrode layer E10 is formed on the upper surface of the central plate-shaped structure 111, but in such a configuration, in the X-axis direction or the Z-axis direction. In this case, charges of both positive and negative polarities are simultaneously supplied to the same upper electrode layer E10 at the same time. That is, charges of opposite polarities are generated on the same conductor, cancel each other out and disappear, resulting in power generation loss. The same applies to the configuration of the upper electrode layers E25 and E26 and the configuration of the upper electrode layers E35 and E36 shown in FIG.

  For such a reason, in practice, it is preferable to form four sets of electrically independent individual upper electrode layers E1 to E4 on one plate-like structure 20, as in the example shown in FIG. The arrangement of the individual upper electrode layers shown in FIG. 15A employs the four electrode arrangements shown in FIG. 18 for each of the plate-like structures 111, 113, and 114. That is, on the upper surface of the central plate-like structure 111, the electrode layers E11 and E12 are arranged on both sides of the center axis on the root end side with the Y axis as the center axis, and on both sides of the center axis on the tip side. Electrode layers E13 and E14 are arranged. On the upper surface of the negative plate-shaped structure 113, electrode layers E21 and E22 are disposed on both sides of the central axis on the root end side with the longitudinal axis L1 parallel to the Y axis as the central axis. The electrode layers E23 and E24 are arranged on both sides of the central axis of the above. Similarly, electrode layers E31 and E32 are arranged on the upper surface of the positive-side plate-shaped structure 114 on both sides of the central axis on the longitudinal end axis L2 parallel to the Y-axis, and on the tip end side. The electrode layers E33 and E34 are arranged on both sides of the central axis on the side.

  In the example shown in FIG. 18, the stress generated in the plate-shaped structure 20 tends to concentrate most on the portion immediately before the connection with the pedestal 10 and the weight 30, so that the stress of the upper electrode layers E1 and E2 is reduced. The left end preferably extends to the boundary position with the pedestal 10, and the right ends of the upper electrode layers E3, E4 preferably extend to the boundary position with the weight body 30. Each individual upper electrode layer shown in FIG. 15A also has a configuration in which the end is extended to such a boundary position.

  All four sets of upper electrode layers E1 to E4 shown in FIG. 18 are always supplied with charges of the same polarity at a certain point in time. However, the polarity of the charges taken out from each upper electrode layer changes every moment. And change. This is because when the plate-like structure 20 vibrates, the direction of the stress (compression direction stress or extension direction stress) applied to each part of the piezoelectric material layer changes, and the polarity of the generated charge changes accordingly. is there. Therefore, in the power generation element 1002 shown in FIG. 15A, in order to take out the electric charges generated in each of the twelve sets of individual upper electrode layers E11 to E34 and use them as electric power, the electric power generation circuit 500 generates It is necessary to rectify the resulting current.

  FIG. 19 is a circuit diagram showing a specific configuration of the power generation circuit 500 having such a rectification function. In FIG. 19, P11 to P34 shown on the left are portions of the piezoelectric material layer 420 located below the individual upper electrode layers E11 to E34 shown in FIG. The lines drawn on the left side of P11 to P34 correspond to the common lower electrode layer 410, and the lines drawn on the right side of P11 to P34 correspond to the individual upper electrode layers E11 to E34, respectively.

  In this circuit diagram, D11 (+) to D34 (+) are rectifying elements (diodes), each of which plays a role in extracting positive charges generated in the individual upper electrode layers E11 to E34. D11 (−) to D34 (−) are also rectifying elements (diodes) and play a role of extracting negative charges generated in the individual upper electrode layers E11 to E34, respectively.

  On the other hand, Cf is a smoothing capacitive element (capacitor) whose positive terminal (upper terminal in the figure) is supplied with the extracted positive charges, and whose negative terminal (lower terminal in the figures) is the extracted negative charges. Is supplied. The capacitive element Cf plays a role of smoothing the pulsating flow based on the generated charge, and the impedance of the capacitive element Cf can be almost neglected in a steady state in which the vibration of the weight body is stable. ZL connected in parallel with the capacitance element Cf indicates a load of a device that receives supply of power generated by the power generation element 1002. Further, D41 and D42 facing in opposite directions are connected as rectifying elements (diodes) between both terminals of the capacitive element Cf and the lower electrode layer 410.

  As a result, the power generation circuit 500 includes the capacitive element Cf and the positive electrode of the capacitive element Cf from each of the individual upper electrode layers E11 to E34 for guiding the positive charges generated in the individual upper electrode layers E11 to E34 to the positive electrode side of the capacitive element Cf. Rectifying elements D11 (+) to D34 (+) whose forward direction is toward the side, and a capacitor for guiding negative charges generated in the individual upper electrode layers E11 to E34 to the negative electrode side of the capacitive element Cf. A rectifying element for negative charge D11 (−) to D34 (−) having a forward direction from the negative electrode side of the element Cf toward each of the individual upper electrode layers E11 to E34, and the electric energy converted from the vibration energy. Is smoothed by the capacitive element Cf and supplied to the load ZL.

  In this circuit diagram, the positive charge extracted by the positive charge rectifying elements D11 (+) to D34 (+) and the negative charge rectified elements D11 (-) to D34 (-) are extracted to the load ZL. Negative charges will be supplied. Therefore, in principle, the most efficient power generation becomes possible if the total amount of the positive charges and the total amount of the negative charges generated in the individual upper electrode layers E11 to E34 at the individual moments are equal. .

  Therefore, in practice, it is preferable that the basic structure of the power generation element 1002 has a symmetrical structure that is plane-symmetric with respect to the YZ plane as shown in FIG. Further, it is preferable that the electrode layers E11 to E14 formed on the upper surface of the central plate-shaped structure 111 have a symmetrical structure that is plane-symmetric with respect to the YZ plane, and the electrode layers E21 to E14 formed on the upper surface of the negative-side plate-shaped structure 113. E24 preferably has a symmetrical structure that is plane-symmetric with respect to a plane parallel to the Z-axis including the longitudinal axis L1. The electrode layers E31 to E34 formed on the upper surface of the positive-side plate-like structure 114 are formed of the longitudinal axis L2. And a symmetric structure that is plane-symmetric with respect to a plane parallel to the Z axis is preferable.

<<<< §6. Example in which the basic structure is accommodated in the device housing >>>>>
Here, an embodiment in which the power generating element is housed in the device housing will be described. FIG. 20A is a plan sectional view of a power generating element 1500 with a device housing having a configuration in which the power generating element 1000 shown in FIG. 3 is housed in a device housing 310A, and FIG. 20B is a side cross sectional view.

  The illustrated device housing 310A is a rectangular parallelepiped structure suitable for accommodating the basic structure of the power generating element 1000 shown in FIG. 3, and is a side plate shown in a plan sectional view of FIG. 311 and a top plate 315 and a bottom plate 316 shown in the side sectional view of FIG. FIG. 20A is a cross-sectional view of the power generating element 1500 cut along a plane parallel to the XY plane and slightly above the XY plane, and FIG. It is sectional drawing cut | disconnected by the plane. Actually, a charge generation element 400 such as a piezoelectric element is provided on the upper surface of the main substrate 110, and a power generation circuit 500 for taking out the generated charge as electric power is provided in any place. However, FIG. 20 does not show the charge generation element 400 and the power generation circuit 500.

  In the case of this embodiment, the pedestal 310 shown in FIG. 3 is incorporated as a part of the device housing 310A, and the illustrated side plate 311 functions as the pedestal 310 shown in FIG. Of course, the pedestal 310 is left separately from the device housing 310A, and the basic structure shown in FIG. 3 is entirely stored in the device housing 310A, and the pedestal 310 is fixed in the device housing 310A. (For example, the bottom surface of the pedestal 310 may be joined to the top surface of the bottom plate 316).

  As shown in the figure, a predetermined space is secured between the inner surface of the device housing 310A and the outer surfaces of the plate-like structures 111, 113, 114 and the weights 211, 212, 213. When the magnitude of the external vibration applied to the housing 310A is equal to or less than a predetermined reference level, each of the plate-like structures 111, 113, 114 and each of the weights 211, The 212 and 213 vibrate in the secured space to generate power. However, when the magnitude of the external vibration applied to the device housing 310A exceeds the reference level, each of the plate-like structures 111, 113, 114, and each of the weights according to the applied external vibration. Any one of the bodies 211, 212, and 213 (in some cases, the charge generation element 400 formed on the upper surface of the main substrate 110) contacts the inner surface of the device housing 310A, and further displacement is limited. .

  Of course, from the viewpoint of increasing the power generation efficiency, the displacement of each of the plate-like structures 111, 113, 114 and each of the weights 211, 212, 213 should not be controlled. Generally, when a large displacement occurs, the plate-shaped structure is largely bent, and the charge generation element 400 such as a piezoelectric element can generate a larger charge. However, if the plate-like structure is excessively displaced beyond its elastic limit, the plate-like structure may be damaged, and may not function as a power generating element. Therefore, in practice, the gap size between the inner surface of the device housing 310A and the outer surfaces of the plate-like structure and the weight body is set to a predetermined value so as not to cause excessive displacement such that the plate-like structure is damaged. When an external vibration exceeding the reference level is applied, the plate-like structure and the weight contact the inner surface of the device housing 310A so that no further displacement occurs. It is preferable to keep it.

<<<< §7. Second to eighth embodiments >>>>>
<7-1. Difference from First Embodiment>
Subsequently, as modified examples of the first embodiment described above, the second to eighth embodiments will be individually described. In these embodiments, the form of the basic structure in the power generating element 1000 according to the first embodiment, in particular, the number of plate-like structures and the mutual connection relationship are changed, all of which are described in §6. As described above, this embodiment is shown as an embodiment housed in an apparatus housing.

  Note that the basic operation of the power generating elements according to the second to eighth embodiments is almost the same as the operation of the power generating element according to the first embodiment described above, and thus detailed descriptions of individual embodiments are given. The description of the operation is omitted.

  FIGS. 21 to 28 and 31 used in the following description are plan sectional views in which the power generating elements according to the second to eighth embodiments are cut along a plane parallel to the XY plane and slightly above the XY plane. The illustration of the power generation circuit 500 is omitted. In addition, for each plate-like structure, an example is shown in which a piezoelectric element employing the four sets of electrode arrangements shown in FIG. 18 is used as the charge generation element 400 (with some exceptions). In these drawings, rough hatching on a portion of the apparatus housing (including a portion functioning as a pedestal) indicates that the portion is a cross-sectional portion. On the other hand, with respect to the portion of the main substrate (the plate-like structure and each connection body), the fine hatched hatching indicates the region where each individual upper electrode layer is formed, and the dot hatching indicates the area on the lower surface of the main substrate. It shows a region where the weights are joined, and neither shows a cross section.

  Also, in the following description, a space having a positive X coordinate value is defined as a positive space, and a space having a negative X coordinate value is defined as a negative space, of the space partitioned by the YZ plane and the YZ plane. The plate-like structure arranged on the YZ plane is called a center plate-like structure, the plate-like structure placed in the positive space is called a positive-side plate structure, and the plate-like structure is placed in the negative space. The resulting plate-like structure is referred to as a negative-side plate-like structure.

<7-2. Second Embodiment>
FIG. 21 is a plan cross-sectional view of a power generating element 2000 with a device housing according to the second embodiment of the present invention. In this example, the main substrate 120 having an E-shaped plane has a negative-side plate-like structure 121 and a positive-side plate-like structure 122 having a first attribute, a heterogeneous connector 123, and a second attribute. A central plate-like structure 124. The heterogeneous connector 123 plays a role of connecting the negative plate-like structure 121 and the positive plate-like structure 122 having the first attribute to the central plate-like structure 124 having the second attribute. The basic structure portion includes the main substrate 120, a pedestal 321 incorporated in the apparatus housing 320 as a part of a side plate, and two sets of weight bodies 221 and 222. The pedestal 321 plays a role of supporting the negative-side plate-like structure 121 and the positive-side plate-like structure 122 at the root end points Q1 and Q2.

  Here, the negative-side plate-shaped structure 121 is disposed in the negative-side space, the root end is connected to the root end point Q1 of the pedestal 321, and the front end is connected to the heterogeneous connector 123. A plate-like structure having a first attribute extending in a direction parallel to the Y-axis (direction of the longitudinal axis L1) such that the direction from the root end to the tip is the Y-axis positive direction. Further, the positive-side plate-like structure 122 is disposed in the positive-side space, the root end is connected to the root end point Q2 of the pedestal, and the front end is connected to the heterogeneous connector 123. A plate-like structure having a first attribute extending in a direction parallel to the Y-axis (direction of the longitudinal axis L2) such that a direction from the end to the tip is the Y-axis positive direction.

  On the other hand, the central plate-shaped structure 124 is disposed on the YZ plane, the root end is connected to the heterogeneous connector 123, and the direction from the root end to the tip is the Y-axis negative direction. Thus, the plate-like structure having the second attribute extends in a direction parallel to the Y axis. The first weight 221 is a weight connected to the lower surface of the heterogeneous connector 123 (the area shown by dot hatching in the figure), and the second weight 222 is located at the center. It is a weight connected to a region on the lower surface of the distal end portion of the plate-like structure 124 (region shown by dot hatching in the figure).

