JP6670405B2 - Heat treatment equipment - Google Patents

Description

  The present invention relates to a heat treatment apparatus for treating an object to be processed in a heated atmosphere.

  2. Description of the Related Art A heat treatment apparatus for performing a heat treatment on a material such as a substrate is known (for example, see Patent Document 1). As an example of the heat treatment apparatus, the CVD apparatus described in Patent Literature 1 has a quartz reaction tube. The reaction tube is configured to receive a wafer as a material. A source is supplied into the reaction tube. In the reaction tube, the source gas is activated by a thermal reaction. Thereby, a desired film is formed on the surface of the wafer.

  The above-mentioned heat treatment apparatus is a horizontal furnace, and is arranged in a posture in which the reaction tube is laid horizontally. For this reason, the opening of the reaction tube faces in the horizontal direction. Therefore, the transfer of the wafer into and out of the reaction tube is performed by moving the wafer horizontally.

Japanese Patent Publication No. 5-56647

  During the heat treatment of the wafer, the opening of the reaction tube is closed by a door. The door is opened and closed using an opening and closing mechanism. The opening / closing mechanism has, for example, a power source such as an electric motor, and a transmission mechanism that transmits the output of the power source to the door.

  Since the opening / closing mechanism is arranged near the reaction tube, the opening / closing mechanism is likely to be heated to a high temperature by receiving heat from the reaction tube. In such an opening and closing mechanism, there is a demand for higher durability.

  In view of the above circumstances, an object of the present invention is to increase the durability of a door opening / closing mechanism in a horizontal furnace in a heat treatment apparatus.

(1) In order to solve the above-described problems, a heat treatment apparatus according to an aspect of the present invention includes a horizontal furnace having an opening arranged horizontally and a door for opening and closing the opening, and an opening and closing operation of the door. An opening / closing mechanism for causing the air to flow, and a blowing means and a suction means for generating an airflow of a cooling gas passing around the opening outside the horizontal furnace , wherein the opening / closing mechanism moves linearly. A linear motion actuator having an output portion configured in a horizontal direction and converting the linear motion of the output portion into a rocking motion about a predetermined first axis extending in a vertical direction, and converting the rocking motion to the door. look including a link mechanism for transmitting the, the link mechanism is disposed in a region where the air flow passes have integrally swingable link member to said first axis line and the door, the link member Is prescribed The output unit is connected to the output unit so as to be rotatable relative to the output unit around a second axis, and the linear motion actuator is configured to be swingable around a predetermined third axis parallel to the second axis. The link member has an input-side arm portion to which the driving force from the output portion is input, an output-side arm portion to output the driving force to the door side, and the input-side arm portion fixed to a lower portion and the upper portion to the upper portion. An intermediate shaft portion to which an output side arm portion is fixed and extending vertically, wherein the input side arm portion and the output side arm portion are the first axis when viewed along the direction in which the first axis extends. , And extends in a forked manner, and the direction of the input side arm and the direction of the output side arm are different from each other .

  According to this configuration, since the link mechanism is provided, the linear motion actuator can be disposed at a position further away from the position of the door. Thereby, it is possible to suppress the high heat from the horizontal furnace from reaching the linear motion actuator. Therefore, the durability of the opening / closing mechanism can be further increased by reducing the load on the linear actuator. Further, if the link mechanism has a mechanical structure, it is possible to more reliably suppress a malfunction of the link mechanism caused by high heat. As described above, in the heat treatment apparatus, the durability of the door opening / closing mechanism in the horizontal furnace can be further increased.

Further, as described above, the link mechanism has the door and a link member that can swing integrally around the first axis, and the link member is connected to the output unit around a predetermined second axis. The linear motion actuator is connected to the output section so as to be relatively rotatable, and is configured to be swingable about a predetermined third axis parallel to the second axis.

According to this configuration, the link member and the door swing around the first axis along with the operation of the output section of the linear motion actuator. Thereby, the door is opened and closed. At this time, the linear motion actuator itself also swings around the third axis, so that a smooth linear motion of the output unit can be realized .

( 2 ) Preferably, the heat treatment apparatus further includes a scavenger section surrounding the opening and generating an airflow around the opening, and the scavenger section is arranged around the opening. A side wall, the heat treatment apparatus supports the link member swingably around the first axis, the first stay portion disposed on the inner side of the side wall facing the opening, The side wall further includes a second stay portion that supports the linear motion actuator so as to swing around the third axis and is disposed on an outer side of the side wall opposite to the inner side .

(3) More preferably, the side wall of the scavenger portion includes a support member that collectively supports the link mechanism and the linear actuator, and the first stay portion and the second stay portion are provided on the support member. Installed.
According to this configuration, the link mechanism, the linear motion actuator, and the support member can be formed as a unit. This makes it easier to handle the link mechanism and the linear actuator as compared to a case where the link mechanism and the linear actuator are handled separately, for example, when assembling the heat treatment apparatus.

(4) good Mashiku, the horizontal furnace comprises a cylindrical horizontal furnace body in which the opening is formed,
When a direction along the axial direction of the horizontal furnace and away from the horizontal furnace body with the opening as a starting point is a front direction, when the door is closed, the second axis is the output power. It is arranged on the front side with respect to the side arm .

(5) Preferably, the output side arm portion is arranged downstream of the input side arm portion in the flow direction of the airflow .

  According to the present invention, in the heat treatment apparatus, the durability of the door opening / closing mechanism in the horizontal furnace can be further increased.

1 is a schematic plan view of a heat treatment apparatus according to an embodiment of the present invention, showing a partially broken state. FIG. 2 is a diagram illustrating a state in which the heat treatment apparatus is viewed from the front along line II-II in FIG. 1, and illustrates a state in which a part is broken. It is the side view which omitted illustration of a part of heat treatment equipment, and has shown the state where some were broken. It is the figure which expanded a part of FIG. It is the figure which expanded a part of FIG. It is the figure which expanded a part of FIG. It is a figure for explaining an example of operation in a heat treatment device.

  Hereinafter, embodiments for carrying out the present invention will be described with reference to the drawings. Note that the present invention can be widely applied as a heat treatment apparatus for heat treating an object to be treated.

[Schematic configuration of heat treatment apparatus]
FIG. 1 is a schematic plan view of a heat treatment apparatus 1 according to an embodiment of the present invention, showing a partially broken state. FIG. 2 is a diagram illustrating a state in which the heat treatment apparatus 1 is viewed from the front along the line II-II in FIG. 1, and illustrates a state in which a part is broken. FIG. 3 is a side view in which some parts of the heat treatment apparatus 1 are not illustrated, and shows a state in which some parts are broken. FIG. 4 is an enlarged view of a part of FIG. FIG. 5 is an enlarged view of a part of FIG. FIG. 6 is an enlarged view of a part of FIG. In addition, below, it says up and down, right and left, and front and back based on the state which looked at the heat treatment apparatus 1 from the front shown in FIG.

  Referring to FIGS. 1 to 3, heat treatment apparatus 1 is configured to be capable of performing a heat treatment on the surface of workpiece 100. Examples of the heat treatment include a CVD (Chemical Vapor Deposition) process, a diffusion process, an annealing process, a semiconductor device manufacturing process, and a solar cell manufacturing process. In the present embodiment, the object to be processed 100 is a semiconductor wafer. The heat treatment apparatus 1 forms a thin film on the surface of the object 100 by performing a heat treatment on the object 100 in an atmosphere of a reactive gas. Further, the heat treatment apparatus 1 is a horizontal heat treatment apparatus. The object 100 is moved in the horizontal direction when the object 100 is taken in and out of the heat treatment apparatus 1. The heat treatment apparatus 1 is installed in a factory building such as a semiconductor manufacturing factory.

  The heat treatment apparatus 1 includes a horizontal furnace 3 including a door 2, a heater 4 for heating the atmosphere in the horizontal furnace 3, a storage chamber 5 for storing a front portion 9 of the horizontal furnace 3, and opening and closing of the door 2. And an opening / closing mechanism 6 for performing the operation.

  The horizontal furnace 3 is provided for storing the workpiece 100. Further, the horizontal furnace 3 is provided for subjecting the processing object 100 stored in the horizontal furnace 3 to a heat treatment in a heated atmosphere. The horizontal furnace 3 is formed hollow. The horizontal furnace 3 is elongated in the horizontal direction (front-rear direction), and one end of the horizontal furnace 3 in the longitudinal direction is opened laterally (forward).

  The horizontal furnace 3 has a door 2 and a horizontal furnace main body 7.

The horizontal furnace main body 7 is formed in a cylindrical shape (hollow shape) using, for example, quartz (SiO ₂ ), and in the present embodiment, extends longitudinally forward and backward. The rear end of the horizontal furnace body 7 is closed. At the front end of the horizontal furnace main body 7, an opening 7a arranged horizontally is formed. The opening 7a is formed in a flange shape opened forward. That is, the opening 7 a has a shape that protrudes radially outward of the horizontal furnace main body 7 with respect to the longitudinal middle portion of the horizontal furnace main body 7.

  The opening 7a is formed in a size that allows the object 100 to pass through. The workpiece 100 is put into and taken out of the horizontal furnace main body 7 through the opening 7a. The object to be processed 100 is inserted into the horizontal furnace main body 7 from the outside of the horizontal furnace main body 7 through the opening 7a, for example, while being placed on the support base 12. The opening 7 a is opened and closed by the door 2.

The door 2 is provided to open and close the opening 7a. The door 2 is formed using, for example, quartz (SiO ₂ ). The door 2 closes the opening 7a of the horizontal furnace main body 7 by being disposed at the predetermined closed position P3 while the heat treatment of the workpiece 100 is performed in the horizontal furnace main body 7. Thus, the door 2 prevents the heat energy and the heat treatment gas from flowing out of the horizontal furnace body 7. The door 2 is disposed at a predetermined open position P2 when the workpiece 100 is put into and taken out of the horizontal furnace main body 7, thereby opening the opening 7a of the horizontal furnace main body 7. Thus, the door 2 is disposed so as not to hinder the work of taking the workpiece 100 into and out of the horizontal furnace body 7.

  The door 2 is formed in a substantially disk shape and has a predetermined thickness. The outer peripheral portion of the door 2 is configured to contact the end face of the opening 7a when the door 2 is at the closed position P1. The front part 9 of the horizontal furnace 3 having the above configuration (the front part of the horizontal furnace body 7 and the door 2) is housed in the housing room 5.

  The accommodation room 5 is provided to form a space for accommodating the front part 9 of the horizontal furnace 3. The storage chamber 5 is provided around the front part 9 of the horizontal furnace 3 to generate an air flow F1 of a cooling gas. Due to the generation of the airflow F1, the front portion 9 of the storage chamber 5 is cooled by the airflow F1, and as a result, overheating of the front portion 9 is suppressed. Further, gas released from the inside of the horizontal furnace 3 is discharged by the airflow F1.

  In the present embodiment, the accommodation room 5 is formed in a substantially rectangular parallelepiped shape. In the present embodiment, the accommodation room 5 has a configuration in which a wall forming member such as a metal panel is installed on four columns 10 arranged so as to surround the front part of the horizontal furnace 3 in plan view.

  The accommodation room 5 has an outer shell 11 and a scavenger 12 for forming a passage for the airflow F1 in the outer shell 11.

  The outer shell 11 is provided as a part forming an outer shell of the accommodation room 5. The front part 9 of the horizontal furnace 3 and the opening / closing mechanism 6 are accommodated in the outer shell part 11.

  The outer shell 11 includes a support 10, a bottom wall 13, a top wall 14, a left wall 15 and a right wall 16 as a pair of left and right side walls, a rear wall 17, and a front wall 18.

  The bottom wall 13, the top wall 14, the left side wall 15, the right side wall 16, the rear wall 17, and the front wall 18 are formed using a panel-shaped member such as a metal plate. The bottom wall 13 is fixed to the lower part of four columns 10 arranged at the four corners of the outer shell 11, and covers the front part 9 of the horizontal furnace 3 from below. On the other hand, the ceiling wall 14 is fixed to the upper part of the four columns 10 and covers the front part 9 of the horizontal furnace 3 from above. The left side wall 15 is fixed to two columns 10 on the left side of the four columns 10, and covers the front part 9 of the horizontal furnace 3 from the left side.

  The right side wall 16 is fixed to the right two columns 10 of the four columns 10 and covers the front part 9 of the horizontal furnace 3 from the right side. The rear wall 17 is fixed to two rear columns 10 of the four columns 10, and covers the front part 9 of the horizontal furnace 3 from the rear side. In the rear wall 17, a through hole 17a through which the horizontal furnace main body 7 penetrates is formed. The through-hole 17a is formed in a shape corresponding to the shape of the outer peripheral surface of the horizontal furnace 3, and leakage of gas from between the horizontal furnace main body 7 and the rear wall 17 is suppressed.