  In the first embodiment shown in FIG. 3, only one central plate-like structure 111 is provided as a plate-like structure having a first attribute, and a negative plate-like structure is provided as a plate-like structure having a second attribute. The body 113 and the positive-side plate-like structure 114 are provided. However, in the second embodiment shown in FIG. 21, the negative-side plate-like structure 121 has a first attribute. And a positive-side plate-like structure 122 is provided, and only one central plate-like structure 124 is provided as a plate-like structure having the second attribute.

  Both embodiments have a total of three plate-like structures, and the power is extracted using a total of 12 sets of individual upper electrode layers. However, in the case of the second embodiment shown in FIG. Since the connection between the main substrate 120 and the pedestal 321 is made at the two root points Q1 and Q2, the power generation circuit 500 (not shown) provided in the device housing 320 and each individual upper electrode layer Can be performed at two locations, that is, near the root end point Q1 and near the root end point Q2, and an advantage that wiring can be easily obtained is obtained.

<7-3. Third Embodiment>
FIG. 22 is a plan cross-sectional view of a power generating element 3000 with a device housing according to the third embodiment of the present invention. In this example, the main substrate 130 includes a first negative side plate-like structure 131 and a first positive side plate-like structure 132 having a first attribute, a heterogeneous connector 133, and a second attribute having a second attribute. It is constituted by two negative-side plate-like structures 134 and a second positive-side plate-like structure 135, and a foremost end connector 136. The heterogeneous connector 133 includes a first negative plate-like structure 131 and a first positive plate-like structure 132 having a first attribute, and a second negative plate-like structure 134 and a second negative plate-like structure 134 having a second attribute. It serves to connect the second positive-side plate-shaped structure 135 to the second side. The foremost end connector 136 is a member connected to both the tip of the second negative plate-shaped structure 134 and the tip of the second positive plate-shaped structure 135.

  The basic structure portion includes the main substrate 130, a pedestal 331 incorporated in the device housing 330 as a part of a side plate, and two sets of weights 231 and 232. The pedestal 331 plays a role of supporting the first negative plate-shaped structure 131 and the first positive plate-shaped structure 132 at the root end points Q1 and Q2.

  Here, the first negative-side plate-like structure 131 is disposed in the negative-side space, the root end is connected to the root end point Q1 of the pedestal 331, and the front end is connected to the heterogeneous connector 133. And a plate-like structure having a first attribute extending in a direction parallel to the Y-axis (direction of the longitudinal axis L1) such that the direction from the root end toward the tip is the Y-axis positive direction. It is. Further, the first positive-side plate-like structure 132 is disposed in the positive-side space, the root end is connected to the root end point Q2 of the pedestal, and the distal end is connected to the heterogeneous connector 133. It is a plate-like structure having a first attribute extending in a direction parallel to the Y-axis (direction of the longitudinal axis L2) such that the direction from the root end toward the tip is the Y-axis positive direction. .

  On the other hand, the second negative-side plate-like structure 134 is disposed in the negative-side space, the root end is connected to the heterogeneous connector 133, and the tip is connected to the foremost end connector 136. A plate-like structure having a second attribute extending in a direction parallel to the Y-axis (direction of the longitudinal axis L3) such that the direction from the root end toward the tip is the Y-axis negative direction. is there. In addition, the second front-side plate-like structure 135 is disposed in the front-side space, the root end is connected to the heterogeneous connector 133, and the tip is connected to the foremost end connector 136. A plate-like structure having a second attribute extending in a direction parallel to the Y-axis (direction of the longitudinal axis L4) such that the direction from the root end toward the tip is the Y-axis negative direction. is there.

  The first weight 231 is a weight connected to the lower surface of the heterogeneous connector 133 (the area indicated by dot hatching in the figure), and the second weight 232 is It is a weight connected to the lower surface of the distal end connector 136 (the area indicated by dot hatching in the figure).

  In the second embodiment shown in FIG. 21, only one central plate-like structure 124 is provided as a plate-like structure having the second attribute. However, in the third embodiment shown in FIG. As a plate-like structure having two attributes, two of a second negative-side plate-like structure 134 and a second positive-side plate-like structure 135 are provided. For this reason, the number of plate-like structures is increased to four, and power is extracted using a total of 16 individual upper electrode layers. For this reason, although the width in the X-axis direction slightly increases, larger power can be generated. Of course, also in the case of the third embodiment, the connection between the main board 130 and the pedestal 331 is made at two points, the root end points Q1 and Q2. Is obtained.

  It is also possible to adopt a configuration in which the foremost end connection body 136 is not provided. In this case, the second weight is connected to the lower surface of the distal end of the second negative plate-shaped structure 134, and the third weight is connected to the lower surface of the distal end of the second positive plate-shaped structure 135. In this way, a total of three sets of weights may be separately provided in combination with the first weights 231 connected to the lower surface of the heterogeneous connector 133.

<7-4. Fourth embodiment>
FIG. 23 is a plan sectional view of a power generating element 4000 with a device housing according to the fourth embodiment of the present invention. The essential difference between the power generating element 3000 shown in FIG. 22 and the power generating element 4000 shown in FIG. 23 is that, in the latter, a central plate-shaped structure 147 and a front end connection body 148 are added. The central plate-shaped structure 147 is a plate-shaped structure having the third attribute, which has not been found in the above embodiments. An important feature of the fourth embodiment is that, in addition to the plate structure of the first attribute and the plate structure of the second attribute, a plate structure of the third attribute is further provided. is there.

  In the case of this example, the main substrate 140 includes a first negative side plate-like structure 141 and a first positive side plate-like structure 142 having a first attribute, a first heterogeneous connector 143, and a second attribute. A second negative side plate-like structure 144 and a second positive side plate-like structure 145, a second heterogeneous connector 146, a central plate-like structure 147 having a third attribute, And a connector 148. The foremost end connector 148 is a member connected to the front end of the central plate-shaped structure 147. Here, the first heterogeneous connector 143 includes a first negative plate-like structure 141 and a first positive plate-like structure 142 having a first attribute, and a second negative plate-like structure 142 having a second attribute. And serves to connect the first structural plate 144 and the second front plate-like structure 145. In addition, the second heterogeneous connector 146 includes a second negative plate-like structure 144 and a second positive plate-like structure 145 having a second attribute, and a central plate-like structure 147 having a third attribute. And serve to connect.

In other words, the first heterogeneous connector 143 connects the plate-like structure having the first attribute and the plate-like structure having the second attribute to each other, and forms the first of the plate-like structures. Serves as a turning point.
Similarly, the second heterogeneous connector 146 connects the plate-like structure having the second attribute and the plate-like structure having the third attribute to each other, and forms a second turning point of the plate-like structure. Play a role. As described above, in the fourth embodiment, the plate-like structure is folded at the first turning point, and is also folded at the second turning point.

  The basic structure portion includes the main substrate 140, a pedestal 341 incorporated as a part of a side plate in the device housing 340, and three sets of weights 241, 242, and 243. The pedestal 341 serves to support the first negative plate-like structure 141 and the first positive plate-like structure 142 at the root end points Q1 and Q2.

  Here, the first negative-side plate-like structure 141 is disposed in the negative-side space, the root end is connected to the root end point Q1 of the pedestal 341, and the front end is connected to the first heterogeneous connector. 143, a plate having a first attribute extending in a direction parallel to the Y axis (direction of the longitudinal axis L1) such that the direction from the root end toward the tip is the Y axis positive direction. -Like structure. Further, the first front-side plate-like structure 142 is disposed in the front-side space, the root end is connected to the root end point Q2 of the pedestal, and the front end is connected to the first heterogeneous connecting body 143. A plate-like structure having a first attribute that is connected and extends in a direction parallel to the Y-axis (the direction of the longitudinal axis L2) such that the direction from the root end to the tip is the Y-axis positive direction. Body.

  On the other hand, the second negative-side plate-like structure 144 is disposed in the negative-side space, the root end is connected to the first heterogeneous connecting body 143, and the tip is connected to the second heterogeneous connecting body. The second attribute connected to the connector 146 and extending in the direction parallel to the Y axis (the direction of the longitudinal axis L3) so that the direction from the root end toward the tip is the Y axis negative direction. It is a plate-like structure having. Further, the second front-side plate-like structure 145 is disposed in the front-side space, the root end is connected to the first interspecies connection member 143, and the tip end is connected to the second interspecies connection. The second attribute connected to the connector 146 and extending in the direction parallel to the Y axis (the direction of the longitudinal axis L4) so that the direction from the root to the tip is the negative direction of the Y axis. It is a plate-like structure having.

  The central plate-shaped structure 147 is arranged on the YZ plane, the root end is connected to the second heterogeneous connector 146, and the direction from the root end to the distal end is the Y-axis. It is a plate-like structure having a third attribute extending in a direction parallel to the Y axis so as to be in the positive direction, and the foremost end connector 148 is connected to the front end of the central plate-like structure 147. It is a member.

  The first weight 241 is a weight connected to the lower surface of the first heterogeneous connecting body 143 (the area shown by dot hatching in the figure), and the second weight 242. Is a weight connected to the lower surface (the area shown by dot hatching in the figure) of the second heterogeneous connector 146, and the third weight 243 is It is a weight connected to the lower surface (the area shown by dot hatching in the figure).

  In the fourth embodiment, power is extracted using a total of 16 sets of individual upper electrode layers as in the third embodiment. Further, since the connection between the main board 140 and the pedestal 341 is made at two locations of the root end points Q1 and Q2, there is an advantage that the wiring to the power generation circuit 500 (not shown) can be easily arranged. Further, in the basic structure of the fourth embodiment, the first resonance system based on the vibration of the plate-like structure having the first attribute and the second resonance system based on the vibration of the plate-like structure having the second attribute A more complex combined vibration system including the resonance system and the third resonance system based on the vibration of the plate-like structure having the third attribute is configured.

  Note that it is also possible to adopt a configuration in which the foremost end connection body 148 is not provided. In this case, the third weight may be connected to the lower surface of the distal end portion of the central plate-shaped structure 147. However, as shown in the figure, if the foremost end connecting member 148 having a width wider than the central plate-like structure 147 is provided, and the third weight 243 is connected to the lower surface thereof, the third weight can be obtained. As the body 243, a weight body having a larger mass can be formed, and larger vibration can be generated. In the illustrated example, the individual upper electrode layer (piezoelectric element) is not provided on the upper surface of the central plate-shaped structure 147. An upper electrode layer (piezoelectric element) may be provided to extract electric power.

<7-5. Fifth Embodiment>
FIG. 24 is a plan cross-sectional view of a power generating element 5000 with a device housing according to the fifth embodiment of the present invention. An important feature of the fifth embodiment is that plate-like structures having the same attribute are arranged in series. In the embodiments described so far, the plate-like structures having the same attribute are arranged in parallel, and none of them is arranged in series. Here, let's confirm this point first.

  First, in the case of the power generating element 1000 according to the first embodiment illustrated in FIG. 3, the negative-side plate-like structure 113 and the positive-side plate-like structure 114 are provided as the plate-like structures of the second attribute. All of these are connected at the root end to the heterogeneous connector 112 and are arranged in parallel. In the case of the power generating element 2000 according to the second embodiment shown in FIG. 21, the negative-side plate-like structure 121 and the positive-side plate-like structure 122 are provided as the plate-like structures of the first attribute. Each of these has a root end connected to the pedestal 321 and is arranged in parallel.

  On the other hand, in the case of the power generating element 3000 according to the third embodiment shown in FIG. 22, the negative-side plate-like structure 131 and the positive-side plate-like structure 132 are provided as the first attribute plate-like structure. Each of these has a root end connected to the pedestal 331 and is arranged in parallel. Further, a negative-side plate-like structure 134 and a positive-side plate-like structure 135 are provided as the plate-like structures of the second attribute, all of which have their root ends connected to the heterogeneous connector 133. And are arranged in parallel. The same applies to the power generating element 4000 according to the fourth embodiment shown in FIG.

  However, in the case of the power generating element 5000 according to the fifth embodiment shown in FIG. 24, a total of four plate-like structures are provided, and among them, three plate-like structures 151, 153, 154 The first attribute is a plate-shaped structure having a first attribute in which the direction from the root end to the tip is the Y-axis positive direction, and the second attribute is a plate-shaped structure in which the direction from the root tip to the tip is the Y-axis negative direction. The structure is only the plate-like structure 156. Here, the plate-like structures 153 and 154 are in a parallel arrangement relationship, but the plate-like structures 151 and 153 are in a relationship arranged in series, and the plate-like structures 151 and 154 are also arranged in series. It has been a relationship. As a result, the member 152 plays a role of connecting the plate-like structures having the same first attribute. Therefore, here, this member 152 will be referred to as an inter-generic connector.

  Therefore, in the case of this example, the main substrate 150 includes a first central plate-shaped structure 151 having a first attribute, a homogenous connector 152, a negative plate-shaped structure 153 and a positive side plate also having the first attribute. 154, a heterogeneous connector 155, a second central plate-like structure 156 having a second attribute, and a forefront connector 157. The foremost end connector 157 is a member connected to the tip of the second central plate-like structure 156.

  Here, the intergeneric connector 152 connects the first central plate-shaped structure 151 having the first attribute to the negative plate-shaped structure 153 and the positive plate-shaped structure 154 also having the first attribute. Play a role. On the other hand, the heterogeneous connector 155 includes a negative plate-like structure 153 and a positive plate-like structure 154 having a first attribute, and a second central plate-like structure 156 having a second attribute. Play the role of connecting. As described above, the heterogeneous connector 155 connects the plate-like structure having the first attribute and the plate-like structure having the second attribute to each other, and functions as a turning point of the plate-like structure. On the other hand, the inter-general connection body 152 functions as a relay point for connecting the plate-shaped structures having the same first attribute in series.