  The front wall 18 is arranged between the two front columns 10 of the four columns 10 and covers the front part 9 of the horizontal furnace 3 from the front side. The front wall 18 has a pair of left and right fixed walls 18aL, 18aR and a pair of left and right movable walls 18bL, 18bR. The left fixed wall 18aL is fixed to the left front column 10 and extends rightward. The right fixed wall 18aR is fixed to the right front column 10 and extends to the left. A pair of left and right movable walls 18bL, 18bR is disposed adjacent to the pair of left and right fixed walls 18aL, 18aR.

  The movable walls 18bL and 18bR are configured to function as doors of the accommodation room 5 by being displaced left and right with respect to the fixed walls 18aL and 18aR. Each of the movable walls 18bL and 18bR has a closed position P3 facing the opening 7a, and an open position P4 at a position outside the closed position P3 in the left-right direction for opening the opening 7a forward of the storage chamber 5. , Can be displaced. The pair of movable walls 18bL and 18bR at the closed position P3 cooperate with the pair of fixed walls 18aL and 18aR to cover the front part 9 of the horizontal furnace 3 from the front. On the other hand, the pair of movable walls 18bL, 18bR at the open position P4 are arranged so as to overlap with the corresponding fixed walls 18aL, 18aR, and expose the door 2 of the horizontal furnace 3 to the front. The movable walls 18bL and 18bR are opened and closed by a driving device 19 including an electric motor and the like.

  With the above configuration, the bottom wall 13, the top wall 14, the pair of left and right side walls 15, 16, the rear wall 17, and the front wall 18 cooperate to form a rectangular box portion. The bottom wall 13, the top wall 14, the pair of left and right side walls 15 and 16, the rear wall 17, and the front wall 18 surround the front part 9 of the horizontal furnace 3. The scavenger unit 12 is disposed inside the outer shell 11 having the above configuration.

  The scavenger section 12 is provided to surround the periphery of the opening 7a of the horizontal furnace 3 and generate an airflow F1 around the opening 7a. In the present embodiment, the scavenger portion 12 forms a space extending along the longitudinal direction of the horizontal furnace 3, and the scavenger portion 12 is an intermediate portion of the storage chamber 5 in the left-right direction and is vertically It is arranged in the middle part of the accommodation room 5 in the direction.

  In the present embodiment, the scavenger section 12 introduces a cooling gas (air in the present embodiment) into the scavenger section 12 from the right side of the opening 7a, passes through the periphery of the opening 7a, and then cools. The gas is discharged to the outside of the scavenger section 12 from the left side of the opening 7a. This suppresses overheating around the opening 7a. Further, it prevents gas in the horizontal furnace 3 from inadvertently leaking from the opening 7a to the outside of the storage chamber 5 when the door 2 is opened.

  The scavenger portion 12 has a bottom wall 23, a top wall 24, a pair of left and right side walls 25 and 26, a rear wall 17, and a front wall 18. That is, the front wall 18 and the rear wall 17 as a part of the scavenger portion 12 are formed by the front wall 18 and the rear wall 17 as a part of the accommodation room 5.

  The bottom wall 23, the top wall 24, the left side wall 25, and the right side wall 26 are formed using a panel-shaped member such as a rectangular metal plate. The front portion of the bottom wall 23 is fixed to, for example, a pair of left and right fixed walls 18aL and 18aR of the front wall 18. The rear part of the bottom wall 23 is fixed to the rear wall 17. This bottom wall 23 covers the front part 9 of the horizontal furnace 3 from below. The front portion of the top wall 24 is fixed to, for example, a pair of left and right fixed walls 18aL and 18aR of the front wall 18. The rear part of the top wall 24 is fixed to the rear wall 17. The top wall 24 covers the front part 9 of the horizontal furnace 3 from above. The bottom wall 23 and the top wall 24 are arranged so as to be vertically sandwiched between the bottom wall 13 and the top wall 14 of the accommodation room 5.

  The front portion of the left side wall 25 is fixed to, for example, a fixed wall 18aL of the front wall 18. The rear part of the left side wall 25 is fixed to the rear wall 17. The left side wall 15 covers the front part 9 of the horizontal furnace 3 from the left side.

  The right side wall 26 has a side wall main body 27 and a support member 28 that is detachable from the side wall main body 27.

  The side wall main body 27 and the support member 28 are formed in a rectangular shape. The front portion of the side wall main body 27 is fixed to, for example, a fixed wall 18aR on the right side of the front wall 18. The rear portion of the side wall main body 27 is fixed to the rear wall 17. A through hole 27 a is formed in a portion of the side wall main body 27 near the front. The through hole 27a is a through hole formed in a rectangular shape.

  The upper end of the through hole 27 a is located near the upper end of the horizontal furnace main body 7. Further, the lower end of the through hole 27 a is located near the lower end of the horizontal furnace main body 7. In the front-rear direction, the length of the through-hole 27a is set to about half or less of the length of the side wall main body 27. Most of the through-hole 27a is closed by the support member 28.

  The support member 28 is provided to support the opening / closing mechanism 6, and more specifically, to collectively support a later-described link mechanism 35 and a linear actuator 34 of the opening / closing mechanism 6. The outer peripheral portion of the support member 28 is fixed to the outer peripheral edge of the through hole 27 a in the side wall main body 27 using, for example, a fixing member such as a screw. The support member 28 is disposed so as to face the opening 7a of the horizontal furnace main body 7 and the door 2 left and right. The support member 28 is in contact with the outer side surface of the side wall main body 27. With this configuration, the worker can attach the support member 28 to the scavenger unit 12 in a relatively large space outside the scavenger unit 12.

  With the above configuration, the right side wall 26 covers the front part 9 of the horizontal furnace 3 from the right side. The pair of left and right side walls 25 and 26 are disposed so as to be sandwiched left and right by the pair of left and right side walls 15 and 16 of the outer shell 11. Further, the bottom wall 23, the top wall 24, and the pair of left and right side walls 25 and 26 are formed in a rectangular shape as a whole in a cross section orthogonal to the front-rear direction. That is, inside the outer shell 11, the scavenger 12 has a rectangular parallelepiped shape surrounded by the bottom wall 23, the top wall 24, and the pair of left and right side walls 25, 26 between the front wall 18 and the rear wall 17. It forms a space. The front part 9 of the horizontal furnace 3 is accommodated in this space.

  Cooling openings 8 are formed in the pair of left and right side walls 25 and 26 of the scavenger unit 12. The cooling opening 8 is provided to allow the cooling gas to pass through the scavenger 12 (to generate the airflow F1). In the present embodiment, at least a part of the opening / closing mechanism 6 is arranged in the cooling opening 8.

  The cooling opening 8 is configured such that the component of the direction of the airflow F1 includes at least one of the left-right direction, the up-down direction, and the front-back direction. In the present embodiment, the cooling opening 8 is configured such that the airflow F1 flows along the left-right direction, flows along the up-down direction, and further flows along the front-rear direction. Thereby, the cooling opening 8 suppresses the gas from staying in the scavenger portion 12 and more reliably lowers the temperature in the scavenger portion 12. Further, it is intended to more reliably recover the gas released from the horizontal furnace 3 into the scavenger section 12.

  Referring to FIGS. 1 to 3 and 6, cooling opening 8 is provided with an introduction portion 31 for introducing a cooling gas into scavenger portion 12 and a cooling gas is discharged from scavenger portion 12. And a discharge section 32 of

  In the present embodiment, the introduction section 31 is formed on the right side wall 26 of the scavenger section 12. More specifically, the introduction portion 31 is formed on the support member 28 of the right side wall 26. The introduction portion 31 is formed as a hole penetrating the support member 28. The introduction portion 31 is formed on the lower front side of the support member 28. In the up-down direction, the position of the introduction portion 31 is aligned with the position of the lower portion of the door 2. The lower portion of the door 2 in this case refers to a portion below the position of the center 2a of the door 2 in the up-down direction.

  Further, in the front-rear direction, the position of the introduction portion 31 is set to a position in front of the door 2 at the closed position P1. In the present embodiment, the introduction portion 31 is formed in a rectangular shape elongated in the front-rear direction. As described above, by forming the introduction portion 31 on the support member 28 which is detachable from the side wall body 27 and is smaller than the shape of the side wall body 27, the operation of forming the introduction portion 31 can be performed more easily. it can.

  In the present embodiment, the length of the introduction portion 31 in the up-down direction is set to about half of the length of the introduction portion 31 in the front-rear direction. For example, a cooling gas that flows on the outer right side of the scavenger section 12 in the outer shell section 11 of the storage chamber 5 is introduced into the scavenger section 12 by the blower fan 29 into the introduction section 31. The discharge unit 32 is arranged such that at least one of the position in the up-down direction, the position in the front-rear direction, and the position in the left-right direction (all three in the present embodiment) differs from the introduction unit 31.

  The discharge unit 32 is provided to discharge the cooling gas that has passed through the scavenger unit 12 to the outside of the scavenger unit 12. The discharge part 32 is formed as a duct connected to the left side wall 25. The discharge unit 32 is disposed behind the introduction unit 31 in the front-rear direction. The discharge portion 32 is formed on the rear upper side of the left side wall 25. In the up-down direction, the position of the discharge unit 32 is aligned with the position of the upper part of the door 2. The upper portion of the door 2 in this case refers to a portion above the center 2a of the door 2 in the vertical direction. In the front-rear direction, the position of the discharge unit 32 is set at the position of the middle part of the horizontal furnace main body 7. In this way, the introduction part 31 and the discharge part 32 are spaced apart from each other so as to sandwich the door 2, and are also spaced apart in the front-rear direction (the longitudinal direction of the horizontal furnace 3).

  For example, a pipe (not shown) is connected to the discharge unit 32. A negative pressure is generated in the discharge section 32 and the pipe by the suction fan 30, and the cooling gas flowing in the scavenger section 12 is sucked into the pipe through the discharge section 32 and discharged to the atmosphere through a filter or the like.

  With the above-described configuration, the cooling gas enters the scavenger section 12 from the introduction section 31 and passes around the door 2 and the opening 7a while generating an airflow F1, and then proceeds to the upper left rear, and then the discharge section It is discharged from the scavenger section 12 from the outside. The opening and closing mechanism 6 is installed in the scavenger section 12.

  Referring to FIGS. 1 and 2 and FIGS. 4 to 6, an opening / closing mechanism 6 is provided for opening / closing door 2. As described above, at least a part of the opening / closing mechanism 6 is disposed in the introduction portion 31 of the cooling opening 8. Further, in the present embodiment, the airflow F <b> 1 hits substantially the entire opening / closing mechanism 6. In the present embodiment, the opening / closing mechanism 6 is disposed in a right region in the scavenger unit 12 and on a right outer side of the scavenger unit 12.

  The opening / closing mechanism 6 includes a stay unit 33, a linear actuator 34, and a link mechanism 35.

  The stay unit 33 is provided to support the linear actuator 34 and the link mechanism 35. The stay unit 33 is arranged adjacent to the support member 28, and is fixed to the support member 28. The stay unit 33 extends rightward and leftward of the support member 28. The stay unit 33 is arranged adjacent to the introduction portion 31 of the cooling opening 8.

  The stay unit 33 has a first stay part 36 and a second stay part 37.

  The first stay portion 36 is provided to support a link member 45 of the link mechanism 35 described later. The first stay portion 36 is disposed inside the scavenger portion 12. The first stay portion 36 supports the link member 45 so as to swing around a first axis S1 described later, and is held by the support member 28. The first stay portion 36 has a base plate 36a and a pair of upper and lower first extension portions 36b.

  The base plate 36a is formed, for example, in a substantially rectangular flat plate shape. The base plate 36a is received on the inner surface of the support member 28 facing the inside of the scavenger portion 12, and is held (fixed) to the support member 28 using a fixing member 36c such as a screw member. More specifically, the base plate 36a has elongated holes 36d extending in the up-down direction at four corners of the base plate 36a. Each long hole 36d is penetrated by the fixing member 36c. By adjusting the position of the base plate 36a with respect to the fixing member 36c in a state where the fixing of the base plate 36a and the support member 28 by the fixing member 36c is released, the position of the first stay portion 36 in the vertical direction is adjusted. Can be.

  A first extension 36b extends from upper and lower portions of the base plate 36a. Each first extending portion 36b is formed in a horizontally extending plate shape, and is formed in a shape extending from the base plate 36a toward the left front. In the front-rear direction, the front end of the first extension portion 36b is disposed in front of the front end of the base plate 36a. A second stay portion 37 is disposed on the right side of the first stay portion 36.

  The second stay portion 37 is provided to support a later-described linear actuator 34 of the link mechanism 35. The second stay part 37 is disposed inside the outer shell part 11 on the right outside of the scavenger part 12. The second stay portion 37 supports the linear actuator 34 so as to swing around a third axis S3 described later, and is held by the support member 28. The position of the second stay portion 37 is set lower than the position of the first stay portion 36. The second stay portion 37 has a base plate 37a and a pair of upper and lower second extension portions 37b.