  The basic structure portion includes the main substrate 150, a pedestal 351 incorporated in the device housing 350 as a part of a side plate, and three sets of weights 251, 252, and 253. The pedestal 351 plays the role of supporting the first central plate-shaped structure 151 at the origin O.

  Here, the first central plate-shaped structure 151 is disposed on the YZ plane, the root end is connected to the pedestal 351, and the front end is connected to the congener connection member 152. A plate-like structure having a first attribute extending in a direction parallel to the Y-axis such that a direction from the end to the tip is the Y-axis positive direction. Further, the negative-side plate-like structure 153 is disposed in the negative-side space, and has a root end connected to the same-genus connector 152 and a distal end connected to the heterogeneous connector 155. A plate-like structure having a first attribute extending in a direction parallel to the Y-axis (direction of the longitudinal axis L1) such that a direction from the end to the tip is the Y-axis positive direction. Similarly, the positive-side plate-shaped structure 154 is disposed in the negative-side space, the root end is connected to the intergeneric connector 152, and the tip is connected to the heterogeneous connector 155, A plate-like structure having a first attribute extending in a direction parallel to the Y-axis (direction of the longitudinal axis L2) such that a direction from the root end toward the tip becomes the Y-axis positive direction.

  On the other hand, the second central plate-shaped structure 156 is disposed on the YZ plane, the root end is connected to the heterogeneous connector 155, and the direction from the root end to the tip is the Y-axis. It is a plate-like structure having a second attribute extending in a direction parallel to the Y-axis so as to be in the negative direction, and the foremost end connector 157 is a distal end of the second central plate-like structure 156. Is connected to the member.

  The first weight 251 is a weight connected to the lower surface of the intergeneric connecting body 152 (the area shown by dot hatching in the figure), and the second weight 252 is The third weight 253 is a weight connected to the lower surface of the inter-connector 155 (the area indicated by dot hatching in the figure), and the third weight 253 is the lower surface of the tip connector 157 (dot hatched in the figure). Weighted region connected to the area shown in FIG.

  The fifth embodiment includes the following three types of resonance systems. The first resonance system is a system that generates vibration based on the bending of the first central plate-shaped structure 151. In the drawing, the inter-general connection body 152 and all the components connected to the right side thereof are connected to the first It will function as the weight of the first resonance system. The second resonance system is a system that generates vibration based on the bending of the negative-side plate-like structure 153 and the positive-side plate-like structure 154, and is connected to the heterogeneous connector 155 and the left central portion thereof in the figure. All the components will function as the weight of this second resonance system. The third resonance system is a system that generates vibration based on the bending of the second central plate-like structure 156, and the component connected to the tip of the third resonance system is a weight of the third resonance system. Will function as

  Note that it is also possible to adopt a configuration in which the foremost end connection body 157 is not provided. In this case, the third weight may be connected to the lower surface of the distal end portion of the second central plate-like structure 156. However, as shown in the figure, if a foremost end connection member 157 wider than the second central plate-like structure 156 is provided and the third weight 253 is connected to the lower surface thereof, the third weight 253 can be obtained. It is possible to form a weight body having a larger mass as the weight body 253, and it is possible to generate a larger vibration.

  In the illustrated example, since no individual upper electrode layer (piezoelectric element) is provided on the upper surface of the second central plate-shaped structure 156, a total of 12 sets of individual upper electrode layers are used in the fifth embodiment. Power is taken out. Of course, in order to further increase the power generation efficiency, an individual upper electrode layer (piezoelectric element) may be provided also on the upper surface of the second central plate-shaped structure 156 so as to extract power.

<7-6. Sixth embodiment>
FIG. 25 is a plan sectional view of a power generating element 6000 with a device housing according to the sixth embodiment of the present invention. The sixth embodiment is a modification in which the shape of the weight body in the above-described fifth embodiment is slightly changed, and the connection relationship between the plate-like structures is completely different from that of the fifth embodiment. Is the same. However, since the weights of the first weight body and the third weight body are changed to be large, the planar shapes of the intergeneric connecting body and the foremost end connecting body are changed to U-shape.

  Specifically, in the case of this example, the main substrate 160 includes a first central plate-shaped structure 161 having a first attribute, an inter-connector 162, and a negative side plate-shaped structure 163 having the same first attribute. And a front-side plate-like structure 164, a heterogeneous connector 165, a second central plate-like structure 166 having a second attribute, and a foremost connector 167. The foremost end connecting body 167 is a member connected to the front end of the second central plate-shaped structure 166.

  Here, the inter-general connection body 162 connects the first central plate-shaped structure 161 having the first attribute, and the negative side plate-shaped structure 163 and the positive side plate-shaped structure 164 also having the first attribute. Play a role. On the other hand, the heterogeneous connector 165 includes a negative plate-like structure 163 and a positive plate-like structure 164 having a first attribute, and a second central plate-like structure 166 having a second attribute. Play the role of connecting.

  The basic structure includes the main substrate 160, a pedestal 361 incorporated as a part of a side plate in the device housing 360, and three sets of weights 261, 262, and 263. The pedestal 361 plays a role of supporting the first central plate-shaped structure 161 at the origin O.

  Here, the first central plate-shaped structure 161 is arranged on the YZ plane, the root end is connected to the pedestal 361, and the front end is connected to the inter-general connection body 162. A plate-like structure having a first attribute extending in a direction parallel to the Y-axis such that a direction from the end to the tip is the Y-axis positive direction. Further, the negative-side plate-like structure 163 is disposed in the negative-side space, the root end is connected to the same-genus connector 162, and the distal end is connected to the heterogeneous connector 165. A plate-like structure having a first attribute extending in a direction parallel to the Y-axis (direction of the longitudinal axis L1) such that a direction from the end to the tip is the Y-axis positive direction. Similarly, the positive-side plate-shaped structure 164 is disposed in the negative-side space, the root end is connected to the same-genus connector 162, and the tip is connected to the different-genus connector 165. A plate-like structure having a first attribute extending in a direction parallel to the Y-axis (direction of the longitudinal axis L2) such that a direction from the root end toward the tip becomes the Y-axis positive direction.

  On the other hand, the second central plate-shaped structure 166 is arranged on the YZ plane, the root end is connected to the heterogeneous connector 165, and the direction from the root end to the tip is the Y-axis. It is a plate-like structure having a second attribute extending in a direction parallel to the Y-axis so as to be in the negative direction, and the foremost end connector 167 is a tip end of the second central plate-like structure 166. Is connected to the member.

  The feature of the sixth embodiment is that the planar shape of the intergeneric connecting body 162 and the foremost end connecting body 167 is U-shaped, and the first weight body 261 and the third weight body 261 connected to the lower surfaces thereof are connected to each other. The plane shape of the weight body 263 is also a U-shaped point.

  Specifically, as shown in the figure, the inter-general connection body 162 extends in a direction orthogonal to the YZ plane (a direction parallel to the X axis), and extends in the Y axis negative direction from the orthogonal portion 162R. It has a negative-side wing portion 162N and a positive-side wing portion 162P, and is formed of a plate-shaped member whose projected image on the XY plane has a U-shape. The first weight 261 is connected to all the lower surfaces of the orthogonal part 162R, the negative wing part 162N, and the positive wing part 162P of the inter-general connection body 162, and the projected image on the XY plane is U-shaped. It is constituted by a structure having a shape like a letter. In the case of the illustrated embodiment, the planar shape of the intergeneric connecting body 162 is the same as the planar shape of the first weight body 261, and the first weight body 261 is a region indicated by dot hatching in the drawing. Structure.

On the other hand, as shown in the figure, the foremost end connector 167 has an orthogonal portion 167R extending in a direction orthogonal to the YZ plane (a direction parallel to the X axis) and a negative side extending from the orthogonal portion 167R in the positive Y axis direction. It has a wing-shaped part 167N and a positive wing-shaped part 167P, and is constituted by a plate-shaped member whose projected image on the XY plane has a U-shape. The third weight body 263 is connected to all the lower surfaces of the orthogonal portion 167R, the negative wing portion 167N, and the positive wing portion 167P of the foremost end connector 167, and the projected image on the XY plane is U-shaped. It is constituted by a structure having a character shape.
In the case of the illustrated example, the planar shape of the distal end connecting body 167 is the same as the planar shape of the third weight body 263, and the third weight body 263 is indicated by dot hatching in the figure. The structure occupies the area. The second weight body 262 is a weight body having a rectangular plane and connected to the lower surface of the heterogeneous connecting body 165 (the area indicated by dot hatching in the figure).

  The connection relationship of each member in the sixth embodiment is exactly the same as in the above-described fifth embodiment, and the operation principle is also exactly the same. However, since the plane shapes of the first weight body 261 and the third weight body 263 are U-shaped, it is possible to increase the mass of these weight bodies as compared with the fifth embodiment. And the advantage of further improving the power generation efficiency can be obtained. Of course, an individual upper electrode layer (piezoelectric element) may be provided also on the upper surface of the second central plate-shaped structure 166 to extract power.

  Here, the plane shape of the first weight body 261 and the third weight body 263 is U-shaped, and the plane shape of the second weight body 262 is rectangular. The purpose of this is to reduce the size of the entire device by effectively utilizing the internal space as much as possible. That is, for the first weight 261, the negative wing portion 162 </ b> N and the positive wing portion 162 </ b> P can be arranged using the space generated on both sides of the first central plate-shaped structure 161, The mass can be increased while effectively utilizing the space. Similarly, for the third weight body 263, the negative wing portion 167N and the positive wing portion 167P can be arranged by utilizing the space generated on both sides of the second central plate-like structure 166. Also, the mass can be increased while effectively utilizing the space.

  As described above, the power generating element 6000 according to the sixth embodiment can sufficiently increase the masses of the first weight body 261 and the third weight body 263. Suitable performance can be exhibited. In general, in the case of a vibration source including a motor such as a refrigerator or an air conditioner, a vibration component in a specific coordinate axis direction is mainly used, so that a power generation having a structure suitable for uniaxial power generation (a structure that easily vibrates only in a specific coordinate axis direction) Although elements are useful, in vehicles such as automobiles, trains, and ships, vibration energy containing vibration components in various directions is applied, so a structure suitable for three-axis power generation (vibration in any direction of the coordinate axes XYZ). It is preferable to use a power generating element having a structure that is easy to perform.

  In the power generating element 6000 illustrated in FIG. 25, since the masses of the first weight body 261 and the third weight body 263 are large, vibration energy including any of the X-axis component, the Y-axis component, and the Z-axis component is externally generated. , Each weight body can be vibrated with a sufficient amplitude, and performance suitable for triaxial power generation can be exhibited.

<7-7. Seventh embodiment>
FIG. 26 is a plan sectional view of a power generating element 7000 with a device housing according to the seventh embodiment of the present invention. At first glance, the seventh embodiment has an outer shape similar to that of the above-described sixth embodiment. That is, the first central plate-like structure 161 having the first attribute in FIG. 25 is replaced with a pair of plate-like structures 171 and 172, and the second central plate-like structure 166 having the second attribute in FIG. A configuration in which a pair of plate-like structures 174 and 175 is used is adopted. However, in terms of structural features, the power generating element 7000 shown in FIG. 26 is similar to the power generating element 3000 shown in FIG.

  Specifically, in the case of this example, the main substrate 170 includes a first negative side plate-like structure 171 and a first positive side plate-like structure 172 having a first attribute, a heterogeneous connector 173, It is composed of a second negative-side plate-like structure 174 and a second positive-side plate-like structure 175 having two attributes, and a foremost end connector 176. The foremost end connector 176 is a member connected to the distal ends of the second negative plate-like structure 174 and the second positive plate-like structure 175.

  The basic structure portion includes the main substrate 170, a pedestal 371 incorporated as a part of a side plate in the device housing 370, and two sets of weights 271 and 272. The pedestal 371 plays a role of supporting the first negative-side plate-like structure 171 and the first positive-side plate-like structure 172 near the origin O.

  The first negative-side plate-shaped structure 171 is a plate-shaped structure arranged in the negative-side space, and has a root end connected to the pedestal 371 and a front end connected to the heterogeneous connector 173. It is a plate-like structure having a first attribute extending in a direction parallel to the Y axis (direction of the longitudinal axis L1) such that the direction from the root end toward the tip is the Y axis positive direction. . Similarly, the first positive-side plate-like structure 172 is a plate-like structure arranged in the positive-side space, and has a root end connected to the pedestal 371 and a tip end connected to the heterogeneous connector 173. A plate-like structure having a first attribute that is connected and extends in a direction parallel to the Y-axis (the direction of the longitudinal axis L2) such that the direction from the root end to the tip is the Y-axis positive direction. Body.

  On the other hand, the heterogeneous connector 173 has a shape slightly different from that of the previous embodiments. That is, in the case of the embodiment shown in FIG. 26, the heterogeneous connector 173 has a planar shape that occupies a continuous area with dot hatching, and is perpendicular to the YZ plane (parallel to the X axis). Direction), a negative wing portion 173N and a positive wing portion 173P extending in the negative Y-axis direction from the orthogonal portion 173R, and a negative arm portion extending in the Y-axis positive direction from the orthogonal portion 173R. 173NN and a positive side arm-shaped portion 173PP, and is formed of a plate-shaped member whose projected image on the XY plane has an H shape. The first weight 271 includes all of the orthogonal portion 173R, the negative wing portion 173N, the positive wing portion 173P, the negative arm portion 173NN, and the positive arm portion 173PP of the heterogeneous connector 173. It is connected to the lower surface and is constituted by a structure whose projected image on the XY plane has an H-shape. In the case of the illustrated embodiment, the planar shape of the heterogeneous connector 173 is the same as the planar shape of the first weight 271, and the first weight 271 is shown by dot hatching in the figure. The structure occupies the area.