The base plate 37a is formed, for example, in a substantially rectangular flat plate shape. In the present embodiment, the base plates 36a, 37a of the stays 36, 37 are aligned in the front-rear direction. The base plate 37a is received on an outer surface of the support member 28 facing the outside of the scavenger portion 12, and is held (fixed) on the support member 28 using a fixing member 37c such as a screw member. More specifically, the base plate 37a, the long hole 37d extending in the vertical direction are formed at four corners of the base plate 37 a. Each of the long holes 37d is penetrated by the fixing member 37c. By adjusting the position of the base plate 37a with respect to the fixing member 37c in a state where the fixing of the base plate 37a and the supporting member 28 by the fixing member 37c is released, the position of the second stay portion 37 in the vertical direction is adjusted. Can be.

  A second extending portion 37b extends from upper and lower portions of the base plate 37a. Each second extending portion 37b is formed in a plate shape extending horizontally, and is formed in a shape extending rightward and forward from the base plate 37a. In the front-rear direction, the front end of the second extending portion 37b is disposed in front of the front end of the base plate 37a. The opening / closing mechanism 6 (the linear motion actuator 34 and the link mechanism 35) is supported by the stay unit 33 having the above configuration.

  The linear motion actuator 34 is provided as an actuator for generating a driving force for opening and closing the door 2. The linear actuator 34 is, for example, a hydraulic cylinder. Examples of the fluid pressure cylinder include a pneumatic cylinder and a hydraulic cylinder. In the present embodiment, the linear motion actuator 34 is arranged horizontally.

  Further, the linear motion actuator 34 is disposed so as to penetrate the introduction portion 31 of the cooling opening 8. That is, the linear motion actuator 34 is disposed in the accommodation room 5 so as to extend over the outside and inside of the scavenger portion 12. Further, the height position (the position in the vertical direction) of the linear motion actuator 34 is set lower than the height position of the center 2 a of the door 2. Thereby, when the gas in the horizontal furnace 3 flows from the opening 7 a to the outside of the horizontal furnace 3 in the scavenger section 12, it is possible to suppress the convection of the high-temperature gas from reaching the linear actuator 34.

  The linear actuator 34 has a fixed portion 38, an output portion 39 supported by the fixed portion 38, and an attachment 40 fixed to a tip of the output portion 39. In the present embodiment, the fixing portion 38 is formed by a cylinder portion, and the output portion 39 is formed by a rod projecting from the cylinder portion. Note that the fixing portion 38 may be formed by a rod, and the output portion 39 may be formed by a cylinder portion.

  As described above, the fixing portion 38 is formed by the cylinder portion, and is formed in an elongated cylindrical shape. The fixing portion 38 is connected to a pump (not shown) or the like, and is configured to receive a fluid pressure generated by the operation of the pump. The fixing part 38 is arranged inside the outer shell part 11 and outside the scavenger part 12. The fixing part 38 is arranged so as to face the introduction part 31 in the left-right direction.

  A third support shaft 43 extending in the vertical direction is provided at, for example, one end of the outer peripheral portion of the fixed portion 38. The third support shaft 43 is formed, for example, at the upper end and the lower end of the fixed portion 38, and extends toward the second extending portion 37 b of the second stay portion 37. Each of the third support shafts 43 is fitted into a hole formed at the tip of the second extension 37b. Thereby, the fixed portion 38 (the linear motion actuator 34) can swing around the third axis S3 as the axis of the third support shaft 43 with respect to the scavenger portion 12.

  The third axis S3 is parallel to both a first axis S1 and a second axis S2 described later. Further, the fixing portion 38 is supported by the second stay portion 37 via the third support shaft 43. That is, the second stay portion 37 supports the linear motion actuator 34 so as to swing around the third axis S3, and is supported by the support member 28. Thus, the linear motion actuator 34 is supported by the support member 28 on the right side wall 16 of the scavenger unit 12. An output section 39 protrudes from one end of the fixing section 38.

  As described above, the output section 39 is formed by a rod, and is configured to perform a linear motion with respect to the fixed section 38 by receiving the above-described fluid pressure. The output section 39 is configured so that the fixing section 38 allows the fixing section 38 to move linearly with respect to the fixing section 38. The output section 39 is arranged so as to extend from the fixing section 38 disposed outside the scavenger section 12 through the introduction section 31 of the cooling opening 8 and into the scavenger section 12. The tip of the output section 39 includes a male screw section. Attachment 40 is attached to the tip of output section 39.

  The attachment 40 is provided for attaching the output unit 39 to the link mechanism 35. The attachment 40 is formed in a rod shape. A female screw portion is formed at a base end portion of the attachment 40. A male screw portion at the distal end of the output portion 39 is screw-coupled to a link member 45 described later of the female screw portion. Thus, the attachment 40 is fixed to the output unit 39 so that the position of the attachment 40 with respect to the output unit 39 can be adjusted. In addition, a lock nut 44 is screwed to the tip of the output unit 39, and the output unit 39 and the attachment 40 are fixed to each other. The distal end portion of the attachment 40 is formed in a U-shape, and is arranged so as to sandwich an input-side arm portion 46 of the link member 45 described later. At the tip of the attachment 40, a connecting portion 40a is formed.

  The connection portion 40a is provided as a portion to which a second support shaft 42 of the link mechanism 35 described later is connected. In the present embodiment, the connecting portion 40a is formed as a through-hole portion that vertically passes through the attachment 40. The connecting portion 40a is arranged so as to be movable between the inside of the scavenger portion 12 and the outside of the scavenger portion 12. The linear motion actuator 34 having the above configuration is connected to the link mechanism 35.

  The link mechanism 35 is provided to connect the output unit 39 of the linear motion actuator 34 and the door 2. More specifically, the link mechanism 35 is provided to convert the linear motion of the output portion 39 of the linear motion actuator 34 into a swing motion for opening and closing the door 2. Further, in the present embodiment, the link mechanism 35 transmits the output from the linear motion actuator 34 disposed near the lower part of the scavenger portion 12 to the door 2 at a position above the position of the linear motion actuator 34. It is configured. The link mechanism 35 is supported by a support member 28 on the right side wall 26 of the scavenger unit 12 via a stay unit 33.

  The link mechanism 35 has a link member 45, a first support shaft 41, a second support shaft 42, a third support shaft 43, and a connecting portion 49 for connecting the link member 45 to the door 2. .

  That is, the third support shaft 43 is a part of the linear motion actuator 34 and also a part of the link mechanism 35. In the present embodiment, the center axis of the first support shaft 41 is the first axis S1, the center axis of the second support shaft 42 is the second axis S2, and the center axis of the third support shaft 43 is the third axis. This is the axis S3. The link mechanism 35 converts the linear motion of the output portion 39 of the linear actuator 34 into a swing motion about the first axis S1 extending in the vertical direction, and transmits the swing motion to the door 2.

  The link member 45 is configured to swing integrally with the door 2 around the first axis S1. The link member 45 is, for example, a portion formed in a substantially L shape in plan view. The link member 45 is supported by the first stay portion 36 via the first support shaft 41, and can swing around the first axis S1. The link member 45 is disposed near the support member 28, and the remaining part is disposed outside the scavenger section 12 in the outer shell 11. Most of the link member 45 is disposed in the scavenger section 12. The link member 45 extends upward from a portion of the opening 8 adjacent to the introduction portion 31.

  The link member 45 has an input side arm 46, an intermediate shaft 47, and an output side arm 48.

  The input side arm portion 46 is provided as a plate-like portion to which the driving force from the output portion 39 of the linear motion actuator 34 is input in the link member 45. The input side arm portion 46 is formed in an arm shape extending substantially horizontally. The input side arm 46 is disposed around the introduction portion 31 of the cooling opening 8, and moves from the scavenger portion 12 through the introduction portion 31 with the swing of the link member 45 about the first axis S <b> 1. It is displaced so as to protrude outside the scavenger portion 12.

  The distal end of the input side arm portion 46 is formed in a shape bulging toward the linear motion actuator 34 side, and the second support shaft 42 is provided at this distal end. The second support shaft 42 is a shaft portion extending in the vertical direction. The second support shaft 42 is connected to the attachment 40 of the linear motion actuator 34.

  The second support shaft 42 may be rotatable relative to both the input arm 46 and the attachment 40, or may be rotatable relative to only one of the input arm 46 and the attachment 40. Is also good. With the above configuration, the link member 45 is connected to the output section 39 so as to be rotatable relative to the output section 39 of the linear motion actuator 34 around the second axis S2. The base end of the input side arm 46 is connected to the first support shaft 41.

  The first support shaft 41 is a shaft portion extending in the vertical direction. The first support shaft 41 has a configuration in which both upper and lower ends are supported by a pair of upper and lower first extension portions 36b of the first stay portion 36, and is prevented from falling out of the first extension portion 36b. Is configured. The first support shaft 41 is disposed at a distal end of the first extension 36b. The lower portion of the first support shaft 41 penetrates the input arm 46 and is connected to the input arm 46. The base end of the input arm 46 is fixed to the intermediate shaft 47.

  The intermediate shaft portion 47 is a cylindrical portion extending in the vertical direction, and is arranged between a pair of upper and lower first extension portions 36 b of the first stay portion 36. The first support shaft 41 is inserted into the intermediate shaft portion 47, and the intermediate shaft portion 47 surrounds the first support shaft 41. The output side arm 48 is fixed to the upper end of the intermediate shaft 47.

  The output side arm portion 48 is provided as a portion of the link member 45 that outputs the driving force from the output portion 39 of the linear motion actuator 34 to the door 2 side. The output side arm portion 48 is formed in an arm shape extending substantially horizontally. The output side arm portion 48 is disposed inside the scavenger portion 12 above the introduction portion 31 of the cooling opening 8. The output side arm portion 48 extends from the intermediate shaft portion 47 toward the center 2a of the door 2.

  The output side arm section 48 has an upper part 48a and a lower part 48b.

  The upper part 48a is formed in a flat plate shape. The base end of the upper part 48a is arranged between the first extension part 36b above the first stay part 36 and the intermediate shaft part 47, and penetrates the first support shaft 41. The upper portion 48a, the intermediate shaft portion 47, and the input side arm portion 46 may rotate integrally around the first support shaft 41 and the first axis S1, or the first support shaft 41 and the first axis. It may be relatively rotatable around S1. A lower part 48b is fixed to a lower surface of the upper part 48a.

  The lower portion 48b is provided as an elongated plate-like portion arranged vertically. The lower portion 48b extends linearly in a direction away from the first support shaft 41. The lower part 48b is fixed to the coupling part 49. That is, the output side arm 48 of the link mechanism 35 is fixed to the door 2 via the coupling 49. The connecting portion 49 is provided for connecting the door 2 and the link member 45 so that the position of the door 2 with respect to the link member 45 can be adjusted.

  Referring to FIGS. 1, 2 and 4, coupling portion 49 has an arm-side coupling portion 51, an intermediate portion 52, and a door-side coupling portion 53.

  The arm-side connecting portion 51 is formed in a vertical plate shape extending in parallel with the lower portion 48 b of the output-side arm portion 48. The arm-side connecting portion 51 is disposed in front of the lower part 48b. The arm-side joint 51 has a long hole 51a extending in the longitudinal direction of the arm-side joint 51. The output side arm portion 48 and the connecting portion 49 are connected by a fixing member 48d such as a screw penetrating the long hole portion 51a. When the fixing between the arm-side connecting portion 51 and the lower portion 48b by the fixing member 48d is released, the arm-side connecting portion 51 is connected to the connecting portion 49 and the link member 45 (door 2) in the longitudinal direction of the output-side arm portion 48. Can be adjusted. The arm-side connecting portion 51 is fixed to a base end portion of an intermediate portion 52 extending along the longitudinal direction of the arm-side connecting portion 51. A door-side connecting portion 53 is fixed to a front end portion of the intermediate portion 52.

  The door-side connecting portion 53 is formed as a plate-like portion arranged vertically. Long holes 53a and 53b extending vertically are formed in, for example, the upper and lower portions of the door-side connecting portion 53. A fixing member 53c such as a male screw penetrates each of the long holes 53a and 53b. The fixing member 53c fixes the door-side connecting portion 53 and the door 2 to each other. In a state where the fixing of the door-side connecting portion 53 and the door 2 by the fixing member 53c is released, the relative position between the connecting portion 49 (link member 45) and the door 2 in the vertical direction can be adjusted.

  A stopper 55 is provided in connection with the opening / closing mechanism 6. The stopper 55 is provided to restrict the door 2 from being excessively displaced toward the opening 7 a of the horizontal furnace 3. The stopper portion 55 is arranged, for example, so as to contact the lower portion 48b of the output side arm portion 48 when the door 2 is at the closed position P1. The stopper portion 55 is formed using, for example, a bolt, and is a portion where the tip end of the stopper portion 55 contacts the output side arm portion 48. The stopper 55 is fixed to the first stay 36 via a bracket 56.