  Thus, in the case of the power generating element 7000 according to the seventh embodiment shown in FIG. 26, the negative arm portion 173NN and the positive arm portion 173PP do not have flexibility, and the plate-shaped structure Does not function as a part, but will function as a part of the heterogeneous connector 173. The tip of the negative arm 173NN is connected to the root of the second negative plate-like structure 174 having the second attribute, and the tip of the positive arm 173PP is connected to the second end. The root end of the second positive-side plate-like structure 175 having the attribute is connected. Therefore, the heterogeneous connector 173 includes the first negative plate-like structure 171 and the first positive plate-like structure 172, and the second negative plate-like structure 174 and the second positive plate-like structure 175. And serve to connect.

  On the other hand, the foremost end connector 176 plays a role of interconnecting the tip of the second negative plate-like structure 174 and the tip of the second positive plate-like structure 175. As shown in the figure, the foremost end connector 176 includes an orthogonal portion 176R extending in a direction orthogonal to the YZ plane (a direction parallel to the X axis) and a negative wing portion extending from the orthogonal portion 176R in the positive Y axis direction. 176N and a positive-side wing-shaped portion 176P, and are formed by a plate-shaped member whose projected image on the XY plane has a U-shape. The second weight body 272 is connected to all the lower surfaces of the orthogonal portion 176R, the negative wing portion 176N, and the positive wing portion 176P of the foremost end connector 176, and the projected image on the XY plane is U It is constituted by a structure having a character shape. In the illustrated embodiment, the plane shape of the foremost end connecting body 176 is the same as the plane shape of the second weight body 272, and the second weight body 272 is shown by dot hatching in the figure. The structure occupies the area.

  An important feature of the power generating element 7000 is that the second negative-side plate-like structure 174 and the second positive-side plate-like structure 175 include an X-axis path portion extending in a direction parallel to the X-axis and a Y-axis parallel portion. And a Y-axis path portion extending in the direction, and the projected image on the XY plane has an L-shaped shape.

  For example, the second negative plate-shaped structure 174 arranged in the negative space has a negative X-axis path portion 174X extending in a direction parallel to the X axis (the direction of the longitudinal axis L3 ′) and a parallel with the Y axis. A negative Y-axis path portion 174Y extending in the direction (the direction of the longitudinal axis L3), and a root end of the negative X-axis path portion 174X is connected to the heterogeneous connector 173; The distal end of the negative-side X-axis path 174X is connected to the root end of the negative-side Y-axis path 174Y, and the distal end of the negative-side Y-axis path 174Y is connected to the foremost end connector 176. I have. Therefore, the second negative-side plate-shaped structure 174 has an L-shaped projection image on the XY plane.

  Similarly, the second positive-side plate-like structure 175 arranged in the positive-side space has a positive-side X-axis path portion 175X extending in a direction parallel to the X-axis (the direction of the longitudinal axis L4 ') and a parallel with the Y-axis. And the positive-side Y-axis path portion 175Y extending in an appropriate direction (the direction of the longitudinal axis L4), and the root end of the positive-side X-axis path portion 175X is connected to the heterogeneous connector 173. The tip of the positive-side X-axis path 175X is connected to the root end of the positive-side Y-axis path 175Y, and the tip of the positive-side Y-axis path 175Y is connected to the foremost end connector 176. ing. Therefore, the second front side plate-shaped structure 175 has an L-shaped projected image on the XY plane.

  As described above, the structural features of the power generating element 7000 shown in FIG. 26 are the same as those of the power generating element 3000 shown in FIG. 22, and in any case, the topological connection from the pedestal has the first attribute. The order is a pair of plate-like structures, a connector between different genus, a pair of plate-like structures having the second attribute, and a leading-edge connector. However, in the case of the power generating element 7000, the planar shape of the pair of plate-like structures 174 and 175 having the second attribute is L-shaped, so that the degree of freedom of arrangement of each part can be further improved, and the device housing It is possible to use the space in 370 as effectively as possible and to reduce the size of the entire device.

  In the case of this power generation element 7000, the pair of plate-like structures 171 and 172 having the first attribute are arranged in a direction parallel to the Y axis (longitudinal direction) so that the direction from the root end to the tip is the Y axis positive direction. The pair of plate-like structures 174 and 175 having the second attribute are L-shaped structures, while the plate-like structures extend in the direction of the axes L1 and L2). This is a component having slightly different features from the plate-like structure having the second attribute in the embodiments described above. However, a part of the Y-axis path portions 174Y and 175Y extending in a direction parallel to the Y-axis (the direction of the longitudinal axes L3 and L4) so that the direction from the root end to the tip becomes the Y-axis negative direction. Contains. Therefore, this power generation element 7000 can also adjust the resonance frequency related to vibration in a specific direction, expand the frequency band in which power can be generated, and improve efficiency in various use environments, similarly to the various embodiments described above. It is possible to provide a function and effect unique to the present invention, that is, to provide a power generating element capable of performing effective power generation.

FIG. 27 is a plan sectional view of a power generating element 7000A according to a first modification of the power generating element 7000 shown in FIG. The difference between the power generating element 7000 shown in FIG. 26 and the power generating element 7000A shown in FIG. 27 is that the pair of plate-like structures 171 and 172 having the first attribute in the former is a pair of plate-like structures having the first attribute in the latter. The only difference is that the structures are replaced by the structures 171A and 172A.
That is, in the case of the power generation element 7000A shown in FIG. 27, the pair of plate-like structures 171A and 172A having the first attribute are plate-like structures having an L-shaped plane.

  As illustrated, the first negative-side plate-like structure 171A is disposed in a negative-side space, and extends in a direction parallel to the Y-axis (the direction of the longitudinal axis L1). And a first negative-side X-axis path portion 171X extending in a direction parallel to the X-axis (the direction of the longitudinal axis L1 '), and the root end of the first negative-side Y-axis path portion 171Y is a pedestal. 371, the tip of the first negative Y-axis path 171Y is connected to the root end of the first positive X-axis path 171X, and the first negative X-axis path 171X. The tip of the portion 171X is connected to the heterogeneous connector 173. As a result, the first negative-side plate-shaped structure 171A has an L-shaped projected image on the XY plane.

  Similarly, the first positive-side plate-like structure 172A is disposed in the positive-side space, and has a first positive-side Y-axis path portion 172Y extending in a direction parallel to the Y-axis (the direction of the longitudinal axis L2). A first positive-side X-axis path portion 172X extending in a direction parallel to the X-axis (the direction of the longitudinal axis L2 '), and a root end of the first positive-side Y-axis path portion 172Y has a base 371; And the tip of the first positive-side Y-axis path 172Y is connected to the root end of the first positive-side X-axis path 172X to form the first positive-side X-axis path The tip of the 172X is connected to the heterogeneous connector 173. As a result, the first front-side plate-shaped structure 172A has an L-shaped projected image on the XY plane.

  As a result, in the case of the power generation element 7000A, the four plate-like structures 171A, 172A, 174, and 175 all have an L-shaped projection image on the XY plane. It includes a Y-axis path extending in a direction parallel to the Y-axis (direction of the longitudinal axes L1 to L4) such that the direction from the end to the tip is the Y-axis positive direction or the negative direction. Therefore, the power generation element 7000A can also adjust the resonance frequency for vibration in a specific direction.

  FIG. 28 is a plan sectional view of a power generation element 7000B according to a second modification of the power generation element 7000 shown in FIG. The difference between the power generating element 7000 shown in FIG. 26 and the power generating element 7000B shown in FIG. 28 is that the pair of L-shaped plate-like structures 174 and 175 having the second attribute in the former is different from the pair having the second attribute in the latter. Only in that it is replaced by the J-shaped plate-like structures 174C and 175C.

  As shown, the second negative plate-like structure 174C is disposed in the negative space, and extends in the direction parallel to the X axis (the direction of the longitudinal axis L3 '), and the Y-axis path portion Y, A negative-side Y-axis path portion extending in a direction parallel to the axis (the direction of the longitudinal axis L3); a negative-side curved connection portion connecting the negative-side X-axis path portion and the negative-side Y-axis path portion with a curved path; , And a plate-like structure whose projected image on the XY plane forms a J-shape. Here, the root end of the negative-side X-axis path portion is connected to the heterogeneous connector 173, and the distal end of the negative-side X-axis path portion is connected to the negative-side Y-axis path portion by a negative-side curved connection portion. The distal end of the negative Y-axis path portion is connected to the root end portion, and is connected to the foremost end connector 176.

  Similarly, the second positive-side plate-like structure 175C is disposed in the positive-side space, and has a positive-side X-axis path portion extending in a direction parallel to the X-axis (the direction of the longitudinal axis L4 ′); A positive-side Y-axis path portion extending in a direction parallel to (a direction of the longitudinal axis L4), a positive-side curved connection portion that connects the positive-side X-axis path portion and the positive-side Y-axis path portion with a curved path, Is a plate-like structure whose projected image on the XY plane has a J-shape. Here, the root end of the positive-side X-axis path portion is connected to the heterogeneous connector 173, and the distal end of the positive-side X-axis path portion is connected to the positive-side Y-axis path portion by a positive-side curved connection portion. The distal end of the positive-side Y-axis path is connected to the distal end connector 176.

  As described above, each of the second negative-side plate-like structure 174C and the second positive-side plate-like structure 175C has a J-shape projected image on the XY plane. It includes a Y-axis path extending in a direction parallel to the Y-axis (direction of the longitudinal axes L3 and L4) such that the direction from the end to the tip is the Y-axis negative direction. Therefore, the power generation element 7000B can also adjust the resonance frequency for vibration in a specific direction.

  In the case of the embodiment shown in FIG. 28, the upper surfaces of the first negative-side plate-like structure 171, the first positive-side plate-like structure 172, and the second negative-side plate-like structure 174C are each provided with four sets of individual members. Although the upper electrode layer is provided, only one set of J-shaped upper electrode layers is provided on the upper surface of the second positive-side plate-like structure 175C. This is a consideration for showing an example of a variation of the upper electrode layer arranged on the upper surface of each plate-like structure. Although some variations regarding the arrangement of the upper electrode layer are also shown in the power generation element 1003 shown in FIG. 17, the power generation elements 7000, 7000A, and 7000B according to the seventh embodiment shown in FIGS. It is possible to apply various variations.

  For example, as an upper electrode layer formed on the upper surface of the first negative-side plate-shaped structure 171, four sets of individual upper electrode layers E1 to E4 are arranged as shown in FIG. Although an example has been described, a single upper electrode layer E10 may be arranged as shown in FIG. 29 (b). The same applies to the upper electrode layer disposed on the upper surface of the L-shaped or J-shaped plate-shaped structure. For example, as for the L-shaped plate-like structure 174 shown in FIG. 27, an example is shown in which four sets of individual upper electrode layers E1 to E4 are arranged as shown in FIG. A single upper electrode layer E10 may be arranged as shown in (b), or a total of eight sets of individual upper electrode layers E1 to E8 may be arranged as shown in FIG.

  As described above, if charges of both positive and negative polarities are simultaneously supplied to the same upper electrode layer at the same time, they cancel each other out and disappear, resulting in power generation loss. Therefore, in order to improve the power generation efficiency, it is important to always supply charges of the same polarity to a certain individual upper electrode layer at a certain time. However, the more the number of upper electrode layers is increased, the more time is required for patterning and wiring in the manufacturing process, and the manufacturing cost rises.

  Therefore, in practice, it is preferable to determine an appropriate arrangement of the upper electrode layer for each product, assuming the actual use environment of the power generation element to be an individual product. For example, when an actual use environment in which an elongation stress or a compression stress acts on the entire upper surface of the L-shaped plate-like structure 174 is assumed, as shown in FIG. It is preferable to adopt a configuration in which the upper electrode layer E10 is arranged to reduce the cost.

<7-8. Eighth embodiment>
FIG. 31 is a plan cross-sectional view of a power generating element 8000 with a device housing according to the eighth embodiment of the present invention. At first glance, the eighth embodiment has an outer shape similar to that of the above-described seventh embodiment, but as a plate-like structure having the second attribute, an L-shaped plate-like structure is used. Instead, a characteristic is that a U-shaped plate-like structure is employed. Similarly, the topological connection from the pedestal includes a pair of plate-like structures 181 and 182 having a first attribute, a connection between heterogeneous members 183, and a pair of plate-like structures 184 and 185 having a second attribute. , And the leading edge connector 186.

  Specifically, in the case of the eighth embodiment shown in FIG. 31, the main substrate 180 includes a first negative plate-like structure 181 and a first positive plate-like structure 181 having a first attribute, A second negative plate-like structure 184 and a second positive plate-like structure 185 having two attributes, a first negative plate-like structure 181 and a first positive plate-like structure 182, and a second negative plate Connecting member 183 for connecting the plate-shaped structure 184 and the second positive-side plate-shaped structure 185, the tip of the second negative-side plate-shaped structure 184, and the tip of the second positive-side plate-shaped structure 185. And a leading edge connector 186 that connects the components to each other.