  The schematic configuration of the heat treatment apparatus 1 has been described above. In the heat treatment apparatus 1 having the above configuration, when the object to be processed 100 is taken in and out of the horizontal furnace 3 in order to heat-treat the object to be processed 100, first, the movable walls 18bL and 18bR are moved from the closed position P3 to the open position P4. It is displaced, and the scavenger portion 12 is opened forward. Then, the linear actuator 34 linearly displaces the output unit 39 toward the fixed unit 38 side. Accordingly, as shown in FIG. 7, which is a diagram for explaining an example of the operation in the heat treatment apparatus 1, the linear motion actuator 34 displaces the output section 39 to move the input side arm section 46 of the link member 45. The link member 45 is swung around the first axis S1 by pulling toward the fixing portion 38 side.

  At this time, the tip of the input side arm 46 is displaced from the inside of the scavenger 12 to the outside of the scavenger 12 through the introduction portion 31 of the cooling opening 8. Further, the output-side arm unit 48 displaces the door 2 about the first axis S1 together with the coupling unit 49, and displaces the door 2 to the open position P2. Thereby, the opening 7a of the horizontal furnace 3 is exposed. Therefore, the object to be processed 100 can be taken in and out of the horizontal furnace 3. At this time, the linear motion actuator 34 relatively rotates around the second axis S2 with the input side arm portion 46 of the link member 45, and around the third axis S3 with the second stay portion 37 (support member 28). Relative rotation.

  At this time, since the movable walls 18bL and 18bR of the front wall 18 of the accommodation room 5 are displaced to the open position P4, the operation of projecting a part of the door 2 to the outside of the accommodation room 5 does not have to be hindered.

  When the door 2 is closed, the linear motion actuator 34 linearly displaces the output portion 39 in a direction protruding from the fixed portion 38. Accordingly, the output unit 39 displaces the link member 45 about the first axis S1 by swinging the input-side arm unit 46 of the link member 45 toward the scavenger unit 12 side. At this time, the distal end of the input side arm 46 is displaced from outside the scavenger 12 to inside the scavenger 12 through the introduction portion 31 of the cooling opening 8.

  Further, the output side arm unit 48 displaces the door 2 about the first axis S1 together with the coupling unit 49, and displaces the door 2 to the closed position P1 as shown in FIG. Thus, the opening 7 a of the horizontal furnace 3 is closed by the door 2. At this time, the linear motion actuator 34 relatively rotates around the second axis S2 with the link member 45, and relatively rotates around the third axis S3 with the second stay 37 (the support member 28).

  After the opening 7a is closed by the door 2, the movable walls 18bL and 18bR of the front wall 18 of the storage chamber 5 are displaced to the closed position P3. Thereby, the accommodation room 5 is closed.

  As described above, according to the heat treatment apparatus 1, the scavenger unit 12 includes the cooling opening 8 in which the output unit 39 of the linear actuator 34 of the opening / closing mechanism 6 and the input arm 46 of the link member 45 are arranged. In. According to this configuration, the opening / closing mechanism 6 is cooled by being applied to the cooling gas passing through the cooling opening 8. Thereby, the opening / closing mechanism 6 is cooled. That is, the scavenger unit 12 has a function of cooling the opening / closing mechanism 6 in addition to a function of discharging gas that has come out of the horizontal furnace 3. Therefore, there is no need to provide a dedicated cooling device for cooling the opening / closing mechanism 6, and the configuration of the heat treatment apparatus 1 can be simplified. As described above, in the heat treatment apparatus 1, the opening / closing mechanism 6 for opening and closing the door 2 of the horizontal furnace 3 can be cooled with a simpler configuration.

  According to the heat treatment apparatus 1, the linear actuator 34 of the opening / closing mechanism 6 is supported by the scavenger 12 via the second stay 37. According to this configuration, the linear motion actuator 34 can be disposed near the introduction portion 31 of the cooling opening 8. Thereby, the linear motion actuator 34 can be more reliably cooled by the cooling gas. Further, the scavenger section 12 can be used to support the linear actuator 34. Thus, the configuration for supporting the linear actuator 34 can be simplified, so that the configuration of the heat treatment apparatus 1 can be further simplified.

  According to the heat treatment apparatus 1, the link mechanism 35 of the opening / closing mechanism 6 is supported by the scavenger unit 12. According to this configuration, the scavenger unit 12 can also be used to support the link mechanism 35. Thereby, the configuration for supporting the scavenger portion 12 can be simplified, so that the configuration of the heat treatment apparatus 1 can be further simplified.

  Further, according to the heat treatment apparatus 1, the linear actuator 34 has the output portion 39 capable of linear movement. Further, the link mechanism 35 has a link member 45 that can swing integrally with the door 2 around the first axis S1. The link member 45 is connected to the output section 39 so as to be rotatable relative to the output section 39 around the second axis S2. According to this configuration, the door 2 can be opened and closed with a simple configuration that swings the link member 45 around the first axis S1.

  Further, according to the heat treatment apparatus 1, the output portion 39 of the linear motion actuator 34 and the input side arm portion 46 of the link member 45 in the opening / closing mechanism 6 are at least temporarily in the introduction portion 31 of the cooling opening 8. Placed in According to this configuration, the opening / closing mechanism 6 can be more reliably cooled by the lower-temperature cooling gas that has just been introduced into the scavenger unit 12 from outside the scavenger unit 12.

  Further, according to the heat treatment apparatus 1, in the cooling opening 8, the introduction part 31 and the discharge part 32 are spaced apart from each other so as to sandwich the door 2, and are spaced apart in the longitudinal direction of the horizontal furnace 3. Are located. According to this configuration, in the scavenger section 12, the backflow of the cooling gas mixed with the gas in the horizontal furnace 3 to the introduction section 31 can be more reliably suppressed. Thereby, the temperature of the opening / closing mechanism 6 can be suppressed more reliably.

  Further, according to the heat treatment apparatus 1, since the link mechanism 35 is provided in the opening / closing mechanism 6, the linear motion actuator 34 can be disposed at a position further away from the position of the door 2. Thereby, it is possible to suppress the high heat from the horizontal furnace 3 reaching the linear motion actuator 34. Therefore, the durability of the opening / closing mechanism 6 can be further increased by reducing the load on the linear motion actuator 34. Further, if the link mechanism 35 has a mechanical structure, it is possible to more reliably suppress the operation failure of the link mechanism 35 due to high heat. As described above, in the heat treatment apparatus 1, the durability of the opening / closing mechanism 6 in the horizontal furnace 3 can be further increased.

  Further, according to the heat treatment apparatus 1, the link member 45 and the door 2 swing around the first axis S <b> 1 in accordance with the operation of the output section 39 of the linear motion actuator 34. Thereby, the door 2 is opened and closed. At this time, the linear actuator 34 itself also swings around the third axis S3, so that a smooth linear motion of the output unit 39 can be realized.

  Further, according to the heat treatment apparatus 1, the support member 28 supports the link mechanism 35 and the linear actuator 34 collectively. According to this configuration, the opening / closing mechanism 6 (the link mechanism 35 and the linear actuator 34) and the support member 28 can be formed as a unit. Thus, when assembling the heat treatment apparatus 1, the link mechanism 35 and the linear actuator 34 can be handled more easily than when the link mechanism 35 and the linear actuator 34 are handled separately.

  According to the heat treatment apparatus 1, the support member 28 is provided in the scavenger section 12. According to this configuration, the scavenger portion 12 arranged around the opening 7a can be used as a member for supporting the opening / closing mechanism 6 (the link mechanism 35 and the linear actuator 34). Therefore, there is no need to provide a dedicated member for supporting the link mechanism 35 and the linear actuator 34, and the configuration of the heat treatment apparatus 1 can be simplified.

  According to the heat treatment apparatus 1, the link mechanism 35 and the linear actuator 34 of the opening / closing mechanism 6 are firmly supported by the first stay portion 36 extending from the support member 28 and the second stay portion 37 extending from the support member 28. be able to. Further, compared to the case where the link member 45 and the linear actuator 34 are directly attached to the support member 28, the degree of freedom of the layout of the link member 45 and the linear actuator 34 can be increased.

  Although the embodiments of the present invention have been described above, the present invention is not limited to the above embodiments. Various changes can be made to the present invention as long as they are described in the claims.

  (1) In the above-described embodiment, an example has been described in which the linear actuator 34 and the link mechanism 35 of the opening / closing mechanism 6 are supported by the scavenger unit 12 via the stay unit 33. However, this need not be the case. For example, the linear actuator 34 and the link mechanism 35 may be supported by another configuration.

  (2) In the above-described embodiment, the introduction unit 31 is configured to be able to accommodate a part of the link member 45 of the opening / closing mechanism 6 and a part of the output unit 39 of the linear motion actuator 34. However, this need not be the case. For example, the introduction portion 31 is formed in a trunk shape having a sufficient length, width, and height so that more portions of the opening / closing mechanism 6 (for example, all of the opening / closing mechanism 6) are arranged in the introduction portion 31. It may be.

  (3) In the above-described embodiment, an example in which the opening / closing mechanism 6 is disposed around the introduction portion 31 of the cooling opening 8 has been described as an example. However, this need not be the case. For example, the opening and closing mechanism 6 may be arranged around the discharge portion 32 of the cooling opening 8. In this case, at least a part of the opening / closing mechanism 6 is disposed in the discharge unit 32.

  (4) Further, in the above-described embodiment, the form in which the link mechanism 35 is provided with the second support shaft 42 and the third support shaft 43 has been described as an example, but this is not essential. For example, instead of the second support shaft 42 and the third support shaft 43, another joint such as a spherical joint may be used.

  The present invention can be widely applied as a heat treatment apparatus.

DESCRIPTION OF SYMBOLS 1 Heat treatment apparatus 2 Door 3 Horizontal furnace 6 Opening / closing mechanism 7a Opening 12 Scavenger part 28 Support member 34 Linear actuator 35 Link mechanism 36 First stay part 37 Second stay part 39 Output part 45 Link member S1 First axis S2 Second Axis line S3 Third axis line

Claims (5)

A horizontal furnace having a horizontally disposed opening and a door for opening and closing the opening;
An opening and closing mechanism for opening and closing the door,
Blowing means and suction means for generating an air flow of a cooling gas passing around the opening outside the horizontal furnace ,
The opening / closing mechanism has a linear motion actuator having an output portion configured to perform linear motion and a horizontally arranged linear motion actuator, and the linear motion of the output portion is formed into a swing motion about a predetermined first axis extending in a vertical direction. A link mechanism for converting and transmitting the swinging motion to the door,
The link mechanism has a link member that is arranged in a region where the airflow passes and that can swing integrally with the door around the first axis.
The link member is connected to the output unit so as to be rotatable relative to the output unit around a predetermined second axis,
The linear motion actuator is configured to be swingable around a predetermined third axis parallel to the second axis.
The link member has an input-side arm portion to which a driving force from the output portion is input, an output-side arm portion to output the driving force to the door side, and the input-side arm portion fixed to a lower portion and an upper portion to an upper portion. An intermediate shaft portion to which the output side arm portion is fixed and extends vertically ,
When viewed along the direction in which the first axis extends, the input arm and the output arm extend bifurcated from the first axis as a base point, A heat treatment apparatus, wherein directions of the output side arm portions are different from each other. The heat treatment apparatus according to claim 1,
Surrounding the periphery of the opening, further comprising a scavenger portion for generating an airflow around the opening,
The scavenger portion includes a side wall disposed around the opening.
A first stay portion that supports the link member so as to be able to swing around the first axis and is disposed on an inner surface of the side wall that faces the opening, and that is capable of swinging around the third axis. A heat treatment apparatus, further comprising: a second stay portion that supports a linear motion actuator and is disposed on an outer side of the side wall opposite to the inner side. The heat treatment apparatus according to claim 2,
The side wall of the scavenger portion includes a support member that collectively supports the link mechanism and the linear actuator,
The heat treatment apparatus according to claim 1, wherein the first stay portion and the second stay portion are attached to the support member. The heat treatment apparatus according to any one of claims 1 to 3,
The horizontal furnace includes a cylindrical horizontal furnace body in which the opening is formed,
When a direction along the axial direction of the horizontal furnace and away from the horizontal furnace body with the opening as a starting point is a front direction, when the door is closed, the second axis is the output power. A heat treatment apparatus, wherein the heat treatment apparatus is arranged on the front side with respect to a side arm. The heat treatment apparatus according to any one of claims 1 to 4,
The heat treatment apparatus according to claim 1, wherein the output-side arm is disposed downstream of the input-side arm in the flow direction of the airflow .

Images