  The basic structure portion includes the main substrate 180, a pedestal 381 incorporated as a part of a side plate in the device housing 380, and two sets of weights 281 and 282. The base 381 serves to support the first negative plate-shaped structure 181 and the first positive plate-shaped structure 182 near the origin O.

  The first negative-side plate-like structure 181 is a plate-like structure arranged in the negative-side space, and has a root end connected to the pedestal 381 and a front end connected to the heterogeneous connector 183. It is a plate-like structure having a first attribute extending in a direction parallel to the Y axis (direction of the longitudinal axis L1) such that the direction from the root end toward the tip is the Y axis positive direction. . Similarly, the first positive-side plate-shaped structure 182 is a plate-shaped structure disposed in the positive-side space, and has a root end connected to the pedestal 381 and a front end connected to the heterogeneous connector 183. A plate-like structure having a first attribute that is connected and extends in a direction parallel to the Y-axis (the direction of the longitudinal axis L2) such that the direction from the root end to the tip is the Y-axis positive direction. Body.

  As shown, the heterogeneous connector 183 includes an orthogonal portion extending in a direction orthogonal to the YZ plane (a direction parallel to the X axis), a negative wing portion extending from the orthogonal portion in the Y axis negative direction, and a positive portion. And a side wing portion, and is formed of a plate-shaped member whose projected image on the XY plane has a U-shape. The first weight body 281 is connected to the lower surface of the entire region of the heterogeneous connector 183, and is formed of a structure whose projected image on the XY plane has a U-shape. In the case of the illustrated embodiment, the planar shape of the heterogeneous connector 183 is the same as the planar shape of the first weight 281, and the first weight 281 is provided with dot hatching in the figure. The structure occupies the area.

  On the other hand, the second negative-side plate-shaped structure 184 is disposed in the negative-side space, and extends in a direction parallel to the Y-axis (the direction of the longitudinal axis L3), and on the X-axis. It includes a negative relay path portion 184B extending in a direction parallel to the longitudinal axis L5 (direction of the longitudinal axis L5) and a negative distal end path portion 184C extending in a direction parallel to the Y axis (the direction of the longitudinal axis L7). , XY plane form a U-shape. Here, the root end of the negative root end side route portion 184A is connected to the heterogeneous connector 183, and the distal end portion of the negative root end side route portion 184A is connected to the root end of the negative relay route portion 184B. The distal end of the negative relay path 184B is connected to the root end of the negative distal path 184C, and the distal end of the negative distal path 184C is connected to the distal end. It is connected to body 186.

  The second positive-side plate-shaped structure 185 is disposed in the positive-side space, and has a positive-side root-end-side path portion 185A extending in a direction parallel to the Y-axis (direction of the longitudinal axis L4) and a X-axis. It includes a positive relay path portion 185B extending in a parallel direction (direction of the longitudinal axis L6) and a positive distal path portion 185C extending in a direction parallel to the Y axis (direction of the longitudinal axis L8). , XY plane form a U-shape. Here, the root end of the positive root end side path portion 185A is connected to the heterogeneous connector 183, and the tip end of the positive root end side path portion 185A is connected to the root end of the positive relay path portion 185B. The tip of the positive relay path 185B is connected to the root end of the positive distal path 185C, and the distal end of the positive relay path 185C is connected to the most distal end. It is connected to body 186.

  The foremost end connector 186 plays a role of interconnecting the tip of the second negative plate-shaped structure 184 and the tip of the second positive plate-shaped structure 185. As illustrated, the foremost end connector 186 includes an orthogonal portion extending in a direction orthogonal to the YZ plane (a direction parallel to the X axis), a negative wing portion extending from the orthogonal portion in the positive Y axis direction, and a positive wing portion. And a side wing portion, and is formed of a plate-shaped member whose projected image on the XY plane has a U-shape. The second weight body 282 is connected to the lower surface of the entire region of the foremost end connector 186, and is formed of a structure whose projected image on the XY plane has a U-shape. In the illustrated embodiment, the plane shape of the foremost end connection body 186 is the same as the plane shape of the second weight body 282, and the second weight body 282 is shown by dot hatching in the figure. The structure occupies the area.

  In the case of this power generation element 8000, the pair of plate-like structures 181 and 182 having the first attribute are arranged in a direction parallel to the Y-axis (longitudinal direction) so that the direction from the root end to the tip is the Y-axis positive direction. In contrast to the linear plate-like structure extending in the directions of the axes L1 and L2), the pair of plate-like structures 184 and 185 having the second attribute are U-shaped structures. This is a component having slightly different features from the plate-like structure having the second attribute in the embodiments described above. However, the Y-axis path portions 184C and 185C extending in a direction parallel to the Y-axis (directions of the longitudinal axes L7 and L8) so that the direction from the root end toward the tip is the Y-axis negative direction is partially provided. Contains. Therefore, similarly to the various embodiments described above, the power generation element 8000 can also adjust the resonance frequency related to vibration in a specific direction, expand a frequency band in which power can be generated, and improve efficiency in various use environments. It is possible to provide a function and effect unique to the present invention, that is, to provide a power generating element capable of performing effective power generation.

<<<< §8. Basic features of the present invention >>>>>
So far, the power generating element according to the present invention has been described based on several embodiments. Here, the basic features of the present invention will be described as a summary of these embodiments.

  The present invention is an invention of a power generating element that generates electric power by converting vibration energy into electric energy, and has an effect of expanding a frequency band in which electric power can be generated. The basic components of the power generating element according to the present invention are a basic structural part that forms a physical vibration system, and a charge generating element that generates electric charges based on the deformation of the basic structural part. Although the power generation itself is possible if a charge generation element is provided, in order to efficiently extract electric power, in practice, the current generated based on the charge generated in the charge generation element is further rectified. It is preferable to add a power generation circuit for extracting electric power.

  The basic structure portion includes a plurality of flexible plate-like structures, a connector between different species, a pedestal, and a weight, and the plate-like structure has at least a first attribute. Two types, a plate-like structure and a plate-like structure of the second attribute, are included. The heterogeneous connector serves to connect the plate-like structure having the first attribute and the plate-like structure having the second attribute to each other. Further, the pedestal plays a role of supporting the plate-like structure having the first attribute. Here, when the XYZ three-dimensional coordinate system is defined, the plate-like structure of the first attribute and the plate-like structure of the second attribute are arranged such that their plate surfaces are parallel to the XY plane. I have.

  The difference between the plate-like structure of the first attribute and the plate-like structure of the second attribute lies in the direction from the root end to the tip end. As described above, in the present application, in a structure in which a plurality of plate-like structures are connected, when considering a connection path to the pedestal, on the connection path, a side closer to the pedestal is referred to as a root end, and from the pedestal. The far side is called the tip. Then, in the plate-like structure having the first attribute, the root end is connected to the pedestal, the front end is connected to the heterogeneous connector, and the direction from the root end to the front end is positive on the Y-axis. A plate-shaped member extending in a direction parallel to the Y-axis can be said to be the direction. Similarly, the plate-shaped structure of the second attribute has a root end connected to the heterogeneous connector, and has a Y-axis negative direction so that the direction from the root end to the tip is the Y-axis negative direction. It can be called a plate-like member extending in a parallel direction.

  In addition, the heterogeneous connector functions to connect the plate-like structures extending in the opposite directions to each other, and thus functions as a turning point of the plate-like structure. As described above, in the present invention, since the plate-like structure of the first attribute and the plate-like structure of the second attribute adopt a structure in which the plate-like structure is folded back through the inter-generic connector, each plate-like structure is Despite being constituted by a plate-like member extending in a direction parallel to the Y axis, the size of the entire apparatus in the Y axis direction can be suppressed, and the overall size can be reduced.

  The weight body included in the basic structure vibrates due to the bending of the plate-like structure. However, as shown in the model shown in FIG. 7C, the basic structure includes the plate-like structure having the first attribute. Thus, a composite vibration system including the first resonance system I based on the bending of the second resonance system II and the second resonance system II based on the bending of the plate-like structure having the second attribute is configured. For this reason, by adjusting the resonance frequencies fr1 and fr2 of each resonance system, it is possible to design to expand the frequency band in which power can be generated.

  As described above, the power generating element according to the embodiment described so far includes the plate-shaped structure having the first attribute and the plate-shaped structure having the second attribute as essential components. A plate-like structure having three attributes can be added. Specifically, a plate-shaped structure having a third attribute is added to the power generating element 4000 (see FIG. 23) according to the fourth embodiment described in §7-4.

  That is, in the case of the power generation element 4000, the basic structure further includes a flexible third-attribute plate-like structure (central plate-like structure 147), a third-attribute plate-like structure, And a second heterogeneous connector 146 for interconnecting the two-attribute plate-like structures. The distal ends of the plate-like structures having the second attribute (the second negative-side plate-like structure 144 and the second positive-side plate-like structure 145) are connected to the second inter-species connector 146. . The plate-shaped structure having the third attribute (central plate-shaped structure 147) is arranged such that its plate surface is parallel to the XY plane, and the root end is connected to the second heterogeneous connector 146. It extends in a direction parallel to the Y axis so that the direction from the root end to the tip is the positive direction of the Y axis.

  As described above, in the case of adding the third attribute plate-like structure, the direction in which the third attribute plate-like structure extends is opposite to the direction in which the second attribute plate-like structure extends (in other words, (The same direction as the extension direction of the plate-like structure of the first attribute). Then, for each plate-like structure, when considering the connection path from the pedestal to the foremost portion (the end of the tree structure forming the cantilever), the plate-like structure having the first attribute is changed to the second attribute. At the time of transition to the plate-like structure, direction reversal due to folding occurs. Further, at the time of transition from the second attribute plate-like structure to the third attribute plate-like structure, direction reversal due to folding occurs. Will be.

Such a folded structure is the same when a plate-like structure having a fourth attribute or later is added.
That is, if the configuration of the embodiment to which the plate-like structures of the fourth and subsequent attributes are added is described in general terms, the basic structure part further includes a flexible plate-like structure of the third attribute to the n-th attribute. (Where n is an arbitrary natural number that satisfies n ≧ 4), a plate-like structure having an i-th attribute and a plate-like structure having an (i-1) th attribute (where i is 3 (I.e., each natural number that satisfies ≤i≤n). Here, the plate-like structure having the i-th attribute is arranged so that its plate surface is parallel to the XY plane, and the root end is connected to the (i-1) th inter-species connector. The tip is connected to the i-th interspecies connector or is a free end; the direction from the root end to the tip is the Y-axis positive direction when i is an odd number; If i is an even number, it extends in the direction parallel to the Y axis so that it becomes the Y axis negative direction. For example, when n = 4, the basic structure further includes a third flexible member. A fourth inter-connector connecting the plate-shaped structure having the attribute, the plate-shaped structure having the fourth attribute, the plate-shaped structure having the third attribute, and the plate-shaped structure having the second attribute; A third inter-connector connecting the plate-shaped structure having the attribute and the plate-shaped structure having the third attribute is provided.

  Here, the plate-shaped structure of the third attribute is arranged so that its plate surface is parallel to the XY plane, and the root end is connected to the second heterogeneous connector, and the tip end is Are connected to the third heterogeneous connector, and extend in a direction parallel to the Y axis so that the direction from the root end to the tip is the Y axis positive direction. Further, the plate-shaped structure having the fourth attribute is arranged so that its plate surface is parallel to the XY plane, the root end is connected to the third heterogeneous connector, and the tip is It is a free end and extends in a direction parallel to the Y-axis so that the direction from the root end to the tip is the Y-axis negative direction.

  Note that a plurality of plate-like structures having the same attribute can be provided as necessary. In this case, a plurality of plate-like structures having the same attribute can be arranged in parallel so as to be parallel to each other, or can be arranged in series via a connector belonging to the same genus. For example, the power generating element 5000 (see FIG. 24) according to the fifth embodiment described in §7-5 includes three plate-like structures 151, 153, and 154 as the plate-like structures having the first attribute. Although provided, the plate-like structures 153 and 154 are arranged and arranged with respect to each other, and these and the plate-like structure 151 are arranged in series via the inter-general connector 152.

  Generally, if a plurality of plate-like structures are provided and each plate-like structure is provided with a charge generating element, the power generation efficiency can be improved accordingly, but the occupied area for arranging the plate-like structures is increased. Therefore, the size of the entire apparatus increases. In this case, when a plurality of plate-like structures are arranged in parallel, the size of the device in the X-axis direction increases, and when a plurality of plate-like structures are arranged in series, the size of the device in the Y-axis direction increases. Therefore, in practice, it is only necessary to determine how to arrange the plurality of plate-like structures in consideration of the size and shape of the entire apparatus.

  It is preferable to use a plate-like member having an orthogonal portion extending in a direction orthogonal to the YZ plane (a direction parallel to the X axis) as the heterogeneous connector or the homogeneous connector. Then, the root end or the tip of the plate-like structure extending in the direction parallel to the Y-axis can be connected to a predetermined position on the side surface of the orthogonal portion, and the plate-like structure having the same attribute can be connected. It is also possible to flexibly cope with a case where a plurality of wires are provided.

  In order to improve the power generation efficiency of the power generating element, it is also effective to increase the mass of the weight body. As one method for that purpose, a method of connecting a foremost end connecting body to the tip end of the foremost plate-like structure and connecting a weight body to the lower surface thereof can be adopted. For example, the distal end connector 136 shown in FIG. 22, the distal connector 148 shown in FIG. 23, the distal connector 157 shown in FIG. 24, and the distal connector 167 shown in FIG. It plays the role of increasing the mass of the connected weight body. In particular, the forefront connector 136 shown in FIG. 22 is a member that has the same attribute and connects the distal ends of a plurality of plate-like structures 134 and 135 arranged in parallel so as to be parallel to each other. This produces an effect of significantly increasing the mass of the weight body 232 connected to the lower surface.

  Further, in the power generating element 6000 shown in FIG. 25, the planar shape of the inter-general connection member 162 and the foremost portion connection member 167 is U-shaped, and the weights of the weights 261 and 263 connected to the lower surface thereof are increased. I have. In practicing the present invention, at least some members of the intergeneric connector, the intergeneric connector, and the foremost connector are provided with an orthogonal portion extending in a direction orthogonal to the YZ plane, and a Y axis extending from the orthogonal portion. With a positive-side wing portion and a negative-side wing portion extending in a direction parallel to, a projected image on the XY plane is constituted by a U-shaped plate-shaped member having a U-shaped shape, The effect of increasing the mass of the weight connected to the lower surface is obtained. That is, the orthogonal portion of the U-shaped plate-shaped member is disposed at a position straddling the positive space and the negative space, the positive wing is disposed in the positive space, and the negative wing is disposed in the negative space. Therefore, a weight having a large mass can be disposed so as to extend over all of the lower part of the orthogonal part, the lower part of the positive wing part, and the lower part of the negative wing part.

  In addition, as shown in the example of the seventh embodiment described in §7-7 and the example of the eighth embodiment described in §7-8, a plate serving as a component of the power generating element according to the present invention is provided. The shape-like structure does not necessarily need to be a linear beam extending in a direction parallel to the Y-axis, and may be an L-shaped, J-shaped, or U-shaped beam.

  In short, the plate-like structure of the first attribute used in the present invention has a root end connected to the pedestal, a front end connected to the heterogeneous connector, and at least a part of the plate-shaped structure from the root end. It suffices to include a Y-axis path portion of the first attribute that extends in a direction parallel to the Y-axis so that the direction toward the tip is the Y-axis positive direction. Similarly, the plate-shaped structure of the second attribute used in the present invention has a root end connected to the heterogeneous connector, and at least a part thereof has a Y-axis negative direction from the root end to the front end. It suffices to include a second attribute Y-axis path portion extending in a direction parallel to the Y-axis so as to become a direction.

  The power generating element 7000 shown in FIG. 26 includes plate-like structures 174 and 175 having the second attribute, X-axis path portions 174X and 175X extending in a direction parallel to the X-axis, and a Y-axis path extending in a direction parallel to the Y-axis. This is an example in which an L-shaped beam including portions 174Y and 175Y is used. Of course, the plate-like structures 171 and 172 having the first attribute can be configured by L-shaped beams. In the power generation element 7000A shown in FIG. 27, all of the four sets of plate-like structures are L-shaped. This is an example in which the beam is constituted by the following beams.

  In short, in practicing the present invention, one or both of the first attribute plate-shaped structure and the second attribute plate-shaped structure are connected to the X-axis path portion extending in the direction parallel to the X-axis and the Y-axis. And a Y-axis path portion extending in a parallel direction, and a beam having an L-shaped portion whose projected image on the XY plane has an L-shaped shape can be formed.

  Further, as in a power generating element 7000B shown in FIG. 28, one or both of the first attribute plate-like structure and the second attribute plate-like structure extend in the direction parallel to the X-axis, Including a Y-axis path extending in a direction parallel to the Y-axis and a curved connection connecting the X-axis path and the Y-axis path with a curved path, the image projected onto the XY plane has a J-shape. It can also be constituted by a beam having a J-shaped part in shape.

  Further, like the power generating element 8000 shown in FIG. 31, the plate-like structures 184 and 185 having the second attribute are formed by connecting a root end side path portion extending in a direction parallel to the Y axis and a relay extending in a direction parallel to the X axis. A path portion and a distal-side path portion extending in a direction parallel to the Y axis, and sequentially connecting the root-side path portion, the relay path portion, and the distal-side path portion from the root end portion to the distal end portion. Accordingly, the projection image on the XY plane can also be constituted by a beam having a U-shaped portion having a U-shaped shape.

  It is preferable that the basic structure used for the power generating element according to the present invention is configured using one main substrate having a plate surface parallel to the XY plane. The basic structure of the power generating element 1000 shown in FIG. 3 is configured by joining the weight body group 210 and the pedestal 310 to the main substrate 110, and the respective plate-like structures 111, 113, 114, and The connection body 112 is constituted by a part of the main board 110. Of course, a part of the main substrate can also be used as a part of the main board, if the part has the intergeneric connection, and if the part has the most advanced part.

  In addition, it is preferable that the basic structure used in the power generation element according to the present invention is formed of a structure that is plane-symmetric with respect to the YZ plane. Each of the basic structures of the first to eighth embodiments described above has a structure that is plane-symmetric with respect to the YZ plane. If the basic structure is plane-symmetric with respect to the YZ plane, the charge generating elements such as piezoelectric elements added thereto can be arranged so as to be plane-symmetric with respect to the YZ plane. The total amount of the generated positive charges and the total amount of the negative charges can be made as equal as possible, and efficient power generation without loss is possible.

<<<< §9. Other Modifications of the Present Invention >>
Here, some modified examples of the various embodiments described so far will be described.

First, the mutual connection relationship between the plurality of plate-like structures is not limited to the examples shown in the first to eighth embodiments described above, and various other connection relationships may be employed. Can be.
Of course, the number of plate-like structures having the same attribute is not limited, and an arbitrary number of plate-like structures may be arranged in parallel, or an arbitrary number of plate-like structures may be arranged in series.

  In the examples shown in the first to eighth embodiments described above, another member is interposed between the two directly connected members, so that the two members are indirectly connected. It may be made to be connected in some way. For example, in the first embodiment shown in FIG. 3, the root end of the central plate-shaped structure 111 is directly connected to the pedestal 310, but some other member (or a plurality of members) may be provided therebetween. The base end portion of the central plate-shaped structure 111 may be indirectly connected to the pedestal 310 by interposing.

  In the first to eighth embodiments, the piezoelectric element is arranged in the main portion where the bending of the plate-like structure occurs. However, in which part the piezoelectric element is arranged depends on the design of each power generating element. It is a matter that can be determined as appropriate, and it is not always necessary to adopt the arrangement as in the illustrated embodiment. Of course, in order to improve the power generation efficiency, it is preferable to dispose the piezoelectric elements in all portions where the plate-like structure is bent. For example, if a piezoelectric element is also arranged in the plate-like structure 147 of FIG. 23, the plate-like structure 156 of FIG. 24, and the plate-like structure 166 of FIG. 25, the power generation efficiency can be further improved. Further, when the piezoelectric element is arranged on the lower surface side of the plate-like structure, the power generation efficiency can be further improved. However, if the number of piezoelectric elements is increased, it is necessary to increase the number of wirings, and a rise in manufacturing cost is inevitable.

  Of course, the number and size of the weights are also important parameters that affect the power generation efficiency. In general, the weight is connected to any one of a predetermined portion of the plate-like structure, a predetermined portion of the heterogeneous connector, a predetermined portion of the homogenous connector, and a predetermined portion of the foremost connector. do it. In the embodiments described so far, the weight bodies are provided at two or three places. However, the weight bodies may be provided at four or more places, or may be provided at only one place. Further, in the embodiments described so far, the weight is joined to the lower surface of the main substrate, but the weight may be joined to the upper surface or the side surface of the main substrate. The shape and size of the weight body are also arbitrary.

  Generally, as the number and size of the weights are increased, the plate-shaped structure can be more flexed, so that the power generation efficiency can be improved. However, if a weight is joined to a plate-like structure, the joints of the plate-like structure lose flexibility, so it is advisable to adopt a structure in which the weight is joined to each connection as much as possible. preferable.

  In practicing the present invention, it is not always necessary to provide a weight body. For example, although the power generating element 1000 shown in FIG. 3 is provided with three sets of weight bodies 211, 212, and 213, even if these weight body groups 210 are removed, power can be generated. This is because each of the plate-like structures 111, 113, 114 and the connecting member between different species 112 has its own mass and functions as a weight. Therefore, even if weight group 210 is removed from power generating element 1000 shown in FIG. 3, the function as a synthetic vibration system can be achieved only by E-shaped main substrate 110, and the effects of the present invention can be obtained. Can be. Similarly, in the second to eighth embodiments, it is possible to remove all the weight bodies.

  In general, in the case of a system in which one plate-like structure is vibrated, the amplitude to which the weight body is added can be larger than that of the structure including only the plate-like structure. Therefore, in the case of a power generating element including only one plate-like structure, the power generating efficiency can be improved by adding a weight having a mass as large as possible. However, in order to increase the mass of the weight body without changing the material, it is necessary to increase the size of the weight body, and it is necessary to secure a space for the weight body to vibrate. Will do.

  On the other hand, when the structure without the weight is adopted, the vibration of the plate-like structure is caused by the mass corresponding to its own weight. Therefore, the amplitude must be reduced. However, since only the vibration space of the plate-like structure needs to be secured, the space of the entire apparatus can be saved. When a larger amount of power generation is required, a structure in which a large number of plate-like structures are densely arranged can be adopted. Since there is no need to provide a weight, a large number of plate-like structures can be arranged vertically and horizontally at an extremely high density.

  For example, if only the E-shaped main substrate 110 shown in FIG. 3 is used, a small space can be filled by stacking a large number while maintaining a slight gap therebetween. Of course, by changing the shape of the plate-like structure, the resonance frequency of each resonance system can be adjusted, so that the effect of the present invention that the frequency band in which power can be generated is widened is also obtained. Therefore, a power generating element having no weight body at all is sufficiently useful as an industrial product.

<<<< §10. Manufacturing process of power generating element >>>
Here, an example of a preferable manufacturing process for mass-producing the power generating element of the present invention will be described. Of course, the power generating element of the present invention may be manufactured by any process as long as each part can fulfill the unique role described above, but here, the basic structure is mass-produced. A manufacturing process suitable for the above will be described. The feature of the manufacturing process described here is that a basic structure is formed using an SOI (Silicon On Insulator) substrate.

  First, an SOI substrate 1800 as shown in FIG. This SOI substrate 1800 is a substrate having a three-layer structure in which a silicon active layer 1801, a silicon oxide layer 1802, and a silicon base layer 1803 are laminated in this order, and is commercially available as a material for manufacturing various semiconductor devices. I have. In the illustrated example, the thickness of the silicon active layer 1801 is t11 = 15 μm, the thickness of the silicon oxide layer 1802 is t12 = 1 μm, and the thickness of the silicon base layer 1803 is t13 = 625 μm.

  Of course, the thickness of each part may be an arbitrary dimension, but since the silicon active layer 1801 is a layer constituting a plate-like structure, the thickness t11 has the necessary flexibility when used as a plate-like structure. The thickness is to be obtained. On the other hand, since the silicon base layer 1803 is a layer constituting the weight body and the pedestal, the thickness t13 is a thickness that can secure a sufficient mass as the weight body and a sufficient rigidity as the pedestal. To do.

  FIG. 32B is a cross-sectional side view showing an example in which a power generation element 1500A having a structure similar to the power generation element 1500 with the device housing shown in FIG. 20 is manufactured using the SOI substrate 1800 shown in FIG. It is a figure, and shows the section which cut power generation element 1500A by the YZ plane (illustration of charge generation element 400 and power generation circuit 500 is omitted). Therefore, the basic configuration shown in FIG. 32 (b) conforms to the basic configuration shown in FIG. 20 (b).

  Specifically, FIG. 32 (b) shows a state in which the interspecies connecting body 112 is connected to the central plate-shaped structure 111, and the weight body 211 is joined to the lower surface of the interspecies connecting body 112. ing. Also, a state in which the weight body 212 is located at the back is shown. The side walls 311 and 313 of the device housing are located at the left and right ends, and the side wall 312 of the device housing is located at the back. Since the side wall 314 of the device housing is located on the near side, it is not shown in the drawing. The side wall 311 of the device housing serves as a pedestal, and supports the root end of the central plate-shaped structure 111 at the origin O. Of course, the negative-side plate-shaped structure 113 is located behind the central plate-shaped structure 111, and the positive-side plate-shaped structure 114 is located in front of the central plate-shaped structure 111.

  After all, in the case of this power generation element 1500A, each of the plate-like structures 111, 113, 114 and the heterogeneous connector 112 is constituted by a single-layer structure of the silicon active layer 1801 shown in FIG. The weights 211, 212, and 213 are formed of a two-layer structure of a silicon oxide layer 1802 and a silicon base layer 1803 shown in FIG. 32 (a), and a pedestal 311 (side plates 311 to 314 of the device housing) is shown in FIG. 32 (a) is constituted by a three-layer structure of a silicon active layer 1801, a silicon oxide layer 1802 and a silicon base layer 1803. In addition, the bottom surface of each of the weight bodies 211, 212, and 213 is positioned higher than the bottom surface of the pedestal 311 (side plates 311 to 314 of the device housing) in order to secure a space for downward displacement. It is processed as follows.

  The basic structure of the power generating element 1500A having the structure shown in FIG. 32B can be manufactured by etching the SOI substrate 1800 shown in FIG. For example, if the silicon active layer 1801 is processed into an E-shape by etching from the upper surface side of the SOI substrate 1800, an E-shaped member corresponding to the main substrate 110 shown in FIG. 3 can be formed. At this time, the silicon oxide layer 1802 can be used as an etching stopper. Further, by etching from the lower surface side of the SOI substrate 1800, a process of leaving the pedestal 311 (side plates 311 to 314 of the device housing) and the weights 211, 212, and 213 can be performed. At this time, the silicon oxide layer 1802 can be used as an etching stopper. Finally, the unnecessary portion of the silicon oxide layer 1802 is removed by another etching method to obtain the structure shown in FIG.

  Note that in the case where the thickness of the silicon oxide layer 1802 is small, the silicon oxide layer 1802 may be left without being removed. That is, if the thickness t11 + t12 shown in FIG. 32 (a) is a thickness that can provide the necessary flexibility when used as a plate-like structure, the silicon oxide layer 1802 can be used as a part of the plate-like bridge. There is no problem if you leave it. In this case, each of the plate-like structures 111, 113, 114 and the heterogeneous connecting body 112 is constituted by a two-layer structure of a silicon active layer 1801 and a silicon oxide layer 1802 shown in FIG. The weights 211, 212, and 213 are constituted by a single-layer structure of the silicon base layer 1803 shown in FIG.

  As described above, the example in which the power generation element 1500A having a structure similar to the power generation element 1500 with the device housing illustrated in FIG. 20 is manufactured using the SOI substrate 1800 illustrated in FIG. Can be manufactured by the same process. For example, as shown in FIG. 24, in the case of the embodiment having the intergeneric connector 152 and the distal end connector 157, the plate-like structure, the intergeneric connector, the intergeneric connector, and the distalmost connector The body may be constituted by a single-layer structure of the silicon active layer 1801 or a two-layer structure of the silicon active layer 1801 and the silicon oxide layer 1802.

  Although the power generating element 1500A shown in FIG. 32 (b) is not provided with the top plate 315 or the bottom plate 316 of the device housing of the power generating element 1500 shown in FIG. A member serving as a plate or a bottom plate may be added. The power generating element 1500B having the structure shown in FIG. 32 (c) is based on the premise that members serving as a top plate and a bottom plate of the device housing are added, and each of the weight bodies 211A, 212A, 213A (see FIG. Are not located at the same position as the bottom surface of the pedestal 311 (the side plates 311 to 314 of the device housing). This is because it is assumed that a groove is formed in the bottom plate of the apparatus housing to secure a displacement space below each weight body.

  FIG. 33 is a side sectional view showing an example in which the power generation element 1500B shown in FIG. The top plate 1601 of the device housing is joined to the upper surface of the power generating element 1500B, and the bottom plate 1602 of the device housing is joined to the lower surface of the power generating device 1500B. Here, an upper groove 1603 is formed on the lower surface of the top plate 1601 of the device housing, as shown by a broken line in the figure, and the plate-like structures 111, 113, 114 and the heterogeneous connector 112 are located upward. An upper space for displacement is secured. Further, a lower groove 1604 is formed on the upper surface of the bottom plate 1602 of the apparatus housing, as shown by a broken line in the figure, to secure a lower space for each of the weight bodies 211A, 212A, 213A to be displaced downward. Have been. The top plate 1601 and the bottom plate 1602 of the device housing may be made of, for example, a glass or silicon substrate.

  In the case of this example, the entire device including the power generation element 1500B, the top plate 1601, and the bottom plate 1602 is housed in the exterior package 1700. Although not shown, the power generation circuit 500 is provided on the outer package 1700 side. Therefore, the bonding wire W is connected between the bonding pad B1 provided on the power generation element 1500B side and the bonding pad B2 provided on the exterior package 1700 side, and mutual wiring is provided (actually, the wiring is connected to the wiring). The required number of bonding wires W are connected). The interior space of the exterior package 1700 may be hollow, but may be filled with resin or the like.

  FIG. 34 is a side sectional view showing a modification of the process shown in FIG. 32, and shows a structure in which the weights 211, 212, and 213 are removed from the structure shown in FIG. In other words, when etching the SOI substrate 1800 from the lower surface side, only the pedestal 311 (side plates 311 to 314 of the device housing) is left. In this modification, each weight body is not a part of the SOI substrate 1800 but is made of a completely different material. That is, after etching from the lower surface side (in the figure, the silicon oxide layer 1802 is removed, the silicon oxide layer 1802 may be left), and the weight bodies 211B, 212B are positioned at the positions shown by the broken lines in the figure. , 213B (not shown in the figure). The weights 211B, 212B, and 213B may be made of any material, but in practice, it is preferable to use a metal such as iron or tungsten in order to increase the mass as much as possible.

  FIG. 35 is a top view showing a step of manufacturing the power generating element 6000 shown in FIG. 25 by the process according to the modification shown in FIG. 34 (hatching indicates a region of each part and shows a cross section). Not something.) That is, FIG. 35 is an enlarged top view showing the vicinity of the inter-general connection body 162 of the power generating element 6000 shown in FIG. 25, and the area with dot hatching indicates the U-shaped homo-general connection body 162. In the case of this example, a U-shaped weight body 261 is joined to the lower surface of the intergeneric connection body 162.

  However, the U-shaped weight body 261 is designed to be slightly larger in size than the U-shaped inter-general connection body 162, and is attached to the lower surface of the inter-general connection body 162, and A part of the portion protrudes from the contour of the intergeneric connector 162. The portion of the U-shaped weight body 261 that is hatched in the figure is the protruding portion. As described above, the U-shaped weight body 261 is a separate member formed using a metal such as iron or tungsten, and may be joined to the lower surface of the inter-general connection body 162 using an adhesive or the like. .

  Providing such a protruding portion has the following two advantages. The first advantage is that when excessive vibration energy is applied from the outside, the protruding portion comes into contact with the inner surface of the device housing and further displacement can be suppressed, so that the device has a fragility. The point is that damage to the plate-like structure 161 and the inter-connector 162 formed from the silicon active layer can be prevented. If the weight body 261 is made of metal, the weight body 261 itself is hardly damaged. The second advantage is that, when performing the operation of joining the weight body 261 to the lower surface of the inter-general connection body 162, the outline of the weight body 261 can be visually confirmed from above. As shown in FIG. 35, since a part of the weight body 261 protrudes from the intergeneric connecting body 162, the positional relationship between the both can be visually confirmed, and an accurate joining operation can be performed. . The same applies to the other weight bodies 262 and 263.

<<<< §11. Another feature of the present invention >>>>>
As described in §8, a feature common to the first to eighth embodiments is a folded structure in which a plate-shaped structure having a first attribute and a plate-shaped structure having a second attribute are connected to each other by a connector between different species. With such a feature, it is possible to obtain the operation and effect of expanding the frequency band in which power can be generated while suppressing the size of the entire device.

  Here, another characteristic common to the first to eighth embodiments will be considered, and the present invention will be grasped as a power generating element having such another characteristic. The fundamental concept of this other feature lies in the structure in which the path formed by the plate-like structure branches or joins in the middle. Hereinafter, the basic concept will be specifically described.

  The invention described here comprises, similarly to the above-described inventions, a basic structural part constituting a synthetic vibration system, and a charge generating element for generating electric charges based on deformation of the basic structural part, and includes a vibration energy To a power generating element that generates electric power by converting the electric power into electric energy. Practically, it is preferable to further provide a power generation circuit that rectifies a current generated based on the charge generated in the charge generation element and extracts power.

  Here, the basic structure portion includes a plurality of flexible plate-like structures, one or a plurality of intermediate connectors for interconnecting the plate-like structures, and a pedestal for supporting the plate-like structures. have. If necessary, a weight connected to a predetermined location can be added.

  An important feature is that the individual plate-like structures are directly or indirectly connected to the pedestal via the intermediate connector and other plate-like structures. The body aggregate forms a tree-like structure with the pedestal as the root (including not only a structure in which branches branch off as the terminal leaves reach, but also a structure in which the branches merge). Is that when a path leading to the end of the path is traced, the path includes a branch portion that branches into a plurality of paths on the way, or a junction where a plurality of paths joins on the way.

  For example, in the case of the power generation element 1000 according to the first embodiment shown in FIG. 3, when the path from the origin O on the pedestal side to the end points T3 and T5 which are the ends of the tree structure is traced, the heterogeneous connector 112 is obtained. And a branching portion that branches off at. In the case of the power generating element 2000 according to the second embodiment shown in FIG. 21, when the path from the root end points Q1 and Q2 on the pedestal side to the tip of the central plate-shaped structure 124 at the end of the tree-like structure is traced. , The junction between the heterogeneous connectors 123 is included. Then, in the case of the power generating element 3000 according to the third embodiment shown in FIG. 22, when the path from the root end points Q1 and Q2 on the pedestal side to the foremost end connecting body 136 at the end of the tree-like structure is traced, The junction 133 includes a merging / branching portion that merges and branches.

  Similarly, in the case of the power generating element 4000 according to the fourth embodiment shown in FIG. 23, when the path from the base end points Q1 and Q2 to the foremost end connector 148 at the end of the tree-like structure is different, A merging / branching portion that merges and branches at the intergeneric connector 143 and a merging portion that merges at the intergeneric connector 146 are included. Further, in the case of the power generating element 5000 according to the fifth embodiment shown in FIG. 24, when the path from the origin O on the pedestal side to the distal end connector 157 at the end of the tree-like structure is traced, the intergeneric connector 152 is obtained. , And a merging portion merging in the heterogeneous connector 155. Then, in the case of the power generating element 6000 according to the sixth embodiment shown in FIG. 25, when the path from the origin O on the pedestal side to the leading end connector 167 at the end of the tree-like structure is traced, the intergeneric connector 162 And a merging portion merging in the inter-generic connector 165. The same applies to the seventh embodiment shown in FIGS. 26 to 28 and the eighth embodiment shown in FIG.

  As described above, when a tree-like structure is formed by an aggregate of the plate-like structure and the intermediate connector, a cantilever structure is formed by a path from the pedestal to the end of the tree-like structure, and a vibration system is configured as a whole. . Moreover, if a branch or a junction is provided in the path from the pedestal to the end of the tree-like structure, a combined vibration system in which the resonance systems formed based on the individual plate-like structures are intertwined in a complicated manner is configured. That is, by adjusting the resonance frequency of each resonance system, it is possible to obtain the operation and effect of the present invention in that the frequency band in which power can be generated is widened. Therefore, finally, another embodiment in which the present invention is grasped with a broad fundamental concept of "a structure in which a path made of a plate-like structure branches or merges on the way" will be described.

  FIGS. 36 and 37 used in the following description are plan cross-sectional views of the power generation element according to the ninth embodiment cut along a plane parallel to the XY plane and slightly above the XY plane. Illustration of the circuit 500 is omitted. Also, an example is shown in which a piezoelectric element employing the four electrode arrangements shown in FIG. 18 or FIG. In these figures, rough hatching on a portion of the apparatus housing (including a portion functioning as a pedestal) indicates that the portion is a cross-sectional portion. On the other hand, with respect to the portion of the main substrate (the plate-like structure and each connection body), the fine hatched hatching indicates the region where each individual upper electrode layer is formed, and the dot hatching indicates the area on the lower surface of the main substrate. It shows a region where the weights are joined, and neither shows a cross section.

  FIG. 36 is a plan sectional view of a power generation element 9000 with a device housing according to the ninth embodiment of the present invention. In this example, the main substrate 190 includes a first negative plate-shaped structure 191 arranged in the negative space, a first positive plate-shaped structure 192 arranged in the positive space, and an intermediate connector 193. A second negative-side plate-like structure 194 disposed in the negative-side space, a second positive-side plate-like structure 195 disposed in the positive-side space, and a foremost end connector 196. I have. The basic structure includes the main board 190, a pedestal 391 incorporated as a part of a side plate in the device housing 390, and two sets of weight bodies 291 and 292.

  The pedestal 391 serves to support the first negative plate-shaped structure 191 and the first positive plate-shaped structure 192 near the origin O. The intermediate connector 193 includes a first negative plate-shaped structure 191 and a first positive plate-shaped structure 192, a second negative plate-shaped structure 194 and a second positive plate-shaped structure 195, And the leading end connector 196 serves to connect the distal end of the second negative plate-shaped structure 194 and the distal end of the second positive plate-shaped structure 195 to each other.

  More specifically, each of the first negative-side plate-like structure 191 and the first positive-side plate-like structure 192 has a root end connected to the pedestal 391 and a front end connected to the intermediate connector 193. It extends in a direction parallel to the Y axis so that the direction from the root end to the tip (the direction of the longitudinal axes L1 and L2) is the positive direction of the Y axis. The second negative plate-like structure 194 and the second positive plate-like structure 195 each have a root end connected to the intermediate connector 193 and a tip connected to the foremost end connector 196. It extends in a direction parallel to the Y axis so that the direction from the root end to the tip (the direction of the longitudinal axes L1 and L2) is the positive direction of the Y axis.

  The intermediate connector 193 has a planar shape that occupies a continuous area with dot hatching, and includes an orthogonal portion 193R extending in a direction orthogonal to the YZ plane (a direction parallel to the X axis) and an orthogonal portion 193R. It has a negative-side wing portion 193N and a positive-side wing portion 193P extending in the Y-axis negative direction, and is constituted by a plate-shaped member whose projected image on the XY plane has a U-shape. The first weight 291 is connected to all the lower surfaces of the orthogonal portion 193R, the negative wing portion 193N, and the positive wing portion 193P of the intermediate connector 193, and the projected image on the XY plane is U-shaped. It is constituted by a structure having a shape. In the illustrated embodiment, the planar shape of the intermediate connector 193 is the same as the planar shape of the first weight 291, and the first weight 291 corresponds to a region hatched in the figure by dot hatching. Occupy structure.

  Similarly, the foremost end connector 196 has a planar shape occupying a continuous area with dot hatching, and has an orthogonal portion 196R extending in a direction orthogonal to the YZ plane (a direction parallel to the X axis). , A negative wing portion 196N and a positive wing portion 196P extending in the Y-axis negative direction from the orthogonal portion 196R, and a projection image on the XY plane is formed of a U-shaped plate-like member. I have. The second weight body 292 is connected to all the lower surfaces of the orthogonal portion 196R, the negative wing portion 196N, and the positive wing portion 196P of the foremost end connecting body 196, and the projected image on the XY plane is U-shaped. It is constituted by a structure having a shape like a letter. In the illustrated embodiment, the planar shape of the foremost end connecting body 196 is the same as the planar shape of the second weight body 292, and the second weight body 292 is indicated by dot hatching in the figure. The structure occupies the area.

  In the case of the power generating element 9000 shown in FIG. 36, the four sets of plate-like structures 191, 192, 194, and 195 are arranged such that the direction from the root end to the tip is the positive Y-axis direction. It is a plate-like structure and corresponds to the plate-like structure of the first attribute described above. In other words, in the case of the power generation element 9000, the four sets of plate-like structures 191, 192, 194, and 195 are all plate-like structures having the same attribute.

  In the case of the power generating element described above as the first to eighth embodiments, “the folded structure in which the first attribute plate-like structure and the second attribute plate-like structure are connected by the heterogeneous connector”. However, in the power generating element 9000 according to the ninth embodiment shown in FIG. 36, such a “folded structure” is not used. However, this power generation element 9000 also adopts the broad basic concept of “a structure in which a path made of a plate-like structure branches or merges in the middle”.

  That is, when focusing on the path from the origin O on the base 391 to the tip point T which is the end of the tree-like structure, a branch portion or a junction is provided on the path, and based on each plate-like structure, A combined vibration system in which the formed resonance systems are intertwined in a complicated manner is configured. That is, when following the above-mentioned path from the origin O to the tip point T, the path first branches into two sets of paths along the plate-like structures 191 and 192, and these merge once at the intermediate connector 193, and are again formed into the plate-like structure. A tree-like structure is formed that branches into two sets of paths along the bodies 194 and 195 and joins again at the tip connector 196. Moreover, since the four sets of plate-like structures 191, 192, 194, and 195 all extend along the direction parallel to the Y axis, the frequency at which power can be generated by adjusting the resonance frequency of each resonance system. The operation and effect of the present invention of widening the band can be obtained.

  FIG. 37 is a plan sectional view of a power generation element 9000A according to a modification of the power generation element 9000 shown in FIG. The difference between the power generating element 9000 shown in FIG. 36 and the power generating element 9000A shown in FIG. 37 is that, in the latter, instead of the four sets of plate-like structures 191, 192, 194, 195 in the former, an L-shaped 4 The point is that a set of plate-like structures 191A, 192A, 194A, 195A is used. In §7-7, as the seventh embodiment, an example in which a plate-like structure made of an L-shaped beam is used is shown. In the case of the power generation element 9000A shown in FIG. 37, four sets of plate-like structures are used. Each of 191A, 192A, 194A, and 195A is constituted by an L-shaped beam.

  Therefore, the width of the device housing 390A of FIG. 37 in the X-axis direction is slightly wider than that of the device housing 390 of FIG. The width of the intermediate connector 193A and the distal end connector 196A of FIG. 37 is slightly wider in the X-axis direction than the intermediate connector 193 and the distal end connector 196 of FIG.

  As in the example shown in FIG. 36, the intermediate connector 193A has a planar shape occupying a continuous area with dot hatching, and extends in a direction orthogonal to the YZ plane (a direction parallel to the X axis). A plate-shaped member having an orthogonal portion 193AR, a negative-side wing portion 193AN and a positive-side wing portion 193AP extending from the orthogonal portion 193AR in the negative Y-axis direction, and having a U-shaped projection image projected on the XY plane. It is constituted by. The first weight body 291A is connected to all the lower surfaces of the orthogonal portion 193AR, the negative wing portion 193AN, and the positive wing portion 193AP of the intermediate connector 193A, and the projected image on the XY plane is U-shaped. It is constituted by a structure having a shape. In the illustrated embodiment, the planar shape of the intermediate connector 193A is the same as the planar shape of the first weight 291A, and the first weight 291A corresponds to the area indicated by dot hatching in the figure. Occupy structure.

  Similarly, the foremost end connector 196A has a planar shape that occupies a continuous area with dot hatching, and includes an orthogonal portion 196AR extending in a direction orthogonal to the YZ plane (a direction parallel to the X axis). , A negative wing portion 196AN and a positive wing portion 196AP extending in the Y-axis negative direction from the orthogonal portion 196AR, and a projection image on the XY plane is formed of a U-shaped plate-shaped member. I have. The second weight body 292A is connected to all the lower surfaces of the orthogonal portion 196AR, the negative wing portion 196AN, and the positive wing portion 196AP of the foremost end connection body 196A, and the projected image on the XY plane is U-shaped. It is constituted by a structure having a shape like a letter. In the illustrated embodiment, the plane shape of the foremost end connecting body 196A is the same as the plane shape of the second weight body 292A, and the second weight body 292A is dot-hatched in the drawing. The structure occupies the area.

  On the other hand, the first negative-side plate-shaped structure 191A includes a first negative-side Y-axis path portion 191AY extending in a direction parallel to the Y-axis (direction of the longitudinal axis L1) and a direction parallel to the X-axis (longitudinal axis). L1) extending in the direction of L3), and the projected image on the XY plane has an L-shape. Here, the root end of the first negative Y-axis path portion 191AY is connected to the pedestal 391A, and the distal end of the first negative Y-axis path portion 191AY is connected to the first negative X-axis path. The distal end of the first negative X-axis path portion 191AX is connected to the negative wing portion 193AN of the intermediate connector 193A.

  The first positive-side plate-shaped structure 192A extends in a direction parallel to the Y-axis (direction of the longitudinal axis L2) and in a direction parallel to the X-axis (longitudinal axis). (In the direction of L4), the first positive-side X-axis path portion 192AX, and the projected image on the XY plane has an L-shape. Here, the root end of the first positive-side Y-axis path portion 192AY is connected to the pedestal 391A, and the tip end of the first positive-side Y-axis path portion 192AY is connected to the first positive-side X-axis path. The front end of the first positive X-axis path portion 192AX is connected to the positive wing portion 193AP of the intermediate connector 193A.

  The second negative-side plate-shaped structure 194A extends in a direction parallel to the Y-axis (direction of the longitudinal axis L1) and in a direction parallel to the X-axis (longitudinal axis L1). (In the direction of L5), the second negative X-axis path portion 194AX, and the projected image on the XY plane has an L-shape. Here, the root end of the second negative Y-axis path portion 194AY is connected to the orthogonal portion 193AR of the intermediate connector 193A, and the tip of the second negative Y-axis path portion 194AY is the second end. Is connected to the root end of the negative-side X-axis path portion 194AX, and the distal end of the second negative-side X-axis path portion 194AX is connected to the negative-side wing portion 196AN of the foremost end connector 196A. .

  Finally, the second positive side plate-like structure 195A extends in a direction parallel to the Y axis (direction of the longitudinal axis L2) and in a direction parallel to the X axis (longitudinal direction). (In the direction of the axis L6), the second positive-side X-axis path portion 195AX, and the projected image on the XY plane has an L-shape. Here, the root end of the second positive-side Y-axis path 195AY is connected to the orthogonal part 193AR of the intermediate connector 193A, and the tip of the second positive-side Y-axis path 195AY is the second end. Is connected to the root end of the positive-side X-axis path portion 195AX, and the distal end of the second positive-side X-axis path portion 195AX is connected to the positive-side wing portion 196AP of the foremost end connector 196A. .

  In the case of this power generation element 9000A, the four plate-like structures 191A, 192A, 194A, and 195A all have an L-shaped projected image on the XY plane, but a part thereof has a root tip. , And includes a Y-axis path extending in a direction parallel to the Y-axis (direction of the longitudinal axes L1 and L2) such that the direction from the to the front end is the Y-axis positive direction. Therefore, the power generation element 9000A can also adjust the resonance frequency for vibration in a specific direction.

  The various modifications described in §9 can be similarly applied to the ninth embodiment described in §11.

  INDUSTRIAL APPLICABILITY The power generating element according to the present invention can be widely used for a technique of generating power by converting vibration energy into electric energy. The basic principle is that the vibration of the weight causes the plate-like structure to bend, and the electric charge generated in the charge generating element is taken out to the outside in response to the bending, so that the electric motor is used for automobiles, trains, ships, and the like. Attachment to a vibration source such as a vehicle, a refrigerator, or an air conditioner enables effective use of vibration energy that is normally wasted as electric energy. In addition, by providing a plate-shaped structure having different attributes, a plurality of resonance systems having different resonance frequencies can be mixed, and the frequency band in which power can be generated can be broadened. A power generating element capable of generating power can be designed.

Claims (10)

A power generating element for generating electric power by converting vibration energy into electrical energy, a first plate-like structures that have a flexibility, and a second plate-like structures that have a flexible a third plate-like structure that having a flexible, and a first connection body for connecting the first plate structure and the second plate-like structure to each other, the first a basic structure having a second connecting body for connecting the two plate-like structures third plate-like structure to each other, a pedestal for supporting the first plate-like structure, and
A charge generating element that generates a charge based on the deformation of the basic structure,
With
Said first plate-like structure, the root end portion is directly or indirectly connected to the pedestal, are directly or indirectly connected to the tip portion first connecting body, the tip portion Is located on one side in the first direction from the root tip,
It said second plate-like structure is connected directly or indirectly to the roots ends first connecting body, is directly or indirectly connected tip to the second connection body The tip is located on the other side in the first direction than the root tip,
It said third plate-like structure, the root end portion is directly or indirectly connected to the second connecting body, disposed on one side in the first direction than tip apical It is,
The basic structure portion further includes a first weight connected to the first connection, a second weight connected to the second connection, and a third plate-shaped member. And a third weight connected to the tip of the structure . A power generating element that generates electric power by converting vibration energy into electric energy, comprising: a first flexible plate-shaped structure; a second flexible plate-shaped structure; A third plate-shaped structure having: a first connection body interconnecting the first plate-shaped structure and the second plate-shaped structure; and a second plate-shaped structure comprising: A basic structure portion having a second connection body for mutually connecting the third plate-like structure, and a pedestal supporting the first plate-like structure;
A charge generating element that generates a charge based on the deformation of the basic structure,
With
The first plate-shaped structure has a root end directly or indirectly connected to the pedestal, a front end directly or indirectly connected to the first connection body, and a front end, It is arranged on one side in the first direction from the root end,
The second plate-like structure has a root end directly or indirectly connected to the first connection body, and a tip end directly or indirectly connected to the second connection body. The tip is located on the other side in the first direction than the root end,
The third plate-shaped structure has a root end directly or indirectly connected to the second connector, and a tip end is disposed on one side in the first direction with respect to the root end. ,
A first weight connected to the first connection, wherein the basic structure further includes a foremost end connection connected to a distal end of the third plate-like structure; And at least two of a second weight connected to the second connector and a third weight connected to the foremost connector. Power generation element. The power generating element according to claim 1 or 2 ,
A power generating element, wherein an upper surface of the first plate-shaped structure, an upper surface of the second plate-shaped structure, and an upper surface of the third plate-shaped structure are arranged in the same plane. The power generating element according to any one of claims 1 to 3 ,
A power generating element, wherein at least two of the first plate-shaped structure, the second plate-shaped structure, and the third plate-shaped structure extend in parallel with each other. The power generating element according to any one of claims 1 to 3 ,
The power generating element, wherein the first plate-shaped structure, the second plate-shaped structure, and the third plate-shaped structure extend in parallel with each other. The power generating element according to any one of claims 1 to 5 ,
A power generation element, wherein the charge generation element has a piezoelectric element formed in a portion where the plate-shaped structure is deformed. The power generating element according to claim 6 ,
A piezoelectric element formed on the upper surface of the plate-like structure, a lower electrode layer formed on the upper surface of the lower electrode layer, a piezoelectric material layer for generating electric charges based on stress, and a lower electrode layer formed on the upper surface of the piezoelectric material layer; And a power supply element having a predetermined polarity, respectively, supplied to the lower electrode layer and the upper electrode layer. The power generating element according to claim 6 ,
A common lower electrode layer is formed on the upper surface of the plate-like structure, a common piezoelectric material layer is formed on the upper surface of the common lower electrode layer, and a plurality of electrically independent plural An individual upper electrode layer is formed, and when the plate-shaped structure undergoes a specific deformation, each individual upper electrode layer is supplied with a charge of the same polarity from the piezoelectric material layer. element. The power generating element according to claim 8 ,
A power generating element, wherein an individual upper electrode layer is disposed on each of the plate-like structures. The power generation device according to claim 8 or 9,
A power generation element further comprising a power generation circuit that rectifies a current generated between the common lower electrode layer and each of the individual upper electrode layers based on electric charges generated in the piezoelectric element and takes out power.

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